KR20210014089A - Process for preparing vessel for drain and storage of chemicals - Google Patents

Abstract

The present invention relates to a method for manufacturing a vessel for drainage and storage of chemicals and, more specifically, to a vessel for drainage and storage of chemicals, which is formed by airtight coupling an upper body to a lower body by fusion and then fitting connectors, having one or more various shapes, to a body, thereby performing a chemical drainage and storage function, and a manufacturing method thereof. According to the present invention, a vessel for drainage and storage of chemicals can solve various problems caused by conventional incomplete welding, can use PFA fusion, thereby providing strong durability and airtightness against pressure, can have all parts made of a PFA material, thereby being completely rod-welded and fused with all the parts made of the PFA material and increasing product safety, and can have the characteristics of the translucent PFA material, thereby enabling a user to identify internal chemicals and being made lightweight. In addition, the manufacturing method can use an article molded by injection molding, thereby simplifying manufacturing processes, can shorten manufacturing time, thereby increasing working efficiency and reducing the resultant costs, and can shorten the delivery period of the product, thereby increasing manufacturing productivity.

Description

Manufacturing method of chemical drain and storage container structure {Process for preparing vessel for drain and storage of chemicals}

The present invention relates to a method of manufacturing a chemical drain and storage container structure, and more particularly, by sealing an upper body and a lower body by fusion bonding, and then fitting and coupling at least one connector having various shapes to the body. It relates to a structure of a chemical drain and storage container that performs a chemical drain and storage function, and a manufacturing method thereof.

In general, in a semiconductor manufacturing process or an LCD manufacturing process, piping for various fluid supply facilities is essentially installed for stably and safely supplying various types of fluids to a process chamber in a clean room section in a constant quality state.

When manufacturing a substrate in such a semiconductor manufacturing process, various chemical solutions (Chemical) and ultrapure water (UPW) (ultrapure water containing hydrogen or ozone, i.e., so-called hydrogen water or ozone water) are used, and the fluid supply facility is a process device. It requires special piping equipment with sufficient cleanliness, corrosion resistance and strength to prevent contamination or leakage while keeping the fluid in high purity throughout the process.

For draining or storing such chemicals, a drain and storage container of chemicals are used.

However, the drain and storage containers of chemicals according to the prior art are made of PTFE, and due to the characteristics of PTFE, the inside of the BOX due to frequent leakage due to incomplete welding [PTFE BODY and PFA welding (BAND & ROD]) and color opacity of the PTFE material. It is impossible to check with the naked eye, and the product weight is heavy due to the characteristics of the molding product, and there is a problem that productivity decreases due to the characteristics of the molding product.

Therefore, there is a need for an improved chemical drain and storage container structure capable of solving this problem.

Korea Registration No. 10-1058767 (August 17, 2011) Korea Registration No. 10-0832447 (May 20, 2008)

The present inventors have studied intensively to improve the problems associated with the prior art as described above, and to develop an efficient chemical drain and storage container structure. As a result, the chemical drain and storage container structure constitute the main body. All materials are made of PFA, and PFA fusion is applied to have strong durability and airtightness against pressure. All parts are made of PFA material, allowing complete ROD welding and fusion with all parts applied with PFA material, as well as product safety. By using this improved and translucent PFA material, it was possible to check the internal chemical and to make it possible to reduce the weight of the injection-applied product, and the present invention was completed.

The problem to be solved by the present invention is not limited thereto, and other problems that are not mentioned will be clearly understood by those skilled in the art from the following description.

Accordingly, the object of the present invention is, in one aspect, by applying PFA fusion bonding constituting the main body to have strong durability and airtightness against pressure, and all parts are made of PFA material, so that all parts to which PFA material is applied and complete ROD welding and The purpose is to provide a structure for a chemical drain and storage container that not only can be fused, but also improves product safety, allows confirmation of internal chemicals due to translucent PFA material properties, and enables product weight reduction.

An object of the present invention is, in an additional aspect, that the manufacturing process is simple by applying the injection product and the manufacturing time is short, so that the manufacturing cost can be reduced and the manufacturing cost can be reduced and the manufacturing productivity is high, such as shortening the delivery time, and a storage container for a chemical It is to provide a method of manufacturing the structure.

