KR20250119610A - 석영 유리 도가니 및 이를 이용한 실리콘 단결정의 제조 방법 - Google Patents

석영 유리 도가니 및 이를 이용한 실리콘 단결정의 제조 방법

Info

Publication number
KR20250119610A
KR20250119610A KR1020257022286A KR20257022286A KR20250119610A KR 20250119610 A KR20250119610 A KR 20250119610A KR 1020257022286 A KR1020257022286 A KR 1020257022286A KR 20257022286 A KR20257022286 A KR 20257022286A KR 20250119610 A KR20250119610 A KR 20250119610A
Authority
KR
South Korea
Prior art keywords
crucible
concentration
quartz glass
crystallization
crucible body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257022286A
Other languages
English (en)
Korean (ko)
Inventor
켄 키타하라
히로시 키시
에리코 키타하라
코우타 하세베
히데키 후지와라
Original Assignee
가부시키가이샤 사무코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 사무코 filed Critical 가부시키가이샤 사무코
Publication of KR20250119610A publication Critical patent/KR20250119610A/ko
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1020257022286A 2023-01-13 2023-10-24 석영 유리 도가니 및 이를 이용한 실리콘 단결정의 제조 방법 Pending KR20250119610A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2023-003944 2023-01-13
JP2023003944 2023-01-13
PCT/JP2023/038281 WO2024150500A1 (ja) 2023-01-13 2023-10-24 石英ガラスルツボ及びこれを用いたシリコン単結晶の製造方法

Publications (1)

Publication Number Publication Date
KR20250119610A true KR20250119610A (ko) 2025-08-07

Family

ID=91896847

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257022286A Pending KR20250119610A (ko) 2023-01-13 2023-10-24 석영 유리 도가니 및 이를 이용한 실리콘 단결정의 제조 방법

Country Status (7)

Country Link
US (1) US20260103821A1 (https=)
JP (1) JPWO2024150500A1 (https=)
KR (1) KR20250119610A (https=)
CN (1) CN120500560A (https=)
DE (1) DE112023005191T5 (https=)
TW (1) TW202432907A (https=)
WO (1) WO2024150500A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180051714A (ko) 2016-11-08 2018-05-17 한국에너지기술연구원 양방향 에너지네트워크에서의 복합에너지시스템 및 그 제어방법
JP2020105062A (ja) 2018-12-27 2020-07-09 クアーズテック株式会社 石英ガラスるつぼの製造方法および光学ガラス溶融用石英ガラスるつぼ
WO2021140729A1 (ja) 2020-01-10 2021-07-15 株式会社Sumco 石英ガラスルツボ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5213356B2 (ja) * 2007-05-31 2013-06-19 信越石英株式会社 シリコン単結晶引上用石英ガラスルツボおよびその製造方法
SG11201910063VA (en) * 2017-05-02 2019-11-28 Sumco Corp Quartz glass crucible and manufacturing method thereof
JP6855358B2 (ja) * 2017-09-27 2021-04-07 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180051714A (ko) 2016-11-08 2018-05-17 한국에너지기술연구원 양방향 에너지네트워크에서의 복합에너지시스템 및 그 제어방법
JP2020105062A (ja) 2018-12-27 2020-07-09 クアーズテック株式会社 石英ガラスるつぼの製造方法および光学ガラス溶融用石英ガラスるつぼ
WO2021140729A1 (ja) 2020-01-10 2021-07-15 株式会社Sumco 石英ガラスルツボ

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
비특허문헌 1: A. E. Geissberger and F. L. Galeener, "Raman studies of vitreous SiO2 versus fictive temperature", Phys. Rev. B, Vol. 28, pp. 3266-3271(1983).
비특허문헌 2: A. Agarwal, K. M. Davis, and M. Tomozawa, "A simple IR spectroscopic method for determining fictive temperature of silica glasses", J. Non-Cryst. Solids, Vol. 185, pp. 191-198 (1995).

Also Published As

Publication number Publication date
CN120500560A (zh) 2025-08-15
JPWO2024150500A1 (https=) 2024-07-18
DE112023005191T5 (de) 2025-10-09
TW202432907A (zh) 2024-08-16
US20260103821A1 (en) 2026-04-16
WO2024150500A1 (ja) 2024-07-18

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