KR20240004908A - Cross web tension measurement and control - Google Patents

Abstract

This disclosure generally relates to systems and methods for transporting a web through a web processing device. In one aspect, a web tension adjustment unit is provided for guiding the web. The web tension adjustment unit includes a first guide roller. The first guide roller includes an adjustment unit. The web tensioning unit further includes one or more first non-contact sensors positioned to measure displacement data of the web at a first location. The web tension adjustment unit further includes a system controller for controlling the adjustment unit based on the measured displacement data.

Description

Cross web tension measurement and control

[0001] This disclosure generally relates to systems and methods for transporting a web via a web processing apparatus.

[0002] Web handling is a key factor when processing continuous webs. The many rollers handling hundreds of meters or even kilometers of web must be arranged and operated in such a way that no damage occurs in the web, especially unilateral thermal damage such as wrinkles, tears, etc. However, the web thickness of, for example, plastic or metal foils may vary across the width of the substrate. Additionally, sometimes the web is wound on storage spool rollers with different internal tensions across the width of the web.

[0003] It is undesirable for defects to occur during web processing such as web coating. These defects can lead to a complete halt in production and/or rejection of parts or all of the processed web. In other words, web guiding malfunctions can be very costly and time consuming.

[0004] Moreover, there are significant space constraints in current web processing devices, such as coating devices. Additionally, in many applications the web must not touch or be guided on one side of the web at all, i.e. the coated side of the web or foil. As a result, the design of the path of the web through a web processing device, such as a coating device, is inherently limited.

[0005] Accordingly, a need exists for systems and methods for monitoring and controlling a web as it moves through a processing system.

[0006] This disclosure generally relates to systems and methods for transporting a web through a web processing device.

[0007] In one aspect, a web tension adjustment unit is provided for guiding the web. The web tension adjustment unit includes a first guide roller. The first guide roller includes an adjustment unit. The web tensioning unit further includes one or more first non-contact sensors positioned to measure displacement data of the web at a first location. The web tension adjustment unit further includes a system controller for controlling the adjustment unit based on the measured displacement data.

[0008] Implementations may include one or more of the following: The one or more first non-contact sensors are selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof. The one or more first non-contact sensors include at least two sensors arranged in a transverse direction across the web, perpendicular to the direction of movement of the web. The first location is between the first guide roller and the second roller, where the web is in a free span position. One or more first non-contact sensors measure the angle of reflection of the web. The web tensioning unit further comprises one or more second non-contact sensors positioned opposite the one or more first non-contact sensors to monitor cross-web tension and thereby monitor a second side of the web at a first location. do. The adjustment unit is positioned at the first end of the first guide roller. The steering unit includes a motor. The system controller is a closed-loop controller and the measured displacement data is used as a variable feedback signal. The system controller includes one of analog electronics and digital electronics.

[0009] In another aspect, a web processing apparatus is provided. The web processing device includes at least one web tension adjustment unit for guiding the web. The web tension adjustment unit includes a first guide roller. The first guide roller includes an adjustment unit. The adjustment unit includes one or more first non-contact sensors positioned to measure displacement data of the web at a first location. The web tension adjustment unit further includes a system controller for controlling the adjustment unit based on the measured displacement data.

[0010] Implementations may include one or more of the following: The web processing device further includes a coating unit for coating the web. The one or more first non-contact sensors are selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof. The one or more first non-contact sensors include at least a first sensor and a second sensor arranged in a transverse direction across the web, perpendicular to the direction of movement of the web. The first location is between the first guide roller and the second roller, where the web is in a free span position. The first sensor is positioned to measure the displacement of the web at a first location along the transverse direction, and the second sensor is positioned to measure the displacement of the web at a second location along the transverse direction. One or more first non-contact sensors measure the angle of reflection of the web. The system controller is configured to calculate a signal for adjusting the position of the first guide roller based on the measured reflection angle of the web such that after adjustment, the tension of the web on both sides is equal.

[0011] In another aspect, a method for processing a web is provided. The method includes guiding a web using at least one web tensioning unit. The web tension adjustment unit includes a first guide roller including the adjustment unit. The web tensioning unit includes one or more first non-contact sensors positioned to measure the displacement of the web at a first location. The method further includes measuring the displacement of the web at the first location. The method further includes adjusting the position of the first guide roller by moving one end of the first guide roller, wherein the adjusting step is based on the measured displacement of the web.

[0012] Implementations may include one or more of the following: The method further includes calculating a signal for adjusting the position of the first guide roller based on the measured displacement data, wherein after adjustment, the tension of the web on both sides is the same. The method further includes coating the web with a layer of material after adjusting the position of the first guide roller. The one or more first non-contact sensors are selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof. The one or more first non-contact sensors include at least a first sensor and a second sensor arranged in a transverse direction across the web, perpendicular to the direction of movement of the web. The first location is between the first guide roller and the second roller, where the web is in a free span position. The first sensor is positioned to measure the displacement of the web at a first location along the transverse direction, and the second sensor is positioned to measure the displacement of the web at a second location along the transverse direction. One or more first non-contact sensors measure the angle of reflection of the web. The method further includes calculating a signal for adjusting the position of the first guide roller based on the measured reflection angle of the web, wherein after adjustment, the tension of the web on both sides is the same.

[0013] In another aspect, instructions are stored on a non-transitory computer readable medium where, when executed by a processor, they cause a process to perform the operations of the apparatus and/or method.

[0014] In a manner that the above-enumerated features of the present disclosure may be understood in detail, a more detailed description of the implementations briefly summarized above may be made with reference to the implementations, some of which are illustrated in the accompanying drawings. It is done. However, it should be noted that the accompanying drawings illustrate only typical implementations of the disclosure and should not be considered limiting the scope of the disclosure, as the disclosure may permit other equally effective implementations. Because there is.
[0015] Figure 1 illustrates a schematic cross-sectional view of a web processing device in accordance with one or more implementations of the present disclosure.
[0016] Figure 2 illustrates a schematic cross-sectional view of a web tension adjustment unit according to one or more implementations of the present disclosure.
[0017] Figure 3 illustrates a schematic top view of the web tension adjustment unit of Figure 2 in accordance with one or more implementations of the present disclosure.
[0018] Figure 4 illustrates a schematic cross-sectional view of a roller incorporating an adjustment unit according to one or more implementations of the present disclosure.
[0019] Figure 5 illustrates a flow diagram of a method of adjusting web tension in accordance with one or more implementations of the present disclosure.
[0020] Figure 6A illustrates a plot of sensor readings according to one or more implementations of the present disclosure.
[0021] Figure 6B illustrates a plot of sensor readings according to one or more implementations of the present disclosure.
[0022] Figure 7 illustrates a signal flow chart for adjusting web tension in accordance with one or more implementations of the present disclosure.
[0023] Figure 8 illustrates a schematic cross-sectional view of a web coating system incorporating a web tension adjustment unit in accordance with one or more implementations of the present disclosure.
[0024] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the drawings. It is contemplated that elements and features of one implementation may be beneficially incorporated into other implementations without further remark.

