KR20230033608A - 웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치 - Google Patents
웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치 Download PDFInfo
- Publication number
- KR20230033608A KR20230033608A KR1020220107361A KR20220107361A KR20230033608A KR 20230033608 A KR20230033608 A KR 20230033608A KR 1020220107361 A KR1020220107361 A KR 1020220107361A KR 20220107361 A KR20220107361 A KR 20220107361A KR 20230033608 A KR20230033608 A KR 20230033608A
- Authority
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- South Korea
- Prior art keywords
- variables
- mapping rule
- wafer
- semiconductor components
- mapping
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000013507 mapping Methods 0.000 claims abstract description 78
- 238000012360 testing method Methods 0.000 claims abstract description 78
- 239000011159 matrix material Substances 0.000 claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 claims abstract description 19
- 238000004422 calculation algorithm Methods 0.000 claims abstract description 11
- 235000012431 wafers Nutrition 0.000 claims description 54
- 238000013100 final test Methods 0.000 claims description 31
- 238000010801 machine learning Methods 0.000 claims description 17
- 238000012549 training Methods 0.000 claims description 17
- 238000004590 computer program Methods 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 3
- 238000012417 linear regression Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 description 14
- 239000000047 product Substances 0.000 description 13
- 238000005457 optimization Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 4
- 238000012858 packaging process Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000004886 process control Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000013528 artificial neural network Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003066 decision tree Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012706 support-vector machine Methods 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
- G06Q50/04—Manufacturing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
- G06F17/10—Complex mathematical operations
- G06F17/18—Complex mathematical operations for evaluating statistical data, e.g. average values, frequency distributions, probability functions, regression analysis
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
- G06N20/10—Machine learning using kernel methods, e.g. support vector machines [SVM]
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
- G06N3/084—Backpropagation, e.g. using gradient descent
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N5/00—Computing arrangements using knowledge-based models
- G06N5/01—Dynamic search techniques; Heuristics; Dynamic trees; Branch-and-bound
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Business, Economics & Management (AREA)
- Software Systems (AREA)
- Data Mining & Analysis (AREA)
- Mathematical Physics (AREA)
- General Engineering & Computer Science (AREA)
- Strategic Management (AREA)
- Human Resources & Organizations (AREA)
- Economics (AREA)
- Evolutionary Computation (AREA)
- Artificial Intelligence (AREA)
- Computing Systems (AREA)
- Operations Research (AREA)
- General Business, Economics & Management (AREA)
- Tourism & Hospitality (AREA)
- Marketing (AREA)
- Entrepreneurship & Innovation (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Medical Informatics (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Development Economics (AREA)
- Computational Linguistics (AREA)
- Quality & Reliability (AREA)
- Computational Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Mathematical Analysis (AREA)
- Mathematical Optimization (AREA)
- General Health & Medical Sciences (AREA)
- Game Theory and Decision Science (AREA)
- Pure & Applied Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Evolutionary Biology (AREA)
- Molecular Biology (AREA)
- Bioinformatics & Computational Biology (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102021209608.5A DE102021209608A1 (de) | 2021-09-01 | 2021-09-01 | Verfahren und Vorrichtung zur Positionsrekonstruktion von Halbleiterbauteilen auf einem Wafer |
DE102021209608.5 | 2021-09-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20230033608A true KR20230033608A (ko) | 2023-03-08 |
Family
ID=85175411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020220107361A KR20230033608A (ko) | 2021-09-01 | 2022-08-26 | 웨이퍼 상의 반도체 부품들의 위치 재구성 방법 및 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2023036038A (de) |
KR (1) | KR20230033608A (de) |
CN (1) | CN115795254A (de) |
DE (1) | DE102021209608A1 (de) |
TW (1) | TW202329279A (de) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102194962B1 (ko) | 2020-05-20 | 2020-12-24 | 주식회사 네이처모빌리티 | 빅데이터 기반 택시수요예측을 이용한 ai 자동배차 매칭 서비스 제공 시스템 |
-
2021
- 2021-09-01 DE DE102021209608.5A patent/DE102021209608A1/de active Pending
-
2022
- 2022-08-26 KR KR1020220107361A patent/KR20230033608A/ko unknown
- 2022-08-30 TW TW111132706A patent/TW202329279A/zh unknown
- 2022-08-31 JP JP2022137602A patent/JP2023036038A/ja active Pending
- 2022-08-31 CN CN202211054043.9A patent/CN115795254A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN115795254A (zh) | 2023-03-14 |
TW202329279A (zh) | 2023-07-16 |
JP2023036038A (ja) | 2023-03-13 |
DE102021209608A1 (de) | 2023-03-02 |
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