DE102019102512A1 - Laser system - Google Patents

Abstract

Laser system (10) for generating a useful light distribution (L) with a laser light source (12a, 12b), feed optics (20) which define a preform beam path (28) for the laser beam (14), and with beam shaping optics (32), which follows the preform beam path (28) and defines a beam shaping beam path (36). An optical alignment module (44) is provided through which the at least one laser beam (14) passes in front of the preform beam path (28), the optical alignment module (44) having at least one adjustable optical device (52) for a variable optical effect on the Has laser beam (14). In addition, a measuring optics module (56) is provided which is set up to measure an influence of the optical action in the alignment optics module (44) on the beam-shaping beam path (36) and / or on the preform beam path (28) .

Description

The invention relates to a laser system or a laser device for generating a useful light distribution with in particular a linear beam cross section.

Such useful light distribution is e.g. provided by an output beam which propagates along a direction of propagation and which has a line-like beam cross section with a non-vanishing intensity in a working plane which is extended along a line direction. Such beam profiles are used, for example, in the processing of surfaces of semiconductors or glasses, e.g. in the manufacture of PFT displays, in the doping of semiconductors, in the manufacture of solar cells or in the manufacture and processing of aesthetically designed glass surfaces for construction purposes. Here, the line-like beam profile is scanned, for example, perpendicular to the direction of expansion of the line over the surface to be processed, and triggers the desired conversion processes or processing processes there.

In order to generate the desired, in particular linear, useful light distribution from laser light from one or more laser light sources, such laser systems generally comprise a plurality of functional units. Usually, a feed optic is initially provided in the beam path after the laser light source, by means of which the laser beams are first preformed, for example by suitable widening, anamorphic deformation of the beam cross section and / or adaptation of optical paths. The feed optics can, for example, be fed by a plurality of laser light sources and provide corresponding optical input channels. A beam shape optic is then provided in the beam path, which serves to generate the actual, linear distribution of useful light. The beam shaping optics generally comprise a large number of optical elements, in particular a shaping optics and a homogenization optics, by means of which the useful light distribution with in particular a linear beam cross section is ultimately generated from the beam profiles of the individual laser light sources. Due to the large number of necessary optical effects on the beam path, the laser systems are complex and require precise adjustment of the individual optically functional units to one another. Such a laser system with the features of the preamble of claim 1 is for example in the WO 2018/019374 A1 described.

A compact structure is regularly desired for the laser systems, especially if the laser system is used as part of a larger production or processing system. In the areas of application mentioned at the beginning, operation under clean room conditions is sometimes necessary. Due to the necessary infrastructure, installation space under clean room conditions is particularly cost-intensive. A compact structure of the laser systems mentioned is particularly advantageous in this case.

However, the scope for designing compact optical arrangements for the laser systems is often limited by the fact that a large number of optical elements and optical devices have to be precisely adjusted in relation to one another in the laser systems. If the beam path is too complex, adjustment when setting up the laser system at the target location is costly. It is often necessary to re-calibrate all optical components individually. In practice, complex and at the same time very compact beam paths are often avoided in order to reduce the effort involved in setting up and maintenance.

The invention has for its object to enable a compact design for the laser systems mentioned and at the same time to reduce the adjustment effort.

This object is achieved by a laser system with the features of claim 1. The laser system as a whole is a device which in particular comprises a plurality of functional devices and / or elements, such as optics or actuators. In particular, the laser system comprises at least one laser light source for emitting at least one laser beam as well as a feed optics which defines a preform beam path for the at least one laser beam, in particular a preform beam path from at least one optical input channel of the feed optics to at least one optical output channel of the feed optics. The laser system also includes beam shaping optics which follow the preform beam path and which define a beam shaping beam path in which the useful light distribution is shaped from the laser beam of the at least one optical output channel. In this respect, the beam shape optics are arranged downstream of the feed optics in the beam path and act on laser beams that emerge from the feed optics, in particular from their at least one optical output channel.