[0025] The following disclosure describes roll-to-roll deposition systems, metrology systems, and methods for monitoring and adjusting web tension of a flexible substrate or web in a roll-to-roll deposition system. Specific details are set forth in the following description and in FIGS. 1-8 to provide a thorough understanding of various implementations of the present disclosure. Other details describing well-known structures and systems often associated with adjusting web tension of a flexible substrate or web in web coating, coating metrology systems, and roll-to-roll deposition systems would unnecessarily obscure the description of various implementations. In order to avoid causing harm, it is not described in the following disclosure.

[0026] Many of the details, dimensions, angles and other features shown in the drawings are merely illustrative of specific implementations. Accordingly, other implementations may have other details, components, dimensions, angles, and features without departing from the spirit or scope of the disclosure. Moreover, additional implementations of the present disclosure may be practiced without some of the details described below.

[0027] For purposes of describing the geometry and motion of a system, Cartesian coordinates (x, y, and z) are used. As used herein, movement along the x direction can refer to both +x and -x directions. As used herein, movement along the y direction may refer to movement along the +y and -y directions. As used herein, movement along the z direction may refer to movement along the +z and -z directions.

[0028] Implementations described herein will be described below with reference to roll-to-roll coating systems such as TopMet™, SmartWeb™, TopBeam™, all of which are available from Applied Materials, Inc., Santa Clara, California. Other tools capable of performing roll-to-roll processing may also be configured to benefit from the implementations described herein. The device description described herein is illustrative and should not be construed or understood as limiting the scope of the implementations described herein. Additionally, the implementations described herein are applicable to flexible substrates with a coating on a single side or with a coating on opposite sides or with a double-sided coating.

[0029] Although the specific substrates on which some of the implementations described herein may be practiced are not limited, it is particularly advantageous to practice them on flexible substrates, including, for example, web-based substrates, panels, and discrete sheets. Please note that The substrate may also be in the form of a foil, film, or thin plate.

[0030] It is also noted herein that the flexible substrate or web used within the implementations described herein may typically be characterized by the fact that it is bendable. The term “web” may be used as a synonym for the term “strip”, the term “flexible substrate”, etc. For example, the web described in implementations herein may be a foil. Synonyms for the term “web” include strip, foil, flexible substrate, etc. Typically, a web comprises a continuous sheet of thin, flexible material. Examples of web materials include metals, plastics, paper, etc. A web as understood herein is typically a three-dimensional solid body. The thickness of the web as understood herein may be less than 1 mm, more typically less than 500 mm or even less than 10 mm. A web as understood herein may have a width of at least 0.5 m, more typically at least 1 m or even at least 4 m. A web as understood herein typically has a length of at least 1 km, 25 km or even 60 km.

[0031] It is further noted that in some implementations where the substrate is a vertically oriented substrate, the vertically oriented substrate may be tilted with respect to the vertical plane. For example, in some implementations, the substrate can be tilted from about 1 degree to about 20 degrees from the vertical plane. In some implementations where the substrate is a horizontally oriented substrate, the horizontally oriented substrate can be tilted with respect to a horizontal plane. For example, in some implementations, the substrate can be tilted from about 1 degree to about 20 degrees from a horizontal plane. As used herein, the term “vertical” is defined as the major surface or deposition surface of a flexible conductive substrate perpendicular to the horizontal. As used herein, the term “horizontal” is defined as the major surface or deposition surface of the flexible conductive substrate being parallel to the horizon.

[0032] It is further noted that in the present disclosure, a “roll” or “roller” may be understood as a device that provides a surface with which a substrate (or part of a substrate) can be contacted during its presence in the processing system. At least some of the “rolls” or “rollers” referred to herein may comprise a circular shape for contacting the substrate to be processed or already processed. In some implementations, the “roll” or “roller” may have a cylindrical or substantially cylindrical shape. The substantially cylindrical shape may be formed around a straight longitudinal axis or may be formed around a curved longitudinal axis. According to some implementations, a “roll” or “roller” as described herein can be configured to contact a flexible substrate. For example, a “roll” or “roller” as referred to herein refers to a guiding roller configured to guide a substrate while the substrate is being processed (e.g., during a deposition process) or while the substrate is in the processing system. ; a spreader roller configured to provide a defined tension to the substrate to be coated; a deflection roller that deflects the substrate along a defined travel path; Processing rollers, such as process drums, for example coating rollers or coating drums, for supporting the substrate during processing; It may be an adjustment roller, a feed roll, a take-up roll, etc. A “roll” or “roller” as described herein may include metal. In one implementation, the surface of the roller device that will come into contact with the substrate can be configured to suit the individual substrate to be coated. Moreover, it should be understood that, according to some implementations, rollers as described herein may be mounted on low friction roller bearings, especially with a dual bearing roller architecture. Accordingly, roller parallelism of the transport arrangement as described herein can be achieved and “wandering” of the substrate in the transverse direction during substrate transport can be eliminated.

[0033] Fluctuations in tension along the web during processing due to misalignment of rollers in the web system can lead to wrinkles and other defects in the processed web, which can damage the processed web. One way to adjust the web tension in the chamber is to shut down the web system, open the web system, and physically adjust the rollers. However, this can lead to significant downtime of the web system, which can increase the cost of ownership. Additionally, these defects in the web may not be detected until after the entire web has been processed. This may lead to discarding the processed web, which may increase material costs. Accordingly, it would be advantageous to be able to monitor the tension in the web in-situ during processing and to be able to dynamically adjust the web tension in response to the monitored tension without opening the system.

[0034] Additionally, current optical monitoring systems used in web systems may have a small depth of field, for example in the range of +/-20 μm. This means that the web under irradiation should not change its position by more than +/-20 μm along the optical path of the light beam, for example by fluttering. It is particularly difficult to reliably measure the optical transmission properties of a flexible substrate during its transport. For example, flexible substrates may tend to exhibit fluttering in a direction perpendicular to the substrate transport path, particularly in portions of the substrate where the substrate is not supported on a substrate support. Additionally, flexible substrates are typically thin and delicate, and as a result, such substrates can flap by more than 20 μm in unsupported positions. This web flapping typically limits the types of distance measuring sensors that can be used to monitor flexible substrates. For example, typically triangulation based sensors are not used for duplex measurements due to web fluttering.

