CN114556021A

CN114556021A - Burner for scrubber

Info

Publication number: CN114556021A
Application number: CN202080073749.2A
Authority: CN
Inventors: 李弼珩; 申喜峻; 李荣雄; 卢明根; 赵显闰
Original assignee: CSK Corp
Current assignee: CSK Corp
Priority date: 2019-08-21
Filing date: 2020-08-12
Publication date: 2022-05-27
Also published as: JP2022545691A; US20220275933A1; KR20210022897A; WO2021033080A1; TW202117233A; KR102325814B1; EP4018126A4; EP4018126A1

Abstract

The present invention provides a burner for a scrubber, which is equipped with: a first nozzle in the shape of a tube and equipped with a first body; a second nozzle in the shape of a tube and equipped with a second body positioned so as to wrap the outer circumference of the aforementioned first body; and a third nozzle in the shape of a tube and equipped with a third body positioned so as to wrap the outer circumference of the aforementioned second body.

Description

Burner for scrubber

Technical Field

The present invention relates to a burner mounted on a scrubber for treating exhaust gas generated during an electronic industrial process.

Background

Exhaust gas generated during electronic industrial processes such as semiconductor manufacturing processes, LCD manufacturing processes, and OLED manufacturing processes is composed of a mixture of VOC, PFC gas, moisture, and other foreign substances. The aforementioned exhaust gas is generated in large quantities during the semiconductor etching process and during the chemisorption process, and contains a gas that promotes global warming. In addition, it is known that the PPC gas contained in the aforementioned off-gas is difficult to decompose during the treatment. The PFC gas contained in the aforementioned exhaust gas is treated by a scrubber using a heating method, an adsorption method, and a plasma method.

The aforementioned heating method washer may include: a burner heating the exhaust gas by generating a flame; a reaction chamber attached to a lower portion of the burner to perform combustion and reaction to generate byproduct particles; and a water tank located at one side of the lower portion of the reaction chamber to collect byproduct particles and aqueous exhaust gas. The aforementioned burner forms a flame by using both the supplied oxidant and fuel, and decomposes the exhaust gas by heating the exhaust gas. The aforementioned exhaust gases may differ in the type and volume of gas discharged depending on the process.

Therefore, it is necessary for the aforementioned burner to form an appropriate flame according to the type of exhaust gas in order to burn the exhaust gas more efficiently.

Disclosure of Invention

Problems which the present invention seeks to solve

It is an object of the present invention to provide a scrubber burner that can reduce the production of carbon monoxide and nitrogen oxides during the combustion of exhaust gases.

Means for solving the problems

The burner for a scrubber according to the present invention comprises: a first nozzle equipped with a first body in the shape of a tube; a second nozzle equipped with a second body to wrap an outer circumference of the first body; a third nozzle equipped with a third body positioned so as to wrap around the outer circumference of the aforementioned second body.

In addition, with the burner for a scrubber according to the present invention, the aforementioned first nozzle may inject an oxidant, the aforementioned second nozzle may inject a fuel or a mixed gas composed of a fuel and an oxidant, and the aforementioned third nozzle may inject an oxidant or a mixed gas composed of a fuel and an oxidant. Here, the oxidant injected from the aforementioned first nozzle may be different in oxygen content from the oxidant injected from the aforementioned third nozzle.

In addition, the scrubber burner of the present invention may be equipped with: a first passage formed inside the first body and through which the oxidant injected from the first nozzle flows; a second passage formed between an outer circumference of the first body and an inner circumference of the second body and through which the fuel injected from the second nozzle or a mixed gas composed of the fuel and the oxidizer flows; and a third passage formed between an outer circumference of the second body and an inner circumference of the third body, and through which an oxidizer or a mixed gas composed of a fuel and an oxidizer flows.

In addition, the burner for a scrubber according to the present invention may be positioned such that the aforementioned first, second and third bodies may have the same central axis.

In addition, with the burner for a scrubber according to the present invention, the lower ends of the aforementioned first, second and third bodies may be located at the same height.

In addition, with the burner for a scrubber according to the present invention, the lower ends of the aforementioned first, second and third bodies may be located at different heights.

In addition, with the burner for a scrubber according to the present invention, the lower end of the first body and the lower end of the second body may be located at the same height, and the lower end of the third body may be located lower than the lower ends of the first body and the second body.

