KR20210074475A - Both-sided deposition type roll-to-roll graphine film manufacturing apparatus provided with tension modulation unit in the lower - Google Patents

Abstract

The present invention relates to an apparatus for preparing a double-sided deposition type roll-to-roll graphene film provided with a tension control unit at a lower portion thereof and, more particularly, to an apparatus for preparing a double-sided deposition type roll-to-roll graphene film provided with a tension control unit at a lower portion thereof, which maintains a certain tension on a catalytic metal film during a process of manufacturing the graphene film, to prevent damage to the catalytic metal film on which the graphene is deposited, and facilitates cooling of the catalytic metal film on which the graphene is deposited. With regard to the apparatus for preparing a double-sided deposition type roll-to-roll graphene film provided with a tension control unit at a lower portion thereof for depositing graphene while transferring the catalytic metal film in a roll-to-roll method, the present invention provides the apparatus for preparing the double-sided deposition type roll-to-roll graphene film provided with the tension control unit at the lower portion thereof, which comprises: an upper chamber including a supply roller for supplying a catalytic metal film to a deposition chamber, and a winding roller for winding the catalytic metal film on which graphene is deposited in the deposition chamber; a deposition chamber connected to a lower portion of the upper chamber and having graphene deposited on the catalytic metal film; a direction changing roller for changing a direction of the catalytic metal film in the deposition chamber; and a tension control unit for constantly adjusting a tension acting on the catalytic metal film.

Description

Both-sided deposition type roll-to-roll graphene film manufacturing apparatus provided with tension modulation unit in the lower}

The present invention relates to a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus having a tension control unit at the lower portion, and more particularly, a catalyst on which graphene is deposited by maintaining a constant tension on the catalyst metal film during the manufacturing process of the graphene film. It relates to a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus having a tension control unit provided at the bottom to prevent damage to the metal film and to facilitate cooling of the catalytic metal film on which graphene is deposited.

In general, graphene is a material in which carbon is connected to each other in a hexagonal shape to form a honeycomb-shaped two-dimensional planar structure, and its thickness is very thin, transparent, and has very high electrical conductivity. Attempts have been made to apply graphene to a transparent display or a flexible display by using these characteristics.

A conventional method for manufacturing a graphene film is described in Patent Publication No. 10-2012-0111659 (a film manufacturing method containing graphene, published on October 10, 2012).

In the above publication, for mass production, graphene is formed while transferring the catalytic metal film in one direction in a roll-to-roll method, and the transfer film is applied to one side of the catalytic metal film on which graphene is not formed. It is described with respect to the step of forming, and the mechanical configuration required for each step is described.

Specifically, a winding roller and a transport roller for winding and transporting a catalytic metal film, and a graphene formation space for depositing graphene by supplying a carbon supply gas to the catalytic metal film are described.

The prior art suggests a roll-to-roll type graphene film manufacturing apparatus, but there is a problem in that the catalyst metal film is damaged due to the difference in roller speed between the feed roller and the take-up roller.

(Document 1) Patent Publication No. 10-2012-0061224 (published on June 13, 2012) (Document 2) Registered Patent Publication No. 10-1262327 (Registered on June 2, 2013) (Document 3) Registered Patent Publication No. 10-1874317 (Registered on June 28, 2018) (Document 4) Registered Patent Publication No. 10-1760653 (Registered on July 18, 2017)

In order to solve the above problems, the present invention is a roll-to-roll method for manufacturing a graphene film in a manufacturing apparatus, provided with a tension control unit in the lower portion of a deposition chamber for depositing graphene between the supply roller and the winding roller An object of the present invention is to provide a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the bottom to prevent damage to the catalytic metal film by allowing the tension acting on the moving catalytic metal film to constantly act.

In addition, the present invention is provided with a guide roller capable of guiding the movement of the catalytic metal film on which graphene is deposited, thereby preventing damage to the catalytic metal film due to torsion, etc. occurring during the movement of the catalytic metal film. An object of the present invention is to provide an apparatus for manufacturing a double-sided deposition-type roll-to-roll graphene film having a control unit provided at the lower portion.

In addition, an object of the present invention is to provide a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the bottom capable of lowering the temperature of the film as quickly as possible in the process of discharging the graphene-deposited film.

In addition, an object of the present invention is to provide a double-sided deposition type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the lower portion that can prevent the catalytic metal film on which graphene is deposited from sagging due to its own weight.