The object of the present invention as above is

A storage container body 100 formed by injection and sealed at one end of the cylindrical upper body 110 and the lower body 120 by fusion sealing;

A viewing window 300 inserted into the interior of the main body 100 from the upper part of the main body 100 of the storage container and coupled to the fitting; And

At least one selected from the group consisting of one or more male connectors, tube adapters, flange adapters, level gauge connectors, pipes and pipe elbows inserted into the main body 100 from the outer circumferential surface of the main body 100 of the storage container is coupled by fitting coupling It can be achieved by a chemical drain and storage container structure and a manufacturing method thereof, characterized in that the interior is communicated.

The structure of the chemical drain and storage container according to the present invention can solve various problems caused by conventional incomplete welding, has strong durability and airtightness against pressure by applying PFA fusion, and all parts are made of PFA material. Not only can complete rod welding and fusing with all parts applied with PFA material, but also product safety is improved, internal chemical check is possible with the characteristics of translucent PFA material, and lightweight products applied to injection products are possible. In addition, according to the manufacturing method according to the present invention, the manufacturing process is simple and the manufacturing time is short, so that the manufacturing process is simple and the manufacturing time is short, so that the cost can be reduced, and the manufacturing productivity is high, such as shortening the delivery time.

1 is a manufacturing process diagram of a structure of a chemical drain and storage container according to the present invention.
Fig. 2 is a plan view showing the structure of a chemical drain and storage container according to the first embodiment of the present invention.
3 is a left side explanatory view of the structure of a chemical drain and storage container according to the first embodiment of the present invention.
Fig. 4 is a front explanatory view of the structure of a chemical drain and storage container according to the first embodiment of the present invention.
5 is a right side explanatory view of the structure of a chemical drain and storage container according to the first embodiment of the present invention.
6 is a plan view illustrating a structure of a chemical drain and a storage container according to a second embodiment of the present invention.
7 is a left side explanatory view of a structure of a chemical drain and storage container according to a second embodiment of the present invention.
Fig. 8 is a front explanatory view of a structure of a chemical drain and storage container according to a second embodiment of the present invention.
9 is a right side explanatory view of a structure of a chemical drain and storage container according to a second embodiment of the present invention.
10 is an explanatory diagram showing the configuration of the through tube adapter according to the present invention.
Fig. 11 is a plan view illustrating a structure of a chemical drain and storage container according to a third embodiment of the present invention.
12 is a front explanatory view of the structure of a chemical drain and storage container according to a third embodiment of the present invention.
13 is a left side explanatory view of a structure of a chemical drain and storage container according to a third embodiment of the present invention.
14 is a right side explanatory view of a structure of a chemical drain and storage container according to a third embodiment of the present invention.
15 is a view for explaining a detailed fitting structure of the male connector.
16 is a perspective view showing a heat fusing machine for heat fusing.
17 is a test result of fracture performance of the structure of the drain and storage container of the chemical according to the present invention.
18 and 19 are photographs of the results of a fracture performance test of the structure of the drain and storage container of the chemical according to the present invention.

In one aspect, the present invention,

A storage container body 100 formed by injection and sealed at one end of the cylindrical upper body 110 and the lower body 120 by fusion sealing;

A viewing window 300 inserted into the interior of the main body 100 from the upper part of the main body 100 of the storage container and coupled to the fitting; And

At least one selected from the group consisting of one or more male connectors, tube adapters, flange adapters, level gauge connectors, pipes and pipe elbows inserted into the main body 100 from the outer circumferential surface of the main body 100 of the storage container is coupled by fitting coupling It provides a chemical drain and storage container structure, characterized in that the internal communication is made.

The present invention in another further aspect,

a) a preliminary step of preliminarily inspecting the appearance and dimensions of materials constituting the drain and storage container;

b) forming a cylindrical upper body 110 and a lower body 120 with one end sealed by injection;

c) chamfering the upper body 110 and the lower body 120 formed by injection and processing by removing burrs,

d) washing and drying step of washing and drying the fusion site as the center;

e) a body fusion bonding step of fusion bonding the upper body 110 and the lower body 120 in a butting state;

f) hole processing step of forming holes in the outer circumferential surface of the main body 100 of the drain and storage container and then processing the formed holes;

g) a viewing window 300 into the formed hole; And a fitting for inserting a component selected from the group consisting of one or more male connectors, tube adapters, flange adapters, level gauge connectors, pipes, and pipe elbows from the outer circumferential surface of the main body 100 of the storage container into the main body 100 by fitting coupling. Bonding step; And

h) a finishing step of washing and drying by checking the presence or absence of formation of foreign substances on the drain and storage container structure of the manufactured chemical; and a method for manufacturing a drain and storage container structure of a chemical.

