KR20230100601A - Magnetic particle and magentic component - Google Patents

Abstract

An embodiment of the present invention includes a metal magnetic particle having a plurality of phases, the plurality of phases include a Fe-based phase and a Fe ₃ O ₄ phase, the content ratio of the Fe ₃ O ₄ phase among the plurality of phases provides magnetic particles that are less than 50% silver.

Description

Magnetic Particles and Magnetic Components {MAGNETIC PARTICLE AND MAGENTIC COMPONENT}

The present invention relates to magnetic particles and magnetic components.

In the case of magnetic parts such as inductors, common mode filters, LC filters, baluns, and magnetic recording media, magnetic particles are generally included in the body to implement intended magnetic characteristics. Here, the magnetic particles may be formed of a ferrite-based or metal-based magnetic material.

In magnetic components, in order to realize low resistance, high DC bias characteristics, high efficiency characteristics, etc., it is necessary to refine magnetic particles and increase packing density while reducing loss. However, the size of the body is also miniaturized in the trend of miniaturization of magnetic parts, and accordingly, there is a limit to increasing the amount of magnetic particles that can be included in the body. In addition, when the body is molded with high pressure to increase the filling rate of the magnetic particles, there may be problems such as deformation of the magnetic part. Accordingly, a method for minimizing loss of magnetic parts by improving the characteristics of magnetic particles is required.

One of the objects of the present invention is to implement magnetic particles capable of improving loss characteristics of magnetic parts.

As a method for solving the above problems, the present invention intends to propose a novel magnetic particle through an example, and specifically, includes a metal magnetic particle having a plurality of phases, wherein the plurality of phases is an Fe-based phase (Fe -based phase) and Fe ₃ O ₄ phase, and the content ratio of the Fe ₃ O ₄ phase among the plurality of phases is less than 50%.

Another aspect of the present invention is

A metal magnetic particle having a plurality of phases, wherein the plurality of phases include a Fe-based phase and a Fe ₃ O ₄ phase, and a ratio of the Fe ₃ O ₄ phase present on the surface of the metal magnetic particle is less than 70%. provide particles.

Another aspect of the present invention is

It includes metal magnetic particles having a plurality of phases, and the plurality of phases provides magnetic particles including an amorphous phase and an Fe ₃ O ₄ phase.

Another aspect of the present invention is

A magnetic component including a body including a plurality of magnetic particles, wherein at least one of the plurality of magnetic particles includes a metal magnetic particle having a plurality of phases, and the plurality of phases include a Fe-based phase and an Fe ₃ O ₄ phase. and, among the plurality of phases, the Fe ₃ O ₄ phase occupies a content ratio of less than 50%.

Another aspect of the present invention is

A magnetic component comprising a body including a plurality of magnetic particles, wherein the plurality of magnetic particles each include first to third magnetic particles including first to third magnetic metal particles, the first magnetic particles has a diameter in a first diameter range, the second magnetic particles have a diameter in a second diameter range smaller than the first diameter range, and the third magnetic particles have a diameter in a third diameter range smaller than the second diameter range has a diameter, and the third magnetic metal particle provides a magnetic component including an Fe-based phase and an Fe ₃ O ₄ phase.

In the case of magnetic particles according to an example of the present invention, the coercive force can be effectively reduced, and thus the efficiency can be increased by reducing the loss of magnetic parts employing the same.

1 shows a magnetic particle according to an embodiment of the present invention, and FIG. 1 (a) and FIG. 1 (b) correspond to a perspective view and a cross-sectional view, respectively.
2 to 5 show magnetic particles according to modified embodiments.
6 is a schematic perspective view showing a magnetic component according to an embodiment of the present invention.
FIG. 7 is a schematic cross-sectional view taken along line II′ of the magnetic component of FIG. 6 .
8 and 9 are enlarged views of one region of the body of the magnetic component of FIG. 6 .
FIG. 10 shows the magnetic particles of FIG. 9 .
11 to 15 show a magnetic component having a wound coil structure.

Hereinafter, embodiments of the present invention will be described with reference to specific embodiments and accompanying drawings. However, the embodiments of the present invention can be modified in many different forms, and the scope of the present invention is not limited to the embodiments described below. In addition, the embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art. Therefore, the shape and size of elements in the drawings may be exaggerated for clearer explanation, and elements indicated by the same reference numerals in the drawings are the same elements.

1 shows a magnetic particle according to an embodiment of the present invention, and FIG. 1 (a) and FIG. 1 (b) correspond to a perspective view and a cross-sectional view, respectively. 2 to 4 show cross-sectional views of magnetic particles according to modified examples.

Referring to FIG. 1 , in the present embodiment, the magnetic particle 100 includes a metal magnetic particle 101 having a plurality of phases 121-125. Also, the magnetic particle 100 may include an oxide film 110 formed on the surface of the magnetic metal particle 101 . The plurality of phases 121-125 included in the magnetic metal particle 101 include a Fe-based phase 122 and Fe ₃ O ₄ phases 123-125, in this case, a plurality of phases 121-125 Among them, the Fe ₃ O ₄ phase (123-125) accounts for less than 50%. That is, the Fe ₃ O ₄ phase (123-125) is less than the sum of the contents of the other phases (121, 122). In the metal magnetic particle 101 constituting the magnetic particle 100, both the Fe-based phase 122 and the Fe ₃ O ₄ phase 123-125 are included, while their relative contents are adjusted as in the following embodiments. By doing so, the coercive force of the magnetic particles 100 can be effectively lowered, and when the magnetic particles 100 having such a low coercive force are used in magnetic parts, efficiency characteristics can be improved by reducing loss. In addition, the plurality of phases 121 to 125 may include an amorphous phase 121 as a partial phase. Hereinafter, the main components of the magnetic particle 100 will be described in detail.

The Fe-based phase 122 of the magnetic metal particle 101 is a material for securing magnetic properties, for example, iron (Fe), silicon (Si), chromium (Cr), cobalt (Co), molybdenum (Mo), It may include at least one selected from the group consisting of aluminum (Al), niobium (Nb), copper (Cu), and nickel (Ni). Specifically, the Fe-based phase 122 includes Fe, Si, and Cr. may contain metals. As a more specific example, the Fe-based phase 122 is pure iron, Fe-Si-based alloy, Fe-Si-Al-based alloy, Fe-Ni-based alloy, Fe-Ni-Mo-based alloy, Fe-Ni-Mo-Cu-based alloy, Fe-Co alloy, Fe-Ni-Co alloy, Fe-Cr alloy, Fe-Cr-Si alloy, Fe-Si-Cu-Nb alloy, Fe-Ni-Cr alloy, Fe- It may include at least one of Cr-Al-based alloys. For example, when the Fe-based phase 122 includes an Fe-Cr-Sr-based alloy, the wt% of Si and Cr may be 15% or less, and as a more specific example, 0.80 wt% < Si < 12.5 wt%, 2.5 wt% % < Cr < 14.2% by weight.

