KR20220121495A - A black photo sensitive resin composition, an organic light emitting diode prepared by using the composition, and a display device comprising the organic light emitting diode - Google Patents
A black photo sensitive resin composition, an organic light emitting diode prepared by using the composition, and a display device comprising the organic light emitting diode Download PDFInfo
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- KR20220121495A KR20220121495A KR1020210025646A KR20210025646A KR20220121495A KR 20220121495 A KR20220121495 A KR 20220121495A KR 1020210025646 A KR1020210025646 A KR 1020210025646A KR 20210025646 A KR20210025646 A KR 20210025646A KR 20220121495 A KR20220121495 A KR 20220121495A
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- KR
- South Korea
- Prior art keywords
- resin composition
- photosensitive resin
- organic light
- light emitting
- black photosensitive
- Prior art date
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Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
- C08K5/0041—Optical brightening agents, organic pigments
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- H01L27/3246—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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Abstract
Description
본 발명은 흑색 감광성 수지 조성물, 이를 사용하여 제조된 화소정의막, 상기 화소정의막을 포함하는 유기발광소자 및 상기 유기발광소자를 포함하는 표시장치에 관한 것이다.The present invention relates to a black photosensitive resin composition, a pixel defining layer manufactured using the same, an organic light emitting device including the pixel defining layer, and a display device including the organic light emitting device.
평판표시소자(flat panel display device) 중 하나인 유기발광소자(organic light emitting diode)는 자체 발광형이기 때문에 액정표시장치(liquid crystal display device)에 비해 시야각 및 콘트라스트(contrast) 등이 우수하며, 백라이트(back light)가 필요하지 않기 때문에 경량·박형이 가능하고, 소비전력 측면에서도 유리하다. 또한 직류 저전압 구동이 가능하고 응답속도가 빠르며, 구성되는 소자 모두가 고체이기 때문에 외부 충격에 강하고, 사용 온도 범위도 넓을 뿐만 아니라 제조 비용 측면에서도 저렴하다는 장점을 가지고 있다. 특히, 상기 유기발광소자의 제조공정은 액정표시장치나 PDP(plasma display panel)와는 달리 증착/식각(deposition/etching) 공정의 반복 및 인캡슐레이션(encapsulation) 공정이 전부라고 할 수 있기 때문에 공정이 매우 단순하다는 장점이 있다.Since an organic light emitting diode, which is one of flat panel display devices, is a self-emissive type, it has superior viewing angle and contrast compared to a liquid crystal display device, and a backlight. Because back light is not required, it is lightweight and thin, and it is advantageous in terms of power consumption. In addition, DC low voltage driving is possible, the response speed is fast, and since all components are solid, it is strong against external shocks, has a wide operating temperature range, and is inexpensive in terms of manufacturing cost. In particular, in the manufacturing process of the organic light emitting device, unlike a liquid crystal display device or a plasma display panel (PDP), it can be said that repetition of the deposition/etching process and the encapsulation process are all of the process. It has the advantage of being very simple.
상기 유기발광소자는 콘트라스트 및 휘도가 좋아야 하는데, 외광이 밝을 경우 콘트라스트가 좋지 않다. 특히 배면 발광형인 유기발광소자의 경우, 소자의 음극이 반사율이 우수한 금속으로 되어있기 때문에, 외부에서 소자내부로 들어오는 빛이 음극면에 반사되어 발광층에서 나오는 빛과 섞이게 된다. 이와 같은 문제를 해결하기 위하여 현재 대부분의 유기발광소자는 투명기판 하부에 원편광판(circular polarizer)을 형성함으로써 음극에 의한 외부 입사광의 반사를 줄이고 있다. 즉, 외부에서 빛이 입사될 때, 상기 원편광판에 의해 절반이 차단되고, 차단되지 않은 나머지 반은 음극면에 반사되어 나올 때 차단됨으로써, 외광에 의한 콘트라스트 저하를 억제할 수 있다.The organic light emitting device should have good contrast and luminance, but when external light is bright, the contrast is not good. In particular, in the case of a bottom emission type organic light emitting device, since the cathode of the device is made of a metal having excellent reflectivity, light entering the device from the outside is reflected on the cathode surface and mixed with the light emitted from the light emitting layer. In order to solve this problem, most organic light emitting devices currently reduce the reflection of external incident light by the cathode by forming a circular polarizer under the transparent substrate. That is, when light is incident from the outside, half is blocked by the circularly polarizing plate, and the other half that is not blocked is blocked when reflected on the cathode surface, thereby suppressing a decrease in contrast caused by external light.
그러나 상술한 종래의 투명기판 위에 원편광판을 붙인 유기발광소자는 음극에 의한 외부 입사광의 반사를 크게 줄여줌과 동시에 유기 발광층으로부터 외부로 발산되는 빛까지도 차단하기 때문에, 콘트라스트는 향상되지만 휘도는 50%이상 감소되며, 원편광판의 도입으로 고비용이 야기되는 문제점이 있었다.However, the organic light emitting device having a circularly polarizing plate attached to the above-described conventional transparent substrate greatly reduces the reflection of external incident light by the cathode and at the same time blocks even the light emitted from the organic light emitting layer to the outside, so the contrast is improved but the luminance is 50% There was a problem in that the above was reduced, and high cost was caused by the introduction of the circularly polarizing plate.
상기 문제점을 해결하기 위해 외부 입사광을 흡수하여 콘트라스트를 향상시키는 블랙 화소정의막(pixel defined layer)을 형성할 수 있다. 블랙 화소정의막은 포토리소그래피 공정을 통해 정밀하게 패터닝되며, 유기발광소자 픽셀을 제작하는 고압 증착 공정을 거치게 된다. 하지만 종래의 액정표시장치(liquid crystal display device)에 사용되는 BM(Black Matrix)용 감광성 수지 조성물은 유기발광소자 픽셀을 제작하는 고압 증착 공정 중 유기발광소자 구동에 치명적인 가스 성분이 용출되어 휘도 저하를 유발할 수 있고, 심한 경우 유기발광소자의 구동이 불가능하게 되는 문제점이 있다.In order to solve the above problem, a black pixel defined layer that absorbs external incident light to improve contrast may be formed. The black pixel-defining layer is precisely patterned through a photolithography process, and then subjected to a high-pressure deposition process for manufacturing an organic light-emitting device pixel. However, in the conventional liquid crystal display device (liquid crystal display device), the photosensitive resin composition for BM (Black Matrix) releases a gas component fatal to driving the organic light emitting device during the high-pressure deposition process of manufacturing the organic light emitting device pixel, thereby reducing the luminance. In severe cases, there is a problem in that driving of the organic light emitting device becomes impossible.
관련하여, 대한민국 등록특허 제10-0814660호는 아크릴(acrylic) 화합물을 함유하는 흑색 감광성 수지 조성물을 개시하고 있으나, 고압 증착 공정 과정에서의 아웃 가스 특성이 충분치 못한 것으로 보인다. 이에 유기 발광 표시 장치를 제조하는 데 있어서 고압 증착 과정 중에 유기 발광 소자 구동에 치명적인 아웃가스 성분의 용출을 최소화하며, 우수한 콘트라스트 및 휘도를 가지는 유기 발광 표시 장치를 제조할 수 있는 새로운 흑색 감광성 수지 조성물의 개발이 요구된다.In relation to this, Korean Patent Registration No. 10-0814660 discloses a black photosensitive resin composition containing an acrylic compound, but it seems that the outgas characteristics in the high-pressure deposition process are not sufficient. Accordingly, in manufacturing an organic light emitting display device, a new black photosensitive resin composition capable of manufacturing an organic light emitting display device having excellent contrast and luminance while minimizing the elution of outgas components fatal to driving the organic light emitting device during the high-pressure deposition process. development is required.
본 발명은, 상기 종래 기술의 문제를 해결하기 위하여 안출된 것으로서, 유기발광소자 픽셀을 제작을 위한 고압의 증착 공정을 거치는 경우에도 소자 구동에 치명적인 가스 성분이 용출이 적은 신뢰성이 우수한 흑색 감광성 수지 조성물을 제공하는 것을 목적으로 한다.The present invention, as devised to solve the problems of the prior art, is a black photosensitive resin composition having excellent reliability with little elution of gas components fatal to device driving even when a high-pressure deposition process for manufacturing an organic light-emitting device pixel is performed aims to provide
또한, 본 발명은 상기 흑색 감광성 수지 조성물로 제조된 화소정의막, 상기 화소정의막을 포함하는 유기발광소자, 및 상기 유기발광소자를 포함하는 표시장치를 제공하는 것을 목적으로 한다.Another object of the present invention is to provide a pixel defining layer made of the black photosensitive resin composition, an organic light emitting device including the pixel defining layer, and a display device including the organic light emitting device.
그러나, 본원이 해결하고자 하는 과제는 이상에서 언급한 과제로 제한되지 않으며, 언급되지 않은 또 다른 과제들은 아래의 기재로부터 통상의 기술자에게 명확하게 이해될 수 있을 것이다.However, the problem to be solved by the present application is not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.
상기 목적을 달성하기 위해, 본 발명은 착색제, 광중합성 화합물, 알칼리 가용성 수지, 광중합 개시제 및 용제를 포함하며, 상기 광중합성 화합물은 15 관능 이상의 덴드리머 아크릴레이트 올리고머를 포함하는 것을 특징으로 하는, 흑색 감광성 수지 조성물을 제공한다.In order to achieve the above object, the present invention comprises a colorant, a photopolymerizable compound, an alkali-soluble resin, a photoinitiator and a solvent, wherein the photopolymerizable compound comprises a dendrimer acrylate oligomer having a function of 15 or more, black photosensitivity A resin composition is provided.
또한, 본 발명은 상기 본 발명의 흑색 감광성 수지 조성물로 제조된 화소정의막을 제공한다.In addition, the present invention provides a pixel defining film made of the black photosensitive resin composition of the present invention.
또한, 본 발명은 상기 본 발명의 화소정의막을 포함하는 유기발광소자를 제공한다.In addition, the present invention provides an organic light emitting device including the pixel defining layer of the present invention.
또한, 본 발명은 상기 본 발명의 유기발광소자를 포함하는 표시장치를 제공한다.In addition, the present invention provides a display device including the organic light emitting device of the present invention.
