KR20240049518A - Substrate storage container, manufacturing method thereof, and substrate support on the lid side - Google Patents

Abstract

The lid body 3 has a first regulating portion 36 on the lid side and a second regulating portion 37 on the lid side. The lid side substrate support portion 7 has a support portion side first regulating portion 76 and a support portion side second regulating portion 77, and slides from the first position to the second position with respect to the lid body 3 in the direction ( It is mounted on the lid body 3 by sliding it to D22). The lid side second regulating portion 37 is a lid side substrate support portion 7 on the opposite side D11 from the side of the substrate storage space 27 for positioning the lid side substrate support portion 7 in the first position. does not regulate the movement of In the first position, the lid side first regulating portion 36 allows movement of the support portion side first regulating portion 76 in the slide direction D22, and the support portion side first regulating portion 76 in the slide direction D22. Allows movement of the regulatory unit 77. In the second position, the lid side first regulating portion 36 regulates the movement of the support portion side first regulating portion 76 in the direction D21 opposite to the slide direction, and the movement of the support portion side first regulating portion 76 in the slide direction D22 is controlled. The movement of the second regulating portion 77 on the support side is regulated, and the second regulating portion on the lid side 37 regulates the movement of the substrate supporting portion 7 on the lid side toward the side D12 of the substrate storage space 27. .

Description

Substrate storage container, manufacturing method thereof, and substrate support on the lid side

The present invention relates to a substrate storage container, and particularly to a substrate storage container that accommodates a plurality of substrates, such as semiconductor wafers, in a parallel state. Additionally, the present invention relates to a method of manufacturing a substrate storage container and a lid side substrate support portion in the substrate storage container.

As a substrate storage container for storing substrates such as semiconductor wafers, one having a structure including a container body and a lid is known. The container body has a cylinder-shaped wall portion in which the container body opening is formed at one end and the other end is closed. A substrate storage space is formed within the container body. The substrate storage space is surrounded by walls and can accommodate a plurality of substrates. The container body is provided with an inner substrate support portion on the inner side of the substrate storage space.

The lid body is removable with respect to the container body opening, and closes the container body opening when mounted on the container body opening. When the lid body is mounted on the container body opening, a lid body-side substrate support portion (also called a "front retainer") is disposed and mounted on the inner side that faces the substrate storage space of the container body. The front retainer supports a plurality of substrates in cooperation with the substrate support portion on the inner side of the container body when the lid body is mounted on the container body opening.

As a form of attaching the front retainer to the lid body, there are a form in which the front retainer itself is deformed and inserted into the lid body (for example, see Patent Document 1), or a form in which the front retainer is slid and inserted into the lid body (for example, see Patent Document 1). For example, see Patent Document 2), there is a form in which the front retainer is press-fitted into the lid body, etc.

Patent Document 1: International Publication No. 2009/060782 Patent Document 2: Japanese Patent Laid-Open No. 2020-009981

In these mounting types, the front retainer (the substrate support portion on the lid body side) is inserted or press-fitted into the lid body in a certain shape, so it may be damaged due to shock, vibration, or deformation caused by the front retainer hitting an object. However, the press fit may become loose and the front retainer may fall out of the lid.

The purpose of the present invention is to provide a substrate storage container in which a lid-side substrate support portion mounted on a lid is difficult to remove from the lid, a manufacturing method thereof, and a lid-side substrate support portion.

The present invention has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and a plurality of substrates can be accommodated by the inner surface of the wall portion, and the substrate storage communicates with the container body opening portion. A container body in which a space is formed, a lid that is detachable from the container body opening and can close the container body opening, and a part of the lid body in which the container body opening is closed by the lid body. a lid side substrate support portion disposed in a portion opposite to the substrate storage space and capable of supporting edge portions of the plurality of substrates when the container body opening is closed by the lid body; , a first regulating portion on the lid side and a second regulating portion on the lid side, wherein the substrate support portion on the lid side has a first regulating portion on the support portion and a second regulating portion on the support portion, and is positioned at a first position with respect to the lid body. It is configured to be mounted on the lid body by sliding it to two positions in a predetermined slide direction, wherein the lid body-side second regulating portion is positioned on the side of the substrate storage space for positioning the lid body-side substrate support portion at the first position. The movement of the lid body-side substrate support portion to the opposite side is not restricted, and in the first position, the lid body-side first regulating portion allows movement of the support portion-side first regulating portion in the slide direction. , allowing movement of the support-side second regulating portion in the slide direction, and in the second position, the lid body-side first regulating portion allows movement of the support-side first regulating portion in a direction opposite to the sliding direction. In addition to regulating the movement of the second regulation portion on the support side in the slide direction, the second regulation portion on the lid side regulates the movement of the substrate support portion on the lid side toward the substrate storage space. It's about.

In addition, the lid side substrate support portion further includes a contact avoidance portion, and when viewed from a side opposite to the side of the substrate storage space, the contact avoidance portion is configured to avoid contact with the lid side second regulating portion, The lid side second regulating portion does not restrict movement of the lid side substrate support portion to the side opposite to the substrate storage space for positioning the lid side substrate support portion in the first position, and does not restrict movement of the lid side substrate support portion to the second position. In this case, when viewed from the side opposite to the side of the substrate storage space, the contact avoidance portion does not avoid contact with the lid side second regulating portion, so that the lid side second regulating portion is in the substrate storage space. It is desirable to regulate the movement of the substrate support portion on the lid side to the side.

In addition, it is preferable that the surface of the second regulating portion on the lid side opposite to the substrate storage space side is inclined toward the opposite direction to the slide direction so as to approach the substrate storage space side. .

Furthermore, in the first position, the side opposite to the side of the substrate storage space in the first regulating portion on the support portion side is in contact with the side of the substrate storage space in the first regulating portion on the lid side. desirable.

In addition, the lid body further includes a third regulating portion on the lid side, and when the first regulating portion on the support portion is deformed from the first position, the substrate support portion on the lid side moves to a side opposite to the side of the substrate storage space. In addition, it is preferable that the third regulating portion on the lid side regulates movement of the substrate support portion on the lid side to a side opposite to the side of the substrate storage space.

Additionally, the lid body and the lid body-side substrate support portion are preferably provided with an erroneous mounting prevention structure that prevents the lid body-side substrate support portion from being mounted on the lid body in the wrong direction.

In addition, the lid body-side substrate support portion includes a pair of first frame portions extending in a predetermined direction, a pair of second frame portions extending in a direction different from the predetermined direction, and the first frame portion. It has a leg portion to be connected and a substrate receiving portion formed on the leg portion, wherein the leg portion is connected to one of the leg portions connected to the first frame portion and to the other first frame portion. A pair of legs is formed by one of the legs not connected to the other leg, and the pair of legs is formed in the same number as the plurality of substrates stored in the substrate storage container, and one pair of the second frame portions includes: , it is preferable to connect the pair of first frame portions on both outer sides of the direction in which the pair of leg portions are parallel.

In addition, it is preferable that the lid side substrate support portion further includes a structure for improving operability of the slide at a position that does not interfere with the lid side second regulating portion in the first position.

