KR20240069863A - Method for manufacturing antistatic conductive PFA and antistatic conductive PFA products - Google Patents

Abstract

It relates to an antistatic conductive PFA that can increase the charging effect by increasing the charging direction of the conductive PFA in multiple directions to prevent product defects during the manufacturing process due to static electricity, and a method of manufacturing an antistatic conductive PFA product, (a) Raw material preparation step of preparing raw materials for fluoropolymer pellets by drying carbon nanotubes (CNT), carbon black (CB), and PFA base (Perfluoroalkoxy Base), (b) PFA base (Perfluoroalkoxy Base) adding carbon nanotubes (CNT), and carbon black (CB) to a stirrer and mixing them through the stirrer to create a mixture, and (c) adding the mixture to an extruder to produce fluorocarbon pellets through extrusion. It includes the step of generating, and has the effect of increasing the charging effect of conductive PFA by forming a charging path not only in the flow direction of the resin but also in the vertical direction in the conductive PFA product.

Description

Method for manufacturing antistatic conductive PFA and antistatic conductive PFA products}

The present invention relates to anti-static conductive PFA and a method of manufacturing anti-static conductive PFA products. More specifically, to prevent product defects during the manufacturing process due to static electricity, the charging effect is achieved by increasing the charging direction of conductive PFA in multiple directions. It relates to an antistatic conductive PFA that can be increased and a method of manufacturing an antistatic conductive PFA product.

In general, the semiconductor manufacturing process includes various processes such as forming a thin film on a semiconductor substrate such as a silicon wafer, forming a pattern, implanting impurity ions, and cleaning and etching unnecessary thin films.

In addition, many equipment such as spinners, bowls, chucks, substrate holders, wafer carriers, and nozzles are used in this semiconductor manufacturing process.

At this time, due to the nature of the semiconductor manufacturing process that requires a fine manufacturing process, static electricity generated from semiconductor equipment causes product defects and a decrease in product yield.

Therefore, equipment used in the semiconductor manufacturing process is made of conductive materials to remove static electricity.

For example, in Patent Document 1 below, a plurality of protrusions protrude from the outer circumferential surface and a hollow portion is provided to prepare a plurality of substrate support pipes made of fluororesin so that a plurality of substrates can be spaced apart from each other, and the substrate support pipes include: Preparing a pair of support plates made of fluoropolymer material to be joined at both ends, mounting the plurality of substrate support pipes on a pipe holder so that they are aligned at designated positions, and indenting to match the shape of the support plates. In a state of inserting the support plate into a suction unit having a formed concave inlet, applying negative pressure to the suction unit to bring the support plate into close contact with the wall of the concave inlet, thereby fixing the support plate in a predetermined position, the substrate A heating unit heated to a high temperature is brought into contact with one or more of the two ends of the support pipe and the joint portion of the support plate to which the substrate support pipe is joined to locally melt the substrate support pipe so that it can be coupled to the support plate. and, with the heating unit retracted, approaching the suction unit to both ends of the substrate support pipe and applying pressure to simultaneously fusion bond both ends of the plurality of substrate support pipes to the coupling portion of the support plate. A method of manufacturing a fluororesin substrate holder is disclosed.

For this reason, the fluororesin substrate holder, substrate holder manufacturing method, and manufacturing device used therein in Patent Document 1 below manufacture a fluororesin substrate holder that mounts multiple substrates using PFA material with excellent mechanical strength and chemical resistance, thereby eliminating harmful gases. There is an effect of producing a substrate holder with excellent quality in a short time while minimizing the amount of generated.

However, the fluoropolymer substrate holder, substrate holder manufacturing method, and manufacturing apparatus used therein in Patent Document 1 below cannot solve problems caused by static electricity because a charging path that induces electrostatic charges is not formed in the PFA material substrate holder.

In addition, Patent Document 2 below is applied to a substrate processing unit including a chuck member on which a substrate is placed, and a processing liquid supply member that supplies processing liquid toward the substrate placed on the chuck member, and the processing liquid supply member An antistatic bowl that accommodates the processing liquid supplied to the substrate on the chuck member and then released from the substrate, and at least a portion of it is made of a conductive material formed by mixing carbon nanotubes (CNTs) to remove static electricity. is presenting.