본 발명의 흑색 감광성 수지 조성물은 차광성을 부여하기 위해 포함되는 흑색 안료가 감광성을 방해하여 광 가교가 효율적으로 일어나지 못하여 발생하는 노광 투과도의 한계와, 이로 인한 현상 공정 상의 불리함을 효과적으로 방지할 수 있는 화소정의막을 제공할 수 있다.The black photosensitive resin composition of the present invention can effectively prevent the limitation of exposure transmittance caused by the black pigment included to impart light-shielding properties interfering with photosensitivity and thus not efficiently photocrosslinking, and disadvantages in the development process caused by this. It is possible to provide a pixel defining layer with
특히, 유기발광소자 픽셀을 제작을 위한 고압의 증착 공정에서 아웃가스 발생 특성이 우수한 효과를 나타내므로, 각 화소의 혼색을 방지하고, 외광 반사를 효과적으로 방지할 수 있는 화소정의막을 제공할 수 있다. 또한, 본 발명의 흑색 감광성 수지 조성물은 포스트 베이크 전후의 막 두께 변화를 최소화할 수 있고, 연필경도, 밀착성 및 내화학성(신뢰성 및 현상성)이 우수한 막을 제조할 수 있다.In particular, it is possible to provide a pixel-defining film capable of preventing color mixing of each pixel and effectively preventing external light reflection since it exhibits an excellent effect of outgas generation characteristics in a high-pressure deposition process for manufacturing an organic light-emitting device pixel. In addition, the black photosensitive resin composition of the present invention can minimize the change in film thickness before and after post-baking, and can produce a film excellent in pencil hardness, adhesion, and chemical resistance (reliability and developability).
따라서 본 발명의 흑색 감광성 수지 조성물은 유기발광소자 제조에 유용하게 사용될 수 있다. Therefore, the black photosensitive resin composition of the present invention can be usefully used for manufacturing an organic light emitting device.
본 발명은, 착색제, 광중합성 화합물, 알칼리 가용성 수지, 광중합 개시제 및 용제를 포함하며, 상기 광중합성 화합물은 15 관능 이상의 덴드리머 아크릴레이트 올리고머를 포함하는 것을 특징으로 하는 흑색 감광성 수지 조성물에 관한 것이다.The present invention relates to a black photosensitive resin composition comprising a colorant, a photopolymerizable compound, an alkali-soluble resin, a photopolymerization initiator, and a solvent, wherein the photopolymerizable compound comprises a 15 or more functional dendrimer acrylate oligomer.
또한, 본 발명은 상기 흑색 감광성 수지 조성물로 제조된 화소정의막, 상기 화소정의막을 포함하는 유기발광소자, 및 상기 유기발광소자를 포함하는 표시장치에 관한 것이다.In addition, the present invention relates to a pixel defining film made of the black photosensitive resin composition, an organic light emitting device including the pixel defining layer, and a display device including the organic light emitting device.
본 발명의 흑색 감광성 수지 조성물은, 차광성을 부여하기 위해 포함되는 흑색 안료가 감광성을 방해하여 광 가교가 효율적으로 일어나지 못하여 발생하는 노광 투과도의 한계와, 이로 인한 현상 공정 상의 불리함을 효과적으로 방지할 수 있는 화소정의막을 제공할 수 있다.The black photosensitive resin composition of the present invention can effectively prevent the limit of exposure transmittance caused by the black pigment included to impart light-shielding properties interfering with photosensitivity and thus not efficiently photocrosslinking, and disadvantages in the development process due to this. It is possible to provide a pixel defining layer capable of
특히 유기발광소자 픽셀을 제작을 위한 고압의 증착 공정에서 아웃가스 발생 특성이 우수한 효과를 나타내므로, 각 화소의 혼색을 방지하고, 외광 반사를 효과적으로 방지할 수 있는 화소정의막을 제공할 수 있다.In particular, it is possible to provide a pixel-defining film capable of preventing color mixing of each pixel and effectively preventing external light reflection because it exhibits an excellent effect of generating outgas in a high-pressure deposition process for manufacturing an organic light-emitting device pixel.
또한, 본 발명의 흑색 감광성 수지 조성물은 포스트 베이크 전후의 막 두께 변화를 최소화할 수 있고, 연필경도, 밀착성 및 내화학성이 우수한 막을 제조할 수 있다.In addition, the black photosensitive resin composition of the present invention can minimize the change in film thickness before and after post-baking, and can produce a film excellent in pencil hardness, adhesion and chemical resistance.
< 흑색 감광성 수지 조성물 ><Black photosensitive resin composition>
본 발명의 흑색 감광성 수지 조성물은, 관능기를 특정 범위로 갖는 광중합성 화합물을 포함하는 것을 특징으로 하며, 구체적으로 착색제, 광중합성 화합물, 알칼리 가용성 수지, 및 광중합 개시제를 포함할 수 있고, 용제를 더 포함할 수 있으며, 필요에 따라 첨가제를 더 포함할 수 있다.The black photosensitive resin composition of the present invention is characterized in that it contains a photopolymerizable compound having a functional group in a specific range, and specifically may include a colorant, a photopolymerizable compound, an alkali-soluble resin, and a photoinitiator, and a solvent and may further include additives as necessary.
착색제coloring agent
본 발명에서 사용되는 착색제는 흑색 안료 또는 염료, 및 유기 안료 또는 염료로 이루어진 군으로부터 선택되는 1종 이상을 포함할 수 있다. 본 발명의 흑색 감광성 수지 조성물은 흑색 안료를 포함함으로써 차광성을 부여할 수 있다.The colorant used in the present invention may include at least one selected from the group consisting of a black pigment or dye, and an organic pigment or dye. The black photosensitive resin composition of this invention can provide light-shielding property by including a black pigment.
본 발명에서 사용되는 착색제는 흑색 안료 또는 염료와 같이 흑색 그 자체일 수도 있고, 여러 안료 또는 염료를 혼합하여 흑색을 얻을 수 있는 경우도 포함된다. 착색제는 가시광선에서 차광성이 존재한다면 특별히 제한되지 않는다.The colorant used in the present invention may be black itself, such as a black pigment or dye, or a case in which black can be obtained by mixing several pigments or dyes is included. The colorant is not particularly limited as long as it has light-shielding properties in visible light.
상기 흑색 안료로는, 특별한 제한 없이 공지된 것이 사용될 수 있으나, 구체적으로 아닐린 블랙, 락탐 블랙, 퍼릴렌 블랙, 카본블랙, 산화크롬, 산화철 및 티탄블랙 등이 사용될 수 있으며 이들은 1종 단독 또는 2종 이상의 조합으로 사용될 수 있다. 상기 카본 블랙으로는 채널 블랙, 퍼니스 블랙, 서멀 블랙, 램프 블랙 등을 들 수 있다.As the black pigment, a known black pigment may be used without particular limitation, and specifically, aniline black, lactam black, perylene black, carbon black, chromium oxide, iron oxide and titanium black may be used, and these may be used alone or in two types. A combination of the above may be used. Channel black, furnace black, thermal black, lamp black, etc. are mentioned as said carbon black.
필요한 경우 전기 절연성을 위해 표면에 수지가 피복된 카본 블랙이 사용될 수 있다. 상기 수지가 피복된 카본 블랙은 수지가 피복되어 있지 않은 카본 블랙에 비해 도전성이 낮기 때문에, 블랙 매트릭스 또는 화소정의막 형성 시에 우수한 전기 절연성을 부여 할 수 있는 이점이 있다.If necessary, carbon black coated with a resin on the surface may be used for electrical insulation. Since the resin-coated carbon black has lower conductivity than the non-resin-coated carbon black, there is an advantage in that excellent electrical insulation can be imparted when forming a black matrix or a pixel defining film.
착색제로 사용되는 흑색 안료 또는 염료, 및 유기 안료 또는 염료는 화소정의막에 요구되는 특성에 알맞게 함량을 조절할 수 있다. 상기 착색제는 상기 흑색 감광성 수지 조성물 총 중량에 대하여 1 내지 50 중량%, 바람직하게는 5 내지 40 중량%로 포함될 수 있다. 착색제의 함량이 상기 범위 미만인 경우 차광성이 충분하지 않으며, 상기 범위를 초과하는 경우 패터닝 후 얻어진 패턴의 품질이 저하될 우려가 있다.The content of the black pigment or dye used as the colorant and the organic pigment or dye may be adjusted to suit the characteristics required for the pixel defining layer. The colorant may be included in an amount of 1 to 50% by weight, preferably 5 to 40% by weight, based on the total weight of the black photosensitive resin composition. If the content of the colorant is less than the above range, light blocking properties are not sufficient, and if it exceeds the above range, there is a risk that the quality of the pattern obtained after patterning may be deteriorated.
광중합성 화합물photopolymerizable compound
본 발명에서 광중합성 화합물은, 후술하는 광중합 개시제의 작용으로 중합할 수 있는 화합물로서, 관능기를 특정 범위로 갖는 아크릴레이트 올리고머를 포함하는 광중합성 화합물을 사용하는 것을 특징으로 한다. The photopolymerizable compound in the present invention is a compound that can be polymerized by the action of a photopolymerization initiator to be described later, and is characterized by using a photopolymerizable compound including an acrylate oligomer having a functional group in a specific range.
본 발명의 광중합성 화합물은, 4 관능 이상 내지 8 관능 이하의 아크릴레이트 올리고머 및 15 관능 이상의 덴드리머 아크릴레이트 올리고머를 포함할 수 있다.The photopolymerizable compound of the present invention may include an acrylate oligomer having a function of 4 or more to 8 functional or less, and a dendrimer acrylate oligomer having 15 or more functions.
또한, 본 발명에서 광중합성 화합물은 4 관능 이상 내지 8 관능 이하의 아크릴레이트 올리고머를 포함할 수 있고, 바람직하게는, 5 관능 내지 6관능의 아크릴레이트 올리고머 또는 8 관능의 아크릴레이트 올리고머를 포함할 수 있다. 상기 4 관능 이상 내지 8 관능 이하의 아크릴레이트 올리고머를 포함함으로써 포스트베이크 단계에서 순테이퍼 패턴형성이 용이한 효과를 얻을 수 있다.In addition, in the present invention, the photopolymerizable compound may include an acrylate oligomer of tetrafunctional or more to 8 functional or less, and preferably, an acrylate oligomer of 5 to 6 functional or 8 functional acrylate oligomer. have. By including the acrylate oligomer having the above 4-functionality to 8-functionality or less, it is possible to obtain an effect of facilitating the formation of a forward taper pattern in the post-baking step.
