KR20210145471A - Rotary module coupled ionizer - Google Patents

Abstract

In accordance with the present invention, a rotary module-combined ionizer includes: a body having at least one storage space formed therein, and having an insertion groove formed to communicate with the storage space; an X-ray tube module inserted into the storage space of the body, while including a first connector socket having a first connector, and an X-ray tube electrically connected with the first connector; a rotor formed on one side of the storage space of the body, and combined to be rotatable around a rotation axis; and a second connector socket combined with the rotor to be rotatable by the rotation of the rotor, and including a second connector delivering power to the first connector. Therefore, the second connector socket is combined with the first connector socket of the X-ray tube module on the outside of the body to bring the first connector into electric contact with the second connector, and then, as the X-ray tube module is rotated, the rotor is rotated to lead the X-ray tube module to be stored in the storage space.

Description

Rotary module coupled ionizer

The present invention relates to a rotary module coupled type ionizer, and more particularly, to a rotary module coupled type ionizer formed in a structure in which an X-ray tube module can be easily attached and detached.

In general, in the manufacturing process of LCD and semiconductor, it is common to install a static electricity removal device in order to prevent problems such as attachment of fine dust to LCD or semiconductor wafers or damage to elements due to static electricity in advance.

The static electricity removal device is largely divided into a corona equation device and an X-ray radiation device. Recently, an X-ray radiation device that overcomes the disadvantages of the corona equation device, such as sputtering caused by high voltage discharge, ozone gas release, and inconvenience caused by ion balance adjustment. A device, that is, an X-ray ionizer is mainly used.

The X-ray ionizer is a device that neutralizes static electricity on the surface of an object to be discharged by generating and radiating X-rays to ionize gas molecules, and is mainly implemented by irradiating soft X-rays. Since these X-ray ionizers do not generate fine dust and do not require air convection, they have received more attention and have been developed in various ways.

Republic of Korea Patent No. 10-1656781 'X-ray ionizer with easy replacement of X-ray tube' is a patent registered on September 6, 2016, filed by the present applicant on February 5, 2016, and is an easy-to-replace X-ray tube It relates to an X-ray ionizer, comprising: an X-ray tube module to which a specially manufactured fastening bolt is mounted in a latching manner, a voltage generating assembly formed so as to be detachable from the X-ray tube module, and a body accommodating the voltage generating assembly therein; Including, as the X-ray tube module is easily detached from the voltage generating assembly accommodated in the body using a fastening bolt, there is an effect that only the X-ray tube, which is a consumable part, can be easily replaced by an operator without a separate tool.

However, in the case of the above technique, the second electrode part in the X-ray tube module is oriented in the vertical insertion direction due to a limitation in the configuration in which the X-ray tube module is simply vertically inserted into the voltage generating assembly, and the end of the second electrode part by the action of gravity When a high voltage is applied as well as the problem of concentration of the load on the face part. There was a disadvantage in that it was difficult to secure sufficient creepage distance to prevent the occurrence of creepage discharge.

Korean Patent Laid-Open Patent No. 10-2020-0046850 'X-ray ionizer with easy attachment and detachment of X-ray tube and secure discharge safe distance' to solve the problems of the prior art was filed by the applicant on October 26, 2018 As a patent published on May 7, 2020, it relates to an X-ray ionizer that is easy to attach and detach an X-ray tube and has a safe discharge distance. It relates to an X-ray ionizer having a sufficient creepage distance to prevent discharge, and it is difficult to visually check the connector part when attaching and detaching the X-ray tube module due to a configuration limitation in which the X-ray tube module slides into the voltage generating assembly. Due to this, there was a problem in that it was inconvenient to combine the X-ray tube module.

Republic of Korea Patent Registration No. 10-1656781 (2016.09.06.) Republic of Korea Patent Publication No. 10-2020-0046850 (2020.05.07.)

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problem, and after the second connector socket is coupled to the first connector socket of the X-ray tube module from the outside of the body, the X-ray tube module is rotated so that the X-ray tube module is placed in the receiving space. An object of the present invention is to provide a rotatable module-coupled ionizer in which the body and the X-ray tube are easily detachable by being accommodated.

Objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those of ordinary skill in the art from the following description.

In order to achieve the above object, the rotational module coupled type ionizer according to the present invention includes a body having at least one receiving space formed therein, an insertion groove communicating with the receiving space, and being inserted into the receiving space of the body. , an X-ray tube module including a first connector socket having a first connector and an X-ray tube electrically connected to the first connector, a rotation formed on one side of the receiving space of the body and rotatably coupled around a rotation axis A second connector socket coupled to the entire body and the rotating body, rotatable by the rotation of the rotating body, and including a second connector for transmitting power to the first connector, the X-ray tube from the outside of the body After the second connector socket is coupled to the first connector socket of the module so that the first connector is in electrical contact with the second connector, the rotating body rotates as the X-ray tube module is rotated to rotate the X-ray tube module It is characterized in that it is accommodated in the storage space.

In addition, when the X-ray tube module is coupled to the second connector socket from the outside, the body is characterized in that the anti-collision groove is formed on the side of the insertion groove so as not to collide with the body.

In addition, a portion of the second connector socket may protrude outside the insertion groove by rotation.

In addition, the first connector socket is formed with a cylindrical electrode part with an empty inside, a fixing protrusion for fixing the electrode part is formed, a recess is formed around the fixing protrusion, and an external protrusion is wrapped around the recess, The second connector socket has a protrusion formed around the pin-shaped second connector, and the pin-shaped second connector of the second connector socket is inserted into the hollow cylindrical electrode part of the first connector socket, Since the protrusion of the second connector socket is inserted into the groove of the first connector socket, a creepage distance, which is a distance between a contact point between the electrode part and the second connector, and an outer surface of the body made of metal, is sufficiently secured.

In addition, the second connector and the electrode part, when the X-ray tube module is accommodated in the accommodation space, characterized in that it is provided horizontally along the longitudinal direction of the body.

In addition, the rotating body is characterized in that the hinge type rotatable about the axis of rotation.

In the rotary module coupling type ionizer according to the present invention, when the X-ray tube module is coupled to the body, the coupling between the second connector socket and the first connector socket of the X-ray tube module protruding from the outside of the body is performed on the outside of the body. It is possible to visually check the connector part when attaching and detaching the module, thereby facilitating attachment and detachment.

In addition, a receiving space is formed on one side of the body and coupled to the first connector socket of the X-ray tube module from the outside by a rotating body rotatably installed on one side of the receiving space and a second connector socket extending from the rotating body As the soft X-ray tube module is rotated and accommodated inside the receiving space, there is an effect of facilitating detachment of the module from the outside.

In addition, the pin-shaped second connector of the second connector socket is inserted into the cylindrical electrode part with an empty inside of the first connector socket, and the protrusion of the second connector socket is inserted into the groove of the first connector socket, so that the There is an effect that the creepage distance, which is the distance between the electrode part and the contact point of the second connector, and the outer surface of the body made of metal, is sufficiently secured.

1 is a perspective view showing the configuration of a rotary module coupled type ionizer according to the present invention.
2 is an exploded perspective view of an X-ray tube module according to the present invention.
3 is an enlarged cross-sectional view showing the relationship between the X-ray tube module and the rotating body before the coupling according to the present invention.
4 is an enlarged cross-sectional view and an enlarged view of the main part showing the coupling relationship between the X-ray tube module and the rotating body according to the present invention.
5 is a conceptual diagram illustrating before and after coupling of an X-ray tube module and a rotating body according to an embodiment of the present invention.
6 is a conceptual diagram illustrating before and after coupling of an X-ray tube module and a rotating body according to another embodiment of the present invention.
7 is a conceptual diagram illustrating a process in which the X-ray tube module according to the present invention is rotated and moved into a storage space.

Advantages and features of the present invention, and methods of achieving them, will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

Detailed contents for carrying out the present invention will be described in detail with reference to the accompanying drawings below. Regardless of the drawings, like reference numbers refer to like elements, and "and/or" includes each and every combination of one or more of the recited items.

