KR20230091013A - Black matrix pigment dispersion composition and manufacturing method thereof, black matrix resist composition, and black resist film - Google Patents
Black matrix pigment dispersion composition and manufacturing method thereof, black matrix resist composition, and black resist film Download PDFInfo
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- KR20230091013A KR20230091013A KR1020220162934A KR20220162934A KR20230091013A KR 20230091013 A KR20230091013 A KR 20230091013A KR 1020220162934 A KR1020220162934 A KR 1020220162934A KR 20220162934 A KR20220162934 A KR 20220162934A KR 20230091013 A KR20230091013 A KR 20230091013A
- Authority
- KR
- South Korea
- Prior art keywords
- black matrix
- black
- carbon black
- alkali
- pigment dispersion
- Prior art date
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- 239000000049 pigment Substances 0.000 title claims abstract description 86
- 239000000203 mixture Substances 0.000 title claims abstract description 68
- 239000011159 matrix material Substances 0.000 title claims abstract description 56
- 239000006185 dispersion Substances 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000006229 carbon black Substances 0.000 claims abstract description 51
- 229920005989 resin Polymers 0.000 claims abstract description 37
- 239000011347 resin Substances 0.000 claims abstract description 37
- 239000002270 dispersing agent Substances 0.000 claims abstract description 33
- 230000002378 acidificating effect Effects 0.000 claims abstract description 28
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 24
- 239000002904 solvent Substances 0.000 claims abstract description 24
- 150000002484 inorganic compounds Chemical group 0.000 claims abstract description 8
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 8
- 150000002500 ions Chemical class 0.000 claims description 23
- 150000001875 compounds Chemical class 0.000 claims description 17
- 238000010521 absorption reaction Methods 0.000 claims description 13
- 239000003999 initiator Substances 0.000 claims description 10
- 239000004925 Acrylic resin Substances 0.000 claims description 9
- 239000004593 Epoxy Substances 0.000 claims description 9
- 150000001412 amines Chemical class 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 abstract description 10
- 235000019241 carbon black Nutrition 0.000 description 41
- 239000003822 epoxy resin Substances 0.000 description 35
- 229920000647 polyepoxide Polymers 0.000 description 35
- -1 potassium ions Chemical class 0.000 description 15
- 239000011164 primary particle Substances 0.000 description 10
- 239000002516 radical scavenger Substances 0.000 description 10
- 239000007787 solid Substances 0.000 description 9
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 229910052797 bismuth Inorganic materials 0.000 description 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 150000001450 anions Chemical class 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 150000001768 cations Chemical class 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical class C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 5
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 5
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- 125000000542 sulfonic acid group Chemical group 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000004305 biphenyl Substances 0.000 description 4
- 235000010290 biphenyl Nutrition 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical compound CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 3
- 125000003700 epoxy group Chemical group 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
- 239000003456 ion exchange resin Substances 0.000 description 3
- 229920003303 ion-exchange polymer Polymers 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 229910001414 potassium ion Inorganic materials 0.000 description 3
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- 229930185605 Bisphenol Natural products 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- 241000557626 Corvus corax Species 0.000 description 2
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- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
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- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 125000005396 acrylic acid ester group Chemical group 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
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- 230000001588 bifunctional effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
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- 238000000576 coating method Methods 0.000 description 2
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- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
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- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
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- 150000002576 ketones Chemical class 0.000 description 2
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- LPEKGGXMPWTOCB-UHFFFAOYSA-N methyl 2-hydroxypropionate Chemical compound COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 2
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
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- 239000002243 precursor Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
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- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 2
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- 238000003756 stirring Methods 0.000 description 2
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- LGPAKRMZNPYPMG-UHFFFAOYSA-N (3-hydroxy-2-prop-2-enoyloxypropyl) prop-2-enoate Chemical compound C=CC(=O)OC(CO)COC(=O)C=C LGPAKRMZNPYPMG-UHFFFAOYSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
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- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- HMLSBRLVTDLLOI-UHFFFAOYSA-N 1-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)C(C)OC(=O)C(C)=C HMLSBRLVTDLLOI-UHFFFAOYSA-N 0.000 description 1
- NFTVTXIQFYRSHF-UHFFFAOYSA-N 1-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)C(C)OC(=O)C=C NFTVTXIQFYRSHF-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
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- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
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- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
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- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 1
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- DJKKWVGWYCKUFC-UHFFFAOYSA-N 2-butoxyethyl 2-methylprop-2-enoate Chemical compound CCCCOCCOC(=O)C(C)=C DJKKWVGWYCKUFC-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- PTJDGKYFJYEAOK-UHFFFAOYSA-N 2-butoxyethyl prop-2-enoate Chemical compound CCCCOCCOC(=O)C=C PTJDGKYFJYEAOK-UHFFFAOYSA-N 0.000 description 1
- YQZHOBBQNFBTJE-UHFFFAOYSA-N 2-chloro-3-methylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(C)C(Cl)=C2 YQZHOBBQNFBTJE-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
- C08K3/013—Fillers, pigments or reinforcing additives
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D17/00—Pigment pastes, e.g. for mixing in paints
- C09D17/002—Pigment pastes, e.g. for mixing in paints in organic medium
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D17/00—Pigment pastes, e.g. for mixing in paints
- C09D17/004—Pigment pastes, e.g. for mixing in paints containing an inorganic pigment
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials Engineering (AREA)
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Abstract
Description
본 발명은 블랙 매트릭스용 안료 분산 조성물과 그 제조 방법, 블랙 매트릭스용 레지스트 조성물 및 블랙 레지스트막에 관한 것이다.The present invention relates to a pigment dispersion composition for a black matrix, a method for producing the same, a resist composition for a black matrix, and a black resist film.
종래에 카본 블랙, 염기성기 함유 안료 분산제, 산성기 함유 안료 분산조제, 바인더 수지 및 용제 등을 함유하는 블랙 매트릭스용 안료 분산 조성물을 이용한 레지스트 조성물은 높은 광학 농도(차광성)이나 세선 밀착성(해상도)이 요구되고(특허문헌 1), 또한 카본 블랙을 세정하여 칼륨 이온을 저감시키면, 광학 농도(차광성) 등을 향상시킬 수 있다는 것이 알려져 있다(특허문헌 2).Conventionally, a resist composition using a pigment dispersion composition for a black matrix containing carbon black, a pigment dispersant containing a basic group, a pigment dispersion aid containing an acidic group, a binder resin and a solvent has high optical density (light blocking property) and fine wire adhesion (resolution). This is demanded (Patent Document 1), and it is known that the optical density (light-shielding property) and the like can be improved by further washing the carbon black to reduce potassium ions (Patent Document 2).
그러나, 상기와 같이 카본 블랙을 세정하는 경우, 다량의 물을 사용할 필요가 있고, 또한, 세정, 여과, 건조 등의 번잡한 조작이 필요하게 되는 문제가 있었다. 또한, 조성물 중의 칼륨 이온을 제거하기 위해서 일반적으로 이온 교환 수지를 구비한 수지탑에 조성물을 통액시키는 방법도 알려져 있지만, 다량의 이온 교환 수지를 사용하기 때문에 이온 교환 수지의 조달이나 폐기에 높은 비용을 요하는 문제가 있었다.However, in the case of washing carbon black as described above, there is a problem in that a large amount of water needs to be used and complicated operations such as washing, filtration, and drying are required. In addition, in order to remove potassium ions in the composition, a method of generally passing the composition through a resin tower equipped with an ion exchange resin is also known, but since a large amount of ion exchange resin is used, high costs are incurred in procurement and disposal of the ion exchange resin. There was a problem requiring
본 발명은 상기 실정을 감안하여 이루어진 것으로 광학 농도 및 세선 밀착성이 우수한 블랙 매트릭스용 레지스트 조성물이 얻어지는 블랙 매트릭스용 안료 분산 조성물을 제공하는 것을 목적으로 한다.The present invention was made in view of the above circumstances, and an object of the present invention is to provide a pigment dispersion composition for a black matrix from which a resist composition for a black matrix excellent in optical density and fine wire adhesion can be obtained.
즉, 본 발명은 카본 블랙, 염기성기 함유 안료 분산제, 산성기 함유 안료 분산조제, 알칼리 가용성 수지, 이온 포착제, 및 용제를 함유하고, 상기 카본 블랙은 산성 카본 블랙이며, 상기 이온 포착제는 메디안 직경이 0.1 ~ 10㎛인 무기계 화합물이며, 또한 상기 카본 블랙 100질량부에 대하여 1 ~ 15질량부인 블랙 매트릭스용 안료 분산 조성물에 관한 것이다.That is, the present invention contains carbon black, a pigment dispersant containing a basic group, a pigment dispersing aid containing an acidic group, an alkali-soluble resin, an ion scavenger, and a solvent, wherein the carbon black is acidic carbon black, and the ion scavenger is a median It is an inorganic compound with a diameter of 0.1 to 10 µm, and relates to a pigment dispersion composition for a black matrix, which is 1 to 15 parts by mass based on 100 parts by mass of the carbon black.
또한, 본 발명은 상기 블랙 매트릭스용 안료 분산 조성물, 광중합성 화합물, 및 광중합 개시제를 함유하는 블랙 매트릭스용 레지스트 조성물에 관한 것이다.Further, the present invention relates to a resist composition for a black matrix containing the pigment dispersion composition for a black matrix, a photopolymerizable compound, and a photopolymerization initiator.
또한, 본 발명은 블랙 매트릭스용 레지스트 조성물을 사용하여 얻어지는 블랙 레지스트막에 관한 것이다.Moreover, this invention relates to the black resist film obtained using the resist composition for black matrices.
또한, 본 발명은 상기 블랙 매트릭스용 안료 분산 조성물의 제조 방법으로서, 상기 이온 포착제의 존재하에 적어도 상기 카본 블랙을 분산 처리하는 블랙 매트릭스용 안료 분산 조성물의 제조 방법에 관한 것이다.Further, the present invention relates to a method for producing the pigment dispersion composition for a black matrix, wherein at least the carbon black is subjected to a dispersion treatment in the presence of the ion trapping agent.
