KR20220128518A - Method for forming thin film on artificial joint of polymer series based on atomic layer deposition - Google Patents

Method for forming thin film on artificial joint of polymer series based on atomic layer deposition Download PDF

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KR20220128518A
KR20220128518A KR1020210032039A KR20210032039A KR20220128518A KR 20220128518 A KR20220128518 A KR 20220128518A KR 1020210032039 A KR1020210032039 A KR 1020210032039A KR 20210032039 A KR20210032039 A KR 20210032039A KR 20220128518 A KR20220128518 A KR 20220128518A
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South Korea
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artificial joint
thin film
layer deposition
atomic layer
polymer
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KR1020210032039A
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Korean (ko)
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송용남
홍민표
김경민
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고려대학교 산학협력단
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Priority to KR1020210032039A priority Critical patent/KR20220128518A/en
Priority to PCT/KR2022/002093 priority patent/WO2022191450A1/en
Publication of KR20220128518A publication Critical patent/KR20220128518A/en

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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • A61F2/3094Designing or manufacturing processes
    • A61F2/30942Designing or manufacturing processes for designing or making customized prostheses, e.g. using templates, CT or NMR scans, finite-element analysis or CAD-CAM techniques
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
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    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • A61F2/38Joints for elbows or knees
    • AHUMAN NECESSITIES
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    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • A61F2/38Joints for elbows or knees
    • A61F2/3868Joints for elbows or knees with sliding tibial bearing
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    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L27/00Materials for grafts or prostheses or for coating grafts or prostheses
    • A61L27/02Inorganic materials
    • A61L27/04Metals or alloys
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    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
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    • A61L27/00Materials for grafts or prostheses or for coating grafts or prostheses
    • A61L27/28Materials for coating prostheses
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    • A61L27/00Materials for grafts or prostheses or for coating grafts or prostheses
    • A61L27/28Materials for coating prostheses
    • A61L27/30Inorganic materials
    • A61L27/306Other specific inorganic materials not covered by A61L27/303 - A61L27/32
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0227Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0254Physical treatment to alter the texture of the surface, e.g. scratching or polishing
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/407Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523Pulsed gas flow or change of composition over time
    • C23C16/45525Atomic layer deposition [ALD]
    • C23C16/45553Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523Pulsed gas flow or change of composition over time
    • C23C16/45525Atomic layer deposition [ALD]
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/02Prostheses implantable into the body
    • A61F2/30Joints
    • A61F2002/30001Additional features of subject-matter classified in A61F2/28, A61F2/30 and subgroups thereof
    • A61F2002/30003Material related properties of the prosthesis or of a coating on the prosthesis
    • A61F2002/30004Material related properties of the prosthesis or of a coating on the prosthesis the prosthesis being made from materials having different values of a given property at different locations within the same prosthesis
    • A61F2002/30026Material related properties of the prosthesis or of a coating on the prosthesis the prosthesis being made from materials having different values of a given property at different locations within the same prosthesis differing in wear resistance
    • AHUMAN NECESSITIES
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    • A61F2/00Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
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    • A61F2002/3006Properties of materials and coating materials
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
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    • A61F2310/00389The prosthesis being coated or covered with a particular material
    • A61F2310/00592Coating or prosthesis-covering structure made of ceramics or of ceramic-like compounds
    • A61F2310/00598Coating or prosthesis-covering structure made of compounds based on metal oxides or hydroxides
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    • A61L2430/00Materials or treatment for tissue regeneration
    • A61L2430/24Materials or treatment for tissue regeneration for joint reconstruction

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  • Chemical & Material Sciences (AREA)
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  • Engineering & Computer Science (AREA)
  • Oral & Maxillofacial Surgery (AREA)
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Abstract

The present invention relates to a method for forming a thin film on a polymer-based artificial joints based on an atomic layer deposition method, comprising the steps of: (a) positioning an artificial joint within a chamber; (b) purging a first precursor containing a ceramic material into the chamber; and (c) purging a second precursor containing moisture into the chamber, wherein the thin film of the ceramic material is formed on a surface of the artificial joint by repeating the step (b) and the step (c) for a predetermined number of processes according to the atomic layer deposition method. Accordingly, by forming a ceramic-based thin film that is strong against wear resistance on a polymer-based material used for artificial joints through an atomic layer deposition, it is possible to manufacture artificial joints that are strong against wear resistance.

Description

원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법{METHOD FOR FORMING THIN FILM ON ARTIFICIAL JOINT OF POLYMER SERIES BASED ON ATOMIC LAYER DEPOSITION}A method of forming a thin film on a polymer-based artificial joint based on the atomic layer deposition technique

본 발명은 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 관한 것으로서, 보다 상세하게는 인공 관절에 사용되는 폴리머 계열의 소재의 기계적 물성을 향상시키기 위한 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 관한 것이다.The present invention relates to a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, and more particularly, to a method for forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique to improve the mechanical properties of a polymer-based material used for an artificial joint. It relates to a method of forming a thin film on a polymer-based artificial joint.

