KR20230103118A - Overhead Transport selectively conducting a group transport - Google Patents

Abstract

The ceiling transfer device is started. The ceiling transfer device is installed on a floor where a plurality of processing facilities for handling transported objects are disposed and at least one transfer rail installed on a ceiling facing the floor and extending in a line shape, and at least one transporting object while moving between the processing facilities along the transfer rail. A cluster controller configured to configure one transport device and transport devices adjacent to each other as a single cluster device and perform cluster transport to transport transported objects. Even if there is no corresponding transport device for transporting objects having various characteristics, maintenance cost of the ceiling drive device can be reduced by transporting them using a cluster device combined with an existing transport device.

Description

Overhead transport selectively conducting a group transport {Overhead Transport selectively conducting a group transport}

The present invention relates to a ceiling conveying device, and more particularly, to a ceiling conveying device that grips and transports a conveyed object along a transfer rail installed on the ceiling.

In the manufacturing process of semiconductor devices, a ceiling transfer device is widely used for wafer transfer. Due to the nature of the semiconductor manufacturing process, unit process facilities are installed in a clean room, and transfer between process facilities is accommodated in a FOUP and performed through a transfer device.

The ceiling transfer device is a transfer rail installed on the ceiling of a clean room in which a number of unit process facilities are installed and a transfer that protects the carrier from the outside while moving up and down from the transfer rail to transfer and load the FOUP and move along the transfer rail It consists of a transport vehicle.

The transfer device transfers the FOUP from the source port, which is the load port of the source facility, and then moves along the transfer rail to load it into the target port, which is the load port of the target facility. At this time, the standard of the transport device is set according to the transported object, and the appropriate transport device is determined according to the characteristics of the transported object such as the shape, size, and weight of the FOUP.

Therefore, the transport vehicle is set as a driving condition of a loadable foo, and the driving condition is applied on the premise of transporting a single foo. In other words, 1 vehicle-1 pull transfer is established as a drive unit of the conveying device. Accordingly, in the case of simultaneously transporting a plurality of the same FOUPs, a large carrier capable of accommodating a plurality of FOUPs is manufactured and a new transfer device having driving conditions suitable for transporting the large FOUP is being manufactured.

However, there is a problem in that the conveying device cannot be standardized because the transport characteristics of the conveying device 1-1-1 require a conveying device that meets the characteristics of the conveyed object. There is a problem in that, when a new transported object is required, a new transporting device corresponding to the new transporting device must be developed, and when the characteristics of a conventional transported object are changed, the conventional transporting device must also be modified accordingly.

For example, when the total weight of a transported object is changed due to a change in the quantity or type of contents accommodated in the transported object, it is impossible to transfer the transported object with a transport device under the existing drive condition, and thus a transport device having a new drive condition must be provided. In addition, when the size of the conveyed object is changed, it is difficult to stably drive the conveying device under the existing driving conditions due to the difference in the center of gravity.

Accordingly, despite the various advantages of the ceiling transfer device, the field of application tends to be limited only in the entire process of the semiconductor manufacturing process in which the shape, size, and weight of the transport object, FOUP, are standardized. In the semiconductor post-process, since the type of conveyed object and transport conditions are diverse, it is expensive to manufacture and maintain a transport device corresponding to each transport object and transport condition. Furthermore, in other industrial fields where the types of conveyed objects and conveying conditions are more diverse, it is difficult to realistically satisfy the one-vehicle-one-object conveying characteristic that requires a corresponding conveying device for each object.

Therefore, there is an increasing need for a new operating method of a ceiling conveying device capable of transferring various conveyed objects using a conventional conveying device.

The present invention has been proposed to improve the above-described problems, and embodiments of the present invention provide a ceiling transfer device that transfers objects having various sizes and weights to a plurality of transfer devices.

Ceiling conveying device according to exemplary embodiments for achieving one object of the present invention is installed on a floor where a plurality of handling facilities for handling conveyed goods are disposed and a ceiling facing the floor and at least one extending in a line shape. A transfer rail, at least one transfer device that moves between the processing facilities along the transfer rail and transfers the transported object, and a group that configures the transport devices adjacent to each other as a single group device to transfer the transported object in a cluster. contains the controller.

As an embodiment, the cluster controller includes a transfer signal detecting unit for detecting a transfer signal for the cluster transport items, which are transport items requiring cluster transfer, characteristic information on the cluster transport items, and rails of the transfer rails distributed around the cluster transport items. and a transport mode setting unit that sets a transport mode for the cluster cargoes by combining information, and a cluster transport operation unit that controls the operation of the clustering device to transport the cluster cargoes according to the set transport mode.