The laser system also includes at least one alignment optics module, which is arranged such that the laser beam emitted by the laser light source passes through the alignment optics module before the preform beam path. The adjustment optics module has at least one adjustable or adjustable, in particular controllable, optics device which is designed in a variable manner and Way to optically affect the laser beam. In addition, at least one measuring optics module is provided, which is set up for this purpose and which is arranged such that an influence of the optical action in the adjusting optics module on the at least one laser beam in the beam shaping beam path and / or in the preform beam path is measured can be. In this respect, the measuring optics module is designed and arranged in such a way that a reaction of the beam path to the effects generated by means of the adjusting optics module can be measured.

By acting on the laser beam with the adjustment optics module, the beam path in the subsequent optics can thus be influenced and the response to interference can be detected by means of the measurement optics module. For example, the action on the laser beam in the alignment optics module can take place in such a way that the subsequent beam path has certain desired optical properties. If, for example, a new laser light source is installed in the laser system at the installation site when the laser system is being set up, the measuring optics module can be used to determine whether the beam shaping beam path has predetermined reference properties. If these reference properties are not available, the beam path can be influenced accordingly with the adjustment optics module.

In this respect, the laser light source can be adjusted into the laser system by means of the adjustment optics module without the optical elements of the complex beam shaping beam path and / or the preform beam path having to be changed. The beam shaping optics and the feed optics can therefore be pre-calibrated before the laser system is set up at the destination, for example during their manufacture. When setting up the laser system, the laser light source is then simply ground into the system using the adjustment optics module. This simplifies adjustment. It is also possible that the complex optical devices are already assembled in the respective housings and remain in the housing during transport.

The adjustment optics module assumes in particular the function of an interface between the laser light source and the optical units (feed optics, beam shaping optics) that are actually effective for generating the useful light distribution. In this respect, the alignment optics module can be designed such that it does not contribute to the actual formation of the useful light distribution from the laser beams. In particular, the properties of the useful light distribution are defined by the beam properties of the laser light source on the one hand and essentially only by the beam shape optics and the feed optics on the other hand.

The adjustment optics module is preferably arranged immediately after an optical output of the laser light source, through which the laser beam is emitted, and in front of the optical input channel of the feed optics.

The beam shaping optics preferably comprise a coupling element, by means of which a measuring beam can be coupled out of the beam shaping beam path. In particular, it is provided that the measuring optics module is arranged in such a way that the decoupled measuring beam is detected by the measuring optics module. For example, the decoupling element is a beam splitter or a partially transparent mirror, which generates two partial beams with different directions of propagation from an incident beam of the beam shaping beam path. The measuring beam is provided in particular by one of the two partial beams. This is done in particular in such a way that a large part of the power of a laser beam divided by the decoupling element is passed on to the following beam-shaping beam path (e.g. reflected by the partially transparent mirror) and only a small part of the power leads to the measuring optics module as a measuring beam. In particular, the coupling takes place e.g. such that a large part of the power of a detected laser beam is reflected and a small part is transmitted, the measuring beam of the beams being of lower power.

In order to define the complex beam shaping beam path, the beam shaping optics preferably have a large number of optical elements for beam deflection and / or beam guidance. It is also conceivable that the feed optics for defining the preform beam path have a large number of optical elements for beam deflection and / or beam guidance. The measuring optics module is preferably arranged such that at least one of these optics elements, preferably several of the optics elements, are passed through by the laser beam in the beam path in front of the measuring optics module. In this respect, at least at least one of the said optical elements, preferably a plurality of optical elements, are traversed along a beam path of the laser beam, starting from the laser light source, after passing through the adjustment optics module and the subsequent feed optics, before the respective laser beam strikes the measurement optics module. This enables the measurement of the response to the variation in the adjustment optics module to also take into account optical properties of the optical elements in the beam path of the beam shaping optics.

A reference beam path can be defined in the beam shape optics and this target state can be brought about by varying the adjustment optics module. In particular, the decoupling element is arranged in the beam path between two optical elements of the beam shaping optics.

