KR20230027266A - Shape memory alloy actuator and method - Google Patents

Abstract

SMA actuators and related methods are described. One embodiment of the actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled to a pair of buckle arms among a plurality of buckle arms. Another embodiment of an actuator includes at least one bimorph actuator comprising a base and a shape memory alloy material. Bimorph actuators are attached to the base.

Description

Shape memory alloy actuator and method

CROSS REFERENCES TO RELATED APPLICATIONS

This application claims the benefit and priority of U.S. Provisional Application No. 63/044,305, filed on June 25, 2020, and U.S. Patent Application No. 17/195,497, filed on March 8, 2021, the disclosures of which is incorporated herein by reference in its entirety.

technology field

Embodiments of the present invention relate to the field of shape memory alloy systems. More specifically, embodiments of the present invention relate to the field of shape memory alloy actuators and methods related thereto.

A shape memory alloy ("SMA") system has a moving assembly or structure that can be used with a camera lens element, for example as an autofocus drive. These systems may be surrounded by a structure such as a screening can. The moving assembly is supported for movement on the support assembly by a plurality of ball-like bearings. A bending element formed of a metal such as phosphor bronze or stainless steel has a moving plate and a bending portion. The flexure extends between the moving plate and the stationary support assembly and functions as a spring enabling movement of the movement assembly relative to the stationary support assembly. The ball allows the moving assembly to move with little resistance. The mobile assembly and support assembly are joined by four shape memory alloy (SMA) wires extending between the assemblies. Each SMA wire has one end attached to the support assembly and the opposite end attached to the moving assembly. The suspension is driven by applying an electrical drive signal to the SMA wires. However, this type of system suffers from the complexity of the system resulting in a bulky system requiring a large installation space and a large height clearance. Also, current systems do not offer a high Z-stroke range with a compact, low profile footprint.

SMA actuators and related methods are described. One embodiment of the actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled to a pair of buckle arms among a plurality of buckle arms. Another embodiment of an actuator includes at least one bimorph actuator comprising a base and a shape memory alloy material. A bimorph actuator is attached to the base.

Other features and advantages of embodiments of the present invention will be apparent from the accompanying drawings and detailed description below.

Embodiments of the present invention are illustrated by way of example and not limitation in the drawings of the accompanying drawings in which like reference numbers indicate like elements, in which:
1A illustrates a lens assembly comprising an SMA actuator configured as a buckle actuator according to an embodiment;
1b illustrates an SMA actuator according to an embodiment;
2 illustrates an SMA actuator according to an embodiment;
3 illustrates an exploded view of an auto focus assembly including an SMA wire actuator according to an embodiment;
4 illustrates an autofocus assembly including an SMA actuator according to an embodiment;
5 illustrates an SMA actuator according to an embodiment including a sensor;
6 illustrates top and side views of an SMA actuator configured as a buckle actuator according to an embodiment fitted with a lens carriage;
7 illustrates a side view of a portion of an SMA actuator according to an embodiment;
8 illustrates multiple views of an embodiment of a buckle actuator;
9 illustrates a bimorph actuator according to an embodiment with a lens carriage;
10 illustrates a cut away view of an auto focus assembly including an SMA actuator according to an embodiment;
11A-11C illustrate diagrams of bimorph actuators in accordance with some embodiments;
12 illustrates a diagram of an embodiment of a bimorph actuator according to an embodiment;
13 illustrates a cross-section of an end pad of a bimorph actuator according to an embodiment;
14 illustrates a central feed pad cross-section of a bimorph actuator according to an embodiment;
15 illustrates an exploded view of an SMA actuator comprising two buckle actuators according to an embodiment;
16 illustrates an SMA actuator comprising two buckle actuators according to an embodiment;
17 illustrates a side view of an SMA actuator comprising two buckle actuators according to an embodiment;
18 illustrates a side view of an SMA actuator comprising two buckle actuators according to an embodiment;
19 illustrates an exploded view of an assembly comprising an SMA actuator comprising two buckle actuators according to an embodiment;
20 illustrates an SMA actuator comprising two buckle actuators according to an embodiment;
21 illustrates an SMA actuator comprising two buckle actuators according to an embodiment;
22 illustrates an SMA actuator comprising two buckle actuators according to an embodiment;
23 illustrates an SMA actuator comprising two buckle actuators and a coupler according to an embodiment;
24 illustrates an exploded view of an SMA system including an SMA actuator including a buckle actuator with a laminate hammock according to an embodiment;
25 illustrates an SMA system including an SMA actuator including a buckle actuator 2402 with a laminate hammock according to an embodiment;
26 illustrates a buckle actuator comprising a laminate hammock according to an embodiment;
27 illustrates a laminate hammock of SMA actuators according to an embodiment;
28 illustrates a laminated crimp connection of an SMA actuator according to an embodiment;
29 illustrates an SMA actuator including a buckle actuator with a laminate hammock;
30 illustrates an exploded view of an SMA system including an SMA actuator including a buckle actuator according to an embodiment;
31 illustrates an SMA system including an SMA actuator including a buckle actuator according to an embodiment;
32 illustrates an SMA actuator including a buckle actuator according to an embodiment;
33 illustrates two yoke capture joints of a pair of buckle arms of an SMA actuator according to an embodiment;
34 illustrates a resistance welding crimp for an SMA actuator according to an embodiment used to attach an SMA wire to a buckle actuator;
35 illustrates an SMA actuator comprising a buckle actuator with two yoke capture joints;
36 illustrates a SMA bimorph liquid lens according to an embodiment;
37 illustrates a see-through SMA bimorph liquid lens according to an embodiment;
38 illustrates cross-section and bottom views of an SMA bimorph liquid lens according to an embodiment;
39 illustrates an SMA system including an SMA actuator with a bimorph actuator according to an embodiment;
40 illustrates an SMA actuator with a bimorph actuator according to an embodiment;
41 illustrates the length of the bimorph actuator and the location of bonding pads for the SMA wire to extend the wire length past the bimorph actuator;
42 illustrates an exploded view of an SMA system including a bimorph actuator according to an embodiment;
43 illustrates an exploded view of a subsection of an SMA actuator according to an embodiment;
44 illustrates a subsection of an SMA actuator according to an embodiment;
45 illustrates a 5-axis sensor shift system according to an embodiment;
46 illustrates an exploded view of a 5-axis sensor shift system according to an embodiment;
47 illustrates an SMA actuator that includes a bimorph actuator integrated into this circuitry for all operation according to an embodiment;
48 illustrates an SMA actuator that includes a bimorph actuator integrated into this circuitry for all operation according to an embodiment;
49 illustrates a cross-section of a 5-axis sensor shift system according to an embodiment;
50 illustrates an SMA actuator according to an embodiment including a bimorph actuator;
51 illustrates a top view of an SMA actuator according to an embodiment including a bimorph actuator that has moved an image sensor at different x and y positions;
52 illustrates an SMA actuator including a bimorph actuator according to an embodiment configured as a box bimorph autofocus;
53 illustrates an SMA actuator including a bimorph actuator according to an embodiment;
54 illustrates an SMA actuator including a bimorph actuator according to an embodiment;
55 illustrates an SMA actuator including a bimorph actuator according to an embodiment;
56 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
57 illustrates an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 2-axis lens shift OIS;
58 illustrates a cross section of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 2-axis lens shift OIS;
59 illustrates a box bimorph actuator according to an embodiment;
60 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
61 illustrates an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
62 illustrates a cross section of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
63 illustrates a box bimorph actuator according to an embodiment;
64 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
65 illustrates an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
66 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
67 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
68 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
69 illustrates an exploded view of an SMA including an SMA actuator according to an embodiment including a bimorph actuator;
70 illustrates a cross-section of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 3-axis sensor shift OIS;
71 illustrates a box bimorph actuator component according to an embodiment;
72 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment;
73 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
74 illustrates an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
75 illustrates a cross section of an SMA system including an SMA actuator according to an embodiment;
76 illustrates a box bimorph actuator according to an embodiment;
77 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment;
78 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
79 illustrates an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
80 illustrates a cross section of an SMA system including an SMA actuator according to an embodiment;
81 illustrates a box bimorph actuator according to an embodiment;
82 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment;
83 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
84 illustrates an exploded view of an SMA system including an SMA actuator according to an embodiment;
85 illustrates a cross-section of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator;
86 illustrates a box bimorph actuator for use in an SMA system according to an embodiment;
87 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment;
88 illustrates example dimensions for a bimorph actuator of an SMA actuator according to an embodiment;
89 illustrates a lens system for a folded camera according to an embodiment;
90 illustrates several embodiments of a lens system including a liquid lens according to an embodiment;
91 illustrates a folded lens that is a prism disposed on an actuator, according to an embodiment;
92 illustrates a bimorph arm with an offset according to an embodiment;
93 illustrates a bimorph arm with an offset and limiter according to an embodiment;
94 illustrates a bimorph arm with an offset and limiter according to an embodiment;
95 illustrates an embodiment of a base including a bimorph arm with an offset according to an embodiment;
96 illustrates an embodiment of a base comprising two bimorph arms with an offset according to an embodiment;
97 illustrates a buckler arm including a load point extension according to an embodiment;
98 illustrates a buckler arm 9801 including a load point extension 9810 according to an embodiment;
99 illustrates a bimorph arm including a load point extension according to an embodiment;
100 illustrates a bimorph arm including a load point extension according to an embodiment;
101 illustrates an SMA optical image stabilization device according to an embodiment;
102 illustrates the SMA material attaching portion 40 of the moving portion according to the embodiment;
103 illustrates an SMA attachment portion of a stop plate to which resistance-welded SMA wires are attached according to an embodiment;
104 illustrates an SMA actuator 45 including a buckle actuator according to an embodiment;
105A and 105B illustrate a resistance weld crimp including an island for an SMA actuator according to an embodiment;
106 illustrates the relationship between bending plane z offset, trough width, and peak force of a bimorph beam according to an embodiment;
107 illustrates an example of how the box volume, which is an approximation of the box surrounding the entire bimorph actuator, relates to work per bimorph element according to an embodiment;
108 illustrates a liquid lens driven using a buckler actuator according to an embodiment;
109 illustrates an unfixed load point end of a bimorph arm according to an embodiment;
110 illustrates an unfixed load point end of a bimorph arm according to an embodiment;
111 illustrates an unfixed load point end of a bimorph arm according to an embodiment;
112 illustrates an unfixed load point end of a bimorph arm according to an embodiment;
113 illustrates a fixed end of a bimorph arm according to an embodiment;
114 illustrates a fixed end of a bimorph arm according to an embodiment;
115 illustrates a fixed end of a bimorph arm according to an embodiment;
116 illustrates a fixed end of a bimorph arm according to an embodiment;
117 illustrates a rear view of a fixed end of a bimorph arm according to an embodiment;
118 illustrates an unfixed load point end of a bimorph arm according to an embodiment;
119 illustrates an unfixed load point end of a bimorph arm according to an alternative embodiment;
120 illustrates a non-fixed load point end of a bimorph arm according to an alternative embodiment;
121 illustrates an unfixed load point end of a bimorph arm according to an alternative embodiment;
122 illustrates a non-fixed load point end of a bimorph arm according to an alternative embodiment;
123 illustrates a fixed end of a bimorph arm according to an embodiment;
124 illustrates a fixed end of a bimorph arm according to an embodiment;
125 illustrates a fixed end of a bimorph arm according to an embodiment;
126 illustrates a fixed end of a bimorph arm according to an alternative embodiment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of SMA actuators that include a compact footprint and provide a high actuation height, e.g. movement in the positive z-axis direction (z-direction), referred to herein as z-stroke, are described herein. do. Examples of SMA actuators include SMA buckle actuators and SMA bimorph actuators. SMA actuators are used in lens assemblies as autofocus actuators, microfluidic pumps, sensor shifts, optical image stabilization, optical zoom assemblies, to mechanically strike two surfaces to create a vibrating feel typically found in haptic feedback sensors and devices. It can be used in many applications, including but not limited to, and other systems where actuators are used. For example, embodiments of actuators described herein may be used as haptic feedback actuators for use in a mobile phone or wearable device configured to provide an alarm, notification, alert, touch area, or press button response to a user. Also, more than one SMA actuator may be used in the system to achieve a larger stroke.