Through this, the antistatic bowl of Patent Document 2 below can eliminate the static electricity generated in the antistatic bowl by solving the static electricity problem of Patent Document 1 below, and as a result, the static electricity causes substrates such as wafers to be affected. It has the effect of preventing defects and foreign substances such as dust from sticking to the anti-static bowl.

However, in the antistatic bowl of Patent Document 2 below, as shown in FIG. 1, carbon nanotubes (CNTs) mixed and molded to remove static electricity form a charging path in the direction of the flow of molten resin within the bowl. As a result, it has a charging effect only in the flow direction of the resin, and there is a problem that the charging effect is minimal in a direction perpendicular to the flow direction of the resin.

In addition, Patent Document 2 below shows that carbon nanotubes (CNTs) mixed and molded into a bowl are brought to the surface during injection molding of the bowl, and are separated when physically contacted and appear as particles, and the generation of these particles is in the semiconductor process. There are problems that cause various defects and lower yields of semiconductor products.

Republic of Korea Patent No. 10-1148396 (announced on May 21, 2012) Republic of Korea Patent No. 10-2052536 (announced on December 5, 2019)

The purpose of the present invention is to provide a method for manufacturing antistatic conductive PFA and antistatic conductive PFA products that have a charging effect in all directions as well as the flow direction of the resin by diversifying the charging path of conductive PFA.

Another object of the present invention is to manufacture anti-static conductive PFA and anti-static conductive PFA products that can prevent particle generation by removing carbon nanotubes (CNTs) derived from the product surface during extrusion and injection molding of conductive PFA. It provides a method.

The method for manufacturing antistatic conductive PFA according to an embodiment of the present invention to achieve this technical problem is (a) carbon nanotube (CNT), carbon black (CB), and PFA base (Perfluoroalkoxy Base). Raw material preparation step of preparing raw materials for fluororesin pellets by drying, (b) PFA base (Perfluoroalkoxy Base), carbon nanotubes (CNT), and carbon black (CB) are put into a stirrer and mixed through the stirrer to form a mixture. It includes the step of generating, and (c) putting the mixture into an extruder and producing fluororesin pellets through extrusion processing.

In addition, in step (b) of the present invention, the carbon nanotubes (CNTs) are mixed with the PFA base at a weight ratio of 0.2% to 0.5% based on the weight of 100 wt% of the entire mixture, and the carbon black (CB) is added to the mixture. It is characterized by being mixed with the PFA base at a weight ratio of 5 to 15% based on the total weight of 100 wt%.

In addition, in the present invention, step (a) further includes preparing raw materials for fluororesin pellets by drying graphene (GF), and the graphene (GF) is added to the entire mixture at 100 wt% by weight. It is characterized by being mixed with the PFA base at a weight ratio of 0.1% to 0.8%.

In addition, in the present invention, after step (c), (d) melting the fluororesin pellets in an injection molding machine to injection mold the resin composition, and (e) removing particles from the surface of the resin composition. Includes more steps.

In addition, in the present invention, step (e) includes (e1) cooling the injection molded product to -30 to 50°C to cool and shrink the PFA base, and (e2) performing a polishing technique on the cooled injection molded product. It includes removing particles protruding from the injection molded product to the surface of the PFA base, and (e3) restoring the contracted state of the cooled injection molded product to room temperature.

In addition, the method for manufacturing an antistatic conductive PFA product according to an embodiment of the present invention includes (A) molding a product for semiconductor processing using a fluoropolymer composition, (B) cooling and shrinking the molded product, ( C) performing a polishing process on the shrunk molded product to polish the surface of the product, and (D) restoring the shrunk state of the polished molded product to a normal temperature state.

In addition, in the present invention, step (B) is characterized in that it is performed using the linear thermal expansion coefficient characteristics of each raw material constituting the fluororesin composition under temperature conditions of -30 to 50 ° C.

