KR20230098010A - Discharge pressure evaluation method, discharge pressure evaluation program, recording medium and substrate processing apparatus - Google Patents

Abstract

[Problem] It is possible to evaluate a discharge pressure applied to a treatment liquid in order to discharge the treatment liquid from a nozzle in a reasonable time depending on whether the discharge pressure is appropriate.
[Solution Means] There are provided N evaluation steps from the 1st to the Nth, each of which evaluates the discharge pressure by evaluation items different from each other. However, when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation items related to the I-th evaluation step, the evaluation of the discharge pressure by the evaluation items related to the (I+1)-th evaluation step is executed, If it is judged that the discharge pressure is inadequate in the evaluation by the evaluation items related to the I-th evaluation step, the evaluation of the discharge pressure by the evaluation step in the order following the I-th evaluation step is not executed (that is, it is omitted). ).

Description

Discharge pressure evaluation method, discharge pressure evaluation program, recording medium and substrate processing apparatus

This invention relates to a technique of discharging a treatment liquid from a nozzle by applying a discharge pressure to the treatment liquid. In addition, as an object to which the processing liquid is discharged from the nozzle, for example, a semiconductor substrate, a photomask substrate, a liquid crystal display substrate, an organic EL display substrate, a plasma display substrate, a FED (Field Emission Display) substrate, an optical disk substrate Substrates, substrates for magnetic disks, substrates for magneto-optical disks, and the like are included.

As shown in Japanese Unexamined Patent Publication No. 2011-005465 and Japanese Unexamined Patent Publication No. 2020-040046, when the processing liquid discharged from the nozzle is applied to the substrate, the discharge pressure applied to the processing liquid is applied to the substrate. greatly affects the thickness of Therefore, in Japanese Unexamined Patent Publication No. 2011-005465, the discharge pressure waveform is divided into a plurality of sections, and based on the gradient of the waveform in each section, whether or not the discharge pressure is within an acceptable range is evaluated. Moreover, in Japanese Unexamined Patent Publication No. 2020-040046, optimization of parameters related to the discharge pressure is aimed at for each region such as a rise region and a steady discharge region.

That is, in Japanese Unexamined Patent Publication No. 2011-005465 and Japanese Unexamined Patent Publication No. 2020-040046, high-precision evaluation of the discharge pressure is made possible by evaluating the waveform of the discharge pressure in each of a plurality of divisions or regions. On the other hand, performing evaluation on many evaluation items in this way causes the time required for evaluation of the discharge pressure to increase. In particular, it was not always reasonable to evaluate all evaluation items over an inappropriate discharge pressure over a long period of time.

The present invention has been made in view of the above problems, and an object of the present invention is to make it possible to evaluate a discharge pressure applied to a treatment liquid in order to discharge the treatment liquid from a nozzle at a reasonable time depending on whether the discharge pressure is appropriate.

In the discharge pressure evaluation method according to the present invention, the discharge pressure in a discharge device that discharges the treatment liquid from a nozzle by applying discharge pressure to the treatment liquid is evaluated by the first to Nth Nth discharge pressures by different evaluation items. Among the number of evaluation steps (N is an integer greater than or equal to 2), the step of evaluating the discharge pressure by the evaluation items related to the first evaluation step, and the Ith (I is an integer greater than or equal to 1 and less than N) among the N evaluation steps. ), when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation items related to the evaluation step of (I+1), while the evaluation of the discharge pressure by the evaluation items related to the (I+1)th evaluation step is performed, In the case where the discharge pressure is judged to be unsuitable in the evaluation by the evaluation items related to the evaluation step, a process of not executing the evaluation of the discharge pressure by the evaluation step in the order following the I-th evaluation step is provided.

The discharge pressure evaluation program according to the present invention evaluates the discharge pressure in a discharge device that discharges the treatment liquid from a nozzle by applying discharge pressure to the treatment liquid according to different evaluation items, from the 1st to the Nth Nth. Among the number of evaluation steps (N is an integer greater than or equal to 2), the step of evaluating the discharge pressure by the evaluation items related to the first evaluation step, and the Ith (I is an integer greater than or equal to 1 and less than N) among the N evaluation steps. ), when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation items related to the evaluation step of (I+1), while the evaluation of the discharge pressure by the evaluation items related to the (I+1)th evaluation step is performed, When the discharge pressure is judged to be inappropriate in the evaluation by the evaluation items related to the evaluation step, the computer executes the process of not executing the evaluation of the discharge pressure by the evaluation step in the order following the I-th evaluation step. .

The recording medium according to the present invention records the above discharge pressure evaluation program so that it can be read by a computer.

A substrate processing apparatus according to the present invention includes a nozzle, a pressure imparting unit for applying discharge pressure to a processing liquid so that the nozzle discharges the processing liquid, a measuring unit for measuring the discharge pressure, and applying a discharge pressure to the processing liquid. Stores the contents of execution in N (N is an integer of 2 or more) evaluation steps from the 1st to the Nth in which the discharge pressure in the discharge device for discharging the treatment liquid from the nozzle is evaluated by different evaluation items. The control unit evaluates the discharge pressure by an evaluation item related to the first evaluation step among the N evaluation steps, and among the N evaluation steps, the I-th (I is an integer greater than or equal to 1 and less than N) ), when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation items related to the evaluation step of (I+1), while the evaluation of the discharge pressure by the evaluation items related to the (I+1)th evaluation step is performed, In the case where the discharge pressure is judged to be inappropriate in the evaluation by the evaluation items related to the evaluation step, the evaluation of the discharge pressure by the evaluation step in the order following the I-th evaluation step is not executed.

In the present invention (discharge pressure evaluation method, discharge pressure evaluation program, recording medium, and substrate processing apparatus) constructed as described above, N evaluation steps from the 1st to the Nth are provided to evaluate the discharge pressure by evaluation items different from each other. Therefore, the evaluation steps from the 1st to the Nth can be sequentially executed. However, when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation items related to the I-th evaluation step, the evaluation of the discharge pressure by the evaluation items related to the (I+1)-th evaluation step is executed, If the discharge pressure is judged to be inappropriate in the evaluation by the evaluation items related to the I-th evaluation step, the discharge pressure is not evaluated by the evaluation step in the order following the I-th evaluation step. That is, when the discharge pressure is sequentially evaluated by the first to Nth evaluation steps, if the discharge pressure is judged to be inappropriate in one of the evaluation steps, the evaluation in the subsequent evaluation steps is not executed. Accordingly, it is possible to evaluate the discharge pressure applied to the treatment liquid in order to discharge the treatment liquid from the nozzle at a reasonable time depending on whether the discharge pressure is appropriate.

Further, the discharge pressure evaluation method may be configured so that, among the N evaluation steps, different evaluation values are given to the discharge pressure according to a difference in the number of evaluation steps in which the discharge pressure is evaluated. In this configuration, a better evaluation value can be given to a discharge pressure having a greater number of evaluation steps performed, and it becomes possible to assign an appropriate evaluation value to the discharge pressure depending on whether or not the discharge pressure is appropriate.

In addition, in the evaluation target period including at least a main period from the start of discharge of the processing liquid from the nozzle through the rise of the discharge pressure to the predetermined pressure and the start of the decrease of the discharge pressure from the predetermined pressure, the discharge pressure Based on the result of measuring the pressure, a step of extracting a characteristic amount of the time change of the discharge pressure in the entire period to be evaluated as a total feature amount, and a step of evaluating the change over time of the discharge pressure based on the total feature amount By executing the above, the discharge pressure evaluation method may be constituted such that the first evaluation step has an evaluation item for evaluating the discharge pressure. In such a configuration, the evaluation target period includes at least a main period from the start of discharge of the processing liquid from the nozzle through the rise of the discharge pressure to the predetermined pressure and the start of the reduction of the discharge pressure from the predetermined pressure. Based on the measured value of the discharge pressure measured in the above, the characteristic amount of the time change of the discharge pressure in the entire period to be evaluated is extracted as a total feature amount, and the change over time of the discharge pressure is evaluated based on the total feature amount. Accordingly, it is possible to reflect the appropriateness of the discharge pressure in the evaluation of the discharge pressure during the entire period (in other words, the period to be evaluated) influencing the thickness of the processing liquid applied to the substrate.

Further, the evaluation target period is the main period, and the discharge pressure evaluation method may be structured so that the main feature value, which is the feature amount of the time change of the discharge pressure in the entire main period, is extracted as the entire feature value. In such a configuration, when the main period has a particularly large influence on the thickness of the treatment liquid applied to the substrate (in other words, when the influence of the period after the main period has passed is insignificant), the discharge pressure in the entire main period It is possible to reflect the appropriateness of the in the evaluation of the discharge pressure.

Further, the discharge pressure evaluation method may be constituted so that the main characteristic variable represents a difference between a main approximate waveform approximating the time change of the discharge pressure in the entire main period and a time change of the discharge pressure in the entire main period. . In such a configuration, the discharge pressure in the entire principal period can be appropriately evaluated based on the approximate waveform for the time change of the discharge pressure in the entire principal period.

In addition, the main approximate waveform is a linear approximation of the time change of the discharge pressure that increases with the passage of time after the start of discharge of the treatment liquid from the nozzle, linearly over time from the discharge start pressure to the normal pressure greater than the discharge start pressure. An ascending approximation line that increases, an approximation line at the start that is set between the start point of ejection of the treatment liquid from the nozzle and the ascending approximation line and indicates the discharge start pressure, and a main period from when the ascending approximation line reaches the steady pressure The discharge pressure evaluation method may be configured so as to have a stationary straight line that is set until the end and represents the stationary pressure. In such a configuration, the time change of the discharge pressure in the entire main period can be approximated, and the discharge pressure in the entire period can be appropriately evaluated.

In addition, the evaluation target period is the first period from the start of discharging the processing liquid from the nozzle to the end of discharging the processing liquid from the nozzle, and the time change of the discharge pressure in the entire first period has The discharge pressure evaluation method may be structured so that the first characteristic quantity, which is the characteristic quantity, is extracted as the entire characteristic quantity. In this configuration, the discharge pressure affects the thickness of the processing liquid applied to the substrate through the first period from the start of the discharge of the processing liquid from the nozzle to the end of the discharge of the processing liquid from the nozzle. In this case, it is possible to reflect the appropriateness of the discharge pressure in the entire first period in the evaluation of the discharge pressure.

In addition, the first feature is a discharge pressure evaluation method so as to indicate a difference between a first approximate waveform approximating the time change of the discharge pressure in the entire first period and the time change of the discharge pressure in the entire first period. may be configured. In this configuration, the discharge pressure in the entire period can be appropriately evaluated based on the approximate waveform for the time change of the discharge pressure in the entire period from the start to the end of the discharge of the treatment liquid from the nozzle.

In addition, the first approximate waveform is linearly approximated to the time change of the discharge pressure that increases over time after the start of discharge of the processing liquid from the nozzle, so that from the discharge start pressure to the normal pressure greater than the discharge start pressure, the time lapse An ascending approximation line that increases linearly along the line, an approximation line at the start that is set between the starting point of ejection of the treatment liquid from the nozzle and the approximate ascending line indicating the discharge start pressure, and before the end of discharge of the treatment liquid from the nozzle , By linearly approximating the time change of the discharge pressure that decreases over time, a descending approximation straight line that linearly decreases with time from the normal pressure to the discharge end pressure smaller than the normal pressure, and the descending approximation straight line and the treatment liquid from the nozzle Even if the discharge pressure evaluation method is constructed so that a stationary straight line representing a steady pressure is obtained by connecting between an approximation line at the end set between the end points of discharge and indicating the discharge end pressure, and each of the ascending approximation straight line and the descending approximation straight line. do. In this configuration, the time change of the discharge pressure in the entire period from the start to the end of discharge of the processing liquid from the nozzle is approximated by a trapezoidal waveform, and the discharge pressure in the entire period can be appropriately evaluated.

In addition, a step of extracting, as a second feature, a feature of the time change of the discharge pressure in a second period shorter than the evaluation target period, as a second feature, and a time change of the discharge pressure based on the second feature The discharge pressure evaluation method may be constituted such that the second evaluation step among the N evaluation steps has an evaluation item of evaluating the discharge pressure by executing the step of evaluating . In this configuration, the discharge pressure can be evaluated with high accuracy based on the time change of the discharge pressure in a period shorter than the entire period from the start to the end of discharge of the processing liquid from the nozzle.

In addition, a predetermined initial period of increase from the start of discharge of the processing liquid from the nozzle is set as the second period, the discharge pressure increases over time through the initial period of increase, and the discharge pressure in the initial period of increase The discharge pressure evaluation method may be configured such that a feature representing a difference between a regression curve of time change of , and a time change of discharge pressure in the rising initial period is extracted as the second feature. In such a configuration, the discharge pressure can be evaluated taking into account the temporal change of the discharge pressure immediately after the start of the processing liquid from the nozzle.

Further, the discharge pressure evaluation method may be configured such that an increasing period from the start of discharge of the processing liquid from the nozzle until the discharge pressure increases to a predetermined pressure is set as the second period. In such a configuration, the discharge pressure can be evaluated taking into account the time change of the discharge pressure in the rising period.

Specifically, the discharge pressure evaluation method may be configured such that the length of the rising period is extracted as the second feature. In this configuration, the discharge pressure can be evaluated by considering the rate of increase in the discharge pressure.

In addition, the discharge pressure evaluation method may be structured so that the number of times that one differential of the time change of the discharge pressure crosses the predetermined threshold value is extracted as the second feature during the rising period. With such a configuration, the discharge pressure can be evaluated by taking into account the smoothness of the temporal change of the discharge pressure in the rising period.

In addition, the discharge pressure evaluation method may be configured such that the number of times the absolute value of the second derivative of the time change of the discharge pressure crosses the predetermined threshold value is extracted as the second feature during the rising period. With such a configuration, the discharge pressure can be evaluated by taking into account the smoothness of the temporal change of the discharge pressure in the rising period.

Further, in the rising period, the time at which the two derivatives of the change over time of the discharge pressure become larger than the predetermined positive threshold, and the second derivative of the change over time of the discharge pressure have a predetermined negative value having the same absolute value as the positive threshold. The discharge pressure evaluation method may be structured so that the ratio of the time when is smaller than the threshold value of is extracted as the second feature. In this configuration, the discharge pressure can be evaluated by considering the difference in time change of the discharge pressure at the beginning and end of the rising period.

In addition, a predetermined rise end period until the discharge pressure increases to the predetermined pressure is set as the second period, and a rise end approximate waveform approximating the time change of the discharge pressure in the rise end period, and a rise end period A feature representing the difference in the time change of the discharge pressure at the time is extracted as the second feature, and the rising end approximation waveform is a linear approximation of the time change of the discharge pressure that increases with time in a pressure range smaller than a predetermined pressure. A rising end approximation line that overlaps with the approximate curve obtained by doing so and increases linearly with time to the steady pressure, which is the average value of the time change of the discharge pressure in the steady period following the rising end period, and a rising end approximation line from the rising end approximate line The discharge pressure evaluation method may be constituted so as to have an extended straight line representing the steady pressure set extending until the end of the period. In such a configuration, the discharge pressure can be evaluated by considering the degree of stalling of the discharge pressure at the end of the rising period.