인체의 관절은 그 표면에 섬모조직을 가지고 있어서 체액(body fluid)을 저장할 수 있는 친수성을 보유하고 있다. 따라서, 체액은 해당 섬모조직에 저장되어, 윤활유로서 기능함으로써 인체 관절의 자연스러운 운동을 가능하게 한다.The joints of the human body have ciliary tissue on their surface, so they have hydrophilicity that can store body fluids. Accordingly, the body fluid is stored in the ciliary tissue and functions as a lubricant to enable natural movement of the human joint.

인체의 관절은 인체의 여러 부위 중에 신체의 전체적인 모양과 균형을 결정하고 무게를 지탱하는 기능을 수행하는 중요한 기관 중 하나이다. 그 만큼, 관절은 빈번하게 사용되고 나아가 잦은 충격에 노출되어 시간이 지남에 따라 노화가 진행되거나 각종 질병이나 사고로 인해 관절의 기능이 약해지거나 상실되는 경우가 발생한다. The joints of the human body are one of the important organs that determine the overall shape and balance of the body and carry out the function of supporting weight among various parts of the human body. As much as that, the joint is frequently used and further exposed to frequent shocks, and aging progresses over time, or the function of the joint is weakened or lost due to various diseases or accidents.

이와 같은 관절 손상은 자연 상태에서는 치료가 힘들기 때문에, 손상된 관절을 대체할 수 있는 인공 관절의 개발이 꾸준히 진행되고 있다. 이와 같은 인공관절의 시술을 통해 삶의 질이 현저히 개선되고 있다. 무릎관절, 어깨관절, 고관절, 발목관절이 대표적인 인공관절에 속한다.Since such joint damage is difficult to treat in its natural state, the development of artificial joints that can replace damaged joints is steadily progressing. The quality of life has been significantly improved through such artificial joint surgery. The knee joint, shoulder joint, hip joint, and ankle joint are representative artificial joints.

도 1은 일반적인 인공 관절의 예를 나타낸 도면으로, 무릎 관절의 예를 나타낸 것이다. 무릎 관절은 크게 대퇴골의 원위부 말단의 관절면을 대체하는 대퇴골 요소(3)와, 경골의 근위부단의 절면을 대체하는 경골 요소(5)와, 대퇴골 요소(3)와 경골 요소(5) 사이에 위치하면서 대퇴골 요소(3)의 관절면과 접촉하는 관절면을 가진 베어링 요소(1)를 포함한다.1 is a view showing an example of a general artificial joint, showing an example of a knee joint. The knee joint is largely composed of a femoral element (3) replacing the articular surface of the distal end of the femur, a tibial element (5) replacing the articular surface of the proximal end of the tibia, and the femoral element (3) and the tibial element (5). a bearing element (1) having an articular surface in contact with the articular surface of the femoral element (3) while being positioned.

여기서, 대퇴골 요소(3)는 베어링 요소(3)와 접촉하면서 관절운동을 하게 되는데, 베어링 요소(3)의 관절면은 통상 폴리머 계열의 소재로 된 표면을 가지고 있다.Here, the femoral element (3) is in contact with the bearing element (3) to make joint motion, the joint surface of the bearing element (3) usually has a surface made of a polymer-based material.

그런데, 폴리머 계열의 표면은 대퇴골 요소(3)와의 관절 운동 과정에서 내마모가 발생하게 되고, 이로 인해 인공 관절의 수명을 단축시키는 문제점이 있다.However, the polymer-based surface is abrasion-resistant in the course of joint motion with the femoral element 3, thereby reducing the lifespan of the artificial joint.

이에, 본 발명은 상기와 같은 문제점을 해소하기 위해 안출된 것으로서, 인공 관절에 사용되는 폴리머 계열의 소재의 기계적 물성을 향상시켜 내마모 현상에 강인한 인공 관절이 제작이 가능한 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법을 제공하는데 그 목적이 있다.Accordingly, the present invention has been devised to solve the above problems, and by improving the mechanical properties of the polymer-based material used for artificial joints, a polymer based on the atomic layer deposition technique that can produce artificial joints that are strong against abrasion resistance. An object of the present invention is to provide a method for forming a thin film on a series of artificial joints.

상기 목적은 본 발명에 따라, 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 있어서, (a) 상기 인공 관절을 챔버 내부에 위치시키는 단계와, (b) 세라믹 소재가 함유된 제1 전구체를 상기 챔버 내부로 퍼징하는 단계와, (c) 수분이 함유된 제2 전구체를 상기 챔버 내부로 퍼징하는 단계를 포함하며; 상기 원자층 증착 기법에 따라 상기 (b) 단계 및 상기 (c) 단계가 기 설정된 공정 횟수만큼 반복 수행되어 상기 인공 관절의 표면에 상기 세라믹 소재의 박막이 형성되는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 의해서 달성된다.The above object is, according to the present invention, in a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, (a) positioning the artificial joint in a chamber, (b) containing a ceramic material purging the first precursor into the chamber, and (c) purging the second precursor containing moisture into the chamber; In the atomic layer deposition technique, characterized in that the steps (b) and (c) are repeated as many times as the preset number of processes according to the atomic layer deposition technique to form the thin film of the ceramic material on the surface of the artificial joint It is achieved by a method of forming a thin film on a polymer-based artificial joint.