In addition, in the present invention, step (C) is characterized by removing particles of carbon nanotubes (CNT) and carbon black (CB) protruding from the surface of the molded product.

In addition, in the method of manufacturing an antistatic conductive PFA product according to the present invention, the fluororesin composition includes carbon nanotubes (CNT), carbon black (CB), and PFA base (Perfluoroalkoxy Base). Do this.

In addition, in the method of manufacturing an antistatic conductive PFA product according to the present invention, the carbon nanotubes (CNTs) are mixed with the PFA base at a weight ratio of 0.2% to 0.5% based on the weight of 100wt% of the entire mixture, and the carbon black (CB) ) is characterized in that it is mixed with the PFA base at a weight ratio of 5 to 15% based on 100 wt% of the entire mixture.

In addition, in the method for producing an antistatic conductive PFA product according to the present invention, the fluororesin composition further includes graphene (GF), and the graphene (GF) is contained in an amount of 0.1% to 0.1% based on 100 wt% of the total mixture. It is characterized by being mixed with PFA base at a weight ratio of 0.8%.

Additionally, in the present invention, the molded product includes a spinner, a bowl, a chuck, a substrate holder, a wafer carrier, and a nozzle. Additionally, in the present invention, step (D) is performed at room temperature.

As described above, the method of manufacturing anti-static conductive PFA and anti-static conductive PFA products according to the present invention diversifies the charging path of the conductive PFA to form a charging path not only in the flow direction of the resin but also in the vertical direction, thereby increasing the conductivity. It has the effect of increasing the charging effect of PFA.

In addition, the method for manufacturing antistatic conductive PFA and antistatic conductive PFA products according to the present invention prevents the generation of particles by removing carbon nanotubes (CNTs) derived from the product surface during extrusion and injection molding of conductive PFA. , this has the effect of preventing product defects and lower semiconductor yield.

Figure 1 is a diagram for explaining the conductivity characteristics of a conventional conductive PFA.
Figure 2 is a flowchart showing a method for manufacturing antistatic conductive PFA according to an embodiment of the present invention.
Figure 3 is a flowchart showing a method of manufacturing antistatic conductive fluororesin pellets according to an embodiment of the present invention.
FIG. 4 is a diagram for explaining a method of manufacturing the antistatic conductive fluororesin pellet of FIG. 3.
Figure 5 is a diagram for explaining the conduction characteristics of antistatic conductive PFA according to an embodiment of the present invention.
FIG. 6 is a diagram for explaining particles for the antistatic conductive PFA of FIG. 5.
FIG. 7 is a flowchart showing step (e) of FIG. 2 in detail.
FIG. 8 is a diagram for explaining step (e) of FIG. 2.
Figure 9 is a diagram for explaining the charging effect of anti-static conductive PFA according to an embodiment of the present invention.
Figure 10a is a diagram showing a test product using a conventional conductive PFA.
Figure 10b is a diagram showing a test product to which anti-static conductive PFA is applied according to an embodiment of the present invention.
Figure 11 is a diagram showing particle test results for conventional conductive PFA applied products.
Figure 12 is a diagram showing particle test results for products to which anti-static conductive PFA is applied according to an embodiment of the present invention.

Below, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily implement the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. In order to clearly explain the present invention in the drawings, parts unrelated to the description are omitted, and similar parts are given similar reference numerals throughout the specification.

Throughout the specification, when a part is said to “include” a certain element, this means that it may further include other elements rather than excluding other elements, unless specifically stated to the contrary.

Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the present invention with reference to the accompanying drawings.

The same reference numerals in each drawing indicate the same members.

FIG. 1 is a diagram illustrating the conductive characteristics of a conventional conductive PFA, and FIG. 2 is a flowchart showing a method of manufacturing an antistatic conductive PFA according to an embodiment of the present invention.

In addition, Figure 3 is a flowchart showing a method of manufacturing an antistatic conductive fluororesin pellet according to an embodiment of the present invention, and Figure 4 is a diagram for explaining the manufacturing method of an antistatic conductive fluororesin pellet of Figure 3. That is, FIGS. 3 and 4 show the process of steps (S10) to (S30) in FIG. 2.