As an example, the characteristic information about the cluster transport items includes the size, weight, and shape of the cluster transport items.

As an embodiment, the transfer mode is a longitudinal transfer mode in which the cluster device is constituted by a tandem device, which is the transfer device running along the same transfer rail, and carried out along a single transfer rail, and a longitudinal transfer mode that is adjacent to each other and extends side by side. and includes a transverse transport mode in which the grouping device is configured with a row device, which is the transport device that runs along different transport rails, and performed along a plurality of transport rails at the same time.

As an embodiment, the cluster transfer operation unit includes a longitudinal actuator and a transverse actuator that control the cluster devices to operate in the longitudinal transfer mode and the transverse transfer mode, respectively.

As an embodiment, the longitudinal mover detects the load distribution and shape of the group transport objects and determines the interval and number of the tandem devices, and a unique operation to operate the tandem devices with a single operation signal. A tandem drive frequency setting unit for setting a frequency, an interval setting unit for individually driving the tandem devices at the tandem drive frequency to set the detected distance, and the grouping device to which the clustered cargo is fixed at the tandem drive frequency. It includes a longitudinal driving unit that drives.

As an embodiment, the conveying rail is provided with a distance sensor capable of detecting a separation distance between adjacent conveying rails, and the distance setting unit obtains the distance detected through the distance sensor to determine the target conveying device for the standard conveying device. The position is adjusted so that the distance corresponds to the detection interval.

As an embodiment, the transverse actuator includes a rowing device setting unit that determines the number of the rowing devices by detecting the load distribution and shape of the group cargo, and a unique operating frequency to operate the rowing devices with a single operation signal. A row drive frequency setting unit to set, a device alignment unit to drive the row devices individually at the row drive frequency and align them along the center line of the cluster transport objects, and drive the cluster devices to which the cluster transport objects are fixed at the row drive frequency It includes a transverse driving unit that does.

As an embodiment, the transverse actuator further includes a rotation control unit provided in the transfer device and controlling a rotation driving unit that rotates a position of an elevation unit that lowers the gripping unit toward the transported object to coincide with an alignment direction of the group transported object. .

As an embodiment, the cluster transfer operation unit further includes a combined actuator that simultaneously performs the longitudinal transfer mode and the lateral transfer mode by operating the longitudinal actuator and the transverse actuator with a single operation signal, The swarming device operates in a multi-transport mode.

In the ceiling conveying device according to exemplary embodiments of the present invention, conveyed objects that do not meet the operating conditions of the conveying device can be transported by a cluster device in which a plurality of conveying devices are combined. Select the optimal transport mode from the longitudinal transport mode and the lateral transport mode based on the characteristic information of the conveyed object and the rail information, and multiple transports along the longitudinal direction along the transport rail or in the transverse direction perpendicular to the transport rail to suit the transport mode Arrange devices to form cluster devices. By arranging the driving means to drive the grouping devices as a single transporting unit, it is possible to transport the cluster transported objects by combining conventional transporting devices without having to provide a separate transporting device. Accordingly, the correlation between the conveying vehicle constituting the ceiling conveying device and the conveyed object can be alleviated and conveyed articles of various sizes and weights can be transferred using the conventional conveying device.

However, the effects of the present invention are not limited to the above-mentioned effects, and may be variously extended without departing from the spirit and scope of the present invention.

1 is a configuration diagram showing a ceiling transfer device according to an embodiment of the present invention.
2 is a view showing a transfer device according to an embodiment of the present invention.
FIG. 3 is a block diagram showing the configuration of a clustering controller for forming the clustering device shown in FIG. 1 .
FIG. 4A is a perspective view illustrating longitudinal cluster transfer performed by the ceiling transfer device shown in FIG. 1 in a longitudinal transfer mode according to an embodiment of the present invention.
FIG. 4B is a perspective view illustrating lateral cluster transfer performed by the ceiling transfer device shown in FIG. 1 in a lateral transfer mode according to an embodiment of the present invention.

Since the present invention can be applied with various changes and can have various forms, embodiments will be described in detail in the text. However, this is not intended to limit the present invention to a specific form disclosed, and should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

Like reference numbers have been used for like elements in describing each figure. Terms such as first and second may be used to describe various components, but the components are not limited by the terms and are used only for the purpose of distinguishing one component from another.

Terms used in this application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprise" or "consisting of" are intended to designate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the present application, they should not be interpreted in an ideal or excessively formal meaning. don't

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and redundant descriptions of the same components are omitted.

1 is a configuration diagram showing a ceiling transfer device according to an embodiment of the present invention.

