KR20230142993A - Apparatus and method for detecting gas - Google Patents

Abstract

A device connected to an out pipeline through which gas is discharged from a processing module that processes harmful gas flowing in from the in pipeline, and monitoring whether harmful gas is processed from the out pipeline, connected to the out pipeline, A gas input port through which gas flows from the out pipeline, an inner line through which the introduced gas passes, a gas output port connected to the out pipeline and through which the introduced gas is discharged to the out pipeline, disposed on the inner line A pressure sensor that senses the pressure of the internal line, a gas detection sensor disposed in the internal line and measuring the gas concentration of the internal line, a first valve disposed between the gas input port and the gas detection sensor, A gas detection device is provided, including a second valve disposed between the gas detection sensor and the gas output port, and a pump disposed between the gas detection sensor and the second valve.

Description

Gas detection device and method {APPARATUS AND METHOD FOR DETECTING GAS}

The present invention relates to a gas detection device and method, and particularly to a gas detection device and method for detecting gas concentration and gas leakage in a gas flowing section.

The importance of scrubber equipment, which reduces various harmful gases generated in the semiconductor manufacturing process, is increasing. The scrubber serves to purify gases and compounds generated inside semiconductor production equipment.

Gas scrubbers used in the semiconductor industry remove various toxic gases, acidic gases, combustible gases (SiH4, SiH6, DCS, As3, PH3), and environmentally harmful gases (PFC: SF6, NF3, F4) generated during the semiconductor manufacturing process. , C2, C3, etc.), and is classified into wet, dry, burn, adsorption, and plasma methods depending on the cleaning method.

The cleaning method of gas scrubbers for semiconductors can be broadly divided into four types: wet type, direct combustion type, indirect combustion type, and adsorption type.

It consists of a primary scrubber that first removes by-products discharged from the equipment and a secondary scrubber that finally processes remaining by-products after purification. Depending on the cleaning method, it is classified into wet, dry, burn-wet, adsorption, and plasma methods.

Harmful gases are treated by a scrubber, and a gas detection device is used to determine the degree of harmful gas treatment.

Sensors in conventional gas detection devices have problems such as failure or reduced accuracy due to continued exposure to high concentrations of gas.

Accordingly, technology that can extend the lifespan of gas detection sensors and improve measurement accuracy is required.

The technical problem to be achieved by the present invention is to provide a gas detection device and method that can extend the life of a gas detection sensor and improve measurement accuracy.

According to one embodiment, a device is provided that is connected to an out pipeline through which gas is discharged from a processing module that processes harmful gas flowing in from the in pipeline, and monitors whether harmful gas is treated from the out pipeline. The gas detection device is connected to the out pipeline, a gas input port through which gas flows from the out pipeline, an internal line through which the introduced gas passes, and connected to the out pipeline, and the introduced gas flows into the out pipe. A gas output port discharged to the line, a pressure sensor disposed in the internal line and sensing the pressure of the internal line, a gas detection sensor disposed in the internal line and measuring the gas concentration in the internal line, and the gas input port and a first valve disposed between the gas detection sensor, a second valve disposed between the gas detection sensor and the gas output port, and a pump disposed between the gas detection sensor and the second valve.

The gas detection device determines whether the gas input port and gas output port are blocked by comparing the pressure of the internal line with a preset reference pressure value, and when the gas input port and gas output port are determined to be normal, the gas output port is checked. It may further include a control unit that opens the first valve and operates the pump to allow gas to flow from the pipeline.

The control unit may block the first valve when the gas concentration measured through the gas detection sensor reaches a preset reference gas concentration value.

According to one embodiment, a gas sensing method of a gas sensing device is provided. The gas detection method includes determining whether the gas input port and gas output port are blocked by comparing the pressure of the internal line with a preset reference pressure value. If the gas input port and gas output port are determined to be normal, the out pipeline Opening the first valve and operating the pump to allow gas to flow in from the gas, and blocking the first valve when the gas concentration measured through the gas detection sensor reaches a preset reference gas concentration value. do.

It can extend the life of gas detection sensors and improve measurement accuracy.

1 is a block diagram of a gas detection system according to one embodiment.
Figure 2 is a block diagram of a gas detection device according to one embodiment.
3 to 8 are diagrams for explaining the operation of a gas detection device according to an embodiment.
Figure 9 is a block diagram of a gas detection system according to one embodiment.
10 is a flowchart of a gas detection method according to one embodiment.