In addition, the present invention is provided with a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and the inner surface of the wall portion can accommodate a plurality of substrates and communicates with the container body opening portion. A container body in which a substrate storage space is formed, a lid that is detachable from the container body opening and can close the container body opening, and a portion of the lid body that closes the container body opening by the lid body. a lid side substrate support portion disposed in a portion opposite to the substrate storage space when the lid is closed, and capable of supporting edge portions of the plurality of substrates when the container body opening is closed by the lid; The sieve has a first regulating portion on the lid side and a second regulating portion on the lid side, and the substrate support portion on the lid side has a first regulating portion on the support portion and a second regulating portion on the support portion, and is positioned at a first position with respect to the lid body. A method of manufacturing a substrate storage container configured to be mounted on the lid by sliding in a predetermined slide direction from the lid to a second position, wherein the lid side substrate support portion is positioned at the first position, In order to move to the side opposite to the side of the substrate storage space so that it is not restricted by the second regulating portion on the lid side, and position the substrate support portion on the lid side at the second position, the first regulating portion on the support portion and The support-side second regulating portion is moved in the slide direction so as not to be restricted by the lid-side first regulating portion, and in the second position, the support-side first regulating portion is positioned in a direction opposite to the sliding direction. Movement is regulated by the lid side first regulating portion, movement of the support portion side second regulating portion in the slide direction is regulated by the lid side first regulating portion, and movement of the lid body side toward the side of the substrate storage space is regulated by the lid side first regulating portion. It relates to a method of manufacturing a substrate storage container in which the movement of the substrate support portion forms an arrangement regulated by the second regulating portion on the lid side.

In addition, the lid body further includes a third regulating portion on the lid side, and by deforming the first regulating portion on the support portion from the first position, the substrate support portion on the lid side is moved to a side opposite to the side of the substrate storage space, Preferably, the movement of the substrate support portion on the lid side to the side opposite to the substrate storage space is regulated by the third regulating portion on the lid side.

In addition, the present invention is provided with a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and the inner surface of the wall portion can accommodate a plurality of substrates and communicates with the container body opening portion. A container body in which a substrate storage space is formed, a lid that is detachable from the container body opening and can close the container body opening, and includes a first regulating portion on the lid side and a second regulating portion on the lid side. A lid side substrate support portion disposed on the lid in a substrate storage container comprising: the lid side substrate support portion is a part of the lid body that supports the substrate when the container body opening is closed by the lid body. It is disposed in a portion facing the storage space, and can support edge portions of the plurality of substrates when the container body opening is closed by the lid body, and the lid body-side substrate support portion includes a support portion-side first regulating portion. and a second regulating portion on the support side, and is configured to be mounted on the lid by sliding in a predetermined slide direction from a first position to a second position with respect to the lid, and the lid body-side substrate support is positioned in the first position. The movement of the lid side substrate support portion to the side opposite to the side of the substrate storage space for positioning is not regulated by the lid body side second regulating portion, and in the first position, in the slide direction. The movement of the support-side first regulating portion and the support-side second regulating portion is not regulated by the lid body-side first regulating portion, and in the second position, the movement of the support portion in a direction opposite to the sliding direction The movement of the first regulating portion on the side is regulated by the first regulating portion on the lid side, and the movement of the second regulating portion on the support side in the slide direction is regulated by the first regulating portion on the lid side, and the substrate storage space The movement of the lid side substrate support portion to the side is related to the lid side substrate support portion regulated by the lid side second regulating portion.

According to the present invention, it is possible to provide a substrate storage container in which the lid side substrate support portion mounted on the lid body is difficult to remove from the lid body, a manufacturing method thereof, and the lid body side substrate support portion.

[Figure 1] is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 according to an embodiment of the present invention.
[Figure 2] is an upward perspective view showing the container body 2 of the substrate storage container 1 according to an embodiment of the present invention.
[Figure 3a] is a perspective view of the lid body 3 and the front retainer 7 in a state before sliding (first position) according to an embodiment of the present invention, as seen from the inside.
[Figure 3b] is a partially enlarged view of Figure 3a.
[FIG. 3C] is a rear view of the lid body 3 and the front retainer 7 in a state before sliding (first position) according to an embodiment of the present invention, as seen from the inside.
[Figure 3d] is a partially enlarged view of Figure 3c.
[Figure 3e] is a cross-sectional view along line AA shown in Figure 3c.
[Figure 3f] is a cross-sectional view taken along line BB shown in Figure 3c.
[Figure 4a] is a perspective view showing the front retainer 7 removed from Figure 3a.
[FIG. 4B] is a rear view showing the front retainer 7 removed from FIG. 3C.
[FIG. 4C] is a schematic perspective view of the lid side first regulating portion 36 and the lid side second regulating portion 37 in the embodiment.
[Figure 5a] is a perspective view of the front retainer 7 according to an embodiment of the present invention as seen from the inside (support side).
[Figure 5b] is a rear view of the front retainer 7 according to an embodiment of the present invention as seen from the inside (support side).
[FIG. 5C] A partially enlarged perspective view of the front retainer 7 according to an embodiment of the present invention as seen from the inside (support side), as seen from the opposite side to FIG. 5A.
[Figure 6a] is a cross-sectional view along line AA in the middle of the slide (corresponding to Figure 3e).
[Figure 6b] is a cross-sectional view along line BB in the middle of the slide (corresponding to Figure 3f).
[Figure 7a] is a partially enlarged view of the rear view of the lid body 3 and the front retainer 7 in the state after sliding (second position) as seen from the inside (corresponding to Figure 3d).
[Figure 7b] is a cross-sectional view along line AA in the state after sliding (corresponding to Figure 3e).
[Figure 7c] is a cross-sectional view along line BB in the state after sliding (corresponding to Figure 3f).
[Figure 8] is a schematic perspective view (corresponding to Figure 4c) of the lid side first regulating portion 36 and the lid side second regulating portion 37 in the modified form.

Hereinafter, the substrate storage container 1 according to this embodiment will be described with reference to the drawings. Figure 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to an embodiment of the present invention. Figure 2 is an upward perspective view showing the container body 2 of the substrate storage container 1 according to the embodiment of the present invention. Fig. 3A is a perspective view of the lid body 3 and the front retainer 7 in a state before sliding (first position) according to an embodiment of the present invention, as seen from the inside. Figure 3b is a partially enlarged view of Figure 3a. Fig. 3C is a rear view of the lid body 3 and the front retainer 7 in the state before sliding (first position) according to the embodiment of the present invention, as seen from the inside. Figure 3d is a partially enlarged view of Figure 3c. Figure 3e is a cross-sectional view taken along line A-A shown in Figure 3c. Figure 3f is a cross-sectional view taken along line B-B shown in Figure 3c. Fig. 4A is a perspective view showing the front retainer 7 removed from Fig. 3A. Fig. 4b is a rear view showing the front retainer 7 removed from Fig. 3c. Fig. 4C is a schematic perspective view of the lid side first regulating portion 36 and the lid side second regulating portion 37 in the embodiment. Fig. 5A is a perspective view of the front retainer 7 according to the embodiment of the present invention as seen from the inside (support side). Fig. 5B is a rear view of the front retainer 7 according to the embodiment of the present invention as seen from the inside (support side). Fig. 5C is a partially enlarged perspective view of the front retainer 7 according to the embodiment of the present invention as seen from the inside (support side), as seen from the opposite side to Fig. 5A. Fig. 6A is a cross-sectional view taken along line A-A (corresponding to Fig. 3E) in the state during the slide. Fig. 6b is a cross-sectional view taken along line B-B (corresponding to Fig. 3f) in the state during the slide. Fig. 7A is a partially enlarged view (corresponding to Fig. 3D) of the rear view of the lid body 3 and the front retainer 7 in the state after sliding (second position) as seen from the inside. Figure 7b is a cross-sectional view taken along line A-A (corresponding to Figure 3e) in the state after sliding. Fig. 7C is a cross-sectional view taken along line B-B (corresponding to Fig. 3F) in the state after sliding.

