KR20230100566A - Article transferring system and wireless network sensitivity monitoring method - Google Patents

Abstract

The present invention provides an article transport system. The product transport system includes a monitoring device; a transport vehicle that transports products and includes a wireless communication unit; a travel rail providing a travel path for the transport vehicle; and a wireless communication device installed along the traveling route, wherein the wireless communication device is configured to form a wireless network through which the transport vehicle can communicate wirelessly, wherein the transport vehicle is configured to perform wireless communication with the transport vehicle. The wireless communication unit may be configured to transmit sensitivity data of the transport vehicle to the wireless network to the monitoring device while traveling along a route.

Description

Article transfer system and wireless network sensitivity monitoring method {ARTICLE TRANSFERRING SYSTEM AND WIRELESS NETWORK SENSITIVITY MONITORING METHOD}

The present invention relates to an article carrying system and a wireless network sensitivity monitoring method.

In general, in order to manufacture a semiconductor device, various types of processes such as deposition, photo, and etching processes are performed, and devices performing each of these processes are disposed in a semiconductor manufacturing line. Articles such as substrates (eg, wafers, glass), which are objects to be processed in a semiconductor device manufacturing process, may be supplied to each semiconductor processing apparatus while being stored in a container such as a FOUP, POD, TRAY, MAGAZINE, or cassette. In addition, the processed articles may be collected from each semiconductor processing apparatus into a container, and the collected container may be transported to the outside.

The container is transported by a transport vehicle such as an Overhead Hoist Transport Apparatus (OHT). The transport vehicle runs along a rail provided along the ceiling of a semiconductor manufacturing line. A transport vehicle transports a container containing an article to a load port of one of semiconductor processing devices. In addition, the transport vehicle may pick up a container containing processed products from a load port and transport the container to the outside or to another one of the semiconductor processing devices.

In general, a transport vehicle receives a control signal from a control system (Overhead Hoist Transport Apparatus Control System, OCS), and travels along a rail based on the received control signal. The transportation vehicle receives a control signal related to a transportation destination and loading and unloading of goods from the control system and performs work. In addition, the transportation vehicle may transmit its driving information to the control system. For example, the transportation vehicle may transmit information such as driving speed, current location, container gripping status, driving destination, etc. to the control system.

Meanwhile, a wireless AP (Access Point) forming a wireless network is installed in a semiconductor manufacturing line. The carrier vehicle accesses a wireless network formed by wireless APs and exchanges control signals with a control system. In addition, a plurality of wireless APs are installed spaced apart from each other in a semiconductor manufacturing line.

In order for the transport vehicle to properly receive a control signal from the control system and properly transmit driving information to the control system, the transport vehicle must have excellent sensitivity to a wireless network. If the signal sensitivity to the wireless network is low, a communication failure may occur between the transport vehicle and the control system. If a communication failure occurs, problems such as delay in returning goods may occur.

In order to prevent such a problem in advance, signal sensitivity information on the wireless network may be collected using a portable terminal or PC having a program capable of measuring the signal sensitivity of the wireless network installed. Workers carry portable terminals or PCs directly. Specifically, a worker collects signal sensitivity information about a wireless network while directly moving an area under a driving rail on which a transport vehicle moves.

However, in this method of collecting signal sensitivity information, signal sensitivity information for a wireless network is collected under a running rail, not on a running rail on which a transport vehicle actually runs. Accordingly, the collected information differs from the signal sensitivity of the carrier vehicle to the wireless network. In other words, the signal sensitivity information collected from under the running rail is difficult to view as accurate data from the transport vehicle's point of view.

In some cases, the line environment may change due to movement of a semiconductor processing device in a semiconductor manufacturing line or installation of an interference such as a partition. When the line environment changes, signal sensitivity to the carrier vehicle's wireless network may deteriorate in some areas. In order to solve this problem, it is necessary to additionally install a wireless AP or to move and install a wireless AP. However, the collection of signal sensitivity for the wireless network as above is performed when a wireless AP is installed in a semiconductor manufacturing line. That is, collection of signal sensitivity is not continuously performed. Therefore, it is difficult to respond immediately, such as additional installation of a wireless AP or mobile installation of a wireless AP.

An object of the present invention is to provide an article carrying system and a wireless network sensitivity monitoring method capable of more accurately measuring the wireless sensitivity of a carrying vehicle to a wireless network signal.

In addition, an object of the present invention is to provide an article carrying system and a wireless network sensitivity monitoring method capable of easily specifying a region in which wireless sensitivity is weak in a semiconductor manufacturing line.

In addition, an object of the present invention is to provide an article carrying system and a wireless network sensitivity monitoring method capable of easily specifying a carrying vehicle in which an abnormality has occurred in a wireless communication unit.

The object of the present invention is not limited thereto, and other objects not mentioned will be clearly understood by those skilled in the art from the description below.

The present invention provides an article transport system. The product transport system includes a monitoring device; a transport vehicle that transports products and includes a wireless communication unit; a travel rail providing a travel path for the transport vehicle; and a wireless communication device installed along the traveling route, wherein the wireless communication device is configured to form a wireless network through which the transport vehicle can communicate wirelessly, wherein the transport vehicle is configured to perform wireless communication with the transport vehicle. The wireless communication unit may be configured to transmit sensitivity data of the transport vehicle to the wireless network to the monitoring device while traveling along a route.