상기 4 관능 이상 내지 8 관능 이하의 아크릴레이트 올리고머의 종류는 특별히 한정되지 않으며, 예를 들면, 트리메틸올프로판트리(메타)아크릴레이트, 에톡실레이티드트리메틸올프로판트리(메타)아크릴레이트, 프로폭실레이티드트리메틸올프로판트리(메타)아크릴레이트, 펜타에리스리톨트리(메타)아크릴레이트, 펜타에리스리톨테트라(메타)아크릴레이트, 디펜타에리스리톨트리(메타)아크릴레이트, 디펜타에리스리톨펜타(메타)아크릴레이트, 에톡실레이티드디펜타에리스리톨헥사(메타)아크릴레이트, 프로폭실레이티드디펜타에리스리톨헥사(메타)아크릴레이트, 디펜타에리스리톨헥사(메타)아크릴레이트 등을 들 수 있다.The type of the acrylate oligomer having a function of 4 or more to 8 functional or less is not particularly limited, and for example, trimethylolpropane tri(meth)acrylate, ethoxylated trimethylolpropane tri(meth)acrylate, propoxyl Rated trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, Ethoxylated dipentaerythritol hexa(meth)acrylate, propoxylated dipentaerythritol hexa(meth)acrylate, dipentaerythritol hexa(meth)acrylate, etc. are mentioned.
상기 15 관능 이상의 덴드리머 아크릴레이트 올리고머는, 바람직하게는 15 관능 이상 25 관능 미만일 수 있고, 더욱 바람직하게는 15 관능 이상 20 관능 이하일 수 있고, 가장 바람직하게는 18 관능 이상 20 관능 이하일 수 있다. 15 관능 이상의 덴드리머 아크릴레이트 올리고머를 포함함으로써 코팅 필름의 경도가 향상되어, 잔막율이 높아지는 효과를 얻을 수 있다.The 15 functional or more dendrimer acrylate oligomer may preferably have 15 functional or more and less than 25 functional, more preferably 15 or more and 20 functional or less, and most preferably 18 or more and 20 functional or less. By including the 15 functional or more dendrimer acrylate oligomer, the hardness of the coating film is improved, and the effect that the remaining film rate is increased can be obtained.
상기 15 관능 이상의 덴드리머 아크릴레이트 올리고머로는, 예를 들어, 미원상사 SP-1106, KPX그린켐 KOMERATE PM900, 신나카무라 U-15HA 등을 들 수 있다.As said 15 functional or more dendrimer acrylate oligomer, Miwon Corporation SP-1106, KPX Greenchem KOMERATE PM900, Shin-Nakamura U-15HA, etc. are mentioned, for example.
상기 광중합성 화합물의 총 중량에 대하여, 상기 4 관능 이상 8 관능 미만의 아크릴레이트 모노머 30 내지 90 중량%, 바람직하게는 50 내지 80 중량%; 및 상기 15 관능 이상의 덴드리머 아크릴레이트 올리고머 10 내지 50 중량%, 바람직하게는 20 내지 50 중량%를 포함할 수 있다. 상기 함량 범위를 만족하는 경우, 기존과 동일한 패턴을 유지하면서 경도가 향상되는 이점이 있다.Based on the total weight of the photopolymerizable compound, 30 to 90% by weight, preferably 50 to 80% by weight of the tetrafunctional or more and less than 8 functional acrylate monomer; and 10 to 50 wt%, preferably 20 to 50 wt% of the 15 or more functional dendrimer acrylate oligomer. When the content range is satisfied, there is an advantage in that hardness is improved while maintaining the same pattern as before.
또한, 본 발명에서 광중합성 화합물은, 경도 향상을 위해 8 관능 이상 15 관능 미만, 바람직하게는 8 관능 이상 10 관능 이하의 아크릴레이트 올리고머를 더 포함할 수 있다.In addition, in the present invention, the photopolymerizable compound may further include an acrylate oligomer of 8 functional or more and less than 15 functional, preferably 8 functional or more and 10 functional or less, in order to improve hardness.
상기 8 관능 이상 15 관능 미만의 아크릴레이트 올리고머로는, 예를 들어, 오사카유기화학 Viscoat#802, Viscoat#1000, 미원상사 SC-2153 등을 들 수 있다.As said 8 functional or more and less than 15 functional acrylate oligomer, Osaka Organic Chemical Viscoat #802, Viscoat #1000, Miwon Corporation SC-2153 etc. are mentioned, for example.
상기 광중합성 화합물은 흑색 감광성 수지 조성물 총 중량에 대하여 10 내지 70 중량%, 바람직하게는 20 내지 60 중량%로 사용될 수 있다. 광중합성 화합물이 상기 범위로 포함되면 화소부의 강도나 평활성 측면에서 바람직한 이점이 있다.The photopolymerizable compound may be used in an amount of 10 to 70 wt%, preferably 20 to 60 wt%, based on the total weight of the black photosensitive resin composition. When the photopolymerizable compound is included in the above range, there is a desirable advantage in terms of strength or smoothness of the pixel portion.
알칼리 가용성 수지Alkali Soluble Resin
상기 알칼리 가용성 수지는 통상적으로 광이나 열의 작용에 의한 반응성 및 알칼리 용해성을 가지며, 상기 착색제의 분산매로서 작용하며, 본 발명의 알칼리 가용성 수지로는 카도계 수지를 사용하는 것이 바람직하다. 카도계 바인더 수지를 포함하는 경우 공정간 신뢰성이 우수해지는 이점이 있다. 또한, 아웃가스 발생을 최소화하여 증착 공정 시 주름 또는 크랙이 발생하지 않고 뛰어난 신뢰성을 부여하는 이점이 있다.The alkali-soluble resin generally has reactivity and alkali solubility under the action of light or heat, and acts as a dispersion medium for the colorant. It is preferable to use a cardo-based resin as the alkali-soluble resin of the present invention. When the cardo-based binder resin is included, there is an advantage in that reliability between processes is improved. In addition, there is an advantage of providing excellent reliability without generating wrinkles or cracks during the deposition process by minimizing the generation of outgas.
상기 카도계 수지의 중량평균분자량은 5,000 내지 10,000인 것이 바람직하고, 5,200 내지 9,000인 것이 더욱 바람직하다. 상기 범위를 만족하는 경우, 코팅 필름의 경도가 향상되어, 잔막율이 높아지는 이점이 있다.The weight average molecular weight of the cardo-based resin is preferably 5,000 to 10,000, more preferably 5,200 to 9,000. When the above range is satisfied, the hardness of the coating film is improved, and there is an advantage in that the residual film rate is increased.
상기 카도계 수지의 산가는 50 내지 120 mgKOH/g인 것이 바람직하고, 70 내지 110 mgKOH/g인 것이 더욱 바람직하다. 상기 범위를 만족하는 경우, 현상액의 용해성이 충분하여 잔사 발생이 억제되며 패턴 형성이 용이한 이점이 있다.The acid value of the cardo-based resin is preferably 50 to 120 mgKOH/g, more preferably 70 to 110 mgKOH/g. When the above range is satisfied, there is an advantage in that the solubility of the developer is sufficient, the generation of residues is suppressed, and the pattern formation is easy.
상기 카도계 수지는 구체적으로 비스(4-히드록시페닐)설폰, 비스(4-히드록시-3,5-디메틸페닐)설폰 및 비스(4-히드록시-3,5-디클로로페닐)설폰, 비스(4-히드록시페닐)헥사플루오로프로판, 비스(4-히드록시-3,5-디메틸페닐)헥사플루오로프로판 및 비스(4-히드록시-3,5-디클로로페닐)헥사플루오로프로판, 비스(4-히드록시페닐)디메틸실란, 비스(4-히드록시-3,5-디메틸페닐)디메틸실란 및 비스(4-히드록시-3,5-디클로로페닐)디메틸실란, 비스(4-히드록시페닐)메탄, 비스(4-히드록시-3,5-디클로로페틸)메탄 및 비스(4-히드록시-3,5-디브로모페닐)메탄, 2,2-비스(4-히드록시페닐)프로판, 2,2-비스(4-히드록시-3,5-디메틸페닐)프로판, 2,2-비스(4-히드록시-3,5-디클로로페닐)프로판, 2,2-비스(4-히드록시-3-메틸페닐)프로판 및 2,2-비스(4-히드록시-3-클로로페닐)프로판, 비스(4-히드록시페닐)에테르, 비스(4-히드록시-3,5-디메틸페닐)에테르 및 비스(4-히드록시-3,5-디클로페닐)에테르, 9,9-비스(4-히드록시페닐)플루오렌, 9,9-비스(4-히드록시-3-메틸페닐)플루오렌, 9,9-비스(4-히드록시-3-클로로페닐)플루오렌, 9,9-비스(4-히드록시-3-브로모페닐)플루오렌, 9,9-비스(4-히드록시-3-플루오로페닐)플루오렌, 9,9-비스(4-히드록시-3-메톡시페닐)플루오렌, 9,9-비스(4-히드록시-3,5-디메틸페닐)플루오렌, 9,9-비스(4-히드록시-3,5-디클로로페닐)플루오렌 및 9,9-비스(4-히드록시-3,5-디브로모페닐)플루오렌 등으로부터 얻어진 것일 수 있으나, 이에 한정되는 것은 아니다.The cardo-based resin is specifically bis (4-hydroxyphenyl) sulfone, bis (4-hydroxy-3,5-dimethylphenyl) sulfone and bis (4-hydroxy-3,5-dichlorophenyl) sulfone, bis (4-hydroxyphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane and bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane; Bis(4-hydroxyphenyl)dimethylsilane, bis(4-hydroxy-3,5-dimethylphenyl)dimethylsilane and bis(4-hydroxy-3,5-dichlorophenyl)dimethylsilane, bis(4-hydroxy hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichloroethyl)methane and bis(4-hydroxy-3,5-dibromophenyl)methane, 2,2-bis(4-hydroxyphenyl) ) propane, 2,2-bis (4-hydroxy-3,5-dimethylphenyl) propane, 2,2-bis (4-hydroxy-3,5-dichlorophenyl) propane, 2,2-bis (4 -Hydroxy-3-methylphenyl)propane and 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxyphenyl)ether, bis(4-hydroxy-3,5-dimethyl Phenyl)ether and bis(4-hydroxy-3,5-dichlorophenyl)ether, 9,9-bis(4-hydroxyphenyl)fluorene, 9,9-bis(4-hydroxy-3-methylphenyl) ) fluorene, 9,9-bis (4-hydroxy-3-chlorophenyl) fluorene, 9,9-bis (4-hydroxy-3-bromophenyl) fluorene, 9,9-bis (4 -Hydroxy-3-fluorophenyl) fluorene, 9,9-bis (4-hydroxy-3-methoxyphenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dimethylphenyl) ) obtained from fluorene, 9,9-bis(4-hydroxy-3,5-dichlorophenyl)fluorene and 9,9-bis(4-hydroxy-3,5-dibromophenyl)fluorene, etc. may be, but is not limited thereto.