Referring to FIG. 1 , a ceiling transport device 500 according to an embodiment of the present invention is a cluster controller ( 300).

As an embodiment, the transfer rail 100 is installed on a floor (B) where a plurality of processing facilities (EQ) for handling conveyed goods are disposed and a ceiling (T) facing the floor (B) and extends in a line shape. Provided with at least one rail structure.

For example, the transfer rail 100 extends in a line shape to be adjacent to the ceiling 12 inside the semiconductor post-processing fab 10 . A plurality of post-process process equipment (EQ) is disposed on the floor 11 of the fab 10, and a load port is one-to-one with the process equipment (EQ) for loading and unloading substrates to the process equipment (EQ). are placed When a magazine (M) containing a plurality of substrates (not shown) or a material to be transported (T) is located in the load port, the material (T) or the magazine (M) flows into the processing equipment (EQ) to perform a post-processing process for the substrate. carry out When the post-processing process is completed, the substrates are accommodated in the magazine M or transported material T and unloaded to the load port.

The process equipment (EQ) includes various post-processing process equipment capable of manufacturing semiconductor devices. For example, the post-processing process facility (EQ) may include various facilities capable of performing a post-processing process for semiconductor manufacturing, such as a bonding process or a packaging process. The substrate is supplied to the load port by the ceiling transfer device 500 and then supplied to the process equipment EQ, where various processes for manufacturing a semiconductor package are performed. When the process is completed in the processing equipment (EQ), the substrate is accommodated in the transfer magazine (M) or the conveyance material (T) and discharged from the processing equipment (EQ) to the load port again. The magazine (M) or the transfer material (T) in which a plurality of processing substrates are accommodated is accommodated in the transfer device 200 of the ceiling transfer device 500, and the process equipment (EQ) for the subsequent process along the transfer rail 100 is supplied to the load port of Hereinafter, the magazine M or the transported object T is referred to as a transported object T as a transfer object of the ceiling transport device 500 .

The conveyed material (T) located in the load port is fixed to the transfer device 200 and transferred along the transfer rail 100 to the load port of a subsequent process facility for a subsequent process. The transfer rail 100 is arranged to pass through the top of each load port provided in the fab 10, so that the transfer device 200 can exchange the load port and transported material T disposed in each process equipment EQ. can That is, the transfer device 200 grips and lifts the conveyed material T from the source port SP, which is a load port of the source process equipment, and fixes it inside the transfer device 200, and is a load port of the target process equipment. After transferring to the top of the target port (TP), the transported product (T) is lowered to place the transported product (T) in the target port (TP).

At this time, in order to effectively access between the plurality of process equipment (EQ) arranged in the limited space of the fab 10, the transfer rail 100 has a network shape so that the transfer device 200 moves along the optimal transfer distance. It consists of

For example, the transfer rail 100 may be formed of a multi-layer structure in which linear running rails are installed to overlap along the height direction of the semiconductor fab 10, or a parallel structure disposed side by side with each other along the horizontal direction may be formed. The transfer rails of the parallel structure and the multi-layer structure may have branch rails for changing the running rails to adjacent transfer rails.

As an embodiment, the transfer device 200 moves along the transfer rail 100 and transfers substrates between a plurality of process equipment (EQ) installed on the floor 11 of the semiconductor fab 10 .

2 is a view showing a transfer device according to an embodiment of the present invention.

Referring to FIG. 2, the transfer device 200 is coupled to the transfer rail 100 and performs a rotational motion with respect to the transfer rail 100 to drive along the transfer rail 100, and It includes a transport vehicle 250 fixed to the lower portion of the travel machine 210 to hold the transport object T and fix it therein. Therefore, the transfer vehicle 250 moves along the transfer rail 100 by the movement of the travel machine 210 relative to the transfer rail 100 .

The travel machine 210 is provided on both sides of the travel base 211 having a three-dimensional shape and the travel base 211 to rotate while in contact with the transfer rail 100. A wheel 212 and a steering wheel 213 disposed on an upper surface of the driving base 211 and movable along a direction perpendicular to the driving direction of the driving base 211 are provided.

The driving base 211 functions as a base body to which the driving wheel 212 and the steering wheel 213 are fixed, and the transport vehicle 250 is fixed to the lower part. Therefore, the driving base 211 is configured to have sufficient strength and rigidity to fix the transport vehicle 250 and the transport object T and withstand the dynamic loads of the driving wheel 212 and the steering wheel 213. do.

The driving wheel 212 rotates along the transfer rail 100 that optimally connects the source port ST and the target port TP to transport the conveyed object T. At this time, when departing from the travel rail to change the travel path according to the information on the optimal transport rail, the steering wheel 213 enters the branch rail. The steering wheel 213 moves the transfer vehicle 250 while moving to a new travel line while rotating with respect to the branch rail.

