KR20210118306A - Manufacturing device for display device - Google Patents

Abstract

The present invention provides an apparatus for manufacturing a display device capable of adjusting the flow rate (or pressure) of air injected from each discharge flow pipe. The apparatus according to an embodiment includes: a first plate including a first internal flow path disposed inside the first plate; and a second plate disposed on the first plate and including a plurality of discharge ports open to the outside, and a second internal flow path disposed inside the second plate and spatially connecting each of the discharge ports to the first internal flow path. The first internal flow path comprises a first flow path pipe, and the second internal flow path comprises a second flow path pipe, a first air chamber and a second air chamber, wherein the internal width of the first air chamber and the internal width of the second air chamber are larger than the internal width of the first flow path pipe and the internal width of the second flow path pipe, and the first air chamber is spatially connected to the first flow path pipe. The second flow path pipe includes an inter-chamber moving flow path pipe that spatially connects the first gas chamber and the second gas chamber; and a discharge flow path pipe that spatially connects the second gas chamber and each of the discharge ports.

Description

The manufacturing apparatus of a display device {MANUFACTURING DEVICE FOR DISPLAY DEVICE}

The present invention relates to an apparatus for manufacturing a display device.

The importance of the display device is increasing with the development of multimedia. In response to this, various types of display devices such as an organic light emitting display (OLED) and a liquid crystal display (LCD) are being used.

The display panel constituting the display device is formed by cutting from the panel substrate, and fine particles or fumes may be generated during the cutting process. At this time, the generated fine particles or fumes may be adsorbed to the pad part and cause poor contact with the pad part. Therefore, in order to prevent this, an air blower that sprays air to remove fine particles or fumes is used.

When removing fine particles or fumes through an air blower, if air is directly sprayed on the display panel, it may cause the display panel to vibrate, which may cause problems in the display panel cutting process. have.

SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus for manufacturing a display device capable of minimizing vibration of a panel substrate and controlling a flow rate (or pressure) of air sprayed from each discharge channel.

The problems of the present invention are not limited to the problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

According to an exemplary embodiment, an apparatus for manufacturing a display device includes: a first plate including a first internal flow path disposed therein; and a second plate disposed on the first plate, comprising a plurality of outlets opened to the outside, and a second internal channel disposed therein and spatially connecting each outlet to the first inner channel. a first including two plates, wherein the first internal flow path includes a first flow path pipe, the second internal flow path includes a second flow path pipe, and an inner width greater than the first flow path pipe and the second flow path pipe an air room and a second air room, wherein the first air room is spatially connected to the first flow pipe, and the second flow pipe is spatially connected between the first air room and the second air room. and a flow passage pipe for moving between rooms, and a discharge flow pipe for spatially connecting the second air room and each of the discharge ports.

The second plate may include a body portion and a protrusion having a width smaller than that of the body portion and extending outside the body portion.

The protrusion may include a first protrusion and a second protrusion, a lower surface of the first protrusion may include a curved surface, and a curved space may be defined between a lower surface of the first protrusion and an upper surface of the second protrusion.

The discharge flow pipe may be disposed in the second protrusion and may be spatially connected to the curved space.

The discharge port may be covered by the first protrusion in a plan view.

A top surface of the first protrusion may be flat, and a thickness of the first protrusion may decrease toward the outside.

The second air room may be disposed in the second protrusion.

The first air room may be disposed in the body portion.

The first air room and the second air room may each have a shape extending in a first direction, and the inter-room movement flow pipe may extend in a second direction intersecting the first direction.

The discharge flow pipe may extend in a third direction perpendicular to a plane defined by the first direction and the second direction.

A plurality of flow passage pipes between the rooms may be provided, and the flow passage pipes between the respective rooms may be arranged to be parallel to each other and spaced apart from each other.

The inner diameter of the moving passage pipe between the rooms may increase from the center toward the outside.

It may further include a laser module disposed on the upper side of the second plate for emitting a laser beam and an optical system for controlling an optical path of the laser beam.

Further comprising a third plate spaced apart from the second plate and disposed to surround the second plate, wherein the spaced space between the second plate and the third plate has an outer surface of the second plate as a side wall , a groove portion having an inner surface of the third plate as the other side wall and an upper surface of the first plate as a bottom surface may be defined.

An upper surface of the first plate of the groove portion may include a suction hole, and the suction hole may be connected to a lower suction unit that provides a negative pressure through a lower suction pipe disposed inside the first plate.

The second plate may seat a target substrate.

The second plate may further include a plurality of adsorption holes for fixing the target substrate.

According to another exemplary embodiment, an apparatus for manufacturing a display device includes: a first plate; and a second plate disposed on the first plate and including a through hole having a closed curve shape, wherein the first plate includes a first internal flow path including a first flow path pipe, and the second plate includes a plurality of outlets disposed around the through-hole, and a second internal flow path spatially connecting each of the outlets to the first internal flow path, wherein the second internal flow path includes a second flow path pipe, and the inner width is the and a first air room and a second air room larger than a first flow pipe and the second flow pipe, wherein the first air room is spatially connected to the first flow pipe, and the second flow pipe is the second flow pipe. and an inter-room movement flow path pipe spatially connecting between the first air room and the second air room, and a discharge flow path pipe spatially connecting between the second air room and each of the discharge ports.

The second plate may include a body portion and a protrusion having a width smaller than that of the body portion and extending outside the body portion.

The protrusion may include a first protrusion and a second protrusion, a lower surface of the first protrusion may include a curved surface, and a curved space may be defined between a lower surface of the first protrusion and an upper surface of the second protrusion.

The details of other embodiments are included in the detailed description and drawings.

According to embodiments of the present invention, by indirectly injecting air to pass through the lower surface of the curved first protrusion, the flow velocity (or pressure) of the air may be reduced due to the Coanda effect. Accordingly, vibration of the panel substrate can be minimized.

In addition, the first air room, which is wider than the first flow pipe, in the internal flow path, and a plurality of inter-room moving flow pipes connecting the first air room and the second air room are disposed, so that the flow rate of air injected from each discharge flow pipe pipe (or pressure) can be adjusted.

Effects according to the embodiments of the present invention are not limited by the contents exemplified above, and more various effects are included in the present specification.

