KR20210112462A - Vacuum pump housing for preventing overpressure and vacuum pump having the same - Google Patents

Abstract

The present invention provides a vacuum pump housing comprising: a suction port through which a fluid is sucked and a discharge port through which the suctioned fluid is discharged; a plurality of pump chambers provided to compress the fluid between the suction port and the discharge port; and a plurality of partition walls for partitioning each pump chamber. Each partition wall includes: an inlet and an outlet through which the compressed fluid is introduced and discharged; a shaft receiving unit in which a shaft is accommodated; and a discharge hole provided so that some of the compressed fluid is discharged to a shaft receiving unit side or an adjacent front partition wall while the compressed fluid flows from the inlet to the outlet. An objective of the present invention is to provide the vacuum pump capable of improving an exhaust speed.

Description

A vacuum pump housing for preventing overcompression and a vacuum pump including the same

The present invention relates to a vacuum pump housing that prevents overcompression in the vacuum pump housing and a vacuum pump including the same.

In general, a vacuum pump is a device for increasing the degree of vacuum in a container by sucking and compressing a low-pressure gas below atmospheric pressure in a container and releasing it into the atmosphere.

The vacuum pump includes a housing having an inlet and an outlet of the fluid for pumping the fluid, and a pair of rotors provided in the housing.

In the vacuum pump configured as described above, as a pair of rotors provided in the housing rotates by a driving means such as a motor, the fluid introduced into the housing is compressed and discharged through the outlet.

For example, in order to create a vacuum environment of a process chamber such as semiconductor manufacturing equipment, a vacuum pump compresses and sucks a fluid (process gas) from the process chamber and exhausts it to the atmosphere at atmospheric pressure.

In particular, when the fluid is evacuated using a multi-stage vacuum pump, as the fluid is transferred through the continuous pump chamber of the vacuum pump, the fluid in the vacuum pump is pressurized in stages and the pressure in the pump chamber is gradually increased. will increase to

Accordingly, overcompression occurs inside the vacuum pump housing, and accordingly, the number of rotations of the rotor decreases, and it takes a lot of time to exhaust the fluid in the process chamber.

In order to solve this problem, conventionally, the compressed fluid is discharged to the atmosphere by forming a bypass flow path such as an auxiliary exhaust pipe instead of an outlet to prevent overcompression.

However, the above-described pump has a difficulty in forming an additional component to prevent overcompression on the outside, and as the additional component is deformed over a certain period of time, there is a problem in that the overall performance of the vacuum pump is reduced.

Therefore, there is a need for a technology capable of overcoming the above problems.

KR registration 10-1695319 (2011.12.21)

An object of the present invention is to provide a vacuum pump capable of minimizing a reduction in rotational speed of a rotor due to overcompression by preventing overcompression of the vacuum pump and improving the exhaust speed by maintaining high exhaust performance in the atmospheric pressure region. .

In order to achieve the above object, according to an aspect of the present invention, a suction port through which the fluid is sucked and a discharge port through which the sucked fluid is discharged; a plurality of pump chambers provided to compress the fluid between the inlet and outlet; and a plurality of partition walls for partitioning each pump chamber. Including, each partition wall, the inlet and outlet through which the compressed fluid is introduced and discharged; a shaft accommodating part in which the shaft is accommodated; and a discharge hole provided so that a portion of the compressed fluid is discharged to the side of the shaft accommodating part or the adjacent front pump chamber while the compressed fluid flows from the inlet to the outlet. It provides a vacuum pump housing comprising a.

In addition, the respective pump chamber volumes include those provided to be gradually reduced toward the discharge port side.

In addition, the flow rate Q1 of the compressed fluid discharged to the discharge hole includes a flow rate ratio of 0.3 to 0.7 of the flow rate Q2 of the compressed fluid discharged to the discharge port.

In addition, the pressure P1 of the compressed fluid discharged to the discharge hole includes a pressure ratio of 0.7 to 1 of the pressure P2 of the compressed fluid discharged to the discharge port.

In addition, the number of discharge holes of the rear end barrier rib adjacent to the one barrier rib is equal to or smaller than that of the one barrier rib.

In addition, when the number of discharge holes of any one partition is n (n is an integer), n or n-1 (n is an integer) are provided in adjacent rear end partitions.

In addition, the area of the discharge hole of one of the barrier ribs is larger than the area of the discharge hole of the adjacent rear end barrier rib.

