KR20230138388A - 팬아웃 플로우 셀 - Google Patents
팬아웃 플로우 셀 Download PDFInfo
- Publication number
- KR20230138388A KR20230138388A KR1020227045853A KR20227045853A KR20230138388A KR 20230138388 A KR20230138388 A KR 20230138388A KR 1020227045853 A KR1020227045853 A KR 1020227045853A KR 20227045853 A KR20227045853 A KR 20227045853A KR 20230138388 A KR20230138388 A KR 20230138388A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- die
- flow cell
- top surface
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 358
- 238000000034 method Methods 0.000 claims abstract description 354
- 239000000853 adhesive Substances 0.000 claims abstract description 297
- 230000001070 adhesive effect Effects 0.000 claims abstract description 297
- 239000012530 fluid Substances 0.000 claims abstract description 132
- 239000000463 material Substances 0.000 claims description 226
- 238000010438 heat treatment Methods 0.000 claims description 58
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- 239000011521 glass Substances 0.000 claims description 46
- 239000004020 conductor Substances 0.000 claims description 44
- 239000000919 ceramic Substances 0.000 claims description 37
- 238000000465 moulding Methods 0.000 claims description 36
- 239000004593 Epoxy Substances 0.000 claims description 35
- 238000001723 curing Methods 0.000 claims description 30
- 150000001875 compounds Chemical class 0.000 claims description 28
- 239000002648 laminated material Substances 0.000 claims description 25
- 239000010949 copper Substances 0.000 claims description 18
- 239000010931 gold Substances 0.000 claims description 18
- 230000008878 coupling Effects 0.000 claims description 17
- 238000010168 coupling process Methods 0.000 claims description 17
- 238000005859 coupling reaction Methods 0.000 claims description 17
- 238000001459 lithography Methods 0.000 claims description 16
- 230000000295 complement effect Effects 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 15
- 229910052737 gold Inorganic materials 0.000 claims description 15
- 229910044991 metal oxide Inorganic materials 0.000 claims description 15
- 150000004706 metal oxides Chemical class 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- 238000001029 thermal curing Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 238000005304 joining Methods 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 description 52
- 239000000945 filler Substances 0.000 description 49
- 238000010586 diagram Methods 0.000 description 42
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- 238000000206 photolithography Methods 0.000 description 3
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- 238000003786 synthesis reaction Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000001712 DNA sequencing Methods 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 230000009471 action Effects 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0663—Whole sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0819—Microarrays; Biochips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Optical Measuring Cells (AREA)
- External Artificial Organs (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163146444P | 2021-02-05 | 2021-02-05 | |
| US63/146,444 | 2021-02-05 | ||
| US202163169423P | 2021-04-01 | 2021-04-01 | |
| US63/169,423 | 2021-04-01 | ||
| PCT/US2022/014740 WO2022169763A1 (en) | 2021-02-05 | 2022-02-01 | Fanout flow cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20230138388A true KR20230138388A (ko) | 2023-10-05 |
Family
ID=82741618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227045853A Pending KR20230138388A (ko) | 2021-02-05 | 2022-02-01 | 팬아웃 플로우 셀 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20240009665A1 (https=) |
| EP (1) | EP4288209A4 (https=) |
| JP (1) | JP2024507023A (https=) |