Below, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily implement the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. In order to clearly explain the present invention in the drawings, parts that are not related to the description are omitted, and similar parts are given similar reference numerals throughout the specification.

Throughout the specification, when a part “includes” a certain element, this means that it may further include other elements rather than excluding other elements, unless specifically stated to the contrary.

The terms used in the embodiments of the present invention are general terms that are currently widely used as much as possible while considering the function in the present invention, but this may vary depending on the intention or precedent of a person working in the art, the emergence of new technology, etc. . In addition, in certain cases, there are terms arbitrarily selected by the applicant, and in this case, the meaning will be described in detail in the description of the relevant embodiments. Therefore, the terms used in the present embodiments should not be defined simply as the names of the terms, but should be defined based on the meaning of the term and the overall content of the present embodiments.

In embodiments of the present invention, terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms. The above terms are used only for the purpose of distinguishing one component from another. For example, a first component may be named a second component, and similarly, the second component may also be named a first component without departing from the scope of the present invention. The term and/or includes any of a plurality of related stated items or a combination of a plurality of related stated items.

Additionally, in embodiments of the present invention, singular expressions include plural expressions unless the context clearly dictates otherwise.

In addition, in the embodiments of the present invention, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but It should be understood that it does not exclude in advance the presence or addition of other features, numbers, steps, operations, components, parts, or combinations thereof.

Additionally, in an embodiment of the present invention, a 'module' or 'unit' performs at least one function or operation and may be implemented as hardware or software, or as a combination of hardware and software. Additionally, a plurality of 'modules' or a plurality of 'units' may be integrated into at least one module and implemented with at least one processor, except for 'modules' or 'units' that need to be implemented with specific hardware.

1 is a block diagram of a gas detection system according to one embodiment. Figure 2 is a block diagram of a gas detection device according to one embodiment. 3 to 8 are diagrams for explaining the operation of a gas detection device according to an embodiment. Figure 9 is a block diagram of a gas detection system according to one embodiment.

Referring to FIG. 1, a gas detection system according to one embodiment includes a semiconductor process cabinet 10, an in-pipe line 1, an out-pipe line 2, a processing module 100, and a gas detection device 200. do.

As an example, the semiconductor process cabinet 10 may be a scrubber facility that processes harmful gases, such as toxic or flammable, used in the semiconductor manufacturing process.

As an example, the phosphorus pipeline 1 may be a metal pipeline through which gas flows into the processing module 100.

As an example, the out pipeline 2 may be a metal pipeline through which gas is discharged from the processing module 100.

As an example, the processing module 100 may be a scrubber that processes harmful gas flowing from the phosphorus pipeline 1.

As an example, the gas detection device 200 is connected to the out pipeline 2 and can monitor whether harmful gas is processed from the out pipeline 2. Specifically, the gas detection device 200 determines whether harmful gas is being processed through the processing module 100 based on the result of comparing the gas concentration measured through the gas detection sensor with a preset reference gas concentration value. It can be monitored.

2 and 3, the gas detection device 200 according to one embodiment includes a gas input port 211, an internal line 212, a gas output port 213, a pressure sensor 214, and a gas detection sensor. (215), first valve 216, second valve 217, pump 218, control unit 219, purge port 220, third valve 221, case 222, display unit 223 ), cabinet input port 224, fourth valve 225, cabinet output port 226, fifth valve 227, temperature and humidity sensor 228, speaker unit 229, and communication unit 230. there is.

As an example, the gas input port 211 is connected to the out pipe line 2 through a connecting hose or metal pipe line, and may be a port through which gas flows in from the out pipe line 2.

As an example, the internal line 212 may be a hose line or tube through which the gas flowing into the gas input port 211 passes.

As an example, the internal line 212 may include a first internal line 212a, a second internal line 212b, and a third internal line 212c.

The first internal line 212a is an example, and when the first valve 216 and the second valve 217 are opened (the third valve 221, the fourth valve 225, and the fifth valve 227 are When blocked), the gas flowing into the gas input port 211 may be a line through which the gas is discharged to the gas output port 213.

As an example, the second internal line 212b may be a line branching from the first internal line 212a. When the third valve 221 is opened (when the first valve 216, second valve 217, fourth valve 225, and fifth valve 227 are closed), purging gas flows into the purge port 220. may flow from the second internal line 212b to the first internal line 212a.

As an example, the third internal line 212c may be a line branching from the first internal line 212a. When the fourth valve 225 and the fifth valve 227 are open (when the first valve 216, second valve 217, and third valve 221 are closed), the outside flows into the cabinet input port 224. Air (air inside the semiconductor process cabinet 10) may pass from the third internal line 212c to the first internal line 212a and be discharged to the cabinet output port 226.