In addition, each partition has a first surface facing the inlet side and a second surface opposite to the first surface, and the discharge hole is provided in at least a portion of the second surface, and is provided in an area between the inlet and the outlet include being

In addition, the discharge hole includes one provided in at least a partial region of the shaft accommodating part.

In addition, each of the partition walls includes a hollow inside so that the compressed fluid can move.

In addition, according to another aspect of the present invention, a pair of rotating bodies each including a shaft and a plurality of rotors provided on the shaft outer periphery; and a housing in which a pair of rotating bodies are accommodated, the housing having an inlet through which the fluid is sucked and an outlet through which the sucked fluid is discharged; Including, the housing, a plurality of pump chambers in which a rotor for compressing the fluid is accommodated, respectively; a plurality of partition walls partitioning each pump chamber and having a shaft accommodating portion in which the shaft is accommodated; and each partition wall, an inlet and an outlet through which the compressed fluid is introduced and discharged; a discharge hole provided so that some of the compressed fluid is discharged to the side of the shaft accommodating part or the adjacent front partition wall while the compressed fluid flows from the inlet to the outlet; It provides a vacuum pump comprising a.

In addition, the rotor includes a root rotor.

In addition, the respective rotors accommodated in different pump chambers include those provided with the same or different rotor diameter, number of lobes, and profiles.

According to the present invention, by forming the discharge hole in the housing, it is possible to prevent overcompression that may occur inside the housing, thereby minimizing the reduction in the number of rotations of the rotor and improving the exhaust speed.

In addition, by preventing overcompression during exhaust at atmospheric pressure, there is an effect that can limit power consumption.

In addition, there is an effect that can prevent heat accumulation inside the vacuum pump due to overcompression.

1 is a front view of a vacuum pump housing according to an embodiment of the present invention.
2 is a rear view of a partition wall according to the first and second embodiments of the present invention.
Figure 3 is a front side perspective view of the vacuum pump housing according to the first embodiment of the present invention.
4 is a rear side perspective view of the vacuum pump housing according to the first embodiment of the present invention.
5 is a rear side perspective view of a vacuum pump housing according to a second embodiment of the present invention.
6 is a view illustrating a flow of a fluid in a vacuum pump housing according to an embodiment of the present invention.
7 is a front view of a vacuum pump according to a third embodiment of the present invention.
8 is a perspective view showing a pair of rotating bodies according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to their ordinary or dictionary meanings, and the inventor should properly understand the concept of the term in order to best describe his invention. Based on the principle that it can be defined, it should be interpreted as meaning and concept consistent with the technical idea of the present invention.

In addition, regardless of the reference numerals, the same or corresponding components are given the same or similar reference numbers, and duplicate descriptions thereof will be omitted, and the size and shape of each component shown for convenience of description is exaggerated or reduced can be

Therefore, the configuration shown in the embodiments and drawings described in the present specification is only the most preferred embodiment of the present invention and does not represent all of the technical spirit of the present invention, so at the time of the present application, various It should be understood that there may be equivalents and variations.

The present invention relates to a vacuum pump housing (10 or 20) and a vacuum pump (30) including the same. By forming a discharge hole in the housing, it is possible to prevent overcompression that may occur inside the housing, and accordingly, the rotor It relates to a vacuum pump housing capable of minimizing the reduction in rotational speed and improving the exhaust speed, and a vacuum pump including the same.

First, the vacuum pump housing 10 or 20 described herein may include an upper housing 11 and a lower housing 12 .

In particular, the plurality of pump chambers 200 ; 201 , 202 , 203 , 204 and the plurality of partition walls 300 provided inside the upper and lower housings 11 and 12 may be formed symmetrically to each other.

Therefore, hereinafter, the vacuum pump housing 10 or 20 and the vacuum pump 30 including the same will be described in detail with reference to the drawings showing the lower housing 12, and unless otherwise noted, the same applies to the upper housing 11 It should be understood that components may be included.

In addition to this, in the following, for example, the vacuum pump housing 10 provided with four pump chambers, that is, the first to fourth pump chambers 201 to 204 and three partition walls, that is, the first to third partition walls 301 to 303 . or 20) and the vacuum pump 30 including the same will be described, but the plurality of pump chambers 200 may be provided in various numbers according to the exhaust capacity of the vacuum pump, and a plurality of partition walls ( 300) may be provided.