| KR (1) | KR20230138388A (https=) |
| CN (1) | CN116209523A (https=) |
| AU (1) | AU2022217155A1 (https=) |
| CA (1) | CA3183872A1 (https=) |
| WO (1) | WO2022169763A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024220219A1 (en) * | 2023-04-17 | 2024-10-24 | Ciena Corporation | Managing adhesive material shaping using structure arrays |
| US12596225B2 (en) | 2023-04-17 | 2026-04-07 | Ciena Corporation | Managing adhesive material shaping using structure arrays |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0234048B2 (ja) * | 1981-10-09 | 1990-08-01 | Sekonitsuku Kk | Ekitaiyokinoondoseigyosochi |
| US6254827B1 (en) * | 1993-11-01 | 2001-07-03 | Nanogen, Inc. | Methods for fabricating multi-component devices for molecular biological analysis and diagnostics |
| EP1054949A4 (en) * | 1998-02-20 | 2006-09-27 | Nanogen Inc | ADVANCED, ACTIVE DEVICES AND PROCESSES FOR MOLECULAR, BIOLOGICAL ANALYSIS AND DIAGNOSIS |
| DE102004041595A1 (de) * | 2004-04-30 | 2005-12-01 | Markus Gruber | Messzelle sowie Verfahren zum Herstellen einer Messzelle und Messvorrichtung zur Aufnahme einer derartigen Messzelle |
| WO2007049332A1 (ja) * | 2005-10-25 | 2007-05-03 | Shimadzu Corporation | フローセル及びその製造方法 |
| US7802466B2 (en) * | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
| US8623598B2 (en) * | 2008-03-19 | 2014-01-07 | Intelligent Bio Systems, Inc. | Methods and compositions for inhibiting undesired cleaving of labels |
| US20130050155A1 (en) * | 2011-08-30 | 2013-02-28 | Qualcomm Mems Technologies, Inc. | Glass as a substrate material and a final package for mems and ic devices |
| US9385006B2 (en) * | 2012-06-21 | 2016-07-05 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming an embedded SOP fan-out package |
| JP6128764B2 (ja) * | 2012-06-27 | 2017-05-17 | 京セラ株式会社 | バイオセンサ、検出方法、検出システム及び検出装置 |
| US9789483B2 (en) * | 2013-03-11 | 2017-10-17 | Cue Inc. | System for portable and easy-to-use detection of analytes with mobile computing device |
| EP3116651B1 (en) * | 2014-03-11 | 2020-04-22 | Illumina, Inc. | Disposable, integrated microfluidic cartridge and methods of making it |
| US9911700B2 (en) * | 2016-01-26 | 2018-03-06 | Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. | Embedded packages |
| CN206292198U (zh) * | 2016-09-21 | 2017-06-30 | 光合声科技股份有限公司 | 电子式生物传感器与微流体装置的多基板整合结构 |
| CN111295733B (zh) * | 2017-09-19 | 2024-01-05 | 深圳华大智造科技股份有限公司 | 晶片级测序流通池制造 |
| US10861829B2 (en) * | 2017-12-26 | 2020-12-08 | Illumina, Inc. | Sensor system |
| NL2020616B1 (en) * | 2018-02-03 | 2019-08-14 | Illumina Inc | Cartridge with laminated manifold |
| TWI853851B (zh) * | 2018-11-15 | 2024-09-01 | 中國商深圳華大智造科技有限公司 | 微流體裝置與其製備方法 |
| CN111718836B (zh) * | 2020-06-16 | 2022-08-26 | 东南大学 | 一种用于稀有细胞获取与单细胞封装的微流控芯片 |
-
2022
- 2022-02-01 KR KR1020227045853A patent/KR20230138388A/ko active Pending
- 2022-02-01 US US18/003,281 patent/US20240009665A1/en active Pending
- 2022-02-01 EP EP22750252.3A patent/EP4288209A4/en active Pending
- 2022-02-01 JP JP2022580780A patent/JP2024507023A/ja active Pending
- 2022-02-01 AU AU2022217155A patent/AU2022217155A1/en active Pending
- 2022-02-01 CA CA3183872A patent/CA3183872A1/en active Pending
- 2022-02-01 CN CN202280005346.3A patent/CN116209523A/zh active Pending
- 2022-02-01 WO PCT/US2022/014740 patent/WO2022169763A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CA3183872A1 (en) | 2022-08-11 |
| EP4288209A1 (en) | 2023-12-13 |
| JP2024507023A (ja) | 2024-02-16 |
| EP4288209A4 (en) | 2024-12-11 |
| WO2022169763A1 (en) | 2022-08-11 |
| AU2022217155A1 (en) | 2023-01-05 |
| CN116209523A (zh) | 2023-06-02 |
| US20240009665A1 (en) | 2024-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20221227 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20250123 Comment text: Request for Examination of Application |