Hereinafter, a drain and storage container structure of a chemical of the present invention and a method of manufacturing the same will be described in detail on the basis of the accompanying exemplary drawings.

The present invention may be modified in various ways and may have various embodiments, and specific embodiments will be described in detail in the detailed description. However, this is not intended to limit the present invention to a specific embodiment, it is to be understood to include all changes, equivalents, or substitutes included in the spirit and scope of the present invention.

In addition, terms used in the present invention are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as “comprise” or “have” are intended to designate the existence of features, numbers, steps, actions, components, parts, or a combination thereof described in the specification, and one or more other features It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance.

1 is a manufacturing process diagram of a structure of a drain and storage container of a chemical according to the present invention, FIG. 2 is a plan view of a structure of a drain and storage container of a chemical according to a first embodiment of the present invention, and FIG. A left side explanatory view of the structure of a chemical drain and storage container according to the first embodiment, Fig. 4 is a front explanatory view of the structure of a chemical drain and storage container according to the first embodiment of the present invention, and Fig. 5 is the present invention It is a right side explanatory view of the structure of a chemical drain and a storage container according to the first embodiment of. 15 is a view for explaining a detailed fitting structure of the male connector, and FIG. 16 is a perspective view showing a heat fusing machine for heat fusing.

1 to 16, the structure of the drain and storage container of the chemical according to the present invention has a buffering role when there are too many chemicals to be drained, an overflow or backflow prevention role in a filter replacement or drain process, and an external drain when equipment fails. It can perform the function of a drain box that serves as a safety device to perform the function of a storage container used for storage for chemical storage, agitation, supply and transport.

Hereinafter, the term "pipe" may hereinafter be used interchangeably with the term "pipe".

The piping used in the present invention may be a piping providing a path for flow and storage of various chemicals and ultrapure water (DIW) used in semiconductor manufacturing apparatuses. In other semiconductor manufacturing apparatuses, their use is not limited, such as being applied to various pipes or ducts that provide a path for the flow and storage of fluid. The material of the pipe may preferably be made of a material including PFA, that is, perfluoroalkoxy, which is a kind of fluorine resin.

PFA is translucent, has excellent heat resistance and chemical resistance, and has excellent hot strength especially at high temperatures, so it is used in piping lines that require special high temperature characteristics. In addition, PFA has the advantage of being able to observe the fluid flow inside. Meanwhile, the material of the pipe is not limited to PFA.

Hereinafter, the structure of the chemical drain and storage container according to the first embodiment of the present invention will be described in detail.

The structure of the chemical drain and storage container according to the first embodiment of the present invention has a cylindrical storage container body 100 as a basic structure.

The cylindrical storage container body 100 may be manufactured by forming a cylindrical upper body 110 and a lower body 120 having one end sealed by injection, respectively, and then airtightly bonding them by fusion bonding.

The viewing window 300 installed on the upper portion of the cylindrical storage container body 100 may be installed by fitting a hole in the upper portion of the body 100 of the storage container and fitting into the interior of the body 100.

The upper viewing window 300 has a ring-shaped HT PVC flange 310, a HT PVC transparent cover 320, a PFA film 303, an O-ring 340, and a PFA flange 330 in a state in which they are sequentially stacked. At the edges, each of the upper hex bolts 301, plate washers 302 and lower reinforcing flanges 304, plate washers 305, spring washers 306 and nuts 307 fastened by, and viewing window 300 ), it may be preferable that the pipe 331 penetrates and is coupled to the inside of the body 100 by fitting coupling.

Similarly, the flange 250 through which the chemical flows in, the male connector 210 through which the chemical flows out, the male connector 220 for LPC drain, the male connector 230 for exhaust box, the dip tube connector 240 for the inhaler function, and the male The connector 260 and the male connector 270, which is a level gauge, are coupled from the outer circumferential surface of the main body 100 of the storage container into the main body 100 by fitting coupling.