In various embodiments, the SMA actuator has a z-stroke greater than 0.4 mm. Additionally, the SMA actuators for various embodiments have a z-direction height of less than 2.2 mm when the SMA actuators are in their initial, non-actuated position. Various embodiments of an SMA actuator configured as an auto focus actuator in a lens assembly may have a footprint as small as 3 mm greater than the lens inner diameter ("ID"). According to various embodiments, SMA actuators may have a wider footprint in one direction to accommodate components including, but not limited to, sensors, wires, traces, and connectors. According to some embodiments, the installation space of the SMA actuator is 0.5 mm larger in one direction, eg the length of the SMA actuator is 0.5 mm larger than the width.

1A illustrates a lens assembly comprising an SMA actuator configured as a buckle actuator according to an embodiment. 1B illustrates an SMA actuator configured as a buckle actuator according to an embodiment. The buckle actuator 102 is coupled with the base 101. As illustrated in FIG. 1B , the SMA wire 100 is attached to the buckle actuator 102 so that when the SMA wire 100 is actuated and retracted, the buckle actuator 102 locks, thereby causing each buckle to At least the central portion 104 of the actuator 102 is caused to move in the z-stroke direction as indicated by arrow 108, eg in the positive z-direction. According to some embodiments, SMA wire 100 is driven when current is supplied to one end of the wire through a wire retainer such as crimp structure 106 . Due to the inherent resistance of the SMA material from which the SMA wire 100 is made, current to heat the SMA wire 100 flows through the wire. The other side of the SMA wire 100 has a wire retainer such as crimp structure 106 connecting the SMA wire 100 to ground to complete the circuit. Heating the SMA wire 100 to a sufficient temperature changes the inherent material properties from martensite to austenite crystal structure, which changes the length of the wire. Changing the current changes the temperature and therefore changes the length of the wire, which is used to drive and undrive the actuator to control movement of the actuator, at least in the z-direction. Those skilled in the art will understand that other techniques may be used to provide current to the SMA wires.

2 illustrates an SMA actuator configured as an SMA bimorph actuator according to an embodiment. As illustrated in FIG. 2 , the SMA actuator includes a bimorph actuator 202 coupled to a base 204 . The bimorph actuator 202 includes an SMA ribbon 206. The bimorph actuator 202 is configured to move at least the free end of the bimorph actuator 202 in the z-stroke direction 208 as the SMA ribbon 206 contracts.

3 illustrates an exploded view of an auto focus assembly including an SMA actuator according to an embodiment. As illustrated, the SMA actuator 302 is configured as a buckle actuator according to embodiments described herein. The autofocus assembly also includes optical image stabilization ("OIS") 304, a lens carriage 306 configured to hold one or more optical lenses using techniques including techniques known in the art; It includes a return spring 308, a vertical slide bearing 310, and a guide cover 312. The lens carriage 306 is configured so that when the SMA wire is driven to pull and lock the buckle actuator 302, using techniques including techniques described herein, the SMA actuator 302 moves in the z-stroke direction, for example. It is configured to slide against a vertical slide bearing (nm g 310) as it moves in the positive z-direction. The return spring 308 is configured to apply a force to the lens carriage 306 in a direction opposite to the z-stroke direction using techniques including techniques known in the art. According to various embodiments, the return spring 308 is configured to move the lens carriage 306 in a direction opposite to the z-stroke direction when the tension in the SMA wire is lowered as the SMA wire is not driven. When the tension of the SMA wire is lowered to an initial value, the lens carriage 306 moves to the lowest height in the z-stroke direction. FIG. 4 illustrates an autofocus assembly including an SMA wire actuator according to the embodiment illustrated in FIG. 3 .

5 illustrates an SMA wire actuator according to an embodiment including a sensor. In various embodiments, sensor 502 is configured to measure movement of the SMA actuator in the z-direction or of a component that the SMA actuator is moving using techniques including techniques known in the art. The SMA actuator includes one or more buckle actuators 506 configured to actuate using one or more SMA wires 508 similar to those described herein. For example, in the autofocus assembly described with reference to FIG. 4, the sensor moves the lens carriage 306 from its initial position in the z-direction 504 using techniques including techniques known in the art. It is configured to determine the amount of movement. According to some embodiments, the sensor is a tunnel magneto resistance ("TMR") sensor.

6 illustrates top and side views of an SMA actuator 602 configured as a buckle actuator according to an embodiment fitted with a lens carriage 604 . 7 illustrates a side view of a portion of an SMA actuator 602 according to the embodiment illustrated in FIG. 6 . According to the embodiment illustrated in FIG. 7 , the SMA actuator 602 includes a sliding base 702 . According to an embodiment, sliding base 702 is formed of a metal such as stainless steel using techniques including techniques known in the art. However, those skilled in the art will understand that other materials may be used to form the sliding base 702 . Also, according to some embodiments, sliding base 702 has a spring arm 612 coupled with an SMA actuator 602 . According to various embodiments, spring arm 612 is configured to provide two functions. The first function is to help push an object, for example the lens carriage 604, onto the vertical sliding surface of the guide cover. In this example, the spring arm 612 preloading the lens carriage 604 upwards against this surface ensures that the lens does not tilt during actuation. In some embodiments, vertical sliding surface 708 is configured to mate with a guide cover. The second function of the spring arm 612 is to move the SMA actuator 602 down again after the SMA wire 608 moves the SMA actuator 602 in the z-stroke direction, i.e., in the positive z-direction, For example, to help pull in the negative z-direction. Thus, when the SMA wire 608 is driven, the wire contracts to move the SMA actuator 602 in the z-stroke direction, and the spring arm 612 moves in the z-stroke direction when the SMA wire 608 is not driven. is configured to move the SMA actuator 602 in the opposite direction of

SMA actuator 602 also includes a buckle actuator 710 . In various embodiments, buckle actuator 710 is formed of a metal such as stainless steel. Buckle actuator 710 also includes a buckle arm 610 and one or more wire retainers 606 . According to the embodiment illustrated in FIGS. 6 and 7 , the buckle actuator 710 includes four wire retainers 606 . Each of the four wire retainers 606 is configured to receive an end of the SMA wire 608 and retain the end of the SMA wire 608 so that the SMA wire 608 is secured to the buckle actuator 710 . In various embodiments, the four wire retainers 606 are crimps configured to clamp portions of the SMA wires 608 to secure the wires to the crimp. Those skilled in the art will appreciate that the SMA wire 608 may be secured to the wire retainer 606 using techniques known in the art, including but not limited to adhesive, solder, and mechanically secured. . A smart memory alloy (“SMA”) wire 608 extends between the pair of wire retainers 606 so that the buckle arm 610 of the buckle actuator 710 is driven by the SMA wire 608 to They are configured to move when the retainers 606 are pulled closer together. According to various embodiments, SMA wire 608 is electrically driven to move and control the position of buckle arm 610 when current is applied to SMA wire 608 . The SMA wire 608 is undriven when the current is removed or below a threshold. This causes the pair of wire retainers 606 to move apart and the buckle arm 610 to move in the opposite direction when the SMA wire 608 is driven. According to various embodiments, buckle arm 610 is configured to have an initial angle of 5 degrees relative to sliding base 702 when the SMA wire is undriven in its initial position. And, at full stroke or when the SMA wire is fully driven, the buckle arm 610 is configured to have an angle of 10 to 12 degrees relative to the sliding base 702 according to various embodiments.

According to the embodiment illustrated in FIGS. 6 and 7 , the SMA actuator 602 also includes a sliding bearing 706 configured between the sliding base 702 and the wire retainer 606 . Slide bearing 706 is configured to minimize any friction between slide base 702 and buckle arm 610 and/or wire retainer 606 . Slide bearings for some embodiments are fixed to slide bearing 706 . According to various embodiments, the slide bearing is formed of polyoxymethylene ("POM"). Those skilled in the art will appreciate that other structures may be used to lower any friction between the buckle actuator and the base.

According to various embodiments, sliding base 702 is configured to engage an assembly base 704, such as an auto focus base for an auto focus assembly. Actuator base 704 includes etched shims, in accordance with some embodiments. These etched seams can be used to provide clearance for wires and crimps when the SMA actuator 602 is part of an assembly such as an auto focus assembly.

8 illustrates multiple views of an embodiment of a buckle actuator 802 on the x-axis, y-axis, and z-axis. As orientated in FIG. 8 , buckle arm 804 is configured to move in the z-axis when the SMA wire is driven and undriven as described herein. According to the embodiment illustrated in FIG. 8 , buckle arms 804 are coupled to each other through a central portion such as hammock portion 806 . According to various embodiments, hammock portion 806 is configured to mount an object actuated by a buckle actuator, for example, a portion of a lens carriage moved by a buckle actuator using techniques including those described herein. do. Hammock portion 806 is configured to provide lateral stiffness to the buckle actuator during actuation according to some embodiments. In another embodiment, the buckle actuator does not include hammock portion 806. According to this embodiment, the buckle arm is configured to act on and move the object. For example, the buckle arm is configured to directly act on a feature of the lens carriage and push it upward.

9 illustrates an SMA actuator configured as an SMA bimorph actuator according to an embodiment. SMA bimorph actuators include bimorph actuators 902, including those described herein. According to the embodiment illustrated in FIG. 9 , one end 906 of each of the bimorph actuators 902 is secured to a base 908 . According to some embodiments, one end 906 is welded to base 908 . However, one skilled in the art will appreciate that other techniques may be used to secure one end 906 to base 908 . 9 also illustrates a lens carriage 904 arranged to be configured to curl in the z-direction when the bimorph actuator 902 is actuated and lift the carriage 904 in the z-direction. In some embodiments, a return spring is used to push the bimorph actuator 902 back to its initial position. The return spring may be configured as described herein to help push the bimorph actuator downward toward an initial, unactuated position. Since the footprint of bimorph actuators is small, SMA actuators with reduced footprint compared to current actuator technology can be manufactured.

