KR20210019761A - Mould of multi-layered structure for hot press sintering - Google Patents

Abstract

According to the present invention, a mold of a multi-layer lamination structure for hot-pressing sintering comprises a mold die, an outer sleeve, an inner sleeve, a core, an upper punch, and a lower punch. A pre-formed specimen can be used as it is in hot-pressing sintering to secure 30-60% of additional space in the mold in comparison to a case where powder is used to manufacture at least twice as many edge rings per one-time process, prevent foreign substance introduction, and minimize separate postprocessing processes such as wire cutting after sintering. Also, according to the present invention, the mold of a multi-layer lamination structure for hot-pressing sintering uses a pre-formed specimen which minimizes the density deviation of the specimen to effectively prevent the specimen from being twisted in hot-pressing sintering. Accordingly, the sintering density of an edge ring manufactured by hot-pressing sintering corresponds to 95-99.9% of a theoretical value.

Description

Mold of multi-layered structure for hot pressing sintering {MOULD OF MULTI-LAYERED STRUCTURE FOR HOT PRESS SINTERING}

The present invention relates to a mold having a multilayer laminate structure for hot pressing sintering.

The semiconductor wafer manufacturing process continues to develop through the reversal of technology, resulting in a finer line width and an increase in the number of stacks. On the other hand, the ceramic components for semiconductor manufacturing used for this need to withstand the increasingly severe plasma, and accordingly, there is a need to improve the characteristics of these ceramic components.

For example, a plasma apparatus (chamber) in which plasma etching is performed is composed of an electrostatic chuck including an upper electrode and a lower electrode, and a covering assembly surrounding the electrostatic chuck to protect the electrostatic chuck from plasma generated in the plasma processing chamber. , A substrate such as a semiconductor wafer or a glass substrate is supported on the upper surface of the electrostatic chuck. With this configuration, as power is applied between the upper electrode and the lower electrostatic chuck, plasma P is generated in the plasma processing chamber due to the electric field effect, and ions are incident in the direction toward the electrostatic chuck, and the chemical reaction of plasma ions and Etching is performed on the substrate using kinetic energy.

Meanwhile, the covering assembly surrounding the electrostatic chuck may have a configuration in which a coupling groove is formed on a lower surface of the edge ring and the electrode ring is coupled thereto, and the edge ring surrounds the side surface of the substrate supported on the upper surface of the electrostatic chuck. Is a ceramic component for semiconductor manufacturing that is manufactured in a three-dimensional shape of a standard and environment capable of maintaining the same height as the substrate supported by the electrostatic chuck.

On the other hand, the existing edge ring was made of single crystal silicon (Silicon) or quartz (Quartz), but this composition is excessively etched under severe plasma conditions, so maintenance or replacement is required after a short period of use. There was this. Therefore, today, edge rings are manufactured using sintered bodies using non-oxide-based structural materials such as silicon carbide, boron carbide, and silicon nitride.In particular, the hot press sintering method is a method in which a ceramic material is pressed in a specific atmosphere to produce a sintered body. As one of the methods with excellent properties of the sintered body, it is applied to the manufacturing process of edge rings, which are ceramic components for semiconductor manufacturing.

However, in the case of a mold structure in a furnace that is generally used when using the hot press sintering method, a sample powder for forming a sintered body is charged into the mold, molded into a cylinder or ring, and then processed into a post-processing process such as wire cutting to manufacture an edge ring. It was common. In this case, there is a problem that the density variation of the specimen increases as the area to be pressed increases, and there is a fear of mold breakage due to the occurrence of imbalance in the sintered specimen. In addition, according to the above method, there is a problem that the period per unit operation is long and the specific surface area is large, so the number of sintered bodies that can be produced during one process is small, so the process unit cost is very high. There is a problem in that the working time is lengthened by repetitive processes such as raising the carbon sheet, raising the spacer for uniform pressure, and then raising the carbon sheet again. In addition, according to the above method, there may be a problem that foreign substances are transferred during the sample charging procedure.

In order to solve the above problems, the present invention is a mold having a multi-layered structure, wherein the core includes a hole, is divided into four or six, and is preformed in a space spaced apart between the outer sleeve and the inner sleeve. It is intended to provide a mold having a multi-layered structure for hot pressing sintering including a bonding base having a specific structure that may be charged and is formed between one or more mold units.

