KR870000580A - 기판온도 측정 방법 및 장치 - Google Patents

기판온도 측정 방법 및 장치

Info

Publication number
KR870000580A
KR870000580A KR1019860004887A KR860004887A KR870000580A KR 870000580 A KR870000580 A KR 870000580A KR 1019860004887 A KR1019860004887 A KR 1019860004887A KR 860004887 A KR860004887 A KR 860004887A KR 870000580 A KR870000580 A KR 870000580A
Authority
KR
South Korea
Prior art keywords
substrate temperature
measuring substrate
measuring
temperature
substrate
Prior art date
Application number
KR1019860004887A
Other languages
English (en)
Other versions
KR900005861B1 (ko
Inventor
유우이치 마츠이
Original Assignee
스미도모덴기 고오교오 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스미도모덴기 고오교오 가부시기가이샤 filed Critical 스미도모덴기 고오교오 가부시기가이샤
Publication of KR870000580A publication Critical patent/KR870000580A/ko
Application granted granted Critical
Publication of KR900005861B1 publication Critical patent/KR900005861B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/10—Thermometers specially adapted for specific purposes for measuring temperature within piled or stacked materials
KR1019860004887A 1986-02-21 1986-06-19 기판온도 측정 방법 및 장치 KR900005861B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP86-37677 1986-02-21
JP61037677A JPS62195139A (ja) 1986-02-21 1986-02-21 基板温度測定方法および装置

Publications (2)

Publication Number Publication Date
KR870000580A true KR870000580A (ko) 1987-02-19
KR900005861B1 KR900005861B1 (ko) 1990-08-13

Family

ID=12504247

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860004887A KR900005861B1 (ko) 1986-02-21 1986-06-19 기판온도 측정 방법 및 장치

Country Status (2)

Country Link
JP (1) JPS62195139A (ko)
KR (1) KR900005861B1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2757439B2 (ja) * 1989-03-22 1998-05-25 日本電気株式会社 熱起電力の検出方法
JP3735052B2 (ja) * 2001-07-27 2006-01-11 大日本スクリーン製造株式会社 基板の接触式温度測定装置およびそれを備えた基板の熱処理装置
JP4803596B2 (ja) * 2006-09-06 2011-10-26 東京エレクトロン株式会社 測温装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074543A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd ロ−ドロツク装置の試料温度測定方法

Also Published As

Publication number Publication date
KR900005861B1 (ko) 1990-08-13
JPS62195139A (ja) 1987-08-27

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A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
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