KR20200101695A - Mass spectrometer - Google Patents

Abstract

Disclosed is a mass spectrometer for an OLED panel sample. The device for analyzing the OLED panel sample in a laser desorption ionization method may comprise: a stage on which an OLED panel sample is disposed; a laser irradiation unit irradiating a laser to the OLED panel sample; a vision unit providing an observed image for the OLED panel sample; and an ion detector detecting ions desorbed from the OLED panel sample based on the laser irradiated by the laser irradiation unit.

Description

Mass spectrometry device {MASS SPECTROMETER}

It is related to Laser Desorption Ionization. More specifically, it relates to a laser desorption ionization device that analyzes OLED (Organic Light Emitting Diode) pixels.

With the recent development of organic light emitting diode (OLED) display-related technologies, OLED displays having an image quality higher than QHD (Quad High Definition) are being commercialized.

There are two conventional facilities that can analyze OLED panels in pixel units, Nano-SIMS (secondary ion MS) and LA-ICP-MS (Laser Ablation-Inductively Coupled Plasma MS), and the cost of the equipment is very expensive and There is a technical limitation that only elements or ions can be analyzed.

Therefore, there is a need to develop a device that is specialized in the analysis of OLED panels of QHD or higher, has a fine spatial resolution in pixel units, and enables mass analysis without limitation of samples.

US 2017/0358438 A1 (published December 14, 2017) discloses an idle particle inductively coupled plasma mass spectrometer. The invention relates to a system for analyzing the mass spectrum of a display.

In one embodiment, an apparatus for analyzing an OLED panel sample by laser desorption ionization includes: a stage on which an OLED panel sample is disposed; A laser irradiation unit for irradiating a laser to the OLED panel sample; A vision unit that provides an observation image for the OLED panel sample; And an ion detector for detecting ions desorbed from the OLED panel sample based on the laser irradiated by the laser irradiation unit.

이하인 빔 사이즈의 레이저를 조사할 수 있다.The laser irradiation unit according to an embodiment is greater than 0 and 5

Lasers of the following beam sizes can be irradiated.

이하의 정밀도에 기초하여 제어될 수 있다.The stage according to an embodiment is greater than 0 and 2

It can be controlled based on the following precision.

이하의 분해능에 기초하여 생성된 상기 관측 영상을 제공할 수 있다.The vision unit according to an embodiment is greater than 0 and 2

The observation image generated based on the following resolution may be provided.

The mass spectrometry apparatus according to an embodiment may further include a visualization unit that visualizes and provides a mass analysis result of the OLED panel sample.

The visualization unit according to an embodiment may visualize the mass analysis result based on the two-dimensional mass distribution of the OLED panel sample.

1 is a diagram showing the overall structure of a mass spectrometer according to an embodiment.
2 shows an example of a mass spectrum measured by a mass spectrometer according to an embodiment.
3 shows an example in which a mass analysis result of an OLED panel sample is visualized according to an embodiment.
4 is a diagram showing an example of an OLED panel sample for which mass analysis has been completed.
5 is a diagram illustrating an example of an observation image of an OLED panel sample provided through a vision unit according to an exemplary embodiment.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. However, the scope of the rights is not limited or limited by these embodiments. The same reference numerals in each drawing indicate the same members.

The terms used in the description below have been selected as general and universal in the related technology field, but there may be other terms depending on the development and/or change of technology, customs, preferences of technicians, and the like. Therefore, terms used in the following description should not be understood as limiting the technical idea, but should be understood as exemplary terms for describing embodiments.

In addition, in certain cases, there are terms arbitrarily selected by the applicant, and in this case, detailed meanings will be described in the corresponding description. Therefore, terms used in the following description should be understood based on the meaning of the term and the contents throughout the specification, not just the name of the term.

1 is a diagram showing the overall structure of a mass spectrometer according to an embodiment.

The mass spectrometry device 120 according to an exemplary embodiment may analyze the mass of an OLED panel sample using a laser desorption ionization method. The mass spectrometer 120 ionizes the OLED panel sample, and the time it takes for the generated ions to reach the detector by mass of ions while accelerating movement to the ion detector based on the voltage applied to the plate (Time Of Flight ; TOF) can be measured to determine the molecular weight of the ion. The reason for analyzing the mass of the OLED panel sample through the method described is that the mass of the sample to be subjected to mass analysis is very small, which is beyond the measurement limit of a general balance using gravity.