본 발명의 블랙 매트릭스용 안료 분산 조성물은 카본 블랙, 염기성기 함유 안료 분산제, 산성기 함유 안료 분산조제, 알칼리 가용성 수지, 이온 포착제, 및 용제를 함유하고, 상기 카본 블랙은 산성 카본 블랙이고, 상기 이온 포착제는 메디안 직경이 0.1 ~ 10㎛인 무기계 화합물이며, 또한 상기 카본 블랙 100질량부에 대하여 1 ~ 15질량부이다. 본 발명의 블랙 매트릭스용 안료 분산 조성물은 상기 이온 포착제에 의해 산성 카본 블랙의 제조로 혼입하는 칼륨 이온 등의 이온을 포함하는 물질을 포착할 수 있기 때문에 산성 카본 블랙의 세정 등의 조작을 필요로 하지 않고도 광학 농도 및 세선 밀착성이 우수한 블랙 매트릭스용 레지스트 조성물이 얻어진다.The pigment dispersion composition for a black matrix of the present invention contains carbon black, a basic group-containing pigment dispersant, an acidic group-containing pigment dispersing aid, an alkali-soluble resin, an ion trapping agent, and a solvent, wherein the carbon black is acidic carbon black, The ion trapping agent is an inorganic compound having a median diameter of 0.1 to 10 µm, and is 1 to 15 parts by mass based on 100 parts by mass of the carbon black. Since the pigment dispersion composition for a black matrix of the present invention can capture substances containing ions such as potassium ions, which are mixed in the production of acidic carbon black by the ion trapping agent, operations such as washing the acidic carbon black are not required. A resist composition for a black matrix excellent in optical density and thin line adhesion without the need for a black matrix can be obtained.
본 발명의 블랙 매트릭스용 안료 분산 조성물은 카본 블랙, 염기성기 함유 안료 분산제, 산성기 함유 안료 분산조제, 알칼리 가용성 수지, 이온 포착제, 및 용제를 함유한다.The pigment dispersion composition for a black matrix of the present invention contains carbon black, a pigment dispersant containing a basic group, a pigment dispersing aid containing an acidic group, an alkali-soluble resin, an ion trapping agent, and a solvent.
<카본 블랙><Carbon Black>
상기 카본 블랙은 카르복실기 등의 산성기를 갖는 산성 카본 블랙이다. 상기 산성 카본 블랙으로서는 블랙 매트릭스용 안료 분산 조성물에 사용되는 공지의 산성 카본 블랙을 사용할 수 있고, 예를 들면 현상성 및 세선 밀착성을 향상시키는 관점에서 pH가 5.0 이하인 것 가 바람직하고, pH가 1.0 이상 3.5 이하인 것이 보다 바람직하고, 또한 DBP 흡유량이 80ml/100g 이하인 것이 바람직하고, DBP 흡유량이 70ml/100g 이하인 것이 보다 바람직하고 또한, 입자경이 20 ~ 60nm 인 것이 바람직하다. 또한, 상기 pH는 카본 블랙 1g을 탄산을 제외한 증류수(pH 7.0) 20ml에 첨가하여 마그네틱 교반기로 혼합하여 수성 현탁액을 제조하고, 유리 전극을 사용하여 25℃ 에서 측정할 수 있다(독일 공업품 표준 규격 DIN ISO 787/9). 또한, DBP 흡유량이란 공극 용적을 측정함으로써 카본 블랙의 구조를 간접적으로 정량화하는 것으로 JIS K 6217-4에 준거하여 측정한 수치이다. 또한, 상기 입자경은 현미경 관찰에 의해 측정 또는 산출한 평균 1차 입자경을 의미한다. 이들 값에 대해서 시판품의 경우, 카탈로그값을 참고로 한다. 상기 카본 블랙은 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다.The said carbon black is acidic carbon black which has acidic groups, such as a carboxyl group. As the acidic carbon black, known acidic carbon blacks used in pigment dispersion compositions for black matrices can be used. For example, from the viewpoint of improving developability and fine wire adhesion, the pH is preferably 5.0 or less, and the pH is 1.0 or more. It is more preferably 3.5 or less, and the DBP oil absorption amount is preferably 80 ml/100 g or less, more preferably the DBP oil absorption amount is 70 ml/100 g or less, and the particle size is preferably 20 to 60 nm. In addition, the pH can be measured by adding 1 g of carbon black to 20 ml of distilled water (pH 7.0) excluding carbonic acid, mixing with a magnetic stirrer to prepare an aqueous suspension, and measuring the pH at 25 ° C using a glass electrode (German industrial standard DIN ISO 787/9). In addition, DBP oil absorption amount indirectly quantifies the structure of carbon black by measuring void volume, and is a numerical value measured based on JIS K 6217-4. In addition, the said particle diameter means the average primary particle diameter measured or computed by microscopic observation. For these values, in the case of commercial products, refer to the catalog values. These carbon blacks may be used alone or in combination of two or more.
상기 산성 카본 블랙으로서는 구체적으로는 콜롬비아 케미컬즈사 제조의 Raven1080(pH2.4, 평균 1차 입자경 28nm, DBP 흡유량 60ml/100g), Raven1100U(pH2.9, 평균 1차 입자경 32nm, DBP 흡유량 72ml/100g), NEROX305(pH2.8, 평균 1차 입자경 28nm, DBP 흡유량 58ml/100g), NEROX3500(pH3.0, 평균 1차 입자경 31nm, DBP 흡유량 43ml/100g)의 캐보트사 제조의 TPK1104R(pH3.0, 평균 1차 입자경 약 30nm, DBP 흡유량 38ml/100g), 미쓰비시 케미컬사 제조의 MA14(pH2.8, 평균 1차 입자경 40nm, DBP 흡유량 73ml/100g), MA220(pH 2.9, 평균 1차 입자경 55nm, DBP 흡유량 93ml/100g) 등을 들 수 있다.Specific examples of the acidic carbon black include Raven 1080 (pH 2.4, average primary particle size 28 nm, DBP oil absorption 60 ml/100 g) and Raven 1100U (pH 2.9, average primary particle size 32 nm, DBP oil absorption 72 ml/100 g) manufactured by Columbia Chemicals. , NEROX305 (pH2.8, average primary particle size 28 nm, DBP oil absorption 58 ml / 100 g), NEROX3500 (pH3.0, average primary particle size 31 nm, DBP oil absorption 43 ml / 100 g) TPK1104R (pH 3.0, Average primary particle size about 30 nm, DBP oil absorption 38ml/100g), MA14 (pH2.8, average primary particle size 40nm, DBP oil absorption 73ml/100g) manufactured by Mitsubishi Chemical, MA220 (pH 2.9, average primary particle size 55nm, DBP oil absorption 93ml/100g) and the like.
상기 카본 블랙은 상기 블랙 매트릭스용 안료 분산 조성물 중 블랙 매트릭스막을 형성한 경우의 차광성을 높이는 관점에서 3질량% 이상인 것이 바람직하고, 10질량% 이상인 것이 보다 바람직하고, 안료 분산의 관점에서 70질량% 이하인 것이 바람직하고, 50질량% 이하인 것이 보다 바람직하다.The carbon black is preferably 3% by mass or more, more preferably 10% by mass or more, and 70% by mass from the viewpoint of pigment dispersion, from the viewpoint of enhancing the light-shielding property when a black matrix film is formed in the pigment dispersion composition for a black matrix. It is preferable that it is below, and it is more preferable that it is 50 mass % or less.
<염기성기 함유 안료 분산제><Basic group-containing pigment dispersant>
상기 염기성기 함유 안료 분산제는 상기 카본 블랙을 분산할 수 있으면 되고, 블랙 매트릭스용 안료 분산 조성물에 사용되는 공지의 염기성기 함유 안료 분산제를 사용할 수 있고, 예를 들면 음이온성 계면활성제, 염기성기 함유 폴리에스테르계 안료 분산제, 염기성기 함유 아크릴계 안료 분산제, 염기성기 함유 우레탄계 안료 분산제, 염기성기 함유 카르보디이미드계 안료 분산제 등을 들 수 있다. 상기 염기성기로서는 1급, 2급 또는 3급 아미노기가 특히 분산성이 우수한 관점에서 바람직하다. 상기 염기성기 함유 안료 분산제는 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다.The basic group-containing pigment dispersant only needs to be capable of dispersing the carbon black, and known basic group-containing pigment dispersants used in pigment dispersion compositions for black matrices can be used, such as anionic surfactants and basic group-containing polycarbonates. Ester-type pigment dispersants, basic group-containing acrylic pigment dispersants, basic group-containing urethane-type pigment dispersants, basic group-containing carbodiimide-type pigment dispersants, and the like are exemplified. As the basic group, a primary, secondary or tertiary amino group is particularly preferred from the standpoint of excellent dispersibility. The said basic group containing pigment dispersant can be used individually or in combination of 2 or more types.
상기 염기성기 함유 안료 분산제는 양호한 안료 분산성이 얻어지는 점에서 고분자형의 염기성기 함유 안료 분산제가 바람직하다. 상기 고분자형의 염기성기 함유 안료 분산제로서는 예를 들면, 염기성기 함유 우레탄계 고분자 안료 분산제, 염기성기 함유 폴리에스테르계 고분자 안료 분산제, 염기성기 함유 아크릴계 고분자 안료 분산제 등을 들 수 있다. 이들 중에서도 염기성기 함유 우레탄계 고분자 안료 분산제, 염기성기 함유 아크릴계 고분자 안료 분산제가 바람직하다. 상기 염기성기 함유 우레탄계 고분자 안료 분산제는 폴리에스테르쇄, 폴리에테르쇄, 및 폴리카보네이트쇄로 이루어지는 군으로부터 선택되는 적어도 1종을 갖는 염기성기 함유 우레탄계 고분자 안료 분산제가 보다 바람직하다.The pigment dispersant containing a basic group is preferably a polymeric type pigment dispersant containing a basic group from the viewpoint of obtaining good pigment dispersibility. Examples of the polymer type pigment dispersant containing a basic group include a basic group-containing urethane polymer pigment dispersant, a basic group-containing polyester polymer pigment dispersant, and a basic group-containing acrylic polymer pigment dispersant. Among these, a basic group-containing urethane-based polymer pigment dispersant and a basic group-containing acrylic polymer pigment dispersant are preferable. The basic group-containing urethane-based polymer pigment dispersant is more preferably a basic group-containing urethane-based polymer pigment dispersant having at least one selected from the group consisting of a polyester chain, a polyether chain, and a polycarbonate chain.