여기서, (d) 상기 (b) 단계의 수행 후 상기 (c) 단계의 수행 전, 상기 (c) 단계의 수행 후 상기 (b) 단계의 수행 전에, 상기 챔버 내부로 비활성 기체를 퍼징하는 단계를 더 포함할 수 있다.Here, (d) after performing step (b), before performing step (c), after performing step (c), and before performing step (b), purging the inert gas into the chamber may include more.

그리고, 상기 세라믹 소재는 산화 아연을 포함할 수 있다.In addition, the ceramic material may include zinc oxide.

그리고, 상기 제1 전구체는 DEZn((C2H5)2Zn)일 수 있다.In addition, the first precursor may be DEZn ((C2H5)2Zn).

그리고, 상기 제2 전구체는 증류수일 수 있다.And, the second precursor may be distilled water.

또한, 상기 비활성 기체는 질소 또는 아르곤을 포함할 수 있다.In addition, the inert gas may include nitrogen or argon.

여기서, 상기 (d) 단계의 수행 시간은 상기 (b) 단계 및 상기 (c) 단계의 수행 시간은 길게 수행될 수 있다.Here, the execution time of step (d) may be performed longer than the execution time of step (b) and step (c).

일 예로, 상기 (b) 단계 및 상기 (c) 단계의 수행 시간은 0.5초이고, 상기 (d) 단계의 수행 시간은 30초일 수 있다.For example, the execution time of step (b) and step (c) may be 0.5 seconds, and the execution time of step (d) may be 30 seconds.

그리고, 상기 (a) 단계의 수행 후 상기 챔버 내부의 온도를 기 설정된 예열 온도로 예열하는 단계를 더 포함할 수 있다.The method may further include preheating the temperature inside the chamber to a preset preheating temperature after performing step (a).

여기서, 상기 예열 온도는 100℃ 내지 110℃의 범위 내에서 선택될 수 있다.Here, the preheating temperature may be selected within the range of 100°C to 110°C.

또한, 상기 (a) 단계의 수행 전에 상기 인공 관절을 표면 처리하는 단계를 더 포함할 수 있다.In addition, it may further include the step of surface-treating the artificial joint before performing the step (a).

여기서, 상기 인공 관절을 표면 처리하는 단계는 상기 인공 관절의 표면을 폴리싱(Polishing)하는 단계와; 폴리싱(Polishing)한 상기 인공 관절을 세척하는 단계와; 상기 인공 관절의 표면을 플라즈마 처리하는 단계를 포함할 수 있다.Here, the step of surface-treating the artificial joint comprises: polishing the surface of the artificial joint; washing the artificial joint by polishing; It may include plasma-treating the surface of the artificial joint.

그리고, 상기 인공 관절은 베어링 요소일 수 있다.And, the artificial joint may be a bearing element.

상기와 같은 구성에 따라, 본 발명에 따르면 인공 관절에 사용되는 폴리머 계열의 소재에 내마모성에 강인한 세라믹 계열의 박막을 원자층 증착 기법을 통해 형성하여, 내마모 현상에 강인한 인공 관절이 제작이 가능한 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법이 제공된다.According to the above configuration, according to the present invention, a ceramic-based thin film strong in abrasion resistance is formed on a polymer-based material used for artificial joints through atomic layer deposition, so that an artificial joint strong in abrasion resistance can be produced. A method for forming a thin film on a polymer-based artificial joint based on a layer deposition technique is provided.

도 1은 일반적인 인공 관절의 예를 나타낸 도면이고,
도 2는 본 발명의 실시예에 따른 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법의 과정을 나타낸 도면이고,
도 3 내지 도 9는 본 발명의 실시예에 따른 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 대한 실험 결과를 설명하기 위한 도면이다.
1 is a view showing an example of a general artificial joint,
2 is a view showing the process of a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique according to an embodiment of the present invention;
3 to 9 are diagrams for explaining experimental results of a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique according to an embodiment of the present invention.

본 발명의 이점 및 특징, 그리고 그것들을 달성하는 방법은 첨부되는 도면과 함께 상세하게 후술되어 있는 실시예들을 참조하면 명확해질 것이다. 그러나 본 발명은 이하에서 개시되는 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 수 있으며, 단지 본 실시예들은 본 발명의 개시가 완전하도록 하고, 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이며, 본 발명은 청구항의 범주에 의해 정의될 뿐이다. 명세서 전체에 걸쳐 동일 참조 부호는 동일 구성 요소를 지칭한다.Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention pertains It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.

이하에서는 첨부된 도면을 참조하여 본 발명에 따른 실시예들을 상세히 설명한다.Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명의 실시예에 따른 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법의 과정을 나타낸 도면이다. 본 발명의 실시예에서는 폴리머 계열의 인공 관절이 인공 관절을 구성하는 베어링 요소인 것을 예로 한다.2 is a view showing the process of a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique according to an embodiment of the present invention. In the embodiment of the present invention, it is exemplified that the polymer-based artificial joint is a bearing element constituting the artificial joint.