In addition, the initial oscillation period from the time point when the discharge pressure reaches the maximum value to the time point when the two derivatives of the time change of the discharge pressure cross zero twice is set as the second period, and the discharge pressure in the initial oscillation period The discharge pressure evaluation method is configured so that the difference between the minimum pressure value and the average discharge pressure average value in a predetermined steady period following the initial oscillation period and the maximum discharge pressure value is extracted as the second feature. You can do it. In such a configuration, the discharge pressure can be evaluated taking into account the overshoot of the discharge pressure.

In addition, a predetermined transition period from the time when the discharge pressure exceeds the predetermined pressure is set as the second period, and the discharge pressure in the transition period is the average value of the discharge pressure in the predetermined steady period following the transition period. The discharge pressure evaluation method may be structured so that the characteristic quantity representing the difference in pressure is extracted as the second characteristic quantity. In such a configuration, the discharge pressure can be evaluated taking into account the stability of the discharge pressure after the discharge pressure reaches the predetermined pressure.

In addition, a constant pressure period from the point when the discharge pressure exceeds the predetermined pressure to the point when the discharge pressure starts to decrease toward the end of the discharge of the processing liquid from the nozzle is set as the second period, and the constant pressure The discharge pressure evaluation method may be configured such that a characteristic quantity representing the difference between the maximum value and the minimum value of the discharge pressure in the period is extracted as the second characteristic quantity. In such a configuration, the discharge pressure can be evaluated by considering the stability of the discharge pressure during the constant pressure period of the discharge pressure.

In addition, as a discharge pressure evaluation method in which N is 3 or more, a step of extracting, as a third feature, a characteristic value of a change in discharge pressure over time in a third period shorter than the evaluation target period, among evaluation target periods; The discharge pressure evaluation method may be constituted so that the third evaluation step among the N evaluation steps has an evaluation item of evaluating the discharge pressure by executing a step of evaluating the change in the discharge pressure over time based on the characteristic amount. In this configuration, the discharge pressure can be evaluated with high accuracy based on the time change of the discharge pressure in a period shorter than the entire period from the start to the end of discharge of the processing liquid from the nozzle.

Further, after the start of discharging the treatment liquid from the nozzle, a pressure increasing period in which the discharge pressure increases with time from the lower reference value to the upper reference value greater than the lower reference value is set as the third period, and is set between the lower reference value and the upper reference value. It is one of the measured values of the discharge pressure in , and is the square mean of the time change of the discharge pressure and the approximate straight line obtained by linear regression for the time change of the discharge pressure in the interval between the lower reference value and one measured value One measurement in which the sum of the square error and the root mean square error of the time change of the discharge pressure and the approximate straight line obtained by linear regression for the time change of the discharge pressure in the interval between one measured value and the upper reference value is minimized The discharge pressure evaluation method may be configured such that a value is obtained and the ratio of the slope of the straight line between the lower reference value and one measurement value and the slope of the straight line between the one measurement value and the upper reference value is extracted as the third feature. In such a configuration, the discharge pressure can be evaluated by considering the linearity of the increase in the discharge pressure.

In addition, a predetermined rise end period until the discharge pressure increases to the predetermined pressure is set as the third period, and a rise end approximation waveform approximating the time change of the discharge pressure in the rise end period, and a rise end period A feature representing the difference in the time change of the discharge pressure at the time is extracted as a third feature, and the rising end approximation waveform is a linear approximation of the time change of the discharge pressure that increases with time in a pressure range smaller than a predetermined pressure. The discharge pressure evaluation method may be constituted so that it overlaps with the approximation curve obtained by doing so, and has a rising end approximation line that linearly increases to a predetermined pressure with the lapse of time, and an extension straight line connected to the rising end approximation line and indicating the predetermined pressure. . In such a configuration, the discharge pressure can be evaluated by considering the degree of stalling of the discharge pressure at the end of the rising period.

In addition, the initial oscillation period from the time when the discharge pressure reaches the maximum value to the time when the two derivatives of the time change of the discharge pressure cross zero twice is set as the third period, and from the maximum value of the discharge pressure, The sum of the value obtained by subtracting the steady pressure, which is the average of the discharge pressures in the predetermined steady period following the initial oscillation period, and the value obtained by subtracting the minimum discharge pressure in the initial oscillation period from the steady pressure, is the third characteristic The discharge pressure evaluation method may be structured so that it is extracted as an amount. In such a configuration, the discharge pressure can be evaluated taking into account the overshoot of the discharge pressure.

As described above, according to the present invention, it is possible to evaluate the discharge pressure applied to the treatment liquid in order to discharge the treatment liquid from the nozzle at a reasonable time depending on whether the discharge pressure is appropriate.

1 is a diagram schematically showing the overall configuration of a coating device that is an embodiment of a substrate processing device according to the present invention.
Fig. 2 is a diagram showing the configuration of a coating liquid supply mechanism;
Fig. 3 is a block diagram showing an example of the configuration of a control unit;
Fig. 4 is a flow chart showing an example of a discharge pressure evaluation method executed based on a discharge pressure evaluation program;
Fig. 5 is a diagram for explaining each period used for evaluation of discharge pressure;
Fig. 6 is a diagram schematically showing an example of an operation performed by a pressure evaluation unit for a change in discharge pressure over time;
Fig. 7 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on a characteristic quantity Fv1;
Fig. 8 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on a feature amount Fv2;
Fig. 9 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on a feature amount Fv3;
Fig. 10A is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on a feature amount Fv4;
Fig. 10B is a diagram showing an example of a change over time in a discharge pressure judged to be unsuitable by evaluation based on the characteristic amount Fv4;
Fig. 11A is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on a feature amount Fv5;
Fig. 11B is a diagram showing an example of a change over time in a discharge pressure judged to be unsuitable by evaluation based on the characteristic amount Fv5;
Fig. 12 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv6;
Fig. 13 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the feature amount Fv7;
Fig. 14 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic quantity Fv8;
Fig. 15 is a view for explaining evaluation items for evaluating a change in discharge pressure over time based on the feature amount Fv9;
Fig. 16 is a view for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv10;
Fig. 17 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic quantity Fv11;
Fig. 18 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv12;
Fig. 19 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the feature amount Fv13;
Fig. 20 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the feature amount Fv14;
Fig. 21 is a flowchart showing details of measurement result evaluation;
Fig. 22 schematically shows an example of an operation performed according to the flowchart of Fig. 21;
Fig. 23 is a diagram for explaining each period used in a modified example of discharge pressure evaluation items;
Fig. 24 is a diagram for explaining a modified example of an evaluation item for evaluating a change in discharge pressure over time based on the feature amount Fv1_1;

1 is a diagram schematically showing the overall configuration of a coating device that is an embodiment of a substrate processing device according to the present invention. This coating device 1 is a slit coater that applies a coating liquid to the upper surface Sf of the substrate S conveyed in a horizontal posture from the left side to the right side in FIG. 1 . In addition, in order to clarify the arrangement relationship of each part of the apparatus in the following angles, the transport direction of the substrate S is set to "X direction", and the horizontal direction from the left side to the right side in Fig. 1 is set to "+X". direction”, and the opposite direction is referred to as “-X direction”. Moreover, while the front side of an apparatus is called "-Y direction" among the horizontal directions (Y) orthogonal to the X direction, the rear side of an apparatus is called "+Y direction". In addition, the upward and downward directions in the vertical direction Z are referred to as "+Z direction" and "-Z direction", respectively.

In the coating device 1, along the conveyance direction Dt (+X direction) of the substrate S, an input conveyor 100, an input transfer unit 2, a lifting stage unit 3, The output transfer unit 4 and the output conveyor 110 are disposed close to each other in this order, and as described in detail below, a conveyance path for the substrate S extending in a substantially horizontal direction is formed by these. . In the following description, when expressing a positional relationship in relation to the conveying direction Dt of the substrate S, "upstream side in the conveying direction Dt of the substrate S" is simply referred to as "upstream side". Also, "downstream side in the conveying direction Dt of the substrate S" is simply omitted as "downstream side" in some cases. In this example, the (-X) side corresponds to the "upstream side" and the (+X) side to the "downstream side" relatively when viewed from a certain reference position.

The substrate S to be processed is carried into the input conveyor 100 from the left side of FIG. 1 . The input conveyor 100 includes a roller conveyor 101 and a rotation drive mechanism 102 for rotationally driving the roller conveyor 101, and the rotation of the roller conveyor 101 moves the substrate S to the downstream side in a horizontal position, that is, It is conveyed in the (+X) direction. The input transfer unit 2 includes a roller conveyor 21 and a rotation/elevation driving mechanism 22 having a function of driving rotation and a function of raising and lowering the roller conveyor 21 . As the roller conveyor 21 rotates, the substrate S is further conveyed in the (+X) direction. Moreover, when the roller conveyor 21 moves up and down, the position of the vertical direction Z of the board|substrate S is changed. With the input transfer unit 2 configured in this way, the substrate S is transferred from the input conveyor 100 to the lifting stage unit 3.

The floating stage unit 3 includes a flat plate-shaped stage divided into three parts along the substrate transport direction Dt. That is, the floating stage part 3 is equipped with the entrance floating stage 31, the application stage 32, and the exit floating stage 33, and the upper surfaces of these each stage mutually form a part of the same plane. Furthermore, the lifting stage part 3 has a lift pin driving mechanism 34, a lifting control mechanism 35, and a lift driving mechanism 36. The lift pin driving mechanism 34 can raise and lower the lift pins installed on the inlet floating stage 31 . The lifting control mechanism 35 can supply compressed air for lifting the substrate S to each stage of the lifting stage part 3 . The elevating drive mechanism 36 can elevate the exit floating stage 33 .

On the upper surface of each of the inlet floating stage 31 and the outlet floating stage 33, a large number of blowing holes for ejecting compressed air supplied from the floating control mechanism 35 are formed in a matrix shape, and the buoyancy applied from the ejected air flow As a result, the substrate S rises. In this way, the lower surface Sb of the substrate S is supported in a horizontal posture in a state separated from the upper surface of the stage. The distance between the lower surface Sb of the substrate S and the upper surface of the stage, that is, the floating amount can be, for example, 10 micrometers to 500 micrometers.

On the other hand, on the upper surface of the application stage 32, a blowing hole for blowing compressed air and a suction hole for sucking air between the lower surface Sb of the substrate S and the upper surface of the stage are alternately arranged. The distance between the lower surface Sb of the substrate S and the upper surface of the coating stage 32 is precisely controlled by the floating control mechanism 35 controlling the amount of compressed air ejected from the ejection hole and the amount of suction from the suction hole. do. Accordingly, the position in the vertical direction Z of the upper surface Sf of the substrate S passing above the coating stage 32 is controlled to a prescribed value. As a specific structure of the floating stage part 3, what was described in Japanese Patent No. 5346643 is applicable, for example. In addition, the floating amount in the coating stage 32 is calculated by the control unit 9 based on the detection result by the sensors 61 and 62 described in detail later, and can be adjusted with high precision by air flow control. has been

The rotation of the roller conveyor 21 imparts a driving force in the (+X) direction to the substrate S carried into the floating stage unit 3 through the input transfer unit 2, and the entrance lifting stage 31 returned to the The entrance floating stage 31, the application stage 32, and the exit floating stage 33 support the substrate S in a floating state, but do not have a function of moving the substrate S in the horizontal direction. Transport of the substrate S in the floating stage unit 3 is performed by the substrate transport unit 5 arranged below the entrance floating stage 31, the coating stage 32, and the exit floating stage 33. all.

The substrate transport unit 5 includes a chuck mechanism 51 that supports the substrate S from below by partially abutting the lower surface periphery of the substrate S, and a suction pad provided on the suction member at the upper end of the chuck mechanism 51. A suction/travel control mechanism 52 having a function of adsorbing and holding the substrate S by applying negative pressure (not shown) and a function of reciprocating the chuck mechanism 51 in the X direction is provided. In a state where the substrate S is held by the chuck mechanism 51, the lower surface Sb of the substrate S is located at a higher position than the upper surface of each stage of the floating stage unit 3. Therefore, the board|substrate S maintains a horizontal attitude as a whole by the buoyancy applied from the floating stage part 3, while the peripheral part is adsorbed and held by the chuck mechanism 51. In addition, in the step of partially holding the lower surface Sb of the substrate S by the chuck mechanism 51, in order to detect the position in the vertical direction Z of the upper surface of the substrate S, a sensor for measuring the plate thickness ( 61) is disposed near the roller conveyor 21. Since a chuck (not shown) in a state not holding the substrate S is located directly below the sensor 61, the sensor 61 is able to move the upper surface of the suction member, that is, the vertical direction Z of the suction surface. position can be detected.

The substrate S carried from the input transfer unit 2 to the lifting stage unit 3 is held by the chuck mechanism 51, and in this state, the chuck mechanism 51 moves in the (+X) direction, thereby enabling the substrate ( S) is conveyed from above the entrance floating stage 31 via the above of the application stage 32 to the above of the exit floating stage 33. The conveyed board|substrate S is also carried to the output transfer part 4 arrange|positioned on the (+X) side of the exit floating stage 33.

The output transfer unit 4 includes a roller conveyor 41 and a rotation/elevation driving mechanism 42 having a function of driving the roller to rotate and a function of raising and lowering it. When the roller conveyor 41 rotates, the driving force in the (+X) direction is given to the board|substrate S, and the board|substrate S is further conveyed along the conveyance direction Dt. Moreover, when the roller conveyor 41 moves up and down, the position of the vertical direction Z of the board|substrate S is changed. By the output transfer part 4, the board|substrate S is transferred to the output conveyor 110 from above the exit floating stage 33.

The output conveyor 110 includes a roller conveyor 111 and a rotation drive mechanism 112 for rotationally driving this, and the substrate S is further moved in the (+X) direction by the rotation of the roller conveyor 111. It is conveyed and finally discharged out of the coating device 1. In addition, although the input conveyor 100 and the output conveyor 110 may be installed as a part of the structure of the coating device 1, they may be separate from the coating device 1. Further, for example, a substrate dispensing mechanism of a separate unit installed on the upstream side of the coating device 1 may be used as the input conveyor 100 . In addition, a substrate receiving mechanism of a separate unit provided on the downstream side of the coating device 1 may be used as the output conveyor 110 .

An application mechanism 7 for applying a coating liquid to the upper surface Sf of the substrate S is disposed on the transport path of the substrate S transported in this way. The application mechanism 7 has a slit nozzle (hereinafter simply referred to as "nozzle") 71 having a slit-shaped discharge port. In addition, although not shown, a positioning mechanism is connected to the nozzle 71, and the nozzle 71 is positioned at an application position above the application stage 32 (a position indicated by a solid line in FIG. 1) by the positioning mechanism. It is positioned at a maintenance position described later. Further, a coating liquid supply mechanism 8 is connected to the nozzle 71, the coating liquid is supplied from the coating liquid supply mechanism 8, and the coating liquid is discharged from a discharge port opening downward at the bottom of the nozzle.

