KR20240054867A - 패키지 구조체, 장치 및 그 형성 방법 - Google Patents
패키지 구조체, 장치 및 그 형성 방법 Download PDFInfo
- Publication number
- KR20240054867A KR20240054867A KR1020230107710A KR20230107710A KR20240054867A KR 20240054867 A KR20240054867 A KR 20240054867A KR 1020230107710 A KR1020230107710 A KR 1020230107710A KR 20230107710 A KR20230107710 A KR 20230107710A KR 20240054867 A KR20240054867 A KR 20240054867A
- Authority
- KR
- South Korea
- Prior art keywords
- membrane
- subpart
- anchored
- edge
- cell
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 60
- 239000012528 membrane Substances 0.000 claims abstract description 476
- 238000004519 manufacturing process Methods 0.000 claims description 45
- 230000008569 process Effects 0.000 claims description 25
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 134
- 238000010586 diagram Methods 0.000 description 40
- 239000000463 material Substances 0.000 description 36
- 238000013022 venting Methods 0.000 description 24
- 238000013461 design Methods 0.000 description 20
- 239000012790 adhesive layer Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 16
- 239000000758 substrate Substances 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 229910052732 germanium Inorganic materials 0.000 description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 239000008207 working material Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 210000000613 ear canal Anatomy 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002259 gallium compounds Chemical class 0.000 description 2
- 150000002291 germanium compounds Chemical class 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 230000005236 sound signal Effects 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 101710097688 Probable sphingosine-1-phosphate lyase Proteins 0.000 description 1
- 101710105985 Sphingosine-1-phosphate lyase Proteins 0.000 description 1
- 101710122496 Sphingosine-1-phosphate lyase 1 Proteins 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000263 scanning probe lithography Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/02—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
- H04R19/013—Electrostatic transducers characterised by the use of electrets for loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/006—Interconnection of transducer parts
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Buffer Packaging (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18/048,027 US11943595B2 (en) | 2021-05-11 | 2022-10-19 | Sound producing cell and manufacturing method thereof |
| US18/048,027 | 2022-10-19 | ||
| US202363444577P | 2023-02-10 | 2023-02-10 | |
| US63/444,577 | 2023-02-10 | ||
| US18/358,907 | 2023-07-25 | ||
| US18/358,907 US20240022859A1 (en) | 2021-05-11 | 2023-07-25 | Package structure, apparatus and forming methods thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20240054867A true KR20240054867A (ko) | 2024-04-26 |
Family
ID=90828838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020230107710A KR20240054867A (ko) | 2022-10-19 | 2023-08-17 | 패키지 구조체, 장치 및 그 형성 방법 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2024060575A (ja) |
| KR (1) | KR20240054867A (ja) |
| TW (1) | TW202418846A (ja) |
-
2023
- 2023-08-17 KR KR1020230107710A patent/KR20240054867A/ko unknown
- 2023-09-08 JP JP2023146289A patent/JP2024060575A/ja active Pending
- 2023-10-11 TW TW112138746A patent/TW202418846A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2024060575A (ja) | 2024-05-02 |
| TW202418846A (zh) | 2024-05-01 |
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