In an embodiment of the present invention for achieving the above object, a mold die (die); An outer sleeve provided inside the mold die; An inner sleeve disposed inside the outer sleeve and spaced apart from the outer sleeve by a predetermined distance; A core disposed in the inner sleeve;

An upper punch disposed at an upper end of a space spaced between the outer sleeve and the inner sleeve; And a lower punch disposed at a lower end of a space spaced between the outer sleeve and the inner sleeve. A coupling base formed between one or more mold units and the one or more mold units including, an upper base formed on an uppermost mold unit among the one or more mold units, and a lowermost mold unit. It provides a mold having a multilayered structure for hot pressing sintering, including a lower base to be formed.

In yet another embodiment of the present invention, the core includes a hole (hole) therein, and is divided into four or six, to provide a mold having a multi-layered structure for hot pressing sintering.

In another embodiment of the present invention, a mold having a multilayered structure for hot pressing sintering is provided in which a preformed specimen is loaded in a spaced apart between the outer sleeve and the inner sleeve.

In another embodiment of the present invention, the coupling base provides a multi-layered laminated structure mold, characterized in that the coupling base holds a central axis by adding a coupling base.

In the mold of the multilayer laminate structure for hot pressing sintering of the present invention, the preformed specimen can be used as it is during hot pressing sintering, so that 30 to 60% of additional space in the mold can be secured compared to the case of using powder. It is possible to manufacture an edge ring of more than twice the number of times, it is possible to prevent the introduction of impurities, and there is an effect of minimizing a separate post-processing process such as wire cutting after sintering.

In addition, since the mold of the multilayer laminate structure for hot pressing sintering of the present invention uses a preformed specimen with minimal density variation of the specimen, it is possible to effectively prevent distortion of the specimen during hot pressing sintering, and accordingly, hot pressing sintering There is an effect that the sintered density of the edge ring manufactured through processing corresponds to 95 to 99.9% of the theoretical value.

1 is a perspective view showing a mold apparatus of a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention.
2 is a perspective view showing a mold apparatus of a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention.
3 shows a multilayered structure of a mold apparatus having a multilayered laminated structure for hot pressing sintering according to an embodiment of the present invention.
4 is a cross-sectional view of a mold apparatus having a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention.
5 is a view showing a core as a configuration in a mold of a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention.

The invention will be described in detail below and exemplify specific embodiments, as various modifications may be made and may have various forms. However, this is not intended to limit the invention to a specific form of disclosure, it should be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the invention.

Meanwhile, the size of each component in the drawings may be exaggerated for the sake of explanation, and does not mean a size that is actually applied. 1 is a perspective view showing a mold apparatus of a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention. 2 is an exploded perspective view showing a mold apparatus having a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention, and FIG. 3 is an exploded perspective view of a mold apparatus having a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention. A multi-layer structure, FIG. 4 is a cross-sectional view of a mold apparatus according to an embodiment of the present invention, and FIG. 5 schematically shows a core in a configuration included in a mold.

Hereinafter, a mold having a multilayer laminate structure for hot pressing sintering according to a specific embodiment of the present invention will be described.

First, as described above, today's edge ring is manufactured using a sintered body obtained by hot pressing sintering a non-oxide-based structural material such as silicon carbide, boron carbide, and silicon nitride.According to the hot pressing sintering method, as the area to be pressed increases, the specimen There is a problem that the density deviation of (a) becomes large, and there is a concern of mold breakage due to the occurrence of imbalance in the sintered specimen (a). In addition, according to the above method, there is a problem that the period per unit operation is long and the specific surface area is large, so the number of sintered bodies that can be produced during one process is small, and the process cost is very high. There is a problem in that the working time is lengthened by repetitive processes such as raising the carbon sheet after input, raising the spacer for uniform pressure, and then raising the carbon sheet again. In addition, according to the above method, there may be a problem that foreign substances are transferred during the sample charging procedure.

The present inventors, focusing on the above problem, as a mold of a multilayered structure, the core 140 includes a hole 141 therein, is divided into four or six, the outer sleeve 120 and the inner sleeve ( 130) In the case of loading the preformed specimen (a) in the spaced space between, and including the coupling base 20 of a specific structure formed between one or more mold units 10, a plurality of uniformity is ensured Since it is possible to manufacture the edge ring using the preformed specimen (a), it is possible to secure an additional 30 to 60% of space in the mold compared to the case of using the sample powder directly during hot pressing sintering, and at least 3 times per process The above edge ring can be manufactured, impurities can be prevented, and additional post-processing processes such as wire cutting after sintering can be minimized, and distortion of the specimen (a) during hot pressing sintering can be prevented. It can be effectively prevented, and it was confirmed through an experiment that the sintered density of the edge ring thus produced corresponds to 95 to 99.9% of the theoretical value, so that the deviation is minimized, and the present invention was completed.

Specifically, a mold having a multilayer laminate structure for hot pressing sintering according to an embodiment of the present invention includes a mold die 110; An outer sleeve 120 provided inside the mold die 110; An inner sleeve 130 disposed inside the outer sleeve 120 to be spaced apart from the outer sleeve 120 by a predetermined distance; A core 140 disposed in the inner sleeve 130; An upper punch 150 disposed at an upper end of the spaced apart space between the outer sleeve 120 and the inner sleeve 130; And a lower punch 160 disposed at a lower end of a space spaced between the outer sleeve 120 and the inner sleeve 130. A coupling base 20 formed between the at least one mold unit 10 and the at least one mold unit 10, and an upper portion formed on the uppermost mold unit 10 among the at least one mold unit 10 It may include a base 30 and a lower base 40 formed under the mold unit 10 at the lowermost end.

Specifically, as shown in FIG. 3, in the mold of the multilayered structure according to an embodiment of the present invention, two mold units 10 are provided between an upper base and a lower base, and the two mold units 10 A coupling base 20 is provided therebetween, and each mold unit 10 is disposed around the coupling base 20. On the other hand, the mold according to another embodiment of the present invention may include two or more mold units 10, in which case, the mold unit 10 is stacked with the coupling base 20 as a boundary as described above. May be disposed, and the coupling base 20 may be provided between each mold unit 10.

Meanwhile, the sleeve may include an outer sleeve 120 provided inside the mold die, and an inner sleeve 130 disposed inside the outer sleeve 120 to be spaced apart from the outer sleeve 120 at a predetermined distance, A preformed specimen (a) may be loaded in the spaced apart space between the outer sleeve 120 and the inner sleeve 130.

In particular, the sleeve has a trapezoidal cross-sectional shape and is provided to facilitate the demolding of the sintered body, and may have a divided structure, does not directly contact the die and the sintered body, and is easy to separate and replaceable.

Meanwhile, the core 140 is provided to fix the inner sleeve 130 and has a characteristic of reducing defects resulting from a difference in thermal expansion caused by cooling of the sintered body. To this end, the core 140 is located inside the inner sleeve 130. In addition, the core 140 may be provided to have a four- or six-divided structure. In detail, the core 140 according to the present invention is divided into four or six about a central axis in an up-down direction (meaning a direction toward the upper base and the lower base, respectively) as a more preferred embodiment so that they are separated from each other in the outer direction. It may be an assembly of divided cores 145 provided. In more detail, a plurality of divided cores 145 provided in four or six are divided around the central axis of the upper base 30, the central axis of the core 140, and the central axis of the lower base 40 to match each other. Is formed. Here, the plurality of split cores 145 are formed spaced apart from each other at the same arc interval. Accordingly, the plurality of split cores 145 have a fan-shaped cross-sectional shape having the same size and shape when viewed from an upper direction and a lower direction. In addition, between the plurality of split cores 145, when viewed from the vertical direction, a space formed with a "+" is formed. Through this, when an external force is applied to the mold die 110, the positions of the plurality of split cores 145 located therein are varied and shock can be absorbed. Therefore, compared to the case where the split core 145 as described above is not provided, problems such as damage of the sintered body caused by external force can be solved, and the state before demoulding is located inside the mold die 110. The safety of the sintered body can be remarkably improved.

As another more preferred embodiment of the present invention, the core 140 is an assembly of a plurality of divided cores 145, but the aforementioned hole 141 may be additionally formed. In detail, the core 140 is formed of a split core 145 divided into four or six about the central axis of the hole 141 formed through the vertical direction, and spaced apart from each other around the central axis of the hole 141 It may be provided as an assembly of divided cores 145 provided. That is, the split core 145 formed by being divided into four or six has a circular arrangement around the central axis of the hole 141. Accordingly, a space is formed between each of the split cores 145, which is a “+” shape and a “o” shape at the center when viewed from the vertical direction. Through this, when an external force is applied to the mold die 110, the positions of the plurality of split cores 145 located therein are varied and shock can be absorbed. By providing the divided core 145 as described above, it is easy to demold and has a remarkable effect of effectively preventing damage to the sintered body during the demoulding.

Meanwhile, the punch is formed of an upper punch 150 disposed at the upper end of the spaced space between the outer sleeve 120 and the inner sleeve 130 and the spaced space between the outer sleeve 120 and the inner sleeve 130. It may include a lower punch 160 disposed at the bottom, and the punch allows the sintered body to be formed in a desired shape by adjusting the gap between the upper punch 150 and the lower punch 160 according to a desired shape when manufacturing the sintered body. Play a role.

