KR20240007395A - Fluorine-containing grease for semiconductor manufacture assembly equipment in clean-room - Google Patents

Abstract

LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and cross roller bearing parts, perfluoropolyether (PFPE) 2~15 wt%, ethene tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoroethylene (PTFE) 25~38 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~35 wt%, polyethylene (Polyethylene) 1~ 5 wt%, long chain alcohol (Hexyl-1-decanol,2) 0.5~3 wt%, gel type sulfur-based extreme pressure additive (Overbased Sulfonates) 1~5 wt%, sulfurized bis (die) Contains at least 1 to 5 wt% of sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) and is lead grade NLGI #3 (220 mm to 250 mm) mm) A fluorine-containing grease applied to semiconductor production equipment is presented.

Description

Fluorine-containing grease for semiconductor manufacture assembly equipment in clean-room}

The present invention relates to die attach and wire-bonding semiconductor equipment that constitutes the wafer chip internal circuit in the semiconductor assembly production line, with an acceleration in the range of 10G ~ 18G (1G = 9.8㎨), within a stroke distance of 300 mm, and a stop due to direction change of less than 0.30 seconds. It relates to fluorine-containing grease applied to LM-bearing, ball screw-bearing, general ball rolling-bearing, and crossed roller-bearing parts that are repeatedly subjected to frictional forces. More specifically, it relates to LM bearings and It improves the lubrication performance of the four types of bearing parts - ball screw bearings, general ball rolling bearings, and crossed roller bearings - for their kinetic and static friction and load, and reduces the frictional load, improving the durability of the four core bearing parts and reducing the friction of grease. This is about a technology that can minimize losses due to chip defects and production stoppages due to replacement of equipment parts by extending the lubrication life (durability) of the grease itself by reducing the coefficient.

The production and use of fluorine-containing grease as a lubricant has been known for a long time. Fluorine-containing greases have been prepared by blending polytetrafluoroethylene (PTFE) polymer in a perfluorinated liquid, such as perfluoropolyether (PFPE), followed by sufficient agitation (see USP 4472290).

In addition, the invention of fluorine grease is disclosed in Republic of Korea Patent Publication No. Special 1998-080506 (publication date: November 25, 1998).

The disclosed invention is a 15-50% tetrafluoroethylene (POLYMERIZED-TETRAFLUOROETHENE hereinafter referred to as PTFE) copolymer containing fluorine as the main component of perfluoropolyethers (PFPEs) at 60% by weight and containing other ethylenically unsaturated monomers. Perfluoropolyether (perfluoropolyethers hereinafter referred to as M-series and Z-series PFPEs) oil with a viscosity grade of 30 to 1000 cSt at 20°C, with a molecular weight of 4,000 to 25,000 in weight percent and linear structure, 30 to 84.5 It relates to fluorine grease containing % by weight.

The disclosed invention has utility as a lubricant for use in general machines, but is unsuitable for use in semiconductor production equipment in clean rooms. In particular, when existing soap-based grease is used in semiconductor production equipment in clean rooms, the low specific gravity of soap-based fatty acid grease (ρ≒ 0.9 g/㎤ or less), which causes the grease particles to scatter and oscillate and then land on semiconductor wafer products, and the elasticity of the metal lithium (Li)-based thickener holding the lubricating base oil and spitting out due to the saponification reaction within the soap-based fatty acid grease. Problems with lubricating base oil dropping and mist particles due to separation of lubricating base oil due to lack of lubricating base oil, scattering of particles due to bearing wear powder due to lack of lubrication (durability) due to lubricating base oil, problem of landing on semiconductor wafer products after oscillation, lubricating Due to the base oil, carbide generation and scattering due to accelerated deterioration of the soap thickener due to lack of lubrication (durability) and heat resistance, problems with oscillation and sticking to semiconductor wafer products, swelling of various rubber and resin parts of lubricating base oil and additives, Contamination and defect factors such as particle scattering due to curing reaction and problems with oscillation and landing on semiconductor wafer products occur.

As a result, soap-based fatty acid grease easily deteriorates due to the vertical load applied to the grease and the horizontal and vertical loads subjected to static friction force (345,600 times/day) due to repeated direction changes, and this grease deterioration phenomenon is caused by fatty acid carbide (sludge). : sludge) is generated and accumulated, and the fatty acids and soap-based thickener carbonized substances in the lubricating base oil act as factors of wear, hindering and deteriorating lubricating performance, and causing wear of bearings and equipment precision due to wear of parts within the equipment. This causes the problem of defective semiconductor wafers.

Therefore, the fundamental purpose of the lubricant is to extend the life of the equipment, prevent scattering of particles in the equipment, and prevent contamination of the equipment to suit the long-term durability of the lubricating film for creating and maintaining the existing lubricating film due to the short stroke distance of semiconductor equipment and the rapid temperature rise in a short period of time. There is a need for the invention of a fluorine-containing grease that can prevent and improve the problem of defective wafers.

Meanwhile, conventional technologies related to grease include Korea Patent Publication No. 1998-080506.

The present invention is intended to solve the problems of the prior art, and the purpose of the present invention is to provide a lubricant suitable for the long-term durability of the existing lubricating film for creating and maintaining the existing lubricating film according to the short stroke distance of semiconductor equipment and the rapid temperature rise over a short period of time. The fundamental purpose of this product is to provide a fluorine-containing grease that can extend the life of equipment, prevent scattering of equipment particles, prevent equipment contamination, and improve or solve the problem of defective wafers.

The problem to be solved by the present invention is not limited to the above-mentioned problem, and other technical problems not mentioned will be clearly understood by those skilled in the art from the contents described later.

As a technical solution to achieve the purpose of the present invention,

In the first aspect of the present invention, it is used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions of 400 Kgf/mm2 or less, and direction change times of 0.30 seconds or less. It is applied to LM bearings, ball screw bearings, general ball rolling bearings, and crossed roller bearing parts, and contains 2~15 wt% of perfluoropolyether (PFPE), Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoroethylene (PTFE) 25~38 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~35 wt %, Polyethylene 1~5 wt%, long chain alcohol (Hexyl-1-decanol,2) 0.5~3 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt %, containing at least 1 to 5 wt% of sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum), and is a lead grade. A fluorine-containing grease applied to semiconductor production equipment, characterized as NLGI #3 (220 mm ~ 250 mm), is disclosed.

As a second aspect of the present invention, it is used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions of 400 Kgf/mm2 or less, and direction change times of 0.30 seconds or less. It is applied to LM bearings, ball screw bearings, general ball rolling bearings, and crossed roller bearing parts, and contains 5~15 wt% of perfluoropolyether (PFPE), Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 3~8 wt%, polytetrafluoroethylene (PTFE) 30~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 15~30 wt %, Polyethylene 5~10 wt%, long chain alcohol (Hexyl-1-decanol,2) 1~2 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt %, containing at least 1 to 5 wt% of sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum), and is a lead grade. A fluorine-containing grease applied to semiconductor production equipment, characterized as NLGI #3 (220 mm ~ 250 mm), is disclosed.

As a third aspect of the present invention, it is used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions of 400 Kgf/mm2 or less, and direction change times of 0.30 seconds or less. It is applied to LM bearings, ball screw bearings, general ball rolling bearings, and crossed roller bearing parts, and contains 2~17 wt% of perfluoropolyether (PFPE), Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 2~9 wt%, polytetrafluoroethylene (PTFE) 25~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~30 wt %, Polyethylene 3~12 wt%, long chain alcohol (Hexyl-1-decanol,2) 2~3 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt %, containing at least 1 to 5 wt% of sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum), and is a lead grade. A fluorine-containing grease applied to semiconductor production equipment, characterized as NLGI #3 (220 mm ~ 250 mm), is disclosed.

In the fourth aspect of the present invention, it is used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions of 400 Kgf/mm2 or less, and direction change times of 0.30 seconds or less. It is applied to LM bearings, ball screw bearings, general ball rolling bearings, and crossed roller bearing parts, and is made of perfluoropolyether (PFPE) 9~15 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoroethylene (PTFE) 25~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 15~25 wt %, Polyethylene 3~12 wt%, long chain alcohol (Hexyl-1-decanol,2) 3~5 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt %, containing at least 1 to 5 wt% of sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum), and is a lead grade. A fluorine-containing grease applied to semiconductor production equipment, characterized as NLGI #3 (220 mm ~ 250 mm), is disclosed.

At this time, the perfluoropolyether (PFPE), polyalphaolefin (PAO-Group Ⅳ), and ethene tetrafluoro (Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) The viscosity grade of the lube base oil composed of is VG 40℃ (15~32) and VG 100℃ (6~12).

In addition, the fluorine-containing grease is characterized in that the lubrication degree (wt%) is 0.5 or less.

In addition, the 4-ball wear test (ASTM D2266) result of the fluorine-containing grease is characterized in that it is 0.40 mm to 0.49 mm.

In addition, the 4-ball load test (ASTM D2596) result of the fluorine-containing grease is characterized in that it is 200 kgf to 400 kgf.

In addition, the sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) is a yellow molybdenum disulfide that can be used at a high temperature of 260°C or higher. It is characterized by being used as a warning indicator of a temperature rise above 180℃ in semiconductor equipment by using the property of changing color from yellow to dark green.

In addition, the fluorine-containing grease includes the gel-type sulfur-based extreme pressure additive (Overbased Sulfonates) and is characterized by exhibiting rust prevention performance of more than 120 hours based on a 5% salt water spray (KS M 2109) test.

The fluorine-containing grease applied to semiconductor production equipment in a clean room according to the present invention violently and repeatedly generates static friction (345,600 times/day) due to direction changes in die attach semiconductor equipment that constitutes the wafer chip internal circuit during the post-semiconductor production line process. Reduces frictional load on LM bearings, ball screw bearings, general ball rolling bearings, and cross-roller bearings for driving mold bases that control movement within wire-bonding semiconductor equipment, and reduces the temperature of the friction surface due to high-speed movement and direction changes. It reduces the generation of various particles, scattering, and contamination of equipment, extends the life of LM bearings, ball screw bearings, general ball rolling bearings, and crossed roller bearing parts, secures the lubrication durability of grease, maintains the coordinate precision of semiconductor production equipment, and It has the effect of reducing the defect rate of semiconductor wafers.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Figure 1 is a diagram showing the results of an oscillation test for a fluorine-containing grease according to an embodiment of the present invention and a grease from another company.
Figure 2 is a diagram showing the results of an LM bearing reciprocating test of a fluorine-containing grease according to an embodiment of the present invention and a grease from another company.
Figure 3 is a diagram showing the results of a cross-roller bearing test of a fluorine-containing grease according to an embodiment of the present invention and a grease from another company.

Hereinafter, preferred embodiments of the present invention will be described in detail. However, some components that are unrelated to the gist of the invention will be omitted or compressed, but the omitted components are not necessarily components that are unnecessary in the present invention, and may be used in combination by those skilled in the art to which the present invention pertains. You can.

Due to the nature of the die-attach and wire-bonding semiconductor equipment, contamination from various particles occurs, and the operation time is long without downtime, so it is expensive to use LM bearings, ball screw bearings, general ball rolling bearings, and crossed roller bearings in the equipment. Problems with lifespan and precision decline are occurring.

The key to maintaining the lifespan and coordinate accuracy of equipment is to efficiently reduce wear caused by friction between equipment parts during operation, and there is a significant difference in the lifespan and precision of equipment depending on the performance of the grease, which is a lubricant for this purpose.

Grease consists of base oil (liquid), thickener (solid powder), and additives, and the degree of hardness or softness is adjusted depending on the mixing ratio of these.

Grease is a mixture of the above three materials, and the thickener acts as a sponge and reservoir for the base oil that provides actual lubrication.

When the lubricating base oil is subjected to a certain pressure and load, it comes out of the thickener and forms a lubricating film at various friction boundaries. When the pressure is released, it enters the thickener and prevents the base oil from escaping within the equipment. Among these, additives are dissolved in base oil to improve lubricity such as extreme pressure resistance, wear resistance, heat resistance, and rust prevention, or to meet performance requirements other than lubricity.

Grease is indicated by a National Lubricants Grease Institute_Grade (NLGI_Grade) rather than a viscosity grade. The grease rating is determined by placing grease in a container at room temperature (25°C) and placing a set standard weight (102.5g) on top of the grease, and is determined by the depth into which the weight goes into the grease for a standard time (1/10 scale 5 seconds). Hard grease shows a low value of the depth into which the standard weight enters the grease, while soft grease shows a high value of the depth into which the reference weight enters the grease. The coating grade is expressed in 9 grades: "000, 00, 0, 1, 2, 3, 4, 5, 6", and the lower the grade, the softer the grease (based on coating grade test ASTM D217, KS M 2032) . Leading grade "#2" is known to be the most commonly used grease.

Existing greases used in semiconductor equipment have also used lead grades “#0~#2”. However, due to the short stroke distance in semiconductor equipment and the nature of being easily subject to load in a short period of time, when grease with lead grade "#0~#2" is used, the lead grade is not appropriate and lubrication (durability) is not maintained due to grease leaving within the equipment. and dispersion problems shortened the grease re-injection cycle, causing the inconvenience of frequent grease re-injection, which resulted in production loss due to production stoppage.