According to an embodiment, a plurality of location marks may be displayed on the driving route, and the transport vehicle may be configured to transmit location data of the transport vehicle obtained by recognizing the location marks to the monitoring device.

According to an embodiment, a plurality of the wireless communication devices are provided and disposed spaced apart from each other along the driving route, different identification data are designated, and in the transport vehicle, the wireless communication unit is connected to the wireless network. may be configured to obtain the identification data of the wireless communication device forming the wireless network, and transmit the acquired identification data to the monitoring device.

According to one embodiment, the monitoring device may include: an analysis unit configured to analyze the sensitivity data, the location data, and the identification data; and a display unit configured to display an analysis result of the analysis unit.

According to an embodiment, the analysis unit may be configured to derive a sensitivity to the wireless network at a node of the running rail where the location mark is displayed based on the location data and the sensitivity data.

According to an embodiment, the analysis unit divides the sensitivity of the wireless communication unit to the wireless network into two or more sensitivity grades according to a predetermined reference value, and the sensitivity of the wireless network at each node of the running rail marked with the location mark. It may be configured to derive a sensitivity rating of the wireless communication unit for a wireless network.

According to an embodiment, the transport vehicle may further include a storage unit for storing the sensitivity data, obtain the sensitivity data while driving along the driving route, and store the sensitivity data in the storage unit. there is.

According to an embodiment, the transport vehicle may be configured to transmit the sensitivity data obtained while driving along the driving path to the monitoring device in real time.

According to an embodiment, the product transport system further includes a control device for transmitting a control signal to the transport vehicle, and the transport vehicle transmits the sensitivity data obtained while driving along the driving route through the control device. It can be configured to transmit to a monitoring device.

In addition, the present invention is a driving system including a traveling rail providing a traveling path, a plurality of vehicles traveling along the traveling rail, and a plurality of wireless communication devices installed along the traveling path and forming a wireless network, respectively. A method for monitoring sensitivity between a wireless communication unit provided in a vehicle and the wireless network is provided. The monitoring method may acquire sensitivity data on sensitivity between the wireless communication unit and the wireless network while the vehicle drives along the driving route.

According to an embodiment, the vehicle may recognize a location mark displayed on the driving route and obtain the sensitivity data from the location mark.

According to an embodiment, the vehicle may recognize a location mark displayed on the driving route and obtain identification data of the wireless network connected from the location mark.

According to an embodiment, the vehicle may transmit the sensitivity data of the location mark and the identification data of the wireless network connected to the location mark to a monitoring device.

According to an embodiment, the monitoring device may analyze the sensitivity data, the identification data, and the location mark from the vehicle, and display the analysis result on a display.

According to an embodiment, the vehicle monitors the sensitivity data at the location mark and the identification data at the location mark - the monitoring device analyzes the received data and enables the user to monitor the analysis result. It is a device that can transmit data in real time.

According to an embodiment, the vehicle stores the sensitivity data in the location mark and the identification data in the location mark in a storage unit provided in the vehicle, and then monitors the data stored in the storage unit. The device - the monitoring device analyzes the received data and transmits the analysis result to a device enabling the user to monitor.

According to an embodiment, the vehicle may transmit the sensitivity data of the location mark and the identification data of the location mark to a control device that transmits a control signal to the vehicle.

In addition, the present invention provides a method for monitoring signal sensitivity of transport vehicles to a wireless network formed by wireless communication devices installed in a semiconductor manufacturing line. The monitoring method includes the steps of driving the transport vehicles along a running rail installed on the ceiling of a semiconductor manufacturing line; and acquiring sensitivity to the wireless network while the transportation vehicles drive along the running rail.

According to an embodiment, the transportation vehicles may further include recognizing a location mark displayed on the running rail and transmitting the sensitivity of the location mark to a monitoring device.

According to an embodiment, the transportation vehicles may further include transmitting identification data about the wireless communication device connected at the location mark to the monitoring device.

According to an embodiment of the present invention, it is possible to more accurately measure the radio sensitivity of the transportation vehicle to the radio network signal.

In addition, according to an embodiment of the present invention, it is possible to easily specify a region in which radio sensitivity is weak in a semiconductor manufacturing line.

In addition, according to an embodiment of the present invention, it is possible to easily identify a transport vehicle in which an abnormality has occurred in the wireless communication unit.

The effects of the present invention are not limited to the above-mentioned effects, and effects not mentioned will be clearly understood by those skilled in the art from this specification and the accompanying drawings.

1 is a diagram schematically showing an article conveying system according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of the transport vehicle of FIG. 1 viewed from the front.
3 is a cross-sectional view of the transport vehicle of FIG. 1 viewed from the side.
FIG. 4 is a view schematically illustrating location marks displayed on the running rail of FIG. 1 .
FIG. 5 is a view schematically showing a location where the location mark of FIG. 4 is displayed.
6 is a block diagram schematically illustrating the monitoring device of FIG. 1 .
7 is a flowchart schematically illustrating a wireless network sensitivity monitoring method according to an embodiment of the present invention.
8 is a diagram showing an example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit.
FIG. 9 is a diagram showing another example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit.
FIG. 10 is a diagram showing another example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit.
FIG. 11 is a diagram showing another example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit.
FIG. 12 is a diagram showing another example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit.