In order to achieve the above object, the present invention prepares a double-sided deposition type roll-to-roll graphene film having a tension control unit at the bottom for depositing graphene while transporting a catalytic metal film in a roll-to-roll manner. An apparatus comprising: an upper chamber provided with a supply roller for supplying a catalytic metal film to a deposition chamber, and a winding roller for winding a catalytic metal film on which graphene is deposited in the deposition chamber; a deposition chamber connected to a lower portion of the upper chamber and in which graphene is deposited on the catalytic metal film; and a direction changing roller for changing the direction of the catalytic metal film in the deposition chamber, and a tension adjusting unit for constantly adjusting the tension acting on the catalytic metal film; It provides a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided at the bottom.

The upper chamber in the present invention, the upper chamber body; a supply roller mounted inside the upper chamber body to supply a catalyst metal film; a first upper direction conversion roller mounted on one side of the supply roller to convert the direction of the catalyst metal film supplied from the supply roller downward; It is mounted on the lower part of the first upper direction conversion roller to supply the catalytic metal film supplied from the first upper direction conversion roller to the lower side at a constant speed, and to prepare the catalytic metal film whose direction is converted to the upper side by the direction conversion roller 2 an upper guide roller for constantly supplying the upper direction changing roller; a second upper direction conversion roller for supplying the winding roller by changing the direction of the catalyst metal film supplied from the upper guide roller; and a winding roller for winding the catalyst metal film supplied from the second upper direction conversion roller.

In the present invention, the upper guide roller part includes a main guide roller provided with a driving force, and a pair of a pair for supplying to the upper or lower portions while in close contact with the main guide roller on both sides of the main guide roller to give a certain tension to the catalytic metal film. It is characterized in that it is composed of an auxiliary guide roller.

In the present invention, the deposition chamber includes: an outer body of the deposition chamber; a deposition chamber inner body formed inside the deposition chamber outer body; a heater provided in the inner space of the inner body of the deposition chamber; a plurality of lower guide rollers for guiding the catalytic metal film from both sides of the heater to be constantly transferred downward and to be transferred upward by being changed in a direction change roller; and a cooling tube installed on both sides of the inner body of the deposition chamber to cool the catalytic metal film on which the graphene is deposited by cooling the deposition chamber.

In the present invention, the tension control unit includes: a direction changing roller for changing the direction of the catalyst metal film from the bottom to the top; The direction conversion roller is hinge-coupled to the upper end, and the direction conversion roller support portion is mounted with a fixed counterweight at the lower end; a fixed counterweight mounted at the lower end of the direction conversion roller support to maintain the direction conversion roller support in an upright state, and to give tension to the catalytic metal film transferred along the direction conversion roller; One side is rotatably mounted to the direction changing roller support, the other side is a link fixed to the rotation shaft; The other side of the one side link is fixedly mounted so that a counterclockwise moment acts, and one side of the other side link is fixedly mounted so that a clockwise moment acts on a rotating shaft; a rotary shaft support for rotatably supporting the rotary shaft; One side is fixedly mounted to the rotating shaft, the other side is a link with an adjustable counterweight is mounted; and an adjustable counterweight mounted on the other link to adjust the moment while moving from one side to the other.

The present invention has the effect of preventing damage to the catalytic metal film on which graphene is deposited by providing a tension control unit so that a constant tension can be maintained in the catalytic metal film.

In addition, since the upper chamber and the deposition chamber are formed in an upright type, the present invention prevents the catalytic metal film from sagging by its own weight, thereby preventing damage to graphene.

In addition, the present invention has an effect of increasing productivity because heat inside the deposition chamber can be quickly cooled through the cooling tube of the deposition chamber.

1 is an overall perspective view of a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit in the lower portion according to the present invention.
Figure 2 is a perspective view showing an upper chamber according to the present invention.
Figure 3 is a perspective view of a state in which the roll support plate is removed from the upper chamber of Figure 2;
4 is a perspective view showing a deposition chamber according to the present invention.
5 is a perspective view of a state in which a side plate of an inner body of the deposition chamber is removed from the deposition chamber of FIG. 4;
6 is a perspective view of a tension adjusting unit according to the present invention.
7 is a perspective view showing the tension control unit of FIG. 6 from another angle;
FIG. 8 is a force distribution diagram illustrating forces acting on the tension adjusting unit of FIG. 6 .

Hereinafter, embodiments of the present invention in which the above object can be specifically realized will be described in detail with reference to the accompanying drawings. In the description of the present embodiments, the same names and symbols are used for the same components, and an additional description thereof will be omitted.

