KR20230150517A - Inspection apparatus for displacement measurement and visual acquisition at the same time - Google Patents

Abstract

An inspection device capable of simultaneously measuring displacement and acquiring images is disclosed. An inspection device capable of simultaneously measuring displacement and acquiring images according to the present invention includes a displacement measurement module that measures the displacement of an object; A photography module that photographs a subject; A support body to which a displacement measurement module is coupled to one side and an imaging module to the other side; and an optical module provided on the support and splitting the light reflected from the subject to direct the light to the displacement measurement module and the imaging module.

Description

Inspection device capable of simultaneously measuring displacement and acquiring images {INSPECTION APPARATUS FOR DISPLACEMENT MEASUREMENT AND VISUAL ACQUISITION AT THE SAME TIME}

The present invention relates to an inspection device capable of simultaneously measuring displacement and acquiring images.

In various industrial fields, measurements are made on objects using light or similar physical means. For example, optical displacement sensors using LEDs, microwaves, or lasers are known.

Optical displacement sensors can be applied to measure displacement of an object, which are physical quantities such as distance, distance change, position, and thickness of the object.

Optical displacement sensors are generally divided into trigonometric laser displacement sensors and confocal displacement sensors using white LEDs or laser light sources.

The laser displacement sensor is a method that applies triangulation. Part of the light reflected from the subject creates a light spot on the linear image sensor through a light receiving lens, and when the subject moves, the light spot on the linear image sensor also moves, causing its position to change. By detecting , the amount of displacement of the subject can be detected.

The confocal displacement sensor uses an optical lens to disperse white light or multi-color laser light source for each wavelength, and calculates the distance from the focused value through a spectrum analyzer. The distance that has passed through the pinhole can be calculated through analysis by wavelength within a spectrum analyzer.

Additionally, a vision inspection device is known that analyzes light reflected from the subject rather than analyzing the subject itself. In vision inspection, when light is shined on a subject, the lens captures the image and transmits it to the camera's image sensor in the form of light. The image sensor converts this into a digital image and transmits it to the processor.

Previously, it was impossible to measure optical displacement inspection and vision inspection simultaneously. In other words, when aligning the optical axis to secure an optically accurate image of a subject and measuring the distance to the subject or change in distance using the same axis, a high error rate occurs due to assembly tolerances between the optical displacement sensor and the camera. There was a problem. Therefore, in the past, optical displacement inspection and vision inspection were conducted separately, but in this case, there was a problem in that the inspection time took a lot of time and the efficiency of the inspection time was reduced.

[Document 1] Republic of Korea Patent Publication No. 10-2015-0086955 (published on July 29, 2015) [Document 2] Republic of Korea Patent Publication No. 10-2010-0047553 (published on May 10, 2010)

Therefore, the technical problem to be solved by the present invention is to improve the inspection precision of the subject by enabling displacement measurement and image acquisition for the subject at the same time, and also to enable simultaneous displacement measurement and image acquisition that can shorten the inspection time. Providing inspection equipment.

According to one aspect of the present invention, a displacement measurement module that measures the displacement of a subject; A photographing module for photographing the subject; A support body to which the displacement measurement module is coupled to one side and the imaging module to the other side; and an optical module provided on the support and splitting the light reflected from the object toward the displacement measurement module and the imaging module. An inspection device capable of simultaneously measuring displacement and acquiring an image can be provided.

The support body includes a support block to which the displacement measurement module is coupled to one side of the upper surface and the imaging module is coupled to the other side of the upper surface; a first channel formed through the upper and lower surfaces of the support block, to which the displacement measurement module is coupled, and forming a first optical path through which light reflected from the subject is directed to the displacement measurement module; and a second channel formed inside the support block to be in communication with the first channel, to which the photographing module is coupled, and forming a second optical path through which light reflected from the subject is directed to the photographing module. there is.

The first channel may be formed vertically through the upper and lower surfaces of the support block, and the second channel may be formed vertically after branching in the horizontal direction from the first channel.

The optical module includes: a beam splitter provided in the first channel and splitting light reflected from the subject into the first optical path and the second optical path; and an optical mirror provided in the second channel and reflecting light transmitted along the second optical path to the imaging module.

It may further include a lighting module provided on the lower surface of the support block and disposed adjacent to the opening of the first channel located on the lower surface of the support block.

The lighting module may include a plurality of light sources installed on the lower surface of the support block and disposed adjacent to the opening of the first channel located on the lower surface of the support block.

The lighting module includes: a support member detachably coupled to the lower surface of the support block and having a through hole formed in the center thereof inline with the opening of the first channel located on the lower surface of the support block; And it may include a plurality of light sources installed on the lower surface of the support member.