Hereinafter, with reference to the accompanying drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily carry out the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. In addition, in describing preferred embodiments of the present invention in detail, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. In addition, the same reference numerals are used throughout the drawings for parts having similar functions and actions.

'Including' a certain component means that other components may be further included, rather than excluding other components unless otherwise stated. Specifically, terms such as "comprise" or "having" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features or It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.

Singular expressions include plural expressions unless the context clearly dictates otherwise. In addition, shapes and sizes of elements in the drawings may be exaggerated for clearer description.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms may be used for the purpose of distinguishing one component from another. For example, a first element may be termed a second element, and similarly, the second element may also be termed a first element, without departing from the scope of the present invention.

It is understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, but other elements may exist in the middle. It should be. On the other hand, when a component is referred to as “directly connected” or “directly connected” to another component, it should be understood that no other component exists in the middle. Other expressions describing the relationship between components, such as "between" and "directly between" or "adjacent to" and "directly adjacent to", etc., should be interpreted similarly.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in this application, they are not interpreted in an ideal or excessively formal meaning. .

Hereinafter, a product carrying system and a wireless network sensitivity monitoring method according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 12 .

1 is a diagram schematically showing an article conveying system according to an embodiment of the present invention.

Referring to FIG. 1 , the product transport system 10 of this embodiment may be used to transport containers. In particular, the product transport system 10 of this embodiment can transport a container in which the product is stored. The article may be a substrate such as a wafer, glass, reticle, or mask. A container in which articles are stored may be a Front Opening Unified Pod (FOUP) or a cassette. Also, a container in which an article is stored may be a pod. Also, the container in which the article is stored may be a magazine for accommodating a plurality of printed circuit boards and a tray for accommodating a plurality of semiconductor packages.

Hereinafter, an example in which the product transport system 10 transports a container in which a substrate such as a wafer is stored to substrate processing apparatuses A arranged in a semiconductor manufacturing line will be described as an example. The article transported by the article conveying system 10 is described as an example of a substrate used for manufacturing a semiconductor device. However, it is not limited thereto, and the product conveying system 10 of the present embodiment may be equally or similarly applied to various production lines requiring conveyance of articles and/or containers containing articles.

In addition, the substrate processing apparatus A in which the product transport system 10 transports the product according to an embodiment of the present invention may perform a processing process of processing the substrate. For example, the substrate processing device A may be a device capable of performing processes such as cleaning, etching, ashing, baking, and coating of a substrate. The substrate processing apparatus A may include an index unit IP and a processing unit PP. The index unit IP may include a load port through which a container containing the above-described items may be loaded or unloaded. An article (eg, a substrate such as a wafer) in a container seated on the index unit IP may be transported to the processing unit PP of the substrate processing apparatus A that performs a processing process on the substrate. The processing unit PP may be configured to perform the above-described processes on the substrate.

The product transport system 10 may include a travel rail 100 , a transport vehicle 200 , a control device 300 , a wireless communication device 400 , and a monitoring device 500 .

The travel rail 100 may provide a travel path along which the transport vehicle 200 travels. The running rail 100 may be fixed to the ceiling of a semiconductor manufacturing line. The running rail 100 may be fixed to the ceiling of the semiconductor manufacturing line through a shaft installed on the ceiling of the semiconductor manufacturing line. A travel path provided by the travel rail 100 may be arranged to overlap the substrate processing apparatus A when viewed from above. For example, the travel path provided by the travel rail 100 may be arranged to overlap with the index portion IP of the substrate processing apparatus A when viewed from above. Accordingly, the transport vehicle 200 to be described later may seat the container in which the article is stored in the index unit IP of the substrate processing apparatus A.

The transport vehicle 200 may travel along the travel rail 100 . The transport vehicle 200 may transport a container in which an article is stored while moving along the travel rail 100 . The transport vehicle 200 may be an overhead transport apparatus (OHT) that travels along the running rail 100 installed in the semiconductor manufacturing line. A plurality of transport vehicles 200 may be provided. For example, the article transport system 10 may include a first transport vehicle 200A to a twelfth transport vehicle 200L. The number of transport vehicles 200 included in the product transport system 10 may be variously modified according to the design of a semiconductor manufacturing line.

FIG. 2 is a cross-sectional view of the transport vehicle of FIG. 1 viewed from the front, and FIG. 3 is a cross-sectional view of the transport vehicle of FIG. 1 viewed from the side.

Referring to FIGS. 2 and 3 , the conveying vehicle 200 according to an embodiment of the present invention may be configured to be able to travel along the travel rail 100 described above. The transport vehicle 200 may be configured to hold the container C. The transport vehicle 200 may be configured to run along the rail 100 while holding the container C. The transport vehicle 200 includes a body 210, a driving wheel 220, a steering member 230, a frame 240, a neck 250, a slider 260, a lifting member 270, a grip member 280, And may include a control unit (290).