1 is an overall perspective view of a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus having a tension control unit provided at a lower portion according to the present invention, FIG. 2 is a perspective view illustrating an upper chamber according to the present invention, and FIG. It is a perspective view of a state in which the roll support plate is removed from the upper chamber, FIG. 4 is a perspective view showing a deposition chamber according to the present invention, and FIG. 5 is a perspective view of a state in which the side plate of the inner body of the deposition chamber is removed from the deposition chamber of FIG. 6 is a perspective view of the tension control unit according to the present invention, FIG. 7 is a perspective view showing the tension control unit of FIG. 6 from another angle, and FIG. 8 is a force distribution diagram illustrating forces acting on the tension control unit of FIG. 6 .

1 is an overall perspective view of a double-sided deposition-type roll-to-roll graphene film manufacturing apparatus 1 having a tension control unit provided at a lower portion according to the present invention. As shown in the figure, the graphene film manufacturing apparatus 1 includes an upper chamber 10 , a deposition chamber 20 , and a tension adjusting unit 30 for maintaining the tension of the catalyst metal film inside the deposition chamber 20 . ) and the upper chamber 10 and the support part 40 for supporting the deposition chamber 20 .

2 to 3 are views of the upper chamber 10 of the graphene film manufacturing apparatus 1 according to the present invention. As shown in FIG. 2, the upper chamber 10 includes an upper chamber body 11, a supply roller 12a and a winding roller 12b, which are mounted symmetrically inside the upper chamber body 11, and a supply roller ( The first upper direction conversion roller 13a for converting the direction of the catalyst metal film F transferred in 12a) to the lower direction, and the first upper direction conversion roller 13a are mounted symmetrically with the catalyst metal film (F) A second upper direction conversion roller 13b for converting the upward transfer of the to the winding roller 12b side, and an upper guide roller part 14 for guiding the catalyst metal film F transferred from the upper part to the lower part and from the lower part to the upper part ) is composed of The upper chamber body 11 is formed with a pair of openings 111a and 111b to which doors (not shown) are mounted on both sides, and a roll on which the catalyst metal film F is wound through one opening 111a. A roll mounted on the supply roller 12a and on which a catalyst metal film on which graphene is deposited is wound through the other opening 111b is mounted on the winding roller 12b. The supply roller 12a and the winding roller 12b are driven by a motor mounted on the rear side. A through hole 112 is formed in the lower portion of the upper chamber body 11 so that the catalyst metal film can be transferred. In addition, the guide roller unit 14 is in close contact with the main guide roller 141 on both sides of the main guide roller 141 and the main guide roller 141 to which the driving force is provided, giving a certain tension to the catalytic metal film (F) and the upper part Or it is composed of a pair of auxiliary guide rollers (142a, 142b) for supplying to the lower portion. The main guide roller 141 is driven by a motor mounted on the rear side to apply tension to the catalyst metal film. The supply roller 12a and the winding roller 12b, the first upper direction conversion roller 13a, the second upper direction conversion roller 13b, and the upper guide roller part 14 are roller support plates mounted on the front and rear of the rollers. (17a, 17b), the supply roller (12a) and the winding roller (12b) are the supply roller support plate (18a) and the winding roller support plate (18b) at the lower part of the roller in consideration of the volume of the roll The roller support plate ( 17a, 17b) is fixedly mounted and supported. In addition, the first upper direction conversion roller 13a, the second upper direction conversion roller 12b and the upper guide roller part 14 are rotatably supported by the auxiliary roller support plate 15, and the auxiliary roller support plate 15a , 15b) is supported by being mounted on the roller support plates 17a, 17b. The upper guide roller unit 14 is composed of a main guide roller 141 and a pair of auxiliary guide rollers 142a and 142b. The main guide roller 141 and the auxiliary guide rollers 142a and 142b are in close contact with each other to form a catalyst. While applying a certain tension to the metal film (F), the catalyst metal film (F) is transferred to the lower portion or upper portion. A connection body 16 is formed in the lower portion of the upper chamber body 11 and is connected to the deposition chamber 20 through a through hole 112, and a catalyst metal film ( F) is transferred up and down. The first upper direction conversion roller 13a and the second upper direction conversion roller 13b are driven by a motor mounted on the rear side, and the first upper direction conversion roller 13a is a catalyst supplied from the supply roller 12a A certain tension is applied to the metal film and transported downward, and the second upper direction shifting roller 13b transports the catalytic metal film to the winding roller 12b with a constant tension.