1 is a front view of a vacuum pump housing according to a first embodiment of the present invention, FIG. 2 is a rear view of a bulkhead according to a first embodiment of the present invention, and FIG. 3 is a vacuum pump according to a first embodiment of the present invention. 4 is a rear perspective view of the vacuum pump housing according to the first embodiment of the present invention, and FIG. 5 is a rear perspective view of the vacuum pump housing according to the second embodiment of the present invention.

Hereinafter, the vacuum pump housing 10 or 20 according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 5 .

The vacuum pump housing 10 or 20 according to the first and second embodiments of the present invention includes a suction port 100 , a discharge port 101 , a pump chamber 200 , and a partition wall 300 .

More specifically, the suction port 100 through which the fluid is sucked may be connected to a process chamber such as semiconductor manufacturing equipment to suck the fluid (process gas) from the process chamber.

Accordingly, it is possible to form a vacuum environment of the process chamber.

As described above, the fluid sucked into the suction port 100 passes through the plurality of pump chambers 200 provided to compress the fluid between the suction port 100 and the discharge port 101 and is compressed, and the compressed fluid is the discharge port through which the fluid is discharged. It can be discharged to the atmosphere through 101.

That is, the discharge port 101 may be opened to the atmosphere, but is not limited thereto.

Here, as an example, the suction port 100 and the discharge port 101 may be respectively provided in the upper housing 11 and the lower housing 12, but is not limited thereto.

In particular, the suction port 100 may be provided at the side of the first pump chamber 201 , and the discharge port 101 may be provided at the rear end of the fourth pump chamber 204 .

In addition, the plurality of pump chambers 200 include a plurality of partition walls 300 for partitioning each of the pump chambers 201 to 204 .

The plurality of pump chambers 200 may be provided in various numbers according to the exhaust capacity of the vacuum pump. For example, at least two pump chambers 200 may be included, but are not limited thereto. A plurality of partition walls 300 may be provided.

More specifically, as an example, the plurality of pump chambers 200 include first to fourth pump chambers 201 to 204 , and the plurality of partition walls 300 include first to fourth partition walls 301 to 304 . do.

The first and second pump chambers 201 and 202 are partitioned by a first partition wall 301, the second and third pump chambers 202 and 203 are partitioned by a second partition wall 302, and third and fourth pump chambers ( 203 and 204 may be partitioned by the third partition wall 303 .

Here, the fourth partition wall 304 may partition the discharge end and the fourth pump chamber 204 to be described later.

In addition to this, each of the partition walls 301 to 304 includes an inlet 311 and an outlet 310 through which the compressed fluid is introduced and discharged.

In particular, the outlet 310 of the first partition wall 301 may be fluidly connected to the inlet 100 so that the fluid sucked from the inlet 100 is compressed in the first pump chamber 201 and flows to the outlet 310 . can

Accordingly, the fluid that has passed through the suction port 100 and the first pump chamber 201 sequentially is discharged toward the lower end of the first bulkhead 301 and flows into the rear end pump chamber inlet 311 provided on the upper end side of the rear end pump chamber, that is, the second It may flow into the pump chamber 202 .

In addition, each of the partition walls 301 to 304 includes a first surface 300a facing the suction port 100 and a second surface 300b opposite to the first surface 300a.

Here, the second surface 300b may face the discharge port 101 side.

More specifically, each of the partition walls 301 to 304 has a predetermined thickness T, and the compressed fluid in each of the pump chambers 201 to 204 is discharged through the outlet 310 to the rear end pump chamber inlet 311. The interior may be hollow to allow fluid movement.

That is, the partition wall may include a hollow part 305 having a hollow interior.

In this case, the outlet 310 may be provided at the lower end side of each partition wall, and the inlet 311 may be provided at the upper end side.

That is, the outlet 310 may be provided in the partition wall of the lower housing, and the inlet 311 may be provided in the partition wall of the upper housing.

Meanwhile, the vacuum pump housing 10 or 20 of the present invention further includes a bearing plate (not shown) provided with the discharge port 101 .

More specifically, the bearing plate may be connected and mounted to the side of the second surface 304b of the fourth partition wall 304 forming one surface of the fourth partition wall 304 to form a discharge end (not shown).

That is, the discharge port 101 may be provided at the rear end of the fourth pump chamber 204 .

In addition, the discharge end means a space formed by the second surface 304b of the fourth partition wall 304 and the bearing plate, and the discharge end may be provided in a structure having the same shape as each pump chamber.

