IT1175802B - PROCEDURE FOR CLEANING OBJECTS USING SUPERCRITICAL GASES - Google Patents

PROCEDURE FOR CLEANING OBJECTS USING SUPERCRITICAL GASES

Info

Publication number
IT1175802B
IT1175802B IT49424/83A IT4942483A IT1175802B IT 1175802 B IT1175802 B IT 1175802B IT 49424/83 A IT49424/83 A IT 49424/83A IT 4942483 A IT4942483 A IT 4942483A IT 1175802 B IT1175802 B IT 1175802B
Authority
IT
Italy
Prior art keywords
procedure
cleaning objects
supercritical gases
supercritical
gases
Prior art date
Application number
IT49424/83A
Other languages
Italian (it)
Other versions
IT8349424A0 (en
Inventor
William A Mueller
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IT8349424A0 publication Critical patent/IT8349424A0/en
Application granted granted Critical
Publication of IT1175802B publication Critical patent/IT1175802B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
IT49424/83A 1982-12-06 1983-12-02 PROCEDURE FOR CLEANING OBJECTS USING SUPERCRITICAL GASES IT1175802B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US44693982A 1982-12-06 1982-12-06

Publications (2)

Publication Number Publication Date
IT8349424A0 IT8349424A0 (en) 1983-12-02
IT1175802B true IT1175802B (en) 1987-07-15

Family

ID=23774383

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49424/83A IT1175802B (en) 1982-12-06 1983-12-02 PROCEDURE FOR CLEANING OBJECTS USING SUPERCRITICAL GASES

Country Status (5)

Country Link
EP (1) EP0127643A1 (en)
KR (1) KR840007367A (en)
ES (1) ES527786A1 (en)
IT (1) IT1175802B (en)
WO (1) WO1984002291A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013366A (en) * 1988-12-07 1991-05-07 Hughes Aircraft Company Cleaning process using phase shifting of dense phase gases
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
JPH03202102A (en) * 1989-12-28 1991-09-03 Toray Dow Corning Silicone Co Ltd Method for reducing amount of siloxane oligomer in organopolysiloxane molded product
AT395951B (en) * 1991-02-19 1993-04-26 Union Ind Compr Gase Gmbh CLEANING OF WORKPIECES WITH ORGANIC RESIDUES
US5482371A (en) * 1991-04-18 1996-01-09 Osaka Sanso Kogyo Ltd. Method and apparatus for measuring the dew point and/or frost point of a gas having low water content
JP2863663B2 (en) * 1991-04-18 1999-03-03 大阪酸素工業株式会社 Method for cleaning a reflector of an optical dew point meter and an optical dew point meter with a cleaning device
US5470154A (en) * 1991-04-18 1995-11-28 Osaka Sanso Kogyo Ltd. Method of cleaning the reflector mirror in an optical dew point meter and an optical dew point meter equipped with a cleaning device
DE4123288C2 (en) * 1991-07-13 1994-11-17 Reinhard Knof Process for the treatment of crystalline silica granules
FR2686351A1 (en) * 1992-01-20 1993-07-23 Metalimphy Process for cleaning and degreasing metal products packaged in reel or sheet form forming a stack and plant for its use
US5316591A (en) * 1992-08-10 1994-05-31 Hughes Aircraft Company Cleaning by cavitation in liquefied gas
DE4309734A1 (en) * 1993-03-25 1994-09-29 Akzo Nobel Nv Process for cleaning hollow fibers
US5481058A (en) * 1994-01-07 1996-01-02 Minnesota Mining And Manufacturing Company Supercritical fluid extraction involving hydrofluoroalkanes
DE4423188C2 (en) * 1994-07-01 1999-03-11 Linde Ag Cleaning of compressed gas tanks
US6248797B1 (en) * 1999-05-17 2001-06-19 Shelton A. Dias Supercritical carbon dioxide extraction of contaminants from ion exchange resins
US6589355B1 (en) * 1999-10-29 2003-07-08 Alliedsignal Inc. Cleaning processes using hydrofluorocarbon and/or hydrochlorofluorocarbon compounds
KR100447942B1 (en) * 2001-07-04 2004-09-08 한국화학연구원 Maintenance of membranes by prefiltration at high pressure and by cleaning their microstructures with supercritical fluids
US7282099B2 (en) 2002-09-24 2007-10-16 Air Products And Chemicals, Inc. Dense phase processing fluids for microelectronic component manufacture
US7267727B2 (en) 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US6880560B2 (en) 2002-11-18 2005-04-19 Techsonic Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
US20050029492A1 (en) 2003-08-05 2005-02-10 Hoshang Subawalla Processing of semiconductor substrates with dense fluids comprising acetylenic diols and/or alcohols
US7195676B2 (en) 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1493190C3 (en) * 1963-04-16 1980-10-16 Studiengesellschaft Kohle Mbh, 4330 Muelheim Process for the separation of mixtures of substances
US4124528A (en) * 1974-10-04 1978-11-07 Arthur D. Little, Inc. Process for regenerating adsorbents with supercritical fluids

Also Published As

Publication number Publication date
WO1984002291A1 (en) 1984-06-21
EP0127643A1 (en) 1984-12-12
KR840007367A (en) 1984-12-07
ES527786A1 (en) 1985-05-16
IT8349424A0 (en) 1983-12-02

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