2 : is a figure which shows the structure of a coating liquid supply mechanism. As shown in FIG. 2 , the coating liquid supply mechanism 8 uses a pump 81 that supplies the coating liquid by volume change as a supply source for supplying the coating liquid to the nozzle 71 . As the pump 81, a bellows type pump described in, for example, Japanese Unexamined Patent Publication No. 10-61558 can be used. This pump 81 has a flexible tube 811 that can be elastically expanded and contracted in the radial direction. One end of this flexible tube 811 is connected to the coating liquid replenishing unit 83 via a pipe 82, and the other end is connected to a nozzle 71 via a pipe 84.

Outside the flexible tube 811, a bellows 812 elastically deformable in the axial direction is disposed. This bellows 812 has a small bellows portion 813 and a large bellows portion 814, and an incompressible medium is sealed in a pump chamber 815 between the flexible tube 811 and the bellows 812. . In addition, an actuating disk portion 816 is provided between the small bellows portion 813 and the large bellows portion 814. A driving unit 817 is connected to the working disk unit 816 . When the drive unit 817 operates according to a command from the control unit 9, the operation disk unit 816 rotates in a predetermined movement pattern (a pattern representing a change in speed of the operation disk unit 816 over time). direction, changing the volume inside the bellows 812. Accordingly, the flexible tube 13 expands and contracts in the radial direction to perform a pump operation, and supplies the coating liquid appropriately replenished from the coating liquid replenishing unit 83 toward the nozzle 71 . For this reason, the movement pattern of the actuating disk portion 816 is closely related to the discharge characteristics (temporal change of discharge pressure) of the coating liquid discharged from the nozzle 71, and predetermined discharge characteristics are obtained according to the movement pattern. .

The coating liquid replenishment unit 83 has a storage tank 831 for storing the coating liquid. This storage tank 831 is connected to the pump 81 through a pipe 82 . In addition, an on-off valve 833 is fitted in the pipe 82 . This opening/closing valve 833 is opened in response to a replenishment command from the control unit 9, allowing the flexible tube 811 of the pump 81 to be replenished with the coating liquid in the storage tank 831. Conversely, it is closed according to the replenishment stop command from the control unit 9, and replenishment of the coating liquid from the storage tank 831 to the flexible tube 811 of the pump 81 is regulated.

An opening/closing valve 85 is fitted to a pipe 84 connected to the output side of the pump 81 (left side in the same drawing), and opens and closes in response to an open/close command from the control unit 9. In this way, it is possible to switch between supplying the coating liquid to the nozzle 71 and stop supplying the liquid. In addition, a pressure gauge 86 is attached to the pipe 84 to detect the pressure (discharge pressure) of the coating liquid supplied to the nozzle 71, and transmit the detection result (pressure value) to the control unit 9. print out

In the nozzle 71 to which the coating liquid is supplied from the coating liquid supply mechanism 8 in this way, as shown in FIG. 2, a sensor 62 for detecting the floating height for detecting the floating height of the substrate S in a non-contact manner. is installed. By this sensor 62, it is possible to measure the separation distance between the floating substrate S and the upper surface of the stage surface of the coating stage 32, and the control unit 9 is positioned according to the detected value. The position where the nozzle 71 descends is adjusted by controlling (not shown). In addition, as the sensor 62, an optical sensor, an ultrasonic sensor, etc. can be used.

In order to perform predetermined maintenance on the nozzle 71, as shown in FIG. 1, a nozzle cleaning standby unit 72 is installed in the coating mechanism 7. The nozzle washing standby unit 72 mainly includes a roller 721, a cleaning unit 722, a roller bat 723, and the like. Then, nozzle cleaning and liquid reservoir formation are performed by these, and the discharge port of the nozzle 71 is adjusted to a state suitable for the next coating process. In addition, the nozzle 71 is positioned at the position where the nozzle cleaning waiting unit 72 is installed, that is, the maintenance position, and the nozzle 71 discharges the coating liquid from the nozzle 71 to evaluate the discharge pressure applied to the coating liquid. Discharge is performed.

In addition, the application device 1 is equipped with a control unit 9 (FIG. 3) for controlling the operation of each part of the device. 3 is a block diagram showing an example of the configuration of a control unit. As shown in FIG. 3 , the control unit 9 is a computer including a calculation unit 91 , a storage unit 93 and a UI (User Interface) 95 . The calculation unit 91 is a processor composed of a CPU (Central Processing Unit) or the like, and a measurement execution unit 911 that measures the discharge pressure by executing the discharge pressure evaluation program 97 and evaluates the measured discharge pressure. A pressure evaluation unit 913 is built. The storage unit 93 is a storage device such as a hard disk drive (HDD) or a solid state drive (SDD), and the discharge pressure evaluation program 97 or the discharge pressure evaluation program 97 is executed. The discharge pressure measurement data 99 is stored. This discharge pressure evaluation program 97 is provided, for example, by a recording medium M installed separately from the control unit 9. This recording medium M records the discharge pressure evaluation program 97 so that it can be read by a computer (control unit 9). Examples of such a recording medium M include a USB (Universal Serial Bus) memory, a memory card, or a storage device of an external server computer. In addition, the UI 95 has a display that displays information to the user and an input device that accepts input operations by the user. As the control unit 9 having such a configuration, various types of computers such as desktop type, laptop type or tablet type can be used, for example.

4 is a flowchart showing an example of a discharge pressure evaluation method executed based on a discharge pressure evaluation program. In step S101, the measurement execution unit 911 moves the working disk unit 816 based on the movement pattern defined in the discharge pressure evaluation program 97 to discharge the coating liquid from the nozzle 71 (pseudo discharge). ). Accordingly, when the actuating disc portion 816 accelerates from zero speed to a predetermined target speed, it moves at a constant speed at the target speed and decelerates from the target speed to zero speed. However, as shown in Japanese Unexamined Patent Publication No. 2020-040046, in a local period from when the speed of the working disk portion 816 reaches the maximum speed until it stabilizes at the target speed, the working disk portion 816 The speed (parameter) is adjusted, and the movement pattern is set.

Specifically, the discharge pressure is in the following order

Discharge pressure increases from the initial pressure Pi to the target pressure Pt greater than the initial pressure Pi

・The discharge pressure is stable at the target pressure (Pt)

Discharge pressure decreases from the target pressure (Pt) to the initial pressure (Pi)

The movement pattern of the actuating disc portion 816 is defined in the discharge pressure evaluation program 97 so as to change to .

Further, in step S101, the measurement execution unit 911, in parallel with the discharge of the coating liquid from the nozzle 71 according to the movement of the operating disk unit 816, the discharge pressure by the pressure gauge 86 at a predetermined sampling cycle. The measured value of is acquired periodically. In this way, during the discharge period Tt (FIG. 5) during which the coating liquid is discharged from the nozzle 71, the result of measuring the discharge pressure applied to the coating liquid is obtained, and the discharge pressure measurement data 99 is stored in the storage unit. (93) is remembered. This discharge pressure measurement data 99 indicates the time and the value of the discharge pressure measured at that time in association with each other.

In step S102, the pressure evaluation unit 913 evaluates the time change of the discharge pressure indicated by the discharge pressure measurement data 99 according to predetermined evaluation criteria. As this evaluation item will be described later, a predetermined feature value is extracted from the change over time of the discharge pressure indicated by the discharge pressure measurement data 99, and the change over time of the discharge pressure is evaluated based on this feature value. Next, each evaluation item for evaluating the time change of the discharge pressure indicated by the discharge pressure measurement data 99 will be described in detail.

5 is a diagram for explaining each period used for evaluation of the discharge pressure. In FIG. 5 , a change in the discharge pressure over time is schematically shown in a graph in which the horizontal axis represents the time and the vertical axis represents the discharge pressure. In addition, the notation of such a graph is the same also in each figure shown next. In the example of FIG. 5 , the discharge of the coating liquid from the nozzle 71 starts before the discharge of the coating liquid from the nozzle 71 and after the discharge of the coating liquid from the nozzle 71 is finished (that is, before and after the discharge period Tt). Pressure measurement data 99 is acquired. In addition, in this example, the discharge pressure at the time ta at which the discharge of the coating liquid from the nozzle 71 is started and the discharge pressure at the time te at which the discharge of the coating liquid from the nozzle 71 is finished are It is the initial pressure (Pi). However, it cannot be said that each pressure at the start and end of discharge always coincides with the initial pressure Pi.

As shown in Fig. 5, the discharge period Tt can be divided into four periods Ta, Tb, Tc, and Td. Details of the rising period Ta, the transition period Tb, the steady period Tc and the falling period Td are as follows.

The rising period Ta is the time ta at which the coating liquid supply mechanism 8 starts discharging the coating liquid from the nozzle 71 (that is, the coating liquid supply mechanism 8 stops the movement of the operating disk portion 816). This is the period from the start time ta) to the time tb when the discharge pressure reaches the target pressure Pt. That is, when discharge of the coating liquid from the nozzle 71 starts at time ta, the discharge pressure increases from the initial pressure Pi to the target pressure Pt between the time ta and the time tb.

The transition period Tb is a period from time tb to time tc passing through a predetermined vibration damping period. This vibration damping period is a period required for the time change of the discharge pressure to be stable, and is set, for example, by a user's input operation to the UI 95 and stored in the storage unit 93.

The steady period Tc is from time tc to time td at which the coating liquid supply mechanism 8 starts to reduce the discharge pressure (that is, the coating liquid supply mechanism 8 moves from the target speed of the operating disc portion 816). This is the period until the time td) at which the deceleration starts. That is, the coating liquid supply mechanism 8 moves the operation disk part 816 at a constant speed between the time tc and the time td, and starts deceleration of the operation disk part 816 at the time td. Also, in the steady period Tc, the discharge pressure is basically stable at the target pressure Pt. However, even in the steady period Tc, the time change of the discharge pressure includes minute oscillations, and the discharge pressure becomes larger or smaller than the target pressure Pt.

In addition, the constant pressure period Tbc is composed of the transition period Tb and the steady period Tc. That is, the constant pressure period Tbc is a period between time tb and time td.

The lowering period Td is the time te at which the coating liquid supply mechanism 8 finishes discharging the coating liquid from the nozzle 71 from the time td (that is, the coating liquid supply mechanism 8 operates the disc 816 ) is the period until the time te) stops. That is, the discharge pressure decreases to the initial pressure Pi between the time td and the time te, and the discharge of the coating liquid from the nozzle 71 stops at the time te.

Fig. 6 is a diagram schematically showing an example of an operation performed by a pressure evaluation unit for changes in discharge pressure over time. As shown in FIG. 6 , the pressure evaluation unit 913 calculates the one-time derivative D1 of the change in the discharge pressure over time by differentiating the change in the discharge pressure over time. Further, the pressure evaluation unit 913 calculates the second derivative D2 of the time change of the discharge pressure by differentiating the first derivative D1 of the time change of the discharge pressure with time. In addition, the pressure evaluation unit 913, each of the following

MAE(α, β)=(1/n)·(Σ|α-β|)

RMSE(α, β)=((1/n)·(Σ(α-β) ² )) ^1/2

n = number of data

Based on , the mean absolute error MAE and the root mean square error RMSE are calculated.

Fig. 7 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv1. The evaluation items in FIG. 7 are a trapezoidal waveform having an amplitude corresponding to the difference between the average value of the discharge pressure in the steady period Tc (ie, the steady pressure Pm) and the initial pressure Pi, and the discharge pressure measurement data ( Based on the error (ideal trapezoidal absolute error) of 99), the temporal change of the discharge pressure indicated by the discharge pressure measurement data 99 is evaluated.

Specifically, during the rising period Ta, a linear regression analysis is performed on the time change of the discharge pressure between a predetermined lower standard pressure and a predetermined upper standard pressure greater than the lower standard pressure, and a rising regression line (Lr_R) is calculated. This rising regression line Lr_R increases linearly from the initial pressure Pi to the steady pressure Pm between the time t11 and the time t12.

Similarly, during the falling period Td, a linear regression analysis is performed on the time change of the discharge pressure between the upper reference pressure and the lower reference pressure, and a falling regression line Lr_F is calculated. This descending regression line Lr_F linearly decreases from the normal pressure Pm to the initial pressure Pi between the time t13 and the time t14.

In addition, the lower reference pressure and the upper reference pressure are pressures greater than the initial pressure Pi and less than the target pressure Pt, and are set by, for example, an input operation to the UI 95 by the user, and the storage unit 93 ) is remembered. In this example, the lower reference pressure is the pressure obtained by adding the pressure of 20% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the upper reference pressure is the initial pressure ( It is the pressure obtained by adding the pressure of 80% of the absolute value of the difference between Pi) and the target pressure (Pt) to the initial pressure (Pi).

In addition, an approximation straight line Lr_s at the start is set for the section from time ta to time t11. The approximation straight line Lr_s at this start is a straight line with zero inclination indicating the initial pressure Pi. That is, the starting approximation straight line Lr_s is a straight line connecting the starting point of ejection of the coating liquid from the nozzle 71 (time ta) to the starting point of the rising regression line Lr_R. Depending on the state (slope) of the regression line, time t11 may be before time ta, and time t12 may be after time tb. As a result, when t11 < ta, the approximate straight line Lr_s at the start is omitted.

Further, for the section from time t14 to time te, an approximate straight line Lr_e at the end is set. The approximation straight line Lr_e at the end of this is a straight line with zero inclination indicating the initial pressure Pi. That is, the end approximation line Lr_e is a straight line connecting the end point of the falling regression line Lr_F to the end point of ejection of the coating liquid from the nozzle 71 (time te). In addition, when te < t14, the approximation straight line Lr_e at the end is omitted.

Further, a stationary straight line Lr_m is set for the section from time t12 to time t13. This stationary straight line Lr_m is a straight line with zero inclination representing the stationary pressure Pm. That is, the stationary straight line Lr_m is a straight line representing the steady pressure Pm connecting the end point (time t12) of the upward regression line Lr_R and the start point (time t13) of the downward regression line Lr_F.

In this way, an approximate waveform WF1 composed of a starting approximation line (Lr_s), an ascending regression line (Lr_R), a stationary line (Lr_m), a falling regression line (Lr_F), and an approximation line (Lr_e) at the end arranged in time series is calculated. Then, the pressure evaluation unit 913 determines the average absolute error MAE (ideal trapezoidal absolute error) between the discharge pressure measurement data 99 and the approximate waveform WF1 in the entire discharge period Tt from time ta to time te. , calculated as the characteristic quantity Fv1. Further, the pressure evaluation unit 913 normalizes the feature Fv1 to a range of 0 or more and 2 or less based on a predetermined threshold value Th1 (for example, 0.05). Specifically, the following expression

If Fv1<Th1, then Fv1=0

If Fv1≥Th1, Fv1=(Fv1+1-Th1)×c1

Based on , the feature amount Fv1 is converted into a normalized feature amount Fv1 (ie, the evaluation value V1). Here, the coefficient c1 is a standardization coefficient, and the feature variable Fv1 is preset to a value within the range of 2 or less (for example, 15).