The Fe-based phase 122 shows a single crystal region, and FIG. 1 shows a case of having one single crystal region 122 . And, as in the modified example of FIG. 2, the Fe-based phase 122 may include two or more single crystal regions 122a and 122b, and in this way, the Fe-based phase 122 includes a plurality of single crystal regions 122a and 122b. In this case, the single crystal regions 122a and 122b do not need to be adjacent to each other and may exist spaced apart from each other within the magnetic metal particle 101.

Referring to FIG. 1 , the plurality of phases 121 to 125 may include an amorphous phase 121, and FIGS. 1 and 2 show an example in which the amorphous phase 121 is one. However, the number of amorphous phases 121 may be two or more. In addition, in this embodiment, the metal magnetic particle 101 includes both the amorphous phase 121 and the single crystal region 122, but only one of them may exist. Specifically, as in the modified example of FIG. 3 , the magnetic metal particle 101 may include Fe-based single crystal regions 122a, 122b, and 122c and may not include an amorphous phase. Conversely, as in the modified example of FIG. 4 , the magnetic metal particle 101 may include amorphous phases 121a, 121b, and 121c and may not include a single crystal region.

Referring to FIG. 1, the single crystal region 122 is a group composed of Fe(001) phase, Fe(011) phase, Fe(002) phase, Fe(101) phase, Fe(111) phase, and Fe(224) phase. may include at least one of them. The single crystal region 122 may be defined as a region in which crystals present therein have a certain orientation. As in the modified examples of FIGS. 2 and 3 , when a plurality of single crystal regions 122a, 122b, and 122c exist, they may have different orientations. In addition, the amorphous phase 121 may include at least one of an Fe-based metal and an Fe-based metal oxide, wherein the Fe-based metal includes iron (Fe), silicon (Si), chromium (Cr), cobalt (Co), It may include at least one selected from the group consisting of molybdenum (Mo), aluminum (Al), niobium (Nb), copper (Cu), and nickel (Ni). Specifically, the Fe-based metal is a Fe-Si-based alloy, Fe-Si-Al-based alloy, Fe-Ni-based alloy, Fe-Ni-Mo-based alloy, Fe-Ni-Mo-Cu-based alloy, Fe-Co-based alloy Alloy, Fe-Ni-Co alloy, Fe-Cr alloy, Fe-Cr-Si alloy, Fe-Si-Cu-Nb alloy, Fe-Ni-Cr alloy, Fe-Cr-Al alloy may contain at least one. For example, when the Fe-based alloy includes a Fe-Cr-Sr-based alloy, the wt% of Si and Cr may be 15% or less, and as a more specific example, 0.80 wt% < Si < 12.5 wt%, 2.5 wt% < Cr < 14.2% by weight. In this case, the Fe-based metal oxide may be an oxide of the above-described Fe-based metal.

As described above, the magnetic metal particle 101 includes Fe ₃ O ₄ phases 123-125, and FIGS. 1 and 2 show examples in which three Fe ₃ O ₄ phases 123-125 exist. However, as shown in FIGS. 3 and 4 , the number of Fe ₃ O ₄ phases 123 to 124 may be two, or may be less than one or four or more. The Fe ₃ O ₄ phases 123 to 125 may include single crystal regions, and FIG. 1 shows an example in which three single crystal regions 123 to 125 exist. In this case, the single crystal regions 123-125 are selected from the group consisting of Fe ₃ O ₄ (022) phase, Fe ₃ O ₄ (113) phase, Fe ₃ O ₄ (311) phase, and Fe ₃ O ₄ (111) phase. may contain at least one. As in the present embodiment, when a plurality of Fe ₃ O ₄ phase single crystal regions 123 to 125 exist, they may have different orientations.

The plurality of phases 121-125 present in the metallic magnetic particle 101 can be determined through cross-section analysis (eg, HR-TEM analysis), XRD analysis, chemical analysis, etc. of the metallic magnetic particle 101 to determine their existence or content ratio. You can check. As an example, the plurality of phases 121 to 125 may be identified through HR-TEM (eg, JEOL's 2100F) crystal pattern analysis, and an area ratio may also be obtained therefrom. The content ratio of each of the plurality of phases 121 to 125 can be obtained through the area ratio obtained in this way. area occupied. In the case of a material forming a plurality of phases 121-125, it can be known through STEM-EDS analysis. The presence or absence of Fe and Fe ₃ O ₄ can also be known through XRD analysis, and the crystallinity and type of oxide can be confirmed in each region by XRD analysis. Specifically, when the Fe ₃ O ₄ phase (123-125) is included, a single Fe peak as well as a magnetite Fe ₃ O ₄ peak may be detected. In addition, the crystal structure of the Fe ₃ O ₄ phase (123-125) can be known through HR-TEM analysis, and the crystal structure of Fe ₃ O ₄ in the magnetic particles 100 obtained as a result of TEM image simulation performed by the present inventors is On the other hand, it was confirmed that there was no matching result with γ-Fe ₂ O ₃ .

In the case of the present embodiment, multiple phases 121-125 exist inside the magnetic metal particle 101, and in particular, the amorphous phase 121, the Fe-based phase 122, and the Fe ₃ O ₄ phase 123-125. can include In the case of the magnetic particle 100 including the metal magnetic particle 101, it is preferable to have high amorphousness, that is, a high content of the amorphous phase 121 in order to lower the coercive force, but in the manufacturing process of the magnetic particle 100 There is a limit to increasing amorphousness. And as the size of the magnetic particles 100 decreases, it is more difficult to secure amorphousness. When the size of the magnetic particles 100 is reduced, the specific surface area is increased and natural oxidation is likely to occur. In this case, magnetic properties of the magnetic particles 100 may be deteriorated due to the generation of non-magnetic Fe ₂ O ₃ phase. However, as described above, the Fe-based phase 122 of the magnetic metal particle 101 does not necessarily have to include a single crystal region, and as amorphousness is very high, the Fe-based phase 122 substantially has a single crystal or polycrystalline structure. may or may not be included. In this way, when the metal magnetic particle 101 does not substantially include a single crystal region other than the amorphous phase 121 and the Fe ₃ O ₄ phase (123-125), the content of the amorphous phase 121 is the Fe ₃ O ₄ phase. It is not necessarily more than the content of (123-125), and their content can be adjusted if necessary.