Here, for convenience of explanation, the direction from the container body 2 to the lid body 3, which will be described later (direction from the upper right to the lower left in Figure 1), is defined as the front direction D11, , the opposite direction is defined as the posterior direction (D12), and these combined are defined as the anteroposterior direction (D1). In addition, the direction from the lower wall 24 to the upper wall 23 (upward direction in FIG. 1), which will be described later, is defined as the upper direction D21, and the opposite direction is defined as the lower direction D22, and these are combined. Defined as the up and down direction (D2). In addition, the direction from the second side wall 26 to be described later toward the first side wall 25 (the direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and The opposite direction is defined as the right direction (D32), and these are combined to define the left and right directions (D3). In the main drawings, arrows indicating these directions are shown in the drawings.

In addition, the substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc. It is a thin one used in industry. The substrate W in this embodiment is a silicon wafer with a diameter of 300 mm.

As shown in Figures 1 and 2, the substrate storage container 1 is a process container for storing the substrate W made of the above-described silicon wafer and transporting it in the process within the factory. It is used as a shipping container for transporting substrates by land transport, air transport, sea transport, etc., and includes a container body (2) and a lid. It consists of (3). The container body 2 is equipped with a side substrate support portion 5 and an inner substrate support portion 6 (see Fig. 2, etc.). As shown in FIGS. 3A to 3F, a front retainer 7 serving as a lid body-side substrate support portion is mounted on the lid body 3.

The container body 2 has a container body opening 21 formed at one end and a cylindrical wall portion 20 whose other end is closed. ) is provided. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is formed surrounded by a wall 20 . A lateral substrate support portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

The side substrate support portions 5 are installed on the wall portion 20 so as to form a pair within the substrate storage space 27 . The side substrate support portion 5 contacts the edges of the plurality of substrates W when the container body opening 21 is not closed by the lid 3, thereby maintaining a predetermined distance between the adjacent substrates W. The edge portions of the plurality of substrates W can be supported in a parallel state with the substrates spaced apart at an interval of . On the inner side of the lateral substrate support portion 5, an inner substrate support portion 6 is formed integrally with the lateral substrate support portion 5.

The inner substrate support portion 6 (see Fig. 2, etc.) is installed on the wall portion 20 within the substrate storage space 27 to form a pair with a front retainer 7, which will be described later. The inner substrate support portion 6 contacts the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3, thereby holding the rear portion of the edge portion of the plurality of substrates W. I can support it.

The lid body 3 is detachable from the opening periphery 28 (Figure 1, etc.) forming the container body opening 21, and the container body opening 21 can be closed. The front retainer 7 is a part of the lid 3 and is attached to the portion facing the substrate storage space 27 when the container body opening 21 is closed by the lid 3. It is installed. The front retainer 7 is arranged to form a pair with the inner substrate support portion 6 inside the substrate storage space 27.

The front retainer 7 supports the front portions of the edges of the plurality of substrates W by contacting the edge portions of the plurality of substrates W when the container body opening 21 is closed by the lid 3. can do. The front retainer 7 supports the plurality of substrates W in cooperation with the inner substrate support portion 6 when the container body opening 21 is closed by the lid 3, thereby supporting the adjacent substrates W ) They are supported in parallel, spaced apart from each other at a predetermined interval.

The substrate storage container 1 is made of resin such as plastic. Examples of the material resin include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polybutylene terephthalate, polyether ether ketone, liquid crystal polymer, and alloys thereof. there is. When imparting conductivity to the resin of these molding materials, conductive substances such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymer are selectively added. It is also possible to add glass fiber or carbon fiber to increase rigidity.

Hereinafter, each part will be described in detail. As shown in Figure 1, the wall portion 20 of the container body 2 includes an inner wall 22, an upper wall 23, a lower wall 24, and a first side wall ( 25) and a second side wall 26. The inner wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-described materials and are formed as one piece.

The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the inner wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a container body opening 21 that is approximately rectangular in shape. It forms an opening peripheral portion 28.

The opening peripheral portion 28 is formed at one end of the container body 2, and the inner wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the inner wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26. forms a substrate storage space 27 surrounded by these. The container body opening 21 formed in the opening peripheral portion 28 is surrounded by the wall 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

As shown in FIG. 1, the portion of the upper wall 23 and the lower wall 24 near the opening peripheral portion 28 has a latch engagement that is recessed toward the outside of the substrate storage space 27. Concave portions 231A, 231B, 241A, and 241B are formed. A total of four latch engaging recesses 231A, 231B, 241A, and 241B are formed, one each near the left and right ends of the upper wall 23 and the lower wall 24.

As shown in FIG. 1, on the outer surface of the upper wall 23, a rib 235 is formed integrally with the upper wall 23. The ribs 235 increase the rigidity of the container body 2. Additionally, a top flange 236 is fixed to the central portion of the upper wall 23. The top flange 236 is a member that becomes a hanging part of the substrate storage container 1 when the substrate storage container 1 is hung on an AMHS (automatic wafer transfer system), PGV (wafer substrate transfer vehicle), etc.

As shown in FIG. 2, the lateral substrate support portion 5 is mounted on the first side wall 25 and the second side wall 26, respectively, and is formed in pairs in the left and right directions D3 to provide a substrate storage space. It is installed on the container body (2) in (27). Specifically, the side substrate support portion 5 is provided with a plate portion 51.

The plate portion 51 is plate-shaped and has a substantially bow shape. The plate portions 51 are provided on each of the first side wall 25 and the second side wall 26 in a total of 50 pieces, 25 pieces each, in the vertical direction D2. Adjacent plate portions 51 are arranged in a parallel positional relationship spaced apart from each other at intervals of 7 mm to 20 mm, preferably at intervals of 10 mm to 12 mm, in the vertical direction D2.

In addition, the 25 plate portions 51 installed on the first side wall 25 and the 25 plate portions 51 installed on the second side wall 26 have an opposing positional relationship in the left and right direction D3. I'm doing it. On the upper surface of the plate portion 51, convex portions 511 and 512 are formed. The substrate W supported on the plate portion 51 contacts only the protruding ends of the convex portions 511 and 512 and does not contact the plate portion 51 with its surface.

The lateral substrate support portion 5 of this configuration is configured to accommodate a plurality of substrates W in a state in which adjacent substrates W are spaced apart from each other at a predetermined interval and are positioned parallel to each other. ) can support the edges.

As shown in Fig. 2, the inner substrate support portion 6 is formed integrally with the container body 2 at the rear end of the plate portion 51 of the side substrate support portion 5. The inner substrate support portion 6 is formed in a corresponding number for each sheet of substrate W that can be stored in the substrate storage space 27, specifically 25 pieces. The inner substrate support portion 6 disposed on the first side wall 25 and the second side wall 26 has a paired positional relationship with the front retainer 7 described later in the front-back direction D1. When the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the inner substrate support portion 6 sandwiches and supports the end edge of the edge portion of the substrate W.

As shown in Fig. 1, the lid body 3 has a substantially rectangular shape that roughly matches the shape of the opening peripheral portion 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and by attaching the lid 3 to the opening periphery 28, the lid 3 is attached to the opening periphery 28. The container body opening 21 can be closed due to the positional relationship surrounded by the container body opening 21.

As shown in Figures 3A to 4C, the lid body 3 includes an inner plate-shaped portion 301 having a substantially rectangular plate shape, and a substantially rectangular plate shape. It is provided with an outer plate top part (302) and a main wall part (303). The surface on the rearward direction D12 side of the inner plate top portion 301 constitutes the inner surface of the lid body, and when the container body opening 21 is closed by the lid body 3, the container body ( Together with the inner surface of 2), a substrate storage space (27) is formed. At the peripheral portion of the inner plate-shaped portion 301, there is a front direction D11 (a direction perpendicular to the inner surface of the lid of the inner plate-shaped portion 301) along the peripheral portion so as to go around the peripheral portion. An extending main wall portion 303 is formed. The inner plate portion 301 and the main wall portion 303 are integrally formed and connected using, for example, polycarbonate. Additionally, the inner plate portion 301 and the main wall portion 303 are not limited to those made of polycarbonate.