Meanwhile, in the mold according to an exemplary embodiment of the present invention, the core 140 includes a hole 141 therein, and may be divided into 4 or 6 divisions. In particular, when the hole 141 is formed inside the core 140, shrinkage stress is reduced during cooling after sintering the sintered body to minimize defects in the sintered body.

Meanwhile, a carbon sheet (not shown) may be additionally provided for the constituent elements of the mold, and the carbon sheet is provided to facilitate demolding, prevent contamination, and meet thermal expansion, and specifically 0.25 mm to Carbon sheets in the 5 mm thickness range can be used.

On the other hand, in the mold according to an embodiment of the present invention, the coupling base 20 is a coupling base characterized in that it holds the central axis in a structure capable of coupling the upper core 140 and the lower upper punch 150 The addition of the mold may be capable of additional lamination, and by having the above configuration, it is possible to further improve the mold having a multilayered structure (ex. stability and uniformity of the process).

Meanwhile, in the mold according to an embodiment of the present invention, a preformed specimen (a) may be charged in the spaced apart space between the outer sleeve 120 and the inner sleeve 130.

Specifically, when using the hot press sintering method according to the prior art, in the case of a mold structure in a generally used furnace, a sample powder for forming a sintered body is charged into the mold, molded into a cylinder or ring, and then processed into a post-processing such as wire cutting. It was common to manufacture an edge ring. In this case, as the area to be pressed increases, there is a problem in that the density variation of the specimen (a) increases, and there is a fear of mold breakage due to the occurrence of imbalance in the sintered specimen (a). In addition, according to the above method, there is a problem that the period per unit operation is long and the specific surface area is large, so the number of sintered bodies that can be produced during one process is small, and the process cost is very high. There is a problem in that the working time is lengthened by repetitive processes such as raising the carbon sheet after input, raising the spacer for uniform pressure, and then raising the carbon sheet again. In addition, according to the above method, there may be a problem that foreign substances are transferred during the sample charging procedure.

On the other hand, in the mold of the multilayer laminate structure for hot pressing sintering according to the present invention, it is necessary to perform the above-described repetitive process by performing the sintering process by loading the preformed specimen (a) without introducing a powdered sample. There is no risk of damage to the mold due to sample imbalance, and it is possible to secure an additional space of 30 to 60% in the mold compared to the case of using powder, making it possible to manufacture at least twice as many edge rings per one process. It is possible to prevent impurities from entering, and there is an effect of minimizing a separate post-processing process such as wire cutting after sintering. In addition, since the mold of the multilayered structure for hot pressing sintering of the present invention uses a preformed specimen (a) with a minimized density variation of the specimen (a), it effectively prevents distortion of the specimen (a) during hot pressing sintering. Accordingly, there is an effect that the sintering density of the edge ring manufactured through hot pressing sintering is 95 to 99.9% of the theoretical value.

In a more preferred embodiment of the present invention, the preformed specimen (a) is laminated and inserted, but a carbon sheet member may be further provided therebetween. Specifically, a plurality of specimens (a) are preformed and provided, and the plurality of specimens (a) are charged in a spaced apart space formed between the outer sleeve 120 and the inner sleeve 130. Here, a carbon sheet member is provided between the plurality of specimens (a). That is, the specimen (a) and the carbon sheet member are repeatedly laminated alternately with each other. Accordingly, the plurality of specimens (a) are not in contact with each other and are kept spaced apart by the carbon sheet member. Therefore, compared to the case where the carbon sheet member is not provided, convenience in the separation process can be significantly improved. That is, when the carbon sheet member is not provided, the plurality of specimens (a) are adhered to each other, so that separation is not easy, and there is a problem of damage and quality deterioration. On the other hand, the present invention can solve the above problems through a carbon sheet member provided between the preformed specimen (a) and the specimen (a), not in powder form. In addition, since the carbon sheet member is provided, the preformed specimen (a) is subjected to uniform pressure in all directions to minimize density variation, and thus, a remarkable quality improvement effect can be achieved compared to the conventional technology.

Specifically, the preformed specimen (a) that can be charged during the hot pressing sintering process of the present invention is 1 selected from the group _{consisting of silicon carbide (SiC), boron carbide (B 4} C) and silicon nitride (Si ₃ N _{4 ).} It may be a preformed specimen (a) made of more than one sample.

