KR20220153840A - Inline type diffusion bonding apparatus and Its Operating Method - Google Patents

Abstract

The present invention relates to an inline diffusion bonding device comprising: a preheating chamber for preheating a workpiece brought in from the outside; a heating and pressurizing chamber for receiving the preheated workpiece, and heating and pressurizing the same for diffusion bonding; a cooling chamber for cooling the workpiece after diffusion bonding is completed, and carrying out the same; a transport part for transporting the workpiece between chambers, a first gate room located between the preheating chamber and the heating and pressurizing chamber; and a second gate room located between the heating and pressurizing chamber and the cooling chamber. The operation of a gate is facilitated, an exhaust facility for adjusting the pressure does not need to be installed separately on the gate rooms, and the operation reliability and ease of design of the device are secured.

Description

Inline type diffusion bonding apparatus and its operating method {Inline type diffusion bonding apparatus and Its Operating Method}

The present invention relates to an in-line diffusion bonding device and an operating method thereof, and more particularly, in a diffusion bonding device for diffusion bonding a workpiece, a preheating-heating pressure-cooling chamber is separately configured and inlined to form a plurality of workpieces. It relates to an inline diffusion bonding device capable of continuously processing and a method of operating the same.

Unlike fusion welding, which melts and joins the base material, solid state joining is a method of joining while maintaining the workpiece in a solid state. Solid state bonding has the advantage of preserving original properties and minimizing defects in the joint because the base material does not melt.

With the development of new materials such as composite materials and the development of high-tech industries, solid-state bonding technology is widely adopted for bonding materials that cannot be joined with conventional fusion welding technology, materials with complex shapes, and materials that require high quality and precision. .

Types of solid-state bonding include friction bonding using frictional heat, brazing using intercalated metal, and diffusion bonding using atomic diffusion. Among them, diffusion bonding is a method of bonding by applying a pressure that does not cause plastic deformation under a high temperature atmosphere that does not melt the base material.

1 is a diagram showing the structure of a conventional device used for diffusion bonding.

A conventional diffusion bonding device 100 includes a main chamber 110 capable of maintaining a vacuum inside the main chamber 110, an adiabatic chamber 120 within the main chamber 110, and a workpiece 10 located in the adiabatic chamber 120. ), a heating element 130 for heating, a support part 140 for holding the workpiece 10 in the heat insulation chamber 120, and a pressing part for pressurizing the workpiece 10 on the support part 140 ( 150).

In the conventional diffusion bonding device 100, a gate (not shown) on the front side capable of insulation and sealing is opened, the workpiece 10 is placed on the support 140 in the heat insulation chamber 120, and then the gate is closed. After exhausting the gas in the main chamber 110 to create a vacuum state or injecting an inert gas (in FIG. 1, piping for discharging gas or injecting an inert gas is not shown), to the heating element 130 Electricity is supplied and the pressing member 150 is lowered to heat and press the workpiece 10 so that the workpiece is diffusion-bonded. The workpiece 10 is also placed in a separate mold and heated and pressed.

When the diffusion bonding is completed, an inert gas is supplied or the workpiece is cooled in a vacuum atmosphere, and then the front gate is opened to take the workpiece out of the diffusion bonding device.

The process as described above has a problem in that the process time is long because the process of heating, pressurization, and cooling is performed in a single chamber, and energy consumption increases as heating and cooling are repeated.

As a reference technique to solve this problem, there is Korean Patent Registration No. 10-2193022. The registered patent, which is an in-line pressure sintering device, continuously arranges a vacuum chamber (I) - a preheating chamber (II) - a pressure sintering chamber (III) - a slow cooling chamber (IV) - a quenching chamber (V), and in each chamber Each of the heat insulation chambers 120 is provided, and a transport unit (not shown) for transporting the workpiece 10 is provided between the chambers.

In addition, gate chambers i to iv are disposed between the chambers I to V, and a front gate 210 and a rear gate 220 are installed in the gate chamber to open or close the chambers on both sides. .

When closed, the front gate 210 and the rear gate 220 are simultaneously pressed toward each chamber by the first cylinder 230, and when opened, the first cylinder 230 is contracted and the second cylinder 240 rises upwards by

In this case, the pressure difference with the adjacent chamber. That is, leakage may occur due to the force acting on the gates on both sides of the gate chamber depending on the difference between vacuum pressure and atmospheric pressure, and in order to recover to a vacuum state when leakage occurs, a pipe for vacuum exhaust must be installed in the gate chamber. Also, since the front gate and the rear gate are physically connected by the first cylinder, the insulation performance is hindered.

In the case of the in-line pressure sintering device in which the workpiece is relatively small in size, the device is also manufactured in a small size, but the diffusion bonding device that is the object of the present invention is generally thick and large in size, so that it has two gates like the pressure sintering device. It is difficult to simultaneously press (210, 220) into the cylinder (230) or raise it.

In addition, due to these problems, it is unreasonable to apply the above in-line pressure sintering device to a diffusion bonding device, and problems of design considering heat transfer and strength and pressure control between the gate chamber and the chamber must be solved.

KR 10-1167626 B1, 2012.07.20., Figure 2 KR 10-2193022 B1, 2020.12.18., Fig. 5 KR 10-1627503 B1, 2016.06.07., Figure 8

In the present invention, in manufacturing and operating the diffusion bonding device as an in-line device capable of continuous processing of preheating-heating-cooling, the operation of the gate is smooth, and there is no need to install an exhaust system for separate pressure control in the gate room. Its purpose is to secure the operation reliability and ease of design of the device.

A preheating chamber for preheating a workpiece brought in from the outside, a heating and press chamber for diffusion bonding by receiving the preheated workpiece and heating/pressing it, a cooling chamber for cooling the workpiece after diffusion bonding and carrying it out, An in-line diffusion bonding device comprising a transport unit for transporting a workpiece between chambers, a first gate chamber located between the preheating chamber and the heating and press chamber, and a second gate chamber located between the heating and press chamber and the cooling chamber. ,

The preheating chamber includes a first chamber body, a first heat insulating chamber in the first chamber body, a first gate for opening and closing an inlet of the first chamber body and the first heat insulating chamber to accommodate a workpiece, and the first heat insulating chamber. 1-2 doors opening and closing the outlet of the first insulation chamber at a position opposite to the gate, 1-2 door operation units operating the 1-2 doors, and a first heater in the first insulation chamber contains;

The first gate chamber includes a second chamber body, a second gate that opens and closes the outlet of the preheating chamber and is installed at a position spaced apart from the first and second doors, and a third gate that opens and closes the inlet of the heating and pressing chamber. and second and third gate operation units operating the second and third gates, respectively;

The heating and pressing chamber includes a third chamber body, a second insulating chamber in the third chamber body, a 2-1 door installed spaced apart from the third gate and opening and closing the entrance of the second insulating chamber; 2-2 door for opening and closing the outlet of the heat insulation chamber, a pressing part for pressurizing the workpiece in the second heat insulation chamber through the third chamber body and the second heat insulation chamber from the outside of the third chamber body, a support part for supporting the second heater in the second heat insulation chamber, and 2-1 and 2-2 door operating parts for operating the 2-1 door and the 2-2 door, respectively;

The second gate chamber includes a fourth chamber body, a fourth gate that opens and closes the outlet of the heating and pressing chamber and is installed at a position spaced apart from the 2-2 door, and a fifth gate that opens and closes the inlet of the cooling chamber. and fourth and fifth gate operation units operating the fourth and fifth gates, respectively;

The cooling chamber is characterized in that it includes a fifth chamber body and a sixth gate for opening and closing an outlet of the fifth chamber to discharge the workpiece.

Preferably, the transport unit operates in a rack and pinion combination.

The 1-2, 2-1, 2-2 door operating units, the 2nd, 3rd, 4th, and 5th gate operating units operate guide units for guiding the position of each door and gate, and each door and gate. It is preferable to be made by each lift part which raises and lowers.

The operation method of the inline diffusion bonding device of the present invention

The preheating chamber, the heating/pressing chamber, the cooling chamber, the first gate chamber located between the preheating chamber and the heating/pressing chamber, the second gate chamber located between the heating/pressing chamber and the cooling chamber, and transporting the workpiece between the respective chambers. As an in-line diffusion bonding device comprising a transport unit to do,

The preheating chamber includes a first chamber body, a first heat insulating chamber in the first chamber body, a first gate for opening and closing an inlet of the first chamber body and the first heat insulating chamber to accommodate a workpiece, and the first heat insulating chamber. 1-2 doors opening and closing the outlet of the first insulation chamber at a position opposite to the gate, 1-2 door operation units operating the 1-2 doors, and a first heater in the first insulation chamber contains;

The first gate chamber includes a second chamber body, a second gate that opens and closes the outlet of the preheating chamber and is installed at a position spaced apart from the first and second doors, and a third gate that opens and closes the inlet of the heating and pressing chamber. and second and third gate operation units operating the second and third gates, respectively;

The heating and pressing chamber includes a third chamber body, a second insulating chamber in the third chamber body, a 2-1 door installed spaced apart from the third gate and opening and closing the entrance of the second insulating chamber; 2-2 door for opening and closing the outlet of the heat insulation chamber, a pressing part for pressurizing the workpiece in the second heat insulation chamber through the third chamber body and the second heat insulation chamber from the outside of the third chamber body, a support part for supporting the second heater in the second heat insulation chamber, and 2-1 and 2-2 door operating parts for operating the 2-1 door and the 2-2 door, respectively;

The second gate chamber includes a fourth chamber body, a fourth gate that opens and closes the outlet of the heating and pressing chamber and is installed at a position spaced apart from the 2-2 door, and a fifth gate that opens and closes the inlet of the cooling chamber. and fourth and fifth gate operation units operating the fourth and fifth gates, respectively;

providing an in-line diffusion bonding device in which the cooling chamber includes a fifth chamber body and a sixth gate that opens and closes an outlet of the fifth chamber to discharge the workpiece;

an initial step in which the first and second gate chambers, the heating/pressing chamber, and the cooling chamber are in a vacuum state or an inert gas atmosphere, and the preheating chamber is in an inert gas atmosphere, and the preheating chamber and the heating/pressing chamber are respectively heated to designated initial temperatures;

opening the first and second gates to convey the workpiece into the preheating chamber through the first gate;

closing the first gate and evacuating the preheating chamber and the first gate chamber to a vacuum state or forming an inert gas atmosphere;

closing the second gate and operating the first heater to preheat the workpiece in the preheating chamber;

The 1-2nd door, the 2nd gate, the 3rd gate, and the 2-1st door are opened, the workpiece is moved to the heating and pressing chamber using the transport unit and placed in the support unit, the 1-2nd door, the 2nd gate, closing the third gate and the second-first door;

adjusting the temperature in the heating and pressing chamber and the pressure by the pressing unit so that diffusion bonding of the workpiece occurs;

turning off the first heater of the preheating chamber, purging the inside of the preheating chamber with nitrogen gas, opening the first and second gates of the preheating chamber, and then transferring a new workpiece into the preheating chamber;

After opening the 2-2nd door, the 4th gate, and the 5th gate, the diffusion-bonded workpiece is moved from the heating/pressing chamber to the cooling chamber by the transfer unit, and the 2-2nd door, the 4th gate, closing the fifth gate;

cooling the work piece in the cooling chamber;

opening the fifth and sixth gates and carrying the cooled workpiece to the outside through the sixth gate;

closing the sixth gate, evacuating the cooling chamber and the second gate chamber or forming an inert gas atmosphere, and then closing the fifth gate.

It is preferable to cool the workpiece in the heating/pressing chamber before moving the diffusion-bonded workpiece from the heating/pressing chamber to the cooling chamber.

According to the present invention, in operating the diffusion bonding device as an in-line device capable of continuous processing of preheating-heating-cooling, the operation of the gate is smooth, there is no need for pressure control in the gate chamber, and the operation reliability and This has the effect of ensuring ease of design.

1 is a view showing the structure of a conventional diffusion bonding device;
Figure 2 is a view showing the structure of a conventional in-line sintering device.
3 is a diagram showing the structure of a diffusion bonding device according to an embodiment of the present invention;
4 to 7 are diagrams for explaining the operation of the diffusion bonding device according to one embodiment of the present invention.

Hereinafter, the present invention will be described in more detail according to its embodiments with reference to the drawings.

3 is a diagram showing the structure of a diffusion bonding device according to an embodiment of the present invention.

The diffusion bonding apparatus 100 of this embodiment includes a preheating chamber 300 for preheating a workpiece 10 by bringing in a workpiece 10 from the outside, and a heating and press chamber for diffusion bonding by receiving the preheated workpiece 10 and heating/pressurizing the workpiece 10 ( 500), a cooling chamber 700 that cools and transports the workpiece 10 on which diffusion bonding is completed, a transport unit 800 capable of transporting the workpiece between each chamber, a preheating chamber 400, It is divided into a first gate chamber 400 positioned between the heating and pressing chambers 500 and a second gate chamber 600 located between the heating and pressing chamber 500 and the cooling chamber 700 .

The preheating chamber 300 includes a first chamber body 310, a first heat insulating chamber 320 within the first chamber body, and a first chamber body 310 and a first heat insulating chamber 320 for accommodating a workpiece. A first gate 330 for opening and closing the inlet of the first and second doors 340 for opening and closing the outlet of the first heat insulation chamber 320 at a position opposite to the first gate 330; It includes a 1-2 door operation unit 350 that operates the 1-2 door 340 and a first heater (not shown) in the first heat insulation chamber.

The first chamber body 310 has a metal tubular shape, has an inlet formed on the left side of the drawing, and opens and closes the inlet by the first gate 330 . A first insulation chamber 320 is disposed inside the first chamber body 310, and an entrance of the first insulation chamber 320 is also opened and closed by the first gate 330. That is, as the first gate 330 is opened and closed, the first chamber body 310 and the inlet of the first heat insulation chamber 320 are opened and closed. The outlet of the first heat insulation chamber 320 is opened and closed by the 1-2 doors 340 .

In this description, 'gate' refers to a door that opens and closes the entrance and exit of each chamber body, and 'door' refers to a door that opens and closes the entrance and exit of each insulation chamber body. Both the chamber body and the insulation chamber are formed in a tubular shape with inlets and outlets formed on the left and right sides. Each chamber body is divided into a body between each gate.

The first gate 330 exceptionally simultaneously opens and closes the chamber body and the inlet of the adiabatic chamber. The first gate 330 is hingedly connected to the first chamber body 310 and is installed in an opening/closing form.

In the preheating chamber 300, the transport unit 800 is installed inside and outside the first heat insulation chamber 320. The transport unit 800 is made in the form of a rack and pinion and transports a workpiece between each chamber, and the transport unit has a shape similar to that disclosed in Korean Patent Registration No. 10-2193022 or Korean Patent Registration No. 10-1627503 or similar thereto. Since it is possible, a detailed description is omitted.

The first heat insulating chamber 320 has a first heater (not shown) therein to preheat the workpiece 10 . The exit side of the first heat insulation chamber 320 is opened and closed by the 1-2 doors 340 . It is natural that the 1-2 doors 340 include a heat insulating material so that heat does not escape through the outlet of the first heat insulating chamber 320 .

The 1-2nd door 340 is opened and closed by the 1-2nd door operating unit 350 . The 1-2 door operating unit is combined with the 1-2 door 340 to guide its operation, and the 1-2 door guide unit 351 moves the 1-2 door 340 up and down. It consists of -2 door lift part 352.

The 1-2nd door lift unit 352 moves the 1-2nd door 340 connected by a chain (not shown) up and down, and the 1-2nd door guide unit 351 moves the 1-2nd door 340 up and down. 340 is spaced apart from or brought into close contact with the outlet of the first heat insulation chamber 320.

In this embodiment, other door lift parts and gate lift parts to be described later, including the 1-2 door lift parts 352, are described as raising and lowering a door or gate by a cylinder, but the door lift part and the gate lift part It can be made in the form of winding a chain or the like by a rotating drum, and it can be made by various other well-known means, of course.

The exit of the preheating chamber 300 is also the entrance of the first gate chamber 400 .

The first gate chamber 400 includes a second chamber body 410 and a second gate 420 that opens and closes the outlet of the preheating chamber 300 and is spaced apart from the first and second doors 340, It includes a third gate 430 that opens and closes the inlet of the heating and pressing chamber, and second and third gate operation units 440 and 450 that operate the second and third gates 420 and 430 .

The second gate 420 is opened and closed by the second gate operator 440 . The second gate operating unit 440 includes a second gate guide unit 441 that is coupled to the second gate 420 and guides its operation, and a second gate lift unit that vertically operates the second gate 420 ( 442).

The operational relationship between the second gate 420 and the second gate operating unit 440, as well as the operational relationship between the remaining gates/doors and the gate/door operating unit, is similar to that of the 1-2 door 340 described above. Since it is similar to the operating relationship of the operating unit 350, the description of the operating relationship between the gate (door) and the gate (door) operating unit will be omitted.

Each gate and door may further include a separate cylinder or link capable of pressing the gate and the door to a corresponding entrance and exit side.

The outlet of the first gate chamber 400 is the inlet of the heating/pressing chamber 500, and is opened and closed by the third gate 430 of the first gate chamber 400.

The heating and pressurizing chamber 500 is installed to be spaced apart from the third chamber body 510, the second thermal insulation chamber 520 within the third chamber body 510, and the third gate 430, and the second thermal insulation chamber ( 520), the 2-1 door 530 that opens and closes the inlet, the 2-2 door 540 that opens and closes the outlet of the second insulation chamber 520, and the third chamber body 510 from the outside. A pressurizing part passing through the third chamber body 510 and the second insulating chamber 520 to pressurize the workpiece 100 in the second insulating chamber 520, and a support part 560 supporting the workpiece 10 , 2-1 and 2-2 operating the second heater (not shown) in the second heat insulation chamber 520, the 2-1 door 530 and the 2-2 door 540, respectively. It includes door operation parts 570 and 580.

The support part 560 separates the workpiece 10 from the transport part 800 and supports the lower side of the workpiece 10 when the pressurizing part 550 presses the workpiece 10, and mainly rollers or bearings. It serves to prevent the pressing force from acting on the transport unit 800 made of the back.

In order to separate the workpiece 10 from the transport unit 800 and support it with the support unit 560, the transport unit 800 in the heating and pressing chamber 500 moves up and down by the transport unit lift 810, or the support unit It is possible if the support part 560 moves up and down by the lift 562 .

The second gate chamber 600 includes a fourth gate 620 that opens and closes the fourth chamber body 610 and the outlet of the heating/pressing chamber 500 and is installed spaced apart from the 2-2 door 540. , the fifth gate 630 for opening and closing the inlet of the cooling chamber 700, and the fourth and fifth gate operation units 640 and 650 for operating the fourth and fifth gates 620 and 630. .

The cooling chamber 700 includes a fifth chamber body 710 and a sixth gate 720 that opens and closes an outlet of the fifth chamber to discharge the workpiece.

The sixth gate 720 is composed of a casement type gate connected to the fifth chamber body 710 by a hinge.

The preheating chamber 300, the heating and pressurizing chamber 500, and the cooling chamber 700 are provided with pipes (not shown) for discharging gas in each chamber, forming a vacuum state, or injecting inert gas. have.

The transport unit 800 installed in the first and second gate chambers 400 and 600 is moved up and down by the transport unit lift 810 connected thereto, so as to avoid interference with the second, third, fourth and fifth gates 420, 430, 620 and 630. It can be.

Hereinafter, the operation relationship of the inline diffusion bonding device according to this embodiment will be described.

First, the in-line diffusion bonding device,

The preheating chamber 300 is heated to a temperature of about 200° C. under an inert gas (nitrogen) atmosphere,

The first and second gate chambers 400 and 600, the heating/pressing chamber 500, and the cooling chamber 700 are in a vacuum state or an inert gas atmosphere, and the heating/pressing chamber 500 has an initial state of heating to a temperature of about 600°C. to achieve

Although preheating in the preheating chamber 300 is about 500°C and diffusion bonding in the heating and press chamber 500 is about 1100°C and 300 ton pressurization, the workpiece 10 enters the preheating chamber 300 from the outside. It is preferable to create an atmosphere in the initial state as described above in consideration of heat loss and reheating efficiency when moving the workpiece 10 from the heating/pressing chamber 500 to the cooling chamber 700.

In the initial state as described above, the first gate 330 is opened, and the workpiece 10 is introduced into the preheating chamber 300 .

At this time, the second gate 420 is preferably open. This is because, when the first gate is opened, atmospheric pressure acts on the preheating chamber 300, and if the second gate 420 of the first gate chamber 400 is closed, the second gate 420 moves in the open direction. Air in the preheating chamber 300 may leak into the first gate chamber 400 due to pressure.

When the second gate 420 is opened, the first gate chamber 400 is also placed in an atmospheric pressure state. At this time, when the heating and pressing chamber 500 is in a vacuum state, the third gate 430 is in the heating and press chamber 500 Since it is pressurized toward the sealing side, atmospheric air does not leak into the heating and pressing chamber 500.

The second gate 420 may be partially opened or fully opened as needed.

Then, the first gate 330 is closed, and the inside of the preheating chamber 300 is evacuated to a vacuum state or an inert gas atmosphere is set.

Since the second gate 420 is (partially) open, the first gate chamber 400 is also in a vacuum state or in an inert gas atmosphere by an exhaust system that exhausts the preheating chamber 300 .

Thereafter, the second gate 420 is closed, and the workpiece 10 is preheated to 500° C. through the first heater in the first heat insulation chamber 320 . At this time, all gates and doors of the inline diffusion bonding device are closed. (See Fig. 4)

When the preheating is completed, the 1-2 door 340, the 2nd gate 420, the 3rd gate 430, and the 2-1 door 530 are opened, and the workpiece ( 10) is moved to the heating and pressing chamber 500. (See Fig. 5)

In the heating and pressing chamber 500 , the workpiece 10 is placed on the support 560 by raising the support 560 or lowering the transporter 800 .

After the workpiece 10 is placed on the support part 560 of the heating and pressing chamber 500, the 1-2nd door 340, the 2nd gate 420, the 3rd gate 430, the 2-1st The door 530 is closed, the temperature in the heating and pressing chamber 500 is raised to about 1100° C., and the workpiece 10 is pressed with 300 tons by the pressing unit 550 . In this embodiment, the conditions for diffusion bonding of **** and **** are described, and the temperature of the preheating chamber 300 and the temperature and pressure in the heating and pressing chamber 500 may vary depending on the type of workpiece. There is.

After the workpiece 10 is transferred from the preheating chamber 300 to the heating and pressing chamber 500, the first heater of the preheating chamber 300 is turned off and the inside of the preheating chamber 300 is purged with nitrogen gas.

After the first gate 330 of the preheating chamber 300 is opened again and the second gate 420 is (partially) opened, a new workpiece 10 is introduced into the preheating chamber 300 .

Thereafter, the first gate 330 is closed, and the preheating chamber 300 and the first gate chamber 400 are evacuated or set to an inert gas atmosphere, and then the second gate 420 is closed. The preheating chamber 300 preheats the newly introduced workpiece 10 by the first heater. (See Fig. 6)

In the drawing, the workpiece loaded first is indicated by 10(1), and the next loaded workpiece is sequentially indicated by 10(2) and 10(3).

On the other hand, the workpiece after the diffusion bonding of the workpiece in the heating and pressing chamber 500 may move directly to the cooling chamber 700, or after turning off the second heater of the heating and pressing chamber 500 and then cooling naturally for about 1 hour. You can also move. This is to sequentially and continuously process the workpieces by adjusting the staying time in each chamber in consideration of the processing time of the workpiece between each chamber.

The workpiece that has been diffusion bonded in the heating and pressing chamber 500 is moved from the support 560 to the transport 800 by moving the support 560 or the transport 800 up and down.

Thereafter, after opening the 2-2nd door 540, the fourth gate 620, and the fifth gate 630, the transfer unit 800 is used to transfer the heat-pressing chamber 500 to the cooling chamber 700. The work piece 10 is moved. (See FIG. 7 ) When the movement is completed, the 2-2 door 540, the fourth gate 620, and the fifth gate 630 are closed. (See Fig. 8)

After the workpiece 10 in the cooling chamber 700 is forcibly cooled by nitrogen gas or the like circulating in the chamber, the sixth gate 720 is opened to be carried out. At this time, since atmospheric pressure acts on the cooling chamber 700 , force is applied in the direction in which the fifth gate 630 is opened, and air in the cooling chamber 700 may leak into the second gate chamber 600 . To prevent this, the fifth gate 630 is (partially) opened so that atmospheric pressure also acts on the second gate chamber 600 . Atmospheric pressure applied to the second gate chamber 600 applies a force to the fourth gate 620 towards the heating/pressing chamber 500, and accordingly, atmospheric air does not leak into the heating/pressing chamber 500.

After transporting the workpiece to the outside, the sixth gate 720 is closed, the cooling chamber 700 and the second gate chamber 600 are evacuated or set to an inert gas atmosphere, and then the fifth gate 630 close the

It will be appreciated that, according to the steps described above, preheating of the workpiece in the preheating chamber 300, diffusion bonding in the heating and pressing chamber 500, and cooling in the cooling chamber 700 can be sequentially performed. The steps of preheating, diffusion bonding, and cooling take almost the same amount of time, and even in this case, the processing time can be significantly reduced compared to the steps of preheating, diffusion bonding, and cooling in one chamber.

Reference Numerals 10: workpiece 100: diffusion bonding device 110: main member 120: insulation chamber
130: heating element 140: support member 150: pressing member 210: front gate
220: rear gate 230: first cylinder 240: second cylinder 300: preheating chamber
310: first chamber body 320: first insulation chamber 330: first gate
340: 1-2 door 350: 1-2 door operation unit 351: 1-2 door guide unit
352: 1-2 door lift part 400: first gate chamber 410: second chamber body
420: second gate 430: third gate 440: second gate operation unit
441: second gate guide part 442: second gate lift part
450: third gate operating unit 500: high-temperature pressure chamber 510: third chamber body
520: second insulation chamber 530: 2-1 door 540: 2-2 door 550: pressurization part
560: support part 562: support part lift 570: 2-1 door operating part
580: 2-2 door operating part 600: second gate chamber 610: fourth chamber body
620: 4th gate 630: 5th gate 640: 4th gate operating unit
650: 5th gate operating unit 700: cooling chamber 710: 5th chamber body
720: 6th gate 800: transport unit 810: transport unit lift

Claims (5)

A preheating chamber for preheating a workpiece brought in from the outside, a heating and press chamber for diffusion bonding by receiving the preheated workpiece and heating/pressing it, a cooling chamber for cooling the workpiece after diffusion bonding and carrying it out, An in-line diffusion bonding device comprising a transport unit for transporting a workpiece between chambers, a first gate chamber located between the preheating chamber and the heating and press chamber, and a second gate chamber located between the heating and press chamber and the cooling chamber. ,

The preheating chamber includes a first chamber body, a first heat insulating chamber in the first chamber body, a first gate for opening and closing an inlet of the first chamber body and the first heat insulating chamber to accommodate a workpiece, and the first heat insulating chamber. 1-2 doors opening and closing the outlet of the first insulation chamber at a position opposite to the gate, 1-2 door operation units operating the 1-2 doors, and a first heater in the first insulation chamber contains;

The first gate chamber includes a second chamber body, a second gate that opens and closes the outlet of the preheating chamber and is installed at a position spaced apart from the first and second doors, and a third gate that opens and closes the inlet of the heating and pressing chamber. and second and third gate operation units operating the second and third gates, respectively;

The heating and pressing chamber includes a third chamber body, a second insulating chamber in the third chamber body, a 2-1 door installed spaced apart from the third gate and opening and closing the entrance of the second insulating chamber; 2-2 door for opening and closing the outlet of the heat insulation chamber, a pressing part for pressurizing the workpiece in the second heat insulation chamber through the third chamber body and the second heat insulation chamber from the outside of the third chamber body, a support part for supporting the second heater in the second heat insulation chamber, and 2-1 and 2-2 door operating parts for operating the 2-1 door and the 2-2 door, respectively;

The second gate chamber includes a fourth chamber body, a fourth gate that opens and closes the outlet of the heating and pressing chamber and is installed at a position spaced apart from the 2-2 door, and a fifth gate that opens and closes the inlet of the cooling chamber. and fourth and fifth gate operation units operating the fourth and fifth gates, respectively;

The cooling chamber includes a fifth chamber body and a sixth gate that opens and closes an outlet of the fifth chamber to discharge the workpiece.
According to claim 1,
Inline diffusion bonding device, characterized in that the transport unit operates in a rack and pinion coupling method.
According to claim 1,
The 1-2, 2-1, 2-2 door operating units, the 2nd, 3rd, 4th, and 5th gate operating units operate guide units for guiding the position of each door and gate, and each door and gate. In-line diffusion bonding device, characterized in that made by each lift unit for lifting and lowering.
The preheating chamber, the heating/pressing chamber, the cooling chamber, the first gate chamber located between the preheating chamber and the heating/pressing chamber, the second gate chamber located between the heating/pressing chamber and the cooling chamber, and transporting the workpiece between the respective chambers. As an in-line diffusion bonding device comprising a transport unit to do,

The preheating chamber includes a first chamber body, a first heat insulating chamber in the first chamber body, a first gate for opening and closing an inlet of the first chamber body and the first heat insulating chamber to accommodate a workpiece, and the first heat insulating chamber. 1-2 doors opening and closing the outlet of the first insulation chamber at a position opposite to the gate, 1-2 door operation units operating the 1-2 doors, and a first heater in the first insulation chamber contains;

The first gate chamber includes a second chamber body, a second gate that opens and closes the outlet of the preheating chamber and is installed at a position spaced apart from the first and second doors, and a third gate that opens and closes the inlet of the heating and pressing chamber. and second and third gate operation units operating the second and third gates, respectively;

The heating and pressing chamber includes a third chamber body, a second insulating chamber in the third chamber body, a 2-1 door installed spaced apart from the third gate and opening and closing the entrance of the second insulating chamber; 2-2 door for opening and closing the outlet of the heat insulation chamber, a pressing part for pressurizing the workpiece in the second heat insulation chamber through the third chamber body and the second heat insulation chamber from the outside of the third chamber body, a support part for supporting the second heater in the second heat insulation chamber, and 2-1 and 2-2 door operating parts for operating the 2-1 door and the 2-2 door, respectively;

The second gate chamber includes a fourth chamber body, a fourth gate that opens and closes the outlet of the heating and pressing chamber and is installed at a position spaced apart from the 2-2 door, and a fifth gate that opens and closes the inlet of the cooling chamber. and fourth and fifth gate operation units operating the fourth and fifth gates, respectively;

providing an in-line diffusion bonding device in which the cooling chamber includes a fifth chamber body and a sixth gate that opens and closes an outlet of the fifth chamber to discharge the workpiece;

an initial step in which the first and second gate chambers, the heating/pressing chamber, and the cooling chamber are in a vacuum state or an inert gas atmosphere, and the preheating chamber is in an inert gas atmosphere, and the preheating chamber and the heating/pressing chamber are respectively heated to designated initial temperatures;

opening the first and second gates to convey the workpiece into the preheating chamber through the first gate;

closing the first gate and evacuating the preheating chamber and the first gate chamber to a vacuum state or forming an inert gas atmosphere;

closing the second gate and operating the first heater to preheat the workpiece in the preheating chamber;

The 1-2nd door, the 2nd gate, the 3rd gate, and the 2-1st door are opened, the workpiece is moved to the heating and pressing chamber using the transport unit and placed in the support unit, the 1-2nd door, the 2nd gate, closing the third gate and the second-first door;

adjusting the temperature in the heating and pressing chamber and the pressure by the pressing unit so that diffusion bonding of the workpiece occurs;

turning off the first heater of the preheating chamber, purging the inside of the preheating chamber with nitrogen gas, opening the first and second gates of the preheating chamber, and then transferring a new workpiece into the preheating chamber;

After opening the 2-2nd door, the 4th gate, and the 5th gate, the diffusion-bonded workpiece is moved from the heating/pressing chamber to the cooling chamber by the transfer unit, and the 2-2nd door, the 4th gate, closing the fifth gate;

cooling the work piece in the cooling chamber;

opening the fifth and sixth gates and carrying the cooled workpiece to the outside through the sixth gate;

An operation method of an inline diffusion bonding device comprising the steps of closing the sixth gate, evacuating the cooling chamber and the second gate chamber or forming an inert gas atmosphere, and then closing the fifth gate.
According to claim 4,
A method of operating an inline diffusion bonding apparatus characterized by cooling a workpiece in the heating and pressing chamber before moving the workpiece after diffusion bonding from the heating and pressing chamber to the cooling chamber.

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