KR840007367A - Method for cleaning articles using supercritical gas - Google Patents

Method for cleaning articles using supercritical gas Download PDF

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Publication number
KR840007367A
KR840007367A KR1019830005750A KR830005750A KR840007367A KR 840007367 A KR840007367 A KR 840007367A KR 1019830005750 A KR1019830005750 A KR 1019830005750A KR 830005750 A KR830005750 A KR 830005750A KR 840007367 A KR840007367 A KR 840007367A
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KR
South Korea
Prior art keywords
article
gas
comprised
contaminant
pressure
Prior art date
Application number
KR1019830005750A
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Korean (ko)
Inventor
에이. 뮬러 윌리암
Original Assignee
에프. 씨. 맥너트
휴우즈 에어크라프트 캄파니
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Publication date
Application filed by 에프. 씨. 맥너트, 휴우즈 에어크라프트 캄파니 filed Critical 에프. 씨. 맥너트
Publication of KR840007367A publication Critical patent/KR840007367A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids

Landscapes

  • Cleaning In General (AREA)
  • Detergent Compositions (AREA)

Abstract

내용 없음.No content.

Description

초임계 기체를 사용한 물품의 세정방법Method for cleaning articles using supercritical gas

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

Claims (14)

표면에 오염 물질이 부착되어 있는 물품을 압력 용기에 투입하는 공정이 용기내에 온도와 압력이 초임계 상태로 유지된 기체를 도입하는 공정, 이 기체에 의하여 오염물질이 흡수되기에 충분한 시간 동안 상기 초임계 상태의 기체와 물품과의 접촉을 유지시키는 공정 및 용기로부터 오염물질이 함유된 기체를 제거하여 오염물질이 물품으로부터 분리시키는 공정의 결합으로 이루어진 것이 특징인 물품의 표면에 부착된 고체 오염 물질을 제거하는 방법.The step of introducing an article having contaminants attached to the surface into a pressure vessel is a step of introducing a gas in which the temperature and pressure are maintained in a supercritical state in the vessel, and the second Solid contaminants adhering to the surface of the article, comprising a process of maintaining contact between the critical gas and the article, and removing the contaminant-containing gas from the container to separate the contaminant from the article. How to remove. 제1항에 있어서, 기체가 이산화탄소인 것이 특징인 방법.The method of claim 1 wherein the gas is carbon dioxide. 제1항에 있어서, 이산화탄소가 압력 용기내에서 온도 약 35℃ 내지 약 100℃ 압력 약 1500psi(77,572mmHg) 내지 약 10,000psi(517,149mmHg)로 유지되는 것이 특징인 방법.The method of claim 1, wherein the carbon dioxide is maintained at a temperature of about 35 ° C. to about 100 ° C. at a pressure of about 1500 psi (77,572 mmHg) to about 10,000 psi (517,149 mmHg). 제1항에 있어서, 오염 물질이 주로 유기 물질로 구성된 것이 특징인 방법.The method of claim 1 wherein the pollutant is comprised primarily of organic material. 제1항에 있어서, 물품과 초임계 상태의 기체를 약 0.25 내지 약 4시간동안 접촉시키는 것이 특징인 방법.The method of claim 1, wherein the article is in contact with the supercritical gas for about 0.25 to about 4 hours. 제1항에 있어서, 물품의 고무제인 것이 특징인 방법.The method of claim 1 wherein the article is made of rubber. 제1항에 있어서, 물품이 금속제인 것이 특징인 방법.The method of claim 1 wherein the article is made of metal. 제1항에 있어서, 물품이 합성 유기 중합체로 구성된 것이 특징인 방법.The method of claim 1 wherein the article is comprised of a synthetic organic polymer. 제1항에 있어서, 물품이 폴리이미드 중합체로 구성된 것이 특징인 방법.The method of claim 1 wherein the article is comprised of a polyimide polymer. 제1항에 있어서, 물품이 탄소로 구성된 것이 특징인 방법.The method of claim 1 wherein the article is comprised of carbon. 제1항에 있어서, 물품이 석영 결정질인 것이 특징인 방법.The method of claim 1 wherein the article is quartz crystalline. 제1항에 있어서, 물품이 여러 가지 부품들의 조립체인 것이 특징인 방법.The method of claim 1 wherein the article is an assembly of various parts. 제1항에 있어서, 오염 물질이 물품의 외부 표면으로부터 기체에 의하여 제거되는 것이 특징인 방법.The method of claim 1 wherein the contaminants are removed by gas from the exterior surface of the article. 제1항에 있어서, 오염 물질이 물품의 틈새로부터 제거되는 것이 특징인 방법.The method of claim 1 wherein the contaminant is removed from the gap of the article. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019830005750A 1982-12-06 1983-12-05 Method for cleaning articles using supercritical gas KR840007367A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44693982A 1982-12-06 1982-12-06
US446939 1982-12-06

