KR20210115570A - Light emitting unit and exposure system having the same - Google Patents

Abstract

The present invention relates to a light-emitting unit reflecting the light generated by a light-emitting portion through a reflecting portion and an exposure system comprising the same, and specifically, to the light-emitting unit capable of achieving miniaturization of the light-emitting unit and the exposure system while obtaining a sufficient amount of light, and the exposure system comprising the same.

Description

A light emitting unit and an exposure machine system having the same

The present invention relates to a light emitting unit that reflects light generated from a light emitting unit through a reflecting unit, and an exposure machine system having the same.

The light emitting unit is configured to include a light emitting unit provided with a plurality of light emitting bodies and a reflecting unit for reflecting light generated from the light emitting body.

Such a light emitting unit is used in various industrial fields, and depending on the type of the industrial field in which the light emitting unit is used, the type of the light emitting body of the light emitting unit may vary, or the required amount of light of the light emitting unit may vary.

When the number of light emitting units is increased to increase the amount of light of the light emitting unit, the area of the light emitting unit is increased, and the light emitting unit is enlarged. There is a problem that the lifespan is shortened.

As a patent for the above-described light emitting unit, the one described in Japanese Patent Application Laid-Open No. 2004-335952 (hereinafter referred to as 'Patent Document 1') is known.

The illumination light source device of Patent Document 1 is used in an exposure apparatus for manufacturing a semiconductor element, a liquid crystal substrate, or the like, and uses a light emitting diode (LED) as a light source instead of a conventional mercury lamp light source. These light emitting diodes have high luminous efficiency compared to mercury lamps, etc., and have features such as power saving and low heat generation, so that maintenance costs can be reduced. There is an advantage that there is no risk of rupture due to factors such as deterioration.

However, in the case of Patent Document 1, a plurality of LEDs are two-dimensionally arranged on a plate-shaped member to constitute a light emitting unit, but in order to still obtain a sufficient amount of light, a large number of LEDs must be arranged on a two-dimensional plane. As such, when a large number of LEDs are arranged on a two-dimensional plane, the size of the light emitting unit increases, and there is a problem that the size of the exposure machine system having the same also increases.

Japanese Laid-Open Patent Publication No. 2004-335952

The present invention has been devised to solve the above problems, and an object of the present invention is to provide a light emitting unit capable of obtaining a sufficient amount of light while achieving miniaturization of a light emitting unit and an exposure machine system, and an exposure machine system having the same.

A light emitting unit according to one aspect of the present invention includes a support; a plurality of reflection units each having an interior space having a front opening formed therein, and individually installed on one surface of the support unit; and a plurality of light emitting units respectively installed on one surface of the support so as to be located in the inner space of each of the plurality of reflection units, and provided with a plurality of light emitting bodies for generating light on the outer circumferential surface; A plurality of reflective surfaces for reflecting light corresponding to each of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit are provided in the inner space, and a distance between the plurality of light emitting units and the corresponding plurality of reflective surfaces is the length of the light emitting unit It is characterized in that the distance increases toward the front side in the direction.

In addition, at least one light emitting body among the plurality of light emitting bodies installed in the longitudinal direction of the light emitting part is characterized in that it has a different light profile from the other light emitting body.

In addition, the beam angle of the light profile of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit is characterized in that it is formed narrower toward the front side of the light emitting unit.

In addition, at least one of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit has a different optical axis direction from the other light emitting units.

In addition, the optical axis direction of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit is characterized in that it is formed to be inclined backward toward the front side of the light emitting unit.

In addition, the plurality of light emitting units installed in the longitudinal direction of the light emitting unit is characterized in that it is arranged to be spaced apart from each other.

In addition, the separation distance between the plurality of light emitting units installed in the longitudinal direction of the light emitting unit is characterized in that it becomes shorter toward the front side of the light emitting unit.

In addition, the number of the plurality of light emitting units installed in the circumferential direction of the light emitting unit is characterized in that it is provided toward the front side of the light emitting unit.

In addition, each of the plurality of reflective surfaces is characterized in that it is formed on a portion of each of the plurality of inner surfaces of the reflective portion.

In addition, the plurality of reflective surfaces may be formed on a portion of each of the plurality of inner surfaces based on a longitudinal direction of the light emitting part.

In addition, the plurality of reflective surfaces may be formed on a portion of each of the plurality of inner surfaces based on a circumferential direction of the light emitting part.

An exposure machine system according to one aspect of the present invention includes a light emitting unit generating light; an aperture for removing unnecessary light from among the light; a light homogenizer for making the light homogeneous; at least one mirror that converts the light passing through the light homogenizer into parallel light; a mask stage supporting a mask through which the parallel light passes; and an irradiation target stage supporting an irradiation subject to which the light passing through the mask is irradiated, wherein the light emitting unit has a support portion and an inner space having a front opening formed therein, respectively, on one surface of the support portion A plurality of individually installed reflective units and a plurality of light emitting units each of which are individually installed on one surface of the support so as to be located in the inner space of each of the plurality of reflective units, a plurality of light emitting units generating light on an outer circumferential surface including; and, in the inner space of the reflection unit, a plurality of reflective surfaces for reflecting light corresponding to each of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit are provided, and the plurality of light emitting units and the plurality of halves corresponding thereto are provided. The distance between the slopes is characterized in that the distance increases toward the front side in the longitudinal direction of the light emitting part.

According to the light emitting unit of the present invention and the exposure machine system having the same as described above, there are the following effects.

A plurality of light emitting bodies are provided on the outer circumferential surface of the light emitting part, and the outer circumferential surface of the light emitting part on which at least one light emitting body is installed is not parallel to one surface of the support part, so that the light emitting body is located on a three-dimensional plane rather than a two-dimensional plane with the support part. Through this, it is possible to provide a greater number of light emitting bodies with a minimum area. Therefore, it is possible to generate a required amount of light even with a size smaller than that of a conventional light emitting unit. In other words, the light emitting unit of the present invention provides an effect of downsizing in vertical and horizontal directions while obtaining a sufficient amount of light by arranging a plurality of light emitting bodies in three dimensions.

By arranging a plurality of light emitting bodies three-dimensionally on the outer circumferential surface of the light emitting unit and reflecting the light generated from the plurality of light emitting bodies on the reflective surface of the reflecting unit, a sufficient amount of light can be obtained while miniaturization of the light emitting unit and the exposure machine system having the same is achieved. can do.

By increasing the distance between the plurality of light emitting bodies and the corresponding plurality of reflective surfaces toward the front side in the longitudinal direction of the light emitting unit, even if the number of light emitting units arranged in the longitudinal direction of the light emitting unit is increased, sufficient light quantity in the forward direction of the light emitting unit is easy can be investigated thoroughly.

By adjusting the optical axis direction and the optical axis angle of the plurality of light emitting units, even if the directivity angle of the light profile is the same, all the light emitted from the light emitting unit can be reflected by reaching the reflective surface in the forward direction, and through this, the light quantity efficiency of the light emitting unit can be easily increased.

By making the density of the light emitting body installed at the front end of the light emitting unit larger than that of the rear side of the light emitting unit, the problem of uniformity and insufficient amount of light generated by the light emitting unit can be solved.

It is possible to reinforce the amount of light that cannot be reflected on the front reflective surface and efficiently circulate the heat generated from the luminous body by using the relatively wider front inner space than the rear.

By processing only a portion of the first to third inner surfaces in the longitudinal direction or the circumferential direction of the light emitting part to form a reflective surface, it is possible to reduce the cost of processing the entire inner surface into a curved surface.