That is, one surface facing the second surface 304b of the fourth partition wall 304 of the bearing plate (not shown) may be provided in a structure having the same shape as each pump chamber.

Accordingly, the discharge port 101 may be movably connected to the discharge end, which is a space formed by the second surface of the fourth partition wall and the bearing plate.

The fluid compressed in the fourth pump chamber 204 may be discharged to the atmosphere through a discharge port.

In addition, each of the partition walls 301 to 304 includes a shaft receiving portion 320 in which the shaft is accommodated.

In addition, in each of the pump chambers 201 to 204, the compressed fluid flows from the inlet 311 to the outlet 310, the shaft receiving part 320 side or the adjacent shear partition wall 301 side. It includes a discharge hole 330 provided to be partially discharged.

In addition, the volume of each of the pump chambers 201 to 204 may be provided to gradually decrease toward the discharge port 101 side.

More specifically, based on the longitudinal direction (axial direction of the shaft) of the housing, the width d1 of the first pump chamber 201 is formed larger than the width d2 of the second pump chamber 202, and the second pump chamber ( The width d2 of the third pump chamber 203 is formed to be larger than the width d3 of the third pump chamber 203 , and the width d3 of the third pump chamber 203 is formed to be larger than the width d4 of the fourth pump chamber 204 . can be

That is, the width of each pump chamber may be gradually reduced from the first pump chamber 201 toward the fourth pump chamber 204 side.

Accordingly, the volume of each of the pump chambers 201 to 204 is gradually decreased toward the discharge port 101 side.

Meanwhile, the flow rate Q1 of the compressed fluid discharged to the discharge hole 330 may have a flow rate ratio of 0.3 to 0.7 of the flow rate Q2 of the compressed fluid discharged to the outlet.

More specifically, the flow rate Q1 of the compressed fluid introduced into the inlet 311 of any one pump chamber 200 and discharged to the discharge hole 330 is 0.3 to Q2 of the flow rate Q2 of the compressed fluid discharged to the outlet 310 . 0.7, preferably 0.4 to 0.6 of Q2, more preferably 0.5 of Q2.

That is, Q1/Q2 = 0.3 to 0.7 or Q1/Q2 = 0.4 to 0.6 or Q1/Q2 = 0.5.

For example, the flow rate of the fluid compressed in the second pump chamber 202 is discharged to the outlet 310 of the second partition wall 302 is Qtot, and the flow rate of the compressed fluid discharged to the discharge hole 330 is Q1. , when the flow rate of the compressed fluid flowing into the inlet 311 is Q2,

Q1 = Qtot/2.

In addition, the pressure P1 of the compressed fluid discharged through the discharge hole 330 may have a pressure ratio of 0.7 to 1 or 0.9 to 1 of the pressure P2 of the compressed fluid flowing into the inlet 311 .

As described above, in the present invention, in addition to the outlet 310 through which the fluid compressed in each pump chamber 200 is discharged to the bulkhead at the rear end, the discharge hole 330 is discharged to the bulkhead at the front end (the hollow part of the bulkhead at the front end). It is possible to prevent overcompression that may occur inside the housing, that is, in each pump chamber 200 by forming the

That is, any one of the pump chambers (eg, the second pump chamber) through the discharge hole 330 is movably connected to the hollow part of the front end partition (first partition) of the one pump chamber, thereby preventing overcompression. be able to

In addition, by preventing overcompression during exhaust at atmospheric pressure, there is an effect that can limit power consumption.

In addition, there is an effect that can prevent heat accumulation in the vacuum pump due to overcompression.

In particular, for example, in the case of the load lock process, the chamber at atmospheric pressure is exhausted. At this time, since the overcompression phenomenon is prevented by the discharge hole, the exhaust speed can be maintained high, thereby reducing the process chamber exhaust time in the load lock process. can be made short.

Meanwhile, the discharge hole 330 having the above-described function may be formed as follows.

More specifically, each partition wall 300 has a first surface 300a facing the suction port 100 side and a second surface 300b opposite to the first surface 300a, and has a discharge hole 330 . Silver, which is provided in at least a partial area of the second surface 300b, may be provided in an area between the outlet 310 and the inlet 311 .

In addition, the discharge hole 330 may be provided in at least a partial area (not shown) of the shaft accommodating part 320 .

