CN116000445A - Laser processing device - Google Patents

Abstract

The invention relates to the technical field of laser processing equipment, and discloses a laser processing device capable of adjusting the diameter of a light beam. The laser beam expander comprises a laser module, a galvanometer adjusting module, a laser focusing module, a processing plane, a control module, a beam expanding module and a light spot adjuster; the beam expanding module is arranged on a corresponding laser path of the laser module; the light spot regulator is arranged on the output light path of the corresponding beam expanding module; the galvanometer adjusting module is provided with at least one incident light path and at least one emergent light path matched with the corresponding incident light path, and the incident light path extends towards the direction of the corresponding light spot adjuster; the laser focusing module is arranged on the emergent light path. The beam expansion module is utilized, the beam diameter and the divergence angle of the corresponding laser can be changed, and the beam diameter can be adjusted under the condition that the divergence angle is unchanged by matching with the facula adjuster, so that the problems of focus change and loss of calibration precision of the galvanometer adjusting module caused by directly adjusting the beam expansion module are avoided, and the processing efficiency is improved.

Description

Laser processing device

Technical Field

The invention relates to the technical field of laser processing equipment, in particular to a laser processing device.

Background

In a traditional laser processing system, a laser emits laser, and after passing through an external light path system, the laser enters a scanning galvanometer, and the beam path is changed through deflection of the galvanometer, and finally, the laser passes through a focusing field lens to process on the surface of a workpiece. The traditional laser processing mode can not adjust the beam diameter according to the requirement, namely the size of the light spot finally emitted by the focusing field lens can not be adjusted according to the requirement processing requirement, and the processing efficiency is reduced.

Disclosure of Invention

The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the invention provides a laser processing device which can adjust the diameter of the light beam according to the requirement and effectively improve the processing efficiency.

The laser processing device comprises a laser module, a galvanometer adjusting module, a laser focusing module, a processing plane, a control module, at least one beam expanding module and at least one light spot adjuster; the laser module is used for emitting at least one beam of laser; each beam expanding module is arranged on a corresponding laser light path of the laser module and used for changing the beam diameter and the divergence angle of the corresponding laser; each facula adjuster is arranged on an output light path corresponding to the beam expanding module and used for adjusting the diameter of an outgoing light beam corresponding to the beam expanding module; the galvanometer adjusting module is provided with at least one incident light path and at least one emergent light path matched with the corresponding incident light path, and the incident light path extends towards the corresponding light spot adjuster; the laser focusing module is arranged on the emergent light path and is used for outputting focused laser beams; the processing plane is arranged on an output light path of the laser focusing module; the control module is respectively and electrically connected with the laser module and the galvanometer adjusting module.

According to some embodiments of the invention, the laser module comprises a first laser and a first reflection unit; the first laser is used for emitting first laser; the first reflecting unit is positioned on the output light path of the first laser, and the reflecting light path of the first reflecting unit extends towards the corresponding direction of the beam expanding module.

According to some embodiments of the invention, the laser module further comprises a light splitting and reflecting unit, the light splitting and reflecting unit is located between the first laser and the first reflecting unit, a transmission light path of the light splitting and reflecting unit extends towards a direction where the first reflecting unit is located, and a reflection light path of the light splitting and reflecting unit extends towards a direction where the corresponding beam expanding module is located.

According to some embodiments of the invention, the laser module comprises at least one laser emitting the laser light towards the corresponding beam expanding module.

According to some embodiments of the invention, the first reflecting unit comprises at least one light reflecting sheet, and the light splitting reflecting unit comprises at least one light splitting reflecting sheet.

According to some embodiments of the invention, the laser module comprises a first laser, a second laser, a first reflecting unit and a second reflecting unit; the first laser is used for emitting first laser; the second laser is used for emitting second laser light; the first reflecting unit is positioned on the output light path of the first laser, and the reflecting light path of the first reflecting unit extends towards the corresponding direction of the beam expanding module; the second reflecting unit is positioned on the output light path of the second laser, and the reflecting light path of the second reflecting unit extends towards the corresponding direction of the beam expanding module.

According to some embodiments of the invention, the beam expanding module includes a beam expander, and the beam expander is disposed on a corresponding laser path of the laser module, and is configured to change a beam diameter of the corresponding laser, and the beam expander outputs an adjusted beam toward the corresponding spot adjuster.