먼저, 인공 관절을 챔버 내부로 인입시켜(S11), 인공 관절을 챔버 내부에 위치시킨다. 여기서, 본 발명의 실시예에서는 후술할 원자층 증착 기법을 통해 박막을 형성할 때, 인공 관절의 표면의 균일성을 확보하기 위해 인공 관절의 표면을 표면 처리하는 과정(S10)을 포함하는 것을 예로 한다.First, the artificial joint is introduced into the chamber (S11), and the artificial joint is positioned inside the chamber. Here, in the embodiment of the present invention, when the thin film is formed through the atomic layer deposition technique to be described later, for example, the process (S10) of surface-treating the surface of the artificial joint is included in order to secure the uniformity of the surface of the artificial joint. do.

본 발명의 실시예에 따른 표면 처리 과정은 폴리싱(Polishing) 과정과, 세척 과정과, 플라즈마 처리 과정을 포함하는 것을 예로 한다.For example, the surface treatment process according to an embodiment of the present invention includes a polishing process, a cleaning process, and a plasma treatment process.

본 발명의 실시예에 따른 폴리싱 과정은 폴리싱 장비에 의한 폴리싱 과정과, 폴리싱 천을 이용한 폴리싱 과정을 포함하는 것을 예로 한다. 폴리싱 장비에 의한 폴리싱 과정은 샌드 페이퍼(Sand paper)를 사용하여 회전시켜 표면 처리가 진행될 수 있으며, 폴리싱 천을 이용한 폴리싱을 통해 최종적인 폴리싱 과정을 수행할 수 있다.The polishing process according to the embodiment of the present invention is exemplified by including a polishing process using a polishing equipment and a polishing process using a polishing cloth. In the polishing process by the polishing equipment, the surface treatment may be performed by rotating using sand paper, and the final polishing process may be performed through polishing using a polishing cloth.

본 발명의 실시예에 따른 세척 과정은 에탄올을 이용한 1차 세척 과정과, 증류수를 이용한 2차 세척 과정을 포함하는 것을 예로 한다. 각각의 세척 과정은 10분 동안 수행되며, 초음파를 인가하여 세척하는 것을 예로 한다.The washing process according to an embodiment of the present invention is exemplified to include a primary washing process using ethanol and a secondary washing process using distilled water. Each washing process is performed for 10 minutes, and washing by applying ultrasonic waves is an example.

상기와 같은 표면 처리의 각 과정들 사이에서는 에어 플로우(Air blow)를 통해 표면에서 생성된 미세 입자를 제거하는 과정을 포함할 수 있다.Between each process of the surface treatment as described above, it may include a process of removing fine particles generated from the surface through an air blow.

상기와 같이 세척 과정이 끝난 인공 관절에 대해, 본 발명의 실시예에서는 인공 관절의 표면에 플라즈마 처리를 진행할 수 있다. 본 발명의 실시예에서는 펨토 사이언스 플라즈마(Femto science plasma) 장비를 이용하여 플라즈마 처리를 수행하는 것을 예로 한다. 이를 통해 인공 관절의 표면에 작용기(functional group)가 생성되어, 이후의 과정에서 인공 관절의 표면에 박막을 증착할 때, 초기 증착 과정에 효과적인 표면 조건을 생성할 수 있게 된다.For the artificial joint after the cleaning process as described above, in an embodiment of the present invention, plasma treatment may be performed on the surface of the artificial joint. In an embodiment of the present invention, plasma processing is performed using a femto science plasma equipment as an example. Through this, a functional group is created on the surface of the artificial joint, and when a thin film is deposited on the surface of the artificial joint in a subsequent process, effective surface conditions can be created in the initial deposition process.

상기와 같은 표면 처리 과정이 완료되면, 표면 처리된 인공 관절을 원자층 증착을 위한 ALD 장비의 챔버 내부로 인입시켜(S11), 인공 관절을 챔버 내부에 위치시킨다.When the surface treatment process as described above is completed, the surface-treated artificial joint is introduced into the chamber of the ALD equipment for atomic layer deposition (S11), and the artificial joint is positioned inside the chamber.

본 발명의 실시예에서는 원자층 증착 기법을 통한 박막의 형성 전에, 챔버 내부의 온도를 기 설정된 예열 온도로 예열하는 과정(S12)을 포함하는 것을 예로 한다.In an embodiment of the present invention, before the formation of the thin film through the atomic layer deposition technique, it is exemplified that the process ( S12 ) of preheating the temperature inside the chamber to a preset preheating temperature is included.