A driving wheel 220, a steering member 230, and a neck 250 may be coupled to the body 210. A driving wheel 220 may be rotatably coupled to the body 210 . In addition, the body 210 may be provided with a driving actuator 211 for rotating the driving wheel 220 . In addition, the body 210 may include a control unit 290 that controls the operation of the transportation vehicle 200 . Also, the steering member 230 may be provided on the upper surface of the body 210 . In addition, the neck 250 may be rotatably coupled to the body 210 .

The driving actuator 211 may transmit power to the driving wheel 220 to rotate the driving wheel 220 . In addition, the body 210 may be provided in plurality. Each body 210 may have the aforementioned driving actuator 211 . In addition, each of the bodies 210 may be coupled with the driving wheel 220, the steering member 230, and the neck 250 described above.

The driving wheel 220 may be rotatably coupled to the body 210 . The driving wheel 220 may be rotated by receiving power from the driving actuator 211 . The driving wheel 220 may be rotated in contact with the traveling rail 100 . The driving wheel 220 may be coupled to the body 210 . The driving wheel 220 may be rotatably coupled to the body 210 . The driving wheel 220 may contact the traveling rail 100 and rotate to travel on the traveling rail 310 . A plurality of driving wheels 220 may be provided. Driving wheels 220 may be provided as a pair. One of the driving wheels 220 is rotatably coupled to one surface of the body 210, and the other of the driving wheels 220 is rotatably coupled to the other surface opposite to one surface of the body 210.

The steering member 230 may be provided on top of the body 210 . The steering member 230 may include a plurality of steering wheels 232 and a steering rail 234 . When viewed from above, the steering wheel 232 may be disposed along a direction parallel to the running direction of the transport vehicle 200 . In addition, the steering rail 234 may have a longitudinal direction parallel to a direction perpendicular to the running direction of the transport vehicle 200 when viewed from above. Also, the position of the steering wheel 232 may be changed along the longitudinal direction of the steering rail 234 .

The frame 240 may have an inner space. A slider 260, an elevating member 270, and a grip member 280, which will be described later, may be provided in the inner space of the frame 240. In addition, the frame 240 may have a hexahedral shape with open sides and a bottom surface. That is, the front and rear surfaces of the frame 240 may be provided as blocking plates. Accordingly, it is possible to prevent the container C held by air resistance from being shaken while the transport vehicle 200 is running. In addition, the frame 240 may be coupled to the body 210 via the neck 250. The neck 250 may be rotatably provided with respect to the body 210 and the frame 240 . The frame 240 may be coupled to at least one body 210 via at least one neck 250 . For example, one frame 240 may be provided, and two necks 250 may be coupled to one frame 240 . And, the two necks 250 may be respectively coupled to different bodies 210 .

Slider 260 may be coupled to frame 240 . The slider 260 may change the position of the elevating member 270 . The slider 260 may move the elevating member 270 in a direction perpendicular to the traveling direction of the transport vehicle 200 . That is, the slider 260 can change the position of the container C gripped by the grip member 280 to the right and left with respect to the driving direction of the transport vehicle 200 .

The elevating member 270 may be provided between the body 210 and the grip member 280 . The elevating member 270 may move the grip member 280 in the vertical direction. The elevating member 270 may raise or lower the grip member 280 . The lifting member 270 may include a lifting actuator 271 and a belt 272 . The elevating member 270 may also be referred to as a hoist device. The lift driver 271 may change the length of the suspended belt 272 by winding or unwinding the belt 272 . For example, when the lift driver 271 unwinds the belt 272, the length of the belt 272 becomes longer, and when the lift driver 271 winds the belt 272, the length of the belt 272 may be shortened. Also, a plurality of belts 272 may be provided. One end of each of the plurality of belts 272 may be connected to the grip member 280 .

The grip member 280 can grip the container C. When the grip member 280 is closed, the grip member 280 can grip the container C. When the grip member 280 is opened, the grip member 280 may place the container C. That is, the grip member 280 can hold the container C in a detachable manner. The grip member 280 may unload the container C from the index unit IP of the substrate processing apparatus A.

The control unit 290 may be provided on the body 210 as described above. The control unit 290 may be provided in an inner space of the body 210 . The control unit 290 may control at least one of elements of the transportation vehicle 200 , for example, the traveling driver 211 , the lift driver 271 , and the slider 260 . The control unit 290 may include a wireless communication unit 291 , a storage unit 292 , and a control unit 293 .

The wireless communication unit 291 may access a wireless network formed by the wireless communication device 400 to be described later. Accordingly, the transportation vehicle 200 may be capable of wireless communication with the control device 300 and/or the monitoring device 500 to be described later. The wireless communication unit 291 may include a wireless LAN card. In addition, the wireless communication unit 291 may receive a control signal from the control device 300 to be described later via a wireless network formed by the wireless communication device 400 and transmit the control signal to the control unit 293 .

The control signal transmitted by the control device 300 may include the driving speed of the transportation vehicle 200, the driving destination, whether the container C is being held, whether the container C is loaded/unloaded, and the like. The control unit 293 may control the operation of the transportation vehicle 200 based on the control signal transmitted from the control device 300 . The control unit 293 may include a processor that performs calculations for controlling components of the transportation vehicle 200 . A processor may consist of one or more processing circuits for arithmetic and signal processing.