1 is a plan view illustrating a display device according to an exemplary embodiment.
2 is a schematic partial cross-sectional view of a display device according to an exemplary embodiment.
3 is a perspective view of an apparatus for manufacturing a display device according to an exemplary embodiment.
4 is a cross-sectional view illustrating an internal adsorption channel and an external adsorption channel of an apparatus for manufacturing a display device according to an exemplary embodiment.
5 is a cross-sectional view illustrating an internal flow path and a lower suction flow path of an apparatus for manufacturing a display device according to an exemplary embodiment.
6 is a perspective view of a second plate and a third plate according to an exemplary embodiment;
FIG. 7 is an enlarged view of region Q of FIG. 5 .
8 is a schematic diagram illustrating an internal flow path in embossing according to an embodiment.
9 is a plan view illustrating a second internal flow path according to an exemplary embodiment.
10 and 11 are schematic views illustrating a process in which fine particles are removed.
12 is a plan view illustrating a second internal flow path according to another exemplary embodiment.
13 is a plan view illustrating a second internal flow path according to another exemplary embodiment.
14 is a plan view illustrating a second internal flow path according to another exemplary embodiment.
15 is a plan view illustrating a second internal flow path according to another exemplary embodiment.
16 is a plan view illustrating a second internal flow path according to another exemplary embodiment.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

Reference to an element or layer “on” of another element or layer includes any intervening layer or other element directly on or in the middle of the other element or layer. Like reference numerals refer to like elements throughout.

Although the first, second, etc. are used to describe various elements, these elements are not limited by these terms, of course. These terms are only used to distinguish one component from another. Accordingly, it goes without saying that the first component mentioned below may be the second component within the spirit of the present invention.

Hereinafter, embodiments will be described with reference to the accompanying drawings.

1 is a plan view illustrating a display device according to an exemplary embodiment. 2 is a schematic partial cross-sectional view of a display device according to an exemplary embodiment.

In the plan view of FIG. 1 , up, down, left, and right directions are defined for convenience of description. The up-down direction is a vertical direction or a column direction, and the left-right direction is a horizontal direction or a row direction. In the specification, the terms "upper edge", "lower edge", "left edge", and "right edge" of a display panel or the like refer to edges or ends respectively positioned on the upper, lower, left, and right sides of the display panel, etc. do. It should be understood that the directions mentioned in the embodiments refer to relative directions, and the embodiments are not limited to the mentioned directions.

1 and 2 , the display device DD is a device that displays a moving image or a still image, and the display device DD includes a mobile phone, a smart phone, a tablet personal computer (PC), and a smart watch and a watch phone. , mobile communication terminals, electronic notebooks, e-books, PMP (Portable Multimedia Player), navigation, UMPC (Ultra Mobile PC), etc. as well as portable electronic devices such as televisions, laptops, monitors, billboards, display screens of various products such as billboards and Internet of Things can be used as Examples of the display device DD include an organic light emitting diode display, a liquid crystal display, a plasma display, a field emission display, an electrophoretic display, an electrowetting display, a quantum dot light emitting display, and a micro LED display. Hereinafter, an organic light emitting diode display will be described as an example of the display device, but the present invention is not limited thereto.

The display device DD may include a display panel DP. The display panel DP may include a flexible substrate including a flexible polymer material such as polyimide. Accordingly, the display panel DP may be bent, bent, folded, or rolled.

The display panel DP may include a main region MR and a bending region BD connected to one side of the main region MR. The display panel DP may further include a sub-region SR connected to the bending region BD and overlapping the main region MR in a thickness direction.

When a portion of the display panel DP that displays a screen is defined as a display area DA and a portion that does not display a screen is defined as a non-display area NDA, the display area DA of the display panel DP is the main area. (MR) is placed within. A portion other than the display area DA becomes a non-display area NDA of the display panel DP. In an exemplary embodiment, a peripheral edge portion of the display area DA and the bending area BD in the main area MR. The entirety of and the entire sub-area SR may be the non-display area NDA. However, the present invention is not limited thereto, and the bending area BD and/or the sub-region SR may also include the display area DA.

The main area MR may have a shape substantially similar to a planar shape of the display device DD. The main region MR may be a flat region located on one plane. However, the present invention is not limited thereto, and at least one edge of the remaining edges other than an edge (side) connected to the bending region BD in the main region MR may be bent to form a curved surface or may be bent in a vertical direction.

The display area DA of the display panel DP may be disposed in the center of the main area MR. The display area DA may include a plurality of pixels. The display area DA may have a rectangular shape or a rectangular shape with rounded corners. However, the present invention is not limited thereto, and the display area DA may have various shapes such as a square or other polygons, or a circle or an oval.

When at least one edge among the remaining edges other than an edge (side) connected to the bending area BD in the main area MR forms a curved surface or is bent, the display area DA may also be disposed on the corresponding edge. . However, the present invention is not limited thereto, and a non-display area NDA that does not display a screen may be disposed on the curved or bent edge, or the display area DA and the non-display area NDA may be disposed together.

A non-display area NDA may be positioned around the display area DA in the main area MR. The non-display area NDA of the main area MR may lie in an area from the outer boundary of the display area DA to the edge of the display panel DP. Signal wires or driving circuits for applying a signal to the display area DA may be disposed in the non-display area NDA of the main area MR. Also, an outermost black matrix may be disposed in the non-display area NDA of the main area MR, but is not limited thereto.

The bending area BD is disposed between the main area MR and the sub area SR, and at least one of the two outlines may include a curved portion. For example, the bending region BD may be a curved portion in which two outlines connecting one side of the main region MR and one side of the sub region SR have the same curvature. The distance between the two outlines may decrease from the main area MR to the sub area SR.

In the bending area BD, the display panel DP may be bent with a curvature in a downward direction in a thickness direction, that is, in a direction opposite to the display surface. The bending area BD may have a constant radius of curvature, but is not limited thereto and may have a different radius of curvature for each section. As the display panel DP is bent in the bending area BD, the surface of the display panel DP is inverted. That is, the one surface of the display panel DP facing the upper side may be changed so that it travels outward through the bending area BD and then faces downward again.

The sub region SR extends from the bending region BD. The sub region SR may extend in a direction parallel to the main region MR starting after bending is completed. The sub region SR may overlap the main region MR in the thickness direction of the display panel DP. The sub area SR may overlap the non-display area NDA of the edge of the main area MR, and further overlap the display area DA of the main area MR. The width of the sub region SR may be the same as the width of the bending region BD, but is not limited thereto.

A driving chip IC may be disposed on the sub-region SR of the display panel DP. The driving chip IC may include an integrated circuit that drives the display panel DP. In an embodiment, the integrated circuit may be a data driving integrated circuit that generates and provides a data signal, but is not limited thereto. The driving chip IC may be mounted on the display panel DP in the sub region SR. The driving chip IC is mounted on one surface of the display panel DP, which is the same surface as the display surface, and as described above, the surface of the display panel DP faces downward in the thickness direction as the bending region BD is bent and inverted. The upper surface of the driving chip (IC) may face downward. The driving chip IC may be attached to the display panel DP through an anisotropic conductive film or may be attached to the display panel DP through ultrasonic bonding bonding. The horizontal width of the driving chip IC may be smaller than the horizontal width of the display panel DP. The driving chip IC may be disposed in a horizontal central portion of the sub region SR, and left and right edges of the driving chip IC may be spaced apart from the left and right edges of the sub region SR, respectively.