According to the evaluation based on the characteristic amount Fv1 in FIG. 7 , when the time change of the discharge pressure in the entire discharge period Tt deviates greatly from the ideal shape (i.e., trapezoidal shape), a large score is obtained for this discharge pressure. (i.e. a bad rating).

Fig. 8 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv2. The evaluation items in FIG. 8 evaluate the smoothness of the rise of the discharge pressure. Specifically, curve regression analysis is performed on the time change of the discharge pressure between the lower reference pressure P2_l and the upper reference pressure P2_u greater than the lower reference pressure P2_l during the rising period Ta. and a rising regression curve Nr is calculated. This curve regression analysis is performed by quadratic curves.

The lower reference pressure P2_l is set to the initial pressure Pi. On the other hand, the upper reference pressure P2_u is a pressure higher than the lower reference pressure P2_l and lower than the target pressure Pt, and is set by, for example, input operation to the UI 95 by the user, and the storage unit 93 ) is remembered. In this example, the upper reference pressure P2_u is a pressure obtained by adding a pressure of 20% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi. This rising regression curve Nr increases from the lower reference pressure P2_l (initial pressure Pi) to the upper reference pressure P2_u between time t21 and time t22. Further, time t21 coincides with time ta, and time t22 is later than time ta and earlier than time tb.

In this way, the waveform WF2 composed of the rising regression curve Nr is calculated. Then, the pressure evaluation unit 913 calculates the root mean square error RMSE between the discharge pressure measurement data 99 and the waveform WF2 in the rising initial period (Ta_s) from the time t21 to the time t22 as the feature value Fv2 calculated as Further, the pressure evaluation unit 913 normalizes the characteristic variable Fv2 within a range of 0 or more and 2 or less based on a predetermined threshold value Th2 (for example, 0.05). Specifically, the following expression

If Fv2 < Th2, then Fv2 = 0

If Fv2≥Th2, then Fv2=2

Based on , the feature amount Fv2 is converted into a normalized feature amount Fv2 (ie, the evaluation value V2).

According to the evaluation based on the characteristic amount Fv2 in FIG. 8 , when an abnormality occurs in the discharge pressure immediately after the start of discharge due to the influence of the state before the start of discharge of the coating liquid from the nozzle 71, this discharge pressure A high score (i.e., a bad evaluation) can be given to In addition, the curve which can be used for curve regression analysis is not limited to a quadratic curve, and other curves, such as an exponential function, may be sufficient.

Fig. 9 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv3. The evaluation items in Fig. 9 evaluate whether or not the rise period Ta falls within a certain period. Specifically, the pressure evaluation unit 913 measures the length of the rising period Ta from the time ta to the time tb required for the discharge pressure to increase from the initial pressure Pi to the target pressure Pt (= tb- ta) is calculated as the characteristic quantity Fv3. Further, the pressure evaluation unit 913 normalizes the feature Fv3 within a range of 0 or more and 1 or less based on a predetermined threshold value Th3 (for example, 350 ms). Specifically, the following expression

If Fv3 < Th3, then Fv3 = 0

If Fv3≥Th3, then Fv2=1

Based on , the feature amount Fv3 is converted into a normalized feature amount Fv3 (ie, the evaluation value V3).

According to the evaluation based on the characteristic quantity Fv3 in FIG. 9 , a large score (namely, bad evaluation) can be given to the discharge pressure that takes time to rise to the target pressure Pt.

10A is a diagram for explaining evaluation items for evaluating the time change of discharge pressure based on the feature amount Fv4, and FIG. 10B is an example of the change over time of the discharge pressure judged to be unsuitable by the evaluation based on the feature amount Fv4. It is a figure that represents The evaluation items in FIG. 10A evaluate the presence or absence of an abnormality in the increase in discharge pressure. Specifically, the pressure evaluation unit 913 calculates the one-time differential D1 of the time change of the discharge pressure for the rising period Ta from the time ta to the time tb, and obtains the one-time differential waveform WF4.

Then, the pressure evaluation unit 913 obtains the number of times that the once-differentiated waveform WF4 crosses the predetermined threshold value Th4 as the characteristic amount Fv4 in the rising period Ta. In the example of FIG. 10A , the once-differential waveform WF4 and the threshold value Th4 (for example, 0.002) intersect at time t41 and time t42, respectively, and the number of crossings (feature amount Fv4) becomes two times. In addition, the pressure evaluation unit 913 normalizes the characteristic variable Fv4 within a range of 0 or more and 1 or less. Specifically, the following expression

If Fv4≤2, then Fv4=0

If Fv4>2, then Fv4=1

Based on , the feature amount Fv4 is converted into a standardized feature amount Fv4 (ie, evaluation value V4).

According to the evaluation based on the feature Fv4 of FIG. 10A, when a step occurs in the time change of the discharge pressure in the rising period Ta (for example, as shown in FIG. 10B), for this discharge pressure High scores (i.e., bad ratings) can be given.

11A is a diagram for explaining evaluation items for evaluating the time change of discharge pressure based on the feature amount Fv5, and FIG. 11B is an example of the change over time of the discharge pressure judged to be unsuitable by the evaluation based on the feature amount Fv5. It is a figure that represents The evaluation items in FIG. 11A evaluate the presence or absence of an abnormality in the increase in discharge pressure. Specifically, the pressure evaluation unit 913 calculates the double derivative D2 of the time change of the discharge pressure for the rising period Ta from the time ta to the time tb, and obtains the double differential waveform WF5.

And the pressure evaluation part 913 calculate|requires the frequency|count at which the absolute value of the twice-differentiated waveform WF5 crosses predetermined threshold value Th5 as a feature-value Fv5 in the rising period Ta. In the example of FIG. 11A , the absolute value of the twice-differentiated waveform WF5 and the threshold value Th5 (eg, 0.0002) intersect at times t51, t52, t53, and t54, respectively, and the number of crossings (feature amount Fv5) is 4 becomes a meeting In addition, the pressure evaluation unit 913 normalizes the characteristic variable Fv5 within a range of 0 or more and 1 or less. Specifically, the following expression

If Fv5=4, then Fv5=0

If Fv5≠4, then Fv5=1

Based on , the feature amount Fv5 is converted into a standardized feature amount Fv5 (ie, evaluation value V5).

According to the evaluation based on the feature Fv5 of FIG. 11A, when a step occurs in the time change of the discharge pressure in the rising period Ta (for example, as shown in FIG. 11B), for this discharge pressure High scores (i.e., bad ratings) can be given.

Fig. 12 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv6. The evaluation items in FIG. 12 evaluate whether the increase in discharge pressure is not stalling in the latter half. Specifically, the pressure evaluation unit 913 calculates the double derivative D2 of the time change of the discharge pressure for the rising period Ta from the time ta to the time tb, and obtains the double differential waveform WF6.

Then, the pressure evaluator 913 calculates, in the rising period Ta, the time T_1st when the double differential waveform WF6 becomes larger than the predetermined positive threshold value Th5, and the second differential waveform WF6 becomes a predetermined negative value. Each time (T_2nd) that becomes smaller than the threshold value (-Th5) of is obtained. Here, the positive threshold and the negative threshold have the same absolute value Th5 and have different signs. The absolute value (Th5) of such positive and negative threshold values is the same as that of the threshold value Th5 used in the evaluation by the above-mentioned feature amount Fv5. Then, the pressure evaluation unit 913 obtains the ratio of these times (= T_1st/T_2nd) as the feature amount Fv6. In addition, the pressure evaluation unit 913, the following equation

Fv6=｜1-Fv6｜

Based on , the feature quantity Fv6 is converted.

In addition, the pressure evaluation unit 913 normalizes the feature Fv6 converted in this way to a range of 0 or more and 2 or less using a predetermined threshold value Th6 (for example, 0.2). Specifically, the following expression

If Fv6 < Th6, then Fv6 = 0

If Fv6≥Th6, Fv6=f(Fv6)

f(γ)=4×γ-0.8

Based on , the feature amount Fv6 is converted into a standardized feature amount Fv6 (namely, the evaluation value V6). In addition, the function f(γ) with γ as a variable is not limited to this example and can be arbitrarily changed.

The conveyance speed of the substrate S to which the coating liquid is applied reaches the target speed without stalling even in the second half of the acceleration period. Therefore, it is suitable for the discharge pressure applied to the coating liquid to reach the target pressure Pt without stalling in the rising period Ta. On the other hand, according to the evaluation based on the characteristic variable Fv6 in FIG. 12, when the discharge pressure stalls during the rising period Ta, a large score (ie, bad evaluation) can be given to this discharge pressure.

Fig. 13 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv7. The evaluation items in FIG. 13 evaluate the sharpness of the change over time of the discharge pressure at the end of the rise. Specifically, linear regression analysis is performed on the time change of the discharge pressure between the lower reference pressure P7_l and the upper reference pressure P7_u greater than the lower reference pressure P7_l during the rising period Ta. Then, a rising end regression line (Lr) is calculated. Here, the lower reference pressure P7_l is a pressure obtained by adding a pressure of 80% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the upper reference pressure P7_u is , is the pressure obtained by adding the pressure of 90% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the discharge pressure is the lower standard between time t71 and time t72 It increases from the pressure P7_l to the upper reference pressure P7_u.

This rising and ending regression line Lr increases over time and reaches the steady pressure Pm (the average value of the discharge pressure during the steady period Tc) at time t73. In this way, the rising/ending regression line Lr is set for the section from time t71 to time t73. Further, the pressure evaluation unit 913 sets an extended straight line Lm having a zero slope indicating the normal pressure Pm between the time t73 and the time tb. As described above, the time tb is the time when the discharge pressure reaches the target pressure Pt, and corresponds to the end time of the rising period Ta. That is, this extending straight line Lm is set to extend from (the end point of) the rising end regression line Lr to the end point of the rising period Ta. In the case of tb < t73, the extension straight line Lm is omitted.

In this way, an approximate waveform WF7 composed of the ascending end regression line Lr and the extension line Lm arranged in time series is calculated. Then, the pressure evaluation unit 913 calculates the discharge pressure measurement data 99 during the rising end period Ta_e from the time t72 when the discharge pressure becomes 90% of the target pressure Pt to the time tb when it becomes 100%. A value representing the difference between ? and the approximate waveform WF7 is calculated as the feature amount Fv7. Specifically, a weighted reference time width Tw = t73-t72 is set. And, the sum of the weighted square root errors is

Fv7=(Σ(P_measure-WF7) ² × W) ^1/2

P_measure=discharge pressure measurement data (99)

W=1 in the range of time tb≤t73+2×Tw

W=w in the range of time tb＞t73+2×Tw

w is a weighting factor greater than 1, e.g. 10

is calculated based on

Further, the pressure evaluation unit 913 normalizes the feature Fv7 within a range of 0 or more and 2 or less based on a predetermined threshold value Th7 (for example, 0.6). Specifically, the following expression

If Fv7 < Th7, then Fv7 = 0

If Fv7≥Th7, then Fv7=Fv7/c7

c7 is any positive constant, for example 1.1

Based on , the feature amount Fv7 is converted into the standardized feature amount Fv7 (ie, the evaluation value V7).

According to the evaluation based on the characteristic variable Fv7 in FIG. 13 , when the momentum of the rise is weak and the change in the discharge pressure shows a rounded waveform over time, a large score (i.e., bad evaluation) can be given to this discharge pressure.

Fig. 14 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv8. The evaluation items in FIG. 14 evaluate the degree of overshoot that occurs when the discharge pressure rises. Specifically, the pressure evaluation unit 913 obtains the sign (positive/negative) of the second derivative D2 of the discharge pressure at time t81 when the discharge pressure reaches the maximum value Pmax. Then, the pressure evaluation unit 913 calculates time t82 at which the sign of the second derivative D2 of the discharge pressure is switched twice from the sign at time t81. Then, the time change of the discharge pressure in the initial vibration period (Tb_s) from the time t81 to the time t82 is evaluated.

Specifically, the minimum value (P8min) of the time change of the discharge pressure in this initial oscillation period (Tb_s) is obtained, and the pressure of the smaller one of the normal pressure (Pm) and the pressure (P8min) is the target pressure (Pg). ) is selected. And, the difference between the maximum pressure (Pmax) and the target pressure (Pg), that is, the following equation

Fv8=Pmax-Pg

Based on , the feature quantity Fv8 is calculated.

In addition, the pressure evaluation unit 913 normalizes the feature Fv8 to a range of 0 or more and 2 or less using a predetermined threshold value Th8 (eg, 0.035). Specifically, the following expression

If Fv8 < Th8, then Fv8 = 0

If Fv8≥Th8, then Fv8=Fv8/c8

c8 is any positive constant, for example 0.12

Based on , the feature amount Fv8 is converted into a standardized feature amount Fv8 (ie, evaluation value V8).

According to the evaluation based on the characteristic variable Fv8 in FIG. 14, when the momentum of the increase is strong and the change in the discharge pressure over time indicates a large overshoot, a large score (i.e., a bad evaluation) can be given to this discharge pressure. there is.

Fig. 15 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv9. The evaluation items in FIG. 15 evaluate the stability of the time change of the discharge pressure in the transition period Tb. Specifically, the pressure evaluation unit 913 calculates the discharge pressure in the transition period Tb and the normal pressure Pm, which is the average value of the discharge pressure in the steady period Tc, by the following formula.

Fv9=RMSE(P_measure, Pm)

P_measure=discharge pressure measurement data (99)

Based on , the root mean square error RMSE (P_measure, Pm) is calculated as the feature amount Fv9.

In addition, the pressure evaluation unit 913 normalizes the characteristic variable Fv9 within a range of 0 or more and 2 or less. Specifically, the following expression

Fv9=Fv9/c9

c9 is any positive constant, for example 0.04

Based on , the feature amount Fv9 is converted into a standardized feature amount Fv9 (ie, evaluation value V9).

According to the evaluation based on the characteristic variable Fv9 in FIG. 15, when the time change of the discharge pressure indicates ringing in the transition period Tb, a large score (i.e., a bad evaluation) can be given to this discharge pressure. there is.

Fig. 16 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv10. The evaluation items in FIG. 16 evaluate the stability of the time change of the discharge pressure in the constant pressure period Tbc. Specifically, the pressure evaluation unit 913 obtains the maximum value Pmax and minimum value P10min of the discharge pressure in the constant pressure period Tbc. Then, the pressure evaluation unit 913 calculates the difference between the maximum pressure Pmax and the minimum pressure P10min in the constant pressure period Tbc, that is, the following equation

Fv10=Pmax-P10min

Based on , the characteristic quantity Fv10 is calculated.

