JP4426003B2 - Ion carrier ionization apparatus and method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ion transport ionization apparatus and method for removing static electricity generated in a clean room.
[0002]
[Prior art]
Conventionally, the generation of static electricity has been a problem in clean rooms for manufacturing semiconductors, liquid crystal displays (hereinafter, LCDs) and the like. In the case of a semiconductor manufacturing clean room, the low humidity environment and the plastic containers that carry the wafer and the semiconductor element are easily charged, which causes static electricity. This static electricity causes dust to adhere to the wafer surface and destroys ICs and semiconductor elements on the wafer, thereby reducing the yield of products.
[0003]
In the case of an LCD, static electricity is generated due to frictional charging due to contact with different materials in the processing process. In particular, since the glass substrate used in the LCD has a large area and is highly insulating and easily generates static electricity, electrostatic breakdown due to a large amount of static electricity affects the yield of products.
[0004]
Therefore, conventionally, as an apparatus for removing static electricity in a production environment such as a clean room, an air ionization apparatus that neutralizes the charge of a charged body with ions is known. This air ionizer generates corona discharge by applying a positive or negative high voltage to a positive or negative electrode, respectively. Then, the air around the electrode tip is ionized to be positive and negative, and the ions are conveyed by an air flow to neutralize the charge on the charged body with ions of opposite polarity.
[0005]
[Problems to be solved by the invention]
However, in the conventional air ionization apparatus using the corona discharge described above, in order to facilitate the generation of ions and to prevent the consumption of the generated ions, the electrodes are disposed in the vicinity of the static elimination object. ing. For this reason, the following problems have occurred.
[0006]
(1) Ozone generation Since the air in the vicinity of the object to be neutralized is ionized by corona discharge, in addition to the ionization of nitrogen and water vapor in the air, a reaction in which oxygen becomes ozone also occurs. Oxidation of ozone oxidizes the surface of the silicon wafer or reacts with a small amount of impurities in the air to generate secondary particles.
[0007]
(2) Generation of electromagnetic noise Irregular electromagnetic waves generated from the discharge electrode at the time of discharge cause malfunction of precision equipment and computers having a built-in semiconductor element.
[0008]
(3) Each time the dust generation corona discharge from the ion generating electrode is caused, the electrode is worn, and the worn electrode material is scattered. Further, a trace gas component in the air is formed into particles by corona discharge and deposited on the ion generating electrode, and when it becomes a certain size, it is scattered again. Such dust generation reduces the yield.
[0009]
In recent years, manufacturing apparatuses such as semiconductors and LCDs have been downsized year by year, and it has become difficult for conventional air ionization apparatuses to secure an optimal installation space in the manufacturing apparatus. That is, in the conventional air ionization apparatus, in order to perform effective static elimination, a space of an appropriate size between the electrode for generating ions and the static elimination object, for example, a distance between the electrode and the static elimination object is 300 mm. Although it has been necessary to separate them as described above, it has become difficult to take such an installation space for the air ionizer with the recent miniaturization of manufacturing apparatuses.
[0010]
Further, for example, in the LCD manufacturing process, the glass substrate is significantly charged by contact and peeling. Therefore, conventionally, static elimination has been performed by the air ionizer as described above. However, since the processing speed of the production apparatus is high, the glass substrate is often stored in a cassette without being completely neutralized. In such a cassette, since the space between the glass substrate and the glass substrate stored is as narrow as several millimeters, when a conventional air ionizer is used, the ionized air flow does not enter and the glass substrate is neutralized. It was difficult. Accordingly, there is an increasing demand for countermeasures against static electricity in such a narrow space.
[0011]
The present invention has been proposed in order to solve the above-described problems of the prior art, and its purpose is to produce various production apparatuses without causing generation of ozone, electromagnetic noise, dust generation, and the like. It is an object of the present invention to provide an ion transport ionization apparatus and method that can cope with downsizing and can perform static elimination even in a narrow space.