The method of manufacturing antistatic conductive PFA according to an embodiment of the present invention is used in semiconductor processes such as spinners, bouls, chucks, substrate holders, wafer carriers, nozzles, etc. We provide conductive PFA for manufacturing anti-static conductive PFA products that can cause problems due to static electricity.

In general, the generation of static electricity in the semiconductor or display manufacturing process, which requires microscopic processes, causes product defects and a decrease in product yield. For this purpose, conventionally, as shown in FIG. 1, a conductive fluororesin product is provided by mixing a PFA base (Perfluoroalkoxy Base) 10 with carbon nanotubes (CNTs) 20.

At this time, the PFA (Perfluoroalkoxy) (10) refers to a copolymer of tetrafluoroethylene (TFE) and perfluoropropyl vinyl ether (PPVE) developed by DuPont in the United States in 1972.

DuPont Company released the PFA (10) under the brand name Teflon PFA, and since then, Japanese Novoflon PFA, Flon PFA, and Dyneon PFA have been developed.

This PFA (10) generally exists in the form of granules or powder, and its properties are similar to those of polytetrafluoroethylene (PTFE), but has the advantage of being able to be processed into a thermoplastic resin.

Additionally, PFA(10) is similar to polyperfluoroethylene propylene (FEP) in many respects, but exhibits better mechanical properties than FEP at high temperatures.

As such, PFA(10) is widely known as the best soluble copolymer because it has many advantages of PTFE and FEP, such as excellent weather resistance, corrosion resistance, and chemical resistance, and excellent transparency and mechanical strength. It is used in various fields.

In particular, PFA(10) is actively used in the semiconductor industry where the purity requirements for chemical substances are very strict due to its excellent properties as described above.

In addition, the carbon nanotube (CNT) 20 represents an allotrope of carbon having a cylindrical nanostructure in which carbon atoms are connected to each other in a hexagonal honeycomb shape. The carbon nanotubes 20 are made of nanotubes with a length-to-diameter ratio of 132,000,000:1, which represents the highest diameter ratio among materials known to date.

In addition, carbon nanotubes (20) have very unique thermal conductivity and mechanical and electrical properties, so they are used as additives for various structural materials. In addition, carbon nanotubes (20) have many unique properties, so they are used in various fields such as nanotechnology, electrical engineering, optics, and materials engineering. It is utilized.

Conventional conductive PFA manufactured by mixing carbon nanotubes (CNTs) 20 with the PFA base 10 is made by mixing carbon in the flow direction of the molten PFA resin during extrusion and injection molding, as shown in Figure 1. The shape of the nanotube (CNT) 20 is determined.

Therefore, in the flow direction of the resin, the carbon nanotubes (CNTs) 20 show a densely connected charging path 60, but in the direction perpendicular to the flow direction, the connection between the carbon nanotubes 20 is smooth. Since this is not done properly, the charging path 60 is not formed and is cut off.

For this reason, the conventional conductive PFA exhibits an excellent charging effect in the horizontal direction, which is the flow direction of the resin, but a problem occurs in which the charging effect is insignificant in the direction perpendicular to the flow direction of the resin.

The method for producing anti-static conductive PFA according to an embodiment of the present invention is provided to exhibit an excellent charging effect not only in the flow direction of molten PFA resin in extrusion and injection molding, but also in the direction perpendicular to the flow direction.

To this end, the method for manufacturing antistatic conductive PFA according to an embodiment of the present invention is as shown in Figures 2 to 4 (a) carbon nanotube (CNT) (20), carbon black (CB) ) (30), and the raw material preparation step (S10) of drying the PFA base (Perfluoroalkoxy Base) (10) to prepare the raw materials for the fluororesin pellets (50), (b) PFA base (Perfluoroalkoxy Base) (10) and carbon Step (S20) of adding nanotubes (CNT) (20) and carbon black (CB) (30) to a stirrer (1) and mixing them through the stirrer (1) to produce a mixture (S20), and (c) the mixture. It includes a step (S30) of inputting into the extruder 2 and producing fluororesin pellets 50 through extrusion processing.