상기 염기성기 함유 안료 분산제는 블랙 매트릭스용 안료 분산 조성물을 저점도화할 수 있고, 도막 중의 카본 블랙을 고농도로 할 수 있는 관점에서 아민가가 5 ~ 50mgKOH/ g인 것이 바람직하고, 아민가가 5 ~ 35mgKOH/g인 것이 보다 바람직하다. 또한, 아민가란 유리 염기 및 염기의 총량을 나타내는 것으로 시료 1g을 중화하는데 필요한 염산에 대하여 당량의 수산화칼륨의 mg수로 나타낸 것이다.The basic group-containing pigment dispersant preferably has an amine value of 5 to 50 mgKOH/g, and an amine value of 5 to 35 mgKOH/g from the viewpoint of being able to lower the viscosity of the pigment dispersion composition for a black matrix and to increase the concentration of carbon black in the coating film. It is more preferable that it is g. In addition, the amine value indicates the total amount of free base and base, and is expressed as the number of mg of potassium hydroxide equivalent to hydrochloric acid required to neutralize 1 g of the sample.
상기 염기성기 함유 안료 분산제는 상기 카본 블랙 100질량부에 대하여 1 ~ 100질량부인 것이 바람직하고, 2 ~ 50질량부인 것이 보다 바람직하다.It is preferable that it is 1-100 mass parts, and it is more preferable that it is 2-50 mass parts with respect to 100 mass parts of the said carbon black of the said basic group containing pigment dispersant.
<산성기 함유 안료 분산조제><Acidic group-containing pigment dispersing aid>
상기 산성기 함유 안료 분산조제는 안료의 분산성을 보다 개선할 목적으로 사용되고 예를 들면, 락탐 블랙, 페릴렌계 화합물, 디케토피롤로피롤계 화합물, 아조나프톨계 화합물, 디옥사진계 화합물, 퀴나크리돈계 화합물, 프탈로시아닌계 화합물 및 그 금속 착체, 안트라퀴논, 나프탈렌, 아크리돈, 또는 트리아진 등의 색소에 카르복실기, 술폰산기 등의 산성기가 도입된 화합물(산성기를 갖는 색소 유도체)이나, 이들을 유기 아민 등으로 중화한 화합물을 들 수 있다. 상기 산성기를 갖는 색소 유도체로서는 카본 블랙의 분산성이 양호한 관점에서 술폰산기를 갖는 프탈로시아닌계 (프탈로시아닌 골격을 갖는) 색소 유도체가 바람직하다. 상기 산성기 함유 안료 분산조제는 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다.The acidic group-containing pigment dispersing aid is used for the purpose of further improving the dispersibility of the pigment, for example, lactam black, perylene-based compound, diketopyrrolopyrrole-based compound, azonaphthol-based compound, dioxazine-based compound, quinacridone-based compound , phthalocyanine-based compounds and their metal complexes, compounds in which an acidic group such as a carboxyl group or a sulfonic acid group is introduced into a pigment such as anthraquinone, naphthalene, acridone, or triazine (pigment derivative having an acidic group), these as organic amines, etc. A neutralized compound is mentioned. As the pigment derivative having an acidic group, a phthalocyanine-based (having a phthalocyanine skeleton) pigment derivative having a sulfonic acid group is preferable from the viewpoint of good dispersibility of carbon black. The acidic group-containing pigment dispersing aid may be used alone or in combination of two or more.
상기 산성기 함유 안료 분산조제는 상기 카본 블랙 100질량부에 대하여 0.1 ~ 20질량부인 것이 바람직하고, 1 ~ 10질량부인 것이 보다 바람직하다.It is preferable that it is 0.1-20 mass parts, and it is more preferable that it is 1-10 mass parts with respect to 100 mass parts of said carbon blacks of the said acidic group containing pigment dispersing aid.
<알칼리 가용성 수지><Alkali-soluble resin>
상기 알칼리 가용성 수지는 알칼리 현상액에 용해할 수 있는 것이면 특별히 제한은 없지만, 카르복실기, 술폰산기, 포스폰산기(-P(=O)(OH2)) 등의 음이온성기의 1 종 또는 2 종 이상을 함유하는 수지가 바람직하다. 상기 알칼리 가용성 수지는 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다.The alkali-soluble resin is not particularly limited as long as it is soluble in an alkaline developer, but one or more of anionic groups such as carboxyl group, sulfonic acid group, and phosphonic acid group (-P(=O)(OH 2 )) are used. Resin containing is preferable. The alkali-soluble resin may be used alone or in combination of two or more.
상기 알칼리 가용성 수지의 산가는 알칼리 현상성의 관점에서 10 mgKOH/g 이상 300 mgKOH/g 이하인 것이 바람직하고, 20 mgKOH/g 이상 200 mgKOH/g 이하인 것이 보다 바람직하다.The acid value of the alkali-soluble resin is preferably 10 mgKOH/g or more and 300 mgKOH/g or less, and more preferably 20 mgKOH/g or more and 200 mgKOH/g or less, from the viewpoint of alkali developability.
상기 알칼리 가용성 수지의 중량 평균 분자량은 레지스트막의 형성성의 관점에서 3,000 이상인 것이 바람직하고, 4,000 이상인 것이 보다 바람직하다. 상기 알칼리 가용성 수지의 중량 평균 분자량은 알칼리 현상액에의 용해성을 높이는 관점에서 100,000 이하인 것이 바람직하고, 50,000 이하인 것이 보다 바람직하다.It is preferable that it is 3,000 or more, and, as for the weight average molecular weight of the said alkali-soluble resin, it is more preferable that it is 4,000 or more from a viewpoint of formation property of a resist film. It is preferable that it is 100,000 or less, and, as for the weight average molecular weight of the said alkali-soluble resin, it is more preferable that it is 50,000 or less from a viewpoint of improving solubility to alkali developing solution.
상기 중량 평균 분자량은 겔 투과 크로마토그래피(GPC)법에 의해 측정할 수 있다. 일례로서, GPC 장치로서 Water2690(워터즈사 제조), 컬럼으로서 PLgel, 5㎛, MIXED-D(Polymer Laboratories사 제조)를 사용하여 전개 용매로서 테트라히드로푸란, 컬럼 온도 25℃, 유속 1밀리리터/분, RI 검출기, 시료 주입 농도 10 밀리그램/밀리리터, 주입량 100 마이크로리터의 조건 하에서 크로마토그래피를 행하여 폴리스티렌 환산의 중량 평균 분자량으로서 구할 수 있다.The weight average molecular weight can be measured by a gel permeation chromatography (GPC) method. As an example, using Water2690 (manufactured by Waters) as a GPC device, PLgel, 5 μm, MIXED-D (manufactured by Polymer Laboratories) as a column, tetrahydrofuran as a developing solvent, column temperature 25 ° C., flow rate 1 milliliter / min, Chromatography is performed under the conditions of an RI detector, a sample injection concentration of 10 milligrams/milliliter, and an injection amount of 100 microliters, and the weight average molecular weight in terms of polystyrene can be obtained.
상기 알칼리 가용성 수지로서는 예를 들면, 알칼리 가용성 폴리이미드 수지, 알칼리 가용성 폴리이미드 전구체, 알칼리 가용성 폴리벤조옥사졸 수지, 알칼리 가용성 폴리벤조옥사졸 전구체, 알칼리 가용성 카르도 수지, 알칼리 가용성 에폭시(메타)아크릴레이트 수지, 알칼리 가용성 폴리실록산 수지, 알칼리 가용성 노볼락 수지, 알칼리 가용성 (메타)아크릴 수지, 알칼리 가용성 폴리우레탄 수지, 알칼리 가용성 폴리에스테르 수지 등을 들 수 있다. 이들 중에서도 도막의 내열성의 관점에서 알칼리 가용성 카르도 수지, 알칼리 가용성 에폭시(메타)아크릴레이트 수지가 바람직하다.Examples of the alkali-soluble resin include alkali-soluble polyimide resin, alkali-soluble polyimide precursor, alkali-soluble polybenzoxazole resin, alkali-soluble polybenzoxazole precursor, alkali-soluble cardo resin, alkali-soluble epoxy (meth)acrylic acid. rate resins, alkali-soluble polysiloxane resins, alkali-soluble novolak resins, alkali-soluble (meth)acrylic resins, alkali-soluble polyurethane resins, alkali-soluble polyester resins and the like. Among these, alkali-soluble cardo resin and alkali-soluble epoxy (meth)acrylate resin are preferable from a viewpoint of the heat resistance of a coating film.
상기 알칼리 가용성 카르도 수지란 카르도 골격을 갖는 알칼리 가용성 수지를 말하고, 카르도 골격이란 환상 구조를 구성하는 환 탄소 원자인 4급 탄소 원자에 2개의 방향족기가 단결합으로 연결된 골격을 말한다. 알칼리 가용성 카르도 수지의 구체예로서는 예를 들면, ADEKA ARKLS WR-301(ADEKA 사제), 오그졸 CR-TR1, CR-TR2, CR-TR3, CR-TR4, CR-TR5, CR-TR6(이상, 오사카가스케미칼사 제조)를 들 수 있다.The alkali-soluble cardo resin refers to an alkali-soluble resin having a cardo skeleton, and the cardo skeleton refers to a skeleton in which two aromatic groups are connected by a single bond to a quaternary carbon atom, which is a ring carbon atom constituting a cyclic structure. As a specific example of alkali-soluble cardo resin, ADEKA ARKLS WR-301 (made by ADEKA), Ogsol CR-TR1, CR-TR2, CR-TR3, CR-TR4, CR-TR5, CR-TR6 (above, manufactured by Osaka Gas Chemical Co., Ltd.).