[0035] In web coating processes, there are several metrology techniques used to measure thickness. Some of these techniques suffer from errors caused by web fluttering, making their use more difficult. Some implementations of the present disclosure take the opposite approach and use sensitivity to flapping as the measure of interest and use it as a non-contact proxy for the local tension of the web. Any suitable sensor measurement with sensitivity to sample angle can be used. For example, triangulation laser displacement, capacitance, and eddy current can be used. Essentially any signal that is sensitive to fluttering can be reused for either the uncoated portion of the web or the coated section where variations in thickness occur at a much different frequency than the signal from fluttering. If both sources of variation occur, they can be mathematically partitioned using high-pass and low-pass filters to extract relevant thickness and flutter/web tension information.

[0036] In some implementations of the present disclosure, cross web tension is measured in real time using a non-contact sensor to calculate web angle. Measurements of the web angle can be fed back into the control system to adjust the parallelism of the rollers, enabling the use of various optical sensors, such as laser sensors, to monitor the web. Laser-based triangulation distance sensors are sensitive to the angle of the web presentation. The angle of the web is a function of tension and filtering mechanism. For webs of known stable thickness, the change in apparent thickness is now locally an expression of the web angle. The angle is a function of the tension of the web path at that point, and if locations are selected on both web edges where no coating occurs, the cross web tension can be measured in real time. This measurement can then be fed back into the control system to correct the web tension by adjusting the parallelism of the rollers.

[0037] In some implementations of the disclosure, the non-contact sensor is selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof.

[0038] 1 illustrates a schematic cross-sectional view of a web processing system 100 including a web processing device 110 in accordance with one or more implementations of the present disclosure. Web processing device 110 includes a web tension adjustment unit 120. Web processing device 110 may further include one or more coating units (not shown) from which web 130 is supplied to be coated in one or more layers. Additionally, a web storage spool 140 is shown with web 130 coiled thereon. Typically, the web 130 on the web storage spool 140 is not processed. As an alternative to the depicted implementation, web storage spool 140 may be positioned within web processing device 110 (see, e.g., the implementation illustrated in Figure 8). In some implementations described herein, web processing device 110 operates at vacuum conditions, for example, pressures below 10 mbar or even below 1 mbar. In other implementations, web processing device 110 operates in standby conditions.

[0039] As shown in Figure 1, web 130 enters web processing device 110 through an inlet port 150, such as a first seal. The processed web 160 may be guided out of the web processing device 110 through an outlet port 170, such as a second seal, and wound onto a wind-up spool 180. . As an alternative to the implementation shown in Figure 1, a take-up spool for holding the processed web may be positioned within the web processing device 110 (see, for example, the implementation illustrated in Figure 8). As a result, in some implementations, the take-up spool may be configured to operate in vacuum conditions.

[0040] Typically, web processing device 110 includes one, two, three, or more web tension adjustment units 120 in accordance with the present disclosure.

[0041] Web processing system 100 further includes a system controller 190 operable to control various aspects of web processing system 100. System controller 190 facilitates control and automation of web processing system 100 and may include a central processing unit (CPU), memory, and support circuits (or I/O). Software instructions and data can be coded and stored in memory to instruct the CPU. System controller 190 may communicate with one or more of the components of web processing system 100, for example, via a system bus. A program (or computer instructions) readable by system controller 190 determines which tasks can be performed on a substrate, such as web 130. In some aspects, the program may include code for monitoring processing conditions, controlling the web processing device 110 and/or controlling the web tension adjustment unit 120. It is software that can be read by . Although a single system controller, system controller 190, is shown, it should be recognized that multiple system controllers may be used with aspects described herein.

[0042] A typical application of a web guide control unit or web processing device as disclosed herein is high vacuum web film deposition. For example, in some energy storage device applications, a thin layer of lithium metal may be deposited over the web to serve as a pre-lithiation layer for the underlying anode or cathode materials. A further application of the web tensioning unit or web processing device as disclosed herein involves the deposition of a protective layer on a packaging substrate such as thin plastic, paper or metal foil. Thin metal or oxide films can be deposited on packaging substrates to create a moisture or oxygen barrier that promotes freshness and extends the shelf life of consumer products using these films.

[0043] According to implementations of the present disclosure, web 130 is supplied to web processing device 110 from a web supply, such as web storage spool 140. Typical lengths of the web on the coil are in the range of 500 meters to 60 kilometers. In some implementations, web 130 is supplied to web processing device 110 from a previous web processing device (not shown). In general, and without being limited to this implementation, two, three, or more of the web processing devices as disclosed herein can be positioned in tandem, such that a web can be distributed across all of these web processing devices. It continues continuously through.

[0044] Without being limited by this implementation, typical guide speeds range from 0.01 meters per minute to 20 meters per second (m/s). In the web processing device 110 different processing operations can be performed, such as cleaning, coating, especially sputtering, cooling, heating or structuring of the web.

[0045] After the web is processed in web processing device 110, the processed web 160 exits web processing device 110 at outlet port 170. Processed web 160 may be fed to a second processing unit, as shown in FIG. 1 , by take-up spool 180 or may be guided for storage. In particular, the web processing systems, web processing devices, and methods as disclosed herein specifically allow winding-up of the web on a spool in a continuous manner, thereby preventing asymmetric layer stacking on the winding spool. do.

[0046] A web tensioning unit and web processing device as described herein can be used to guide a web in a variety of applications. The web processing apparatus as described herein is particularly suitable for coating webs such as metal webs, especially copper or aluminum webs, and thin plastic webs. A thin web in this context is intended to be understood as having a thickness of between 1 m and 200 m, especially between 30 μm and 140 μm.

[0047] 2 illustrates a schematic cross-sectional view of a web tension adjustment unit 120 in accordance with one or more implementations of the present disclosure. FIG. 3 illustrates a schematic top view of the web tension adjustment unit 120 of FIG. 2 in accordance with one or more implementations of the present disclosure. The web tension adjustment unit 120 includes a first roller 210 and a second roller 220 for guiding a substrate, such as a web 130. The first roller 210 and/or the second roller 220 may be guide rollers. Web tension adjustment unit 120 further includes one or more first non-contact sensors 230a-230d (collectively 230) and optionally one or more second non-contact sensors 240. The one or more first non-contact sensors 230 and/or one or more second non-contact sensors 240 may be free-standing or positioned within a module. As shown in FIG. 2, the web 130 is conveyed and transported from the first roller 210 to the second roller 220 along the substrate transport path T.

