KR20210121134A - laser system - Google Patents

Abstract

Laser light sources 12a, 12b, feed optics 20 defining a preform-beam path 28 for the laser beam 14, and a beamforming-beam path 36 followed after the preform-beam path 28 A laser system (10) comprising beam forming optics (32) defining an effective light distribution (L). A steering optics module 44 is provided, wherein at least one laser beam 14 passes the steering optics module before the preform-beam path 28 , and the steering optics module 44 provides a variable optical power to the laser beam 14 . and at least one adjustable optical arrangement 52 to actuate. Also provided is a measurement optics module 56 , wherein the measurement optics module measures the effect of optical action in the steering optics module 44 on the beamforming-beam path 36 and/or the preform-beam path 28 . equipped to do

Description

laser system

The present invention relates in particular to a laser system or laser installation for producing an effective light distribution comprising a linear beam cross-section.

Such an effective light distribution is provided for example by an output beam, the output beam being spread along a diffusion direction, the effective light distribution comprising a linear beam cross-section with an intensity that does not dissipate and extends along a line segment direction in the working plane. Such a beam profile is used, for example, in the surface processing of semiconductors or glass, for example in the production of PFT displays, in the doping of semiconductors, in the production of solar cells, or in the production and processing of aesthetically formed glass surfaces for architectural purposes. do. Such a linear beam profile is scanned over the surface to be machined, eg perpendicular to the elongation direction of the line segment and at this position triggers the desired transformation or treatment process.

In order to produce the desired, in particular linear, effective light distribution from the laser light of one or more laser light sources, such a laser system generally comprises a plurality of functional units. In general, after the laser light source in the beam path, preferential feeding optics are provided, with which the laser beam is first preformed, eg suitable dilation, anamorphic deformation of the beam cross-section and/or optical propagation path. It is preformed by adjustment. The supply optics may for example be supplied by a plurality of laser light sources and may provide corresponding optical input channels. Beam forming optics are then provided in the beam path, which serve to create a unique linear effective light distribution. Beam forming optics generally comprise a number of optical elements, in particular deforming optics and homogenizing optics, by means of which an effective light distribution with a particularly linear beam cross-section is finally produced from the beam profiles of the individual laser light sources. Due to the many essential optical actions on the beam path, laser systems are complexly built and require mutually accurate coordination of the individual optical functional units. Such a laser system comprising the features of the preamble of claim 1 is described for example in WO 2018/019374 A1.

It is generally desirable for a laser system to be built compactly, especially when the laser system is used as part of a large production or processing plant. Some of the fields of use mentioned at the outset require operation under cleanroom conditions. Due to the infrastructure required for this, the installation space is particularly cost-intensive under cleanroom conditions. In this case, the compact construction of the mentioned laser system is very advantageous.

However, the design freedom in building compact optical arrangements for laser systems is often limited by the fact that multiple optics elements and optical fixtures in the laser system must be precisely adjusted with respect to each other. In the construction of a laser system at the target site, too complex beam paths result in coordination costs. Often, it is necessary to individually recalibrate the entire optics components. Thus, in practice, complex and at the same time very compact beam paths are often avoided in order to reduce the cost of construction and maintenance.

The task underlying the invention is to enable a compact design in the mentioned laser system while at the same time reducing the cost of adjustment.

This problem is solved by a laser system comprising the features of claim 1 . A laser system collectively refers, in particular, to an installation comprising a plurality of functional devices and/or elements, such as optics or actuators. In particular, the laser system comprises at least one laser light source for emitting at least one laser beam, and supply optics, the supply optics defining a preform-beam path for this at least one laser beam, in particular of the supply optics. Preform-beam path confinement from at least one optical input channel to at least one optical output channel of the supply optics. The laser system further comprises beam forming optics, wherein the beam forming optics follow the preform-beam path and define a beam forming-beam path, wherein the beam forming-beam path is effective from a laser beam of at least one optical output channel in the beam forming-beam path. The light distribution is formed. In this regard, the beam forming optics are arranged after the supply optics in the beam path and act on the supply optics, in particular the laser beams emitted from at least one optical output channel of the supply optics.