The adjustable optical device can advantageously be implemented by a configuration-changeable optical element which is set up to act on properties of the laser beam (e.g. direction of propagation, intensity or the like). In particular, the configuration-changeable optical element is a beam deflection element, for example a deflection mirror. To change the configuration of the optical element, a controllable actuator is preferably provided which acts mechanically or electrically on the optical element, for example.

In particular, the alignment optics module for defining an alignment optics beam path has a plurality of optics elements, which also include the configuration-changeable optics element mentioned above. An advantageous aspect results from the fact that two configuration-changeable optical elements, each with associated actuators, are arranged in series along the alignment optical beam path. The two optical elements are preferably designed for deflecting the laser beam in two mutually perpendicular deflection directions, the deflection directions preferably also being perpendicular to the direction of propagation of the laser beam. For example, two mirrors arranged one after the other in the beam path are provided, the mirrors each being tiltable about two axes, the axes preferably being perpendicular to one another.

It is conceivable e.g. a configuration like a galvo scanner.

For a further embodiment, a beam attenuator can be arranged in the alignment optics beam path. The beam attenuator is designed in particular in such a way that it can assume two configurations. In principle, the beam attenuator can also be designed as a variable, in particular continuously variable, beam attenuator. This makes it possible to adjust the intensity of the laser beam.

In particular, the measuring optics module is not only set up to measure an action in the sense of a change in the beam path due to the action in the adjusting optics module. Rather, the measuring optics module is preferably also designed to measure an absolute property of the beam shaping beam path, preferably the position of a light spot of the detected laser beam on an optical sensor. The measuring optics module preferably comprises the optical sensor, in particular in the form of a CCD camera, on which the laser beam impinges. In this case, the optical sensor is preferably set up in such a way that a point of impact (e.g. by a light spot of the measuring beam on the sensor surface) can be measured in a reference coordinate system of the optical sensor. This makes it possible to determine the course of the laser beams in the detected section of the beam shaping beam path and the respective beam direction of the laser beam. A desired beam path can then be set by suitable changes in the alignment optics module.

In order to enable a precise measurement, the measuring optics module is preferably arranged in a stationary manner and in particular is positioned at a reference position with a reference orientation in the beam shaping optics.

The measuring optics module is designed in particular in the manner of an independent structural unit. The measuring optics module preferably has a beam access for a measuring beam and a beam splitting device, the beam splitting device being designed to split the detected measuring beam into at least two measuring beam paths, each with an assigned optical sensor. The measuring optics module is preferably designed such that the at least two measuring beam paths have different optical path lengths. For example, one measurement beam path can be set up to measure optical properties of the far field, and the other measurement beam path can be set up to measure properties of the optical near field.

Since the optical units of the beam shaping optics and the feed optics do not have to be manipulated for the adjustment of the laser beam, a comparatively complex beam path can be provided for the beam shaping optics and / or the feed optics. As explained, other solutions often try to avoid excessive complexity of the beam paths in order to keep the adjustment effort low. In this respect, the configurations described here particularly support configurations with compact and possibly also folded beam profiles. In this respect, in particular the feed optics and / or the beam shaping optics are designed in such a way that the preform beam path and / or the beam shaping beam path have several changes of direction and in particular are multiple folds. For example, the respective beam path runs in the manner of a Z fold (similar to the shape of the letter Z). This allows a comparatively long optical path in a compact space be accommodated. This is particularly advantageous since, for example, telescopes or other beam shaping optics with low refractive power and / or large focal lengths can be used in the beam pathways, which have comparatively low optical errors and aberrations. A particularly compact laser system can be provided by a folded beam path. In the present laser system, the complex beam shape optics and / or feed optics can be pre-adjusted during their manufacture. A compact laser system is thus provided, which achieves a reduced adjustment effort.

For a further embodiment, in particular the beam-shaping beam path can run in several planes and each have a folded beam path in several planes.