On the other hand, in the present embodiment, the metal magnetic particle 101 includes the amorphous phase 121 and the Fe-based phase 122 as well as the Fe ₃ O ₄ phase 123-125, which is a magnetic oxide, so that the characteristics of the magnetic particle 100 are deteriorated. was minimized. In addition, the coercive force of the magnetic particles 100 may be effectively controlled by optimizing the relative contents of the amorphous phase 121, the Fe-based phase 122, and the Fe ₃ O ₄ phases 123-125. Specifically, the content ratio occupied by the Fe ₃ O ₄ phase (123-125) in the magnetic metal particle 101 is less than 50%, which is because the content of the Fe ₃ O ₄ phase (123-125) is too large, so that the other phases This is a condition considering that the Ms characteristics of the magnetic particle 100 may deteriorate when the content is equal to or greater than the content of (121, 122). As a specific condition, in the case of the relative content of the amorphous phase 121, the Fe-based phase 122 and the Fe ₃ O ₄ phase (123-125), the Fe ₃ O ₄ phase (123-124) in the metal magnetic particle 101 The area ratio may be 15% or more and less than 50%, more specifically 19% or more and 42.3% or less. Here, the relative content of the amorphous phase 121, the Fe-based phase 122, and the Fe ₃ O ₄ phase 123-125 can be obtained through the area ratio of the cross section of the magnetic metal particle 101. When the content ratio of the Fe ₃ O ₄ phase (123-124) is as low as 19% or 15% or less, the metal magnetic particle 101 has a structure in which an amorphous phase 121 and an Fe-based phase 122 are mixed. In this case, there may be a limit in securing sufficient magnetic permeability, and there may be a limit in increasing the filling rate in the magnetic part in terms of shape. The following is the result of analyzing the magnetic properties and filling factor according to the content of the Fe ₃ O ₄ phase (123-124). According to this, the content ratio of the Fe ₃ O ₄ phase (123-124) in the magnetic metal particle 101 is It was possible to secure sufficient characteristics at a level of less than 50%. In addition, it was confirmed that when the content ratio of the Fe ₃ O ₄ phase (123-124) in the magnetic metal particle 101 is 19% or more and 42.3% or less, it is more preferable in terms of magnetic permeability and filling rate.

Fe ₃ O ₄ phase ratio (%) Ms.
(emu/g) Hc
(Oe) magnetic permeability Q Rs
(mΩ) Filling rate
(%) 81 96.798 143.81 35.8 42 562.58 83.47 51 158.62 71.484 37.8 45.7 541.76 83.99 42.3 170 136 39.8 46.1 578.22 84.88 35 178.49 112.27 41.1 41.9 633.68 85.19 34 177.25 80.502 40 47.7 557.22 85.46 19.6 180.37 99.215 42.3 41 661.41 85.79 15.1 164.73 87.89 36.3 45.9 545.48 82.21

The location of the Fe ₃ O ₄ phases 123 to 125 in the magnetic particle 100 may also affect the characteristics of the magnetic particle 100 . Unlike the present embodiment, when the Fe ₃ O ₄ phase (123-125) is mainly present on the surface of the magnetic metal particle 100 and has a form similar to that of coating the magnetic metal particle 100, the Fe ₃ O ₄ phase (123 -125) may have similar limitations to the case where the content is low. Therefore, it may be preferable that the ratio of the Fe ₃ O ₄ phases 123-125 present on the surface of the magnetic metal particle 101 be less than 70%. Here, the ratio of the Fe ₃ O ₄ phases 123 to 125 can be measured, for example, in the ZY cross section passing through the center of the metal magnetic particle 101, and specifically, the outer line of the metal magnetic particle 101 in the ZY cross section. After extracting, it can be obtained by calculating the ratio of the lines corresponding to the Fe ₃ O ₄ phase (123-125). In the case of this less than 70% condition, it is not necessarily applied together with the above-mentioned content condition, that is, the content ratio of the Fe ₃ O ₄ phase (123-125) is less than 50%, and the magnetic particles 100 are less than 70% Only conditions may be met. In addition, as shown in FIG. 4 , at least a portion of the Fe ₃ O ₄ phases 123 to 125 may be present in a cross section passing through the center of the magnetic metal particle 101 , for example, in the center of the ZY cross section.

The oxide film 110 is formed on the surface of the metal magnetic particle 101 to protect the metal magnetic particle 101 and to make the magnetic particle 101 electrically insulated from the outside. Eddy current loss of the magnetic particles 100 may be reduced by the oxide film 110 . The oxide film 110 may include a crystalline region, and since the crystalline region includes an Fe ₃ O ₄ component, deterioration of the characteristics of the magnetic particle 100 may be minimized. In this case, the Fe ₃ O ₄ component of the crystal region may have an orientation structure different from that of the Fe ₃ O ₄ phases 123 - 125 of the magnetic metal particle 101 . A thickness T of the oxide layer 110 may be 5-20 nm.

The size of the magnetic particle 100 may correspond to an ultra-differential diameter (D) in the range of 10-900 nm. The diameter (D) of the magnetic particle 100 may be measured in the cross-section of the central portion. For example, an image is obtained by photographing a Z-Y cross section passing through the center of the magnetic particle 100 with a scanning electron microscope (SEM). In this case, the image pixel size in the SEM image is 10 nm and the working distance can be fixed at 8 mm. And the mode can use back scattered mode. Then, the diameter (D) can be calculated using an image analysis program (eg, ORS Deep Learning tool). The magnetic particle 100 may have a spherical or substantially spherical shape, but is not limited thereto. That is, as in the modified example of FIG. 5 , the magnetic particle 100 may have an aspherical shape. Such a shape can be obtained as the sphericity of the metal magnetic particle 101 is lowered during the oxidation process. If the magnetic particle 100 has an arbitrary shape that does not maintain a spherical shape, the above-mentioned diameter can be interpreted by replacing it with the Feret Diameter, and the average value of the diameter can also be interpreted by replacing the average value of the Feret diameter. . A tool of image processing software can be utilized as a method of calculating the mean value of the diameter. However, this is an example of a method of individually analyzing the size of the magnetic particles 100, and as will be described later, when analyzing the size of the magnetic particles 100 included in the magnetic parts 200, 400, and 500, It can be measured through cross-sectional images of the parts 200, 400, and 500.

In one example of a manufacturing method for the metal magnetic particle 101 to include the above-described composite structure, that is, the amorphous phase 121, the Fe-based phase 122, and the Fe ₃ O ₄ phase 123-125, RF plasma After evaporating the raw material using a method, it is possible to form a fine powder by cooling using an inert gas. In this process, a polycrystal or polycrystal structure is obtained depending on the oxidizing atmosphere and gas, and the composition of the metal magnetic particle 101. By adjusting these process variables, the magnetic particle 100 having the above-described structure can be obtained. In this case, a process of separating large particles may be performed by moving the obtained particles through an air current.