The laser system further includes at least one steering optics module, wherein the steering optics module is arranged such that the laser beam emitted from the laser light source passes through the steering optics module before the preform-beam path.

The steering optics module comprises at least one adjustable or adjustable, in particular controllable optics arrangement, the optics arrangement being configured to optically act on the laser beam in a variable manner. Further, at least one measurement optics module is provided, wherein the measurement optics module measures the effect of an optical action performed in the adjustment optics module on the at least one laser beam in the beamforming-beam path and/or the preform-beam path equipment and arranged to do so. In this regard, the measurement optics module is designed and arranged so that the response of the beam path to the actions generated using the steering optics module can be measured.

By acting on the laser beam using the steering optics module, the beam path can then be affected in subsequent optics and the response to this influence can be detected using the measuring optics module. For example, the action on the laser beam in the steering optics module can be performed in such a way that the beam path connected thereto includes certain desired optical properties. For example, when a new laser light source is installed in the laser system when the laser system is built at a construction site, it can be determined whether the beam forming-beam path includes predetermined reference properties by using the measurement optics module. If these reference properties do not exist, the beam path can be correspondingly influenced using the steering optics module.

In this regard, the laser light source can be adjusted in the laser system using the tuning optics module, while the optical elements of the complex beamforming-beam path and/or preform-beam path do not have to be changed for this purpose. Therefore, the beam forming optics and the supply optics may already be pre-calibrated before the laser system is built at the destination, for example, pre-calibrated during the manufacture of these optics. When constructing a laser system, the laser light source is simply adjusted to the system using a tuning optics module. This simplifies the adjustment. In addition, it is possible that complex optical equipment is already built in each housing in a finished state and remains in the housing during transport.

The adjustment optics module has in particular an interface function between the laser light source and the unique effective optical units (supply optics, beam forming optics) for generating an effective light distribution. The adjustment optics module in this regard can be formed so that such a module does not contribute to the intrinsic forming of the effective light distribution from the laser beams. That is, in particular the properties of the effective light distribution are defined on the one hand by the beam properties of the laser light source and on the other hand substantially only by the beam forming optics and the supply optics.

The adjustment optics module is preferably arranged directly behind the optical output of the laser light source and before the optical input channel of the supply optics, through which the laser beam is emitted.

Preferably, the beam forming optics comprise a decoupling element, with which the measuring beam can be decoupled from the beam forming-beam path. In particular, it is contemplated here that the measuring optics module is arranged such that this decoupled measuring beam is sensed by the measuring optics module. For example, the decoupling element is a beam splitter or partially transmissive mirror, which generates two partial beams with different diffusion directions from the incident beam of the beam forming-beam path. The measuring beam is provided in particular by one of the two partial beams. In particular, this means that most of the output of the laser beam split by the decoupling element is transmitted to the subsequent beam forming-beam path (eg reflected by the partially transmissive mirror), and only a small part of the output is the measuring beam as the measuring optics module. carried out to reach In particular, the decoupling is performed such that, for example, most of the output of the sensed laser beam is reflected and a small part is transmitted, and the measuring beam of the beams includes a low output.

In order to define a complex beam forming-beam path, the beam forming optics preferably comprise multiple optics elements for beam redirecting and/or beam guiding. Likewise, it is contemplated that the feed input system for defining the preform-beam path comprises multiple optics elements for beam redirecting and/or beam guiding. Preferably, the measuring optics module is arranged such that the laser beam passes through at least one of these optics elements, preferably a plurality of optics elements, in the beam path before the measuring optics module. In this regard, before each laser beam reaches the measuring optics module, starting from the laser light source along the beam path of the laser beam and passing through the adjusting optics module and then the accompanying supply optics, at least one of the mentioned optics elements At least one optics element, preferably a plurality of optics elements. Accordingly, when measuring the response to a change in the steering optics module, the optical properties of the optical elements in the beam path of the beam forming optics can also be taken into account.

A reference beam path may be determined in the beam forming optical system, and this target state may be caused by a change in the adjustment optical system module. In particular the decoupling element is arranged in the beam path between two optics elements of the beam forming optics.