10 illustrates a cutaway view of an autofocus assembly including an SMA actuator according to an embodiment including a position sensor, such as a TMR sensor. The auto focus assembly 1002 includes a position sensor 1004 attached to a travel spring 1006 and a magnet 1008 attached to the lens carriage 1010 of the auto focus assembly including an SMA actuator as described herein. includes The position sensor 1004 is configured to move the lens carriage 1010 in the z-direction (from an initial position based on the distance the magnet 1008 is away from the position sensor 1004 using techniques including techniques known in the art). 1005) to determine the movement amount. According to some embodiments, the position sensor 1004 is electrically coupled with a controller or processor, eg, a central processing unit, using a plurality of electrical traces on the spring arm of the travel spring 1006 of the optical image stabilization assembly.

11A-11C illustrate diagrams of bimorph actuators in accordance with some embodiments. According to various embodiments, the bimorph actuator 1102 includes a beam 1104 and one or more SMA materials 1106, such as an SMA ribbon 1106b (eg, including an SMA ribbon according to the embodiment of FIG. 11B ). as illustrated in a perspective view of a bimorph actuator that does the same) or an SMA wire 1106a (eg, as illustrated in a cross-section of a bimorph actuator including an SMA wire according to an embodiment of FIG. 11A). SMA material 1106 is secured to beam 1104 using techniques including those described herein. According to some embodiments, SMA material 1106 is secured to beam 1104 using adhesive film material 1108 . In various embodiments, an end of the SMA material 1106 is electrically and mechanically coupled with a contact 1110 configured to supply current to the SMA material 1106 using techniques including techniques known in the art. . According to various embodiments, contacts 1110 (eg, as illustrated in FIGS. 11A and 11B ) are gold-plated copper pads. According to an embodiment, a bimorph actuator 1102 having a length of about 1 mm is configured to produce a large stroke and a pushing force of 50 millinewtons ("mN"), e.g., as illustrated in FIG. Used as part of an assembly. According to some embodiments, use of a bimorph actuator 1102 with a length greater than 1 mm will produce a larger stroke but less force than one with a length of 1 mm. In an embodiment, the bimorph actuator 1102 comprises a 20 micron thick SMA material 1106, a 20 micron thick insulator 1112 such as a polyimide insulator, and a 30 micron thick stainless steel beam 1104 or Contains base metals. Various embodiments include a second insulator 1114 disposed between the SMA material 1106 and a contact layer comprising the contact 1110 . Second insulator 1114 is configured to insulate SMA material 1106 from portions of the contact layer not used as contacts 1110 according to some embodiments. In some embodiments, the second insulator 1114 is a covercoat layer such as polyimide insulator. Those skilled in the art will understand that other dimensions and materials may be used to meet desired design characteristics.

12 illustrates a diagram of an embodiment of a bimorph actuator according to an embodiment. The embodiment illustrated in FIG. 12 includes a central feed 1204 for applying power. Power is supplied in the center of the SMA material 1202 (wire or ribbon) as described herein. The end of SMA material 1202 is grounded to beam 1206 or base metal as a return path at end pad 1203. End pad 1203 is electrically insulated from the rest of contact layer 1214. According to an embodiment, the proximity of the base metal or beam 1206 to the SMA material 1202, such as an SMA wire, along the entire length of the SMA material 1202 is such that when the current is turned off, i.e. the bimorph actuator is Provides faster cooling of the wire when not driven. The result is faster wire deactivation and actuator response times. The thermal profile of the SMA wire or ribbon is improved. For example, the thermal profile is more uniform so that a higher total current can be reliably delivered to the wire. Without a uniform heat sink, parts of the wire, such as the center region, may become overheated and damaged, requiring reduced current and reduced operation to operate reliably. The center feed 1204 provides the benefits of faster wire activation/actuation (faster heating) and reduced power consumption (lower resistive path length) of the SMA material 1202 for faster response time. This enables faster actuator operation and the ability to operate at higher travel frequencies.

As illustrated in FIG. 12 , beam 1206 includes a central metal 1208 insulated from the rest of beam 1206 to form central feed 1204 . An insulator 1210 as described herein is disposed over beam 1206 . Insulator 1210 is used to provide electrical access to beam 1206, for example to couple ground section 1214b of the contact layer, and to provide a contact to center metal 1208 to feed center feed 1204. It is configured to have one or more openings or vias 1212 to form. A contact layer 1214 as described herein includes a power section 1214a and a power section 1214a to provide drive/control signals to the bimorph actuator via power contacts 1216 and ground contacts 1218, in accordance with some embodiments. and a ground section 1214b. A covercoat layer 1220 as described herein may be used to electrically insulate the contact layer 1214 except for portions of the contact layer 1214 where electrical bonding is desired (eg, one or more contacts). ) is placed on top of

13 illustrates a cross-section of an end pad of a bimorph actuator according to an embodiment as illustrated in FIG. 12 . As previously described, end pad 1203 is electrically insulated from the rest of contact layer 1214 by gap 1222 formed between end pad 1203 and contact layer 1214 . According to some embodiments, the gap is formed using etching techniques including techniques known in the art. End pad 1203 includes a via section 1224 configured to electrically couple end pad 1203 with beam 1206 . Via section 1224 is formed in via 1212 formed in insulator 1210 . SMA material 1202 is electrically coupled to end pad 1213. SMA material 1202 may be electrically coupled to end pad 1213 using techniques including, but not limited to, solder, resistance welding, laser welding, and direct plating.

14 illustrates a center feed cross section of a bimorph actuator according to an embodiment as illustrated in FIG. 12 . The center feed 1204 is electrically coupled to the power source through the contact layer 1214 and connected to the center metal 1208 through the via section 1226 of the center feed 1204 formed in the via 1212 formed in the insulator 1210. electrically and thermally coupled.

The actuators described herein may be used to form actuator assemblies that use multiple buckles and/or multiple bimorph actuators. According to an embodiment, the actuators can be stacked on top of each other to increase the achievable stroke distance.

15 illustrates an exploded view of an SMA actuator comprising two buckle actuators according to an embodiment. According to the embodiment described herein, the two buckle actuators 1302 and 1304 are arranged relative to each other to use their actions opposite each other. In various embodiments, the two buckle actuators 1302 and 1304 are configured to move in an inverse relationship relative to each other to position the lens carriage 1306. For example, the first buckle actuator 1302 is configured to receive a power signal inverse of the power signal sent to the second buckle actuator 1304 .

16 illustrates an SMA actuator comprising two buckle actuators according to an embodiment. In the buckle actuators 1302 and 1304, the buckle arms 1310 and 1312 of the respective buckle actuators 1302 and 1304 face each other and the sliding bases 1314 and 1316 of the respective buckle actuators 1302 and 1304 are two buckles. It is configured to be the outer surface of the actuator. The hammock portion 1308 of each SMA actuator 1302, 1304 according to various embodiments may be an object actuated by one or more buckle actuators 1302, 1304, for example, a technique including the techniques described herein. It is configured to mount a portion of the lens carriage 1306 that is moved by the buckle actuator.

17 illustrates a side view of an SMA actuator comprising two buckle actuators according to an embodiment illustrating the direction of the SMA wire 1318 moving an object such as a lens carriage in the positive z direction or upward direction.

18 illustrates a side view of an SMA actuator comprising two buckle actuators according to an embodiment illustrating the direction of the SMA wire 1318 moving an object such as a lens carriage in the negative z direction or downward direction.

19 illustrates an exploded view of an assembly comprising an SMA actuator comprising two buckle actuators according to an embodiment. The buckle actuators 1902 and 1904 are the buckle arms 1910 and 1912 of the respective buckle actuators 1902 and 1904 are the outer surfaces of the two buckle actuators and the sliding bases 1914 and 1916 of the respective buckle actuators 1902 and 1904, respectively. ) are configured to face each other. The hammock portion 1908 of each SMA actuator 1902, 1904 according to various embodiments is an object actuated by one or more buckle actuators 1902, 1904, such as the techniques described herein. is configured to mount a portion of the lens carriage 1906 moved by the buckle actuator. In some embodiments, the SMA actuator includes a base portion 1918 configured to receive a second buckle actuator 1904. The SMA actuator may also include a cover portion 1920. 20 illustrates an SMA actuator comprising two buckle actuators according to an embodiment comprising a base portion and a cover portion.

21 illustrates an SMA actuator comprising two buckle actuators according to an embodiment. In some embodiments, buckle actuators 1902 and 1904 are arranged relative to each other such that hammock portion 1908 of first buckle actuator 1902 is rotated about 90 degrees from hammock portion of second buckle actuator 1904. The 90 degree configuration allows for pitch and roll rotation of objects such as the lens carriage 1906. This provides better control over the movement of the lens carriage 1906. In various embodiments, a differential power signal is applied to the SMA wires of each buckle actuator pair, which provides pitch and roll rotation of the lens carriage for tilt OIS operation.

Embodiments of SMA actuators that include two buckle actuators eliminate the need to have a return spring. Using two buckler actuators can improve/reduce hysteresis when using SMA wire resistance for position feedback. Counter-force SMA actuators with two buckler actuators help more accurate position control due to lower hysteresis than those with return springs. In some embodiments, such as the embodiment illustrated in FIG. 22 , an SMA actuator comprising two buckle actuators 2202 and 2204 is connected to the left and right SMA wires 2218a and 2218b of each buckle actuator 2202 and 2204. Provides 2-axis tilt using differential power. For example, left SMA wire 2218a is driven with a higher power than right SMA wire 2218b. This causes the left side of the lens carriage 2206 to be moved downward and the right side to be moved upward (tilted). The SMA wires of the first buckle actuator 2202 are, in some embodiments, maintained at the same power to act as fulcrum points for the SMA wires 2218a, 2218b to differentially push and cause the tilt action. Reversing the power signal applied to the SMA wire, for example, applying the same power to the SMA wire of the second buckle actuator 2202 and differential to the left and right SMA wires 2218a, 2218b of the second buckle actuator 2204 Using power causes tilt of the lens carriage 2206 in the other direction. This provides the ability to tilt an object, such as a lens carrier, on its axis of motion, or it can disregard any tilt between lens and sensor for good dynamic tilt, resulting in better image quality across all pixels.

23 illustrates an SMA actuator comprising two buckle actuators and a coupler according to an embodiment. SMA actuators include two buckle actuators as described herein. The first buckle actuator 2302 is configured to couple with the second buckle actuator 2304 using a coupler, such as a coupler ring 2305. Buckle actuators 2302 and 2304 are arranged relative to each other such that hammock portion 2308 of first buckle actuator 2302 is rotated about 90 degrees from hammock portion 2309 of second buckle actuator 2304. A payload for movement, such as a lens or lens assembly, is attached to a lens carriage 2306 configured to be placed on the sliding base of the first buckle actuator 2302.

In various embodiments, the same power may be applied to the SMA wires of first buckle actuator 2302 and second buckle actuator 2304 . This may result in maximizing the z stroke of the SMA actuator in the positive z-direction. In some embodiments, the stroke of the SMA actuator may have a z-stroke that is more than twice the stroke of another SMA actuator comprising two buckle actuators. In some embodiments, additional springs may be added to push the two bucklers to help push the actuator assembly and payload back down when the power signal is removed from the SMA actuator. The same opposite power signal can be applied to the SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304 . This allows the SMA actuator to be moved in the positive z-direction by the buckle actuator and in the negative z-direction by the buckle actuator, enabling accurate control of the position of the SMA actuator. In addition, the same opposite power signal (differential power signal) is applied to the left and right SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304 to move an object such as the lens carriage 2306 at least on two axes. It can be tilted in one direction.

An embodiment of an SMA actuator that includes two buckle actuators and a coupler, such as the one illustrated in FIG. 23 , can be combined with additional buckle actuators and pairs of buckle actuators to achieve a desired stroke greater than a single SMA actuator.

24 illustrates an exploded view of an SMA system including an SMA actuator including a buckle actuator with a laminate hammock according to an embodiment. As described herein, in some embodiments, an SMA system is configured for use with one or more camera lens elements as an auto focus drive. As illustrated in FIG. 24 , the SMA system moves the lens carriage 2406 in a direction opposite to the z-stroke direction when tension in the SMA wire 2408 is lowered as the SMA wire is undriven, according to various embodiments. and a return spring 2403 configured to move. The SMA system of some embodiments includes a housing 2409 configured to receive a return spring 2403 and operate a sliding bearing to guide the lens carriage in the z-stroke direction. Housing 2409 is also configured to be disposed on buckle actuator 2402 . Buckle actuator 2402 includes a sliding base 2401 similar to that described herein. Buckle actuator 2402 includes a buckle arm 2404 coupled with a hammock portion, such as laminate hammock 2406 formed of laminate. Buckle actuator 2402 also includes an SMA wire attachment structure, such as laminated crimp connection 2412.

As illustrated in FIG. 24 , sliding base 2401 is disposed on an optional adapter plate 2414 . The adapter plate is configured to mate the SMA system or buckler actuator 2402 to other systems such as OIS, additional SMA systems, or other components. 25 illustrates an SMA system 2501 including an SMA actuator including a buckle actuator 2402 with a laminate hammock according to an embodiment.

26 illustrates a buckle actuator including a laminate hammock according to an embodiment. Buckle actuator 2402 includes a buckle arm 2404 . Buckle arm 2404 is configured to move in the z-axis when SMA wire 2412 is driven and undriven as described herein. The SMA wire 2408 is attached to the buckle actuator using laminated crimp connections 2412. According to the embodiment illustrated in FIG. 26 , buckle arms 2404 are coupled together through a central portion such as laminate hammock 2406 . According to various embodiments, the laminate hammock 2406 is configured to mount an object actuated by a buckle actuator, for example a portion of a lens carriage moved by a buckle actuator using techniques including those described herein. do.

27 illustrates a laminate hammock of SMA actuators according to an embodiment. In some embodiments, the laminate hammock 2406 material is a low stiffness material so that it does not resist driving action. For example, laminate hammock 2406 is formed using a copper layer disposed on a first polyimide layer and a second polyimide layer disposed on the copper. In some embodiments, laminate hammock 2406 is formed over buckle arm 2404 using deposition and etching techniques, including techniques known in the art. In another embodiment, laminate hammock 2406 is formed separately from buckle arm 2404 and attached to buckle arm 2404 using techniques including welding, adhesives, and other techniques known in the art. In various embodiments, glue or other adhesive is used on the laminate hammock 2406 to ensure that the buckler arm 2404 remains in place relative to the lens carriage.

28 illustrates a laminated crimp connection of an SMA actuator according to an embodiment. The laminated crimp connection 2412 is configured to attach the SMA wire 2408 to the buckle actuator and create an electrical circuit joint with the SMA wire 2408. In various embodiments, the laminated crimp connection 2412 includes a laminate formed of one or more layers of insulator and one or more layers of a conductive layer formed over the crimp.

For example, a polyimide layer is disposed on at least a portion of the stainless steel portion forming the crimp 2413. A conductive layer, such as copper, is then disposed on the polyimide layer, which is electrically coupled with one or more signal traces 2415 disposed on the buckle actuator. When the crimp is deformed to make contact with the internal SMA wire, it also brings the SMA wire into electrical contact with the conductive layer. Accordingly, a conductive layer associated with one or more signal traces is used to apply power signals to the SMA wires using techniques including those described herein. In some embodiments, a second polyimide layer is formed over the conductive layer in areas where the conductive layer will not contact the SMA wires. In some embodiments, laminated crimp connection 2412 is formed over crimp 2413 using deposition and etching techniques, including techniques known in the art. In another embodiment, laminated crimp connection 2412 and one or more electrical traces are formed separately from crimp 2413 and buckle actuators and crimped using techniques including welding, adhesives, and other techniques known in the art. 2412 and a buckle actuator.

29 illustrates an SMA actuator including a buckle actuator with a laminate hammock. As illustrated in FIG. 29 , when a power signal is applied, the SMA wire contracts or shortens to move the buckle arm and laminate hammock in the positive z-direction. A laminate hammock in contact with an object in turn moves the object, such as a lens carriage, in the positive z-direction. When the power signal is reduced or removed, the SMA wire is stretched to move the buckle arm and laminate hammock in the negative z-direction.

30 illustrates an exploded view of an SMA system including an SMA actuator including a buckle actuator according to an embodiment. As described herein, in some embodiments, an SMA system is configured for use with one or more camera lens elements as an auto focus drive. As illustrated in FIG. 30 , the SMA system moves the lens carriage 3005 in a direction opposite to the z-stroke direction when the tension in the SMA wire 3008 is lowered as the SMA wire is undriven, according to various embodiments. and a return spring 3003 configured to move. In some embodiments, the SMA system includes stiffeners 3000 disposed on return springs 3003. The SMA system of some embodiments includes a two-part housing 3009 configured to receive a return spring 3003 and operate a slide bearing to guide the lens carriage in the z-stroke direction. Housing 3009 is also configured to be disposed on buckle actuator 3002 . Buckle actuator 3002 includes a sliding base 3001 similar to that described herein formed of two parts. Sliding base 3001 electrically connects two sides (e.g., one side is ground and the other side is power) as current flows to the wires through portions of sliding base 3001, according to some embodiments. Divided to insulate.

Buckle actuator 3002 includes a buckle arm 3004 . Each pair of buckle actuators 3002 is formed on a separate portion of buckle actuator 3002 . Buckle actuator 3002 also includes an SMA wire attachment structure, such as a resistance welding wire crimp 3012. The SMA system optionally includes a flex circuit 3020 to electrically couple the SMA wires 3008 to one or more control circuits.

As illustrated in FIG. 30 , sliding base 3001 is placed on an optional adapter plate 3014 . The adapter plate is configured to mate the SMA system or buckler actuator 3002 to other systems such as OIS, additional SMA systems, or other components. 31 illustrates an SMA system 3101 that includes an SMA actuator that includes a buckle actuator 3002 according to an embodiment.

32 includes an SMA actuator including a buckle actuator according to an embodiment. Buckle actuator 3002 includes a buckle arm 3004 . Buckle arm 3004 is configured to move in the z-axis when SMA wire 3012 is driven and undriven as described herein. SMA wire 2408 is attached to resistance welding wire crimp 3012. According to the embodiment illustrated in FIG. 32 , buckle arm 3004 is configured to mate with an object such as a lens carriage without a central portion using two yoke capture joints.

33 illustrates two yoke capture joints of a pair of buckle arms of an SMA actuator according to an embodiment. 33 also illustrates the plated pads used to attach the optional flex circuit to the sliding base. In some embodiments, the plating pad is formed using gold. 34 illustrates a resistance welding crimp for an SMA actuator according to an embodiment used to attach an SMA wire to a buckle actuator. In some embodiments, a glue or adhesive may also be placed on top of the weld to aid in mechanical strength and act as a fatigue strain relief during operation and impact loading.

35 illustrates an SMA actuator comprising a buckle actuator with two yoke capture joints. As illustrated in FIG. 35 , when a power signal is applied, the SMA wire contracts or shortens to move the buckle arm in the positive z-direction. The two yoke capture joints contact the object and in turn move the object, such as the lens carriage, in the positive z-direction. When the power signal is reduced or removed, the SMA wire is stretched to move the buckle arm in the negative z-direction. The yoke capture feature ensures that the buckle arm remains in the correct position relative to the lens carriage.

36 illustrates an SMA bimorph liquid lens according to an embodiment. The SMA bimorph liquid lens 3501 includes a circuit having a liquid lens subassembly 3502 , a housing 3504 , and an SMA actuator 3506 . In various embodiments, the SMA actuator includes four bimorph actuators 3508, such as the embodiments described herein. The bimorph actuator 3508 is configured to push the forming ring 3510 positioned on the flexible membrane 3512 . The ring bends the membrane 3512/liquid 3514 to change the light path through the membrane 3512/liquid 3514. A liquid containing ring 3516 is used to contain the liquid 3514 between the membrane 3512 and the lens 3518. The same force from the bimorph actuator changes the focus of the image in the Z direction (perpendicular to the lens) to act as an autofocus. The differential force from the bimorph actuator 3508 may move the light beam in the X and Y axis directions to operate as an optical image stabilization device according to some embodiments. Both OIS and AF functions can be achieved simultaneously with proper control of each actuator. In some embodiments, three actuators are used. A circuit having an SMA actuator 3506 includes one or more contacts 3520 for control signals to drive the SMA actuator. According to some embodiments that include four SMA actuators, a circuit having SMA actuators 3506 includes four power circuit control contacts and a common return contact for each SMA actuator.

37 illustrates a see-through SMA bimorph liquid lens according to an embodiment. 38 illustrates cross-section and bottom views of an SMA bimorph liquid lens according to an embodiment.

39 illustrates an SMA system including an SMA actuator 3902 with a bimorph actuator according to an embodiment. SMA actuator 3902 includes four bimorph actuators using the techniques described herein. 40 illustrating SMA actuators 3902 with bimorph actuators according to an embodiment, two of the bimorph actuators are configured as positive z-stroke actuators 3904 and two have negative z - It is configured as a stroke actuator 3906. Opposite actuators 3906 and 3904 are configured to control motion in both directions over the full stroke range. This provides the ability to adjust the control code to compensate for tilt. In various embodiments, two SMA wires 3908 attached to the top of the component enable positive z-stroke displacement. Two SMA wires attached to the bottom of the component enable negative z-stroke displacement. In some embodiments, each bimorph actuator is attached to an object, such as lens carriage 3910, using tabs that engage the object. The SMA system includes a top spring 3912 configured to provide stability of the lens carriage 3910 in an axis orthogonal to the z-stroke axis, for example, in the x-axis and y-axis directions. Additionally, a top spacer 3914 is configured to be disposed between the top spring 3912 and the SMA actuator 3902. A bottom spacer 3916 is arranged between the SMA actuator 3902 and the bottom spring 3918. The bottom spring 3918 is configured to provide stability of the lens carriage 3910 in an axis orthogonal to the z-stroke axis, eg, in the x-axis and y-axis directions. Bottom spring 3918 is configured to be disposed on a base 3920 as described herein.

41 illustrates the length 4102 of the bimorph actuator 4103 and the location of the bonding pad 4104 for the SMA wire 4206 to extend the wire length past the bimorph actuator. It uses longer wires than bimorph actuators to increase stroke and force. Thus, the extended length 4108 of the SMA wire 4206 beyond the bimorph actuator 4103 is used to set the stroke and force for the bimorph actuator 4103.

42 illustrates an exploded view of an SMA system that includes an SMA bimorph actuator 4202 according to an embodiment. According to various embodiments, the SMA system is configured to use discrete metal materials and non-conductive adhesives to create one or more electrical circuits that independently power the SMA wires. Some embodiments have no AF magnitude effect and include four bimorph actuators as described herein. Two of the bimorph actuators are configured as positive z stroke actuators and two are configured as negative z stroke actuators. 43 illustrates an exploded view of a subsection of an SMA actuator according to an embodiment. The subsection includes a negative actuator signal connection 4302, a base 4304 with a bimorph actuator 4306. Negative actuator signal connection 4302 includes wire bond pads 4308 for connecting the SMA wires of bimorph actuator 4306 using techniques including those described herein. The negative actuator signal connection 4302 is secured to the base 4304 using an adhesive layer 4310. The subsection also includes a positive actuator signal connection 4314 with a wire bond pad 4316 for connecting the SMA wire 4312 of the bimorph actuator 4306 using techniques including techniques described herein. include The positive actuator signal connection 4314 is secured to the base 4304 using an adhesive layer 4318. Base 4304, negative actuator signal connection 4302, and positive actuator signal connection 4314 are each formed of metal, such as stainless steel. The connection pads 4322 of each of the base 4304, negative actuator signal connection 4302, and positive actuator signal connection 4314 are connected to the bimorph actuator 4306 using techniques including those described herein. configured to electrically couple the control signal and ground to drive the In some embodiments, connection pads 4322 are gold plated. 44 illustrates a subsection of an SMA actuator according to an embodiment. In some embodiments, gold plated pads are formed on the stainless steel layer for solder bonding or other known electrical termination methods. In addition, the formed wire bonding pad is used for a signal joint for electrically coupling SMA wires for power signals.

45 illustrates a 5-axis sensor shift system according to an embodiment. A 5-axis sensor shift system is configured to move an object, such as an image sensor, in 5 axes relative to one or more lenses. This includes X/Y/Z axis translation and pitch/roll tilt. Optionally, the system is configured to use only 4 axes with X/Y axis translation and pitch/roll tilt with separate AF on top to perform Z motion. Another embodiment includes a 5-axis sensor shift system configured to move one or more lenses relative to the image sensor. In some embodiments the static lens stack is mounted on the top cover and inserted inside the ID (without touching the orange moving carriage inside).

46 illustrates an exploded view of a 5-axis sensor shift system according to an embodiment. The 5-axis sensor shift system includes two circuit components: a flexible sensor circuit 4602, a bimorph actuator circuit 4604; 8-12 bimorph actuators 4606 are built into bimorph circuit components using techniques including those described herein. The 5-axis sensor shift system includes a moving carriage 4608 and an outer housing 4610 configured to hold one or more lenses. The bimorph actuator circuit 4604 includes 8-12 SMA actuators as described herein, depending on the embodiment. The SMA actuator is configured to move the moving carriage 4608 in 5 axes: x-direction, y-direction, z-direction, pitch, and roll, similar to other 5-axis systems described herein.

47 illustrates an SMA actuator that includes a bimorph actuator integrated into this circuitry for all operation according to an embodiment. An embodiment of an SMA actuator may include 8-12 bimorph actuators 4606. However, other embodiments may include more or less. 48 illustrates an SMA actuator 4802 that includes a bimorph actuator integrated into its circuitry for all operation according to an embodiment partially formed to fit inside a corresponding outer housing 4804. 49 illustrates a cross-section of a 5-axis sensor shift system according to an embodiment.

50 illustrates an SMA actuator 5002 according to an embodiment that includes a bimorph actuator. SMA actuator 5002 is configured to move image sensors, lenses, or various other payloads in the x and y directions using four side-mounted SMA bimorph actuators 5004. 51 illustrates a top view of an SMA actuator including a bimorph actuator that moved an image sensor, lens or other various payloads at different x and y positions.

52 illustrates an SMA actuator including a bimorph actuator 5202 according to an embodiment configured as a box bimorph autofocus. Four top- and bottom-mounted SMA bimorph actuators, such as those described herein, are configured to move together to create movement in the z-stroke direction for autofocus operation. 53 illustrates an SMA actuator including bimorph actuators according to an embodiment wherein two top mounted bimorph actuators 5302 are configured to push one or more lenses downward. 54 illustrates an SMA actuator including bimorph actuators according to an embodiment, wherein the two bottom-mounted bimorph actuators 5402 are configured to push one or more lenses upward. 55 is a bimorph actuator according to an embodiment to show that four top and bottom mounted SMA bimorph actuators 5502 as described herein are used to move one or more lenses to create a tilt motion. It illustrates an SMA actuator including a.

56 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 2-axis lens shift OIS. In some embodiments, the 2-axis lens shift OIS is configured to move the lens in the X/Y axis. In some embodiments, the Z-axis movement comes from a separate AF as described herein. Four bimorph actuators push the autofocus side for OIS operation. 57 illustrates an exploded view of an SMA system including an SMA actuator 5802 according to an embodiment including a bimorph actuator 5806 configured as a 2-axis lens shift OIS. 58 illustrates a cross section of an SMA system including an SMA actuator 5802 according to an embodiment including a bimorph actuator 5806 configured as a 2 axis lens shift OIS. 59 illustrates a box bimorph actuator 5802 according to an embodiment for use in an SMA system configured as an as-fabricated two-axis lens shift OIS prior to being molded to fit into the system. Such a system can be configured to have a high OIS stroke OIS (eg, +/−200 μm or greater). Additionally, this embodiment is configured to have a wide operating range and good OIS dynamic tilt using four slide bearings, such as POM slide bearings. Embodiments are configured to integrate easily with AF designs (eg, VCM or SMA).

60 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 5-axis lens shift OIS and auto focus. In some embodiments, the 5-axis lens shift OIS and auto focus are configured to move the lens in the X/Y/Z axes. In some embodiments, the pitch and yaw axis motion is for dynamic tilt tuning capabilities. Eight bimorph actuators are used to provide motion for autofocus and OIS using the techniques described herein. 61 illustrates an exploded view of an SMA system that includes an SMA actuator 6202 according to an embodiment including a bimorph actuator 6204 according to an embodiment configured as a 5-axis lens shift OIS and auto focus. 62 illustrates a cross-section of an SMA system including an SMA actuator 6202 according to an embodiment including a bimorph actuator 6204 configured as a 5-axis lens shift OIS and auto focus. 63 illustrates a box bimorph actuator 6202 according to an embodiment for use in an SMA system configured as an as-fabricated 5-axis lens shift OIS and autofocus prior to being molded to fit into the system. Such a system can be configured to have a high OIS stroke OIS (eg, +/−200 μm or greater) and a high autofocus stroke (eg, 400 μm or greater). Also, such an embodiment can override any tilt and eliminate the need for a separate autofocus assembly.

64 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as an outward push box. In some embodiments, the bimorph actuator assembly is configured to wrap around an object such as a lens carriage. Since the circuit assembly moves with the lens carriage, it is a flexible part for low X/Y/Z stiffness. The tail pad of the circuit is static. The outward push box can be configured for 4 or 8 bimorph actuators. Thus, the outward push box can be configured as four bimorph actuators on the side for OIS with movement in the X and Y axes. The outward push box can be configured as four bimorph actuators on the top and bottom for autofocus with movement in the z-axis. The outward push box can be configured as 8 bimorph actuators on the top, bottom and sides for OIS and autofocus with movement in the x, y, z axes and is capable of 3 axis tilt (pitch/roll/yaw) . 65 illustrates an exploded view of an SMA system that includes an SMA actuator 6602 according to an embodiment that includes a bimorph actuator 6604 configured as an outward push box. Accordingly, the SMA actuator is configured such that the bimorph actuator acts on the outer housing 6504 to move the lens carriage 6506 using techniques described herein. 66 illustrates an SMA system that includes an SMA actuator 6602 according to an embodiment that includes a bimorph actuator configured as an outward push box partially molded to receive a lens carriage 6604. 67 illustrates an SMA system including an SMA actuator 6602 including a bimorph actuator 6604 according to an embodiment configured as an as-fabricated outward push box prior to being molded to fit into the system.

68 illustrates an SMA system that includes an SMA actuator 6802 according to an embodiment that includes a bimorph actuator configured as a 3-axis sensor shift OIS. In some embodiments, the z-axis movement comes from a separate autofocus system. Four bimorph actuators configured to push the sides of the sensor carriage 6804 provide motion for the OIS using the techniques described herein. 69 illustrates an exploded view of an SMA including an SMA actuator 6802 according to an embodiment including a bimorph actuator configured as a 3-axis sensor shift OIS. 70 illustrates a cross-section of an SMA system including an SMA actuator 6802 according to an embodiment including a bimorph actuator 6806 configured as a 3-axis sensor shift OIS. 71 illustrates a box bimorph actuator 6802 component according to an embodiment for use in an SMA system configured as an as-fabricated three-axis sensor shift OIS prior to being molded to fit into the system. 72 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment configured as a 3 axis sensor shift OIS. Such a system can be configured to have a high OIS stroke OIS (eg, +/−200 μm or greater) and a high autofocus stroke (eg, 400 μm or greater). Additionally, this embodiment is configured to have a wide biaxial motion range and good OIS dynamic tilt using four slide bearings, such as POM slide bearings. Embodiments are configured to integrate easily with AF designs (eg, VCM or SMA).

73 illustrates an SMA system including an SMA actuator 7302 according to an embodiment including a bimorph actuator 7304 configured as a 6 axis sensor shift OIS and auto focus. In some embodiments, the 6 axis sensor shift OIS and auto focus are configured to move the lens in the X/Y/Z/pitch/yaw/roll axis. In some embodiments, the pitch and yaw axis motion is for dynamic tilt tuning capabilities. Eight bimorph actuators are used to provide motion for autofocus and OIS using the techniques described herein. 74 illustrates an exploded view of an SMA system including an SMA actuator 7402 according to an embodiment including a bimorph actuator 7404 configured as a 6-axis sensor shift OIS and auto focus. 75 illustrates a cross section of an SMA system including an SMA actuator 7402 according to an embodiment including a bimorph actuator configured as a 6 axis sensor shift OIS and auto focus. 76 illustrates a box bimorph actuator 7402 according to an embodiment for use in an SMA system configured as an as-fabricated 6-axis sensor shift OIS and autofocus prior to being molded to fit into the system. 77 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment configured as a 3 axis sensor shift OIS. Such a system can be configured to have a high OIS stroke OIS (eg, +/−200 μm or greater) and a high autofocus stroke (eg, 400 μm or greater). Also, such an embodiment can override any tilt and eliminate the need for a separate autofocus assembly.

78 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a two-axis camera tilt OIS. In some embodiments, the two-axis camera tilt OIS is configured to move the camera in a pitch/yaw axis. Four bimorph actuators are used to push the top and bottom of the autofocus for full camera motion for OIS pitch and yaw motion using the techniques described herein. 79 illustrates an exploded view of an SMA system that includes an SMA actuator 7902 according to an embodiment that includes a bimorph actuator 7904 configured as a two-axis camera tilt OIS. 80 illustrates a cross-section of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a two-axis camera tilt OIS. 81 illustrates a box bimorph actuator according to an embodiment for use in an SMA system configured as an as-fabricated two-axis camera tilt OIS prior to being molded to fit into the system. 82 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment configured as a two-axis camera tilt OIS. Such a system can be configured to have a high OIS stroke OIS (eg, plus/minus 3 degrees or more). Embodiments are configured to integrate easily with an auto focus ("AF") design (eg, VCM or SMA).

83 illustrates an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 3-axis camera tilt OIS. In some embodiments, the two-axis camera tilt OIS is configured to move the camera in a pitch/yaw/roll axis. Four bimorph actuators are used to push the top and bottom of the autofocus for full camera motion for OIS pitch and yaw motion using the techniques described herein. It uses OIS technology to push the aspect of autofocus for full camera motion for roll motion. 84 illustrates an exploded view of an SMA system including an SMA actuator 8402 according to an embodiment including a bimorph actuator 8404 configured as a 3-axis camera tilt OIS. 85 illustrates a cross-section of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator configured as a 3-axis camera tilt OIS. 86 illustrates a box bimorph actuator for use in an SMA system according to an embodiment configured as an as-fabricated three-axis camera tilt OIS prior to being molded to fit into the system. 87 illustrates a flexible sensor circuit for use in an SMA system according to an embodiment configured as a 3-axis camera tilt OIS. Such a system can be configured to have a high OIS stroke OIS (eg, plus/minus 3 degrees or more). Embodiments are configured to integrate easily with AF designs (eg, VCM or SMA).

88 illustrates exemplary dimensions for a bimorph actuator of an SMA actuator according to an embodiment. Although the dimensions are preferred embodiments, those skilled in the art will understand that other dimensions may be used based on the desired characteristics for the SMA actuator.

89 illustrates a lens system for a folded camera according to an embodiment. A folded camera includes a folded lens 8902 configured to bend light into a lens system 8901 that includes one or more lenses 8903a-d. In some embodiments, the folded lens is any one or more of a prism and a lens. The lens system 8901 is configured to have a major axis 8904 oblique with respect to a transmission axis 8906 parallel to the direction of travel of the light prior to the light reaching the folded lens 8902. For example, a folded camera is used in a camera phone system to reduce the height of the lens system 8901 in the direction of the transmission axis 8906.

Embodiments of lens systems include one or more liquid lenses as described herein. The embodiment illustrated in FIG. 89 includes two liquid lenses 8903b,d as described herein. One or more liquid lenses 8903b, d are configured to be driven using techniques including those described herein. Liquid lenses are driven using actuators including, but not limited to, buckler actuators, bimorph actuators, and other SMA actuators. 108 illustrates a liquid lens driven using a buckler actuator 60 according to an embodiment. The liquid lens includes a molded ring coupler 64, a liquid lens assembly 61, one or more buckler actuators 60 as described herein, a sliding base 65, and a base 62. The one or more buckler actuators 60 may move the light beam by moving the molded ring/coupler 64 to change the shape of the flexible membrane of the liquid lens assembly 61, for example as described herein, or configured to mold. In some embodiments, 3 or 4 actuators are used. Liquid lenses can be used alone or in combination with other lenses to act as auto focus or optical image stabilization devices. The liquid lens may also be otherwise configured to direct an image to an image sensor.

90 illustrates several embodiments of a lens system 9001 that includes liquid lenses 9002a-h for focusing an image onto an image sensor 9004. As illustrated, liquid lenses 9002a-h can include any lens shape and can be dynamically configured to adjust light paths through the lenses using techniques including those described herein. there is.

A lens system for a folded camera is configured to include a driven folded lens 9100. An example of a driven collapsible lens is a prism tilt as illustrated in FIG. 91 . In the example illustrated in FIG. 91 , the folding lens is a prism 9102 disposed on an actuator 9104 . Actuators include, but are not limited to, SMA actuators including those described herein. In some embodiments, prismatic tilt is disposed on SMA actuators that include four bimorph actuators 9106 as described herein. According to some embodiments, driven folded lens 9100 is configured as an optical image stabilization device using techniques including those described herein. For example, a driven collapsible lens is configured to include an SMA system as illustrated in FIG. 39 . Another example of a driven folding lens may include an SMA actuator as illustrated in FIG. 21 . However, the folding lens may also include other actuators.

92 illustrates a bimorph arm with an offset according to an embodiment. Bimorph arm 9201 includes a bimorph beam 9202 having an offset 9203 formed thereon. The formed offset 9203 increases the mechanical advantage to produce higher forces than a bimorph arm without offset. According to some embodiments, the depth of offset 9204 (also referred to herein as bend plane z offset 9204) and the length of offset 9206 (also referred to herein as trough width 9206) are the peak force It is configured to define the characteristics of the bimorph arm, such as. For example, the graph of FIG. 106 illustrates the relationship between the bend plane z offset 9204 , the trough width 9206 , and the peak force of the bimorph beam 9202 according to an embodiment.

The bimorph arm includes one or more SMA materials, such as an SMA ribbon or SMA wire 9210 as described herein. The SMA material is secured to the beam using techniques including those described herein. In some embodiments, an SMA material, such as SMA wire 9210, is secured to a fixed end 9212 of the bimorph arm and a load point end 9214 of the bimorph arm so that the formed offset 9203 is the amount by which the SMA is clamped. be between the ends. In various embodiments, an end of the SMA material is electrically and mechanically coupled with a contact configured to supply current to the SMA material using techniques including techniques known in the art. Bimorph arms with offsets can be included in SMA actuators and systems such as those described herein.

93 illustrates a bimorph arm with an offset and limiter according to an embodiment. Bimorph arm 9301 includes a bimorph beam 9302 having a formed offset 9303 and a limiter 9304 adjacent to the formed offset 9303. Offset 9303 increases the mechanical advantage to produce a higher force than bimorph arm 9301 without offset and limiter 9304 increases the force of the arm in a direction away from the unfixed load point end 9306 of the bimorph actuator. prevent action. Bimorph arm 9301 with formed offset 9303 and limiter 9304 can be included in SMA actuators and systems such as those described herein. Bimorph arm 9301 includes one or more SMA materials, such as an SMA ribbon or SMA wire 9308 as described herein, secured to bimorph arm 9301 using techniques including those described herein. includes

94 illustrates a bimorph arm with an offset and limiter according to an embodiment. Bimorph arm 9401 includes a bimorph beam 9402 having a formed offset 9403 and a limiter 9404 adjacent to the formed offset 9403. Limiter 9404 is formed as part of base 9406 for bimorph arm 9401 . The base 9406 is configured to receive the bimorph arm 9401 and includes a recess 9408 configured to receive an offset portion of the bimorph beam. The lower end of the recess is configured as a limiter 9404 adjacent to the formed offset 9403. Base 9406 can also include one or more portions 9410 configured to support portions of the bimorph arm when not actuated. Bimorph arm 9401 with formed offset 9403 and limiter 9404 can be included in SMA actuators and systems such as those described herein. Bimorph arm 9401 includes one or more SMA materials, such as an SMA ribbon or SMA wire as described herein, secured to bimorph arm 9401 using techniques including techniques described herein. .

95 illustrates an embodiment of a base including a bimorph arm with an offset according to an embodiment. Bimorph arm 9501 includes a bimorph beam 9502 with a defined offset 9504. The bimorph arm may also include a limiter using techniques including those described herein. Bimorph arm 9501 includes one or more SMA materials, such as an SMA ribbon or SMA wire 9506 as described herein, secured to bimorph arm 9501 using techniques including those described herein. includes

96 illustrates an embodiment of a base 9608 that includes two bimorph arms with an offset according to an embodiment. Each bimorph arm 9601a,b includes a bimorph beam 9602a,b with a defined offset 9604a,b. Each bimorph arm 9601a,b includes an SMA ribbon or SMA wire 9606a,b as described herein secured to the bimorph arm 9501 using techniques including those described herein. It includes one or more SMA materials such as Each bimorph arm 9601a, b may include a limiter using a technique including techniques described herein. Some embodiments include a base comprising more than two bimorph arms formed using techniques including those described herein. According to some embodiments, bimorph arm 9601 is integrally formed with base 9608. In another embodiment, one or more of the bimorph arms 9602a, b are formed separately from the base 9608 and may be formed using a technique including, but not limited to, solder, resistance welding, laser welding, and adhesive to the base 9608. ) is fixed at In some embodiments, two or more bimorph arms 9601a, b are configured to act on a single object. This enables the ability to increase the force applied to the object. The following graph of FIG. 107 illustrates an example of how the box volume, which is an approximation of the box surrounding the entire bimorph actuator, relates to work per bimorph element. The box volume is approximated using the length of bimorph actuator 9612, the width of bimorph actuator 9610, and the height of bimorph actuator 9614 (collectively referred to as “box volume”).

97 illustrates a buckler arm including a load point extension according to an embodiment. Buckler arm 9701 includes a beam portion 9702 and one or more load point extensions 9704a, b extending from beam portion 9702. Each end 9706a,b of buckler arm 9701 is configured to be integrally formed or secured to a plate or other base using techniques including those described herein. According to some embodiments, one or more load point extensions 9704a,b are secured to or integrally formed with beam portion 9702 at an offset from load point 9710a,b of beam portion 9702. Load points 9710a, b are portions of beam portion 9702 configured to transfer the force of buckler arm 9701 to another object. In some embodiments, load points 9710a, b are the center of beam portion 9702. In other embodiments, the load points 9710a, b are at locations other than the center of the beam portion 9702. The load point extensions 9704a, b are configured to extend from a point coupled to the beam portion 9702 in the longitudinal axial direction of the beam portion 9702 toward the load point 9710a, b of the beam portion 9702. . In some embodiments, the ends of the load point extensions 9704a,b extend to at least the load point 9710a,b of the beam portion 9702. Buckler arm 9701 includes one or more SMA materials, such as SMA ribbon or SMA wire 9712 as described herein. SMA material, such as SMA wire 9712, is secured to opposite ends of beam portion 9702. The SMA material is secured to the opposite end of the beam portion using techniques including those described herein. In some embodiments, the length of the load point extensions 9704a, b can be configured to any length contained within the longitudinal length of the associated flat (undriven) beam portion 9702 of the buckler arm 9701.

98 illustrates a buckler arm 9801 including a load point extension 9810 according to an embodiment in a driven position. The SMA material secured to the opposite end of beam portion 9802 is actuated using techniques including those described herein. The load point 9804 allows the buckler arm 9801 to increase the stroke range across the buckler arm without an extension. Thus, a buckler arm incorporating a load point extension allows for a greater maximum vertical stroke. A buckler arm with a load point extension may be included in SMA actuators and systems such as those described herein.

99 illustrates a bimorph arm including a load point extension according to an embodiment. Bimorph arm 9901 includes a beam portion 9902 and one or more load point extensions 9904a, b extending from the beam portion. One end of the bimorph arm 9901 is configured to be integrally formed or secured to a plate or other base using techniques including those described herein. The end of beam portion 9902 opposite the fixed or integral end is not fixed and is free to move. According to some embodiments, one or more load point extensions 9904a,b are secured to or integrally formed with beam portion 9902 at an offset from the free end of beam portion 9902. Load point extensions 9904a, b are configured to extend away from a plane containing the longitudinal axis of beam portion 9902 from the point at which they join beam portion 9902. For example, one or more load point extensions 9904a, b extend in the direction in which the free end of the beam portion extends when actuated. Some embodiments of the bimorph arm 9901 include one or more load point extensions 9904a, b having a longitudinal axis that forms an angle with a plane containing the longitudinal axis of the beam portion, including from 1 degree to 90 degrees. do. In some embodiments, ends 9910a, b of load point extensions 9904a, b are configured to engage an object configured to be moved.

Bimorph arm 9901 includes one or more SMA materials, such as an SMA ribbon or SMA wire 9906 as described herein. SMA material, such as SMA wire 9906, is secured to opposite ends of beam portion 9902. SMA material is secured to opposite ends of beam portion 9902 using techniques including those described herein. In some embodiments, the length of the load point extensions 9904a, b can be of any length. According to some embodiments, the location of the point of engagement of the object by the ends 9910a, b of the load point extensions 9904a, b can be configured to be at any point along the longitudinal length of the beam portion 9902. there is. The height above the beam part at the end of the load point extension when the beam part is flat (undriven) can be configured to be any height. In some embodiments, the load point extension may be configured to be over at least another portion of the bimorph arm when the bimorph arm is actuated.

100 illustrates a bimorph arm with a load point extension according to an embodiment in a driven position. The SMA material secured to the opposite end of the beam portion 2 is driven using techniques including those described herein. The load point extension 10 allows the bimorph arm 1 to increase the stroke force across the bimorph arm without the extension. Thus, the bimorph arm 1 comprising the load point extension 10 enables a greater force applied by the bimorph arm 1 . A bimorph arm 1 having a load point extension 10 may be included in SMA actuators and systems such as those described herein.

101 illustrates an SMA optical image stabilization device according to an embodiment. The SMA optical image stabilization device 20 includes a moving plate 22 and a stationary plate 24. The moving plate 22 includes a spring arm 26 integrally formed with the moving plate 22 . In some embodiments, the moving plate 22 and stationary plate 24 are each formed to be a single integral plate. The moving plate 22 includes a first SMA material attaching portion 28a and a second SMA material attaching portion 28b. The stop plate 24 includes a first SMA material attachment portion 30a and a second SMA material attachment portion 30b. Each SMA material attachment portion 28, 30 is configured to secure an SMA material, such as an SMA wire, to a plate using a resistance welded joint. The first SMA material attachment portion 28a of the moving plate 22 is formed by a first SMA wire 32a disposed between the first SMA material attachment portion and the first SMA material attachment portion 30a of the stationary plate and the moving plate. and a second SMA wire 32b disposed between the first SMA material attaching portion of the stop plate 24 and the second SMA attaching portion 30b of the stop plate 24 . The second SMA material attachment portion 28b of the moving plate 22 is formed between the third SMA wire 32c disposed between the second SMA material attachment and the second SMA material attachment portion 30b of the stationary plate and the moving plate. and a fourth SMA wire 32d disposed between the second SMA material attachment portion and the first SMA material attachment portion 30a of the stop plate 24 . Driving each SMA wire using techniques including those described herein moves the moving plate 22 away from the stationary plate 24 . 102 illustrates the SMA material attaching portion 40 of the moving portion according to the embodiment. The SMA material attaching portion is configured such that an SMA material such as an SMA wire 41 is resistance welded to the SMA material attaching portion 40 . 103 illustrates the SMA attachment portion 42 of the stop plate to which the resistance welded SMA wire 43 is attached according to the embodiment.

104 illustrates an SMA actuator 45 including a buckle actuator according to an embodiment. Buckle actuator 46 includes a buckle arm 47 as described herein. Buckle arm 47 is configured to move in the z-axis when SMA wire 48 is driven and undriven using techniques including those described herein. Each SMA wire 48 is attached to a respective resistance welding wire crimp 49 using resistance welding. Each resistance welding wire crimp 49 includes at least one side of the SMA wire 48 an island 50 insulated from the metal 51 forming the buckle arm 47 . Island structures can be used in other actuators, optical image stabilization devices, and autofocus systems to connect at least one side of an SMA wire to an insulated island structure formed in a base metal layer, such as in the OIS application shown in FIG. 101 .

105 illustrates a resistance weld crimp comprising an island for an SMA actuator according to an embodiment used to attach an SMA wire 48 to a buckle actuator 46 using techniques including techniques described herein. . 105A illustrates the lower portion of the SMA actuator 45. According to some embodiments, the SMA actuator 45 is formed of a stainless steel base layer 51 . A dielectric layer 52 such as a polyimide layer is disposed on the bottom portion of the stainless steel base layer 51 . According to some embodiments, conductor layer 53 is electrically connected to stainless steel island 50 through vias in dielectric layer 52 and includes wires welded to stainless steel island 50 and conductors attached to stainless steel island. Allows electrical connections to be made between circuits. According to some embodiments, islands 50 are etched from a stainless steel base layer. Dielectric layer 52 holds islands 50 in place within stainless steel base layer 51 . Island 50 is configured to attach SMA wires to the island using a technique including techniques described herein, such as resistance welding. 105B illustrates the top portion of the SMA actuator 45 including the island 50. In some embodiments, a glue or adhesive may also be placed on top of the weld to aid in mechanical strength and act as a fatigue strain relief during operation and impact loading.

108 includes a lens system including an SMA actuator with a buckle actuator according to an embodiment. The lens system includes a liquid lens assembly 61 disposed on a base 62 . The lens system also includes a molded ring/coupler 64 mechanically coupled with the buckle actuator 60 . An SMA actuator, including a buckle actuator 60 as described herein, is disposed on a sliding base 65 disposed on a base 62. The SMA actuator is configured to move the molded ring/coupler 64 along the optical axis of the liquid lens assembly 61 by driving the buckle actuator 60 using techniques including those described herein. This moves the mold ring/coupler 64 to change the focus of the liquid lens in the liquid lens assembly.

109 illustrates an unfixed load point end of a bimorph arm according to an embodiment. The non-fixed load point end 70 of the bimorph arm includes a flat surface 71 for holding an SMA material such as SMA wire 72. The SMA wire 72 is fixed to the flat surface 71 by resistance welding 73. Resistance weld 73 is formed using techniques including techniques known in the art.

110 illustrates an unfixed load point end of a bimorph arm according to an embodiment. The non-fixed load point end 76 of the bimorph arm includes a flat surface 77 for holding an SMA material such as SMA wire 78. SMA wire 78 is secured to flat surface 77 by a resistance weld similar to that illustrated in FIG. 109 . An adhesive 79 is placed on the resistance weld. This adhesive allows for a more reliable bond between the SMA wire 78 and the unsecured load point end 76. Adhesive 79 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

111 illustrates an unfixed load point end of a bimorph arm according to an embodiment. The non-fixed load point end 80 of the bimorph arm includes a flat surface 81 for holding an SMA material such as SMA wire 82. A metal interlayer 84 is disposed on the flat surface 81 . The metal interlayer 84 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 82 is secured to the metal intermediate layer 84 disposed on the flat surface 81 by resistance welding 83 . Resistance weld 83 is formed using techniques including techniques known in the art. The metal interlayer 84 allows for better adhesion with the unsecured load point end 80.

112 illustrates an unfixed load point end of a bimorph arm according to an embodiment. The free load point end 88 of the bimorph arm includes a flat surface 89 for holding an SMA material such as SMA wire 90. A metal interlayer 92 is disposed on the flat surface 89 . The metal interlayer 92 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 90 is secured to the flat surface 89 by a resistance weld similar to that illustrated in FIG. 111 . An adhesive 91 is placed on the resistance weld. This adhesive allows for a more reliable bond between the SMA wire 90 and the unsecured load point end 88. Adhesive 91 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

113 illustrates a fixed end of a bimorph arm according to an embodiment. The fixing end 95 of the bimorph arm includes a flat surface 96 for holding an SMA material such as SMA wire 97. The SMA wire 97 is secured to the flat surface 96 by a resistance weld 98. Resistance weld 98 is formed using techniques including those known in the art.

114 illustrates a fixed end of a bimorph arm according to an embodiment. The anchoring end 120 of the bimorph arm includes a flat surface 121 for anchoring an SMA material, such as an SMA wire 122. The SMA wire 122 is secured to the flat surface 121 by a resistance weld similar to that illustrated in FIG. 113 . An adhesive 123 is placed on the resistance weld. This adhesive enables a more reliable bond between the SMA wire 122 and the anchoring end 120. Adhesive 123 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

115 illustrates a fixed end of a bimorph arm according to an embodiment. The fixing end 126 of the bimorph arm includes a flat surface 127 for holding an SMA material such as SMA wire 128. A metal interlayer 130 is disposed on the flat surface 127 . The metal interlayer 130 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 128 is secured to the metal interlayer 130 disposed on the flat surface 127 by resistance welding 129 . Resistance weld 129 is formed using techniques including techniques known in the art. The metal interlayer 130 allows for better adhesion with the anchoring end 126.

116 illustrates a fixed end of a bimorph arm according to an embodiment. The fixing end 135 of the bimorph arm includes a flat surface 136 for holding an SMA material such as SMA wire 137. A metal interlayer 138 is disposed on the planar surface 136 . The metal interlayer 136 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 137 is secured to the flat surface 136 by a resistance weld similar to that illustrated in FIG. 115 . An adhesive 139 is placed over the resistance weld. This adhesive enables a more reliable bond between the SMA wire 137 and the fixed end 135. Adhesive 139 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

117 illustrates a rear view of a fixed end of a bimorph arm according to an embodiment. Bimorph arm 143 is constructed according to the embodiments described herein. The fixed end 143 of the bimorph arm includes an island 144 that is insulated from the outer portion 145 of the fixed end 143 . This allowed island 144 to be electrically and/or thermally insulated from exterior portion 145 . In some embodiments, the SMA material secured opposite the fixed end 143 of the bimorph arm is electrically coupled with the SMA material, such as an SMA wire, through a via. Island 144 is disposed on an insulator 146 as described herein. Island 144 may be formed using etching techniques including techniques known in the art.

118 illustrates an unsecured load point end 70 of a bimorph arm according to an embodiment. The non-fixed load point end (70) of the bimorph arm includes a flat surface (71) configured to include a radiant surface area (74) extending from the resistance welding region (73). Radiant surface area 74 includes a distal portion 76 and a proximal portion 75 . The flat surface 71 is configured to have an SMA material, such as SMA wire 72, and the material is secured to the flat surface 71. According to some embodiments, SMA wire 72 is secured to flat surface 71 at resistance weld area 73 by a resistance weld. Resistance welds are formed using techniques including those known in the art. In other embodiments, SMA wire 72 is secured to flat surface 71 using other attachment techniques, including those described herein.

The temperature decrease of the unfixed load point end 70 is proportional to the phase transition temperature of the SMA wire 72. The radiant surface area 74 significantly increases the surface area of the free point end 70.

The increased surface area improves the temperature reduction of the unfixed load point end 70. The increased surface area allows cooling to prevent shape memory alloy phase transition during actuation.

119 illustrates an unsecured load point end 170 of a bimorph arm according to an embodiment. The non-fixed load point end 170 of the bimorph arm includes a planar surface 171 configured to include a radiant surface area 174 extending from the resistance welding region 173 .

Radiant surface area 174 includes a distal portion 176 and a proximal portion 175 . Flat surface 171 is configured to have an SMA material such as SMA wire 172 secured to flat surface 171 . According to some embodiments, SMA wire 172 is secured to flat surface 171 by a resistance weld to resistance weld area 173 . In other embodiments, SMA wire 172 is secured to flat surface 171 using other attachment techniques, including those described herein.

The unsecured load point end 170 also includes a proximal hole 178 and a distal hole 179 separated by a resistance weld region 173 . Proximal hole 178 and distal hole 179 are formed using techniques including those known in the art. Although holes 178 and 179 are illustrated as full through features, holes 178 and 179 may be partially etched in some examples.

Proximal hole 178 and distal hole 179 physically break flat surface 171 and define the location of resistance weld region 173 . Holes 178 and 179 are configured to mitigate interference between wire 172 and planar surface 171 near resistance weld area 173 , in accordance with some embodiments.

120 illustrates an unsecured load point end 270 of a bimorph arm according to an embodiment. The non-fixed load point end 270 of the bimorph arm includes a planar surface 271 configured to include a radiant surface area 274 extending from the resistance welding region 273 . Flat surface 271 is configured to have an SMA material such as SMA wire 272 secured to flat surface 271 . According to some embodiments, SMA wire 272 is secured to flat surface 271 by a resistance weld to resistance weld area 273 . In other embodiments, SMA wire 272 is secured to flat surface 271 using other attachment techniques, including those described herein.

The unsecured load point end 270 also includes a proximal hole 278 and a distal hole 279 separated by a resistance weld region 273 . The free load point end 270 also includes an elongate hole 280 corresponding to a section of SMA wire 272 . Elongate hole 280 may be removed to create a wire gap for SMA wire 272. In some embodiments, elongate aperture 280 extends from proximal aperture 278 . Although holes 278, 279, and 280 are illustrated as full through features, holes 278, 279, and 280 may be partially etched in some examples.

Proximal hole 278 and distal hole 279 physically break flat surface 271 and define the location of resistance weld region 273 . Similarly, elongate hole 280 physically breaks flat surface 271 and defines the location of SMA wire 272. Holes 278 , 279 , 280 are configured to mitigate interference between wire 272 and planar surface 271 near resistance weld area 273 , in accordance with some embodiments.

121 illustrates an unsecured load point end 370 of a bimorph arm according to an embodiment. The flat surface 371 is configured to have an SMA material such as SMA wire 372 secured to the flat surface 371 . According to some embodiments, SMA wire 372 is secured to flat surface 371 by a resistance weld to resistance weld region 373 that is at least partially isolated by non-linear hole 378 . In some configurations, non-linear hole 378 is U-shaped to physically isolate up to 90% of resistance weld area 373. Resistance weld region 373 can be mounted on the weld tongue defined by non-linear hole 378 . In other embodiments, SMA wire 372 is secured to flat surface 371 using other attachment techniques, including those described herein. Although non-linear hole 378 is illustrated as a full through feature, non-linear hole 378 may be partially etched in some examples.

The increased surface area from the radiant surface area 374 enables cooling to prevent shape memory alloy phase transition during actuation. In some alternative embodiments, resistance weld region 373 may be completely etched away from unsecured load point end 370 . Alternatively, resistance weld region 373 may also include a partially etched slot to increase the compliance of the tongue.

122 illustrates an unsecured load point end 470 of a bimorph arm according to an embodiment. Adjacent planar surface 471 is provided for holding SMA material, such as SMA wire 472. The SMA wire 472 is secured to the flat surface 471 by a resistance weld area 473 at least partially isolated by a non-linear hole 478.

Resistance weld area 473 may be mounted using partially etched slot 479 in non-linear hole 478. In some configurations, non-linear hole 478 physically breaks planar surface 471 and defines the location of resistance weld region 473 . Holes 178 and 179 are configured to mitigate interference between wire 172 and planar surface 171 near resistance weld region 173 , in accordance with some embodiments. Although holes 178 and 179 are illustrated as full through features, holes 178 and 179 may be partially etched in some examples.

The increased surface area from the radiant surface area 474 enables cooling to prevent shape memory alloy phase transition during actuation.

The disclosed embodiments may be applied to a fixed end of a bimorph arm. 123-125 are provided herein as exemplary embodiments of fixed ends incorporating the disclosed embodiments.

123 illustrates a fixed end of a bimorph arm according to an embodiment. The fixing end 95 of the bimorph arm includes a flat surface 96 for holding an SMA material such as SMA wire 97. SMA wire 97 is secured to flat surface 96 by resistance welding area 98. Resistance weld region 98 is formed using techniques including those known in the art.

The anchoring end 95 includes a proximal hole 93 and a distal hole 94 separated by a resistance weld region 98 . Proximal hole 93 and distal hole 94 are formed using techniques including those known in the art.

Proximal hole 93 and distal hole 94 physically break flat surface 96 and define the location of resistance weld 98 . Holes 93 and 94 are configured to mitigate interference between SMA wire 97 and planar surface 96 near resistance weld area 98 , according to some embodiments. Although holes 93 and 94 are illustrated as full through features, holes 93 and 94 may be partially etched in some instances.

124 illustrates a fixed end of a bimorph arm according to an embodiment. The fixing end 195 of the bimorph arm includes a flat surface 196 for holding an SMA material such as SMA wire 197. SMA wire 197 is secured to flat surface 196 by resistance welding at resistance welding area 198 . Resistance weld region 198 is formed using techniques including those known in the art.

The fixed end 195 includes a proximal hole 193 and a distal hole 194 separated by a resistance weld region 198 . Proximal aperture 193 and distal aperture 194 are formed using techniques including those known in the art.

Fixed end 195 also includes an elongate hole 160 corresponding to a section of SMA wire 197 . Elongate hole 160 may be removed to provide wire clearance for SMA wire 197. In some embodiments, elongate aperture 160 extends from distal aperture 194 .

Proximal hole 193 and distal hole 194 at least partially physically isolate resistance weld region 198 . The elongate hole 160 physically breaks the planar surface 196 and defines the location of the SMA wire 197. Holes 194 and 196 are configured to mitigate interference between SMA wire 197 and planar surface 196 near resistance weld area 198 , in accordance with some embodiments. Although holes 194 and 196 are illustrated as full through features, holes 194 and 196 may be partially etched in some examples.

125 illustrates a fixed end 295 of a bimorph arm according to an embodiment. The fixing end 295 of the bimorph arm includes a flat surface 296 for holding an SMA material such as SMA wire 297. SMA wire 297 is secured to flat surface 296 by resistance welding at resistance welding area 298 .

Resistance weld region 298 is at least partially isolated by nonlinear aperture 294 . In some configurations, non-linear hole 294 is U-shaped to physically isolate up to 90% of resistance weld area 298 . Resistance weld 298 can be mounted on the weld tongue defined by non-linear hole 294 .

The non-linear hole 294 physically breaks the planar surface 296 and defines the location of the resistance weld region 298. Linear hole 294 is configured to mitigate interference between SMA wire 297 and planar surface 296 near resistance weld area 298 , in accordance with some embodiments. In some alternative embodiments, resistance weld region 298 may be completely etched away from fixed end 295 . Alternatively, resistance weld area 298 may also include a partially etched slot to reduce the contact area.

An alternative embodiment is shown in FIG. 126 . In this embodiment, the non-linear hole 294 of the resistance weld region 298 is rotated 180 degrees from that shown in FIG. 125 .

Terms such as "top", "bottom", "above", "below", and x-direction, y-direction, and z-direction herein refer to the spatiality of the parts relative to each other, rather than any particular spatial or gravitational orientation. It will be appreciated that it is used as a term of convenience to indicate a relationship. Thus, the term is intended to include an assembly of component parts whether the assembly is oriented in the specific orientation shown in the drawings and described in the specification, oriented backwards from that orientation, or in any other rotational transformation. .

It will be understood that the term "invention" as used herein should not be construed as meaning that only a single invention is presented having a single essential element or group of elements. Similarly, it will also be understood that the term "invention" includes a number of separate innovations, each of which may be considered a separate invention. Although the present invention has been described in detail with reference to preferred embodiments and their drawings, it is apparent to those skilled in the art that various changes and modifications may be made to the embodiments of the present invention without departing from the spirit and scope of the present invention. . Additionally, the techniques described herein can be used to fabricate devices with 2, 3, 4, 5, 6, or more generally n bimorph actuators and buckle actuators. Accordingly, it is to be understood that the foregoing detailed description and accompanying drawings are not intended to limit the scope of the present invention, which is to be inferred only from the following claims and their properly construed legal equivalents. .

Claims (20)

is an actuator,
beam part;
fixed end; and
including a load point end, the beam portion being disposed between the fixed end and the load point end;
The actuator of claim 1 , wherein the load point end comprises a flat surface comprising a resistance weld area configured to secure the SMA material. The actuator of claim 1 comprising SMA material secured to the stationary end and the load point end. 3. The actuator of claim 2, wherein the load point end comprises a distal hole and a proximal hole separated by a resistance weld region. 3. The actuator of claim 2, wherein the load point end comprises an elongate hole corresponding to a section of SMA material. 3. The actuator of claim 2, wherein the load point end comprises a distal hole and a proximal hole separated by a resistance welding region, an elongated hole corresponding to a section of SMA material, the elongated hole extending from the distal hole. The actuator of claim 1 , wherein the load point end includes a non-linear hole defining a resistance weld region. 7. The actuator of claim 6, wherein the resistance weld region is completely etched away from the load point end. 7. The actuator of claim 6, wherein the resistance weld region is partially etched by the non-linear hole. The actuator of claim 1 , wherein the load point end further comprises at least one radiant surface area extending from the resistance weld region. is an actuator,
beam part;
fixed end;
load point end, the beam portion being disposed between the fixed end and the load point end; and
SMA material fixed to a fixed end and a load point end, the fixed end comprising:
An actuator comprising a flat surface comprising resistance welds of SMA material. 11. The actuator of claim 10, wherein the fixed end comprises a distal hole and a proximal hole separated by a resistance weld region. 11. The actuator of claim 10, wherein the fixed end comprises an elongate hole corresponding to a section of SMA material. 11. The actuator of claim 10, wherein the fixed end comprises a distal hole and a proximal hole separated by a resistance welding region and an elongate hole corresponding to a section of SMA material, the elongate hole extending from the distal hole. 11. The actuator of claim 10, wherein the fixed end includes a non-linear hole defining a resistance weld region for a resistance weld. 15. The actuator of claim 14, wherein the resistance weld area for the resistance weld is completely etched away from the load point end. 15. The actuator of claim 14, wherein the resistance weld area for the resistance weld is partially etched by the non-linear hole. 11. The actuator of claim 10, wherein the load point end further comprises at least one radiant surface area extending from the resistance weld region. is an actuator,
Base; and
comprising one or more bimorph arms, wherein the one or more bimorph arms:
beam part,
fixed end, and
An actuator comprising a load point end, wherein the beam portion is disposed between the fixed end and the load point end, wherein at least one of the fixed end and the load point end comprises a flat surface comprising a resistance welding region. 19. The actuator of claim 18, wherein at least one of the stationary end and the load point end includes a distal hole and a proximal hole separated by a resistance weld region. 19. The actuator of claim 18, wherein at least one of the stationary end and the load point end includes an elongate hole corresponding to a section of SMA material.

Images