Hereinafter, an example of a magnetic component including the above-described magnetic particles will be described. 6 to 8 , in the case of the present embodiment, a magnetic component 200 including a plurality of magnetic particles 211 corresponds to a coil component. Specifically, the magnetic component 200 includes a body 201, a support member 202, a coil pattern 203, and external electrodes 205 and 206, and the body 201 includes a plurality of magnetic particles 211. include Here, at least one of the plurality of magnetic particles 211 includes the above-described composite structure, that is, the metal magnetic particle 101 having a plurality of phases 121 to 125 . Here, it includes the Fe-based phase 122 and the Fe ₃ O ₄ phase (123-125), and in this case, the content ratio of the Fe ₃ O ₄ phase (123-125) among the plurality of phases (121-125) is less than 50% And the plurality of phases 121 to 125 may include an amorphous phase 121 .

The body 201 seals at least a portion of the support member 202 and the coil 203 to form the appearance of the magnetic component 200 . Also, the body 201 may be formed such that a partial region of the drawing pattern L is exposed to the outside. As shown in FIG. 8 , the body 201 includes a plurality of magnetic particles 211 , and these magnetic particles 211 may be dispersed inside the insulating material 210 . The insulating material 210 may include a polymer component such as epoxy resin or polyimide. The body 201 includes a plurality of magnetic particles 211, and at least one of them may have a composite structure described in FIGS. 1 to 5. As described above, the coercive force of the magnetic particles 211 can be reduced by having the metal magnetic particles 101 of the composite structure, and the Q characteristics and loss characteristics of the magnetic part 200 using the magnetic particles 211 can be improved. Of the magnetic particles 211, those having the above-described metal magnetic particles 101, that is, the metal magnetic particles 101 including the Fe-based phase 122 and Fe ₃ O ₄ phases 123-125 are magnetic particles 211 When ) is referred to as the composite particle 211, a plurality of composite particles 211 are included in the body 201, and the plurality of composite particles 211 may have a diameter of D50 of 100-300 nm. In this case, D50 means a value located at the center when arranged in order of diameter size.

Meanwhile, the diameter of the magnetic particle 211 present in the body 201 may be measured from a cross section of the body 201 . Specifically, with respect to the cross section in the X-Z direction passing through the center of the body 201, a plurality of areas (eg, 5 or 10 areas) at equal intervals in the Y direction are photographed with a scanning electron microscope, and then an image analysis program is used. Thus, the diameter of the magnetic particle 211 can be obtained. In this case, since the magnetic particle 211 may be deformed or the oxide film 110 may be destroyed by a compression process or the like in the outer region of the body 201, the diameter of the magnetic particle 211 may be measured except for this area. For example, a region corresponding to a length within 5% or 10% of the surface of the body 201 may be excluded.

Meanwhile, in relation to an example of the manufacturing method, the body 201 may be formed by a lamination method. Specifically, after forming the coil 203 on the support member 202 using a method such as plating, a plurality of unit laminates for manufacturing the body 201 are prepared and stacked. Here, in the unit laminate, a slurry is prepared by mixing magnetic particles 211 such as metal and organic substances such as a thermosetting resin, a binder, and a solvent, and the slurry is coated on a carrier film by a doctor blade method for several tens of μm. After coating to a thickness of, it can be dried to manufacture a sheet (sheet) type. Accordingly, the unit laminate may be manufactured in a form in which magnetic particles are dispersed in a thermosetting resin such as epoxy resin or polyimide. The body 201 may be implemented by forming a plurality of unit laminates described above and press-laminating them at the upper and lower portions of the coil 203 .

The support member 202 supports the coil 203 and may be formed of a polypropylene glycol (PPG) substrate, a ferrite substrate, or a metal-based soft magnetic substrate. As shown, the central portion of the support member 202 penetrates to form a through hole, and a portion of the body 201 may fill the through hole to form the magnetic core portion C.

The coil 203 is built inside the body 201 and serves to perform various functions in the electronic device through characteristics expressed from the coil of the magnetic part 200 . For example, the magnetic component 200 may be a power inductor, and in this case, the coil 203 may store electricity in the form of a magnetic field and maintain an output voltage to stabilize power. In this case, the coil pattern constituting the coil 203 may include a first coil 203a and a second coil 203b in a stacked form on both sides of the support member 202, where the first coil ( 203a) and the second coil 203b may be electrically connected through a conductive via V penetrating the support member 202 . In this case, the coil 203 may include a pad region P. The coil 203 may be formed in a spiral shape. At the outermost part of the spiral shape, a lead portion T exposed to the outside of the body 201 for electrical connection with the external electrodes 205 and 206 is provided. ) may be included. However, unlike the illustrated form, the coil 203 may be disposed on only one surface of the support member 202 . Meanwhile, in the case of the coil pattern constituting the coil 203, it may be formed using a plating process used in the art, for example, a method such as pattern plating, anisotropic plating, isotropic plating, and the like, and a plurality of these processes are performed. It can also be formed in a multi-layered structure. However, the coil 203 may be implemented in a wound coil structure, and in this case, the support member 202 may not be included in the body 201 . The winding type coil structure will be described in detail in the following embodiments in FIG. 11 .

The external electrodes 205 and 206 may be formed outside the body 201 to be connected to the lead portion T. The external electrodes 205 and 206 may be formed using a paste containing a metal having excellent electrical conductivity, for example, nickel (Ni), copper (Cu), tin (Sn), or silver (Ag). It may be a conductive paste containing alone or an alloy thereof. In addition, a plating layer may be further formed on the external electrodes 205 and 206 . In this case, the plating layer may include at least one selected from the group consisting of nickel (Ni), copper (Cu), and tin (Sn). For example, a nickel (Ni) layer and a tin (Sn) layer may be can be formed sequentially.

A magnetic component according to another embodiment will be described with reference to FIGS. 9 and 10 . The embodiments of FIGS. 9 and 10 are different from the embodiments of FIGS. 6 to 8 in terms of magnetic particles existing inside the body, and other components may be identically employed, so duplicate descriptions are omitted. In the case of the present embodiment, the body 201 includes a plurality of magnetic particles 321, 322, and 323, and the plurality of magnetic particles 321, 322, and 323 each include first to third metal magnetic particles 301, 302 and 303), and the first to third magnetic particles 321, 322, and 323 are included. Here, the plurality of magnetic particles 321, 322, and 323 have different diameter sizes. Specifically, the first magnetic particle 321 has a diameter D1 in a first diameter range, and the second magnetic particle 322 has a diameter D2 in a second diameter range smaller than the first diameter range, The third magnetic particle 323 has a diameter D3 of the third diameter range smaller than the second diameter range. As a specific example, the first diameter range may be 5-61 μm, and the second diameter range may be 0.6-4.5 μm. In addition, the third diameter range may be 10-900 nm. The diameters of the first to third magnetic particles 321 , 322 , and 323 may be diameters measured from a cross section of the body 201 . In this embodiment, the third magnetic particle 323 having the smallest size has the above-described composite particle structure such that the coercive force is reduced, and thus the Q characteristics and loss characteristics can be improved. Meanwhile, the diameter ranges of the second magnetic particles 322 and the third magnetic particles 323 may partially overlap. In this case, the second and third magnetic metal particles 302 and 303 may include different materials. there is. Accordingly, the second magnetic particles 322 and the third magnetic particles 323 may be distinguished using methods such as SEM-EDS and XRF. In addition, the first to third diameter ranges may not overlap with each other so that the first and third magnetic particles 321, 322, and 323 can be more clearly distinguished. 61 μm, the second diameter range may be 0.9-4.5 μm, and the third diameter range may be 10-800 nm.