상기 알칼리 가용성 수지는 흑색 감광성 수지 조성물 총 중량에 대하여 1 내지 50 중량%, 바람직하게는 5 내지 40 중량%로 포함될 수 있다. 이러한 함량범위는 현상액에 대한 용해도와 패턴 형성 등을 다각적으로 고려하여 선정된 것으로서, 알칼리 가용성 수지가 상기 범위로 포함되면 현상액에 대한 용해성이 충분하여 패턴 형성이 용이하고, 현상시에 노광부의 화소 부분의 막감소가 방지되어 비화소 부분의 누락성이 양호해진다.The alkali-soluble resin may be included in an amount of 1 to 50% by weight, preferably 5 to 40% by weight, based on the total weight of the black photosensitive resin composition. This content range is selected by considering solubility in the developer and pattern formation from various angles. When the alkali-soluble resin is included in the above range, the solubility in the developer is sufficient to facilitate pattern formation, and the pixel portion of the exposed part during development. film reduction is prevented, and the omission property of the non-pixel portion is improved.
광중합 개시제photopolymerization initiator
상기 광중합 개시제는 흑색 감광성 수지 조성물에 일반적으로 사용되는 광중합 개시제를 사용할 수 있다. 예컨대 아세토페논계, 벤조페논계, 트리아진계, 티오크산톤계, 옥심계, 벤조인계, 비이미다졸계 화합물 등을 사용할 수 있다.As the photopolymerization initiator, a photopolymerization initiator generally used in the black photosensitive resin composition may be used. For example, acetophenone-based, benzophenone-based, triazine-based, thioxanthone-based, oxime-based, benzoin-based, biimidazole-based compounds and the like may be used.
아세토페논계 화합물은 디에톡시아세토페논, 2-히드록시-2-메틸-1-페닐프로판-1-온, 벤질디메틸케탈, 2-히드록시-1-[4-(2-히드록시에톡시)페닐]-2-메틸프로판-1-온, 1-히드록시시클로헥실페닐케톤, 2-메틸-1-(4-메틸티오페닐)-2-모르폴리노프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온, 2-히드록시-2-메틸[4-(1-메틸비닐)페닐]프로판-1-온의 올리고머 등이 가능하고, 이들 중 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온이 바람직하게 사용 가능하다.The acetophenone compound is diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethyl ketal, 2-hydroxy-1-[4-(2-hydroxyethoxy) Phenyl]-2-methylpropan-1-one, 1-hydroxycyclohexylphenyl ketone, 2-methyl-1-(4-methylthiophenyl)-2-morpholinopropan-1-one, 2-benzyl- oligomers of 2-dimethylamino-1-(4-morpholinophenyl)butan-1-one and 2-hydroxy-2-methyl[4-(1-methylvinyl)phenyl]propan-1-one are possible and 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butan-1-one among them.
벤조페논계 화합물로는 벤조페논, 벤조일 안식향산, 벤조일 안식향산 메틸, 4-페닐 벤조페논, 히드록시 벤조페논, 아크릴화 벤조페논, 4,4′-비스(디메틸 아미노)벤조페논, 4,4′-비스(디에틸 아미노) 벤조페논 등이 가능하다.Benzophenone-based compounds include benzophenone, benzoyl benzoic acid, methyl benzoyl benzoate, 4-phenyl benzophenone, hydroxybenzophenone, acrylated benzophenone, 4,4'-bis(dimethyl amino)benzophenone, 4,4'-bis (diethyl amino) benzophenone and the like are possible.
트리아진계 화합물로는 2,4,6-트리클로로-s-트리아진, 2-페닐-4,6-비스(트리클로로 메틸)-s-트리아진, 2-(3′,4′-디메톡시 스티릴)-4,6-비스(트리클로로 메틸)-s-트리아진, 2-(4′-메톡시 나프틸)-4,6-비스(트리클로로 메틸)-s-트리아진, 2-(p-메톡시 페닐)-4,6-비스(트리클로로 메틸)-s-트리아진, 2-(p-트릴)-4,6-비스(트리클로로 메틸)-s-트리아진, 2-비페닐-4,6-비스(트리클로로 메틸)-s-트리아진, 비스(트리클로로 메틸)-6-스티릴-s-트리아진, 2-(나프토 1-일)-4,6-비스(트리클로로 메틸)-s-트리아진, 2-(4-메톡시 나프토 1-일)-4,6-비스(트리클로로 메틸)-s-트리아진, 2,4-트리클로로 메틸(피페로닐)-6-트리아진, 2,4-트리클로로 메틸(4′-메톡시 스티릴)-6-트리아진 등이 가능하다.Examples of the triazine-based compound include 2,4,6-trichloro-s-triazine, 2-phenyl-4,6-bis(trichloromethyl)-s-triazine, 2-(3′,4′-dimethoxy styryl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4'-methoxy naphthyl)-4,6-bis(trichloromethyl)-s-triazine, 2- (p-methoxyphenyl)-4,6-bis(trichloromethyl)-s-triazine, 2-(p-triyl)-4,6-bis(trichloromethyl)-s-triazine, 2- Biphenyl-4,6-bis(trichloromethyl)-s-triazine, bis(trichloromethyl)-6-styryl-s-triazine, 2-(naphtho 1-yl)-4,6- Bis(trichloromethyl)-s-triazine, 2-(4-methoxynaphtho 1-yl)-4,6-bis(trichloromethyl)-s-triazine, 2,4-trichloromethyl ( piperonyl)-6-triazine, 2,4-trichloromethyl(4'-methoxy styryl)-6-triazine, and the like are possible.
티오크산톤계 화합물로는 2-이소프로필티오크산톤, 2,4-디에틸티오크산톤, 2,4-디클로로티오크산톤, 1-클로로-4-프로폭시티오크산톤 등이 가능하다.The thioxanthone-based compound may include 2-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro-4-propoxythioxanthone, and the like.
옥심계 화합물로는 o-에톡시카르보닐-α-옥시이미노-1-페닐프로판-1-온 등을 들 수 있으며, 시판품으로 Ciba사의 OXE-01, OXE-02 및 Basf사의 Irgacure OXE03이 대표적이다.Examples of the oxime-based compound include o-ethoxycarbonyl-α-oxyimino-1-phenylpropan-1-one, and commercial products include OXE-01 and OXE-02 from Ciba and Irgacure OXE03 from Basf. .
벤조인계 화합물로는 벤조인 메틸 에테르, 벤조인 에틸 에테르, 벤조인 이소프로필 에테르, 벤조인 이소부틸 에테르, 벤질디메틸케탈 등이 사용 가능하다.As the benzoin-based compound, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzyldimethyl ketal, and the like can be used.
비이미다졸계 화합물로는 2,2′-비스(2-클로로페닐)-4,4′,5,5′-테트라페닐비이미다졸, 2,2′-비스(2,3-디클로로페닐)-4,4′,5,5′-테트라페닐비이미다졸, 2,2′-비스(2-클로로페닐)-4,4′,5,5′-테트라(알콕시페닐)비이미다졸, 2,2′-비스(2-클로로페닐)-4,4′,5,5′-테트라(트리알콕시페닐)비이미다졸, 4,4′,5,5′ 위치의 페닐기가 카르보알콕시기에 의해 치환되어 있는 이미다졸 화합물 등이 가능하다.Examples of the biimidazole-based compound include 2,2′-bis(2-chlorophenyl)-4,4′,5,5′-tetraphenylbiimidazole, 2,2′-bis(2,3-dichlorophenyl) -4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(alkoxyphenyl)biimidazole, 2 ,2′-bis(2-chlorophenyl)-4,4′,5,5′-tetra(trialkoxyphenyl)biimidazole, the phenyl group at the 4,4′,5,5′ position is replaced by a carboalkoxy group Substituted imidazole compounds and the like are possible.
상기 광중합 개시제는 상기 흑색 감광성 수지 조성물 총 중량에 대하여 0.1 내지 10 중량%, 바람직하게는 0.3 내지 8 중량%로 포함될 수 있다. 이러한 함량 범위는 광중합성 화합물의 광중합 속도 및 최종 얻어지는 도막의 물성을 고려한 것으로, 상기 범위 미만이면 중합 속도가 낮아 전체적인 공정 시간이 길어질 수 있으며, 반대로 상기 범위를 초과할 경우 과도한 반응에 의해 가교 반응이 지나서 도막의 물성이 오히려 저하될 수 있으므로 상기 범위 내에서 적절히 사용할 필요가 있다. The photopolymerization initiator may be included in an amount of 0.1 to 10% by weight, preferably 0.3 to 8% by weight, based on the total weight of the black photosensitive resin composition. This content range is in consideration of the photopolymerization rate of the photopolymerizable compound and the physical properties of the finally obtained coating film. If the content is less than the above range, the polymerization rate is low and the overall process time may be prolonged. Since the physical properties of the coating film may be rather deteriorated over time, it is necessary to appropriately use it within the above range.
또한, 광중합 개시제와 함께 광중합 개시 보조제를 사용할 수 있는데, 상기 광중합 개시제와 함께 광중합 개시 보조제를 사용하는 경우 감광성 수지 조성물이 더욱 고감도가 되어 생산성이 향상되므로 바람직하다. 상기 광중합 개시 보조제로는 아민 및 카르복실산 화합물로 이루어진 군으로부터 선택되는 1종 이상의 화합물이 바람직하게 사용될 수 있다.In addition, a photopolymerization initiation auxiliary may be used together with the photopolymerization initiator. When the photopolymerization initiation auxiliary is used together with the photopolymerization initiator, the photosensitive resin composition becomes more sensitive and productivity is improved. At least one compound selected from the group consisting of amines and carboxylic acid compounds may be preferably used as the photopolymerization initiation adjuvant.