The adjustable optics arrangement can be implemented in an advantageous manner by means of a configurable optics element, which is arranged to act on the properties of the laser beam (eg diffusion direction, intensity or the like). A particularly configurable optics element is a beam deflecting element, for example a deflecting mirror. A controllable actuator is preferably provided for changing the configuration of the optics element, which actuator acts on the optics element, for example mechanically or electrically.

In particular, the steering optics module for defining the steering optics-beam path comprises a plurality of optics elements, wherein these optics elements also include the above-described configurable optics elements. An advantageous aspect is obtained by sequentially disposing two configurable optics elements along the steering optics-beam path with their respective associated actuators. The two optical elements are preferably formed for deflecting the laser beam in two deflection directions perpendicular to each other, the deflection directions being preferably perpendicular to the diffusion direction of the laser beam. For example, two mirrors are provided which are arranged one after the other in the beam path, these mirrors being each tiltable around two axes, the axes preferably being mutually perpendicular. For example, it is also conceivable to be configured in the manner of a galvo scanner.

For other configurations, a beam attenuator may be arranged in the steering optics-beam path. The beam attenuator is formed in particular in such a way that such a beam attenuator can comprise two configurations. The beam attenuator can also be formed as an essentially variable, in particular continuously variable, beam attenuator. Through this, it is possible to adjust the intensity of the laser beam.

The measuring optics module is not only provided for measuring the action in terms of a change in the beam path, in particular based on the action in the steering optics module. Rather, the measuring optics module is preferably formed for measuring the absolute properties of the beam forming-beam path, and preferably also for measuring the position of the emission spot of the laser beam detected by the optical sensor. The measuring optics module preferably comprises an optical sensor, in particular in the manner of a CCD camera, on which the laser beam arrives. The optical sensor is then preferably arranged in such a way that the point of arrival is measurable in the reference coordinate system of the optical sensor (eg by means of an emitting spot of the measuring beam on the sensor surface). Thereby, the trajectory of the laser beams and the respective beam direction of the laser beam in the sensed portion of the beam forming-beam path can be calculated. A desired beam trajectory can be established by appropriate changes in the steering optics module.

In order to enable accurate measurement, the measurement optics module is preferably positionally positioned and positioned at a reference position, in particular with reference alignment, in the beam forming optics.

The measuring optics module is formed in particular in the manner of an independent constituent unit. Preferably, the measuring optics module comprises a beam entrance for the measuring beam and a beam splitting arrangement for splitting the sensed measuring beam into at least two measuring beam paths each going to one assigned optical sensor. is formed Preferably, the measuring optics module is formed in such a way that at least two measuring beam paths have different optical path lengths. Thus, for example, one measuring beam path can be arranged for measuring the optical properties of the far field and the other measuring beam path can be arranged for measuring the optical properties of the near field.

A relatively complex beam trajectory can be provided for the beam forming optics and/or the supply optics since the optical units of the beam forming optics and the supply optics must not be manipulated for the adjustment of the laser beam. As mentioned, often in other solutions it is attempted to keep the cost of adjustment low in order to avoid too undue complexity of the beam path. The formations described herein in this regard support in a particular way a formation comprising compact and optionally folding beam trajectories. In this regard, in particular the feeding optics and/or the beamforming optics are formed in such a way that the preform-beam path and/or the beam-forming-beam path comprise a plurality of direction changes and in particular proceed by folding several times. For example, each beam path proceeds in the manner of Z-folding (similar to the shape of the letter Z). This allows a relatively long optical path to be attached on a compact installation space. This is particularly advantageous, since, for example, the beam paths may be equipped with a telescope or other beam forming optics with low refractive intensities and/or long focal lengths, these optics having relatively low optical errors and aberrations. A very compact laser system can be provided due to the folding beam trajectory. The complex beam forming optics and/or the supply optics in the laser system of the invention can already be pre-tuned in the manufacture of these optics. Thus, a compact laser system with reduced adjustment costs is provided.

For other examples, in particular the beamforming-beam path may run in a plurality of planes and may comprise one folded beam trajectory each in a plurality of planes.

The beam forming optics and/or the feeding optics are preferably each pre-assembled modular component units. For another configuration, a housing is provided, which at least surrounds the beam forming optics or surrounds the beam forming optics together with the supply optics. The adjustment optics module is in particular formed as a complete component unit and in particular formed separately from the housing. Preferably the adjustment optics module is arranged outside the housing. However, it is also conceivable for the adjustment optics module to be arranged inside the supply optics, for example to achieve a more compact construction.

The steering optics module preferably likewise comprises its own module housing. In this regard, various modular construction units can be used at the construction site separately from the laser light sources. For the adjustment of the whole system, only the adjustment optics module should be connected between the laser light source and the supply optics, and the beam path in the beam forming optics and/or the supply optics should include the desired shape by the appropriate setting of the adjustment optics module. .

The measuring optics module is also preferably surrounded by a housing, which also contains at least the beam forming optics. Preferably, the measurement optics module also includes a separate module housing. This allows for simple mounting in pre-calibrated systems. In particular, the housing comprises a predetermined interface with the positioning means for interlocking with the corresponding positioning means in the module housing of the measurement optics module, so that an accurate reference position and alignment of the measurement optics module can be established.

The housing can be built monolithically for the beam-forming optics or for the beam-forming optics and the supply optics, since the adjustment of the components located therein is not essential when building on-site. In particular, the housing comprises a box and a support plate located therein within the box, the support plate being preferably integrally connected with the box. In this way, in connection with the configuration described herein, a stable construction for pre-coordinated units can be achieved.

Basically, it is advantageous for a plurality of laser light sources to be provided each for the emission of at least one laser beam, and for the supply optics to correspondingly comprise a plurality of optical input channels for the preform beam path. In addition, the supply optics preferably comprise a corresponding number of optical output channels, the output channels providing a transition section to the beam forming-beam path. For each laser light source, preferably each one separate steering optics module is provided, which is arranged between each laser light source and an input channel assigned to this laser light source. In this regard, it is preferably given for each laser light source a unique steering optics module, ie the number of laser light sources and steering optics modules is the same.

An advantageous configuration can be obtained in that a separate measuring optics module is provided for each optical input channel. It is also conceivable that a separate measurement optics module is provided for each individual laser light source. The laser beams of the various laser light sources can basically be sorted within the supply optics so that the measurement optics module senses the laser beams from one or more input channels.

It is also conceivable that the laser beams of the input channels are guided separately and/or in groups in the supply optics and only then unified or aggregated for effective light distribution in the beam forming optics, eg after the measuring optics module in the beam path.

It may also be advantageous for the measurement optics module to be assigned to a plurality of adjustment optics modules simultaneously. In particular, the measurement optics module is capable of measuring the effect of optical action in each of the assigned adjustment optics modules. For calibration of the system, for example, the laser light sources can be tuned into the beam path in turn using the respective steering optics module.

Preferably, the adjustment optics module, the supply optics and the beam forming optics are formed in such a way that the respective laser beams of the various laser light sources proceed without mixing with the laser beams of other laser light sources before the measuring optics module in the beam path. Thus, the various laser light sources can be adjusted independently of each other, even if a unique measurement optics module is not provided for each laser light source.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention is described in more detail with reference to the drawings.
1 is a schematic diagram for explaining a beam path and functional components of a laser system according to the present invention;
2 is a perspective view of a laser system according to the invention having a compact design;
3 is a view showing an example of the formation of an adjustment optical system module.

In the following description and drawings, the same reference numerals are respectively used for the same or corresponding features.

1 and 2 show a laser system or laser installation, which is generally indicated by the reference numeral 10 . The laser system 10 comprises in the example shown two laser light sources 12a, 12b, which are preferably each formed in a modular fashion as a complete structural unit. Each laser light source 12a, 12b in the illustrated example is formed so that two separate laser beams 14 are emitted in parallel. This can be considered an optional formative example.