According to some embodiments of the invention, the beam expanding module further comprises a third reflecting unit, the third reflecting unit is located on the output light path of the beam expander, and the reflecting light path of the third reflecting unit extends towards the corresponding direction of the light spot adjuster.

According to some embodiments of the invention, the galvanometer adjustment module includes an adjustment platform, at least one first galvanometer, and at least one second galvanometer, each of the first galvanometers being located on an output optical path of a corresponding one of the spot adjusters; each second galvanometer is positioned on the output light path of the corresponding first galvanometer; the adjusting platform is used for respectively fixing the first vibrating mirror and the second vibrating mirror, and can respectively and independently adjust the positions of the corresponding first vibrating mirror and second vibrating mirror.

According to some embodiments of the invention, the spot adjuster comprises a turntable and a driving piece, wherein the turntable is provided with a plurality of through holes with different diameters, and the through holes are distributed along the circumferential direction of the turntable; the driving end of the driving piece is in transmission connection with the turntable and used for driving the turntable to rotate.

According to some embodiments of the invention, the spot modifier comprises a base and a turntable; the base, the carousel is equipped with the through-hole of a plurality of different diameters, and a plurality of the through-hole is followed the circumference distribution of carousel, just the carousel rotates to be connected on the base.

The embodiment of the invention has at least the following beneficial effects: the beam diameter and the divergence angle of the corresponding laser can be changed by utilizing the beam expanding module, and then the beam diameter can be adjusted according to the requirement under the condition that the divergence angle is unchanged by matching with the facula regulator, so that the problems of focus change and loss of calibration precision of the galvanometer adjusting module caused by directly adjusting the beam expanding module can be avoided, and the processing efficiency is effectively improved.

Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic view of a laser processing apparatus according to a first embodiment of the present invention;

FIG. 2 is a schematic view of a laser processing apparatus according to a second embodiment of the present invention;

FIG. 3 is a schematic view of a laser processing apparatus according to a third embodiment of the present invention;

FIG. 4 is a schematic view of another angle of a spot adjuster of the laser processing apparatus shown in FIG. 3;

fig. 5 is a schematic view of a laser processing apparatus according to a fourth embodiment of the present invention.

Reference numerals:

reference numerals	Name of the name	Reference numerals	Name of the name
				100	Laser module	310	Turntable
110	First laser	311	Through hole
				120	First reflecting unit	400	Vibrating mirror adjusting module
130	Light splitting reflection unit	410	First vibrating mirror
				140	Second laser	420	Second vibrating mirror
150	Second reflecting unit	430	Adjusting platform
				200	Beam expanding module	500	Laser focusing module
210	Beam expander	600	Control module
				220	Third reflecting unit	700	Plane of working
300	Facula regulator	800	Adjusting light sheet

Detailed Description

The conception, specific structure, and technical effects produced by the present invention will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, aspects, and effects of the present invention. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.

It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly or indirectly fixed or connected to the other feature. Further, the descriptions of the upper, lower, left, right, top, bottom, etc. used in the present invention are merely with respect to the mutual positional relationship of the respective constituent elements of the present invention in the drawings.

It should be noted that, unless otherwise specified, when a feature is referred to as being "electrically connected" or "electrically connected" with another feature, the two features may be directly connected through pins, or connected through cables, or may be connected through a wireless transmission manner. The specific electrical connection mode belongs to a general mode of a person skilled in the art, and the person skilled in the art can realize connection according to the need.

Furthermore, unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in the description presented herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any combination of one or more of the associated listed items.

It should be understood that although the terms first, second, third, etc. may be used in this disclosure to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element of the same type from another. For example, a first element could also be termed a second element, and, similarly, a second element could also be termed a first element, without departing from the scope of the present disclosure.

Referring to fig. 1, 2, or 3, a laser processing apparatus according to an embodiment of the present invention includes a laser module 100, a galvanometer adjustment module 400, a laser focusing module 500, a processing plane 700, a control module 600, at least one beam expanding module 200, and at least one spot adjuster 300; the laser module 100 is used for emitting at least one beam of laser light; each beam expanding module 200 is disposed on a corresponding laser path of the laser module 100, and is used for changing the beam diameter and divergence angle of the corresponding laser; each spot adjuster 300 is disposed on the output optical path of the corresponding beam expansion module 200, and is used for adjusting the diameter of the outgoing beam of the corresponding beam expansion module 200; the galvanometer adjusting module 400 has at least one incident light path and at least one emergent light path matched with the corresponding incident light path, and the incident light path extends towards the corresponding spot adjuster 300; the laser focusing module 500 is arranged on the emergent light path and is used for outputting a focused laser beam; the processing plane 700 is arranged on the output light path of the laser focusing module 500; the control module 600 is electrically connected to the laser module 100 and the galvanometer adjustment module 400, respectively.