상기 알칼리 가용성 에폭시(메타)아크릴레이트 수지란 에틸렌성 불포화 모노카르복실산이 갖는 카르복실기를, 에폭시 수지가 갖는 에폭시기에 개환 부가시킴으로써 에틸렌성 불포화기를 도입하고, 또한 에폭시기의 개환에 의해 생긴 수산기의 적어도 일부에 다염기성 카르복실산(또는 그 무수물)을 부가시킴으로써 카르복실기를 도입하여 얻어지는 산 변성 에폭시 수지 중, 상기 카르도 골격을 갖지않고, 상기 알칼리 가용성 수지에 상당하는 수지를 말한다. 상기 알칼리 가용성 에폭시(메타)아크릴레이트 수지에 있어서 모체 원료가 되는 에폭시 수지로서는 예를 들면, 비스페놀 A형 에폭시 수지, 비스페놀 F형 에폭시 수지, 비페닐 구조를 갖는 에폭시 수지, 페놀 노볼락형 에폭시 수지, 크레졸 노볼락형 에폭시 수지를 바람직하게 들 수 있다. 에폭시 수지를 변성하기 위해 사용하는 에틸렌성 불포화 모노카르복실산으로서는 예를 들어 아크릴산, 메타크릴산을 바람직하게 들 수 있다. 다염기성 카르복실산(또는 그 무수물)로서는 예를 들면 말레산 무수물, 숙신산 무수물, 테트라히드로프탈산 무수물을 바람직하게 들 수 있다. 이들 중에서도 세선 밀착성을 향상시키는 관점에서 비페닐 골격을 갖는 알칼리 가용성 에폭시(메타)아크릴레이트 수지가 바람직하다. 상기 알칼리 가용성 에폭시(메타)아크릴레이트 수지의 구체예로서는 예를 들면, ZAR-1494H, ZAR-2001H, ZFR-1491H, ZCR-1797H, ZCR-1569H, ZCR-1798H(이상, 니폰카야쿠사 제조)를 들 수 있다. 또한, 바람직한 구체예로서는 하기 구조식 중 어느 하나로 표시되는 부분 구조를 갖는 알칼리 가용성 에폭시(메타)아크릴레이트 수지를 들 수 있다.The alkali-soluble epoxy (meth) acrylate resin refers to the introduction of an ethylenically unsaturated group by ring-opening addition of a carboxyl group of an ethylenically unsaturated monocarboxylic acid to an epoxy group of an epoxy resin, and further to at least a part of the hydroxyl groups generated by ring-opening of the epoxy group Among the acid-modified epoxy resins obtained by introducing a carboxyl group by adding a polybasic carboxylic acid (or its anhydride), it does not have the cardo skeleton and corresponds to the alkali-soluble resin. Examples of the epoxy resin serving as a base material in the alkali-soluble epoxy (meth)acrylate resin include bisphenol A-type epoxy resins, bisphenol F-type epoxy resins, epoxy resins having a biphenyl structure, phenol novolak-type epoxy resins, Cresol novolak-type epoxy resins are preferably used. As an ethylenically unsaturated monocarboxylic acid used in order to modify|denature an epoxy resin, acrylic acid and methacrylic acid are mentioned preferably, for example. As polybasic carboxylic acid (or its anhydride), maleic acid anhydride, succinic acid anhydride, and tetrahydrophthalic anhydride are mentioned preferably, for example. Among these, an alkali-soluble epoxy (meth)acrylate resin having a biphenyl skeleton is preferable from the viewpoint of improving the thin wire adhesion. Specific examples of the alkali-soluble epoxy (meth)acrylate resin include ZAR-1494H, ZAR-2001H, ZFR-1491H, ZCR-1797H, ZCR-1569H, and ZCR-1798H (above, manufactured by Nippon Kayaku Co., Ltd.). can Moreover, as a preferable specific example, the alkali-soluble epoxy (meth)acrylate resin which has a partial structure represented by any one of the following structural formulas is mentioned.
[화학식 1][Formula 1]
상기 알칼리 가용성 수지는 상기 카본 블랙 100질량부에 대하여 1 ~ 70질량부인 것이 바람직하고, 2 ~ 40질량부인 것이 보다 바람직하다.It is preferable that it is 1-70 mass parts, and, as for the said alkali-soluble resin, it is more preferable that it is 2-40 mass parts with respect to 100 mass parts of said carbon black.
<이온 포착제><Ion capture agent>
상기 이온 포착제는 메디안 직경이 0.1 ~ 10㎛인 무기계 화합물이다. 상기 이온 포착제는 양이온 및 음이온 중 적어도 한쪽을 포착할 수 있는 것이면 되고, 이온 포착능을 갖는 양이온 포착제, 음이온 포착제, 양(兩)쪽 이온 포착제를 들 수 있다. 무기계 화합물로서는 예를 들면, 안티몬, 비스무트, 지르코늄, 티탄, 주석, 마그네슘, 및 알루미늄으로 이루어지는 군으로부터 선택되는 1종 이상의 금속 원자를 포함하는 무기계 화합물을 들 수 있다. 이들 중에서도 비스무트, 지르코늄, 마그네슘, 및 알루미늄으로 이루어지는 군으로부터 선택되는 1종 이상의 금속 원자를 포함하는 무기계 화합물이 바람직하다. 상기 이온 포착제는 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다. 또한, 상기 메디안 직경은 레이저 회절/산란식 입자경 분포 측정 장치를 이용하여 측정할 수 있고, 시판품의 경우 카탈로그값을 참고로 한다.The ion trapping agent is an inorganic compound having a median diameter of 0.1 to 10 μm. The ion trapping agent may be any one capable of trapping at least one of cations and anions, and examples thereof include cation trapping agents, anion trapping agents, and both ion trapping agents having ion trapping ability. Examples of the inorganic compound include inorganic compounds containing at least one metal atom selected from the group consisting of antimony, bismuth, zirconium, titanium, tin, magnesium, and aluminum. Among these, an inorganic compound containing at least one metal atom selected from the group consisting of bismuth, zirconium, magnesium, and aluminum is preferable. The said ion trapping agent can be used individually or in combination of 2 or more types. In addition, the median diameter can be measured using a laser diffraction/scattering type particle size distribution measuring device, and in the case of a commercial product, reference is made to the catalog value.
상기 이온 포착제는 상기 카본 블랙 100 질량부에 대하여 1 ~ 15 질량부이다. 상기 이온 포착제는 상기 카본 블랙 100질량부에 대하여 세선 밀착성을 향상시키는 관점에서 2질량부 이상인 것이 바람직하고, 3질량부 이상인 것이 보다 바람직하고, 그리고 광학 농도 을 향상시키는 관점에서 10질량부 이하인 것이 바람직하고, 8질량부 이하인 것이 보다 바람직하다.The ion trapping agent is 1 to 15 parts by mass based on 100 parts by mass of the carbon black. The ion trapping agent is preferably 2 parts by mass or more, more preferably 3 parts by mass or more, and 10 parts by mass or less from the viewpoint of improving the optical density, with respect to 100 parts by mass of the carbon black. It is preferable, and it is more preferable that it is 8 mass parts or less.
<용제><Solvent>
상기 용제는 블랙 매트릭스용 안료 분산 조성물에 사용되는 공지의 용제를 사용할 수 있다. 상기 용제는 안료를 안정적으로 분산시키고, 상기 염기성기 함유 안료 분산제나 상기 알칼리 가용성 수지를 충분히 용해시킬 수 있는 관점에서 에스테르계 용제, 에테르계 용제, 에테르에스테르계 용제, 케톤계 용매, 방향족 탄화수소계 용제, 질소 함유계 용제 등이 바람직하다. 상기 용제는 단독으로 또는 2종 이상을 조합하여 사용할 수 있다.As the solvent, a known solvent used in a pigment dispersion composition for a black matrix may be used. The solvent stably disperses the pigment and is an ester solvent, an ether solvent, an ether ester solvent, a ketone solvent, or an aromatic hydrocarbon solvent from the viewpoint of sufficiently dissolving the basic group-containing pigment dispersant or the alkali-soluble resin. , nitrogen-containing solvents, etc. are preferable. These solvents can be used alone or in combination of two or more.
상기 에스테르계 용제로서는 2-히드록시프로피온산메틸, 2-히드록시프로피온산에틸, 2-히드록시-2-메틸프로피온산에틸, 3-메틸-3-메톡시부틸프로피오네이트, 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 에톡시아세트산에틸, 히드록시아세트산에스테르, 포름산 n-아밀 등을 들 수 있다. 상기 에테르계 용제로서는 예를 들면, 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 에틸렌글리콜모노이소프로필에테르, 에틸렌글리콜모노부틸에테르, 디에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노에틸에테르, 프로필렌글리콜모노메틸에테르, 프로필렌글리콜모노에틸에테르, 프로필렌글리콜모노부틸에테르, 디에틸렌글리콜디에틸에테르, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜메틸에틸에테르 등을 들 수 있다. 상기 에테르에스테르계 용제로서는 예를 들면, 에틸렌글리콜모노메틸에테르아세테이트, 에틸렌글리콜모노에틸에테르아세테이트, 에틸렌글리콜모노부틸에테르아세테이트, 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트 등을 들 수 있다. 상기 케톤계 용제로서는 예를 들면, 메틸이소부틸케톤, 시클로헥사논, 2-헵타논, δ-부티로락톤 등을 들 수 있다. 상기 방향족 탄화수소계 용제로서는 예를 들면, 톨루엔, 크실렌, 알킬나프탈렌 등을 들 수 있다. 상기 질소 함유계 용제의 예는 N-메틸피롤리돈, N,N-디메틸포름아미드, N,N-디메틸아세트아미드 등을 들 수 있다.Examples of the ester solvent include methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, 3-methyl-3-methoxybutylpropionate, methyl 3-methoxypropionate, Ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, hydroxyacetic acid ester, n-amyl formate, etc. are mentioned. Examples of the ether-based solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, and propylene glycol. monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, diethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether and the like. Examples of the ether ester solvent include ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate. Examples of the ketone solvent include methyl isobutyl ketone, cyclohexanone, 2-heptanone, and δ-butyrolactone. Examples of the aromatic hydrocarbon-based solvent include toluene, xylene, and alkyl naphthalene. Examples of the nitrogen-containing solvent include N-methylpyrrolidone, N,N-dimethylformamide, and N,N-dimethylacetamide.
