KR20220159946A - Vibratory transport device and multi-row vibratory transport system having the same - Google Patents

Abstract

When a force acts on a trough having a linear transport surface from the side, the trough is suppressed from swinging in the lateral direction. A vibratory transport device of the present invention is a vibratory transport device that transports an object to be transported on a linear transport surface by vibration, and includes a first mass body having a linear transport surface, a second mass body that vibrates in antiphase with the first mass body, and A drive elastic body that connects the first mass body and the second mass body, and a vibrating body including the first mass body, the second mass body, and the driving elastic body, on the upstream side in the conveying direction and the downstream side in the conveying direction, above the central portion in the height direction of the vibrating body. A base having a support surface disposed thereon, and an anti-vibration elastic body connecting the vibrating body to the support surface.

Description

Vibratory transport device and multi-row vibratory transport system having the same

The present invention relates to a vibratory transport device capable of transporting an object to be transported in a predetermined direction and a multi-row vibratory transport system having the same.

BACKGROUND ART Conventionally, a vibrating conveying apparatus capable of conveying an object to be conveyed such as a workpiece along a conveying surface to a predetermined conveying destination by vibration is known. A vibratory transport device, connected to the vibrator installation member through an inertial mass fixed to the upper surface of the vibrator installed in the transverse direction, an vibrator installation member fixed to the lower surface of the vibrator body, and a first connecting member installed at an angle Some have carriers that become (for example, refer to Patent Literature 1). In this vibratory transport device, displacement vibration caused by the vibrating body causes bending vibration in the first linking member, and the bending vibration is transmitted to the transport member, so that the workpiece is transported in a predetermined direction along the transport surface. Here, the bending vibration includes vibration components in each of a horizontal direction and a vertical direction. Further, in this vibratory transport device, the linking member support piece is fixed to the middle part of the first linking member in the longitudinal direction, and the linking member support piece and the base are connected via the second linking member. In this way, by fixing the linking-member support piece to the portion serving as the intermediate portion in the longitudinal direction of the first linking member (node of the vibration amplitude), vibration transmitted from the base to the installation surface is greatly reduced.

In addition, as described in Patent Document 1, in order to further reduce the vibration transmitted from the base to the installation surface, as the second connecting member, an Al-based alloy based on Al and Zn, and a Ni-based based on Ni and Co It is conceivable to use a damper such as an alloy or a Fe-based alloy based on Fe and Cr. In the configuration of Patent Literature 1, the anti-vibration effect of significantly reducing vibration in the horizontal direction transmitted from the base to the installation surface is exhibited.

Japanese Unexamined Patent Publication No. 11-91928

As described above, since the vibration in such a vibratory transport device has vibration components in each of the horizontal and vertical directions, in order to further enhance the anti-vibration effect, it is desired to reduce the vertical component as well as the horizontal component. For example, in Patent Literature 1, it is conceivable to reduce the vertical component by reducing the thickness of the connecting member supporting piece while configuring the connecting member supporting piece with an elastic body.

However, by reducing the thickness of the connecting member support piece, the rigidity is weakened in the direction of rotation centering on the connection point between the base and the second connecting member. Usually, since the carrier that transports the object is in a state where the operator can contact it at the upper end of the device, as described above, the carrier member is in a state where the thickness of the connecting member support piece is reduced, for example, while the operator is working. There is a problem that, if the side surface portion of the carrier is pushed from the side, the carrier swings in the lateral direction with the connection point between the base and the second connecting member as a rotational axis.

This problem particularly occurs remarkably in a multi-row vibratory conveyance system in which a plurality of the above-described vibratory conveyance devices are paralleled in the width direction and a plurality of linear conveyance surfaces are arranged substantially in parallel. Here, a case where a plurality of vibrating bodies composed of an inertial mass body, vibrating body mounting member, carrier body, and first coupling member of Patent Document 1 are paralleled (multi-row vibration transport system) is taken as an example. In this multi-row vibratory transport system, there is a case of driving only a part of the vibrating bodies without being limited to the case of driving all the vibrating bodies at the same time. In general, a vibrating body used in a vibrating transport device is vibrated at or near a resonance frequency in order to obtain a large amplitude. As described above, the vibration in such a vibrating transport device has a horizontal component and a vertical component, and unless both are attenuated together, the vibration isolating effect transmitted from the base to the installation surface cannot be sufficiently exhibited. In particular, in a multi-row vibratory transport system, when the resonance frequencies of each other coincide, the vibration components of the vibrating body are transmitted to other vibrating bodies that are stationary or need to be stopped, are amplified by resonance, and unexpected transport is started. have.

An object of the present invention is to provide a vibration conveying device capable of exhibiting an anti-vibration effect of a vertical component and suppressing a conveying member from swinging in the lateral direction even when a force acts on the conveying member for conveying an object from the side, and comprising the same. It is to provide a multi-row vibration conveying system.

That is, a vibratory transport device according to the present invention is a vibratory transport device that transports an object to be transported on a linear transport surface by vibration, and includes a first mass body having the linear transport surface and a first mass body that vibrates in antiphase with the first mass body. Two masses, a drive elastic body connecting the first mass body and the second mass body, and a vibrating body including the first mass body, the second mass body, and the drive elastic body on the upstream side in the transport direction and the downstream side in the transport direction. The base having a support surface disposed above the central portion of the vibrating body in the height direction or the center of gravity of the vibrating body, and an anti-vibration elastic body connecting the vibrating body to the supporting surface.

As a result, in the vibrating transport device according to the present invention, since the support surface for supporting the vibrating body is disposed above the central part in the height direction of the vibrating body or the center of gravity of the vibrating body, the vibration isolating elastic body of the vertical component is made flexible and the damping rate is reduced. Even in a state where is maximized, even if a force acts from the side on the side surface of the conveying member that conveys the conveying object, the distance between the point of action of the force and the fixing point (rotational axis) of the vibrating body and the base becomes relatively small. As a result, the torque acting laterally on the conveying member is reduced, and the oscillation of the conveying member in the lateral direction is suppressed. Therefore, in a multi-row vibratory conveyance system having a plurality of vibratory conveyance devices, it is possible to reduce the collision of the conveying member with peripheral parts, and also to reduce the size of the gap between the conveying members when arranging the conveying members in parallel.

In the vibratory transport device according to the present invention, the anti-vibration elastic body includes a first arm portion installed on the support surface and damping vertical component vibration, and a first arm portion vertically disposed on the first arm portion and installed on the vibrating body. It is characterized by having 2 dark parts.

As a result, in the vibration conveying device according to the present invention, the elastic modulus in the parallel direction and the elastic modulus in the vertical direction are independently determined in the anti-vibration elastic body for further reducing the vibration transmitted from the base to the installation surface. can be adjusted

In the vibratory transport device according to the present invention, the anti-vibration elastic body includes a first arm portion installed on the support surface and damping vertical component vibration, and a first arm portion vertically disposed on the first arm portion and installed on the vibrating body. It is characterized by having 2 arm parts and a curved part which connects the said 1st arm part and the said 2nd arm part, and curves convexly.

As a result, in the vibration conveying device according to the present invention, the elastic modulus in the parallel direction and the elastic modulus in the vertical direction are independently determined in the anti-vibration elastic body for further reducing the vibration transmitted from the base to the installation surface. can be adjusted Further, when force acts on the side surface of the carrying member from the side, swinging of the carrying member in the lateral direction is effectively suppressed.

In the vibration transport device according to the present invention, the first fixing part of the vibrating body and the anti-vibration elastic body is disposed below the second fixing part of the support surface and the anti-vibration elastic body.

Thus, in the vibrating transport device according to the present invention, since the vibrating body is supported so as to be suspended from the base, the vibration of the vibrating body is stabilized even when the vibrating body is increased in size.

A multi-row vibration conveyance system according to the present invention is characterized in that a plurality of vibratory conveyance devices described in any one of the above inventions are provided, and the plurality of linear conveyance surfaces are arranged substantially in parallel.

Thus, in the multi-row vibratory transport system according to the present invention, even when a force acts on the transport member of the vibratory transport device from the side, the transport member is suppressed from swinging in the lateral direction. Therefore, it becomes possible to prevent the part from being damaged by colliding with an adjacent conveying member.

According to the present invention, even when a force acts on the carrying member having the carrying surface from the side, it is possible to suppress the carrying member from swinging in the lateral direction.

1 is a plan view of a multi-row vibratory transport system having a vibratory transport device according to a first embodiment of the present invention.
Fig. 2 is a side view of the vibratory conveying device of Fig. 1;
FIG. 3 is a view in which the front connecting plate of FIG. 2 is removed.
FIG. 4 is a view showing an installation portion of a trough and a trough support of the vibratory transport device of FIG. 2 .
5 is a side view of a vibratory transport device according to a second embodiment of the present invention.
6 is a side view of a vibratory transport device according to a third embodiment of the present invention.
Fig. 7 is a side view showing a modified example of the vibratory transport device according to the first embodiment of the present invention.
Fig. 8 is a perspective view showing the configuration of a vibratory transport device according to a reference example of the present invention.
Fig. 9 is a side view of the vibratory transport device.
10 is an exploded view of the vibratory conveying device.
Fig. 11 is a perspective view of the vibratory transport device in a state where the cover member is removed.
Fig. 12 is a side view of the vibratory transport device in a state where the cover member is removed.
13 is a view showing a flexible substrate before three-dimensional bending.
14 is a view showing a three-dimensionally bent flexible substrate.
15 is a diagram showing a first spanning portion.
16 is a diagram showing a second spanning portion.
Fig. 17 is a diagram showing a third straddling portion;

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

(First Embodiment)

As shown in FIG. 1 , the multi-row vibratory transport system according to the present embodiment has a plurality of vibratory transport devices 1 . A plurality of vibration transport devices 1 are arranged in parallel, and a plurality of troughs 8 (linear transport surfaces 8t) are arranged substantially in parallel. The vibratory transport device 1 is a linear feeder that transports a workpiece, such as an electronic component, to a predetermined transport destination while moving it by vibration on a linear linear transport surface 8t, for example.

In addition, the rear upper surface of the linear conveyance surface 8t is in a state where the work is always piled up by a funnel or the like (not shown). Therefore, when the vibratory conveying device 1 starts conveying, it can be conveyed to the end of the linear conveying surface 8t and supplied to a predetermined conveying destination.