As in the present embodiment, by using a plurality of types of magnetic particles 321, 322, and 323 having different sizes, the filling rate of the magnetic particles 321, 322, and 323 in the body 201 can be improved, and thus the magnetic part. The magnetic properties of (200) can be improved. In addition, in the case of ultrafine powder having a relatively small size, it is difficult to form an amorphous form and thus it may be difficult to sufficiently lower the coercive force. can be significantly reduced.

The first to third magnetic magnetic particles 301, 302, and 303 are pure iron, Fe-Si-based alloy, Fe-Si-Al-based alloy, Fe-Ni-based alloy, Fe-Ni-Mo-based alloy, Fe-Ni- Mo-Cu alloy, Fe-Co alloy, Fe-Ni-Co alloy, Fe-Cr alloy, Fe-Cr-Si alloy, Fe-Si-Cu-Nb alloy, Fe-Ni-Cr alloy It may include at least one of an alloy and a Fe-Cr-Al-based alloy. The first magnetic particle 321 may include a first oxide film 311 formed on the surface of the first magnetic metal particle 301 . Similarly, the second magnetic particles 322 may include a second oxide film 312 formed on the surface of the second magnetic metal particles 302, and the third magnetic particles 323 may include the third metal magnetic particles 303 It may include a third oxide film 313 formed on the surface of. The first to third oxide layers 311, 312, and 313 may include Fe oxide, such as Fe ₂ O ₃ and Fe ₃ O ₄ . In addition, the first to third oxide films 311, 312, and 313 may include phosphate or ferrite (eg, NiZnCu ferrite or NiZn ferrite), and in addition, oxides such as MgO, Al ₂ O ₃ , etc. may also include

The inventors of the present invention experimented with changes in characteristics (permeability, core loss) according to the relative content of the first to third magnetic particles 321, 322, and 323 present in the body 201, and the results are shown in Tables 2 to 4. showed As described above, the diameters of the magnetic particles 321 , 322 , and 323 present in the body 201 may be measured from a cross section of the body 201 . Specifically, with respect to the cross section in the X-Z direction passing through the center of the body 201, a plurality of areas (eg, 5 or 10 areas) at equal intervals in the Y direction are photographed with a scanning electron microscope, and then an image analysis program is used. Thus, the diameters of the magnetic particles 321, 322, and 323 can be obtained. In this case, as a specific example, the image pixel size in the SEM image may be fixed to 10 nm*10 nm and the working distance may be fixed to 8 mm. And the mode can use back scattered mode. After that, the average value of the diameter can be calculated using an image analysis program (eg, ORS Deep Learning tool). The magnetic particles 321, 322, and 323 may have a spherical or substantially spherical shape, but are not limited thereto. That is, the magnetic particles 321, 322, and 323 may have a non-spherical shape. This shape can be obtained as the sphericity of the metal magnetic particles 301, 302, and 303 is lowered in the oxidation process. When the magnetic particles 321, 322, and 323 have an arbitrary shape that does not maintain a spherical shape, the above-mentioned diameter can be interpreted by replacing it with the Feret Diameter, and the average value of the diameter is also replaced by the average value of the Feret diameter. can be interpreted As a method of calculating the mean value of the diameter, a tool of image processing software can be used, and the size distribution can be obtained through particle size analysis for each area. Meanwhile, in the outer region of the body 201, the magnetic particles 321, 322, and 323 may be deformed or the oxide film 110 may be destroyed by a compression process or the like. It may be excluded, for example, a region corresponding to a length within 5% or 10% of the surface of the body 201 may be excluded. In addition, as another example, it is possible to infer the size of the destroyed particle through the size measured at three points where the destruction did not occur. In addition, in the above description, it is said that the diameters of the magnetic particles 321, 322, and 323 are measured by taking a plurality of cross sections from the magnetic component, but when it is difficult to take a plurality of cross sections, one cross section, for example, an X-Y cross section passing through the center of the magnetic component may be measured in

Depending on the diameter measured using the above-described method or the like, when the diameter range is 5-61 μm, as the first magnetic particle, when the diameter range is 0.6-4.5 μm, as the second magnetic particle, when the diameter range is 10-900 nm case, it was classified as a third magnetic particle. In addition, the content ratio of each magnetic particle to the first to third magnetic particles for each sample was expressed in %, and magnetic permeability and core loss were measured.

First, Table 2 below shows the results of samples in which the D50 of the first magnetic particles ranges from 21 to 36 μm, and Samples 1, 2, and 9 marked with * correspond to comparative examples. In the case of magnetic permeability, the case where it increased by 5% or more compared to the reference sample was marked as "O", and the case where it was not was marked as "X". Here, in the reference sample, the content ratio of the first and second magnetic particles is 76:24, and the third magnetic particles are not included. In addition, in the case of core loss / Q, when Q decreased by 30% or more from the increased permeability compared to the reference sample, it was marked as defective (X) (eg, when permeability increased by 5, Q decreased by more than 6.5 was marked as defective). Here, the content ratio corresponds to the area ratio obtained from the cross-sectional image obtained using the above-described measurement method.

Sample Area percentage (%) magnetic permeability Core Loss/Q First magnetic particle Second magnetic particle third magnetic particle One* 100 0 0 X X 2* 76 4 20 X X 3 76 9 15 O O 4 76 10.6 13.4 O O 5 76 12 12 O O 6 76 13.5 10.5 O O 7 76 15 9 O O 8 76 16.4 7.6 O O 9* 76 20 4 X O

Table 3 below shows the results of samples in which the D50 of the first magnetic particles ranges from 12 to 21 μm, and samples 10, 15, 16, and 20 marked with * correspond to comparative examples.

Sample Area percentage (%) magnetic permeability Core Loss/Q First magnetic particle Second magnetic particle third magnetic particle 10* 76 6.5 17.5 X X 11 76 9 15 O O 12 76 11 13 O O 13 76 12 12 O O 14 76 13 11 O O 15 76 14.8 9.2 O O 16 76 16.2 7.8 O O 17* 76 17 7 X X 18* 72 10 18 X X 19 72 12 16 O O 20 72 14 14 O O

Table 4 below shows the results of samples in which the D50 of the first magnetic particles is in the range of 5-12 μm, and samples 21 and 31 marked with * correspond to comparative examples.