The laser beams of each of the laser light sources 12a, 12b form one input beam group 16a, 16b, respectively, in the example shown. The input beam groups 16a and 16b are respectively incident on the supply optical system 20 through the optical input channel 18a or 18b. In this regard, the supply optics 20 comprises a beam entrance 22a or 22b assigned thereto for each optical input channel 18a or 18b.

The supply optics 20 are formed to guide the laser beams 14 from the optical input channels 18a, 18b to the optical output channels 24a, 24b. For this purpose, the supply optics 20 comprises a plurality of optics elements 26 (eg lens means, reflectors, diverting mirrors, prisms or the like) for beam redirecting and/or beam guiding, and these optics elements A preform-beam path 28 is defined in the supply optics 20 using this method. In the example shown the preform-beam path 28 is folded several times, so that a relatively long optical path can be run on a compact installation space, and there is enough space for optical elements for beam property forming not shown in detail. provided (eg telescope).

Output beam groups 30a, 30b of the laser beams 14 are provided in the optical output channels 24a, 24b, respectively, and the output beam groups are sensed by a subsequent beam forming optics 32 in the beam path and are It is transformed into the desired effective light distribution L, which in the example shown comprises a linear beam cross-section.

The beam forming optics 32 comprises a plurality of optical function installations and in particular a plurality of optics elements 34 for beam redirecting and/or beam guiding. They define the beam forming-beam path in the beam forming optical system 32 and contribute to forming a linear effective light distribution L from the laser beams 14 of the output beam groups 30a, 30b.

For example, the laser beams of the output beam groups 30a or 30b or subgroups of these output beam groups may first pass through one or more telescopes 38, which telescopes are formed in particular as anamorphic telescopes and are suitable form the beam cross-section in this way. Along the beam path the laser beams 14 are guided through a deformation optic 40 in the example shown, which is a beam cross-section elongated from the laser beams 14 of the output beam groups 30a, 30b. One or more beam packets with The pre-formed beam packets can be mixed with, for example, equalization optics 42 and optionally flattened in the intensity stream to provide the desired effective light distribution L.

The preform-beam path 28 is folded several times in the example shown, so that a relatively long optical path can be run on a compact installation space and sufficient space is provided for optical elements for beam property forming not shown in detail. . The beamforming-beam path 36 is also preferably folded several times.

The supply optical system 20 may be formed such that the laser beams 14 of one input beam group 16a, 16b first travel separately from each other and also separately from the laser beams of each other input beam group ( see Fig. 1). The supply optical system 20, in the example shown, is that the laser beams of the various input beam groups 16a, 16b are sorted in the preform-beam path 28, and then each output beam group 30a, 30b is respectively is formed to include at least one laser beam 14 each from the input beam groups 16a, 16b. Such formations may be advantageous, but are optional in the examples herein. In particular, it is contemplated that the various laser beams are not mixed in the classification.

The laser system 10 also includes a steering optics module 44 through which the laser beam 14 passes before entering the preform-beam path 28 . In the example shown, each laser light source 12a, 12b and each optical input channel 18a, 18b are assigned exactly one steering optics module 44 . In this regard, the steering optics module 44 is connected between the optical output 46 of each laser light source 12a, 12b and the respective beam inlet 22a, 22b of the supply optics.

The adjustment optics module 44 is formed as a modular structural unit. As can be seen from the detailed view of FIG. 1 , the steering optics module includes a plurality of optics elements 48 , using the optics elements to define the steering optics-beam path 50 in the steering optics module 44 . . The adjustment optics module 44 comprises an adjustable optics arrangement 52 , by means of which the laser beam 14 can be acted upon, in particular operated in such a way that the laser beam 14 can be controlled and deflected. can receive For this purpose, the adjustable optics arrangement 42 comprises at least one configurable optics element 54 and an assigned adjustable actuator (not shown in detail). Preferably, the configurable optics element 54 may point to a tilting mirror, which may be set using an assigned actuator. In the example shown the steering optics-beam path 50 comprises two configurable optics elements 54 acting in succession, the optics elements preferably with respect to two perpendicular directions (and the diffusion of the laser beam). A deflection of the laser beam 14 (perpendicular to the direction) can be achieved respectively. Through this, a beam direction and a beam position may be set.