Although the first, second, etc. are used to describe various elements, these elements are not limited by these terms, of course. These terms are only used to distinguish one component from another. Accordingly, it goes without saying that the first component mentioned below may be the second component within the spirit of the present invention.

The terminology used herein is for the purpose of describing the embodiments, and is not intended to limit the present invention. As used herein, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and/or “comprising” does not exclude the presence or addition of one or more other components in addition to the stated components.

Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing the configuration of a rotary module coupled type ionizer according to the present invention.

Referring to FIG. 1 , the rotary module combination type ionizer largely includes an X-ray tube module 100 , a body 200 , a voltage generating module (not shown), a rotating body 300 and a second connector socket 320 . do.

First, the body 200 has one or more accommodating spaces 205 formed therein, and an insertion groove 210 communicating with the accommodating space 205 is formed therein. In addition, the body 200 may be formed in a bar shape.

More specifically, as an example of the body 200 in FIG. 1 , a bar-shaped structure in which a plurality of X-ray tube modules can be mounted along the longitudinal direction thereof is shown. However, the body 200 may be formed in various length structures, such as being formed in a length structure corresponding to the size of a single X-ray tube module, and also the accommodation spaces 205 are formed in various numbers corresponding to the length. can be That is, the size of the body 200 and the number of the storage spaces 205 corresponding to the number of modules that can be accommodated inside the body 200 can be designed with various specifications depending on various factors such as the antistatic environment. is of course

Next, the X-ray tube module 100 is inserted into the receiving space 205 of the body 200 , the first connector socket 120 having a first connector 130 , the first connector 130 , and It includes an X-ray tube 110 that is electrically connected.

Next, at least one voltage generating module (not shown) may be formed in the body 200 , and it is not excluded that it may be provided not only inside the body 200 but also outside the body 200 . . The voltage generating module receives a voltage from the outside to generate a voltage, and the voltage generating module may be configured with various specifications based on its capacity in response to various factors such as a static-elimination environment.

Next, the rotating body 300 is formed on one side of the receiving space 205 of the body 200, and is rotatably coupled around a rotating shaft. In addition, one side includes an insertion hole 310 having a groove into which the rotation shaft is inserted. The rotation shaft will be described in more detail below.

Next, the second connector socket 320 is coupled to the rotating body 300 to be rotatable by the rotation of the rotating body 300 , and a second connector for transmitting power to the first connector 130 ( 330). The second connector 330 may be electrically connected to any one or more of the voltage generating modules provided with at least one in the body 200 . Also, the second connector 330 may receive a voltage from the voltage generating module through a voltage wire.

The X-ray tube module 100 is detachable through the physical and electrical coupling of the first connector socket 120 and the second connector socket 320 to the body 200 through the lower one side of the body 200 . is installed That is, in the mutually coupled state, the voltage generated by the voltage generating module is transmitted to the X-ray tube 110 so that X-rays for removing static electricity can be radiated. (100) can be easily separated from the body (200) to perform a replacement operation.

At this time, in the X-ray tube module 100 and the rotating body 300 , the first connector socket 120 and the second connector socket 320 respectively provided on the outside of the insertion groove 210 are coupled to each other, and the When the tube module 100 is rotated, it is rotated by the rotating body 300 and accommodated in the receiving space 205 in the body 200 . A more detailed description will be given later.

Although FIG. 1 shows a state in which a plurality of unit ionizers 201 are inserted into the bar-type body 200, the unit ionizer 201 is inserted into the bar-type body 200 without configuring the unit ionizer 201. Of course, the voltage generating module (not shown), the rotating shaft 301, the second connector socket 320, etc. which are components of ) can be directly inserted. In addition, the unit ionizer 201 may have the same structure as the body 200 , and may also be formed as a single unit structure like the unit ionizer 201 .

