KR20210022897A - Burner for Scrubber - Google Patents

Abstract

The present invention is to provide a burner for a scrubber capable of reducing the generation of carbon monoxide and nitrogen oxides in the combustion process of waste gas. According to the present invention, disclosed is a burner for a scrubber comprising: a first nozzle having a tubular shape and a first body; a second nozzle having a tubular shape and a second body positioned to surround an outer circumferential surface of the first body; and a third nozzle having a tubular shape and a third body positioned to surround an outer circumferential surface of the second body.

Description

Burner for Scrubber{Burner for Scrubber}

The present invention relates to a burner for a scrubber mounted on a scrubber that treats waste gas generated in an electronics industry process.

Waste gases generated from electronic industry processes such as semiconductor production process, LCD production process or OLED production process are composed of a mixture of VOC, PFC gas, moisture and other foreign substances. The waste gas is generated a lot during a semiconductor etching process or a chemical vapor deposition process, and contains a gas that promotes global warming. In addition, the PPC gas contained in the waste gas is known to be a gas that is difficult to decompose during treatment. The PFC gas contained in the waste gas is treated by a heating method, an adsorption method, or a plasma type scrubber.

In general, the heating type scrubber includes a burner unit that generates a flame to heat waste gas, a reaction chamber that is mounted under the burner unit to generate by-product particles by burning and reacting the waste gas, and one side of the reaction chamber. Thus, it may include a water tank tank for collecting by-product particles and water-soluble waste gas. The burner unit may be decomposed by forming a flame using the supplied oxidizing agent and fuel and heating the waste gas. The waste gas may have different types and contents of the gas discharged depending on the process. Accordingly, the burner unit needs to form an appropriate flame according to the type of the waste gas for more efficient combustion of the waste gas.

An object of the present invention is to provide a burner for a scrubber capable of reducing the generation of carbon monoxide and nitrogen oxides in the combustion process of waste gas.

The scrubber burner of the present invention has a tubular shape and a second nozzle having a first nozzle having a first body and a tubular shape and a second body positioned so as to surround the outer circumferential surface of the first body, and the It characterized in that it comprises a third nozzle having a third body positioned so as to surround the outer circumferential surface of the second body.

In addition, in the scrubber burner of the present invention, the first nozzle injects an oxidizing agent, the second nozzle injects a fuel or a mixed gas in which a fuel and an oxidizing agent are mixed, and the third nozzle is an oxidizing agent or a mixture of the fuel and the oxidizing agent. The mixed gas can be injected. In this case, the oxidizing agent sprayed from the first nozzle may have a different content of oxygen from the oxidizing agent sprayed from the third nozzle.

In addition, the scrubber burner of the present invention is formed inside the first body and is formed between the first passage, which is a passage through which the oxidizing agent sprayed from the first nozzle flows, and between the outer circumferential surface of the first body and the inner circumferential surface of the second body. Is formed between the second passage through which the fuel injected from the second nozzle or a mixture gas of fuel and oxidant flows, and between the outer circumferential surface of the second main body and the inner circumferential surface of the third main body, A third passage through which the mixed gas flows may be provided.

In addition, the burner for a scrubber of the present invention may be positioned so that the first body, the second body, and the third body have the same central axis.

In addition, in the burner for a scrubber of the present invention, lower ends of the first body, the second body, and the third body may be positioned at the same height.

In addition, in the scrubber burner of the present invention, lower ends of the first body, the second body, and the third body may be positioned at different heights.

In addition, in the scrubber burner of the present invention, the lower ends of the first body and the second body are located at the same height, and the lower end of the third body may be located lower than the lower ends of the first body and the second body. have.

In addition, the scrubber burner of the present invention is positioned between the first body and the second body to maintain a separation distance between the first body and the second body, and between the second body and the third body. It may further include a second spacer member located at to maintain a spaced distance between the second body and the third body.

In addition, the first spacer member and the second spacer member may be formed of a porous material.