폴리머 계열의 소재는 금속이나 웨이퍼, 또는 필름에 비해 상대적으로 열 특성이 낮기 때문에, 챔버 내부의 온도를 기 설정된 예열 온도로 유지시켜 줌으로써, 증착 효율을 향상시킬 수 있다. 본 발명의 실시예에서는 예열 온도로 60℃에서 145℃ 사이에서 결정되며, 바람직하게는 100℃ 내지 110℃ 사이에서 결정될 수 있다.Since the polymer-based material has relatively low thermal properties compared to a metal, a wafer, or a film, the deposition efficiency can be improved by maintaining the temperature inside the chamber at a preset preheating temperature. In an embodiment of the present invention, the preheating temperature is determined between 60°C and 145°C, preferably between 100°C and 110°C.

상기와 같이, 챔버 내부가 예열 온도로 예열되면, 원자층 증착 기법을 이용하여 폴리머 계열의 인공 관절의 표면에 박막을 형성하는 과정이 진행된다.As described above, when the inside of the chamber is preheated to a preheating temperature, a process of forming a thin film on the surface of the polymer-based artificial joint by using the atomic layer deposition technique proceeds.

먼저, 세라믹 소재가 함유된 제1 전구체를 챔버 내부로 퍼징(Purging)한다(S13). 본 발명에서는 세라믹 소재로 산화 아연(Zinc oxide)이 적용되는 것을 예로 하며, 이에 따라 인공 관절의 표면에 산화 아연 세라믹 박막이 형성될 수 있다. 본 발명에서는 산화 아연을 포함하는 제1 전구체로 DEZn((C2H5)2Zn)가 적용되는 것을 예로 한다.First, the first precursor containing the ceramic material is purged into the chamber (S13). In the present invention, zinc oxide is applied as a ceramic material as an example, and accordingly, a zinc oxide ceramic thin film may be formed on the surface of the artificial joint. In the present invention, DEZn ((C2H5)2Zn) is applied as the first precursor containing zinc oxide as an example.

그런 다음, 챔버 내부로 불활성 기체가 퍼징된다(S14). 불활성 기체의 퍼징을 통해 챔버 내부에 잔존하는 잔여 물질들을 챔버 외부로 제거할 수 있게 된다.Then, the inert gas is purged into the chamber (S14). Residual materials remaining in the chamber may be removed to the outside of the chamber through purging of the inert gas.

불활성 기체의 퍼징이 완료되면, 수분이 함유된 제2 전구체를 챔버 내부로 퍼징한다(S15). 본 발명의 실시예에서는 제2 전구체로 증류수가 적용되는 것을 예로 한다.When the purging of the inert gas is completed, the second precursor containing moisture is purged into the chamber (S15). In an embodiment of the present invention, distilled water is applied as the second precursor as an example.

제2 전구체의 퍼징이 완료되면, 마찬가지로, 불활성 기체를 챔버 내부로 퍼징하여(S16), 챔버 내부에 잔존하는 잔여 물질들을 챔버 외부로 제거하게 된다. 본 발명에서는 불활성 기체로 질소 기체 또는 아르곤 기체가 사용되는 것을 예로 한다.When the purging of the second precursor is completed, similarly, the inert gas is purged into the chamber ( S16 ), and the remaining materials remaining in the chamber are removed to the outside of the chamber. In the present invention, it is exemplified that nitrogen gas or argon gas is used as the inert gas.

또한, 본 발명의 실시예에서는 불활성 기체의 퍼징하는 수행 시간을 제1 전구체를 퍼징하거나 제2 전구체를 퍼징하는 수행 시간보다 길게 적용하는 것을 예로 한다. 일 예로, 제1 전구체 및 제2 전구체를 퍼징하는 수행 시간을 0.5초로 하고, 불활성 기체를 퍼징하는 수행 시간을 30초로 적용하는 것을 예로 한다.In addition, in an embodiment of the present invention, it is exemplified that the time for purging the inert gas is longer than the time for purging the first precursor or purging the second precursor. As an example, it is assumed that the execution time of purging the first precursor and the second precursor is 0.5 seconds, and the execution time of purging the inert gas is applied as 30 seconds.

상기와 같은 과정, 즉 제1 전구체의 퍼징, 불활성 기체의 퍼징, 제2 전구체의 퍼징, 불활성 기체의 퍼징의 과정을 기 설정된 공정 횟수인 N회 수행하는 과정(S17)에서 원자층 증착 기법에 따라 인공 관절의 표면에 세라믹 소재의 박막이 형성 가능하게 된다. 본 발명에서는 상기와 같은 과정을 1800회 수행하는 것을 예로 한다.According to the atomic layer deposition technique in the process (S17) of performing the process as described above, that is, purging the first precursor, purging the inert gas, purging the second precursor, and purging the inert gas N times a preset number of processes A thin film of ceramic material can be formed on the surface of the artificial joint. In the present invention, it is exemplified that the above process is performed 1800 times.

이하에서는, 도 3 내지 도 9를 참조하여 본 발명의 실시예에 따른 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 대한 실험 결과에 대해 설명한다.Hereinafter, experimental results of a method for forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique according to an embodiment of the present invention will be described with reference to FIGS. 3 to 9 .

