KR20240108737A - Multi-stage pickling system - Google Patents

Abstract

A plurality of cleaning booths connected in cascade, a transport means for transporting the object to be cleaned within the cleaning booth, and a nozzle for spraying the cleaning fluid onto the object within the cleaning booth, and supplying the cleaning fluid to the nozzle from the cleaning booth. A multi-stage cleaning device is provided, which includes a cleaning fluid system for recovering and regenerating used cleaning fluid, and is configured to set different cleaning conditions for each cleaning booth.

Description

Multi-stage cleaning device {MULTI-STAGE PICKLING SYSTEM}

The present invention relates to a multi-stage cleaning device, and more specifically, in order to efficiently clean the objects to be treated transported within the cleaning booth, a plurality of cleaning stations are provided in series, that is, in cascade, and the cleaning liquid used for each cleaning bus is provided. By allowing the conditions such as ingredient composition, concentration, oxidation reduction potential (ORP), temperature, booth length, and spray pressure to be varied, the effect of removing contaminants or defects on the surface of the object to be treated is excellent and the cleaning speed is dramatically improved. , relates to a multi-stage cleaning device.

There is a known technology for cleaning objects to be treated in a cleaning booth.

The object to be treated may be made of various shapes and materials, but in the following, a steel plate (the shape is a plate, the material is steel) is shown and explained as an example, and it can also be applied to objects of other shapes and materials due to their nature. Unless excluded, the present invention applies equally.

Cleaning can be done in various forms and with various cleaning liquids, but hereinafter, pickling will be used as an example, and the present invention is equally applicable to cleaning of other forms and components, unless application is excluded due to its nature.

The cleaning booth is a physical partition space for efficiently contacting the cleaning liquid with the object to be treated, and can be made of various shapes and methods. Hereinafter, the object to be treated is transported within the cleaning booth, and the cleaning liquid is applied to the object to be treated during transport. This spray-type cleaning bus is taken as an example, and the present invention is equally applicable to cleaning buses of other shapes and other types (immersion type, etc.), unless application is excluded due to their nature.

The means of transporting the object to be treated in the cleaning booth can be implemented in various ways, but the following will explain the transport means using a transport roll as an example, unless the application is excluded from the nature of the transport means of other shapes and methods. The present invention applies equally.

In the case where the object to be treated is a plate-shaped object, the posture of the object to be treated during transport can be designed in various ways, such as a standing position, a lying position, or a posture at an intermediate angle. However, hereinafter, the posture of the object to be treated during transport will be described. Standing transport, which is in an upright position, is explained by taking as an example the center of gravity-biased standing transport method, where the upright angle is tilted at a preset inclination and the center of gravity is transferred with the center of gravity biased to one side so that the position is maintained during the transport process. , the present invention is equally applicable to transportation means of other shapes and methods, unless application is excluded due to their nature.

The following patent document discloses a technique of temporarily taking out a steel sheet immersed in a pickling tank during the submerged steel plate pickling process, spraying gas to evaporate the acid solution, and then immersing it in the pickling tank again.

Patent registration 10-1249167 gazette

Since the technology in the patent document is an immersion type, it is a separate technology from the center of gravity-biased standing transfer technology, which is the target scope of the present invention. In addition, although it is composed of front-end pickling, gas injection, and back-end pickling, it does not disclose the differences in specific composition, such as temperature and concentration, of the pickling treatment of the front-end and back-end pickling.

The immersion cleaning technology involves immersing the object to be treated in a immersion tank containing a large amount of cleaning solution, waiting for a chemical reaction, and then removing it. This technology has many problems, such as a decrease in chemical reaction between the cleaning liquid and the object to be treated, and waste of the cleaning solution, so a technology in which the object to be treated is transported within a cleaning booth and the cleaning liquid is sprayed, like the present invention, has emerged.

In the conventional technology for transporting objects to be treated and spraying cleaning liquid, the cleaning liquid sprayed into the cleaning booth is designed and controlled to maintain set values such as temperature, concentration, and spraying pressure as uniformly as possible. The cleaning liquid that flows down after spraying and cleaning is collected from the bottom and recycled through a regeneration process. The concentration management during this regeneration and recycling is also controlled by pre-designed settings.

