CN216767759U - Multistage Roots Vacuum Pump - Google Patents

Abstract

The embodiment of the utility model provides a multi-stage Roots vacuum pump, which relates to the technical field of vacuum pumps. The multi-stage Roots vacuum pump includes a cavity and two rotors. The cavity includes an intake cavity, a first-stage compression cavity and a second-stage compression cavity that are connected in sequence. The number of the first-stage compression cavity is two, and the two first-stage compression cavities are opposite to each other. The two rotors are symmetrical in the middle plane of the two; the two rotors are installed in the cavity, and the two rotors mesh with each other and rotate in the opposite direction. The rotor, the first-stage Roots rotor and the second-stage Roots rotor are respectively located in the intake cavity, the first-stage compression cavity and the second-stage compression cavity. The two first-stage compression chambers are symmetrical with respect to the midplane of the two, so that the two first-stage Roots rotors of the rotor are also symmetrical with respect to the midplane of the two, which can reduce the volume of the equipment and can effectively It can greatly reduce the axial force on the rotor and improve the stability of the equipment.

Description

Multistage Roots Vacuum Pump

technical field

The utility model relates to the technical field of vacuum pumps, in particular to a multi-stage Roots vacuum pump.

Background technique

Most of the suction and exhaust structures of existing traditional vacuum pumps are generally distributed on both sides. For example, the existing multi-stage Roots vacuum pump is a variable-volume dry vacuum pump. The shaft end gear drives synchronously and reversely. During the pumping process of the claw pump, there is no liquid medium such as oil in the pump cavity, and it does not pollute the pumped container and the working environment, so it has been widely used in the semiconductor, electronic, chemical and pharmaceutical industries. However, the existing vacuum pump does not have a structure that exhausts near the gas at both ends at the same time, or exhausts both ends near the gas at the same time.

This makes the vacuum pump of the existing structure larger in size and has a large number of internal parts, so it is difficult to ensure the stability of the equipment operation, and the rotor bears a large axial force, and the stability of the equipment exhausting is not enough.

Utility model content

The purpose of the present invention includes providing a multi-stage Roots vacuum pump, which can reduce the volume of the pump, reduce the axial force of the rotor, and increase the stability of the equipment.

Embodiments of the present utility model can be implemented as follows:

The utility model provides a multi-stage Roots vacuum pump. The multi-stage Roots vacuum pump comprises:

A cavity, the cavity includes an air intake cavity, a first-stage compression cavity and a second-stage compression cavity which are communicated in sequence, the number of the first-stage compression cavity is two, and the two first-stage compression cavities are symmetrical with respect to the midplane of the two;

Two rotors are installed in the cavity. The two rotors mesh with each other and rotate in the opposite direction. The rotors include an intake rotor, a primary Roots rotor and a secondary Roots rotor. The intake rotor, the primary Roots rotor and the secondary Roots rotor The stage Roots rotors are respectively located in the intake cavity, the first stage compression cavity and the second stage compression cavity.

The beneficial effects of the multi-stage Roots vacuum pump provided by the embodiment of the present invention include:

The two primary compression chambers are symmetrical with respect to the midplane of the two, so that the two primary Roots rotors of the rotor are also symmetrical with respect to the midplane of the two, which can reduce the volume of the equipment and effectively. It can greatly reduce the axial force on the rotor and improve the stability of the equipment.

In an optional embodiment, the intake cavity is communicated with the two primary compression cavities through two first passages respectively, and the two first passages are symmetrical with respect to the midplane of the two primary compression cavities.

In this way, the two first passages are symmetrical with respect to the midplanes of the two primary compression chambers, which further balances the forces on both ends of the rotor and increases the stability of the rotor's operation.

In an optional embodiment, the two primary compression chambers and the two secondary compression chambers communicate with each other through two second passages, and the two second passages are symmetrical with respect to the midplane of the two primary compression chambers.

In this way, the two second passages are symmetrical with respect to the middle planes of the two primary compression chambers, which further balances the forces on both ends of the rotor and increases the stability of the rotor operation.

In an optional embodiment, the number of intake chambers is one, the intake chamber is located between two primary compression chambers, and the two secondary compression chambers are respectively located outside the two primary compression chambers.

In an optional embodiment, the number of secondary compression chambers is two, and the two secondary compression chambers are symmetrical with respect to the midplane of the two primary compression chambers.

In this way, the two secondary compression chambers are symmetrical with respect to the midplanes of the two primary compression chambers, which further reduces the volume of the equipment, reduces the axial force borne by the rotor, and improves the stability of the equipment.