Referring to fig. 1, or fig. 2, or fig. 3, in a specific application, the processing plane 700 is located below the laser focusing module 500, where the laser module 100 may be configured as required to emit any number of laser beams with corresponding power, and after the corresponding laser beams pass through the beam expanding module 200, the diameter and divergence angle of the incident beam may be changed, and it should be noted that, in a normal use process, the diameter magnification and divergence angle of the beam changed by the beam expanding module 200 are fixed, and if the focal spot size of the beam passing through the laser focusing module 500 needs to be adjusted, the focal spot size of the beam passing through the laser focusing module 500 may be changed by the corresponding spot adjuster 300; the oscillating mirror adjusting module 400 can adjust the angle of the oscillating mirror, so as to adjust the incident angle of the corresponding light beam, enable the laser to deflect at a specific angle and enter the laser focusing module 500, and finally enable the incident laser to achieve focusing so as to process the workpiece to be processed in the processing plane 700, wherein the light beam emitted by the laser focusing module 500 is emitted to the processing plane 700, and the processing plane 700 can provide a reference point by setting the position between the laser focusing module 500 and the processing plane 700 in advance, so that the workpiece to be processed is accurately placed in a processable range, further improving the processing efficiency, and meanwhile, the control module 600 is arranged to better control the parameters of the laser module 100 and the oscillating mirror adjusting module 400.

Therefore, by matching with the spot adjuster 300, the corresponding beam diameter can be adjusted according to the requirement under the condition that the divergence angle is unchanged, so that the problems of focus change and loss of calibration accuracy of the galvanometer adjusting module 400 caused by directly adjusting the beam expanding module 200 can be avoided, and the processing efficiency is effectively improved.

In some embodiments of the present invention, the laser module 100 includes at least one laser that emits laser light toward the corresponding beam expanding module 200. It will be appreciated that in some embodiments of the invention, the laser module 100 may only emit a single laser beam, and the laser beam is incident directly toward the beam expansion module 200, i.e., without refraction or reflection by any mirror.

Referring to fig. 1, in some embodiments of the present invention, a laser module 100 includes a first laser 110 and a first reflection unit 120; the first laser 110 is configured to emit a first laser light and is electrically connected to the control module 600; the first reflecting unit 120 is located on the output optical path of the first laser 110, and the reflecting optical path of the first reflecting unit 120 extends toward the direction of the corresponding beam expanding module 200, so that the first laser 110 can be controlled to be turned on or off by the control module 600, and meanwhile, the parameters of the first laser 110 for emitting the first laser can be adjusted, and the specific control process belongs to a conventional technical means in the art, and detailed description is omitted.

Referring to fig. 2, in some embodiments of the present invention, the laser module 100 includes a first laser 110, a first reflection unit 120, and a spectral reflection unit 130; the first laser 110 is configured to emit a first laser light and is electrically connected to the control module 600; the first reflection unit 120 is located on the output optical path of the first laser 110, and the reflection optical path of the first reflection unit 120 extends toward the direction of the corresponding beam expanding module 200, the light splitting reflection unit 130 is located between the first laser 110 and the first reflection unit 120, the transmission optical path of the light splitting reflection unit 130 extends toward the direction of the first reflection unit 120, the reflection optical path of the light splitting reflection unit 130 extends toward the direction of the corresponding beam expanding module 200, the first laser 110 can be controlled to be turned on or off by the control module 600, and meanwhile, parameters of the first laser 110 for emitting the first laser can be adjusted, and a specific control process belongs to conventional technical means in the art, and detailed description is omitted.