Hereinafter, one vibratory transport device 1 will be described, but all of the plurality of vibratory transport devices 1 have substantially the same configuration. Fig. 2 is a side view of the vibratory conveyance device, and in Fig. 3 is a view of the vibratory conveyance device of Fig. 2 in which the linking plate on the front side of the sheet is removed.

As shown in FIGS. 2 and 3 , the vibratory transport device 1 includes a base 2 fixed on a floor surface, a movable part 5 arranged above the base 2, and a movable part 5 A trough 8 having a fixing part 6 provided above the fixing part 6 and a linear conveying surface 8t for conveying a workpiece above the fixing part 6 is provided.

The base 2 includes a base horizontal portion 2a extending along the linear conveyance surface 8t, and two base vertical portions respectively provided at the upstream end and the downstream end in the conveyance direction of the base horizontal portion 2a. (2b) has. The base horizontal portion 2a is a member extending in the horizontal direction, whereas the two base vertical portions 2b are both members extending in the vertical direction.

The two base vertical portions 2b are connected at their lower ends to the transport direction upstream and transport direction downstream ends of the base horizontal portion 2a, and their upper ends are disposed near the lower surface of the trough 8. The two base vertical portions 2b each have a flat support surface 2c disposed at an upper end thereof. The support surface 2c is a part for attaching the anti-vibration spring 50, and is inclined so that the upstream end in the conveying direction is disposed below the downstream end in the conveying direction.

The movable part 5 and the fixed part 6 are connected at two points in the front-back direction by a pair of drive springs 10 using plate springs. The pair of driving springs 10 are fixed to the front and rear end surfaces of the movable part 5 by fastening bolts 10a at the lower end, and the front and rear directions of the fixed part 6 by fastening bolts 10b at the upper end. fixed to the end face.

The drive spring 10 is a flat spring (plate spring). A piezoelectric element 11 functioning as an excitation source is attached to the drive spring 10, and by applying an electric charge to the piezoelectric element 11, the drive spring 10 elastically deforms and vibrates, thereby causing the movable part 5 and The fixing part 6 vibrates in antiphase.

In this embodiment, the driving spring 10 is installed so that the normal posture, which is not elastically deformed, becomes an inclined posture with respect to the vertical direction. A pair of driving springs 10 are fixed to the movable part 5 and the fixed part 6 so that they are substantially parallel to each other. The spring constant of the drive spring 10 and the piezoelectric element 11 is appropriately selected depending on the condition of an arbitrary resonance frequency determined by the weight and size of the conveyed parts, the weight of the trough 8, and the like.

Further, inside the fixed portion 6, a drive portion (not shown) for vibrating the pair of drive springs 10 is provided. The drive unit is provided with a drive source such as a piezoelectric element 11, and is capable of relatively vibrating the movable unit 5 and the stationary unit 6.

The trough 8 is connected to the trough support 12 disposed above the fixing part 6 . The trough support 12 is connected to the movable part 5 by the connecting plate 16 and vibrates in synchronization with the movable part 5 . The connection plate 16 is connected to the movable part 5 by the connection bolt 16b while being connected to the trough support 12 by the fastening bolt 16a.

On the lower surface of the front end side portion of the trough 8, as shown in FIG. 4, a hooking portion 30 (hook portion) is formed. The locking portion 30 has a protruding portion 31 protruding downward from the lower surface of the trough 8 and a tip protruding portion 32 extending from the tip of the protruding portion 31 toward the upstream side in the conveying direction.

At the front end of the trough support 12, a hooking concave portion 12a for hooking the tip protrusion 32 of the hooking part 30 of the trough 8 is formed. Therefore, the front end side portion of the trough 8 is fixed to the front end of the trough support 12 by engaging the tip projection 32 of the hooking portion 30 with the hooking concave portion 12a of the trough support 12. do. The rear end of the trough 8 is fixed to the rear end of the trough support 12 with bolts 8a in a state where the hooking portion 30 is caught on the front end of the trough support 12 .

A supporting portion 33 protruding downward is formed at the rear end of the lower surface of the trough 8, and a supporting portion 34 protruding downward is formed on the upstream side of the engaging portion 30 in the conveyance direction. In a state where the trough 8 is installed on the trough support 12, the lower surfaces of the support 33 and the support 34 contact the upper surface of the trough support 12.

Between the lower surface of the trough 8 and the upper surface of the trough support 12, hard rubber 35 is disposed. The hard rubber 35 is disposed at an approximately central portion between the support portion 33 and the support portion 34 . The hard rubber 35 is a substantially rectangular plate-like member having substantially the same width as the trough 8 . The predetermined thickness of the hard rubber 35 is approximately the same as the amount of protrusion of the support portion 33 and the support portion 34 .

In the state where the trough 8 is attached to the trough support 12, gaps are formed between the support portion 33 and the hard rubber 35 and between the support portion 34 and the hard rubber 35. Therefore, the lower surface of the trough 8 is supported at three locations: the support part 33, the hard rubber 35, and the support part 34 with respect to the upper surface of the trough support 12.

In this embodiment, the movable part 5, the connecting plate 16, the trough support 12, and the trough 8 are the first mass of the present invention, and the fixed part 6 is the second mass of the present invention, The driving spring 10 is the driving elastic body of the present invention, and the anti-vibration spring 50 is the anti-vibration elastic body of the present invention. Therefore, the vibrating body T is comprised including the movable part 5, the connecting plate 16, the trough support 12, the trough 8, the stationary part 6, and the driving spring 10.

The vibrating body T is supported against the support surfaces 2c of the two base vertical portions 2b by a pair of anti-vibration springs 50 which are plate springs. The anti-vibration spring 50 has a first arm portion 51 installed on the support surface 2c to damp vibration of a vertical component, and a second arm portion 52 disposed vertically with respect to the first arm portion 51. have. The 1st arm part 51 and the 2nd arm part 52 are integrally formed, and the anti-vibration spring 50 is a flat L-shaped elastic member (L-shaped spring).

The anti-vibration spring 50 is fixed to the support surface 2c at the first arm portion 51 by a fastening bolt 51a, and at the second arm portion 52 by a fastening bolt 52a a driving spring ( 10) is fixed. Here, the pair of anti-vibration springs 50 are installed on the support surface 2c so that the first arm portion 51 is disposed in parallel, and a pair of driving springs ( 10) is installed.

In addition, the first arm portion 51 of the anti-vibration spring 50 is disposed perpendicular to the driving spring 10, and the second arm portion 52 is disposed parallel to the driving spring 10. Therefore, the first arm portion 51 of the anti-vibration spring 50 is parallel to the elastic main axis of the drive spring 10, and the second arm portion 52 is disposed perpendicular to the elastic main axis of the drive spring 10. . In the present embodiment, the direction of the elastic main axis of the drive spring 10 is defined by the installation angle of the drive spring 10, and "the first arm portion 51 of the anti-vibration spring 50 is the drive spring 10 ) means that the first arm 51 of the anti-vibration spring 50 is disposed along a direction that is parallel or substantially parallel to the elastic main axis of the drive spring 10, and , "the second arm portion 52 of the anti-vibration spring 50 is disposed perpendicular to the elastic main axis of the drive spring 10" means that the second arm portion 52 of the anti-vibration spring 50 is It means that it is arranged along a direction orthogonal or approximately orthogonal to the principal axis of elasticity (direction normal to the principal axis of elasticity).

In this embodiment, each of the pair of drive springs 10 is provided with a protrusion 53 at a portion of a joint that is not displaced in the horizontal and vertical directions, and the second anti-vibration spring 50 is provided on the protrusion 53. The distal end of the arm portion 52 is fixed. In addition, since the drive spring 10 has both ends (upper and lower ends) fixed to the fixed portion 6 and the movable portion 5 (fixed at both ends), the joint is at the center of the longitudinal direction of the drive spring 10 Part.

The node of the drive spring 10 can be grasped as a point, but the area where the protrusion 53 is provided in the drive spring 10 is a predetermined area including the node of the drive spring 10 (the node and the area near the node). )to be. The projection 53 is provided with a female screw hole (not shown).

In the second arm portion 52 of the anti-vibration spring 50, a bolt insertion hole (not shown) communicating with the female screw hole of the protrusion 53 is formed, and a bolt 52a inserted through the bolt insertion hole is The second arm 52 of the anti-vibration spring 50 is fixed to the protrusion 53 of the drive spring 10 by screwing into the female screw hole of the protrusion 53 .

The support surface 2c arranged at the upper end of the two base vertical parts 2b is arrange|positioned above the center part of the vibrating body T in the height direction. Therefore, when force acts on the side surface of the trough 8 from the side, in Fig. 2, the straight line passing through the two support surfaces 2c is intended to be rocked, but the support surface 2c is vibrating. Compared to the case of being arranged below the central part in the height direction of T, the distance between the point of application of the force and the rotation axis becomes small, and the torque acting on the side of the trough 8 becomes small. In this embodiment, the height of vibrating body T is the distance along the vertical direction between the upper end of the trough 8 and the lower end of the movable part 5.

In a state where the vibrating body T is supported by the pair of anti-vibration springs 50 on the support surfaces 2c of the two base vertical portions 2b, the second arm portion 52 of the anti-vibration spring 50 is the first arm portion. It extends downward from the end of 51. The vibrating body T and the first fixing part A1 of the second arm part 52 are arranged below the supporting surface 2c and the second fixing part A2 of the first arm part 51 .

Therefore, the two support surfaces 2c are respectively arranged on the upstream side in the transport direction and the downstream side in the transport direction with respect to the vibrating body T, and the vibrating body T is the supporting surface 2c of the two base vertical portions 2b. ) is supported so as to be suspended by a pair of anti-vibration springs (50). In addition, in order to prevent side force from acting on the side surface portion below the trough 8 of the vibrating body T, a cover member is provided on the side surface of the base 2, and the cover member moves the trough 8 of the vibrating body T. ) You may make it cover the lower side part than.

The main action of the vibration transport device 1 will be described. In a state where the vibratory conveying device 1 is fixed to the floor surface, a workpiece is placed on the upper surface of the trough 8 set substantially horizontally. In this state, by energizing the drive spring 10, the movable part 5 and the stationary part 6 are caused to vibrate. Here, since the driving spring 10 connecting the movable part 5 and the stationary part 6 is inclined in the conveying direction, the component in the conveying direction and the vertical direction component perpendicular to the conveying direction are generated according to the inclination angle. have and vibrate And this vibration is transmitted to the trough 8 via the connecting plate 16 and transmitted from the trough 8 to the work, so that the work is conveyed on the upper surface of the trough 8.