실험에는 폴리머 계열의 인공 관절로 UHMW-PE 재질의 소재가 사용되었으며, 10x10x6mm 블록 형태의 시편이 사용되었다. 앞서 설명한 바와 같이, 표면 처리 과정을 수행하였으며, 샌드 페이퍼 #400, #800, #1600, #2400을 사용해서 회전형태의 폴리싱 장비를 통해 표면 처리를 한 후, 폴리싱 천을 이용하여 최종 폴리싱을 진행하였으며, 여기에는 다이아몬드 서스펜션(Diamond suspension) 1㎛ 입자가 사용되었다.In the experiment, a UHMW-PE material was used as a polymer-based artificial joint, and a 10x10x6mm block-shaped specimen was used. As described above, the surface treatment process was performed, and after surface treatment was performed using a rotary type polishing equipment using sand paper #400, #800, #1600, #2400, the final polishing was performed using a polishing cloth. , Here, diamond suspension 1㎛ particles were used.

그런 다음, 아이소 에탄올(Iso ethanol)을 사용하여 10분, 증류수에서 10분동안 초음파를 이용하여 세척이 진행되었으며, 모든 과정 사이에 에어 블로우(Air blow)를 통해 표면에서 생성되는 미세입자를 제거하였다.Then, washing was carried out using ultrasonic waves for 10 minutes in distilled water and 10 minutes in distilled water using isoethanol, and fine particles generated on the surface were removed through air blow between all processes. .

그리고, 펨토 사이언스 플라즈마(Femto science plasma) 장비를 이용하여 플라즈마 처리가 수행되었으며, 100W, 60초 조건에서 진행되었다. 본 발명의 실시예에 따른 실험에서는 챔버 내부의 예열 온도를 각각 60℃, 70℃, 80℃, 90℃, 100℃, 110℃, 120℃, 130℃, 140℃로 설정하여 각각 수행되었다. In addition, plasma treatment was performed using a femto science plasma equipment, and was performed under conditions of 100 W and 60 seconds. In the experiment according to an embodiment of the present invention, the preheating temperature inside the chamber was set to 60°C, 70°C, 80°C, 90°C, 100°C, 110°C, 120°C, 130°C, and 140°C, respectively.

각각의 예열 온도에서 챔버 내부에서의 증착은 제1 전구체에 대해 0.5초, 불활성 기체 30초, 제2 전구체에 대해 0.5초로 진행되었으며, 제1 전구체, 불활성 기체, 제2 전구체, 불활성 기체를 하나의 사이클로 하여 총 1800 사이클로 증착한 후, 상온 냉각하였다.At each preheating temperature, the deposition inside the chamber proceeded for 0.5 seconds for the first precursor, 30 seconds for the inert gas, and 0.5 seconds for the second precursor, and the first precursor, the inert gas, the second precursor, and the inert gas were combined into one After deposition for a total of 1800 cycles as a cycle, it was cooled to room temperature.

도 3은 각각의 예열 온도에서의 박막의 두께를 확인하기 위해 촬영된 SEM 이미지이다. 박막 두께의 확인에 있어, 한 사이클 당 박막 형성 두께가 급격하게 증가하거나 급격하게 감소하는 구간이 있는 경우, 증착이 불안정하게 되는 온도이기 때문에 박막 형성률이 일정한 구간을 확인할 수 있다.3 is an SEM image taken to confirm the thickness of the thin film at each preheating temperature. In the confirmation of the thin film thickness, if there is a section in which the thickness of the thin film is rapidly increased or rapidly decreased per cycle, it is possible to check a section in which the thin film formation rate is constant because the temperature at which the deposition becomes unstable.

도 4는 예열 온도에 따른 박막 성장률을 나타낸 그래프이다. 60℃에서 90℃의 구간에서 온도에 따라 박막 성장률이 급격히 올라가는 것으로 나타나, 해당 온도 구군에서는 박막 형성이 다소 불안정하다는 것을 확인하였다. 실험 결과, 100℃에서 130℃ 사이의 구간에서 박막 성장률이 안정적으로 이루어지는 것을 확인할 수 있었다.4 is a graph showing the thin film growth rate according to the preheating temperature. The thin film growth rate rapidly increased according to the temperature in the range of 60°C to 90°C, confirming that the thin film formation was somewhat unstable in the corresponding temperature group. As a result of the experiment, it was confirmed that the thin film growth rate was stably performed in the section between 100 °C and 130 °C.

도 5는 예열 온도에 따른 박막의 표면 상태를 관찰한 것으로, SEM을 통해 촬영된 이미지이다. 도 5에서는 60℃, 80℃, 90℃, 100℃, 110℃, 140℃에서 관찰된 이미지를 나타내고 있다.5 is an observation of the surface state of the thin film according to the preheating temperature, and is an image taken through SEM. 5 shows images observed at 60°C, 80°C, 90°C, 100°C, 110°C, and 140°C.

