KR840007367A - 초임계 기체를 사용한 물품의 세정방법 - Google Patents

초임계 기체를 사용한 물품의 세정방법 Download PDF

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Publication number
KR840007367A
KR840007367A KR1019830005750A KR830005750A KR840007367A KR 840007367 A KR840007367 A KR 840007367A KR 1019830005750 A KR1019830005750 A KR 1019830005750A KR 830005750 A KR830005750 A KR 830005750A KR 840007367 A KR840007367 A KR 840007367A
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KR
South Korea
Prior art keywords
article
gas
comprised
contaminant
pressure
Prior art date
Application number
KR1019830005750A
Other languages
English (en)
Korean (ko)
Inventor
에이. 뮬러 윌리암
Original Assignee
에프. 씨. 맥너트
휴우즈 에어크라프트 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에프. 씨. 맥너트, 휴우즈 에어크라프트 캄파니 filed Critical 에프. 씨. 맥너트
Publication of KR840007367A publication Critical patent/KR840007367A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids

Landscapes

  • Cleaning In General (AREA)
  • Detergent Compositions (AREA)
KR1019830005750A 1982-12-06 1983-12-05 초임계 기체를 사용한 물품의 세정방법 KR840007367A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44693982A 1982-12-06 1982-12-06
US446939 1982-12-06

Publications (1)

Publication Number Publication Date
KR840007367A true KR840007367A (ko) 1984-12-07

Family

ID=23774383

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019830005750A KR840007367A (ko) 1982-12-06 1983-12-05 초임계 기체를 사용한 물품의 세정방법

Country Status (5)

Country Link
EP (1) EP0127643A1 (fr)
KR (1) KR840007367A (fr)
ES (1) ES527786A1 (fr)
IT (1) IT1175802B (fr)
WO (1) WO1984002291A1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013366A (en) * 1988-12-07 1991-05-07 Hughes Aircraft Company Cleaning process using phase shifting of dense phase gases
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
JPH03202102A (ja) * 1989-12-28 1991-09-03 Toray Dow Corning Silicone Co Ltd オルガノポリシロキサン成形物中のシロキサンオリゴマー量の減少方法
AT395951B (de) * 1991-02-19 1993-04-26 Union Ind Compr Gase Gmbh Reinigung von werkstuecken mit organischen rueckstaenden
JP2863663B2 (ja) * 1991-04-18 1999-03-03 大阪酸素工業株式会社 光学式露点計の反射鏡の洗浄方法及び洗浄装置付き光学式露点計
US5482371A (en) * 1991-04-18 1996-01-09 Osaka Sanso Kogyo Ltd. Method and apparatus for measuring the dew point and/or frost point of a gas having low water content
US5470154A (en) * 1991-04-18 1995-11-28 Osaka Sanso Kogyo Ltd. Method of cleaning the reflector mirror in an optical dew point meter and an optical dew point meter equipped with a cleaning device
DE4123288C2 (de) * 1991-07-13 1994-11-17 Reinhard Knof Verfahren zur Behandlung von kristallinem Siliziumdioxid-Granulat
FR2686351A1 (fr) * 1992-01-20 1993-07-23 Metalimphy Procede de nettoyage et degraissage de produits metalliques conditionnes sous forme de bobine ou de feuilles formant tas et installation pour sa mise en óoeuvre.
US5316591A (en) * 1992-08-10 1994-05-31 Hughes Aircraft Company Cleaning by cavitation in liquefied gas
DE4309734A1 (de) * 1993-03-25 1994-09-29 Akzo Nobel Nv Verfahren zum Reinigen von Hohlfasern
US5481058A (en) * 1994-01-07 1996-01-02 Minnesota Mining And Manufacturing Company Supercritical fluid extraction involving hydrofluoroalkanes
DE4423188C2 (de) * 1994-07-01 1999-03-11 Linde Ag Reinigung von Druckgasbehältern
US6248797B1 (en) * 1999-05-17 2001-06-19 Shelton A. Dias Supercritical carbon dioxide extraction of contaminants from ion exchange resins
US6589355B1 (en) 1999-10-29 2003-07-08 Alliedsignal Inc. Cleaning processes using hydrofluorocarbon and/or hydrochlorofluorocarbon compounds
KR100447942B1 (ko) * 2001-07-04 2004-09-08 한국화학연구원 고압 전처리와 초임계 유체 세정에 의한 분리막 성능의 유지 및 복원방법
US7282099B2 (en) 2002-09-24 2007-10-16 Air Products And Chemicals, Inc. Dense phase processing fluids for microelectronic component manufacture
US7267727B2 (en) 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US6880560B2 (en) 2002-11-18 2005-04-19 Techsonic Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
US20050029492A1 (en) 2003-08-05 2005-02-10 Hoshang Subawalla Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols
US7195676B2 (en) 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1493190C3 (de) * 1963-04-16 1980-10-16 Studiengesellschaft Kohle Mbh, 4330 Muelheim Verfahren zur Trennung von Stoffgemischen
US4124528A (en) * 1974-10-04 1978-11-07 Arthur D. Little, Inc. Process for regenerating adsorbents with supercritical fluids

Also Published As

Publication number Publication date
IT8349424A0 (it) 1983-12-02
ES527786A1 (es) 1985-05-16
EP0127643A1 (fr) 1984-12-12
WO1984002291A1 (fr) 1984-06-21
IT1175802B (it) 1987-07-15

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Legal Events

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid