JP5073986B2 - Grease composition and bearing - Google Patents
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- JP5073986B2 JP5073986B2 JP2006210014A JP2006210014A JP5073986B2 JP 5073986 B2 JP5073986 B2 JP 5073986B2 JP 2006210014 A JP2006210014 A JP 2006210014A JP 2006210014 A JP2006210014 A JP 2006210014A JP 5073986 B2 JP5073986 B2 JP 5073986B2
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本発明は、グリース組成物及び軸受に関し、特に、真空環境下で使用される転がり軸受用として好適なグリース組成物及びこれを封入した軸受に関する。 The present invention relates to a grease composition and a bearing, and more particularly to a grease composition suitable for a rolling bearing used in a vacuum environment and a bearing in which the grease composition is sealed.
半導体の製造は、一般に真空下で行われる場合が多い。従って、このような真空環境中で使用されるモータなどに使用される転がり軸受用の潤滑グリースには、蒸気圧が低く、蒸発により涸渇しない性能が求められる。
従来、このような真空環境中では、ＰＦＰＥ（パーフルオロアルキルポリエーテル）を基油としたグリースが使用されている。特にこの真空分野では、２次蒸留などを行い、蒸気圧を低くしたＰＦＰＥを基油としたグリースが使用されている。この蒸気圧を特に低くしたＰＦＰＥとしては、ソルベイ社製フォンブリン YHVAC140/13，同フォンブリンZ25，ダイキン社製デムナム S200が市販されており、これらを基油とし、ＰＴＦＥを増ちょう剤としたグリースが使われている（非特許文献１及び２）。
しかし、最近の長寿命化指向に対しては、上記の単に蒸気圧を低くしたＰＦＰＥを基油としたグリースを使用するだけでは、満足されなくなってきている。
In general, a semiconductor is often manufactured under a vacuum. Accordingly, a lubricating grease for a rolling bearing used in a motor or the like used in such a vacuum environment is required to have a low vapor pressure and a performance that does not deplete due to evaporation.
Conventionally, in such a vacuum environment, grease using PFPE (perfluoroalkyl polyether) as a base oil has been used. Particularly in this vacuum field, grease based on PFPE having a low vapor pressure by secondary distillation or the like is used. PFPE with a particularly low vapor pressure includes Solvay's Fomblin YHVAC140 / 13, Fomblin Z25, and Daikin's demnum S200. These are base oils with PTFE as a thickener. Is used (Non-patent Documents 1 and 2).
However, for the recent trend toward longer life, it is no longer satisfactory to simply use the above-mentioned grease based on PFPE with a low vapor pressure.
この長寿命化に関しては、先ず厚い潤滑油膜を形成できることが求められる。これは転がり疲れ寿命の延長だけではなく、真空下で油膜が薄く金属表面が直接に接するようになると、空気中と異なり酸化皮膜の保護がないため、ただちに焼付いてしまう場合も少なくないためである。この油膜は、高速回転時より低速回転時の方が薄くなる。従って、グリースには第一に、低速回転条件下でも厚い油膜を形成できることが求められる。
油膜の厚膜化は、通常は、基油の動粘度を高くすることによりなされる。しかし、単に基油の動粘度を高くするだけでは、長寿命化に必要な、有効な油膜厚さを得ることができない。
また、同様に重要な性能として、潤滑中のグリース減量の小さいことが求められる。静的条件では蒸気圧のみを指標とできるが、潤滑条件ではトライボ化学反応により一部のＰＦＰＥが分解してしまうことが知られている。従って、転がり軸受の潤滑条件下でも、単に蒸発減量が小さいだけでなく、ＰＦＰＥの分解による減量も小さくすることが求められる。さらに寿命以外の要求特性として、低温性、すなわち、低温下でも充分低いトルクで回転させることができるという特性が求められる。
In order to extend the life, it is first required that a thick lubricating oil film can be formed. This is not only an extension of the rolling fatigue life, but also when the oil film is thin and the metal surface comes into direct contact under vacuum, unlike the air, there is no protection of the oxide film, so there are many cases where it will burn out immediately. . This oil film is thinner at low speed than at high speed. Therefore, the grease is first required to be able to form a thick oil film even under low-speed rotation conditions.
The thickening of the oil film is usually performed by increasing the kinematic viscosity of the base oil. However, simply increasing the kinematic viscosity of the base oil cannot provide an effective oil film thickness necessary for extending the service life.
Similarly, as an important performance, it is required that the weight loss of grease during lubrication is small. It is known that only the vapor pressure can be used as an index under static conditions, but a part of PFPE is decomposed by tribochemical reaction under lubrication conditions. Therefore, it is required to reduce not only the evaporation loss but also the loss due to the decomposition of PFPE even under the lubricating condition of the rolling bearing. Furthermore, as a required characteristic other than the life, a low temperature property, that is, a characteristic that the motor can be rotated with a sufficiently low torque even at a low temperature is required.
従って、本発明の目的は、蒸気圧が低く、厚い油膜を形成することができ、潤滑中の減量が小さく、低温性に優れており、被潤滑物の寿命を延長することができるグリース組成物を提供することである。
本発明の他の目的は、上記グリース組成物を封入した軸受を提供することである。
Accordingly, an object of the present invention is to provide a grease composition that has a low vapor pressure, can form a thick oil film, has a small weight loss during lubrication, is excellent in low temperature properties, and can extend the life of an object to be lubricated. Is to provide.
Another object of the present invention is to provide a bearing in which the grease composition is enclosed.
本発明は以下に示すグリース組成物及びこれを封入した軸受を提供するものである。
１．増ちょう剤と基油を含むグリース組成物において、増ちょう剤として、１次粒径が０．１μｍ以下のポリテトラフルオロエチレンと１次粒径が０．１μｍ超０．５μｍ以下のポリテトラフルオロエチレンを含有することを特徴とするグリース組成物。
２．１次粒径が０．１μｍ以下のポリテトラフルオロエチレンと１次粒径が０．１μｍ超０．５μｍ以下のポリテトラフルオロエチレンの質量比が１０：９０〜９０：１０である上記１記載のグリース組成物。
３．基油がパーフルオロアルキルポリエーテルである上記１又は２記載のグリース組成物。
４．パーフルオロアルキルポリエーテルの分子構造が、枝分かれを持たない直鎖構造であり、かつ−ＯＣＦ2−ユニット（アセタール結合）を持たないことを特徴とする上記３記載のグリース組成物。
５．基油の４０℃における動粘度が８０〜２５０ｍｍ2／ｓである上記４記載のグリース組成物。
６．真空環境下の転がり軸受に使用される上記３〜５のいずれか１項記載のグリース組成物。
７．上記１〜６のいずれか１項記載のグリース組成物を封入した転がり軸受。
The present invention provides the following grease composition and a bearing in which the grease composition is enclosed.
1. In a grease composition containing a thickener and a base oil, as a thickener, polytetrafluoroethylene having a primary particle size of 0.1 μm or less and polytetrafluoroethylene having a primary particle size of more than 0.1 μm and 0.5 μm or less A grease composition containing ethylene.
2.1 The mass ratio of polytetrafluoroethylene having a primary particle size of 0.1 μm or less and polytetrafluoroethylene having a primary particle size of more than 0.1 μm and 0.5 μm or less is 10:90 to 90:10 The grease composition as described.
3. 3. The grease composition according to 1 or 2 above, wherein the base oil is perfluoroalkyl polyether.
4). 4. The grease composition according to 3 above, wherein the molecular structure of the perfluoroalkyl polyether is a straight chain structure having no branching and having no —OCF 2 — unit (acetal bond).
5. 5. The grease composition according to 4 above, wherein the base oil has a kinematic viscosity at 40 ° C. of 80 to 250 mm 2 / s.
6). 6. The grease composition according to any one of 3 to 5, which is used for a rolling bearing in a vacuum environment.
7). The rolling bearing which enclosed the grease composition of any one of said 1-6.
本発明のグリース組成物は、蒸気圧が低く、厚い油膜を形成することができ、潤滑中の減量が小さく、低温性に優れている。このため、真空環境中で使用される被潤滑物の寿命を延長することができる。 The grease composition of the present invention has a low vapor pressure, can form a thick oil film, has a small weight loss during lubrication, and is excellent in low temperature properties. For this reason, the lifetime of the to-be-lubricated object used in a vacuum environment can be extended.
本発明のグリース組成物は、増ちょう剤として粒径の異なる２種以上のＰＴＦＥを使用することを特徴とするものである。本発明に使用するＰＴＦＥのうち少なくとも１種は１次粒径が０．１μｍ以下であり、他の少なくとも１種は１次粒径が０．１μｍ超０．５μｍ以下である。
これらの粒径の異なる２種以上のＰＴＦＥを使用することにより、厚い油膜、例えば、０．１μｍ以上の厚みを有する油膜を形成することができる。その理由は明らかではないが、ＰＴＦＥ粒子が、ＥＨＬ油膜に入り込むためであると考えられる。この２種類のＰＴＦＥの使用による厚膜化は、大気圧条件下で確認されたものである。従って、この厚膜化による転がり疲れの寿命延長は、大気圧下でも使用できる技術であるといえる。
The grease composition of the present invention is characterized in that two or more kinds of PTFE having different particle diameters are used as a thickener. At least one of the PTFE used in the present invention has a primary particle size of 0.1 μm or less, and at least one of the other PTFE has a primary particle size of more than 0.1 μm and 0.5 μm or less.
By using two or more kinds of PTFE having different particle diameters, a thick oil film, for example, an oil film having a thickness of 0.1 μm or more can be formed. Although the reason is not clear, it is considered that the PTFE particles enter the EHL oil film. The increase in film thickness by using these two types of PTFE has been confirmed under atmospheric pressure conditions. Therefore, it can be said that the extension of the life of rolling fatigue by increasing the thickness of the film is a technique that can be used even under atmospheric pressure.
１次粒径が０．１μｍ以下のＰＴＦＥの市販品の例としては、住友３Ｍ社製のダイニオンＴＦ９２０７が挙げられる。
１次粒径が０．１μｍ超０．５μｍ以下のＰＴＦＥの市販品の例としては、ダイキン社製ルブロンＬ２，同Ｌ５Ｆ，三井デュポンフロロケミカル社製ＴＬＰ１０Ｆ−１，旭硝子製フルオンＬ１７０，Ｌ１７１などが挙げられる。
これらの２種のＰＴＦＥは、乳化重合法や懸濁重合法により合成できる。
１次粒径の測定法は、特に限定されないが、例えば、透過型電子顕微鏡により粒子を直接観察することにより、簡便かつ高精度で行うことができる。
１次粒径が０．１μｍ以下のポリテトラフルオロエチレンと１次粒径が０．１μｍ超０．５μｍ以下のポリテトラフルオロエチレンの質量比は、好ましくは１０：９０〜９０：１０、さらに好ましくは２０：８０〜９０：１０であり、最も好ましくは２５：７５〜９０：１０である。
As an example of a commercial product of PTFE having a primary particle size of 0.1 μm or less, Dionon TF9207 manufactured by Sumitomo 3M may be mentioned.
Examples of commercially available PTFE products having a primary particle size of more than 0.1 μm and less than 0.5 μm include Daikin's Lubron L2 and L5F, Mitsui DuPont Fluorochemical Co., Ltd. TLP10F-1, Asahi Glass Fullon L170 and L171, and the like. Can be mentioned.
These two types of PTFE can be synthesized by an emulsion polymerization method or a suspension polymerization method.
The method for measuring the primary particle size is not particularly limited. For example, the primary particle size can be measured easily and accurately by directly observing the particles with a transmission electron microscope.
The mass ratio of polytetrafluoroethylene having a primary particle size of 0.1 μm or less and polytetrafluoroethylene having a primary particle size of more than 0.1 μm and 0.5 μm or less is preferably 10:90 to 90:10, more preferably Is 20:80 to 90:10, most preferably 25:75 to 90:10.
本発明のグリース組成物の増ちょう剤としては、上記特定粒径のＰＴＦＥの他に、基油に分散し、これを半固体にできる粉体材料や、固体潤滑剤は全て増ちょう剤として使用できる。このような増ちょう剤としては、上記特定粒径のＰＴＦＥ以外のＰＴＦＥ、Ｌｉ石けんやＬｉコンプレックス石けんに代表される石けん系増ちょう剤、ジウレアに代表されるウレア系増ちょう剤、カーボンブラックなどに代表される有機系増ちょう剤、有機化クレイやシリカに代表される無機系増ちょう剤、二硫化モリブデンやグラファイト、ＭＣＡ、窒化ホウ素、フッ化黒鉛などの固体潤滑剤も使用可能である。
本発明のグリース組成物において増ちょう剤として使用される上記特定粒径のＰＴＦＥの量は通常はグリース組成物全体に対して、好ましくは１５〜４０質量％、さらに好ましくは２０〜４０質量％である。また、増ちょう剤全体に対して、好ましくは２０〜１００質量％、さらに好ましくは５０〜１００質量％である。
As a thickener of the grease composition of the present invention, in addition to the above-mentioned PTFE having a specific particle size, all powder materials and solid lubricants that can be dispersed in a base oil and made semi-solid can be used as a thickener. it can. Examples of such thickeners include PTFE other than PTFE having the above specific particle size, soap-type thickeners represented by Li soap and Li complex soap, urea-type thickeners represented by diurea, carbon black and the like. Organic lubricants represented by organic thickeners, inorganic thickeners represented by organic clay and silica, and solid lubricants such as molybdenum disulfide, graphite, MCA, boron nitride, and graphite fluoride can also be used.
The amount of PTFE having a specific particle size used as a thickener in the grease composition of the present invention is usually preferably 15 to 40% by mass, more preferably 20 to 40% by mass, based on the entire grease composition. is there. Moreover, Preferably it is 20-100 mass% with respect to the whole thickener, More preferably, it is 50-100 mass%.
本発明のグリース組成物に使用する基油としては、ＰＦＰＥ、鉱油、エステル系合成油、合成炭化水素油、ポリグリコール系合成油、フェニルエーテル系合成油、シリコーン系合成油等が挙げられる。蒸気圧が低く、真空で使用できる点でＰＦＰＥやシクロペンタン油が好ましい。真空下での長寿命を実現するためには、ＰＦＰＥの中でも、下記の分子構造のものがさらに好ましい。
（１）枝分かれを持たない直鎖状の分子構造
（２）分子中に−ＣＦ2Ｏ−ユニット（アセタール結合）を持たないもの
（１）の直鎖状のＰＦＰＥは、その立体障害が少ない構造から、流動性に優れる。すなわち、低温でも流動性を失わないことから、低温性に優れる（文献１：月間トライボロジー２，（１９８８）１５）。
（２）の−ＣＦ2Ｏ−ユニットを持たないものは、−ＣＦ2Ｏ−ユニットを持つものはフッ素の持つ電子吸引効果が不充分なため、他のＰＦＰＥより耐熱性や耐薬品性がやや弱く（文献１）、ＥＨＬ条件下で分解し易く、粘度低下し易いためである（文献２：日本トライボロジー学会トライボロジー会議予稿集（鳥取２００４−１１）３７７）。
Examples of the base oil used in the grease composition of the present invention include PFPE, mineral oil, ester synthetic oil, synthetic hydrocarbon oil, polyglycol synthetic oil, phenyl ether synthetic oil, and silicone synthetic oil. PFPE and cyclopentane oil are preferred because they have a low vapor pressure and can be used in a vacuum. In order to realize a long life under vacuum, among the PFPEs, those having the following molecular structure are more preferable.
(1) linear PFPE of -CF 2 O-units having no (acetal bonds) (1) is in the linear molecular structure (2) molecules having no branching, the steric hindrance is small structures Therefore, it has excellent fluidity. That is, since fluidity is not lost even at low temperatures, it is excellent in low temperature properties (Reference 1: Monthly Tribology 2, (1988) 15).
(2) having no -CF 2 O-units are, for those with a -CF 2 O-units is insufficient electron withdrawing effect with the fluorine, the heat resistance and chemical resistance than other PFPE slightly This is because it is weak (Reference 1), easily decomposes under EHL conditions, and easily decreases in viscosity (Reference 2: Proceedings of Tribology Conference of the Japanese Society of Tribology (Tottori 2004-11) 377).
分子構造が枝分かれを持たない直鎖構造で、かつ−ＣＦ2Ｏ−ユニットを持たないＰＦＰＥの市販品の例としては、ダイキン社製デムナムシリーズが挙げられる。デムナムシリーズのうち、好ましいものは、蒸気圧が低い高粘度タイプのデムナムＳ−１００，Ｓ−２００であり、特に好ましいものは、デムナムＳ−２００である。
真空下の使用でなければ、基油は特に制限されない。
しかし、本発明のグリース組成物に使用する基油は、ＰＦＰＥを、好ましくは５０質量％以上、さらに好ましくは６０質量％以上含むものが望ましく、１００質量％のものが最も好ましい。
本発明のグリース組成物に使用する基油の４０℃における動粘度は、好ましくは８０〜２５０ｍｍ2／ｓ、さらに好ましくは１５０〜２５０ｍｍ2／ｓである。動粘度がこの範囲より低いと油膜厚さを大きくすることが困難になり、この範囲より高いと低温トルクが高くなる傾向がある。
As an example of a commercial product of PFPE having a linear structure having no branching in the molecular structure and having no —CF 2 O— unit, there is a demnum series manufactured by Daikin. Among the demnum series, high viscosity type demnum S-100 and S-200 having a low vapor pressure are preferable, and demnum S-200 is particularly preferable.
The base oil is not particularly limited unless it is used under vacuum.
However, the base oil used in the grease composition of the present invention preferably contains 50% by mass or more, more preferably 60% by mass or more, and most preferably 100% by mass of PFPE.
The kinematic viscosity at 40 ° C. of the base oil used in the grease composition of the present invention is preferably 80 to 250 mm 2 / s, more preferably 150 to 250 mm 2 / s. If the kinematic viscosity is lower than this range, it is difficult to increase the oil film thickness, and if it is higher than this range, the low-temperature torque tends to increase.
本発明のグリース組成物には、通常のグリース組成物に使用される添加剤、例えば、酸化防止剤、錆止め剤、金属腐食防止剤、油性剤、耐摩耗剤、極圧剤、二硫化モリブデンやグラファイト等の固体潤滑剤などを含有させることができる。 The grease composition of the present invention includes additives used in ordinary grease compositions, such as antioxidants, rust inhibitors, metal corrosion inhibitors, oiliness agents, antiwear agents, extreme pressure agents, molybdenum disulfide, A solid lubricant such as graphite can be contained.
本発明のグリース組成物が厚い油膜を形成できる理由は、次のように考えられる。
１次粒径が０．１μｍ以下のＰＴＦＥがＥＨＬ油膜に入り込み油膜を厚くする。そこで接触面を持ち上げると０．１μｍ超０．５μｍ以下のＰＴＦＥも入りやすくなり、さらに油膜を厚くする。
０．１μｍ以下のＰＴＦＥのみを使用すると、最初の持ち上げ効果しか発現しないため、充分な油膜厚さにはならない。また、０．１μｍ超０．５μｍ以下のＰＴＦＥのみを使用すると、粒子が大き過ぎて、最初の持ち上げ効果が発現せず、油膜は基油のみと同じであり、厚くならない。全て０．５μｍ以上の場合は、言うまでもなく、粒子が大き過ぎてＥＨＬ油膜に入り込みができない。
The reason why the grease composition of the present invention can form a thick oil film is considered as follows.
PTFE having a primary particle size of 0.1 μm or less enters the EHL oil film and thickens the oil film. Therefore, when the contact surface is lifted, PTFE having a thickness of more than 0.1 μm and not more than 0.5 μm easily enters, and the oil film is further thickened.
If only PTFE of 0.1 μm or less is used, only the first lifting effect is exhibited, so that the oil film thickness is not sufficient. Moreover, when only PTFE of more than 0.1 μm and 0.5 μm or less is used, the particles are too large and the initial lifting effect is not exhibited, and the oil film is the same as the base oil alone and does not become thick. Needless to say, if all are 0.5 μm or more, the particles are too large to enter the EHL oil film.
実施例
＜試験グリース＞
表１に示される基油（ＰＦＰＥ）に増ちよう剤（ＰＴＦＥ）を加え、よく攪拌し、３本ロールミルを通しグリースに仕上げた。
＜試験方法＞
・混和ちょう度 ：ＪＩＳ Ｋ２２２０ に規定される試験機，試験方怯
・油膜厚さ ：測定装置…光干渉式ＥＨＬ油膜厚さ測定装置
：測定条件…試験温度：６８℃，転がり速度：０．０１ｍ／ｓ，面圧０．５５ＧＰａ
・グリース減量速度：
測定方法…真空槽の中でグリースを充填した軸受を回転させ、定期的に質量を測定し、グリースの減量速度を算出する。
測定条件…軸受：６９０６
内外輪及び玉の材質：ＳＵＳ４４０Ｃ
グリース充填量：０．５ｇ
回転速度：±５０ｒｐｍ
アキシャル荷重：２１３Ｎ
揺動角：１８０°
雰囲気圧力：１０-4Ｐａ台，温度：１００℃
質量測定：１００〜１５０ｈ毎
・低温トルク ：ＪＩＳ Ｋ２２２０に規定される試験機，試験方法(-40℃)
試験結果を表１に示す
Example <Test Grease>
A thickener (PTFE) was added to the base oil (PFPE) shown in Table 1, stirred well, and passed through a three-roll mill to finish the grease.
<Test method>
・ Mixing penetration: Testing machine, test method specified in JIS K2220, Oil film thickness: Measuring device: Optical interference type EHL oil film thickness measuring device
: Measurement conditions: Test temperature: 68 ° C., rolling speed: 0.01 m / s, surface pressure 0.55 GPa
・ Grease weight loss speed:
Measuring method: Rotate a bearing filled with grease in a vacuum chamber, periodically measure the mass, and calculate the grease reduction rate.
Measurement conditions: Bearing: 6906
Material of inner and outer rings and balls: SUS440C
Grease filling amount: 0.5g
Rotation speed: ± 50rpm
Axial load: 213N
Swing angle: 180 °
Atmospheric pressure: 10 −4 Pa level, temperature: 100 ° C.
Mass measurement: Every 100-150h Low temperature torque: Testing machine and test method specified in JIS K2220 (-40 ° C)
The test results are shown in Table 1.
実施例１、２のグリース組成物は、油膜厚さがいずれも０．１１μｍを超えている。実施例１は、基油として‐ＯＣＦ2−を含有するＰＦＰＥを使用しているので、真空下のグリース減量が大きい。実施例２は、基油として側鎖構造のＰＦＰＥを使用しているので、低温性が劣る。
実施例３〜５のグリース組成物は、基油として直鎖構造を持ち、‐ＯＣＦ2‐を持たないＰＦＰＥを使用し、ちょう度をＮｏ．２，Ｎｏ．１，Ｎｏ．３グレードとしたものである。油膜厚さは０．１１μｍを超え、グリース減量速度も１０-4台であり、低温トルクも起動トルクが２００ｍＮ・ｍ以下と小さく、充分満足な性能を示している。
１次粒径が０．１μｍ以下のＰＴＦＥのみを使用した比較例１のグリース組成物では油膜厚さが小さい。
１次粒径が０．１μｍ超０．５μｍ以下のＰＴＦＥのみを使用した比較例２のグリース組成物では油膜厚さがさらに小さい。
比較例２において動粘度の高い基油を使用した比較例３のグリース組成物では、油膜厚さはやや大きくなるが、１次粒径が０．１μｍ以下のＰＴＦＥを使用していないため、実施例のグリース組成物の油膜厚さにははるかに及ばない。
In the grease compositions of Examples 1 and 2, the oil film thickness exceeds 0.11 μm. Since Example 1 uses PFPE containing -OCF 2- as the base oil, the grease loss under vacuum is large. Since Example 2 uses PFPE having a side chain structure as the base oil, the low temperature property is inferior.
The grease compositions of Examples 3 to 5 use PFPE having a linear structure as a base oil and having no -OCF 2- , and having a consistency of No. 2, no. 1, No. 1 Three grades are used. The oil film thickness exceeds 0.11 μm, the grease weight reduction rate is 10 −4 units, and the low-temperature torque is as low as 200 mN · m or less, indicating a sufficiently satisfactory performance.
In the grease composition of Comparative Example 1 using only PTFE having a primary particle size of 0.1 μm or less, the oil film thickness is small.
In the grease composition of Comparative Example 2 using only PTFE having a primary particle size of more than 0.1 μm and not more than 0.5 μm, the oil film thickness is even smaller.
In the grease composition of Comparative Example 3 using a base oil having a high kinematic viscosity in Comparative Example 2, the oil film thickness is slightly increased, but PTFE having a primary particle size of 0.1 μm or less is not used. The oil film thickness of the example grease composition is far below.
PTFE A:住友3M社製造 ダイニオンTF9207 １次粒径0.1μm
PTFE B:ダイキン社製 ルブロンL2 １次粒径0.2μm
PTFE C:ダイキン社製 ルブロンL5F １次粒径0.2μm
PFPE A:ダイキン社製 デムナムS200
(直鎖,-CF2O-なし)、動粘度:200mm2/s(40℃)、蒸気圧:1×10-7Pa(50℃)
PFPE B:ソルベイ社製 フォンブリンZ25
(直鎖,-CF2O-あり)、動粘度:159mm2/s(40℃)、蒸気圧:1×10-9Pa(50℃)
PFPE C:ソルベイ社製 フォンブリンYHVAC140/13
(側鎖)、動粘度:400mm2/s(40℃)、蒸気圧:1×10-8Pa(50℃)
PTFE A: Manufactured by Sumitomo 3M Dinion TF9207 Primary particle size 0.1μm
PTFE B: Daikin's Lubron L2 primary particle size 0.2μm
PTFE C: Daikin's Lubron L5F primary particle size 0.2μm
PFPE A: Daikin demnum S200
(Linear, without -CF 2 O-), kinematic viscosity: 200 mm 2 / s (40 ° C), vapor pressure: 1 x 10 -7 Pa (50 ° C)
PFPE B: Solvay Fomblin Z25
(Linear, with -CF 2 O-), kinematic viscosity: 159 mm 2 / s (40 ° C), vapor pressure: 1 x 10 -9 Pa (50 ° C)
PFPE C: Solvay Fomblin YHVAC140 / 13
(Side chain), Kinematic viscosity: 400 mm 2 / s (40 ° C), Vapor pressure: 1 × 10 -8 Pa (50 ° C)
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020071576A1 (en) * | 2018-10-01 | 2020-04-09 | 최인석 | Fluorine-containing grease for semiconductor equipment |
| EP3783088A1 (en) | 2019-08-23 | 2021-02-24 | Canon Kabushiki Kaisha | Lubricant composition, sliding apparatus, fixing apparatus, and image-forming apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2012102157A (en) | 2010-11-05 | 2012-05-31 | Nok Kluber Kk | Lubricant composition |
| US9581943B2 (en) * | 2014-04-30 | 2017-02-28 | Canon Kabushiki Kaisha | Heat fixing apparatus and grease composition for the heat fixing apparatus |
| JP6218127B2 (en) * | 2016-11-04 | 2017-10-25 | Ｎｏｋクリューバー株式会社 | Lubricant composition |
| CN109097171B (en) * | 2018-09-25 | 2021-05-28 | 中国石油化工股份有限公司 | Oil film bearing oil composition and preparation method thereof |
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| JP5042401B2 (en) * | 1998-10-14 | 2012-10-03 | 日本精工株式会社 | Rolling bearing for automobile fuel injection control |
| JP4239514B2 (en) * | 2001-10-04 | 2009-03-18 | 日本精工株式会社 | Rolling bearing |
| JP3875108B2 (en) * | 2002-01-15 | 2007-01-31 | Ｎｏｋクリューバー株式会社 | Low torque grease composition |
| JP2003293797A (en) * | 2002-04-08 | 2003-10-15 | Minebea Co Ltd | Bearing for electronic controlled throttle motor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020071576A1 (en) * | 2018-10-01 | 2020-04-09 | 최인석 | Fluorine-containing grease for semiconductor equipment |
| EP3783088A1 (en) | 2019-08-23 | 2021-02-24 | Canon Kabushiki Kaisha | Lubricant composition, sliding apparatus, fixing apparatus, and image-forming apparatus |
| US11414620B2 (en) | 2019-08-23 | 2022-08-16 | Canon Kabushiki Kaisha | Lubricant composition, sliding apparatus, fixing apparatus, and image-forming apparatus |
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