KR850001314A - 알루미늄 커패시터 박막 및 그 전해 에칭공정 - Google Patents

알루미늄 커패시터 박막 및 그 전해 에칭공정 Download PDF

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Publication number
KR850001314A
KR850001314A KR1019840003854A KR840003854A KR850001314A KR 850001314 A KR850001314 A KR 850001314A KR 1019840003854 A KR1019840003854 A KR 1019840003854A KR 840003854 A KR840003854 A KR 840003854A KR 850001314 A KR850001314 A KR 850001314A
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KR
South Korea
Prior art keywords
thin film
electrolytic
etching process
electrolytic etching
aluminum
Prior art date
Application number
KR1019840003854A
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English (en)
Inventor
스티븐 샤퍼 제시
Original Assignee
잭 오이셔
노스 아메리칸 필립스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 잭 오이셔, 노스 아메리칸 필립스 코포레이션 filed Critical 잭 오이셔
Publication of KR850001314A publication Critical patent/KR850001314A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004—Details
    • H01G9/04—Electrodes or formation of dielectric layers thereon
    • H01G9/048—Electrodes or formation of dielectric layers thereon characterised by their structure
    • H01G9/055—Etched foil electrodes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/04—Etching of light metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00—Chemistry: electrical and wave energy
    • Y10S204/08—AC plus DC
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12431—Foil or filament smaller than 6 mils

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • ing And Chemical Polishing (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

내용 없음

Description

알루미늄 커패시터 박막 및 그 전해 에칭공정
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (4)

  1. 직류 및 고전류밀도를 이용한 제1산프리에치 및 제2양극을 포함하는 알루미늄 커패시터박막의 전해에칭공정으로서, 상기 제1전해조가 30℃ 내지 60℃의 온도로 유지되는 동안 최소 약 0.05mg/cm2의 상기 박막의 무게 손실이 이루어질 때까지 0.1 내지 2.0A/cm2의 전류밀도 및 15Hz 내지 100Hz의 주파수를 갖는 교류를 필요로 하면서 무게비로 1% 내지 6%의 HCl, 0% 내지 2%의 H3PO4및 0% 내지 2%의 HNO3를 포함하는 제1수성 전해조에 상기 박막을 담금으로써 박막이 프리에칭되고, 상기 박막에서 HCl을 제거하지 않고서 상기 전해용액이 80℃ 내지 100℃의 온도에서 유지되는 동안, 최소 약 7mg/cm2의 상기 박막의 총 무게 손실이 이루어질때까지 무게비로 18% 내지 26%의 NaCl과 0.3 내지 2%의 Na2SO4이나 1% 내지 4%의 붕산을 포함하는 제2수성전해용액에 상기 박막을 담금으로써 박막이 에칭되는 것을 특징으로 하는 알루미늄 커패시터박막의 전해에칭공정.
  2. 제1항에 있어서, 교류프리에칭 단계에서 이용된 전해조는 무게비로 0.5 내지 2%의 H3PO4를 포함하는 것을 특징으로 하는 알루미늄 커패시터 박막의 전해에칭공정.
  3. 제2항에 있어서, 프리에칭단계는 약 0.05mg/cm2내지 2.0mg/cm2의 박막의 무게손실이 이루어질때까지 계속되고 에칭단계는 상기 7mg/cm2내지 14mg/cm2의 박막의 전체무게 손실이 이루어질때까지 계속되는 것을 특징으로 하는 알루미늄 커패시터박막의 전해에칭공정.
  4. 제1항의 방법에 의해 제조된 전해 커패시터에 사용되도록 응용된 에칭된 알루미늄 박막.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019840003854A 1983-07-05 1984-07-04 알루미늄 커패시터 박막 및 그 전해 에칭공정 KR850001314A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US510530 1983-07-05
US06/510,530 US4437955A (en) 1983-07-05 1983-07-05 Combined AC and DC etching of aluminum foil

Publications (1)