At this time, the position of the center of gravity of the fixing part 6 is approximately in the vicinity of the center of the fixing part 6 . In addition, the center of gravity position obtained by synthesizing the center of gravity of the movable part 5, the center of gravity of the connecting plate 16 vibrating integrally with the movable part 5, and the center of gravity of the trough 8 is When the trough 8 straddles the fixing part 6 and is integrally formed, the position of the center of gravity of the fixing part 6 is in the vicinity. Because of this, both vibrations are eliminated, and vibrations transmitted to the base 2 and the bottom surface together with the action of the anti-vibration spring 10 can be effectively damped.

In the multi-row vibratory transport system of the present embodiment, since the troughs 8 of the plurality of vibratory transport devices 1 are arranged in parallel, the width of the trough 8 is very small, and the front end side portion and the rear end portion of the trough 8 are It is difficult to fix multiple places between them to the trough support 12 with bolts from above. Therefore, the front end side part of the trough 8 is fixed to the trough support 12 by the hooking part 30.

For example, if the part on the front end side of the trough 8 is fixed with bolts from below the front end of the trough support 12, since it is necessary to form a threaded portion in the trough 8, the thickness of the trough 8 is It becomes larger, and the weight of the trough 8 increases, causing a problem in that the carrying capacity decreases. On the other hand, in this embodiment, since the front end side part of the trough 8 is fixed to the trough support 12 by the hooking part 30, it is not necessary to form a threaded part in the trough 8.

In addition, when the trough 8 is fixed to the trough support 12 at two locations, the front end side and the rear end, the distance between the fixed locations becomes longer, and the portion between the fixed locations of the trough 8 is supported by the trough support 12 Therefore, there is a problem that the resonance frequency of the trough 8 between the fixed locations is lowered and the vibration distribution becomes uneven. On the other hand, in this embodiment, while the trough 8 is fixed to the trough support 12 at the front end side and the rear end, the part between the front end side and the rear end of the trough 8 is made of hard rubber ( 35) is fixed to the trough support 12. As a result, there is no problem that the conveyance capacity is lowered or the problem that the vibration distribution becomes uneven. In addition, in this embodiment, when one hard rubber 35 is disposed between the front end side portion and the rear end of the trough 8, the lower surface of the trough 8 is supported by the trough support 12 at three locations, When the two hard rubbers 35 are disposed between the front end side portion and the rear end of the trough 8, the lower surface of the trough 8 is supported by the trough support 12 at four locations. In either case, there is no problem that the vibration distribution becomes uneven.

As described above, the vibration conveyance device 1 of the present embodiment is a vibration conveyance device that conveys an object to be conveyed on the linear conveyance surface 8t by vibration, and the first mass body having the linear conveyance surface 8t (movable part ( 5), the connecting plate 16, the trough support 12, the trough 8), the second mass vibrating in antiphase with the first mass body (fixed part 6), the first mass body and the second mass body With respect to the driving elastic body (a pair of driving springs 10) connecting the oscillating body T including the first mass body, the second mass body, and the driving elastic body, on the upstream side in the conveying direction and the downstream side in the conveying direction, the oscillating body T A base 2 having a support surface 2c disposed above the central portion in the height direction of the base 2, and an anti-vibration elastic body (a pair of anti-vibration springs 50) connecting the vibrating body T to the support surface 2c. .

Thus, in the vibratory transport device 1 of the present embodiment, the support surface 2c (the second fixed point A2 between the vibrating body T and the base 2) supporting the vibrating body T is the central portion in the height direction of the vibrating body T. Since it is arranged more upward, even if the damping rate is maximized by making the vibration-proof spring 50 of the vertical component flexible, even if a force acts on the side surface of the trough 8 from the side, the point of action of the force and the vibrating body The distance between T and the fixed point (rotation axis) of the base 2 becomes relatively small. Thereby, the torque acting on the trough 8 from the side becomes small, and the trough 8 is suppressed from swinging in the lateral direction. Therefore, in a multi-row vibratory conveying system having a plurality of vibratory conveying devices 1, it is possible to reduce the collision of the trough 8 with peripheral parts, and when the troughs 8 are arranged in parallel, the trough 8 It is possible to reduce the size of the gap between the liver.

In the vibratory transport device 1 of the present embodiment, the anti-vibration spring 50 is provided on the support surface 2c and damps the vibration of the vertical component, and the first arm 51 is perpendicular to the first arm 51. and a second arm 52 installed on the vibrating body T.

As a result, in the vibrating transport device 1 of the present embodiment, the elastic modulus in the parallel direction and the vertical The modulus of elasticity in the direction to be can be independently adjusted.

In the vibration transport device 1 of the present embodiment, the first fixing part A1 of the vibrating body T and the anti-vibration spring 50 is disposed below the second fixing part A2 of the support surface 2c and the anti-vibration spring 50. do.

Thus, in the vibrating transport device 1 of the present embodiment, since the vibrating body T is supported so as to hang from the base vertical portion 2b of the base 2, even when the vibrating body T is enlarged in size, the vibrating body T Vibration stabilizes.

The multi-line vibratory conveyance system of the present embodiment includes a plurality of vibratory conveyance devices 1, and a plurality of linear conveyance surfaces 8t are arranged substantially in parallel.

As a result, in the multi-row vibratory transport system of the present embodiment, even when a force acts on the trough 8 of the vibratory transport device 1 from the side, the trough 8 is suppressed from swinging in the lateral direction, so that the adjacent It becomes possible to prevent parts from being damaged by colliding with the trough 8.

(Second Embodiment)

The difference between the vibratory transport device 101 of the present embodiment and the vibratory transport device 1 of the first embodiment is that in the first embodiment, the vibration body T and the second arm portion 52 of the anti-vibration spring 50 1st fixing part A1 of is arrange|positioned below the 2nd fixing part A2 of the 1st arm part 51 of the support surface 2c and the anti-vibration spring 50, in this embodiment, the vibration body T and The point that the 1st fixing part A1 of the 2nd arm part 152 of the anti-vibration spring 150 is arrange|positioned above the support surface 2c and the 2nd fixing part A2 of the 1st arm part 151 of the anti-vibration spring 150 to be. In addition, in the vibratory conveyance apparatus 101 of this embodiment, the description is abbreviate|omitted about the point of the structure similar to the vibratory conveyance apparatus 1 of 1st Embodiment.

As shown in FIG. 5 , the vibratory transport device 101 includes a base 2 fixed on a floor surface, a movable part 5 arranged above the base 2, and an upper part of the movable part 5. A trough 8 having a fixing portion 6 provided and a linear conveying surface 8t for conveying a workpiece above the fixing portion 6 is provided.

In this embodiment, the movable part 5, the connecting plate 16, the trough support 12, and the trough 8 are the first mass of the present invention, and the fixed part 6 is the second mass of the present invention, The driving spring 10 is the driving elastic body of the present invention, and the anti-vibration spring 150 is the anti-vibration elastic body of the present invention. Therefore, the vibrating body T is comprised including the movable part 5, the connecting plate 16, the trough support 12, the trough 8, the stationary part 6, and the driving spring 10.

The vibrating body T is supported with respect to the support surfaces 2c of the two base vertical parts 2b by a pair of anti-vibration springs 150 which are plate springs. The anti-vibration spring 150 has a first arm portion 151 and a second arm portion 152 arranged vertically with respect to the first arm portion 151 . The 1st arm part 151 and the 2nd arm part 152 are integrally formed, and the anti-vibration spring 150 is a flat L-shaped elastic member (L-shaped spring).

The anti-vibration spring 150 is fixed to the support surface 2c at the first arm portion 151 by the fastening bolt 51a, and at the second arm portion 152 by the fastening bolt 10b at the fixed portion 6 ) is fixed at A pair of anti-vibration springs 150 are installed on the support surface 2c so that the first arm portion 151 is disposed in parallel, and are installed on the fixing part 6 so that the second arm portion 152 is disposed in parallel.

In a state where the vibrating body T is supported by the pair of anti-vibration springs 150 on the support surfaces 2c of the two base vertical portions 2b, the second arm portion 152 of the anti-vibration spring 150 is the first arm portion. It extends upward from the end of 151. Therefore, the 1st fixing part A1 of the 2nd arm part 152 of the vibration body T and the anti-vibration spring 150 is the 2nd fixing part of the support surface 2c and the 1st arm part 151 of the anti-vibration spring 150 It is placed above A2.

The support surface 2c arranged at the upper end part of the two base vertical parts 2b is arrange|positioned above the center part of the height direction of the vibrating body T on the conveying direction upstream side and the conveying direction downstream side with respect to the vibrating body T.

As described above, in the vibratory transport device 101 of the present embodiment, the same effects as those of the vibratory transport device 1 of the present embodiment are obtained.

(Third Embodiment)

The difference between the vibratory transport device 201 of the present embodiment and the vibratory transport device 1 of the first embodiment is that in the first embodiment, the vibrating body T includes the first mass body, the second mass body, and the driving elastic body. On the other hand, in the present embodiment, the vibrating body T has a first mass body, a second mass body, and a driving elastic body, and has a third mass body connected to the second mass body by a driving elastic body. In addition, in the vibratory conveyance apparatus 201 of this embodiment, about the point of the structure similar to the vibratory conveyance apparatus 1 of 1st Embodiment, the description is abbreviate|omitted.

As shown in FIG. 6, the vibratory transport device 201 includes a base 2 fixed on the floor surface, a main block 213a and a sub-block 213b disposed above the base 2, The main block 212a and the sub-block 212b arranged above it, and the trough 8 which has the linear conveyance surface 8t which conveys the workpiece|work above it are provided.

The main block 212a and the sub-block 212b are integrally fixed, and the main block 213a and the sub-block 213b are integrally fixed.

The trough support 12 connected to the trough 8 and the main block 212a are connected at two points in the front-rear direction by a pair of drive springs 10 using plate springs. The pair of driving springs 10 are fixed to the front and rear end surfaces of the main block 212a at the lower end by fastening bolts 10a, and the front and rear ends of the trough support 12 at the upper end by fastening bolts 10b. It is fixed to the direction end face.

The sub-block 212b and the sub-block 213b are connected at two locations in the front-back direction by a pair of drive springs 210 using plate springs. The pair of drive springs 210 are fixed to the front and rear end surfaces of the sub block 213b at the lower end by fastening bolts 210a, and the front and rear ends of the sub block 212b at the upper end by fastening bolts 210b. It is fixed to the direction end face.