In addition, if re-injection of grease is not performed at an appropriate time, the load on the friction contact surface is large, inefficient loss of power occurs, and the temperature of the friction interface rapidly rises due to friction of equipment and parts due to lack of lubrication performance.

Therefore, in order to prevent grease from escaping for long-term lubrication (durability) and to meet the requirements of a long grease re-lubrication cycle of more than 6 months, the lead grade of grease used in semiconductor equipment is in the NLGI #3 (220 mm ~ 250 mm) range. It is designed to be a relatively hard main grade, but the viscosity grade (VG) of the lube base oil is set to be in the range of 15 to 32 ㎟/s, considering that the speed factor (Dm.N) of various semiconductor bearings is 620,000 to 950,000.

The preliminary performance test and main performance test of grease required in a semiconductor clean room environment are conducted as follows.

1) Lubrication (durability)

* Reciprocating test of LM bearing (main performance test - model number NH252080ANCT01PCZ, constant speed 5.4m/s, acceleration/deceleration 10.0G, stroke 1.5m)

* 4-ball test (pre-performance test)

- anti-wear (ASTM D2266),

- Load resistance (Extreme Pressure: ASTM D2596)

2) Particle scattering and oscillation test: Standards presented by NSK of Japan (preliminary performance test)

* Ball-screw bearing scattering (shaft diameter Ø 12, lead 30mm, steel diameter: 2.00mm, rotation speed 2,500rpm, acceleration/deceleration 0.4G, stroke 390mm)

* LM bearing oscillation (model number NS201300ALC1T01PCZ, stroke 1,000mm, speed 0.5m/s, 1.0m/s, 1.5m/s, measurement particle size range 10~3000nm, oscillation measuring instrument TSI Model 3772)

3) Crossed roller bearing durability test in mold base (main performance test)

* Crossed roller bearing reciprocating test (IKO [model number-CRWG4-200H], 20Hz, stroke 4 mm [Amp. 2 mm], acceleration 18G)

The lubrication (durability), wear resistance, and load carrying capacity of grease determine the lifespan of semiconductor equipment, and these characteristics of grease determine the speed factor (Dm.N) of the bearing according to the selection and mixing ratio of the type of lubricating base oil and the viscosity grade of the base oil. ) depends greatly on the compatibility with PTFE, the thickener, and the selection and combination of additives.

Therefore, in order to prevent grease lubricant base oil separation and minimize particle scattering and dust generation, mixing technology of lubricant base oil and thickener, selection of specific thickener and increase in the proportion of base oil, upward adjustment of base oil grade (#2 → #3), and improvement of grease raw materials. Minimizing surface energy and selecting specific additives are necessary.

In addition, the grease as a lubricant includes a wet type grease using base oil in a liquid state and a dry type grease using a solid dry lubricant. Fluorine-containing grease applied to the semiconductor production equipment of the present invention is used. It is lubrication in the form of M and Z series PFPE wet lubricating base oils, and the thickener in the form of solid powder has a mechanism that repeats the inclusion, discharge, and absorption of the lubricating base oil, showing an intermediate form between liquid and solid phases.

Hereinafter, the composition of the fluorine-containing grease applied to the semiconductor production equipment of the present invention will be described in detail.

<base oil>

The base oil of the fluorine-containing grease applied to the semiconductor production equipment of the present invention includes fluorine base oil (PFPE), reactive fluorine raw material (polymer modifier), and synthetic oil (PAO).

Perfluoropolyether (PFPE), the first base oil of the fluorine-containing grease of the present invention, uses only the M or Z series of perfluoropolyether (PFPE), a substance extracted from fluorite (FLUORSPAR: CaF2).

Recycled PFPE material obtained by thermal decomposition of Teflon (PTFE) resin scrap is excluded due to concerns about the human hazard of perfluoroo octanoic acid (PFOA). In addition, as the PFPE for this patent, the Y series type with a branch structure is judged to be unsuitable for the characteristics of semiconductor equipment and is therefore excluded.

The perfluoropolyether (M or Z series PFPE) has extremely low evaporation, thermal oxidation, and carbonization due to its excellent low-temperature fluidity and stability at high temperatures, and has low sliding resistance due to the formation of a stable lubricating film even when rapid pressure or load increases. It has the characteristic of low surface friction.

However, when the base oil composition is 100% perfluoropolyether (PFPE), the initial lubrication performance is excellent, but the long-term lubrication durability is weak.

On the contrary, synthetic oil (PAO), a representative substance of synthetic base oil, has the advantage of excellent lubrication durability, but has lower initial lubricating performance and lower specific gravity (ρ≒ 0.9 g/㎤ or less) than perfluoropolyether (PFPE), causing particle scattering, Indicates a problem with rash.

Therefore, in the present invention, a reactive fluorine raw material (polymer modifier) can be added to perfluoropolyether (PFPE) and synthetic oil (PAO) to use a reactive base oil that has only the advantages of both materials.

<Thickener>

The thickener for the fluorine-containing grease applied to the semiconductor production equipment of the present invention is polytetrafluoroethylene (aka Teflon powder: PTFE), but in order to cope with boundary lubrication, it is measured in nanometers (nm) rather than micrometers (μm). It uses a single unit of material and uses a mixture of suspending, emulsion, and crystal crystal structures.

The polytetrafluoroethylene (PTFE) is a material that exhibits very stable chemical resistance, very good heat resistance, very low friction coefficient, very low surface tension (non-adhesiveness), low thermal expansion coefficient, low thermal conductivity, and flame retardancy. It is known. Among them, the fluoropolymer Teflon itself has excellent lubrication performance and has low surface friction. As an example of widespread application, it is used as a surface coating to maximize lubricity in kitchen appliances by France's Tefal. However, the disadvantage of Teflon coating alone is that it has low strength and short durability, and only products that have been verified to be harmless to the human body from separated coating materials are used.

<Additives>

The additive for the fluorine-containing grease applied to the semiconductor production equipment of the present invention is sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum. use.

Sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) is used by many lubricant manufacturers to improve anti-wear. It is used as a dry extreme pressure additive, but as a result of analyzing the results through the applicant's experiments, the effect of improving wear resistance was found up to 2 to 5 wt%, but adding more than 6 wt% had no effect on improving anti-wear. It turned out that there was none. In particular, adding more than 6 wt% to thickener or base oil, which exceeds the allowable saturation value, is an important factor that can cause problems with particle scattering and dust generation in semiconductor production lines where cleanliness is important. Through the applicant's scattering experiment, it was found that the maximum amount should not exceed 5 wt% compared to the total wt% of the base oil.