In an alternative embodiment, the mid-plane of the intake cavity coincides with the mid-plane of the two primary compression cavities.

In this way, the distribution of the cavity inside the cavity and the distribution of the vanes of the rotor are in a symmetrical form, which minimizes the volume of the equipment, reduces the axial force borne by the rotor, and improves the stability of the equipment.

In an optional embodiment, the secondary compression cavity is an exhaust cavity, and the cavity further includes two exhaust passages, the two exhaust passages are respectively communicated with the two secondary compression chambers, and the two exhaust passages are opposite to the two exhaust passages. The midplane of each primary compression cavity is symmetrical.

In this way, the two exhaust passages are symmetrical with respect to the midplane of the two primary compression chambers, which further reduces the volume of the equipment, reduces the axial force borne by the rotor, and improves the stability of the equipment.

In an optional embodiment, the number of the intake cavities is two, the two intake cavities are respectively located outside the two first-stage compression cavities, and the two intake cavities are arranged at an angle with respect to the midplane of the two first-stage compression cavities. Symmetrical form.

In this way, the multi-stage Roots vacuum pump is in the form of air intake at both ends and air outlet in the middle, and the two intake chambers are symmetrical with respect to the midplane of the two first-stage compression chambers, which can reduce the volume of the equipment and effectively Reduce the axial force on the rotor and improve the stability of the equipment.

In an optional embodiment, the cavity further includes two air intake passages, the two air intake passages are respectively communicated with the two air intake cavities, and the two air intake passages are symmetrical with respect to the midplane of the two primary compression chambers form.

In this way, the two air inlets are symmetrical with respect to the middle planes of the two primary compression chambers, which further balances the forces on both ends of the rotor and increases the stability of the rotor's operation.

In an optional embodiment, the secondary compression cavity is an exhaust cavity, the number of the secondary compression cavity is one, and the midplane of the secondary compression cavity coincides with the midplanes of the two primary compression cavities.

In this way, the distribution of the cavity inside the cavity and the distribution of the lobes on the rotor are in a symmetrical form, which minimizes the volume of the equipment, reduces the axial force borne by the rotor, and improves the stability of the equipment.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the accompanying drawings that need to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention. Therefore, it should not be regarded as a limitation of the scope. For those of ordinary skill in the art, other related drawings can also be obtained from these drawings without any creative effort.

Fig. 1 is the outline schematic diagram of the multi-stage Roots vacuum pump provided by the first embodiment of the present utility model;

Fig. 2 is a schematic cross-sectional view of the multi-stage Roots vacuum pump along section line A-A in Fig. 1;

Fig. 3 is the cross-sectional schematic diagram of the multi-stage Roots vacuum pump in Fig. 1 along section line B-B;

4 is a schematic cross-sectional view of a multi-stage Roots vacuum pump from a first perspective provided by the second embodiment of the present invention;

5 is a schematic cross-sectional view of a multi-stage Roots vacuum pump provided by a second embodiment of the present invention from a second perspective.

Icon: 100-Multistage Roots vacuum pump; 110-Cavity; 111-Inlet cavity; 112-First-stage compression cavity; 113-Second-stage compression cavity; 114-First channel; 115-Second channel; 116-Inlet Air duct; 117-exhaust duct; 118-intake port; 119-exhaust port; 120-rotor; 121-intake rotor; 122-first-stage Roots rotor; 123-second-stage Roots rotor; 130-motor .

Detailed ways

In order to make the purposes, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. The embodiments described above are a part of the embodiments of the present invention, but not all of the embodiments. The components of the embodiments of the invention generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations.

Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

In the description of the present utility model, it should be noted that, if the azimuth or positional relationship indicated by the terms "upper", "down", "inner", "outer", etc. appears, it is based on the azimuth or positional relationship shown in the accompanying drawings, Or the orientation or positional relationship that the utility model product is usually placed in use is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation or a specific orientation. construction and operation, and therefore should not be construed as a limitation of the present invention.

In addition, where the terms "first", "second" and the like appear, they are only used to differentiate the description, and should not be construed as indicating or implying relative importance.

It should be noted that the features in the embodiments of the present invention may be combined with each other under the condition of no conflict.

first embodiment

Please refer to FIG. 1 and FIG. 2 , this embodiment provides a multi-stage Roots vacuum pump 100 . The multi-stage Roots vacuum pump 100 is a structure with intake air in the middle and exhaust at both ends. The multi-stage Roots vacuum pump 100 includes a cavity. 110 , rotor 120 and motor 130 .