In addition, the burner for a scrubber according to the present invention may further include: a first separating member located between the first body and the second body to maintain a separation distance between the first body and the second body; and a second separation member positioned between the second body and the third body to maintain a separation distance between the second body and the third body.

In addition, the first separating member and the second separating member may be made of a porous material.

Effects of the invention

According to the type of exhaust gas, the burner for a scrubber according to the present invention may improve flame stability and reduce the generation of discharged carbon monoxide and nitrogen oxides by changing the type of oxidant supplied to the first nozzle positioned at the inside and the type of oxidant supplied to the third nozzle positioned at the outside.

In addition, with the burner for a scrubber according to the present invention, it is possible to prevent the instability of the flame due to the exhaust gas flowing into the flame, due to the fact that the end of the third nozzle located at the outer side protrudes more downward than the nozzle located at the inner side.

In addition, with the burner for a scrubber according to the present invention, it is possible to prevent corrosion of exhaust gas by using a corrosion-resistant material for the third nozzle located at the outer side.

In addition, with the burner for a scrubber according to the present invention, due to the fact that the nozzles are supported by the separation member composed of the porous material, the space between the nozzles is constantly maintained, so that the fuel and the oxidant are constantly supplied and the flame can be constantly formed.

Drawings

Fig. 1 is a vertical sectional view of a burner for a scrubber according to an embodiment of the present invention.

Fig. 2 is a horizontal sectional view a-a of fig. 1.

Fig. 3 is a horizontal sectional view of B-B of fig. 1.

Fig. 4 is a vertical sectional view of a burner for a scrubber according to another embodiment of the present invention.

Fig. 5 is a partial vertical sectional view of a scrubber installed with a burner for a scrubber according to an embodiment of the present invention.

Detailed Description

Hereinafter, a burner for a scrubber according to an embodiment of the present invention will be described in detail by referring to the accompanying drawings and embodiments.

First, a burner for a scrubber according to an embodiment of the present invention will be described.

Fig. 1 is a vertical sectional view of a burner for a scrubber according to an embodiment of the present invention. Fig. 2 is a horizontal sectional view a-a of fig. 1. Fig. 3 is a horizontal sectional view of B-B of fig. 1. Fig. 4 is a vertical sectional view of a burner for a scrubber according to another embodiment of the present invention.

When we refer to fig. 1 to 3, a burner (10) for a scrubber according to an embodiment of the present invention includes a first nozzle (110), a second nozzle (120), and a third nozzle (130). The aforementioned burner (10) for a scrubber may further include a first separating member (140) and a second separating member (150). The aforementioned burner (10) for a scrubber may be formed in the shape of a triple tube having a first nozzle (110), a second nozzle (120), and a third nozzle (130) having the same central axis. The aforementioned burner (10) for a scrubber is equipped with a scrubber to treat exhaust gas generated by a semiconductor process, thereby enabling combustion of the exhaust gas.

The aforementioned burner (10) for a scrubber may selectively inject fuel and oxidant from the first nozzle (110), the second nozzle (120), and the third nozzle (130) according to the type of exhaust gas being treated. For example, the aforementioned first nozzle (110) may inject an oxidant, the second nozzle (120) may inject a fuel, and the third nozzle (130) may inject an oxidant. In addition, the oxygen content of the oxidant injected by the aforementioned first nozzle and the oxygen content of the oxidant injected by the third nozzle may be different. For example, the oxygen content of the oxidant injected from the aforementioned first nozzle (110) may be greater than the oxygen content of the oxidant injected from the third nozzle (130). In this case, when the fuel injected by the second nozzle (120) expands, the aforementioned burner (10) for a scrubber can stably form a flame at the inner side with the oxidant injected by the first nozzle (110). In addition, the burner (10) for a scrubber can stably maintain the flame by the oxidant injected from the third nozzle (130). In addition, the oxygen content of the oxidant injected by the aforementioned first nozzle may be relatively smaller than the oxygen content of the oxidant injected by the third nozzle.