1 is a perspective view of a light emitting unit according to an embodiment of the present invention.
2 is a front view of a light emitting unit according to an embodiment of the present invention.
3 is a cross-sectional view illustrating a coupling relationship of a light emitting unit according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view illustrating an exploded light emitting part and a reflective part from the support part of FIG. 1 .
5 is an exploded perspective view of the reflector of FIG. 1 ;
6A is a cross-sectional view of a reflector according to another embodiment of the present invention;
6B is a plan view of a reflector according to another embodiment of the present invention;
7A is a perspective view of a light emitting unit of a light emitting unit according to an embodiment of the present invention.
Figure 7 (b) is a rear view of the light emitting unit of Figure 7 (a) viewed from the rear to the front side.
7( c ) is a view showing a structure in which the first support fixing part of the support part of the light emitting unit is formed in a hole shape according to an embodiment of the present invention.
FIG. 7(d) is a cross-sectional view illustrating a light emitting part coupled to the first supporting part fixing part of FIG. 7(c);
Figure 8 (a) is a front view of the support portion of the light emitting unit according to an embodiment of the present invention.
Figure 8 (b) is a rear view of the support portion of the light emitting unit according to an embodiment of the present invention.
FIG. 9(a) is a diagram illustrating a light profile between a plurality of light emitting bodies installed on one mounting surface; FIG.
FIG. 9(b) is a view showing optical axes of a plurality of light emitting bodies installed on one mounting surface; FIG.
FIG. 9(c) is a diagram illustrating a distance between a plurality of light emitting bodies installed on one mounting surface; FIG.
FIG. 9(d) is a view showing the number of mountings between a plurality of light emitting bodies installed on one mounting surface; FIG.
10 is a view showing an exposure machine system having a light emitting unit according to an embodiment of the present invention.

Specific structural or functional descriptions of the embodiments according to the concept of the present invention disclosed in this specification are only exemplified for the purpose of explaining the embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention are It may be implemented in various forms and is not limited to the embodiments described herein.

Since the embodiments according to the concept of the present invention may have various changes and may have various forms, the embodiments will be illustrated in the drawings and described in detail herein. However, this is not intended to limit the embodiments according to the concept of the present invention to specific disclosed forms, and includes all modifications, equivalents, or substitutes included in the spirit and scope of the present invention.

Terms such as first or second may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another, for example without departing from the scope of the inventive concept, a first component may be termed a second component and similarly a second component A component may also be referred to as a first component.

When a component is referred to as being “connected” or “connected” to another component, it may be directly connected or connected to the other component, but it is understood that other components may exist in between. it should be On the other hand, when it is said that a certain element is "directly connected" or "directly connected" to another element, it should be understood that the other element does not exist in the middle. Other expressions describing the relationship between components, such as "between" and "immediately between" or "neighboring to" and "directly adjacent to", etc., should be interpreted similarly.

The technical terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present specification, terms such as "comprise" or "have" are intended to designate that a feature, number, step, operation, component, part, or combination thereof described herein exists, but one or more other features It is to be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Hereinafter, a light emitting unit of the present invention will be described with reference to FIGS. 1 to 9 .

Figure 1 is a perspective view of a light emitting unit according to an embodiment of the present invention, Figure 2 is a front view of the light emitting unit according to an embodiment of the present invention, Figure 3 is a combination of the light emitting unit according to an embodiment of the present invention It is a cross-sectional view showing the relationship, FIG. 4 is a cross-sectional view showing the disassembled light emitting part and the reflecting part in the support of FIG. 1, FIG. 5 is an exploded perspective view of the reflecting part of FIG. 1, and FIG. 6A is another embodiment of the present invention 6b is a plan view of the reflection unit according to another embodiment of the present invention, FIG. 7 (a) is a perspective view of the light emitting unit of the light emitting unit according to an embodiment of the present invention, 7 (a) is a rear view of the light emitting part viewed from the rear to the front side, Figure 7 (c) is a view showing the structure of the first support fixing part of the support part of the light emitting unit according to an embodiment of the present invention is formed in the shape of a hole and FIG. 7(d) is a cross-sectional view illustrating that the light emitting part is coupled to the fixing part of the first support part of FIG. 7(c), and FIG. Figure 8 (b) is a rear view of the support of the light emitting unit according to an embodiment of the present invention, Figure 9 (a) is a view showing a light profile between a plurality of light emitting bodies installed on one mounting surface 9 (b) is a view showing the optical axis of the plurality of light emitting elements installed on one mounting surface, Figure 9 (c) is a diagram showing the distance between the plurality of light emitting elements installed on one mounting surface and FIG. 9( d ) is a diagram illustrating the number of mountings between a plurality of light emitting bodies installed on one mounting surface.

1 , the x direction in which light is emitted by the light emitting unit 10 according to an embodiment of the present invention is the front of the light emitting unit 10 , the y direction is the upper direction of the light emitting unit 10 , and the z direction is defined in the right direction of the light emitting unit 10 .

1 to 5, the light emitting unit 10 according to an embodiment of the present invention may be configured to include a support part 100, a light emitting part 300 and a reflective part 500, In detail, the support part 100 and the inner space 520 in which the front opening 520a is formed are provided, respectively, and a plurality of reflective parts 500 that are individually installed on one surface of the support part 100 and , each is individually installed on one surface of the support part 100 so as to be located in the inner space of each of the plurality of reflection parts 500, and a plurality of light emitting bodies 410, 420, 430, 440 for generating light are provided on the outer peripheral surface It may be configured to include a plurality of light emitting units 300 .

The support unit 100 may individually support the configuration of the light emitting unit 300 and the reflection unit 500 . A plurality of light emitting units 300 may be installed on the support unit 100 . A plurality of reflection units 500 may be installed on the support unit 100 .

Referring to FIG. 2 , the plurality of light emitting units 300 and the plurality of reflection units 500 may be individually installed on one support unit 100 . The plurality of light emitting units 300 and the plurality of reflection units 500 may be installed on the support unit 100 to correspond to each other one-to-one. One light emitting part 300 may be installed on the installation surface 101 of the support part 100 so as to be disposed in the inner space 520 of one reflecting part 500 . The plurality of light emitting units 300 and the plurality of reflection units 500 may be installed on the support unit 100 in rows and columns arranged in parallel.

The support part 100 may be formed of a metal material or a plastic material having high strength in order to support the weight of the light emitting part 300 and the reflective part 500 .

The support part 100 may be a tetrahedron including a plurality of surfaces. The support part 100 may include the installation surface 101 on which the light emitting part 300 or the reflective part 500 is installed. The installation surface 101 may be formed in a polygonal shape, such as a circle, an oval, a square, a square, a rectangle, a pentagon, or a hexagon. The installation surface 101 may be formed of a flat surface or a curved surface. When the installation surface 101 is formed of a curved surface, the installation surface 101 may be concavely formed to have a predetermined curvature.

The overall shape of the support part 100 may be a plate-shaped member including the installation surface 101 . In addition, the overall shape of the support part 100 may be a rectangular parallelepiped shape including the installation surface 101 .

The support unit 100 may define its front surface as the installation surface 101 , and may include a rear surface 102 and a side (not shown) connecting the front surface and the rear surface 102 .

Alternatively, a plurality of surfaces other than the installation surface 101 of the support part 100 may be formed in a curved surface, and in the case of a curved surface, the support part 100 may be formed concavely or convexly to the rear of the support part 100 .

The support part 100 is provided in the support part 100 and is provided in the first support part fixing part 110 and the support part 100 into which the first connection part 340 of the light emitting part 300 is inserted, the second of the reflection part 500 . The second connection part 510a may be configured to include a fixing part 120 of the second support part into which the connection part 510a is inserted.

In detail, the support part 100 may include a first support part fixing part 110 to fix the light emitting part 300 to the installation surface 101 . The first supporting part fixing part 110 may be configured in plurality with the number corresponding to the plurality of light emitting parts 300 installed on the installation surface 101 .

The support part 100 may include a second support part fixing part 120 to fix the reflective part 500 to the installation surface 101 . The second supporting part fixing part 120 may be configured in plurality with the number corresponding to the plurality of reflective parts 500 installed on the installation surface 101 .

The first supporting part fixing part 110 of the light emitting unit 10 according to an embodiment of the present invention may have a groove or hole shape into which the first connecting part 340 of the light emitting part 300 can be inserted.

The first support fixing part 110 may include a screw thread on an inner circumferential surface so that the screw thread formed on the outer circumferential surface of the first connection part 340 of the light emitting part 300 can be detachably coupled thereto.

The light emitting unit 300 may be coupled to the first supporting unit fixing unit 110 by screwing.

The second support part fixing part 120 may have a groove or hole shape into which the second connection part 510a of the reflective part 500 can be inserted.

The second support part fixing part 120 may include a thread on the inner circumferential surface so that the thread formed on the second connection part 510a of the reflective part 500 can be detachably coupled thereto.

The second support fixing part 120 may have a circular groove or circular hole shape concentric with the first support fixing part 110 to be disposed around the first support fixing part 110 . In this case, the second supporting part fixing part 120 has a larger diameter than the first supporting part fixing part 110 .

As in the structure described above, in the light emitting unit 10 of the present invention, the plurality of reflection units 500 and the plurality of light emitting units 300 are individually installed on one surface of the support unit 100, respectively, so that the plurality of reflection units 500 ) and the plurality of light emitting units 300 may not contact each other.

The support part 100 may constitute a body of the support part itself as a cooling member. In this case, the support 100 may include a support body 100a made of a material having high thermal conductivity, and a support cooling pipe 100b through which the heat exchanger fluid passes through the support body 100a. The support body 100a may be made of a metal material, and may be made of copper or aluminum having high thermal conductivity. Accordingly, the support part 100 may receive heat from the light emitting part 300 and the reflective part 500 coupled to the support part 100 to cool the light emitting part 300 and the reflective part 500 .

The light emitting unit 10 of the present invention is provided with a plurality of cooling tubes 220 for flowing a refrigerant therein, and may further include a support cooling unit 200 attached to the rear surface of the support unit 100 . .

1 to 3 , the support cooling part 200 according to an embodiment may be coupled to the rear surface of the support part 100 in order to cool the heat of the support part 100 . In this case, the support cooling part 200 is a separate member from the support part 100 , and may be in surface contact with the rear surface of the support part 100 so as to be coupled to the rear surface of the support part 100 with a maximum surface area. The support cooling unit 200 may include a cooling body unit 210 having a hollow shape, and a plurality of cooling tubes 220 passing through the cooling body unit 210 and flowing a refrigerant therein. Alternatively, the support cooling unit 200 may include a plurality of cooling fins (not shown) and a plurality of cooling tubes 220 passing through the plurality of cooling fins and flowing a refrigerant therein.

Since the support unit 100 is individually coupled to the plurality of light emitting units 300 and the plurality of reflection units 500 , heat generated by the light emitting unit 300 and the reflection unit 500 is transferred as it is. By cooling the heat of the support part 100 using the support part cooling part 200 , it is possible to prevent the support part 100 from being thermally destroyed by receiving excessive heat.

Since the support part cooling part 200 is formed of a material having a higher heat transfer efficiency than the support part 100 , heat from the support part 100 may be efficiently transferred to the support part cooling part 200 . The support cooling unit 200 is preferably made of a metal material having good heat transfer efficiency.

Hereinafter, the reflector 500 of the present invention will be described.

4, 5 and 9 , in the reflector 500 according to an embodiment of the present invention, the reflector body 510 and the light emitting unit 300 are disposed in the reflector body 510 . It may include an inner space 520 formed in the inner space 520 , and an inner surface 530 having a plurality of reflective surfaces 540 reflecting light generated from the light emitting unit 300 .

A plurality of reflective surfaces 540 that reflect light corresponding to each of the plurality of light emitting bodies installed in the longitudinal direction of the light emitting unit 300 may be provided in the inner space 520 of the reflecting unit 500 .

In this case, each distance between the plurality of light emitting bodies and the plurality of reflective surfaces 540 corresponding thereto increases toward the front side in the longitudinal direction of the light emitting unit 300 .

For example, when the plurality of light emitting bodies are formed of first to third light emitting bodies 410a , 410b , and 410c installed in the longitudinal direction of the light emitting unit 300 , the plurality of reflective surfaces 540 may include the first to third light emitting bodies 410a. , 410b, and 410c) may be formed of first to third reflective surfaces 540a, 540b, and 540c that reflect light in correspondence with each other.

In other words, first to third light emitting bodies 410a, 410b, and 410c that are installed in the longitudinal direction of the light emitting unit 300 in the internal space 520 of the reflecting unit 500 reflect light corresponding to each of the first to third light emitting units. Third reflective surfaces 540a, 540b, and 540c may be provided.

The first to third light emitting bodies 410a , 410b , and 410c are a first light emitting body 410a , a second light emitting body 410b and a third light emitting body 410c in the front to rear direction based on the longitudinal direction of the light emitting part 300 . are arranged sequentially.

The first to third reflective surfaces 540a, 540b, and 540c corresponding to the first to third light emitting bodies 410a, 410b, and 410c, respectively, have the first to third reflective surfaces 540a, 540b, and 540c in the longitudinal direction of the light emitting unit 300 in the front to rear direction The reflective surface 540a, the second reflective surface 540b, and the third reflective surface 540c are sequentially disposed.

In this case, the distance between the first to third light-emitting bodies 410a, 410b, and 410c and the first to third reflecting surfaces 540a, 540b, and 540c is 'between the first light-emitting body 410a and the first reflecting surface 540a. A relationship of 'distance between the second light emitting body 410b and the second reflective surface 540b > the third light emitting body 410c and the third reflective surface 540c' is satisfied.

In other words, the distance between any one of the plurality of light emitting bodies and the corresponding reflective surface increases toward the front of the light emitting unit 300 or the front opening 520a of the reflecting unit 500 .

The reflector body 510 may be formed of a metal material having high heat conduction efficiency. However, since the reflector body 510 also needs to reflect light, it may be made of aluminum, which is a metal material having high light reflectance as well as high heat conduction efficiency.

The reflector body part 510 may include a second connection part 510a coupled to the second support part fixing part 120 on the rear surface, and the second connection part 510a according to an example protrudes backward. It may be inserted into and coupled to the second support part fixing part 120 in the shape of a protrusion. Alternatively, although not shown, the second connection part may be fixedly coupled by being inserted by a reflective part fixing screw passing through the second support part fixing part in the shape of a hole or a groove.

The reflector body 510 may include a front opening 520a that is opened forward and a rear opening 520b that is opened rearward. The front opening 520a may have a larger area than the rear opening 520b. The front opening 520a and the rear opening 520b may be formed in a circular shape. The front opening 520a serves as an opening for the light emitted from the reflective unit 500 when the light generated by the light emitting unit 300 is reflected by the plurality of reflective surfaces 540 and emitted to the outside. The rear opening 520b is penetrated by the light emitting unit 300 and serves as an opening through which one end of the light emitting unit 300 can be directly installed on the support unit 100 .

The external shape of the reflector body 510 may have a rectangular parallelepiped shape, but is not limited thereto, and may have a shape such as a cylinder, a triangular pillar, a square pillar, a pentagonal pillar, a hexagonal pillar, or an inverted cone.

The reflector body 510 may be integrally formed as a single body, or may be formed as an assembly of a plurality of reflector pieces 511 , 512 , and 513 as shown in FIG. 5 .

A plurality of reflector pieces 511, 512, 513 includes a first reflector piece 511 having a front opening 520a formed therein, and a second reflector piece 512 coupled to the rear of the first reflector piece 511. , coupled to the rear of the second reflector piece 512 and may include a third reflector piece 513 in which a rear opening 520b is formed.

However, in an embodiment of the present invention, the description of the plurality of reflective unit pieces as three is only an example and is not limited thereto, and the light emitting unit spots of the light emitting unit 300 such as 2, 4, 5, 6 The number of reflective part pieces can be changed according to the number or required amount of light.

The plurality of reflector pieces 511 , 512 , and 513 may be combined with each other to form one reflector body 510 . Each of the reflector pieces 511 , 512 , and 513 may have a shape in which the reflector body 510 is vertically cut to a predetermined length in the front and rear directions.

The inner space 520 may provide a space in which the light emitting unit 300 is mounted. The inner space 520 means a space formed inside the reflector body 510 by the inner surface 530 .

The inner space 520 is communicated to the front and rear by the front opening 520a and the rear opening 520b. The vertical cross-sectional area of the inner space 520 decreases from the front to the rear, so that the path of the reflected light reflected by the reflective surface 540, which will be described later, is not obstructed. The inner surface 530 of the inner space 520 may be inclined toward the light emitting unit 300 toward the rear.

The inner space 520 includes a first inner space 521 formed by the first reflecting unit piece 511, a second inner space 522 formed by the second reflecting unit piece 512, and a third reflecting unit. A third inner space 523 formed by the piece 513 may be included. However, the internal space may be further divided according to the number of reflective part pieces. For example, the inner space may be further divided into a fourth inner space, a fifth inner space, and the like.

The first inner space 521 communicates with the front opening 520a forward and communicates with the front opening of the second inner space 522 rearward. The third inner space 523 communicates with the rear opening 520b in the rear and communicates with the rear opening of the second inner space 522 in the front. The front opening of the second inner space 522 may have a shape corresponding to the rear opening of the first inner space 521 , and the rear opening of the second inner space 522 is the front surface of the third inner space 523 . It may have a shape corresponding to the opening.

The inner surface 530 is a surface formed inside the reflector body 510 and forms an inner space 520 .

The inner surface 530 is a first inner surface 531 that is an inner surface of the first inner space 521 , a second inner surface 532 that is an inner surface of the second inner space 522 , and a third inner space 523 . It may include a third inner surface 533 that is an inner surface. However, the inner surface may be further divided according to the number of reflective part pieces. For example, the inner surface may be further divided into a fourth inner surface, a fifth inner surface, and the like.

The inner surface 530 may have a shape in which the longitudinal direction of the light emitting unit 300 is rotated about the central axis. For example, the inner surface 530 may have a circular shape rotated by 360 degrees about the central axis. Alternatively, the inner surface 530 may have an arc shape rotated by a predetermined angle with respect to the central axis, and may have a shape in which a plurality of arcs are stacked. The inner surface 530 may have a circular cross-section with respect to the vertical direction of the light emitting unit 500 and a shape in which a plurality of arcs are overlapped.

As an example, the inner surface 530 may have a shape made by combining four arcs, and the number of arcs may be determined according to the number of light emitting spots of the light emitting unit 300 .

The inner surface 530 may include a plurality of reflective surfaces 540 reflecting light from the light emitting unit 300 . The plurality of reflective surfaces 540 may be formed on the surface of the inner surface 530 .

4 , the plurality of reflective surfaces 540 of the reflective unit 500 of the light emitting unit 10 according to an embodiment of the present invention may be formed on the entire inner surface 530 .

In other words, since the entire surface of the inner surface 530 is formed as the reflective surface 540 , light may be reflected entirely from the inner surface 530 . In this case, the first reflective surface 540a is entirely formed on the first inner surface 531 , the second reflective surface 540b is entirely formed on the second inner surface 532 , and the third reflective surface ( 540c may be entirely formed on the third inner surface 533 .

As described above, in the reflection unit 500 of the light emitting unit according to another embodiment of the present invention, as shown in FIG. 6A , each of the plurality of reflection surfaces 540 is a portion of each of the plurality of inner surfaces 530 . can be formed in

In detail, the plurality of reflective surfaces 540 may be formed on a portion of each of the plurality of inner surfaces based on the longitudinal direction of the light emitting unit 300 .

In other words, each of the plurality of reflective surfaces 540 may be formed on the inner surface 530 corresponding to a position at which the light emitting unit spot of the light emitting unit 300 is focused with respect to the longitudinal direction of the light emitting unit 300 .

In this case, based on the longitudinal direction of the light emitting part 300 , the first reflective surface 540a may be partially formed on the first inner surface 531 , and the second reflective surface 540b may be formed on the second inner surface. It may be partially formed on the surface 532 , and the third reflective surface 540c may be partially formed on the third inner surface 533 .

Contrary to the above, as shown in FIG. 6B , in the reflection unit 500 of the light emitting unit according to another embodiment of the present invention, the plurality of reflection surfaces 540 emit light with the longitudinal direction of the light emitting unit 300 as a central axis. It may be formed on the inner surface 530 corresponding to a position in which the light-emitting spot of the part 300 is a focal point.

In other words, each of the plurality of reflective surfaces 540 may be formed on the inner surface 530 corresponding to a position in which the light emitting unit spot of the light emitting unit 300 is focused with respect to the circumferential direction of the light emitting unit 300 .

In this case, the first reflective surface 540a may be partially formed on the first inner surface 531 in the circumferential direction with respect to the central axis of the light emitting unit 300 , and the second reflective surface 540b may be The second inner surface 532 may be partially formed, and the third reflective surface 540c may be partially formed on the third inner surface 533 .

In the present invention, by processing only a part of the first to third inner surfaces 531 to 533 in the longitudinal or circumferential direction of the light emitting unit 300 to form the reflective surfaces 540a to 540c, the entire inner surface is curved. The processing cost can be reduced.

The plurality of reflective surfaces 540 may be formed by coating the inner surface 530 with a material having high reflectivity or by polishing the inner surface 530 to increase reflectivity. Alternatively, the plurality of reflective surfaces 540 may be detachably coupled to the reflective body 510 .

Each of the plurality of reflective surfaces 540 may be formed of at least one of an elliptical surface, a parabolic surface, and a free-form surface in the longitudinal direction of the light emitting unit 500 .

In the case of the elliptical reflective surface, when the light emitting spot of the light emitting unit 500 is the first focus of the ellipse, the reflected light reflected on the elliptical reflecting surface is condensed to the second focus of the ellipse.

In the case of the parabolic reflective surface, when the light emitting spot of the light emitting unit 500 is the parabolic focal point, the reflected light reflected on one parabolic reflective surface may form parallel horizontal light.

As for the reflection surface of the free-form surface, depending on the design of the reflection surface, the reflected light reflected from the same free-form surface may obtain inclined light inclined in the longitudinal direction of the light emitting unit 500 .

3 to 5 , the reflective unit 500 is an example in which a plurality of reflective surfaces 540 are formed of a plurality of parabolic reflective surfaces, and the plurality of parabolic reflective surfaces are each light emitting body of the light emitting unit 300 . It has a spot as a focal point, and is an example in which all of the reflected light reflected from the plurality of parabolic reflective surfaces is formed in parallel in the longitudinal direction of the light emitting unit 300 .