Sample Area percentage (%) magnetic permeability Core Loss/Q First magnetic particle Second magnetic particle third magnetic particle 21* 64 18 18 O X 22 64 20 16 O O 23 64 22 14 O O 24 64 24 12 O O 25 64 26 10 O O 26 68 16 16 O O 27 72 14 14 O O 28 72 16 12 O O 29 76 12 12 O O 30 76 16 8 O O 31* 76 20 4 X O

According to the above experimental results, an optimized ratio of the first to third magnetic particles can be derived. Specifically, the content ratio of the first magnetic particles is 90% or less and the content ratio of the third magnetic particles is 7.6-16%. In this case, it can be confirmed that good performance is exhibited in terms of magnetic permeability and core loss characteristics. In this case, when the ratio of the relatively large first magnetic particles is lowered to half or less, the overall filling rate of the magnetic particles is lowered, resulting in an increase in magnetic permeability loss. Therefore, the content ratio of the first magnetic particles is preferably 50% or more.

Hereinafter, as another type of magnetic component including the above-described magnetic particles, a magnetic component having a wound coil structure will be described. First, referring to FIGS. 11 to 13 , the magnetic component 400 includes a mold part 450, a coil part 430, a cover part 460, and receiving grooves h1 and h2, and an external electrode 470, 480) is further included. The body B forms the exterior of the magnetic component 400 and embeds the coil unit 430 therein. The body (B) includes a mold part 450 and a cover part 460 . The mold part 450 may include a core 420 . The body B may be formed in the shape of a hexahedron as a whole. The body B has a first surface 401 and a second surface 402 facing each other in a first direction X, and a third surface 403 and a fourth surface facing each other in a second direction Y. 404, a fifth surface 505 and a sixth surface 506 facing each other in the third direction (Z). Each of the first to fourth surfaces 401, 402, 403, and 404 of the body B connects the fifth surface 405 and the sixth surface 406 of the body B to the wall surface of the body B. corresponds to Hereinafter, both end surfaces of the body B refer to the first surface 401 and the second surface 402 of the body B, and both side surfaces of the body B refer to the third surface of the body B ( 403) and the fourth side 404.

The body B is illustratively formed so that the magnetic component 400 according to the present embodiment in which external electrodes 470 and 480 to be described later are formed has a length of 2.0 mm, a width of 1.2 mm, and a thickness of 0.6 mm. It may be, but is not limited thereto. Meanwhile, the body B includes a mold part 450 and a cover part 460. The cover part 460 is disposed on the upper part of the mold part 450 and is disposed on all surfaces except for the lower surface of the mold part 450. surrounds Therefore, the first to fifth surfaces 101, 102, 103, 104, and 105 of the body B are formed by the cover part 460, and the sixth surface 106 of the body B is formed by the mold part ( 450) and the cover part 460. The mold unit 450 has one surface and the other surface facing each other. One surface of the mold unit 450 is a surface corresponding to the lower surface of the mold unit 450 and means an area in which the receiving grooves h1 and h2 described later are disposed. As will be described later, since the receiving grooves h1 and h2 are processed inside the mold part 450, the bottom surfaces of the receiving grooves h1 and h2 may be disposed in an area between one surface and the other surface of the mold part 450. . The mold part 450 includes a support part 410 and a core 420 . The core 420 penetrates the coil unit 430 and is disposed at the center of the other surface of the support unit 410 . For the above reason, in this specification, one side and the other side of the mold part 450 are used as the same meaning as one side and the other side of the support part 410 , respectively. The mold unit 450 may be formed by filling a mold with a composite material including the magnetic metal particles 321 , 322 , and 323 of FIG. 10 and an insulating resin. Here, the insulating resin may include epoxy, polyimide, liquid crystal polymer, etc. alone or in combination, but is not limited thereto.

The coil unit 430 is embedded in the body B to express the characteristics of the magnetic component 400 . For example, when the magnetic component 400 of the present embodiment is used as a power inductor, the coil unit 430 may play a role of stabilizing power of an electronic device by storing an electric field as a magnetic field and maintaining an output voltage. The coil part 430 is disposed on the other surface of the mold part 450 . Specifically, the coil unit 430 is wound around the core 420 and disposed on the other surface of the support unit 410 . The coil unit 430 is an air-core coil and may be composed of a flat coil. The coil unit 430 may be formed by winding a metal wire such as a copper wire having a surface coated with an insulating material in a spiral shape. The coil unit 430 may include a plurality of layers. Each layer of the coil unit 430 may be formed in a planar spiral shape and have a plurality of turns. That is, the coil unit 430 may form an innermost turn T1 , at least one intermediate turn T2 , and an outermost turn T3 outward from the center of one surface of the mold unit 450 .

The cover part 460 may be disposed on the mold part 450 and the coil part 430 . The cover part 460 covers the mold part 450 and the coil part 430 . The cover part 460 may be coupled to the mold part 450 by being placed on the support part 410 , the core 420 , and the coil part 430 of the mold part 450 and pressurized. At least one of the mold part 450 and the cover part 460 includes the metal magnetic particles 321, 322, and 323 of FIG. 10, and in the present embodiment, the mold part 450 and the cover part 460 are respectively The metal magnetic particles 321, 322, and 323 of FIG. 10 are included.

The first and second accommodating grooves h1 and h2 are formed to be spaced apart from each other on one surface of the mold unit 450, and the first and second accommodating grooves h1 and h2 have both ends of a coil unit 430 to be described later. is placed For example, the first and second accommodating grooves h1 and h2 are respectively formed on one surface of the mold unit 450 and are spaced apart from each other in the longitudinal direction X. The first and second accommodating grooves h1 and h2 may be disposed outside the region corresponding to the core 420 of one surface of the mold unit 450, but are not limited thereto. Each of the first and second accommodating grooves h1 and h2 may be formed to extend along one direction from one surface of the mold unit 450, but only if the structure can effectively expose both ends of the coil unit 430. It can be formed in a form that does not become.

Since the body B is an area including the mold part 450 and the cover part 460, one surface of the body B means one surface of the area including the mold part 450 and the cover part 460. . The coil part 430 is drawn out and includes first and second drawing parts disposed in the first and second accommodating grooves h1 and h2, respectively. Since the first and second accommodating grooves h1 and h2 are regions where both ends of the coil unit 430 are drawn out to the external electrodes 470 and 480, they correspond to the first and second external electrodes 470 and 480, respectively. Spaced apart from each other as much as possible, they are formed on one side of the body (B).