However, in terms of the shape defects of the object to be treated, the removal rate of contaminants, and the cleaning speed, the method of treating with one cleaning booth and one set value has a lot of room for improvement in terms of performance compared to the overall investment time. In particular, since cleaning is performed only once, there are cases where fine cleaning occurs, and in this case, it is necessary to go back to the process and perform additional cleaning, which causes waste of process and time due to this additional cleaning operation, which is a factor in reducing productivity. do.

In cleaning, for example, among shape defects, scratches and dents have different types and treatment methods, and protrusions and attached contaminants also have different types and treatment methods. Additionally, strong cleaning and mild cleaning have different uses and processing performance. The present inventors focused on this point and came up with the present invention.

The present invention is intended to solve the problems of the prior art, by providing two or more cleaning booths in cascade to clean the objects to be treated internally and configuring each cleaning booth to perform different cleaning, thereby improving the cleaning effect and The goal is to provide a multi-stage cleaning device that can significantly improve the cleaning speed.

In addition, by varying the conditions such as composition, concentration, oxidation reduction potential (ORP), temperature, booth length, and spray pressure of the cleaning solution used for each different cleaning, the removal rate of defects in the shape of the object to be treated, the removal rate of contaminants, and the cleaning speed are dramatically improved. The goal is to provide a multi-stage cleaning device that can be used.

The multi-stage cleaning device of the present invention for achieving the above problem includes a plurality of cleaning booths connected in cascade, a transport means for transporting the object to be cleaned in the cleaning booth, and It includes a cleaning solution system that supplies cleaning fluid to a nozzle that sprays the cleaning fluid and recovers and regenerates the used cleaning fluid from the cleaning booth, and is characterized in that cleaning conditions are set differently for each of the cleaning booths.

Here, the cleaning conditions set differently for each cleaning booth may be at least one of the component composition of the cleaning liquid, concentration, oxidation reduction potential (ORP), temperature, booth length, and injection pressure.

In addition, the cleaning booth is composed of a front-stage cleaning booth and a rear-stage cleaning booth, and the hydrofluoric acid concentration of the cleaning liquid may be set higher in the front-stage cleaning booth than in the rear-stage cleaning booth.

In addition, the cleaning booth is composed of a front-stage cleaning booth and a rear-stage cleaning booth, and the oxidation reduction potential (ORP) of the cleaning liquid may be set lower in the front-stage cleaning booth than that in the rear-stage cleaning booth.

In addition, the cleaning booth is composed of a front-stage cleaning booth and a rear-stage cleaning booth, and the temperature of the cleaning liquid may be set higher in the front-stage cleaning booth than in the rear-stage cleaning booth.

In addition, the cleaning booth is composed of a front cleaning booth and a rear cleaning booth, and the booth length of each cleaning booth may be set to be shorter than the front cleaning booth than the rear cleaning booth.

In addition, the object to be treated is a plate-shaped member that is transported while standing, and the transfer means includes a plurality of downward transfer rolls that transport while supporting the lower part of the object to be treated, and a plurality of downward transport rolls that transport while supporting the side portions of the object to be treated. It includes a lateral transfer roll , wherein the downward transfer roll is inclined toward the lateral transfer roll by a predetermined angle α with respect to the horizontal direction, and the lateral transfer roll is transferred downward by a predetermined angle β with respect to the vertical direction. It is inclined toward the side away from the roll, and the object to be treated can be transported with its center of gravity biased toward the side transfer roll.

According to the present invention, two or more cleaning booths for cleaning the object being transported inside are provided in cascade, and different cleaning is performed for each cleaning booth, thereby significantly improving the cleaning effect and cleaning speed. Multi-stage cleaning A device is provided.

In addition, by varying the conditions such as composition, concentration, oxidation reduction potential (ORP), temperature, booth length, and spray pressure of the cleaning solution used for each different cleaning, the removal rate of defects in the shape of the object to be treated, the removal rate of contaminants, and the cleaning speed are dramatically improved. A multi-stage cleaning device that can be used is provided.