상기 용제의 비율은 상기 블랙 매트릭스용 안료 분산 조성물 중, 공정성의 관점에서 40질량% 이상인 것이 바람직하고, 50질량% 이상인 것이 보다 바람직하며, 분산 안정성의 관점에서 90질량% 이하인 것이 바람직하고, 80질량% 이하인 것이 보다 바람직하다.The ratio of the solvent is preferably 40% by mass or more, more preferably 50% by mass or more, and preferably 90% by mass or less from the viewpoint of processability, and 80% by mass in the pigment dispersion composition for a black matrix. It is more preferable that it is % or less.
<에폭시 수지><Epoxy resin>
상기 블랙 매트릭스용 안료 분산 조성물에는 세선 밀착성을 향상시키는 관점에서 에폭시 수지를 사용해도 된다. 특히, 고저항 용도에서는 에폭시 수지를 배합하는 것이 바람직하다. 상기 에폭시 수지는 에폭시기를 2개 이상 갖는 다관능 에폭시 수지이다. 상기 에폭시 수지로서는 예를 들면, 비스페놀 A형 에폭시 수지, 비스페놀 F형 에폭시 수지, 비스페놀 S형 에폭시 수지, 트리스페놀메탄형 에폭시 수지, 비페놀형 에폭시 수지, 지환식 에폭시 수지, 지방족사슬형 에폭시 수지, 글리시딜 에스테르형 에폭시 수지, 페놀 화합물(페놀, 크레졸, 알킬페놀, 카테콜, 비스페놀 F, 비스페놀 A, 비스페놀 S 등)과 알데히드 화합물(포름알데히드, 살리실알데히드 등)과의 축합물의 글리시딜 에테르화물, 2관능 페놀의 글리시딜 에테르화물, 2관능 알코올의 글리시딜 에테르화물, 3관능 이상의 폴리페놀의 글리시딜 에테르화물, 및 이들의 수소 첨가물 또는 할로겐화물 등을 들 수 있다. 상기 에폭시 수지는 지환 또는 방향환을 갖는 다관능 에폭시 수지이어도 되고, 또한 지환인 디시클로펜타디엔 골격을 갖는 다관능 에폭시 수지이어도 되고, 그 중에서도 세선 밀착성을 향상시키는 관점에서 방향환을 갖는 다관능 에폭시 수지가 바람직하다. 상기 에폭시 수지의 구체예로서는 에폴라이트 40E, 에폴라이트 100E, 에폴라이트 200E, 에폴라이트 400E, 에폴라이트 70P, 에폴라이트 200P, 에폴라이트 400P, 에폴라이트 1500NP, 에폴라이트 80MF, 에폴라이트 4000, 에폴라이트 3002(이상 쿄에이샤화학사 제조), 데나콜 EX-212L, 데나콜 EX-214L, 데나콜 EX-216L, 데나콜 EX-850L, 데나콜 EX-321L(이상, 나가세켐텍스사 제조), GAN, GOT, NC3000, NC6000, EPPN502H, EPPN-503(이상, 니폰카야쿠사 제조), 에피코트 828, 에피코트 1002, 에피코트 1750, 에피코트 1007, YX8100-BH30, E1256, E4250, E4275 (이상, 재팬에폭시레진사 제조), 에피크론 EXA-9583, 에피크론 N695, HP7200, HP4032(이상, 다이니폰잉키화학공업사 제조), VG3101(미쓰이화학사 제조), 테픽 S, 테픽 G, 테픽 P(이상, 닛산화학공업사 제조), 포토트 YH-434L(도토카세이사 제조) 등을 들 수 있다. 또한, 상기 에폭시 수지는 인단 구조나 비페닐 구조를 갖지 않는 것이 반응성 등의 점에서 바람직하다.You may use an epoxy resin for the said pigment dispersion composition for black matrices from a viewpoint of improving thin wire adhesiveness. In particular, in high-resistance applications, it is preferable to blend an epoxy resin. The epoxy resin is a multifunctional epoxy resin having two or more epoxy groups. Examples of the epoxy resin include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, trisphenolmethane type epoxy resin, biphenol type epoxy resin, alicyclic epoxy resin, aliphatic chain type epoxy resin, Glycidyl ester type epoxy resin, glycidyl condensate of phenolic compounds (phenol, cresol, alkylphenol, catechol, bisphenol F, bisphenol A, bisphenol S, etc.) and aldehyde compounds (formaldehyde, salicylaldehyde, etc.) Ether compounds, glycidyl ether products of bifunctional phenols, glycidyl ether products of bifunctional alcohols, glycidyl ether products of trifunctional or higher functional polyphenols, and hydrogenated products or halides thereof. The epoxy resin may be a polyfunctional epoxy resin having an alicyclic ring or an aromatic ring, or may be a multifunctional epoxy resin having an alicyclic dicyclopentadiene backbone. Resin is preferred. Specific examples of the epoxy resin include Epolite 40E, Epolite 100E, Epolite 200E, Epolite 400E, Epolite 70P, Epolite 200P, Epolite 400P, Epolite 1500NP, Epolite 80MF, Epolite 4000, and Epolite 3002 ( Manufactured by Kyoeisha Chemical Co., Ltd.), Denacol EX-212L, Denacol EX-214L, Denacol EX-216L, Denacol EX-850L, Denacol EX-321L (above, manufactured by Nagase ChemteX Co., Ltd.), GAN, GOT , NC3000, NC6000, EPPN502H, EPPN-503 (above, manufactured by Nippon Kayaku Co., Ltd.), Epicoat 828, Epicoat 1002, Epicoat 1750, Epicoat 1007, YX8100-BH30, E1256, E4250, E4275 (above, Japan Epoxy Resin company), Epicron EXA-9583, Epicron N695, HP7200, HP4032 (above, manufactured by Dainippon Inkki Chemical Industries, Ltd.), VG3101 (manufactured by Mitsui Chemicals, Inc.), Tepic S, Tepic G, Tepic P (above, manufactured by Nissan Chemical Industries, Ltd.) ), Potot YH-434L (manufactured by Doto Kasei Co., Ltd.), and the like. Moreover, it is preferable from points, such as reactivity, that the said epoxy resin does not have an indan structure or a biphenyl structure.
상기 에폭시 수지로서는 예를 들면, 하기 식 1 ~ 7로 표시되는 방향환을 갖는 다관능 에폭시 수지를 바람직하게 들 수 있다.As said epoxy resin, the polyfunctional epoxy resin which has an aromatic ring represented by the following formulas 1-7 is mentioned preferably, for example.
[화학식 2][Formula 2]
(식 1)(Equation 1)
(m은 0 ~ 20이다)(m is 0 to 20)
[화학식 3][Formula 3]
(식 2)(Equation 2)
[화학식 4][Formula 4]
(식 3)(Equation 3)
(n은 1 ~ 20이다)(n is 1 to 20)
[화학식 5][Formula 5]
(식 4)(Equation 4)
(R1 ~ R6은 각각 독립적으로 탄소수가 1 ~ 6의 포화탄화수소기이고, n은 1 ~ 20이다)(R 1 to R 6 are each independently a saturated hydrocarbon group having 1 to 6 carbon atoms, and n is 1 to 20)
[화학식 6][Formula 6]
(식 5)(Equation 5)
(n은 1 ~ 20이다)(n is 1 to 20)
[화학식 7][Formula 7]
(식 6)(Equation 6)
(R1 ~ R2은 각각 독립적으로 탄소수가 1 ~ 6의 포화탄화수소기이고, n은 1 ~ 20이다)(R 1 to R 2 are each independently a saturated hydrocarbon group having 1 to 6 carbon atoms, and n is 1 to 20)
[화학식 8][Formula 8]
(식 7)(Equation 7)
(n은 1 ~ 20이다)(n is 1 to 20)
상기 에폭시 수지는 상기 블랙 매트릭스용 안료 분산 조성물 또는 후술하는 블랙 매트릭스용 레지스트 조성물에 포함되는 카본 블랙 100질량부에 대하여 블랙 매트릭스로서의 저항값의 관점에서 1질량부 이상인 것이 바람직하고, 2질량부 이상인 것이 보다 바람직하고, 5질량부 이상인 것이 더욱 바람직하고, 그리고 안료 농도에 의한 흑색도의 관점에서 30질량부 이하인 것이 바람직하고, 20질량부 이하인 것이 보다 바람직하고, 15질량부 이하인 것이 더욱 바람직하다.The epoxy resin is preferably 1 part by mass or more, and preferably 2 parts by mass or more, from the viewpoint of resistance value as a black matrix with respect to 100 parts by mass of carbon black contained in the pigment dispersion composition for a black matrix or a resist composition for a black matrix described later. More preferably, it is more preferably 5 parts by mass or more, and from the viewpoint of blackness by pigment concentration, it is preferably 30 parts by mass or less, more preferably 20 parts by mass or less, and even more preferably 15 parts by mass or less.
상기 블랙 매트릭스용 안료 분산 조성물에는 필요에 따라 레벨링제, 상기 에폭시 수지 및 상기 알칼리 가용성 수지 이외의 수지, 산화 방지제, 소포제 등의 첨가제를 더 첨가해도 된다. 단, 악취성의 관점에서 티올 화합물(예를 들어, 분자량이 1000 이하인 티올 화합물)은 포함하지 않는 것이 바람직하다.You may further add additives, such as a leveling agent, resin other than the said epoxy resin and the said alkali-soluble resin, antioxidant, and an antifoamer, to the said pigment dispersion composition for black matrices as needed. However, it is preferable not to contain a thiol compound (for example, a thiol compound having a molecular weight of 1000 or less) from the viewpoint of odor.