As an example. The through grooves H1 and H2 may be formed by a mold when the mold unit 450 is formed, and the first and second accommodating grooves h1 and h2 are formed by stacking and compressing magnetic sheets containing magnetic metal particles. In the process of forming the cover part 460 , it may be formed on the mold part 450 . Protrusions corresponding to the through-holes H1 and H2 are formed in the mold for forming the mold part 450, and the through-holes H1 and H2 are formed in the mold part 450 manufactured in a form corresponding to the shape of the mold. can be formed Also, the first and second accommodating grooves h1 and h2 may not be formed in the process of forming the mold part 450, but may be formed in the process of forming the cover part 460 on the mold part 450. there is. That is, both ends of the coil unit 300 protruding from one surface of the mold unit 450 through the through-holes H1 and H2 of the mold unit 450 are attached to the mold unit 450 in the magnetic sheet compression process. ) can be buried inside. As a result, first and second receiving grooves h1 and h2 may be formed on one surface of the mold unit 450 . Alternatively, the first and second accommodating grooves h1 and h2 and the through grooves H1 and H2 may be formed in a process of forming the mold part 450 using a mold. In this case, protrusions corresponding to the first and second accommodating grooves h1 and h2 and the through grooves H1 and H2 may be formed in the mold used to form the mold unit 450 .

Both ends of the coil unit 430 may pass through one surface of the mold unit 450 and be disposed in the first and second receiving grooves h1 and h2, respectively. Since the shape in which the ends of the coil unit 430 are disposed in the accommodating grooves h1 and h2 is not limited, the widths of the first and second accommodating grooves h1 and h2 are the same as those of the through grooves H1 and H2. It may or may not be different. Both ends of the coil unit 430 are exposed to one surface of the mold unit 450, that is, the sixth surface 406 of the body B. Both ends of the coil unit 430 exposed to one side of the mold unit 450 are disposed in first and second receiving grooves h1 and h2 formed to be spaced apart from each other on the sixth side 406 of the body B. . Both ends of the coil part 430 may pass through the support part 410 of the mold part 450 and be exposed as one surface of the support part 410 . Although not specifically illustrated, since both ends of the coil unit 430 have the same thickness as the coil unit 430 , they may protrude from one surface of the support unit 410 by an amount corresponding to the thickness of the coil unit 430 . However, in the process of polishing the openings of the plating resist for forming the external electrodes 470 and 480 to be described later, the protruding ends may also be polished together, so the ends of the coil unit 430 exposed on one side of the support portion 410 are It may be substantially smaller than the thickness of the coil unit 430 .

The external electrodes 470 and 480 may be spaced apart from each other on one surface of the body B, that is, on the sixth surface 106 . Specifically, the external electrodes 470 and 480 are spaced apart from each other on one surface of the mold unit 450 and are disposed on both ends of the coil unit 430 disposed in the first and second receiving grooves h1 and h2, respectively. can be connected Since both ends of the coil unit 430 are disposed along the bottom surfaces of the first and second accommodating grooves h1 and h2, and the external electrodes 470 and 480 are applied along both ends of the coil unit 430, the external electrodes may be formed to correspond to the shapes of the first and second receiving grooves h1 and h2. As an example, the external electrodes 470 and 480 may be formed by coating a conductive resin containing conductive particles such as silver (Ag) on the first and second receiving grooves h1 and h2. The external electrodes 470 and 480 are copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), chromium (Cr), titanium (Ti), or may be formed of a conductive material such as an alloy thereof, but is not limited thereto. The sub-electrodes 470 and 480 may have a single-layer or multi-layer structure. According to the present embodiment, the external electrodes 470 and 480 may include a first layer contactingly connected to both ends of the coil unit 430 and a second layer covering the first layer. As an example, the first layer may be formed of a conductive resin containing silver (Ag) particles, but is not limited thereto and may be formed by a pre-plating layer containing copper (Cu). Although not specifically shown, the second layer may be disposed on the first layer to cover the first layer. The second layer may include nickel (Ni) and/or tin (Sn). The second layer may be formed by electroplating, but is not limited thereto.

Meanwhile, the magnetic component 400 according to the present exemplary embodiment may further include an insulating layer 490 surrounding a surface of the coil unit 430 . The method of forming the insulating layer 490 is not limited, but may be formed by, for example, chemical vapor deposition of parylene resin or the like on the surface of the coil unit 430, screen printing, photoresist, or the like. It can be formed by a known method such as exposure of PR), a process through development, a spray application, a dipping process, and the like. The insulating layer 490 is not particularly limited as long as it can be formed as a thin film, but may be formed of, for example, photoresist (PR) or epoxy resin.

Meanwhile, although not shown, the magnetic component 400 according to the present embodiment further includes an additional insulating layer on the sixth surface 406 of the body B, except for the region where the external electrodes 470 and 480 are disposed. can do. The additional insulating layer may be used as a plating resist in forming the external electrodes 470 and 480 by electroplating, but is not limited thereto. In addition, the additional insulating layer is disposed on at least some of the first to fifth surfaces 401, 402, 403, 404, and 405 of the body B to prevent electrical shorts between other electronic components and the external electrodes 470 and 480. can do. Meanwhile, although it is shown that the through holes H1 and H2 pass through the mold part 450 from the inside of the mold part 450, this is merely exemplary. That is, as a modified example of the present embodiment, the through grooves H1 and H2 are formed on the side surface of the mold part 450, and the first and second receiving grooves h1 and h2 disposed on one surface of the mold part 450 and can be intertwined In this case, both ends of the coil unit 430 may be disposed along a side surface of the mold unit 450 and one surface of the mold unit 450 . In addition, although the magnetic component 400 includes the magnetic particles of FIG. 10 in this embodiment, it may also include the magnetic particles of FIG. 8 and this is the same in the following embodiments.

Magnetic parts according to modified examples will be described with reference to FIGS. 14 and 15 . First, in the embodiment of FIG. 14 , the method in which the coil unit 430 is drawn out of the body B of the magnetic component 500 is different from the previous embodiment, and descriptions of other overlapping components are omitted. In this embodiment, the support part 410 of the magnetic component 500 has first and second lead-out parts 431 and 432 to accommodate the first and second lead-out parts 431 and 432 of the winding coil 430. It may include first and second receiving grooves h1 and h2 formed in a shape corresponding to ). The first and second accommodating grooves h1 and h2 are each formed along the thickness direction (T direction) on one side of the support part 410, and are formed in the second direction (Y direction) on the other surface 406 of the support part 410. It can be formed by extending to. The first and second accommodating grooves h1 and h2 may be disposed parallel to each other in the first direction (X direction). Therefore, when the magnetic material is included in the cover part 460, the same component as the magnetic material of the cover part 460 may be disposed in the first and second accommodating grooves h1 and h2. The first and second drawing parts 431 and 432 are accommodated along the first and second receiving grooves h1 and h2 of the support part 410, respectively, and one end is connected to the winding part and the other end is connected to the body ( It is exposed through the sixth surface 406 of B) and is connected to the first and second external electrodes 470 and 480, respectively. In this case, the first external electrode 470 may include an area 510 covering the sixth surface 406 of the body B and an area 520 covering the second surface 402, The second external electrode 480 may include an area 530 covering the sixth surface 406 of the body B and an area 540 covering the first surface 401 .

