KR20210006036A - X-ray inspection apparatus having vibration reduction member of surpport plate for object to be inspected - Google Patents

Abstract

Disclosed is an X-ray inspection apparatus that seats a subject on a support plate of a stage and receives X-rays emitted from an X-ray tube and transmitted through the subject to obtain an inspection image. According to the present invention, the X-ray inspection apparatus comprises: a bracket coupled to the stage; and a plurality of vibration reducing members installed on the bracket to support the support plate. The plurality of vibration reducing members are disposed adjacent to the X-ray tube.

Description

X-ray inspection device equipped with a vibration reducing member of the object support plate {X-RAY INSPECTION APPARATUS HAVING VIBRATION REDUCTION MEMBER OF SURPPORT PLATE FOR OBJECT TO BE INSPECTED}

The present invention relates to an X-ray inspection apparatus, and in particular, to an X-ray inspection apparatus having a vibration reducing member for a support plate to be tested capable of effectively absorbing the vibration transmitted to the support plate on which the test object is seated.

X-rays have a characteristic diffraction pattern for each crystal because their wavelength is as small as an atomic size, and because of their high energy, they have a strong fluorescence effect on a substance, can easily penetrate the substance, and ionize the substance. When transmitting such X-rays, the transmittance of the X-rays varies depending on the density of the substance or the atom, and thus the energy impinging on the phosphor is different.

The X-ray inspection apparatus using this principle can be divided into a medical X-ray inspection apparatus for photographing the inside of a living body, and an industrial X-ray inspection apparatus for non-destructive inspection used in general industrial fields.

In particular, the industrial X-ray inspection apparatus is configured to obtain an image having a remarkably higher resolution than a medical X-ray inspection apparatus because it photographs a microscopic object such as a semiconductor chip or a ball grid array (BGA).

However, vibration transmitted to the industrial X-ray inspection apparatus or generated by itself acts as a factor that prevents obtaining high-resolution images.

The conventional industrial X-ray inspection apparatus has a problem of increasing the manufacturing cost of the industrial X-ray inspection apparatus as it has an expensive vibration reduction apparatus in order to reduce such vibrations.

On the other hand, the support plate on which the object to be tested is mounted for X-ray imaging is made of a material having a high X-ray transmittance, and the thinner the thickness, the higher the X-ray transmittance, so that high-resolution images can be obtained.

Therefore, the conventional X-ray inspection apparatus is manufactured to have a thin thickness of about 1.5 mm in consideration of the extent to which photographing is possible due to vibration while the thickness of the support plate provided on the stage is thin.

However, even with an expensive vibration reduction device, the support plate having a thin thickness did not generate itself or the vibration transmitted from the surrounding structure did not disappear quickly, and the vibration continued for a certain period of time. There is a problem in that the X-ray examination time is significantly increased because it is necessary to wait until the image is reduced to the extent possible.

The present invention is to solve the above problems, and is made of a simple structure and provides an X-ray inspection apparatus having a vibration reducing member of the support plate to be tested capable of quickly absorbing the vibration generated from the support plate. have.

In order to solve the above problem, the present invention is an X-ray inspection apparatus for acquiring an inspection image by mounting an object to be tested on a support plate of a stage and receiving X-rays radiated from an X-ray tube and transmitted through the object, the stage A bracket coupled to; And a plurality of vibration reducing members installed on the bracket and supporting the support plate, wherein the plurality of vibration reducing members are disposed adjacent to the X-ray tube.

A portion of the plurality of vibration reducing members may be fixed in contact with the bracket, while a portion of the vibration reducing member is not in contact with the bracket.

A portion of the plurality of vibration reducing members may be points supporting the support plate.

An assembly hole is formed in a portion of the plurality of vibration reducing members, and in the assembly hole, a ball support tool for supporting the support plate in point contact, a resin washer for supporting the ball support, and one end of the resin washer elastically A coil spring supporting and a vibration absorber supporting the other end of the coil spring may be sequentially disposed.