In addition, the pressure evaluation unit 913 normalizes the characteristic variable Fv10 within a range of 0 or more and 2 or less using a threshold value Th10 (for example, 0.12). Specifically, the following expression

If Fv10<Th10, then Fv10=0

If Fv10≥Th10, then Fv10=Fv10/Th10

Based on this, the feature amount Fv10 is converted into the standardized feature amount Fv10 (ie, the evaluation value V10).

According to the evaluation based on the characteristic quantity Fv10 in FIG. 16 , when the time change of the discharge pressure shows a large variation in the steady period Tc, which has a large influence on the film thickness of the coating liquid, a large score for this discharge pressure ( i.e. a bad rating).

Fig. 17 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic quantity Fv11. The evaluation items in FIG. 17 evaluate the straightness of the time change of the discharge pressure in the rising period Ta. Specifically, in the rising period Ta, from the time t111 when the discharge pressure becomes the lower reference pressure P11_l to the time t113 when the discharge pressure becomes the upper reference pressure P11_u greater than the lower reference pressure P11_l. The pressure rise period (Tar) of is obtained. Here, the lower reference pressure P11_l is the pressure obtained by adding a pressure of 20% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the upper reference pressure P11_u is , is the pressure obtained by adding the pressure of 80% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the discharge pressure is the lower standard between time t111 and time t113 It increases from the pressure P11_l to the upper reference pressure P11_u.

Further, the pressure evaluation unit 913 obtains specific data Dm that satisfies a predetermined condition from among the discharge pressure measurement data 99 between the lower reference pressure P11_l and the upper reference pressure P11_u. These predetermined conditions will be described in detail later.

Among the discharge pressure measurement data 99, one measurement data between the lower reference pressure P11_l and the upper reference pressure P11_u is selected as the candidate data Dc. Then, linear regression analysis is performed on the temporal change of the discharge pressure between the measurement data Dl representing the lower reference pressure P11_l and the candidate data Dc, and a regression line obtained is an approximate straight line Lr_1. In addition, linear regression analysis is performed on the temporal change of the discharge pressure between the measurement data Du representing the upper reference pressure P11_u and the candidate data Dc, and a regression line obtained is an approximate straight line Lr_2. Further, in the section between the measured data Dl and the candidate data Dc, the root mean square error RMSE (P_measure, Lr1) of the time change of the discharge pressure and the approximate straight line Lr_1 is obtained. Similarly, in the section between the candidate data Dc and the measured data Du, the root mean square error RMSE (P_measure, Lr2) of the time change of the discharge pressure and the approximate straight line Lr_2 is obtained. Here, P_measure represents the discharge pressure measurement data 99.

In addition, these sums are

Er=RMSE(P_measure, Lr1)+RMSE(P_measure, Lr2)

is saved according to Then, among the discharge pressure measurement data 99, the candidate data Dc for which the sum Er is the minimum is specified as the specific data Dm.

Then, as K1 and K2 are the respective slopes of the approximation line Lr_1 and Lr_2 obtained for the specific data Dm, the feature quantity Fv11 is expressed by the following expression

If K1 > K2, Fv11 = 1-K1/K2

If K1≤K2, then Fv11=1-K2/K1

is calculated based on

Further, the pressure evaluation unit 913 normalizes the feature Fv11 within a range of 0 or more and 1 or less based on a predetermined threshold Th11 (eg, 0.25). Specifically, the following expression

If Fv11<Th11, then Fv11=0

If Fv11≥Th11, Fv11=f(Fv11)

f(γ)=4×γ-1

Based on this, the feature amount Fv11 is converted into the normalized feature amount Fv11 (ie, the evaluation value V11). In addition, the function f(γ) with γ as a variable is not limited to this example and can be arbitrarily changed.

According to the evaluation based on the characteristic variable Fv11 in FIG. 17 , when the discharge pressure shows a time change with poor straightness in the rising period Ta, a large score for this discharge pressure (that is, a bad score) evaluation) can be given.

Fig. 18 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic variable Fv12. The evaluation items in FIG. 18 evaluate the sharpness of the change over time of the discharge pressure at the end of the rise. Specifically, linear regression analysis is performed on the time change of the discharge pressure between the lower reference pressure P12_l and the upper reference pressure P12_u greater than the lower reference pressure P12_l during the rising period Ta. Then, a rising end regression line (Lr) is calculated. Here, the lower reference pressure P12_l is a pressure obtained by adding a pressure of 70% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the upper reference pressure P12_u is , is the pressure obtained by adding the pressure of 90% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the discharge pressure is the lower standard between the time t121 and the time t122 It increases from the pressure P12_l to the upper reference pressure P12_u.

This rising and ending regression line Lr increases over time and reaches the target pressure Pt at time t123. In this way, for the section from time t121 to time t123, a rising/ending regression line Lr is set. Further, the pressure evaluator 913 sets an extended straight line Lm having a zero slope indicating the target pressure Pt between the time t123 and the time tb. As described above, the time tb is the time when the discharge pressure reaches the target pressure Pt, and corresponds to the end time of the rising period Ta. That is, this extending straight line Lm is set to extend from (the end point of) the rising end regression line Lr to the end point of the rising period Ta. In the case of tb<t123, the extension straight line Lm is omitted.

In this way, the approximate waveform WF12 composed of the ascending end regression line Lr and the extension line Lm arranged in time series is calculated. Then, the pressure evaluation unit 913 calculates the discharge pressure measurement data 99 during the rising end period Ta_e from the time t122 when the discharge pressure becomes 90% of the target pressure Pt to the time tb when it becomes 100%. and the approximate waveform WF12, a value representing the difference is calculated as the feature amount Fv12. Specifically, the square root error sum is expressed as

Fv12=(Σ(P_measure-WF12) ² ) ^1/2

P_measure=discharge pressure measurement data (99)

calculated based on

Further, the pressure evaluation unit 913 normalizes the feature Fv12 within a range of 0 or more and 1 or less based on a predetermined threshold value Th12 (eg, 0.8). Specifically, the following expression

If Fv12<Th12, then Fv12=0

If Fv12≥Th12, Fv12=f(Fv12)

f(γ)=5×γ-4

Based on , the feature amount Fv12 is converted into the normalized feature amount Fv12 (ie, the evaluation value V12). In addition, the function f(γ) with γ as a variable is not limited to this example and can be arbitrarily changed.

According to the evaluation based on the characteristic variable Fv12 in FIG. 18, when the momentum of the increase is weak and the change in the discharge pressure over time shows a round waveform in a general view, a large score (i.e., a bad evaluation) is given to this discharge pressure can do.

Fig. 19 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic variable Fv13. The evaluation items in FIG. 19 evaluate the sharpness of the change over time of the discharge pressure at the end of the rise. Specifically, linear regression analysis is performed on the time change of the discharge pressure between the lower reference pressure P13_l and the upper reference pressure P13_u greater than the lower reference pressure P13_l during the rising period Ta. Then, a rising end regression line (Lr) is calculated. Here, the lower reference pressure P13_l is the pressure obtained by adding 90% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the upper reference pressure P13_u is , is the pressure obtained by adding the pressure of 95% of the absolute value of the difference between the initial pressure Pi and the target pressure Pt to the initial pressure Pi, and the discharge pressure is the lower standard between the time t131 and the time t132 It increases from the pressure P13_l to the upper reference pressure P13_u.

This rising and ending regression line Lr increases over time and reaches the target pressure Pt at time t133. In this way, for the section from time t131 to time t133, a rising/ending regression line Lr is set. Further, the pressure evaluator 913 sets an extended straight line Lm having a zero slope indicating the target pressure Pt between the time t133 and the time tb. As described above, the time tb is the time when the discharge pressure reaches the target pressure Pt, and corresponds to the end time of the rising period Ta. That is, this extending straight line Lm is set to extend from (the end point of) the rising end regression line Lr to the end point of the rising period Ta. In the case of tb<t133, the extension straight line Lm is omitted.

In this way, the approximate waveform WF13 composed of the ascending end regression line Lr and the extension line Lm arranged in time series is calculated. Then, the pressure evaluator 913 calculates the discharge pressure measurement data 99 during the rising end period Ta_e from the time t132 when the discharge pressure becomes 95% of the target pressure Pt to the time tb when it becomes 100%. and the approximate waveform WF13, a value representing the difference is calculated as the feature amount Fv13. Specifically, the square root error sum is expressed as

Fv13=(Σ(P_measure-WF13) ² ) ^1/2

P_measure=discharge pressure measurement data (99)

calculated based on

Further, the pressure evaluation unit 913 normalizes the feature Fv13 within a range of 0 or more and 1 or less based on a predetermined threshold value Th13 (eg, 0.1). Specifically, the following expression

If Fv13<Th13, then Fv13=0

If Fv13≥Th13, Fv13=f(Fv13)

f(γ)=(10×γ-1)/3

Based on this, the feature amount Fv13 is converted into the standardized feature amount Fv13 (ie, the evaluation value V13). In addition, the function f(γ) with γ as a variable is not limited to this example and can be arbitrarily changed.

According to the evaluation based on the characteristic variable Fv13 in FIG. 19 , when the momentum of the rise is weak and the temporal change of the discharge pressure shows a roundish waveform when viewed locally, a large score (i.e., bad evaluation) is given to this discharge pressure. can be granted

Fig. 20 is a diagram for explaining evaluation items for evaluating a change in discharge pressure over time based on the characteristic amount Fv14. The evaluation items in FIG. 20 evaluate the degree of overshoot that occurs when the discharge pressure rises. Specifically, the pressure evaluation unit 913 obtains the sign (positive/negative) of the second derivative D2 of the discharge pressure at time t141 when the discharge pressure reaches the maximum value Pmax. Then, the pressure evaluation unit 913 calculates time t142 at which the sign of the second derivative D2 of the discharge pressure is switched twice from the sign at time t141. Then, the time change of the discharge pressure in the initial oscillation period (Tb_s) from the time t141 to the time t142 is evaluated.

Specifically, the minimum value (P14min) of the time change of the discharge pressure in this initial oscillation period (Tb_s) is obtained. Then, the difference between the maximum pressure (Pmax) and the normal pressure (Pm) is calculated using the following formula.

OVER=Pmax-Pm

It is calculated based on, and the difference between the normal pressure (Pm) and the minimum pressure (P14min) is calculated using the following formula

UNDER=Pm-P14min

calculated based on And, the sum of OVER and UNDER, that is, the following expression

Fv14=OVER+UNDER

Based on , the feature quantity Fv14 is calculated.

Further, the pressure evaluation unit 913 normalizes the feature Fv14 within a range of 0 or more and 1 or less using a predetermined threshold value Th14 (eg, 0.01). Specifically, the following expression

If Fv14<Th14, Fv14=0

If Fv14≥Th14, then Fv14=f(Fv14)

f(γ)=(100×γ-1)/9

Based on this, the feature amount Fv14 is converted into the standardized feature amount Fv14 (ie, the evaluation value V14).

According to the evaluation based on the feature variable Fv14 in Fig. 20, the error from the target pressure Pt is calculated for each point of overshoot and ringback (a phenomenon in which the pressure decreases due to rebound after a sudden rise). Therefore, in the case where the change in the discharge pressure over time indicates a large overshoot or ringback, a large score (i.e., a bad evaluation) can be given to the discharge pressure.

The above is the description of each evaluation item that can be used to evaluate the change in discharge pressure over time, and the feature quantities Fv1 to Fv14 and evaluation values V1 to V14 extracted from each evaluation item. In addition, in the evaluation of the measurement result in step S102, the evaluation by all the evaluation items described above is not always performed, and the number of evaluation items to be executed changes depending on the appropriateness of the change in the discharge pressure over time. Next, this point is demonstrated.

Fig. 21 is a flow chart showing details of measurement result evaluation, and Fig. 22 is a diagram schematically showing an example of an operation performed according to the flowchart in Fig. 21 . The evaluation of the measurement results in FIG. 21 is performed by the pressure evaluation unit 913 . In this measurement result evaluation, N evaluation steps (N is an integer greater than or equal to 2, N = 3 in this example) are prepared, and these N evaluation steps are sequentially executed.

As shown in Fig. 22, evaluation items based on the feature amount Fv1 shown in Fig. 7 are assigned to the first (I = 1) evaluation step. Regarding the second (I = 2) evaluation step, evaluation items based on the feature quantities Fv2 to Fv10 shown in Figs. 8 to 16 are allocated. Regarding the third evaluation step (I = 3), evaluation items based on the feature quantities Fv11 to Fv14 shown in Figs. 17 to 20 are allocated. Then, in each evaluation step I, the time change of the discharge pressure is evaluated based on the assigned evaluation items. In addition, I is a number for identifying an evaluation step, and is an integer of 1 or more and N or less.

In this way, different evaluation items are assigned to the N evaluation steps. Further, final evaluation values Vf in mutually different ranges (ranges) are assigned to the N evaluation steps. Therefore, as described later, the final evaluation value Vf within the range assigned to the I-th evaluation step is given to the discharge pressure evaluated by the I-th evaluation step.

As shown in Fig. 21, in step S201, I is reset to zero, and in step S202, I is incremented by one. In step S203, the discharge pressure is evaluated based on the evaluation items of the I-th evaluation step. Here, since I=1, the characteristic variable Fv1 is calculated and the evaluation value V1 is obtained. And this evaluation value V1 becomes the evaluation result of the 1st evaluation step.

In step S204, it is determined whether I=N. Here, since I &lt; N, the process proceeds to step S205. In step S205, based on the evaluation result in step S203, it is judged whether the time change of the discharge pressure is good. If the evaluation result (evaluation value V1) is equal to or greater than the predetermined distribution threshold At1, it is judged as defective (NO) in step S205, and the evaluation by the second to third evaluation steps (ie, evaluation steps from I to the subsequent evaluation steps) is performed. It is omitted, and the process proceeds to step S206.

In step S206, the number (I) of the completed evaluation steps and the final evaluation value Vf according to the evaluation result in the I-th evaluation step are determined. In this example, since only the first evaluation step has been executed, according to the example of FIG. 22, the minimum evaluation value (= 20) of the range for the first evaluation step is evaluated in the first evaluation step. The value obtained by adding the result (evaluation value V1) is determined as the final evaluation value Vf. Accordingly, the final evaluation value Vf within the range 20 to 40 set for the first evaluation step is given to the time change of the discharge pressure.

Alternatively, if the evaluation result (evaluation value V1) in step S204 is less than the distribution threshold At1, it is judged as good (YES) in step S205, returns to step S202, and I is incremented by one.

Then, in step S203, the discharge pressure is evaluated based on the evaluation items of the I-th evaluation step. Here, since I=2, the characteristic quantities Fv2 to Fv10 are calculated, and the evaluation values V2 to V10 are obtained. And the sum of the evaluation values V2-V10 becomes the evaluation result of the 2nd evaluation step. That is, the sum of the evaluation values of the evaluation items belonging to the I-th evaluation step becomes the evaluation result in the I-th evaluation step.