In addition, the first nozzle (110) may inject an oxidant, and the second nozzle (120) and the third nozzle (130) may inject a fuel. In this case, with the aforementioned burner (10) for a scrubber, the oxidant injected by the first nozzle (110) is brought into contact with the fuel injected by the second nozzle (120) and the third nozzle (130) to form a flame. In particular, the aforementioned burner (10) for a scrubber is capable of forming a stable flame at the opposite inner side as the fuel expands in the direction in which the oxidant is injected at the inner side.

In addition, the aforementioned first nozzle (110) may inject the oxidizer, and the second nozzle (120) and the third nozzle (130) may inject the fuel and the oxidizer after mixing them. In addition, the aforementioned first nozzle (110) and third nozzle (130) may inject the oxidizer, and the second nozzle (120) may mix the fuel and the oxidizer and inject them. In this case, with the aforementioned burner (10) for a scrubber, it is possible to reduce the generation of nitrogen oxides due to the fact that part of the fuel is mixed with the oxidant in advance before being injected.

For the foregoing oxidizing agent, oxygen, CDA, air, oxygen + CDA, oxygen + nitrogen, CDA + nitrogen, air + nitrogen, or oxygen + air + nitrogen may be used. In addition, for the aforementioned fuel, hydrogen (H) may be used₂) Methane (CH)₄) Propane (C)₃H₈) Natural gas (CH)₄+C₃H₈+ etc.). In addition, for the aforementioned fuels, all types of hydrocarbon fuels (C) can be used_nH_m)。

In the following description, the inner, inner or inner circumference refers to a direction or one side toward the central axis of the first nozzle (110) in fig. 1, and the outer, outer or outer circumference refers to the opposite direction or one side. Further, the upper side or top refers to a direction or side toward the upper portion in fig. 1, and the lower side or bottom refers to a direction or side toward the lower portion in fig. 1.

The aforementioned first nozzle (110) may include a first body (111) and a first supply pipe (113). The aforementioned first nozzle (110) may be located at the innermost side of the burner (10) for a scrubber. The first nozzle (110) may inject an oxidant. The first nozzle (110) may form a first passage (110a) through which an oxidant flows.

The first body (111) may be formed in a shape of a tube with an upper portion and a lower portion opened. The first body (111) may have a first passage (110a) formed inside. The first body (111) may have a first inner diameter, a first outer diameter, and a first height. The upper and lower portions of the first body (111) may have the same first inner diameter. In addition, the aforementioned first body (111) may have the same first diameter at the upper and lower portions. That is, the first body (111) may be formed in the shape of a straight pipe. The aforementioned first inner diameter may be determined to have an appropriate diameter according to the amount of the oxidant to be injected. That is, the aforementioned first inner diameter may be determined as a diameter corresponding to a horizontal cross-sectional area of the first passage (110a) required for the oxidant flow.

As for the aforementioned first body (111), the first outer diameter is determined according to the necessary strength level and heat resistance level, and may be formed with an appropriate thickness. The aforementioned first height may be appropriately determined according to the structure of the scrubber on which the burner (10) for a scrubber is mounted. The first body (111) may be formed such that the lower portion thereof is constituted by a flat surface. The aforementioned first body (111) may be made of a corrosion-resistant metallic material such as stainless steel. The aforementioned first body (111) may be in contact with materials such as F and Cl, and may be composed of a corrosion-resistant material.

The first supply pipe (113) may be a pipe having the same inner diameter as that of the first body (111). The first supply pipe (113) may be formed in a straight line or a curved line according to a position where the scrubber burner (10) is formed. The lower end of the first supply pipe (113) is connected to the upper end of the first body (111), and supplies an oxidizing agent supplied from the outside to the first body (111).

The aforementioned second nozzle (120) may include a second body (121), a second sealing ring (122), and a second supply pipe (123). The aforementioned second nozzle (120) may be located at an outer side of the first nozzle (110) at the scrubber burner (10). The aforementioned second nozzle (120) may form a second passage (120a) through which fuel or oxidant or both may flow. The second nozzle (120) may inject only fuel of a mixed gas of the fuel and the oxidizer.

The second body (121) may be formed in a shape of a tube having an upper portion and a lower portion opened. The second body (121) may have a second inner diameter, a second outer diameter, and a second height. The aforementioned second body (121) may have a second inner diameter that is the same for the upper and lower portions. In addition, the aforementioned second body (121) may have the same outer diameter for the upper and lower portions. That is, the second body (121) may be formed in the shape of a straight pipe. The aforementioned second diameter may be greater than the first outer diameter of the first body (111).