Referring to fig. 2, in some embodiments of the present invention, the first reflecting unit 120 includes at least one light reflecting sheet, and the spectroscopic reflecting unit 130 includes at least one spectroscopic light reflecting sheet and at least one light reflecting sheet. The specific angles of the reflection light sheet and the light splitting reflection light sheet can be set according to actual conditions, namely, the direction of the first laser emitted by the first laser and the incident direction of the beam expanding module 200 can be set, the principles of the reflection light sheet and the light splitting reflection light sheet belong to technical means common to those skilled in the art, and the specific number of the reflection light sheet and the light splitting reflection light sheet are matched for use, the light path reflection principle and the light splitting reflection principle can be correspondingly adjusted according to actual requirements, so that excessive description and illustration are not needed.

It will be appreciated that in some embodiments of the invention, the laser module 100 may have only a single first laser 110 emitting the first laser light and the first laser light is incident directly towards the beam expanding module 200, i.e. without refraction or reflection by any mirror.

Referring to fig. 3, in some embodiments of the present invention, the laser module 100 includes a first laser 110, a second laser 140, a first reflection unit 120, and a second reflection unit 150; the first laser 110 is for emitting a first laser light; the second laser 140 is configured to emit a second laser light; the first reflecting unit 120 is located on the output light path of the first laser 110, and the reflecting light path of the first reflecting unit 120 extends towards the corresponding beam expanding module 200; the second reflecting unit 150 is located on the output optical path of the second laser 140, and the reflected optical path of the second reflecting unit 150 extends to the direction of the corresponding beam expanding module 200, so that the first laser 110 or the second laser 140 can be controlled to be turned on or off by the control module 600, and meanwhile, the parameters of the first laser 110 emitting the first laser or the parameters of the second laser 140 emitting the second laser can be adjusted, and the specific control process belongs to conventional technical means in the field, and detailed description is omitted here.

It is appreciated that in some embodiments of the present invention, the laser module 100 may have only the first laser 110 alone and the second laser 140 alone emitting the second laser, and the first laser and the second laser are respectively directly incident toward the corresponding beam expanding module 200, i.e. without refraction or reflection by any lens.

It should be noted that, in some embodiments of the present invention, when the control module 600 is matched, the control module 600 is electrically connected to the first laser 110 or the second laser 140, respectively, so that the working state of the first laser 110 or the second laser 140 can be controlled independently by the control module 600.

The beam expander 200 includes a beam expander 210, where the beam expander 210 is disposed on a corresponding laser path of the laser module 100, and is used for changing a beam diameter and a divergence angle of the corresponding laser, and the beam expander 210 outputs the changed beam toward the corresponding spot adjuster 300.

Referring to fig. 1, 2, or 3, in some embodiments of the present invention, the beam expanding module 200 further includes a third reflecting unit 220, the third reflecting unit 220 is located on an output light path of the beam expander 210, and a reflected light path of the third reflecting unit 220 extends toward a direction of the corresponding spot adjuster 300.

Similarly, it is known that the third reflective unit 220 includes at least one reflective sheet. The specific angle of the reflective sheet can be set according to the actual situation, that is, the direction of the laser emitted by the beam expander 210 and the incident direction of the facula regulator 300, the principle of the reflective sheet belongs to the technical means conventional to those skilled in the art, and the specific number of the reflective sheets can be correspondingly adjusted according to the actual requirement by matching with the use and the light path reflection principle, so that excessive description and illustration are not made here.

It can be appreciated that in some embodiments of the present invention, any beam expansion module 200 may only have an independent beam expansion mirror 210, and the laser beam directly enters the spot adjuster 300 after passing through the beam expansion mirror 210, i.e. without being refracted or reflected by any lens, and whether the beam expansion module 200 needs to reflect by the third reflection unit 220 can be determined according to the design requirement and the installation environment, otherwise, the beam expansion module 200 may also use the beam expansion mirror 210 alone, and when the installation position is limited, the beam expansion module may cooperate with the third reflection unit 220, so that the laser beam path enters the corresponding spot adjuster 300 on the designated route.