3 to 5 , the reflected light reflected by the reflection unit 500 may be formed to be symmetrical with respect to the central axis of the light emitting unit 300 .

Referring back to FIG. 2 , the light emitting unit 10 according to an embodiment of the present invention may include a plurality of reflection units 500 .

The plurality of reflection units 500 include a first reflection group P provided on the end side of the support unit 100 , and a second reflection group C installed on the center side of the support unit 100 rather than the first reflection group P. may include.

The first reflection group P may include a plurality of reflection units 500 installed in a column or row of at least one of an upper end, a lower end, a left end, and a right end of the support unit 100 . The second reflection group C may include a plurality of reflection units 500 excluding the first reflection group P among the plurality of reflection units 500 installed on the support unit 100 , and the upper end of the support unit 100 . , may include a plurality of reflection units 500 not installed at the lower end, the left end, and the right end.

The second reflection group C is installed at the center of the installation surface 101 of the support 100 , and the first reflection group P is installed at the edge of the installation surface 101 of the support 100 . . The first reflection group C is installed at an outer portion of the installation surface 101 of the support part 100 rather than the central portion than the second reflection group P.

The main optical axis of the reflected light reflected by the reflection unit installed in the first reflection group P may be inclined light, and the main optical axis of the reflected light reflected by the reflection unit installed in the second reflection group C may be horizontal light. If it is parallel to the longitudinal direction of the light emitting unit 300, it may be referred to as horizontal light, and if it is inclined in the longitudinal direction, it may be referred to as inclined light.

The direction of the main optical axis of the reflection unit is a direction obtained by averaging the directions of the optical axes of the plurality of reflected lights reflected by the plurality of reflection surfaces provided in one reflection unit. Although the main optical axis of the reflected light of the reflection unit is horizontal, each reflected light may be partially inclined light. Conversely, even if the main optical axis of the reflected light of the reflector is inclined, each reflected light may be some horizontal light, but the average direction of the total reflected light is inclined with respect to the light emitting part 300 .

The reflection unit installed in the first reflection group P may be inclined light in which the reflected light reflected from one reflection unit is not symmetrical with respect to the light emitting unit 300 . The reflected light of the first reflection group P may be inclined light that may be incident into the aperture 20 to be described later.

Accordingly, it is possible to reduce the amount of light that does not pass through the aperture, so that the light does not reach the irradiation area, thereby solving the problem of insufficient light in the irradiation area.

Alternatively, the ratio of the inclined light to the reflected light of the first reflection group P may be higher than that of the parallel light parallel to the longitudinal direction of the light emitting unit 300 .

In the reflection unit installed in the second reflection group C, the reflected light reflected by one reflection unit may be symmetrical light with respect to the light emitting unit 300 . The reflected light of the second reflection group C may be parallel light. Alternatively, the ratio of the inclined light to the reflected light of the second reflection group C may be smaller than that of the parallel light parallel to the longitudinal direction of the light emitting unit 300 .

Hereinafter, the light emitting unit 300 and the support unit 100 will be described in detail with reference to FIGS. 7A to 8B .

Referring to FIG. 7A , the light emitting part 300 is a member installed on the support part 100 to generate light in the direction of the reflective surface 540 . As described above, the plurality of light emitting units 300 may be detachably installed on one support unit 100 in rows and columns.

In each of the plurality of light emitting units 300 , the outer peripheral surface of the light emitting unit 300 on which at least one of the plurality of light emitting units 410 , 420 , 430 , 440 is installed is not parallel to one surface of the support unit 100 .

In other words, at least one light emitting body among the plurality of light emitting bodies 410 , 420 , 430 , 440 installed in the light emitting unit 300 is positioned on a three-dimensional plane rather than a two-dimensional plane with the support 100 , and through this , it is possible to provide a greater number of light emitting bodies with a minimum area.

The outer circumferential surface of the above-described light emitting unit 300 may be understood as a plurality of mounting surfaces 310a, 310b, 310c, and 310d, and one surface of the supporting unit 100 may be understood as an installation surface 101 of the supporting unit 100. have.

The light emitting unit 300 may include a plurality of light emitting units 410 , 420 , 430 , and 440 and a light emitting unit body 310 on which the plurality of light emitting units 410 , 420 , 430 , and 44 may be mounted.

The light emitting body 310 may be a polyhedron including a plurality of mounting surfaces 310a, 310b, 310c, and 310d. The cross section of the light emitting body 310 may be formed of a polygon such as a triangle, a quadrangle, a pentagon, or a hexagon, and the outer circumferential surface of the light emitting body 310 may have a plurality of rectangles. The number of the plurality of rectangles depends on the cross-sectional shape of the illuminant body 310 .

The light emitting unit body 310 may have a pillar shape elongated in one direction (front and back direction), and may be formed in a polygonal pillar shape such as a triangular pillar, a square pillar, a pentagonal pillar, or a hexagonal pillar. In the case of FIG. 7( a ), the light emitting unit body 310 is an example of a quadrangular pole.

The plurality of mounting surfaces 310a, 310b, 310c, and 310d may be formed in a rectangular shape forming an outer circumferential surface of the light emitting body 310 . A plurality of light emitting bodies 410 , 420 , 430 , and 440 may be mounted on each of the plurality of mounting surfaces 310a , 310b , 310c and 310d forming the outer circumferential surface of the light emitting body 310 .

In addition, a plurality of light emitting bodies 410a, 410b, 410c may be mounted on one mounting surface 310a, and a plurality of light emitting bodies 420a, 420b, 420c may be mounted on one mounting surface 310b, A plurality of light emitting bodies 430a, 430b, and 430c may be mounted on one mounting surface 310c, and a plurality of light emitting bodies 440a, 440b, 440c may be mounted on one mounting surface 310d.

In other words, a plurality of light emitting units may be mounted on one mounting surface of the light emitting unit based on the longitudinal direction of the light emitting unit body 310 , and a plurality of light emitting units may be mounted on a plurality of mounting surfaces in the circumferential direction on the outer circumferential surface of the light emitting unit body 310 . can be mounted as

The light emitting part 300 may include a first connection part 340 that may be removably coupled to the first support part fixing part 110 of the support part 100 to be fixed. The first connection part 340 may extend from one end of the light emitting unit body 310 and protrude, and the first connection part 340 may be inserted into a groove or a hole of the first support part fixing part 110 to be coupled thereto. In this case, a screw thread 340a may be formed on the outer peripheral surface of the first connection part 340 . Alternatively, the first connection part 340 may be formed in a groove or hole shape inside one end of the light emitting part body 3100 , and the first connection part 340 is inserted by the light emitting part fixing screw 120a passing through the support part 100 . and can be fixed.

Referring to FIG. 7( b ), the light emitting unit 300 is a positive wire on the plurality of mounting surfaces 310a , 310b , 310c and 310d to supply electricity to the plurality of light emitting bodies 410 , 420 , 430 , and 440 . It may include (321, 323) and negative wirings (322, 324).

For example, the plus wire 321 and the minus wire 322 may be disposed on one mounting surface 310a, attached to the mounting surface 310a with an adhesive or by coating a metal material on the mounting surface 310a. can be formed. The light emitting body 410 may generate light by being electrically connected to the positive wiring 321 and the negative wiring 322 on one mounting surface 310a to receive power.

Each of the positive wirings 321 disposed on the two adjacent mounting surfaces 310a and 310d may be formed of one electrically connected member, and the negative wirings disposed on the two adjacent mounting surfaces 310a and 310b. 322 may be formed of one electrically connected member. Accordingly, when the light emitting body 310 is formed of a square pillar, the adjacent mounting surfaces share a positive or negative wiring as a corner portion of the rectangle, and only two positive wirings and two negative wirings are mounted on four mounting surfaces. It is possible to supply electricity to the light emitting body.