The aforementioned second body (121) may be located at an outer side of the first body (111) such that the central axis is located at the same position as the central axis of the first body (111). For example, the aforementioned second body (121) may be combined with the first body (111) so as to form a circle concentric with the first body (111) with the horizontal section as a reference point. The aforementioned second body (121) may be positioned to completely wrap the outer circumference of the first body (111) so as to form the second passage (120 a). That is, the first body (111) can be inserted into the second body (121). In addition, the aforementioned second passage (120a) may be formed by a space between an outer circumference of the first body (111) and an inner circumference of the second body (121). Therefore, the aforementioned second inner diameter can be appropriately determined according to the amount of injected fuel or mixed gas and according to the outer diameter of the first body (111). That is, the aforementioned second inner diameter may be determined by the horizontal cross-sectional area of the second passage (120a) and the first outer diameter. The aforementioned second passage (120a) provides a passage through which fuel injected through the second nozzle (120) or a mixed gas composed of fuel and oxidant flows.

In addition, the aforementioned second height may be appropriately determined according to the structure of the scrubber on which the burner (10) for a scrubber is mounted. The aforementioned second height may be lower than the first height of the first body (111). The second body (121) may be formed such that the lower end portion is constituted by a flat surface. In addition, the aforementioned second body (121) may be combined with the first body (111) such that the lower end portion is located at the same height as that of the lower end portion of the first body (111). Therefore, the upper end of the second body (121) can be located at a position lower than the position of the upper end of the first body (111). The second outer diameter of the aforementioned second body (121) is determined according to the necessary strength level and heat resistance level, and may be formed with an appropriate thickness. The aforementioned second body (121) may be formed of a corrosion-resistant metal material such as stainless steel. Due to the fact that the aforementioned second body (121) can be in contact with materials such as F and Cl, it can be formed of a corrosion-resistant material.

The aforementioned second seal ring (122) may include a second penetration hole (122 a). The second seal ring (122) may be formed in a plate shape having a diameter corresponding to the second inner diameter or the second outer diameter of the second body (121). The aforementioned second penetration hole (122a) may be formed to have a diameter corresponding to the first outer diameter of the first body (111). The aforementioned second sealing ring (122) seals the upper end of the second body (121) and provides a passage into which the first body (111) is inserted. The first body (111) is inserted into the inner side of the second body (121) through the second penetration hole (122a) to be combined.

The second supply pipe (123) may be a pipe having a certain inner diameter. As for the aforementioned second supply pipe (123), one end portion may be combined with an upper portion of the second body (121) so as to be connected with the second passage (120 a). The aforementioned second supply pipe (123) may form a straight line or a curved line according to a position where the scrubber burner (10) is formed. The second supply pipe (123) supplies fuel or a mixed gas supplied from the outside to the second body (121).

The aforementioned third nozzle (130) may include a third body (131), a third sealing ring (132), and a third supply pipe (133). The third nozzle may be located at an outer side of the second nozzle (120) on the scrubber burner (10). The aforementioned third nozzle (130) may form a third passage (130a) through which at least one of the fuel and the oxidant flows. The third nozzle (130) may inject only the fuel, or may inject a mixed gas composed of the fuel and the oxidizer.

The third body (131) may be formed in a shape of a tube having an upper portion and a lower portion opened. The third body (131) may have a third inner diameter, a third outer diameter, and a third height. The aforementioned third body (131) may have the same inner diameter at the upper and lower portions. In addition, the aforementioned third body (131) may have the same outer diameter at the upper and lower portions. That is, the third body (131) may be formed in the shape of a straight pipe. The aforementioned third inner diameter may be larger than the outer diameter of the second body (121). The aforementioned third body (131) may be positioned at the outside of the second body (121) so that its axis is located at the same position as the central axis of the first body (111). For example, the second body (121) may be inserted inside the third body (131). In addition, the aforementioned third body (131) may be combined with the second body (121) so as to form a circle concentric with the first body (111) and the second body (121) with the horizontal section as a reference point.

