CN216767759U - Multistage roots vacuum pump - Google Patents
Multistage roots vacuum pump Download PDFInfo
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- CN216767759U CN216767759U CN202220375290.8U CN202220375290U CN216767759U CN 216767759 U CN216767759 U CN 216767759U CN 202220375290 U CN202220375290 U CN 202220375290U CN 216767759 U CN216767759 U CN 216767759U
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Abstract
The embodiment of the utility model provides a multistage roots vacuum pump, and relates to the technical field of vacuum pumps. The multistage Roots vacuum pump comprises a cavity and two rotors, wherein the cavity comprises an air inlet cavity, a first-stage compression cavity and a second-stage compression cavity which are sequentially communicated, the number of the first-stage compression cavities is two, and the two first-stage compression cavities are symmetrical relative to the middle plane of the two first-stage compression cavities; two rotors are installed in the cavity, and two rotor intermeshing, and synchronous antiport, the rotor is including admitting air rotor, one-level roots rotor and second grade roots rotor, and the rotor that admits air, one-level roots rotor and second grade roots rotor are located respectively and admit air chamber, one-level compression chamber and second grade compression chamber. The two first-stage compression cavities are in a symmetrical form relative to the middle planes of the two first-stage compression cavities, so that the two first-stage Roots rotors of the rotors are also in a symmetrical form relative to the middle planes of the two first-stage compression cavities, the size of the equipment can be reduced, the axial force borne by the rotors can be effectively reduced, and the stability of the equipment is improved.
Description
Technical Field
The utility model relates to the technical field of vacuum pumps, in particular to a multistage roots vacuum pump.
Background
Most of the suction and exhaust structures of the existing traditional vacuum pumps are generally distributed on two sides respectively, for example, the existing multistage roots vacuum pump is a variable-volume dry vacuum pump and consists of a pair of multistage rotors arranged on parallel shafts in a pump body, and the gears at the shaft ends drive the synchronous reverse operation. The claw-type pump does not contain liquid media such as oil and the like in the pump cavity in the air pumping process, and has no pollution to the pumped container and the working environment, so the claw-type pump is widely applied to the semiconductor, electronic, chemical and pharmaceutical industries. However, the existing vacuum pump has no structure for exhausting gas near both ends simultaneously or exhausting gas near both ends simultaneously.
The vacuum pump with the existing structure is large in size, the number of internal parts is large, the stability of equipment operation is difficult to guarantee, the axial force borne by the rotor is large, and the stability of equipment exhaust is insufficient.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a multi-stage Roots vacuum pump which can reduce the volume of the pump, reduce the axial force of a rotor and increase the stability of equipment.
Embodiments of the utility model may be implemented as follows:
the utility model provides a multistage roots vacuum pump, which comprises:
the cavity comprises an air inlet cavity, a primary compression cavity and a secondary compression cavity which are sequentially communicated, the number of the primary compression cavities is two, and the two primary compression cavities are symmetrical relative to the middle planes of the two primary compression cavities;
two rotors are installed in the cavity, are meshed with each other and rotate in a synchronous reverse direction, and comprise an air inlet rotor, a first-level Roots rotor and a second-level Roots rotor which are respectively located in an air inlet cavity, a first-level compression cavity and a second-level compression cavity.
The multistage roots vacuum pump provided by the embodiment of the utility model has the beneficial effects that:
the two first-stage compression cavities are in a symmetrical form relative to the middle planes of the two first-stage compression cavities, so that the two first-stage Roots rotors of the rotors are also in a symmetrical form relative to the middle planes of the two first-stage compression cavities, the size of the equipment can be reduced, the axial force borne by the rotors can be effectively reduced, and the stability of the equipment is improved.
In an alternative embodiment, the inlet chamber communicates with the two primary compression chambers via two first channels, respectively, which are symmetrical with respect to the mid-plane of the two primary compression chambers.
Therefore, the two first channels are symmetrical relative to the middle planes of the two primary compression cavities, the stress on two ends of the rotor is further balanced, and the stability of the rotor in operation is improved.
In an alternative embodiment, the two primary compression chambers and the two secondary compression chambers are respectively communicated through two second passages, and the two second passages are in a symmetrical form relative to the middle planes of the two primary compression chambers.
Therefore, the two second channels are symmetrical relative to the middle planes of the two primary compression cavities, so that the stress on the two ends of the rotor is further balanced, and the stability of the rotor in operation is improved.
In an alternative embodiment, the number of the air inlet cavity is one, the air inlet cavity is located between the two primary compression cavities, and the two secondary compression cavities are respectively located at the outer sides of the two primary compression cavities.