The storage unit 292 may store information about the transport vehicle 200, commands for controlling the transport vehicle 200, and the like. Also, the storage unit 292 may store driving information of the transportation vehicle 200 . Also, the storage unit 292 may temporarily store driving information of the transport vehicle 200 . The temporarily stored driving information may be transmitted to the control device 300 and/or the monitoring device 500 to be described later in real time through the wireless communication unit 291 . For example, the storage unit 292 may include a volatile memory. Also, the storage unit 292 may permanently store driving information of the transportation vehicle 200 . Permanently stored driving information may be transmitted to the control device 300 and/or the monitoring device 500 through a wireless or wired communication method. For example, the storage unit 292 may include a non-volatile memory.

The transportation vehicle 200 may further include a recognizing unit 242 . The recognition unit 242 may be a substrate capable of recognizing the location mark N displayed on the running rail 100 as shown in FIG. 4 . The recognition unit 242 may be a camera capable of recognizing the location mark N displayed on the traveling rail 100 or a barcode recognition device. When the recognizing unit 242 recognizes the location mark N, the control unit 290 can derive location data described below, that is, the current location of the transportation vehicle 200 . For example, the location mark N is formed on the running rail 100, and as shown in FIG. 5, a plurality of locations may be formed on the running rail 100. For example, the location mark N formed on the running rail 100 may include a first location mark N1 to a 28th location mark N28. However, this is only an example and the number of position marks N formed on the running rail 100 may be variously modified as needed.

Driving information of the transport vehicle 200 that the transport vehicle 200 can transmit to the control device 300 and/or the monitoring device 500 is the traveling speed of the transport vehicle 200 (hereinafter referred to as “speed data”). ), the location of the transport vehicle 200 (hereinafter referred to as “location data”), the sensitivity of the transport vehicle 200 to the wireless network (hereinafter referred to as “sensitivity data”), and the transport vehicle 200 accesses identification information (hereinafter, referred to as “identification data”) about the wireless communication device 400 forming a wireless network.

The location data may be data related to the current location of the transportation vehicle 200 . The location data may be collected by recognizing the location mark N displayed on the traveling rail 100 by the recognizing unit 242 of the transportation vehicle 200 . The location mark N may be a mark including information about where the location mark N is displayed on the running rail 100, such as a barcode or a QR code. When the recognition unit 242 recognizes the corresponding mark, the control unit 290 may estimate the current location of the transportation vehicle 200 .

The identification data may be identification information about the wireless communication device 400 to be described later. A plurality of wireless communication devices 400 may be provided, and identification information may be designated to distinguish them from each other. The identification data may be the Mac Address, S/N, and the like of the connected wireless communication device 400 . Identification data may be collected by connecting the wireless communication unit 291 to a wireless communication device 400 to be described later.

Sensitivity data may be collected by the control unit 290 measuring the signal sensitivity of the wireless communication unit 291 to the wireless network at set intervals. For example, the sensitivity data may be collected by measuring the signal sensitivity of the wireless communication unit 291 to the wireless network at predetermined time intervals (eg, 1 second intervals).

Referring back to FIG. 1 , the control device 300 may control the product transport system 10 . The control device 300 may control the transportation vehicle 200 . The control device 300 may control the transportation vehicles 200 . The control device 300 may control the transport vehicles 200 to transport containers containing articles to the substrate processing devices A disposed in the semiconductor manufacturing line. The control device 300 may control driving of the transportation vehicles 200 . The control device 300 may transmit a control signal (command) for controlling the transportation vehicles 200 to the transportation vehicle 200 . The control device 300 may be connected to the transportation vehicles 200 through a wireless communication method. According to the control signal (command) of the control device 300, the transportation vehicles 200 may transport the goods from the starting location instructed by the control device 300 to the destination location.

The control device 300 includes a process controller composed of a microprocessor (computer) that controls components of the product transport system 10, and a keyboard and the like through which an operator performs command input operations and the like to manage the product transport system 10. , a user interface made up of a display or the like that visualizes and displays the operation status of the substrate processing apparatus, and a storage unit that stores a control program for executing processes executed in the article transport system 10 under control of a process controller. . Also, the user interface and storage may be connected to the process controller. The processing recipe may be stored in a storage medium of the storage unit, and the storage medium may be a hard disk, a portable disk such as a CD-ROM or a DVD, or a semiconductor memory such as a flash memory.

The wireless communication device 400 may form a wireless network. A wireless network formed by the wireless communication device 400 may allow the transportation vehicle 200 to communicate wirelessly with the control device 300 and/or the monitoring device 500 . The wireless communication device 400 may be a wireless access point (AP). The wireless communication device 400 may be a wireless router. A plurality of wireless communication devices 400 may be provided. For example, the wireless communication device 400 may include a first wireless communication device 400A to a twelfth wireless communication device 400L. However, this is just one example, and the number of wireless communication devices 400 that can cover all areas in which the transport vehicle 200 travels can be variously modified.