A pad part PAD may be provided at an end of the sub-region SR of the display panel DP, and a printed circuit board FPCB may be connected to the pad part PAD. The printed circuit board (FPCB) may be a flexible printed circuit board or a film.

3 is a perspective view of an apparatus for manufacturing a display device according to an exemplary embodiment.

Referring to FIG. 3 , the shape of the panel substrate PS before cutting shown by a dotted line in FIG. 3 may be a rectangular shape. The four corners are rounded, and the flow passage pipe between the rooms of the main area MR and the bending area BD is formed into a display device DD having an L-shaped cut shape, and the laser beam LB is along the cutting line CL. ) can be used to cut The cutting line CL may be an edge of the display panel DP after cutting. The panel substrate PS before cutting includes a central portion that is disposed inside the cutting line CL and becomes the display panel DP after cutting, and an edge portion that is disposed outside the cutting line CL and becomes a dummy portion DM after cutting. may include

The apparatus 1 for manufacturing a display device according to an embodiment may include a laser module 10 , an optical system 20 , an upper suction unit 30 , and a stage unit STU. The display device manufacturing apparatus 1 may be a device capable of cutting the panel substrate PS by irradiating the laser beam LB to the panel substrate PS.

The laser module 10 may emit a laser beam LB capable of cutting the panel substrate PS. In an exemplary embodiment, the laser beam LB may be irradiated along the cutting line CL of the panel substrate PS. The laser beam LB emitted from the laser module 10 may be a CO2 laser, a green laser, an infrared laser, or an ultraviolet laser.

The optical system 20 may allow the laser beam LB emitted from the laser module 10 to reach the panel substrate PS. Specifically, it may be reached along the cutting line CL formed on the panel substrate PS. In an exemplary embodiment, the irradiation of the laser beam LB is a laser cutting process while adjusting the optical path of the laser beam LB using the optical system 20 in a state in which the laser module 10 and the panel substrate PS are fixed. This can proceed. For example, the optical system 20 may include a galvano scanner or a polygon mirror.

The stage unit STU may support the panel substrate PS. The stage unit STU may include a first plate 100 , a second plate 200 , and a third plate 300 disposed on the first plate 100 . The second plate 200 and the third plate 300 may overlap the first plate 100 in the third direction DR3 . Also, the stage unit STU may further include an internal flow path ABL. The internal flow path ABL may include a first internal flow path ABL1 included in the first plate 100 and a second internal flow path ABL2 included in the second plate 100 .

The panel substrate PS may be seated on the second plate 200 and the third plate 300 . The second plate 200 may support the central portion of the panel substrate PS, and may provide negative pressure through the internal suction hole 251 to fix the central portion of the panel substrate PS. The second plate 200 has substantially the same shape as the display panel DP, and the size of the second plate 200 may be larger than that of the display panel DP, but is not limited thereto. The edge of the second plate 200 may be substantially parallel to the edge of the display panel DP, and may be disposed inside the edge of the display panel DP. That is, the edge of the second plate 200 may be substantially parallel to the cutting line CL of the panel substrate PS, and may be disposed inside the cutting line CL of the panel substrate PS. A detailed description of the shape of the second plate 200 will be described later.

An edge of the panel substrate PS may be seated on the third plate 300 . That is, the third plate 300 may support the edge portion of the panel substrate PS, and may provide a negative pressure through the external suction hole 351 to fix the edge portion of the panel substrate PS.

The third plate 300 may be disposed to be spaced apart from the second plate 200 to the outside. The third plate 300 may be disposed to surround the second plate 200 . A groove 130 may be disposed in a space between the second plate 200 and the third plate 300 . The groove 130 is a space defined by using the outer surface of the second plate 200 as one side wall, the inner surface of the third plate 300 as the other side wall, and the upper surface of the first plate 100 as the bottom surface. can The cutting line CL on the panel substrate PS may overlap the groove 130 in the third direction DR3 .

The panel substrate PS may be supported on the second plate 200 and the third plate 300 . A central portion of the panel substrate PS may be supported on the second plate 200 , and an edge of the panel substrate PS may be supported on the third plate 300 .

The stage unit STU is disposed on the first plate 100 , and may further include a fourth plate 400 disposed outside of the third plate 300 . The fourth plate 400 may cover the upper surface of the first plate 100 disposed outside the third plate 300 . The fourth plate 400 may overlap the first plate 100 in the third direction DR3 . That is, the fourth plate 400 may cover the upper surface of the first plate 100 that does not overlap the second plate 200 and the third plate 300 in the third direction DR3 . The fourth plate 400 may be disposed to be spaced apart from the third plate 300 to the outside.

An upper suction unit 30 may be disposed between the optical system 20 and the stage unit STU. When the panel substrate PS is cut by the laser beam LB along the cutting line CL, fine particles may be generated. These fine particles may be sucked through the upper suction unit 30 and discharged to the outside. can Specifically, the upper suction unit 30 provides negative pressure to the upper suction unit 31 under the upper suction unit 30 through the upper suction pipe 32 connected to the vacuum motor (not shown) to suck fine particles. can Fine particles may be generated on the upper and lower portions of the panel substrate PS when the panel substrate PS is cut. The fine particles generated in the upper portion of the panel substrate PS may be mainly sucked through the upper suction unit 30 and discharged to the outside. An operation of discharging the fine particles will be described in detail below with reference to FIGS. 10 and 11 .

4 is a cross-sectional view illustrating an internal adsorption channel and an external adsorption channel of an apparatus for manufacturing a display device according to an exemplary embodiment. 5 is a cross-sectional view illustrating an internal flow path and a lower suction flow path of an apparatus for manufacturing a display device according to an exemplary embodiment. 6 is a perspective view of a second plate and a third plate according to an exemplary embodiment;

4 to 6 , the second plate 200 has a body portion 280 and has a width smaller than that of the body portion 280 and extends in the second direction DR2 of the body portion 280 to the other side ( 260, 270) may be included. The protrusions 260 and 270 may include a first protrusion 260 and a second protrusion 270 .

A plurality of internal suction holes 251 may be disposed on the upper surface 281 of the body 280 . The plurality of internal suction holes 251 may be arranged in a grid shape along the first direction DR1 and the second direction DR2, but is not limited thereto and may be arranged in various shapes. Although FIG. 5 illustrates the second plate 200 having 30 internal suction holes 251 formed on the upper surface 281 of the body 280 , the number of internal suction holes 251 is not limited thereto.

The internal adsorption hole 251 may be connected to the internal adsorption motor IV through an internal adsorption passage IVL formed through the inside of the second plate 200 and the first plate 100 . The internal adsorption channel IVL includes a second internal adsorption tube 250 formed through the inside of the second plate 200 and a first internal adsorption pipe 151 formed through the inside of the first plate 100 . can do. In one embodiment, the internal adsorption flow path (IVL) may have a cylindrical cross-section having a circular cross-section, but is not limited thereto and may have various shapes such as a triangular cross-section or a quadrangular cross-section. One end of the second internal adsorption pipe 250 may be connected to the internal adsorption hole 251 , and the other end may be connected to one end of the first internal adsorption pipe 151 to be described later.