1 is an exemplary schematic diagram of a multi-stage cleaning device of the present invention.
Figure 2 is a partial cutaway view of the interior of the multi-stage cleaning booth constituting the cleaning device and a block diagram of the multi-stage cleaning liquid system.
Figure 3 is an exemplary schematic diagram of a conventional cleaning device.
Figure 4 is a partial cutaway view of the interior of a single cleaning booth constituting a conventional cleaning device and a block diagram of a single cleaning liquid system.
Figure 5 is a graph of the cumulative weight loss by operating condition according to the configuration of the present invention and the experiment of the comparative example.
Figure 6 is a sample photo showing the time-dependent cleaning effect of the cleaning solution used in Comparative Example 1 in a single booth under mixed acid tank 1 conditions.
Figure 7 is a sample photo showing the time-dependent cleaning effect of the cleaning solution used in Comparative Example 2 in a single booth under mixed acid tank 2 conditions.
Figure 8 is a sample photo showing the cleaning effect by time of the treatment result by the multi-stage booth under the mixed acid tank 1 and 2 split cleaning conditions for each cleaning liquid used in one embodiment according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. However, for members having the same function due to the same configuration, the same reference numerals are maintained even if the drawings are different, so detailed description thereof may be omitted.

In addition, the relationship in which other members are arranged or connected to the front, rear, left and right, top and bottom of a certain member includes cases where a separate member is inserted in the middle. Conversely, when a member is said to be 'right' in front, right, left, above or below another member, it means that there is no separate member in between. And when a part is said to 'include' other components, this does not mean excluding other components, but rather can include other components, unless specifically stated to the contrary.

Also, the name of the composition is divided into 1st, 2nd, etc. to distinguish the composition in the same relationship, and is not necessarily limited to the order. Additionally, terms such as 'unit', 'means', 'part', 'member', and 'module' described in the specification mean a comprehensive unit of structure that performs at least one function or operation.

In addition, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, so the present invention is not necessarily limited to what is shown in the drawings, and is intended to clearly express various parts and regions such as layers and regions. Thickness, etc. may be exaggerated and enlarged or reduced.

<Basic configuration - multi-stage cleaning device>

The multi-stage cleaning device of the present invention includes a plurality of cleaning booths (B) , a transport means (10) , and a cleaning liquid system (20, 21) . The device includes a multi-stage object transport type spray cleaning booth configured to transport an object to be cleaned within the booth and spray a cleaning liquid toward the object.

The plurality of cleaning booths (B) are formed by connecting a plurality of cleaning buses in a cascade. That is, it is characterized by a configuration in which the object to be treated (S), which is the output of the front-stage cleaning bus (B1), is the input of the rear-stage cleaning bus (B2).

Each of the cleaning stations (B1, B2) may be configured to be partitioned by a partition wall (30). The partition wall 30 has a penetration portion (not shown) through which the object S can pass.

The penetrating portion may have a shape corresponding to the cross-sectional shape of the object to be treated. For example, as shown in FIG. 1, if the object S is a plate-shaped member and the minimum cross-sectional area is advanced during transport, the shape of the penetrating portion may be formed to correspond to the cross-sectional shape of the minimum cross-sectional area. . However, the penetrating portion may be formed in the form of a flexible slit made of a material that can withstand the cleaning liquid, and may be operated in such a way that it opens only when the object to be treated (S) penetrates, and the gap closes when the penetrating is completed.

And, the object to be treated (S) is transported by the transfer means 10 of the front cleaning booth before passing through the penetration part, and is transported by the transport means 10 of the rear cleaning booth after passing the penetration part. You can.

The cleaning booths (B1, B2) refer only to booths that perform a practical cleaning role, and even if a booth without a cleaning function, for example, a booth with a simple rinse function, is inserted in the middle, a cascade of cleaning booths is formed. It is assumed to be included in the concept of connection.

The transport means (10) is a means for transporting the object (S) to be cleaned within the cleaning booth (B).