2 is an exploded perspective view of an X-ray tube module according to the present invention. As shown in FIG. 2 , the X-ray tube module 100 is connected to an X-ray tube 110 that generates and radiates soft X-rays and the X-ray tube 110 to deliver a voltage to the X-ray tube 110 . A first connector including a first connector 130 as a basic configuration, a support cover for protecting and supporting the X-ray tube 110 and a first connector coupled to the support cover in a sliding manner to support and fix the first connector 130 . A socket 120 is provided.

The first connector 130 includes an electrode part 131 selectively detachably connected to the second connector 330 and an X-ray tube electrode part 132 connected to the X-ray tube 110 .

The electrode unit 131 is inserted into a portion protruding from the inner central portion of the first connector socket 120 and is installed to be perpendicular to the central axis of the X-ray tube 110 , and the X-ray tube electrode unit 132 has one end. The upper portion of the X-ray tube is horizontally coupled, and the other end is disposed behind the first connector socket 120 .

At this time, it is preferable that the other end of the X-ray tube electrode part 132 is bent and extended downwardly, and it is stably coupled to the electrode part 131 and the coupling bolt 133 by means of a bolt fastening method.

In other words, the first connector 130 is fixed to be connected to the X-ray tube 110 by the first connector socket 120 , and the electrode part 131 is located in front of the X-ray tube module 100 . is disposed to face, and the X-ray tube electrode part 132 is installed so as to be in contact with the upper portion of the X-ray tube 110 to be connected.

3 is an enlarged cross-sectional view showing the relationship between the X-ray tube module and the rotating body before the coupling according to the present invention.

Referring to FIG. 3 , a receiving space 205 is recessed in one side of the body 200 so that the X-ray tube module 100 is inserted, and a rotating shaft 301 is provided at one side of the receiving space 205 .

The rotating shaft 301 is inserted into the insertion hole 310 of the rotating body 310 , the rotating body 300 rotatably coupled to the rotating shaft 301 is installed, and is coupled to the rotating body 300 . A second connector socket 320 that extends and is rotated by the rotation of the rotating body 300 is provided.

In other words, an insertion hole 310 is formed on one side of the rotation body 300 , and the insertion hole 310 is inserted into the rotation shaft 301 , so that the rotation body 300 rotates the rotation shaft 301 . rotated around the center

In addition, although the rotation of the rotating body 300 has been described above by taking the hinge method as an example, a rotation method using a ball bearing, a rotation method using a cog wheel, a rotation method by a spring, etc. may also be used.

The second connector 330 that is physically coupled to the first connector 130 and transmits the voltage is installed on one side of the second connector socket 320 , and the second connector 330 is connected to the second connector 330 . It is secured by a connector socket 320 .

The second connector 330 is connected to the voltage generating module (not shown) with a voltage wire (not shown) to transmit the voltage generated from the voltage generating module to the second connector 330 . Here, the high-voltage cable is preferably installed so that the second connector 330 and the second connector socket 320 can be freely rotated by the rotating body 300 .

To describe the first connector socket 120 and the second connector socket 320 in more detail, the first connector socket 120 has the hollow cylindrical electrode part 131 formed therein, A fixing protrusion 121 for fixing the electrode part 131 is formed. A recess 122 is formed around the fixing protrusion 121 , and the outer protrusion 123 surrounds the recess 122 .

The second connector socket 320 has a protrusion 321 formed around the pin-shaped second connector 330 .

4 is an enlarged cross-sectional view and an enlarged view of the main part showing the coupling relationship between the X-ray tube module and the rotating body according to the present invention.

Referring to FIGS. 3 to 4 , the coupling relationship between the X-ray tube module 100 and the rotating body 300 will be described. As shown in FIG. 4 , the first of the X-ray tube module 100 from the outside. After the second connector socket 320 is coupled to the first connector socket 120 , the X-ray tube module 100 is rotated to accommodate the X-ray tube module 100 inside the accommodation space 205 .

The pin-shaped second connector 330 of the second connector socket 320 is inserted into the cylindrical electrode part 131 in which the inside of the first connector socket 120 is empty, and the second connector socket 320 is inserted into the second connector socket 320 . The protrusion 321 is inserted into the recess 122 of the first connector socket 120 . Accordingly, a creepage distance that is a distance between the contact point between the electrode part 131 and the second connector 330 and the outer surface of the body 200 made of metal can be sufficiently secured.