As described above, the protrusions 260 and 270 extending to the other side in the second direction DR2 may be disposed on the other side of the body portion 280 in the second direction DR2 . The protrusions 260 and 270 may include a first protrusion 260 and a second protrusion 270 . The upper surface of the first protrusion 260 may include a flat surface, and the lower surface 261 may include a curved surface. A curved space may be defined between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 . In a plan view, the first protrusion 260 may cover the discharge port 241 .

The first protrusion 260 and the second protrusion 270 may be disposed to be spaced apart from each other in the third direction DR3 . Specifically, the first protrusion 260 is disposed on one side of the second protrusion 270 in the third direction DR3 , and the second protrusion 270 is disposed on the other side of the first protrusion 260 in the third direction DR3 . can be placed.

As the lower surface 261 of the first protrusion 260 is formed in a curved shape, the flow of air injected from the lower portion may be controlled by the Coanda effect. In order to describe this in detail, reference is made to FIG. 11 . An upper surface of the first protrusion 260 may be flat. The thickness of the first protrusion 260 in the third direction DR3 may decrease toward the other side in the second direction DR2 . That is, the thickness of the first protrusion 260 in the third direction DR3 may decrease toward the outside of the second plate 200 .

The second protrusion 270 may be disposed to be spaced apart from the first protrusion 260 to the other side in the third direction DR3 . As will be described later, the discharge flow path pipe 240 spatially connected to the second air room 220 and the curved space may be disposed inside the second protrusion 270 .

The separation distance between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 may be different for each region. The separation distance between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 may increase toward the other side in the second direction DR2 . That is, the separation distance between the lower surface 261 of the first protrusion 260 and the upper surface 271 of the second protrusion 270 may increase toward the outside of the second plate 200 . One side in the second direction DR2 of the lower surface 261 of the first protrusion 260 and one side in the second direction DR2 of the upper surface 271 of the second protrusion 270 may be connected, but is not limited thereto. The other end of the first protrusion 260 in the second direction DR2 and the other end of the second protrusion 270 in the second direction DR2 may be aligned in the third direction DR3 , but the present invention is not limited thereto.

The second plate 200 may include a second internal flow path ABL2 disposed therein and a plurality of outlets 241 opened to the outside. The second internal flow path ABL2 includes a first air room 210 , a second air room 220 , and an inter-room moving flow pipe 230 connecting the first air room 210 and the second air room 220 , and a discharge flow path pipe 240 spatially connecting between the second air room 220 and the discharge port 241 . Specifically, the first air room 210 may be disposed inside the body part 280 , and the second air room 220 may be disposed inside the second protrusion part 270 . The first air room 210 and the second air room 220 have a shape extending in the first direction DR1 , and the inter-room movement flow path pipe 230 has a shape extending in the second direction DR2 . can The internal flow path ABL will be described in detail with reference to FIGS. 7 to 9 .

The third plate 200 may be disposed outside the second plate 200 . The third plate 200 may fix the edge portion of the panel substrate PS through the plurality of external suction holes 251 disposed on the upper surface 201 . In an exemplary embodiment, the dummy part DM may be disposed on the third plate 200 after cutting. The outer surface of the second plate 200 and the inner surface of the third plate 200 may be disposed to face each other and to be spaced apart from each other.

The external adsorption hole 251 may be connected to the external adsorption motor OV through the external adsorption passage OVL formed through the inside of the third plate 200 and the inside of the first plate 100 . The third plate 200 may include a second external adsorption tube 350 disposed therein.

The external adsorption channel OVL includes a second external adsorption tube 250 formed through the inside of the third plate 200 and a first external adsorption tube 152 formed through the inside of the first plate 100 . can do. In one embodiment, the external adsorption flow path (OVL) may have a cylindrical cross-section having a circular cross-section, but is not limited thereto and may have various shapes such as a triangular cross-section, a quadrangular cross-section, and the like. The second external adsorption tube 350 may have one end connected to the external adsorption hole 351 , and the other end may be connected to one end of the first external adsorption tube 152 , which will be described later.

In FIG. 4 , the first internal adsorption tube 151 is illustrated as being disposed above the first external adsorption tube 152 in the first plate 100 , but is not limited thereto, and the first internal adsorption tube 151 . is disposed below the first external adsorption pipe 152 , or the first internal adsorption pipe 151 and the first external adsorption pipe 152 may be disposed on the same plane.

As described above, the second plate 200 , the third plate 300 , and the fourth plate 400 may be disposed on the first plate 100 . The first plate 100 may include a first internal adsorption tube 151 and a first external adsorption tube 152 disposed therein. One end of the first internal adsorption tube 151 may be connected to the other end of the second internal adsorption tube 250 , and the other end may be connected to the internal adsorption motor IV. One end of the first external adsorption tube 152 may be connected to the other end of the second external adsorption tube 250 , and the other end may be connected to the external adsorption motor OV.

The first plate 100 may further include a first flow path pipe 110 and a lower suction pipe 122 disposed therein. One end of the first flow pipe 110 may be connected to the above-described first air room 210 , and the other end may be connected to the air blower unit AB. The air blower unit AB may provide air toward the first flow pipe 110 . One end of the lower suction pipe 122 may be connected to the lower suction unit 120 to be described later, and the other end may be connected to the lower suction unit BS.

The lower suction flow path BSL provides negative pressure to the lower suction unit 120 disposed on the first plate 100 and the lower suction pipe 122 and the lower suction pipe 122 connected to the lower suction unit 120 . It may include a lower suction unit (BS). The lower suction flow path BSL may be formed using a 5-axis processing machine.

The lower suction part 120 is disposed on the upper surface of the first plate 100 defining the bottom surface of the groove part 130 , and the other side surface and the third plate 200 in the second direction DR2 of the second plate 200 . ) in the second direction DR2 . When the panel substrate PS is cut by the laser beam LB along the cutting line CL, fine particles may be generated in upper and lower portions of the panel substrate PS. Fine particles generated under the panel substrate PS may be mainly sucked through the lower suction unit 120 and discharged to the outside. An operation of discharging the fine particles will be described in detail below with reference to FIGS. 10 and 11 .

The lower suction unit 120 may include a lower suction hole 121 disposed on the lower suction unit 120 and opened to the outside. That is, the upper surface of the first plate 100 defining the bottom surface of the groove 130 may include a lower suction hole 121 . 6 illustrates the lower suction unit 120 in which the two lower suction holes 121 are disposed, the number of the lower suction holes 121 is not limited thereto. The lower suction hole 121 may have a circular shape, but is not limited thereto and may have various shapes such as a triangle or a square.