[0048] In some implementations, one or more first non-contact sensors 230 may be provided at a position between the first roller 210 and the second roller 220. If present, one or more second non-contact sensors 240 are also provided at a position between the first roller 210 and the second roller 220. One or more second non-contact sensors 240 may be positioned opposite the one or more first non-contact sensors 230 . One or more first non-contact sensors 230 may be positioned toward the first side or “front side” of web 130 and one or more second non-contact sensors 240 may be positioned toward the first side or “front side” of web 130. It can be positioned to face the second side or “backside” of. The area between the first roller 210 and the second roller 220 where the web 130 is not supported on the substrate support surface, e.g., the surface of the roller, is “free span” or “free span.” It may also be referred to as “position”. It has been shown that the web 130 may flutter in a “free span position” and as a result the optical measurements may be negatively affected. For example, the inspected portion of web 130 may move out of focus of the light beam in a direction perpendicular to the substrate transport direction (“T”). This change in reflection angle during flapping changes the reflection angle of the web, which can be used to identify changes in the local tension of the web. This change in local tension may be communicated to and/or calculated by system controller 190, which then adjusts the parallelism of first roller 210 and/or second roller 220. It can be used to:

[0049] In some implementations, as shown in FIG. 3 , the one or more first non-contact sensors 230 may include a plurality of first non-contact sensors positioned side by side along a transverse direction perpendicular to the direction of movement (“T”) ( 230a-230d). Although four first non-contact sensors are shown in FIG. 3, any suitable number of first non-contact sensors may be used. For example, in some implementations, a single non-contact sensor configured to move along the transverse direction over web 130 is used in place of multiple non-contact sensors. Positioning the plurality of first non-contact sensors 230a-230d along the transverse direction allows the non-contact sensors to monitor across the width of web 130. Any suitable non-contact sensor having sensitivity to the angle of the web (e.g. web flapping). One or more first non-contact sensors 230a-230d may be any number of laser-based triangulation sensors, interferometers, image sensors, Eddy Current Sensors (ECS), capacitance sensors, and/or May include thickness sensors. Examples of suitable non-contact sensors include laser-based triangulation sensors, such as Keyence and Micro-Epsilon LVDT interferometers. Examples of laser profilometers that can be used with the implementations described herein are capable of measuring anode edge definition within a 7.5 mm width and measuring edge thickness (Z axis) and straightness (X axis) repeatability axes. Keyence LJ- Includes PT010.

[0050] Figure 4 illustrates a schematic cross-sectional view of a guide roller 400 incorporating an adjustment unit according to one or more implementations of the present disclosure. The guide roller 400 may be, for example, at least one of the first roller 210 and the second roller 220 used in the web tension adjustment unit 120. Guide roller 400 is typically mounted on shaft 410. As used herein, the term shaft shall include any support of the guide roller 400, which may be rotatable, for example, or may constitute a static axis around which the roller rotates.

[0051] The web 130 is guided by a guide roller 400. Web 130 may be generally unprocessed or may have already undergone one or more processing operations. In particular, the web tension adjustment unit 120 of the present disclosure is not limited exclusively to use in web processing devices. For example, web tension adjustment unit 120 may also be implemented in manufacturing plants where web transportation is used.

[0052] For purposes of illustration, guide roller 400 is shown mounted on frame 420. Frame 420 may be any unit capable of supporting guide roller 400. In particular, it is possible, but not required, that the frame 420 on both sides of the guide roller 400 belong to an integrated frame. Typical diameters of the guide rollers used in the subject matter are between 65 mm and 300 mm.

[0053] The alignment of the guide roller 400 is adjusted using roller adjustment units 430a and 430b (collectively 430). In some implementations, a single coordination unit is provided. For example, there is either a roller adjustment unit 430a or a roller adjustment unit 430b. The roller adjustment unit 430 is typically disposed at the first end 440 or the second end 450 of the guide roller 400. For example, roller adjustment unit 430a may be disposed at first end 440. The roller adjustment unit 430b may be disposed at the second end 450 of the guide roller 400. Two adjustment units each are typically provided on a first end 440 and a second end 450 of the guide roller 400, e.g. each provided on one end of the guide roller 400. This is also possible. For example, as exemplarily illustrated in FIG. 4 , roller steering unit 430b is disposed adjacent second end 450 .

[0054] In some implementations, roller steering unit 430 can perform movement along the x direction (+x/-x), movement along the y direction (+y/-y), and movement along the z direction (+z/-z). You can respond to at least one of them while moving. Accordingly, the first end 440 and the second end 450 of the guide roller 400 each move in the x direction (eg, +x/-x) and the y direction (eg, +y/-y). , and may be independently adjustable along at least one of the z direction (e.g., +z/-z).

[0055] In principle, the roller adjustment unit 430 can be applied for alignment of the guide rollers 400 to prevent transverse tension acting on the web 130 . Typically, the roller adjustment unit 430 of the present disclosure is particularly useful for compensating for different coiling strengths in the guide roller 400 and, consequently, in all machines following the guide roller 400. do. Different coiling strengths are most typically a result of the different thicknesses of the web along its width. This may result in a generally skewed feed and subsequently variable contact between the guiding rollers and the web 130, which may be accompanied by thermal complications.

[0056] In some implementations of the present disclosure, guide roller 400 is a cooling or heating roller. Typically, there are additional rollers positioned downstream and/or upstream of the guide roller 400. Other processing operations, such as cleaning or coating, may be taken before (i.e., upstream) guide roller 400 or after (i.e., downstream) guide roller 400.

[0057] Without being limited to any implementation of the present disclosure, data measured by the one or more first non-contact sensors 230 may be used to monitor the alignment of the guide roller 400 and to detect one end of the guide roller 400. It can be used to adjust the alignment of the guide roller 400 by moving it. Accordingly, the alignment of the guide roller 400 is changed compared to one or more of the horizontal and vertical directions. If only one roller adjustment unit 430 is provided at one end of the guide roller 400, the other end of the guide roller 400 is maintained in a constant position.