상기 블랙 매트릭스용 안료 분산 조성물 중, 상기 카본 블랙, 상기 염기성기 함유 안료 분산제, 상기 산성기 함유 안료 분산조제, 상기 알칼리 가용성 수지, 상기 이온 포착제 및 상기 용제의 합계의 비율은 75질량% 이상인 것이 바람직하고, 85질량% 이상인 것이 보다 바람직하고, 95질량% 이상인 것이 더욱 바람직하다. 또한, 상기 에폭시 수지를 배합하는 경우, 상기 블랙 매트릭스용 안료 분산 조성물 중, 상기 카본 블랙, 상기 염기성기 함유 안료 분산제, 상기 산성기 함유 안료 분산조제, 상기 알칼리 가용성 수지, 상기 이온 포착제, 상기 용제 및 상기 에폭시 수지의 합계의 비율은 75질량% 이상인 것이 바람직하고, 85질량% 이상인 것이 보다 바람직하고, 95질량% 이상인 것이 더욱 바람직하다.In the pigment dispersion composition for a black matrix, the total ratio of the carbon black, the basic group-containing pigment dispersant, the acidic group-containing pigment dispersant aid, the alkali-soluble resin, the ion trapping agent, and the solvent is 75% by mass or more. It is preferable, and it is more preferable that it is 85 mass % or more, and it is still more preferable that it is 95 mass % or more. In the case of blending the epoxy resin, in the black matrix pigment dispersion composition, the carbon black, the basic group-containing pigment dispersant, the acidic group-containing pigment dispersing aid, the alkali-soluble resin, the ion trapping agent, and the solvent and the ratio of the total of the epoxy resin is preferably 75% by mass or more, more preferably 85% by mass or more, and still more preferably 95% by mass or more.
상기 블랙 매트릭스용 안료 분산 조성물은 상기 각 성분을 롤밀, 니더, 고속 교반기, 비드밀, 볼밀, 샌드밀, 초음파 분산기, 고압 분산 장치 등을 사용하여 분산 처리하여 제조하면 된다. 특히, 상기 카본 블랙에 포함되는 이온을 포함하는 물질을 효율적으로 포착하고, 광학 농도 및 세선 밀착성을 향상시키는 관점에서 상기 이온 포착제의 존재하에 적어도 상기 카본 블랙을 분산 처리하는 것이 바람직하다.The pigment dispersion composition for the black matrix may be prepared by dispersing the above components using a roll mill, a kneader, a high-speed stirrer, a bead mill, a ball mill, a sand mill, an ultrasonic disperser, a high-pressure dispersion device, or the like. In particular, from the viewpoint of efficiently trapping substances containing ions contained in the carbon black and improving optical density and fine wire adhesion, it is preferable to carry out a dispersion treatment of at least the carbon black in the presence of the ion trapping agent.
<블랙 매트릭스용 레지스트 조성물><Resist composition for black matrix>
본 발명의 블랙 매트릭스용 레지스트 조성물은 상기 블랙 매트릭스용 안료 분산 조성물, 광중합성 화합물, 및 광중합 개시제를 포함한다. 또한, 상기 카본 블랙의 비율은 상기 블랙 매트릭스용 레지스트 조성물의 고형분 중, 30질량% 이상 80질량% 이하인 것이 바람직하다.The resist composition for a black matrix of the present invention includes the pigment dispersion composition for a black matrix, a photopolymerizable compound, and a photopolymerization initiator. In addition, it is preferable that the ratio of the said carbon black is 30 mass % or more and 80 mass % or less with respect to the solid content of the said resist composition for black matrixes.
<광중합성 화합물><Photopolymerizable compound>
상기 광중합성 화합물은 블랙 매트릭스용 레지스트 조성물에 사용되는 공지의 광중합성 화합물을 사용할 수 있고, 예를 들면, 광중합성 불포화 결합을 갖는 모노머, 올리고머 등을 들 수 있다. 상기 광중합성 화합물은 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다.As the photopolymerizable compound, known photopolymerizable compounds used in resist compositions for black matrices may be used, and examples thereof include monomers and oligomers having photopolymerizable unsaturated bonds. The photopolymerizable compound may be used alone or in combination of two or more.
광중합성 불포화 결합을 1개 갖는 모노머로서는 예를 들면, 메틸메타크릴레이트, 부틸메타크릴레이트, 2-에틸헥실메타크릴레이트, 메틸아크릴레이트, 부틸아크릴레이트, 2-에틸헥실아크릴레이트 등의 알킬메타크릴레이트 또는 아크릴레이트; 벤질메타크릴레이트, 벤질아크릴레이트 등의 아랄킬메타크릴레이트 또는 아크릴레이트; 부톡시에틸메타크릴레이트, 부톡시에틸아크릴레이트 등의 알콕시알킬메타크릴레이트 또는 아크릴레이트; N.N-디메틸아미노에틸메타크릴레이트, N.N-디메틸아미노에틸아크릴레이트 등의 아미노알킬메타크릴레이트 또는 아크릴레이트; 디에틸렌글리콜 모노에틸에테르, 트리에틸렌글리콜 모노부틸에테르, 디프로필렌글리콜 모노메틸에테르 등의 폴리알킬렌글리콜 모노알킬에테르의 메타크릴산 에스테르 또는 아크릴산 에스테르; 헥사에틸렌글리콜 모노페닐에테르 등의 폴리알킬렌글리콜 모노아릴에테르의 메타크릴산 에스테르 또는 아크릴산 에스테르; 이소보닐 메타크릴레이트 또는 아크릴레이트; 글리세롤 메타크릴레이트 또는 아크릴레이트; 2-히드록시에틸 메타크릴레이트 또는 아크릴레이트 등을 들 수 있다.Examples of the monomer having one photopolymerizable unsaturated bond include alkyl methacrylates such as methyl methacrylate, butyl methacrylate, 2-ethylhexyl methacrylate, methyl acrylate, butyl acrylate, and 2-ethylhexyl acrylate. acrylates or acrylates; aralkyl methacrylates or acrylates such as benzyl methacrylate and benzyl acrylate; alkoxyalkyl methacrylates or acrylates such as butoxyethyl methacrylate and butoxyethyl acrylate; aminoalkyl methacrylates or acrylates such as N.N-dimethylaminoethyl methacrylate and N.N-dimethylaminoethyl acrylate; methacrylic acid esters or acrylic acid esters of polyalkylene glycol monoalkyl ethers such as diethylene glycol monoethyl ether, triethylene glycol monobutyl ether, and dipropylene glycol monomethyl ether; methacrylic acid esters or acrylic acid esters of polyalkylene glycol monoaryl ethers such as hexaethylene glycol monophenyl ether; isobornyl methacrylate or acrylate; glycerol methacrylate or acrylate; 2-hydroxyethyl methacrylate or acrylate; and the like.
광중합성 불포화 결합을 2개 이상 갖는 모노머로서는 예를 들면 비스페놀 A 디메타크릴레이트, 1,4-부탄디올 디메타크릴레이트, 1,3-부틸렌글리콜 디메타크릴레이트, 디에틸렌글리콜 디메타크릴레이트, 글리세롤 디메타크릴레이트, 네오펜틸 글리콜 디메타크릴레이트, 폴리에틸렌글리콜 디메타크릴레이트, 폴리프로필렌글리콜 디메타크릴레이트, 테트라에틸렌글리콜 디메타크릴레이트, 트리메틸올프로판 트리메타크릴레이트, 펜타에리스리톨 트리메타크릴레이트, 펜타에리스리톨 테트라메타크릴레이트, 디펜타에리스리톨 테트라메타크릴레이트, 디펜타에리스리톨 펜타메타크릴레이트, 비스페놀 A 디아크릴레이트, 1,4-부탄디올 디아크릴레이트, 1,3-부틸렌글리콜 디아크릴레이트, 디에틸렌 글리콜 디아크릴레이트, 글리세롤 디아크릴레이트, 네오펜틸글리콜 디아크릴레이트, 폴리에틸렌글리콜 디아크릴레이트, 폴리프로필렌글리콜 디아크릴레이트, 테트라에틸렌글리콜 디아크릴레이트, 트리메틸올프로판 트리아크릴레이트, 펜타에리트리톨 트리아크릴레이트, 펜타에리트리톨 테트라아크릴레이트, 디펜타에리트리톨 테트라아크릴레이트, 디펜타에리트리톨 헥사아크릴레이트, 디펜타에리트리톨 펜타아크릴레이트 등을 들 수 있다.Examples of the monomer having two or more photopolymerizable unsaturated bonds include bisphenol A dimethacrylate, 1,4-butanediol dimethacrylate, 1,3-butylene glycol dimethacrylate, and diethylene glycol dimethacrylate. , glycerol dimethacrylate, neopentyl glycol dimethacrylate, polyethylene glycol dimethacrylate, polypropylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, trimethylolpropane trimethacrylate, pentaerythritol trimeta acrylate, pentaerythritol tetramethacrylate, dipentaerythritol tetramethacrylate, dipentaerythritol pentamethacrylate, bisphenol A diacrylate, 1,4-butanediol diacrylate, 1,3-butylene glycol diacrylate Rate, diethylene glycol diacrylate, glycerol diacrylate, neopentyl glycol diacrylate, polyethylene glycol diacrylate, polypropylene glycol diacrylate, tetraethylene glycol diacrylate, trimethylolpropane triacrylate, pentaeryth A ritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol hexaacrylate, dipentaerythritol pentaacrylate, etc. are mentioned.
광중합성 불포화 결합을 갖는 올리고머로서는 예를 들어 상기 모노머를 적절히 중합시켜 얻어진 것을 들 수 있다.As an oligomer which has a photopolymerizable unsaturated bond, what was obtained by suitably polymerizing the said monomer is mentioned, for example.