Upper and lower washers are disposed on the upper and lower surfaces of the vibration absorber, respectively, and the lower washers may be supported by a plurality of elastic adjustment bolts screwed to a portion of the vibration reducing member.

Each vibration reducing member may further include an elastic adjusting member that is screwed into the assembly hole to support the vibration absorber.

The vibration absorber may be made of urethane or silicone.

An assembly hole is formed in a part of the plurality of vibration reducing members, and a ball support tool for supporting the support plate in point contact with the assembly hole, a resin washer for supporting the ball support, and a resin washer for elastically supporting the resin washer Hydraulic shock absorbers may be arranged sequentially.

The hydraulic shock absorber may be screwed to enable forward rotation and reverse rotation in the assembly hole.

An assembly hole is formed in a part of the plurality of vibration reducing members, and a ball support tool for supporting the support plate in point contact with the assembly hole, a resin washer for supporting the ball support, and a resin washer for elastically supporting the resin washer A urethane spring and a lower washer supporting the urethane spring are sequentially disposed, and the lower washer may be supported by a plurality of elastic adjustment bolts screwed to a portion of the vibration reducing member.

The plurality of vibration reducing members may be disposed closest to the center of the X-ray tube within a range that does not interfere with the X-ray tube.

The plurality of vibration reducing members may be disposed on a virtual circumference concentric with the X-ray tube, or may be disposed adjacent to the imaginary circumference.

As described above, in the present invention, the production cost can be greatly reduced by applying the vibration absorbing member of a simple structure, and as the vibration absorbing member directly supports the support plate and quickly absorbs the vibration of the support plate, X-rays There is an advantage that can significantly shorten the inspection time. In addition, according to the present invention, as the thin support plate is applied, the magnification can be increased compared to the prior art, thereby improving image quality.

1 is a schematic diagram showing an X-ray inspection apparatus equipped with a vibration reducing member according to an embodiment of the present invention.
2 is an exploded perspective view showing an X-ray tube, a vibration reducing member, and a stage.
3 is a plan view showing a vibration reducing member disposed on a bracket of a stage with a support plate removed.
4 is a cross-sectional view showing the inside of the vibration reducing member.
5 is a graph showing vibration characteristics generated in a supporting plate that vary depending on whether or not a vibration reducing member is installed.
6 is a graph showing vibration characteristics generated in the support plate when the vibration absorber of the vibration reducing member is replaced with a metal washer.
7 to 9 are cross-sectional views illustrating various embodiments of a vibration reducing member.
10 is a schematic diagram showing an X-ray inspection apparatus equipped with a vibration reducing member according to another embodiment of the present invention.

In describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be abbreviated or omitted.

Hereinafter, an X-ray inspection apparatus including a vibration reducing member for an object support plate according to an embodiment of the present invention will be described with reference to the drawings.

1 is a schematic view showing an X-ray inspection apparatus equipped with a vibration reducing member according to an embodiment of the present invention, and FIG. 2 is an exploded perspective view showing an X-ray tube, a vibration reducing member, and a stage.

Referring to Figure 1, the inspection device 1 according to an embodiment of the present invention An X-ray tube 10, a stage 20 supporting the test object to expose the test object to X-rays radiated from the X-ray tube 10, and a detector for receiving X-rays transmitted through the test object 30 and a vibration reducing member 40 for absorbing vibration of the support plate 25 provided on the stage 20.

The X-ray tube 10 is fixedly installed on the base 2 and is located under the stage 20 so as to radiate X-rays toward the support plate 25 of the stage 20.

The X-ray tube 10 applied in the X-ray inspection apparatus 1 of the present invention is an open type, and unlike a closed type, a vacuum state can be arbitrarily created, so that a filament or a target, which is a consumable supplied for a single use, can be replaced.

The stage 20 includes a fixed part 21, a first movable part 22 moving in a linear direction, a second movable part 23 moving in a direction perpendicular to the moving direction of the first movable part 22, It may include a support plate 25 coupled to the second movable portion 23.

In this case, the first movable part 22 moves along the X-axis direction and the second movable part 23 moves along the Y-axis direction.