[0058] The guide roller 400 is typically moved in a dimension corresponding to the dimension in which the force caused by web tension acts on the shaft 410 of the guide roller 400. As used herein, the features “movement in a dimension” or “measurement in a dimension” shall refer to movement or measurement in one direction and/or its opposite direction, respectively. For example, double arrow 460 shown in Figure 4 illustrates one dimension. In some implementations described herein, tension is measured in the same dimension in which the guide roller is moved.

[0059] In some implementations, roller adjustment unit 430 includes an actuator, such as a motor, to move one end of guide roller 400. In particular, this is not limited to the implementation of Figure 4, and one or more roller adjustment units 430 in all implementations described herein may be provided with an actuator, such as a motor. For example, in one example, the motor may be a linear motor. In another example, the motor may be capable of moving along at least one of the x-direction, y-direction, and z-direction. As indicated by arrow 460, the motor can move the end of guide roller 400 up and down from the perspective shown on this page. The motor may also move the guide roller 400 perpendicular to the plane of the page.

[0060] In some implementations, but not limited to that of Figure 4, the directions of movement of roller adjustment unit 430 correspond to the measurement directions of the calculated tension. That is, as in the example of Figure 4, system controller 190 is typically configured to calculate tension in the guide rollers in the same direction in which the steering unit is configured to move the guide rollers. For example, in the implementation of Figure 4, the direction indicated by arrow 350 may correspond to both the directions of movement of adjustment unit 310 and the measurement directions of the calculated tension.

[0061] Different motors may be used in roller steering unit 430 of the present disclosure. Typically, the actuator for adjustment is an electric or hydraulic motor. In the frame 420, rails (not shown), etc. may be provided on which the roller adjustment unit 430 moves the individual side(s) of the guide roller 400.

[0062] FIG. 5 illustrates a flow diagram of a method 500 of adjusting web tension in accordance with one or more implementations of the present disclosure. Method 500 may be performed using a web tension adjustment unit, such as web tension adjustment unit 120. Web tension adjustment unit 120 may be positioned in a coating system, such as web coating system 800 depicted in FIG. 8 . FIG. 6A illustrates a plot 600 of sensor readings 602 , 604 , 606 , and 608 according to one or more implementations of the present disclosure. FIG. 6B illustrates a plot 620 of sensor readings 622 , 624 , 626 , and 628 according to one or more implementations of the present disclosure.

[0063] In operation 510, web 130 is transported along a substrate transport path (“T”).

[0064] In operation 520, during transport of the web 130 past one or more first non-contact sensors 230, the one or more non-contact sensors emit, for example, a laser, 230) monitors the height, position, or distance of the web. Referring to FIG. 6A , plot 600 depicts sensor readings for four or more first non-contact sensors 230 arranged transversely across web 130. For example, sensor readings 602 correspond to a first non-contact sensor 230a monitoring the web at a first location along the transversal direction. Sensor readings 604 correspond to a second non-contact sensor 230b monitoring the web at a second location along the transverse direction. Sensor readings 606 correspond to a third non-contact sensor 230c monitoring the web at a third location along the transverse direction. Sensor readings 608 correspond to a fourth non-contact sensor 230d monitoring the web at a third location along the transverse direction. As shown in plot 600, fourth non-contact sensor 230d detects displacement of the web due to fluttering of web 130 or misalignment of one of the rollers, e.g., second roller 220. Detect problems 610 or abnormalities that may be caused by .

[0065] At operation 530, in response to detection of problem 610, system controller 190 may initiate maintenance/realignment of the rollers to adjust tension on web 130 to achieve more uniform web tension. In some implementations, the rollers are dynamically aligned in real time to adjust the tension of web 130. Referring to FIG. 6B , plot 620 depicts sensor readings for four or more first non-contact sensors 230 arranged transversely across web 130 after correction of web tension. For example, sensor reading 622 corresponds to a first contactless sensor 230a, sensor reading 624 corresponds to a second contactless sensor 230b, and sensor reading 626 corresponds to a third contactless sensor. Corresponding to sensor 230c, sensor reading 628 corresponds to fourth non-contact sensor 230d. As shown in plot 620, sensor readings 628 of fourth non-contact sensor 230d indicate that problem 610 has been corrected so that the rollers have been realigned and the tension on web 130 is more uniform. shows a smoother reading 630.

[0066] 7 illustrates a signal flow chart 700 for a web tension adjustment unit in accordance with one or more implementations of the present disclosure. The signal flow chart 700 for a web tension adjustment unit includes a closed loop controller based on negative feedback 710 of transverse tension measurements. The closed loop system combines the output of the controlled system, for example the feedback signal 720, with the control signal 740 and the feedback signal 720 supplied to the controlled system, which are the output of the system controller 190 itself. It remains the same as the set point 730 value by using the previous values. The main elements of signal flow chart 700 include system controller 190, guide roller 400, and one or more first non-contact sensors, which constitute web tension adjustment unit 120 according to implementations of the present disclosure. It is (230). The tension difference in the web, which can be calculated based on monitoring by at least two non-contact sensors positioned along the transverse direction of the web, is the feedback signal 720. In some implementations, the tension difference in the web may also be calculated based on monitoring by a single sensor configured to move along a transverse direction of the web. The tension calculated based on monitoring of a first location along the transverse direction may be compared to the tension calculated based on monitoring of a second location along the transverse direction to determine whether the tension of the web is uniform or non-uniform. If the tension is not uniform, the guide roller 400 can be adjusted to correct the tension of the web.

[0067] In some implementations, setpoint 730 in the controller has a null value to compensate for tension differences corresponding to transverse tensions acting on the web. Accordingly, in some implementations, error 731 corresponds to a tension difference measurement, i.e., feedback signal 720. In some implementations, system controller 190 uses roller adjustment unit 430 of guide roller 400 to compensate for deviations from zero error 731. Typically, this error 731 compensation translates into an adjustment (i.e., movement) of the shaft 410 of the guide roller 400. Accordingly, control signals 740, e.g., controller outputs, typically correspond to instructions to roller adjustment unit 430 how much individual ends of guide rollers 400 should be moved.

[0068] In principle, different control approaches can be implemented in system controller 190. In some implementations, a linear control approach selected from the following is implemented in system controller 190: proportional, integral and derivative (PID) control; proportional and integral (PI) control; proportional and derivative (PD) control; and proportional (P) control. However, other advanced controls using nonlinear control approaches, such as adaptive gain, dead time compensation, fuzzy logic, neural networks, or feedforward control, are also implemented in implementations of the present disclosure. It can be. Controllers implemented in this application may be analog or digital interfaces that include compatibility with transistor-transistor logic (TTL). Typically digital interfaces operate in a discrete manner where values for an adjustment unit are refreshed after a specific, fixed period of time. Other special features may be present in the controllers of the present disclosure, such as self-tuning, signal calculation or filtering, or built-in indicators.