When the applied voltage value is 11.2 kV based on the CEI IEC 60065 international standard, the minimum creepage distance is 32 mm or more. The creepage distance, which is a distance from the outer surface of the body 200, will be at least 32 mm.

In order to secure such a creepage distance, as shown in FIG. 4 , the electrode part 131 and the second connector ( The distance between the contact point of the 330) and the outer surface of the body 200 made of metal is preferably formed in a length structure that can be spaced apart by a predetermined distance or more. That is, as shown in FIG. 4 , the electrodes are configured to be spaced apart from each other by a predetermined distance based on the fully coupled state.

To be more specific, in the present invention, the first connector 130 and the second connector 330 are formed in a socket structure, and a plurality of protrusions are male and female to face each other due to the nature of the socket structure. Accordingly, the edge length is increased by an amount corresponding to the number and width of the protrusions compared to the same reference unit space, and accordingly, the creepage distance, which is a distance through which the discharge can be guided, is also increased.

That is, by changing the design of the number of protrusions and the width of each protrusion in the above-described socket structure, it is possible to secure a creepage distance corresponding to the applied voltage value such as the aforementioned international standard.

As a specific example of this, the fixing protrusion 121 of the first connector socket 120, the recess 122, the external protrusion 123, and the protrusion 321 of the second connector socket 320 are included. Thus, by changing the length (width) structure of the peripheral components directly/indirectly coupled to the second connector 330 , it may be configured to secure a creepage distance corresponding to the applied voltage value of the ionizer.

On the other hand, when the X-ray tube module 100 is accommodated inside the accommodation space 205 , the second connector 330 and the electrode part 131 move in the longitudinal direction (horizontal direction) of the body 200 . provided horizontally.

This is because in the case of the body 200 implemented in a bar shape, the length of the length axis is much longer than the width due to the basic bar structure, and it is of course necessary to use the length axis of the body 200 to secure the above-mentioned creepage distance. This is because it is much more advantageous in terms of interference and space utilization.

On the other hand, as for the coupling structure of the first connector 130 and the second connector 330 , the coupling between the electrode part 131 and the second connector 330 was described using a male-female coupling method as an example, but coupling using a foot seal spring A structure, a coupling structure using a banana chirp, a coupling structure using a leaf spring, etc. can also be used.

5 is a conceptual diagram illustrating before and after coupling of an X-ray tube module and a rotating body according to an embodiment of the present invention, and FIG. 6 is a view showing before and after coupling of an X-ray tube module and a rotating body according to another embodiment of the present invention It is a conceptual diagram.

5 to 6 , a portion of the second connector socket 320 may protrude outside the insertion groove 210 by rotation.

As shown, in the soft X-ray module 100 coupling preparation state, when the soft X-ray module and the connector are coupled in the width direction (vertical direction) of the bar as in the prior art, space interference may occur, to prevent this For this purpose, a structure (protrusion structure) in which the second connector socket 320 is positioned downward by a predetermined distance or more compared to the prior art is preferable.

On the other hand, in the case of the maximum tilting angle of the second connector socket 320, the soft X-ray module from the outside of the receiving space 205 or the body 200, as shown in Fig. 5 (a) or Fig. 6 (a). (100) may be configured by variously changing within a range that can be combined without occurrence of interference.

7 is a conceptual diagram illustrating a process in which the X-ray tube module according to the present invention is rotated and moved into a storage space.

Therefore, the rotatable module coupling type ionizer including the configuration as described above is the second connector socket 320 to the first connector socket 120 of the soft X-ray module 100 from the outside of the insertion groove 210 . After being coupled to, that is, the first connector 130 and the second connector 330 are coupled, and the X-ray tube module 100 is rotated so that the X-ray tube module 100 is placed in the receiving space 205 . accommodated inside. In this case, the rotation shaft 301 provided in the receiving space 205 and the rotation body 300 are rotatably coupled, and the first connector socket 320 is extended to the rotation body 300 . This is because the connector socket 120 is coupled.