[0012]
[Means for Solving the Problems]
The invention according to claim 1 is a tube for supplying an ion carrier gas toward the vicinity of a charged body in order to remove static electricity, and an ion generator for ionizing a part of the ion carrier gas supplied into the tube. The ion generating apparatus includes: an ionization source built in the tube; and a control device provided outside the tube and including a power supply unit and a control unit of the ionization source. The ionization source is provided in the vicinity of the distal end portion of the tube, and at the distal end portion of the tube, a soft X-ray generated from the ionization source, a low energy electron beam, or an alpha ray from a radioisotope or A shielding part for shielding the radiation of β rays is formed, and the shielding part is formed by alternately forming a plurality of partition walls inside the tube. It is configured to prevent the progress of radiation from soft X-rays, the low energy electron beam or the radioisotope .
[0013]
The invention according to claim 4 captures the invention according to claim 1 from the viewpoint of a method, and in order to remove static electricity, an ion carrier gas is supplied toward the vicinity of the charged body by a tube, and In an ion transport ionization method in which a part of an ion transport gas supplied to a tube is ionized by an ion generator, of the ion generator, an ionization source is built in the tube, and a power supply unit and a control unit of the ionization source A control device provided outside the tube, the ionization source is provided in the vicinity of the tip of the tube, and at the tip of the tube, soft X-rays generated from the ionization source, a low energy electron beam, Alternatively, a shielding part for shielding α-ray or β-ray radiation from the radioisotope is provided, and the shielding part has a plurality of partition walls inside the tube. By being formed in a different manner, the progress of radiation from the soft X-ray, the low energy electron beam or the radioisotope is prevented .
[0014]
According to a second aspect of the present invention, there is provided a tube that supplies an ion carrier gas toward the vicinity of a charged body in order to remove static electricity, and an ion generator that ionizes a part of the ion carrier gas supplied into the tube. The ion generating apparatus includes: an ionization source built in the tube; and a control device provided outside the tube and including a power supply unit and a control unit of the ionization source. The ionization source is provided in the vicinity of the distal end portion of the tube, and at the distal end portion of the tube, a soft X-ray generated from the ionization source, a low energy electron beam, or an alpha ray from a radioisotope or A shielding part for shielding β-ray radiation is formed, and the shielding part bends the tube twice at a substantially right angle so that the soft X-ray, It is comprised so that the progress of the low energy electron beam or the said radiation may be prevented.
[0015]
The invention according to claim 5 captures the invention according to claim 2 from the viewpoint of a method, and in order to remove static electricity, an ion carrier gas is supplied toward the vicinity of the charged body by a tube, and In an ion transport ionization method in which a part of an ion transport gas supplied to a tube is ionized by an ion generator, of the ion generator, an ionization source is built in the tube, and a power supply unit and a control unit of the ionization source A control device provided outside the tube, the ionization source is provided in the vicinity of the tip of the tube, and at the tip of the tube, soft X-rays generated from the ionization source, a low energy electron beam, Alternatively, a shielding part for shielding α-ray or β-ray radiation from the radioisotope is provided, and the shielding part bends the tube twice at a substantially right angle. By bending, the progress of the soft X-ray, the low energy electron beam or the radiation is prevented.
[0016]
According to a third aspect of the present invention, there is provided a tube for supplying an ion carrier gas toward the vicinity of a charged body in order to remove static electricity, and an ion generator for ionizing a part of the ion carrier gas supplied into the tube. The ion generating apparatus includes: an ionization source built in the tube; and a control device provided outside the tube and including a power supply unit and a control unit of the ionization source. The ionization source is provided in the vicinity of the distal end portion of the tube, and at the distal end portion of the tube, a soft X-ray generated from the ionization source, a low energy electron beam, or an alpha ray from a radioisotope or A shielding part for shielding β-ray radiation is formed, and the shielding part branches the tube into a plurality of outlets, thereby reducing the soft X-rays, It is comprised so that the progress of the radiation from an energy electron beam or the said radioisotope may be prevented.