이러한 광중합 개시 보조제는 광중합 개시제 1 몰당 통상적으로 10 몰 이하, 바람직하게는 0.01 내지 5 몰의 범위 내에서 사용하는 것이 바람직하다. 상기 범위 내에서 광중합 개시 보조제를 사용할 경우 중합 효율을 높여 생산성 향상 효과를 기대할 수 있다.Such a photopolymerization initiation adjuvant is generally 10 mol or less per 1 mol of the photopolymerization initiator, and preferably used within the range of 0.01 to 5 mol. When the photopolymerization initiation auxiliary agent is used within the above range, the effect of improving the productivity can be expected by increasing the polymerization efficiency.
용제solvent
본 발명에서 용제는 흑색 감광성 수지 조성물에 포함되는 다른 성분들을 용해시키는데 효과적이되 반응하지 않는 것이면, 통상의 흑색 감광성 수지 조성물에서 사용되는 용제를 특별히 제한하지 않고 사용할 수 있다.In the present invention, as long as the solvent is effective in dissolving other components included in the black photosensitive resin composition but does not react, the solvent used in the general black photosensitive resin composition may be used without particular limitation.
상기 용제의 구체예로는 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 에틸렌글리콜모노프로필에테르, 에틸렌글리콜모노부틸에테르 등의 에틸렌글리콜모노알킬에테르류; 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜디에틸에테르, 디에틸렌글리콜디프로필에테르, 디에틸렌글리콜디부틸에테르 등의 디에틸렌글리콜디알킬에테르류; 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트 등의 에틸렌글리콜알킬에테르아세테이트류; 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 프로필렌글리콜모노프로필에테르아세테이트, 메톡시부틸아세테이트 및 메톡시펜틸아세테이트 등의 알킬렌글리콜알킬에테르아세테이트류; 벤젠, 톨루엔, 크실렌, 메시틸렌 등의 방향족 탄화수소류; 메틸에틸케톤, 아세톤, 메틸아밀케톤, 메틸이소부틸케톤, 시클로헥사논등의 케톤류; 에탄올, 프로판올, 부탄올, 헥사놀, 시클로헥산올, 에틸렌글리콜, 글리세린 등의 알코올류; 3-에톡시프로피온산 에틸, 3-메톡시프로피온산 메틸 등의 에스테르류; 및 γ-부티롤락톤 등의 환상 에스테르류 등을 들 수 있다. Specific examples of the solvent include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether; diethylene glycol dialkyl ethers such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, and diethylene glycol dibutyl ether; ethylene glycol alkyl ether acetates such as methyl cellosolve acetate and ethyl cellosolve acetate; alkylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxybutyl acetate and methoxypentyl acetate; aromatic hydrocarbons such as benzene, toluene, xylene, and mesitylene; ketones such as methyl ethyl ketone, acetone, methyl amyl ketone, methyl isobutyl ketone and cyclohexanone; alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, and glycerin; esters such as ethyl 3-ethoxypropionate and methyl 3-methoxypropionate; and cyclic esters such as γ-butyrolactone.
상기의 용제 중, 도포성, 건조성면에서 바람직하게는 상기 용제 중에서 비점이 100℃ 내지 200℃인 유기 용제를 사용할 수 있고, 보다 바람직하게는 알킬렌글리콜알킬에테르아세테이트류, 케톤류, 3-에톡시프로피온산 에틸이나, 3-메톡시프로피온산 메틸 등의 에스테르류를 사용할 수 있으며, 더욱 바람직하게는 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 시클로헥사논, 3-에톡시프로피온산 에틸, 3-메톡시프로피온산 메틸 등을 사용할 수 있다. 이들 용제는 각각 단독으로 또는 2종 이상 혼합하여 사용할 수 있다.Among the above solvents, from the viewpoint of applicability and dryness, an organic solvent having a boiling point of 100°C to 200°C may be preferably used in the solvent, and more preferably alkylene glycol alkyl ether acetates, ketones, 3-ethoxy Esters such as ethyl propionate and methyl 3-methoxypropionate can be used, and more preferably, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, 3-ethoxy ethyl propionate, 3- methyl methoxypropionate and the like can be used. These solvents can be used individually or in mixture of 2 or more types, respectively.
상기 용제는 흑색 감광성 수지 조성물 총 중량에 대하여 통상 30 내지 80 중량%, 바람직하게는 40 내지 70 중량%로 포함될 수 있다. 용제가 상기 범위로 포함되는 경우, 롤 코터, 스핀 코터, 슬릿 앤드 스핀 코터, 슬릿 코터(다이 코터라고도 하는 경우가 있음) 및 잉크젯 등의 도포 장치로 도포했을 때 도포성이 양호해지는 경향이 있어 바람직하다.The solvent may be included in an amount of usually 30 to 80% by weight, preferably 40 to 70% by weight, based on the total weight of the black photosensitive resin composition. When the solvent is included in the above range, the coating property tends to be good when applied with an application device such as a roll coater, a spin coater, a slit and spin coater, a slit coater (sometimes referred to as a die coater) and an inkjet, so it is preferable do.
첨가제additive
본 발명의 흑색 감광성 수지 조성물은 상기한 성분들 외에 본 발명의 목적을 해치지 않는 범위에서 통상의 기술자의 필요에 따라 첨가제를 더 포함할 수 있으며, 첨가제로는 밀착촉진제, 계면활성제 등이 있을 수 있으나, 이에 제한되는 것은 아니다.The black photosensitive resin composition of the present invention may further include additives according to the needs of those skilled in the art in a range that does not impair the purpose of the present invention in addition to the above components, and the additives may include adhesion promoters, surfactants, etc. , but is not limited thereto.
상기 밀착촉진제는 기판과의 밀착성을 높이기 위하여 첨가될 수 있는 것으로, 카르복실기, 메타크릴로일기, 이소시아네이트기, 에폭시기 및 이들의 조합으로 이루어진 군에서 선택되는 반응성 치환기를 갖는 실란 커플링제를 포함할 수 있으나 이에 한정되는 것은 아니다. 예컨대, 상기 실란 커플링제는 트리메톡시실릴 벤조산, γ-메타크릴 옥시프로필 트리메톡시 실란, 비닐트리아세톡시실란, 비닐 트리메톡시실란, γ-이소시아네이트 프로필 트리에톡시실란, γ-글리시독시 프로필 트리메톡시실란, β-(3,4-에폭시시클로헥실)에틸트리메톡시실란 등을 들 수 있으며, 이들을 단독 및 2종 이상 조합하여 사용할 수 있다.The adhesion promoter may be added to increase adhesion to the substrate, and may include a silane coupling agent having a reactive substituent selected from the group consisting of a carboxyl group, a methacryloyl group, an isocyanate group, an epoxy group, and combinations thereof. However, the present invention is not limited thereto. For example, the silane coupling agent is trimethoxysilyl benzoic acid, γ-methacryl oxypropyl trimethoxy silane, vinyltriacetoxysilane, vinyl trimethoxysilane, γ-isocyanate propyl triethoxysilane, γ-glycidoxy and propyl trimethoxysilane and β-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, and these may be used alone or in combination of two or more.
상기 계면활성제는 흑색 감광성 수지 조성물의 코팅성을 보다 향상시키기 위해 사용할 수 있으며, BM-1000, BM-1100(BM Chemie사), 프로라이드 FC-135/FC-170C/FC-430(스미토모 쓰리엠㈜), SH-28PA/-190/SZ-6032(도레 시리콘㈜)등의 불소계 계면 활성제를 사용할 수 있으나, 이에 한정되지는 않는다. 상기 계면활성제는 안료분산제로서 사용될 수 있으며, 이 경우 폴리에스테르계 계면활성제를 사용할 수 있다.The surfactant can be used to further improve the coatability of the black photosensitive resin composition, BM-1000, BM-1100 (BM Chemie), Proride FC-135/FC-170C/FC-430 (Sumitomo 3M Co., Ltd.) ), SH-28PA/-190/SZ-6032 (Toray Silicon Co., Ltd.), etc., may be used, but the present invention is not limited thereto. The surfactant may be used as a pigment dispersant, and in this case, a polyester-based surfactant may be used.
상기 첨가제는 흑색 감광성 수지 조성물 총 중량에 대하여 0.1 내지 5 중량%, 바람직하게는 0.5 내지 3 중량%로 포함될 수 있다.The additive may be included in an amount of 0.1 to 5% by weight, preferably 0.5 to 3% by weight, based on the total weight of the black photosensitive resin composition.
< 화소정의막, 유기발광소자 및 표시장치 >< Pixel defining film, organic light emitting device and display device >
또한, 본 발명은 상기 흑색 감광성 수지 조성물을 이용하여 제조된 화소정의막을 제공하고, 상기 화소정의막을 포함하는 유기발광소자를 제공하며, 상기 유기발광소자를 포함하는 표시장치를 제공한다.In addition, the present invention provides a pixel defining layer manufactured using the black photosensitive resin composition, an organic light emitting device including the pixel defining layer, and a display device including the organic light emitting device.
본 발명의 일 실시형태에 있어서, 상기 흑색 감광성 수지 조성물은 유기발광소자의 화소정의막 형성용일 수 있으며, 또는 상기 흑색 감광성 수지 조성물은 블랙 뱅크(black bank)용 또는 차광막일 수 있다. 요컨대, 본 발명에 있어서, 상기 “화소 정의막”은 “블랙 뱅크” 또는 “차광막”과 혼용될 수 있다.In one embodiment of the present invention, the black photosensitive resin composition may be used for forming a pixel defining layer of an organic light emitting device, or the black photosensitive resin composition may be used for a black bank or a light blocking layer. In other words, in the present invention, the “pixel defining layer” may be used interchangeably with “black bank” or “light blocking layer”.
일반적으로 유기발광소자의 구동시, 특히 야외에서 사용하는 모바일에서 빛에 의한 산란현상은 시인성을 떨어뜨린다. 상기 산란광의 흡수를 위하여 별도의 블랙 매트릭스 도입하면 야외에서의 시인성을 향상시킬 수 있으나, 블랙 매트릭스를 도입하기 위한 공정이 추가되어야 하므로 공정이 복잡해지고, 비용 및 시간 등이 늘어나게 되어 결국 공정의 효율성이 저하될 수 있다.In general, when an organic light emitting diode is driven, especially in a mobile device used outdoors, scattering by light reduces visibility. When a separate black matrix is introduced for absorption of the scattered light, visibility in the outdoors can be improved, but since a process for introducing the black matrix must be added, the process becomes complicated, and the cost and time increase, so that the efficiency of the process is ultimately reduced. may be lowered.