The mass spectrometer 120 may have a molecular weight focusing of 100 to 1200 daltons for mass analysis of an OLED panel sample.

The mass spectrometry device 120 may be implemented as equipment applicable to an OLED panel production line by modularizing an ionization source and an analysis tube according to an analysis target.

The mass spectrometry device 120 enables pixel-by-pixel mass analysis through a fine-sized beam, and can perform mass analysis irrespective of the components of the OLED sample, and can be implemented at a lower price compared to existing equipment. . In addition, the mass spectrometry device 120 can be used in the field of managing the quality of the OLED panel through mass spectrum analysis, and provides a means for analyzing deviations, causes of defects, and degradation according to the OLED panel manufacturing method. Can provide.

The mass spectrometer 120 includes a stage 122 on which an OLED panel sample is placed, a laser irradiation unit 121 that irradiates a laser to the OLED panel sample, and a vision unit 123 that provides an observation image for the OLED panel sample. , It may include ion detectors 124 and 125 for detecting ions desorbed from the OLED panel sample based on the laser irradiated by the laser irradiation unit 121. The mass spectrometry device 120 may have an exterior 110 of the shape shown in (a).

According to an embodiment, the mass spectrometry device 120 may analyze an OLED (Organic Light Emitting Diode) panel sample using a laser desorption ionization method. The mass spectrometry device 120 may measure an OLED panel sample in a high vacuum state. To this end, the mass spectrometry device 120 may further include a sample introduction unit and a vacuum system. The OLDE panel sample can go through a low vacuum condition to enter a high vacuum condition from the atmospheric condition.

보다 크고 5

이하인 빔 사이즈의 레이저를 OLED 패널 시료에 조사할 수 있다. 이를 위해 레이저 조사부(121)는 5um 이하의 극세초점 레이저 광학 시스템을 포함할 수 있다. 질량 분석 장치(120)는 미세한 빔 사이즈에 기초하여 QHD 급 이상의 고해상도 OLED 패널을 Pixel 단위로 직접 분석할 수 있는 수단을 제공할 수 있다. 사용하는 특정 파장의 레이저를 실제 분석하고자 하는 물질이 흡수하는 것은 레이저 조사부(121)의 설정에 매우 중요한 요소이다. OLED에 사용되는 유기 물질들은 레이저 조사부(121)에서 사용하는 UV 레이저에 대해 좋은 이온화 감도를 보이므로, 일 실시예에 따른 질량 분석 장치(120)는 349nm UV 레이저를 사용할 수 있다.The laser irradiation unit 121 may irradiate laser light onto the OLED panel sample. According to an embodiment, the laser irradiation unit 121 is 0

Greater than 5

A laser of the following beam size can be irradiated to the OLED panel sample. To this end, the laser irradiation unit 121 may include a micro-focus laser optical system of 5 μm or less. The mass spectrometry device 120 may provide a means for directly analyzing a high-resolution OLED panel having a QHD level or higher in pixel units based on a fine beam size. It is a very important factor in setting the laser irradiation unit 121 that the material to be actually analyzed absorbs the laser of a specific wavelength used. The organic materials used in the OLED show good ionization sensitivity to the UV laser used by the laser irradiation unit 121, so the mass spectrometry device 120 according to an embodiment may use a 349 nm UV laser.

The ion detectors 124 and 125 may detect ions desorbed from the OLED panel sample. The ion detectors 124 and 125 may use an ion optical system. The ion optical system may transfer ions to the ion detectors 124 and 125 using a high voltage or high voltage pulse.

The mass spectrometry apparatus 120 according to an embodiment may simultaneously perform high-definition image analysis and mass spectrometry by combining the LDI-TOF and the vertical vision system in a simple structure. For example, the mass spectrometry device 120 is a Laser Desorption/Ionization-Time of flight (LDI-TOF) system using a high-resolution laser beam of 5 μm or less, and may include a high-resolution vision unit 123. The mass spectrometry device 120 may provide a means for confirming the position of the OLED substrate sample to which the laser is irradiated using the vision unit 123.