The lower suction pipe 122 may be disposed inside the first plate 100 . One end of the lower suction pipe 122 may be opened to the outside through the lower suction hole 121 , and the other end may be connected to the lower suction unit BS disposed outside the first plate 100 . That is, the lower suction hole 121 may be connected to the lower suction unit BS through the lower suction pipe 122 .

The lower suction unit BS may provide a negative pressure to the lower suction hole 121 through the lower suction pipe 122 . In an exemplary embodiment, the lower suction pipe 122 may extend from the lower suction hole 121 to the other side in the third direction DR3 and may be bent to one side in the second direction DR2 to extend, but is not limited thereto. .

FIG. 7 is an enlarged view of region Q of FIG. 5 . 8 is a schematic diagram illustrating an internal flow path in embossing according to an embodiment. 9 is a plan view illustrating a second internal flow path according to an exemplary embodiment.

As described above, the internal flow path ABL may include a first internal flow path ABL1 included in the first plate 100 and a second internal flow path ABL2 included in the second plate 100 . The first internal flow path ABL1 may include a first flow path pipe 110 connected to the air blower unit AB. The second internal flow path ABL2 is a first air room 210 spatially connected to the first flow path pipe 110 , a second air room 220 spatially connected to the first air room 210 , and a second It may include flow pipes 230 and 240 . The second flow passage pipes 230 and 240 are inter-room movement flow passage pipes 230 connecting the first air room 210 and the second air room 220 and between the second air room 220 and the discharge port 241 . It may include a discharge flow pipe 240 spatially connected. The internal flow path ABL may be formed using a 5-axis machining machine.

The first flow pipe 110 may be disposed inside the first plate 100 . One end of the first flow pipe 110 may be directly connected to the first air room 210 , and the other end may be connected to the air blower unit AB disposed on one side of the first plate 100 .

In one embodiment, the first flow pipe 110 extends from the air blower unit AB to the other side in the second direction DR2, and is bent from the other end in the second direction DR2 to one side in the first direction DR1. , may be bent from one end in the first direction DR1 to one side in the second direction DR2, and bent to one side in the third direction DR3 from one end in the second direction DR2 to be connected to the first air room 210 However, it is not limited thereto. The width of the first flow pipe 110 may be constant for each region, but is not limited thereto and may be different for each region. An extension direction of the first flow path pipe 110 from the air blower unit AB may be a traveling direction of air provided through the first flow path pipe 110 .

The first air room 210 may have a wider width than the first flow pipe 110 and the second flow pipe 230 , 240 , and may be a space primarily filled with air moved from the first flow pipe 110 . have. An air blower hole 211 may be disposed between the first air room 210 and the first flow pipe 110 . The first air room 210 may have a wider width in the first direction DR1 than the first flow pipe 110 . The width of the first air room 210 may be constant for each area, but is not limited thereto and may have a different width for each area. The first air room 210 may have a rectangular parallelepiped shape having a long side extending in the first direction DR1, but is not limited thereto.

The first air room 210 may be a space in which the width in the first direction DR1 that is connected to the first flow pipe 110 in the internal flow path ABL and is perpendicular to the traveling direction of the internal flow path ABL is increased. have. Specifically, the width may be increased from the air blower hole 211 . An extension direction of a portion of the first flow pipe 110 connected to the first air room 210 may be the third direction DR3 . The first air room 210 may be a space in which the width in the first direction DR1 is increased. Accordingly, the air entering the first air room 210 from the first flow pipe 110 may be diffused to one side and the other side in the first direction DR1 .

The inter-room movement flow pipe 230 may extend from the first air room 210 toward the second air room 220 . The inter-room movement flow pipe 230 may spatially connect the first air room 210 and the second air room 220 . The inter-room movement flow path pipe 230 may have a width in the first direction DR1 smaller than that of the first air room 210 and the second air room 220 . The width of the inter-room movement flow path pipe 230 in the first direction DR1 may be constant for each region, but is not limited thereto and may have a different width for each region. One side of the inter-room movement flow path 230 in the second direction DR2 may be connected to the first air room 210 , and the other side of the second direction DR2 may be connected to the second air room 220 . The extending direction of the inter-room movement flow path pipe 230 may be perpendicular to the extending direction of the first flow path pipe 110 , and may be perpendicular to the extending direction of the discharge flow path pipe 240 . In addition, the inter-room movement flow path pipe 230 may not overlap with the first flow path pipe 110 in the extending direction of the first flow path pipe.

There may be a plurality of inter-room movement passage pipes 230 . The plurality of inter-room movement flow pipes 230 may be arranged along the first direction DR1 . The flow passage pipes 230 between each room may be arranged to be spaced apart from each other in parallel. 8 and 9 illustrate that three inter-room movement flow passage pipes 230 connecting the first air room 210 and the second air room 220 are arranged in the first direction DR1, but the inter-room movement flow passage The number and arrangement of the tubes 230 are not limited thereto. In an exemplary embodiment, the inter-room movement flow path pipe 230 is one in the central portion of each of the first air room 210 and the second air room 220 , and one in the first direction DR1 on one side and the other side, respectively. can be placed one by one. The width of each of the plurality of inter-room movement passage pipes 230 may be constant, but is not limited thereto and may have different widths. The width of each of the inter-room movement flow pipe 230 may be smaller than the width of the first flow pipe 110 , but is not limited thereto and may have the same width or a larger width.

The second air room 220 may have a wider width than the inter-room movement flow passage pipe 230 , and may be a space in which air moved from the inter-room movement flow passage pipe 230 is filled. The second air room 220 may have a wider width in the first direction DR1 than the inter-room movement flow path pipe 230 . The second air room 220 may have a cylindrical shape extending in the first direction DR1, but is not limited thereto. One end and the other end of the second air room 220 in the first direction DR1 may each have a hemispherical shape.

The second air room 220 may be a space in which the width in the first direction DR1 that is connected to the inter-room movement flow pipe 230 in the internal flow path ABL and is perpendicular to the moving direction of the internal flow path ABL is widened. have. Specifically, the extending direction of the portion connected to the second air room 220 in the inter-room movement flow path pipe 230 may be the second direction DR2. The second air room 220 may be a space in which the width in the first direction DR1 from the internal flow path ABL is increased. Accordingly, air entering the second air room 220 from the inter-room movement flow path pipe 230 may be diffused in one direction and the other direction in the first direction DR1 .

A plurality of discharge flow passage pipes 240 arranged in the first direction DR1 may be disposed on one side of the second air room 220 in the third direction DR3 . Each of the plurality of discharge passage pipes 240 may spatially connect between the second air room 220 and the discharge port 241 opened to the outside. The discharge flow pipe 240 may extend in the third direction DR3, but is not limited thereto. Each discharge flow pipe 240 may have a cylindrical shape, but is not limited thereto and may have various three-dimensional shapes such as a triangular pole or a square pole.