Referring to fig. 4, in some embodiments of the present invention, the spot adjuster 300 includes a turntable 310 and a driving member (not shown), the turntable 310 is provided with a plurality of through holes 311 having different diameters, and the plurality of through holes 311 are distributed along the circumference of the turntable 310; the driving end of the driving member (not shown) is in driving connection with the turntable 310, and is used for driving the turntable 310 to rotate. The rotary table 310 can be adjusted by using a driving member (not shown) in an electric control manner, and the rotating precision can be improved by adopting an electric adjustment manner, so that the through hole 311 with the corresponding diameter size is rotated onto the output light path of the corresponding beam expanding module 200, the adjustment efficiency is improved, and the laser processing efficiency can be improved. Wherein, the driving member (not shown) may use an air cylinder, a motor, an electric cylinder, or the like as a driving source, and when a servo motor is used, the accuracy of rotation of the turntable 310 may be improved. It should be noted that, in order to implement the adjustment of the beam diameter by the spot adjuster 300, the diameter value of the beam emitted from the beam expansion module 200 needs to be at least larger than the diameter value of the through hole 311 with the smallest diameter on the spot adjuster 300.

It may be appreciated that, in some embodiments of the present invention, the control module 600 is further electrically connected to a driving element (not shown in the figure), and the driving element (not shown in the figure) may be directly controlled by the control module 600 to transfer the corresponding through hole 311 to the output light path of the beam expanding module 200 so as to adjust the diameter of the output light beam of the beam expanding module 200, where the control module 600 adopts a structure conventional in the art, and a control algorithm for the driving element (not shown in the figure) also belongs to a conventional technical means in the art, and will not be described in detail herein.

Referring to fig. 2 or 3, in some embodiments of the present invention, the control module 600 is electrically connected to the laser module 100, the spot adjuster 300, and the galvanometer adjustment module 400, respectively. The control module 600 can be used for switching on or switching off the laser module 100, and adjusting the power of laser output, and the control module 600 can adjust the deflection angle of the galvanometer adjusting module 400 by adjusting the facula control module 600, so that the incoming laser forms a specific angle deflection and enters the laser focusing module 500. The control module 600 adopts a structure conventional in the art, and is electrically connected with the laser module 100, the light spot adjuster 300 and the galvanometer adjusting module 400, so that the laser module 100, the light spot adjuster 300 and the galvanometer adjusting module 400 can be directly controlled from the control module 600, and convenience is improved; it should be noted that, the laser module 100, the light spot adjuster 300, and the galvanometer adjusting module 400 may be separately provided with corresponding control modules 600 to realize one-to-one electrical connection and control.

In some embodiments of the invention, spot adjuster 300 includes a base (not shown) and a turntable 310; the turntable 310 is provided with a plurality of through holes 311 with different diameters, the plurality of through holes 311 are distributed along the circumferential direction of the turntable 310, and the turntable 310 is rotatably connected to a base (not shown). The rotation connection mode belongs to a conventional technical means in the art, and when the corresponding final beam diameter needs to be adjusted, the turntable 310 can be rotated, so that the corresponding through hole 311 is located on the output optical path of the corresponding beam expansion module 200, and the beam diameter can be changed.

It should be noted that the rotation of the turntable 310 may also be directly performed manually, and in the case of manual adjustment, in order to limit the rotation of the turntable 310, a conventional limiting mechanism, such as a damper, may be manually matched, so that the automatic rotation of the turntable 310 may be avoided without external force.

Referring to fig. 1, or fig. 2, or fig. 3, in some embodiments of the invention, galvanometer adjustment module 400 includes an adjustment stage 430, at least one first galvanometer 410, and at least one second galvanometer 420, each first galvanometer 410 being positioned in the output optical path of a corresponding spot adjuster 300; each second galvanometer 420 is positioned on the output optical path of the corresponding first galvanometer 410; the adjusting platform 430 is used for fixing the first galvanometer 410 and the second galvanometer 420 respectively, and can adjust the deflection positions of the corresponding first galvanometer 410 and second galvanometer 420 respectively, and the adjusting platform 430 is electrically connected with the control module 600. The first galvanometer 410 and the second galvanometer 420 are a group, so that the deflection angle of one laser beam can be adjusted, that is, the input optical path of each first galvanometer 410 is an incident optical path of the galvanometer adjusting module 400, and the output optical path of the corresponding second galvanometer 420 is an emergent optical path of the galvanometer adjusting module 400.

The control module 600 can control the adjusting platform 430, so that the adjusting platform 430 can be utilized to enable the corresponding first vibrating mirror 410 or second vibrating mirror 420 to be finely adjusted in the horizontal direction where the left-right direction is located, and the angle position of the corresponding first vibrating mirror 410 or second vibrating mirror 420 can be adjusted.