In an alternative embodiment, the number of secondary compression chambers is two, the two secondary compression chambers being symmetrical with respect to the mid-plane of the two primary compression chambers.
Therefore, the two secondary compression cavities are symmetrical relative to the middle planes of the two primary compression cavities, the size of the equipment is further reduced, the axial force borne by the rotor is reduced, and the stability of the equipment is improved.
In an alternative embodiment, the mid-plane of the inlet chamber coincides with the mid-planes of the two primary compression chambers.
Therefore, the cavity distribution inside the cavity and the distribution of the lobes of the rotor are both in a symmetrical form, the size of the equipment is reduced to the maximum extent, the axial force borne by the rotor is reduced, and the stability of the equipment is improved.
In an optional embodiment, the second-stage compression cavity is an exhaust cavity, the cavity further comprises two exhaust passages, the two exhaust passages are respectively communicated with the two second-stage compression cavities, and the two exhaust passages are symmetrical relative to the middle planes of the two first-stage compression cavities.
Therefore, the two exhaust passages are symmetrical relative to the middle planes of the two primary compression cavities, the size of the equipment is further reduced, the axial force borne by the rotor is reduced, and the stability of the equipment is improved.
In an alternative embodiment, the number of the air inlet cavities is two, the two air inlet cavities are respectively positioned at the outer sides of the two primary compression cavities, and the two air inlet cavities are in a symmetrical form relative to the middle planes of the two primary compression cavities.
Like this, multistage roots vacuum pump is the form that both ends were admitted air, the centre is given vent to anger, and two admit air the chamber and be the symmetry form for the midplane of two one-level compression chambers, can reduce the volume of equipment, can also reduce the axial force that the rotor bore effectively, improve the stability of equipment.
In an optional embodiment, the cavity further includes two inlet channels, the two inlet channels are respectively communicated with the two inlet cavities, and the two inlet channels are in a symmetrical form relative to the middle planes of the two primary compression cavities.
Therefore, the two air inlet channels are symmetrical relative to the middle planes of the two primary compression cavities, the stress on the two ends of the rotor is further balanced, and the stability of the rotor in operation is improved.
In an alternative embodiment, the two-stage compression cavity is an exhaust cavity, the number of the two-stage compression cavity is one, and the middle plane of the two-stage compression cavity is coincident with the middle planes of the two primary compression cavities.
Therefore, the cavity distribution inside the cavity and the distribution of the lobes on the rotor are both in a symmetrical form, the size of the equipment is reduced to the maximum extent, the axial force borne by the rotor is reduced, and the stability of the equipment is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic external view of a multistage Roots vacuum pump according to a first embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of the multi-stage Roots vacuum pump of FIG. 1 taken along section line A-A;
FIG. 3 is a schematic cross-sectional view of the multi-stage Roots vacuum pump of FIG. 1 taken along section line B-B;
FIG. 4 is a schematic cross-sectional view of a first view of a multistage Roots vacuum pump provided in accordance with a second embodiment of the present invention;
fig. 5 is a schematic sectional view of a second view of the multistage roots vacuum pump according to the second embodiment of the present invention.
Icon: 100-multi-stage Roots vacuum pump; 110-a cavity; 111-an air intake chamber; 112-one stage compression chamber; 113-a secondary compression chamber; 114-a first channel; 115-a second channel; 116-an inlet duct; 117-exhaust duct; 118-an air inlet; 119-an exhaust port; 120-a rotor; 121-an inlet rotor; 122-first order roots rotors; 123-two-stage Roots rotor; 130-motor.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. are used for indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship which is usually placed when the utility model is used, it is only for convenience of describing the present invention and simplifying the description, but it is not necessary to indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and be operated, and thus, it should not be construed as limiting the present invention.
Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
First embodiment
Referring to fig. 1 and 2, the present embodiment provides a multi-stage roots vacuum pump 100, the multi-stage roots vacuum pump 100 is in a structure form of middle air intake and two-end air exhaust, and the multi-stage roots vacuum pump 100 includes a chamber 110, a rotor 120 and a motor 130.
The cavity 110 includes an air inlet cavity 111, a first-stage compression cavity 112 and a second-stage compression cavity 113 which are sequentially communicated, the number of the first-stage compression cavities 112 is two, the two first-stage compression cavities 112 are symmetrical with respect to the middle plane of the two first-stage compression cavities, the number of the air inlet cavity 111 is one, the air inlet cavity 111 is located between the two first-stage compression cavities 112, the middle plane of the air inlet cavity 111 coincides with the middle planes of the two first-stage compression cavities 112, and an air inlet 118 is formed in the side wall of the air inlet cavity 111 (see fig. 3).