[0017]
The invention described in claim 6 captures the invention described in claim 3 from the viewpoint of the method. In order to remove static electricity, an ion carrier gas is supplied toward the vicinity of the charged body by a tube, and In an ion transport ionization method in which a part of an ion transport gas supplied to a tube is ionized by an ion generator, of the ion generator, an ionization source is built in the tube, and a power supply unit and a control unit of the ionization source A control device provided outside the tube, the ionization source is provided in the vicinity of the tip of the tube, and at the tip of the tube, soft X-rays generated from the ionization source, a low energy electron beam, Alternatively, a shielding part for shielding α-ray or β-ray radiation from the radioisotope is provided, and the shielding part branches the tube into a plurality of outlets. This prevents the progress of radiation from the soft X-ray, the low energy electron beam or the radioisotope.
[0019]
In the above aspect, when radiation from soft X-rays, low-energy electron beams or radioisotopes is generated from the ionization source, they are leaked to the outside by forming a shielding portion at the tip of the tube. Can be prevented. Soft X-rays, low-energy electron beams, and radiation from radioisotopes can be sufficiently shielded by, for example, a thin vinyl chloride plate, and since there is almost no reflection, form a shielding part with a simple structure. Can do.
[0022]
Moreover, it is not necessary to cover the entire production apparatus such as a semiconductor or an LCD with a vinyl chloride plate or the like to shield radiation from soft X-rays, low-energy electron beams, and radiation isotopes, and a simple configuration can be achieved. Therefore, the application range of this ion transport ionizer is widened.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.
[0024]
[1. First Embodiment]
[1-1. Constitution]
FIG. 1 is a schematic diagram showing a configuration of an ion transport ionization apparatus according to a first embodiment of the present invention. In the figure, reference numeral 1 denotes a tube, which is made of, for example, fluorine resin or vinyl chloride resin, and has an inner diameter of about 15 mm. In addition, the thickness of the said fluororesin or vinyl chloride resin is a thickness which can absorb this soft X ray, when using soft X ray as an ionization source so that it may mention later. In the case of vinyl chloride resin, the thickness can be sufficiently shielded with a thickness of 2 mm. Further, the distal end portion 1 a of the tube 1 is disposed in the vicinity of the charged body S, and positive and negative ions generated in the ion generator 5 are supplied toward the charged body S. That is, in the present embodiment, the “tip portion” of the tube 1 refers to the outlet side of the ion carrier gas, that is, the charged body side.
[0025]
The tube 1 is supplied with air in a clean room or the like or non-reactive gas (hereinafter referred to as ion carrier gas) such as high-purity N ₂ gas. Here, "high purity N ₂ gas" includes a degree of oxygen and water vapor to form negative ions, and, in N ₂ gas that oxygen concentration is enough not to generate ozone (approximately 5%) It shall be.
[0026]
Further, 2 is a valve, and 3 is a flow meter, and these adjust the flow rate of the ion carrier gas in the tube 1. A membrane filter 4 collects dust in the ion carrier gas.
[0027]
Further, an ion generator 5 is provided in the vicinity of the distal end portion 1 a of the tube 1. The ion generator 5 includes an ionization source 6 disposed inside the tube 1 and a control device 7 for the ionization source 6. Here, the ionization source 6 includes a generator of a soft X-ray generator, a generator of a low energy electron beam generator, a sealed radioisotope, a generator of an ultraviolet generator, an ionizer using creeping discharge, and the like. An ion carrier gas flowing inside is configured to be ionized.
[0028]
Here, soft X-rays are weak X-rays having an energy of about 3 to 9.5 keV, and can be easily shielded by a 2 mm-thick vinyl chloride plate. The low energy electron beam is an electron beam (soft electron) extracted at a low operating voltage of several tens of kV by, for example, an ultra-compact electron beam irradiation tube manufactured by USHIO INC., And reaches about 5 cm in the air. Ionize the region with distance. Note that since a low energy electron beam generates ozone in a gas containing oxygen, in this embodiment, a non-reactive gas containing oxygen that does not generate ozone, such as high-purity N ₂ gas, is used. . Further, since soft X-rays are also generated, shielding is necessary.