<Example 1>

As an example of the fluorine-containing grease applied to semiconductor production equipment of the present invention,

LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and cross roller bearing parts, perfluoropolyether (PFPE) 2~15 wt%, ethene tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoroethylene (PTFE) 25~38 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~35 wt%, polyethylene (Polyethylene) 1~ 5 wt%, long chain alcohol (Hexyl-1-decanol,2) 0.5~3 wt%, gel type sulfur-based extreme pressure additive (Overbased Sulfonates) 1~5 wt%, sulfurized bis (die) Lead grade NLGI #3 (220 mm to 250 mm) containing at least 1 to 5 wt% of sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum)) )'s fluorine-containing grease applied to semiconductor production equipment is presented.

In this Example 1, perfluoropolyether (PFPE) 15 wt%, ethene tetrafluoro (Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 10 wt%, polytetrafull Polytetrafluoroethylene (PTFE) 30 wt%, polyalphaolefin (PAO-Group Ⅳ) 30 wt%, polyethylene 5 wt%, long chain alcohol (Hexyl-1-decanol, 2) 3 wt%, GEL type sulfur-based extreme pressure additive - (Overbased Sulfonates) 5 wt%, sulfurized bis (dibutylcarbamodithioato) di-μ-oxodioxodimolybdenum (sulfurized bis (dibutylcarbamodithioato)) A fluorine-containing grease applied to semiconductor production equipment was manufactured using di-μ-oxodioxodimolybdenum)) 2 wt%.

<Example 2>

As another example of the fluorine-containing grease applied to the semiconductor production equipment of the present invention,

LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.

Perfluoropolyether (PFPE) 5~15 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 3~8 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 30~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 15~30 wt%, polyethylene (Polyethylene) 5~10 wt%, long chain alcohol (Hexyl-1- decanol,2) 1~2 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi A fluorine-containing grease applied to semiconductor production equipment of lead grade NLGI #3 (220 mm to 250 mm) containing at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) is presented.

In this Example 2, perfluoropolyether (PFPE) 15 wt%, ethene tetrafluoro (Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5 wt%, polytetrafull Polytetrafluoroethylene (PTFE) 35 wt%, polyalphaolefin (PAO-Group Ⅳ) 30 wt%, polyethylene 5 wt%, long chain alcohol (Hexyl-1-decanol, 2) wt%, GEL type sulfur-based extreme pressure additive - (Overbased Sulfonates) 5 wt%, sulfurized bis (dibutylcarbamodithioato) di-μ-oxodioxodimolybdenum (sulfurized bis (dibutylcarbamodithioato)) Fluorine-containing grease applied to semiconductor production equipment was manufactured using di-μ-oxodioxodimolybdenum)) 3 wt%.

<Example 3>

As another example of the fluorine-containing grease applied to semiconductor production equipment of the present invention,

LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.

Perfluoropolyether (PFPE) 2~17 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 2~9 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 25~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~30 wt%, polyethylene (Polyethylene) 3~12 wt%, long chain alcohol (Hexyl-1- decanol,2) 2~3 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi. A fluorine-containing grease applied to semiconductor production equipment of lead grade NLGI #3 (220 mm to 250 mm) containing at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) is presented.

In this Example 3, perfluoropolyether (PFPE) 15 wt%, ethene tetrafluoro (Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5 wt%, polytetrafull Polytetrafluoroethylene (PTFE) 35 wt%, polyalphaolefin (PAO-Group Ⅳ) 30 wt%, polyethylene 5 wt%, long chain alcohol (Hexyl-1-decanol, 2) wt%, GEL type sulfur-based extreme pressure additive - (Overbased Sulfonates) 4 wt%, sulfurized bis (dibutylcarbamodithioato) di-μ-oxodioxodimolybdenum (sulfurized bis (dibutylcarbamodithioato)) A fluorine-containing grease applied to semiconductor production equipment was manufactured using di-μ-oxodioxodimolybdenum)) 4 wt%.

<Example 4>

As another example of the fluorine-containing grease applied to semiconductor production equipment of the present invention,

LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.

Perfluoropolyether (PFPE) 9~15 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 25~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 15~25 wt%, polyethylene (Polyethylene) 3~12 wt%, long chain alcohol (Hexyl-1- decanol,2) 3~5 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi. A fluorine-containing grease applied to semiconductor production equipment of lead grade NLGI #3 (220 mm to 250 mm) containing at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) is presented.

In this Example 4, perfluoropolyether (PFPE) 10 wt%, ethene tetrafluoro (Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5 wt%, polytetrafull Polytetrafluoroethylene (PTFE) 40 wt%, polyalphaolefin (PAO-Group Ⅳ) 25 wt%, polyethylene (Polyethylene) 5 wt%, long chain alcohol (Hexyl-1-decanol, 2) 5 wt%, GEL type sulfur-based extreme pressure additive - (Overbased Sulfonates) 5 wt%, sulfurized bis (dibutylcarbamodithioato) di-μ-oxodioxodimolybdenum (sulfurized bis (dibutylcarbamodithioato)) A fluorine-containing grease applied to semiconductor production equipment was manufactured using di-μ-oxodioxodimolybdenum)) 5 wt%.

The types of perfluoropolyether (PFPE) shown above refer to the M and Z series. The M and Z series are Solvay's PFPE lubricants with the product names "Fomblin®M" and "Fomblin®Z". indicates.

The base oil for most existing fluorine-containing greases uses Solvay's Fomblin®PFPE, but among Solvay's Fomblin®PFPE "Y, M, W, Z" types, the mid-to-low-price "Y" type is used (here: Y , M, W, Z represent lubricants (PFPE) from Solvay, USA, product names "Fomblin®Y", "Fomblin®M", "Fomblin®W", "Fomblin®Z").

Hereinafter, for information on the types, characteristics, and viscosity index of Fomblin®Y", "Fomblin®M", "Fomblin®W", and "Fomblin®Z", refer to the technical information disclosed in previously applied registered patent No. 10-2134093. Because it is possible, it is omitted.

Perfluoropolyether (PFPE), which is the base oil in the examples of the present invention, is Solvay's Fomblin®PFPE, and has a viscosity of Solvay's Fomblin®PFPE "Y, M, W, Z" types. By using "M" or "Z" types with an index of 300 or higher, high temperature stability, which is a grease requirement in semiconductor equipment, has been improved.

Detailed information on the results of the 4-ball wear resistance test (ASTM D 2266 standard) for the "M" type and "Z" type lube base oil of Solvay's Fomblin® PFPE is described in the previously filed Patent No. 10-2134093. Since it can be referred to, it is omitted.

The “M” type and “Z” type perfluoropolyether (PFPE) has excellent stability at high temperatures compared to the “Y” type, has a thin lubricant film, is strong against pressure, and has excellent initial lubricity. Specific details will be omitted since the technical details disclosed in previously applied patent number 10-2134093 can be referred to.