The support block is provided at a lower portion and includes a bracket having a long hole formed long in the longitudinal direction of the support block. The support member includes a plurality of fastening grooves provided on the upper surface, and the long hole and the fastening groove are bolted to each other. It can be.

The imaging module includes: an optical guide unit whose one end is coupled to the other upper surface of the support block and is in communication with the second channel; A coupling portion coupled to the other end of the light guide portion and communicating with the light guide portion; A camera unit coupled to the coupling portion; and a branch part branched in a horizontal direction from a side of the light guide unit and connected to the light guide tube.

Embodiments of the present invention use an optical module that divides the optical path of the light reflected from the subject into a displacement measurement module and a photography module, so that displacement measurement and image acquisition for the subject can be measured at the same time, allowing for inspection of the subject. Precision can be improved and inspection time can be shortened, ensuring the efficiency of inspection of scrap objects.

In addition, embodiments of the present invention can miniaturize inspection devices capable of measuring displacement and acquiring images of a subject, and thus can be used in narrow spaces, thereby improving usability.

Figure 1 is a front view showing an inspection device capable of simultaneously measuring displacement and acquiring images according to a first embodiment of the present invention.
Figure 2 is a side cross-sectional view showing a support according to a first embodiment of the present invention.
Figure 3 is a plan view showing a support according to a first embodiment of the present invention.
Figure 4 is a bottom view showing a support according to the first embodiment of the present invention.
Figure 5 is a front view showing an inspection device capable of simultaneously measuring displacement and acquiring images according to a second embodiment of the present invention.
Figure 6 is a side cross-sectional view showing a support according to a second embodiment of the present invention.
Figure 7 is a plan view showing a support according to a second embodiment of the present invention.
Figure 8 is a bottom view showing a support according to a second embodiment of the present invention.

In order to fully understand the present invention, its operational advantages, and the objectives achieved by practicing the present invention, reference should be made to the accompanying drawings illustrating preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the present invention with reference to the attached drawings. The same reference numerals in each drawing indicate the same member.

Hereinafter, an inspection device 100 capable of simultaneously measuring displacement and acquiring images according to the first embodiment of the present invention will be described.

Figure 1 is a front view showing an inspection device capable of simultaneously measuring displacement and acquiring images according to a first embodiment of the present invention, Figure 2 is a side cross-sectional view showing a support according to a first embodiment of the present invention, and Figure 3 is a It is a top view showing the support according to the first embodiment of the invention, and Figure 4 is a bottom view showing the support according to the first embodiment of the present invention.

Referring to Figures 1 to 4, the inspection device 100 capable of simultaneously measuring displacement and acquiring images according to the first embodiment of the present invention includes a displacement measurement module 110, an imaging module 120, and a displacement measurement module. (110) and the photographing module 120 are coupled to the support body 130, and provided on the support body 130 to split the light reflected from the subject (P) and direct it to the displacement measurement module 110 and the photographing module 120. It includes an optical module 140 and a lighting module 150 provided on the support 130.

The inspection device 100 according to the present invention can be applied to the manufacturing process of displays, semiconductors, electrical and electronic products, etc., and in particular, alignment and displacement inspection of the bonding object is essential in the bonding process that requires high bonding precision. In this bonding process, inspection precision can be improved and inspection time can be shortened.

In addition, the inspection device 100 according to the present invention can be mechanically miniaturized by combining the displacement measurement module 110, the imaging module 120, the optical module 140, and the lighting module 150 with the support 130. Therefore, it can be used even in narrow work spaces, improving usability.

In this embodiment, the subject P may be a display, semiconductor, electrical or electronic product, etc., but is not limited to this, and is not limited to this when measuring displacement or obtaining an image using the displacement measurement module 110 and the imaging module 120. Anything is possible.

The displacement measurement module 110 according to this embodiment can measure the displacement of the subject P, which is a physical quantity such as distance, distance change, position, and thickness of the subject P.

The displacement measurement module 110 can perform required measurements on the subject P using various optical characteristics and, for example, can detect the measurement object using a confocal method. The confocal method is a method in which white light containing multiple wavelengths emitted from a light source such as an LED is uniformly dispersed into short wavelengths due to chromatic aberration and then reflected from the subject (P) to detect the wavelength guided to the confocal sensor and analyze the spectrum. says The confocal method has the advantage of being able to precisely measure the displacement of the subject (P) without using electrical or electronic components.

Meanwhile, the displacement measurement module 110, although not shown, includes a controller, a lens, an optical fiber, etc., and can be applied to measurements using various light sources or various optical characteristics.