The first movable part 22 may be slidably disposed on the fixed part 21 in a linear direction. The second movable part 23 may be slidably disposed on the upper surface of the first movable part 22. Accordingly, the first and second movable parts 22 and 23 may be disposed in a stacked state at intervals from each other.

The first and second movable parts 22 and 23 are configured not to interfere with the X-ray tube 10 during movement. In this case, the X-ray tube 10 may be vertically disposed while penetrating the first and second movable parts 22 and 23.

Referring to FIG. 2, a support plate 25 for seating an object to be tested is coupled to the second movable part 23 and can move together with the second movable part 23.

The support plate 25 is moved along the X-axis and Y-axis directions by the first and second movable parts 22 and 23. Accordingly, the test subject seated on the support plate 25 may move to an arbitrary position along the X-axis and Y-axis directions.

Referring to FIG. 2, the bottom of the support plate 25 may be elastically supported by the vibration reducing member 40. The support plate 25 may be made of a carbon plate or an Ultem plate through which X-rays can transmit, and when supported by the vibration reducing member 40 according to the present invention, the thickness is increased from 1.5 mm to 1 mm. Can be reduced. In this case, the present invention can obtain an effect of about 1.25 times of magnification improvement (up to 160 times to 200 times) than the conventional one, and an image of excellent quality due to an increase in transmittance of X-rays can be obtained.

The detector 30 is a sensor device of a method of converting invisible X-rays into visible light that can be seen by the eye and then converting it back to an electrical signal, and serves as a kind of photo sensor that generates X-rays into electrical signals. It expresses the difference in density of the object through X-ray as a black and white image.

The detector 30 is disposed on the upper side of the support plate 25 at intervals and detects X-rays transmitted through the object under test.

Hereinafter, the structure of the vibration reducing member 40 for absorbing the vibration of the support plate 25 will be described with reference to FIGS. 3 and 4.

3 is a plan view showing a vibration reducing member disposed on a bracket of a stage with the support plate removed, and FIG. 4 is a cross-sectional view showing the inside of the vibration reducing member.

Referring to FIG. 3, the vibration reducing member 40 of the present invention may be fixedly installed on the bracket 27 coupled to the second movable part 22 to support the bottom surface of the support plate 25.

In this case, a plurality of vibration reducing members 40 (at least 4) may be used, and in order to maximize vibration absorption efficiency, the vibration reducing member 40 is disposed at a position that does not interfere with the X-ray tube 10, but at the center of the X-ray tube 10 It is desirable to arrange them as closely as possible.

The plurality of vibration reducing members 40 are all made of the same structure, preferably a point in direct contact with the support plate 25 (ball support member 49 to be described later) is disposed adjacent to the X-ray tube 10 Can be.

Referring to FIG. 4, the vibration reducing member 40 may include a body 40a in which a rear portion is stably fixedly coupled to the bracket 27 by a plurality of fixing bolts 51 and 52.

In this case, a plurality of insertion holes 42a and 42b into which a plurality of fixing bolts 51 and 52 are inserted are formed at the rear of the body 40a, and a plurality of fixing bolts 51 and 52 are screwed into the bracket 27 A plurality of fastening grooves 27a and 27b to be fastened may be formed.

The body 40a is maintained in a state in which the fornt portion is in a non-contact state with the bracket 27 while the rear portion is fixed to the bracket 27. Through this structure, the user can easily access a plurality of elastic adjustment bolts 61 and 62 for adjusting the elastic force of the vibration reducing member 40.

A plurality of elastic adjustment bolts (61, 62) support each head (61a, 62a) to prevent separation through the lower opening (41c) of the vibration reducing member (40) a plurality of components arranged in the assembly hole (41a) do. In this case, each of the heads 61a and 62a comes into contact with the lower washer 44a disposed at the lowest of the plurality of components disposed in the assembly hole 41a.

In the assembly hole 41a, from the lower opening 41c toward the upper opening 41b, the lower washer 44a, the vibration absorber 43, the upper washer 44b, the coil spring 46, the resin washer 47, and The ball support 49 may be sequentially disposed.