If the light emitting body 310 is formed of a hexagonal pole, electricity is applied to the light emitting body mounted on each mounting surface with three positive wires and three negative wires disposed on two mounting surfaces adjacent to the corners of the hexagon. can supply

Referring to FIG. 7( c ), the support part 100 is provided in the support part 100 to supply electricity to the plus and minus wires of the light emitting part 300 , and the plus wires 321 and 323 of the light emitting part 300 . ) may include a positive connection line 140 in electrical contact with the support unit 100 and a negative connection line 150 in electrical contact with the negative wirings 322 and 324 of the light emitting unit 300 .

Referring to FIG. 7( d ), the positive connection line 140 and the negative connection line 150 may be formed on the installation surface 101 of the support part 100 , and extend to the rear surface of the light emitting unit body 310 . The wirings 321 and 323 and the minus wirings 322 and 324 may be in electrical contact with each other.

8 (a) and 8 (b), the positive connection line 140 is electrically connected to the positive extension line 141 formed on the installation surface 101 of the support part 100, the negative connection line 150 The silver may be electrically connected to the negative extensibility 151 formed on the rear surface of the support part 100 . The positive extension line 141 and the negative extension line 151 may be connected to an external terminal to receive electricity. The arrangement of the positive terminal and the negative terminal described above is only an example and does not limit the present invention, and the positions of the positive terminal and the negative terminal may be exchanged with each other.

The plurality of light emitting bodies 410 , 420 , 430 , and 440 are members or elements that generate light when electricity is applied, and may be one of an LED chip or an LED package. The plurality of light emitting bodies 410 , 420 , 430 , and 440 may be mounted on the plurality of mounting surfaces 310a, 310b, 310c, and 310d.

Hereinafter, a relationship between the plurality of light emitting bodies mounted in the longitudinal direction of the light emitting unit 300 will be described. For example, the plurality of light emitting bodies 410a , 410b , and 410c mounted in the longitudinal direction of the light emitting unit 100 may include a first light emitting body 410a and a second light emitting unit which are sequentially disposed from the front end of the light emitting unit 300 to the rear side. It may include a light emitting body 410b and a third light emitting body 410c.

The plurality of light emitting bodies 410 , 420 , 430 , and 440 may be disposed on one mounting surface 310a , 310b , 310c , and 310d while being spaced apart from each other by a predetermined length in the longitudinal direction of the light emitting unit 300 . In this case, the number of light emitting bodies installed on each mounting surface may be equally installed on all mounting surfaces.

The plurality of light emitting bodies 410 , 420 , 430 , and 440 may be spaced apart from each other by a predetermined length in the circumferential direction of the light emitting unit 300 and disposed on the plurality of mounting surfaces. In this case, the number of light emitting units installed in the circumferential direction at the first position in the longitudinal direction of the light emitting unit 300 may be the same as the number of light emitting units installed in the circumferential direction at the second position in the longitudinal direction.

The plurality of light emitting bodies 410 , 420 , 430 , and 440 may all have the same light profile. In addition, the optical axis of the plurality of light emitting bodies 410 , 420 , 430 , and 440 may be directed in a direction normal to the mounting surfaces 310a , 310b , 310c and 310d on which the respective light emitting bodies are installed.

A plurality of light emitting bodies (410a, 410b, 410c) installed in the longitudinal direction of the light emitting unit 300 are installed on the light emitting unit body 310, and all the plurality of light emitting bodies (410a, 410b, 410c) of the reflecting unit 500 When disposed inside the inner space 520, the light generated by the first light emitting body 410a installed on the front end side of the light emitting unit body 310 is not reflected on the reflective surface 540a, and a part of the light becomes oblique light. can

This may cause a problem in that the amount of light incident to the light homogenizer 30 (refer to FIG. 10 ) is insufficient.

Hereinafter, with reference to FIGS. 9 (a) to 9 (d), the relationship between the plurality of light emitting bodies 410, 420, 430, and 440 for solving the problem of insufficient amount of light incident to the light homogenizer 30 will be described in detail.

As shown in FIG. 9( a ), at least one light emitting body among the plurality of light emitting bodies 410a , 410b , and 410c installed on one mounting surface in the longitudinal direction of the light emitting unit 300 is different from the other light emitting bodies. Profiles Pr1, Pr2, Pr3 may have.

As an example, the beam angle of the light profiles Pr1 , Pr2 , Pr3 of the plurality of light emitting bodies 410a , 410b , and 410c installed on one mounting surface in the longitudinal direction of the light emitting unit 300 is the light emitting unit 300 . ) may be formed narrower toward the front side.

The beam angle of the light profiles Pr1, Pr2, and Pr3 refers to an area that substantially affects the actual irradiation area among the distribution of light generated by the light emitting bodies 410a, 410b, and 410c, and the range in which the light is emitted is expressed in 'degree' units. expressed as

Incidentally, the directivity angle is set to be twice the angle until the output of the light profiles Pr1, Pr2, Pr3 reaches 50% of the maximum peak value (corresponding to the left and right when viewed from the front).

As an example, as shown in FIG. 9( a ), the beam angle of the light profile Pr1 of the first light-emitting body 410a located most forward in the longitudinal direction of the light-emitting unit 300 is the second light-emitting body. It is formed to be narrower than the beam angle of the light profile Pr2 of 410b and the beam angle of the light profile Pr3 of the third light emitting body 410c.

The beam angle of the light profile Pr2 of the second light emitting body 410b is narrower than that of the light profile Pr3 of the third light emitting body 410c.

The beam angle of the light profile Pr3 of the third light emitting body 410c located at the rearmost front side in the longitudinal direction of the light emitting part 300 is the beam angle of the light profile Pr2 of the second light emitting body 410b and the first light emitting body It is formed to be larger than the directional angle of the light profile Pr1 of 410a.

In summary, the beam angle of the light profiles Pr1 , Pr2 , and Pr3 of the first to third light emitting bodies 410a , 410b , 410c is 'The beam angle of the light profile Pr1 of the first light emitting body 410a < the second illuminant The relationship 'direction angle of the light profile Pr2 of (410b) < the radiation angle of the light profile Pr3 of the third light emitting body 410c' is satisfied.

As described above, by forming the beam angle of the light profile of the first light emitting body 410a installed at the front end of the light emitting unit 300 to be smaller than that of the second and third light emitting bodies 410b and 410c on the rear side, the first light emitting body ( Most of the light generated in 410a) is reflected by the first reflective surface 540a to reach the light homogenizer, and the problem of insufficient light quantity can be solved.

In other words, as it is positioned in front of the light emitting unit 300, the distance between the light emitting body and the reflective surface increases and becomes farther away. , most of the light generated by the light emitting body may be reflected from the reflective surface, and thus, the problem of uniformity and insufficient amount of light generated by the light emitting unit 10 may be solved.

As shown in FIG. 9(b) , at least one of the plurality of light-emitting bodies 410a, 410b, and 410c installed on one mounting surface in the longitudinal direction of the light-emitting unit 300 has a different optical axis than the other light-emitting bodies. can have direction.

As an example, the optical axis direction of the plurality of light emitting bodies 410a, 410b, and 410c installed on one mounting surface in the longitudinal direction of the light emitting unit 300 may be inclined backward toward the front side of the light emitting unit 300. have.

In this case, the plurality of light emitting bodies 410a , 410b , 410c installed on one mounting surface in the longitudinal direction of the light emitting unit 300 is directed toward the front side of the light emitting unit 300 . The optical axis angle may be formed to be small. The optical axis angle means an angle between the mounting surface on which the light emitting body is installed and the optical axis.