The scrubber burner of the present invention increases the stability of the flame by changing the type of oxidizing agent supplied to the first nozzle located inside and the third nozzle located outside according to the type of inflow waste gas, and discharged carbon monoxide and nitrogen oxide. Can reduce the occurrence of.

In addition, in the scrubber burner of the present invention, since the end of the third nozzle located on the outside protrudes below the nozzle located on the inside, it is possible to prevent the flame from being unstable due to the waste gas flowing into the flame.

In addition, the scrubber burner of the present invention can prevent corrosion by waste gas by forming the material of the third nozzle positioned on the outside of a corrosion-resistant material.

In addition, in the scrubber burner of the present invention, since the spacer member made of a porous material supports the nozzles, the distance between the nozzles is kept constant, so that the fuel and the oxidizing agent are uniformly supplied and the flame can be formed uniformly.

1 is a vertical cross-sectional view of a burner for a scrubber according to an embodiment of the present invention.
FIG. 2 is a horizontal cross-sectional view taken along AA of FIG. 1.
3 is a horizontal cross-sectional view taken along BB of FIG. 1.
4 is a vertical cross-sectional view of a burner for a scrubber according to another embodiment of the present invention.
5 is a partial vertical cross-sectional view of a scrubber equipped with a burner for a scrubber according to an embodiment of the present invention.

Hereinafter, a burner for a scrubber according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings and embodiments.

First, a burner for a scrubber according to embodiments of the present invention will be described.

1 is a vertical cross-sectional view of a burner for a scrubber according to an embodiment of the present invention. FIG. 2 is a horizontal cross-sectional view taken along line A-A of FIG. 1. 3 is a horizontal cross-sectional view taken along line B-B of FIG. 1. 4 is a vertical cross-sectional view of a burner for a scrubber according to another embodiment of the present invention.

The scrubber burner 10 according to an embodiment of the present invention includes a first nozzle 110, a second nozzle 120, and a third nozzle 130 with reference to FIGS. 1 to 3. The scrubber burner 10 may further include a first spacer member 140 and a second spacer member 150. The scrubber burner 10 may be formed such that the first nozzle 110, the second nozzle 120, and the third nozzle 130 form a triple tube shape having the same central axis. The scrubber burner 10 may be mounted on a scrubber for treating waste gas in a semiconductor process to burn the waste gas.

The scrubber burner 10 may selectively inject fuel and an oxidizing agent from the first nozzle 110, the second nozzle 120, and the third nozzle 130 according to the type of waste gas to be treated. For example, the first nozzle 110 may inject an oxidizing agent, the second nozzle 120 may inject fuel, and the third nozzle 130 may inject an oxidizing agent. In addition, the oxygen content of the oxidizing agent sprayed from the first nozzle and the oxygen content of the oxidizing agent sprayed from the third nozzle may be different from each other. For example, the oxygen content of the oxidizing agent sprayed from the first nozzle 110 may be relatively higher than the oxygen content of the oxidizing agent sprayed from the third nozzle 130. In this case, the scrubber burner 10 may stably form a flame inside while spreading the fuel injected from the second nozzle 120 with the oxidizing agent injected from the first nozzle 110. In addition, the scrubber burner 10 may stably maintain a flame by an oxidizing agent sprayed from the third nozzle 130. In addition, the oxygen content of the oxidizing agent sprayed from the first nozzle may be relatively smaller than the oxygen content of the oxidizing agent sprayed from the third nozzle.

In addition, the first nozzle 110 may inject an oxidizing agent, and the second nozzle 120 and the third nozzle 130 may inject fuel. In this case, the scrubber burner 10 forms a flame by contacting the oxidizing agent injected from the first nozzle 110 with the fuel injected from the second nozzle 120 and the third nozzle 130. In particular, the scrubber burner 10 may form a relatively stable flame inside while the fuel is diffused in the direction of the oxidizing agent injected therein.