The vibration absorber 43 has a predetermined thickness and absorbs vibrations appearing from the support plate 25 to prevent continuous vibrations from continuing to the support plate 25. The vibration absorber 43 may be formed of a urethane or silicone material.

The lower washer (44a) supports one surface of the vibration absorber 43, and at the same time is supported by a plurality of elastic adjustment bolts (61, 62) as described above.

The upper washer 44b is supported by one end of the coil spring 46, and the vibration absorber 43 is pressed by the one end of the coil spring 46 to prevent the shape of a specific part from being deformed.

The coil spring 46 has one end supported by the upper washer 44b and the other end supported by the resin washer 47. In this case, the coil spring 46 elastically supports the ball support 49 indirectly through the resin washer 47. In this case, the ball support 49 is in point contact with the support plate 25 and performs a rolling motion, thereby minimizing the frictional resistance generated between the ball support 49 and the support plate 25.

The resin washer 47 is disposed between the other end of the coil spring 46 and the ball support 49 to prevent the ball support 49 from being directly supported by the coil spring 46.

Since the resin washer 47 is formed flat on both sides and has a certain strength, deformation such as bending is not generated by the pressure applied from the coil spring 46, so the other end of the coil spring 46 and the ball support ( 49) can be supported stably.

The ball support 49 may be made of steel, and preferably has a diameter larger than the diameter of the upper opening 41b so as not to deviate through the upper opening 41b.

It is preferable that the ball support 49 is formed in a spherical shape to minimize the contact area with the support plate 25.

The ball support 49 may transmit the vibration directly or indirectly transmitted to the support plate 25 to the coil spring 46 through the resin washer 47 as it directly contacts the support plate 25.

5 is a graph showing vibration characteristics generated in the support plate 25 depending on whether or not the vibration reducing member is installed.

Referring to Figure 5 (a), the vibration characteristics appearing on the support plate of the X-ray inspection apparatus of the prior art (when there is no vibration reducing member directly supporting the support plate), when hitting a part of the support plate A large wavelength appears and the magnitude of the wavelength gradually decreases as time passes, but the vibration is maintained for a certain period of time from the point of hitting the support plate.

As described above, when an X-ray inspection is performed in an environment vulnerable to vibration, the image acquired by the detector 30 has a problem of deteriorating the quality, and when a number of products are inspected, the time required for image stabilization increases significantly, and thus the entire product There is a problem that the inspection time is significantly increased.

Referring to Figure 5 (b), the vibration characteristics appearing on the support plate of the X-ray inspection apparatus according to the present invention, when hitting a part of the support plate (the same point as the hitting point of the support plate of the prior art) Although a large wavelength similar to that of the prior art appears, the time for the vibration to exist is much shorter than that of the prior art. For example, when the vibration time of the prior art is T, the vibration time of the present invention can be reduced to T/3 to T/4 compared to the conventional propagation time (T).

That is, in the present invention, since the vibration quickly disappears from the point of hitting the supporting plate, when X-ray is photographed in an environment optimized for vibration absorption, remarkably superior image quality can be obtained compared to the prior art. The overall inspection time can be significantly reduced by improving the inspection speed.

6 is a graph showing vibration characteristics generated in the support plate when the vibration absorber of the vibration reducing member is replaced with a metal washer.

Meanwhile, in the vibration reducing member 40 according to the present invention, the vibration absorber 43 may be omitted, and a new metal washer (not shown) may be added to the position where the vibration absorber 43 was disposed.

When a part of the supporting plate is hit twice in a state in which the vibration reducing member configured as described above is applied, as shown in FIG. 6, the vibration characteristic is similar to that of FIG. 5(b), and the time during which the vibration is maintained is very short. Following the second vibration, a second vibration occurs at intervals.

In the case of hitting the supporting plate twice, short vibrations appear at different hit points, but the vibrations are not maintained continuously and are quickly removed. Accordingly, even when the vibration absorber 43 is replaced with a metal material instead of a urethane or silicone material, vibration absorption may be effectively exhibited.