The driving spring 10 and the driving spring 210 are flat springs (plate springs). A piezoelectric element (not shown) that functions as an excitation source is attached to the drive spring 10 and the drive spring 210, and the drive spring 10 and the drive spring 210 are elastically deformed by applying an electric charge to the piezoelectric element. vibration occurs.

In this embodiment, the trough 8 and the trough support 12 are the first mass body of the present invention, the main block 212a and the sub block 212b are the second mass body of the present invention, and the drive spring 10 This is the driving elastic body of the present invention, and the anti-vibration spring 50 is the anti-vibration elastic body of the present invention.

The vibration transport device 201 of the present embodiment includes a main block 213a and a sub-block 213b (third mass) connected to the second mass body of the present invention by a pair of driving springs 210. have. Therefore, the vibrating body T is composed of the trough 8, the trough support 12, the main block 212a, the subblock 212b, the main block 213a, the subblock 213b, the drive spring 10, and the drive It is configured to include a spring 210.

Similar to the first embodiment, the vibrating body T is supported against the support surfaces 2c of the two base vertical portions 2b by a pair of anti-vibration springs 50 which are plate springs.

The support surface 2c arranged at the upper end part of the two base vertical parts 2b is arrange|positioned above the center part of the height direction of the vibrating body T on the conveying direction upstream side and the conveying direction downstream side with respect to the vibrating body T.

In a state where the vibrating body T is supported on the support surfaces 2c of the two base vertical portions 2b by the pair of anti-vibration springs 50, the vibrating body T and the second arm portion 52 of the anti-vibration spring 50 1st fixing part A1 of is arrange|positioned below the 2nd fixing part A2 of the 1st arm part 51 of the support surface 2c and the anti-vibration spring 50.

Therefore, the two support surfaces 2c are respectively arranged on the upstream side in the transport direction and the downstream side in the transport direction with respect to the vibrating body T, and the vibrating body T is the supporting surface 2c of the two base vertical portions 2b. ) is supported so as to be suspended by a pair of anti-vibration springs (50).

As described above, in the vibratory transport device 201 of the present embodiment, the same effects as those of the vibratory transport device 1 of the present embodiment are obtained.

In the vibration transport device 201 according to the present embodiment, the resonance frequencies of the drive spring 10 and the drive spring 210 are made different from each other, and the drive spring 10 is vibrated by a drive unit (not shown). state and a state in which the drive spring 210 vibrates.

In the vibration transport device 201 of the present embodiment, the inclination posture (direction, angle) of the drive spring 10 and the inclination posture of the drive spring 210 are different. In particular, in this embodiment, the inclination direction of the drive spring 210 is set in the opposite direction to the inclination direction of the drive spring 10 (the direction in which the upper end of the drive spring 10 faces). In the vibratory transport device 201 according to the present embodiment, the oscillation angle of the drive spring 10 and the oscillation angle of the drive spring 210 are made different from each other, and the transported object on the linear transport surface when the drive spring 10 is vibrated It is set so that the conveyance direction of and the conveyance direction of the workpiece|work on the linear conveyance surface in the case of vibrating the drive spring 210 are reverse directions (advance direction and retreat direction).

In addition, a specific structure is not limited only to the above-mentioned embodiment.

For example, in the first to third embodiments, the anti-vibration springs 50 and 150 are flat L-shaped elastic members (L-shaped springs), but the shape (length, area, thickness) of the anti-vibration springs 50 and 150 etc.) is optional. The anti-vibration springs 50 and 150 are not limited to those in which the first arm portions 51 and 151 and the second arm portions 52 and 152 are integrally formed.

For example, the first arm portions 51 and 151 and the second arm portions 52 and 152 may be connected via other elastic members. The anti-vibration springs 50 and 150 include first arm parts 51 and 151 disposed parallel to the elastic main axis of the driving spring 10 and second arm parts disposed perpendicular to the elastic main axis of the driving spring 10 ( 52, 152). The antivibration springs 50 and 150 may be springs other than L-shaped springs (for example, springs in which base ends of I-shaped springs are connected, T-shaped springs, etc.) or elastic bodies other than springs (such as rubber).

For example, as shown in FIG. 7 , the anti-vibration spring 350 is installed on the support surface 2c and damps the vibration of the vertical component, and the first arm 351 is perpendicular to the first arm 351. You may have the 2nd arm part 352 arrange|positioned and attached to the vibrating body T, and the curved part 353 which connects the 1st arm part 351 and the 2nd arm part 352, and curves convexly.

Thus, in the vibratory transport device of this modified example, in the anti-vibration spring 350 for further reducing the vibration transmitted from the base 2 to the mounting surface, the elastic modulus in the parallel direction and the The modulus of elasticity can be adjusted independently. Further, when a force acts on the side portion of the trough 8 from the side, the trough 8 is effectively suppressed from swinging in the transverse direction.

In the first to third embodiments, examples of the vibrating body have been shown, but the configuration of the vibrating body is not limited thereto. Therefore, the vibration body of the present invention may include members other than those while including the first mass body, the second mass body, and the driving elastic body.

In the first to third embodiments, the support surfaces 2c of the two base vertical portions 2b are disposed above the central portion in the height direction of the vibrating body T, but the support surfaces of the two base vertical portions 2b ( Even if 2c) is arrange|positioned above the position of the center of gravity of the vibrating body T, the effect of this invention is acquired.

In the first to third embodiments, the excitation source of the drive spring 10 is a piezoelectric element, but the excitation source may be other than a piezoelectric element. In addition, objects other than various LEDs, such as LEDs, electronic parts other than LEDs, or electronic parts, such as food, may be sufficient as the object to be conveyed by the vibration conveyance device.

In the first embodiment, instead of disposing one or two hard rubbers 35 between the front end side portion and the rear end of the trough 8, the trough ( 8) You may form one or two protruding parts projecting downward from the lower surface. Between the front end side part and the rear end part of the trough 8, you may form one or two protrusions which protrude upward from the upper surface of the trough support 12 toward the top.

In the first embodiment, instead of fixing the front end side portion of the trough 8 to the trough support 12 by means of the hook 30, similarly to the rear end of the trough 8, the trough support ( 12) may be fixed.

In addition, the specific configuration of each part is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the present invention.

Hereinafter, the invention related to the reference example of the present invention will be described.

As a vibratory transport device, various forms are known. For example, an apparatus disclosed in Document 1 (Japanese Patent Laid-Open No. 2016-160099) is configured such that an object to be conveyed on a conveyance surface is conveyed by vibrating a mass (movable member) elastically supported with respect to a base. . Further, for example, an apparatus disclosed in Document 2 (Japanese Patent Laid-Open No. 2007-168936) has a pair of mass bodies (movable part and weight part) connected via an elastic member, and conveys by vibrating them in antiphase. It is configured so that an object to be conveyed on a surface is conveyed.

In these vibratory conveyance devices, the excitation unit for vibrating the mass body is constituted by including a piezoelectric element or an electromagnet, and a predetermined drive voltage is applied to the piezoelectric element or electromagnet from a drive circuit in charge of control so that the mass body is subjected to a predetermined driving voltage. The vibration of is excited so that a predetermined conveying mode is realized.

In the vibratory conveying device as described above, naturally, it is necessary to form a wiring structure for electrically connecting a drive circuit for controlling and a piezoelectric element or an electromagnet. It is often provided in a position different from that of the same structure (body part of the device). Therefore, this wiring structure is, at one end, connected to a piezoelectric element or electromagnet provided inside the structure, laid along the surface of the mass body, or inserted through an insertion hole provided in the mass body as necessary, and then the structure It is drawn out and connected to the drive circuit at the other end.

In a conventional vibratory transport device, such a wiring structure was formed using a circular cable. Then, in order to facilitate the laying of the circular cable and to protect the laid circular cable from being damaged or disconnected, a groove for wiring is formed on the surface of the mass body, and the circular cable is routed along the groove. I was trying to lay it down. In addition, since the circular cable laid along the surface of the mass body remains exposed, it is dangerous, so there has been a case where a cover is provided from above.

In such a configuration, there is a problem that when the mass body is excited, the circular cable rubs against the groove or the cover, causes vibration, and acts like a damper that dampens the vibration. In order to avoid this, it is necessary to make the depth and width of the wiring groove sufficiently large with respect to the outer diameter of the laid circular cable.

On the other hand, in order to secure sufficient amplitude and realize stable conveyance in a vibratory conveyance device, it is indispensable to ensure a sufficient weight of a mass body, in particular, a mass body functioning as a weight. However, as the depth and width of the groove for wiring formed on the surface of the mass body increases, the weight (defective mass) of the mass body lost through the groove increases, making it difficult to secure the weight of the mass body.

In this way, if the groove formed on the surface of the mass body is enlarged in order to prevent the vibration from being weakened by the circular cable, the weight of the mass body cannot be secured, resulting in a decrease in amplitude. Manufacturers of vibratory transport devices have always struggled with this dilemma. Particularly, in recent years, the number of piezoelectric elements and the like to be installed tends to increase along with the enhancement of the functionality of vibratory transport devices and the like. That is, the number of wires tends to increase. Thus, the dilemma becomes even more serious.

The invention of this reference example aims at realizing a wiring structure in which the conveyance performance is less likely to be impaired in a vibratory conveyance device.

The invention of this reference example has taken the following means in order to achieve the above object.

That is, the invention of this reference example includes a structure including a mass body supported elastically, and a vibrating unit for vibrating the mass body, and the vibrating unit vibrates the mass body so that the object to be transported is conveyed. The apparatus, wherein at least a part of connection wiring connecting a component to be connected provided inside the structure and a component to be connected provided outside the structure is formed using a flexible substrate, and at least a part of the flexible substrate It is characterized in that is excreted along the surface of the mass body.

According to this configuration, it is not necessary to provide a deep groove on the surface of the mass body so that the vibration is not weakened by the connection wiring. Therefore, the weight of the mass body is not damaged. That is, the dilemma described above is resolved, and the situation in which conveyance performance is impaired due to connection wiring is avoided.

Preferably, in the vibratory transport device, the flexible substrate has a straddling portion provided between members that move relative to each other by excitation, and the straddling portion has slack that allows relative movement between the members. It is characterized by being provided.

According to this configuration, when relative movement between the members occurs due to excitation, the flexible substrate does not act like a damper for damping vibration.

Preferably, in the vibration transport device, the structure is provided with a plurality of the mass bodies, and the straddling portion is provided between the plurality of mass bodies.

According to this configuration, when the plurality of masses move relative to each other due to excitation, the flexible substrate does not act as a damper for damping vibration.

Preferably, in the vibration conveying device, the straddling portion is provided between the mass body and the component to be connected.

According to this configuration, when the mass body and the component to be connected are moved relative to each other by excitation, the flexible substrate does not act like a damper that dampens vibration.

Preferably, in the vibration transport device, the structure includes an elastic body provided on the mass body, and the vibration excitation unit includes a piezoelectric element for vibration vibration provided on the elastic body and an vibration control unit for applying a driving voltage thereto. and the component to be connected is the piezoelectric element for excitation, and the connected component is the excitation control unit.

According to this configuration, it is possible to connect to a control unit having a piezoelectric element for excitation without impairing transport performance.

Preferably, in the vibratory transport device, the structure includes an elastic body provided on the mass body, and the vibrating unit includes a detection piezoelectric element provided on the elastic body and a vibration control unit that obtains a detection voltage therefrom. and the component to be connected is the piezoelectric element for detection, and the component to be connected is the control unit.

According to this configuration, it is possible to connect to a control unit having a piezoelectric element for detection without impairing transport performance.

According to the invention of this reference example, it is possible to realize a wiring structure in which the transport performance of the vibratory transport device is less likely to be impaired.

Hereinafter, the invention of this reference example will be described with reference to the drawings.

<1. Configuration of Vibration Conveyor>

The configuration of the vibratory transport device according to this reference example will be described with reference to FIGS. 8 to 10 . Fig. 8 is a perspective view showing the configuration of a vibratory transport device 1100 according to this reference example. 9 is a side view of the vibratory transport device 1100. 10 is an exploded view of the vibration conveying device 1100.

The vibration transport device 1100 is a device that transports an object to be transported (specifically, various workpieces such as IC chips and minute coils) by vibration.

The vibratory transport device 1100 includes a structure X constituted by mass bodies 1001a, 1001b, 1001c, elastic bodies 1002a, 1002b, base 1003, cover member 1004, and the like, and piezoelectric elements 1005p, 1005q. ), an excitation control unit 1006, a connection wire 1007, and the like. The object to be conveyed is transported by the vibrating unit Y vibrating the masses 1001a, 1001b, and 1001c of the structure X.

As shown in Fig. 10, the first mass body 1001a includes an upper block portion 1011a and a lower block portion 1012a. The upper block portion 1011a is a long block-shaped member. On the other hand, the lower block portion 1012a is a block-shaped member shorter than the upper block portion 1011a, and is fixed to the lower surface of the upper block portion 1011a on the upper surface. The lower block portion 1012a may be fixed to the upper block portion 1011a by bolts or the like, or may be formed integrally with the upper block portion 1011a.

The upper surface of the first mass body 1001a (that is, the upper surface of the upper block portion 1011a) forms a straight conveying surface (linear conveying surface) L, and in the vibratory conveying device 1100, this linear conveying surface L is a horizontal plane. installed so that In the following, the extension direction (longitudinal direction) of the linear conveyance surface L is referred to as the "rear-rear direction", and the direction orthogonal to the front-rear direction in the horizontal plane (ie, the width direction (short direction) of the linear conveyance surface L) is referred to as "left and right". is called “direction”.

In the second mass body 1001b, a block-like part (previous block part) 1011b disposed in the front and a block-shaped part (rear block part) 1012b disposed in the rear are respectively on the upper end side, extending forward and backward. It is provided with a gate-shaped main block as a whole, which is connected by a long connecting portion 1013b. Further, the second mass body 1001b includes a sub-block portion 1014b fixed to the lower surface of the connecting portion 1013b by a bolt stop.

In the third mass body 1001c, a block-shaped part (previous block part) 1011c disposed in the front and a block-like part (rear block part) 1012c disposed in the rear are forward and backward on the lower end side, respectively. It has a main block in the shape of an inverted gate as a whole, which is connected by an extended long connecting portion 1013c. In addition, the third mass body 1001c has a sub-block portion 1014c fixed to the upper surface of the connecting portion 1013c by a bolt stop.

As shown in FIG. 9 and the like, the first mass body 1001a is connected to the second mass body 1001b via a pair of first elastic bodies 1002a and 1002a provided at the front and rear and extending in parallel to each other, thereby connecting the second mass body to the second mass body 1001b. (1001b) is elastically supported. In addition, the second mass body 1002b is connected to the third mass body 1001c via a pair of second elastic bodies 1002b and 1002b provided at the front and rear and extending in parallel to each other, thereby being elastic with respect to the third mass body 1001c. sexually supported. In addition, the third mass body 1002c is connected to the base 1003 via a pair of anti-vibration springs 1030 and 1030 provided at the front and rear and extending parallel to each other, so that the third mass body 1002c is elastically supported with respect to the base 1003. However, all of the first elastic body 1002a, the second elastic body, and the anti-vibration spring 1030 are flat elastic members, and are constituted by a flat spring or the like. In addition, the base 1003 is a block-shaped member that is long in front and rear, and is disposed on the floor surface or the like of the site where the vibratory transport device 1100 is installed.

The connection aspect of the first elastic body 1002a will be described in more detail. As shown in Fig. 10, upper bolt holes H1001a are provided on the front and rear end surfaces of the lower block portion 1012a of the first mass body 1001a. Further, lower bolt holes H1002a are provided near the lower end of the front surface of the front block portion 1011b and near the lower end of the rear surface of the rear block portion 1012b of the second mass body 1001b. Then, one first elastic body 1002a is bolted to the front surface of the lower block portion 1012a of the first mass body 1001a at the upper end, and the entire block portion of the second mass body 1001b at the lower end. It is bolted to the front face of (1011b). Further, the other first elastic body 1002a is bolted to the rear surface of the lower block portion 1012a of the first mass body 1001a at the upper end, and the rear block of the second mass body 1001b at the lower end. It is bolted to the rear face of part 1012b. In this way, the first mass body 1001a is connected to the second mass body 1001b via the pair of first elastic bodies 1002a and 1002a.

The connection aspect of the second elastic body 1002b will be described in more detail. As shown in Fig. 10, an upper bolt hole H1001b is provided near the upper end of the rear surface of the front block part 1011b of the second mass body 1001b and near the upper end of the front surface of the rear block part 1012b. . Further, lower bolt holes H1002b are provided near the lower end of the rear surface of the front block portion 1011c and near the lower end of the front surface of the rear block portion 1012c of the third mass body 1001c. Then, the second elastic body 1002b on one side is bolted to the rear surface of the former block portion 1011b of the second mass body 1001b at the upper end, and the former block portion of the third mass body 1001c at the lower end. It is bolted to the rear face of (1011c). Further, the second elastic body 1002b on the other side is bolted to the front surface of the rear block portion 1012b of the second mass body 1001b at the upper end, and the rear block of the third mass body 1001c at the lower end. It is bolted to the front face of part 1012c. In this way, the second mass body 1001b is connected to the third mass body 1001c via the pair of second elastic bodies 1002b and 1002b.

A connection aspect of the anti-vibration spring 1030 will be described in more detail. As shown in Fig. 10, upper bolt holes H1301 are provided on the front surface of the front block portion 1011c and the rear surface of the rear block portion 1012c of the third mass body 1001c. Further, lower bolt holes H1302 are provided on the front and rear end surfaces of the base 1003. Then, one anti-vibration spring 1030 is bolted to the front surface of the third mass body 1001c at the upper end and bolted to the front surface of the base 1003 at the lower end. Further, the other anti-vibration spring 1030 is bolted to the rear surface of the third mass body 1001c at the upper end and bolted to the rear surface of the base 1003 at the lower end. Thus, the third mass body 1001c is connected to the base 1003 via a pair of anti-vibration springs 1030 and 1030 .

In this way, the vibratory transport device 1100 is the second mass body 1001b elastically supported on the third mass body 1001c installed on the base 3 through the anti-vibration spring 1030 through the second elastic body 1002b. ) is disposed, and the first mass body 1001a elastically supported via the first elastic body 1002a is disposed thereon. Comparing this to a building, the second mass body 1001a constituting the first floor is disposed on the third mass body 1001c constituting the foundation, and the first mass body 1001a constituting the second floor is disposed thereon. It is a structure of a two-story building.

However, the 1st elastic body 1002a and the 2nd elastic body 1002b are mutually opposite inclined attitudes. That is, as shown in FIG. 9 , the first elastic body 1002a provided between the first mass body 1001a and the second mass body 1001b is inclined forward as it goes downward, The second elastic body 1002b provided between the second mass body 1001b and the third mass body 1001c is inclined backward as it goes downward.

In addition, the first elastic body 1002a and the second elastic body 1002b are set to have resonance frequencies different from each other. As an example, the resonance frequency of the first elastic body 1002a is set to 500 Hz, and the resonance frequency of the second elastic body 1002b is set to 200 Hz.

The first elastic body 1002a and the second elastic body 1002b serve as excitation springs for vibrating the mass bodies 1001a, 1001b, and 1001c, and each elastic body 1002a, 1002b elastically deforms and vibrates this. A piezoelectric element (piezoelectric element for excitation) 1005p for doing so is provided. Further, each of the elastic bodies 1002a and 1002b is provided with a piezoelectric element (a piezoelectric element for detection) 1005q for detecting the degree of elastic deformation thereof. The piezoelectric element 1005p for excitation is provided on both surfaces of the two first elastic bodies 1002a and 1002a and the two second elastic bodies 1002b and 1002b. That is, a total of eight piezoelectric elements 1005p for excitation are provided. Meanwhile, the piezoelectric element 1005q for detection is provided on one side of the first elastic body 1002a provided on the rear side and the second elastic body 1002b provided on the front side. That is, a total of two detecting piezoelectric elements 1005q are provided.

As shown in Fig. 17, a wiring component 1050 is attached to each of the piezoelectric elements for excitation 1005p and each of the piezoelectric elements for detection 1005q. The wiring component 1050 integrates the elastic bodies 1002a and 1002b and two pieces of piezoelectric element 1005p for excitation provided on both surfaces thereof (or one sheet of piezoelectric element 1005q for detection provided on one side thereof). It has a portion that is wound normally and a portion that is bent in a U-shape extending and protruding from this portion. Lead wires or the like extending from the piezoelectric elements 1005p and 1005q are laid on the U-shaped bent portion of the wiring component 1050, and one end of the connection wiring 1007 is connected thereto. By connecting the other end of this connection wire 1007 to the control unit 1006, it is electrically connected to the control unit 1006 of each of the piezoelectric elements 1005p and 1005q.

The excitation control unit 1006 is a functional unit that performs excitation control for vibrating the mass bodies 1001a, 1001b, and 1001c so that an object to be conveyed on the linear conveyance surface L is conveyed in a predetermined conveyance mode, and is realized by a drive circuit or the like.

<2. Operation of Vibratory Conveyor>

Next, a conveying mode realized by the vibratory conveying device 1100 will be described with reference to FIGS. 8 to 10 .

In the vibratory conveyance device 1100, it is possible to switch between a conveyance mode in which the workpiece on the linear transport surface L is forwardly conveyed (forward conveyance) and a conveyance mode in which the workpiece is conveyed backward (return conveyance).

In the case of sending and conveying, the excitation control unit 1006 applies a drive voltage to each excitation piezoelectric element 1005p provided in each first elastic body 1002a to drive each first elastic body 1002a at its resonance frequency. vibrate Then, the first mass body 1001a and the second mass body 1001b vibrate in antiphase with each other. However, since the first elastic body 1002a is inclined forward as it moves downward, the linear conveyance surface L vibrates in the forward and upward inclined direction and the reverse direction at this time. Thereby, the workpiece|work on the linear conveyance surface L is conveyed forward.

On the other hand, when returning conveyance is performed, the excitation control unit 1006 applies a driving voltage to each excitation piezoelectric element 1005p provided in each second elastic body 1002b to cause each second elastic body 1002b to resonate. vibrates at a frequency Then, the second mass body 1001b and the third mass body 1001c vibrate in antiphase with each other. However, since the second elastic body 1002b is inclined backward as it moves downward, at this time, the linear conveyance surface L vibrates in the backward and upward inclined direction and in the reverse direction. Thereby, the work on the linear conveyance surface L is conveyed backward.

In this way, in the vibratory conveyance device 1100, the excitation control unit 1006 switches the piezoelectric element 1005p for excitation that applies the drive voltage to the vibrating state of the first elastic body 1002a and the second elastic body 1002b. ) switches the vibrating state. As a result, the mode of vibration of the mass bodies 1001a, 1001b, and 1001c is switched, so that forward conveyance and return conveyance are switched.

In addition, the excitation control unit 1006 applies a drive voltage to the piezoelectric element 1005p for excitation via the connection wiring 1007, and obtains a detection voltage from the piezoelectric element 1005q for detection via the connection wiring 1007. do. That is, the piezoelectric element 1005q for detection outputs the voltage generated according to the deformation of each elastic body 1002a, 1002b as a detection voltage, and the control unit 1006 having this outputs it. Based on the acquired detection voltage, the excitation control unit 1006 corrects the driving voltage applied to the piezoelectric element 1005p for excitation or the like.

As described above, the resonance frequencies of the first elastic body 1002a and the second elastic body 1002b are set to different values. Therefore, in a state in which one of the first elastic body 1002a and the second elastic body 1002b vibrates at a resonance frequency and is transported in a predetermined direction, the other elastic body does not interfere with the transport.

That is, in a state where the first elastic body 1002a is vibrating at its resonant frequency, the second elastic body 1002b is not elastically deformed as much as the first elastic body 1002a and does not hinder the forward conveyance of the workpiece. Since the second elastic body 1002b is not greatly elastically deformed, the second mass body 1001b and the third mass body 1001c connected via the second elastic body 1002b vibrate as if they were one rigid body. At this time, the second mass body 1001b functions as a weight, and the second elastic body 1002b functions as an auxiliary anti-vibration spring.

Further, in a state where the second elastic body 1002b is vibrating at its resonance frequency, the first elastic body 1002a is not elastically deformed as much as the second elastic body 1002b and does not hinder the backward conveyance of the workpiece. . Since the first elastic body 1002a is not greatly elastically deformed, the first mass body 1001a and the second mass body 1001b connected via the first elastic body 1002a vibrate as if they were one rigid body. At this time, the third mass body 1001c functions as a weight, and the first mass body 1001a and the second mass body 1001b become integral, so to speak, and vibrate to convey the workpiece in the backward direction.

As a specific application example of the vibratory conveyance device 1100, a configuration in which a ball feeder is connected to the rear end of the linear conveyance surface L can be assumed. In this case, the workpiece supplied from the ball feeder can be conveyed forward by forward conveyance. On the other hand, for example, the lower block portion 1012a of the first mass body 1001a can function as a shot stand, and a workpiece that has fallen on the shoot stand can be returned to the ball feeder by return conveyance.

In a conventional vibratory conveying device, in order to be able to perform forward conveyance and return conveyance by switching, for example, a structure composed of a mass body provided with a linear conveyance surface, and a device unit composed of an excitation portion for exciting this, The two were juxtaposed. Then, forward conveyance was performed by exciting the linear conveyance surface on one structure side with one excitation unit, and return conveyance was performed by vibrating the linear conveyance surface on the other structure side with the other vibrating unit. In contrast to such a conventional vibratory conveyance device, the vibratory conveyance device 1100 according to this reference example has a structure X and a vibrating unit Y having only one structure, and is configured to realize both forward conveyance and return conveyance. Therefore, the size (particularly, the width size) of the apparatus can be reduced by about half compared to the conventional vibratory transport apparatus. For this reason, it can be easily introduced even to a site where there is no space. In addition, when a plurality of vibratory transport devices 1100 are arranged in multiple rows and used, twice as many vibratory transport devices 1100 can be arranged compared to conventional vibratory transport devices, so the transport efficiency can be doubled. can

<3. connection wiring>

Next, the connection wiring 1007 included in the vibratory transport device 1100 will be described with reference to FIGS. 11 and 12 . 11 is a perspective view of the vibratory transport device 1100 with the cover member 1004 removed. 12 is a side view of the vibratory transport device 1100 with the cover member 1004 removed. In the following, when the piezoelectric element 1005p for excitation and the piezoelectric element 1005q for detection are not distinguished, they are simply referred to as "piezoelectric element 1005".

The connection wiring 1007 is a wiring that connects both 1005 and 1006 by using each piezoelectric element 1005 as a connection target component and using the control unit 1006 as a connected component. As described above, in the vibratory transport device 1100, the structure X is constituted by including the mass bodies 1001a, 1001b, and 1001c, the elastic bodies 1002a and 1002b, the base 1003, the cover member 1004, and the like, The excitation control unit 1006 is provided outside the structure X. On the other hand, each piezoelectric element 1005 is attached to the elastic bodies 1002a and 1002b as described above. That is, it is provided inside the structure X. That is, the connection wiring 1007 is connected to the piezoelectric element 1005 provided inside the structure X at one end, led out to the outside of the structure X, and connected to the holding control unit 1006 at the other end.

A part of the connection wiring 1007 is constituted by using the flexible substrate F. That is, the terminal 1060 of the cable extending from the excitation control unit 1006 is pulled out to the upper surface side of the base 1003 through the insertion portion 1031 formed in the base 1003 (FIG. 10), A portion of the connection wiring 1007 connecting the terminal 1060 and each piezoelectric element 1005 is formed using the flexible substrate F.

The flexible substrate F constituting a part of the connection wiring 1007 will be described with reference to FIGS. 13 and 14 in addition to FIGS. 11 and 12 . Fig. 13 is a diagram showing the flexible substrate F before being three-dimensionally bent. Fig. 14 is a diagram showing a three-dimensionally bent flexible substrate F.

Unlike a so-called rigid substrate, the flexible substrate F is one in which a wiring pattern is formed on a thin substrate (base film) having flexibility, and is also called a flexible printed wiring board, FPC (Flexible Printed Circuits), or the like. Here, a part of the connection wiring 1007 is constituted by a flexible substrate F in which wiring patterns are formed using copper foil or the like on both sides of a base film formed of an insulating material such as polyimide. A flexible substrate forming wiring (cable) is also called a flexible cable.

The flexible substrate F has a shape that protrudes from the pair of proximal end portions F1 toward six distal end portions F2. A terminal portion 1070 is provided at each of the ends F1 and F2, and a wiring pattern is formed on the front and back surfaces of the substrate to connect the terminal portion 1070 on the base end F1 side to the terminal portion 1070 on the distal end F2 side. .

The flexible substrate F has flexibility, and is bent at a predetermined position from the planar shape shown in FIG. 13, and becomes a three-dimensional shape according to the shape of the structure X by being bent at a predetermined position (FIG. 14), It is installed on the structure X (FIG. 11, FIG. 12). At this time, the terminal portion 1070 provided at each base end F1 is connected to the terminal 1060 of the control unit 1006, and the terminal portion 1070 provided at each tip portion F2 is connected to the piezoelectric element 1005. After the flexible substrate F is installed, a cover member 1004 is arranged so as to cover the flexible substrate F (Fig. 11).

In the state attached to the structure X, portions 1711, 1712, and 1713 of the flexible substrate F are disposed along the side surfaces of the mass bodies 1001b and 1001c (these portions are hereinafter also referred to as "speaking portions"). Further, other portions 1721, 1722, and 1723 are provided across the members that move relative to each other by excitation (these portions are hereinafter also referred to as "hanging portions"). Hereinafter, the speech part and the spanning part are demonstrated.

(Speech part)

On the flexible substrate F, an extended portion (lower extended portion) 1711 provided along the side surface of the third mass body 1001c and a front block portion 1011b of the second mass body 1001b A convoluted part (front side convoluted part) 1712 disposed along the side surface of the second mass body 1001b and a convoluted part disposed along the lateral surface 1012b of the rear block part 1012b of the second mass body 1001b. ) portion (rear side speech portion) 1713 is provided.

Each of the extended portions 1711, 1712, and 1713 is shaped to fit into the surface of the side surface of the mass bodies 1001c and 1001b, is disposed along the side surface, and is fixed to the side surface using double-sided tape or the like. do.

(first straddling part)

The flexible substrate F includes two spanning parts (first spanning parts) 1721 disposed between the second mass body 1001b and the third mass body 1001c. The first spanning portion 1721 on one side is provided between the lower side extending portion 1711 and the front side extending portion 1712 in the flexible substrate F (FIGS. 13 and 14), In the state of being installed on the structure X, it is disposed between the front block portion 11b of the third mass body 1001c and the second mass body 1001b (FIG. 12). The other first straddling portion 1721 is provided between the lower extended portion 1711 and the rear extended portion 1713 in the flexible substrate F (FIG. 13, 14), it is disposed between the rear block portion 1012b of the third mass body 1001c and the second mass body 1001b in the state of being installed on the structure X (FIG. 12).

The first spanning portion 1721 will be described with reference to FIG. 15 . 15, although the 1st straddling part 1721 provided in the rear side is shown, the 1st straddling part 1721 provided in the front side also has a structure similar to this.

The first straddling portion 1721 is a belt-shaped portion that extends linearly in a state before being three-dimensionally bent (FIG. 13), and in a three-dimensional shape, it is a curved portion (1711, 1713 (1712)) The boundary 1730 between the two is bent at approximately 90°, and the approximately central portion of the first straddling portion 1721 is bent in a U shape (FIG. 14). Then, the first straddling portion 1721 bent in a U shape in this way is between the pair of opposing surfaces S1 and S2, that is, between the lower surface S1 of the second mass body 1001b and the upper surface S2 of the third mass body 1001c. In between, it is inserted (FIG. 15).

Therefore, in the first straddling portion 1721, the portion extending from one end side to the bent portion follows the lower surface S1 of the second mass body 1001b, and the portion extending from the other end side to the bent portion follows the upper surface S2 of the third mass body 1001c. It is prepared by However, both ends of the first spanning portion 1721 are interposed between the protruding piece 1041 provided on the cover member 1004 and the respective surfaces S1 and S2 so as not to rise from the respective surfaces S1 and S2. , It is not fixed with respect to each surface S1 and S2, but is provided so as to be spaced apart from each surface S1 and S2, except for these parts.

In this way, the first spanning portion 1721 is not provided linearly between the two mass bodies 1001b and 1001c, but is provided with slack (that is, margin). Therefore, when both masses 1001b and 1001c are relatively moved by excitation, the displacement of both masses 1001b and 1001c is absorbed by this slack, and relative movement of both masses 1001b and 1001c is permitted. That is, the relative movement of both masses 1001b and 1001c is not hindered by the flexible substrate F, and the flexible substrate F does not act as a damper to dampen vibrations at this spanning portion.

In particular, the direction in which both mass bodies 1001b and 1001c move relative to each other when excited is basically the same as including only components in the forward and backward directions and up and down directions, but the first straddling portion 1721 is flexible in each of these directions. It is designed to be deformable, whereby both mass bodies 1001b and 1001c can be sufficiently allowed to move relative to each other in these directions. That is, the first spanning portion 1721 is bent in a U shape, arranged so as to follow the front and back, and arranged so that both ends overlapped vertically. Therefore, the first straddling portion 1721 is deformed so as to change the position of the bent portion, so that it can widely follow the relative movement of the masses 1001b and 1001c in the front-back direction, and is deformed so that the bending angle changes. It is possible to widely follow the relative movement of the masses 1001b and 1001c in the vertical direction as well.

(Second spanning part)

The flexible board F has two straddling parts (second straddling parts) 1722 and 1722 disposed between the third mass body 1001c and the terminal 1060 of the controller 1006. Each second spanning portion 1722 is provided between each proximal end portion F1 and the lower extension portion 1711 in the flexible substrate F (FIG. 13, FIG. 14), and in a state attached to the structure X, the third It is arranged in front and behind between the mass body 1001c and the base 1003 (FIG. 12).

The second straddling portion 1722 will be described with reference to FIG. 16 . In FIG. 16, although the rear 2nd straddling part 1722 is shown, the front 2nd straddling part 1722 also has the same structure as this.

The second straddling portion 1722 is a belt-shaped portion that extends in a straight line in a state before being three-dimensionally bent (FIG. 13), and in a three-dimensional shape, a boundary with the lower continuous portion 1711 ( 1730) is bent at approximately 90°, and the substantially central portion of the second spanning portion 1722 is bent in a U shape (FIG. 14). Then, the second straddling portion 1722 bent in a U shape in this way is between the pair of opposing surfaces S1 and S2, that is, between the lower surface S1 of the third mass body 1001c and the upper surface S2 of the base 3. , is inserted (Fig. 16). Then, the terminal portion 1070 provided on the base end portion F1 is connected to the terminal 1060 of the excitation control unit 1006 drawn out on the upper surface of the base 1003.

Therefore, in the second spanning portion 1722, the portion from one end side to the bent portion follows the lower surface S1 of the third mass body 1001c, and the portion from the other end side to the bent portion follows the upper surface S2 of the base 1003, provided However, the second spanning portion 1722 is fixed to the upper surface S2 of the base 1003 at the end of the side connected to the terminal 1060, but is not fixed to the respective surfaces S1 and S2 except for this portion, It is provided to be spaced apart from each surface S1 and S2.

In this way, the second spanning portion 1722 is not provided linearly between the third mass body 1001c and the base 1003, but is provided loosely. Therefore, when the third mass body 1001c moves relative to the base 1003 due to excitation, the displacement of the third mass body 1001c relative to the base 1003 is absorbed by this looseness, and the third mass body 1001c Relative movement of is allowed. That is, the relative movement of the third mass body 1001c is not hindered by the flexible substrate F, and the flexible substrate F does not act as a damper to dampen vibrations at this crossing portion.

In particular, the direction in which the third mass body 1001c moves relative to the base 1003 when excited is basically the same as including only components in the forward and backward directions and up and down directions, and the second straddling portion 1722 is 1 Similar to the spanning portion 1721, it is bent in a U shape, arranged so as to follow the front and back, and arranged so that both ends overlap vertically, so that it can be flexibly deformed in each of these directions. Therefore, the second spanning portion 1722 can sufficiently allow the third mass body 1001c to move relative to the base 1003 in each of these directions.

(third straddling part)

The flexible substrate F includes six spanning parts (third spanning parts) 1723 disposed between the second mass body 1001b or the third mass body 1001c and each piezoelectric element 1005. Each third straddling portion 1723 is provided between each tip portion F2 and each extended portion 1711, 1712, and 1713 in the flexible substrate F (FIGS. 13 and 14), and is installed on the structure X. , it is disposed between the mass bodies 1001b and 1001c and each piezoelectric element 1005 (FIG. 12).

The third straddling portion 1723 will be described with reference to FIG. 17 . In Fig. 17, a third block portion 1011c of the third mass body 1001c and a piezoelectric element 1005 (a piezoelectric element 1005p for vibration) provided on the front second elastic body 1002b are disposed. Although the straddling portion 1723 is shown, the other third straddling portion 1723 also has an almost identical configuration.

The third straddling portion 1723 is a belt-shaped portion that extends in a straight line in the unfolded state (FIG. 13), and in a three-dimensional shape, a boundary with each continuous portion 1711, 1712, and 1713 ( 1730) is bent at approximately 90°, and the substantially central portion of the third straddling portion 1723 is bent in a U-shape (FIG. 14). Then, the third straddling portion 1723 bent in a U shape in this way is between the pair of opposing surfaces S1 and S2, that is, in the case of the third straddling portion 1723 shown in FIG. 17, the third mass body ( It is inserted between the back surface S1 of the previous block part 1011c of 1001c, and the front surface S2 of the wiring component 1050 provided in the piezoelectric element 1005 (FIG. 17). After that, the terminal portion 1070 provided at the distal end portion F2 is connected to the wiring portion 1050 (and, by extension, the piezoelectric element 1005).

Therefore, in the third spanning portion 1723, the portion from one end side to the bent portion follows the rear surface S1 of the third mass body 1001c, and the portion from the other end side to the bent portion follows the front surface S2 of the wiring component 1050. It is prepared to follow. However, the third straddling portion 1723 is fixed to the front surface S2 of the wiring component 1050 at the end of the side connected to the wiring component 1050, but is fixed to the respective surfaces S1 and S2 except for this part. It is provided so that it can be spaced apart from each surface S1 and S2.

In this way, the third spanning portion 1723 is not provided linearly between the second mass body 1001b or the third mass body 1001c and the piezoelectric element 1005, but is provided with slack. Therefore, when the elastic bodies 1002a and 1002b are deformed by excitation and the piezoelectric element 1005 moves relative to the mass bodies 1001b and 1001c, this looseness causes the piezoelectric element 1005 to move relative to the mass bodies 1001b and 1001c. The displacement of is absorbed, and the relative movement of the piezoelectric element 1005 is allowed. That is, the deformation of the elastic bodies 1002a and 1002b is not hindered by the flexible substrate F, and the flexible substrate F does not act like a damper that dampens vibrations at this spanning portion.

In particular, the direction in which the piezoelectric element 1005 moves relative to the mass bodies 1001b and 1001c when excited is basically the same as including only components in the front-back and top-down directions, and the second straddling portion 1722, It can be flexibly deformed in each of these directions, whereby the piezoelectric element 1005 can be sufficiently allowed to move relative to the mass bodies 1001b and 1001c in each of these directions. That is, the third spanning portion 1723 is bent in a U-shape, arranged substantially vertically, and arranged so that both ends substantially overlap left and right. Therefore, the third spanning portion 1723 is deformed so as to change the position of the bent portion, so that it can widely follow the relative movement of the piezoelectric element 1005 in the vertical direction, and is deformed so that the bending angle changes, so that the piezoelectric element ( 1005), it is possible to widely follow the relative movement in the left and right directions.

<4. effect>

The vibration transport device 1100 according to the above reference example includes a structure X comprising elastically supported mass bodies 1001a, 1001b, and 1001c, and a vibrating unit Y that vibrates the mass bodies 1001a, 1001b, and 1001c. , and the excitation portion Y vibrates the masses 1001a, 1001b, and 1001c so that the object to be conveyed is conveyed. Here, at least a part of the connection wiring 1007 connecting the piezoelectric element 1005, which is a component to be connected, provided inside the structure X, and the control unit 11006, which is a connected component, provided outside the structure X, , It is formed using the flexible substrate F, and at least a part (1711, 1712, 1713) of the flexible substrate F is provided along the surface of the mass bodies 1001b and 1001c. According to this configuration, it is not necessary to provide deep grooves on the surfaces of the mass bodies 1001b and 1001c so that the vibration is not weakened by the connection wiring 1007 . Therefore, the weight of the mass bodies 1001b and 1001c is not damaged. That is, a situation in which conveying performance is impaired by the connection wiring 1007 is avoided.

In particular, in this case, each portion of the connection wiring 1007 provided along the surfaces of the second mass body 1001b and the third mass body 1001c is constituted by the flexible substrate F. The second mass body 1001b functions as a weight during forwarding and conveyance, and the third mass body 1001c functions as a weight during return transport. By being able to sufficiently secure the masses of both mass bodies 1001b and 1001c, It is possible to sufficiently ensure the conveying performance for both forward conveyance and return conveyance.

Further, in the vibratory transport device 1100 according to the above reference example, the flexible substrate F is provided with straddling portions 1721, 1722, and 1723 provided across members that move relative to each other by excitation, and the straddling portion ( 1721, 1722, 1723), slack allowing relative movement between members is provided. Therefore, when relative movement between members occurs due to excitation, the flexible substrate F does not act like a damper that dampens vibration.

In addition, in the vibratory transport device 1100 according to the above reference example, the structure X is provided with a plurality of mass bodies 1001b and 1001c, and a portion (first straddling portion) between the plurality of mass bodies 1001b and 1001c is provided. (1721) is prepared. Therefore, when the plurality of mass bodies 1001b and 1001c are moved relative to each other by excitation, the flexible substrate F does not act like a damper that dampens vibration.

In the vibratory conveyance device 1100 according to the above reference example, a spanning portion (third spanning portion) 1723 is provided between the mass bodies 1001b and 1001c and the piezoelectric element 1005 as a component to be connected. Therefore, when the mass bodies 1001b and 1001c and the piezoelectric element 1005 are moved relative to each other by excitation, the flexible substrate F does not act like a damper that dampens vibration.

Further, in the vibratory conveyance device 1100 according to the above reference example, the structure X includes elastic bodies 1002a and 1002b provided on the mass bodies 1001a, 1001b and 1001c, and the vibrating unit Y includes the elastic bodies 1002a and 1002b. ), a piezoelectric element for excitation (1005p), and an excitation control unit 1006 for applying a drive voltage thereto. Then, the component to be connected in the connection wiring 1007 is the piezoelectric element for excitation 1005p, and the connected component is the control unit 1006 possessed. Therefore, it can be connected to the control unit 1006 having the piezoelectric element 1005p for excitation without impairing transport performance.

Further, in the vibratory conveyance device 1100 according to the above reference example, the structure X includes elastic bodies 1002a and 1002b provided on the mass bodies 1001a, 1001b and 1001c, and the vibrating unit Y includes the elastic bodies 1002a and 1002b. A piezoelectric element 1005q for detection provided in ), and an excitation control unit 1006 for obtaining a detection voltage therefrom. Then, the component to be connected in the connection wire 1007 is the detection piezoelectric element 1005q, and the connected component is the control unit 1006 included. Therefore, it can connect with the control part 1006 which has the piezoelectric element 1005q for detection, without impairing conveyance performance.

In addition, the laying work is completed only by bending the flexible substrate F at a predetermined position and bending it at a predetermined position to form a three-dimensional shape, and attaching it to the structure X. Therefore, compared with, for example, a circular cable laying operation, the workload related to laying is greatly reduced.

Further, in the above reference example, the portions 1711, 1712, and 1713 disposed along the surfaces of the mass bodies 1001b and 1001c in the connection wiring 1007 are made of a flexible substrate F that is significantly smaller in thickness than a circular cable or the like. Consists of. For example, if the base film is formed of polyimide having excellent voltage resistance, the thickness of the base film can be reduced to about 25 μm. Further, for example, if the wiring pattern is formed of copper foil, the film thickness can be made as thin as about 18 μm. For example, if flexible substrate F is formed with this combination, its thickness can be made into a thing of about 127 micrometers. The portions 1711, 1712, and 1713 provided along the surfaces of the mass bodies 1001b and 1001c in the connection wiring 1007 are formed using such a thin flexible substrate F, resulting in the laying of the connection wiring 1007. The increase in the width of the device can be suppressed remarkably small compared to the case of using a circular cable.

In particular, the vibratory conveyance device 1100 according to the above reference example is configured such that forward conveyance and return conveyance can be switched without increasing the size (particularly, the width size) of the device, thereby reducing the space. Introduction to a site where there is no space, realization of high conveying efficiency by multi-row arrangement, etc. are being realized. By adopting a connection wiring 1007 composed of a flexible substrate F, a thin vibratory conveying device (1100 ), it is possible to make the most of it without compromising the advantages of

In addition, in the vibratory conveyance device 1100 according to the above reference example, a comparatively large number of elastic bodies 1002a and 1002b are provided in the structure X in order to be able to switch between forward conveyance and return conveyance without increasing the size of the device. ), and furthermore, a relatively large number of piezoelectric elements 1005 are provided. That is, the number of points of the parts to be connected is large. However, if at least a part of the connection wiring 1007 is formed using the flexible substrate F, a large number of parts to be connected can be easily connected without impairing the transport performance of the vibratory transport device 1100 .

<5. Variation>

In the vibratory transport device 1100 according to the above reference example, the surfaces of the mass bodies 1001c and 1001b are provided with grooves corresponding to the shapes of the continuous portions 1711, 1712, and 1713 disposed along these places. It may be formed, and each extended portion 1711, 1712, 1713 may be disposed along each surface so as to be accommodated inside the corresponding groove. However, in this case, the depth of the groove is sufficient as long as it corresponds to the thickness of the flexible substrate F, and an extremely shallow one of several millimeters is good. By forming such a groove, the laying operation of the flexible substrate F can be further simplified.

In the above reference example, a part of the connection wiring 1007 connecting the piezoelectric element 1005 as the component to be connected and the excitation control unit 1006 as the connected component is constituted by the flexible substrate F, The entirety of the connection wiring 7 may be constituted by the flexible substrate F.

In the above reference example, the portion connecting the terminal 1060 of the cable extending from the excitation control unit 1006 and each piezoelectric element 1005 in the connection wiring 1007 is formed by one flexible substrate F. Although configured, the portion may be configured including, for example, a plurality of flexible substrates. For example, parts corresponding to each of the extended portions 1711, 1712, and 1713 are constituted by separate flexible substrates, and portions corresponding to each of the spanning portions 1721, 1722, and 1723 are loosened. It may be constituted by a circular cable provided with a box.

The connection wiring 1007 according to the above reference example can be applied to various vibratory transport devices. For example, among vibratory conveyance devices, there is one configured such that an object to be conveyed on a conveyance surface formed on an upper surface of the mass object is conveyed by vibrating a mass object elastically supported on a base or the like with an electromagnet. The connection wiring 7 according to the above reference example may be applied to such a vibrating transport device. In this case, for example, at least a part of the connection wiring connecting the electromagnet and the control unit can be made of a flexible substrate, and at least a part of the flexible substrate can be arranged along the surface of the mass body.

Further, for example, in a vibratory transport device, there are two mass bodies (movable portion and weight portion) connected via an elastic body, and a transport table connected to one mass body, and a driving voltage is applied to a piezoelectric element attached to the elastic body so that both There is a case configured so that an object to be conveyed on a conveyance surface formed on a conveyance table is conveyed by vibrating a mass body in an antiphase. The connection wiring 1007 according to the above reference example may be applied to such a vibratory transport device. In this case, for example, it is assumed that at least a part of the connection wiring connecting the piezoelectric element and the control unit is made of a flexible substrate, and at least a part of the flexible substrate is disposed along the surface of one or both masses. can

In the above reference example, the component to be connected in the connection wiring 1007 is the piezoelectric element 1005, but the component to be connected is not limited to the piezoelectric element 1005, for example, as in the above modified example. , may be an electromagnet, or may be various sensor parts or the like.

In the above reference example, the connected component in the connection wiring 1007 is the controller 1006, but the connected component is not limited to this.

In addition, the base material of the flexible substrate F and the material for forming the wiring are not limited to those exemplified in the above reference example.

In addition, the objects to be conveyed in the vibratory conveyor are not limited to works such as IC chips and minute coils.

Other configurations can also be modified in various ways without departing from the spirit of the present reference example.

The present invention can be applied to a vibratory transport device capable of transporting an object in a predetermined direction and a multi-row vibratory transport system having the same.

1: vibratory transport device
2: Expect
2c: support surface
5: movable part (first mass body)
6: fixed part (second mass body)
8: trough (first mass body)
8t: linear transfer surface
10: drive spring (drive elastic body)
12: trough support (first mass body)
50: anti-vibration spring (anti-vibration elastic body)
51: first dark part
52: second dark part
201: vibration transport device
210: drive spring
212a: main block (second mass body)
212b: sub block (second mass body)
213a: main block
213b: sub block
350: anti-vibration spring (anti-vibration elastic body)
351: first dark part
352: second dark part
353: bend
A1: first fixing part
A2: second fixing part
T: vibrating body
X: struct
1001a: first mass body
1001b: second mass body
1001c: third mass body
1002a: first elastic body
1002b: second elastic body
1003: Expectation
1004: cover member
Y: excitation part
1005: piezoelectric element (part to be connected)
1005p: piezoelectric element for excitation
1005q: piezoelectric element for detection
1006 Excitation control unit (connected parts)
1007: connection wiring
F: flexible substrate
1711: lower speech part
1712: anterior speech part
1713: posterior speech part
1721: first straddling part
1722: second straddling part
1723: third straddling part
1100: vibratory transport device

Claims (5)

A vibration conveying device that conveys an object to be conveyed on a linear conveying surface by vibration,
a first mass body having the linear conveyance surface;
a second mass vibrating in antiphase with the first mass;
a driving elastic body connecting the first mass body and the second mass body;
With respect to the vibrating body including the first mass body, the second mass body, and the driving elastic body, on the upstream side in the conveying direction and the downstream side in the conveying direction, above the central part in the height direction of the vibrating body or the position of the center of gravity of the vibrating body. a base having a supporting surface disposed thereon;
A vibration conveying device comprising a vibration-isolating elastic body connecting the vibrating body to the supporting surface. According to claim 1,
The anti-vibration elastic body,
A first arm portion installed on the support surface to damp vibration of a vertical component;
A vibratory transport device characterized by having a second arm portion disposed perpendicular to the first arm portion and attached to the vibrating body. According to claim 1,
The anti-vibration elastic body,
A first arm portion installed on the support surface to damp vibration of a vertical component;
A second arm portion disposed perpendicular to the first arm portion and installed on the vibrating body;
The vibrating transport device characterized by connecting the first arm portion and the second arm portion and having a curved portion curved in a convex shape. According to any one of claims 1 to 3,
The vibration conveyance device according to claim 1, wherein the first fixing part of the vibrating body and the anti-vibration elastic body is disposed below the second fixing part of the support surface and the anti-vibration elastic body. A plurality of vibratory transport devices according to any one of claims 1 to 4 are provided,
The multi-row vibration conveying system, characterized in that the plurality of linear conveying surfaces are arranged substantially in parallel.

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