The conveying vehicle 250 includes a housing 251, a moving part 252, a lifting part 253 and a gripping part 254, and grips the conveyed object T to move the housing 251 from the source port SP. It rises to accommodate the interior of the housing 251 or descends to load the transported material T accommodated in the target port TP.

The housing 251 is fixed so as to be suspended from the lower part of the travel machine 210, and a part of the rear surface R is opened to have a lower opening for the vertical movement of the conveyed object T. In addition, the front side, which is one side, can be opened for the horizontal movement of the conveyed object T.

The moving unit 252 is provided on an inner upper surface of the housing 251 and moves horizontally through the open front of the housing 251 to transfer the conveyed object T along the horizontal direction. The lifting part 253 is fixed to the lower part of the moving part 252 and may lift or lower the conveyed material T by winding or unwinding the belt. The gripping part 254 is fixed to an end of the belt to grip the conveyed material T.

As the lifting part 253 lifts the belt, the conveyed material T held by the gripping part 251 can be moved up and accommodated in the housing 251 or separated from the housing 251 .

At this time, as will be described later, the elevation part 253 can rotate appropriately according to the alignment direction of the conveyed object T with respect to the transfer rail 100 . For example, the elevating unit 253 includes a rotary driving unit 253a and may be disposed along the same direction as the transfer rail 100 or may be disposed along a direction perpendicular to the transfer rail 100. Accordingly, the belts extending from the lifting part 253 may be arranged in a line along the conveying rail 100 or may be arranged to face each other on the sides of the conveying rail 100 .

At this time, the conveyed material T has various sizes, weights, and shapes due to the process characteristics of the unit process EQ or relevance to subsequent processes. In the post-semiconductor process of manufacturing a semiconductor package, unlike the pre-semiconductor process having a uniform shape and weight, various processes for manufacturing the package are performed, so that the conveyed object T also has various shapes and weights.

Accordingly, when the ceiling transport device, which is mainly used in the semiconductor pre-process, is used in the post-process, a transport device 200 corresponding to the conveyed object T having various shapes and weights is required.

However, the present invention configures a plurality of transfer devices 200 as a single group device to correspond to the characteristics of the transported object T using the cluster controller 300, and uses various identical transfer devices 200 to A variety of conveyed goods (T) can be transported.

During the post-semiconductor process, when transported objects T that are out of the operating conditions of individual conventional transport devices 200 are generated, a plurality of transport devices 200 are combined to form a single grouping device in order to transport a single transported object T. will constitute For example, a conveyed object T having a size or weight larger than the size or weight that can be transported by the conventional transport device 200 is out of the driving conditions of the conventional transport device 200, making it difficult to transport. Accordingly, a transported object larger than the set size or heavier than the set size may be set to be transported by combining a plurality of transport devices 200 .

Hereinafter, transported objects T that are significantly different in size, weight, and shape from conventional transported objects T and are transported using a plurality of transfer devices 200 are referred to as group transported objects GT. In addition, a transport unit in which a plurality of transport devices 200 are combined to transport the group cargo GT is referred to as a group device GV.

FIG. 3 is a block diagram showing the configuration of a clustering controller for forming the clustering device shown in FIG. 1 . In the case of this embodiment, the cluster controller 300 discloses that it is provided inside the fab 10, but is not necessarily limited thereto, and if the transfer device 200 can be configured as a cluster device (GV), the fab 10 ) It is obvious that it can be arranged in various configurations inside and outside of.

Referring to FIG. 3, the cluster controller 300 configures the transport devices 200 that are adjacent to each other as a single cluster device GV to perform cluster transport for transporting the cargo T ( 200) can be controlled.

As an embodiment, the cluster controller 300 includes a transfer signal detection unit 310, a transfer mode setting unit 320, and a cluster transfer operation unit 330 to transfer the transfer to the transport structure GT. A plurality of transfer devices 200 may be configured as a single grouping device (GV) to perform.

For example, the transfer signal detecting unit 310 detects whether or not transfer of the clustered cargo GT is required. The transfer signal detection unit 310 is connected to the transport loading elements and storage elements variously disposed in the sea port of the fab 10, so that the transport product exceeding the normal operating conditions of the transfer device 200 is a ceiling transport device ( 500), it is determined whether or not it is put into the operating range.