Publication Number Publication Date
KR850001314A true KR850001314A (ko) 1985-03-18

Family

ID=24031137

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019840003854A KR850001314A (ko) 1983-07-05 1984-07-04 알루미늄 커패시터 박막 및 그 전해 에칭공정

Country Status (7)

Country Link
US (1) US4437955A (ko)
EP (1) EP0133714B1 (ko)
JP (1) JPS6036700A (ko)
KR (1) KR850001314A (ko)
BR (1) BR8403273A (ko)
CA (1) CA1239900A (ko)
DE (1) DE3468444D1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3222967A1 (de) * 1982-06-19 1983-12-22 Hoechst Ag, 6230 Frankfurt Verfahren zur abtragenden modifizierung von elektrochemisch aufgerauhten traegermaterialien aus aluminium nd deren verwendung bei der herstellung von offsetdruckplatten
DE3587234D1 (de) * 1985-04-12 1993-05-06 Luigi Salvadori Verfahren zur herstellung einer aluminiumfolie fuer elektrolytkondensatoren und elektrolytkondensator aus so hergestellten aluminiumfolien.
DE4001466A1 (de) * 1990-01-19 1991-07-25 Hoechst Ag Verfahren zur elektrochemischen aufrauhung von aluminium fuer druckplattentraeger
US5143591A (en) * 1991-06-11 1992-09-01 U.S. Philips Corporation Method of producing ultra stable aluminum oxide for high volt electrolytic capacitors and product thereof
DE4129909A1 (de) * 1991-09-09 1993-03-11 Hoechst Ag Verfahren zum aufrauhen von aluminium bzw. von aluminiumlegierungen als traegermaterial fuer druckplatten und eine druckplatte
DE4232636C2 (de) * 1992-09-29 1996-04-11 Siemens Ag Verfahren zum Herstellen von Elektrodenfolien für, insbesondere Hochvolt-, Elektrolytkondensatoren
US5405493A (en) * 1994-01-26 1995-04-11 Kdk Corporation Method of etching aluminum foil
US6224738B1 (en) 1999-11-09 2001-05-01 Pacesetter, Inc. Method for a patterned etch with electrolytically grown mask
US20020149902A1 (en) * 2001-02-14 2002-10-17 Matsushita Electric Industrial Co., Ltd. Electrode foil for aluminum electrolytic capacitor and method of manufacturing the same
CN103774205A (zh) * 2014-01-06 2014-05-07 广西贺州市桂东电子科技有限责任公司 中高压阳极铝箔二次纯化学侵蚀扩孔方法
CN109609997B (zh) * 2018-12-06 2020-10-09 东莞东阳光科研发有限公司 铝箔腐蚀方法及铝箔

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB966627A (en) 1962-04-09 1964-08-12 British Dielectric Res Ltd Improvements in or relating to the electrolytic etching of anodisable metal foil
US3779877A (en) 1972-02-22 1973-12-18 Sprague Electric Co Electrolytic etching of aluminum foil
US3935080A (en) 1974-10-02 1976-01-27 Polychrome Corporation Method of producing an aluminum base sheet for a printing plate
JPS52141444A (en) * 1976-05-21 1977-11-25 Hitachi Denkaihaku Kenkyusho Method of etching aluminum
US4297184A (en) 1980-02-19 1981-10-27 United Chemi-Con, Inc. Method of etching aluminum
US4374710A (en) 1982-03-18 1983-02-22 American Hoechst Corporation Electrolytic graining of aluminum with nitric and oxalic acids

Also Published As

Publication number Publication date
US4437955A (en) 1984-03-20
JPS6229519B2 (ko) 1987-06-26
CA1239900A (en) 1988-08-02
JPS6036700A (ja) 1985-02-25
EP0133714A1 (en) 1985-03-06
DE3468444D1 (en) 1988-02-11
BR8403273A (pt) 1985-06-11
EP0133714B1 (en) 1988-01-07

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