The inner circumference of the aforementioned third body (131) may be positioned to wrap the entire outer circumference of the second body (121) to form a third passage (130 a). The aforementioned third passage (130a) may be formed as a space between an outer circumference of the second body (121) and an inner circumference of the third body (131). Therefore, the aforementioned third inner diameter can be appropriately determined according to the amount of injected fuel or mixed gas and according to the outer diameter of the second body (121). That is, the third diameter may be determined according to the horizontal cross-sectional area of the third passage (130a) and the second outer diameter. The aforementioned third passage (130a) provides a passage through which the oxidant or the mixed gas composed of the fuel and the oxidant injected through the third nozzle (130) flows.

In addition, the aforementioned third height may be appropriately determined according to the structure of the scrubber on which the burner (10) for a scrubber is mounted. The aforementioned third height may be lower than the second height of the second body (121). The third body (131) may be formed such that the lower end portion forms a flat surface. In addition, the aforementioned third body (131) may be combined with the second body (121) such that the lower end portion has the same height as the lower end portion of the first body (111) and the lower end portion of the second body (121). The aforementioned third body (131) may be positioned lower than the upper end of the second body (121).

On the other hand, according to another embodiment, when we refer to fig. 4, the lower end of the aforementioned third body (131) may be lower than the lower ends of the first body (111) and the second body (121). At this time, the aforementioned first body (111) and second body (121) may be located at the same height. The aforementioned third body (131) may intercept the inflow of exhaust gas into the region where the flame is formed by wrapping the outside of the formed flame. Therefore, the aforementioned burner (10) for a scrubber can prevent the flame from being extinguished by exhaust gas supplied in a semiconductor process. In particular, even in the case where a significant amount of nitrogen is contained in the exhaust gas supplied in the aforementioned semiconductor process, the extinction of the flame can be prevented.

In addition, although not specifically illustrated, the aforementioned burner (10) for a scrubber may have different heights with respect to the lower ends of the first body (111), the second body (121), and the third body (131) to improve combustion efficiency by pre-mixing fuel and oxidant or by reverse expansion of fuel.

The third outer diameter of the aforementioned third body (131) is determined according to the necessary strength and heat resistance level, and the third body may be formed with an appropriate thickness. The aforementioned third body (131) may be formed of a corrosion-resistant metal material such as stainless steel. The aforementioned third body (131) may be formed of a corrosion-resistant material because it may be in contact with materials such as F and Cl.

The aforementioned third seal ring (132) may include a third penetration hole (132 a). The aforementioned third sealing ring (132) may be formed of a plate having a diameter corresponding to a third inner diameter or a third outer diameter of the third body (131). The aforementioned third penetration hole (132a) may be formed to have a diameter corresponding to the second outer diameter of the second body (121). The aforementioned third sealing ring (132) provides a passage through which the second body (121) is inserted while sealing the upper end of the third body (131). The second body (121) is inserted into the third body (131) through the third through hole (132 a).

The third supply pipe (133) may be formed as a pipe having a certain inner diameter. One end of the aforementioned third supply pipe (133) may be connected to the third passage (130a) while being combined with the upper portion of the third body (131). The third supply pipe (133) may be formed in a straight line or a curved line according to a position where the burner (10) for a scrubber is formed. The third supply pipe (133) supplies fuel or a mixed gas supplied from the outside to the third body (131).

The aforementioned first separating member (140) is in the shape of a block, a bar, or a plate, and may be formed with a length or width corresponding to the distance between the first body (111) and the second body (121). The aforementioned first separating member (140) may be formed in a length corresponding to a distance between an outer diameter of the first body (111) and an outer diameter of the second body (121). In this case, the inner end of the aforementioned first separating member (140) may be in contact with the outer circumference of the first body (111), and the outer end may be coupled such that the outer end is exposed to the outer circumference by penetrating the second body (121). In addition, the aforementioned first separating member (140) may be formed in a length corresponding to a distance between an outer diameter of the first body (111) and an inner diameter of the second body (121). In this case, the inner end of the aforementioned first separating member (140) may be in contact with the outer circumference of the first body (111), and the outer end thereof may be in contact with the inner circumference of the second body (121). The inner end portion of the aforementioned first separating member (140) may be in the shape of a circular arc corresponding to the outer diameter or inner diameter of the first body (111), and the outer end portion may be formed in the shape of a circular arc corresponding to the inner diameter or outer diameter of the second body (121).