As shown in FIG. 15, the male connector 210 has a main body 211 and a pipe penetration part 212 integrally formed, and a PFA fitting part 213 having a general structure on the upper part of the main body 211 Is formed, and it is preferable that a rod welding part 215 is formed at the boundary between the container body 100 and the male connector 210.

The adapter or connector may pass through the main body 100 and have an extended portion (not shown) having a predetermined length.

The flange 250 is made of a sus material + Teflon coating, a pipe flange adapter 251 is coupled to the outside, and a pipe 252 is fitted to the body 100 on the inside.

The material of the storage container body 100, the male connector, the tube adapter, the flange adapter, the level gauge connector, the pipe and the pipe elbow is preferably a PFA resin or a fluorine resin.

In a specific embodiment, the connectors 210, 220, 230, 240, 260, 270 may be formed of a Teflon (PFA and PTFE) material, and the sizes may be 1/4", 3/8", 1/2 It can be formed in various sizes such as ", 3/4", 1", 1-1/2" inches.

A rod welding part 215 is formed at the boundary between the main body 100 and the connector 210, and the rod welding method is performed in a conventional manner, and a uniform fitting height of the drain and storage container structure can be secured by welding. It is possible to secure quality, such as durability, by utilizing the space.

Materials used in the coupling structure including the male connector 210 or the tube adapter are not formed by bonding, bonding, or fusion of individual components, but are integrally formed by injection molding, which is a known core injection injection molding method. It can be manufactured by

By applying such PFA injection parts, manufacturing time can be saved, and fusion bonding and welding quality performance can be improved by applying the same PFA material to all parts.

The fusion process may be mainly performed by thermal fusion, and the heat fusion of the upper body 110 and the lower body 120 according to the present invention may be performed using a heat fusion machine.

As an example, FIG. 16 is a perspective view showing a heat fusing machine for heat fusing of upper and lower main bodies. Such a heat splicer may include a base plate 400, a first clamp 410, a second clamp 420, a heat fusion unit 430, and the like.

The base plate 400 is generally provided as a rectangular flat plate, and a first clamp 410, a heat fusion unit 430, and a second clamp 420 are sequentially disposed thereon.

The first clamp 410 and the second clamp 420 are provided to firmly fix the upper and lower bodies 110 and 120 so as not to move during the fusing operation. The first clamp 410 is disposed on one side of the heating fusion unit 430 to clamp the upper body 110, and the second clamp 420 is a heating fusion unit 430 to clamp the lower body 120 It is placed on the other side of. The first clamp 410 and the second clamp 420 have the same structure. The first clamp 410 is a semicircular lower clamper 411 that supports one side of the upper body 110 and a semicircular detachable type that is hinged to the lower clamper 411 to support the other side of the upper body 110 It may include an upper clamper 412 and a fastening member 413 for fixing the detachable upper clamper 412 to the lower clamper 411 by being coupled to both sides of the lower clamper 411 and the separate upper clamper 412, respectively. have. The heating and fusion part 430 is disposed between the first clamp 410 and the second clamp 420. The heating fusion unit 430 includes a heater installed to surround the joint portion of the upper body 110 and the lower body 120 to apply heat to the joint portion. The heating and fusion unit 430 is composed of a lower body 431 and an upper body 432, and a heater for applying heat to the bonding portion is installed on the inner side. One end of the lower body 310 and the upper body 320 is hinged to open and close the upper body 432 with respect to the lower body 431 around the hinge. Further, the other ends of the lower body 431 and the upper body 432 are fixed by the fastening member 340. Reference numeral 434 denotes a fastening member of the heated and fused portion.

When using such a device, heat fusion is performed by arranging the ends of the upper body 110 and the ends of the lower body 120 to face each other, and then attaching the ends of the upper body 110 and the lower body 120 to the first clamp 410 ) And securely fixed to the second clamp 420. Then, in a state in which the upper body 110 and the lower body 120 are butted to each other, heat is applied to the heater to fuse the jointed portion, and then cool to perform thermal fusion.

Hereinafter, the structure of a chemical drain and storage container according to a second embodiment of the present invention will be described in detail.

6 is a plan view illustrating a structure of a chemical drain and storage container according to a second embodiment of the present invention, and FIG. 7 is a left side explanatory view of a structure of a chemical drain and storage container according to a second embodiment of the present invention. , FIG. 8 is a front explanatory view of a structure of a chemical drain and storage container according to a second embodiment of the present invention, and FIG. 9 is a right side explanatory view of a structure of a chemical drain and storage container according to a second embodiment of the present invention. , Figure 10 is an explanatory diagram showing the configuration of the through-type tube adapter according to the present invention.

The structure of a chemical drain and storage container according to the second embodiment of the present invention is a storage container body in which a cylindrical upper body 110 and a lower body 120 formed by injection and sealed at one end are hermetically coupled by fusion bonding. 100); And a viewing window 300 inserted and coupled from the upper portion of the main body 100 of the storage container to the inside of the main body 100; including, a plurality of male connectors 210, 220, 221, 223, 230, 231, The through-type male connector 241, the tube adapter 292 coupled with the pipe elbow 293, and the tube adapter 290 coupled with the pipe 291 are the main body 100 at the outer peripheral surface of the main body 100 of the storage container. It is made by joining into the fitting by welding.

In the chemical drain and storage container structure according to the second embodiment of the present invention, the structures of the storage container body 100 and the viewing window 300 are the same as those of the first embodiment.

The tube adapter 290 may be formed by being coupled to a pipe 291 to penetrate into the body 100.

The plurality of male connectors 210, 220, 221, 223, 230, 231 may have diameters of various sizes, and specific functions may be different.

Hereinafter, a structure of a chemical drain and storage container according to a third embodiment of the present invention will be described in detail.

11 is a plan view illustrating a structure of a chemical drain and a storage container according to a third embodiment of the present invention, and FIG. 12 is a front explanatory view of a structure of a chemical drain and a storage container according to a third embodiment of the present invention. 13 is a left side explanatory view of a structure of a chemical drain and storage container according to a third embodiment of the present invention, and FIG. 14 is a right side explanatory view of a structure of a chemical drain and storage container according to a third embodiment of the present invention. .

The structure of the chemical drain and storage container according to the third embodiment of the present invention is a storage container body in which a cylindrical upper body 110 and a lower body 120 formed by injection and sealed at one end are hermetically coupled by fusion bonding. 100); Including a plurality of male connectors (220, 230, 231, 260), a tube connector 240 and a tube adapter 292 coupled with the pipe elbow 293 is the outer peripheral surface of the main body 100 of the storage container It is made by fitting into the body 100 by welding. Among the male connectors, 223 is disposed on the upper side of the main body, and 260 is disposed on the lower side of the main body.

In the structure of the chemical drain and storage container according to the third embodiment of the present invention, the storage container body 100 is the same as that of the first embodiment, and has a form without a viewing window 300.

The male cannector 210 ′ through which chemicals flow in and the male connector 210 through which chemicals flow out may be joined by fitting welding into the body 100 from the left and right outer circumferential surfaces of the main body 100 of the storage container. .

In a further aspect, the present invention provides a method for manufacturing a chemical drain and storage container structure as described above. Each step will be described in detail below.

a) In the preliminary step, whether or not the exterior is scratched and its dimensions including the condition of the raw materials used in the manufacture of the drain and storage container structure of the chemical, the material used in the bonding structure including the chemical, pipe, flange, male connector and tube adapter. Check your back in advance.

b) In the injection step, the upper body 110 of a cylindrical shape with one end closed by including the step of preparing the PFA raw material powder, the step of putting the raw material into the injection machine, the melting step of the upper and lower bodies, and the injection step of the upper and lower bodies. And the lower body 120 to form.

c) In the processing step, a burr is removed using a processing machine to chamfer the upper body 110 and the lower body 120 formed by injection.

d) In the washing and drying step, the surface to be fused is rubbed with a nonwoven fabric having excellent dust removal performance (more preferably, BEMCOT M-3 nonwoven fabric) using isopropyl alcohol (IPA), etc., and then dried.

e) In the fusing step, after setting the upper body 110 and the lower body 120 to the fusing machine (e.g., clamping), checking the spacing and angle, moving the preheated hot plate forward, heating the product, and moving the hot plate backward. After fusion, check the bead for abnormalities.

f) In the hole processing step, holes are formed on the outer circumferential surface of the main body 100 of the drain and storage container, and then tapping is performed immediately after processing the formed holes. This is to hold the position of the fitting and to firmly couple the fitting to the body and to have orientation.

g) The body of the storage container by fitting a part selected from the group consisting of fitting coupling members such as a viewing window 300, one or more male connectors, tube adapter flange adapters, level gauge connectors, pipes and pipe elbows into the interior of the subsequently formed hole. After inserting and fitting into the main body 100 from the outer circumferential surface of 100, the upper boundary of the container main body 100 is rod-welded.