4 and 5 are views of the deposition chamber 20 . As shown in the figure, the deposition chamber 20 includes a deposition chamber outer body 21 , a deposition chamber inner body 22 formed inside the deposition chamber outer body 21 , and a deposition chamber inner body 22 . ) a heater 24 provided in the inner space, a plurality of one-side lower guide rollers 23a for guiding the catalyst metal film F to be uniformly transported downward from both sides of the heater 24, and a direction changing roller 31 ), a plurality of lower guide rollers 23b on the other side for guiding so that the direction is changed to be transferred upward, and a catalyst on which graphene is deposited by cooling the deposition chamber 20 and installed inside both sides of the deposition chamber inner body 22 . Consists of a pair of cooling tubes (25a, 25b) for cooling the metal film (F). A door (not shown) is mounted on the front opening 211 of the outer body 21 of the deposition chamber, and may be used to maintain the inside of the deposition chamber or to adjust tension. The catalytic metal film supplied or discharged through the upper portion of the outer body 21 of the deposition chamber is directed downward or upward through the catalytic metal film through holes 221a and 221b formed on the upper side of the inner body 22 of the deposition chamber. are transported In addition, in the inner space of the inner body 22 of the deposition chamber 20, the catalytic metal film F supplied from the supply roller 12a and transferred to the winding roller 12b is turned from the downward direction to the upward direction. 31 is mounted to protrude through the through hole 222, and the direction conversion roller 31 is a component of the tension control unit 30, and the catalyst metal film (F) is transported while wrapping the direction conversion roller 31 It acts as a factor that provides tension to the A process gas for deposition is supplied to the inner space of the inner body 22 of the deposition chamber, and while the process gas is heated by a heater, graphene is deposited on the catalytic metal film.

6 and 7 show the tension adjusting unit 30 according to the present invention. The tension control unit 30 is rotatably coupled to a direction conversion roller 31 for switching the transfer direction of the catalyst metal film F from the lower portion to the upper portion, and the direction conversion roller 31 is rotatably coupled to the upper end, and is fixed to the lower end The counterweight 33 is mounted on the direction conversion roller support 32, and the direction conversion roller support 32 is mounted on the lower end of the direction conversion roller support 32 to maintain the upright state, while the direction conversion roller 31 A fixed counterweight 33 for giving tension to the catalyst metal film F transported along The one side link 34 to be mounted and the other side of the one side link 34 are fixedly mounted so that a counterclockwise moment acts, and one side of the other side link 36 is fixedly mounted on the rotating shaft 35 on which a clockwise moment acts. ) and a rotary shaft support 38 for rotatably supporting the rotary shaft 35, one side is fixedly mounted to the rotary shaft 35 and the other side link 36 on which an adjustable counterweight 37 is mounted, and the other link It is mounted on (36) and consists of an adjustment counterweight (37) for adjusting the moment while moving from one side to the other. The rotary shaft support 38 includes a horizontal support 382 fixedly mounted on the support 40 and a vertical support 381 on which the rotary shaft 35 is rotatably mounted. The other link 36 is further formed with a transfer slot 361 for changing the moment while moving the control counterweight 37 from one side to the other side. Accordingly, the tension required for the catalyst metal film can be used while changing little by little as needed.

FIG. 8 shows a distribution diagram of a force for adjusting the tension acting on the catalyst metal film in the tension adjusting unit 30 .

The moment M generated in the rotation shaft 35 is a load formed by the direction conversion roller 31 and the direction conversion roller support 32 and the fixed counterweight 33 mounted on the end of the one side link 34 ( The moment M1 by F1) and the moment M2 by the load F2 by the control counterweight 37 mounted on the other side link 36 act opposite to each other. That is, the moment M1 has a rotational force rotating in a counterclockwise direction, and the moment M2 has a rotational force rotating in a clockwise direction. Accordingly, the moment M due to the difference between M1-M2 acts on the rotation shaft 35 .

M = M1 - M2 = F1 * R1* cos θ - F2 * R2 = F3 * R1* cos θ --- [Equation 1]

F3 = T1 + T2 --- [Equation 2]

Looking at the result of Equation 2, in the case of F3 > T1 + T2, since the tension acting on the catalyst metal film is smaller than the downward force F3, the one-side link 34 goes down. The case in which one side link 34 goes down may occur when the catalyst metal film supplied from the supply roller 12a is supplied faster than the speed at which it is wound by the winding roller 12b. In this case, one side link 34 goes down to the point where F3 and T1 + T2 become equal to each other. In addition, the case of F3 < T1 + T2 may occur when the speed of the catalytic metal film wound by the winding roller 12b is higher than that of the supplied catalytic metal film. When the tension (T1 + T2) is greater than that of F3, the catalyst Excessive tension is applied to the metal film, and accordingly, the catalyst metal film may be damaged. In this case, it is necessary to stop the supply roller (12a) and the winding roller (12b) to maintain a constant tension and then operate again. Therefore, in the tension adjusting unit 30 according to the present invention, when excessive tension is applied to the catalytic metal film, the catalytic metal film may be damaged. After solving the problem, it can be restarted. Accordingly, it may have an advantage that the manufacturing efficiency of graphene may be increased.