Looking at the flow of air in the internal flow path ABL, the air traveling from the air blower unit AB may move along the first flow path pipe 110 .

The air moving along the first flow pipe 110 may enter the first air room 210 through the air blower hole 211 . The air entering the first air room 210 may spread to one side and the other side in the first direction DR1 to fill the first air room 210 . The flow velocity (or pressure) of the air may be smaller in the first air room 210 than in the first flow pipe 110 . When the amount of moving air is constant, the flow velocity (or pressure) of the air decreases as the cross-sectional area perpendicular to the direction of air travel increases, and may increase as the cross-sectional area decreases.

The air filling the first air room 210 may enter the inter-room movement flow path pipe 230 . The flow velocity (or pressure) of air in the inter-room movement flow path pipe 230 may be greater than that in the first air room 210 , and may be larger than in the first flow path pipe 110 , but is not limited thereto. The air passing through the inter-room movement flow path pipe 230 may enter the second air room 220 .

The air entering the second air room 220 may spread to one side and the other side in the first direction DR1 and fill the second air room 220 . The flow velocity (or pressure) of the air may be smaller in the second air room 220 than in the inter-room movement flow pipe 230 . The flow velocity (or pressure) in the second air room 220 may be substantially the same as the flow velocity (or pressure) in the first air room 210 , but is not limited thereto. It may have a value different from the flow rate (or pressure).

The air filling the second air room 220 may be sprayed to the outside through the plurality of discharge flow passage pipes 240 and the discharge ports 241 formed on one side of the second air room 220 in the third direction DR3 .

In an embodiment, the discharge flow pipe 240 may extend toward one side in the third direction DR3 . In this case, the air injected through the discharge flow path pipe 240 and the discharge port 241 may be injected in one side of the third direction DR3 . The flow velocity (or pressure) of the air injected to the outside through the discharge passage pipe 240 and the discharge port 241 may be greater than the flow velocity (or pressure) of the air in the second air room 220 . As will be described later, the fine particles are more easily sucked into the lower suction hole 121 of the lower suction unit 120 by the strong air stream sprayed through the discharge flow path pipe 240 and the discharge port 241 to be removed. . It may be removed by being sucked into the lower suction unit 120 . The flow of air after being sprayed through the discharge passage pipe 240 and the discharge port 241 will be described in detail with reference to FIGS. 10 and 11 .

10 and 11 are schematic views illustrating a process in which fine particles are removed.

10 and 11 , the laser beam LB emitted from the laser module 10 may be irradiated to the cutting line CL on the panel substrate PS through the optical system 20 . The panel substrate PS irradiated with the laser beam LB may be cut while generating fine particles P. Here, the fine particles P may refer to particles of a size that can be observed with the naked eye, but are not limited thereto, and may refer to fume generated as the laser beam LB is irradiated to the panel substrate PS. .

As the laser beam LB is irradiated from the upper portion of the panel substrate PS, fine particles P may be mainly generated on the upper portion of the panel substrate PS at the beginning of the cutting process. The fine particles P generated in the upper part may be mainly removed by the upper suction unit 30 . Specifically, the fine particles (P) are sucked through the upper suction unit 31 disposed under the upper suction unit 30 and discharged to the outside through the upper suction pipe 32 connected to the upper suction unit 30. can The negative pressure of the upper suction unit 30 for sucking the fine particles P may be provided by a vacuum motor (not shown) connected to the upper suction tube 32 .

As the laser beam LB penetrates in the thickness direction of the panel substrate PS as the cutting process proceeds, fine particles P may be generated not only in the upper portion of the panel substrate PS but also in the lower portion of the panel substrate PS. Even in this case, the fine particles P generated on the upper portion of the panel substrate PS may be mainly removed by the upper suction unit 30 . However, the fine particles P generated under the panel substrate PS may be mainly removed by the internal flow path ABL and the lower suction flow path BSL.

As described above with reference to FIGS. 7 to 9 , the internal flow path ABL includes a first internal flow path ABL1 included in the first plate 100 and a second internal flow path included in the second plate 100 ( ABL2). The first internal flow path ABL1 may include a first flow path pipe 110 connected to the air blower unit AB. The second internal flow path ABL2 is a first air room 210 spatially connected to the first flow pipe 110 , a second air room 220 spatially connected to the first air room 210 , and a second It may include flow pipes 230 and 240 . The second flow passage pipes 230 and 240 are inter-room movement flow passage pipes 230 connecting the first air room 210 and the second air room 220 and between the second air room 220 and the discharge port 241 . It may include a discharge flow pipe 240 spatially connected.

In addition, as described above with reference to FIG. 5,

The lower suction flow path BSL provides negative pressure to the lower suction unit 120 disposed on the first plate 100 and the lower suction pipe 122 and the lower suction pipe 122 connected to the lower suction unit 120 . It may include a lower suction unit (BS).

The fine particles P generated under the panel substrate PS may be located in the groove 130 . The fine particles P located in the groove 130 may be discharged to the outside by air provided by the internal flow path ABL and negative pressure provided by the lower suction flow path BSL. Hereinafter, a process of removing the fine particles P generated under the panel substrate PS will be described in terms of air flow.

The flow of air before being sprayed through the discharge flow path pipe 240 and the discharge port 241 has been described above with reference to FIGS. 7 to 9 . After that, the air injected through the discharge flow path pipe 240 may be injected toward the lower surface 261 of the curved first protrusion 260 . That is, the air injected through the discharge channel 240 may not be directly injected toward the panel substrate PS. As described above, as the lower surface 261 of the first protrusion 260 has a curved shape, air may move along the curved surface due to the Coanda effect. Air moving along the lower surface 261 of the first protrusion 260 may move to the lower surface of the panel substrate PS. The flow velocity (or pressure) of the air near the lower surface of the panel substrate PS may be smaller than the flow velocity (or pressure) when the air is injected through the discharge passage pipe 240 . The air that has moved to the lower surface of the panel substrate PS may move toward the lower suction unit 120 together with the fine particles P generated on the lower surface of the panel substrate PS. Air and fine particles P may move toward the lower suction unit 120 due to the negative pressure provided by the lower suction unit BS.

Some of the fine particles P moving toward the lower suction unit 120 may be sucked into the lower suction hole 121 of the lower suction unit 120 . The fine particles P sucked into the lower suction hole 121 may be discharged to the outside through the lower suction pipe 122 . Another portion of the fine particles P that are not sucked into the lower suction hole 121 of the lower suction unit 120 may rise toward the panel substrate PS. At this time, the airflow of the air sprayed from the discharge flow pipe 240 and moving along the lower surface 261 of the first protrusion 260 may act as an air curtain to block the fine particles P from rising. Accordingly, it is possible to facilitate the removal of the fine particles (P) by allowing the fine particles (P) to descend again toward the lower suction unit (120).