As an example, the gas output port 213 is connected to the out pipe line 2 through a connecting hose or metal pipe line, and may be a port through which the introduced gas is discharged to the out pipe line 2.

In one embodiment, the pressure sensor 214 is disposed in the internal line 212 and can sense the pressure of the internal line 212. It can be determined whether the gas input port 211 and the gas output port 213 are blocked through the pressure sensing value.

In one embodiment, the gas detection sensor 215 is disposed in the internal line 212 and can measure the gas concentration in the internal line.

As an example, the first valve 216 may be disposed between the gas input port 211 and the gas detection sensor 215.

The second valve 217 may be disposed between the gas detection sensor 215 and the gas output port 213.

As an example, the pump 218 may be an air pump disposed between the gas detection sensor 215 and the second valve 217.

Referring to FIG. 4, the control unit 219, as an example, compares the pressure of the internal line 212 measured through the pressure sensor 214 with a preset reference pressure value and controls the gas input port 211 and the gas output. It can be determined whether the port 213 is blocked. When the gas input port 211 and the gas output port 213 are blocked by powder, the pressure value increases, so the control unit 219 controls the internal line 212 when the pressure is greater than the preset reference pressure value. , it can be determined that the gas input port 211 and the gas output port 213 are blocked.

As an example, the control unit 219 is configured to allow gas to flow from the out pipe line 2 when the gas input port 211 and the gas output port 213 are determined to be normal (if it is determined that there is no blockage). The first valve 216 may be opened and the pump 218 may be operated.

Referring to FIG. 5, the control unit 219, as an example, operates the first valve when the gas concentration measured through the gas detection sensor 215 reaches a preset reference gas concentration value or a preset reference time elapses. (216) can be blocked. Through this, sensor failure due to exposure to high concentrations of gas can be prevented.

As an example, the purge port 220 may allow purging gas (eg, nitrogen (N2) gas) to flow into the purge port 220.

The third valve 221 may be disposed in the internal line 212 as an example.

Referring to FIG. 6 , in one embodiment, the control unit 219 may block the first valve 216 and then open the third valve 221 to allow purging gas to flow in. Through this, the lifespan of the gas detection sensor 215 can be extended by cleaning the contaminated gas detection sensor 215.

Referring to FIG. 7, the control unit 219 is an example, and after cleaning the gas detection sensor 215, if the gas concentration measured through the gas detection sensor 215 is lower than a preset reference gas concentration value, the remaining gas is It is determined that there is none, and the third valve 221 can be blocked.

Case 222 is an embodiment, and has a gas input port 211, an internal line 212, a gas output port 213, a pressure sensor 214, a gas detection sensor 215, and a first valve 216. ), second valve 217, pump 218, control unit 219, purge port 220, third valve 221, case 222, display unit 223, cabinet input port 224, It may be a metal housing including a fourth valve 225, a cabinet output port 226, a fifth valve 227, a temperature and humidity sensor 228, a speaker unit 229, and a communication unit 230.

As an example, the display unit 223 is disposed on one side of the case 222 and can output pressure sensing values, gas concentration, and gas leakage information on the screen. The display unit 223 is an example of a 7-segment display device, a liquid crystal display (LCD), a thin film transistor-liquid crystal display, and an organic light-emitting diode. OLED).

As an example, the cabinet input port 224 may be a port through which external air (air inside the semiconductor process cabinet 10) flows.

As an example, the fourth valve 225 may be disposed between the cabinet input port 224 and the gas detection sensor 215.

As an example, the cabinet output port 226 may be a port through which external air (air inside the semiconductor process cabinet 10) is discharged.

In one embodiment, the fifth valve 227 may be disposed between the pump 218 and the cabinet output port 226.

As an example, the temperature and humidity sensor 228 is disposed on one side of the case 222 and can sense temperature and humidity.

Referring to FIG. 8, the control unit 219, as an example, may allow external air to flow in when the temperature measured through the temperature and humidity sensor 228 is higher than the preset reference temperature or the humidity is higher than the preset reference humidity. The fourth valve 225 can be opened and the pump can be operated. By maintaining the optimal state of the gas detection sensor 215 through external air circulation, measurement accuracy can be improved and sensor lifespan can be extended.