본 발명에 따른 흑색 감광성 수지 조성물을 사용하여 제조된 화소정의막은 유기발광소자의 블랙 뱅크 역할 뿐만 아니라 블랙 매트릭스의 역할을 함께 수행할 수 있으므로, 별도의 공정의 추가 없이 유기발광소자의 빛의 산란현상에 따른 시인성을 개선할 수 있는 장점이 있다.Since the pixel defining film manufactured using the black photosensitive resin composition according to the present invention can serve not only as a black bank of the organic light emitting device but also as a black matrix, light scattering of the organic light emitting device without additional process There is an advantage in that visibility can be improved.
일 구현예에 있어서, 화소정의막은 포토리소그래피 방법으로 제조될 수 있으며, 포토리소그래피 방법에 따른 화소정의막을 형성하는 통상의 패터닝 공정은 다음과 같은 단계를 포함하여 이루어진다:In one embodiment, the pixel defining layer may be manufactured by a photolithography method, and a typical patterning process for forming the pixel defining layer according to the photolithography method includes the following steps:
a) 기판에 흑색 감광성 수지 조성물을 도포하는 단계;a) applying a black photosensitive resin composition to the substrate;
b) 용매를 건조하는 프리베이크 단계;b) a prebaking step of drying the solvent;
c) 얻어진 피막 위에 포토 마스크를 대어 활성 광선을 조사해 노광부를 경화시키는 단계;c) applying a photomask on the obtained film and irradiating actinic light to cure the exposed portion;
d) 알칼리 수용액을 이용하여 미노광부를 용해하는 현상 공정을 수행하는 단계; 및d) performing a developing process for dissolving the unexposed portion using an aqueous alkali solution; and
e) 건조 및 포스트 베이크를 수행하는 단계.e) performing drying and post-baking.
상기 도포는 원하는 두께를 얻을 수 있도록 롤 코터, 스핀 코터, 슬릿 앤드 스핀 코터, 슬릿 코터(다이 코터라고도 하는 경우가 있음), 잉크젯 등의 도포 장치를 이용한 습식 코팅 방법에 의해 수행될 수 있다.The coating may be performed by a wet coating method using an application device such as a roll coater, a spin coater, a slit and spin coater, a slit coater (sometimes referred to as a die coater), or an inkjet to obtain a desired thickness.
프리베이크는 오븐, 핫 플레이트 등에 의해 가열함으로써 행해진다. 이때 프리베이크에 있어서의 가열 온도 및 가열 시간은 사용하는 용제에 따라 적의 선택 되어 예를 들면, 80 내지 150의 온도로 1 내지 30분간 행해진다.Prebaking is performed by heating with an oven, a hot plate, etc. At this time, the heating temperature and heating time in the prebaking are appropriately selected according to the solvent to be used, and are performed at a temperature of, for example, 80 to 150 for 1 to 30 minutes.
또한, 프리베이크 후에 행해지는 노광은, 노광기에 의해 행해져 포토 마스크를 통하여 노광함으로써 패턴에 대응한 부분만을 감광시킨다. 이때 조사하는 빛은, 예를 들면, 가시광선, 자외선, X선 및 전자선 등이 가능하다.In addition, exposure performed after prebaking is performed by an exposure machine, and only the part corresponding to a pattern is exposed by exposing through a photomask. In this case, the irradiated light may be, for example, visible light, ultraviolet light, X-ray, electron beam, or the like.
노광 후의 알칼리 현상 비노광 부분의 제거되지 않는 부분의 감광성 수지 조성물을 제거하는 목적으로 행해져 이 현상에 의해 원하는 패턴이 형성된다. 이 알칼리 현상에 적합한 현상액으로는, 예를 들면 알칼리 금속이나 알칼리 토류 금속의 탄산염의 수용액 등을 사용할 수 있다. 특히, 탄산나트륨, 탄산칼륨, 탄산 리튬등의 탄산염을 1~3 중량%를 함유하는 미만 알칼리 수용액을 이용하여 10~50℃바람직하게는 20~40℃의 온도 내에서 현상기 또는 초음파 세정기 등을 이용하여 수행한다.Alkali development after exposure It is performed for the purpose of removing the photosensitive resin composition of the part which is not removed of a non-exposed part, and a desired pattern is formed by this development. As a developing solution suitable for this alkali development, the aqueous solution of the carbonate of an alkali metal or alkaline-earth metal, etc. can be used, for example. In particular, using an aqueous alkali solution containing less than 1 to 3 wt% of carbonates such as sodium carbonate, potassium carbonate, lithium carbonate, etc., at a temperature of 10 to 50 ° C, preferably 20 to 40 ° C, using a developer or ultrasonic cleaner, etc. carry out
포스트 베이크는 패터닝 된 막과 기판과의 밀착성을 높이기 위해서 수행하며, 80~220℃에서 10~120 분의 조건으로 열처리를 통해 이루어진다. 포스트 베이크 프리베이크와 같게, 오븐, 핫 플레이트 등을 이용하여 수행한다.Post-baking is performed to increase the adhesion between the patterned film and the substrate, and is performed through heat treatment at 80-220° C. for 10 to 120 minutes. Post-bake As with pre-bake, it is performed using an oven, a hot plate, or the like.
또한, 발명의 흑색 감광성 수지 조성물로 제조된 화소정의막은 광학밀도, 밀착성, 전기 절연성, 차광성 등의 물성이 우수할 뿐만 아니라, 내열성 및 내용제성 등이 우수하여 유기발광소자, 및 상기 유기발광소자를 포함하는 표시장치의 신뢰도를 향상시킬 수 있다.In addition, the pixel defining film made of the black photosensitive resin composition of the present invention has excellent physical properties such as optical density, adhesion, electrical insulation, and light-shielding property, as well as excellent heat resistance and solvent resistance, such as an organic light emitting device, and the organic light emitting device It is possible to improve the reliability of the display device including the.
이하에서, 실시예를 통하여 본 발명을 보다 상세히 설명한다. 그러나, 하기의 실시예는 본 발명을 더욱 구체적으로 설명하기 위한 것으로서, 본 발명의 범위 가 하기의 실시예에 의하여 한정되는 것은 아니다. 하기의 실시예는 본 발명의 범위 내에서 통상의 기술자에 의해 적절히 수정, 변경될 수 있다. 이하의 실시예 및 비교예에서 함량을 나타내는 "%" 및 "부"는 특별히 언급하지 않는 한 중량 기준이다.Hereinafter, the present invention will be described in more detail through examples. However, the following examples are for explaining the present invention in more detail, and the scope of the present invention is not limited by the following examples. The following examples can be appropriately modified and changed by those skilled in the art within the scope of the present invention. In the following Examples and Comparative Examples, "%" and "part" indicating the content are by weight unless otherwise specified.
합성예 1: 알칼리 가용성 수지의 합성 1 (바인더 1)Synthesis Example 1: Synthesis of alkali-soluble resin 1 (binder 1)
4구 플라스크 중에, 하기 화학식 1로 표시되는 비스페놀플루오렌형 에폭시 모노머 235g(에폭시 당량 235)과 테트라메틸암모늄클로라이드 110㎎, 2,6-디-tert부틸-4-메틸페놀 100㎎ 및 아크릴산 72.0g를, 25㎖/분의 속도로 공기를 송풍하면서 90℃부터 100℃로 가열하여 용해시켰다.In a four-neck flask, 235 g (epoxy equivalent 235) of a bisphenol fluorene type epoxy monomer represented by the following formula (1), 110 mg of tetramethylammonium chloride, 100 mg of 2,6-di-tertbutyl-4-methylphenol, and 72.0 g of acrylic acid was dissolved by heating from 90° C. to 100° C. while blowing air at a rate of 25 ml/min.
[화학식 1][Formula 1]
다음에, 이 용액이 백탁한 상태인 채로, 120℃까지 천천히 승온시켜서 완전히 용해시켰다. 이때 용액이 점차 투명하게 되어 가는 것을 확인하며 교반을 계속하였다. 산가가 1.0㎎K0H/g 미만이 될 때까지 약 12시간 가열 교반을 계속하였다. 그 후, 실온까지 냉각하여, 무색 투명하고 고체상의 하기 화학식 2로 표시되는 비스페놀플루오렌형 에폭시아크릴레이트가 얻어졌다.Next, while the solution was in a cloudy state, the temperature was slowly raised to 120° C. to completely dissolve it. At this time, stirring was continued while confirming that the solution gradually became transparent. Heating and stirring was continued for about 12 hours until the acid value became less than 1.0 mgK0H/g. Then, it cooled to room temperature, and the bisphenol fluorene type epoxy acrylate represented by the following formula (2) which is colorless and transparent and solid was obtained.
[화학식 2][Formula 2]
그 후, 이와 같이 얻어진 비스페놀플루오렌형 에폭시아크릴레이트 307.0g에, 프로필렌글리콜모노에틸에테르아세테이트(PGMEA) 600g를 가하여 용해시킨 후, 벤조페논테트라카복시산 2무수물 80.5g, 및 브롬화테트라에틸암모늄 1g을 혼합하고, 110℃부터 115℃로 4시간 반응시켰다. 산무수물기의 소실을 확인 한 후, 1,2,3,6-테트라하이드로무수프탈산 38.0g를 혼합하고, 90℃로 7시간 반응시켜서 카도계 바인더 수지를 얻었다. Thereafter, 600 g of propylene glycol monoethyl ether acetate (PGMEA) was added and dissolved in 307.0 g of the bisphenol fluorene type epoxy acrylate thus obtained, followed by 80.5 g of benzophenone tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide. It was mixed and made to react at 110 degreeC to 115 degreeC for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90° C. for 7 hours to obtain a cardo-based binder resin.
이때, 산무수물기의 소실은 IR 스펙트럼에 의해 확인하였다. 제조된 카도계 바인더 수지는 5,300g/mol의 중량평균분자량과 101mgKOH/g의 산가를 가지는 것을 확인하였다.At this time, the disappearance of the acid anhydride group was confirmed by the IR spectrum. It was confirmed that the prepared cardo-based binder resin had a weight average molecular weight of 5,300 g/mol and an acid value of 101 mgKOH/g.
