KR840000745Y1 - 반도체 재료봉의 존정제 장치 - Google Patents
반도체 재료봉의 존정제 장치 Download PDFInfo
- Publication number
- KR840000745Y1 KR840000745Y1 KR2019830005292U KR830005292U KR840000745Y1 KR 840000745 Y1 KR840000745 Y1 KR 840000745Y1 KR 2019830005292 U KR2019830005292 U KR 2019830005292U KR 830005292 U KR830005292 U KR 830005292U KR 840000745 Y1 KR840000745 Y1 KR 840000745Y1
- Authority
- KR
- South Korea
- Prior art keywords
- rod
- circuit
- coil
- arc
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000006698 induction Effects 0.000 title claims description 7
- 238000010438 heat treatment Methods 0.000 title claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 16
- 239000000523 sample Substances 0.000 claims description 13
- 239000003990 capacitor Substances 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 230000003321 amplification Effects 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000007670 refining Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000000746 purification Methods 0.000 description 9
- 238000012544 monitoring process Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000155 melt Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000013316 zoning Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 108091006149 Electron carriers Proteins 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Generation Of Surge Voltage And Current (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Testing Relating To Insulation (AREA)
Abstract
Description
Claims (1)
- 반도체 재료의 봉을 존정제하기 위해, 존정체에 대해 반도체 재료봉의 위치를 설정하는 장치와, 에너지를 반도체 재료봉에 유도결합하는 것에 의해 봉에 용융존을 발생하게끔 봉을 둘러싸도록 배열된 RF 유도가열코일, 가공코일 및 봉사이에 상대운동을 야기시켜 봉의 길이를 따라 용융존이 이동되게하는 장치를 구비한 반도체 재료봉의 존정제장치에 있어서, 아아크 발생을 감지하도록 가공코일 및 용융존의 근방에 배치된 탐침(11), 전류제한저항(13), 바이어스전원(15), 감도조정 저항(17)으로 이루어진 탐침회로와, 가공코일에 대한 RF 발생기 전력을 차단하기 위한 검출회로 및 증폭회로(19)와, 가공코일에 발생기 전력을 재투입하기 위한 NAND 게이트(89)(79)(93), 저항(83)(85), 다이오드(81)(91), 캐패시터(87)로 이루어진 회로등을 구성시킨 반도체 재료봉의 존정제장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US96964478A | 1978-12-14 | 1978-12-14 | |
US969644 | 1978-12-14 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019790004451 Division | 1979-12-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR840000745Y1 true KR840000745Y1 (ko) | 1984-04-30 |
Family
ID=25515806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019830005292U Expired KR840000745Y1 (ko) | 1978-12-14 | 1983-06-16 | 반도체 재료봉의 존정제 장치 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5582971A (ko) |
KR (1) | KR840000745Y1 (ko) |
BE (1) | BE880601A (ko) |
DE (1) | DE2950266A1 (ko) |
DK (1) | DK530979A (ko) |
IT (1) | IT1124498B (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10110609B4 (de) * | 2001-03-06 | 2013-01-03 | Fludicon Gmbh | Hochspannungsnetzteil |
-
1979
- 1979-12-13 JP JP16091879A patent/JPS5582971A/ja active Pending
- 1979-12-13 BE BE0/198553A patent/BE880601A/fr not_active IP Right Cessation
- 1979-12-13 DE DE19792950266 patent/DE2950266A1/de not_active Withdrawn
- 1979-12-13 DK DK530979A patent/DK530979A/da not_active Application Discontinuation
- 1979-12-13 IT IT41673/79A patent/IT1124498B/it active
-
1983
- 1983-06-16 KR KR2019830005292U patent/KR840000745Y1/ko not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2950266A1 (de) | 1980-07-03 |
IT7941673A0 (it) | 1979-12-13 |
BE880601A (fr) | 1980-06-13 |
JPS5582971A (en) | 1980-06-23 |
DK530979A (da) | 1980-06-15 |
IT1124498B (it) | 1986-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UA0105 | Converted application for utility model registration |
Patent event date: 19830616 Patent event code: UA01011R05D Comment text: Application for Conversion into Application for Utility Model Registration Application number text: 1019830002593 Filing date: 19830610 |
|
UE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event code: UE09021S01D Patent event date: 19830711 |
|
UG1604 | Publication of application |
Patent event code: UG16041S01I Comment text: Decision on Publication of Application Patent event date: 19840329 |
|
E701 | Decision to grant or registration of patent right | ||
UE0701 | Decision of registration |
Patent event date: 19840712 Comment text: Decision to Grant Registration Patent event code: UE07011S01D |