도 5에 나타난 바와 같이, 60℃에서 90℃ 사이에서는 박막을 형성하는 입자의 크기가 균일하지 않음을 확인할 수 있다. 그리고, 140℃의 고온에서도 입자 크기가 커지면서 불균일한 형태를 보이는 것을 확인할 수 있다.As shown in FIG. 5 , it can be confirmed that the size of the particles forming the thin film is not uniform between 60°C and 90°C. And, it can be seen that the particle size increases even at a high temperature of 140° C. and shows a non-uniform shape.

이에, 앞서 설명한 박막 성장률과 도 5에 도시된 바와 같은 표면의 입자 크기의 균일도를 고려할 때, 예열 온도가 100℃에서 110℃ 사이로 설정되는 것이 바람직함을 확인할 수 있었다.Accordingly, it was confirmed that the preheating temperature is preferably set between 100°C and 110°C in consideration of the growth rate of the thin film described above and the uniformity of the particle size of the surface as shown in FIG. 5 .

한편, 기계적 특성을 측정하기 위해, 회전 운동을 하는 Ball on disk wear 장비를 사용하였다. 상대적으로 내마모에 강한 물성을 가지고 현재 인공 관절에서도 사용되는 세라믹 계열의 Si₃N₄ ball(radius 6mm)을 카운터 파트(Counter part)로 하여 실험을 진행하였다.On the other hand, in order to measure the mechanical properties, a ball on disk wear equipment with rotational motion was used. An experiment was conducted using a ceramic-based Si₃N₄ ball (radius 6mm) as a counter part, which has relatively strong physical properties against abrasion and is currently used in artificial joints.

실험 조건은 3N 수직하중, 60RPM 속도로 진행하였으며, 4mm 편심을 주어 wear track의 radius가 4mm가 되도록 하였다. 설정한 실험 조건은 실제 인공 관절에서 생기는 접촉 압력(Contact pressure)보다 33배 큰 값으로, 이러한 조건 하에서 가속화 실험이 진행되었다. Experimental conditions were 3N vertical load, 60RPM speed, and 4mm eccentricity was applied so that the radius of the wear track was 4mm. The set experimental condition was 33 times greater than the contact pressure generated in the actual artificial joint, and the acceleration experiment was conducted under these conditions.

각각의 슬라이딩 거리(Sliding distance)에 따른 박막의 마모 성능(wear performance)를 확인하기 위해서 800, 1600, 3200, 6400m 슬라이딩 거리 조건을 설정하여 마모 실험을 진행하였다.In order to check the wear performance of the thin film according to each sliding distance, a wear test was conducted by setting the conditions of 800, 1600, 3200, and 6400m sliding distance.

도 6은 마모 실험의 결과로 마모된 영역에 대한 SEM 이미지를 나타낸 도면이다. 도 6의 (a)는 슬라이딩 거리 800m, 도 5의 (b)는 슬라이딩 거리 1600m, 도 6의 (c)는 슬라이딩 거리 3200m, 도 5의 (d)는 슬라이딩 거리 6400m에서의 SEM 이미지이다.6 is a view showing an SEM image of a worn area as a result of a wear test. 6 (a) is a sliding distance of 800 m, FIG. 5 (b) is a sliding distance of 1600 m, FIG. 6 (c) is a sliding distance of 3200 m, FIG. 5 (d) is an SEM image at a sliding distance of 6400 m.

도 7 및 도 8은 마모 실홈 이후의 표면의 화학 조성을 확인한 결과를 나타낸 도면이다. 도 7의 (a)는 슬라이딩 거리 800m, 도 7의 (b)는 슬라이딩 거리 1600m, 도 8의 (a)는 슬라이딩 거리 3200m, 도 8의 (b)는 슬라이딩 거리 6400m에서의 결과이다. 그리고, 도 9는 슬라이딩 거리에 따른 박막 형성 물질인 아연 원소의 비율을 나타난 도면이다.7 and 8 are views showing the results of confirming the chemical composition of the surface after the wear seal groove. 7A is a sliding distance of 800m, FIG. 7B is a sliding distance of 1600m, FIG. 8A is a sliding distance of 3200m, and FIG. 8B is a result of a sliding distance of 6400m. And, FIG. 9 is a view showing the ratio of zinc element, which is a thin film-forming material, according to the sliding distance.

도 9에 도시된 바와 같이, 슬라이딩 거리에 따른 박막 형성 물질인 아연 원소의 비율이 줄어드는 것을 확인할 수 있으며, 6400m까지 소량 존재하는 것을 확인할 수 있다. 이를 통해, 6400mm까지, 아연 박막이 마모를 견디며 내부의 폴리머 계열의 소재를 보호하고 있음을 확인할 수 있다.As shown in FIG. 9 , it can be confirmed that the ratio of zinc element, which is a thin film forming material, is reduced according to the sliding distance, and it can be confirmed that a small amount is present up to 6400 m. Through this, it can be confirmed that up to 6400 mm, the zinc thin film withstands abrasion and protects the inner polymer-based material.