Referring to FIGS. 2A and 4 , the discharge hole 330 of the vacuum pump housing 10 according to the first embodiment of the present invention is formed in the upper housing 11 on the second surface 300b of each partition wall. and the lower housing 12 may be respectively formed in regions where they are coupled to face each other.

That is, the discharge hole 330 may be formed in the central portion of the housing.

More specifically, the first groove 331 is provided on the second surface 300b of each partition by a predetermined length L to be symmetrically formed on both sides with respect to the shaft receiving portions 320 and 320'. have.

Referring to FIGS. 2B and 5 , the discharge hole 330 of the vacuum pump housing 20 according to the second embodiment of the present invention is formed in the upper housing 11 on the second surface 300b of each partition wall. And the lower housing 12 may be formed to be symmetrically formed in a region where they are coupled to each other facing each other,

More specifically, based on the shaft receiving portions 320 and 320' on the second surface 300b of each partition wall, the second groove 332 by a predetermined length L between the respective shaft receiving portions 320 and 320'. ) can be formed by providing

By forming the discharge hole 330 as described above, before the compressed fluid is discharged to the discharge port 310, some of the total fluid is discharged to the hollow part of the front end partition through the discharge hole 330 to prevent overcompression. be able to do

Here, when the discharge hole is provided in at least a partial region of the shaft accommodating part 320 , before the compressed fluid is discharged to the discharge port 310 , a portion of the entire fluid through the discharge hole receives the shaft of the adjacent front partition wall. It is discharged to the hollow side of the partition wall through the discharge hole on the side of the part 320 to prevent overcompression.

In particular, by forming the upper housing 11 and the lower housing 12 to be symmetrically formed in a region where they face each other and are coupled to each other, when forming the discharge hole in the vacuum pump housing, it is possible to manufacture more easily.

In addition, the number of discharge holes 330 of any one partition wall 300 may be equal to or greater than the number of discharge holes 330 of adjacent rear end partition walls.

In other words, the number of discharge holes of the rear end barrier rib adjacent to the one barrier rib may be equal to or smaller than that of the one barrier rib.

In particular, when the number of discharge holes in one partition wall is n (n is an integer), n or n-1 (n is an integer) in the rear end partition wall adjacent thereto may be provided.

For example, when the number of discharge holes of the first partition wall 301 is four, the number of discharge holes of the second partition wall 302 that is a partition wall at the rear end may be four or three.

In addition, the area of the discharge hole of one of the partition walls may be larger than the area of the discharge hole of the adjacent rear end partition wall.

As described above, overcompression in each pump chamber can be minimized by making the number of discharge holes of any one bulkhead, for example, the first bulkhead 301 larger than the number of discharge holes of the rear end of the bulkhead, or making the area larger. there will be

In particular, toward the rear end of the pump chamber, the pressure difference between the pump chambers increases and the flow due to the pressure difference increases. There is an advantage in that the number of discharge holes formed in the barrier rib is smaller than the front end, or the area of the discharge holes is formed smaller than the front end, thereby preventing overcompression.

6 is a view illustrating a flow of a fluid in a vacuum pump housing according to an embodiment of the present invention.

Referring to FIG. 6 , when the flow of the compressed fluid by the discharge hole 330 is described, when the fluid is sucked through the suction port and then compressed in each pump chamber and moved to the pump chamber at the rear end, generally 1 shown in the drawing Although it flows along the arrow No., in the present invention, a discharge hole is formed, so that a part of the fluid moves to the partition wall at the front end (the hollow side of the partition wall at the front end) along the arrow No. 2, and then the remaining fluid follows the arrow No. 1 It is moved to the pump chamber of the rear stage, and the compressed fluid is distributed to the bulkhead of the front stage through the discharge hole and moved, thereby preventing overcompression.

Meanwhile, the present invention provides a vacuum pump 30 including the vacuum pump housing 10 or 20 according to the first and second embodiments.

For example, the vacuum pump 30 relates to the vacuum pump 30 including the vacuum pump housing 10 or 20 described above.

Accordingly, as for the specific details of the vacuum pump housing to be described later, the contents described in the vacuum pump housing may be equally applied.

6 is a front view of a vacuum pump 30 according to a third embodiment of the present invention, and FIG. 7 is a perspective view showing a pair of rotating bodies according to an embodiment of the present invention.

6 and 7, the vacuum pump 30 is a pair of rotating bodies 500 including shafts 501 and 501' and a plurality of rotors 502 and 502' provided on the outer periphery of the shaft, respectively. 500').