As described above, the additives of the above-mentioned embodiments of the present invention are directly related to the wear resistance of semiconductor equipment, and thus determine the lifespan of expensive semiconductor equipment.

In addition, detailed information about additives will be omitted since the technical information disclosed in previously filed Patent No. 10-2134093 can be referred to.

<Experiment to fundamentally improve wear resistance for application to semiconductor equipment>

The results of the 4-ball wear resistance test (based on ASTM D 2266) of the existing fatty acid soap-based grease and simple stirred fluorine grease of PFPE and PTFE applied to semiconductor equipment in clean rooms have a wide range of deviations from 0.966 to 1.423 mm, showing a wide range of deviations from 0.966 to 1.423 mm. Due to manufacturers' requests for improved wear resistance, there is a limit to improving anti-wear using only organic molybdenum disulfide and DoverphosEP-425 additives, as the standard is required to be within 0.6 mm (0.5 mm or less as internal management standard), which is lower than the existing wear resistance value. In addition to recognizing the limitations of grease, durability, contamination, particle scattering, and dust generation, the requirements for speed and cleanliness are maximized due to the development of each generation of semiconductor equipment, making it essential to improve the performance of newly applied grease.

To this end, the applicant conducts a preliminary performance test of the grease before the main performance test as follows.

Ⅰ. Improved base oil lubrication performance by fluorine base oil PFPE + PAO reaction ratio (4-ball-wear resistance test)

Ⅱ. 4-ball wear resistance test according to the combination of each reaction lubricant base oil and thickener (PTFE)

Ⅲ. Selection of replacement material for existing Doverphos EP-425 Extreme Pressure Additive and adjustment of content - 4-ball wear resistance and rust prevention test

Ⅳ. Selection and content control of additives that minimize scattering and dust generation by lowering the surface energy of grease and lubricant film - scattering and dust generation test

Ⅴ. Grease load resistance (ASTM D2596) test for performance superior compositions from Ⅰ to Ⅳ

→ Comparison of existing Japanese ‘T’ company AF* grease with our company’s applied grease

The above five tests were conducted.

Ⅰ. Improved base oil lubrication performance by fluorine base oil PFPE + PAO reaction ratio

The results of the base oil lubrication performance test by fluorine base oil PFPE + PAO reaction ratio are shown in [Table 1] below.

(wt% below is expressed based on 100 wt% of the entire grease) composition Base oil type 4-hole wear resistance wear marks (mm) friction coefficient PFPE (2~15 wt%) + PAO (20~35 wt%) - 1st ‘A’ type 0.486 0.0254 PFPE (2~15 wt%) + PAO (20~35 wt%) - secondary 0.462 0.0229 PFPE (5~15wt%) + PAO (15~30 wt%) - 1st ‘B’ type 0.447 0.0236 PFPE (5~15wt%) + PAO (15~30 wt%) - 2nd 0.436 0.0193 PFPE (2~17wt%) + PAO (20~30 wt%) - 1st ‘C’ type 0.475 0.0242 PFPE (2~17wt%) + PAO (20~30 wt%) - secondary 0.445 0.0216 PFPE (9~15 wt%) + PAO (15~25 wt%) - 1st ‘D’ type 0.463 0.0231 PFPE (9~15wt%) + PAO (15~25 wt%) - 2nd 0.438 0.0202

As a result of conducting the 4-ball wear resistance test of the above lubricant base oil, the 4-ball test wear resistance (mm) wear mark value was found to be in the range of 0.436 ~ 0.486 and the friction coefficient was in the range of 0.0193 ~ 0.0254.

Compared to the 4-hole anti-wear wear marks of 0.966~1.423 mm of the existing (simple) stirring type fluorine grease, the wear amount was significantly lower and the friction coefficient was also more effective than expected.

Ⅱ. The results of the 4-ball wear resistance test according to the combination of each reactive lubricant base oil and thickener (PTFE) in [Table 1] are shown in [Table 2] below.

composition 4-hole wear resistance wear marks (mm) friction coefficient ‘A’ type base oil + PTFE (25~38 wt%) - 1st 0.462 0.0241 ‘A’ type base oil + PTFE (25~38 wt%) - 2nd 0.454 0.0212 ‘B’ type base oil + PTFE (30~40 wt%) - 1st 0.438 0.0203 ‘B’ type base oil + PTFE (30~40 wt%) - 2nd 0.421 0.0187 ‘C’ type base oil + PTFE (25~40 wt%) - 1st 0.460 0.0227 ‘C’ type base oil + PTFE (25~40 wt%) - 2nd 0.436 0.0201 ‘D’ type base oil + PTFE (25~40 wt%) - 1st 0.452 0.0218 ‘D’ type base oil + PTFE (25~40 wt%) - 2nd 0.412 0.0197

As a result of conducting a 4-ball wear resistance test on greased products according to the lube base oil + thickener ratio in [Table 1], the wear resistance (mm) wear mark value of the 4-ball test was in the range of 0.412 to 0.462 and the friction coefficient in the range of 0.0187 to 0.0241. appear.

Compared to the existing values of each lubricant base oil (PFPE + PAO), the four-ball test wear resistance (mm) wear mark value was reduced by approximately 0.008 to 0.026 and the friction coefficient was reduced by approximately 0.0005 to 0.0033 due to the addition of PTFE's lubricity.

Ⅲ. Substitute for existing Doverphos EP-425 Extreme Pressure Additive

Based on the results of the experiment with the combination of the above (reactive) fluorine base oil (PFPE + PAO) and thickener PTFE, it is superior to the existing extreme pressure additive in order to improve the overall lubrication durability and wear resistance of the grease, and is used in combination with lubricant base oil and It is necessary to select an alternative additive to improve the problem of grease thickener and to test the wear resistance (mm) and friction coefficient in a 4-ball test for each content.

Among additives, extreme pressure additives have the function of reducing wear by acting chemically at the area where metal meets metal. The friction area where metal meets metal is lubricated with various lubricants, but contact between metals occurs locally at the friction area. Extreme pressure additives are made of polar molecules, and these additives have the function of preventing friction between metals during contact between metals.

However, most of the extreme pressure additives commonly used on the market are in liquid form containing chlorine (Cl), sulfur (S), and phosphorus (P) components, which have very poor solubility with PFPE, causing a polar separation phenomenon with PFPE, resulting in particles. It is an unsuitable material for semiconductor production lines due to various problems such as scattering, toxicity to the human body, poor rust prevention due to long-term metal surface corrosion, and generation of secondary pollutants.