In addition, the first nozzle 110 may inject an oxidizing agent, and the second nozzle 120 and the third nozzle 130 may inject a mixture of fuel and an oxidizing agent. Further, the first nozzle 110 and the third nozzle 130 may inject an oxidizing agent, and the second nozzle 120 may inject a mixture of fuel and an oxidizing agent. In this case, the scrubber burner 10 may reduce the generation of nitrogen oxides because a part of the fuel is mixed with an oxidizing agent and injected in advance to form a flame.

As the oxidizing agent, oxygen, CDA, air, oxygen + air, oxygen + CDA, oxygen + nitrogen, CDA + nitrogen, air + nitrogen, oxygen + air + nitrogen may be used. In addition, as the fuel, hydrogen (Hydrogen, H ₂ ), methane (Methane, CH ₄ ), propane (Propane, C ₃ H ₈ ), city gas (Natural Gas, CH 4 +C ₃ H ₈ +etc) can be used. have. In addition, all hydrocarbon-based fuels (C _n H _m ) may be used as the fuel.

In the following description, the inner, inner, or inner circumferential surface is a direction or surface toward the central axis direction of the first nozzle 110 in FIG. 1, and the outer, outer or outer circumferential surface refers to the opposite direction or surface. In addition, the upper side or the upper surface is a direction or surface facing the upper side in FIG. 1, and the lower side or the lower surface refers to a direction or surface facing the lower side in FIG. 1.

The first nozzle 110 may include a first body 111 and a first supply pipe 113. The first nozzle 110 may be located at the innermost side of the scrubber burner 10. The first nozzle 110 may spray an oxidizing agent. The first nozzle 110 may form a first passage 110a through which an oxidizing agent flows.

The first body 111 may be formed in a tubular shape in which upper and lower portions are open. The first body 111 may form a first passage 110a therein. The first body 111 may have a first inner diameter, a first outer diameter, and a first height. The first body 111 may have the same first inner diameter at the upper and lower portions. In addition, the first body 111 may have the same first outer diameter in the upper and lower portions. That is, the first body 111 may be formed as a straight tube. The first inner diameter may be determined as an appropriate diameter according to the amount of the oxidizing agent to be injected. That is, the first inner diameter may be determined as a diameter corresponding to the horizontal cross-sectional area of the first passage 110a required for the oxidizing agent to flow.

The first body 111 has a first outer diameter determined according to required strength and heat resistance, and may be formed to have an appropriate thickness. The first height may be formed to an appropriate height according to the structure of the scrubber in which the scrubber burner 10 is mounted. The first body 111 may be formed such that the lower end forms a flat surface. The first body 111 may be formed of a corrosion-resistant metal material such as stainless steel. The first body 111 may be formed of a corrosion-resistant material because it may be in contact with a component such as F or Cl.

The first supply pipe 113 may be formed as a pipe having the same inner diameter as the first body 111. The first supply pipe 113 may be formed to form a straight line or a curved line depending on the location where the scrubber burner 10 is formed. The first supply pipe 113 has a lower end connected to the upper end of the first body 111 and supplies an oxidizing agent supplied from the outside to the first body 111.

The second nozzle 120 may include a second body 121, a second sealing ring 122 and a second supply pipe 123. The second nozzle 120 may be located outside the first nozzle 110 in the scrubber burner 10. The second nozzle 120 may form a second passage 120a through which at least one of a fuel and an oxidizing agent flows. The second nozzle 120 may inject only fuel or may inject a mixed gas in which fuel and an oxidizing agent are mixed.

The second body 121 may be formed in a tubular shape in which upper and lower portions are open. The second body 121 may have a second inner diameter, a second outer diameter, and a second height. The second body 121 may have the same second inner diameter in the upper and lower portions. In addition, the second body 121 may have the same second outer diameter in the upper and lower portions. That is, the second body 121 may be formed as a straight tube. The second inner diameter may be formed to have a larger diameter than the first outer diameter of the first body 111.