For example, it can be detected from the source port (SP), which is the load port of the process equipment (EQ), whether or not the conveyed object T disposed on the upper surface is a group conveyed object together with a corresponding port number. Since the source port (SP) transports the cargo toward the target port (TP), the size, weight, and shape of the transported object located in the source port (SP) are detected, and when it is impossible to move with the normal transfer device 200, the transported object is clustered. (GT) and transmits the characteristic information about the group cargo (GT) and the detected port location to the transfer mode setting unit 320.

Similarly, it is possible to detect whether or not the transported object T is a group transported object GT in a buffer port (not shown) of a side track buffer (STB) from which the transported object T is taken out or brought in.

For example, by arranging an inspection device for inspecting whether the transported object T satisfies the operating conditions of the transport device 200 in the source port (SP) or the buffer port, the transported object outside the conventional driving conditions is detected from the inspection device. In this case, the inspection result is transmitted to the transfer signal detection unit 310. The transfer signal detecting unit 310 analyzes the inspection result and the necessity of transporting the transported items, and sets the transported items T as the clustered transported items GT and generates a cluster transport number when cluster transport is required.

The transport signal detecting unit 310 generates a cluster transport signal, which is a data signal including the cluster transport number and the location of the cluster transport object GT, and transmits it to the transport mode setting unit 320 .

In this embodiment, it starts with generating a cluster transfer signal from the inspection result of the transport objects T disposed from the source port SP and the side track buffer. It is obvious that a platooning signal can be generated.

The transfer mode setting unit 320 transmits characteristic information about the cluster transport object GT corresponding to the cluster transport number and rail information about the transport rail 100 located around the cluster transport object GT to the ceiling transport device. 500 is obtained as a database (DB) and a transport mode of cluster transport suitable for transporting the cluster cargoes GT is set.

For example, the transfer mode includes a longitudinal transfer mode (M1) in which a plurality of transfer devices 200 are operated as a single grouping device (GV) along a single transfer rail 100 and a plurality of transfers parallel to each other. A transverse transfer mode (M2) in which multiple transfer devices 200 disposed along the rail 100 are operated as a single grouping device (GV) may be included.

4A is a perspective view showing longitudinal cluster transfer performed by the ceiling transfer device shown in FIG. 1 in a longitudinal transfer mode according to an embodiment of the present invention, and FIG. 4B is a perspective view of FIG. 1 according to an embodiment of the present invention. It is a perspective view showing the lateral cluster transfer performed by the illustrated ceiling transfer device in the lateral transfer mode.

Referring to FIG. 4A, the transfer mode when the collective transport object GT has a length greater than the transportable length of the transport device 200 and parallel rails are not disposed around the cluster transport object M. The setting unit 320 may perform longitudinal cluster transfer for the cluster cargoes GT. That is, the tandem unit 201, which is the transfer unit 200 constituting the cluster unit GV, operates in the longitudinal transfer mode M1 to perform the group transfer of the group transport objects GT.

In the longitudinal transfer mode (M1), a plurality of transfer devices 200 arranged in a line along a single transfer rail 100 are arranged at regular intervals, and then a single aggregated transport object GT is grasped. Accordingly, a single group transport object (GT) that does not meet the operating conditions of each conveying device 200 already installed on the conveying rail 100 is replaced by a new conveying device corresponding thereto, and the conveying device 200 It is possible to configure a grouping device (GV), which is a unit conveyance body for transporting the group cargoes (GT), by combining a plurality of them.

In the case of this embodiment, it is disclosed that the cluster device GV for transporting the cluster cargo GT is composed of two transport devices V1 and V2 arranged in a line with each other, but this is exemplary and the cluster transport object GT is configured. It is obvious that the grouping device (GV) can be configured by using more transfer devices depending on the characteristics of the GT and the transfer device 200 .

Referring to FIG. 4B , the cluster transport objects GT have a width greater than the transportable width of the transport device 200, and the cluster transport objects M are spread over a plurality of transport rails 100 that are parallel to each other. When arranged, the transfer mode setting unit 320 may perform lateral cluster transfer for the cluster transport objects GT. That is, the row unit 202, which is the transfer unit 200 constituting the cluster unit GV, operates in the transverse transfer mode M2 to perform the group transfer of the group transport objects GT.

Therefore, the grouping device GV for performing the transverse conveying mode M2 is a transverse device 202, which is a conveying device that runs along the different conveying rails 101 and 102 that are adjacent to each other and extend in parallel. It is composed of and simultaneously moves along a plurality of transfer rails 101 and 102 and transports the group cargo M1.

In the transverse conveying mode (M2), a plurality of conveying devices 200 are arranged on a plurality of conveying rails 101 and 102, respectively, and a plurality of conveying devices 200 are aligned along a direction perpendicular to the conveying rails 100, and then a single group transported object (GT). Accordingly, instead of manufacturing a new transport device corresponding to the single group transport object GT, a group device GV, which is a unit transport chain, is formed by combining a plurality of transport devices 200 to transport the group transport object GT. can do.