The laser system 10 further comprises at least one measurement optics module 56 , with which the influence of the optical action in the adjustment optics module can be measured. In the illustrated example, two measuring optical system modules 56 are provided, each one measuring optical system module 56 respectively interacting with only one output beam group 30a, 30b.

In the example shown, the measurement optics module 56 is arranged such that the effect of changes in the steering optics module on the beamforming-beam path 36 can be measured. For this purpose, the beamforming-optics system 32 comprises a decoupling element 58 for optical decoupling of the measuring beam 60 from the beamforming-beam path 36 . The decoupling element 58 is formed, for example, of a partially transmissive reflector, which is formed so as to retain most of the emitted radiation in the beam forming-beam path 36 and transmit only a small portion as the measuring beam 60 . The measurement optics module 56 is arranged such that this module senses the measurement beam 60 .

The measurement optics module 56 is described in more detail with reference to the detail inset in FIG. 1 . In particular, the measurement optics module 56 includes a beam entrance 62 , through which the measurement beam 60 is incident. The measuring beam 60 arrives at a beam splitter 64, which splits the measuring beam 60 into, for example, two measuring beam paths 66a, 66b. Measuring beam paths 66a, 66b are respectively guided to an assigned optical sensor 68a, 68b, for example in the form of a CCD chip. In particular, the optical sensors 66a, 66b are formed so that the place of arrival at the sensor can be calculated.

Since the measuring beam optics 56 is disposed at a predetermined position with respect to the beam forming-beam path 36 , the three-dimensional trajectory of the measuring beam 60 and thereby the beam forming-beam path 36 are of a sensed portion. A three-dimensional trajectory may be calculated.

By means of the illustrated configuration comprising two optical sensors, for example measuring beam paths 66a , 66b with different optical path lengths can be provided and for example a laser sensed using various sensors 68a , 68b . The near-field and far-field of the beam can be measured. However, a configuration comprising only a single measuring beam path and a single optical sensor or a configuration comprising a larger number of sensors and a more complex beam path is also conceivable.

3 shows an exemplary configuration for a steering optics module 44, the functional elements of which are indicated by the aforementioned reference numerals.

In particular, the steering optics module 44 comprises a unique module housing 70 within which the elements of the steering optics module 44 are enclosed. For example, the steering optics module 44 includes one or more beam inlets 72 for coupling with an optical outlet of the laser light source. The sensed laser beams 14 are emitted through the beam outlets 74 and travel to the preform-beam path 28 (see FIG. 1 ). In the illustrated example the steering optics module further comprises a beam attenuator 76 after the configurable optics elements 54 in the beam path, so that the detected laser beams are intensity adjusted.

As can be seen in FIG. 2 , the laser system 10 can be built in a modular fashion as a whole, and the individual constituent units are preferably enclosed in separate housings. Thus, for example, the beamforming optics 32 includes a housing 78 , which includes the entire beamforming-beam path 36 . The measurement optics module 56 is preferably also enclosed in a housing 78 . In the illustrated example, the supply optics 20 is formed as a separate module and includes a unique housing 80 , in which the preform-beam path 28 is contained. However, it is also conceivable that the beam forming optical system 32 and the supply optical system 20 are enclosed in a common housing. Housing 78 and/or housing 80 is preferably constructed monolithically, which allows for high stability.

For the construction of the laser system 10 , the steering optics module 44 comprising the module housing 70 has at least one beam outlet 74 corresponding to the beam inlet 22a or 22b of the supply optics 20 . It may be disposed in the housing 80 to do so. Each beam entrance 72 can be associated with an assigned laser light source 12a, 12b, which is preferably also enclosed in its own housing.