The two second-stage compression chambers 113 are located outside the two first-stage compression chambers 112, respectively. The number of the second-stage compression chambers 113 is two, and the two second-stage compression chambers 113 are in a symmetrical form with respect to the mid-planes of the two first-stage compression chambers 112.
The two rotors 120 are mounted in the chamber 110, the two rotors 120 are engaged with each other and rotate in opposite directions, the rotors 120 include an air inlet rotor 121, a first-stage roots rotor 122 and a second-stage roots rotor 123, and the air inlet rotor 121, the first-stage roots rotor 122 and the second-stage roots rotor 123 are respectively located in the air inlet chamber 111, the first-stage compression chamber 112 and the second-stage compression chamber 113.
The motor 130 is installed outside the cavity 110, the motor 130 is in transmission connection with one of the rotors 120, and one of the rotors 120 can be in transmission connection with the other rotor 120 through a gear, so that synchronous reverse rotation of the two rotors 120 is realized.
Referring to fig. 3, the intake chamber 111 and the two first-stage compression chambers 112 are respectively communicated through two first passages 114, and the two first passages 114 are symmetrical with respect to a middle plane of the two first-stage compression chambers 112.
The two first-stage compression chambers 112 and the two second-stage compression chambers 113 are respectively communicated through two second passages 115, and the two second passages 115 are in a symmetrical form with respect to a mid-plane of the two first-stage compression chambers 112.
The second-stage compression cavity 113 is an exhaust cavity, the cavity 110 further comprises two exhaust passages 117, the two exhaust passages 117 are respectively communicated with the two second-stage compression cavities 113, and the two exhaust passages 117 are symmetrical relative to the middle planes of the two first-stage compression cavities 112.
The working principle of the multistage roots vacuum pump 100 provided in this embodiment is as follows:
the motor 130 drives one rotor 120 to rotate, one rotor 120 drives the other rotor 120 to rotate through a gear, the two rotors 120 rotate in opposite directions, the air to be pumped enters the air inlet cavity 111 from the air inlet 118, enters the two first-stage compression cavities 112 through the two first channels 114 respectively, the air entering the first-stage compression cavities 112 rotates through the rotors 120, enters the two second-stage compression cavities 113 through the two second channels 115 respectively, and finally is discharged out of the pump through the two exhaust channels 117.
The multistage roots vacuum pump 100 provided by the embodiment of the utility model has the beneficial effects that:
the cavities in the cavity 110 are arranged in a symmetrical mode, so that the lobes on the rotor 120 are also in a symmetrical mode, the size of the equipment can be reduced, the number of parts can be reduced, the axial force borne by the rotor 120 can be effectively reduced, and the stability of the equipment can be improved.
Second embodiment
Referring to fig. 4, the present embodiment provides a multi-stage roots vacuum pump 100, the multi-stage roots vacuum pump 100 is in a structure form of middle exhaust and two-end air intake, and the multi-stage roots vacuum pump 100 includes a chamber 110, a rotor 120 and a motor 130.
The cavity 110 comprises two air inlet cavities 111, a first-stage compression cavity 112 and a second-stage compression cavity 113 which are sequentially communicated, the two air inlet cavities 111 are respectively positioned at the outer sides of the two first-stage compression cavities 112, and the two air inlet cavities 111 are in a symmetrical form relative to the middle planes of the two first-stage compression cavities 112. The two inlet ports 116 are respectively communicated with the two inlet chambers 111, and the two inlet ports 116 are in a symmetrical form with respect to the mid-planes of the two first-stage compression chambers 112. The second-stage compression cavity 113 is an exhaust cavity, the side wall of the second-stage compression cavity 113 is provided with an exhaust port 119, the number of the second-stage compression cavities 113 is one, and the middle plane of the second-stage compression cavity 113 coincides with the middle planes of the two first-stage compression cavities 112.
Referring to fig. 5, the two intake chambers 111 and the two first-stage compression chambers 112 are respectively communicated through two first passages 114, and the two first passages 114 are symmetrical with respect to a middle plane of the two first-stage compression chambers 112. The two first-stage compression chambers 112 and the two second-stage compression chambers 113 are respectively communicated through two second passages 115, and the two second passages 115 are in a symmetrical form with respect to a mid-plane of the two first-stage compression chambers 112.
The working principle of the multistage roots vacuum pump 100 provided in this embodiment is as follows:
the motor 130 drives one rotor 120 to rotate, one rotor 120 drives the other rotor 120 to rotate through a gear, the two rotors 120 rotate in opposite directions, the pumped fluid enters the two air inlet cavities 111 from the two air inlet channels 116, respectively enters the two primary compression cavities 112 through the two first channels 114, the air entering the two primary compression cavities 112 rotates through the inner rotor 120, enters the two secondary compression cavities 113 through the two second channels 115, and finally is discharged out of the pump through the exhaust port 119.