When the air injected from the discharge passage pipe 240 is directly injected toward the panel substrate PS, the panel substrate PS vibrates due to the high flow velocity (or pressure) of the air injected from the discharge passage tube 240 . This can happen. The apparatus 1 for manufacturing a display device according to an exemplary embodiment indirectly injects air to pass through the lower surface 261 of the first protrusion 260 having a curved shape, so that the flow velocity (or the flow rate of air) due to the Coanda effect , pressure) can be reduced. Accordingly, vibration of the panel substrate PS may be minimized.

In addition, the apparatus 1 for manufacturing a display device according to an exemplary embodiment includes a first air room 210 and a first air room 210 that are wider than the first flow pipe 110 in the internal flow path ABL. By disposing a plurality of inter-room movement flow passage pipes 230 connecting the second air rooms 220 , the flow velocity (or pressure) of air injected from each discharge flow passage tube 240 may be adjusted. Specifically, the air entering the first air room 210 is discharged after being diffused throughout the first air room 210 , so that the amount of air discharged for each moving passage pipe 230 between the rooms can be adjusted. In addition, the amount of air entering the second air room 220 from the first air room 210 can be adjusted for each area by disposing a plurality of inter-room movement flow passage pipes 230 . For example, the flow rate (or pressure) of the air injected from each discharge flow pipe 240 may be uniformly adjusted.

Hereinafter, another embodiment of an apparatus for manufacturing a display device will be described. In the following embodiments, descriptions of the same components as those of the previously described embodiments will be omitted or simplified, and differences will be mainly described.

12 is a plan view illustrating a second internal flow path according to another exemplary embodiment.

Referring to FIG. 12 , in an apparatus 1_1 for manufacturing a display device according to the present exemplary embodiment, an inter-room movement passage pipe 230_1 includes a first inter-room movement passage tube 231_1 and a second inter-room movement passage tube 232_1, and , the first inter-room movement passage pipe 231_1 and the second inter-room movement passage tube 232_1 have different widths from each other, which is different from the apparatus 1 for manufacturing a display device according to an exemplary embodiment. That is, the inner diameter of the moving passage pipe 230_1 between rooms arranged in one direction may increase from the center to the outside in the arrangement.

The apparatus 1_1 for manufacturing a display device according to the present exemplary embodiment indirectly injects air to pass through the lower surface 261_1 of the first protrusion 260_1 having a curved shape, so that the flow rate (or the flow rate of air) due to the Coanda effect , pressure) can be reduced. Accordingly, the vibration of the panel substrate PS_1 may be minimized.

In addition, the apparatus 1_1 for manufacturing a display device according to the present exemplary embodiment includes a first air room 210_1 and a first air room 210_1 that are wider than the first flow pipe 110_1 in the internal flow path ABL_1 . The flow rate (or pressure) of the air injected from each of the discharge flow passage pipes 240_1 through the plurality of inter-room movement flow passage pipes 230_1 connecting the second air rooms 220_1 may be adjusted.

13 is a plan view illustrating a second internal flow path according to another exemplary embodiment.

Referring to FIG. 13 , the display device manufacturing apparatus 1_2 according to the present exemplary embodiment is different in that it includes a greater number of inter-room movement flow passage pipes 230_2 than the display device manufacturing apparatus 1 according to the exemplary embodiment. there is The apparatus 1_2 for manufacturing a display device according to the present exemplary embodiment may include five inter-room movement passage pipes 230_2 , but is not limited thereto, and may include more than one inter-room movement passage tube 230_2 .

The apparatus 1_2 for manufacturing a display device according to the present exemplary embodiment indirectly injects air to pass through the lower surface 261_2 of the first protrusion 260_2 having a curved shape, so that the flow rate (or the flow rate of air) due to the Coanda effect. , pressure) can be reduced. Accordingly, vibration of the panel substrate PS_2 may be minimized.

In addition, the apparatus 1_2 for manufacturing a display device according to the present exemplary embodiment includes a first air room 210_2 and a first air room 210_2 that are wider than the first flow pipe 110_2 in the internal flow path ABL_2 . The flow rate (or pressure) of the air injected from each discharge flow passage pipe 240_2 may be adjusted through the plurality of inter-room movement flow passage pipes 230_2 connecting the second air rooms 220_2 .

14 is a plan view illustrating a second internal flow path according to another exemplary embodiment.

Referring to FIG. 14 , in the display device manufacturing apparatus 1_3 according to the present exemplary embodiment, the plurality of inter-room movement passage pipes 230_3 are non-overlapping the air blower hole 211_3 in the second direction DR2. It is different from the apparatus 1_3 for manufacturing a display device according to an exemplary embodiment.

The apparatus 1_3 for manufacturing a display device according to the present exemplary embodiment indirectly injects air to pass through the lower surface 261_3 of the curved first protrusion 260_3, so that the flow velocity (or the flow rate of air) due to the Coanda effect , pressure) can be reduced. Accordingly, vibration of the panel substrate PS_3 may be minimized.

In addition, the display device manufacturing apparatus 1_3 according to the present exemplary embodiment includes a first air room 210_3 and a first air room 210_3 having a width wider than that of the first flow pipe 110_3 in the internal flow path ABL_3 , and The flow rate (or pressure) of the air injected from each of the discharge flow passage pipes 240_3 through the plurality of inter-room movement flow passage pipes 230_3 connecting the second air rooms 220_3 may be adjusted.

15 is a plan view illustrating a second internal flow path according to another exemplary embodiment.

Referring to FIG. 15 , in the apparatus 1_4 for manufacturing a display device according to the present exemplary embodiment, a plurality of air blower holes 211_4 are provided, and a plurality of inter-room movement passage pipes 230_4 are connected to the air blower hole 211_4 in the second direction. It is different from the manufacturing apparatus 1 of a display device according to an exemplary embodiment in that it is arranged non-overlapping at DR2 .

The apparatus 1_4 for manufacturing a display device according to the present exemplary embodiment indirectly injects air to pass through the lower surface 261_4 of the curved first protrusion 260_4, so that the flow velocity (or the flow rate of air) due to the Coanda effect , pressure) can be reduced. Accordingly, vibration of the panel substrate PS_4 may be minimized.

In addition, the display device manufacturing apparatus 1_4 according to the present exemplary embodiment includes a first air room 210_4 and a first air room 210_4 that are wider than the first flow pipe 110_4 in the internal flow path ABL_4 and The flow rate (or pressure) of the air injected from each of the discharge flow passage pipes 240_4 through the plurality of inter-room movement flow passage pipes 230_4 connecting the second air rooms 220_4 may be adjusted.

16 is a plan view illustrating a second internal flow path according to another exemplary embodiment.