As shown in FIG. 1 and the like, an outer plate-shaped portion 302 is disposed at the extending end of the main wall portion 303 in the front direction D11. The outer plate-shaped portion 302 is fixed to the inner plate-shaped portion 301 in a state in which the peripheral edge of the outer plate-shaped portion 302 is surrounded by the main wall portion 303. Additionally, the surface of the outer plate-shaped portion 302 in the front direction D11 constitutes the outer surface of the lid body.

A latch mechanism is formed on the lid body 3. The latch mechanism is installed near both left and right ends of the lid 3, and protrudes in the upward direction D21 from the upper side of the lid 3, as shown in FIGS. 1, 3A, and 3C. It is provided with two upper latch parts 32A that can be locked and two lower latch parts 32B that can protrude from the lower side of the lid body 3 in the downward direction D22. . An operating unit 33 is provided on the outer surface side of the lid body 3. By operating the operation portion 33 from the front of the lid 3, the upper latch portion 32A and the lower latch portion 32B are made to protrude from the upper and lower sides of the lid 3, or are protruded from the upper and lower sides. You can do it without being told to do it. The upper latch portion 32A protrudes from the upper side of the lid 3 in the upward direction D21 and engages the latch engaging recesses 231A and 231B of the container body 2, and the lower latch portion 32B is By protruding from the lower side of the lid body 3 in the downward direction D22 and engaging the latch engaging recesses 241A and 241B of the container body 2, the lid body 3 is attached to the opening peripheral portion of the container body 2 ( 28).

Inside the lid body 3, a retainer storage concave portion 305 is formed that is recessed toward the outside of the substrate storage space 27 (front direction D11). The front retainer 7 is mounted and fixed in the retainer storage concave portion 305. The retainer storage recess 305 has a pair of side walls 306, 306 in the left-right direction D3, and a bottom surface 307 (inner surface in the front direction D11).

The lid 3 further includes a lid side first regulating portion 36, a lid side second regulating portion 37, and a lid side third regulating portion 38. These will be explained in detail later.

The inner surface of the lid body 3 (the surface on the back side of the lid body 3 shown in Fig. 1), which is immediately adjacent to the opening peripheral portion 28 when the lid body 3 is closing the container body opening portion 21. On the surface opposite to the surface of the step portion (seal surface 281) formed at the position in the rear direction D12, that is, the peripheral edge of the inner plate top portion 301, the lid body 3 A rectangular annular seal member 4 is attached so as to go around the outer peripheral edge. The seal member 4 is arranged so as to circumnavigate the main wall portion 303 of the lid body 3. The seal member 4 is made of various thermoplastic elastomers such as elastically deformable polyester and polyolefin, fluorine rubber, and silicone rubber.

When the lid body 3 is mounted on the opening peripheral portion 28, the seal member 4 is fitted between the seal surface 281 of the container body 2 (see Fig. 1) and the inner surface of the lid body 3 to elastically deform. do. That is, by inserting the seal member 4 between the lid body 3 and the container body 2, the lid body 3 and the opening peripheral portion 28 are separated from each other without contacting each other. Can close the container body opening (21). By removing the lid body 3 from the opening peripheral portion 28, the substrate W can be loaded into and out of the substrate storage space 27 within the container body 2.

As shown in FIG. 1, container body leg portions 244 are formed on the outer surface of the lower wall 24. The container body leg portion 244 is integrally formed with both left and right edges of the lower wall 24, and extends in the front-back direction D1 along both left and right edges of the lower wall 24. When the container body 2 is placed on a horizontal flat surface with the lower wall 24 on the lower side (downward direction D22 side), the container body leg portion 244 contacts the flat surface to form the container body 2. supports stably.

[Details of the lid body and front retainer]

Hereinafter, with reference to FIGS. 3A to 8, the lid body 3 and the front retainer 7 will be described in detail. 3A to 4C, in the retainer storage concave portion 305 on the inside of the lid body 3, a front retainer 7 as a lid body side substrate support portion is provided. It is mounted and fixed in a stored form. As shown in FIGS. 5A to 5C, the front retainer 7 includes a pair of vertical frame portions 71 and 71 (first frame portion) extending in the vertical direction D2, A pair of retainer leg portions 72, 72 (leg portions) connected to each of the pair of vertical frame portions 71, 71, and a lid body-side substrate receiving portion 73 formed on the retainer leg portion 72 ( a substrate receiving portion), a horizontal frame portion 74 (second frame portion) extending in the left and right direction D3, a handle portion 75, and a first regulating portion on the support portion side. It is provided with a section 1 control section 76, a second control section 77 on the support side, and a contact avoidance section 78. They are molded integrally with resin and connected to each other.

The front retainer (7) is basically symmetrical. Therefore, there are cases where only one side of the left and right sides is explained and the explanation of the other side is omitted, but in that case, the explanation of one side is applied to the explanation of the other side. The left-right direction D3 is the left-right direction in the case of the lid 3 and the front retainer 7 arranged in the direction shown in Fig. 1, when viewed from the inside of the lid 3 as shown in Fig. 3a. , In the drawing, the left and right sides appear reversed.

The vertical frame portions 71 (71A, 71B) are formed as a pair in the left-right direction D3 so as to extend in parallel along the vertical direction D2 (predetermined direction).

The retainer leg portions 72 (72A) on the left direction (D31) side extend entirely toward the right rear from the vertical frame portions (71) (71A) on the left direction (D31) side. The substrate receiving portion 73 (73A) on the lid side on the left direction (D31) side is on the right side (D32), which is the tip of the retainer leg portion 72 (72A) on the left direction (D31) side. It is connected to the end. On the other hand, the retainer leg portion 72 (72B) on the right direction D32 side extends toward the left rear from the vertical frame portion 71 on the right direction D32 side. The substrate receiving portion 73 (73B) on the lid side on the right direction (D32) side is connected to the end on the left direction (D31) side, which is the distal end of the retainer leg portion 72 (72B) on the right direction (D32) side. there is. Accordingly, the lid body-side substrate receiving portion 73 is arranged at a predetermined distance from the inner surface of the lid body 3 in the rearward direction D12.

The retainer leg portion 72 includes one retainer leg portion 72 (72A) connected to one vertical frame portion 71 (71A) and the other vertical frame portion 71 ( A leg pair 72U is formed by the retainer leg portion 72 (72B) connected to one retainer leg portion 72 (72A) and the other retainer leg portion 72 (72B) not connected to one retainer leg portion 72 (72A). The leg pairs 72U are formed in the same number as the plurality of substrates W stored in the substrate storage container 1.

The retainer leg portion 72 is composed of a structure that is susceptible to elastic deformation, and is particularly prone to elastic deformation because it has a cantilever shape. Therefore, the retainer leg portion 72 receives an external force in the direction in which the lid side substrate receiving portion 73 approaches the inner surface of the lid body 3 (front direction D11). It is possible to displace the lid body-side substrate receiving portion 73 by elastically deforming in response to an external force.

The horizontal frame portions 74 are formed in pairs in the up-down direction D2 so as to extend in parallel along the left-right direction D3 (a direction different from the predetermined direction). A pair of horizontal frame parts 74, 74 is a pair of vertical frame parts 71, 71 on the outer sides of both sides of the direction in which the pair of leg parts 72U are parallel (up and down direction D2). Connect. The horizontal frame portion 74 on the upward direction D21 side connects the upper ends of a pair of vertical frame portions 71, 71 in the left and right directions D3, and the horizontal frame portion 74 on the downward direction D22 side The horizontal frame portion 74 connects the lower ends of a pair of vertical frame portions 71, 71 in the left and right direction D3.

