KR20200091548A - connector module and upper module for gas supply apparatus of gas cylinder - Google Patents

Abstract

The present invention relates to a connector module in which a nut concentric correction piece is installed between a connector socket and a connector nut and an upper unit for a gas supply device of a gas cylinder. To protect a worker from a dangerous gas, a gas cylinder and a gas pipe are automatically connected.

Description

Connector module and upper module for gas supply apparatus of gas cylinder

The present invention relates to a connector module in which a nut concentric correction piece is installed between a connector socket and a connector nut, and an upper unit for a gas supply device of a gas cylinder.

In general, in the manufacturing process of semiconductor devices, combustible or highly toxic gases according to process characteristics are frequently used, and these gases are usually contained in a high pressure state in a gas cylinder to be replaced and used depending on the remaining amount of gas.

That is, when the connector is fastened to the outlet port of the gas cylinder and the pipe and the outlet port disposed inside the connector are connected to each other, the valve is opened to supply the gas of the gas cylinder to the manufacturing process of the semiconductor device through the outlet port and the pipe. .

However, since the connection of the outlet port and the connector and the valve opening and closing of the gas cylinder are performed manually, the installation and replacement time according to the manual operation is prolonged.

Korean Publication No. 1998-051759

The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide an upper unit for a gas supply device of a connector module and a gas cylinder that corrects to increase the accuracy of the fastening position of the connector nut and the outlet port.

In order to achieve the above object, the connector module for a gas supply device of a gas cylinder according to claim 1 of the present invention is a connector for a gas supply device of a gas cylinder that is fastened/released to the outlet port 91 of the gas cylinder 90 As the module 300, the motor 310, the hollow reducer 320 receiving the rotational power of the motor 310, and the output port of the hollow reducer 320 are installed in the connector socket 330, the outlet port 91 With the connector nut 340 to be fastened/released, the nut concentric correction piece 350 installed between the connector socket 330 and the connector nut 340, and the gas piping installed through the center of the hollow reducer 320 ( 360).

In the connector module for a gas supply device of a gas cylinder according to claim 2 of the present invention, the nut concentric correction piece 350 is preferably implemented by a spring.

In the connector module for a gas supply device of a gas cylinder according to claim 3 of the present invention, the pipe fixing block 370 for fixing the other end of the gas pipe 360 to the hollow reducer 320, and the head of the gas pipe 360 A C-ring 380 interposed between the 361 and the connector nut 340 and a resin-based piping guide 390 installed between the center of the hollow reducer 320 and the gas piping 360 are further included.

The upper unit for a gas supply device of a gas cylinder according to claim 4 of the present invention is an upper unit (5) for a gas supply device (1) of a gas cylinder (90) installed inside the cabinet (3), the first, A support frame 100 including a two-column frame 130 and 140 and a cross frame 150 connecting the upper sides of the first and second column frames 130 and 140; A connector module 300 that is slidably supported on the first column frame 130 without being slid; A valve shutter module 500 disposed and installed in the cross frame 150; The support frame elevating module 700 for elevating the support frame 100 includes; but, the connector module 300 includes a motor 310, a hollow reducer 320 receiving the rotational power of the motor 310, and a hollow The connector nut 340 installed in the connector socket 330 which is the output terminal of the reduction gear 320 and fastened/released with the outlet port 91, and the nut concentric correction installed between the connector socket 330 and the connector nut 340. It includes a piece 350 and a gas pipe 360 installed through the center of the hollow reducer 320.

In the upper unit for a gas supply device of a gas cylinder according to claim 5 of the present invention, the nut concentric correction piece 350 is a spring, and the pipe fixing block () for fixing the other end of the gas pipe 360 to the hollow reducer 320 370), a C-ring 380 interposed between the head 361 of the gas pipe 360 and the connector nut 340, and a resin series installed between the center of the hollow reducer 320 and the gas pipe 360 The piping guide 390 further includes.

In the upper unit for a gas supply device of a gas cylinder according to claim 6 of the present invention, the connector module 300 is provided with a support plate 301 supported on the first column frame 130, and a support plate of the connector module 300 In 301, an outgoing hole 303 through which the gas piping 360 is drawn is formed, and in the first column frame 130, the gas piping 360 drawn out from the outgoing hole 303 is moved up and down of the support frame 100. A vertical long hole 133 that is arranged to be possible is formed.

According to the present invention has the following effects.

There is no human error in connecting the gas cylinder and the gas piping, and the gas cylinder and the gas piping are automatically connected to protect the operator from dangerous gases.

By making the connector nut's degree of freedom move high, it corrects the concentricity of each other that is not correct in the connection with the outlet port.