Referring to FIG. 16 , the apparatus 1_5 for manufacturing a display device according to the present exemplary embodiment may further include a through hole HIAA disposed inside the second plate 200_5 . The first plate 100_5 may be exposed in the inner region of the through hole HIAA. The through hole HIAA may prevent damage to the second plate 200_5 by the laser beam LB when the panel substrate PS is cut along the cutting line CL_HIAA.

The display device manufacturing apparatus 1_5 according to the present exemplary embodiment includes a second air room 220a_5 and a first outlet for removing fine particles P generated by a cutting process occurring on one side of a second plate 200_5 . In addition to the 241a_5, the third air room 220b_5 and the second discharge port 241b_5 for removing the fine particles P generated by the cutting process occurring at the through hole HIAA side are further provided. There is a difference from the manufacturing apparatus 1 of the display device according to the embodiment. The third air room 220b_5 and the second outlet 241b_5 may be disposed around the through hole HIAA. The second air room 220a_5 is disposed on the other side in the second direction DR2 from the first air room 210_5 , and the third air room 220b_5 is on the other side in the second direction DR2 from the first air room 210_5 . can be placed in That is, the first air room 210_5 may be disposed between the second air room 220a_5 and the third air room 220b_5, but is not limited thereto. The display device manufacturing apparatus 1_5 according to the present exemplary embodiment includes a first inter-room movement passage pipe 230a_5 and a first air room 210_5 connecting a first air room 210_5 and a second air room 220a_5, and It may include a second inter-room movement flow passage pipe (230b_5) connecting the third air room (220b_5). A configuration corresponding to the first protrusion 260 and the second protrusion 270 of the apparatus 1 for manufacturing a display device according to an exemplary embodiment also in an area where the third air room 220b_5 and the second outlet 241b_5 are disposed. This can be placed

The apparatus 1_5 for manufacturing a display device according to the present exemplary embodiment indirectly injects air to pass through the lower surface 261_5 of the first protrusion 260_5 having a curved shape, so that the flow velocity (or the flow rate of air) due to the Coanda effect , pressure) can be reduced. Accordingly, vibration of the panel substrate PS_5 may be minimized.

In addition, the apparatus 1_5 for manufacturing a display device according to the present exemplary embodiment includes a first air room 210_5 and a first air room 210_5 that are wider than the first flow pipe 110_5 in the internal flow path ABL_5 . The flow rate (or pressure) of the air injected from each of the discharge flow passage pipes 240_5 may be adjusted through the plurality of inter-room movement flow passage pipes 230a_5 and 130b_5 connecting the second air room 220_5 .

In the above, the present invention has been described focusing on the embodiments of the present invention, but these are merely examples and do not limit the present invention. It will be appreciated that various modifications and applications not exemplified above are possible within a range that is not. For example, each component specifically shown in the embodiment of the present invention may be implemented by modification. And differences related to such modifications and applications should be construed as being included in the scope of the present invention defined in the appended claims.

1: Device for manufacturing a display device
DD: display device
DP: display panel
100: first plate
200: second plate
210: first air room
220: second air room
230: flow path between rooms
300: third plate
400: fourth plate

Claims (20)

a first plate including a first internal flow path disposed therein; and
a second plate disposed on the first plate,
a plurality of discharge ports opened to the outside; and
A second plate disposed therein and including a second internal flow path for spatially connecting each of the discharge ports to the first internal flow path,
The first internal flow path includes a first flow path pipe,
The second internal flow path includes a second flow path pipe, and a first air room and a second air room having inner widths greater than that of the first flow path pipe and the second flow path pipe,
The first air room is spatially connected to the first flow pipe,
The second flow path includes an inter-room movement flow pipe that spatially connects between the first air room and the second air room, and a discharge flow pipe that spatially connects between the second air room and each of the discharge ports. A device for manufacturing a display device. According to claim 1,
The second plate includes a body portion and a protrusion portion having a width smaller than that of the body portion and extending outside the body portion. 3. The method of claim 2,
The protrusion includes a first protrusion and a second protrusion, a lower surface of the first protrusion includes a curved surface, and a curved space is defined between a lower surface of the first protrusion and an upper surface of the second protrusion Device. 4. The method of claim 3,
The discharge flow pipe is disposed in the second protrusion and is spatially connected to the curved space. 5. The method of claim 4,
The discharge port is covered by the first protrusion in a plan view. 5. The method of claim 4,
A top surface of the first protrusion is flat, and a thickness of the first protrusion decreases toward the outside. 5. The method of claim 4,
The second air room is disposed in the second protrusion. 8. The method of claim 7,
The first air room is disposed in the body part. According to claim 1,
The first air room and the second air room each extend in a first direction, and the inter-room movement flow path pipe extends in a second direction intersecting the first direction. 10. The method of claim 9,
The discharge channel pipe extends in a third direction perpendicular to a plane defined by the first direction and the second direction. 10. The method of claim 9,
A plurality of inter-room movement passage pipes are provided, and the inter-room movement flow passage tubes are arranged to be spaced apart from each other in parallel. 12. The method of claim 11,
The inner diameter of the moving flow pipe between the rooms increases from the center toward the outside. According to claim 1,
and a laser module disposed above the second plate for emitting a laser beam and an optical system for controlling an optical path of the laser beam. According to claim 1,
Further comprising a third plate spaced apart from the second plate and disposed to surround the second plate,
In the space between the second plate and the third plate, the outer surface of the second plate as one side wall, the inner surface of the third plate as the other side wall, and the upper surface of the first plate as a bottom surface An apparatus for manufacturing a display device in which a groove is defined. 15. The method of claim 14,
An upper surface of the first plate of the groove portion includes a suction hole, wherein the suction hole is connected to a lower suction unit that provides a negative pressure through a lower suction pipe disposed inside the first plate. According to claim 1,
The second plate is a plate on which a target substrate is mounted. 17. The method of claim 16,
and the second plate further includes a plurality of suction holes for fixing the target substrate. a first plate; and
A second plate disposed on the first plate and including a through-hole having a closed curve shape,
The first plate includes a first internal flow path including a first flow path pipe,
The second plate includes a plurality of outlets disposed around the through hole, and a second inner channel for spatially connecting each outlet with the first inner channel,
The second internal flow path includes a second flow path pipe, and a first air room and a second air room having inner widths greater than that of the first flow path pipe and the second flow path pipe,
The first air room is spatially connected to the first flow pipe,
The second flow path includes an inter-room movement flow pipe that spatially connects between the first air room and the second air room, and a discharge flow pipe that spatially connects between the second air room and each of the discharge ports. A device for manufacturing a display device. 19. The method of claim 18,
The second plate includes a body portion and a protrusion portion having a width smaller than that of the body portion and extending outside the body portion. 20. The method of claim 19,
The protrusion includes a first protrusion and a second protrusion, a lower surface of the first protrusion includes a curved surface, and a curved space is defined between a lower surface of the first protrusion and an upper surface of the second protrusion Device.

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