In step S204, it is determined whether I=N. Here, since I &lt; N, the process proceeds to step S205. In step S205, based on the evaluation result in step S203, it is judged whether the time change of the discharge pressure is good. If the evaluation result (sum of evaluation values V2 to V10) is equal to or greater than the predetermined distribution threshold At2, it is judged as defective (NO) in step S205, skipping the evaluation in the third evaluation step, and proceeding to step S206.

In step S206, the number (I) of the completed evaluation steps and the final evaluation value Vf according to the evaluation result in the I-th evaluation step are determined. In this example, since the first and second evaluation steps have been completed, according to the example of FIG. 22, the minimum evaluation value (= 4) of the range for the second evaluation step The value obtained by adding the evaluation results (the sum of the evaluation values V2 to V10) is determined as the final evaluation value Vf. Accordingly, the final evaluation value Vf within the range 4 to 20 set for the second evaluation step is given to the time change of the discharge pressure.

Alternatively, if the evaluation result (the sum of the evaluation values V2 to V10) in step S205 is less than the distribution threshold At2, it is judged as good (YES) in step S205, returns to step S202, and I is incremented by 1. .

Then, in step S203, the discharge pressure is evaluated based on the evaluation items of the I-th evaluation step. Here, since I = 3, feature quantities Fv11 to Fv14 are calculated, and evaluation values V11 to V14 are obtained. And, similar to the above, the sum of evaluation values V11-V14 becomes the evaluation result of the 3rd evaluation step.

In step S204, it is determined whether I=N. Here, since I=N, the process proceeds to step S206. In step S206, the number (I) of the completed evaluation steps and the final evaluation value Vf according to the evaluation result in the I-th evaluation step are determined. In this example, since the first to third evaluation steps have been completed, according to the example of FIG. 22 , the minimum evaluation value (= 0) of the third evaluation step is set to the evaluation result of the third evaluation step ( A value obtained by adding the evaluation values V11 to V14) is determined as the final evaluation value Vf. Accordingly, the final evaluation value Vf within the range (0 to 4) set for the third evaluation step is given to the time change of the discharge pressure.

In the embodiment described above, there are provided N evaluation steps from the 1st to the Nth, each of which evaluates the discharge pressure by different evaluation items, and the evaluation steps from the 1st to the Nth can be executed in sequence. . However, when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation criteria related to the I-th evaluation step (“YES” in step S205), discharge according to the evaluation criteria related to the (I+1)-th evaluation step While the pressure evaluation is performed, if the discharge pressure is judged to be inappropriate in the evaluation by the evaluation items related to the I-th evaluation step (NO in step S205), the evaluation in the order following the I-th evaluation step Evaluation of the discharge pressure by step is not performed (i.e. omitted). That is, when the discharge pressure is sequentially evaluated by the first to Nth evaluation steps, if the discharge pressure is judged to be inappropriate in one of the evaluation steps, the evaluation in the subsequent evaluation steps is not executed. Accordingly, it is possible to evaluate the discharge pressure applied to the coating liquid in order to discharge the coating liquid from the nozzle 71 in a reasonable time depending on whether the discharge pressure is appropriate.

In addition, among the N evaluation steps, different final evaluation values Vf (evaluation values) are given to the discharge pressure according to the difference in the number (I) of the evaluation steps in which the discharge pressure was evaluated. In such a configuration, a better final evaluation value Vf can be given to a discharge pressure having a greater number of evaluation steps performed, and it becomes possible to give an appropriate final evaluation value Vf to the discharge pressure depending on whether or not the discharge pressure is appropriate.

Further, in the first evaluation step, the discharge period Tt from the start of the discharge of the coating liquid (processing liquid) from the nozzle 71 to the end of the discharge of the coating liquid from the nozzle 71 is 1 period, period to be evaluated), the discharge pressure is measured (step S101). Then, the ideal trapezoidal absolute error of the time change of the discharge pressure in the entire discharge period Tt is extracted as a feature amount Fv1 (first feature amount, total feature amount), and based on this feature amount Fv1, the discharge pressure Time change is evaluated (step S102). This makes it possible to reflect the appropriateness of the discharge pressure in the entire discharge period Tt from the start of the discharge of the coating liquid from the nozzle 71 to the end thereof in the evaluation of the discharge pressure.

Moreover, as shown in FIG. 7 , the characteristic quantity Fv1 is the approximate waveform WF1 (first approximate waveform) approximating the time change of the discharge pressure in the entire discharge period Tt and the It represents the difference in time change of the discharge pressure. In such a configuration, based on the approximate waveform WF1 for the time change of the discharge pressure in the entire discharge period (Tt) from the start to the end of the discharge of the coating liquid from the nozzle 71, the discharge period (Tt) The discharge pressure in the whole can be evaluated appropriately.

In particular, the approximate waveform WF1 is

After the start of the discharge of the coating liquid from the nozzle 71, by linearly approximating the time change of the discharge pressure that increases over time, from the initial pressure Pi (discharge start pressure) to the peak greater than the initial pressure Pi An ascending regression line Lr_R (rising approximation straight line) that linearly increases with time to the pressure Pm;

An approximation line Lr_s at the start indicating the initial pressure Pi, which is set between the starting point of discharge of the coating liquid from the nozzle 71 (time ta) and the rising regression line Lr_R,

・Before the end of the discharge of the coating liquid from the nozzle 71, by linearly approximating the time change of the discharge pressure that decreases with the lapse of time, from the normal pressure Pm to the initial pressure Pi smaller than the normal pressure Pm ( A descending regression line (Lr_F) (descent approximation straight line) that linearly decreases with time to the discharge end pressure);

An approximation line Lr_e at the end, which is set between the descending regression line Lr_F and the end point (time te) of the discharge of the coating liquid from the nozzle 71 and indicates the initial pressure Pi (discharge end pressure),

A stationary straight line (Lr_m) representing the steady pressure (Pm) by connecting each of the ascending regression line (Lr_R) and the descending regression line (Lr_F)

have In such a configuration, the time change of the discharge pressure in the entire discharge period Tt from the start to the end of the discharge of the coating liquid from the nozzle 71 is approximated by a trapezoidal waveform, and the entire discharge period Tt The discharge pressure in can be evaluated appropriately.

Further, in the second evaluation step, the characteristic quantities Fv2 to Fv10 (second characteristic quantity) of the time change of the discharge pressure in the period shorter than the discharge period Tt (second period) during the discharge period Tt. This is extracted, and the time change of the discharge pressure is evaluated based on the characteristic quantities Fv2 to Fv10 (step S102). In this configuration, the discharge pressure can be evaluated with high accuracy based on the time change of the discharge pressure in a period shorter than the discharge period Tt from the start of the discharge of the coating liquid from the nozzle 71 to the end.

In addition, in the evaluation items shown in FIG. 8 , the discharge pressure in a predetermined rising initial period Ta_s (second period) from the start of discharge of the coating liquid from the nozzle 71 is evaluated. Through this rising initial period Ta_s, the discharge pressure increases over time, and the rising regression curve Nr of the time change of the discharge pressure in the rising initial period Ta_s and the rising initial period Ta_s A characteristic variable Fv2 (second characteristic variable) representing the difference in time change of the discharge pressure in the chamber is extracted. In such a structure, the discharge pressure can be evaluated taking into account the time change of the discharge pressure immediately after the start of the coating liquid from the nozzle 71.

In addition, the discharge pressure in the rising period Ta (second period) from the start of the discharge of the coating liquid from the nozzle 71 until the discharge pressure increases to the target pressure Pt (predetermined pressure) is It is evaluated. In such a structure, the discharge pressure can be evaluated by considering the time change of the discharge pressure in the rising period Ta.

Specifically, in the evaluation items shown in FIG. 9 , the length of the rising period Ta is extracted as a feature amount Fv2 (second feature amount). In this configuration, the discharge pressure can be evaluated by considering the rate of increase in the discharge pressure.

In addition, in the evaluation items shown in FIGS. 10A and 10B, the number of times that one time differential D1 of the time change of the discharge pressure crosses the predetermined threshold value Th4 in the rising period Ta is the characteristic variable Fv4 (second characteristic variable ) is extracted as With such a configuration, the discharge pressure can be evaluated by taking into account the smoothness of the temporal change of the discharge pressure in the rising period.

In addition, in the evaluation items shown in FIG. 11 , in the rising period Ta, the number of times the absolute value of the second derivative D2 of the time change of the discharge pressure crosses the predetermined threshold value Th5 is the characteristic variable Fv5 (second characteristic variable ) is extracted as In such a configuration, the discharge pressure can be evaluated by taking into account the smoothness of the temporal change of the discharge pressure in the rising period Ta.

In addition, in the evaluation items shown in FIG. 12 , in the rising period Ta, the time T_1st at which the second derivative D2 of the time change of the discharge pressure becomes larger than the predetermined positive threshold value Th5 and the time change of the discharge pressure The ratio of the time (T_2nd) at which the second derivative D2 of is smaller than the negative threshold value (-Th5) having the same absolute value as the positive threshold value is extracted as the feature quantity Fv6 (second feature quantity). In this configuration, the discharge pressure can be evaluated by taking into account the difference in the time change of the discharge pressure at the beginning and end of the rising period Ta.

Further, in the evaluation items shown in FIG. 13 , the discharge pressure in the rising end period Ta_e (second period) until the discharge pressure increases to the target pressure Pt (predetermined pressure) is evaluated. That is, the approximate waveform WF7 (rising end approximate waveform) approximating the time change of the discharge pressure in the rise end period Ta_e and the characteristic variable Fv7 representing the difference between the time change of the discharge pressure in the rise end period Ta_e (the second feature) is extracted. This approximate waveform WF7 is composed of a rising end regression line Lr (rising end approximate straight line) and an extended straight line Lm. The rising end regression line Lr overlaps with an approximation curve obtained by linearly approximating the time change of the discharge pressure that increases with time in the pressure range P7_l to P7_u smaller than the target pressure Pt, and increases linearly up to the normal pressure (Pm). The extension straight line Lm is set to extend from (the end time of) the rise end regression line Lr to the end point of the rise end period Ta_e, and represents the steady pressure Pm. In such a configuration, the discharge pressure can be evaluated by considering the degree of stalling of the discharge pressure at the end of the rising period Ta.

In addition, in the evaluation items shown in FIG. 14 , from the time when the discharge pressure reached the maximum value (Pmax) (time t81) to the time when the second derivative D2 of the time change of the discharge pressure crossed zero twice (time t82) The discharge pressure in the initial oscillation period Tb_s (second period) of is evaluated. Specifically, the minimum value (P8min) of the discharge pressure in the initial oscillation period (Tb_s) is obtained, and the pressure of the smaller one of the minimum value (P8min) and the steady pressure (Pm) and the maximum value (Pmax) of the discharge pressure The difference of is extracted as a feature amount Fv8 (second feature amount). In such a configuration, the discharge pressure can be evaluated taking into account the overshoot of the discharge pressure.

In addition, in the evaluation items shown in FIG. 15, the discharge pressure in the predetermined transition period Tb (second period) from the time point when the discharge pressure exceeds the target pressure Pt (predetermined pressure) (time tb) is evaluated. do. Specifically, the characteristic variable Fv9 (second characteristic variable) representing the difference in the discharge pressure in the rising period Ta with respect to the steady pressure Pm is extracted. In such a configuration, the discharge pressure can be evaluated by considering the stability of the discharge pressure after the discharge pressure reaches the target pressure Pt.

In addition, in the evaluation items shown in FIG. 16 , from the point at which the discharge pressure exceeds the target pressure Pt (predetermined pressure) (time tb), the discharge pressure decreases toward the end of the discharge of the coating liquid from the nozzle 71 The discharge pressure in the constant pressure period (Tbc) up to the time point (time td) at which the is started is evaluated. Specifically, the characteristic quantity Fv10 representing the difference between the maximum value (Pmax) and minimum value (P10min) of the discharge pressure in the constant pressure period (Tbc) is extracted. In such a configuration, the discharge pressure can be evaluated by considering the stability of the discharge pressure during the constant pressure period Tbc of the discharge pressure.

Further, in the third evaluation step, the characteristic quantities Fv11 to Fv14 (third characteristic quantity) of the time change of the discharge pressure in the period shorter than the discharge period Tt (third period) during the discharge period Tt. This is extracted, and the time change of the discharge pressure is evaluated based on the characteristic quantities Fv11 to Fv14 (step S102). In this configuration, the discharge pressure can be evaluated with high accuracy based on the time change of the discharge pressure in a period shorter than the discharge period Tt from the start of the discharge of the coating liquid from the nozzle 71 to the end.

In addition, in the evaluation items shown in Fig. 17, after the start of the discharge of the coating liquid from the nozzle 71, the discharge pressure is the time from the lower reference pressure P11_l (lower reference value) to the upper reference pressure P11_u (upper reference value). The discharge pressure in the pressure rising period Tar (third period), which increases with progress, is evaluated. Specifically, it is one measurement data of the discharge pressure measurement data 99 between the lower reference pressure P11_l and the upper reference pressure P11_u, and the interval between the lower reference pressure P11_l and one measurement data ( t111 to t112), the approximate straight line (Lr_1) obtained by linear regression for the time change of the discharge pressure and the root mean square error of the time change of the discharge pressure, and the interval between one measurement data and the upper reference pressure (P11_u) In (t112 to t113), one measured value is obtained in which the sum of the approximate straight line (Lr_2) obtained by linear regression for the time change of the discharge pressure and the root mean square error of the time change of the discharge pressure is minimized. In addition, the ratio of the slope (K1) of the straight line between the lower reference pressure (P11_l) and one measurement data and the slope (K2) of the straight line between one measurement data and the upper reference pressure (P11_u) is the characteristic variable Fv11 (th 3 feature). In such a configuration, the discharge pressure can be evaluated by considering the linearity of the increase in the discharge pressure.

Further, in the evaluation items shown in FIG. 18 , the discharge pressure in the rising end period Ta_e (third period) until the discharge pressure increases to the target pressure Pt (predetermined pressure) is evaluated. That is, the characteristic variable Fv12 representing the difference between the approximate waveform WF12 (approximate rise waveform) approximating the time change of the discharge pressure in the rise end period Ta_e and the time change of the discharge pressure in the rise end period Ta_e. (Third characteristic quantity) is extracted. Here, the rising end approximation waveform WF12 is composed of a rising end regression line Lr and an extension straight line Lm. The rising end regression line Lr overlaps with an approximation curve obtained by linearly approximating the time change of the discharge pressure that increases over time in the pressure range P12_l to P12_u smaller than the target pressure Pt, and increases linearly up to the target pressure (Pt). The extension straight line Lm extends from (the end time of) the rising end regression line Lr to the end point of the rising end period Ta_e, and indicates the target pressure Pt. In such a configuration, the discharge pressure can be evaluated by considering the degree of stalling of the discharge pressure at the end of the rising period Ta.