For example, the third light emitting body 410c has an optical axis in a direction perpendicular to the longitudinal direction of the light emitting unit 300, and thus may have an optical axis angle of 90 degrees, and the second light emitting body 410b may have an optical axis angle of 80 degrees. and the third light emitting body 410a may have an optical axis angle of 70 degrees.

In summary, the optical axis angles of the first to third light-emitting bodies 410a, 410b, and 410c are 'optical axis angle of the first light-emitting body 410a < optical axis angle of the second light-emitting body 410b < optical axis angle of the third light-emitting body 410c ' Satisfy the relationship.

As described above, in order to change the optical axis of the plurality of light-emitting bodies 410a, 410b, and 410c, the plurality of light-emitting bodies 410a, 410b, and 410c are configured as the same light-emitting body, but each of the light-emitting bodies may be tilted.

Alternatively, the plurality of light emitting bodies 410a, 410b, and 410c may emit light by not having the same light emitting body, but having optical axes of light emitted from each light emitting body have different inclinations.

As described above, by forming the optical axis direction of the first light emitting body 410a installed at the front end of the light emitting unit 300 to be relatively inclined rearward than the second and third light emitting bodies 410b and 410c on the rear side, the first light emitting body 410a ), most of the light generated is reflected by the first reflective surface 540a to reach the light homogenizer, and the problem of insufficient light quantity can be solved.

In other words, as it is positioned in front of the light emitting unit 300, the distance between the light emitting body and the reflective surface increases and becomes farther away. By forming the angle small, most of the light generated by the light emitting body can be reflected from the reflective surface, and through this, the problem of uniformity and insufficient amount of light generated by the light emitting unit 10 can be solved.

In addition, even if the light-emitting angles of the light profiles of the plurality of light-emitting bodies are the same, as above, by adjusting the optical axis direction and the optical axis angle, all light emitted from the light-emitting body can reach and be reflected on the reflective surface, and through this, the light-emitting unit The light quantity efficiency of (10) can be easily increased.

As shown in Fig. 9(c), the plurality of light emitting bodies 410a, 410b, and 410c installed on any one mounting surface in the longitudinal direction of the light emitting unit 300 are provided on the light emitting unit body 310 at different intervals from each other. can be installed.

In this case, the plurality of light emitting bodies (410a, 410b, 410c) installed on any one mounting surface in the longitudinal direction of the light emitting unit 300 may be arranged to be spaced apart from each other in a shorter distance toward the front side of the light emitting unit 300. have.

For example, the distance L2 between the first light-emitting body 410a and the second light-emitting body 410b may be shorter than the distance L1 between the second light-emitting body 410b and the third light-emitting body 410c.

As described above, the plurality of light emitting bodies (410a, 410b, 410c) installed on any one mounting surface in the longitudinal direction of the light emitting unit 300 are installed in the light emitting unit body 310 at different intervals, but the light emitting unit 300 By disposing the distances spaced apart from each other to be shorter toward the front side of the light emitting unit 300, the density of the light emitting body installed at the front end of the light emitting unit 300 can be increased than that of the rear side of the light emitting unit 300, and through this, the light emitting unit 10 It is possible to solve the problem of uniformity and insufficient amount of light generated from

In addition, it is possible to reinforce the amount of light that cannot be reflected on the front reflective surface 410a and efficiently circulate the heat generated by the light emitting body using the front inner space 520 that is relatively wider than the rear.

As shown in FIG. 9( d ), the number of the plurality of light emitting units installed in the circumferential direction of the light emitting unit 300 may be provided differently depending on the position in the longitudinal direction of the light emitting unit.

In this case, the number of the plurality of light emitting units installed in the circumferential direction of the light emitting unit 300 may increase toward the front side of the light emitting unit 300 .

For example, as shown in FIG. 9( d ), the total number of light emitting units installed around the light emitting unit 300 in which the first light emitting body 410a is installed is three, and the light emitting unit in which the second light emitting body 410b is installed. The total number of light emitting bodies installed around 300 is two, and the number of total light emitting bodies installed around the light emitting unit 300 where the third light emitting body 410c is installed is three, so that the front of the light emitting unit 300 is installed. The number of the plurality of light emitting bodies 410a , 410b , and 410c installed in the circumferential direction of the light emitting unit 300 may increase toward the side.

In summary, the number of the plurality of light emitting units installed in the circumferential direction of the light emitting unit 300 is 'the number of total light emitting units installed around the light emitting unit 300 in which the first light emitting unit 410a is installed > the second light emitting unit (410b) satisfies the relationship 'the number of total light emitting bodies installed around the light emitting part 300 where ' is installed > the number of total light emitting bodies installed around the light emitting part 300 on which the third light emitting body 410c is installed.

As described above, by providing a greater number of the plurality of light emitting bodies installed in the circumferential direction of the light emitting unit 300 toward the front side of the light emitting unit 300, the density of the light emitting body installed at the front end of the light emitting unit 300 is increased by the light emitting unit ( 300) may be larger than the rear side, and through this, the problem of uniformity and insufficient amount of light generated by the light emitting unit 10 may be solved.

In addition, it is possible to reinforce the amount of light that cannot be reflected on the front reflective surface 410a and efficiently circulate the heat generated by the light emitting body using the front inner space 520 that is relatively wider than the rear.

The light emitting unit 300 may include a light emitting unit cooling unit 330 inside the light emitting unit body 310 , and the light emitting unit cooling unit 330 may contact the support cooling unit 200 and generated from the light emitting unit. The heat may be received and transferred to the support cooling unit 200 .

In the light emitting unit 10 of the present invention, several light emitting bodies 410 , 420 , 430 , 440 are provided on the outer circumferential surface of the light emitting unit 300 , and the outer circumferential surface of the light emitting unit 300 on which at least one light emitting body is installed is By not being parallel to one surface of the support part 100 , the light emitting body is positioned on a three-dimensional plane rather than a two-dimensional plane with the support part 100 , and through this, a greater number of light-emitting elements can be provided with a minimum area. Therefore, it is possible to generate a required amount of light even with a size smaller than that of a conventional light emitting unit. In other words, the light emitting unit 10 of the present invention provides the effect of downsizing in vertical and horizontal directions while obtaining a sufficient amount of light by arranging a plurality of light emitting bodies in three dimensions.

In addition, the light emitting unit 10 of the present invention, as described above, by adjusting the number of light profiles, optical axis directions, separation intervals, and circumferential directions of the plurality of light emitting units, the longitudinal front side and rear side of the light emitting unit 300 . It is possible to minimize the light quantity imbalance due to the difference in the distance between the light emitting body and the reflective surface on the side, and through this, it is possible to achieve high light quantity efficiency.

Hereinafter, with reference to FIG. 10, the exposure machine system 1 provided with the light emitting unit 10 which has the above-mentioned structure is demonstrated.

10 is a diagram illustrating an exposure machine system including a light emitting unit according to an embodiment of the present invention.

Referring to FIG. 10 , the exposure machine system 1 of the present invention includes a light emitting unit 10 , an aperture 20 , a light homogenizer 30 , a concave mirror 40 , a flat mirror 50 , and a mask stage ( 60), and may include an irradiation target stage 70 .

The light emitting unit 10 may be formed of a combination of all the above-described configurations.

The aperture 20 has an opening having a size smaller than that of the light homogenizer 30 , and is provided at the front end on the optical path than the light homogenizer 30 in order to remove unnecessary light among the light emitted from the light emitting unit 10 . do.