The beam shape optics and / or the feed optics are preferably pre-assembled, modular units. For a further embodiment, a housing is provided which encloses at least the beam shape optics or the beam shape optics together with the feed optics. The adjustment optics module is designed in particular as a closed structural unit and in particular separately from the housing. The adjustment optics module is preferably arranged outside the housing. However, it is also conceivable to arrange the adjustment optics module within the feed optics, e.g. to achieve a more compact structure.

The adjustment optics module preferably also has its own module housing. In this respect, the various modular units can be brought to the installation site separately from the laser light sources. In order to adjust the overall system, only an adjustment optics module then has to be connected between the laser light source and the feed optics, and the beam path in the beam shaping optics and / or the feed optics is brought into the desired shape by appropriate adjustment of the adjustment optics module.

The measuring optics module is also preferably enclosed by the housing, which at least also contains the beam shaping optics. The measuring optics module preferably also has a separate module housing. This enables easy installation in the pre-calibrated system. In particular, the housing has a defined interface with positioning means for interacting with corresponding positioning means on the module housing of the measuring optics module, so that an exact reference position and orientation of the measuring optics module can be specified.

Since it is not absolutely necessary to adjust the internal components during assembly at the destination, the housing for the beam shaping optics or the beam shaping optics and the feed optics can be constructed monolithically. In particular, the housing comprises a box and a carrier plate inside the box, which is preferably connected in one piece to the box. In cooperation with the embodiment described above, a stable structure for the pre-adjusted units can be achieved.

It is fundamentally advantageous if a plurality of laser light sources are provided for emitting at least one laser beam each and the feed optics accordingly have a plurality of optical input channels for the preform beam path. In addition, the feed optics preferably have a corresponding number of optical output channels, which provide the transition to the beam shaping beam path. A separate adjustment optics module is then preferably provided for each laser light source, which is arranged between the respective laser light source and the input channel assigned to this laser light source. In this respect, there is preferably a separate adjustment optics module for each laser light source, i.e. the number of laser light sources and adjustment optics modules are the same.

An advantageous embodiment can consist in that a separate measuring optics module is provided for each optical input channel. It is also conceivable that a separate measuring optics module is provided for each individual laser light source. The laser beams from the various laser light sources can basically be rearranged in the feed optics, so that a measurement optics module detects laser beams from one or more input channels.

However, it is also conceivable that the laser beams of the input channels are guided separately and / or combined in groups in the feed optics and are only combined or combined in the beam shaping optics, for example in the beam path after the measuring optics module, to form the useful light distribution.

It can also be advantageous if a measurement optics module is assigned to several adjustment optics modules at the same time. In particular, a measurement optics module can measure an influence of the optical action in each of the assigned adjustment optics modules. To calibrate the system, for example, the laser light sources can be successively adjusted into the beam path using the respective adjustment optics module.

The adjustment optics modules, the feed optics and the beam shaping optics are preferably designed such that each laser beam of the different laser light sources in the beam path in front of the measuring optics module without mixing with laser beams from other laser light sources. The various laser light sources can thus be adjusted independently of one another, even if there is not a separate measurement optics module for each laser light source.

The invention is explained in more detail below with reference to the figures.

• 1 skizzierte Darstellung zur Erläuterung des Strahlengangs und der funktionalen Komponenten eines erfindungsgemäßen Lasersystems;
• 2 perspektivische Ansicht auf ein erfindungsgemäßes Lasersystem mit kompakter Bauform; und
• 3 Darstellung einer Ausgestaltung des Justieroptik-Moduls.

Show it:

• 1 sketched representation to explain the beam path and the functional components of a laser system according to the invention;
• 2nd perspective view of an inventive laser system with a compact design; and
• 3rd Representation of an embodiment of the adjustment optics module.

In the following description and in the figures, the same reference numerals are used for identical or corresponding features.

In the 1 and 2nd A laser system or a laser device is shown, all of which are identified by the reference symbol 10th is designated. The laser system 10th includes two laser light sources in the example shown 12a , 12b , which are each preferably designed as a closed structural unit in the manner of a module. In the example shown, each of the laser light sources is 12a , 12b formed such that two separate laser beams in parallel 14 be delivered. This can be seen as an optional design.