Meanwhile, the silicon carbide (SiC), boron carbide (B ₄ C) and silicon nitride (Si ₃ N ₄ ) are non-oxide-based structural materials, along with mechanical properties such as high strength, high hardness, and wear resistance, as well as oxidation resistance, corrosion resistance, and It is the main material of ceramics with low thermal conductivity and thermal properties such as high thermal shock resistance and high temperature strength due to the coefficient of thermal expansion. In particular, the non-oxide-based structural material has a strong covalent bond due to material properties, and has a large grain boundary energy and a low diffusion rate of the grain boundary, making it difficult to form through sintering.

Thus, as the non-oxide-based structural material, silicon carbide (SiC), boron carbide (B ₄ C) and silicon nitride (Si ₃ N ₄ ) are at least one process selected from prepress and cold isostatic pressure for preforming It may be molded into a form that can be immediately applied to the hot-pressing sintering process.

As an example, the preformed specimen (a) granulates at least one sample selected from the group consisting of silicon carbide (SiC), boron carbide (B ₄ C), and silicon nitride (Si ₃ N _{4) having a non-oxide-based structure.} After manufacturing in the form of powder, it is uniaxially pressed through a prepress process, and the molded specimen (a) is uniaxially pressurized, and the molded specimen (a) is cold-pressed. It may be a specimen (a) obtained through a process of minimizing the density variation in the specimen (a) by isostatic pressure pressing.

On the other hand, in the preformed specimen (a) as above, the foreign matter of the specimen (a) is completely removed, and the density variation of the specimen (a) is minimized, effectively preventing the distortion of the specimen (a) during the hot pressing sintering process described above. At the same time, a separate post-processing process such as wire cutting after sintering is not required, and the sintered density of the edge ring manufactured through hot pressing sintering corresponds to 95 to 99.9% of the theoretical value.

In the mold of the multilayered structure for hot pressing sintering of the present invention described above, the preformed specimen (a) can be used as it is during hot pressing sintering, so that an additional space of 30 to 60% in the mold can be secured compared to the case of using powder. As a result, it is possible to manufacture at least twice the number of edge rings per one process, impurities transfer can be prevented, and additional post-processing processes such as wire cutting after sintering are minimized.

In addition, since the mold of the multilayered structure for hot pressing sintering of the present invention uses a preformed specimen (a) with a minimized density variation of the specimen (a), it effectively prevents distortion of the specimen (a) during hot pressing sintering. Accordingly, there is an effect that the sintering density of the edge ring manufactured through hot pressing sintering is 95 to 99.9% of the theoretical value.

The embodiments have been described above, but these are only examples and do not limit the present invention, and those of ordinary skill in the art to which the present invention pertains are not exemplified above without departing from the essential characteristics of the present embodiment. It will be seen that various modifications and applications are possible. For example, each component specifically shown in the embodiment can be modified and implemented. And differences related to these modifications and applications should be construed as being included in the scope of the present invention defined in the appended claims.

10: mold unit 110: mold die
120: outer sleeve 130: inner sleeve
140: core 141: hole
145: split core 150: upper punch
160: lower punch 20: combined base
30: upper base 40: lower base
a: Psalm

Claims (6)

Mold die 110;
An outer sleeve 120 provided inside the mold die 110;
An inner sleeve 130 disposed inside the outer sleeve 120 to be spaced apart from the outer sleeve 120 by a predetermined distance;
A core 140 disposed in the inner sleeve 130;
An upper punch 150 disposed at an upper end of the spaced apart space between the outer sleeve 120 and the inner sleeve 130; And
A lower punch 160 disposed at a lower end of a space spaced between the outer sleeve 120 and the inner sleeve 130; At least one mold unit 10 comprising a and
A coupling base 20 formed between the one or more mold units 10,
Multilayer stacking for hot pressing sintering, including an upper base 30 formed on an uppermost mold unit 10 of the one or more mold units 10, and a lower base formed under the lowermost mold unit 10 The mold of the structure.
The method of claim 1,
The core 140 is characterized in that it includes a hole 141 therein, the mold of the multi-layered structure for hot pressing sintering.
The method according to claim 1 or 2,
The core 140 is a split core 145 that is divided into four based on a central axis to prevent damage to the sintered body during mold demoulding. The mold having a multilayer laminate structure for hot pressing sintering.
The method of claim 1,
The coupling base 20 is a structure capable of coupling the upper core 140 and the lower upper punch 150 to hold the central axis. By adding a coupling base, the mold can be additionally stacked. Multi-layer laminated mold for pressure sintering
The method of claim 1,
A mold having a multilayered structure for hot pressing sintering, in which a preformed specimen (a) is charged in the spaced apart space between the outer sleeve 120 and the inner sleeve 130.
The method of claim 5,
In the spaced apart space, a plurality of specimens (a) are stacked and inserted, and a carbon sheet member is provided between each of the specimens (a).

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