The cavity 110 includes an intake cavity 111, a first-stage compression cavity 112 and a second-stage compression cavity 113 that are communicated in sequence. Symmetrical form, the number of intake chambers 111 is one, the intake chamber 111 is located between the two primary compression chambers 112, the midplane of the intake chamber 111 coincides with the midplane of the two primary compression chambers 112, and the intake chamber An air inlet 118 is opened on the side wall of 111 (please refer to FIG. 3 ).

The two secondary compression chambers 113 are respectively located outside the two primary compression chambers 112 . The number of the secondary compression chambers 113 is two, and the two secondary compression chambers 113 are symmetrical with respect to the midplane of the two primary compression chambers 112 .

The two rotors 120 are installed in the cavity 110. The two rotors 120 mesh with each other and rotate in the opposite direction synchronously. The rotors 120 include an intake rotor 121, a primary Roots rotor 122 and a secondary Roots rotor 123. The intake rotor 121 , the primary Roots rotor 122 and the secondary Roots rotor 123 are respectively located in the intake chamber 111 , the primary compression chamber 112 and the secondary compression chamber 113 .

The motor 130 is installed outside the cavity 110 , the motor 130 is drivingly connected with one of the rotors 120 , and one rotor 120 can be drivingly connected with the other rotor 120 through gears, so that the two rotors 120 can rotate in opposite directions synchronously.

Referring to FIG. 3 , the intake chamber 111 is communicated with the two primary compression chambers 112 through two first passages 114 respectively, and the two first passages 114 are symmetrical with respect to the midplane of the two primary compression chambers 112 .

The two primary compression chambers 112 and the two secondary compression chambers 113 communicate with each other through two second passages 115 , and the two second passages 115 are symmetrical with respect to the midplane of the two primary compression chambers 112 .

The secondary compression cavity 113 is an exhaust cavity, and the cavity 110 further includes two exhaust passages 117. The two exhaust passages 117 are respectively communicated with the two secondary compression chambers 113. The two exhaust passages 117 are opposite to the two one. The midplane of the stage compression cavity 112 is symmetrical.

The working principle of the multi-stage Roots vacuum pump 100 provided in this embodiment:

The motor 130 drives one rotor 120 to rotate, one rotor 120 drives the other rotor 120 to rotate through gears, and the two rotors 120 rotate in opposite directions. 114 enters the two primary compression chambers 112 respectively, the gas entering the primary compression chamber 112 runs through the rotor 120, enters the two secondary compression chambers 113 through the two second passages 115, and finally passes through the two exhaust passages 117 The pumped gas is discharged out of the pump.

The beneficial effects of the multi-stage Roots vacuum pump 100 provided by the embodiment of the present invention include:

The cavities in the cavity 110 are arranged in a symmetrical form, so that the lobes on the rotor 120 are also in a symmetrical form, which can reduce the volume of the equipment and the number of parts, and can also effectively reduce the axial force that the rotor 120 bears. device stability.

Second Embodiment

Referring to FIG. 4 , this embodiment provides a multi-stage Roots vacuum pump 100 . The multi-stage Roots vacuum pump 100 is in the form of intermediate exhaust and air intake at both ends. The multi-stage Roots vacuum pump 100 includes a cavity 110 and a rotor. 120 and motor 130.

The cavity 110 includes an intake cavity 111 , a primary compression cavity 112 and a secondary compression cavity 113 that are communicated in sequence. On the outside, the two intake cavities 111 are symmetrical with respect to the midplane of the two primary compression cavities 112 . The two intake passages 116 are respectively communicated with the two intake chambers 111 , and the two intake passages 116 are symmetrical with respect to the midplane of the two primary compression chambers 112 . The secondary compression chamber 113 is an exhaust chamber. The side wall of the secondary compression chamber 113 is provided with an exhaust port 119. The number of the secondary compression chamber 113 is one. The midplanes of the cavities 112 coincide.

Referring to FIG. 5 , the two intake cavities 111 and the two primary compression cavities 112 are respectively communicated through two first passages 114 , and the two first passages 114 are symmetrical with respect to the midplane of the two primary compression cavities 112 . . The two primary compression chambers 112 and the two secondary compression chambers 113 communicate with each other through two second passages 115 , and the two second passages 115 are symmetrical with respect to the midplane of the two primary compression chambers 112 .