[0029]
Further, the sealed radioisotope is obtained by encapsulating a radioisotope in a capsule or the like, and examples of the radioisotope include americium 241 that generates α rays and nickel 63 that generates β rays. The energy of α rays generated from americium 241 is about 5.4 MeV, and the ionization effect is large, but the reach distance in air is about several centimeters, and can be easily shielded with one sheet of paper. Further, the energy of β rays generated from the nickel 63 is about 57 keV and can be easily shielded by a resin plate.
[0030]
Moreover, the ultraviolet rays generated from the ultraviolet ray generator have a short wavelength of 400 nm or less and an output of about 30 w. When the ionization source 6 is a soft X-ray generation part or a sealed radioisotope, either an air or a non-reactive gas may be used as an ion carrier gas supplied to the tube 1. In the case of the generation part or the generation part of ultraviolet rays, a non-reactive gas containing oxygen to the extent that ozone is not generated, such as high purity N ₂ gas, is used.
[0031]
Furthermore, an example of an ionizer by creeping discharge is shown in FIG. As shown in this figure, the ionizer 11 has an internal electrode 13 and an external electrode 14 provided inside and outside a hexahedral derivative 12 made of ceramics or the like. Five of the six surfaces constituting the dielectric 12 are grounded, and an AC high voltage from an AC high voltage power source in the control device 7 is applied to the internal electrode 13. With such a configuration, when an alternating high voltage is applied to the internal electrode 13, a high voltage is generated on the surface of the derivative 12 by induction, and a discharge is generated in a planar shape with the grounded external electrode 14. In this embodiment, non-reactive gas such as high purity N ₂ gas is used to generate ozone in a gas containing more than 5% oxygen.
[0032]
The distance L ₁ from the tip 1a of the tube 1 to the ionization source 6 is a distance that does not attenuate the generated ions, that is, within 20 cm.
Further, the control device 7 includes a power supply unit and a control unit for generating soft X-rays, low energy electron beams, ultraviolet rays or creeping discharge from the ionization source 6, and is connected to the ionization source 6 by a cable 8.
[0033]
Further, a shielding portion 9 is provided at the distal end portion 1 a of the tube 1. As shown in FIG. 1, for example, the shielding part 9 is composed of a plurality of partition walls 10, 10,. The partition walls 10, 10,... Are alternately formed at an upper portion and a lower portion of the tube 1 with a certain interval. That is, when the ionization source 6 is a soft X-ray generator, a low-energy electron beam generator, or a sealed radioisotope, radiation from the straight soft X-ray, electron beam, or radioisotope (α ray or β ray) ) Hits the partition walls 10, 10,... And is shielded so that they do not leak to the outside. If the ionization source 6 is an ultraviolet ray generating part or a creeping discharge generating part, the shielding part 9 is not necessary.
[0034]
[1-2. Effect]
Next, the effect of this Embodiment which has the structure mentioned above is demonstrated. That is, the ion carrier gas supplied to the tube 1 and sequentially passing through the valve 2, the flow meter 3, and the membrane filter 4 is converted into soft X-rays, low energy electron beams, ultraviolet rays, creeping surfaces by an ionization source 6 built in the tube 1. By irradiating with radiation or radiation from a radioisotope, positive and negative ions are formed. Then, these positive and negative ions pass through the shielding portion 9 of the tube 1 and are supplied from the distal end portion 1a to the charged body S, and neutralize the positive and negative charges on the charged body S, respectively.
[0035]
As described above, in the present embodiment, when the ionization source 6 is a soft X-ray generation unit or a sealed radioisotope, ozone is not generated even when ionizing either air or non-reactive gas. . Further, there is no dust generation such as scattering of electrode materials, accumulation of impurities in the air, and re-scattering, and no electromagnetic noise occurs.
[0036]
Further, when the ionization source 6 is a low energy electron beam, ultraviolet ray or creeping discharge generating part, a non-reactive gas containing oxygen that does not generate ozone, such as high purity N ₂ gas, is used as an ion carrier gas. By using it, there is no generation of ozone during ionization, and no generation of dust and electromagnetic noise occurs.