The laser beams from any laser light source 12a , 12b form an input beam group in the example shown 16a or. 16b . The input beam groups 16a , 16b are each through an optical input channel 18a or. 18b in a feed optics 20 irradiated. In this respect, the feed optics 20 for each optical input channel 18a or. 18b an assigned beam access 22a or. 22b on.

The feed optics 20 is designed to handle the laser beams 14 from the optical input channels 18a , 18b to optical output channels 24a , 24b to lead. For this purpose, the feed optics 20 a plurality of optical elements for beam deflection and / or beam guidance 26 (e.g. lens means, reflectors, deflecting mirrors, prisms or similar), by means of which a preform beam path 28 in the feed optics 20 is specified. In the example shown is the preform beam path 28 Folded several times, so that a comparatively long optical path can be covered in a compact installation space and thus sufficient space is provided for optical elements (not shown) for shaping the beam properties (for example telescopes).

In the optical output channels 24a , 24b become output beam groups 30a , 30b of laser beams 14 provided, which then by a beam shape optics following in the beam path 32 are detected and converted into the desired useful light distribution L, which in the example shown has a linear beam cross section.

The beam shape optics 32 comprises several optically functional devices and in particular a plurality of optical elements 34 for beam deflection and / or beam guidance. These help create a beam shaping beam path 36 in the beam shape optics 32 to define and from the laser beams 14 the output beam groups 30a , 30b to shape the line-shaped useful light distribution L.

For example, the laser beams of the output beam groups 30a or. 30b or subgroups of which initially have one or more telescopes 38 pass through, which are designed in particular as anamorphic telescopes and shape the beam cross section in a suitable manner. The laser beams follow the beam path 14 then in the example shown by a forming optics 40 directed out of the laser beams 14 the output beam groups 30a , 30b Form one or more beam packages with an elongated beam cross-section. The beam bundles preformed in this way are then, for example, using homogenization optics 42 mixed and optionally smoothed in the intensity curve, so that the desired useful light distribution L can be provided.

The preform beam path 28 is folded several times in the example shown, so that a comparatively long optical path can be covered in a compact installation space and thus sufficient space is provided for optical elements (not shown) for shaping the beam properties. Also the beam shape beam path 36 is preferably folded several times.

The feed optics 20 can be designed such that the laser beams 14 an input beam group 16a , 16b initially run separately from one another and also run separately from the laser beams of the respective other input beam group (cf. 1 ). The feed optics 20 is formed in the example shown such that the laser beams of the different input beam groups 16a , 16b in the preform beam path 28 be rearranged and then each output beam group 30a , 30b at least one laser beam each 14 from everyone of the input beam groups 16a , 16b includes. Such configurations can be advantageous, but are optional in the present example. In particular, it is provided that the different laser beams do not mix during the sorting.

The laser system 10th also includes an alignment optics module 44 which is the laser beam 14 before entering the preform beam path 28 goes through. In the example shown, each is laser light source 12a , 12b and each optical input channel 18a , 18b just an adjustment optics module 44 assigned. The alignment optics module 44 is between an optical output 46 the respective laser light source 12a , 12b and the respective beam access 22a , 22b the feed optics switched.

The alignment optics module 44 is designed as a modular unit. As in the detailed view in 1 recognizable, the alignment optics module comprises several optics elements 48 , by means of which an alignment optics beam path 50 in the alignment optics module 44 is defined. The alignment optics module 44 includes an adjustable optical device 52 , by means of which on the laser beam 14 can be acted on, in particular in such a way that the laser beam 14 can be deflected in a controlled manner. For this purpose, the adjustable optical device includes 42 at least one configuration-changeable optical element 54 and an associated adjustable actuator (not shown in detail). The configuration-changeable optical element can be preferred 54 act as a tilting mirror which can be adjusted with the assigned actuator. In the example shown, the alignment optics beam path comprises 50 two serial-acting, configuration-changeable optical elements 54 , each preferably a deflection of the laser beam 14 with respect to two perpendicular directions (and perpendicular to the direction of propagation of the laser beam). This enables the direction and location of the beam to be set.