The transfer means 10 is composed of one or more types of transfer rolls in the example shown in Figure 2, but the present invention is not limited to this, and even in the case of transfer by conveyor, wire, chain, etc., transfer within the booth The present invention can be applied when the cleaning liquid is configured to be sprayed on the object being treated.

The transfer means 10 formed by a plurality of transfer rolls may include, for example, a plurality of downward transfer rolls 11 and a plurality of lateral transfer rolls 12 as shown in FIG. 2, and a detailed description will be provided later.

The cleaning liquid system (20, 21) supplies the cleaning liquid to a nozzle (N) that sprays the cleaning liquid on the object (S) within the cleaning bus (B) and supplies the used cleaning liquid from the cleaning bus (B). It is a recovery and regeneration system.

For example, in the case of acid washing, indiscriminate disposal of used cleaning fluids causes serious environmental pollution. Among the components of used cleaning fluids, some can be recycled, and even for components that should be discarded, there are cases where environmental protection treatment, such as neutralization, is required before discharge. Accordingly, a cleaning solution system is desired that allows the cleaning solution to be recovered, regenerated, stored, and re-supplied with the highest possible recovery rate.

In particular, when regenerating the recovered used cleaning solution, if the chemical properties of the used cleaning solution fluctuate excessively, the type and amount of the treatment chemical for regeneration must be monitored and changed from time to time, and in some cases, the recyclable range must be adjusted. There is a risk that it may exceed the limit and become non-renewable. In other words, it is desirable to improve processing efficiency and maintain the recyclable range to allow only used cleaning fluids with chemical properties within the predetermined recyclable range to be input to the regeneration device 21, and especially as the recyclable range becomes more refined. The efficiency of cleaning solution management increases.

And the multi-stage cleaning device of the present invention is characterized in that cleaning conditions are set differently for each cleaning booth (B).

The cleaning conditions set for each cleaning booth (B1, B2) include the conditions of the booth itself and the conditions of the cleaning liquid sprayed from the booth. Conditions of the booth itself may include the shape, size, and internal temperature of the booth. The conditions of the cleaning solution can be specifications for various chemical and physical properties of the cleaning solution.

In the present invention, as shown in Figures 1 and 2, a separate cleaning solution system is provided and operated for each cleaning bus (B1, B2) using cleaning solutions with different chemical properties, so that the used water recovered in each cleaning solution system is operated separately. Since the chemical properties of the cleaning solution can be limited and operated within the expected range, it is possible to improve the quality of the cleaning solution and improve regeneration efficiency.

<Action>

As shown in Figure 1, the object to be treated (S) enters the front cleaning booth (B1) through the pre-rinse booth by the transfer means (10). In the front-end cleaning booth (B1), the object to be treated (S) is cleaned and transported under set cleaning conditions, and the used cleaning liquid is recovered in the front-end cleaning liquid system. The cleaned object (S) leaves the front cleaning booth (B1) and enters the rear cleaning booth (B2). In the rear-stage cleaning booth (B1), the object to be treated (S) is cleaned and transported under different set cleaning conditions, and the used cleaning liquid is recovered in the rear-stage cleaning liquid system. The cleaned object (S) leaves the rear cleaning booth (B1), passes through the final rinse booth, and is then inputted into the next process.

However, although the above has described an example in which two cleaning units are provided, the present invention can also be applied in the same context to an example in which three or more cleaning units are provided. In addition, Figures 1 and 2 show an example of a method in which the object to be treated (S) is transported standing up, but the present invention is not limited to this, and can be applied to a transport method of other shapes and postures due to its nature. Unless excluded, the present invention applies equally.

And, in the cleaning liquid spray type cleaning booth (B) as described above, while the object (S) is being transported by the transfer means (10), the cleaning liquid is splashed onto the surface of the object (S) by the nozzle (N). and is cleaned. As shown in Figure 2, the cleaning liquid is stored in the tank 20 and is supplied to the cleaning gas (B) through the supply line. The cleaning liquid is sprayed into the cleaning booth (B) through the nozzle (N). However, although FIG. 4 shows an example in which multiple nozzles N are arranged in one direction (direction coming out of the ground), the nozzles N can also be arranged in the opposite direction (direction entering the ground), and are installed in both directions. It can be.