상기 광중합성 화합물은 상기 블랙 매트릭스용 레지스트 조성물의 고형분 중, 2 ~ 20질량%인 것이 바람직하고, 4 ~ 15질량%인 것이 보다 바람직하다.The photopolymerizable compound is preferably 2 to 20% by mass, and more preferably 4 to 15% by mass, based on the solid content of the resist composition for a black matrix.
상기 광중합 개시제는 블랙 매트릭스용 레지스트 조성물에 사용되는 공지의 광중합 개시제를 사용할 수 있고, 예를 들면 벤조페논, N,N'-테트라에틸-4,4'-디아미노벤조페논, 4-메톡시-4'-디메틸아미노벤조페논, 벤질, 2,2-디에톡시아세토페논, 벤조인, 벤조인메틸에테르, 벤조인이소부틸에테르, 벤질디메틸케탈, α-히드록시이소부틸페논, 티옥산톤, 2-클로로티옥산톤, 1-히드록시시클로헥실페닐케톤, t-부틸안트라퀴논, 1-클로로안트라퀴논, 2,3-디클로로안트라퀴논, 3-클로로-2-메틸안트라퀴논, 2-에틸안트라퀴논, 1,4-나프토퀴논, 1,2-벤조안트라퀴논, 1,4-디메틸안트라퀴논, 2-페닐안트라퀴논, 트리아진계 광중합 개시제, 옥심에스테르계 광중합 개시제 등을 들 수 있다. 상기 광중합 개시제는 단독으로, 또는 2종 이상을 조합하여 사용할 수 있다.As the photopolymerization initiator, known photopolymerization initiators used in resist compositions for black matrices may be used, and examples thereof include benzophenone, N,N'-tetraethyl-4,4'-diaminobenzophenone, and 4-methoxy- 4'-dimethylaminobenzophenone, benzyl, 2,2-diethoxyacetophenone, benzoin, benzoinmethyl ether, benzoin isobutyl ether, benzyldimethylketal, α-hydroxyisobutylphenone, thioxanthone, 2 -Chlorothioxanthone, 1-hydroxycyclohexylphenylketone, t-butylanthraquinone, 1-chloroanthraquinone, 2,3-dichloroanthraquinone, 3-chloro-2-methylanthraquinone, 2-ethylanthraquinone , 1,4-naphthoquinone, 1,2-benzoanthraquinone, 1,4-dimethylanthraquinone, 2-phenylanthraquinone, triazine-based photopolymerization initiators, and oxime ester-based photopolymerization initiators. The photopolymerization initiator may be used alone or in combination of two or more.
상기 광중합 개시제는 상기 블랙 매트릭스용 레지스트 조성물의 고형분 중, 0.1 ~ 15질량%인 것이 바람직하고, 1 ~ 10질량%인 것이 보다 바람직하다.It is preferable that it is 0.1-15 mass %, and, as for the said photoinitiator, it is more preferable that it is 1-10 mass % in the solid content of the said black matrix resist composition.
상기 블랙 매트릭스용 레지스트 조성물은 알칼리 현상액에 의한 현상성의 관점에서 상기 알칼리 가용성 수지를 더 첨가해도 된다. 또한, 상기 알칼리 가용성 수지의 합계는 상기 블랙 매트릭스용 레지스트 조성물의 고형분 중, 10질량% 이상 50질량% 이하인 것이 바람직하다. 또한, 상기 블랙 매트릭스용 레지스트 조성물은 도장성을 향상시키는 관점에서 상기 용제를 더 첨가해도 된다. 상기 용제의 합계의 비율은 상기 블랙 매트릭스용 레지스트 조성물 중, 50질량% 이상인 것이 바람직하고, 70질량% 이상인 것이 보다 바람직하다.The alkali-soluble resin may be further added to the resist composition for a black matrix from the viewpoint of developability with an alkali developer. In addition, it is preferable that the total amount of the alkali-soluble resin is 10% by mass or more and 50% by mass or less based on the solid content of the resist composition for a black matrix. In addition, the said solvent may be further added to the said resist composition for black matrices from a viewpoint of improving paintability. It is preferable that it is 50 mass % or more, and, as for the ratio of the sum total of the said solvent, in the said black matrix resist composition, it is more preferable that it is 70 mass % or more.
상기 블랙 매트릭스용 레지스트 조성물에는 필요에 따라 레벨링제, 산화 방지제, 소포제 등의 첨가제를 더 첨가해도 된다.You may further add additives, such as a leveling agent, antioxidant, and an antifoamer, to the said resist composition for black matrices as needed.
상기 블랙 매트릭스용 레지스트 조성물은 상기 블랙 매트릭스용 안료 분산 조성물, 광중합성 화합물, 및 광중합 개시제 등의 각 성분을 교반 장치 등을 사용하여 교반 혼합하여 제조하면 된다.The resist composition for a black matrix may be prepared by stirring and mixing each component such as the pigment dispersion composition for a black matrix, a photopolymerizable compound, and a photopolymerization initiator using a stirring device or the like.
<블랙 레지스트막><Black Resist Film>
본 발명의 블랙 레지스트막은 상기 블랙 매트릭스용 레지스트 조성물을 사용하여 얻어진다. 상기 블랙 레지스트막은 표면 저항값이 5.0×109Ω/□ 이상인 것이 바람직하고, 1.0×1010Ω/□ 이상인 것이 보다 바람직하고, 1.0×1011Ω/□ 이상인 것이 더욱 바람직하다. 특히, 고저항 용도에서는 표면 저항값이 1.0×1012 Ω/□ 이상인 것이 바람직하고, 1.0×1013 Ω/□ 이상인 것이 보다 바람직하다.The black resist film of the present invention is obtained using the above resist composition for a black matrix. The black resist film preferably has a surface resistance value of 5.0×10 9 Ω/□ or more, more preferably 1.0×10 10 Ω/□ or more, and still more preferably 1.0×10 11 Ω/□ or more. In particular, for high-resistance applications, the surface resistance value is preferably 1.0×10 12 Ω/□ or more, and more preferably 1.0×10 13 Ω/□ or more.
[실시예][Example]
이하에 본 발명을 실시예 등에 의해 설명하지만, 본 발명은 이들에만 한정되는 것은 아니다.The present invention will be described below by examples and the like, but the present invention is not limited to these.
<실시예 1-1 ~ 1-11, 비교예 1-1 ~ 1-6><Examples 1-1 to 1-11, Comparative Examples 1-1 to 1-6>
<블랙 매트릭스용 안료 분산 조성물의 제조><Preparation of Pigment Dispersion Composition for Black Matrix>
표 1 및 2에 나타내는 각종 원료를 표 1 및 2에 나타내는 배합 조성(질량%)이 되도록 혼합한 후, 비드 밀로 연육하고, 각 실시예 및 비교예의 블랙 매트릭스용 안료 분산 조성물을 제조하였다.After mixing the various raw materials shown in Tables 1 and 2 so as to have the compounding composition (% by mass) shown in Tables 1 and 2, they were tenderized with a bead mill to prepare black matrix pigment dispersion compositions of Examples and Comparative Examples.
표 1 및 2 중, NEROX305는 산성 카본 블랙(흡유량 58ml/100g, pH 2.8, 평균 1차 입자경 28nm, 오리온·엔지니어드카본즈사 제조);In Tables 1 and 2, NEROX305 is acidic carbon black (oil absorption 58 ml/100 g, pH 2.8, average primary particle size 28 nm, manufactured by Orion Engineered Carbons);
TPK1104R은 산성 카본 블랙(흡유량: 38ml/100g, pH 3.0, 평균 1차 입자경 약 30nm, 캐보트사 제조);TPK1104R is acidic carbon black (oil absorption: 38 ml/100 g, pH 3.0, average primary particle diameter of about 30 nm, manufactured by Cabot Co.);
IXEPLAS B1은 양이온 포착제(지르코늄/비스무트계, 메디안 직경 0.4㎛, 토아합성사 제조);IXEPLAS B1 is a cation scavenger (zirconium/bismuth type, median diameter 0.4 μm, manufactured by Toa Synthetic Industries Co., Ltd.);
IXE-100은 양이온 포착제(지르코늄계, 메디안 직경 1㎛, 토아합성사 제조);IXE-100 is a cation scavenger (zirconium-based, median diameter of 1 μm, manufactured by Toa Synthetic Co., Ltd.);
IXE-500은 음이온 포착제(비스무트계, 메디안 직경 1.5㎛, 토아합성사 제조);IXE-500 is an anion scavenger (bismuth type, median diameter 1.5 μm, manufactured by Toa Synthetic Industries Co., Ltd.);
IXE-550은 음이온 포착제(비스무트계, 메디안 직경 1.5㎛, 토아합성사 제조);IXE-550 is an anion scavenger (bismuth type, median diameter 1.5 μm, manufactured by Toa Synthetic Industries Co., Ltd.);
IXE-600은 양이온 포착제(안티몬/비스무트계, 메디안 직경 1㎛, 토아합성사 제조);IXE-600 is a cation scavenger (antimony/bismuth type, median diameter of 1 μm, manufactured by Toa Synthetic Industries Co., Ltd.);
IXE-700F는 음이온 포착제(알루미늄/마그네슘계, 메디안 지름 1.5㎛, 토아합성사 제조);IXE-700F is an anion scavenger (aluminum/magnesium type, median diameter 1.5 μm, manufactured by Toa Synthesis Co., Ltd.);
IXE-770F는 음이온 포착제(알루미늄/마그네슘계, 메디안 직경 6㎛, 토아합성사 제조);IXE-770F is an anion scavenger (aluminum/magnesium type, median diameter of 6 μm, manufactured by Toa Synthetic Technology Co., Ltd.);
IXE-6136은 양이온 포착제(지르코늄/비스무트계, 메디안 지름 2.1㎛, 토아합성사 제조);IXE-6136 is a cation scavenger (zirconium/bismuth type, median diameter 2.1 μm, manufactured by Toa Synthetic Industries Co., Ltd.);
DB167은 폴리에스테르쇄를 갖는 아미노기 함유 폴리우레탄계 고분자 분산제(빅케미사 제조, 고형분의 아민가 25mgKOH/g, 고형분 52질량%);DB167 is an amino group-containing polyurethane-based polymer dispersant having a polyester chain (manufactured by Big Chemie Co., Ltd., amine value of 25 mgKOH/g in solid content, solid content of 52% by mass);
SS5000S는 술폰산기를 갖는 프탈로시아닌계 색소 유도체(루브리졸사 제조);SS5000S is a phthalocyanine-based pigment derivative having a sulfonic acid group (manufactured by Lubrizol);
BYK2100은 술폰산기를 갖는 프탈로시아닌계 색소 유도체(빅케미사 제조);BYK2100 is a phthalocyanine-based pigment derivative having a sulfonic acid group (manufactured by Big Chemistry);
ZCR-1569H는 비페닐 골격을 갖는 알칼리가용성 에폭시(메타)아크릴레이트 수지(고형분 69%, 니폰카야쿠사 제조);ZCR-1569H is an alkali-soluble epoxy (meth)acrylate resin having a biphenyl backbone (solid content: 69%, manufactured by Nippon Kayaku Co., Ltd.);
EPPN-503은 트리스히드록시페닐메탄형 에폭시 수지(니폰카야쿠사 제조);EPPN-503 is a trishydroxyphenylmethane type epoxy resin (manufactured by Nippon Kayaku Co., Ltd.);
PGMEA는 프로필렌글리콜 모노메틸에테르 아세테이트;를 나타낸다.PGMEA stands for propylene glycol monomethyl ether acetate;
<실시예 2-1 ~ 2-11, 비교예 2-1 ~ 2-6><Examples 2-1 to 2-11, Comparative Examples 2-1 to 2-6>
<블랙 매트릭스용 레지스트 조성물의 제조><Preparation of resist composition for black matrix>
표 3 및 표 4에 나타내는 각종 원료를 표 3 및 표 4에 나타내는 배합 조성(질량%)이 되도록 고속 교반기를 사용하여 혼합한 후, 구멍 직경 0.5㎛의 필터로 여과하고, 각 실시예 및 비교예의 블랙 매트릭스용 레지스트 조성물을 제조하였다.Various raw materials shown in Tables 3 and 4 were mixed using a high-speed stirrer so as to have the compounding composition (% by mass) shown in Tables 3 and 4, and then filtered through a filter with a pore diameter of 0.5 μm, and each Example and Comparative Example A resist composition for a black matrix was prepared.