[0069] 8 illustrates a schematic cross-sectional view of a web coating system 800 incorporating a web tension adjustment unit in accordance with one or more implementations of the present disclosure. The web coating system 800 includes a first web tension adjustment unit 812a and optionally a second web tension adjustment unit 812b. The first web tension adjustment unit 812a and the second web tension adjustment unit 812b may be the web tension adjustment unit 120 previously described herein.

[0070] Web coating system 800 may be a SMARTWEB® system manufactured by Applied Materials configured to deposit coatings on webs in accordance with implementations described herein. Web coating system 800 includes a common processing environment 801 in which some or all of the processing actions for coating a web may be performed. In one example, common processing environment 801 is operable as a vacuum environment. In another example, common processing environment 801 is operable as an inert gas environment.

[0071] The web coating system 800 includes an unwinding module 802 for supplying the continuous flexible substrate, a processing module 804 for processing the continuous flexible substrate, and an unwinding module 804 for collecting the continuous flexible substrate. It is configured as a roll-to-roll system including a winding module 808. Processing module 804 includes a chamber body 805 that defines a common processing environment 801.

[0072] In some implementations, processing module 804 includes a plurality of processing modules 810, 820, 830, and 840 arranged in order, each performing one processing operation on web 130 of material. It is configured to do so. In one example, as depicted in FIG. 8 , processing modules 810 - 840 are positioned radially around coating drum 855 . Additionally, arrangements other than radial are considered. For example, in another implementation, processing modules 810-840 may be positioned in a linear configuration. Each processing module 810-840 includes a deposition source. Compartments may be closed or isolated from adjacent compartments, except for a narrow opening that allows deposition on the coating drum 855.

[0073] In some implementations, processing modules 810-840 are independent modular subchambers, where each processing module is structurally separate from other modular subchambers. Accordingly, each of the independent modular subchambers can be arranged, rearranged, replaced or maintained independently without affecting one another. Although four processing modules 810-840 are shown, it should be understood that any number of processing modules may be included in web coating system 800. For example, web coating system 800 may include, but is not limited to, 3, 4, 6, or 12 processing modules.

[0074] Processing modules 810-840 may include any suitable structure, configuration, arrangement, and/or components that enable web coating system 800 to deposit a coating in accordance with implementations of the present disclosure. there is. For example, processing modules 810-840 may include suitable deposition systems, including coating sources, power sources, individual pressure controls, deposition control systems, and temperature control, but It is not limited. In some implementations, processing modules 810-840 are provided with individual gas supplies. Processing modules 810-840 are typically separated from each other to provide good gas separation.

[0075] Each of the processing modules 810-840 may include one or more deposition sources. Generally, one or more deposition sources as described herein may include at least one of an electron beam source, CVD sources, PECVD sources, and various PVD sources. Exemplary PVD sources include sputtering sources, electron beam evaporation sources, and thermal evaporation sources. In one implementation, the evaporation source is a lithium (Li) source. Additionally, the evaporation source may also be an alloy of two or more metals. The material to be deposited (eg, lithium) may be provided in a crucible. Lithium can be evaporated, for example, by thermal evaporation techniques or by electron beam evaporation techniques.

[0076] In some implementations, processing modules 810 - 840 are configured to process both sides of web 130 . Although web coating system 800 is configured to process a horizontally oriented web 130, web coating system 800 may be configured to process substrates that are positioned in different orientations, for example, web 130 ) can be oriented vertically. In some implementations, web 130 is a flexible conductive substrate. In some implementations, web 130 includes a conductive substrate with one or more layers formed thereon. In some implementations, the conductive substrate is a copper substrate.

[0077] In some implementations, the web coating system 800 includes a common take-up reel 854 positioned in a take-up module 808, a coating drum 855 positioned in a processing module 804, and an unwinding module 802. It includes a reel-to-reel system with a feed reel 856. The take-up reel 854, coating drum 855, and feed reel 856 can be heated individually. The take-up reel 854, coating drum 855, and feed reel 856 can be individually heated using an internal or external heat source positioned within each reel. The web coating system 800 includes one or more auxiliary transfer rollers 853a, 853b, 853c, 853d, 853e, 853f positioned between a take-up reel 854, a coating drum 855, and a feed reel 856. More may be included. According to one aspect, at least one of the one or more auxiliary feed reels 853a-853f, take-up reel 854, coating drum 855, and feed reel 856 may be driven and rotated by a motor.

[0078] In some implementations, first web tension adjustment unit 812a is positioned upstream from a plurality of processing modules 810 - 840 and upstream from feed reel 856 . For example, as shown in Figure 8, the first web tension adjustment unit 812a uses one or more first non-contact sensors 230a and, optionally, between auxiliary transport rollers 853b and 853c. and one or more second non-contact sensors 240 positioned adjacent the free-span portion of web 130. In some implementations, as depicted in FIG. 8 , first web tension adjustment unit 812a is positioned in processing module 804 . Other locations for first web tension adjustment unit 812a are also considered. In one example, first web tension adjustment unit 812a can be positioned in unwind module 802. In another example, the first web tension adjustment unit 812a is positioned in a separate module, and the separate module is positioned between the unwinding module 802 and the processing module 804.

[0079] In some implementations, the second web tension adjustment unit 812b is positioned downstream from the plurality of processing modules 810-840 and upstream from the take-up reel 854. For example, as shown in Figure 8, the second web tension adjustment unit 812b uses one or more first non-contact sensors 230e and, optionally, between auxiliary transport rollers 853d and 853e. and one or more second non-contact sensors 240e positioned adjacent the free-span portion of web 130. In some implementations, as depicted in FIG. 8 , second web tension adjustment unit 812b is positioned in processing module 804 . Other locations for the second web tension adjustment unit 812b are also considered. In one example, second web tension adjustment unit 812b can be positioned in winding module 808. In another example, the second web tension adjustment unit 812b is positioned in a separate module, and the separate module is positioned between the processing module 804 and the winding module 808.