In addition, in the evaluation items shown in FIG. 19 , the discharge pressure in the rising end period Ta_e (third period) until the discharge pressure increases to the target pressure Pt (predetermined pressure) is evaluated. That is, the characteristic variable Fv13 representing the difference between the approximate waveform WF13 (approximate rise waveform) approximating the time change of the discharge pressure during the rise end period Ta_e and the time change of the discharge pressure during the rise end period Ta_e. (Third characteristic quantity) is extracted. Here, the rising end approximation waveform WF13 is composed of a rising end regression line Lr and an extension straight line Lm. The rising end regression line Lr overlaps with an approximation curve obtained by linearly approximating the time change of the discharge pressure that increases with time in the pressure range P13_l to P13_u smaller than the target pressure Pt, and increases linearly up to the target pressure (Pt). The extension straight line Lm extends from (the end time of) the rising end regression line Lr to the end point of the rising end period Ta_e, and indicates the target pressure Pt. In such a configuration, the discharge pressure can be evaluated by considering the degree of stalling of the discharge pressure at the end of the rising period Ta.

In addition, in the evaluation items shown in FIG. 20, from the time when the discharge pressure reached the maximum value (Pmax) (time t141) to the time when the two derivatives D2 of the time change of the discharge pressure crossed zero twice (time t142) The discharge pressure in the initial oscillation period Tb_s (third period) of is evaluated. Specifically, a value obtained by subtracting the normal pressure Pm from the maximum discharge pressure Pmax, and a value obtained by subtracting the minimum discharge pressure P14min in the initial oscillation period Tb_s from the normal pressure Pm. The sum of is extracted as the feature amount Fv14 (third feature amount). In such a configuration, the discharge pressure can be evaluated taking into account the overshoot of the discharge pressure.

As described above, in the above embodiment, the coating device 1 corresponds to an example of the "substrate processing device" of the present invention, the nozzle 71 corresponds to an example of the "nozzle" of the present invention, and the coating liquid supply mechanism ( 8) corresponds to an example of the "pressure applying unit" of the present invention, and the nozzle 71 and the coating liquid supply mechanism 8 cooperate to constitute an example of the "discharge device" of the present invention, and the pressure gauge 86 Corresponds to an example of the "measurement unit" of the present invention, the control unit 9 corresponds to an example of the "computer" and the "control unit" of the present invention, and the discharge pressure evaluation program 97 corresponds to the discharge pressure evaluation program of the present invention corresponds to an example of the present invention, the recording medium M corresponds to an example of the "recording medium" of the present invention, the coating liquid corresponds to an example of the "processing liquid" of the present invention, and the pressure measured by the pressure gauge 86 This corresponds to an example of "discharge pressure" of the present invention.

In addition, the discharge period Tt corresponds to an example of the "first period" of the present invention, the characteristic quantity Fv1 corresponds to an example of the "first characteristic quantity" of the present invention, and the approximate waveform WF1 corresponds to the "first period" of the present invention. 1 approximate waveform", the initial pressure Pi corresponds to an example of the "discharge start pressure" and "discharge end pressure" of the present invention, and the rising regression line Lr_R is the "rising approximate straight line" of the present invention Corresponds to an example of the "approximate straight line at start", the approximation line Lr_s at the start corresponds to an example of the "approximate straight line at start" of the present invention, and the descending regression line Lr_F corresponds to an example of the "approximate line descending" of the present invention , the approximate straight line at the end (Lr_e) corresponds to an example of the "approximate straight line at the end" of the present invention, and the stationary straight line (Lr_m) corresponds to an example of the "stationary straight line" of the present invention.

In addition, the rising initial period (Ta_s), the rising period (Ta), the rising end period (Ta_e), the initial oscillation period (Tb_s), the transition period (Tb), and the constant pressure period (Tbc) of the "second period" of the present invention. Corresponds to an example, the characteristic quantities Fv2 to Fv10 correspond to an example of the "second characteristic quantity" of the present invention, the initial period Ta_s corresponds to an example of the "initial rise period" of the present invention, and the regression curve (Nr ) corresponds to an example of the “regression curve” of the present invention, the rising period Ta corresponds to an example of the “rising period” of the present invention, and the rising end period Ta_e corresponds to the “rising end period” of the present invention Corresponds to an example, the approximate waveform WF7 corresponds to an example of the "rising end approximate waveform" of the present invention, the rising end regression line Lr corresponds to an example of the "rising end approximate straight line" of the present invention, and the extension straight line ( Lm) corresponds to an example of the "extended straight line" of the present invention, the initial oscillation period Tb_s corresponds to an example of the "initial oscillation period" of the present invention, and the steady period Tc corresponds to the "steady period" of the present invention , the transition period Tb corresponds to an example of the "transition period" of the present invention, and the constant pressure period Tbc corresponds to an example of the "constant pressure period" of the present invention.

Further, the pressure rise period (Tar), the rise end period (Ta_e), and the initial oscillation period (Tb_s) correspond to an example of the "third period" of the present invention, and the characteristic quantities Fv11 to Fv14 are the "third characteristic" of the present invention. amount”, the lower reference pressure P11_l corresponds to an example of the “lower reference value” of the present invention, the upper reference pressure P11_u corresponds to an example of the “upper reference value” of the present invention, and the pressure rise The period Tar corresponds to an example of the "pressure rising period" of the present invention, the rising end period Ta_e corresponds to an example of the "rising end period" of the present invention, and the approximate waveforms WF12 and WF13 correspond to the "pressure rising period" of the present invention. Corresponds to an example of the "rising end approximate waveform", the rising end regression line Lr corresponds to an example of the "rising end approximate straight line" of the present invention, and the extension straight line Lm corresponds to an example of the "extension straight line" of the present invention. and the initial oscillation period Tb_s corresponds to an example of the "initial oscillation period" of the present invention.

In addition, this invention is not limited to the above-mentioned embodiment, It is possible to make various changes other than what was mentioned above, as long as it does not deviate from the meaning. For example, in the above embodiment, the discharge characteristics are measured based on the pressure value detected by the pressure gauge 86 attached to the pipe 82, but the attachment position of the pressure gauge 86 is not limited to this, and the nozzle As long as it is a position where the pressure of the coating liquid supplied to (71) can be detected, the mounting position is arbitrary.

In addition, in the above embodiment, the bellows type pump 81 is used, but the type of pump is not limited to this, and for example, a syringe type pump using a piston (for example, Japanese Patent Laid-Open 2008- Publication No. 101510) may be used.

Further, in the above embodiment, the present invention is applied to the coating device 1 for supplying the coating liquid to the surface Sf of the substrate S in a state in which the substrate S is raised, but the subject matter to which the present invention is applied is not limited to this, and the present invention can be applied to all substrate processing techniques in which a predetermined process is performed by supplying a processing liquid to the upper surface of a substrate from a nozzle by supplying a processing liquid to a nozzle.

In addition, in the second evaluation step, it is not essential to evaluate the discharge pressure based on all of the above characteristic quantities Fv2 to Fv10, and the discharge pressure may be evaluated based on only some of these. Also in the third evaluation step, the discharge pressure may be similarly evaluated based on only a part of the above-described characteristic quantities Fv11 to Fv14.

Moreover, in calculating approximate waveform WF1 of FIG. 7, you may use the straight line with zero inclination which shows the target pressure Pt instead of the stationary straight line Lr_m.

In addition, it is not necessarily necessary to prepare all of the three evaluation steps. Therefore, among the first to third evaluation steps described above, only the first and second evaluation steps may be executed, or only the second and third evaluation steps may be executed, or only the first and third evaluation steps may be executed. can be configured to do so. Alternatively, an evaluation step of evaluating the discharge pressure with evaluation items different from the above three evaluation steps may be provided.

In addition, in obtaining the final evaluation value Vf, when taking the sum of each evaluation value (for example, V2 to V10, V11 to V14) in the corresponding evaluation step, different weighting coefficients are multiplied according to the evaluation values to obtain a weight may be granted.

In addition, instead of the characteristic variable Fv1 shown in Fig. 7, the characteristic variable Fv1_1 described in the following modified example may be calculated, and the time change of the discharge pressure may be evaluated based on this characteristic variable Fv1_1. Fig. 23 is a diagram for explaining each period used in a modification of the discharge pressure evaluation item, and Fig. 24 is a diagram for explaining a modification of the evaluation item for evaluating the change over time of the discharge pressure based on the feature amount Fv1_1. . Here, the differences between FIG. 23 and FIG. 5 will be mainly explained, and these common points will be marked with corresponding numerals, and explanations will be omitted appropriately. Similarly, differences between Fig. 24 and Fig. 7 described above will be mainly explained, and corresponding symbols are attached to these common points, and explanations are omitted appropriately.

As shown in Fig. 23, in the modified example of the evaluation item, the attention period Troi is used. This attention period Troi is a period from time ta to time td. That is, the attention period Troi is composed of a rising period Ta, a transition period Tb and a steady period Tc, in other words, a rising period Ta and a constant pressure period Tbc. In this way, the attention period Troi in the present invention is "from the start of discharging the treatment liquid from the nozzle until the discharge pressure starts to decrease from the predetermined pressure through the increase of the discharge pressure to the predetermined pressure. It corresponds to an example of "the main period of", and the target pressure Pt corresponds to an example of the "predetermined pressure" of the present invention.

As shown in Fig. 24, in this modified example, an ascending regression line Lr_R is calculated in the same manner as in the case of the above-mentioned feature amount Fv1, and an approximate straight line Lr_s at the start is set. Further, in the period from time t12 to time td, a stationary straight line Lr_m_1, which is a zero-slope straight line representing the stationary pressure Pm (that is, the average of the measured values of the discharge pressure in the stationary period Tc) is set do.

In this way, the approximate waveform WF1_1 composed of the starting approximation line (Lr_s), the ascending regression line (Lr_R) and the stationary line (Lr_m_1) arranged in time series is calculated. Then, the pressure evaluation unit 913 calculates the average absolute error MAE between the discharge pressure measurement data 99 and the approximate waveform WF1_1 as the characteristic variable Fv1_1 in the entire attention period Troi from the time ta to the time td. do. Further, the pressure evaluation unit 913 normalizes the feature Fv1_1 to a predetermined range based on a predetermined threshold value Th1_1 (for example, 0.05). Specifically, the following expression

If Fv1_1<Th1_1, then Fv1_1=0

If Fv1_1≥Th1_1, Fv1_1=(Fv1_1+1-Th1_1)×c1_1

Based on, the feature amount Fv1_1 is converted into the standardized feature amount Fv1_1 (ie, the evaluation value V1_1). Here, the upper limit of Fv1_1 is 2 × c1_1, and the coefficient c1_1 is a normalization coefficient and is an arbitrary positive constant. In addition, the specific method of normalization of feature amount Fv1_1 is not limited to this example, You may change suitably.

According to the evaluation based on the characteristic variable Fv1_1 in FIG. 24 , when the time change of the discharge pressure in the entire attention period Troi deviated greatly from the ideal shape, a large score (i.e., bad evaluation) for this discharge pressure can be granted.

In such a modified example, in the evaluation of the measurement result of the discharge pressure evaluation shown in FIG. 4 (step S102), the pressure evaluation unit 913 evaluates not the characteristic variable Fv1 but the characteristic variable Fv1_1 based on the result extracted from the discharge pressure. Calculate the value V1_1. In particular, for the first (I = 1) evaluation step, evaluation based on the feature amount Fv1_1 shown in FIG. 24 is assigned instead of evaluation based on the feature amount Fv1 shown in FIG. 7 . Next, the measurement result evaluation shown in FIG. 21 is executed. That is, in the table of FIG. 22 , the feature amount of the evaluation item in case the evaluation step I is 1 is not the feature amount Fv1 but the feature amount Fv1_1 shown in FIG. 24 .

Also in this modified example, there are provided N evaluation steps from the 1st to the Nth for each evaluating the discharge pressure by evaluation items different from each other, and the evaluation steps from the 1st to the Nth can be sequentially executed. However, when it is judged that the discharge pressure is appropriate in the evaluation by the evaluation criteria related to the I-th evaluation step (“YES” in step S205), discharge according to the evaluation criteria related to the (I+1)-th evaluation step While the pressure evaluation is performed, if the discharge pressure is judged to be inappropriate in the evaluation by the evaluation items related to the I-th evaluation step (NO in step S205), the evaluation in the order following the I-th evaluation step Evaluation of the discharge pressure by step is not performed (i.e. omitted). That is, when the discharge pressure is sequentially evaluated by the first to Nth evaluation steps, if the discharge pressure is judged to be inappropriate in one of the evaluation steps, the evaluation in the subsequent evaluation steps is not executed. Accordingly, it is possible to evaluate the discharge pressure applied to the coating liquid in order to discharge the coating liquid from the nozzle 71 in a reasonable time depending on whether the discharge pressure is appropriate.

In addition, from the start of discharge of the processing liquid from the nozzle 71 through the increase of the discharge pressure to the target pressure Pt (predetermined pressure) until the start of the decrease of the discharge pressure from the target pressure Pt In the attention period Troi (main period, evaluation subject period), the discharge pressure is measured. Then, in the first (I = 1) evaluation step, the feature amount Fv1_1 (total feature amount) of the time change of the discharge pressure in the entire attention period Troi is extracted, and based on the feature amount Fv1_1, the discharge pressure The time change of is evaluated. Accordingly, it is possible to reflect whether or not the discharge pressure is appropriate in the entire attention period Troi, which affects the thickness of the processing liquid applied to the substrate S, in the evaluation of the discharge pressure.

Incidentally, in this modified example, when the effect of the attention period Troi on the thickness of the treatment liquid applied to the substrate S is particularly large (in other words, the effect of the period after the attention period Troi has elapsed is insignificant). case), it is possible to reflect the appropriateness of the discharge pressure in the entire period of attention (Troi) in the evaluation of the discharge pressure.

In addition, the feature amount Fv1_1 (main feature amount) is an approximate waveform WF1_1 (main approximate waveform) approximating the time change of the discharge pressure in the entire attention period Troi (main period), and in the entire attention period Troi represents the difference in the time change of the discharge pressure of With such a configuration, the discharge pressure in the entire period of interest Troi can be appropriately evaluated based on the approximate waveform WF1_1 for the temporal change of the discharge pressure in the entire period of interest Troi.

In particular, the approximate waveform WF1_1 is

After the start of the discharge of the coating liquid from the nozzle 71, a linear approximation of the time change of the discharge pressure increasing over time, from the initial pressure Pi (discharge start pressure) to a normal pressure greater than the initial pressure Pi An ascending regression line (Lr_R) (rising approximation straight line) that increases linearly with time until (Pm);

An approximation line Lr_s at the start indicating the initial pressure Pi, which is set between the starting point of discharge of the coating liquid from the nozzle 71 (time ta) and the rising regression line Lr_R,

A steady straight line (Lr_m_1) representing the steady pressure Pm set between the upward regression line Lr_R reaching the steady pressure Pm and the end of the attention period Troi (between the time t12 and the time td) )

have With such a configuration, the time change of the discharge pressure in the entire attention period Troi can be approximated, and the discharge pressure in the entire attention period Troi can be appropriately evaluated.