The first separating member (140) may be formed of a porous material. For example, the aforementioned first separating member (140) may be composed of materials such as porous plates, beads, porous foams, sintered plates, metal fibers, and packed beds.

One or more of the aforementioned first separating members (140) may be positioned by being separated according to the height direction of the first body (111). In addition, at least two of the aforementioned first separating members (140) may be positioned by being separated from each other along the circumferential direction of the first body (111). The first separating member (140) supports the first body (111) and the second body (121) to maintain a separation distance between the first body (111) and the second body (121). More specifically, the inside and outside of the aforementioned first separating member (140) are combined with the first body (111) and the second body (121), respectively, so that the space between the outer circumference of the first body (111) and the inner circumference of the second body (121) is maintained uniform.

The aforementioned second separating member (150) is in the shape of a block, a bar, or a plate, and may be formed with a length or width corresponding to the distance between the second body (121) and the third body (131). The aforementioned second separating member (150) may be formed in a length corresponding to a distance between an outer diameter of the second body (121) and an outer diameter of the third body (131). In this case, the aforementioned second separating member (150) may be combined in such a manner that an inner end thereof is in contact with an outer circumference of the second body (121) and an outer end thereof penetrates the third body (131) and is exposed to the outer circumference. In addition, the aforementioned second separating member (150) may be formed in a length corresponding to a distance between an outer diameter of the second body (121) and an inner diameter of the third body (131). In this case, the inner end of the aforementioned second separating member (150) may be in contact with the outer circumference of the second body (121), and the outer end may be in contact with the inner circumference of the third body (131). The inner end of the second separating member (150) may be formed in the shape of a circular arc corresponding to the outer diameter or inner diameter of the second body (121), and the outer end may be formed in the shape of a circular arc corresponding to the inner diameter or outer diameter of the third body (131).

The second separating member (150) may be formed of a porous material. For example, the aforementioned second separating member (150) may be formed of materials such as porous plates, beads, porous foams, sintered plates, metal fibers, and packed beds.

One or more of the aforementioned second separating members (150) may be positioned by separating in the height direction of the second body (121). In addition, at least two of the aforementioned second separating members (150) may be positioned apart from each other in the circumferential direction of the second body (121). The second separating member (150) supports the second body (121) and the third body (131) to maintain a separation distance between the second body (121) and the third body (131). More specifically, the inner side and the outer side of the aforementioned separation member (150) are coupled with the second body (121) and the third body (131), respectively, to maintain the distance between the outer circumference of the second body (121) and the inner circumference of the third body (131) constant.

The aforementioned burner (10) for a scrubber may be combined in such a manner that the first body (111), the second body (121), and the third body (131) may be separated from each other. For example, the second seal ring (122) of the aforementioned second body (121) may be detachably coupled to the outer circumference of the first body (111). In addition, the third sealing ring (132) of the third body (131) may be detachably coupled to the outer circumference of the second body (121). In addition, the first separating member (140) and the second separating member (150) may be combined with the first body (111) and the second body (121) or with the second body and the third body (131), respectively. Therefore, in the case where any one of the bodies of the aforementioned burner (10) for a scrubber becomes severely corroded, it is possible to reduce the total maintenance cost only by replacing the applicable body.

In addition, the aforementioned burner (10) for a scrubber can form a partial oxidation flame under fuel-rich combustion conditions by adjusting the oxidant injected from the first nozzle (110) and the third nozzle (130). Thus, the aforementioned scrubber burner (10) may increase NF by using hydrogen radicals generated by a partial oxidation flame₃And CF₄ DRE(%)。

In addition, the aforementioned burner (10) for a scrubber can increase DRE (%) of PFC gas by adjusting the temperature and intensity of flame by differentiating the types of oxidants injected from the first nozzle (110) and the second nozzle (120) according to the types of exhaust gas (e.g., PFC gas) discharged from the semiconductor manufacturing process.

In addition, by using the mixed gas having a reduced amount of oxygen or nitrogen for the oxidant injected from the first nozzle (110) or the third nozzle (130), the aforementioned burner (10) for a scrubber makes it possible to reduce the amount of carbon monoxide and the amount of nitrogen oxides emitted during the combustion process.