[0037]
In addition, radiation from soft X-rays, low-energy electron beams, and sealed radioisotopes can be sufficiently shielded with a thin vinyl chloride plate, etc., and almost no reflection occurs, so the structure is simple as shown in FIG. Can be shielded. That is, the periphery of the tip 1a of the tube 1 can be made into a shielding structure, so that it is not necessary to separately shield when installing the ion transport ionization apparatus. Therefore, the application range of this ion transport ionizer is widened. Since the shielding portion 9 is formed around the tip 1a of the tube 1 in this way, it is necessary to cover the entire production apparatus with a vinyl chloride plate of about 2 mm in a production apparatus in which a conventional ionization source is exposed and installed. There is no.
[0038]
In addition, since the ionization source 6 and its control unit 7 serving as a power supply unit and a control unit are separately provided via the cable 8, only the ionization source 6 can be installed in the tube 1, thereby reducing the inner diameter of the tube 1. Can be small. For this reason, ions can be generated in a very narrow place, and neutralization can be performed even in a narrow space such as a gap between glass substrates stored in a cassette. Further, since the ionization source 6 is installed in the vicinity of the distal end 1a of the tube 1, it is possible to prevent the generated ions from adhering to the inner wall of the tube 1 and reducing the number thereof.
[0039]
[2. Second Embodiment]
[2-1. Constitution]
FIG. 3 is a schematic diagram showing the configuration of an ion transport ionization apparatus according to the second embodiment of the present invention. In the figure, members similar to those in the first embodiment shown in FIG. 1 described above are denoted by the same reference numerals, and description thereof is omitted.
[0040]
In this Embodiment, the front-end | tip part 1a of the tube 1 is bent by S shape, and the shielding part 19 is comprised by this bending part. That is, in this embodiment, the partition walls 10, 10,... Of the shielding part 9 shown in FIG. 1 are not provided. Instead, soft X-rays generated from the ionization source 6, low-energy electron beams, or It is configured to shield radiation from radioisotopes.
[0041]
In this case, the distance L ₂ from the ionization source 6 to the first bent portion 19a of the shielding portion 19, is about 5 cm. Further, in the ion generating device 5, the distance L ₃ from the control device 7 of the cable 18 to the ionization source 6, it is possible up to about 2m.
[0042]
[2-2. Effect]
In the present embodiment having the above-described configuration, the charge on the charged body S is removed as in the first embodiment described above. That is, when the ion carrier gas flows around the ionization source 6 in the tube 1, positive and negative ions are irradiated by irradiation with soft X-rays, low energy electron beams, ultraviolet rays, creeping discharges, or radioactive isotopes. Then, it passes through the shielding part 19 and is supplied from the front end part 1a to the charged body S. Then, the positive and negative charges on the charged body S are neutralized.
[0043]
As described above, according to the present embodiment, generation of ozone, generation of dust, and generation of electromagnetic noise can be eliminated and the inner diameter of the tube 1 can be reduced as in the first embodiment described above. Thus, it is possible to eliminate static electricity in a narrow place. Moreover, the radiation from a soft X-ray, a low energy electron beam, or a radioisotope can be shielded only by bending the periphery of the distal end portion 1a of the tube 1. In particular, when shielding a low-energy electron beam, the electron beam stalls at about 5 cm, so that the distance from the ionization source 6 to the bent portion 19a of the shielding portion 19 can be effectively shielded by setting the distance to about 5 cm.
[0044]
[3. Third Embodiment]
[3-1. Constitution]
FIG. 4 is a schematic diagram showing the configuration of an ion transport ionization apparatus according to the third embodiment of the present invention. In the figure, members similar to those in the first embodiment shown in FIG. 1 and the second embodiment shown in FIG. 3 are denoted by the same reference numerals, and description thereof is omitted.