[0080] Web coating system 800 includes a feed reel 856 and a take-up reel 854 for moving web 130 past different processing modules 810-840. In operation, web 130 is unwound from feed reel 856 as indicated by the direction of substrate movement shown by arrow “T”. Web 130 may be guided through one or more auxiliary transport reels 853a-853f (collectively 853). At least one of the one or more auxiliary transfer reels 853a-853f may be a guide roller 400. The tension of the moving web 130 may be adjusted using the first web tension adjustment unit 812a and/or the second web tension adjustment unit 812b as described herein.

[0081] After uncoiling from the feed reel 856 and moving over the auxiliary transfer roller 853b, the web 130 is then moved past the first web tension adjustment unit 812a. When the first web tension adjustment unit 812a detects an abnormality in the tension of the web 130, at least one of the auxiliary transfer rollers 853b and 853c responds to make the tension on the web more uniform, It is adjusted.

[0082] Implementations may include one or more of the following potential advantages. The resolution and convenience provided by laser sensors can be used to enable simultaneous two-sided measurement. Roller parallelism in the transport arrangement as described herein can be achieved and “deviation” of the substrate in the transverse direction during substrate transport can be eliminated. Downtime in web-based processing systems, which increases cost of ownership, can be reduced. Defects in the web can be detected during processing and corrections can be made dynamically during processing in response to the defects. The tension in the web can be monitored in situ during processing and the web tension can be dynamically adjusted in response to the monitored tension, without opening the system.

List of Examples

[0083] This disclosure provides, among other things, the following embodiments, each of which may be considered optionally including any alternative embodiments:

[0084] Clause 1. A web tension adjustment unit for guiding a web, wherein the web tension adjustment unit:

First guide roller - The first guide roller is:

Includes adjustment unit -;

one or more first non-contact sensors positioned to measure displacement data of the web at a first location; and

and a system controller for controlling the adjustment unit based on the measured displacement data.

[0085] Clause 2. The web tensioning unit according to clause 1, wherein the one or more first non-contact sensors are confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or these. is selected from a combination of

[0086] Clause 3. The web tension adjustment unit of clause 1 or clause 2, wherein the one or more first non-contact sensors comprise at least two sensors arranged in a transverse direction across the web, perpendicular to the direction of movement of the web.

[0087] Clause 4. The web tensioning unit of clause 3, wherein the first location is between the first guide roller and the second roller, where the web is in a free span position.

[0088] Clause 5. The web tension adjustment unit of clause 4, wherein the one or more first non-contact sensors measure the angle of reflection of the web.

[0089] Clause 6. The web tensioning unit of any one of clauses 1 to 5, wherein the one or more first non-contact sensors are positioned opposite to monitor the cross web tension to monitor the second side of the web at the first location. It further includes one or more second non-contact sensors.

[0090] Clause 7. The web tension adjustment unit of any one of clauses 1 to 6, wherein the adjustment unit is positioned at the first end of the first guide roller.

[0091] Clause 8. The web tension adjustment unit of any one of clauses 1 to 7, wherein the adjustment unit includes a motor.

[0092] Clause 9. The web tension adjustment unit of any one of clauses 1 to 8, wherein the system controller is a closed-loop controller and the measured displacement data is used as a variable feedback signal.

[0093] Clause 10. The web tension adjustment unit of clause 9, wherein the system controller includes one of analog electronics and digital electronics.

[0094] Clause 11. As a web processing device:

At least one web tension adjustment unit for guiding the web, wherein the web tension adjustment unit:

First guide roller - The first guide roller is:

Includes adjustment unit -;

one or more first non-contact sensors positioned to measure displacement data of the web at a first location; and

and a system controller for controlling the adjustment unit based on the measured displacement data.

[0095] Clause 12. The web processing device of clause 11, further comprising a coating unit for coating the web.

[0096] Clause 13. The web processing device of clause 11 or clause 12, wherein the one or more first non-contact sensors are confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or It is selected from combinations of these.

[0097] Clause 14. The web processing device of any one of clauses 11 to 13, wherein the one or more first non-contact sensors comprise at least a first sensor and a second sensor arranged in a transverse direction across the web, perpendicular to the direction of movement of the web. Includes sensors.

[0098] Clause 15. The web processing apparatus of clause 14, wherein the first location is between the first guide roller and the second roller, wherein the web is in a free span position.

[0099] Clause 16. The web processing device of clause 14 or clause 15, wherein the first sensor is positioned to measure the displacement of the web at a first location along the transverse direction, and the second sensor is positioned to measure the displacement of the web at a second location along the transverse direction. Positioned to measure displacement.

[00100] Clause 17. The web processing device of any of clauses 11-16, wherein the one or more first non-contact sensors measure the angle of reflection of the web.

[00101] Clause 18. The web processing apparatus of clause 17, wherein the system controller provides a signal to adjust the position of the first guide roller based on the measured angle of reflection of the web such that, after adjustment, the tension of the web on both sides is equal. It is configured to calculate .

[00102] Clause 19. A method for processing the web:

Guiding a web using at least one web tensioning unit, wherein the web tensioning unit:

a first guide roller including an adjustment unit; and

comprising one or more first non-contact sensors positioned to measure the displacement of the web at a first location;

measuring the displacement of the web at a first location to provide measured displacement data of the web; and

and adjusting the position of the first guide roller by moving one end of the first guide roller, the adjusting being based on the measured displacement of the web.

[00103] Clause 20. The method of clause 19, further comprising calculating a signal for adjusting the position of the first guide roller based on the measured displacement data of the web, and after adjustment, the tension of the web on both sides. is the same.

[00104] Clause 21. The method of clause 19 or clause 20, further comprising coating the web with a layer of material after adjusting the position of the first guide roller.

[00105] Clause 22. The method of any of clauses 19-21, wherein the one or more first non-contact sensors are confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors. , or a combination thereof.

[00106] Clause 23. The method of any one of clauses 19 to 22, wherein the one or more first non-contact sensors comprise at least a first sensor and a second sensor arranged in a transverse direction across the web, perpendicular to the direction of movement of the web. Includes.

[00107] Clause 24. The method of clause 23, wherein the first location is between the first guide roller and the second roller, wherein the web is in a free span position.

[00108] Clause 25. The method of clause 24, wherein the first sensor is positioned to measure the displacement of the web at a first location along the transverse direction, and the second sensor is positioned to measure the displacement of the web at a second location along the transverse direction. do.

[00109] Clause 26. The method of any of clauses 19-25, wherein the one or more first non-contact sensors measure the angle of reflection of the web.

[00110] Clause 27. The method of clause 26, further comprising calculating a signal for adjusting the position of the first guide roller based on the measured reflection angle of the web, wherein after adjustment, the tension of the web on both sides is: same.