보다 크고 2

이하의 분해능에 기초하여 생성된, OLED 패널 시료를 관측할 수 있는 관측 영상을 제공할 수 있다.According to an embodiment, the vision unit 123 is 0

Greater than 2

An observation image capable of observing an OLED panel sample, generated based on the following resolution, can be provided.

According to an embodiment, the mass spectrometry apparatus 120 may further include a visualization unit that visualizes and provides a mass analysis result of an OLED panel sample. The visualization unit may visualize the result of mass analysis of the OLED panel sample based on the two-dimensional mass distribution of the OLED panel sample. For example, the visualization unit may visually provide information on a two-dimensional mass distribution of an OLED panel sample, and a specific example thereof is presented through FIG. 3.

보다 크고 2

이하의 정밀도에 기초하여 제어될 수 있다. 고 정밀도로 제어되는 스테이지(122)를 통해 질량 분석 장치(120)는 사용자에게 픽셀의 정확한 위치를 분석할 수 있는 수단을 제공할 수 있다.According to one embodiment, stage 122 is 0

Greater than 2

It can be controlled based on the following precision. Through the stage 122 that is controlled with high precision, the mass spectrometry apparatus 120 may provide a user with a means to analyze the exact position of the pixel.

2 shows an example of a mass spectrum measured by a mass spectrometer according to an embodiment.

The mass spectrometer ionizes the OLED panel sample, and the time it takes for the generated ions to reach the detector by mass of ions while accelerating to the ion detector based on the voltage applied to the plate (Time Of Flight; TOF) The mass spectrum of the OLED panel sample can be measured by measuring.

The spectrum shown in FIG. 2 corresponds to a mass spectrum of an OLED panel sample measured through a mass spectrometer. The mass spectrum may indicate the amount of ion current according to the ion species distinguished through m/z.

3 shows an example in which a mass analysis result of an OLED panel sample is visualized according to an embodiment.

The mass spectrometer may visualize the result of mass analysis of the OLED panel sample based on the two-dimensional mass distribution of the OLED panel sample.

For example, as shown in the mass analysis results (310, 320, 330), the mass spectrometry device determines the size of the mass of each position of the OLED panel sample through the size or shape of the corresponding shape (column shape). Visualization can be provided.

4 is a diagram showing an example of an OLED panel sample for which mass analysis has been completed.

수준의 정밀도에 기초하여 움직일 수 있고, 각각의 이동에 대응하여 레이저를 조사함으로써 OLED 패널 시료의 이온화를 진행할 수 있다. 도 4에 도시된 OLED 패널 시료는 스테이지를 5

스텝으로 100*50 만큼 이동시켜 레이저가 조사된 결과(총 5000회 이동함.)로, 각각의 레이저 조사에 따른 번 패턴(Burn Pattern)(410)이 남겨져 있다. 각각의 번 패턴(410)은 조사된 레이저의 빔 사이즈(5

)에 대응되는 크기로 형성될 수 있다.The stage of the mass spectrometer is 2

It can move based on the level of precision, and ionization of the OLED panel sample can proceed by irradiating a laser in response to each movement. The OLED panel sample shown in FIG. 4 has 5 stages.

As a result of irradiation of the laser by moving by 100*50 in steps (a total of 5000 moves.), a Burn Pattern 410 according to each laser irradiation is left. Each burn pattern 410 is the beam size of the irradiated laser (5

) Can be formed in a size corresponding to.

5 is a diagram illustrating an example of an observation image of an OLED panel sample provided through a vision unit according to an exemplary embodiment.

The mass spectrometer may include a vision unit in which a low magnification lens (2X) having a wide field of view and a high magnification lens (8X to 10X) having high resolution are incorporated together. When a high magnification lens is used, the field of view may be narrowed, so that the mass spectrometer can simultaneously use a low magnification lens with a wide field of view and a high magnification lens with high resolution.