<Effect>

In the present invention, two or more cleaning booths (B) for cleaning the object (S) transported inside are provided in cascade, and each cleaning booth (B) is configured to perform different cleaning, thereby improving the cleaning effect and cleaning speed. can be significantly improved.

For example, mild cleaning is performed in the front cleaning booth (B1) of the cascade to remove only surface contaminants, and then strong cleaning is performed in the rear cleaning booth (B2) to obtain a strong and uniform cleaning effect, including removal of surface defects and rust. A strong cleaning is performed in the front cleaning booth (B1) of the cascade to remove only surface contaminants as well as most common surface defects and rust, and then a mild cleaning is performed in the rear cleaning booth (B2) to refine and finish the surface to achieve a high-quality cleaning effect. You can get it.

In the above example, the case of acid washing was explained, but the device of the present invention can also be applied to other cleaning cases, such as alkaline cleaning, alcohol cleaning, detergent cleaning, etc. In this case, cleaning liquids with different strengths and weaknesses are used in separate cleaning booths (B1, B2). ) can be assigned to the present invention. Furthermore, the device of the present invention can also be applied in the case of complex cleaning in which different types of cleaning such as acid, alkali, alcohol, and detergent are mixed, and in this case, different types of cleaning liquid are allocated to separate booths (B1 and B2). possible.

<Specific setting conditions>

The cleaning conditions set differently for each cleaning booth B may be, in particular, at least one of the composition of the cleaning liquid, concentration, oxidation reduction potential (ORP), temperature, booth length, and injection pressure. By varying the conditions of the booth itself or the cleaning liquid for each different cleaning booth, the shape defect or contaminant removal rate, cleaning speed, and cleaning quality can be dramatically improved according to the characteristics of the object to be treated.

In particular, the cleaning bus (B) may be composed of a front cleaning bus (B1) and a rear cleaning bus (B2). At this time, the present invention is applicable even when another cleaning booth or a rinse booth other than cleaning is interposed between the front cleaning booth (B1) and the rear cleaning booth (B2).

In this case, when two or more cleaning buses are arranged in cascade, the hydrofluoric acid concentration of the cleaning liquid may be set higher in the front cleaning bus (B1) than in the rear cleaning bus (B2).

Due to this, there is an effect in that the material to be cleaned with hydrofluoric acid can be cleaned strongly in the front cleaning booth (B1) and then weakly and delicately cleaned in the rear cleaning booth (B2).

In addition, the oxidation reduction potential (ORP) of the cleaning liquid in the front-stage cleaning booth (B1) may be set lower than that in the rear-stage cleaning booth (B2).

Due to this, there is an effect that the material to be cleaned by redox reaction can be cleaned weakly in the front cleaning booth (B1) and then strongly cleaned in the rear cleaning booth (B2).

Additionally, the temperature of the cleaning liquid in the front-stage cleaning booth (B1) may be set higher than that in the rear-stage cleaning booth (B2).

Due to this, there is an effect of being able to clean strongly in the front-stage cleaning booth (B1) using a cleaning liquid whose cleaning power becomes stronger as the temperature increases, and then weakly and delicately in the rear-stage cleaning booth (B2).

In addition, the booth length of each cleaning booth (B) may be set to be shorter in the front cleaning booth (B1) than the rear cleaning booth (B2).

Because of this, the cleaning liquid contact time is different, which has the effect of allowing strong but short cleaning in the front cleaning booth (B1) and then weak and delicate but long cleaning in the rear cleaning booth (B2).

<Experimental example>

When cleaning a steel plate, which is an example of an object to be treated, using an acid solution as a cleaning solution, in the case of a single booth, additional pickling is required due to insufficient pickling, and this additional pickling operation causes a problem in that productivity is reduced. In order to solve this problem, an experimental example in which an experiment was conducted to remove scale through primary pickling and evaluate the effectiveness of separating the pickling booth will be described along with a comparative example.