That is, in the present invention, as shown in FIGS. 3 and 4, the PFA base 10, carbon nanotubes (CNT) 20, and carbon black 30 are mixed in a stirrer 1 according to a preset weight ratio. and extruded in the extruder 2 to produce fluororesin pellets 50 with conductive properties.

At this time, the carbon black (CB) 30 corresponds to soot, which is a fine carbon powder, and is generated through thermal decomposition or incomplete combustion of carbon-based compounds. Carbon black (30) has been used as a material for ink, ink, and paint since ancient times, and in the 20th century, it was used as a reinforcing agent for rubber, and its production is actively taking place along with the development of the rubber industry.

In addition, carbon black 30 has various properties such as reinforcing properties, coloring properties, weather resistance, chemical resistance, and electrical conductivity, and is used for purposes of preventing deterioration of polymer weather resistance and improving electrical conductivity, and as a carbon material.

In addition, in the present invention, in step (b), the carbon nanotubes (CNT) (20) are mixed at a weight ratio of 0.2% to 0.5% based on the weight of 100 wt% of the entire mixture, and the carbon black (CB) (30) ) is characterized by being mixed at a weight ratio of 5 to 15% based on 100 wt% of the entire mixture.

In addition, the method for producing antistatic conductive PFA according to an embodiment of the present invention further includes the step of drying graphene (GF) 40 in step (a) to prepare raw materials for fluororesin pellets 50. can do.

That is, as shown in FIGS. 2 and 3, carbon nanotubes (CNT) 20, carbon black 30, and graphene (GF) 40 are added to the PFA base 10 at a preset weight ratio. Accordingly, the mixture is mixed in the stirrer (1) and extruded in the extruder (2) to produce fluororesin pellets (50) with conductive properties.

In general, graphene (GF) (40) is one of the allotropes of carbon and consists of a structure in which carbon atoms are gathered together to form a two-dimensional plane. Additionally, in graphene 40, each carbon atom forms a hexagonal lattice and is composed of a honeycomb structure or honeycomb lattice in which carbon atoms are located at the vertices of the hexagon.

In addition, the graphene 40 is composed of a thin film with a thickness of 1 atom, and is very thin, with a thickness of up to 0.2 nm, and is characterized by high physical and chemical stability.

In addition, graphene 40 has a very high intrinsic electron mobility of 2000,000 cm ² /V·S, high thermal conductivity of ~5000 W/m·K, and Young's modulus of ~1.0 TPa, and further Because of its composition, the absorption of visible light is very low.

In addition, graphene 40 conducts electricity more than 100 times better than copper and can move electrons more than 100 times faster than single crystal silicon, the main material of semiconductors. In addition, graphene 40 is more than 200 times stronger than steel, has more than twice the thermal conductivity of diamond, which boasts the highest thermal conductivity, and has excellent elasticity, so it can maintain its electrical properties even when stretched or bent.

In the present invention, the graphene (GF) 40 is mixed with the PFA base 10 at a weight ratio of 0.1% to 0.8% based on 100 wt% of the entire mixture.

In addition, as shown in FIGS. 3 and 4, step (c) includes carbon nanotubes (CNTs) (20), carbon black (30), and graphene (GF) (40) on the PFA base (10). ) may further include a step (S31) of repeating the stirring and extrusion processes of steps (S20) to (S30) two to three times to increase the degree of dispersion.

In addition, after step (c), a step (S32) of vacuum packaging the extruded fluororesin pellets 50 may be further included.

Figure 5 is a diagram for explaining the conduction characteristics of antistatic conductive PFA according to an embodiment of the present invention.

As shown in FIG. 5, in the present invention, PFA base 10 is mixed with carbon nanotubes (CNT) 20, carbon black 30, and graphene (GF) 40 to produce PFA resin. ), carbon black (30) or graphene (GF) (40) mixed as a charging additive before the shape of the carbon nanotube (CNT) (20) is determined according to the flow direction of the PFA resin. Carbon nanotubes (CNTs) 20 are prevented from being formed in the flow direction, and are placed in spaces that cannot be filled by carbon nanotubes (CNTs) 20.