Publications (1)

Publication Number Publication Date
KR840007367A true KR840007367A (en) 1984-12-07

Family

ID=23774383

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019830005750A KR840007367A (en) 1982-12-06 1983-12-05 Method for cleaning articles using supercritical gas

Country Status (5)

Country Link
EP (1) EP0127643A1 (en)
KR (1) KR840007367A (en)
ES (1) ES527786A1 (en)
IT (1) IT1175802B (en)
WO (1) WO1984002291A1 (en)

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US5013366A (en) * 1988-12-07 1991-05-07 Hughes Aircraft Company Cleaning process using phase shifting of dense phase gases
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
JPH03202102A (en) * 1989-12-28 1991-09-03 Toray Dow Corning Silicone Co Ltd Method for reducing amount of siloxane oligomer in organopolysiloxane molded product
AT395951B (en) * 1991-02-19 1993-04-26 Union Ind Compr Gase Gmbh CLEANING OF WORKPIECES WITH ORGANIC RESIDUES
US5470154A (en) * 1991-04-18 1995-11-28 Osaka Sanso Kogyo Ltd. Method of cleaning the reflector mirror in an optical dew point meter and an optical dew point meter equipped with a cleaning device
JP2863663B2 (en) * 1991-04-18 1999-03-03 大阪酸素工業株式会社 Method for cleaning a reflector of an optical dew point meter and an optical dew point meter with a cleaning device
US5482371A (en) * 1991-04-18 1996-01-09 Osaka Sanso Kogyo Ltd. Method and apparatus for measuring the dew point and/or frost point of a gas having low water content
DE4123288C2 (en) * 1991-07-13 1994-11-17 Reinhard Knof Process for the treatment of crystalline silica granules
FR2686351A1 (en) * 1992-01-20 1993-07-23 Metalimphy Process for cleaning and degreasing metal products packaged in reel or sheet form forming a stack and plant for its use
US5316591A (en) * 1992-08-10 1994-05-31 Hughes Aircraft Company Cleaning by cavitation in liquefied gas
DE4309734A1 (en) * 1993-03-25 1994-09-29 Akzo Nobel Nv Process for cleaning hollow fibers
US5481058A (en) * 1994-01-07 1996-01-02 Minnesota Mining And Manufacturing Company Supercritical fluid extraction involving hydrofluoroalkanes
DE4423188C2 (en) * 1994-07-01 1999-03-11 Linde Ag Cleaning of compressed gas tanks
US6248797B1 (en) 1999-05-17 2001-06-19 Shelton A. Dias Supercritical carbon dioxide extraction of contaminants from ion exchange resins
US6589355B1 (en) * 1999-10-29 2003-07-08 Alliedsignal Inc. Cleaning processes using hydrofluorocarbon and/or hydrochlorofluorocarbon compounds
KR100447942B1 (en) * 2001-07-04 2004-09-08 한국화학연구원 Maintenance of membranes by prefiltration at high pressure and by cleaning their microstructures with supercritical fluids
US7282099B2 (en) 2002-09-24 2007-10-16 Air Products And Chemicals, Inc. Dense phase processing fluids for microelectronic component manufacture
US7267727B2 (en) 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US6880560B2 (en) 2002-11-18 2005-04-19 Techsonic Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
US20050029492A1 (en) 2003-08-05 2005-02-10 Hoshang Subawalla Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols
US7195676B2 (en) 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1493190C3 (en) * 1963-04-16 1980-10-16 Studiengesellschaft Kohle Mbh, 4330 Muelheim Process for the separation of mixtures of substances
US4124528A (en) * 1974-10-04 1978-11-07 Arthur D. Little, Inc. Process for regenerating adsorbents with supercritical fluids

Also Published As

Publication number Publication date
WO1984002291A1 (en) 1984-06-21
IT1175802B (en) 1987-07-15
IT8349424A0 (en) 1983-12-02
ES527786A1 (en) 1985-05-16
EP0127643A1 (en) 1984-12-12

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid