KR20220147395A - Terminal, heater block and manufacturing method for heater block - Google Patents

Abstract

The present invention relates to a terminal and a heater block including the same. The terminal includes: a guide part in which a through hole is extended; a connection part inserted into the through hole to pass through an opening at one side of the through hole; and a buffer part inserted into the through hole to pass through an opening at the other side opposite to the opening at one side of the through hole. A part of the buffer part is inserted into the through hole, and the rest of the buffer part protrudes from the through hole. The inner diameter of a part where the buffer part is inserted in the through hole increases as it is closer to the opening at the other side of the through hole. Suggested are a method for manufacturing a heater block and a heater block, which can improve the quality of a bonding part.

Description

Terminal block, heater block and heater block manufacturing method

The present invention relates to a terminal block, a heater block, and a method for manufacturing a heater block, and more particularly, to a terminal block capable of improving the quality of a joint portion, a heater block having the same, and a method for manufacturing a heater block applied thereto.

A semiconductor device is manufactured by repeating various unit processes such as thin film lamination, etching, ion implantation, and heat treatment to form a device having desired circuit operating characteristics on a substrate.

When performing these processes, it is necessary to supply a predetermined amount of heat to the substrate, and a heater block is mainly used as such an apparatus. In general, a heater block includes a ceramic body, a heating wire disposed inside the body, and a connection terminal connected to the heating wire.

Here, the hot wire and the connection terminal are joined by a brazing method. At this time, the difference in thermal expansion coefficient between molybdenum used as a hot wire and nickel used as a connection terminal is large. Accordingly, as the use of the heater block is repeated, the impact caused by the difference in the coefficient of thermal expansion between the heating wire and the connection terminal is repeated, and the fatigue thereof may be accumulated and the heater block may be damaged.

In order to prevent this, a buffer member made of a kovar material is conventionally disposed between the hot wire and the connection terminal. For example, after arranging the cushioning member in the depression provided in the body of the heater block to expose a predetermined area of the heating wire, a connection terminal is inserted into the depression and brazing is performed while applying a predetermined load to the heating wire and the buffer member. The connection terminals were joined.

On the other hand, filler is applied between the heating wire and the buffer member and between the buffer member and the connection terminal for brazing bonding. Accordingly, during brazing bonding, the buffer member floats on the filler for a predetermined time until the filler is cured. Further, the buffer member is not fitted to the depression, but is disposed in the depression with a predetermined clearance. Accordingly, the centering of the cushioning member may be misaligned during brazing bonding. As such, when the centering of the buffer member is misaligned, it is difficult for the buffer member and the connection terminal to contact with a sufficient area, and there is a problem in that the quality of the joint is deteriorated.

The technology underlying the present invention is disclosed in the following patent documents.

10-2010-0003707 A 10-1999-0006874 A

The present invention provides a terminal block, a heater block, and a method for manufacturing a heater block capable of improving the quality of a joint portion.

A terminal block according to an embodiment of the present invention includes: a guide portion in which a through hole is formed; a connection part inserted into the through-hole so as to pass through an opening of one side of the through-hole; and a buffer part inserted into the through hole so as to pass through the other opening opposite to the one opening of the through hole, wherein a part of the buffer part is inserted into the through hole and the rest protrude from the through hole, and the through hole In the portion into which the buffer part is inserted, the inner diameter increases as it is closer to the opening on the other side.

The buffer part includes a surface facing the connection part and positioned inside the through hole and a second surface facing the one surface and positioned outside the through hole, and the one surface and the other surface of the buffer part may have different areas.

The buffer part includes a side surface connecting one surface and the other surface, the side surface of the buffer part is disposed inside the through hole, a first side facing the inner wall of the through hole, and a second side disposed outside the through hole And, the first side of the buffer is formed to extend along the circumferential shape of the inner wall of the portion into which the buffer is inserted in the through hole, and has an inclination with respect to the second side of the terminal block.

A heater block according to an embodiment of the present invention includes: a body having an insertion groove formed on its upper surface; a guide part having a through hole extending in the vertical direction and coupled to an upper portion of the insertion groove; a connection part inserted into the through-hole to pass through the upper opening of the through-hole; and a buffer part inserted into the through hole to pass through the lower opening of the through hole and disposed under the insertion groove, wherein a part of the buffer part is inserted into the through hole, and the remainder protrudes downward from the through hole The inner diameter of the portion into which the buffer part is inserted in the through hole may be increased as it is closer to the lower opening.

A filler may be provided between an inner wall of a portion into which the buffer part is inserted in the through hole and the buffer part.

An area of the upper surface and the area of the lower surface of the buffer part may be different from each other.

The buffer portion extends vertically from the edge end of the upper surface to the bottom of the insertion groove from the edge end of the first side and the first side extending from the through hole to the lower end of the inner wall of the portion into which the buffer portion is inserted with an inclination A second aspect may be included.

The connection part and the buffer part may have different coefficients of thermal expansion.

The buffer part may include a Kovar material.

The first side of the buffer may have a lower height as it goes away from the center of the upper surface, and the inner wall of the portion into which the buffer is inserted in the through hole may have a narrower inner diameter as it goes upward from the bottom.

The guide part and the insertion groove may be coupled by screw coupling.

a connection part embedded in the body, embedded in the bottom of the insertion groove, and connected to a lower surface of the buffer part; It may include a; embedded in the body, located under the connection part, and connected to the connection part.

An upper surface of the buffer unit is located on the upper end of the inner wall of the portion into which the buffer unit is inserted in the through hole, a first side is covered by the inner wall of the portion into which the buffer unit is inserted in the through hole, and a second side is the through hole may protrude downward from the lower end of the inner wall of the portion into which the buffer is inserted.

A method for manufacturing a heater block according to an embodiment of the present invention includes the steps of: providing a body provided with a connection part and an insertion groove exposing the connection part; The process of inserting a buffer in the insertion groove; a process of assembling a connection part and a guide part surrounding the circumference of the connection part with the body so as to be disposed on the buffer part; The process of heat-treating to join the connection part, the buffer part, the connection part, and the guide part; and a process of maintaining alignment of the connection part and the buffer part by using the inclined part of the upper part of the buffer part and the inclined part of the lower part of the guide part facing it during the heat treatment process.

The heat treatment process is performed in a brazing furnace, and the process of maintaining the alignment of the buffer part is between the buffer part and the connection part or the The process of flowing the filler provided between the guide part and the connection part; may include.

According to the embodiment of the present invention, by using the inclined portion of the upper portion of the buffer and the inclined portion of the lower portion of the guide portion, it is possible to stably maintain the centering of the buffer portion with respect to the connection portion during brazing bonding, and the joint portion between the buffer portion and the connection portion can improve the bonding quality of

1 is a schematic diagram of a heater block and a substrate processing apparatus having the same according to an embodiment of the present invention.
2 is a partially enlarged view of a heater block according to an embodiment of the present invention.
3 is a schematic view of a connection part, a buffer part, a connection part, and a guide part provided in the heater block according to an embodiment of the present invention.
4 to 7 are process diagrams for explaining a method of manufacturing a heater block according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, an embodiment of the present invention will be described in detail. However, the present invention is not limited to the embodiments disclosed below, and will be implemented in various different forms. Only the embodiments of the present invention are provided to complete the disclosure of the present invention, and to completely inform those of ordinary skill in the art the scope of the invention. In order to explain the embodiment of the present invention, the drawings may be exaggerated, parts irrelevant to the description may be omitted from the drawings, and the same reference numerals in the drawings refer to the same elements.

1 is a schematic diagram of a heater block and a substrate processing apparatus having the same according to an embodiment of the present invention.

Referring to FIG. 1 , a substrate processing apparatus according to an embodiment of the present invention includes a chamber 100 having an internal space to process a substrate (not shown), and a heater block 200 disposed inside the chamber 100 . ) is included. Also, the substrate processing apparatus may include a shaft 300 that is disposed to pass through the chamber 100 and supports the heater block 200 and a power supply (not shown) connected to the heater block 200 .

The chamber 100 may be formed in a predetermined cylindrical shape having a predetermined internal space. The chamber 100 may include a gate (not shown) for letting the substrate in and out and an outlet (not shown) for discharging gas. In addition, the chamber 100 may further include a plasma electrode, a gas supply and a shower head for processing the substrate. Accordingly, the chamber 100 may perform various substrate processing processes, such as thin film lamination, etching, ion implantation, and heat treatment.

The heater block 200 serves to supply predetermined heat to the substrate when performing a substrate processing process. In addition, a substrate may be seated on the heater block 200 . To this end, the heater block 200 may be formed in a plate shape, and may have an upper surface and a lower surface of a predetermined area. The heater block 200 may be provided with a heating wire therein. The heating wire may be arranged in a predetermined pattern shape. The heating wire may be connected to a power supply, and may receive a predetermined power to heat the heater block.

The shaft 300 serves to support the heater block 200 at a predetermined height inside the chamber 100 . The structure of the shaft 300 for this purpose may vary. Meanwhile, the shaft 300 may be disposed to penetrate the lower portion of the chamber 100 in the vertical direction, and may support the lower surface of the heater block 200 . Of course, the shaft 300 may be disposed to penetrate the upper portion of the chamber 100 in the vertical direction, and may support the upper surface of the heater block 200 .

2 is a partially enlarged view of a heater block according to an embodiment of the present invention. At this time, FIG. 2 is an enlarged view showing the part A of FIG. 1 upside down. 3 is a schematic view of a connection part, a buffer part, a connection part, and a guide part provided in the heater block according to an embodiment of the present invention.

2 and 3, the heater block 200 according to an embodiment of the present invention will be described in detail. The heater block 200 according to an embodiment of the present invention includes a body 210 having an insertion groove (g) formed on its upper surface, and a terminal block coupled to the insertion groove (g).

In addition, the heater block 200 may include a filler f, a connection part 220 , and a heating wire 230 . Also, the heater block 200 may include a protrusion 270 .

The terminal block includes the guide part 240 in which the through-hole h is extended, the connection part 250 inserted into the through-hole h to pass through one opening of the through-hole h, for example, the upper opening, and the through-hole h. and a buffer part 260 inserted into the through hole h so as to penetrate the other opening opposite to the one opening, for example, the lower opening.

At this time, the buffer part 260 is partially inserted into the through hole (h), and the rest protrudes from the through hole (h). In addition, the portion in the through hole (h) into which the buffer part 260 is inserted has an inner diameter that is closer to the opening of the other side of the through hole (h).

On the other hand, the through hole (h) is formed to extend in the vertical direction. In addition, the guide portion 240 is coupled to the upper portion of the insertion groove (g). The buffer part 260 is disposed under the insertion groove (g).

The body 210 may be formed in a predetermined shape corresponding to the shape of the substrate (not shown). For example, the body 210 may be formed in a disk shape or a square plate shape having a predetermined area and a predetermined thickness. The body 210 may include one surface and the other surface that are opposite to each other in the vertical direction, and a side surface connecting the same. One surface of the body 210 may be supported on the shaft, and the other surface of the body 210 may support the substrate. Meanwhile, an embodiment of the present invention will be described below based on a state in which one surface of the body 210 is vertically inverted to face upward.

The body 210 may include a ceramic material to withstand a predetermined high temperature and to smoothly transfer heat from the connection part 220 to the other surface of the body 210 . For example, the body 210 may include aluminum nitride (AlN). Of course, the material of the body 210 may vary. An insertion groove g may be formed on one surface, for example, an upper surface of the body 210 .

The insertion groove (g) may be concavely formed on one surface of the body (210). At this time, a part of the connection part 220 may be exposed to the inside of the insertion groove (g). Here, the exposure of the connection part 220 to the inside of the insertion groove (g) in the state before the buffer part 260, the filler (f), the connection part 250 and the guide part 240 are disposed in the insertion groove (g). It means that some of them are exposed.

These insertion grooves (g) may be respectively formed in a plurality of positions of the body (210). For example, the insertion groove (g) may be formed in each of the four positions spaced apart from the front and rear left and right on one surface of the body (210). The plurality of connection parts 250 may be respectively connected to the connection part 220 through the insertion groove (g). In the center of the insertion groove (g), the center of the buffer part 260 and the center of the connection part 250 may be aligned in the vertical direction.

The insertion groove (g) may include an entrance section and an inner section. The inlet section may be a section relatively close to one surface of the body 210 , and the inner section may be a section relatively close to the connection unit 220 . The entrance section and the inner section may have different widths in the horizontal direction. For example, the horizontal width of the entrance section may be greater than the horizontal width of the inner section, and a step may be formed at the boundary between the entrance section and the inner section.

The connection part 250 and the guide part 240 may be disposed in the entrance section. In this case, a part of the connection part 250 and a part of the guide part 240 may protrude a predetermined height from the inlet-side section and be located outside the body 210 .

A buffer 260 may be disposed in the inner section. In this case, a portion of the buffer 260 may protrude a predetermined height from the inner section and be located in the entrance section.

The insertion groove (g) may be threaded at a predetermined height along the inner wall so as to be screw-coupled to the guide unit 240 . At this time, the screw thread may be formed at a predetermined height on the inner wall of the inlet section of the insertion groove (g).

The connection part 220 may be built into the body 210 . Specifically, the connection part 200 may be embedded in the bottom of the insertion groove g, and may be spaced apart from one surface and the other surface of the body 210 . The connection part 220 may have a rectangular shape in cross-section, for example. The connection part 220 may have an upper surface connected to a lower surface of the buffer unit 260 , and a lower surface connected to the heating wire 230 . Accordingly, the connection part 220 may electrically connect the heating wire 230 and the connection part 250 to each other.

The connection unit 220 has a thermal expansion coefficient similar to that of the body 210 and can withstand a long time at a predetermined high temperature at which the substrate processing process is performed, and when power is applied, high temperature heat for increasing the temperature of the substrate can be generated. It may include a predetermined material that satisfies the conditions. For example, the connection part 220 may include a molybdenum material. Of course, the connection part 220 may be made of various materials within a range that satisfies the above-described conditions.

The heating wire 230 may be formed to extend along a predetermined pattern inside the body 210 . The heating wire 230 is located below the connection part 220 . It may be connected to the connector 220 . The heating wire 230 may receive a predetermined power from the connection part 250 through the connection part 220 and generate heat at a predetermined temperature.

The guide part 240 may be formed to extend in the vertical direction. The guide part 240 may include a through hole h. The through hole (h) may be formed to extend through the guide part 240 in the vertical direction. The guide unit 240 may be coupled to the upper portion of the insertion groove (g).

The guide part 240 may be accommodated in the insertion groove g so as to surround the circumference of the connection part 250 . The guide unit 240 may be assembled to the body 210 by being screwed with a screw thread formed on the inner wall of the inlet section of the insertion groove (g). The guide part 240 is disposed inside the insertion groove (g) and extends in the vertical direction and protrudes in the horizontal direction from the hollow cylindrical body part in which a thread is formed on the outer circumferential surface, and the cylindrical body part from the outside of the insertion groove (g). It may include a flange portion. The guide part 240 may include the same material as the connection part 250 . For example, the guide part 240 may include nickel.

The through hole (h) may include a portion into which the connection part 250 is inserted and a portion into which the buffer part 260 is inserted. One opening, for example, the upper opening, of the through hole (h) may be located on the upper surface of the cylindrical portion of the guide unit 240, and the other opening, for example, the lower opening, may be located on the lower surface of the cylindrical portion of the guide portion 240. have. At this time, the connection part 250 may be inserted into the through hole h by passing through the upper opening of the through hole h, and the buffer unit 260 may be inserted into the through hole h by passing through the lower opening. can

The portion into which the connection part 250 of the through hole h is inserted may be an upper portion of the through hole. The upper portion of the through hole may have the same inner diameter in the vertical direction. The inner wall 241 above the through hole may have a hollow cylindrical shape.

A portion of the through hole h into which the buffer part 260 is inserted may be a lower portion of the through hole. The inner diameter of the lower portion of the through hole may decrease as it approaches the upper opening, and the inner diameter may increase as it approaches the lower opening. As such, the inner wall 242 of the lower portion of the through hole has a narrower inner diameter from the lower end to the upper side, so that the inner wall 242 of the lower portion of the through hole may have a hollow truncated cone shape with a wide bottom. Of course, the inner wall 242 under the through hole may have a curved surface or a stepped shape.

The inner wall 241 of the upper part of the through hole is joined to the connection part 250 through the filler f, and the inner wall 242 of the lower part of the through hole is the first side 263 of the buffer part 260 through the filler f. can be joined with The inner wall 242 under the through hole may support the upper portion of the buffer unit 260 in the horizontal direction. In this case, the distance between the inner wall 242 under the through hole and the first side 263 of the buffer part 260 may be the same along the circumference of the buffer part 260 .

The connection part 250 may be inserted into the through-hole h to pass through the upper opening of the through-hole h. The lower part of the connection part 250 may be inserted into the through hole h, and the upper part may protrude upward of the guide part 240 . In addition, a part of the connection part 250 may be disposed in the inlet-side section of the insertion groove g, and the rest may protrude from the body 210 .

A power supply (not shown) may be connected to the protruding portion of the connection part 250 . The connection part 250 may be, for example, in the shape of a round bar extending in the vertical direction. Of course, the shape of the connection part 250 may vary.

The connection part 250 serves to supply power to the connection part 220 through the buffer part 260 . The connection part 250 is disposed on the central region of one surface of the buffer part 260 and may be vertically aligned with the buffer part 260 .

The connection part 250 may include a material having a different coefficient of thermal expansion from that of the connection part 220 . For example, the connection part 250 may include nickel. Of course, the material of the connection part 250 may vary.

The buffer part 260 is inserted into the through hole h to pass through the lower opening opposite to the upper opening of the through hole h, and may be disposed under the insertion groove g. A portion of the buffer 260 may be inserted into the through hole h, and the rest may protrude downward from the through hole h.

The buffer part 260 faces the connection part 240 and faces the one surface 261 located in the through hole h, and the other surface 262 opposite the one surface 261 and located outside the through hole h, and, It may include side surfaces 263 and 264 connecting the one surface 261 and the other surface 262 . Here, one surface 261 of the buffer part 260 may be an upper surface, and the other surface 262 of the buffer part 260 may be a lower surface.

One surface 261 and the other surface 262 of the buffer unit 260 may be flat. One surface 261 of the buffer part 260 may be connected to the connection part 250 through the pillar f, and the other surface 262 may be connected to the connection part 220 through the pillar f.

One surface 261 of the buffer part 260 may be located at the upper end of the inner wall 242 under the through hole. Accordingly, since the connection part 250 is supported on one surface 261 of the buffer part 260 , the connection part 250 may not be exposed to the inner wall 242 under the through hole. One surface 261 and the other surface 262 of the buffer unit 260 may have different areas. For example, the buffer unit 260 may have a larger area of the other surface 262 than the area of the one surface 261 .

The side of the buffer part 260 is disposed inside the through hole (h) and faces the inner wall of the through hole (h), the first side 263, and the second side (263) disposed outside the through hole (h) ( 264) may be included. The first side 263 has a predetermined inclination from the edge end of the one surface 261 of the buffer part 260 to the lower end of the inner wall 242 of the portion where the buffer part 260 is inserted in the through hole (h). can be extended to have The height of the first side 263 of the buffer part 260 may be lowered as it moves away from the center of the one surface 261 . The second side 264 of the buffer unit 260 may extend vertically from the edge end of the first side 263 to the bottom of the insertion groove (g).

In the buffer part 260, the first side 263 may be covered by the inner wall 242 under the through hole, and the second side 264 may protrude downward from the lower end of the inner wall 242 under the through hole. can

The first side 263 of the buffer part 260 may be formed to extend along the shape of the periphery of the inner wall 242 of the portion into which the buffer part 260 is inserted in the through hole h. In addition, the second side 254 of the buffer unit 260 may be formed to extend in the vertical direction. Accordingly, the first side 263 of the buffer unit 260 may have a predetermined inclination with respect to the second side 264 of the buffer unit 260, which is a vertical surface. Similarly, the first side 263 of the buffer unit 260 may have a predetermined inclination with respect to one surface 261 of the buffer unit 260, which is a vertical surface.

On the other hand, the first side 263 of the buffer part 260 may be formed to extend continuously along the circumference of the buffer part 260 . That is, the first side 263 of the buffer part 260 may be formed in a ring shape along the periphery of the edge of the one surface 261 .

The buffer unit 260 may have a first inclined surface formed in an edge region of one surface. The first inclined surface may be continuously formed to extend along the circumference of the buffer unit 260 . For example, the first inclined surface may be formed in a ring shape along an edge region of one surface of the buffer unit 260 .

The first side 263 of the buffer part 260 is disposed to face the inner wall 242 of the lower portion of the through hole of the guide part 240, so that when the heater block 200 is fully expanded and contracted, the guide part 240 is It is supported in the horizontal direction by the inner wall 242 under the through hole and may be stably restrained. Accordingly, the alignment of the buffer unit 260 with respect to the connection unit 250 can be stably maintained during the overall expansion and contraction of the heater block 200 . Here, the alignment may refer to a vertical alignment. The vertical alignment may mean that the center of the connection part 250 and the center of the buffer part 260 are aligned in the vertical direction.

Looking at the vertical section of the buffer unit 260, it can be divided into a rectangular portion and an isosceles trapezoidal portion. That is, the overall shape of the vertical cross-section of the buffer unit 260 may be a predetermined polygonal shape in which an isosceles trapezoid is combined with a long side of a rectangle. In this case, the first side 263 may be located in an isosceles trapezoidal portion of the vertical cross-section.

When the width of the buffer unit 260 in the horizontal direction of the other surface 262 is 1, the width in the horizontal direction of the first side surface 263 may be greater than 0 and less than or equal to 0.1. The width in the horizontal direction refers to the width in the horizontal direction based on the left or right part of the left and right sides on the vertical cross-section of the buffer unit 260 . On the other hand, with respect to the width 1 in the horizontal direction of the other surface 262 of the buffer part 260, the width in the horizontal direction of the one surface 261 of the buffer part 260 may be less than 1 and 0.8 or more.

Preferably, the buffer unit 260 has a horizontal width of 1 when the width of the other surface 262 is 1, a horizontal width of the first side 263 is 0.1, and a horizontal width of the first side 261 is 0.8 days. can In this case, the vertical height of the first side 263 may be twice the horizontal width of the first side 263 .

When the width of the first side 263 in the horizontal direction is greater than 0.1, the width of the one surface 261 is reduced, so that the connection area between the buffer part 260 and the connection part 250 is smaller than the desired area. As the horizontal width of the first side 263 is greater than 0 and less than or equal to 0.1, the area of the one side 261 can be sufficiently secured, and the guide unit 240 through the first side 263 in the horizontal direction. can be stably supported. On the other hand, a ratio of the height of the one surface 261 to the height of the end of the edge of the first side 263 one surface with respect to the other surface 262 of the buffer part 260 may be a ratio of 3:2.

The buffer unit 260 may be disposed in the inner region of the insertion groove (g). The buffer part 260 may connect the connection part 220 and the connection part 250 to each other. The buffer unit 260 may have a different coefficient of thermal expansion from the connection unit 250 . In addition, the buffer unit 260 may have a different coefficient of thermal expansion from the connection unit 220 . The buffer unit 260 suppresses the shock generated by the difference in the coefficient of thermal expansion between the connection unit 250 and the connection unit 220 while the heater block 200 repeats operation and standby and performs a plurality of substrate processing processes. serves to prevent

For example, the connection part 250 may include a material having a relatively low resistance compared to the connection part 220 . That is, the material of the connection part 250 and the material of the connection part 220 may be different. Metals of different materials may have different coefficients of thermal expansion, and thus, the thermal expansion coefficients of the connection part 250 and the connection part 220 may also be different.

As such, when the connection part 250 and the connection part 220 having different coefficients of thermal expansion are directly bonded, the degree of expansion and contraction of the connection part 250 and the degree of expansion and contraction of the connection part 220 are different while the heater block 200 is used. may be damaged.

Therefore, the buffer part 260 having a thermal expansion coefficient intermediate between the thermal expansion coefficient of the connection part 250 and the thermal expansion coefficient of the connection part 220 is disposed between the connection part 250 and the connection part 220, and the buffer part 260 ) through which the connection part 250 and the connection part 220 may be bonded. Accordingly, even if the degree of expansion and contraction of the connection part 250 and the degree of expansion and contraction of the connection part 220 are different, the connection part 250 can reduce the difference between the expansion and contraction therebetween, so that the impact can be buffered. have.

To this end, the buffer unit 260 may include, for example, a kovar. Of course, the material of the buffer 260 may be varied within the range having a predetermined coefficient of thermal expansion located between the coefficient of thermal expansion of the connection part 250 and the coefficient of thermal expansion of the connection part 220 .

The buffer unit 260 may have one surface and the other surface that are opposite to each other in the vertical direction, and a side surface connecting the same. One surface of the buffer part 260 may face the connection part 250 up and down, and the other surface of the buffer part 260 may face the connection part 220 up and down. The side surface of the buffer 260 has a predetermined clearance e with respect to the insertion groove g, and a filler f may be provided in this clearance.

The filler f may be provided between the buffer part 260 and the inner wall 242 of the portion into which the buffer part 260 is inserted in the through hole h. More specifically, the filler (f) is between the guide part 240 and the connection part 250 , between the connection part 250 and the buffer part 260 , and the first side 263 and the guide part of the buffer part 260 . (240) between the lower inner wall 242 of the through hole, between the buffer portion 260 and the inner wall of the insertion groove (g), it may be provided between the buffer portion 260 and the connecting portion (220).

The filler (f) serves to bond the guide part 240 , the connection part 250 , the buffer part 260 , and the connection part 220 . The filler (f) may include gold. Of course, the filler (f) may have a variety of materials within the range that can join the guide portion 240, the connection portion 250, the buffer portion 260, and the connection portion 220 by a brazing method, for example.

The pillar (f) between the guide part 240 and the connection part 250, the pillar (f) between the connection part 250 and the buffer part 260, the first side 263 of the buffer part 260 and the guide The filler f between the inner wall 242 of the lower part of the through hole of the part 240 may be connected in the vicinity of the edge end of the one surface 261 of the buffer part 260 . The filler (f) between the guide part 240 and the connection part 250 is connected to face the first side 263 of the buffer part 260 in the vertical direction, and between the connection part 250 and the buffer part 260 . The pillar (f) of the guide part 240 may be connected to the inner wall 242 under the through hole while facing in the horizontal direction. On the other hand, the filler (f) between the first side 263 of the buffer part 260 and the inner wall 242 under the through hole of the guide part 240, the buffer part 260 and the inside of the insertion groove (g) The pillars f between the side walls may be connected to each other. In addition, the filler f between the buffer part 260 and the inner wall of the insertion groove g, and the filler f between the buffer part 260 and the connection part 220 may be connected to each other.

The protrusion 270 may protrude from the outside of the body 210 to the outer circumferential surface of the connection part 250 . The protrusion 270 serves to seat a rod (not shown) for applying a load to the connection part 250 when the heater block 200 is manufactured.

4 to 7 are process diagrams for explaining a method of manufacturing a heater block according to an embodiment of the present invention. 4 is a schematic view showing a state in which a hot wire, a connection part, and an insertion hole are provided in a body according to an embodiment of the present invention, and FIGS. 5 to 7 are a buffer part, a connection part, and a guide in the insertion hole according to an embodiment of the present invention It is a schematic diagram showing each process of arranging wealth. Here, FIGS. 5 to 7 are enlarged views of part B of FIG. 4 .

A method of manufacturing a heater block according to an embodiment of the present invention will be described with reference to FIGS. 4 to 7 .

The method for manufacturing a heater block according to an embodiment of the present invention includes a process of providing a body 210 having a connection part 220 and an insertion groove g for exposing the connection part 220, and a buffer part in the insertion groove g) The process of inserting the 230 , the process of assembling the connection part 250 and the guide part 240 surrounding the circumference of the connection part 250 with the body 210 so as to be disposed on the buffer part 260 , and the connection part 220 ), the process of heat treatment to bond the buffer part 260, the connection part 250 and the guide part 240, and the inclined portion of the upper part of the buffer part 260 and the guide part 240 facing it during the heat treatment process. It includes the process of maintaining the alignment of the connection part 250 and the buffer part 260 by using the inclined part of the lower part.

At this time, the insertion process includes the process of applying the filler (f) in the insertion groove (g) to cover the exposed portion of the connection part 220, the process of disposing the buffer part 260 on the filler (f), , aligning the center of the buffer part 260 in the vertical direction at the center of the insertion groove (g) so that a clearance (e) is formed in the horizontal direction between the edge of the buffer part 260 and the inner wall of the insertion groove (g) process may be included.

In addition, the assembling process is a process of arranging the guide part 240 on the upper edge region of the buffer part 260 , and disposing the connection part 250 to pass through the through hole h of the guide part 240 . The process of screwing the guide part 240 and the inner wall of the insertion groove (g) and lowering the guide part 240 and the connection part 250, the inclined portion and the guide of the upper part of the buffer part 260 Before disposing the guide part 240 on the upper edge region of the buffer part 260, including the process of providing a clearance between the inclined portions of the lower part of the part 240, the filler (g) in the insertion groove (g) f) is applied to cover the central region of the upper portion of the buffer part 260, or the connection part 250 is disposed to penetrate the through hole h of the guide part 240, and then the guide part 240 and Before screwing the inner wall of the insertion groove (g), the process of applying the filler (f) between the guide part 240 and the connection part 250 may be further included.

In addition, the process of heat treatment may be performed in a brazing furnace.

In addition, in the process of maintaining the alignment of the buffer unit 260, the buffer unit 260 and the connection part ( 250) or between the guide part 240 and the connection part 250 may include a process of flowing the filler (f).

Referring to FIG. 4 , a body 210 provided with a connection part 220 and an insertion groove g for exposing it is provided on a workbench. At this time, the body 210 can be vertically inverted so that the inlet section of the insertion groove (g) faces upward to be seated on the workbench.

Referring to FIG. 5 , a process of inserting the buffer 230 into the insertion groove g is performed. First, the filler (f) may be applied in the insertion groove (g) to cover the exposed portion of the connection part (220). In this case, the filler (f) may be formed and applied in the shape of a mat, for example, or may be applied in the form of a powder. Subsequently, the buffer unit 260 may be disposed on the pillar f. At this time, the buffer part 260 may be disposed in the inner section of the insertion groove g, and the buffer part 260 may be seated on the pillar f. At this time, the first side 263 of the buffer unit 260 may be disposed to face upward. In addition, the center of the buffer part 260 at the center of the insertion groove (g) so that a play can be formed in the horizontal direction between the second side 264 of the buffer part 260 and the inner wall of the insertion groove (g). You can sort up and down. Accordingly, a gap may be formed to have a constant size along the circumference of the buffer unit 260 .

6 and 7 , the connection part 250 and the guide part 240 surrounding the circumference of the connection part 250 are assembled with the body 210 to be disposed on the buffer part 260 .

First, referring to FIG. 6 , the filler f is applied in the insertion groove g to cover the central region of the upper portion of the buffer unit 260 , for example, the upper surface 261 of the buffer unit 260 . Thereafter, the guide part 240 is disposed on the edge region of the upper portion of the buffer part 260 , for example, on the first side 263 of the buffer part 260 , and the connection part 250 passes through the inside of the guide part 240 . ) can be placed. At this time, the protrusion 270 and a part of the connection part 250 near the protrusion 270 can protrude a predetermined height upward of the guide part 240, so that the connection part (h) in the through hole h of the guide part 240. 250) can be placed. Thereafter, the filler f may be applied between the guide part 240 and the connection part 250 . At this time, the filler (f) may be molded into a mat shape and applied. Of course, a sealing member (not shown) may be inserted at a predetermined height between the guide part 240 and the connection part 250 , and a powdery filler f may be applied thereon. In this case, the sealing member may be a predetermined metal that can be melted and removed at a brazing temperature. For example, the sealing member may be a sealing ring including the same material as the filler f. Here, by pre-applying the filler (f) between the guide part 240 and the connection part 250 from the outside of the insertion groove (g), the filler (f) is applied between the guide part 240 and the connection part 250 . It can be applied evenly.

In addition, referring to FIG. 7 , the guide part 240 and the inner wall of the insertion groove g are screwed together to lower the guide part 240 and the connection part 250 . At this time, by applying the filler f between the guide part 240 and the connection part 250 and lowering them together, the verticality of the connection part 250 can be stably secured. Thereafter, the lowering of the guide part 240 and the connection part 250 may be completed, and a clearance may be provided between the inclined part of the upper surface of the buffer part 260 and the inclined part of the lower surface of the guide part 240 .

Thereafter, the body 210 may be transferred to a brazing furnace (not shown). After putting the body 210 into the brazing furnace, the edge of the body 210 is fixed with a jig (not shown), and the rod is seated on the protrusion 270 to apply a predetermined weight to the connection part 250 . .

Thereafter, heat treatment may be performed to bond the connection part 220 , the buffer part 260 , the connection part 250 , and the guide part 240 in the brazing furnace.

During the heat treatment process, using the inclined portion (first side 263) of the upper portion of the buffer unit 260 and the inclined portion of the lower portion of the guide portion 240 facing it (the inner wall 242 of the lower portion of the through hole), Alignment of the connection part 250 and the buffer part 260 can be maintained. Specifically, along the clearance between the first side 263 of the buffer part 260 and the inner wall 242 under the through hole of the guide part 240, between the buffer part 260 and the connection part 250 or the guide part The filler f provided between the 240 and the connection part 250 may flow. At this time, as the filler (f) flows, the vertical distance between the connection part 250 and the buffer part 260 may be narrowed. In addition, a part of the filler f provided between the guide part 240 and the connection part 250 flows between the first side 263 and the inner wall 242 under the through hole, and the guide part 240 and the connection part 250 The height of the filler (f) provided between ) may be lowered by a predetermined height.

Here, among the components of the force generated by the flow of the filler f, the component acting perpendicular to the first side 263 of the upper portion of the buffer 260, that is, the force generated by the flow of the filler f The buffer unit 260 may be fixed in a horizontal direction by using a normal component.

For example, by the clearance between the buffer part 260 and the inner wall of the insertion groove (g) during brazing, the buffer part 260 may flow in the horizontal direction, at this time, the first inclined surface of the buffer part 260 The filler (f) flowing along can push the buffer part 260 from all directions in the direction from the edge region of the upper part of the buffer part 260 to the center region, and accordingly, the buffer part 260 is fixed in the horizontal direction. can do it

Thereafter, the heater block 200 on which the brazing process is completed may be vertically inverted, assembled in a substrate processing apparatus, and a substrate processing process may be performed using the heater block.

The above embodiments of the present invention are intended to illustrate the present invention, not to limit the present invention. It should be noted that the configurations and methods disclosed in the above embodiments of the present invention will be combined and modified in various forms by combining or intersecting with each other, and modifications thereof may also be considered as the scope of the present invention. That is, the present invention will be embodied in a variety of different forms within the scope of the claims and the technical spirit equivalent thereto, and those skilled in the art to which the present invention pertains can implement various embodiments within the scope of the technical spirit of the present invention. will be able to understand

100: chamber
200: heater block
210: body
220: connection
230: hot wire
240: guide unit
250: connection
260: buffer
270: protrusion
300: shaft
f: filler

Claims (15)

a guide part having a through-hole extending therethrough;
a connection part inserted into the through-hole so as to pass through an opening of one side of the through-hole;
Including; and a buffer part inserted into the through hole so as to pass through the other opening opposite to the one opening of the through hole,
The buffer part is partially inserted into the through hole, and the rest protrudes from the through hole,
A terminal block in which an inner diameter of the portion into which the buffer part is inserted in the through-hole is increased as it is closer to the opening of the other side. The method according to claim 1,
The buffer part includes one surface facing the connection part and positioned inside the through hole, and the other surface facing the one surface and positioned outside the through hole,
One side and the other side of the buffer unit have different areas. 3. The method according to claim 2,
The buffer part includes a side connecting one surface and the other surface,
The side surface of the buffer is disposed inside the through hole and includes a first side facing the inner wall of the through hole, and a second side disposed outside the through hole,
The first side of the buffer is formed to extend along the circumferential shape of the inner wall of the portion into which the buffer is inserted in the through hole, and the terminal block has an inclination with respect to the second side. a body having an insertion groove formed on its upper surface;
a guide part having a through hole extending in the vertical direction and coupled to an upper portion of the insertion groove;
a connection part inserted into the through-hole to pass through the upper opening of the through-hole;
a buffer part inserted into the through-hole so as to penetrate the lower opening of the through-hole and disposed under the insertion groove; and
The buffer part is partially inserted into the through hole, and the rest protrudes downward from the through hole,
A portion of the through hole into which the buffer is inserted is a heater block whose inner diameter increases as it approaches the lower opening. 5. The method according to claim 4,
A heater block in which a filler is provided between an inner wall of a portion into which the buffer part is inserted in the through hole and the buffer part. 5. The method according to claim 4,
The buffer unit is a heater block in which the area of the upper surface and the area of the lower surface are different. 7. The method of claim 6,
The buffer portion extends vertically from the edge end of the upper surface to the bottom of the insertion groove from the edge end of the first side and the first side extending from the through hole to the lower end of the inner wall of the portion into which the buffer portion is inserted with an inclination A heater block comprising a second side to be. 5. The method according to claim 4,
A heater block in which the connection part and the buffer part have different coefficients of thermal expansion. 9. The method of claim 8,
The buffer unit is a heater block comprising a Kovar material. 8. The method of claim 7,
The first side of the buffer unit has a lower height as it goes away from the center of the upper surface,
The inner wall of the portion into which the buffer part is inserted in the through hole is a heater block whose inner diameter is narrowed from the bottom to the upper side. 5. The method according to claim 4,
A heater block in which the guide part and the insertion groove are coupled by screw coupling. 5. The method according to claim 4,
a connection part embedded in the body, embedded in the bottom of the insertion groove, and connected to a lower surface of the buffer part;
A heater block including a; embedded in the body, located under the connection part, and connected to the connection part. 8. The method of claim 7,
An upper surface of the buffer unit is located on the upper end of the inner wall of the portion into which the buffer unit is inserted in the through hole, a first side is covered by the inner wall of the portion into which the buffer unit is inserted in the through hole, and a second side is the through hole A heater block protruding downward from the lower end of the inner wall of the portion into which the buffer is inserted. A process of providing a body provided with a connecting portion and an insertion groove exposing the connecting portion;
The process of inserting a buffer in the insertion groove;
a process of assembling a connection part and a guide part surrounding the circumference of the connection part with the body so as to be disposed on the buffer part;
The process of heat-treating to join the connection part, the buffer part, the connection part, and the guide part;
Method of manufacturing a heater block comprising a; using the inclined portion of the upper portion of the buffer portion and the inclined portion of the lower portion of the guide portion facing the same during the heat treatment process to maintain the alignment of the connection portion and the buffer portion. 15. The method of claim 14,
The heat treatment process is performed in a brazing furnace,
The process of maintaining the alignment of the buffer part,
A method of manufacturing a heater block comprising a; flowing a filler provided between the buffer and the connecting portion or between the guide and the connecting portion along a gap between the inclined portion of the upper portion of the buffer and the inclined portion of the lower portion of the guide. .

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