The working principle of the multi-stage Roots vacuum pump 100 provided in this embodiment:

The motor 130 drives one rotor 120 to rotate, one rotor 120 drives the other rotor 120 to rotate through gears, and the two rotors 120 rotate in opposite directions. The first passages 114 respectively enter the two primary compression chambers 112 , the gas entering the two primary compression chambers 112 runs through the inner rotor 120 , enters the two secondary compression chambers 113 through the two second passages 115 , and finally passes through the two secondary compression chambers 113 . The exhaust port 119 discharges the pumped gas out of the pump.

The beneficial effects of the multi-stage Roots vacuum pump 100 provided by the embodiment of the present invention include:

The cavities in the cavity 110 are arranged in a symmetrical form, so that the lobes on the rotor 120 are also in a symmetrical form, which can reduce the volume of the equipment and the number of parts, and can also effectively reduce the axial force that the rotor 120 bears. device stability.

It is easy to understand that the number of stages of the cavity 110 provided in the above embodiment can also be increased to four stages, five stages, etc., and more can be added according to requirements. The rotor 120 is a multi-stage Roots rotor 120, and the profile of the rotor 120 can be With any profile, the number of blades of the rotor 120 can be any number of blades.

The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present invention. , all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (10)

1. A multi-stage roots vacuum pump, comprising:

the cavity body (110) comprises an air inlet cavity (111), first-stage compression cavities (112) and second-stage compression cavities (113) which are sequentially communicated, the number of the first-stage compression cavities (112) is two, and the two first-stage compression cavities (112) are in a symmetrical form relative to the middle planes of the two first-stage compression cavities;

the two rotors (120) are mounted in the cavity (110), the two rotors (120) are meshed with each other and synchronously rotate in opposite directions, the rotors (120) comprise an air inlet rotor (121), a first-stage Roots rotor (122) and a second-stage Roots rotor (123), and the air inlet rotor (121), the first-stage Roots rotor (122) and the second-stage Roots rotor (123) are respectively located in the air inlet cavity (111), the first-stage compression cavity (112) and the second-stage compression cavity (113).

2. A multi-stage roots vacuum pump according to claim 1, wherein the gas inlet chamber (111) communicates with the two primary compression chambers (112) through two first passages (114), respectively, the two first passages (114) being in a symmetrical form with respect to a mid-plane of the two primary compression chambers (112).

3. A multi-stage roots vacuum pump according to claim 1, wherein the two primary compression chambers (112) and the two secondary compression chambers (113) are respectively communicated through two second passages (115), the two second passages (115) being in a symmetrical form with respect to a mid-plane of the two primary compression chambers (112).

4. The multi-stage roots vacuum pump according to claim 1, wherein the number of the gas inlet chamber (111) is one, the gas inlet chamber (111) is located between two of the primary compression chambers (112), and two of the secondary compression chambers (113) are located outside the two primary compression chambers (112), respectively.

5. A multi-stage Roots vacuum pump according to claim 4, wherein the number of the two-stage compression chambers (113) is two, and the two-stage compression chambers (113) are in a symmetrical form with respect to a mid-plane of the two one-stage compression chambers (112).

6. A multi-stage Roots vacuum pump according to claim 4, wherein the mid-plane of the inlet chamber (111) coincides with the mid-planes of the two primary compression chambers (112).

7. A multi-stage Roots vacuum pump according to claim 4, wherein the secondary compression chamber (113) is a discharge chamber, and the chamber body (110) further comprises two discharge passages (117), the two discharge passages (117) communicating with the two secondary compression chambers (113), respectively, the two discharge passages (117) being symmetrical with respect to a mid-plane of the two primary compression chambers (112).

8. The multistage roots vacuum pump according to claim 1, wherein the number of the gas inlet chambers (111) is two, two gas inlet chambers (111) are respectively located outside two primary compression chambers (112), and the two gas inlet chambers (111) are in a symmetrical form with respect to a mid-plane of the two primary compression chambers (112).

9. The multi-stage roots vacuum pump according to claim 8, wherein the chamber body (110) further comprises two inlet ports (116), the two inlet ports (116) respectively communicate with the two inlet chambers (111), and the two inlet ports (116) are symmetrical with respect to a mid-plane of the two primary compression chambers (112).

10. A multi-stage roots vacuum pump according to claim 8, wherein the two-stage compression chambers (113) are exhaust chambers, the number of the two-stage compression chambers (113) is one, and the mid-planes of the two-stage compression chambers (113) coincide with the mid-planes of the two one-stage compression chambers (112).

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