[0045]
In this Embodiment, the shielding part 29 is comprised by forming the several blower outlets 21, 21, ... in the front-end | tip part 1a of the tube 1. As shown in FIG. That is, as shown in FIG. 4, in the vicinity of the ionization source 6, the tube 1 is branched into a plurality of (four in this embodiment) outlets 21, 21,... Both are parallel to the axial direction of the tube 1 but are not arranged on the extension of the axis. That is, when the ionization source 6 is a soft X-ray generator, a low-energy electron beam generator, or a sealed radioisotope, radiation from the straight soft X-ray, electron beam, or radioisotope strikes the wall 22. It is configured to be shielded so that they do not leak to the outside.
[0046]
[3-2. Effect]
In the present embodiment having the above-described configuration, the charges on the charged body S are removed as in the first and second embodiments described above. That is, when the ion carrier gas flows around the ionization source 6 in the tube 1, positive and negative ions are irradiated by irradiation with soft X-rays, low energy electron beams, ultraviolet rays, creeping discharges, or radioactive isotopes. Then, it passes through the shielding part 29 and is supplied to the charging body S from the respective outlets 21, 21,. Then, the positive and negative charges on the charged body S are neutralized.
[0047]
As described above, according to the present embodiment, generation of ozone, generation of dust, and generation of electromagnetic noise can be eliminated as in the first and second embodiments described above. Moreover, when the front-end | tip part 1a of the tube 1 branches to several blower outlets 21, 21, ..., the radiation from a soft X ray, a low energy electron beam, or a radioisotope can be shielded. Further, by increasing the number of outlets 21, 21,..., It is possible to deal with cases where the area of the charged body S is large or where charged portions are dispersed.
[0048]
[4. Other Embodiments]
In addition, this invention is not limited to embodiment mentioned above, The various aspects as shown below are also possible. That is, the specific shape of each member, the mounting position, and the method can be changed as appropriate. For example, the shape of the shielding portions 9 and 19 is not limited to the partition walls 10, 10,... As shown in FIG. 1 and the S-shape as shown in FIG. Any shape may be used as long as the radiation from the element does not leak to the outside and the generated positive and negative ions can be transported.
[0049]
Further, the ionization source 6 is not limited to a soft X-ray, a low energy electron beam, an ultraviolet ray or creeping discharge generation part, or a radioisotope, and may be one that does not generate ozone, generate dust, or generate electromagnetic noise due to ionization. For example, other electromagnetic waves or beams can be used.
[0050]
【The invention's effect】
As described above, according to the present invention, since the ionization source and its control device are provided separately and only the ionization source is arranged in the tube, the inner diameter of the tube can be reduced, and even in a narrow space. Static elimination can be performed. In addition, when using radiation from soft X-rays or radioisotopes as an ionization source, it is possible to eliminate generation of ozone and electromagnetic noise, and dust generation. When using low energy electron beams, ultraviolet rays, or creeping discharges, there is no reaction. By ionizing the reactive gas, generation of ozone and electromagnetic noise and generation of dust can be eliminated.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing the configuration of an ion transport ionization apparatus according to a first embodiment of the present invention.
FIG. 2 is a schematic perspective view showing an example of an ionizer by creeping discharge used in the embodiment.
FIG. 3 is a schematic diagram showing a configuration of an ion transport ionization apparatus according to a second embodiment of the present invention.