The second body 121 may be positioned outside the first body 111 so that the central axis is positioned equal to the central axis of the first body 111. For example, the second body 121 may be coupled to the first body 111 to form a concentric circle with the first body 111 based on a horizontal cross section. The second body 121 may be positioned so that the inner circumferential surface entirely surrounds the outer circumferential surface of the first body 111 to form a second passage 120a. That is, the first body 111 may be inserted into the second body 121. In addition, the second passage 120a may be formed as a space between the outer circumferential surface of the first body 111 and the inner circumferential surface of the second body 121. Accordingly, the second inner diameter may be determined as an appropriate diameter according to the amount of injected fuel or mixed gas and the outer diameter of the first body 111. That is, the second inner diameter may be determined according to the horizontal cross-sectional area of the second passage 120a and the first outer diameter. The second passage 120a provides a path through which fuel injected from the second nozzle 120 or a mixed gas of fuel and oxidizer flows.

In addition, the second height may be formed to an appropriate height according to the structure of the scrubber in which the scrubber burner 10 is mounted. The second height may be formed to be smaller than the first height of the first body 111. The second body 121 may be formed such that the lower end forms a flat surface. In addition, the second body 121 may be coupled to the first body 111 so that the lower end is positioned at the same height as the lower end of the first body 111. Accordingly, the upper end of the second body 121 may be positioned lower than the upper end of the first body 111. The second body 121 has a second outer diameter determined according to required strength and heat resistance, and may be formed to have an appropriate thickness. The second body 121 may be formed of a corrosion-resistant metal material such as stainless steel. The second body 121 may be formed of a corrosion-resistant material because it may be in contact with a component such as F or Cl.

The second sealing ring 122 may include a second through hole 122a. The second sealing ring 122 may be formed in a plate shape having a diameter corresponding to a second inner diameter or a second outer diameter of the second body 121. The second through hole 122a may have a diameter corresponding to the first outer diameter of the first body 111. The second sealing ring 122 provides a path through which the first body 111 is inserted while sealing the upper end of the second body 121. The first body 111 is inserted into and coupled to the inside of the second body 121 through the second through hole 122a.

The second supply pipe 123 may be formed as a pipe having a predetermined inner diameter. The second supply pipe 123 may be connected to the second passage 120a while one end of the second supply pipe 123 is coupled to the upper portion of the second body 121. The second supply pipe 123 may be formed to form a straight line or a curved line depending on the location where the scrubber burner 10 is formed. The second supply pipe 123 supplies fuel or mixed gas supplied from the outside to the second body 121.

The third nozzle 130 may include a third body 131, a third sealing ring 132, and a third supply pipe 133. The third nozzle may be located outside the second nozzle 120 in the scrubber burner 10. The third nozzle 130 may form a third passage 130a through which at least one of a fuel and an oxidizing agent flows. The third nozzle 130 may inject only fuel or may inject a mixed gas in which a fuel and an oxidizing agent are mixed.

The third body 131 may be formed in a tubular shape in which upper and lower portions are open. The third body 131 may have a third inner diameter, a third outer diameter, and a third height. The third body 131 may have the same third inner diameter in the upper and lower portions. In addition, the third body 131 may have the same third outer diameter in the upper and lower portions. That is, the third body 131 may be formed as a straight tube. The third inner diameter may be formed to have a larger diameter than the second outer diameter of the second body 121. The third main body 131 may be positioned outside the second main body 121 so that the central axis is positioned equal to the central axis of the first main body 111. For example, the second body 121 may be inserted into the third body 131. In addition, the third body 131 may be coupled to the second body 121 to form a concentric circle with the first body 111 and the second body 121 based on a horizontal cross section.

The third body 131 may be positioned so that the inner circumferential surface entirely surrounds the outer circumferential surface of the second body 121 to form a third passage 130a. The third passage 130a may be formed as a space between the outer circumferential surface of the second body 121 and the inner circumferential surface of the third body 131. Accordingly, the third inner diameter may be determined as an appropriate diameter according to the amount of injected fuel or mixed gas and the outer diameter of the second body 121. That is, the third inner diameter may be determined according to the horizontal cross-sectional area of the third passage 130a and the second outer diameter. The third passage 130a provides a path through which an oxidizing agent injected from the third nozzle 130 or a mixed gas of a fuel and an oxidizing agent flows.