비록 본 발명의 몇몇 실시예들이 도시되고 설명되었지만, 본 발명이 속하는 기술분야의 통상의 지식을 가진 당업자라면 본 발명의 원칙이나 정신에서 벗어나지 않으면서 본 실시예를 변형할 수 있음을 알 수 있을 것이다. 발명의 범위는 첨부된 청구항과 그 균등물에 의해 정해질 것이다.Although several embodiments of the present invention have been shown and described, it will be apparent to those skilled in the art that changes may be made to these embodiments without departing from the spirit or spirit of the invention. . The scope of the invention will be defined by the appended claims and their equivalents.

Claims (13)

원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법에 있어서,
(a) 상기 인공 관절을 챔버 내부에 위치시키는 단계와,
(b) 세라믹 소재가 함유된 제1 전구체를 상기 챔버 내부로 퍼징하는 단계와,
(c) 수분이 함유된 제2 전구체를 상기 챔버 내부로 퍼징하는 단계를 포함하며;
상기 원자층 증착 기법에 따라 상기 (b) 단계 및 상기 (c) 단계가 기 설정된 공정 횟수만큼 반복 수행되어 상기 인공 관절의 표면에 상기 세라믹 소재의 박막이 형성되는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
In the method of forming a thin film on a polymer-based artificial joint based on the atomic layer deposition technique,
(a) positioning the artificial joint inside the chamber;
(b) purging the first precursor containing the ceramic material into the chamber;
(c) purging a second precursor containing moisture into the chamber;
In the atomic layer deposition technique, characterized in that the steps (b) and (c) are repeated as many times as the preset number of processes according to the atomic layer deposition technique to form the thin film of the ceramic material on the surface of the artificial joint A method of forming a thin film on a polymer-based artificial joint.
제1항에 있어서,
(d) 상기 (b) 단계의 수행 후 상기 (c) 단계의 수행 전, 상기 (c) 단계의 수행 후 상기 (b) 단계의 수행 전에, 상기 챔버 내부로 비활성 기체를 퍼징하는 단계를 더 포함하는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
According to claim 1,
(d) after performing step (b), before performing step (c), after performing step (c), and before performing step (b), purging an inert gas into the chamber A method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that
제2항에 있어서,
상기 세라믹 소재는 산화 아연을 포함하는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
3. The method of claim 2,
The method of forming a thin film on a polymer-based artificial joint based on the atomic layer deposition technique, characterized in that the ceramic material includes zinc oxide.
제3항에 있어서,
상기 제1 전구체는 DEZn((C2H5)2Zn)인 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
4. The method of claim 3,
The method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that the first precursor is DEZn ((C2H5)2Zn).
제4항에 있어서,
상기 제2 전구체는 증류수인 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
5. The method of claim 4,
The method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that the second precursor is distilled water.
제4항에 있어서,
상기 비활성 기체는 질소 또는 아르곤을 포함하는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
5. The method of claim 4,
The inert gas is a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that it contains nitrogen or argon.
제4항에 있어서,
상기 (d) 단계의 수행 시간은 상기 (b) 단계 및 상기 (c) 단계의 수행 시간은 길게 수행되는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
5. The method of claim 4,
The method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that the execution time of the step (d) is performed for a long time for the steps (b) and (c).
제7항에 있어서,
상기 (b) 단계 및 상기 (c) 단계의 수행 시간은 0.5초이고,
상기 (d) 단계의 수행 시간은 30초인 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
8. The method of claim 7,
The execution time of step (b) and step (c) is 0.5 seconds,
A method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that the execution time of step (d) is 30 seconds.
제4항에 있어서,
상기 (a) 단계의 수행 후 상기 챔버 내부의 온도를 기 설정된 예열 온도로 예열하는 단계를 더 포함하는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
5. The method of claim 4,
Method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that it further comprises the step of preheating the temperature inside the chamber to a preset preheating temperature after performing step (a).
제9항에 있어서,
상기 예열 온도는 100℃ 내지 110℃의 범위 내에서 선택되는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
10. The method of claim 9,
The preheating temperature is a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that it is selected within the range of 100 ℃ to 110 ℃.
제4항에 있어서,
상기 (a) 단계의 수행 전에 상기 인공 관절을 표면 처리하는 단계를 더 포함하는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
5. The method of claim 4,
Method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that it further comprises the step of surface-treating the artificial joint before performing step (a).
제11항에 있어서,
상기 인공 관절을 표면 처리하는 단계는
상기 인공 관절의 표면을 폴리싱(Polishing)하는 단계와;
폴리싱(Polishing)한 상기 인공 관절을 세척하는 단계와;
상기 인공 관절의 표면을 플라즈마 처리하는 단계를 포함하는 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
12. The method of claim 11,
The step of surface-treating the artificial joint is
polishing the surface of the artificial joint;
washing the artificial joint by polishing;
A method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, comprising the step of plasma-treating the surface of the artificial joint.
제1항에 있어서,
상기 인공 관절은 베어링 요소인 것을 특징으로 하는 원자층 증착 기법에 기반한 폴리머 계열의 인공 관절에 박막을 형성하는 방법.
According to claim 1,
The artificial joint is a method of forming a thin film on a polymer-based artificial joint based on an atomic layer deposition technique, characterized in that it is a bearing element.
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