The lower end of the displacement measurement module 110 is fixedly coupled to one side of the upper surface of the support body 130. And the subject (P) is disposed at the lower part of the support body 130, and the focus of the displacement measurement module 110 is located on the subject (P). Meanwhile, the displacement measurement module 110 may further include an internal light (not shown) inside, and the light generated from the light source of the displacement measurement module 110 is transmitted through the second channel 135 and the second channel 135 formed on the support 130. The subject P may be illuminated through 1 channel 133.

In addition, in the process of measuring the physical quantity of the subject (P) using the displacement measurement module 110, the optical focus must be formed at a designated position of the subject (P), so the focus position or the location of light incidence or reflection on the subject (P) It is necessary to confirm the location, and for this purpose, in this embodiment, a photographing module 120 for photographing the subject P is provided separately from the displacement measurement module 110.

The imaging module 120 includes a light guide unit 121, one end of which is coupled to the upper surface of the support 130, and a coupling part 123 that is coupled to the other end of the light guide unit 121 and communicates with the light guide unit 121, It includes a camera unit 125 coupled to the coupling portion 123, and a branch portion 125 that branches out in the horizontal direction from the side of the light guide portion 121 and communicates with the light guide tube.

The light guide unit 121 may be formed in the shape of a hollow cylinder and guides the light reflected from the subject P to the camera unit 125. The light guide unit 121 may have a function of detecting light in different wavelength bands from light reflected from the subject P. In addition, light reflected from the subject P is detected by the light guide unit 121 and transmitted to a spectrometer (not shown) or guided to the camera unit 125 to create an image.

The branch portion 125 branches in the horizontal direction from the side of the light guide portion 121 and communicates with the light guide tube. The branch part 125 transmits the light incident on the light guide part 121 to a spectrometer or the like. In addition, a transflective optical mirror (143), etc. may be provided in the area where the light guide part 121 and the branch part 125 intersect to guide light to the branch part 125. The light guided to the branch 125 may be processed by an electronic device such as a computer and displayed.

Meanwhile, in order to place the camera unit 125 at the other end of the light guide tube, in this embodiment, the camera is attached to the other end of the light guide part 121 via the coupling part 123 coupled to the other end of the light guide part 121. A unit 125 is provided. That is, one side of the coupling portion 123 is coupled to the other end of the light guide portion 121, and the camera unit 125 is coupled to the other side of the coupling portion 123.

The coupling portion 123 is formed in a hollow shape and communicates with the light guiding portion 121, and light incident on the light guiding portion 121 is incident on the camera unit 125 through the coupling portion 123. Additionally, the lens area of the camera unit 125 may be inserted into the other side of the coupling portion 123.

The support 130 according to this embodiment supports the displacement measurement module 110 and the imaging module 120 and forms an optical path. The displacement measurement module 110 is coupled to one side of the support 130, and the imaging module 120 is coupled to the other side of the support 130.

As shown in Figures 2 and 3, the support body 130 includes a support block 131 to which a displacement measurement module 110 is coupled to one side of the upper surface and a photographing module 120 is coupled to the other side of the upper surface. ), a first channel 133 formed through the upper and lower surfaces of the object P, coupled with the displacement measurement module 110, and forming a first optical path for the light reflected from the subject P to the displacement measurement module 110, and a support block. A second channel is formed inside the 131 to communicate with the first channel 133, is coupled to the photographing module 120, and forms a second optical path through which light reflected from the subject P is directed to the photographing module 120. Includes channel 135.

The displacement measurement module 110 is fixedly coupled to one side of the upper surface of the support block 131, and the imaging module 120 is fixedly coupled to the other upper surface of the support block 131. The displacement measurement module 110 and the imaging module 120 are arranged to be spaced apart from each other on the upper surface of the support block 131.

Meanwhile, in order to measure physical quantities and capture images of the subject P at the same time, the light reflected from the subject P must be divided into the displacement measurement module 110 and the imaging module 120 and transmitted. For this purpose, a first channel 133 and a second channel 135, which are optical paths through which light moves, are provided inside the support block 131.

The first channel 133 is formed vertically through the upper and lower surfaces of the support block 131. Then, the displacement measurement module 110 is fixedly coupled to the opening of the first channel 133 located on the upper surface of the support block 131. The first channel 133 forms a first optical path through which light reflected from the subject P is directed to the displacement measurement module 110.