수준의 분해능을 가지는 비젼부에 기초하여 OLED 패널 시료에 대한 관측 영상을 제공할 수 있다. The vision unit of the mass spectrometer may provide an observation image of high magnification and high resolution so that the position of the pixel can be visually confirmed through the built-in lenses. According to one embodiment, the mass spectrometry device is 2

An observation image for an OLED panel sample can be provided based on the vision unit having a level of resolution.

The image 510 of FIG. 5 is an example of an observation image of an OLED panel sample generated based on the high magnification lens X8, and the image 520 is through a low magnification lens X2 for analysis of a general spot. This is an example of the generated observation image.

The apparatus described above may be implemented as a hardware component, a software component, and/or a combination of a hardware component and a software component. For example, the devices and components described in the embodiments include, for example, a processor, a controller, an arithmetic logic unit (ALU), a digital signal processor, a microcomputer, a field programmable array (FPA), It can be implemented using one or more general purpose computers or special purpose computers, such as a programmable logic unit (PLU), a microprocessor, or any other device capable of executing and responding to instructions. The processing device may execute an operating system (OS) and one or more software applications executed on the operating system. In addition, the processing device may access, store, manipulate, process, and generate data in response to the execution of software. For the convenience of understanding, although it is sometimes described that one processing device is used, one of ordinary skill in the art, the processing device is a plurality of processing elements and/or a plurality of types of processing elements. It can be seen that it may include. For example, the processing device may include a plurality of processors or one processor and one controller. In addition, other processing configurations are possible, such as a parallel processor.

The software may include a computer program, code, instructions, or a combination of one or more of these, configuring the processing unit to behave as desired or processed independently or collectively. You can command the device. Software and/or data may be interpreted by a processing device or to provide instructions or data to a processing device, of any type of machine, component, physical device, virtual equipment, computer storage medium or device. , Or may be permanently or temporarily embodyed in a transmitted signal wave. The software may be distributed over networked computer systems and stored or executed in a distributed manner. Software and data may be stored on one or more computer-readable recording media.

The method according to the embodiment may be implemented in the form of program instructions that can be executed through various computer means and recorded in a computer-readable medium. The computer-readable medium may include program instructions, data files, data structures, and the like alone or in combination. The program instructions recorded on the medium may be specially designed and configured for the embodiment, or may be known and usable to those skilled in computer software. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes, optical media such as CD-ROMs and DVDs, and magnetic media such as floptical disks. -A hardware device specially configured to store and execute program instructions such as magneto-optical media, and ROM, RAM, flash memory, and the like. Examples of program instructions include not only machine language codes such as those produced by a compiler but also high-level language codes that can be executed by a computer using an interpreter or the like. The hardware device described above may be configured to operate as one or more software modules to perform the operation of the embodiment, and vice versa.

Although the embodiments have been described by the limited drawings, various modifications and variations are possible from the above description to those of ordinary skill in the art. For example, the described techniques are performed in a different order from the described method, and/or components such as a system, structure, device, circuit, etc. described are combined or combined in a form different from the described method, or other components Alternatively, even if substituted or substituted by an equivalent, an appropriate result can be achieved.

Therefore, other implementations, other embodiments, and claims and equivalents fall within the scope of the claims to be described later.

Claims (6)

In an apparatus for analyzing an OLED panel sample by a laser desorption ionization method,
A stage on which an OLED panel sample is placed;
A laser irradiation unit for irradiating a laser to the OLED panel sample;
A vision unit that provides an observation image for the OLED panel sample; And
Ion detector for detecting ions desorbed from the OLED panel sample based on the laser irradiated by the laser irradiation unit
Containing, mass spectrometry device.
The method of claim 1,
The laser irradiation unit,
0

Greater than 5

A mass spectrometry device that irradiates a laser of the following beam size.
The method of claim 1,
The stage,
0

Greater than 2

A mass spectrometry device controlled based on the following precision.
The method of claim 1,
The vision unit,
0

Greater than 2

A mass spectrometry device that provides the observation image based on the following resolution.
The method of claim 1,
Mass spectrometry apparatus further comprising a visualization unit for visualizing and providing a mass analysis result of the OLED panel sample.
The method of claim 5,
The visualization unit,
Visualizing the mass spectrometry result based on the two-dimensional mass distribution of the OLED panel sample.

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