In the case of this embodiment, it is disclosed that the grouping device GV for transporting the group cargoes GT is composed of two transporting devices V1 and V2 positioned in parallel with each other, but this is exemplary and the grouping device GV is illustrative. It is obvious that the grouping device (GV) can be configured by using more transfer devices depending on the characteristics of the GT and the transfer device 200 .

Accordingly, the transport mode setting unit 320 may set the most appropriate cluster transport mode at the place where the cluster transport objects GT is located by combining the characteristics of the cluster transport objects GT with the rail information.

Although not shown, it is obvious that flat-shaped clustered cargoes (GT), which are difficult to transport with a single transport device 200, can be transported by combining the longitudinal transport mode (M1) and the transverse transport mode (M2). . That is, the longitudinal conveying mode M1 and the transverse conveying mode M2 may be performed simultaneously to operate in a complex conveying mode having a constant area.

The cluster transfer operation unit 330 controls the operation of the cluster device GV to transfer the cluster transport objects GT according to the set cluster transport mode. The cluster transfer operation unit 330 includes a longitudinal actuator 331 operating the cluster device GV in the longitudinal transfer mode M1, and a vertical actuator 331 operating the cluster device GV in the lateral transfer mode M2. A transverse actuator 332 for operating and a combined actuator 333 for simultaneously performing the longitudinal transfer mode M1 and the transverse transfer mode M2 may be provided.

For example, the longitudinal actuator 331 may include a tandem device setting unit 331a, a tandem driving frequency setting unit 331b, an interval setting unit 331c, and a longitudinal driving unit 331d.

The tandem device setting unit 331a determines the number and spacing of the tandem devices 201 by detecting the load distribution and shape of the group transport objects GT. The cluster cargo GT transported by the cluster device GV operating in the longitudinal transport mode M1 has the shape of an elongated member extending along the transport rail 100, so the load is the same as that of the transport rail 100. A wide range of changes is formed along the direction.

Accordingly, it is possible to obtain a load distribution along the longitudinal direction of the group transported objects GT and arrange the tandem devices 201 at a location where a concentrated load acts according to the load distribution. By arranging the alignment device 201 for each load point at which the concentrated load acts, the alignment device 201 is arranged at each interval of the concentrated load. Therefore, it is possible to detect the installation interval of the tandem devices 201 according to the load distribution for the group transported objects GT.

Accordingly, the grouping device GV can stably transport the grouped goods GT by fixing the load point.

The serial driving frequency setting unit 331b sets a unique operating frequency to operate the serial device 201 with a single operating signal. The tandem device 201 should function as a single transfer unit with respect to other transfer devices that do not constitute the cluster device (GV). Accordingly, a driving means that can be applied only to the grouping device GV is disposed so as to simultaneously drive the entire arraying device 201 .

For example, by setting a unique operating frequency applied only to the sorting devices 201, when driving power having the operating frequency is applied, all of the sorting devices 201 are simultaneously driven to form the grouping device GV into a single unit. It can operate like a transport device. Accordingly, the serial devices 201 are simultaneously operated by the set operating frequency.

The spacing setting unit 331c drives the tandem devices 201 individually at the tandem driving frequency to set the spacing between the load points detected by the load distribution analysis to have the tandem device 201 rating.

For example, a reference device serving as a standard is selected from among a plurality of tandem devices 201 and set as a reference position. At this time, the rest of the array devices 201, except for the reference device, are turned off and maintained in a stopped state. Next, with the power of only the serial device to be set on the basis of the reference device and the power of the other serial devices being turned off, the serial device to be set is moved to have a set distance from the reference device.

Therefore, the installation interval can be set by individually setting the interval with the preceding device for each transfer device 200 constituting the tandem device 201. At this time, the interval setting unit 331c sets the distance between the front and rear vertical alignment devices 201 to the detection interval by using a distance sensor provided in the transport vehicle 250 .

The forward drive unit 331d drives the cluster device GV to which the cluster transport objects GT is fixed at the tandem driving frequency. When all of the array devices 201 are set at detection intervals, driving power is applied to transport the group devices GV. From the tandem device 201, the lifting part 253 simultaneously descends to the group transported objects GT and holds the clustered transported objects GT in multiple positions. Subsequently, the group cargo GT is simultaneously raised from multiple positions and transferred to the target port TP along the transfer rail 100 .