In addition, the third height may be formed to an appropriate height according to the structure of the scrubber in which the scrubber burner 10 is mounted. The third height may be formed to be smaller than the second height of the second body 121. The third body 131 may be formed such that the lower end forms a flat surface. In addition, the third body 131 may be coupled to the second body 121 so that the lower end of the third body 131 has the same height as the lower end of the first body 111 and the lower end of the second body 121. The upper end of the third body 131 may be positioned below the upper end of the second body 121.

Meanwhile, according to another embodiment, referring to FIG. 4, the third body 131 may be formed such that the lower end of the third body 131 is positioned below the lower end of the first body 111 and the second body 121. In this case, the first body 111 and the second body 121 may be positioned at the same height. The third body 131 may surround the outside of the formed flame and block the inflow of waste gas into the region where the flame is formed. Accordingly, the scrubber burner 10 may prevent the flame from being turned off by the waste gas supplied in the semiconductor process. In particular, even when a large amount of nitrogen is contained in the waste gas supplied from the semiconductor process, it is possible to prevent the flame from being extinguished.

In addition, although the burner 10 for the scrubber is not specifically shown, the lower ends of the first body 111, the second body 121, and the third body 131 are formed at different heights, so that the fuel and the oxidizing agent are used in advance. It is possible to increase the combustion efficiency according to the mixing or increase the combustion efficiency according to the reverse conversion of the fuel.

The third body 131 has a third outer diameter determined according to required strength and heat resistance, and may be formed to have an appropriate thickness. The third body 131 may be formed of a corrosion-resistant metal material such as stainless steel. The third body 131 may be formed of a corrosion-resistant material because it may be in contact with a component such as F or Cl.

The third sealing ring 132 may include a third through hole 132a. The third sealing ring 132 may be formed in a plate shape having a diameter corresponding to a third inner diameter or a third outer diameter of the third body 131. The third through hole 132a may have a diameter corresponding to the second outer diameter of the second body 121. The third sealing ring 132 provides a path through which the second body 121 is inserted while sealing the upper end of the third body 131. The second body 121 is inserted into and coupled to the inside of the third body 131 through the third through hole 132a.

The third supply pipe 133 may be formed as a pipe having a predetermined inner diameter. The third supply pipe 133 may be connected to the third passage 130a while one end of the third supply pipe 133 is coupled to the upper portion of the third body 131. The third supply pipe 133 may be formed to form a straight line or a curved line depending on the location where the scrubber burner 10 is formed. The third supply pipe 133 supplies fuel or mixed gas supplied from the outside to the third body 131.

The first spacer member 140 has a block, rod, or plate shape, and may have a length or width corresponding to a distance between the first body 111 and the second body 121. The first spacer 140 may be formed to have a length corresponding to a distance between the outer diameter of the first body 111 and the outer diameter of the second body 121. In this case, the first spacer member 140 may be coupled such that an inner end is in contact with an outer circumferential surface of the first body 111 and an outer end penetrates the second body 121 and is exposed to an outer circumferential surface. In addition, the first spacer member 140 may be formed to have a length corresponding to a distance between the outer diameter of the first body 111 and the inner diameter of the second body 121. In this case, the inner end of the first spacer 140 may contact the outer circumferential surface of the first body 111 and the outer end may contact the inner circumferential surface of the second main body 121. The first spacer member 140 has an inner end having an arc shape corresponding to an outer diameter or an inner diameter of the first body 111, and an outer end having an arc shape corresponding to an inner diameter or an outer diameter of the second body 121. I can.

The first spacer 140 may be formed of a porous material. For example, the first spacer member 140 may be a porous plate, a bead, a porous foam, a sintering plate, a metal fiber, or a packed bed. ) May be formed of the same material.

