KR20220092800A - 고주파 전원 시스템 - Google Patents

고주파 전원 시스템 Download PDF

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Publication number
KR20220092800A
KR20220092800A KR1020210183226A KR20210183226A KR20220092800A KR 20220092800 A KR20220092800 A KR 20220092800A KR 1020210183226 A KR1020210183226 A KR 1020210183226A KR 20210183226 A KR20210183226 A KR 20210183226A KR 20220092800 A KR20220092800 A KR 20220092800A
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KR
South Korea
Prior art keywords
frequency
modulation
power supply
start phase
reflected wave
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Pending
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KR1020210183226A
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English (en)
Korean (ko)
Inventor
유이치 하세가와
유야 우에노
Original Assignee
가부시키가이샤 다이헨
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Publication of KR20220092800A publication Critical patent/KR20220092800A/ko
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/56—Modifications of input or output impedances, not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
KR1020210183226A 2020-12-25 2021-12-20 고주파 전원 시스템 Pending KR20220092800A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020217562A JP7544594B2 (ja) 2020-12-25 2020-12-25 高周波電源システム
JPJP-P-2020-217562 2020-12-25

Publications (1)

Publication Number Publication Date
KR20220092800A true KR20220092800A (ko) 2022-07-04

Family

ID=82119914

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210183226A Pending KR20220092800A (ko) 2020-12-25 2021-12-20 고주파 전원 시스템

Country Status (3)

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US (1) US11756768B2 (enExample)
JP (1) JP7544594B2 (enExample)
KR (1) KR20220092800A (enExample)

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KR102791775B1 (ko) 2019-05-07 2025-04-03 램 리써치 코포레이션 폐루프 다중 출력 rf 매칭
JP7566873B2 (ja) 2019-07-31 2024-10-15 ラム リサーチ コーポレーション 複数の出力ポートを有する無線周波数電力発生器
WO2021113387A1 (en) * 2019-12-02 2021-06-10 Lam Research Corporation Impedance transformation in radio-frequency-assisted plasma generation
US11994542B2 (en) 2020-03-27 2024-05-28 Lam Research Corporation RF signal parameter measurement in an integrated circuit fabrication chamber
KR20230021739A (ko) 2020-06-12 2023-02-14 램 리써치 코포레이션 Rf 커플링 구조체들에 의한 플라즈마 형성의 제어
JP7691330B2 (ja) * 2021-09-29 2025-06-11 株式会社ダイヘン インピーダンス整合器および高周波電源システム
JP7633133B2 (ja) * 2021-09-30 2025-02-19 株式会社ダイヘン 高周波電源装置
TW202442033A (zh) * 2022-11-30 2024-10-16 日商東京威力科創股份有限公司 電漿處理裝置、電源系統及頻率控制方法
JP2024095373A (ja) 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電力供給システム
JP2024095370A (ja) 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電力供給システム
JP2024094846A (ja) 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電源装置
JP2024094788A (ja) 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電源装置
JP2024095372A (ja) 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電力供給システムの制御方法
JP2024095374A (ja) * 2022-12-28 2024-07-10 株式会社ダイヘン 高周波電力供給システム

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JP2018536295A (ja) 2015-09-01 2018-12-06 エムケーエス インストゥルメンツ，インコーポレイテッド プラズマｒｆバイアス消去システム

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US10276350B2 (en) 2013-05-09 2019-04-30 Lam Research Corporation Systems and methods for using computer-generated models to reduce reflected power towards an RF generator during state transitions of the RF generator by controlling RF values of the RF generator
US9831071B2 (en) 2013-05-09 2017-11-28 Lam Research Corporation Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network model
US9711332B2 (en) 2013-05-09 2017-07-18 Lam Research Corporation Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator
US10469108B2 (en) 2013-05-09 2019-11-05 Lam Research Corporation Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator
US10621265B2 (en) 2013-05-09 2020-04-14 Lam Research Corporation Systems and methods for tuning an impedance matching network in a step-wise fashion
JP6814693B2 (ja) 2017-05-10 2021-01-20 東京エレクトロン株式会社 マイクロ波出力装置及びプラズマ処理装置
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774159A (ja) 1993-09-03 1995-03-17 Anelva Corp プラズマ処理方法およびプラズマ処理装置
KR100304669B1 (ko) 1999-09-09 2001-11-07 윤종용 강유전체 전계 효과 트랜지스터 적외선 센서 및 그 제조 방법과 작동 방법
JP2018536295A (ja) 2015-09-01 2018-12-06 エムケーエス インストゥルメンツ，インコーポレイテッド プラズマｒｆバイアス消去システム
JP2017188434A (ja) 2016-03-04 2017-10-12 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ より低い周波数のｒｆ発生器の周期においてより高いｒｆ発生器に向かって反射する電力を低減し、反射電力を低減させるための関係を用いるシステムおよび方法

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US11756768B2 (en) 2023-09-12
JP7544594B2 (ja) 2024-09-03
JP2022102688A (ja) 2022-07-07
US20220208519A1 (en) 2022-06-30

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