It may be appreciated that, at least two groups of driving components (not shown) are provided on the adjusting platform 430, the driving ends of the driving components (not shown) are respectively and fixedly connected with the corresponding first galvanometer 410 or the corresponding second galvanometer 420, and then the first galvanometer 410 or the second galvanometer 420 can be adjusted by separately driving the corresponding driving components (not shown), so that the deflection angle of the first laser or the second laser can be changed, that is, the first laser or the second laser can be incident to the laser focusing module 500 at different angles, wherein at least two groups of driving components (not shown) are respectively and electrically connected with the control module 600, and the control module 600 realizes separate control.

It is known that the galvanometer adjustment is a conventional technical means in the art, so the specific structure of the driving assembly (not shown) is a structure commonly used in the art, and the control algorithm of the control module 600 on the driving assembly (not shown) is a conventional technical means in the art, which will not be described in detail herein.

It should be noted that, when the control module 600 is matched, the control module 600 is electrically connected with the corresponding driving components (not shown in the figure), so as to control the working states of at least two groups of driving components (not shown in the figure) respectively, and further enable the corresponding first vibrating mirror 410 or second vibrating mirror 420 to realize forward rotation or reverse rotation.

Referring to fig. 1, in a first embodiment, a laser module 100, a beam expanding module 200, a spot adjuster 300, a galvanometer adjusting module 400, a laser focusing module 500, a control module 600 and a processing plane 700 are provided, where the laser module 100 includes a first laser 110 and a first reflecting unit 120, the laser module 100 emits a beam of laser light, the beam expanding module 200 includes a beam expanding mirror 210 and a third reflecting unit 220, the galvanometer adjusting module 400 is provided with a set of corresponding first galvanometer 410 and second galvanometer 420, in this embodiment, the adjusting platform 430 is provided with two sets of driving components (not shown) and is electrically connected with the control module 600 respectively, and the driving ends of the driving components (not shown) are fixedly connected with the corresponding first galvanometer 410 or second galvanometer 420 respectively, so that by separately driving the corresponding driving components (not shown), the deflection positions of the corresponding first galvanometer 410 or second galvanometer 420 can be adjusted, and then the incident angle of the laser light can be deflected towards the laser light module 500 can be changed.

Referring to fig. 2, in a second embodiment, a laser module 100, two beam expansion modules 200, two spot adjusters 300, a galvanometer adjustment module 400, a laser focusing module 500, a control module 600 and a processing plane 700 are provided, where the laser module 100 includes a first laser 110, a first reflecting unit 120 and a light splitting reflecting unit 130, the laser module 100 emits two beams of laser beams with the same power at the same time, each beam expansion module 200 includes a beam expansion mirror 210 and a third reflecting unit 220, the galvanometer adjustment module 400 is provided with two sets of corresponding first galvanometer 410 and second galvanometer 420, in this embodiment, the adjustment platform 430 is provided with four sets of driving components (not shown in the figure) and is electrically connected with the control module 600 respectively, the driving ends of the driving components (not shown in the figure) are fixedly connected with the corresponding first galvanometer 410 or second galvanometer 420 respectively, and by driving the corresponding driving components (not shown in the figure) individually, the corresponding first galvanometer 210 or second galvanometer 420 can be adjusted, the two corresponding first galvanometer mirrors or second galvanometer 420 can be deflected to the same angle, the two laser beams can be deflected by the same angle or different from the specific laser beam expansion modules 300, and the same angle can be adjusted by adopting the two galvanometer adjustment modules 300, and the laser beam can be deflected by the same angle or different parameters.

Referring to fig. 3, in a third embodiment, a laser module 100, two beam expansion modules 200, two spot adjusters 300, a galvanometer adjustment module 400, a laser focusing module 500, a control module 600 and a processing plane 700 are provided, where the laser module 100 includes a first laser 110, a first reflecting unit 120, a second laser 140 and a second reflecting unit 150, the laser module 100 can emit two laser beams with the same power at the same time, and can also emit two laser beams with different powers at the same time, each beam expansion module 200 includes a beam expansion mirror 210 and a third reflecting unit 220, the galvanometer adjustment module 400 is provided with two sets of corresponding first galvanometer 410 and second galvanometer 420, in this embodiment, the adjustment platform 430 is provided with four sets of driving components (not shown in the figure) and is electrically connected with the control module 600, the driving ends of the driving components (not shown in the figure) are respectively and fixedly connected with the corresponding first galvanometer 410 or second galvanometer 420, and can deflect the two laser beams with different parameters at the same angle through the same angle as the two corresponding mirrors 300, so that the two laser beams with different angles can be deflected by the two galvanometer adjustment modules 300, and the two laser beams with different angles can be selectively adjusted by adopting the two laser beams with different parameters.