Therefore, while the conventional conductive PFA has a charging path formed only in the flow direction of the PFA resin, the antistatic conductive PFA according to the present invention includes a direction perpendicular to the flow direction as well as the flow direction of the PFA resin, as shown in Figure 5. A charging path is formed in all directions.

In addition, as shown in FIG. 2, the method for producing antistatic conductive PFA according to an embodiment of the present invention includes (d) melting the fluororesin pellet 50 in an injection molding machine after step (c) to prepare a resin composition. It further includes injection molding (S40), and (e) removing particles 80 from the surface of the resin composition (S50).

FIG. 6 is a diagram for explaining particles for the antistatic conductive PFA of FIG. 5, FIG. 7 is a flowchart showing step (e) of FIG. 2 in detail, and FIG. 8 is step (e) of FIG. 2. This is a drawing to explain.

In the method for producing antistatic conductive PFA according to an embodiment of the present invention, the resin composition produced through the processes of steps (a) to (d) is a resin composition when extruded and injection molded with a conductive resin, as shown in FIG. 6. Carbon nanotubes (CNT) (20), carbon black (30), and graphene (GF) (40) are derived from the surface of the product.

In addition, the additives 20, 30, 40 derived in this way are separated when physical contact occurs on the surface of the resin composition product, and the resulting particles 80 cause various defects and lower yield in the semiconductor process. Occurs.

Therefore, the present invention can remove particles 80 from the surface of the resin composition in advance through the particle 80 removal step (S50) of step (e).

In the present invention, step (e), as shown in Figures 7 and 8, (e1) cooling the injection molded product of the resin composition to -30 to 50 ° C to cool and shrink the PFA base (10) (S51) ), (e2) performing a polishing technique on the cooled injection molded product to remove particles 80 protruding from the surface of the PFA base 10 from the injection molded product (S52), and (e3) It includes a step (S53) of restoring the cooled injection molded product to room temperature.

That is, drawing (a) in FIG. 8 shows a state in which carbon nanotubes (CNT) (20), carbon black (30), and graphene (GF) (40) are derived from the surface of an injection molded product. In addition, figure (b) of FIG. 8 shows that the PFA base 10 was cooled and contracted (S51) by cooling the injection molded product of the resin composition to -30 to 50°C.

In general, the linear thermal expansion coefficient of the PFA base (10) is about 10x10 ^-5 /℃, and the linear thermal expansion of carbon nanotubes (CNT) (20), carbon black (30), and graphene (GF) (40) It has a relatively higher value than the coefficient.

Therefore, the method for producing antistatic conductive PFA according to an embodiment of the present invention uses the difference in linear thermal expansion coefficient to cool the injection molded product of the resin composition to -30 to -50 ° C (S51).

Due to this, in injection molded products of cooled resin compositions, the PFA base (10) has a relatively high content compared to carbon nanotubes (CNT) (20), carbon black (30), and graphene (GF) (40). Contraction occurs at a rate. That is, the carbon nanotubes (CNT) 20, carbon black 30, and graphene (GF) 40 protrude to a greater extent from the surface of the PFA base 10.

In this way, in a state in which the injection molded product of the resin composition is differentially shrunk, carbon nanotubes (CNT) (20) and carbon black ( 30), and graphene (GF) (40) is removed (S52).

In addition, the present invention removes the carbon nanotubes (CNT) 20, carbon black 30, and graphene (GF) 40 protruding from the surface of the product through the polishing technique, as shown in FIG. 8. As in (d), the injection molded product is restored to room temperature (S53).

That is, when the additives (20, 30, 40) protruding from the surface are removed through a polishing technique in a cooled state and restored to room temperature, inversely, carbon nanotubes (CNT) (20), depending on the difference in linear thermal expansion coefficient, are formed. The expansion rate of the PFA base (10) is higher than that of carbon black (30) and graphene (GF) (40), so the PFA base (10) is relatively similar to carbon nanotubes (CNT) (20) and carbon black. (30), and it protrudes outward compared to graphene (GF) (40).