The handle portion 75 is formed on the outer portion of the pair of vertical frame portions 71 in the left-right direction D3. The handle portion 75 protrudes in the rearward direction D12 and is formed in plural pieces spaced apart in the vertical direction D2. The handle portion 75 is formed at a position that does not interfere with the second regulating portion 37 on the lid side in the state before the slide (first position) as shown in FIGS. 3D to 3F, and is used to improve the operability of the slide. This is an example of “structure.” The structure for improving the operability of the slide is typically a protruding portion such as the handle portion 75, but is not limited to this and includes a concave portion, a concave-convex portion, and a holding force. A structure that improves friction, a structure that improves friction, etc. may be used.

The support portion-side first regulating portion 76 is formed on the outer portion of the pair of vertical frame portions 71 in the left-right direction D3. The support side first regulating portion 76 is disposed at a position corresponding to the lid side first regulating portion 36 of the lid body 3. As for the support part side first regulating part 76, only one is formed in the vertical direction D2 at substantially the center position in the vertical direction D2. The support portion side first regulating portion 76 has a base portion 767 protruding from the vertical frame portion 71 in the rearward direction D12, and an upward direction from the rear end of the base portion 767. It has an extension part 766 extending to (D21) and a coming-off part 768. The end portion of the extension portion 766 on the front direction D11 side (which is also the end portion on the front direction D11 side of the support portion side first regulating portion 76) is designated as “first end section” (Section 1). It is called “1st part (761)”. The first end 761 is located in the rear direction D12 than the surface of the vertical frame portion 71 in the rear direction D12. The end of the extension portion 766 in the upward direction D21 is referred to as the “third end portion 763.” In this specification, “end” may be planar (flat, curved) or convex (unless otherwise specified, Same hereafter).

The missing portion 768 is formed by noduling a portion overlapping the extension portion 766 of the vertical frame portion 71 when viewed in the front direction D11. The missing portion 768 is a notch portion that is released outward in the left-right direction D3 and is knotted in the front-back direction D1. The removal portion 768 is disposed at a position corresponding to the first regulating portion 36 on the lid body side of the lid body 3.

The second regulating portion 77 on the support portion is formed on the outer portion of the pair of vertical frame portions 71 in the left-right direction D3. The second regulating portion 77 on the support portion protrudes in the rearward direction D12 and is adjacent to the first regulating portion 76 on the support portion side in the vertical direction D2. In detail, the fourth end 774, which is the end of the support part side second regulating part 77 in the downward direction D22, is the support part side first regulating part 76 in the vertical direction D2. It faces the third end (763).

The contact avoidance portion 78 is formed on the outer portion of the pair of vertical frame portions 71 in the left and right direction D3. The contact avoidance portion 78 is a notch portion that is released outward in the left-right direction D3 and is nodulated in the front-back direction D1. The contact avoidance portion 78 is disposed at a position corresponding to the second regulating portion 37 on the lid body side of the lid body 3.

Next, details of the lid body 3 will be described. In the retainer storage concave portion 305 of the lid body 3, a lid body side first regulating portion (lid body section 1 view portion) 36 and a lid side side second regulating portion (lid body section 2 view portion portion). (37) and a lid side third regulation part (38) are formed.

The lid body-side first regulating portion 36 is formed on each of a pair of side walls 306, 306 in the left-right direction D3 in the retainer storage concave portion 305, and protrudes inward in the left-right direction D3. It is done. The lid side first regulating portion 36 is formed at approximately the center position in the vertical direction D2 corresponding to the support portion side first regulating portion 76. As shown in FIGS. 3F and 4C, the lid body-side first regulating portion 36 is on the side in the front direction D11 when viewed in a cross section perpendicular to its protruding direction (i.e., left-right direction D3). The first end 361 is the end, the second end 362 is the end in the rear direction D12, the third end 363 is the end in the upper direction D21, and the lower direction ( It has a fourth end 364, which is an end on the side of D22). In this embodiment, the first end 361 and the second end 362 are planar. The third end 363 and the fourth end 364 are convex or curved.

The lid body side second regulating portion 37 is formed on each of a pair of side walls 306, 306 in the left and right direction D3 of the retainer storage concave portion 305, and protrudes inward in the left and right direction D3. . As shown in FIGS. 3F and 4C, the lid body-side second regulating portion 37 is on the side in the front direction D11 when viewed in a cross section perpendicular to its protruding direction (i.e., left-right direction D3). It has a first side 371, which is the side of. A plurality of second regulating portions 37 on the lid side are formed on the side wall 306 of the retainer storage concave portion 305, spaced apart in the vertical direction D2.

The lid body-side third regulating portion 38 is formed on the bottom surface 307 of the retainer storage concave portion 305 and protrudes in the rearward direction D12. The lid body-side third regulating portion 38 extends inward in the left-right direction D3 from each of the pair of side walls 306, 306 in the left-right direction D3. Additionally, the arrangement or cross-sectional shape of the lid side third regulating portion 38 is not limited as long as the function of the lid side third regulating portion 38 is exercised.

The front retainer 7 slides in a predetermined slide direction from the first position (see FIGS. 3D to 3F) to the second position (see FIGS. 7A to 7C) with respect to the lid body 3, thereby opening the lid. It is configured to be mounted on the sieve (3). The predetermined slide direction is downward (D22) in this embodiment.

The first position is the position before the slide, and in the present embodiment, as shown in FIGS. 3A to 3F, the front retainer 7 is moved in the forward direction (D11) toward the retainer storage recess 305 of the lid 3. ), the position where the lid side second regulating portion 37 does not regulate the movement of the front retainer 7 (the lid side second regulating portion 37 is inserted into the contact avoidance portion 78) , the position at which the lid side first regulating portion 36 is inserted into the missing portion 768 of the support portion side first regulating portion 76). Additionally, the first position is at the first regulating portion 76 on the support portion side when the front retainer 7 is moved in the forward direction D11 toward the retainer storage concave portion 305 of the lid body 3. The first end 761, which is on the opposite side (front side, front direction D11) from the side of the substrate storage space 27, is on the side of the substrate storage space 27 in the first regulating portion 36 on the lid side ( This is a position where movement of the front retainer 7 in the front direction D11 is temporarily stopped by contacting the second end 362 in the rear direction D12.

The second regulating portion 37 on the lid side is a front retainer (front retainer) on the side opposite to the side of the substrate storage space 27 (front side, front direction D11) for positioning the front retainer 7 in the first position. 7) Do not regulate movement. Looking at it differently, the movement of the front retainer 7 to the side opposite to the side of the substrate storage space 27 (front side, front direction D11) to position the front retainer 7 in the first position is to move the front retainer 7 to the side of the lid body. Not regulated by the Second Regulatory Department (37).

In the first position, the lid side first regulating portion 36 allows movement of the support portion side first regulating portion 76 in the slide direction (downward direction D22) and also allows movement of the support portion side first regulating portion 76 in the slide direction (downward direction D22). Allows movement of the second regulating portion 77 on the support side to D22)). Viewed differently, the movement of the support-side first regulating portion 76 and the support-side second regulating portion 77 in the slide direction (downward direction D22) in the first position is caused by the movement of the lid side first regulating portion 36. ) is not regulated by.