It should be noted that, when the present invention is applied to an actual product, the parameters of the beam expander 210 are not adjustable after determining, if the beam expander 210 is adjusted, the focal point of the final laser will change and the precision of the galvanometer adjustment module 400 needs to be readjusted, so the number and power of the through holes 311 of the spot adjuster 300 and the emitted light beams of the laser module 100 can be adjusted.

In some embodiments of the present invention, the focusing module 500 uses a focusing lens to focus the laser light.

It should be noted that, in the second embodiment or the third embodiment, the galvanometer adjusting module 400 is provided with two sets of corresponding first galvanometers 410 and second galvanometers 420, and the second galvanometers 420 of the two sets face the same focusing lens, and compared with the conventional galvanometer structure in which one set of galvanometers passes through one focusing lens, the second embodiment or the third embodiment of the present invention provides a scheme that the two sets of galvanometers share one focusing lens, so that the processing efficiency can be further improved.

Referring to fig. 5, in some embodiments of the present invention, an adjusting light sheet 800 disposed between the laser focusing module 500 and the processing plane 700 is further included, and the adjusting light sheet 800 is disposed on an output light path of the laser focusing module 500, so that an outgoing angle of the focused laser beam output by the laser focusing module 500 can be adjusted, so that the focused laser beam is incident at an angle perpendicular to the processing plane.

Wherein, in some embodiments of the present invention, the light adjusting sheet 800 is one of a lens, a combination lens, or a prism. In some embodiments of the invention, the combined lens is a lens that is composed of more than two individual lenses. The prism is adopted as the light adjusting sheet 800; by combining the conventional technical means of the person skilled in the art, a corresponding light sheet can be adopted, so that focused laser beams with different angles can be incident at an angle perpendicular to the processing plane.

Referring to fig. 5, in this embodiment, the processing plane 700 is located below the adjusting optical sheet 800, the laser module 100 may be set as required, so that any number of laser beams may be emitted, the oscillating mirror adjusting module 400 may adjust the angle of the oscillating mirror, so as to adjust the incident angle of the corresponding laser beam, so that the laser beam may deflect at a specific angle, the laser focusing module 500 may focus the incident laser beam, so as to process the workpiece on the processing plane 700, and after passing through the adjusting optical sheet 800, the focused laser beam at any angle may be incident at an angle perpendicular to the processing plane 700, that is, in this embodiment, the focused laser beam at any angle may be emitted in a direction parallel to the directions indicated by the upper and lower directions after passing through the adjusting optical sheet 800, and since the focused laser beam may be incident at an angle perpendicular to the processing plane 700, a problem of errors in processing quality caused by an excessive impact angle of the focused laser beam incident on the processing plane 700 may be avoided, so that the focused laser beam is incident at an angle perpendicular to the processing plane 700, and a phenomenon of focus of the focused laser beam may be avoided, and the focused laser beam may be effectively processed in an aberration-enhanced plane.

According to the embodiment of the invention, at least some effects can be achieved by the arrangement, the beam diameter and the divergence angle of the corresponding laser can be changed by utilizing the beam expansion module 200, and the beam diameter can be adjusted according to the requirement under the condition that the divergence angle is unchanged by matching with the facula regulator 300, so that the problems of focus change caused by directly adjusting the beam expansion module 200 and loss of calibration precision of the galvanometer adjustment module 400 can be avoided, and the processing efficiency is effectively improved; in addition, when the laser module 100 can emit at least two laser beams, the laser modules can emit at least two laser beams on the workpiece to be processed at the same time, so that the processing efficiency can be further improved.

The present invention is not limited to the above embodiments, but can be modified, equivalent, improved, etc. by the same means to achieve the technical effects of the present invention without departing from the spirit and principles of the present disclosure. Are intended to fall within the scope of the present invention. Various modifications and variations are possible in the technical solution and/or in the embodiments within the scope of the invention.