A scrubber on which a burner for a scrubber according to an embodiment of the present invention is mounted will be described in brief.

Fig. 5 is a partial vertical sectional view of a scrubber portion on which a burner for a scrubber according to an embodiment of the present invention is mounted.

The aforementioned scrubber may be formed by including a burner (10), a housing (20), and an exhaust gas inflow pipe (30). The aforementioned scrubber is capable of treating exhaust gas emitted from a semiconductor manufacturing process. The aforementioned scrubber housing (20) and the exhaust gas inflow pipe (30) may be formed in different structures, and the structure illustrated in fig. 5 is an illustrative structure.

Although the aforementioned scrubber is not illustrated, it may be located at a lower portion of the housing (20), and may further include a combustion chamber and a water tank that burn exhaust gas.

Since the aforementioned housing (20) and the aforementioned exhaust gas inflow pipe (30) are general structures used by scrubbers, detailed description will be omitted herein.

The burner (10) for a scrubber may be formed as the burner (10) for a scrubber according to the above-mentioned figures 1 to 4.

When a flame is formed in the burner (10) for a scrubber, the scrubber can burn exhaust gas by introducing the exhaust gas through the exhaust gas inflow pipe (30). At this time, the exhaust gas flowing in from the exhaust gas inflow pipe (30) can be heated and combusted after contacting with the flame.

The foregoing description is only an embodiment embodying the burner for a scrubber according to the present invention. The invention is not limited by the foregoing embodiments. The scope to which a person having ordinary knowledge in the art to which the present invention pertains can make various changes without departing from the gist of the present invention is encompassed by the technical spirit of the present invention, as claimed in the following claims section.

Description of the components

110 first nozzle

111 first body

113 first supply pipe

120: second nozzle

121: second body

122 second sealing ring

123 second supply pipe

130 third nozzle

131: third body

132 third sealing ring

133 third supply pipe

140 first separating member

150: second separating member.

Claims

1. A burner for a scrubber, the burner being equipped with: a first nozzle in the shape of a tube and equipped with a first body; a second nozzle in the shape of a tube and equipped with a second body positioned so as to wrap the outer circumference of the aforementioned first body; and a third nozzle in the shape of a tube and equipped with a third body positioned so as to wrap the outer circumference of the aforementioned second body.

2. The burner for a scrubber according to claim 1, wherein the first nozzle injects an oxidizing agent, the second nozzle injects a fuel or a mixed gas of a fuel and an oxidizing agent, and the third nozzle injects an oxidizing agent or a mixed gas of a fuel and an oxidizing agent.

3. The burner for a scrubber according to claim 2, wherein the oxidant injected from the first nozzle is different in oxygen content from the oxidant injected from the third nozzle.

4. The burner for a scrubber according to claim 2, said burner being equipped with: a first passage formed inside the body and through which the oxidant injected from the first nozzle flows; a second passage that is formed between the outer circumference of the aforementioned first body and the inner circumference of the aforementioned second body and through which the fuel or a mixed gas composed of fuel and oxidant injected from the aforementioned second nozzle flows; and a third passage formed between the outer circumference of the second body and the inner circumference of the third body, and through which the oxidant or a mixed gas composed of fuel and oxidant injected from the aforementioned third nozzle flows; and a third passage formed between the outer circumference of the second body and the inner circumference of the third body, and through which the oxidant or a mixed gas composed of fuel and oxidant injected from the aforementioned third nozzle flows.

5. The burner for a scrubber as set forth in claim 1, wherein the first body, the second body, and the third body are positioned to have the same central axis.

6. The burner for a scrubber according to claim 1, wherein lower end portions of the first, second and third bodies have the same height.

7. The burner for a scrubber as set forth in claim 1, wherein lower ends of the first, second, and third bodies are located at different heights.

8. The burner for a scrubber as set forth in claim 1, wherein lower ends of the first and second bodies are located at the same height, and wherein the lower end of the third body is located lower than the lower ends of the first and second bodies.

9. The burner for a scrubber as set forth in claim 1, comprising: a first separating member located between the first body and the second body to maintain a separation distance between the first body and the second body; and a second separating member positioned between the second body and the third body to maintain a separation distance between the second body and the third body.

10. The burner for a scrubber according to claim 9, wherein the first separation member and the second separation member are made of a porous material.