Figure 9 is a diagram for explaining the charging effect of anti-static conductive PFA according to an embodiment of the present invention.

As shown in FIG. 9, the conductive PFA product produced through the particle 80 removal step (S50) of step (e) is the PFA base 10 when the electrostatic chemical solution 70 contacts the product surface. By connecting the chemical solution 70 to the additives 20, 30, and 40, which are charged substances under the surface, static electricity can be easily removed through the charging path 60.

Figure 10a is a diagram showing a test product to which a conventional conductive PFA is applied, and Figure 10b is a diagram showing a test product to which an antistatic conductive PFA is applied according to an embodiment of the present invention.

That is, Figures 10a and 10b are for testing the surface resistance values of products using conductive PFA and anti-static conductive PFA.

[Table 1] Surface resistance values for conventional conductive PFA

[Table 2] Surface resistance values for anti-static conductive PFA

[Table 1] and [Table 2] show the surface resistance values of conductive PFA measured using the test products of FIGS. 10A and 10B. That is, [Table 1] shows the results of measuring the surface resistance value for the product to which the conventional conductive PFA of FIG. 10a was applied, and [Table 2] shows the results of measuring the surface resistance value of the product to which the conventional conductive PFA of FIG. Indicates the surface resistance value.

Additionally, in [Table 1] and [Table 2], TYPE1 represents the surface resistance value measured on the same surface (top or bottom surface), and TYPE2 represents the surface resistance value measured through the top and bottom surfaces of the product. In other words, TYPE2 is a surface resistance value for measuring the charging path formed from the top to the bottom of the product.

At this time, the industry standard representing the charging effect of conductive PFA products is generally set at a surface resistance value of 10^6 (Ω) or less.

Therefore, as shown in TYPE1 in [Table 1], it can be confirmed that the conventional conductive PFA product exhibits an excellent charging effect for the surface resistance value (TYPE1) measured on the same surface.

However, as shown in TYPE2 in [Table 1], the surface resistance value measured from the charging path formed from the upper surface to the lower surface in the direction perpendicular to the flow direction of the resin is more than 10^11 (Ω), confirming that there is no charging effect. You can.

On the other hand, as shown in TYPE1 and TYPE2 in [Table 2], it can be seen that products using the antistatic conductive PFA of the present invention exhibit excellent antistatic effects of 10^6 (Ω) or less in both TYPE1 and TYPE2.

That is, it can be confirmed that the antistatic conductive PFA according to an embodiment of the present invention has an excellent antistatic effect not only in the flow direction of the resin but also in the direction perpendicular to the flow direction.

Figure 11 is a diagram showing the particle test results for a product to which a conventional conductive PFA is applied, and Figure 12 is a diagram showing the particle test results for a product to which an antistatic conductive PFA is applied according to an embodiment of the present invention.

That is, FIG. 11 shows the particle test results for FIG. 10A, and FIG. 12 shows the particle test results for FIG. 10B.

As shown in FIG. 11, in the case of a product using a conventional conductive PFA, it can be seen that black particles 80 appear in the shape of the pressed product on the surface of the product.

On the other hand, as shown in FIG. 12, in the case of a product to which anti-static conductive PFA according to an embodiment of the present invention is applied, it can be confirmed that particles 80 are not found on the product surface.

As such, the method of manufacturing antistatic conductive PFA and antistatic conductive PFA products according to an embodiment of the present invention has the effect of exhibiting an excellent charging effect not only in the direction of resin flow in the injection product, but also in all directions.

In addition, the method for manufacturing antistatic conductive PFA and antistatic conductive PFA products according to an embodiment of the present invention has the effect of preventing product defects and lower yield because particles 80 are not formed on the surface of the injection molded product. .

Although preferred embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and can be easily modified by a person skilled in the art from the embodiments of the present invention to provide equivalent equivalents. Includes all changes within the scope deemed acceptable.