A plurality of the first spacer members 140 may be positioned while being spaced apart along the height direction of the first body 111. In addition, at least two of the first spacer members 140 may be positioned while being spaced apart from each other along the circumferential direction of the first body 111. The first separation member 140 supports the first body 111 and the second body 121 to maintain a separation distance between the first body 111 and the second body 121. More specifically, the first spacer member 140 has an inner side and an outer side coupled to the first body 111 and the second body 121, respectively, so that the outer circumferential surface of the first body 111 and the second body 121 Make sure that the gap between the inner circumferential surfaces of the is kept constant.

The second spacer member 150 may have a block, rod, or plate shape, and may have a length or width corresponding to a distance between the second body 121 and the third body 131. The second spacer 150 may have a length corresponding to a distance between the outer diameter of the second body 121 and the outer diameter of the third body 131. In this case, the second spacer 150 may be coupled such that an inner end of the second spacer 150 is in contact with the outer circumferential surface of the second body 121 and an outer end of the second spacer 150 penetrates the third main body 131 and is exposed to the outer circumferential surface. In addition, the second spacer member 150 may be formed to have a length corresponding to a distance between the outer diameter of the second body 121 and the inner diameter of the third body 131. In this case, the inner end of the second spacer 150 may contact the outer circumferential surface of the second main body 121 and the outer end may contact the inner circumferential surface of the third main body 131. The second spacer member 150 has an inner end having an arc shape corresponding to an outer diameter or an inner diameter of the second body 121, and an outer end having an arc shape corresponding to an inner diameter or an outer diameter of the third body 131. I can.

The second spacer member 150 may be formed of a porous material. For example, the second spacer member 150 is a porous plate, a bead, a porous foam, a sintering plate, a metal fiber, and a packed bed. ) May be formed of the same material.

A plurality of the second spacer members 150 may be positioned while being spaced apart along the height direction of the second body 121. In addition, at least two of the second spacer members 150 may be positioned while being spaced apart from each other along the circumferential direction of the second body 121. The second spacer member 150 supports the second body 121 and the third body 131 to maintain a spaced distance between the second body 121 and the third body 131. More specifically, the second spacer member 150 has an inner side and an outer side coupled to the second body 121 and the third body 131, respectively, so that the outer circumferential surface of the second body 121 and the third body 131 Make sure that the gap between the inner circumferential surfaces of the is kept constant.

In the scrubber burner 10, the first body 111, the second body 121, and the third body 131 may be detachably coupled to each other. For example, the second sealing ring 122 of the second body 121 may be detachably coupled to the outer peripheral surface of the first body 111. In addition, the third sealing ring 132 of the third body 131 may be detachably coupled to the outer peripheral surface of the second body 121. In addition, the first spacer member 140 and the second spacer member 150 may be detachably coupled to the first body 111 and the second body 121 or the second body and the third body 131, respectively. have. Accordingly, the scrubber burner 10 can reduce the overall maintenance cost by replacing only the main body when any one main body is relatively severely corroded.

In addition, the scrubber burner 10 may form a partial oxidizing flame under a fuel rich combustion condition by adjusting the oxidizing agent injected from the first nozzle 110 and the third nozzle 130. _{Accordingly, the scrubber burner 10 may increase NF 3} and CF ₄ DRE (%) by using hydrogen radicals generated by a partial oxidation flame.

In addition, the scrubber burner 10 differs in the type of the oxidizing agent injected from the first nozzle 110 and the second nozzle 120 according to the type of waste gas discharged from the semiconductor process, for example, the type of PFCs gas. By adjusting the temperature and intensity of the flame, the DRE (%) of the PFCs gas can be increased.

In addition, the scrubber burner 10 uses carbon monoxide and nitrogen oxides generated in the combustion process by using the oxidizing agent injected from the first nozzle 110 or the third nozzle 130 into a mixed gas having a reduced content of oxygen or nitrogen. Can reduce the amount of emissions.