The laser system 10th also includes at least one measuring optics module 56 , by means of which an influence of the optical influence in the alignment optics module can be measured. In the example shown there are two measuring optics modules 56 provided, each with a measuring optics module 56 with only one output beam group each 30a , 30b cooperates.

In the example shown is the measuring optics module 56 arranged such that the effect of the variation in the adjustment optics module also on the beam shaping beam path 36 can be measured. For this purpose, the beam shape optics 32 a decoupling element 58 for optically decoupling a measuring beam 60 from the beam shaping beam path 36 on. The decoupling element 58 is designed, for example, as a partially transmissive reflector, which contains the majority of the incident radiation in the beam shaping beam path 36 leaves and only a small part as a measuring beam 60 lets through. The measuring optics module 56 is arranged so that it is the measuring beam 60 detected.

The measuring optics module 56 is based on the in 1 displayed detail view explained in more detail. In particular, the measuring optics module 56 a beam access 62 through which the measuring beam 60 entry. The measuring beam 60 strikes a beam splitter 64 which is the measuring beam 60 on two measuring beam paths, for example 66a , 66b divides. The measuring beam paths 66a , 66b each lead to an assigned optical sensor 68a , 68b , for example in the manner of a CCD chip. In particular, the optical sensors 66a , 66b formed such that a location of the impact on the sensor can be determined.

Because the measurement optics module 56 at a defined position with respect to the beam shaping beam path 36 the three-dimensional course of the measuring beam can be arranged 60 and thus also the three-dimensional course of the detected section of the beam shaping beam path 36 be determined.

The embodiment shown with two optical sensors makes it possible, for example, measuring beam paths 66a , 66b to be provided with different optical path lengths and for example with the various sensors 68a , 68b To measure the near field and far field of the detected laser beam. However, configurations with only one measuring beam path and only one optical sensor are also conceivable, or also with a larger number of sensors and more complex beam paths.

The 3rd shows an exemplary embodiment for the alignment optics module 44 , wherein the functional elements are provided with the reference numerals defined above.

In particular, the alignment optics module 44 its own module housing 70 in which the components of the alignment optics module 44 are bordered. For example, the adjustment optics module includes 44 one or more beam accesses 72 for connection to the optical output of the laser light source. Through beam exits 74 occur the detected laser beams 14 out to in the preform beam path 28 to pass over (cf. 1 ). In the example shown, the alignment optics module comprises in the beam path after the configuration-changeable optics elements 54 also a beam attenuator 76 to adjust the intensity of the detected laser beams.

As in 2nd recognizable, the laser system 10th Overall, be modular, the individual units are preferably enclosed in separate housings. For example, the beam shape optics 32 a housing 78 which covers the entire beam shaping beam path 36 contains. The measuring optics module 56 is preferably also in the housing 78 edged. In the example shown is the feed optics 20 designed as a separate module and has its own housing 80 in which the preform beam path 28 is included. However, it is also conceivable that the beam shape optics 32 and the feed optics 20 are enclosed in a common housing. The housing 78 and / or the housing 80 is preferably monolithic, which enables high stability.

To set up the laser system 10th can the adjustment optics module 44 with its module housing 70 such on the housing 80 be arranged that the at least one beam output 74 with the beam access 22a or. 22b the feed optics 20 corresponds. The respective beam access 72 can with the associated laser light source 12a , 12b be connected, which is preferably also enclosed in its own housing.