In addition, a pair of rotating bodies 500 and 500 ′ are accommodated, and a housing 10 or 20 having a suction port 100 through which the fluid is sucked and a discharge port 101 through which the suctioned fluid is discharged is included.

In addition to this, the housing 10 or 20 includes a plurality of pump chambers 200 in which a rotor 502 for compressing a fluid is accommodated, respectively, and partitions the respective pump chambers 201 to 204, and a shaft 501 ) includes a plurality of partition walls 300 having a shaft receiving portion 320 to be accommodated.

In addition, each of the pump chambers 201 to 204 includes an outlet 310 and an inlet 311 through which the compressed fluid is discharged and introduced, and the compressed fluid flows from the inlet 311 to the outlet 310 In the process, a discharge hole 330 provided to discharge a portion of the compressed fluid toward the shaft accommodating part 320 or the adjacent front partition wall 301 or 302 or 303 is included.

Here, the rotors 502 and 502' may be root rotors.

Accordingly, the vacuum pump 30 may be a Roots pump.

In addition, each rotor accommodated in different pump chambers may be provided with the same or different rotor diameter, number of lobes, and profile.

10, 20: vacuum pump housing
30: vacuum pump

Claims (13)

a suction port through which the fluid is sucked and a discharge port through which the suctioned fluid is discharged;
a plurality of pump chambers provided to compress the fluid between the inlet and outlet; and
a plurality of partition walls for partitioning each pump chamber; includes,
Each of the partition walls includes an inlet and an outlet through which the compressed fluid is introduced and discharged;
a shaft accommodating part in which the shaft is accommodated; and
a discharge hole provided so that some of the compressed fluid is discharged to the side of the shaft accommodating part or the adjacent front partition wall while the compressed fluid flows from the inlet to the outlet; A vacuum pump housing comprising a. The method of claim 1,
The vacuum pump housing is provided such that the volume of each pump chamber is gradually reduced toward the discharge port side. 3. The method of claim 1 or 2,
The flow rate Q1 of the compressed fluid discharged to the discharge hole has a flow ratio of 0.3 to 0.7 of the flow rate Q2 of the compressed fluid discharged to the discharge port. 3. The method of claim 1 or 2,
The pressure P1 of the compressed fluid discharged to the discharge hole is a vacuum pump housing having a pressure ratio of 0.7 to 1 of the pressure P2 of the compressed fluid discharged to the discharge port. 3. The method of claim 2,
A vacuum pump housing in which the number of discharge holes of the rear end partition wall adjacent to the one partition wall is equal to or less than that of the one partition wall. 6. The method of claim 5,
If the number of discharge holes in one partition is n (n is an integer),
A vacuum pump housing in which n or n-1 pieces (n is an integer) are provided in adjacent rear end bulkheads. 3. The method of claim 2,
A vacuum pump housing in which an area of a discharge hole of one partition is larger than an area of a discharge hole of an adjacent rear end partition. The method of claim 1,
Each partition wall has a first surface facing the inlet side and a second surface opposite to the first surface,
The discharge hole is provided in at least a partial area of the second surface, the vacuum pump housing being provided in the area between the inlet and the outlet. The method of claim 1,
The discharge hole is a vacuum pump housing provided in at least a partial area of the shaft receiving part. The method of claim 1,
Each partition wall is a vacuum pump housing with a hollow inside so that the compressed fluid can move. A pair of rotating bodies each including a shaft and a plurality of rotors provided on the outer periphery of the shaft; and
a housing having a pair of rotating bodies accommodated therein, an inlet through which the fluid is sucked, and an outlet through which the sucked fluid is discharged; includes,
the housing,
a plurality of pump chambers in which rotors for compressing the fluid are accommodated, respectively;
a plurality of partition walls partitioning each pump chamber and having a shaft accommodating portion in which the shaft is accommodated; includes
Each of the partition walls includes an inlet and an outlet through which the compressed fluid is introduced and discharged;
a discharge hole provided so that some of the compressed fluid is discharged to the side of the shaft accommodating part or the adjacent front partition wall while the compressed fluid flows from the inlet to the outlet; A vacuum pump comprising a. 12. The method of claim 11,
The rotor is a vacuum pump that is a root rotor. 13. The method of claim 12,
Each rotor accommodated in different pump chambers is a vacuum pump in which the diameter of the rotor, the number of lobes, and the profile are the same or different from each other.

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