In addition, different identification data are assigned to the wireless communication devices 400 . For example, the first wireless communication device 400A may be assigned a first address as a Mac address and a first number as an S/N. The second wireless communication device 400B may have a first address designated as a Mac address and a second number designated as an S/N. The first address and the second address may be different from each other. The first number and the second number may be different from each other.

The wireless communication devices 400 may be installed apart from each other along a travel path provided by the travel rail 100 on which the transport vehicle 200 travels. Each of the wireless communication devices 400 may form a wireless network within a set area. While the transport vehicle 200 travels along the travel rail 100, the transport vehicle 200 can access a wireless network formed by the wireless communication device 400 having the highest signal sensitivity to the wireless network. For example, while the first transport vehicle 200A passes through the first area, it connects to the wireless network formed by the first wireless communication device 400A, and the first transport vehicle 200A operates in a second area different from the first area. While passing by, it is possible to access a wireless network formed by the second wireless communication device 400B. In this way, the wireless communication devices 400 may be installed at appropriate locations of the semiconductor manufacturing line so that the transport vehicle 200 can wirelessly communicate with the control device 300 without communication failure.

The monitoring device 500 may be configured to monitor driving information of the transportation vehicle 200 . The monitoring device 500 may be configured to enable a user to monitor sensitivity data, location data, and identification data among driving information of the transportation vehicle 200 . The monitoring device 500 may analyze driving information of the transport vehicle 200 transmitted from the transport vehicle 200 through a wireless network.

6 is a block diagram schematically illustrating the monitoring device of FIG. 1 .

Referring to FIG. 6 , the monitoring device 500 may include a data transmission/reception unit 510 , an analysis unit 520 , and a display unit 530 . The data transmission/reception unit 510 may be configured to transmit/receive driving information of the transport vehicle 200 wirelessly or wired. The data transceiver 510 may be configured to transmit and receive data to and from the control device 300 wirelessly or wired. The data transmission/reception unit 510 may include a volatile or non-volatile memory capable of storing data.

The analyzer 520 may analyze driving information of the transport vehicle 200 transmitted to the data transceiver 510 . The analysis unit 520 may be configured to analyze the above-described sensitivity data, location data, and identification data. The analyzer 520 may include a processor that performs an operation of analyzing driving information. The analyzer 520 may include a memory in which a program capable of analyzing driving information is stored.

The display unit 530 may be configured to display analysis results analyzed by the analysis unit 520 . The display unit 530 may be configured to allow a user to recognize the analysis result analyzed by the analysis unit 520 . The display unit 530 may include a display.

Hereinafter, a method for monitoring the sensitivity between the transportation vehicle 200 and the wireless communication device 400 according to an embodiment of the present invention will be described in detail.

7 is a flowchart schematically illustrating a wireless network sensitivity monitoring method according to an embodiment of the present invention.

Referring to FIGS. 1 , 5 and 7 , transport vehicles 200 may travel along the travel rail 100 . Transport vehicles 200 may obtain data about their own driving information while driving along the driving rail 100 . The transportation vehicles 200 may collect driving information including location data, sensitivity data, and identification data while driving along a traveling route provided by the traveling rail 100 .

For example, in the first step ( S10 ), the first transport vehicle 200A may recognize position marks N displayed on the travel rail 100 while moving along the travel rail 100 . When the first transport vehicle 200A recognizes the first position mark N1, the first transport vehicle 200A recognizes that its position is the position where the first position mark N1 is marked on the traveling rail 100. Recognizable. At this time, the first transport vehicle 200A may collect data about which of the wireless communication devices 400 is accessing the forming wireless network and the signal sensitivity of the wireless network. In short, when the first transport vehicle 200A recognizes the first location mark N1, the first transport vehicle 200A can collect identification data and measure sensitivity data at the first location mark N1. . When the first transport vehicle 200A moves and recognizes the second location mark N2, the first transport vehicle 200A may measure identification data and sensitivity data at the second location mark N2. Such data acquisition may be continuously performed while the first transport vehicle 200A travels along the travel path provided by the travel rail 100 . In addition, such data acquisition may be performed not only by the first transport vehicle 200A, but also by another transport vehicle 200 traveling along the travel rail 100 .

In the second step ( S20 ), each of the transportation vehicles 200 may transmit the collected data to the monitoring device 500 . Data collected by the transportation vehicles 200 may be transmitted to the monitoring device 500 in real time.

In the third step ( S30 ), data received by the monitoring device 500 , for example, data including driving information transmitted by the transportation vehicle 200 may be analyzed. In the third step (S30), the analysis unit 520 of the monitoring device 500 may analyze the data.

In the fourth step ( S40 ), the analysis unit 520 of the monitoring device 500 may display the result of analyzing the data on the display of the display unit 530 .

Hereinafter, an analysis result of analyzing data by the analyzer 520 of the present invention and examples of displaying the analysis result on the display unit 530 will be described in detail.

Transport vehicles 200 collect location data by recognizing location marks N while traveling along the travel rail 100 . In addition, the transportation vehicles 200 recognize the location mark N, and collect sensitivity data and identification data when recognizing the location mark N.