[00111] Implementations and all functional operations described herein may be implemented in digital electronic circuitry comprising the structural means disclosed herein and their structural equivalents, or combinations thereof, or in computer software, firmware, or hardware. there is. Implementations described herein may be used for execution by, or operation of, one or more non-transitory computer program products, i.e., a data processing device, e.g., a programmable processor, a computer, or multiple processors or computers. To control, the device may be implemented as one or more computer programs tangibly implemented in a machine-readable storage device.

[00112] The processes and logic flows described herein may be performed by one or more programmable processors executing one or more computer programs to perform functions by operating on input data and producing output. Processes and logic flows may also be performed by special-purpose logic circuitry, e.g., a field programmable gate array (FPGA) or an application specific integrated circuit (ASIC), and the device may include special-purpose logic circuitry, e.g. It can also be implemented as an FPGA or ASIC.

[00113] The term “data processing apparatus” encompasses all apparatus, devices, and machines for processing data, including, for example, a programmable processor, a computer, or multiple processors or computers. The device may, in addition to the hardware, contain code that creates an execution environment for the computer program in question, such as code comprising processor firmware, a protocol stack, a database management system, an operating system, or a combination of one or more of them. It can be included. Processors suitable for executing a computer program include, by way of example, both general-purpose and special-purpose microprocessors, and any one or more processors of any type of digital computer.

[00114] Computer-readable media suitable for storing computer program instructions and data include, for example, semiconductor memory devices such as EPROM, EEPROM, and flash memory devices; magnetic disks, such as internal hard disks or removable disks; magneto-optical disks; and all forms of non-volatile memory, media and memory devices, including CD-ROM and DVD-ROM disks. The processor and memory may be supplemented by or included in special purpose logic circuitry.

[00115] When introducing elements of the disclosure, or example aspects or implementation(s) of the elements, the singular expressions “a,” “the,” and “the” are intended to mean that one or more such elements are present.

[00116] The terms “comprising,” “including,” and “having” are intended to be inclusive and mean that additional elements other than those listed may be present.

[00117] Although the foregoing relates to implementations of the disclosure, other and additional implementations of the disclosure may be devised without departing from the basic scope of the disclosure, and the scope of the disclosure is defined by the following claims. It is decided.

Claims (20)

A web tension adjustment unit for guiding a web,
First guide roller - The first guide roller is:
Includes adjustment unit -;
one or more first non-contact sensors positioned to measure displacement data of the web at a first location; and
a system controller for controlling the adjustment unit based on the measured displacement data,
Web tension adjustment unit to guide the web. According to claim 1,
The one or more first non-contact sensors are selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof.
Web tension adjustment unit to guide the web. According to claim 1,
The one or more first non-contact sensors comprise at least two sensors arranged in a transverse direction across the web, perpendicular to the direction of movement of the web.
Web tension adjustment unit to guide the web. According to clause 3,
the first location is between the first guide roller and the second roller, and the web is in a free span position,
Web tension adjustment unit to guide the web. According to clause 4,
The one or more first non-contact sensors measure the reflection angle of the web,
Web tension adjustment unit to guide the web. According to claim 1,
further comprising one or more second non-contact sensors positioned opposite the one or more first non-contact sensors to monitor cross-web tension to monitor a second side of the web at the first location,
Web tension adjustment unit to guide the web. According to claim 1,
The adjustment unit is positioned at the first end of the first guide roller, or
The control unit includes a motor, or
A combination of these,
Web tension adjustment unit to guide the web. According to claim 1,
The system controller is a closed loop controller, and the measured displacement data is used as a variable feedback signal,
Web tension adjustment unit to guide the web. As a web processing device,
At least one web tension adjustment unit for guiding the web,
The web tension adjustment unit,
First guide roller - The first guide roller is:
Includes adjustment unit -;
one or more first non-contact sensors positioned to measure displacement data of the web at a first location; and
a system controller for controlling the adjustment unit based on the measured displacement data,
Web processing device. According to clause 9,
Further comprising a coating unit for coating the web,
Web processing device. According to clause 9,
wherein the one or more first non-contact sensors are selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof.
Web processing device. According to clause 9,
The one or more first non-contact sensors include at least a first sensor and a second sensor arranged in a transverse direction across the web, perpendicular to the direction of movement of the web, and
The first location is between the first guide roller and the second roller, and the web is in a free span position.
Web processing device. According to claim 12,
wherein the first sensor is positioned to measure the displacement of the web at a first location along the transverse direction, and the second sensor is positioned to measure the displacement of the web at a second location along the transverse direction.
Web processing device. According to clause 9,
The one or more first non-contact sensors measure a reflection angle of the web, and
wherein the system controller is configured to calculate a signal for adjusting the position of the first guide roller based on the measured reflection angle of the web such that after adjustment, the tension of the web on both sides is equal.
Web processing device. As a method for processing the web,
guiding the web using at least one web tension adjustment unit, wherein the web tension adjustment unit comprises:
a first guide roller including an adjustment unit; and
comprising one or more first non-contact sensors positioned to measure displacement of the web at a first location;
measuring the displacement of the web at the first location to provide measured displacement data of the web; and
adjusting the position of the first guide roller by moving one end of the first guide roller, the adjusting being based on the measured displacement of the web.
A method for processing the web. According to claim 15,
calculating a signal for adjusting the position of the first guide roller based on the measured displacement data of the web, wherein after adjustment, the tension of the web on both sides is the same.
A method for processing the web. According to claim 15,
further comprising coating the web with a layer of material after adjusting the position of the first guide roller,
A method for processing the web. According to claim 15,
The one or more first non-contact sensors are selected from confocal laser sensors, triangulation-based laser sensors, line-based laser sensors, capacitance sensors, eddy current sensors, or a combination thereof,
The one or more first non-contact sensors include at least a first sensor and a second sensor arranged in a transverse direction across the web, perpendicular to the direction of movement of the web, or
A combination of these,
A method for processing the web. According to clause 18,
the first location is between the first guide roller and the second roller, the web is in a free span position, and
wherein the first sensor is positioned to measure the displacement of the web at a first location along the transverse direction, and the second sensor is positioned to measure the displacement of the web at a second location along the transverse direction.
A method for processing the web. According to claim 15,
The one or more first non-contact sensors measure a reflection angle of the web, and
The method is:
further comprising calculating a signal for adjusting the position of the first guide roller based on the measured reflection angle of the web,
After adjustment, the tension of the web on both sides is the same,
A method for processing the web.