It is obvious to those of ordinary skill in the art that the present invention is not limited to the above embodiments and can be variously modified and modified within the scope without departing from the technical gist of the present invention. will be.

1: graphene film manufacturing device
10: upper chamber 11: upper chamber body
12a: supply roller 12b: take-up roller
13a: first upper direction conversion roller 13b: second upper direction conversion roller
14: upper guide roller part
15a, 15b: auxiliary roller support plate 16: connection body
17a, 17b: roller support plate
18a: supply roller support plate 18b: take-up roller support plate
20: deposition chamber 21: deposition chamber outer body
22: deposition chamber inner body 23a, 23b: lower guide roller
24: heater 25a, 25b: cooling tube
30: tension control unit 31: direction change roller
32: direction conversion roller support 33: fixed counterweight
34: one side link 35: rotation shaft
36: the other side link 37: adjustable counterweight
38: rotation shaft support

Claims (5)

In the double-sided deposition type roll-to-roll graphene film manufacturing apparatus provided at the bottom with a tension control unit for depositing graphene while transferring the catalytic metal film in a roll-to-roll method,
an upper chamber provided with a supply roller for supplying the catalytic metal film to the deposition chamber, and a winding roller for winding the catalytic metal film on which graphene is deposited in the deposition chamber;
a deposition chamber connected to a lower portion of the upper chamber and in which graphene is deposited on the catalytic metal film; and
a tension control unit including a direction changing roller for changing the direction of the catalytic metal film in the deposition chamber, and constantly adjusting a tension acting on the catalytic metal film;
A double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the bottom, characterized in that consisting of.
According to claim 1,
The upper chamber,
upper chamber body;
a supply roller mounted inside the upper chamber body to supply a catalyst metal film;
a first upper direction conversion roller mounted on one side of the supply roller to convert the direction of the catalyst metal film supplied from the supply roller downward;
It is mounted on the lower part of the first upper direction conversion roller to supply the catalytic metal film supplied from the first upper direction conversion roller to the lower side at a constant speed, and to prepare the catalytic metal film whose direction is converted to the upper side by the direction conversion roller 2 an upper guide roller for constantly supplying the upper direction changing roller;
a second upper direction conversion roller for supplying the winding roller by changing the direction of the catalyst metal film supplied from the upper guide roller; and
A double-sided deposition type roll-to-roll graphene film manufacturing apparatus having a tension control unit at the lower portion, characterized in that it consists of a winding roller for winding the catalyst metal film supplied from the second upper direction conversion roller.
3. The method of claim 2,
The upper guide roller part,
It is characterized in that it consists of a main guide roller provided with driving force, and a pair of auxiliary guide rollers that are in close contact with the main guide roller on both sides of the main guide roller and supply a certain tension to the catalyst metal film to the upper or lower parts A double-sided deposition type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the bottom.
According to claim 1,
The deposition chamber,
Deposition chamber outer body;
a deposition chamber inner body formed inside the deposition chamber outer body;
a heater provided in the inner space of the inner body of the deposition chamber;
a plurality of lower guide rollers for guiding the catalytic metal film from both sides of the heater to be constantly transferred downward and to be transferred upward by being changed in a direction change roller; and
a cooling tube installed inside both sides of the inner body of the deposition chamber to cool the catalytic metal film on which the graphene is deposited by cooling the deposition chamber;
A double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the lower portion, characterized in that it consists of.
According to claim 1,
The tension control unit,
a direction change roller for changing the direction of the catalyst metal film from the lower part to the upper part;
The direction conversion roller is hinge-coupled to the upper end, and the direction conversion roller support portion is mounted with a fixed counterweight at the lower end;
a fixed counterweight mounted at the lower end of the direction conversion roller support to maintain the direction conversion roller support in an upright state, and to give tension to the catalytic metal film transferred along the direction conversion roller;
One side is rotatably mounted to the direction changing roller support, the other side is a link fixed to the rotation shaft;
a rotating shaft to which the other side of the one side link is fixedly mounted so that a counterclockwise moment acts, and one side of the other side link is fixedly mounted so that a clockwise moment acts;
a rotary shaft support for rotatably supporting the rotary shaft;
One side is fixedly mounted to the rotation shaft, the other side is a link with an adjustable counterweight mounted on the other side; and
an adjustable counterweight mounted on the other link to adjust a moment while moving from one side to the other;
A double-sided deposition-type roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the bottom, characterized in that it consists of.

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