While searching for improved additives, we learned about the characteristics of extreme pressure resistance, rust prevention, and wetting prevention for LUBRIZOL® 5283C from LUBRIZOL, which is in the form of a grease-like gel (GEL), and found that this product had the best results among the grease compositions in [Table 2]. <Example 4> - ('D' type base oil + PTFE (25-40 wt%)) was added at 3 wt%, 5 wt%, and 7 wt to test wear resistance and rust prevention.

The results are shown in [Table 3] below.

composition 4-hole wear resistance wear marks (mm) friction coefficient ‘D’ type base oil + PTFE (25~40 wt%) +5283C 3wt%- 1st 0.431 0.0208 ‘D’ type base oil + PTFE (25~40 wt%) +5283C 3wt%- 2nd 0.399 0.0194 ‘D’ type base oil + PTFE (25~40 wt%) +5283C 5wt%- 1st 0.419 0.0201 ‘D’ type base oil + PTFE (25~40 wt%) +5283C 5wt%- 2nd 0.413 0.0198 ‘D’ type base oil + PTFE (25~40 wt%) +5283C 7wt%- 1st 0.437 0.0215 ‘D’ type base oil + PTFE (25~40 wt%) +5283C 7wt%- 2nd 0.432 0.0221

Among the grease compositions in [Table 2], <Example 4> - ('D' type base oil + PTFE (25-40 wt%)) as a base, after adding 3 wt%, 5 wt%, and 7 wt% of LUBRIZOL® 5283C, 4- When looking at the wear resistance results, the addition ratio of 3wt% to 5wt% was effective (hereafter, adding more than 8wt% of 5283C has no effect on worsening wear resistance or improving performance, so the experimental values are omitted).

After adding 3wt% and 5wt% of LUBRIZOL® 5283C, the 4-ball wear resistance value (0.588 mm) showed an improvement in wear resistance of 3.2% to 4.7% compared to before addition. This wear resistance value may seem small, but when conducting a four-ball wear resistance test (ASTM D 2266) of various lubricants, the wear mark value in the range of 1.0 mm to 0.5 mm can be easily lowered, but is usually between 0.4 mm and 0.5 mm. The reality is that it is not easy to reduce the wear mark value to 1/100mm.

In addition, in relation to this, it can be seen that the friction coefficient value is also lowered on average.

In addition, in order to verify the rust prevention of 5283C, a salt water 5% spray test according to the KS M 2109 test method was performed on four grease compositions in [Table 2] without the addition of 5283C and three grease compositions in [Table 3] with the addition of 5283C. The results of the process are shown below [Table 4].

composition Salt water 5% spray
Test time (hr) Anti-rust ‘A’ type base oil + PTFE (25~38 wt%) 72 O ‘B’ type base oil + PTFE (30~40 wt%) 72 O ‘C’ type base oil + PTFE (25~40 wt%) 72 O ‘D’ type base oil + PTFE (25~40 wt%) 96 O ‘D’ type base oil + PTFE (25~40 wt%) +5283C 3wt% 120 O ‘D’ type base oil + PTFE (25~40 wt%) +5283C 5wt% 180 X ‘D’ type base oil + PTFE (25~40 wt%) +5283C 7wt% 180 X

The rust prevention effect of LUBRIZOL® 5283C was confirmed when added, and the results of addition ratios of 3wt%, 5wt%, and 7wt% showed that the addition ratio of 3wt% was good, but the results were very excellent at 5wt% or more.

When looking at the 4-ball wear resistance in [Table 3] and the salt water 5% spray rust prevention results in [Table 4], it can be seen that the composition of 'D' type base oil + PTFE (25~40 wt%) + 5283C 5wt% is the most ideal. You can.

Ⅳ. Selection and content control of additives that minimize scattering and dust generation by preventing grease wetting and lowering the surface energy of the lubricating film

In addition to lubrication (durability), one of the main functions of lubricating grease in a clean room is to prevent lubricant base oil from wetting and to minimize the amount of grease scattering and dust generation (generally, for lubrication response during initial operation, a wetting degree of less than 5wt% is allowed). However, grease within 5wt% in a clean room acts as a contaminant for particle scattering and dust generation, so grease close to 0wt% is required).

To prevent weaning, there are methods such as adding existing anti-wetting additives or processing to add elasticity to a separate thickener. However, in order to prevent separation of the fundamental lubricating base oil and thickener, it is a thickener functional material for secondary weaning prevention rather than a single thickener method. This is needed.

In addition, in order to minimize the amount of scattering and dust generation, it is necessary to chemically design a mechanism to increase the specific gravity (ρ) of the grease and lower the surface energy of the lubricating film when applying grease, thereby preventing the grease itself from scattering and dusting and preventing the attachment of external foreign substances. .

For this purpose, polyethylene (molecular weight = 50,000~250,000, density = 0.94 gram/cc) as a polymer additive is chemically dissolved in the reactive lubricant base oil shown in [Table 1], and when completing the grease with the composition shown in [Table 4], polyethylene 1 The effect of adding ~12 wt% showed the following performance.

1) Thixotrophy: It softens when stress is applied, but returns to its original state when the stress is removed, allowing a sufficient oil film to be formed.

2) Non-polar (electrically neutral): Since it has no electrical polarity, it attaches to the lubricating surface before the additive and does not interfere with the action of the additive. Therefore, maximizing the effect of additives

3) Minimize oiliness: Prevents scattering and rash by suppressing oil separation.

4) Chemically non-reactive: Prevents oxidation and deterioration of grease and ensures long-term lifespan

When polyethylene showing the above performance was added in the range of 1 to 9 wt%, particle generation was drastically reduced and there was no change in the four-ball wear resistance (grease lubricity) test value. In other words, no decrease in lubricating performance was observed.

When added in the range of 10 to 12 wt%, no particle degradation was observed, and a slight decrease (0.05 mm) in four-hole wear resistance (grease lubricity) began to appear.

On the other hand, the test results for six types of grease with polyethylene added in the range of 13 to 18 wt% showed that 1) the effect of reducing particle generation no longer occurred, and 2) the size of the wear marks in the four-ball wear resistance (grease lubricity) test was It is more than 1.2mm and the grease lubrication performance has deteriorated rapidly. In other words, the adhesiveness, which is the opposite of the lubricity of grease, increased significantly, and the thixotropy function, which was the main purpose of adding polyethylene, was lost.

Preliminary tests on particle scattering and dust generation during bearing movement of the final grease were conducted by Japan's leading bearing company, 'NSK', under the supervision of 'S' Electronics in Korea.

The scattering and oscillation preliminary performance test conditions and results are as follows.