From the first position shown in FIGS. 3D to 3F, etc., the first regulating portion 76 on the support side is deformed in the rearward direction D12 as shown in FIGS. 6A and 6B, so that the front retainer 7 moves into the substrate storage space. In addition to moving to the side opposite to the side of (27) (front, front direction (D11)), the lid side third regulating portion 38 moves to the side opposite to the side of the substrate storage space 27 (front, front direction (D11)). Regulates the movement of the front retainer (7) to D11)). In detail, when the support side first regulating portion 76 is deformed, parts of the front retainer 7 other than the support side first regulating portion 76 can move in the front direction D11. And, when the parts of the front retainer 7 other than the first regulating portion 76 on the support side come into contact with the third regulating portion 38 on the lid side, they cannot move in the front direction D11. Looking at it differently, parts of the front retainer 7 other than the support side first regulating portion 76 can move in the forward direction D11 until they come into contact with the lid body side third regulating portion 38. In addition, in this specification, "regulating movement" is typically realized by contact between members, but is not limited to contact, and is not limited to cases where there is a gap or is not always in contact within the scope of technical common sense. However, it includes forms that come into contact when moved slightly.

The second position is the position after the slide, and in the present embodiment, as shown in FIGS. 7A to 7C, the lid body-side first regulating portion 36 moves in the direction opposite to the slide direction (upward direction D21). It is a position that regulates the movement of the support-side first regulating portion 76 in the slide direction (downward direction D22) and also regulates the movement of the support-side second regulating portion 77 in the slide direction (downward direction D22). Additionally, the second position is a position where the second regulating portion 37 on the lid side regulates the movement of the front retainer 7 toward the side of the substrate storage space 27 (backward, rearward direction D12).

Looking at it differently, in the second position, the movement of the support side first regulating portion 76 in the direction opposite to the slide direction (upward direction D21) is regulated by the lid side first regulating portion 36. , the movement of the second regulating portion 77 on the support side in the slide direction (downward direction D22) is regulated by the first regulating portion 36 on the lid side, and is located on the side (rear, rear) of the substrate storage space 27. The movement of the front retainer 7 in the direction D12 is regulated by the second regulating portion 37 on the lid body side.

The lid body 3 and the front retainer 7 are provided with an incorrect mounting prevention structure that prevents the front retainer 7 from being mounted on the lid body 3 in the wrong direction. In this embodiment, the movement of the front retainer 7 to the side opposite to the side of the substrate storage space 27 (front side, front direction D11) to position the front retainer 7 in the first position is This is realized by inserting all of the lid side second regulating portions 37 into the contact avoidance portion 78 and not being regulated by the lid side second regulating portions 37. Only when the front retainer (7) is mounted on the lid body (3) in the correct orientation, the lid body side second regulating portion 37 is inserted so that all the lid body side second regulating portions 37 are inserted into the contact avoidance portion 78. and a contact avoidance portion 78 is disposed. For example, if the front retainer 7 is attempted to be mounted on the lid body 3 in the wrong direction, part or all of the second regulating portion 37 on the lid body side will not be inserted into the contact avoidance portion 78 and the vertical frame portion 71 ) contact. Therefore, the front retainer 7 cannot be mounted on the lid body 3. This is a structure to prevent incorrect installation.

[An example of a manufacturing method of the substrate storage container 1 of the embodiment]

Next, an example of a manufacturing method (a method of attaching the front retainer 7 to the lid 3) of the substrate storage container 1 of the embodiment will be described. In order to position the front retainer 7 in the first position, the front retainer 7 is placed in the substrate storage space ( Move to the opposite side (front, anterior direction (D11)) from the side in 27).

In detail, the lid side second regulating portion 37 is inserted into the contact avoidance portion 78, and the lid side first regulating portion 36 is inserted into the missing portion 768 of the support side first regulating portion 76. is inserted into And the first end portion 761 on the side opposite to the side of the substrate storage space 27 in the first regulating portion 76 on the support side (front side, front direction D11) is the first regulating portion 36 on the lid side. ), the movement of the front retainer 7 in the front direction D11 is temporarily stopped by contacting the second end 362 on the side (rear, rear direction D12) of the substrate storage space 27. .

As shown in FIGS. 6A and 6B, by deforming the support portion side first regulating portion 76 from the first position, the front retainer 7 is moved to the opposite side (front, front direction) from the side of the substrate storage space 27. (D11)), and the movement of the front retainer (7) to the side opposite to the side of the substrate storage space (27) (front side, forward direction (D11)) is regulated by the third regulating portion (38) on the lid side. I order it. In detail, when the support side first regulating portion 76 is deformed, parts of the front retainer 7 other than the support portion side first regulating portion 76 can move in the front direction D11. And, if the parts of the front retainer 7 other than the first regulating portion 76 on the support side come into contact with the third regulating portion 38 on the lid side, they will not be able to move in the front direction D11.

In order to position the front retainer 7 in the second position, the support side first regulating portion 76 and the support side second regulating portion 77 are slid so as not to be restricted by the lid side first regulating portion 36. Move it in the direction (downward direction (D22)).

As shown in FIGS. 7A to 7C, in the second position after sliding, the movement of the first regulating portion 76 on the support side in the direction opposite to the sliding direction (upward direction D21) is the first regulating portion 76 on the lid side. It is regulated by the first regulating portion 36, and the movement of the second regulating portion 77 on the support side in the slide direction (downward direction D22) is regulated by the first regulating portion 36 on the lid side, and The movement of the front retainer 7 toward the storage space 27 (rear side, rear direction D12) forms an arrangement regulated by the second regulating portion 37 on the lid body side. Accordingly, the front retainer 7 is mounted on the lid body 3, and a part of the substrate storage container 1 is manufactured.

According to the substrate storage container 1 according to the present embodiment having the above configuration, the following effects can be obtained.

The substrate storage container 1 of the embodiment has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed, and the inner surface of the wall portion 20 has a plurality of The container body 2 is formed with a substrate storage space 27 that can accommodate the substrate W and communicates with the container body opening 21, and is removable with respect to the container body opening 21, and the container body opening (21) is formed. A lid 3 that can close 21), and a part of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. and a lid side substrate support portion (front retainer 7) capable of supporting the edge portions of the plurality of substrates W when the container body opening 21 is closed by the lid 3. The lid body 3 has a first regulating portion 36 on the lid side and a second regulating portion 37 on the lid side, and the front retainer 7 has a first regulating portion 76 on the support side and a second regulating portion on the support portion. It is provided with a regulating portion 77 and is configured to be mounted on the lid 3 by sliding in a predetermined slide direction (downward direction D22) from the first position to the second position with respect to the lid 3. . The second regulating portion 37 on the lid side is a front retainer (front retainer) on the side opposite to the side of the substrate storage space 27 (front side, front direction D11) for positioning the front retainer 7 in the first position. 7) Without restricting the movement, in the first position, the lid side first regulating portion 36 allows movement of the support portion side first regulating portion 76 in the slide direction (downward direction D22). In addition, movement of the second regulating portion 77 on the support side in the slide direction is permitted. In the second position, the lid side first regulating portion 36 regulates movement of the support portion side first regulating portion 76 in the direction opposite to the slide direction (upward direction D21), and the slide The movement of the second regulating portion 77 on the support side in the direction (downward direction D22) is regulated, and the second regulating portion 37 on the lid side is located on the side (backward, rearward direction) of the substrate storage space 27. Regulates the movement of the front retainer (7) to D12)).

Therefore, according to the substrate storage container 1 of the present embodiment, the front retainer 7 mounted on the lid 3 is difficult to come off from the lid 3. Specifically, in the second position, the direction opposite to the slide direction is achieved through the cooperation of the lid side first regulating portion 36, the lid side second regulating portion 37, and the support portion side first regulating portion 76. Since it regulates the movement of the front retainer 7 in the (upward direction (D21)), slide direction (downward direction (D22)), and side of the substrate storage space 27 (rear, rear direction (D12)), the lid It is difficult for the front retainer (7) mounted on the sieve (3) to be removed from the lid body (3).

