KR20230033608A - 웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치 - Google Patents

웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치 Download PDF

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KR20230033608A
KR20230033608A KR1020220107361A KR20220107361A KR20230033608A KR 20230033608 A KR20230033608 A KR 20230033608A KR 1020220107361 A KR1020220107361 A KR 1020220107361A KR 20220107361 A KR20220107361 A KR 20220107361A KR 20230033608 A KR20230033608 A KR 20230033608A
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variables
mapping rule
wafer
semiconductor components
mapping
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KR1020220107361A
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안드레아스 슈타이머
에릭 세바스찬 슈미트
마티아스 베르너
메울 반잘
미헬 야누스
슈테판 파트릭 린트
차바 도모코스
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로베르트 보쉬 게엠베하
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Publication of KR20230033608A publication Critical patent/KR20230033608A/ko

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00Machine learning
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04Manufacturing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10Complex mathematical operations
    • G06F17/18Complex mathematical operations for evaluating statistical data, e.g. average values, frequency distributions, probability functions, regression analysis
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00Machine learning
    • G06N20/10Machine learning using kernel methods, e.g. support vector machines [SVM]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods
    • G06N3/084Backpropagation, e.g. using gradient descent
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00Computing arrangements using knowledge-based models
    • G06N5/01Dynamic search techniques; Heuristics; Dynamic trees; Branch-and-bound
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00Administration; Management
    • G06Q10/04Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00Administration; Management
    • G06Q10/06Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

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  • Physics & Mathematics (AREA)
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  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Development Economics (AREA)
  • Computational Linguistics (AREA)
  • Quality & Reliability (AREA)
  • Computational Mathematics (AREA)
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  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • General Health & Medical Sciences (AREA)
  • Game Theory and Decision Science (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Evolutionary Biology (AREA)
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  • Bioinformatics & Computational Biology (AREA)
KR1020220107361A 2021-09-01 2022-08-26 웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치 KR20230033608A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021209608.5A DE102021209608A1 (de) 2021-09-01 2021-09-01 Verfahren und Vorrichtung zur Positionsrekonstruktion von Halbleiterbauteilen auf einem Wafer
DE102021209608.5 2021-09-01

Publications (1)

Publication Number Publication Date
KR20230033608A true KR20230033608A (ko) 2023-03-08

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KR1020220107361A KR20230033608A (ko) 2021-09-01 2022-08-26 웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치

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JP (1) JP2023036038A (de)
KR (1) KR20230033608A (de)
CN (1) CN115795254A (de)
DE (1) DE102021209608A1 (de)
TW (1) TW202329279A (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102194962B1 (ko) 2020-05-20 2020-12-24 주식회사 네이처모빌리티 빅데이터 기반 택시수요예측을 이용한 ai 자동배차 매칭 서비스 제공 시스템

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CN115795254A (zh) 2023-03-14
TW202329279A (zh) 2023-07-16
JP2023036038A (ja) 2023-03-13
DE102021209608A1 (de) 2023-03-02

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