At this time, by applying driving power at a tandem driving frequency that only the grouping device GV can recognize, the grouping device GV can be driven as a single transfer unit by simultaneously driving the columnar devices 201 at the time.

For example, the horizontal actuator 332 may include a rowing device setting unit 332a, a rowing driving frequency setting unit 332b, a device alignment unit 332c, and a horizontal driving unit 331d.

The rowing device setting unit 332a determines the number of the rowing devices 202 by detecting the load distribution and shape of the group transported objects GT. The cluster conveyed goods (GT) transported by the cluster device (GV) operating in the transverse transport mode (M2) extend along the direction perpendicular to the transport rail 100 and are arranged so as to span multiple transport rails 100 adjacent to each other. do.

Accordingly, the rowing devices 202 disposed adjacent to the different transfer rails 100 are adjusted to align along the center line of the group transported objects GT. That is, the rowing device setting unit 332a sets individual rowing devices (to align the plurality of transporting devices 200 located on different transporting rails along the cluster transported object GT along the center line of the clustered transported object GT). 202) to control.

The row driving frequency setting unit 332b sets a unique operating frequency to operate the row row device 202 with a single operating signal. The rowing device 202 should function as a single conveying unit with respect to other conveying devices that do not constitute the cluster device GV. Accordingly, a driving means applicable only to the grouping device GV is disposed so as to drive the entire rowing device 201 at the same time.

For example, by setting a unique operating frequency applied only to the rowing devices 202, when driving power having the operating frequency is applied, all of the rowing devices 202 are simultaneously driven to form the grouping device GV into a single unit. It can operate like a transport device. Accordingly, the rowing devices 202 are simultaneously operated according to the set operating frequency.

The device arranging unit 332c drives the row devices 202 individually at the row driving frequency to align them along the center line of the group transport objects GT.

For example, among a plurality of rowing devices 202, a reference device serving as a standard is selected and driven to align with the center line of the group transport object GT. At this time, the rest of the rowing devices 202 except for the reference device may be turned off and set to maintain a stopped state. Next, the array devices to be set are sequentially aligned based on the reference device. At this time, the power of only the rowing device to be set is turned on and the power of the other rowing devices is turned off, and the rowing device to be set is moved to align with the reference device. Similar to the tandem device 201, the device aligning unit 332c may align the left and right tandem device 202 based on the position detected using the distance sensor provided in the transport vehicle 250.

The transverse driver 332d drives the cluster device GV at the transverse drive frequency. When all of the rowing devices 202 are aligned on the center line of the cluster transport object GT, driving power is applied to drive the cluster device GV. From the rowing device 202, the elevating parts 253 simultaneously descend to the group transported objects GT and hold the clustered transported objects GT in multiple positions. Subsequently, the group transported goods (GT) are simultaneously elevated in multiple locations and transported to the target port (TP) along the multiple transfer rails (101, 102).

At this time, the grouping device GV can be driven as a single transfer unit by simultaneously driving the rowing device 202 by applying driving power at a row driving frequency that only the grouping device GV can recognize.

In particular, the transverse actuator 332 moves the position of the lifting part 253 provided in the transfer device 200 to lower the gripping part 254 toward the group transport object GT. A rotation control unit 332e for controlling the rotation driving unit 253a that rotates to coincide with the alignment direction of the rotation control unit 332e may be further provided.

Since the conveying device 200 generally transports the conveyed object T while moving along the conveying rail 100, the gripping parts 254 are disposed on both sides of the conveying rail 100 to carry the conveyed object T. to grip However, in the transverse transport mode (M2), since the cluster transport objects GT are aligned in a direction perpendicular to the transport rail 100, the gripping unit 254 is required to hold the transport rail 100 in order to grip the cluster transport objects GT. ) should be rotated in the longitudinal direction.

The rotation controller 332e transmits the intersection angle between the group transport object GT and the transfer rail based on the property information of the group transport object GT and the transport rail information to the rotation controller 332e, and the gripping unit 254 ) rotates the fixed elevation part 253.

The rotation drive unit 253a is driven according to a signal from the rotation control unit 332e, so that the lift unit 253 rotates to hold the group transported objects GT.

The cluster transfer operation unit 330 operates the longitudinal actuator 310 and the transverse actuator 320 with a single motion signal to generate the longitudinal transfer mode (M1) and the transverse transfer mode (M2). ) may be further provided.

For example, the compound actuator 333 may include a compound drive frequency setter capable of setting a compound drive frequency and a compound drive unit. Accordingly, in the grouping device GV, a plurality of vertical devices 201 and a plurality of rowing devices 202 are driven simultaneously to transport clustered cargoes having a certain area.