FIG. 4 is a schematic diagram showing a configuration of an ion transport ionization apparatus according to a third embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Tube 1a ... Tip part 5 ... Ion generator 6 ... Ionization source 7 ... Control apparatus 8, 18, 28 ... Cable 9, 19, 29 ... Shielding part 10 ... Partition 21 ... Outlet 22 ... Wall S ... Charged body

Claims (6)

An ion transport ionization apparatus comprising a tube for supplying an ion carrier gas toward the vicinity of a charged body to remove static electricity, and an ion generator for ionizing a part of the ion carrier gas supplied into the tube In
The ion generator is composed of an ionization source built in the tube, and a control device provided outside the tube and including a power supply unit and a control unit of the ionization source,
The ionization source is provided near the tip of the tube ,
At the tip of this tube, a shielding part is formed to shield the soft X-rays generated from the ionization source, low-energy electron beams, or α-rays or β-rays from radioactive isotopes,
The shielding part is configured to prevent the progress of radiation from the soft X-ray, the low energy electron beam or the radioisotope by forming a plurality of partition walls alternately in the tube. An ion transport ionizer characterized by An ion transport ionization apparatus comprising a tube for supplying an ion carrier gas toward the vicinity of a charged body to remove static electricity, and an ion generator for ionizing a part of the ion carrier gas supplied into the tube In
The ion generator is composed of an ionization source built in the tube, and a control device provided outside the tube and including a power supply unit and a control unit of the ionization source,
The ionization source is provided near the tip of the tube ,
At the tip of this tube, a shielding part is formed to shield the soft X-rays generated from the ionization source, low-energy electron beams, or α-rays or β-rays from radioactive isotopes,
The ion transport type , wherein the shielding part is configured to prevent the progress of the soft X-ray, the low energy electron beam or the radiation by bending the tube twice at a substantially right angle. Ionizer. An ion transport ionization apparatus comprising a tube for supplying an ion carrier gas toward the vicinity of a charged body to remove static electricity, and an ion generator for ionizing a part of the ion carrier gas supplied into the tube In
The ion generator is composed of an ionization source built in the tube, and a control device provided outside the tube and including a power supply unit and a control unit of the ionization source,
The ionization source is provided near the tip of the tube ,
At the tip of this tube, a shielding part is formed to shield the soft X-rays generated from the ionization source, low-energy electron beams, or α-rays or β-rays from radioactive isotopes,
The shielding part is configured to prevent the progress of radiation from the soft X-ray, the low energy electron beam or the radioisotope by branching the tube into a plurality of outlets. Ion transport ionizer. In an ion transport ionization method in which an ion carrier gas is supplied toward the vicinity of a charged body by a tube in order to remove static electricity, and a part of the ion carrier gas supplied to the tube is ionized by an ion generator.
Among the ion generators, an ionization source is built in the tube, a control device including a power supply unit and a control unit of the ionization source is provided outside the tube, and the ionization source is disposed near the tip of the tube. Provided ,
Provided at the tip of this tube is a shielding part for shielding soft X-rays generated from the ionization source, low-energy electron beams, or α-rays or β-rays from radioactive isotopes,
The shielding part is formed by alternately forming a plurality of partition walls inside the tube, thereby preventing the progress of radiation from the soft X-ray, the low energy electron beam or the radioisotope. Transport ionization method. In an ion transport ionization method in which an ion carrier gas is supplied toward the vicinity of a charged body by a tube in order to remove static electricity, and a part of the ion carrier gas supplied to the tube is ionized by an ion generator.
Among the ion generators, an ionization source is built in the tube, a control device including a power supply unit and a control unit of the ionization source is provided outside the tube, and the ionization source is disposed near the tip of the tube. Provided ,
Provided at the tip of this tube is a shielding part for shielding soft X-rays generated from the ionization source, low-energy electron beams, or α-rays or β-rays from radioactive isotopes,
The ion-carrying ionization method , wherein the shielding portion bends the tube twice at a substantially right angle to prevent the soft X-ray, the low energy electron beam, or the radiation from progressing . In an ion transport ionization method in which an ion carrier gas is supplied toward the vicinity of a charged body by a tube in order to remove static electricity, and a part of the ion carrier gas supplied to the tube is ionized by an ion generator.
Among the ion generators, an ionization source is built in the tube, a control device including a power supply unit and a control unit of the ionization source is provided outside the tube, and the ionization source is disposed near the tip of the tube. Provided ,
Provided at the tip of this tube is a shielding part for shielding soft X-rays generated from the ionization source, low-energy electron beams, or α-rays or β-rays from radioactive isotopes,
The ion shielding ionization method , wherein the shielding unit prevents the progress of radiation from the soft X-ray, the low energy electron beam or the radioisotope by branching the tube into a plurality of outlets. .

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