The second channel 135 is formed inside the support block 131 to communicate with the first channel 133. The second channel 135 is horizontally branched from the first channel 133 and then formed vertically in the upper surface direction of the support block 131. And the light guide part 121 of the imaging module 120 is fixedly coupled to the opening of the second channel 135 located on the upper surface of the support block 131. The second channel 135 forms a second optical path through which light reflected from the subject P is directed to the photographing module 120.

Meanwhile, the light reflected from the subject P enters the opening of the first channel 133 located on the lower surface of the support block 131 and is then divided into a first optical path and a second optical path to produce the displacement measurement module 110. and are incident on the imaging module 120, respectively. In this embodiment, an optical module 140 is provided inside the support block 131 to divide the light reflected from the subject P into a first optical path and a second optical path.

The optical module 140 according to this embodiment is provided inside the support block 131 and divides the light reflected from the subject P to form a displacement measurement module 110 along the first optical path of the first channel 133. ) and simultaneously incident on the imaging module 120 along the second optical path of the second channel 135.

The optical module 140 is provided in the first channel 133 and includes a beam splitter 141 that splits the light reflected from the subject P into a first optical path and a second optical path, and a second channel ( 135) and includes an optical mirror 143 that reflects light transmitted along the second optical path to the imaging module 120.

The beam splitter 141 is provided in the first channel 133 in the area where the second channel 135 branches. The light reflected from the subject P is incident on the first channel 133 and then split by the beam splitter 141 to be transmitted along the first optical path and the second optical path. And the light transmitted along the first optical path is incident on the displacement measurement module 110 fixedly coupled to the first channel 133. In addition, light transmitted along the second optical path is incident on the imaging module 120 fixedly coupled to the second channel 135 by the optical mirror 143 provided in the second channel 135. Here, the optical mirror 143 is disposed vertically below the imaging module 120.

Meanwhile, as described above, the displacement measurement module 110 may include internal lighting, but if the amount of light reflected is insufficient depending on the material of the subject P and the distance between the optical module 140 and the subject P, the displacement measurement module 110 may include internal lighting. Inspection using the measurement module 110 and imaging module 120 may be difficult. Accordingly, this embodiment further includes a lighting module 150 provided on the lower surface of the support block 131.

As shown in FIGS. 2 and 4, the lighting module 150 is provided on the lower surface of the support block 131 and can be placed adjacent to the opening of the first channel 133 located on the lower surface of the support block 131. there is.

The lighting module 150 is installed on the lower surface of the support block 131 and may include a plurality of light sources 151 disposed adjacent to the opening of the first channel 133 located on the lower surface of the support block 131. The plurality of light sources 151 may be composed of LEDs, but are not limited to this and various light sources may be installed.

A plurality of LEDs 151 may be installed continuously along the opening edge of the first channel 133 located on the lower surface of the support block 131. By installing a plurality of LEDs 151 as described above, images of the subject P can be captured stably.

Hereinafter, an inspection device 100a capable of simultaneously measuring displacement and acquiring images according to a second embodiment of the present invention will be described.

Figure 5 is a front view showing an inspection device capable of simultaneously measuring displacement and acquiring images according to a second embodiment of the present invention, Figure 6 is a side cross-sectional view showing a support according to a second embodiment of the present invention, and Figure 7 is a It is a top view showing the support according to the second embodiment of the invention, and Figure 8 is a bottom view showing the support according to the second embodiment of the present invention.

Referring to Figures 5 to 8, the inspection device 100a capable of simultaneously measuring displacement and acquiring images according to the second embodiment of the present invention includes a displacement measurement module 110a, an imaging module 120a, and a displacement measurement module. (110a) and a support body (130a) to which the photographing module (120a) is coupled, and provided on the support body (130a) to split the light reflected from the subject (P) and direct it to the displacement measurement module (110a) and the photographing module (120a). It includes an optical module 140a and a lighting module 150a provided on the support 130a.

The displacement measurement module 110a, the imaging module 120a, the support 130a, and the optical module 140a according to the second embodiment of the present invention are the displacement measurement module 110 and the imaging module according to the first embodiment of the present invention. Since the module 120, the support 130, and the optical module 140 are the same, a detailed description thereof will be omitted, and the difference, the lighting module 150a, will be described in detail below.

The lighting module 150a according to this embodiment is provided on the lower surface of the support block 131a and may be placed adjacent to the opening of the first channel 133a located on the lower surface of the support block 131a.

As shown in FIGS. 6 and 8, the lighting module 150a is detachably coupled to the lower surface of the support block 131a and is centrally connected to the opening of the first channel 133a located on the lower surface of the support block 131a. It includes a ring-shaped support member 153a with an in-line through hole 154a formed therein, and a plurality of light sources 151a installed on the lower surface of the support member 153a.