Meanwhile, the vibration reducing member according to the present invention is not limited to the structure shown in FIG. 4 and may be formed in various structures. Hereinafter, various embodiments of the vibration reducing member will be described with reference to FIGS. 7 to 9.

Referring to FIG. 7, the vibration reducing member 240 may include a body 240a that is stably fixedly coupled to the bracket 27 by a plurality of fixing bolts 251 and 252.

In the assembly hole 241a of the body 240a, the elastic adjustment member 242, the vibration absorber 243, the coil spring 246, the resin washer 247, and the ball support tool from the bottom of the body 240a toward the top. 249 may be arranged sequentially.

The vibration absorber 243, the coil spring 246, the resin washer 247 and the ball support 249 are the vibration absorber 43 and the coil spring 46 of the vibration reducing member 40 shown in FIG. 4 described above. , The resin washer 47 and the ball support 49 and the same configuration, and a detailed description thereof will be omitted.

The elastic adjustment member 242 is screwed into the screw portion 241b formed in the lower inner side of the assembly hole 241a. The elastic adjustment member 242 may have a wrench coupling hole 242a into which a part of a wrench (not shown) is inserted at one side.

Therefore, the user can precisely adjust the elastic force by rotating the elastic adjusting member 242 forward or reverse using a wrench.

Referring to FIG. 8, the vibration reducing member 340 may include a body 340a that is stably fixedly coupled to the bracket 27 by a plurality of fixing bolts 351 and 352.

In the assembly hole 341a of the body 340a, an elastic adjustment member 342, a resin washer 347, and a ball support 349 may be sequentially disposed from the bottom of the body 340a toward the top.

The resin washer 347 and the ball support 349 have the same configuration as the resin washer 47 and the ball support 49 of the vibration reducing member 40 shown in FIG. 4, and detailed descriptions will be omitted.

The elastic adjustment member 342 may be formed of a hydraulic shock absorber. In this case, the elastic control member 342 is formed with a plunger 342b that elastically supports the resin washer 347 on one side of the protrusion.

The elastic adjustment member 342 is screwed into the screw portion 341b formed in the lower inner side of the assembly hole 341a. The elastic adjustment member 342 may have a wrench coupling hole 342a into which a part of a wrench (not shown) is inserted at one side. Therefore, the user can precisely adjust the elastic force by rotating the elastic adjusting member 342 forward or reverse using a wrench.

Referring to FIG. 9, the vibration reducing member 440 may include a body 440a that is stably fixedly coupled to the bracket 27 by a plurality of fixing bolts 4351 and 452.

In the assembly hole 441a of the body 440a, a urethane spring 446, a resin washer 447, and a ball support 449 may be sequentially disposed from the bottom of the body 440a toward the top.

The resin washer 447 and the ball support 449 are of the same configuration as the resin washer 47 and the ball support 49 of the vibration reducing member 40 shown in FIG. 4, and detailed descriptions will be omitted.

The plurality of elastic adjustment bolts 461 and 462 support each of the heads 461a and 462a so that a plurality of components disposed in the assembly hole 441a do not deviate through the lower opening of the vibration reducing member 440. In this case, each of the heads 461a and 462a comes into contact with the lower washer 444a disposed at the lowest of the plurality of components disposed in the assembly hole 441a.

The urethane spring 446 has one end and the other end elastically supporting the resin washer 447 and the lower washer 444a, respectively.

The vibration reducing member 440 may precisely adjust the elastic force for supporting the support plate 25 by rotating the plurality of elastic adjusting bolts 61 and 62 forward or reverse.

10 is a schematic diagram showing an X-ray inspection apparatus equipped with a vibration reducing member according to another embodiment of the present invention.

Referring to FIG. 10, under a structure in which the first and second movable parts 122 and 123 of the stage 120 move in the X-axis and Y-axis directions, a number of vibrations are reduced when the stage 120 is movable along the Z-axis direction. The arrangement of the member 140 may be slightly different from the arrangement of the vibration reducing member 40 described above.