Claims (14)

A laser system (10) for generating an effective light distribution (L) comprising a linear beam cross-section, the laser system (10) comprising:
- at least one laser light source (12a, 12b) for emitting at least one laser beam (14);
- feeding optics (20) defining a preform-beam path (28) for said laser beam (14);
- beam forming optics (32) accompanying the preform-beam path (28) and defining a beam forming-beam path (36) for forming the effective light distribution (L);
- at least one conditioning optics module (44) through which the at least one laser beam (14) passes before the preform-beam path (28), at least one conditioning system for giving a variable optical action to the laser beam (14) at least one adjustment optics module (44) comprising possible optics facilities (52); and
- at least one measuring optics module arranged for measuring the effect of said optical action in said steering optics module (44) on said beamforming-beam path (36) and/or said preform-beam path (28); 56). The method of claim 1,
The beam forming optics 32 comprises a decoupling element 58 for optical decoupling of the measuring beam 60 from the beam forming-beam path 36 , wherein the measuring optics module 56 is configured by the measuring optics module A laser system (10) arranged to sense the decoupled measuring beam (60). 3. The method according to claim 1 or 2,
The beam forming optics 32 for defining the beam forming-beam path 36 include a plurality of optics elements 34 for beam redirecting and/or beam guiding and/or the preform-beam path 28 The supply optics 20 for defining At least one of the optics elements 34 and/or optics 26 in the path before the measurement optics module 56, preferably the optics 34 and/or optics elements ( 26) A laser system (10) arranged to pass through a plurality of optical elements. 4. The method according to any one of claims 1 to 3,
The adjustable optics arrangement 52 comprises at least one configurable optics element 54 for acting on the laser beam 14 , in particular a beam deflecting element, wherein the adjustable optics arrangement 52 comprises the optics Laser system (10) comprising at least one controllable actuator for changing the configuration of element (54). 5. The method according to any one of claims 1 to 4,
The measuring optics module 56 comprises at least one optical sensor 68a, 68b to which the laser beam 14 arrives, in particular a CCD camera chip, wherein the optical sensor 68a, 68b is, in the optical sensor The laser system (10), characterized in that it is arranged so that the arrival location of the optical sensor (68a, 68b) is measurable in the reference coordinate system of the optical sensor (68a, 68b). 6. The method according to any one of claims 1 to 5,
The measuring optics module 56 comprises a beam entrance 62 and a beam splitting arrangement 64 for at least one measuring beam 60 , wherein the beam splitting arrangement 64 directs the measuring beam 60 respectively. formed for splitting into at least two measuring beam paths 66a, 66b to one assigned optical sensor 68a, 68b, said at least two measuring beam paths 66a, 66b having different optical path lengths A laser system (10) comprising: 7. The method according to any one of claims 1 to 6,
The feeding optics 20 and/or the beamforming optics 32 are configured such that the preform-beam path 28 and/or the beamforming-beam path 36 comprises a plurality of direction changes, in particular a plurality of times. The laser system (10), characterized in that it is formed to be folded. 8. The method according to any one of claims 1 to 7,
A housing 78 is provided, the housing enclosing the beam forming optics 32 or enclosing the beam forming optics 32 and the supply optics 20 , the steering optics module 44 comprising the housing 78 ) and is preferably arranged outside the housing (78). 9. The method of claim 8,
The laser system (10) characterized in that the measurement optics module (56) is surrounded by the housing (78). 10. The method according to claim 8 or 9,
The laser system (10), characterized in that the housing (78) is built monolithically. 11. The method according to any one of claims 1 to 10,
A plurality of laser light sources 12a, 12b are provided, the supply optics 20 comprising a plurality of optical input channels 18a, 18b to the preform-beam path 28, each laser light source 12a , 12b), each of which is provided with one steering optics module (44), said steering optics module being arranged between said laser light source (12a, 12b) and an assigned input channel (18a, 18b), respectively laser system (10). 12. The method of claim 11,
Laser system (10), characterized in that a separate measurement optics module (56) is provided for each optical input channel (18a, 18b). 12. The method of claim 11,
A laser system (10) characterized in that the measurement optics module (56) is assigned simultaneously to a plurality of adjustment optics modules (44). 14. The method according to any one of claims 11 to 13,
Each laser beam 14 of one laser light source of each of the plurality of laser light sources 12a, 12b is not mixed with the laser beams 14 of the respective other laser light source and is measured within the beam path. A laser system (10) characterized in that it proceeds before the optics module.

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