That is, the transportation vehicles 200 determine which wireless communication device 400 is connected to at the location where each location mark N is displayed (hereinafter, referred to as “node”), and which wireless communication device 400 forms. Data on how sensitive the wireless network is can be collected.

For example, at the first node where the first location mark N1 is displayed, the first transport vehicle 200A collects the Mac Address and S/N of the first wireless communication device 400A, and Measure the sensitivity value for the wireless network formed by (400A). In addition, at the first node where the first location mark N1 is displayed, the second transport vehicle 200B collects the Mac Address and S/N of the first wireless communication device 400A, and the first wireless communication device 400A ) can measure the sensitivity value for the wireless network formed. By repeating this process, when the transportation vehicle 200 is located at the first node, it is possible to access a wireless network of a certain wireless communication device 400 and collect data about the sensitivity value of the signal. there is. These data may be accumulated, and similarly performed at each of the location marks N displayed on the running rail 100 .

The analyzer 520 may classify sensitivity data (measurement values) collected for each of the location marks N into two or more sensitivity grades according to a predetermined reference value. Table 1 below shows examples of grades designated for sensitivity measurement values of the wireless communication unit 291 for the wireless network. In Table 1, the higher the grade (ie, closer to the 5th grade), the better the sensitivity.

Reference value (dbm) Rating -80 dbm < measured value 5 -90 dbm < measured value ≤ - 80 dbm 4 -100 dbm < measured value ≤ -90 dbm 3 -110 dbm < measured value ≤ -100 dbm 2 -120 dbm < measured value ≤ -110 dbm One

That is, the analyzer 520 may rank each of the sensitivity data collected by the transportation vehicle 200 at each location mark N. When a plurality of sensitivity data is collected for each location mark N, a grade may be assigned to each of the sensitivity data, and a sensitivity grade at a corresponding node may be obtained through an average value of the grades. For example, When the measured sensitivity value obtained by the first transport vehicle 200A at the first location mark N1 is -75 dbm, the grade for the corresponding sensitivity data may be a grade 5. In addition, when the measured sensitivity value obtained by the second transport vehicle 200B at the first location mark N1 is -85 dbm, the grade for the corresponding sensitivity data may be a grade 4. In this case, the analyzer 520 may analyze that the sensitivity grade is 4.5 at the first node where the first location mark N1 is indicated.

8 is a diagram showing an example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit. The first analysis result AR1 includes information about the distribution of the number of nodes for each sensitivity class, and the display unit 530 displays this information in tables and graphs. That is, the number of nodes with a sensitivity level of 5, the number of nodes with a sensitivity of 4, the number of nodes with a sensitivity of 3, the number of nodes with a sensitivity of 2, and the number of nodes with a sensitivity of 1. It may contain information about the number.

FIG. 9 is a diagram showing another example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit. The second analysis result AR2 includes information on changes in the number of nodes having each sensitivity level over time, and the display unit 530 displays the related information as a graph.

FIG. 10 is a diagram showing another example in which the analysis result derived by the analysis unit of FIG. 6 is displayed on the display unit. In the third analysis result AR3, identification data (which may be referred to as AP data) of the wireless communication device 400 to which each transport vehicle 200 is currently connected, and a sensitivity rating obtained while each transport vehicle 200 is driving It may include information about the minimum value of , the maximum value of sensitivity levels, and the average value of the obtained sensitivity levels. Through the third analysis result AR3, the user can specify the transport vehicle 200 whose sensitivity grade is consistently low, and in this case, it is estimated that a problem has occurred in the wireless communication unit 291 of the transport vehicle 200. can do.

FIG. 11 is a diagram illustrating another embodiment in which the analysis result derived by the analysis unit of FIG. 6 is displayed on a display unit. In the fourth analysis result AR4, when the transport vehicle 200 is located at each node, the identification data (which may be referred to as AP data) of the connected wireless communication device 400, and the minimum sensitivity level at each node. value, the maximum value of the sensitivity class, and information about the average value of the obtained sensitivity class. The user can specify a node whose sensitivity level is consistently low through the fourth analysis result (AR), and in this case, the location of the wireless communication device 400 forming the wireless network at the corresponding node, a problem with a LAN card, etc. It can be inferred that

FIG. 12 is a diagram illustrating another embodiment in which the analysis result derived by the analysis unit of FIG. 6 is displayed on a display unit. In the fifth analysis result AR5, based on the sensitivity grade values for each node, in the layout of the running rail 100, the signal sensitivity state of a certain area is good, the signal sensitivity is abnormal, and the signal sensitivity state is dangerous and there is no information about the signal sensitivity.

According to an embodiment of the present invention, while the transport vehicle 200 directly travels along the travel rail 100 and while the transport vehicle 200 travels at the same speed as the actual travel speed, the transport vehicle on the travel rail 100 Since the signal sensitivity of the wireless network received by the 200 is directly measured, it is possible to obtain more accurate sensitivity data compared to the case where the user measures the signal sensitivity while moving with a PC for measurement below the driving rail 100. There are benefits to being able to

The above detailed description is illustrative of the present invention. In addition, the foregoing is intended to illustrate and describe preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, changes or modifications are possible within the scope of the concept of the invention disclosed in this specification, within the scope equivalent to the written disclosure and / or within the scope of skill or knowledge in the art. The foregoing embodiment describes the best state for implementing the technical idea of the present invention, and various changes required in specific application fields and uses of the present invention are also possible. Therefore, the above detailed description of the invention is not intended to limit the invention to the disclosed embodiments. Also, the appended claims should be construed to cover other embodiments as well.