In addition, compared to the form in which the front retainer 7 is non-separably mounted on the lid body 3, the front retainer 7 can be moved in a different direction from the slide direction by lifting or breaking the first regulating portion 76 on the support side. It can be slid in the opposite direction (upward direction (D21)). Therefore, it is easy to separate and discard or recycle the front retainer 7.

The lid side first regulating portion 36 in the lid body 3 and the support portion side first regulating portion 76 in the front retainer 7 are one in the vertical direction D2 and one in the vertical direction D2. ) is formed almost in the central position of. Therefore, the position of the front retainer 7 in the vertical direction D2 can be easily adjusted.

In the embodiment, the front retainer 7 further includes a contact avoidance portion 78. When viewed from the side opposite to the side of the substrate storage space 27 (front, front direction D11), the contact avoidance portion 78 is configured to avoid contact with the second regulating portion 37 on the lid side, so that the lid The body-side second regulating portion 37 controls the front retainer 7 on the side opposite to the side of the substrate storage space 27 (front side, front direction D11) for positioning the front retainer 7 in the first position. ) does not regulate the movement of In the second position, when viewed from the side opposite to the side of the substrate storage space 27 (front, front direction D11), the contact avoidance portion 78 avoids contact with the second regulating portion 37 on the lid side. By the configuration, the second regulating portion 37 on the lid side regulates the movement of the front retainer 7 toward the side of the substrate storage space 27 (backward, rearward direction D12).

The front retainer 7 further includes a contact avoidance portion 78, so that the front retainer (78) is provided on the side opposite to the side of the substrate storage space 27 (front side, front direction D11) for positioning in the first position. In addition to not restricting the movement of 7), the movement of the front retainer 7 toward the side of the substrate storage space 27 in the second position (rear, rear direction D12) is regulated, that is, forward and backward. When it is necessary to move the front retainer 7 in the direction D1, it can be moved, and when it is necessary to regulate the movement of the front retainer 7, it can be easily implemented.

In the embodiment, in the first position, the first end 761 is on the opposite side (front side, front direction D11) from the side of the substrate storage space 27 in the support side first regulating portion 76. is in contact with the second end 362 on the side (rear, rear direction D12) of the substrate storage space 27 in the lid side first regulating portion 36. Therefore, by moving the front retainer 7 to the side opposite to the side of the substrate storage space 27 (front, front direction D11) and stopping the movement at the contact position, the first state before sliding can be easily formed. can do.

In the embodiment, the lid body 3 is further provided with a third regulating portion 38 on the lid body side. By deforming the first regulating portion 76 on the support side from the first position, the front retainer 7 moves to the side opposite to the side of the substrate storage space 27 (front side, front direction D11), and the lid The body-side third regulation portion 38 regulates movement of the front retainer 7 to the side opposite to the substrate storage space 27 (front, forward direction D11).

When mounting the front retainer 7 to the lid 3, the first regulating portion 76 on the support side is deformed from the first position to move the front retainer 7 to the third position on the lid body side. It can be moved to the second position by bringing it into contact with the regulating portion 38 and then sliding the front retainer 7 in the slide direction (downward direction D22). By requiring such a step-by-step mounting operation, it is possible to prevent the front retainer 7 from sliding, for example, when mounting the front retainer 7 to the lid body 3 is not intended.

In the embodiment, the front retainer 7 includes a pair of vertical frame portions 71 (71A, 71B) extending in a predetermined direction (up and down direction D2) and a direction different from this predetermined direction ( A pair of horizontal frame parts 74, 74 extending in the left and right direction (D3), a retainer leg part 72 connected to the vertical frame part 71, and a lid body side formed on the retainer leg part 72. A substrate receiving portion 73 is provided. The retainer leg portion 72 is connected to one retainer leg portion 72A, which is connected to one vertical frame portion 71A, and to the other vertical frame portion 71B, and to one retainer leg portion 72A. The other retainer leg portion 72B that is not connected constitutes a leg pair 72U, and the leg pair 72U is formed in the same number as the plurality of substrates W stored in the substrate storage container 1. A pair of horizontal frame parts 74, 74 connects a pair of vertical frame parts 71A, 71B on both outer sides of the direction in which the pair of legs 72U are parallel (up and down direction D2).

Since the horizontal frame portion 74 can increase the rigidity of the front retainer 7 in the left and right directions D3, the leg pair 72U, which has high flexibility and is easily deformed, can be adopted.

The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope described in the claims.

Fig. 8 is a schematic perspective view (corresponding to Fig. 4C) of the lid side first regulating portion 36 and the lid side second regulating portion 37 in the modified form. In the modified form shown in Fig. 8, the first surface is a surface on the side opposite to the side of the substrate storage space 27 in the second regulating portion 37 on the lid side (front side, front direction D11). 371 is inclined so as to approach the side (rear, back direction D12) of the substrate storage space 27 as it faces the opposite direction to the slide direction (upward direction D21). The first surface 371 is inclined in this way, so that when the front retainer 7 is slid in the slide direction (downward direction D22), the vertical frame portion 71 of the front retainer 7 and the lid body side are aligned. A state in which the two regulating portions 37 overlap becomes easier to form (easier to slide, easier to move to the second position).

The predetermined slide direction is not limited to the downward direction D22, and may be, for example, the upward direction D21. The predetermined direction in which the vertical frame portion 71 extends is not limited to the vertical direction D2. The “direction other than the predetermined direction” in which the horizontal frame portion 74 extends is not limited to the left-right direction D3.

The direction of deformation of the first regulating portion 76 on the support side from the first position is not limited to the rear direction D12, and may be, for example, inside the left and right direction D3. In that case, it is preferable that the first regulating portion 76 on the support side has a configuration that is easily deformed inward in the left-right direction D3.

In the embodiment, the leg pair 72U is composed of (cantilever-shaped) retainer leg portions 72 (72A) and retainer leg portions 72 (72B) separated in the left and right directions D3. Not limited. One retainer leg portion 72 (72A) and the other retainer leg portion 72 (72B) may be connected (if necessary, via the lid side substrate receiving portion 73). In this configuration, the horizontal frame portion 74 can be omitted.

In addition, the shapes of the container body and lid body and the number and dimensions of substrates that can be stored in the container body are determined by the shape of the container body 2 and the lid body 3 in this embodiment and the number of substrates that can be stored in the container body 2. There is no limitation to the number or dimensions of the substrate W. Additionally, the substrate W in this embodiment was a silicon wafer with a diameter of 300 mm, but it is not limited to this value.

In addition, in the present embodiment, the inner substrate support portion is provided with an inner substrate support portion 6 formed integrally with the container body 2 at the rear end of the plate portion 51 of the lateral substrate support portion 5. It is not limited to For example, the inner substrate support portion may not be formed integrally with the container body, but may be constructed as a separate body.