1: Stirrer 2: Extruder
10: PFA base 20: Carbon nanotube (CNT)
30: Carbon Black 40: Graphene
50: Fluororesin pellet 60: Charging path
70: Chemical solution 80: Particles

Claims (12)

In the method of producing antistatic conductive PFA,
(a) Raw material preparation step of preparing raw materials for fluoropolymer pellets by drying carbon nanotubes (CNT), carbon black (CB), and PFA base (Perfluoroalkoxy Base);
(b) adding PFA base (Perfluoroalkoxy Base), carbon nanotubes (CNT), and carbon black (CB) to a stirrer and mixing them through the stirrer to create a mixture; and
(c) A method of producing conductive PFA for antistatic purposes, comprising the step of putting the mixture into an extruder and producing fluororesin pellets through extrusion.
In paragraph 1:
In step (b) above
The carbon nanotubes (CNTs) are mixed with the PFA base at a weight ratio of 0.2% to 0.5% based on 100 wt% of the total mixture,
A method of producing conductive PFA for antistatic purposes, characterized in that the carbon black (CB) is mixed with the PFA base at a weight ratio of 5 to 15% based on 100 wt% of the total mixture.
In paragraph 1:
Step (a) further includes preparing raw materials for fluororesin pellets by drying graphene (GF),
The graphene (GF) is a method of producing antistatic conductive PFA, characterized in that the graphene (GF) is mixed with the PFA base at a weight ratio of 0.1% to 0.8% based on 100 wt% of the total mixture.
In paragraph 1 or 3:
After step (c) above
(d) melting the fluororesin pellets in an injection molding machine to injection mold the resin composition; and
(e) further comprising removing particles from the surface of the resin composition,
Step (e) is
(e1) Cooling the injection molded product to -30~50℃ to cool and shrink the PFA base,
(e2) performing a polishing technique on the cooled injection molded product to remove particles protruding from the PFA base surface from the injection molded product, and
(e3) A method of manufacturing conductive PFA for antistatic purposes, including the step of restoring the shrinkage state of the cooled injection molded product to the room temperature state.
In the method of manufacturing an antistatic conductive PFA product,
(A) forming a product for semiconductor processing using a fluororesin composition;
(B) cooling and shrinking the molded product;
(C) performing a polishing process on the shrunk molded product to polish the product surface; and
(D) A method of manufacturing an antistatic conductive PFA product comprising the step of restoring the shrinkage state of the polished molded product to a state at room temperature.
In paragraph 5,
The step (B) is a method of manufacturing an antistatic conductive PFA product, characterized in that it is performed using the linear thermal expansion coefficient characteristics of each raw material constituting the fluororesin composition at a temperature of -30 to 50°C.
In paragraph 5 or 6:
The step (C) is to manufacture an antistatic conductive PFA product, characterized in that it removes particles of carbon nanotubes (CNT) and carbon black (CB) protruding from the surface of the molded product. method.
In paragraph 5,
The fluororesin composition is a method of producing an antistatic conductive PFA product including carbon nanotubes (CNT), carbon black (CB), and PFA base (Perfluoroalkoxy Base).
In paragraph 8:
The carbon nanotubes (CNTs) are mixed with the PFA base at a weight ratio of 0.2% to 0.5% based on 100 wt% of the entire mixture,
A method of manufacturing an antistatic conductive PFA product, characterized in that the carbon black (CB) is mixed with the PFA base at a weight ratio of 5 to 15% based on 100 wt% of the total mixture.
In paragraph 9:
The fluororesin composition further includes graphene (GF),
A method for producing an antistatic conductive PFA product, characterized in that the graphene (GF) is mixed with the PFA base at a weight ratio of 0.1% to 0.8% based on 100 wt% of the total mixture.
In paragraph 5,
The molded product is a method of manufacturing an antistatic conductive PFA product including a spinner, a bowl, a chuck, a substrate holder, a wafer carrier, and a nozzle.
In paragraph 5,
A method for producing an antistatic conductive PFA product, wherein step (D) is performed at room temperature.