In this case, the bracket 127 is formed so as not to interfere with the X-ray tube 110 when the stage 120 moves along the X, Y, and Z axis directions. Accordingly, the plurality of vibration reducing members 140 are disposed at a distance farther from the X-ray tube 110 than the plurality of vibration reducing members 40 described above.

A plurality of vibration reducing members 140 are arranged on a virtual circumference 130 which is approximately concentric with the center of the X-ray tube 110, or to be arranged at a position adjacent to the virtual circumference 130 as shown in FIG. I can.

In FIG. 10, reference numeral 121 denotes a fixed part that supports the first movable part 122 in a slidable manner.

In the above, preferred embodiments of the present invention have been illustrated and described, but the present invention is not limited to the specific embodiments described above, and is generally used in the technical field to which the present invention belongs without departing from the gist of the present invention claimed in the claims. Of course, various modifications may be made by those skilled in the art, and these modifications should not be individually understood from the technical spirit or prospect of the present invention.

10: X-ray tube 20: stage
30: detector 40: vibration reducing member
43: vibration absorber 44a: lower washer
44b: upper washer 46: coil spring
47: resin washer 49: ball support

Claims (12)

An X-ray inspection apparatus for acquiring an inspection image by seating an object on a support plate of a stage and receiving X-rays radiated from an X-ray tube and transmitted through the object,
A bracket coupled to the stage; And
Includes; a plurality of vibration reducing members installed on the bracket to support the support plate,
X-ray inspection apparatus, characterized in that the plurality of vibration reducing members are disposed adjacent to the X-ray tube. The method of claim 1,
An X-ray inspection apparatus, wherein a portion of the plurality of vibration reducing members is non-contact with the bracket and the remaining portion is fixed in a contact state with the bracket. The method of claim 2,
X-ray inspection apparatus, characterized in that a portion of the plurality of vibration reducing members support the support plate. The method of claim 2,
In the assembly hole formed in a portion of the plurality of vibration reducing members, a ball support for supporting the support plate in point contact, a resin washer for supporting the ball support, and a coil spring having one end elastically supporting the resin washer, X-ray inspection apparatus, characterized in that the vibration absorber to which the other end of the coil spring is supported are sequentially arranged. The method of claim 4,
Upper and lower washers are disposed on the upper and lower surfaces of the vibration absorber, respectively,
The lower washer is an X-ray inspection apparatus, characterized in that supported by a plurality of elastic adjustment bolts screwed to a portion of the vibration reducing member. The method of claim 4,
Each vibration reducing member further comprises an elastic adjusting member which is screwed into the assembly hole to support the vibration absorber. The method of claim 5 or 6,
The vibration absorber is an X-ray inspection apparatus, characterized in that made of a urethane or silicone material. The method of claim 2,
In the assembly hole formed in a part of the plurality of vibration reducing members, a ball support for supporting the support plate in point contact, a resin washer for supporting the ball support, and a hydraulic shock absorber for elastically supporting the resin washer are sequentially provided. X-ray inspection apparatus, characterized in that arranged as. The method of claim 8,
The hydraulic shock absorber is an X-ray inspection device, characterized in that the screw fastening to enable forward and reverse rotation in the assembly hole. The method of claim 2,
In the assembly holes formed in a portion of the plurality of vibration reducing members, a ball support for supporting the support plate in point contact, a resin washer for supporting the ball support, a urethane spring for elastically supporting the resin washer, and the urethane Lower washers supporting the spring are sequentially arranged,
The lower washer is an X-ray inspection apparatus, characterized in that supported by a plurality of elastic adjustment bolts screwed to a portion of the vibration reducing member. The method of claim 1,
X-ray inspection apparatus, characterized in that the plurality of vibration reducing members are disposed closest to the center of the X-ray tube within a range that does not interfere with the X-ray tube. The method of claim 11,
The plurality of vibration reducing members are arranged on a virtual circumference concentric with the X-ray tube or adjacent to the virtual circumference.

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