The support member 153a is detachably coupled to the lower surface of the support block 131a. The connection between the support member 153a and the support block 131a is achieved by mutually connecting the long hole H formed in the bracket 132a provided at the bottom of the support block 131a and the fastening groove 155a provided on the upper surface of the support member 153a. Can be connected with bolt (B). Meanwhile, since the long hole H is formed in the bracket 132a, optimal lighting for the subject P can be secured by moving the support member 153a relative to the support block 131a. A plurality of fastening grooves 155a may be formed in parallel with each other on the upper surface of the support member 153a in correspondence with the long hole H of the bracket 132a.

And a plurality of light sources 151a may be installed on the lower surface of the support member 153a. The plurality of light sources 151a may be composed of LEDs, but are not limited to this and various light sources may be installed.

Additionally, a through hole 154a inline with the opening of the first channel 133a is formed in the center of the support member 153a. A plurality of light sources 151a may be installed in succession along the edge of the through hole 154a. By installing a plurality of LEDs as described above, images of the subject P can be captured stably.

The above-described lighting module 150a can be used when brighter lighting conditions are required for the subject P, and can be applied to the displacement measurement module 110a having a focal length longer than the height direction thickness of the support member 153a. You can.

As such, the present invention is not limited to the described embodiments, and it is obvious to those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the present invention. Accordingly, such modifications or variations should be considered to fall within the scope of the claims of the present invention.

100, 100a: Inspection device capable of simultaneously measuring displacement and acquiring images
110, 110a: Displacement measurement module 120, 120a: Shooting module
130, 130a: Support 140, 140a: Optical module
150, 150a: Lighting module

Claims (9)

Displacement measurement module that measures the displacement of the subject;
A photographing module for photographing the subject;
A support body to which the displacement measurement module is coupled to one side and the imaging module to the other side; and
An inspection device capable of simultaneously measuring displacement and acquiring an image, including an optical module provided on the support and splitting the light reflected from the object to direct the light to the displacement measurement module and the imaging module. According to paragraph 1,
The support is,
a support block to which the displacement measurement module is coupled to one side of the upper surface and the imaging module to the other side of the upper surface;
a first channel formed through the upper and lower surfaces of the support block, to which the displacement measurement module is coupled, and forming a first optical path through which light reflected from the subject is directed to the displacement measurement module; and
Displacement measurement including a second channel formed inside the support block in communication with the first channel, to which the photographing module is coupled, and forming a second optical path through which light reflected from the subject is directed to the photographing module. and an inspection device capable of simultaneously acquiring images. According to paragraph 2,
The first channel is formed vertically through the upper and lower surfaces of the support block,
The second channel is horizontally branched from the first channel and then formed vertically. An inspection device capable of simultaneously measuring displacement and acquiring images. According to paragraph 3,
The optical module is,
a beam splitter provided in the first channel and splitting light reflected from the subject into the first optical path and the second optical path; and
An inspection device capable of simultaneously measuring displacement and acquiring an image, including an optical mirror provided in the second channel and reflecting light transmitted along the second optical path to the imaging module. According to paragraph 2,
An inspection device capable of simultaneously measuring displacement and acquiring an image, further comprising a lighting module provided on the lower surface of the support block and disposed adjacent to the opening of the first channel located on the lower surface of the support block. According to clause 5,
The lighting module is,
An inspection device capable of simultaneously measuring displacement and acquiring images, including a plurality of light sources installed on the lower surface of the support block and disposed adjacent to the opening of the first channel located on the lower surface of the support block. According to clause 5,
The lighting module is,
a support member detachably coupled to the lower surface of the support block and having a through hole formed at its center inline with the opening of the first channel located on the lower surface of the support block; and
An inspection device capable of simultaneously measuring displacement and acquiring images, including a plurality of light sources installed on the lower surface of the support member. In clause 7,
The support block is provided at a lower portion and includes a bracket having a long hole formed long in the longitudinal direction of the support block,
The support member includes a plurality of fastening grooves provided on the upper surface,
An inspection device capable of simultaneously measuring displacement and acquiring images in which the long hole and the fastening groove are bolted together. According to paragraph 2,
The shooting module is,
a light guide portion whose one end is coupled to the other side of the upper surface of the support block and communicates with the second channel;
A coupling portion coupled to the other end of the light guide portion and communicating with the light guide portion;
A camera unit coupled to the coupling portion; and
An inspection device capable of simultaneously measuring displacement and acquiring an image, including a branch part that branches out in a horizontal direction from a side of the light guide unit and communicates with the light guide tube.

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