<Acid conditions and booth length>

designation sulfuric acid concentration
(arbitrary unit) Hydrofluoric acid concentration
(arbitrary unit) ORP
(arbitrary unit) temperature
(arbitrary unit) Booth length
(arbitrary unit) Mixed acid tank 1 first concentration first concentration first voltage first temperature first length Mixed acid tank 2 second concentration
(same as first concentration) second concentration
(lower than first concentration) second voltage
(higher than first voltage) second temperature
(lower than first temperature) second length
(longer than the first length)

When the specimen size is 10T (Comparative Example 2) and the splitting operation of mixed acid tanks 1 and 2 (experimental example of the present invention), the pickling completion time and pickling speed were calculated.

<Pickling speed>

division Pickling completion time
(arbitrary unit) Pickling speed
(arbitrary unit) Mixed acid tank 1 single condition
(Comparative Example 1) 1st time first speed Mixed acid tank 2 single condition
(Comparative Example 2) second time
(same as time 1) second speed
(same as first speed) Mixed acid tank 1, 2 division work
(Experimental example) third time
(shorter than the first and second hours)
(Mixed Tank 1 4th hour +
Mixed Tank 2, 5th hour)
(the 4th hour is shorter than the 5th hour) third speed
(faster than first and second speeds)

The evaluation items for pickling performance were cumulative weight loss and pickling completion time, and the completion of pickling was based on the pickling completion time for each ORP. A graph of cumulative weight loss by operating condition is shown in Figure 5. As a result of comparing the cumulative weight reduction, it was confirmed that the slope of the division of mixed acid tanks 1 and 2 of the present invention was the steepest. The larger the slope, the higher the reactivity.

Comparative Example 1: For the booth length (third length), the completion of cleaning with the cleaning liquid in mixed acid tank 1 took the first time, which became the first speed. Microphotographs (x60 magnification) of the specimen over time according to Comparative Example 1 are shown in FIG. 6.

Comparative Example 2: Completion of cleaning with the cleaning liquid in mixed acid tank 2 for the booth length (third length) took a second time (same as the first time), which became the second speed (same as the first speed). . Microphotographs (x60 magnification) of the specimen over time according to Comparative Example 2 are shown in FIG. 7.

Experimental example of the present invention: The booth length (third length) is divided into a first length for the front cleaning booth and a second length for the rear cleaning booth, and the cleaning liquid from mixed acid tank 1 is placed in the front cleaning booth, and the mixed acid tank is placed in the rear cleaning booth. Cleaning was performed by administering the cleaning solution of 2. Completion of cleaning took a total of 3 hours, including the 4th hour in the front cleaning booth and the 5th hour in the rear cleaning booth, which became the 3rd speed (faster than the 1st and 2nd speeds). Microphotographs (x60 magnification) of specimens over time according to this experimental example are shown in FIG. 8.

As a result, it can be seen that the division of the cleaning booth, such as the present invention, can shorten the cleaning time by about 3 minutes or more compared to the operation by a single booth.

<Center of gravity unbalanced standing transfer method>

In addition, in the case where the object S is a plate-shaped member that is transported while standing, the object S can be transported while maintaining its posture while being flipped to a predetermined side during the transport process. The configuration is explained. In the present invention, in which a plurality of cleaning stations (B) are connected in cascade to maximize the cleaning effect and cleaning speed, maintaining the posture of the object to be treated during the transfer process is very important in terms of maintaining the distance from the nozzle (N). do.

At this time, the transport means 10 includes a plurality of downward transport rolls 11 and a plurality of lateral transport rolls 12, as illustrated in FIG. 2.

The plurality of downward transport rolls 11 are rolls that transport the object S while supporting the lower part thereof.

The downward transfer roll 11 is inclined toward the side transfer roll 12 by a predetermined angle α with respect to the horizontal direction e. Therefore, while preventing the object S from deviating from the downward transport roll 11, it serves to transfer the object S by tilting it toward the lateral transport roll 12.

The plurality of lateral transfer rolls 12 are rolls that transfer the object S while supporting the side portion thereof.

The side transfer roll 12 is inclined away from the downward transfer roll 11 by a predetermined angle β with respect to the vertical direction g. Therefore, the object to be treated (S) can be transported while maintaining the angle while being tilted.