Here, as shown in (b) of Figure 7, the X-ray tube module 100 from the outside of the body 200 so as not to collide with the body 200, the side surface of the insertion groove 210 to prevent collision A groove 211 is formed. The anti-collision groove 211 may be formed to extend from the insertion groove 210 or may be formed separately. Preferably, the anti-collision groove 211 is formed to extend from the insertion groove 210 by cutting a portion of the outer surface of the body 200 .

As shown in (b) of FIG. 5 , when the X-ray tube module 100 is directed to the outside while being connected to the second connector socket 320 , a portion of the X-ray tube module 100 is inevitably the body. (200) It is preferable that an appropriate escape space is formed, and the collision prevention groove 211 is formed corresponding to the escape space because an interference phenomenon such as collision occurs when facing the outer surface.

Therefore, in the rotary module-coupled ionizer having the configuration as described above, the second connector socket 320 is connected to the first connector socket 120 of the X-ray tube module 100 from the outside of the body 200 . After being coupled so that the first connector 130 makes electrical contact with the second connector 330, the rotating body 300 rotates as the X-ray tube module 100 is rotated to rotate the X-ray tube module ( 100) may be accommodated in the storage space 205 .

In addition, after the X-ray tube module 100 is accommodated in the receiving space 205 , the method of coupling the X-ray tube module 100 to the body 200 may be fastened using bolts, knobs, and hooks. The X-ray tube module 100 can be fastened to the bar-type body 200 by various methods such as , cicada ring, falling ring, magnet, cam lock, ball flange, fixing pin, compression latch, captive screw, and the like. In addition, in the case of desorption, it is preferable to perform the above process in the reverse order.

Although embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

100: X-ray tube module 110: X-ray tube
120: first connector socket 121: fixing protrusion
122: groove 123: external protrusion
130: first connector 131: electrode part
200: body 201: unit ionizer
205: storage space 210: insertion groove
211: anti-collision groove 300: rotating body
301: rotation shaft 310: insertion hole
320: second connector socket 321: protrusion
330: second connector

Claims (6)

a body having one or more accommodating spaces formed therein, and having an insertion groove communicating with the accommodating space;
an X-ray tube module inserted into the receiving space of the body, the X-ray tube module including a first connector socket having a first connector and an X-ray tube electrically connected to the first connector;
a rotating body formed on one side of the receiving space of the body and rotatably coupled around a rotating shaft; and
Including; including;
The second connector socket is coupled to the first connector socket of the X-ray tube module from the outside of the body so that the first connector makes electrical contact with the second connector, and then rotates the X-ray tube module Rotational module coupled type ionizer, characterized in that the whole is rotated and the X-ray tube module is accommodated in the receiving space.
According to claim 1,
The rotatable module coupling type ionizer, characterized in that when the X-ray tube module is coupled to the second connector socket from the outside, a collision preventing groove is formed in the side of the insertion groove so as not to collide with the body in the body.
According to claim 1,
The second connector socket is a rotary module coupled type ionizer, characterized in that a part protrudes out of the insertion groove by rotation.
According to claim 1,
The first connector socket has an empty cylindrical electrode part formed therein, a fixing protrusion for fixing the electrode part is formed, a recess is formed around the fixing protrusion, and an external protrusion surrounds the recess,
The second connector socket has a protrusion formed around a pin-shaped second connector, and the pin-shaped second connector of the second connector socket is inserted into the hollow cylindrical electrode part of the first connector socket, The protrusion of the second connector socket is inserted into the groove of the first connector socket, so that a creepage distance, which is a distance between the contact point of the electrode part and the second connector, and the outer surface of the body made of metal, is sufficiently secured. Modular coupled ionizer.
5. The method of claim 4,
The second connector and the electrode part,
When the X-ray tube module is accommodated in the receiving space, the rotation type module coupled type ionizer, characterized in that provided horizontally along the longitudinal direction of the body.
According to claim 1,
The rotating body is a rotating module coupled type ionizer, characterized in that the hinge type rotatable about the axis of rotation.

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