The multistage roots vacuum pump 100 provided by the embodiment of the utility model has the beneficial effects that:
the cavities in the cavity 110 are arranged in a symmetrical mode, so that the lobes on the rotor 120 are also in a symmetrical mode, the size of the equipment can be reduced, the number of parts can be reduced, the axial force borne by the rotor 120 can be effectively reduced, and the stability of the equipment can be improved.
It is understood that the number of stages of the cavity 110 provided in the above embodiments may also be increased to four stages, five stages, etc., and may be increased more according to the requirement, the rotor 120 is a multi-stage roots rotor 120, the profile of the rotor 120 may be any profile, and the number of lobes of the rotor 120 may be any number of lobes.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A multi-stage roots vacuum pump, comprising:
the cavity body (110) comprises an air inlet cavity (111), first-stage compression cavities (112) and second-stage compression cavities (113) which are sequentially communicated, the number of the first-stage compression cavities (112) is two, and the two first-stage compression cavities (112) are in a symmetrical form relative to the middle planes of the two first-stage compression cavities;
the two rotors (120) are mounted in the cavity (110), the two rotors (120) are meshed with each other and synchronously rotate in opposite directions, the rotors (120) comprise an air inlet rotor (121), a first-stage Roots rotor (122) and a second-stage Roots rotor (123), and the air inlet rotor (121), the first-stage Roots rotor (122) and the second-stage Roots rotor (123) are respectively located in the air inlet cavity (111), the first-stage compression cavity (112) and the second-stage compression cavity (113).
2. A multi-stage roots vacuum pump according to claim 1, wherein the gas inlet chamber (111) communicates with the two primary compression chambers (112) through two first passages (114), respectively, the two first passages (114) being in a symmetrical form with respect to a mid-plane of the two primary compression chambers (112).
3. A multi-stage roots vacuum pump according to claim 1, wherein the two primary compression chambers (112) and the two secondary compression chambers (113) are respectively communicated through two second passages (115), the two second passages (115) being in a symmetrical form with respect to a mid-plane of the two primary compression chambers (112).
4. The multi-stage roots vacuum pump according to claim 1, wherein the number of the gas inlet chamber (111) is one, the gas inlet chamber (111) is located between two of the primary compression chambers (112), and two of the secondary compression chambers (113) are located outside the two primary compression chambers (112), respectively.
5. A multi-stage Roots vacuum pump according to claim 4, wherein the number of the two-stage compression chambers (113) is two, and the two-stage compression chambers (113) are in a symmetrical form with respect to a mid-plane of the two one-stage compression chambers (112).
6. A multi-stage Roots vacuum pump according to claim 4, wherein the mid-plane of the inlet chamber (111) coincides with the mid-planes of the two primary compression chambers (112).
7. A multi-stage Roots vacuum pump according to claim 4, wherein the secondary compression chamber (113) is a discharge chamber, and the chamber body (110) further comprises two discharge passages (117), the two discharge passages (117) communicating with the two secondary compression chambers (113), respectively, the two discharge passages (117) being symmetrical with respect to a mid-plane of the two primary compression chambers (112).
8. The multistage roots vacuum pump according to claim 1, wherein the number of the gas inlet chambers (111) is two, two gas inlet chambers (111) are respectively located outside two primary compression chambers (112), and the two gas inlet chambers (111) are in a symmetrical form with respect to a mid-plane of the two primary compression chambers (112).
9. The multi-stage roots vacuum pump according to claim 8, wherein the chamber body (110) further comprises two inlet ports (116), the two inlet ports (116) respectively communicate with the two inlet chambers (111), and the two inlet ports (116) are symmetrical with respect to a mid-plane of the two primary compression chambers (112).
10. A multi-stage roots vacuum pump according to claim 8, wherein the two-stage compression chambers (113) are exhaust chambers, the number of the two-stage compression chambers (113) is one, and the mid-planes of the two-stage compression chambers (113) coincide with the mid-planes of the two one-stage compression chambers (112).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220375290.8U CN216767759U (en) | 2022-02-23 | 2022-02-23 | Multistage roots vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220375290.8U CN216767759U (en) | 2022-02-23 | 2022-02-23 | Multistage roots vacuum pump |
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| Publication Number | Publication Date |
|---|---|
| CN216767759U true CN216767759U (en) | 2022-06-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220375290.8U Active CN216767759U (en) | 2022-02-23 | 2022-02-23 | Multistage roots vacuum pump |
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|---|---|
| CN (1) | CN216767759U (en) |
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- 2022-02-23 CN CN202220375290.8U patent/CN216767759U/en active Active
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