1 is a front view showing a gas cylinder.
Figure 2 is a front view showing a gas supply device of a gas cylinder according to a preferred embodiment of the present invention.
3 is a perspective view of the second opening and closing door of FIG. 2;
Figure 4 is a schematic operating flow chart of Figure 3;
5 is a perspective view of the door in FIG.
6 and 7 are front and rear perspective views showing the door of FIG. 5.
8 is a perspective view schematically showing a cabinet.
9 is a front view of the door is omitted in Figure 2;
10 is a plan view showing the locking state of the upper and lower door locks.
11 is a plan view of a state in which the door is advanced in the state of FIG. 10;
Figure 12 is a perspective view of the door manually open.
13 is a plan view showing the unlocked state of FIG. 10 for the operation of FIG. 12;
14 and 15 are perspective views showing main parts for automatic and manual opening and closing of doors.
16 and 17 are side views showing the front and rear of the door hinge.
18 is a cross-sectional plan view illustrating a door lock piece and a slot.
19 is a plan view in which the door is manually opened.
20, 21 and 22 are a front view, a front perspective view and a rear perspective view of the upper unit.
23 and 24 are a bottom and top perspective view showing an enlarged main part of the upper unit.
25 is a front view of the connector module connected to the outlet port of the gas cylinder.
26 to 29 are diagrams illustrating no-load sliding of the connector module with respect to the first column frame.
30 is a perspective view showing an upper unit enlarging a hollow reducer.
31 is a longitudinal sectional view of a connector module.
Fig. 32 is a sectional view of the connector nut fastened to the outlet port.
33 and 34 are front and rear perspective views of the gasket input/output module.
33A is a perspective view of the gripper of FIG. 33 removed.
35 and 36 are a front view and a perspective view showing a main part of the gasket input/output module.
37 is a sectional view showing a gasket alignment unit.
38 is a perspective view showing gasket alignment and chucking.
39 is an enlarged perspective view showing a main part of a grip portion.
40 is a perspective view showing a process of inputting a chucked gasket.
41 is a perspective view showing the outer shape of a valve shutter module.
42 and 43 are sectional perspective and front views of the main part of FIG. 41;
44 is an explanatory diagram of power transmission of the valve shutter module.
45 is a diagram showing examples of various types of valves.
46 and 47 are front views of the valve shutter seating and emergency exit.
48 is a perspective view showing the operation of the main part of the emergency escape.
49 and 50 are perspective and exploded perspective views showing the turntable module.
51 and 52 are cross-sectional views taken along lines 51-51 and 52-52 of FIG. 49;
53 is a bottom perspective view showing a turntable and a pallet-type dedicated jig separately.
54 and 55 are perspective and plan views of the clamping module.
56 to 59 are perspective and plan views showing the operation of the jacket heating module.
60 and 61 are a perspective view and a cross-sectional view showing an autonomous vehicle forklift truck 6300 for carrying a pallet-type dedicated jig.
62 and 63 are perspective and cross-sectional views of the advanced state of FIGS. 60 and 61;
64 and 65 are perspective views showing the clamper and the lifter.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In addition, the horizontal*vertical*height direction of the cabinet 3 is called the x-axis (left-right), y-axis (front-to-back), and z-axis (up-down) directions.

In addition, in the present embodiment, the first and second relations are composed of a pair of left and right, and a single term is used to describe the configuration. In particular, when the first and second needs to be distinguished, the first and second terms and symbols Use a,b.

The gas supply system of the gas cylinder according to this embodiment is largely a gas supply device (1), a gas supply device (1), a cabinet (3) installed therein, and a gas cylinder (90) in the gas supply device (1) It includes an autonomous vehicle transport mechanism (6000) for loading / unloading by transporting.

The gas supply device 1 is composed of a first gas supply device 1a for a gas cylinder (①) and a second supply device (1b) for a gas cylinder (②) installed on the inner left and right sides of the cabinet 3.

Hereinafter, it is assumed that the first and second gas supply devices 1a and 1b are made of a pair, and only the gas supply device 1 is described, and when the right and left are particularly required, the terms first and second are used.

The gas supply device 1 includes upper and lower units 5 and 7 disposed on the upper and lower sides of the cabinet 3 and a control unit 9 that drives and controls the upper and lower units 5 and 7.

In addition, the upper and lower units 5 and 7 are composed of a pair of first upper and lower units 5a and 7a and second upper and lower units 5b and 7b disposed on the left and right sides of the gas cylinder 90. This is to continuously supply the gas.

Of course, it is possible to install only a single upper and lower unit, but there is a problem in that the supply of gas is temporarily stopped while replacing the used gas cylinder with a new gas cylinder.