합성예 2: 알칼리 가용성 수지의 합성 2 (바인더 2)Synthesis Example 2: Synthesis 2 of alkali-soluble resin (binder 2)
벤조페논테트라카복시산 2 무수물을 69.3g, 및 브롬화테트라에틸암모늄 1g을 혼합하고, 110℃부터 115℃로 6시간 반응시키는 것과 1,2,3,6-테트라하이드로무수프탈산 36.4g를 혼합하고, 90℃로 4시간 반응시키는 것을 제외하고 합성예 1과 동일한 방법으로 합성을 진행하였다. 69.3 g of benzophenone tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were mixed, and reacted at 110° C. to 115° C. for 6 hours, and 36.4 g of 1,2,3,6-tetrahydrophthalic anhydride were mixed, Synthesis was carried out in the same manner as in Synthesis Example 1, except for reacting at 90° C. for 4 hours.
제조된 카도계 바인더 수지가 3,200g/mol의 중량평균분자량과 102 mgKOH/g의 산가를 가지는 것을 확인하였다.It was confirmed that the prepared cardo-based binder resin had a weight average molecular weight of 3,200 g/mol and an acid value of 102 mgKOH/g.
합성예 3: 알칼리 가용성 수지의 합성 3 (바인더 3)Synthesis Example 3: Synthesis 3 of alkali-soluble resin (binder 3)
교반기, 온도계 환류 냉각관, 적하 로트 및 질소 도입관을 구비한 플라스크를 준비하고, 한편, N-벤질말레이미드 45부, 메타크릴산45부, 트리사이클로데실 메타크릴레이트 10부, t-부틸퍼옥시-2-에틸헥사노에이트 4부, 프로필렌글리콜모노메틸에테르아세테이트(이하, "PGMEA"라 함) 40부를 투입후 교반 혼합하여 모노머 적하 로트를 준비하고, n-도데칸티올6부, PGMEA 24부를 넣고 교반 혼합하여 연쇄 이동제 적하 로트를 준비했다. A flask equipped with a stirrer, a thermometer reflux cooling tube, a dropping funnel and a nitrogen introduction tube is prepared, while 45 parts of N-benzylmaleimide, 45 parts of methacrylic acid, 10 parts of tricyclodecyl methacrylate, and t-butylper After adding 4 parts of oxy-2-ethylhexanoate and 40 parts of propylene glycol monomethyl ether acetate (hereinafter referred to as "PGMEA"), stirring and mixing to prepare a monomer dropping lot, 6 parts of n-dodecanthiol, PGMEA 24 parts were added, stirred and mixed, and a chain transfer agent dropping lot was prepared.
이후 플라스크에 PGMEA 395부를 도입하고 플라스크내 분위기를 공기에서 질소로 한 후 교반하면서 플라스크의 온도를 90℃까지 승온했다. 이어서 모노머 및 연쇄 이동제를 적하 로트로부터 적하를 개시했다. 적하는, 90℃를 유지하면서, 각각 2h 동안 진행하고 1h 후에 110℃ 승온하여 3h 유지한 뒤, 가스 도입관을 도입시켜, 산소/질소=5/95(v/v)혼합 가스의 버블링을 개시했다.Thereafter, 395 parts of PGMEA was introduced into the flask, the atmosphere in the flask was changed from air to nitrogen, and the temperature of the flask was raised to 90° C. while stirring. Then, the monomer and the chain transfer agent were started dripping from the dropping lot. The dropping proceeds for 2 h while maintaining 90 ° C, and after 1 h, the temperature is raised to 110 ° C and maintained for 3 h, and then a gas introduction tube is introduced to bubbling the oxygen/nitrogen = 5/95 (v/v) mixed gas. started
이어서, 글리시딜메타크릴레이트 10부, 2,2'-메틸렌비스(4-메틸-6-t-부틸페놀) 0.4부, 트리에틸아민 0.8부를 플라스크내에 투입하여 110℃에서 2시간 반응을 계속하고, 그후 실온까지 냉각하면서 고형분 29.1중량%, 중량평균분자량 5,900이고, 산가가 114㎎KOH/g인 아크릴계 바인더 수지(바인더 3)를 얻었다.Then, 10 parts of glycidyl methacrylate, 0.4 parts of 2,2'-methylenebis(4-methyl-6-t-butylphenol), and 0.8 parts of triethylamine were put into the flask, and the reaction was continued at 110°C for 2 hours. Then, while cooling to room temperature, an acrylic binder resin (binder 3) having a solid content of 29.1% by weight, a weight average molecular weight of 5,900 and an acid value of 114 mgKOH/g was obtained.
실시예 1~9 및 비교예 1~6: 흑색 감광성 수지 조성물의 제조Examples 1 to 9 and Comparative Examples 1 to 6: Preparation of black photosensitive resin composition
하기 표 1 및 2에 나타낸 조성 및 함량으로 실시예 1 내지 9 및 비교예 1 내지 6의 흑색 감광성 수지 조성물을 제조하였다.Black photosensitive resin compositions of Examples 1 to 9 and Comparative Examples 1 to 6 were prepared with the compositions and contents shown in Tables 1 and 2 below.
착색제 (유기안료): OBP 제품Colorant (organic pigment): OBP product
광중합성 화합물 (광중합체 1): 3 관능 PETA (Pentaerythritol triacrylate)Photopolymerizable compound (photopolymer 1): trifunctional PETA (Pentaerythritol triacrylate)
광중합성 화합물 (광중합체 2): 5, 6 관능 DPHA (dipentaerythritol hexaacrylate)Photopolymerizable compound (photopolymer 2): 5, 6 functional DPHA (dipentaerythritol hexaacrylate)
광중합성 화합물 (광중합체 3): 8 관능 V#802Photopolymerizable compound (photopolymer 3): 8 functional V#802
광중합성 화합물 (광중합체 4): 14 관능 V#1000Photopolymerizable compound (photopolymer 4): 14 functional V#1000
광중합성 화합물 (광중합체 5): 15관능 U-15HAPhotopolymerizable compound (photopolymer 5): 15 functional U-15HA
광중합성 화합물 (광중합체 6): 18관능 SP-1106Photopolymerizable compound (photopolymer 6): 18 functional SP-1106
광중합성 화합물 (광중합체 7): 20관능 KOMERATE PM900Photopolymerizable compound (photopolymer 7): 20 functional KOMERATE PM900
광중합성 화합물 (광중합체 8): 25관능 KOMERATE PM905Photopolymerizable compound (photopolymer 8): 25 functional KOMERATE PM905
알칼리 가용성 수지 (바인더 1): 합성예 1의 카도계 바인더 수지 (중량평균분자량 5,300g/mol, 산가 101mgKOH/g)Alkali-soluble resin (Binder 1): Cardo-based binder resin of Synthesis Example 1 (weight average molecular weight 5,300 g/mol, acid value 101 mgKOH/g)
알칼리 가용성 수지 (바인더 2): 합성예 2의 카도계 바인더 수지 (중량평균분자량 3,200g/mol, 산가 102 mgKOH/g)Alkali-soluble resin (Binder 2): Cardo-based binder resin of Synthesis Example 2 (weight average molecular weight 3,200 g/mol, acid value 102 mgKOH/g)
알칼리 가용성 수지 (바인더 3): 합성예 3의 아크릴계 바인더 수지 (중량평균분자량 5,900, 산가 114㎎KOH/g)Alkali-soluble resin (binder 3): acrylic binder resin of Synthesis Example 3 (weight average molecular weight 5,900, acid value 114 mgKOH/g)
광중합 개시제: Irgacure 0XE01Photoinitiator: Irgacure 0XE01
첨가제: SH-28PAAdditive: SH-28PA
용제: 프로필렌글리콜모노메틸에테르아세테이트Solvent: propylene glycol monomethyl ether acetate
실험예Experimental example
(1) 착색 기판 제작(1) Production of colored substrates
5cm X 5cm의 유리기판(코닝社)을 중성세제 및 물로 세정 후 건조하였다. 상기 유리기판 상에 상기 실시예 및 비교예에서 제조된 흑색 감광성 수지 조성물 각각을 최종 막 두께가 1.5㎛가 되도록 스핀 코팅을 하고, 80 내지 120℃에서 선 소성하여 1 내지 2분간 건조하여 용제를 제거하였다. 그런 다음, 노광량 40 내지 100 mJ/cm2로 노광하여 1cm X 3cm 패턴을 형성하고 알카리 수용액을 사용하여 비노광부를 제거하였다. 이어서 230℃에서 후 소성을 20분간 하여 착색기판을 제조하였다.A 5 cm X 5 cm glass substrate (Corning) was washed with a neutral detergent and water, and then dried. Each of the black photosensitive resin compositions prepared in Examples and Comparative Examples was spin-coated on the glass substrate to have a final film thickness of 1.5 μm, pre-baked at 80 to 120° C., and dried for 1 to 2 minutes to remove the solvent. did. Then, by exposing at an exposure amount of 40 to 100 mJ/cm 2 , a 1cm X 3cm pattern was formed, and the unexposed portion was removed using an aqueous alkali solution. Then, post-baking was performed at 230° C. for 20 minutes to prepare a colored substrate.
(2) 아웃가스 특성 평가(2) Outgas characteristics evaluation
아웃가스(outgas) 평가는 상기에서 제조된 착색기판을 230℃에서 30분간 열분해시키면서 포집된 화합물을 Py-GC/MS로 분석하는 방법으로 실시되었다. 분석결과는 하기 표 3에 나타내었다.The outgas evaluation was performed by analyzing the collected compounds by Py-GC/MS while thermally decomposing the colored substrate prepared above at 230° C. for 30 minutes. The analysis results are shown in Table 3 below.
(3) 잔막율: PoB 전/후 막 두께 변화(3) Remaining film rate: change in film thickness before/after PoB
상기 (1)에서 패턴 형성 후 230℃에서 후 소성 공정에 의한 두께 변화를 하기 수학식 1로 확인하였다. 구체적으로, 20분간 230℃의 열을 가했을 때, 열을 가하기 전/후의 두께를 측정하여 하기 수학식 1로 변화율(잔막율)을 계산하였다. 그 평가 결과는 하기 표 3에 기재하였다.After the pattern formation in (1), the thickness change by the post-baking process at 230°C was confirmed by Equation 1 below. Specifically, when heat of 230° C. was applied for 20 minutes, the thickness before and after the heat was measured, and the change rate (remaining film rate) was calculated by Equation 1 below. The evaluation results are shown in Table 3 below.