According to the ceiling conveying device according to an embodiment of the present invention, conveyed objects that do not meet the operating conditions of the conveying device can be transported by a cluster device in which a plurality of conveying devices are combined. Select the optimal transport mode from the vertical transport mode and the lateral transport mode based on the characteristic information of the conveyed object and the rail information, and multiple transports along the longitudinal direction along the transport rail or in the transverse direction perpendicular to the transport rail to suit the transport mode Arrange devices to form cluster devices. By arranging the driving means to drive the grouping devices as a single transporting unit, it is possible to transport the cluster transported objects by combining conventional transporting devices without having to provide a separate transporting device. Accordingly, the correlation between the conveying vehicle constituting the ceiling conveying device and the conveyed object can be alleviated and conveyed articles of various sizes and weights can be transferred using the conventional conveying device.

Although the above has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention described in the claims below. You will understand that you can.

100: transfer rail 200: transfer device 210: travel machine
220: transport vehicle 300: cluster controller 310: transport signal detection unit
320: transfer mode setting unit 330: cluster transfer operation unit 500: ceiling transfer device

Claims (10)

at least one transfer rail installed on a floor where a plurality of processing facilities for handling conveyed goods are disposed and on a ceiling facing the floor and extending in a line shape;
at least one conveying device moving between the processing facilities along the conveying rail and conveying the conveyed product; and
A ceiling transport device including a cluster controller configured to configure the transport devices adjacent to each other as a single cluster device and perform cluster transport to transport the transported objects. The method of claim 1, wherein the cluster controller,
a transfer signal detecting unit for detecting a transfer signal for the cluster transported items, which are the transported items requiring cluster transfer;
a transport mode setting unit that sets a transport mode for the cluster transport objects by combining characteristic information of the cluster transport objects with rail information of the transport rails distributed around the cluster transport objects;
A ceiling transfer device including a cluster transfer operation unit controlling an operation of the clustering device to transfer the cluster transport objects according to the set transfer mode. The ceiling transport device according to claim 2, wherein the characteristic information about the group transport objects includes the size, weight, and shape of the cluster transport objects. The method of claim 2, wherein the transfer mode,
a longitudinal transfer mode in which the grouping device is constituted by a tandem device, which is the transfer device that runs along the same transfer rail, and performed along the single transfer rail; and
A ceiling transfer device comprising a transverse transfer mode in which the grouping device is constituted by a row unit, which is the transfer unit that runs along the different transfer rails extending in parallel and adjacent to each other, and performed along a plurality of transfer rails at the same time. 5. The ceiling transport device according to claim 4, wherein the cluster transfer operation unit includes a longitudinal actuator and a transverse actuator that control the cluster devices to operate in the longitudinal transfer mode and the transverse transfer mode, respectively. The method of claim 5, wherein the longitudinal actuator,
a tandem device setting unit that determines the number and spacing of the tandem devices by detecting the load distribution and shape of the transported objects in the cluster;
a serial drive frequency setting unit for setting a unique operating frequency to operate the serial device with a single operating signal;
an interval setting unit configured to individually drive the array devices at the column drive frequency to have the detected interval; and
and a vertical driving unit for driving the grouping device to which the grouped transport objects are fixed at the vertical driving frequency. [Claim 7] The method of claim 6, wherein the conveying rail is provided with a distance sensor capable of detecting a separation distance between adjacent conveying rails, and the distance setting unit obtains the distance detected through the distance sensor to set target conveying device for the reference conveying device. Ceiling transport device for adjusting the position so that the distance of corresponds to the detection interval. The method of claim 5, wherein the transverse actuator,
a rowing device setting unit configured to determine the number of the rowing devices by detecting the load distribution and shape of the transported objects in the cluster;
a row drive frequency setting unit for setting a unique operating frequency to operate the row device with a single operating signal;
a device aligning unit that individually drives the row-by-row devices at the row-by-row drive frequency and aligns them along the center line of the group transported objects; and
and a transverse driving unit for driving the clustering device, to which the clustered transport objects are fixed, at the transverse driving frequency. [Claim 9] The method of claim 8, wherein the transverse actuator further comprises a rotation control unit provided in the conveying device and controlling a rotation driving unit that rotates a position of an elevation unit that lowers the gripping unit toward the conveyed object to coincide with an alignment direction of the group conveyed object. ceiling transfer device. 6. The method of claim 5 , wherein the cluster transfer operation unit further comprises a multi-actor operating the longitudinal actuator and the transverse actuator with a single motion signal to simultaneously perform the longitudinal transfer mode and the transverse transfer mode. A ceiling conveying device that operates the grouping device in a multi-transport mode.

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