By this configuration of the transfer roll 10, the object to be processed (S) is transported with its center of gravity biased toward the lateral transfer roll 12. This is a transfer in which the center of gravity is biased and maintained on one side, and the inclined angle of the downward transfer roll 11 and the side transfer roll 12 is maintained, so the attitude of the object (S) is also maintained. do. Accordingly, the distance and positional relationship with the nozzle N are maintained, and a pre-designed cleaning effect is achieved.

In the present invention, in which a plurality of cleaning booths (B) are connected in cascade, maintaining the distance and positional relationship between the object to be treated (S) and the nozzle (N) is particularly determined by the design and booth design of the cleaning liquid, temperature, pressure, etc. It is an important element in the design of length and has a great influence on improving the cleaning effect. In the present invention, the cleaning effect is improved as designed by maintaining the distance and positional relationship between the object to be treated (S) and the nozzle (N) during transport.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the disclosed embodiments, but is implemented by modification in various different forms within the scope of the claims, detailed description of the invention, and accompanying drawings. It is obvious to those skilled in the art that other embodiments can be implemented and are equivalent, and that these also fall within the scope of the present invention. Only the embodiments are provided so that the disclosure of the present invention is complete, and the present invention It is provided to fully inform those skilled in the art of the scope of the invention, and the present invention is only defined by the scope of the claims.

The present invention can be used in the industry of multi-stage cleaning devices.

10: Transfer roll
11: Downward transfer roll
12: Lateral feed roll
20, 20a, 20b: Tank
21, 21a, 21b: Playback device
30: Bulkhead
B, B1, B2, B3: Booth
N: nozzle
S: object to be treated
α, β: Tilted angle

Claims (7)

Multiple cleaning stations connected in cascade,
a transport means for transporting the object to be cleaned in the cleaning booth;
A cleaning fluid system that supplies cleaning fluid to a nozzle that sprays cleaning fluid on the object to be treated within the cleaning booth and recovers and regenerates the used cleaning fluid from the cleaning booth.
This includes,
The cleaning conditions are set differently for each cleaning booth.
Characterized by a multi-stage cleaning device. In claim 1,
The cleaning conditions, which are set differently for each cleaning booth, are at least one of the composition of the cleaning liquid, concentration, oxidation reduction potential (ORP), temperature, booth length, and injection pressure.
Characterized by a multi-stage cleaning device. In claim 1 or claim 2,
The cleaning booth consists of a front cleaning booth and a rear cleaning booth,
The hydrofluoric acid concentration of the cleaning liquid is set higher in the front-stage cleaning booth than in the rear-stage cleaning booth.
Characterized by a multi-stage cleaning device. In claim 1 or claim 2,
The cleaning booth consists of a front cleaning booth and a rear cleaning booth,
The oxidation reduction potential (ORP) of the cleaning liquid is set lower in the front-stage cleaning booth than in the rear-stage cleaning booth.
Characterized by a multi-stage cleaning device. In claim 1 or claim 2,
The cleaning booth consists of a front cleaning booth and a rear cleaning booth,
The temperature of the cleaning liquid is set higher in the front cleaning booth than in the rear cleaning booth.
Characterized by a multi-stage cleaning device. In claim 1 or claim 2,
The cleaning booth consists of a front cleaning booth and a rear cleaning booth,
The booth length of each cleaning booth is set to be shorter than the front cleaning booth than the rear cleaning booth.
Characterized by a multi-stage cleaning device. In claim 1 or claim 2,
The object to be treated is a plate-shaped member that is transported while standing,
The transportation means is,
A plurality of downward transfer rolls that support and transfer the lower portion of the object to be treated,
A plurality of lateral transfer rolls that transfer while supporting the sides of the object to be processed
This includes,
The downward transfer roll is inclined toward the lateral transfer roll by a predetermined angle α with respect to the horizontal direction,
The lateral transport roll is inclined away from the downward transport roll by a predetermined angle β with respect to the vertical direction,
The object to be processed is transported with its center of gravity biased toward the lateral transport roll.
Characterized by a multi-stage cleaning device.