[수학식 1][Equation 1]
잔막율 = {(열처리 후 막 두께) / (열처리 전 막 두께)} × 100 (%)Remaining film ratio = {(film thickness after heat treatment) / (film thickness before heat treatment)} × 100 (%)
(4) 표면경도(4) Surface hardness
상기 (1)에서 형성된 코팅막의 경화도를 경도계(HM500; Fischer사 제품)를 사용하여 측정하였다. 이때 얻어진 결과는 하기 표 3에 나타내었다. 이때 표면경도는 하기 기준으로 평가하였다.The degree of curing of the coating film formed in (1) was measured using a hardness meter (HM500; manufactured by Fischer). The results obtained at this time are shown in Table 3 below. At this time, the surface hardness was evaluated based on the following criteria.
< 평가기준 >< Evaluation Criteria >
○: 표면경도 250 N/mm2 이상○: surface hardness 250 N/mm 2 or more
△: 표면경도 150 N/mm2 이상 내지 200 N/mm2 미만△: surface hardness of 150 N/mm 2 or more to less than 200 N/mm 2
×: 표면경도 150 N/mm2 미만×: surface hardness less than 150 N/mm 2
(5) 밀착성: 최소 형성 패턴 사이즈(5) Adhesion: Minimum formation pattern size
노광 단계에서 마스크의 패턴 두께가 1 내지 20μm까지 1μm단위로 새겨진 마스크를 사용하였으며, 이때 패턴이 잔존하는 마스크 사이즈를 기준으로 최소패턴을 평가하였다. 그 평가 결과는 하기 표 3에 기재하였다.In the exposure step, a mask with a pattern thickness of 1 to 20 μm was used in 1 μm increments, and the minimum pattern was evaluated based on the mask size in which the pattern remained. The evaluation results are shown in Table 3 below.
(6) 신뢰성: NMP 침지 후 막 두께 변화 (6) Reliability: film thickness change after NMP immersion
상기 (1)에서 코팅막을 형성한 후 NMP 용제에 의한 두께 변화를 하기 수학식 2로 확인하였다. 구체적으로, 최종 완성된 코팅막을 1시간 동안 NMP에 침지했을 때, 침지하기 전/후의 두께를 측정하여 하기 수학식 2로 변화율(NMP 신뢰성)을 계산하였다. 그 평가 결과는 하기 표 3에 기재하였다.After the coating film was formed in (1), the thickness change by the NMP solvent was confirmed by the following Equation 2. Specifically, when the finally completed coating film was immersed in NMP for 1 hour, the thickness before and after immersion was measured to calculate the change rate (NMP reliability) by Equation 2 below. The evaluation results are shown in Table 3 below.
[수학식 2][Equation 2]
NMP 신뢰성 = {(NMP 침지 후 막 두께) / (NMP 침지 전 막 두께)} × 100 (%)NMP reliability = {(film thickness after NMP immersion) / (film thickness before NMP immersion)} × 100 (%)
(7) 현상성 평가(7) Developability evaluation
5cm X 5cm의 유리기판(코닝社)을 중성세제 및 물로 세정 후 건조하였다. 상기 유리기판 상에 상기 실시예 및 비교예에서 제조된 흑색 감광성 수지 조성물 각각을 최종 막 두께가 1.5㎛가 되도록 스핀 코팅을 하고, 100℃에서 5분간 건조하여 용제를 제거하였다. 그런 다음, 알카리 수용액에 2분간 침지 평가를 통해 현상성을 평가하여 하기 표 3에 나타내였다. 이때 현상성은 하기 기준으로 평가하였다.A 5 cm X 5 cm glass substrate (Corning) was washed with a neutral detergent and water, and then dried. Each of the black photosensitive resin compositions prepared in Examples and Comparative Examples was spin-coated on the glass substrate to have a final film thickness of 1.5 μm, and then dried at 100° C. for 5 minutes to remove the solvent. Then, the developability was evaluated by immersion in an aqueous alkali solution for 2 minutes, and is shown in Table 3 below. At this time, developability was evaluated based on the following criteria.
< 평가기준 >< Evaluation Criteria >
○: 용해○: dissolved
△: 박리 후 용해△: dissolution after peeling
×: 박리×: peeling
상기 표 3의 결과로부터, 본 발명에 따른 광중합성 화합물 및 알칼리 가용성 수지를 사용한 실시예 1 내지 8의 경우, 아웃가스 발생량이 비교예들에 비해 현저히 적을 뿐만 아니라, 잔막율 85% 이상, 표면경도 250 N/mm2 이상이고, 8 μm 이하로 최소패턴이 형성되어 밀착성이 우수하여 물리적 특성이 우수할 뿐만 아니라, NMP에 대한 신뢰성이 90% 이상이고, 알카리 수용액에 대한 현상성이 우수하여 내화학성도 우수한 것을 확인할 수 있다. 다만, 3관능 이하의 아크릴레이트 단량체가 더 포함된 실시예 8이나, 15 관능 이상의 덴드리머 아크릴레이트 올리고머 함량이 너무 적게 사용된 실시예 9의 경우, 비교예들에 비해서는 양호하였으나, 전반적인 물성이 다소 저하되는 것을 확인할 수 있었다.From the results of Table 3, in the case of Examples 1 to 8 using the photopolymerizable compound and the alkali-soluble resin according to the present invention, the amount of outgas generated was significantly less than that of Comparative Examples, and the residual film rate was 85% or more, and the surface hardness 250 N/mm 2 or more and a minimum pattern of 8 μm or less is formed, so it has excellent adhesion and excellent physical properties, as well as 90% or more reliability in NMP and excellent developability in aqueous alkali solution, resulting in chemical resistance It can also be seen that the excellent However, in the case of Example 8, which further included trifunctional or less acrylate monomer, or Example 9, in which the content of 15 or more functional dendrimer acrylate oligomer was too small, it was better than Comparative Examples, but overall physical properties were somewhat decline could be observed.
반면, 비교예 1 내지 7과 같이, 광중합성 화합물이나 알칼리 가용성 수지가 본 발명에 따른 조건을 만족하지 못하는 경우, 아웃가스가 현저히 많이 발생하였고, 물리적 특성과 신뢰성에 있어서 효과가 떨어지는 것을 확인할 수 있다.On the other hand, as in Comparative Examples 1 to 7, when the photopolymerizable compound or alkali-soluble resin does not satisfy the conditions according to the present invention, outgas is significantly generated, and it can be seen that the effect in physical properties and reliability is lowered. .
Claims (10)
상기 광중합성 화합물은, 4 관능 이상 8 관능 이하의 아크릴레이트 올리고머 및 15 관능 이상 25 관능 미만의 덴드리머 아크릴레이트 올리고머를 포함하는 것이고,
상기 알칼리 가용성 수지는 중량평균분자량 5,000 내지 10,000의 카도계 수지인 것을 특징으로 하는, 흑색 감광성 수지 조성물.It contains a colorant, a photopolymerizable compound, an alkali-soluble resin, a photoinitiator and a solvent,
The photopolymerizable compound includes an acrylate oligomer of tetrafunctional or more and 8 functional or less and a dendrimer acrylate oligomer having 15 or more functionalities and less than 25 functional functionalities,
The alkali-soluble resin is a cardo-based resin having a weight average molecular weight of 5,000 to 10,000, a black photosensitive resin composition.
상기 광중합성 화합물의 총 중량에 대하여, 상기 4 관능 이상 8 관능 이하의 아크릴레이트 올리고머 30 내지 90 중량% 및 상기 15 관능 이상 25 관능 미만의 덴드리머 아크릴레이트 올리고머 10 내지 50 중량%를 포함하는 것인, 흑색 감광성 수지 조성물.The method according to claim 1,
With respect to the total weight of the photopolymerizable compound, 30 to 90% by weight of the acrylate oligomer of tetrafunctional or more and 8 functional or less and 10 to 50% by weight of the 15 functional or more and less than 25 functional dendrimer acrylate oligomer, A black photosensitive resin composition.
상기 광중합성 화합물은 8 관능 이상 15 관능 미만의 아크릴레이트 올리고머를 더 포함하는 것인, 흑색 감광성 수지 조성물.The method according to claim 1,
The photopolymerizable compound will further include an acrylate oligomer of 8 functional or more and less than 15 functional, black photosensitive resin composition.
상기 카도계 수지의 산가는 50 내지 120 mgKOH/g인 것인, 흑색 감광성 수지 조성물.The method according to claim 1,
The cardo-based resin has an acid value of 50 to 120 mgKOH/g, a black photosensitive resin composition.
상기 착색제는 흑색 안료 또는 염료, 및 유기 안료 또는 염료로 이루어진 군으로부터 선택되는 1종 이상을 포함하는 것인, 흑색 감광성 수지 조성물.The method according to claim 1,
The colorant is a black photosensitive resin composition comprising at least one selected from the group consisting of a black pigment or dye, and an organic pigment or dye.
상기 흑색 감광성 수지 조성물 총 중량에 대하여,
상기 착색제 1 내지 50 중량%,
상기 광중합성 화합물 10 내지 70 중량%,
상기 알칼리 가용성 수지 1 내지 50 중량%,
상기 광중합 개시제 0.1 내지 10 중량%, 및
상기 용제 30 내지 80 중량%를 포함하는 것인, 흑색 감광성 수지 조성물.The method according to claim 1,
Based on the total weight of the black photosensitive resin composition,
1 to 50% by weight of the colorant;
10 to 70% by weight of the photopolymerizable compound,
1 to 50% by weight of the alkali-soluble resin,
0.1 to 10% by weight of the photopolymerization initiator, and
The black photosensitive resin composition comprising 30 to 80% by weight of the solvent.
첨가제를 더 포함하는 것인, 흑색 감광성 수지 조성물.The method according to claim 1,
The black photosensitive resin composition further comprising an additive.
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Citations (1)
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KR100814660B1 (en) | 2005-09-05 | 2008-03-18 | 도오꾜오까고오교 가부시끼가이샤 | Black photosensitive polymer composition |
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Publication number | Priority date | Publication date | Assignee | Title |
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KR100814660B1 (en) | 2005-09-05 | 2008-03-18 | 도오꾜오까고오교 가부시끼가이샤 | Black photosensitive polymer composition |
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