또한, 상기에서 얻어진 블랙 매트릭스용 레지스트 조성물을 사용하여 이하의 평가 방법에 따라 각 항목을 평가하였다. 결과를 표 3 및 표 4에 나타낸다.In addition, each item was evaluated according to the following evaluation method using the resist composition for black matrices obtained above. The results are shown in Table 3 and Table 4.
<레지스트 패턴의 광학 농도(OD값)의 평가><Evaluation of optical density (OD value) of resist pattern>
상기 각 블랙 매트릭스용 레지스트 조성물을 스핀 코터로 막 두께 1㎛가 되도록 유리 기판(코닝 1737) 상에 도포하고, 100℃에서 3분간 프리베이크한 후, 고압수은등으로 노광하고, 또한 230℃에서 30분간 포스트베이크를 행하여 전면부(베타부)만으로 형성된 레지스트막을 얻었다. 얻어진 각 전면부의 레지스트막의 광학 농도(OD값)를 맥베스농도계(TD-931, 상품명, 맥베스사 제조)로 측정하였다. 광학 농도(OD값)가 4.0 이상인 것을 합격 기준으로 하였다.Each of the above black matrix resist compositions was coated on a glass substrate (Corning 1737) to a film thickness of 1 μm by a spin coater, prebaked at 100° C. for 3 minutes, then exposed with a high-pressure mercury lamp, and further at 230° C. for 30 minutes Post-baking was performed to obtain a resist film formed of only the front portion (solid portion). The optical density (OD value) of the resulting resist film on each front surface was measured with a Macbeth densitometer (TD-931, trade name, manufactured by Macbeth). An optical density (OD value) of 4.0 or more was used as the acceptance criterion.
<블랙 레지스트막의 세선 밀착성(A) 및 (B)의 평가><Evaluation of thin wire adhesion (A) and (B) of black resist film>
상기 각 블랙 매트릭스용 레지스트 조성물을 스핀 코터로 막 두께 1㎛가 되도록 유리 기판(EAGL XG) 상에 도포하고, 100℃에서 3분간 프리베이크하였다. 이어서, 1㎛ 내지 20㎛의 선폭에 대해 1㎛ 간격의 라인 패턴을 갖는 포토마스크를 사용하고 고압 수은등을 사용하여 UV 적산 광량 100mJ/㎠로 노광하였다. 그 후, 23℃, 0.05% 수산화칼륨 수용액 중 1kgf/㎠의 샤워 현상압에서 현상 패턴이 나타나기 시작하는 시간(브레이크 포인트)부터 현상을 개시하고, 세선 밀착성(A)의 평가에서는 브레이크 포인트의 1.3배의 시간이 된 곳에서 현상을 종료하고, 세선 밀착성(B)의 평가에서는 브레이크 포인트의 30초 후가 된 곳에서 현상을 종료하였다. 그 후, 1kgf/㎠압의 스프레이 수세를 행하였다. 유리 기판 상에 잔류하는 최소 라인 패턴의 크기(㎛)를 평가하였다. 세선 밀착성(A)의 평가는 브레이크 포인트가 50±25초이고, 최소의 라인 패턴의 사이즈가 10㎛ 이하인 것을 합격 기준으로 하였다. 또한, 세선 밀착성(B)의 평가는 브레이크 포인트가 20±10초이고, 최소의 라인 패턴의 사이즈가 8㎛ 이하인 것을 합격 기준으로 하였다.Each of the above black matrix resist compositions was coated on a glass substrate (EAGL XG) with a spin coater to a film thickness of 1 μm, and prebaked at 100° C. for 3 minutes. Subsequently, a photomask having a line pattern at intervals of 1 μm for a line width of 1 μm to 20 μm was used, and exposure was performed with a cumulative UV light amount of 100 mJ/cm 2 using a high-pressure mercury lamp. Thereafter, development was started from the time at which the development pattern began to appear (break point) at 23°C and a shower development pressure of 1 kgf/cm in a 0.05% potassium hydroxide aqueous solution. Development was terminated at the time of , and development was terminated at 30 seconds after the break point in the evaluation of thin wire adhesion (B). Thereafter, spray washing was performed at a pressure of 1 kgf/cm 2 . The size (μm) of the minimum line pattern remaining on the glass substrate was evaluated. The evaluation of thin wire adhesion (A) was based on a break point of 50 ± 25 seconds and a minimum line pattern size of 10 µm or less. In the evaluation of thin wire adhesion (B), a break point of 20±10 seconds and a minimum line pattern size of 8 μm or less were used as acceptance criteria.
<블랙 레지스트막의 표면 저항값의 측정><Measurement of Surface Resistance of Black Resist Film>
상기 각 블랙 매트릭스용 레지스트 조성물을 스핀 코터로 막 두께 1㎛가 되도록 유리 기판(EAGL XG) 상에 도포하고, 100℃에서 3분간 프리베이크한 후, 고압 수은등으로 노광(UV 적산 광량) 80 mJ/㎠)하고, 추가로 230℃에서 60분간 포스트 베이크를 행하여, 전면부만으로 형성된 블랙 레지스트 패턴(블랙 매트릭스)을 제작하였다. 제작한 각 블랙 레지스트 패턴의 표면 저항값을 본체:미세 전류계 R8340, 옵션:쉴드 박스 R12702A(모두 어드밴스사 제조)로 측정하였다.Each of the above black matrix resist compositions was coated on a glass substrate (EAGL XG) with a spin coater to a film thickness of 1 μm, prebaked at 100° C. for 3 minutes, and then exposed with a high pressure mercury lamp (UV light intensity) 80 mJ/ cm 2 ), and post-baking at 230° C. for 60 minutes was further performed to produce a black resist pattern (black matrix) formed only on the front portion. The surface resistance value of each produced black resist pattern was measured with main body: microcurrent meter R8340, option: shield box R12702A (both manufactured by Advance Co.).
표 3 및 표 4 중에서 DPHA는 디펜타에리트리톨 헥사아크릴레이트;In Tables 3 and 4, DPHA is dipentaerythritol hexaacrylate;
OXE02는 옥심에스테르계 광중합 개시제 「IRGACURE OXE02」(BASF 재팬사 제조);OXE02 is an oxime ester photopolymerization initiator "IRGACURE OXE02" (manufactured by BASF Japan);
WR-301은 알칼리 가용성 카르도 수지 「ADEKA ARKLS WR-301」(고형분 44%, ADEKA사 제조);WR-301 is an alkali-soluble cardo resin "ADEKA ARKLS WR-301" (44% solid content, manufactured by ADEKA Corporation);
PGMEA는 프로필렌글리콜 모노메틸에테르 아세테이트;를 나타낸다.PGMEA stands for propylene glycol monomethyl ether acetate;
Claims (7)
상기 카본 블랙은 산성 카본 블랙이며,
상기 이온 포착제는 메디안 직경이 0.1 ~ 10㎛인 무기계 화합물이며, 또한 상기 카본 블랙 100질량부에 대하여 1 ~ 15질량부인 것을 특징으로 하는 블랙 매트릭스용 안료 분산 조성물.containing carbon black, a pigment dispersant containing a basic group, a pigment dispersing aid containing an acidic group, an alkali-soluble resin, an ion trapping agent, and a solvent;
The carbon black is an acidic carbon black,
The ion trapping agent is an inorganic compound having a median diameter of 0.1 to 10 µm, and is 1 to 15 parts by mass based on 100 parts by mass of the carbon black. The pigment dispersion composition for a black matrix, characterized in that:
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