For reference, when the discharge pressure is evaluated using the characteristic variable Fv1_1 shown in Fig. 24, in step S101, the discharge pressure in the period after the period of interest Troi has elapsed (ie, the falling period Td) is measured. There is no need.

Moreover, you may configure so that the UI 95 can select which one of the above-mentioned two characteristic variable Fv1 and characteristic variable Fv1_1 to evaluate discharge pressure using. In this case, in step S102, the discharge pressure is evaluated by one of the feature values Fv1 and Fv1_1 selected by the input operation to the UI 95 by the user. In addition, in the measurement result evaluation of FIG. 21, about the evaluation step of the 1st (I=1), the discharge pressure is evaluated with the one feature value selected from the characteristic variable Fv1 and characteristic variable Fv1_1.

The present invention is applicable to all substrate processing technologies in which a processing liquid is discharged and supplied from a nozzle to a substrate with target characteristics by supplying the processing liquid to a nozzle.

1 Applicator (substrate processing unit)
71 Nozzle (ejection device)
8 Coating liquid supply mechanism (pressure application part, discharge device)
86 pressure gauge (measurement part)
9 control unit (computer, control unit)
97 discharge pressure evaluation program
M Recording medium
Tt discharge period (first period)
Fv1 feature (first feature)
WF1 approximate waveform (first approximate waveform)
Pi initial pressure (discharge start pressure, discharge end pressure)
Lr_R Rising Regression Line (Rising Approximation Line)
Approximate straight line at the start of Lr_s
Lr_F Descent Regression Line
Approximate straight line at the end of Lr_e
Lr_m normal straight line
Initial period of rising Ta_s (second period)
Ta rising period (second period)
Ta_e rising end period (second period)
Tb_s initial oscillation period (second period)
Tb transition period (second period)
Tbc constant pressure period (second period)
Fv2 to Fv10 feature amount (second feature amount)
Nr regression curve
WF7 approximate waveform (rising end approximate waveform)
Lr Rising Termination Regression Line (Rising Termination Approximate Line)
Lm extension straight line
Tc normal period
Tar pressure rise period (third period)
Ta_e rising end period (third period)
Tb_s initial oscillation period (third period)
Fv11 to Fv14 feature (third feature)
P11_l lower reference pressure (lower reference value)
P11_u upper reference pressure (upper reference value)
Tar pressure rise period
Ta_e rising boil period
WF12, WF13 Approximate Waveform (Approximate Rising End Waveform)
Lr Rising Termination Regression Line (Rising Termination Approximate Line)
Lm extension straight line
Tb_s initial oscillation period

Claims (27)

N (N is an integer of 2 or more) from the 1st to the Nth for evaluating the discharge pressure in a discharge device that applies discharge pressure to the treatment liquid and discharges the treatment liquid from a nozzle, respectively, by different evaluation items. a process of evaluating the discharge pressure by evaluation items related to the first evaluation step, among evaluation steps;
Among the N evaluation steps, when it is determined that the discharge pressure is appropriate in the evaluation by the evaluation items related to the I-th (I is an integer greater than or equal to 1 and less than N) evaluation step, the (I+1)th While the discharge pressure is evaluated by the evaluation items related to the evaluation step, if the discharge pressure is judged to be unsuitable in the evaluation by the evaluation items related to the I-th evaluation step, it is better than the I-th evaluation step. Process of not evaluating the discharge pressure by the evaluation step in the next order
, Discharge pressure evaluation method having. The method of claim 1,
Among the N evaluation steps, different evaluation values are given to the discharge pressure according to a difference in the number of evaluation steps in which the discharge pressure is evaluated. The method of claim 1,
In an evaluation target period that includes at least a main period from the start of discharging the treatment liquid from the nozzle to the start of a decrease in the discharge pressure from the predetermined pressure through an increase in the discharge pressure to a predetermined pressure , based on the result of measuring the discharge pressure, a step of extracting, as a total characteristic amount, a characteristic amount of the time change of the discharge pressure in the entire period to be evaluated;
A step of evaluating the time change of the discharge pressure based on the total feature amount
The discharge pressure evaluation method, wherein the first evaluation step has an evaluation item of evaluating the discharge pressure by executing . The method of claim 3,
The evaluation target period is the main period,
The discharge pressure evaluation method according to claim 1 , wherein a main characteristic quantity, which is a characteristic quantity of a temporal change of the discharge pressure in the entirety of the main period, is extracted as the total characteristic quantity. The method of claim 4,
The discharge pressure evaluation method, wherein the main feature represents a difference between a main approximate waveform approximating the time change of the discharge pressure in the entire main period and a time change of the discharge pressure in the entire main period. The method of claim 5,
The main approximate waveform is,
The time change of the discharge pressure, which increases with time after the start of discharge of the treatment liquid from the nozzle, is linearly approximated, and increases linearly with time from the discharge start pressure to a steady pressure greater than the discharge start pressure. Ascending approximation straight line,
An approximation line at the start of discharge indicating the discharge start pressure, which is set between the starting point of discharge of the treatment liquid from the nozzle and the rising approximation line;
The ascending approximation straight line is established between reaching the steady pressure and the end of the main period to represent the steady pressure.
, Discharge pressure evaluation method. The method of claim 3,
The evaluation target period is a first period from the start of discharging the processing liquid from the nozzle to the end of discharging the processing liquid from the nozzle;
The discharge pressure evaluation method according to claim 1 , wherein a first characteristic quantity, which is a characteristic quantity of a temporal change of the discharge pressure in the entire first period, is extracted as the total characteristic quantity. The method of claim 7,
The first characteristic amount is a discharge pressure representing a difference between a first approximate waveform approximating the time change of the discharge pressure in the entire first period and a time change of the discharge pressure in the entire first period. Assessment Methods. The method of claim 8,
The first approximate waveform is,
After the discharge of the treatment liquid from the nozzle starts, by linearly approximating the time change of the discharge pressure, which increases with time, from the discharge start pressure to a steady pressure greater than the discharge start pressure, increasing linearly with time. Ascending approximation straight line,
An approximation line at the start of discharge indicating the discharge start pressure, which is set between the starting point of discharge of the treatment liquid from the nozzle and the rising approximation line;
Before the end of the discharge of the treatment liquid from the nozzle, by linearly approximating the time change of the discharge pressure, which decreases with time, from the normal pressure to a discharge end pressure smaller than the normal pressure, linearly decreasing with time. a descending approximation straight line,
An approximation line at the end, which is set between the descending approximation line and an end point of discharge of the treatment liquid from the nozzle, and indicates the discharge end pressure;
A stationary straight line connecting between each of the ascending approximation straight line and the descending approximating straight line, and representing the steady pressure.
, Discharge pressure evaluation method. The method of claim 3,
a step of extracting, as a second characteristic amount, a characteristic amount of a time change of the discharge pressure in a second period shorter than the evaluation subject period, among the evaluation subject periods;
A step of evaluating the time change of the discharge pressure based on the second characteristic amount.
The discharge pressure evaluation method, wherein a second evaluation step among the N evaluation steps has an evaluation item of evaluating the discharge pressure by executing . The method of claim 10,
A predetermined rising initial period from the start of discharge of the treatment liquid from the nozzle is set as the second period,
Through the rising initial period, the discharge pressure increases with time,
A discharge pressure evaluation in which a feature value representing a difference between a regression curve of time changes of the discharge pressure in the initial period of increase and a change in time of the discharge pressure in the initial period of increase is extracted as the second feature. method. According to claim 10 or claim 11,
The discharge pressure evaluation method of claim 1 , wherein an increasing period from the start of discharge of the processing liquid from the nozzle until the discharge pressure increases to the predetermined pressure is set as the second period. The method of claim 12,
The discharge pressure evaluation method, wherein the length of the rising period is extracted as the second feature. The method of claim 12,
The discharge pressure evaluation method according to claim 1 , wherein, in the rising period, the number of times that one differential of the time change of the discharge pressure crosses a predetermined threshold value is extracted as the second feature. The method of claim 12,
The discharge pressure evaluation method according to claim 1 , wherein, in the rising period, the number of times an absolute value of the second derivative of the time change of the discharge pressure crosses a predetermined threshold value is extracted as the second feature. The method of claim 12,
In the rising period, a time at which the second derivative of the time change of the discharge pressure becomes larger than a predetermined positive threshold value, and a predetermined value in which the second derivative of the time change of the discharge pressure has an absolute value equal to the positive threshold value. A discharge pressure evaluation method in which a ratio of time when is smaller than a negative threshold of is extracted as the second feature. The method of claim 10,
A predetermined rising end period until the discharge pressure increases to the predetermined pressure is set as the second period,
A characteristic quantity representing a difference between a rise end approximate waveform approximating the time change of the discharge pressure in the rise end period and a time change of the discharge pressure in the rise end period is extracted as the second feature,
The rising end approximation waveform is,
Overlapped with an approximation curve obtained by linear approximation of the time change of the discharge pressure increasing with time in the pressure range smaller than the predetermined pressure, the time change of the discharge pressure in the steady period following the rise end period A rising end approximation straight line that increases linearly with time to a steady pressure, which is the average value;
An extended straight line representing the normal pressure, extending from the approximate end-of-rise straight line to the end of the end-of-rise period.
, Discharge pressure evaluation method. The method of claim 10,
An initial oscillation period from the time when the discharge pressure reaches a maximum value to the time when two derivatives of the time change of the discharge pressure cross zero twice is set as the second period,
A difference between the pressure of the smaller one of the minimum value of the discharge pressure in the initial oscillation period and the average value of the discharge pressure in a predetermined steady period following the initial oscillation period, and the maximum value of the discharge pressure, A discharge pressure evaluation method extracted as a second feature. The method of claim 10,
A predetermined transition period from a time point when the discharge pressure exceeds the predetermined pressure is set as the second period,
A discharge pressure evaluation method in which a characteristic quantity representing a difference in the discharge pressure in the transition period with respect to an average value of the discharge pressure in a predetermined steady period subsequent to the transition period is extracted as the second characteristic quantity. . The method of claim 10,
A constant pressure period from when the discharge pressure exceeds the predetermined pressure to when the discharge pressure starts to decrease toward the end of discharge of the processing liquid from the nozzle is set as the second period. become,
The discharge pressure evaluation method, wherein a characteristic quantity representing a difference between a maximum value and a minimum value of the discharge pressure in the constant pressure period is extracted as the second characteristic quantity. A discharge pressure evaluation method according to claim 10 in which N is 3 or more,
a process of extracting, as a third characteristic amount, a characteristic amount of a time change of the discharge pressure in a third period shorter than the evaluation subject period, among the evaluation subject periods;
A step of evaluating the time change of the discharge pressure based on the third characteristic amount.
, wherein a third evaluation step among the N evaluation steps has an evaluation item of evaluating the discharge pressure. The method of claim 21,
After the discharge of the treatment liquid from the nozzle starts, a pressure rising period in which the discharge pressure increases with time from a lower reference value to an upper reference value greater than the lower reference value is set as the third period,
One of the measured values of the discharge pressure between the lower reference value and the upper reference value,
A root mean square error of an approximate straight line obtained by linear regression for the time change of the discharge pressure in the interval between the lower reference value and the one measurement value and the time change of the discharge pressure;
In the section between the one measurement value and the upper reference value, the sum of the approximate straight line obtained by linear regression for the time change of the discharge pressure and the root mean square error of the time change of the discharge pressure is the minimum. get the measurements,
wherein a ratio of a slope of a straight line between the lower reference value and the one measured value and a slope of a straight line between the one measured value and the upper reference value is extracted as the third feature. The method of claim 21,
A predetermined rising end period until the discharge pressure increases to the predetermined pressure is set as the third period,
A characteristic quantity representing a difference between a rise end approximate waveform approximating the time change of the discharge pressure in the rise end period and a time change of the discharge pressure in the rise end period is extracted as the third feature,
The rising end approximation waveform is,
An approximate rising straight line overlapping with an approximate curve obtained by linearly approximating the time change of the discharge pressure increasing with time in a pressure range smaller than the predetermined pressure and increasing linearly up to the predetermined pressure with time;
An extended straight line connected to the approximation line at the end of the rise and representing the predetermined pressure.
, Discharge pressure evaluation method. The method of claim 21,
An initial oscillation period from the time when the discharge pressure reaches a maximum value to the time when two derivatives of the time change of the discharge pressure cross zero twice is set as the third period,
A value obtained by subtracting a steady pressure, which is an average value of the discharge pressure in a predetermined steady period subsequent to the initial oscillation period, from the maximum value of the discharge pressure, and a value obtained by subtracting the steady pressure in the initial oscillation period from the steady pressure. A discharge pressure evaluation method wherein a sum of values obtained by subtracting a minimum pressure value is extracted as the third feature. N (N is an integer of 2 or more) from the 1st to the Nth for evaluating the discharge pressure in a discharge device that applies discharge pressure to the treatment liquid and discharges the treatment liquid from a nozzle, respectively, by different evaluation items. a process of evaluating the discharge pressure by evaluation items related to the first evaluation step, among evaluation steps;
Among the N evaluation steps, when it is determined that the discharge pressure is appropriate in the evaluation by the evaluation items related to the I-th (I is an integer greater than or equal to 1 and less than N) evaluation step, the (I+1)th While the discharge pressure is evaluated by the evaluation items related to the evaluation step, if the discharge pressure is judged to be unsuitable in the evaluation by the evaluation items related to the I-th evaluation step, it is better than the I-th evaluation step. Process of not evaluating the discharge pressure by the evaluation step in the next order
A discharge pressure evaluation program recorded on a recording medium for causing a computer to execute. A recording medium on which the discharge pressure evaluation program according to claim 25 is recorded so that it can be read by a computer. nozzle,
a pressure imparting unit for applying a discharge pressure to the treatment liquid to cause the nozzle to discharge the treatment liquid;
a measuring unit for measuring the discharge pressure;
N (N is an integer of 2 or more) from the 1st to the Nth for evaluating the discharge pressure in a discharge device that applies discharge pressure to the treatment liquid and discharges the treatment liquid from a nozzle, respectively, by different evaluation items. A control unit that memorizes the contents of execution in the evaluation stage
to provide,
The control unit,
Among the N evaluation steps, the discharge pressure is evaluated by evaluation items related to the first evaluation step,
Among the N evaluation steps, when it is determined that the discharge pressure is appropriate in the evaluation by the evaluation items related to the I-th (I is an integer greater than or equal to 1 and less than N) evaluation step, the (I+1)th While the discharge pressure is evaluated by the evaluation items related to the evaluation step, if the discharge pressure is judged to be unsuitable in the evaluation by the evaluation items related to the I-th evaluation step, it is better than the I-th evaluation step. A substrate processing apparatus that does not evaluate the discharge pressure in a later evaluation step.

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