Next, in the case of the embodiment of FIG. 15 , the support part 410 of the magnetic component 600 has a structure in which a separate receiving groove is not formed. Accordingly, the first and second lead-out portions 431 and 432 of the winding coil 430 may be exposed to opposite sides of the body B, respectively. For example, the first lead-out portion 431 is exposed to the first surface 401 of the body B, and the second lead-out portion 432 is exposed to the second surface 402 of the body B, respectively. It may be connected to the first and second external electrodes 470 and 480 .

The present invention is not limited by the above-described embodiments and accompanying drawings, but is intended to be limited by the appended claims. Therefore, various forms of substitution, modification, and change will be possible by those skilled in the art within the scope of the technical spirit of the present invention described in the claims, which also falls within the scope of the present invention. something to do.

100, 211, 321, 322, 323: magnetic particles
101, 301, 302, 303: metal magnetic particles
110: oxide film
121 amorphous phase
122: Fe-based phase
123, 124, 125: Fe ₃ O ₄ phase
201: body
202: support member
203 Coil
205, 206: external electrode
210: insulating material
C: core part
P: pad area
V: conductive via

Claims (32)

Including metal magnetic particles having a plurality of phases,
The plurality of phases include a Fe-based phase and an Fe ₃ O ₄ phase,
A content ratio of the Fe ₃ O ₄ phase among the plurality of phases is less than 50% of the magnetic particles.
According to claim 1,
The magnetic particle of claim 1, wherein the Fe-based phase includes a single crystal region.
According to claim 2,
The magnetic particle of claim 1 , wherein the Fe-based phase has a polycrystalline structure including a plurality of single crystal regions.
According to claim 2,
The single crystal region is a magnetic particle including at least one of the group consisting of Fe(001) phase, Fe(011) phase, Fe(002) phase, Fe(101) phase, Fe(111) phase, and Fe(224) phase. .
According to claim 1,
The Fe-based phase is a magnetic particle containing a metal including Fe, Si, and Cr.
According to claim 1,
The plurality of phases of the magnetic particle further comprises an amorphous phase.
According to claim 6,
Wherein the amorphous phase includes at least one of Fe-based metal and Fe-based metal oxide.
According to claim 1,
The Fe ₃ O ₄ phase includes a single crystal region.
According to claim 8,
The single crystal region is a magnetic particle including at least one of the group consisting of Fe ₃ O ₄ (022) phase, Fe ₃ O ₄ (113) phase, Fe ₃ O ₄ (311) phase, and Fe ₃ O ₄ (111) phase. .
According to claim 1,
The content ratio of the Fe ₃ O ₄ phase in the metal magnetic particles is 19%-42.3% of the magnetic particles.
According to claim 1,
A ratio of the Fe ₃ O ₄ phase present on the surface of the metal magnetic particle is less than 70% of the magnetic particle.
According to claim 1,
At least a part of the Fe ₃ O ₄ phase is present in a central portion of a cross section passing through a center of the magnetic metal particle.
According to claim 1,
Magnetic particles further comprising an oxide film formed on the surface of the metal magnetic particles.
According to claim 13,
The magnetic particle wherein the oxide film includes a crystal region.
According to claim 14,
The crystal region is a magnetic particle containing Fe ₃ O ₄ components.
According to claim 15,
The Fe ₃ O ₄ component of the crystalline region has an orientation structure different from that of the Fe ₃ O ₄ phase.
According to claim 1,
A magnetic particle with a diameter of 10-900 nm measured in a cross-section including the center.
Including metal magnetic particles having a plurality of phases,
The plurality of phases include a Fe-based phase and an Fe ₃ O ₄ phase,
A ratio of the Fe ₃ O ₄ phase present on the surface of the metal magnetic particle is less than 70% of the magnetic particle.
According to claim 18,
The content ratio of the Fe ₃ O ₄ phase in the metal magnetic particles is 19%-42.3% of the magnetic particles.
According to claim 18,
At least a part of the Fe ₃ O ₄ phase is present in a central portion of a cross section passing through a center of the magnetic metal particle.
Including metal magnetic particles having a plurality of phases,
Wherein the plurality of phases include an amorphous phase and an Fe ₃ O ₄ phase.
According to claim 21,
The plurality of phases further include Fe-based single crystal regions.
The method of claim 22,
The plurality of phases include a plurality of Fe-based single crystal regions.
A magnetic component comprising a body containing a plurality of magnetic particles,
At least one of the plurality of magnetic particles includes a metal magnetic particle having a plurality of phases,
The plurality of phases include a Fe-based phase and an Fe ₃ O ₄ phase,
A content ratio of the Fe ₃ O ₄ phase among the plurality of phases is less than 50%.
According to claim 24,
A magnetic component comprising a coil disposed within said body.
According to claim 24,
When the plurality of magnetic particles including metal magnetic particles having a plurality of phases are referred to as composite particles,
A plurality of the composite particles are included in the body,
The plurality of composite particles have a diameter D50 of 100-300 nm.
A magnetic component comprising a body containing a plurality of magnetic particles,
The plurality of magnetic particles each include first to third magnetic particles including first to third metal magnetic particles,
The first magnetic particle has a diameter within a first diameter range, the second magnetic particle has a diameter within a second diameter range smaller than the first diameter range, and the third magnetic particle has a diameter smaller than the second diameter range. Has a diameter in the third diameter range,
The third magnetic metal particle includes a Fe-based phase and a Fe ₃ O ₄ phase.
The method of claim 27,
The magnetic component of claim 1 , wherein the diameters of the first to third magnetic particles are diameters measured from a cross section of the body.
According to claim 28,
The first diameter range is 5-61 μm,
The second diameter range is 0.6-4.5 μm,
The magnetic component of claim 1, wherein the third diameter range is 10-900 nm.
According to claim 29,
The second and third magnetic metal particles include different materials.
According to claim 29,
In the first to third magnetic particles, the content ratio of the first magnetic particles is 50-90%, and the content ratio of the third magnetic particles is 7.6-16%.
According to claim 28,
The first diameter range is 5-61 μm,
The second diameter range is 0.9-4.5 μm,
The magnetic component of claim 1, wherein the third diameter range is 10-800 nm.

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