Claims (9)

1. A laser processing apparatus, comprising:

a laser module (100) for emitting at least one laser light;

at least one beam expansion module (200), wherein each beam expansion module (200) is arranged on a corresponding laser light path of the laser module (100) and is used for changing the beam diameter and the divergence angle of the corresponding laser;

at least one light spot adjuster (300), wherein each light spot adjuster (300) is arranged on an output light path corresponding to the beam expanding module (200) and is used for adjusting the diameter of an outgoing light beam corresponding to the beam expanding module (200);

a galvanometer adjustment module (400) having at least one incident light path and at least one exit light path matching a corresponding incident light path, the incident light path extending in a direction of the corresponding spot adjuster (300);

the laser focusing module (500) is arranged on the emergent light path and is used for outputting focused laser beams;

a processing plane (700) disposed on an output optical path of the laser focusing module (500);

and the control module (600) is respectively and electrically connected with the laser module (100) and the galvanometer adjusting module (400).

2. The laser processing apparatus according to claim 1, wherein the laser module (100) comprises:

a first laser (110) for emitting a first laser light and electrically connected to the control module (600);

the first reflecting unit (120) is positioned on the output light path of the first laser (110), and the reflecting light path of the first reflecting unit (120) extends towards the corresponding direction of the beam expanding module (200).

3. The laser processing apparatus according to claim 2, wherein: the laser module (100) further comprises a light splitting and reflecting unit (130), the light splitting and reflecting unit (130) is located between the first laser (110) and the first reflecting unit (120), a transmission light path of the light splitting and reflecting unit (130) extends towards the direction of the first reflecting unit (120), and a reflection light path of the light splitting and reflecting unit (130) extends towards the corresponding direction of the beam expanding module (200).

4. The laser processing apparatus according to claim 1, wherein the laser module (100) comprises:

a first laser (110) for emitting a first laser light and electrically connected to the control module (600);

a second laser (140) for emitting a second laser light and electrically connected to the control module (600);

a first reflection unit (120) located on an output optical path of the first laser (110), and a reflection optical path of the first reflection unit (120) extends in a direction of the corresponding beam expansion module (200);

and the second reflecting unit (150) is positioned on the output light path of the second laser (140), and the reflecting light path of the second reflecting unit (150) extends towards the corresponding direction of the beam expanding module (200).

5. The laser processing apparatus according to claim 1, wherein: the beam expanding module (200) comprises a beam expanding lens (210), the beam expanding lens (210) is arranged on a corresponding laser light path of the laser module (100) and used for changing the beam diameter of the corresponding laser, and the beam expanding lens (210) outputs an adjusted beam towards the corresponding facula regulator (300).

6. The laser processing apparatus according to claim 5, wherein: the beam expanding module (200) further comprises a third reflecting unit (220), the third reflecting unit (220) is located on the output light path of the beam expanding lens (210), and the reflecting light path of the third reflecting unit (220) extends towards the corresponding direction of the light spot adjuster (300).

7. The laser processing apparatus according to claim 1, wherein: the galvanometer adjustment module (400) includes:

at least one first galvanometer (410), each first galvanometer (410) being positioned on an output optical path of a corresponding spot adjuster (300);

at least one second galvanometer (420), each second galvanometer (420) being positioned on the output optical path of the corresponding first galvanometer (410);

the adjusting platform (430) is used for respectively fixing the first vibrating mirror (410) and the second vibrating mirror (420), and can respectively and independently adjust the positions of the corresponding first vibrating mirror (410) and second vibrating mirror (420), and the adjusting platform (430) is electrically connected with the control module (600).

8. The laser processing apparatus according to any one of claims 1 to 7, wherein the spot adjuster (300) includes:

the rotary table (310) is provided with a plurality of through holes (311) with different diameters, and the through holes (311) are distributed along the circumferential direction of the rotary table (310);

the driving part is in transmission connection with the turntable (310), and is used for driving the turntable (310) to rotate and is electrically connected with the control module (600).

9. The laser processing apparatus according to any one of claims 1 to 7, wherein the spot adjuster (300) includes:

a base;

the rotary table (310) is provided with a plurality of through holes (311) with different diameters, the through holes (311) are distributed along the circumferential direction of the rotary table (310), and the rotary table (310) is rotationally connected to the base.

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