The light homogenizer 30 may be one of a fly eye lens (FEL), a rod lens, and an integrator lens. The light homogenizing part 30 refers to a lens that makes the light incident through the aperture 20 uniformly as a whole and emits the light.

The concave mirror 40 is an optical member for removing light except for the parallel light among the light emitted from the light homogenizer 30 . Light incident on the concave mirror 40 does not reach the flat mirror 50 except for the light that is reflected by the concave mirror 40 and emitted to the flat mirror 50 , and the light that does not reach is a parallel light. It does not reach the irradiation area 80 with non-slanted light. Through this, only the parallel light parallel to the normal direction of the irradiation area 80 arrives.

The reflection mirror 50 is an optical member that changes the path of the light reflected from the concave mirror 40 in the direction of the irradiation area 80 .

The mask stage 60 may mount the mask 61 on its upper end, and may be moved in the Y-axis direction as well as the X-axis and Z-axis plane directions by a mask driver (not shown).

The irradiation target stage 70 may mount the irradiation target 71 on its upper end, and may be moved not only in the X-axis and Z-axis plane directions but also in the Y-axis direction by a wafer driver (not shown).

The light reflected by the reflective mirror 50 passes through the mask 61 at the top of the mask stage, and the light passing through the mask 61 reaches the irradiation target 71 and is irradiated to the upper end of the irradiation target 71 . A region 80 is formed. The irradiation target 71 may be one of a semiconductor device, a printed circuit board, a liquid crystal display substrate, and the like.

By using the configuration of the light emitting unit 10 and the exposure machine system 1 according to an embodiment of the present invention, the light reaching the irradiation area 80 can be uniformly irradiated to the irradiation target 71 . In addition, even if the number of light emitting bodies is increased to increase the amount of light, the size of the light emitting unit 10 and the exposure machine system 1 can be reduced.

In addition, the light emitting unit 10 provided in the exposure machine system 1 three-dimensionally arranges the plurality of light emitting bodies 410 , 420 , 430 , and 440 on the outer circumferential surface of the light emitting unit 300 , and includes a plurality of light emitting units as reflective surfaces of the reflecting unit. By reflecting the light generated by the light emitting bodies 410 , 420 , 430 , and 440 , a sufficient amount of light can be obtained, and the light emitting unit 10 and the exposure machine system 1 having the same can be miniaturized.

In addition, the light emitting unit 10 provided in the exposure machine system 1 measures the distance between the plurality of light emitting bodies 410a, 410b, and 410c and the plurality of reflective surfaces 540a, 540b, and 540c corresponding to the light emitting unit 300 . By increasing the length toward the front side in the longitudinal direction of the light emitting unit 300, even if the number of light emitting bodies 410a, 410b, and 410c arranged in the longitudinal direction of the light emitting unit 300 is increased, the forward direction of the light emitting unit 10, that is, the exposure machine system 1 ) can be easily irradiated with a sufficient amount of light in the forward direction.

Although the present invention has been described with reference to the embodiment shown in the drawings, this is merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Accordingly, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

1: Exposure machine system
10: light emitting unit 20: aperture
30: light homogenizing part 40: concave mirror
50: flat mirror 60: mask stage
61: mask 70: irradiation target stage
71: Investigation subject
100: support part 100a: support part body
100b: support cooling tube
101: mounting surface 102: rear
110: fixing part of the first support part 120: fixing part of the second support part
200: support cooling unit 210: cooling body unit
220: cooling tube
300: light emitting unit 310: light emitting unit body
310a, 310b, 310c, 310d: mounting surface
321, 323: positive wiring 322, 324: negative wiring
340: first connection 340a: thread
410, 420, 430, 440: illuminant
500: reflector 510: reflector body part
510a: second connection part 511: first reflective part piece
512: second reflective unit piece 513: third reflective unit piece
520: interior space 520a: front opening
520b: rear opening 521: first inner space
522: second inner space 523: third inner space
530: inner surface 531: first inner surface
532: second inner surface 533: third inner surface
540: reflective surface 540a: first reflective surface
540b: second reflective surface 540c: third reflective surface

Claims (12)

support;
a plurality of reflection units each having an interior space having a front opening formed therein, and individually installed on one surface of the support unit; and
A plurality of light emitting units respectively installed on one surface of the support so as to be located in the inner space of each of the plurality of reflective units, and a plurality of light emitting units for generating light are provided on the outer circumferential surface;
A plurality of reflective surfaces for reflecting light corresponding to each of the plurality of light emitting bodies installed in the longitudinal direction of the light emitting unit are provided in the inner space of the reflecting unit,
The light emitting unit, characterized in that the distance between the plurality of light emitting body and the plurality of reflective surfaces corresponding to the light emitting unit, characterized in that the distance increases toward the front side in the longitudinal direction of the light emitting unit. According to claim 1,
The light emitting unit, characterized in that at least one light emitting body among the plurality of light emitting units installed in the longitudinal direction of the light emitting unit has a different light profile from the other light emitting units. According to claim 1,
The light emitting unit, characterized in that the light-emitting unit, characterized in that the light-emitting unit, characterized in that the beam angle of the light profile of the plurality of light-emitting units installed in the longitudinal direction is formed narrower toward the front side of the light-emitting unit. According to claim 1,
The light emitting unit, characterized in that at least one light emitting body of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit has an optical axis direction different from that of the other light emitting units. According to claim 1,
The light emitting unit, characterized in that the optical axis direction of the plurality of light emitting units installed in the longitudinal direction of the light emitting unit is formed to be inclined backward toward the front side of the light emitting unit. According to claim 1,
A plurality of light emitting units installed in the longitudinal direction of the light emitting unit is a light emitting unit, characterized in that it is spaced apart from each other. According to claim 1,
The light emitting unit, characterized in that the distance between the plurality of light emitting units installed in the longitudinal direction of the light emitting unit is shorter toward the front side of the light emitting unit. According to claim 1,
The light emitting unit, characterized in that the number of the plurality of light emitting units installed in the circumferential direction of the light emitting unit is provided toward the front side of the light emitting unit. According to claim 1,
Each of the plurality of reflective surfaces is a light emitting unit, characterized in that formed on a portion of each of the plurality of inner surfaces of the reflective portion. 10. The method of claim 9,
The plurality of reflective surfaces is a light emitting unit, characterized in that formed on a portion of each of the plurality of inner surfaces based on the longitudinal direction of the light emitting unit. 10. The method of claim 9,
The plurality of reflective surfaces is a light emitting unit, characterized in that formed on a portion of each of the plurality of inner surfaces with respect to the circumferential direction of the light emitting unit. a light emitting unit that generates light;
an aperture for removing unnecessary light from among the light;
a light homogenizer for making the light homogeneous;
at least one mirror that converts the light passing through the light homogenizer into parallel light;
a mask stage supporting a mask through which the parallel light passes; and
and an irradiation target stage supporting an irradiation subject to which the light passing through the mask is irradiated,
The light emitting unit is provided with a support, and an internal space having a front opening therein, a plurality of reflective parts that are individually installed on one surface of the support part, and each of the plurality of reflective parts is located in the inner space of each of the plurality of reflective parts and a plurality of light emitting units respectively installed on one surface of the support unit and provided on an outer circumferential surface of a plurality of light emitting bodies for generating light;
A plurality of reflective surfaces for reflecting light corresponding to each of the plurality of light emitting bodies installed in the longitudinal direction of the light emitting unit are provided in the inner space of the reflecting unit,
The exposure machine system, characterized in that the distance between the plurality of light emitting bodies and the plurality of reflective surfaces corresponding thereto increases toward the front side in the longitudinal direction of the light emitting part.

Images