QUOTES INCLUDE IN THE DESCRIPTION

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Patent literature cited

• WO 2018/019374 A1 [0003]

Claims (14)

Laser system (10) for generating a useful light distribution (L) with in particular a linear beam cross section, comprising: - at least one laser light source (12a, 12b) for emitting at least one laser beam (14); a feed optic (20) which defines a preform beam path (28) for the laser beam (14), - A beam shape optics (32), which follows the preform beam path (28) and defines a beam shaping beam path (36) for shaping the useful light distribution (L), characterized by - At least one adjustment optics module (44) through which the at least one laser beam (14) passes before the preform beam path (28), the adjustment optics module (44) at least one adjustable optics device (52) for variable optical action on the laser beam (14) has - And at least one measuring optics module (56) which is set up to measure an influence of the optical influence in the adjusting optics module (44) on the beam shaping beam path (36) and / or on the preform beam path (28) . Laser system (10) after Claim 1 , wherein the beam shaping optics (32) has a coupling element (58) for optically coupling a measuring beam (60) out of the beam shaping beam path (36), and wherein the measuring optics module (56) is arranged in such a way that it couples the coupled measuring beam (60 ) detected. Laser system (10) after Claim 1 or 2nd , wherein the beam shaping optics (32) for defining the beam shaping beam path (36) have a plurality of optical elements (34) for beam deflection and / or beam guiding and / or wherein the feed optics (20) for defining the preform beam path (28) have a multiplicity of optical elements (26) for beam deflection and / or beam guidance, and wherein the measuring optical module (56) is arranged such that at least one of these optical elements (34) and / or optical elements (26), preferably a plurality of the optical elements (34) and / or optical elements (26) through which the laser beam (14) traverses in the beam path in front of the measuring optics module (56). Laser system (10) according to one of the preceding claims, wherein the adjustable optical device (52) has at least one configuration-changeable optical element (54) for acting on the laser beam (14), in particular a beam deflection element, and wherein the adjustable optical device (52) has at least one controllable actuator for changing the configuration of the optical element (54). Laser system (10) according to one of the preceding claims, wherein the measuring optics module (56) has at least one optical sensor (68a, 68b), in particular CCD camera chip, on which the laser beam (14) impinges, the optical sensor (68a, 68b) is set up in such a way that a location of impact on the optical sensor can be measured in a reference coordinate system of the optical sensor (68a, 68b). Laser system (10) according to one of the preceding claims, wherein the measuring optics module (56) has a beam access (62) for at least one measuring beam (60) and a beam splitting device (64), the beam splitting device (64) being designed to transmit the measuring beam (60) to be divided into at least two measuring beam paths (66a, 66b) for each associated optical sensor (68a, 68b), the at least two measuring beam paths (66a, 66b) having different optical path lengths. Laser system (10) according to one of the preceding claims, wherein the feed optics (20) and / or the beam shaping optics (32) are designed such that the preform beam path (28) and / or the beam shaping beam path (36) has several changes in direction, and in particular is folded several times. Laser system (10) according to one of the preceding claims, wherein a housing (78) is provided, which encloses the beam shape optics (32) or the beam shape optics (32) and the feed optics (20), wherein the adjustment optics module (44) separately from the Housing (78) is formed and is preferably arranged outside the housing (78). Laser system (10) after Claim 8 , wherein the measuring optics module (56) is also enclosed by the housing (78). Laser system (10) after Claim 8 or 9 , wherein the housing (78) is constructed monolithically. Laser system (10) according to one of the preceding claims, wherein a plurality of laser light sources (12a, 12b) are provided, and wherein the feed optics (20) has a plurality of optical input channels (18a, 18b) to the preform beam path (28), and wherein for each Laser light source (12a, 12b) each has an adjustment optics module (44) which is arranged between the laser light source (12a, 12b) and the assigned input channel (18a, 18b). Laser system (10) after Claim 11 A separate measuring optics module (56) is provided for each optical input channel (18a, 18b). Laser system (10) after Claim 11 A measuring optics module (56) is assigned to a plurality of adjusting optics modules (44) at the same time. Laser system (10) according to one of the Claims 11 - 13 Each laser beam (14) from each of the plurality of laser light sources (12a, 12b) runs in the beam path in front of the measuring optics module without being mixed with laser beams (14) from the other laser light sources.

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