Next, a scrubber in which a burner for a scrubber according to an embodiment of the present invention is mounted will be schematically described.

5 is a partial vertical cross-sectional view of a scrubber equipped with a burner for a scrubber according to an embodiment of the present invention.

The scrubber may be formed to include a scrubber burner 10, a housing 20, and a waste gas inlet pipe 30. The scrubber may treat waste gas discharged from a semiconductor process. The scrubber may have a housing 20 and a waste gas inlet pipe 30 formed in various structures, and the structure shown in FIG. 5 corresponds to an exemplary structure.

Although not specifically shown, the scrubber may further include a combustion chamber and a water tank tank located under the housing 20 to burn waste gas.

Since the housing 20 and the waste gas inlet pipe 30 are a general structure used in a scrubber, detailed descriptions are omitted here.

The scrubber burner 10 may be formed of the scrubber burner 10 according to FIGS. 1 to 4 described above.

When a flame is formed in the scrubber burner 10, the scrubber may be combusted by introducing waste gas through the waste gas inlet pipe 30. At this time, the waste gas introduced from the waste gas inlet pipe 30 may be heated and combusted while being in contact with the flame.

What has been described above is only one embodiment for implementing the scrubber burner according to the present invention, and the present invention is not limited to the above-described embodiment, and as claimed in the following claims, deviates from the gist of the present invention. Without this, anyone of ordinary skill in the field to which the present invention pertains will have the technical spirit of the present invention to the extent that various modifications can be implemented.

110: first nozzle 111: first body
113: first supply pipe 120: second nozzle
121: second body 122: second sealing ring
123: second supply pipe 130: third nozzle
131: third body 132: third sealing ring
133: third supply pipe 140: first separation member
150: second spacing member

Claims (10)

A first nozzle having a tubular shape and having a first body,
A second nozzle having a tubular shape and a second body positioned to surround the outer circumferential surface of the first body, and
A burner for scrubber comprising a third nozzle having a tubular shape and a third body positioned so as to surround the outer circumferential surface of the second body. The method of claim 1,
The first nozzle sprays an oxidizing agent,
The second nozzle injects fuel or a mixed gas in which a fuel and an oxidizing agent are mixed,
The third nozzle is a burner for scrubber, characterized in that for injecting an oxidizing agent or a mixed gas of a fuel and an oxidizing agent. The method of claim 2,
The burner for scrubber, wherein the oxidizing agent sprayed from the first nozzle has a different content of oxygen from the oxidizing agent sprayed from the third nozzle. The method of claim 2,
A first passage formed inside the first body and being a passage through which an oxidizing agent sprayed from the first nozzle flows,
A second passage formed between the outer circumferential surface of the first body and the inner circumferential surface of the second body and through which fuel injected from the second nozzle or a mixed gas of fuel and oxidizing agent flows, and
A burner for a scrubber, comprising: a third passage formed between an outer circumferential surface of the second body and an inner circumferential surface of the third body and through which an oxidizing agent injected from the third nozzle or a mixed gas of a fuel and an oxidizing agent flows. The method of claim 1,
The burner for scrubber, characterized in that the first body, the second body, and the third body are positioned to have the same central axis. The method of claim 1,
The burner for scrubber, characterized in that the lower ends of the first body, the second body, and the third body are positioned at the same height as each other. The method of claim 1,
The burner for a scrubber, characterized in that the lower ends of the first body, the second body, and the third body are located at different heights. The method of claim 1,
The first body and the second body are located at the same height, the lower end of the third body, the scrubber burner, characterized in that the lower end is located lower than the lower end of the first body and the second body. The method of claim 1,
A first spacer member positioned between the first body and the second body to maintain a spaced distance between the first body and the second body, and
A burner for scrubber comprising a second spacer member positioned between the second body and the third body to maintain a spaced distance between the second body and the third body. The method of claim 9,
The burner for scrubber, characterized in that the first spacer member and the second spacer member are formed of a porous material.

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