Lastly, in the finishing step h), it is finished by washing and drying after checking the presence or absence of foreign substances on the drain and storage container structure of the manufactured chemical.

The manufacturing method of a chemical drain and storage container structure according to the present invention can provide a product with excellent durability and performance, and a simple working process and a short manufacturing time, resulting in high working efficiency and thus reducing manufacturing cost. .

Bursting pressure test for two samples of the chemical drain and storage container prepared according to the preferred embodiment of the present invention by requesting the Korea Institute of Construction and Living Environment (ASTM D1599 when breaking at a pressure increase rate of 0.5 MPa/min at 20°C. The pressure was measured until and the results are shown in Figs. 17 to 19. Fig. 17 is a test result of the destructive performance of the drain and storage container structure of the chemical according to the present invention, and Figs. 18 and 19 are the drain of the chemical according to the present invention and This is a photograph of the results of the destruction test results of the storage container structure.

As a result, each sample exhibited 0.25 and 0.55 MPa results, satisfying the physical property requirements.

As described above, the embodiments of the present invention have been described in detail as described above, but the scope of the present invention is not limited thereto, and the scope of the present invention is included to the extent substantially equal to the embodiments of the present invention. Of course.

100: drain and storage container body
110: upper body
120: lower body
210, 220, 230, 240, 260, 270: male connector
250: flange
291: pipe
292: tube adapter
293: pipe elbow
300: viewing window
410: first clamp
420: second clamp
430: heating and fusion part

Claims (2)

a) a preliminary step of preliminarily inspecting the appearance and dimensions of materials constituting the drain and storage container;
b) forming a cylindrical upper body 110 and a lower body 120 with one end sealed by injection;
c) chamfering the upper body 110 and the lower body 120 formed by injection and processing by removing burrs,
d) washing and drying step of washing and drying the fusion site as the center;
e) a body fusion bonding step of fusion bonding the upper body 110 and the lower body 120 in a butting state;
f) hole processing step of forming holes in the outer circumferential surface of the main body 100 of the drain and storage container and then processing the formed holes;
g) a viewing window 300 into the formed hole; And a fitting for inserting a component selected from the group consisting of one or more male connectors, tube adapters, flange adapters, level gauge connectors, pipes, and pipe elbows from the outer circumferential surface of the main body 100 of the storage container into the main body 100 by fitting coupling. Bonding step; And
h) a finishing step of washing and drying by checking the presence or absence of formation of foreign matter on the drain and storage container structure of the prepared chemical; and a method for manufacturing a drain and storage container structure of a chemical. The method according to claim 1,
The structure of the drain and storage container of the chemical is
A storage container body 100 formed by injection and sealed at one end of the cylindrical upper body 110 and the lower body 120 by fusion sealing;
A viewing window 300 inserted into the interior of the main body 100 from the upper part of the main body 100 of the storage container and coupled to the fitting; And
At least one selected from the group consisting of one or more male connectors, tube adapters, flange adapters, level gauge connectors, pipes and pipe elbows inserted into the main body 100 from the outer circumferential surface of the main body 100 of the storage container is coupled by fitting coupling Is done,
The viewing window 300 is in a state in which the ring-shaped PVC flange 310, the PVC transparent cover 320, the PFA film 303, the O-ring 340, and the PFA flange 330 are sequentially stacked at the edges of the disc, respectively. It is fastened by a hexa bolt 301, a plate washer 302, and a reinforcing flange 304, a plate washer 305, a spring washer 306, and a nut 307 on the upper side of the
The central portion of the viewing window 300 is coupled through the pipe 331 through the inside of the body 100 by fitting welding,
The material of the storage container body 100, the male connector, the tube adapter, the flange adapter, the level gauge connector, the pipe and the pipe elbow is PFA resin,
The method of manufacturing a chemical drain and storage container structure, characterized in that the fusion is performed by thermal fusion.

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