In one embodiment, the control unit 219 blocks the first valve 216, the second valve 217, and the third valve 221 and opens the fourth valve 225 and the fifth valve 227 to the outside. The gas concentration in the air (air inside the semiconductor process cabinet 10) can be monitored, and gas leakage in external air (air inside the semiconductor process cabinet 10) can be determined.

As an example, the speaker unit 229 is included inside the case 222 and can output an alarm sound.

As an example, the communication unit 230 is included inside a case and may include a communication module that transmits and receives data to and from the user terminal 300 using a wired or wireless network.

As an example, the control unit 219 outputs an alarm sound through the speaker unit 229 when the gas concentration measured through the gas detection sensor 215 reaches a preset reference gas concentration value, and the communication unit 230 A notification message can be transmitted to the user terminal 300 through .

In one embodiment, the user terminal 300 is equipped with a memory means, such as a mobile communication terminal, a desktop computer, a laptop computer, a workstation, a palmtop computer, a personal digital assistant (PDA), a web pad, etc. It may be a digital device equipped with a microprocessor and equipped with computing power.

Referring to FIG. 9, the gas detection system according to one embodiment includes a semiconductor process cabinet 10, an in-pipe line 1, an out-pipe line 2, a processing module 100, and a first gas detection device 200. , may include a user terminal 300.

As an example, the first gas detection device 200 may be connected to the in pipeline (1) and the out pipeline (2), and may measure the gas concentration flowing from the in pipeline (1) and the out pipeline (2). The treatment efficiency for harmful gases can be calculated by comparing the gas concentration flowing in from the system.

10 is a flowchart of a gas detection method according to one embodiment.

Referring to FIG. 10, the gas detection method according to one embodiment determines whether the gas input port 211 and the gas output port 213 are blocked by comparing the pressure of the internal line 212 with a preset reference pressure value. In step S100, if the gas input port 211 and the gas output port 213 are determined to be normal, the first valve 216 is opened to allow gas to flow from the out pipe line 2 and the pump 218 is opened. A step of operating (S200), when the gas concentration measured through the gas detection sensor 215 reaches a preset reference gas concentration value, a step of blocking the first valve 216 (S300), the first valve 216 ) and then opening the third valve 221 to allow purging gas to flow in (S400). If the gas concentration measured through the gas detection sensor 215 is lower than the preset reference gas concentration value, the remaining It may include determining that there is no gas and blocking the third valve 221 (S500).

Since steps S100 to S500 are the same as the operation contents of the gas detection device 200 described above, detailed descriptions are omitted.

Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements made by those skilled in the art using the basic concept of the present invention defined in the following claims are also possible. It falls within the scope of rights.

Those skilled in the art related to this embodiment will understand that the above-described base material can be implemented in a modified form without departing from the essential characteristics. Therefore, disclosure methods should be considered from an explanatory rather than a restrictive perspective. The scope of the present invention is indicated in the claims rather than the foregoing description, and all differences within the equivalent scope should be construed as being included in the present invention.

Claims (4)

A device connected to an out pipeline through which gas is discharged from a processing module that processes harmful gas flowing in from the in pipeline, and monitoring whether harmful gas is processed from the out pipeline,
A gas input port connected to the out pipeline and through which gas flows in from the out pipeline,
Internal line through which the incoming gas passes,
A gas output port connected to the out pipe line and discharging the introduced gas into the out pipe line,
A pressure sensor disposed in the internal line and sensing the pressure of the internal line,
A gas detection sensor disposed in the internal line and measuring the gas concentration in the internal line,
A first valve disposed between the gas input port and the gas detection sensor,
a second valve disposed between the gas detection sensor and the gas output port, and
A gas detection device comprising a pump disposed between the gas detection sensor and the second valve. In paragraph 2,
The gas detection device,
The pressure of the internal line is compared with a preset reference pressure value to determine whether the gas input port and gas output port are blocked, and if the gas input port and gas output port are determined to be normal, gas flows in from the out pipeline. A gas sensing device further comprising a control unit that opens the first valve and operates the pump so that the gas detection device can operate. In paragraph 3,
The control unit,
A gas detection device that blocks the first valve when the gas concentration measured through the gas detection sensor reaches a preset reference gas concentration value. A gas detection method of a gas detection device, comprising:
Comparing the pressure of the internal line with a preset reference pressure value to determine whether the gas input port and gas output port are blocked;
If the gas input port and the gas output port are determined to be normal, opening the first valve and operating the pump to allow gas to flow from the out pipe line, and
When the gas concentration measured through the gas detection sensor reaches a preset reference gas concentration value, blocking the first valve
A gas detection method comprising:

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