1) Splash test

Ball screw bearing shaft diameter: Ø 12, lead: 30mm, steel diameter: 2.00mm, stroke: 390mm, preload type: oversize ball preload, maximum rotation speed: 2500min-1, acceleration: 0.4G, number of reciprocations: 1,000 tests completed After confirming that there is no scattering amount, pass or fail is judged.

'HT-Z1 (present invention)' was confirmed to have no scattering amount at all.

2) Oscillation test

LM model number: NS201300ALC1T01PCZ, stroke: 1,000mm, steel diameter: 3.175mm, preload: 680N (5.5% C100), speed: 1.5m/sec, injection flow rate: 0.001 m3/min, measuring space: 0.02832㎥, oscillator measuring device: TSI Condensation Particle Counter Model 3772, measured particle diameter: 10∼3000nm, measurement time: 120 minutes.

Referring to Figure 1, the particle number of existing company's (fluorine) grease is 1,000,000 EA, while the particle number of 'HT-Z1' of the present invention is 80,000~90,000 EA, and the particle number of 'HT-Z1' of the present invention is higher than that of other company's grease. A result of less than 10% was obtained.

Ⅴ. 4-ball load-bearing capacity (ASTM D2596) test of finalized grease

Comparison of existing Japanese 'T' AF* grease and our company's applied grease Existing Japanese ‘T’ company AF*Greece ‘HT-Z1’ (present invention) 160kgf 480kgf

After completing the Greek pre-test evaluation of I~V above,

The full-scale grease lubrication durability performance test conditions and results are presented as follows.

1) Grease lubrication durability main performance test conditions

● LM bearing reciprocating test (applies similar operating conditions to LM bearings in die-attach)

- LM bearing: model number NH252080ANCT01PCZ, steel diameter: 4.7625mm, constant speed 5.4m/s, acceleration/deceleration 10.0G, stroke 1.5m, surface pressure: 1.9GPa, 122km/day (total 22,000km driven - LM block damaged after 180 days, (Based on whether or not the steel ball is separated)

● Cross roller bearing (similar operating conditions applied to the X, Y axis mold base at the bottom of wire-bonding)

- Crossed roller bearing: Model number IKO [CRWG4-200H], stroke 4 mm[Amp. 2 mm], period: 25 Hz[Rectangular Wave], acceleration: 18G, operation time: 120 h (41.47 km), based on whether pinion gear and roller are damaged and grease discoloration after driving a total of 55 km.

2) Grease lubrication durability performance test results

Reciprocating test of LM bearing (die-attach application) Driving distance (km) Damage type Pass or not Third party ‘A’ (Japan) 5,500 End cap broken
(Ganggu leaving) fail Third party ‘B’ (Japan) 2,700 End cap broken
(Ganggu leaving) fail Third party ‘C’ (domestic) 1,780 End cap broken
(Ganggu leaving) fail ‘HT-Z1’ (present invention) 22,000 doesn't exist pass

Referring to [Table 6] and Figure 2, both the existing company's 'A' and 'B' (Japan) and company's 'C' (Korea) were damaged within 6,000 km, and the end cap within the LM block was damaged and the steel ball was separated, and the LM block was damaged. While it cannot be applied in a clean room due to the attachment of grease and abrasive particle contaminants to the rail surface,

The 'HT-Z1' of the present invention met the requirement of 22,000 km and was in a clean condition without any damage to the LM block end cap and no adhesion of grease or abrasion particle contaminants to the surface of the LM rail.

Crossed roller bearing (wire-bonding applied) Driving distance (km) Damage type Pass or not Third party ‘D’ (Taiwan) 8.2 pinion gear broken
greek yellowing fail Third party ‘E’ (domestic) 15.6 pinion gear broken
Severe roller wear fail ‘HT-Z1’ (present invention) 55 doesn't exist pass

Referring to [Table 7] and Figure 3, both the existing company's 'D' (Taiwan) and the company's 'E' (Korea) suffered serious damage to the central axis pinion gear within 20 km, resulting in wear of the roller and heat and carbonization of the grease. While vibration occurred due to the phenomenon,

The 'HT-Z1' of the present invention satisfies the requirement of 41.47 km, and after driving 55 km, there were no signs of wear on the pinion gear and roller, and there was no change in color or performance of the grease.

For reference, lubricating products such as lubricating oil and grease reduce frictional heat by lowering the coefficient of friction between metal surfaces and prevent damage to the lubricant due to frictional heat. The fundamental purpose of using lubricating products is to extend the life of machinery (all lubricating products The key to competition is lowering this friction coefficient and maintaining lubrication durability).

Due to the nature of the fluorine-containing grease applied to semiconductor production equipment in clean rooms of the present invention, in the manufacturing environment of clean rooms of 10,000 class or less, the composition ingredients are mixed in a mixing container based on the composition ratios of the examples described above. It is manufactured into a gel state through a mixing process for a certain period of time, and the thickener is distributed at a certain ratio through the first 3-mill rolling process and the third 3-mill rolling process to form a thickener and base oil. It is manufactured to minimize oil separation.

The fluorine-containing grease of the present invention manufactured through the above process has a thinner lubricating film when used in semiconductor assembly process equipment, ionic bonding with the metal surface, and strong lubricating strength, so it has excellent heat and oxidation stability without being damaged under a load of up to 400kgf. Forms a semi-permanent form of lubrication.

In addition, it is designed with a lead grade of "#3" (220~250: ASTM D217), so due to the nature of die-attach and wire-bonding equipment, the load condition is light under 400Kgf/㎟, and the bearing part model number is small and narrow in the range of 25㎜ or less. As it is realistically difficult to remove existing grease, clean, and re-inject or re-grease grease in a short stroke range within 200 mm in most spaces, grease is applied and filled during the initial assembly of the equipment to respond to a long-term re-lubrication cycle of more than 2 years, and the reason and flowability of the grease It is essential to minimize particle scattering and oscillation by preventing .

In this way, due to the nature of the grease applied with die-attach and wire-bonding equipment, the grease-based grade is designed to be hard and prevents wetting to minimize particle scattering and dust generation, and the viscosity grade of the lube base oil in the grease is produced. Considering that the Speed Factor (Dm.N) of the bearing in the equipment is 620,000~950,000, it is configured in the range of 15~32 ㎟/s to respond to high speeds of 10G or more. Synthetic oil with excellent durability quality of lube base oil must be applied to ensure extreme stability at high temperatures. It is high and has excellent performance in preventing equipment wear.

The physical property test results of the fluorine-containing grease applied to the semiconductor production equipment of the present invention are shown in [Table 8] below.