1 Substrate storage container
2 Container body
20 wall
21 Container body opening
27 Board storage space
28 Opening periphery
3 Lid body
36 Lid body first regulatory department
361 first end
362 second end
363 third end
364 4th end
37 Lid body side 2nd regulatory department
371 page 1
38 Lid body side 3rd regulatory department
7 Lid side substrate support (front retainer)
71, 71A, 71B vertical frame part (first frame part)
72, 72A, 72B retainer leg portion (leg portion)
72U pair of legs
73 Lid side substrate receiving portion (substrate receiving portion)
74 Second frame part (horizontal frame part)
75 Handle section (structure to improve slide operability)
76 First regulatory section on the support side
761 first end
763 third end
766 extension
767 donation
768 missing
77 Second regulatory section on the support side
774 4th end
78 Contact avoidance area
D1 forward and backward
D11 Front direction (opposite side to the board storage space)
D12 rear direction (board storage space side)
D2 Up and down direction (predetermined direction, parallel direction)
D21 upward direction (opposite direction to slide direction)
D22 downward direction (slide direction)
D3 Left and right direction (direction different from the specified direction)
W substrate

Claims (11)

It has a cylindrical wall with a container body opening formed at one end and a closed other end, and a plurality of substrates are placed on the inner surface of the wall. A container body formed with a substrate storage space that can be accommodated and communicates with the container body opening,
A lid that is removable from the container body opening and capable of closing the container body opening;
A portion of the lid body is disposed in a portion facing the substrate storage space when the container body opening is closed by the lid body, and when the container body opening is closed by the lid body, the plurality of substrates A lid side substrate support part that can support the edge of the lid is provided.
Equipped with
The lid body is provided with a lid body side first regulation part (lid body section 1 control part) and a lid body side second regulation part (lid body section 2 view part part),
The lid body-side substrate support portion is provided with a support portion side first regulating portion and a support portion side second regulating portion, and is positioned at a first position with respect to the lid body. It is configured to be mounted on the lid body by sliding in a predetermined slide direction from the second position,
The lid side second regulating portion does not restrict movement of the lid side substrate support portion to a side opposite to the substrate storage space for positioning the lid side substrate support portion in the first position,
In the first position, the lid body-side first regulating portion allows movement of the support portion-side first regulating portion in the slide direction and also allows movement of the support portion-side second regulating portion in the slide direction; ,
In the second position, the lid body-side first regulating portion regulates movement of the support portion-side first regulating portion in a direction opposite to the slide direction, and the support portion-side second regulating portion in the slide direction. A substrate storage container wherein movement is regulated, and the lid side second regulating portion regulates movement of the lid side substrate support portion toward the substrate storage space. According to paragraph 1,
The lid body-side substrate support portion further includes a contact avoidance portion,
When viewed from the side opposite to the side of the substrate storage space, the contact avoidance portion avoids contact with the lid side second regulating portion, so that the lid side second regulating portion is configured to make the lid side substrate support portion the third regulating portion. Without restricting the movement of the substrate support portion on the lid side to the side opposite to the substrate storage space for positioning in the first position,
In the second position, when viewed from the side opposite to the side of the substrate storage space, the contact avoidance portion does not avoid contact with the lid side second regulating portion, so that the lid side second regulating portion is A substrate storage container that regulates movement of the substrate support portion on the lid side toward the substrate storage space. According to claim 1 or 2,
The surface of the second regulating portion on the lid side opposite to the side of the substrate storage space is inclined to approach the side of the substrate storage space as it faces a direction opposite to the slide direction. courage. According to any one of claims 1 to 3,
In the first position, the side opposite to the side of the substrate storage space in the first regulating section on the support side is in contact with the side of the substrate storage space in the first regulating section on the lid side. . According to any one of claims 1 to 4,
The lid body further includes a third regulating portion on the lid body side,
By deforming the support-side first regulator from the first position, the lid-side substrate support portion moves to the side opposite to the side of the substrate storage space, and the lid-side third regulator moves to the side of the substrate storage space. is a substrate storage container that regulates movement of the substrate support portion on the lid side to the opposite side. According to any one of claims 1 to 5,
A substrate storage container wherein the lid body and the lid body-side substrate support portion are provided with an incorrect mounting prevention structure that prevents the lid body-side substrate support portion from being mounted on the lid body in the wrong direction. According to any one of claims 1 to 6,
The lid side substrate support portion includes a pair of first frame portions (Section 1 frame portion) extending in a predetermined direction and a pair of second frame portions (Section 2 frame portion) extending in a direction different from the predetermined direction. and a leg portion connected to the first frame portion and a substrate receiving portion formed on the leg portion,
The leg portion includes one leg portion connected to one of the first frame portions and the other leg portion connected to the other first frame portion and not connected to the one leg portion. The leg portions constitute a pair of leg portions, and the pair of leg portions are formed in equal numbers as the plurality of substrates stored in the substrate storage container,
A substrate storage container in which a pair of the second frame portions connect a pair of the first frame portions on both outsides of a direction in which the pair of legs are paralleled. According to any one of claims 1 to 7,
The substrate storage container further includes a structure for improving operability of the slide, wherein the lid side substrate support portion does not interfere with the lid side second regulating portion in the first position. A container having a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and a substrate storage space that can accommodate a plurality of substrates and communicates with the container body opening is formed by the inner surface of the wall portion. The main body,
a lid that is removable from the container body opening and capable of closing the container body opening;
A portion of the lid body is disposed in a portion facing the substrate storage space when the container body opening is closed by the lid body, and when the container body opening is closed by the lid body, the plurality of substrates A substrate supporter on the lid side that can support the edge of the
Equipped with
The lid body has a first regulating portion on the lid side and a second regulating portion on the lid side,
The lid body-side substrate support portion has a support portion-side first regulating portion and a support portion-side second regulating portion, and is mounted on the lid body by sliding in a predetermined slide direction from a first position to a second position with respect to the lid body. A method of manufacturing a substrate storage container consisting of:
In order to position the lid side substrate support portion at the first position, the lid side substrate support portion is moved to a side opposite to the substrate storage space so that it is not restricted by the lid side second regulating portion,
In order to position the lid side substrate support portion at the second position, the support portion side first regulating portion and the support portion side second regulating portion are moved in the slide direction so as not to be restricted by the lid side first regulating portion,
In the second position, movement of the support-side first regulating portion in a direction opposite to the slide direction is regulated by the lid side first regulating portion, and movement of the support-side second regulating portion in the sliding direction is is regulated by the lid side first regulating portion, and movement of the lid side substrate support portion toward the substrate storage space is regulated by the lid side second regulating portion. According to clause 9,
The lid body further includes a third regulating portion on the lid body side,
By deforming the support portion side first regulating portion from the first position, the lid side substrate supporting portion is moved to the side opposite to the side of the substrate storage space, and the lid side third regulating portion is moved to the side of the substrate storage space. is a method of manufacturing a substrate storage container that regulates movement of the substrate support portion on the lid side to the opposite side. A container having a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and a substrate storage space that can accommodate a plurality of substrates and communicates with the container body opening is formed by the inner surface of the wall portion. The main body,
A lid that is detachable from and removable from the container body opening and can close the container body opening, the lid having a first regulating portion on the lid side and a second regulating portion on the lid side.
A substrate support portion on the lid body side disposed on the lid body of the substrate storage container provided,
The lid body-side substrate support portion is a part of the lid body and is disposed at a portion facing the substrate storage space when the container body opening is closed by the lid body, and the container body opening is closed by the lid body. Able to support edge portions of the plurality of substrates when
Additionally, the lid body-side substrate support portion has a support portion-side first regulating portion and a support portion-side second regulating portion, and is mounted on the lid body by sliding in a predetermined slide direction from a first position to a second position with respect to the lid body. It is structured so that
Movement of the lid side substrate support portion to the side opposite to the substrate storage space for positioning the lid side substrate support portion in the first position is not regulated by the lid side second regulating portion,
In the first position, movement of the support-side first regulating portion and the support-side second regulating portion in the slide direction is not regulated by the lid body-side first regulating portion,
In the second position, movement of the support portion-side first regulating portion in a direction opposite to the slide direction is regulated by the lid side first regulating portion, and the support portion-side second regulating portion in the sliding direction is regulated. A lid-side substrate support portion whose movement is regulated by the lid-side first regulating portion, and movement of the lid-side substrate support portion toward the substrate storage space is regulated by the lid-side second regulating portion.