KR20210088631A - 적어도 하나의 물체의 포지션을 결정하기 위한 검출기 및 방법 - Google Patents

적어도 하나의 물체의 포지션을 결정하기 위한 검출기 및 방법 Download PDF

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Publication number
KR20210088631A
KR20210088631A KR1020217017008A KR20217017008A KR20210088631A KR 20210088631 A KR20210088631 A KR 20210088631A KR 1020217017008 A KR1020217017008 A KR 1020217017008A KR 20217017008 A KR20217017008 A KR 20217017008A KR 20210088631 A KR20210088631 A KR 20210088631A
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KR
South Korea
Prior art keywords
detector
light beam
optical sensor
sensor
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020217017008A
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English (en)
Korean (ko)
Inventor
세바스티안 발로우치
셀랄 모한 오에구엔
로베르트 센트
잉마르 브루더
Original Assignee
트리나미엑스 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 트리나미엑스 게엠베하 filed Critical 트리나미엑스 게엠베하
Publication of KR20210088631A publication Critical patent/KR20210088631A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020217017008A 2018-11-05 2019-11-04 적어도 하나의 물체의 포지션을 결정하기 위한 검출기 및 방법 Withdrawn KR20210088631A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18204274 2018-11-05
EP18204274.7 2018-11-05
PCT/EP2019/080107 WO2020094572A1 (en) 2018-11-05 2019-11-04 Detector and method for determining a position of at least one object

Publications (1)

Publication Number Publication Date
KR20210088631A true KR20210088631A (ko) 2021-07-14

Family

ID=64172339

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217017008A Withdrawn KR20210088631A (ko) 2018-11-05 2019-11-04 적어도 하나의 물체의 포지션을 결정하기 위한 검출기 및 방법

Country Status (6)

Country Link
US (1) US11892279B2 (https=)
EP (1) EP3877725B1 (https=)
JP (1) JP7532356B2 (https=)
KR (1) KR20210088631A (https=)
CN (1) CN112955710A (https=)
WO (1) WO2020094572A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102562630B1 (ko) * 2021-04-13 2023-08-02 조선대학교산학협력단 기하 위상 렌즈를 기반으로 하는 색공초점 센서
CN114280774A (zh) * 2021-12-30 2022-04-05 深圳立仪科技有限公司 一种带光谱共焦测量功能的多功能装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654231B2 (ja) 1986-12-18 1994-07-20 株式会社ミツトヨ 非接触変位計
JPH0444285A (ja) 1990-06-08 1992-02-14 Omron Corp 半導体発光素子
JPH064611U (ja) * 1992-06-25 1994-01-21 株式会社キーエンス 光学式距離測定装置
US5790242A (en) 1995-07-31 1998-08-04 Robotic Vision Systems, Inc. Chromatic optical ranging sensor
DE102004022454B4 (de) * 2004-05-06 2014-06-05 Carl Mahr Holding Gmbh Messeinrichtung mit optischer Tastspitze
DE102008029459B4 (de) 2008-06-20 2011-07-14 MEL Mikroelektronik GmbH, 85386 Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
WO2014023344A1 (de) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Verbesserter chromatischer sensor und verfahren
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3222964B1 (en) 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
EP3542179B1 (en) 2016-11-17 2021-03-24 trinamiX GmbH Detector for optically detecting at least one object
JP6819376B2 (ja) 2017-03-14 2021-01-27 オムロン株式会社 変位計測装置
US11719818B2 (en) * 2017-03-16 2023-08-08 Trinamix Gmbh Detector for optically detecting at least one object

Also Published As

Publication number Publication date
EP3877725A1 (en) 2021-09-15
WO2020094572A1 (en) 2020-05-14
US20220042785A1 (en) 2022-02-10
JP2022506691A (ja) 2022-01-17
US11892279B2 (en) 2024-02-06
EP3877725B1 (en) 2025-07-23
JP7532356B2 (ja) 2024-08-13
CN112955710A (zh) 2021-06-11

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PC1202 Submission of document of withdrawal before decision of registration

St.27 status event code: N-1-6-B10-B11-nap-PC1202