Test Items unit standard this invention Test Methods Mixed lead (25℃) 1/10mm 220-250 240 KS M 2032 NLGI rating - 3 3 - thickener - - PTFE - Base oil viscosity (VG 40℃, 100℃) cSt - 15~32, 6~12 KS M 2014 dropping point ℃ 220 and above doesn't exist KS M 2033 Copper plate corrosion (100℃/24h) - No color change 1a KS M 2088 Evaporation amount (99℃/22h) % 1.8 or less 0.19 KS M 2037 Mixing stability (25℃) 1/10mm 250 or less 238 KS M 2051 Iyudo (100℃/24h) % 5.0 or less 0.08 KS M 2050 4 ball wear mm - 0.412 ASTM D2266

In addition, the comparison between the fluorine-containing grease applied to the semiconductor production equipment of the present invention and the grease of other companies (products A and B) for semiconductor equipment currently in use is shown in [Table 9] below.

Test Items ASTM KS M A product B product product of the present invention State capital (NLGI) ASTM D217 # One #3 #3 thickener - - Li soap Li soap PTFE Base Oil Type type - Phenyl Ether Group 3 PFPE+PAO VG 40℃ ASTM D445 KS M 2014 113.9 32 15~32 VG 100℃ 13.91 3 6~12 Evaporation amount wt% ASTM D972 KS M 2037 1.96 5.6 0.19 Reason wt% ASTM D1742 KS M 2050 3.4 6.1 0.08 Copper plate corrosion ASTM D4048 KS M 2088 1a 1a 1a 4-ball wear mm ASTM D2266 1.72 0.989 0.412 4 ball extreme pressure kgf ASTM D2596 160 185 400 or less Viscosity index ASTM D2270 KS M 2014 135 123 195~220

The embodiments of the present invention described above are only some of the various embodiments of the present invention. The base oil of the present invention uses a reactive fluorine raw material (polymer modifier) that makes perfluoropolyether (PFPE) + synthetic oil (PAO), and uses a viscosity grade VG15~32cSt reactive base oil that has only the advantages of both materials. , the use of polytetrafluoroethylene (PTFE) with nanometer (nm) particles mixed with suspending and crystal crystal structures as a thickener, and the use of organic sulfurized bis (dibutyl) as an additive. Sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum)) within 5 wt%, long chain alcohol (Hexyl-1-decanol,2) 0.5~ Included in the technical idea of fluorine-containing grease applied to semiconductor production equipment containing at least 3 wt%, GEL type sulfur-based extreme pressure additive - (Overbased Sulfonates) 1 to 5 wt%, and Polyethylene (Polyethylene) 1 to 12 wt% It is natural that various embodiments fall within the scope of protection of the present invention.

The preferred embodiments of the present invention described above have been disclosed for illustrative purposes, and those skilled in the art will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications and changes will be possible. and additions should be regarded as falling within the scope of the patent claims of the present invention.

Claims (10)

LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.
Perfluoropolyether (PFPE) 2~15 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 25~38 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~35 wt%, polyethylene (Polyethylene) 1~5 wt%, long chain alcohol (Hexyl-1- decanol,2) 0.5~3 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi. Contains at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum),
Fluorine-containing grease applied to semiconductor production equipment, characterized in that it is led grade NLGI #3 (220 mm ~ 250 mm).
LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.
Perfluoropolyether (PFPE) 5~15 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 3~8 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 30~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 15~30 wt%, polyethylene (Polyethylene) 5~10 wt%, long chain alcohol (Hexyl-1- decanol,2) 1~2 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi Contains at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum),
Fluorine-containing grease applied to semiconductor production equipment, characterized in that it is led grade NLGI #3 (220 mm ~ 250 mm).
LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.
Perfluoropolyether (PFPE) 2~17 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 2~9 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 25~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 20~30 wt%, polyethylene (Polyethylene) 3~12 wt%, long chain alcohol (Hexyl-1- decanol,2) 2~3 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi. Contains at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum),
Fluorine-containing grease applied to semiconductor production equipment, characterized in that it is led grade NLGI #3 (220 mm ~ 250 mm).
LM bearings, ball screw bearings used in process conditions where static friction is repeatedly applied 345,600 times per day according to acceleration conditions in the range of 10G to 18G, stroke distances within 300 mm, load conditions below 400 Kgf/㎟, and direction change times of 0.30 seconds or less. Applies to general ball rolling bearings and crossed roller bearing parts.
Perfluoropolyether (PFPE) 9~15 wt%, Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) 5~10 wt%, polytetrafluoro Roethylene (polytetrafluoroethylene: PTFE) 25~40 wt%, polyalphaolefin (PAO-Group Ⅳ) 15~25 wt%, polyethylene (Polyethylene) 3~12 wt%, long chain alcohol (Hexyl-1- decanol,2) 3~5 wt%, GEL type sulfur-based extreme pressure additive-(Overbased Sulfonates) 1~5 wt%, sulfurized bis(dibutylcarmabodithiato)di-μ-oxodioxodi. Contains at least 1 to 5 wt% of molybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum),
Fluorine-containing grease applied to semiconductor production equipment, characterized in that it is led grade NLGI #3 (220 mm ~ 250 mm).
According to any one of claims 1 to 4,
Consists of the perfluoropolyether (PFPE), polyalphaolefin (PAO-Group Ⅳ), and ethene tetrafluoro (Ethene, tetrafluoro-, oxidized, polymd., reduced, Me esters, reduced, ethoxylated) A fluorine-containing grease applied to semiconductor production equipment, characterized in that the viscosity grade of the lube base oil is VG 40℃ (15~32) and VG 100℃ (6~12).
According to any one of claims 1 to 4,
A fluorine-containing grease applied to semiconductor production equipment, characterized in that the lubricity (wt%) of the fluorine-containing grease is 0.5 or less.
According to any one of claims 1 to 4,
A fluorine-containing grease applied to semiconductor production equipment, characterized in that the 4-ball wear test (ASTM D2266) result of the fluorine-containing grease is 0.40 mm to 0.49 mm.
According to any one of claims 1 to 4,
A fluorine-containing grease applied to semiconductor production equipment, characterized in that the 4-ball load test (ASTM D2596) result of the fluorine-containing grease is 200kgf to 400kgf.
According to any one of claims 1 to 4,
The sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum (sulfurized bis (dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) is yellow molybdenum disulfide, and its color changes at high temperatures above 260°C. A fluorine-containing grease applied to semiconductor production equipment, which uses the property of changing from yellow to dark green to serve as a warning indicator of temperature rises above 180°C in semiconductor equipment.
According to any one of claims 1 to 4,
The fluorine-containing grease includes the gel-type sulfur-based extreme pressure additive (Overbased Sulfonates) and exhibits rust prevention performance for more than 120 hours based on a 5% salt water spray (KS M 2109) test. Fluorine applied to semiconductor production equipment Contains grease.