Substrate processing device: A
Index Part: IP
Processing part: PP
Goods return system: 10
Running Rail: 100
Transport Vehicle: 200
Control unit: 290
Radio Communications Department: 291
Storage unit: 292
Control unit: 293
Control unit: 300
Wireless communication device: 400
Monitoring device: 500
Data transmission and reception unit: 510
Analysis department: 520
Display unit: 530

Claims (20)

monitoring device;
a transport vehicle that transports products and includes a wireless communication unit;
a travel rail providing a travel path for the transport vehicle; and
A wireless communication device installed along the driving route, the wireless communication device being configured to form a wireless network in which the transport vehicle can communicate wirelessly;
wherein the transport vehicle is configured to transmit sensitivity data of the transport vehicle to the wireless network of the wireless communication unit to the monitoring device while traveling along the travel route. According to claim 1,
A plurality of location marks are displayed on the driving route,
wherein the transport vehicle is configured to transmit position data of the transport vehicle obtained by recognizing the location mark to the monitoring device. According to claim 2,
The wireless communication devices are provided in plurality and are arranged spaced apart from each other along the travel route, and different identification data are assigned to each other,
The transport vehicle is configured to acquire the identification data of the wireless communication device that formed the wireless network when the wireless communication unit connects to the wireless network, and transmits the acquired identification data to the monitoring device. system. According to claim 3,
The monitoring device,
an analysis unit configured to analyze the sensitivity data, the location data, and the identification data; and
and a display unit configured to display an analysis result of the analysis unit. According to claim 4,
wherein the analysis unit is configured to derive a sensitivity to the wireless network at a node of the running rail at which the location mark is displayed based on the location data and the sensitivity data. According to claim 4,
The analysis unit classifies the sensitivity of the wireless communication unit to the wireless network into two or more sensitivity grades according to a predetermined reference value, and the wireless network to the wireless network at the node of the running rail where each location mark is displayed. An article conveying system configured to derive a sensitivity rating of a communication unit. According to any one of claims 1 to 6,
The transport vehicle further comprises a storage unit for storing the sensitivity data, configured to obtain the sensitivity data while traveling along the travel route and to store the sensitivity data in the storage unit. According to any one of claims 1 to 6,
Wherein the transport vehicle is configured to transmit the sensitivity data obtained while traveling along the travel route to the monitoring device in real time. According to any one of claims 1 to 6,
The article transport system further includes a control device that transmits a control signal to the transport vehicle;
wherein the transport vehicle is configured to transmit the sensitivity data obtained while traveling along the travel route to the monitoring device through the control device. In a driving system including a traveling rail providing a traveling path, a plurality of vehicles traveling along the traveling rail, and a plurality of wireless communication devices installed along the traveling path and forming a wireless network, the wireless vehicle is equipped with a wireless A method for monitoring sensitivity between a communication unit and the wireless network,
The method of claim 1 , wherein sensitivity data for sensitivity between the wireless communication unit and the wireless network is acquired while the vehicle travels along the driving route. According to claim 10,
The method of claim 1 , wherein the vehicle recognizes a location mark displayed on the driving route, and obtains the sensitivity data at the location mark. According to claim 11,
The method of claim 1 , wherein the vehicle recognizes a location mark indicated on the driving route by the vehicle, and obtains identification data of the wireless network to which the vehicle is connected from the location mark. According to claim 12,
wherein the vehicle transmits the sensitivity data at the location mark and the identification data of the wireless network connected at the location mark to a monitoring device. According to claim 13,
wherein the monitoring device analyzes the sensitivity data, the identification data, and the location mark from the vehicle, and displays analysis results on a display. According to claim 12,
The vehicle monitors the sensitivity data at the location mark and the identification data at the location mark in real time with a device that analyzes the received data and enables a user to monitor the analysis result. How to transmit. According to claim 12,
The vehicle stores the sensitivity data in the location mark and the identification data in the location mark in a storage unit provided in the vehicle,
Thereafter, the data stored in the storage unit is transmitted to a monitoring device, wherein the monitoring device analyzes the received data and enables the user to monitor the analysis result. According to claim 12,
wherein the vehicle transmits the sensitivity data at the location mark and the identification data at the location mark to a control device that transmits a control signal to the vehicle. A method for monitoring signal sensitivity of transport vehicles to a wireless network formed by a wireless communication device installed in a semiconductor manufacturing line, the method comprising:
driving the transport vehicles along a running rail installed on the ceiling of a semiconductor manufacturing line; and
acquiring sensitivity to the wireless network while the transport vehicles travel along the running rail. According to claim 18,
the transport vehicles recognizing a position mark displayed on the running rail, and transmitting the sensitivity at the position mark to a monitoring device. According to claim 19,
the transport vehicles transmitting identification data relating to the wireless communication device connected at the location mark to the monitoring device.

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