1. Cabinet(3)

8 and 12, the cabinet 3 has a rectangular cabinet body 10 with openings 11 formed on the front surface, and first and second door modules 20a that open and close the left and right sides of the opening 11 ) 20b.

The first and second door modules 20a and 20b are the first and second doors 30a and 30b and the first and second doors 30a as shown in FIGS. 6, 7, and 11 to 17. ) 30b, first and second automatic door opening and closing portions 50a and 50b, and first and second manual door opening and closing portions 70a and 30a manually opening and closing the first and second doors 30a and 30b 70b).

The first and second auto door opening and closing portions 50a and 50b are operated to automatically open and close the first and second doors 30a and 30b as shown in FIGS. 3 and 4, in order to replace the gas cylinder 90. This is to ensure only a minimum opening.

Manually opening and closing the first and second doors 30a and 30b as shown in FIG. 12 using the first and second manual door opening and closing portions 70a and 70b maintains maintenance of the upper and lower units 5 and 7. In order to secure the worker's working space as much as possible.

The first and second doors 30a and 30b are disposed in the first and second door frames 31a and 31b and the first and second door frames 31a and 31b, as shown in FIGS. 6 and 7. The first and second opening and closing doors 32a and 32b are included.

The first and second door frames 31a and 31b are U-shaped first and second door frame bodies composed of first and second upper and lower flanges 33a and 34a (33b and 34b) and the first and second webs 35a and 35b. 36a) (36b), first and second rail groove portions 39a and 39b having first and second front and rear rail grooves 37a and 38a (37b and 38b) formed on the first and second phase flanges 33a and 33b ).

The first opening/closing door 32a is disposed in the first front rail groove 37a, and the second opening/closing door 32b is disposed in the second front rail groove 37b.

Therefore, the first opening/closing door 32a is opened by sliding to the second rear rail groove 38b in a state in which the second door frame 31b comes forward with respect to the first door frame 31a, and conversely, the second opening/closing door 32b As shown in FIG. 4, the first door frame 31a slides toward the first rear rail groove 38a in a state in which the first door frame 31a comes forward with respect to the second door frame 31b.

As shown in FIGS. 10 to 15, the first and second auto door opening/closing portions 50a and 50b y-axis (before and after) the first and second door frames 31a and 31b relative to the cabinet body 10. The first and second opening and closing doors 32a and 32b for the driving cylinders 51a and 51b for sliding the first and second door frames and the first and second door frames 31a and 31b along the x-axis (left and right) It includes a driving cylinder (53a) (53b) for the first and second opening and closing doors sliding along.

As shown in FIG. 11, the driving cylinders 51a and 51b for the first and second door frames are provided with cylinders ③ provided on the upper and lower sides of the cabinet body 10, and the first and second upper and lower flanges 33a and 34a. ) (33b, 34b) is installed on the piston rod (④).

The driving cylinders 53a and 53b for the first and second opening and closing doors are implemented as first and second rodless pneumatic cylinders 53a and 53b.

Rodless pneumatic cylinder 53, as shown in Figure 6, the general pneumatic cylinder slides within the stroke length within the range of the stroke through the magnet or the like in the barrel 54, unlike the output method by the piston rod 55 ) Is a linear motion. Therefore, the use of the rodless pneumatic cylinder 53 has the advantage of minimizing the installation area, and also has the advantage of good intermediate stopping characteristics due to the same piston cross-sectional area when moving forward and backward.

The rodless pneumatic cylinder 53 includes a barrel 54 installed on the lower flange 34 in appearance, and a slide 55 sliding along the outer circumferential surface of the barrel 54.

Inside the barrel 54, a piston that slides left and right by air is disposed, and the piston is conveyed together with the slide 55 by magnetism.

Therefore, the opening/closing door 32 is stably sliding on the upper and lower sides through the rail groove part 39 and the slide 55.

The first and second manual door opening/closing portions 70a and 70b are made of first and second doors 30a and 30b opened and closed with respect to the cabinet body 10 as shown in FIGS. 12 to 17. The first and second door locks 72a and 72b and the first and second door frames installed on the pistons of the 1,2 hinge parts 71a and 71b, and the driving cylinders 51a and 51b for the first and second door frames The first and second door lock grooves 73a, 74a (73b, 74b) and the first and second door lock grooves formed in the first and second upper and lower flanges 33a, 34a (33b, 34b) of (31a) (31b) And driving cylinders 75a and 75b for the first and second door locks for locking/unlocking the first and second door locks 72a and 72b with respect to the 73a, 74a and 73b and 74b.

The first and second hinge portions 71a and 71b are the first and second male hinge portions 76a and 76b and the first and second hinge portions installed in the cabinet body 10 as shown in FIGS. 16 and 17. First and second arm hinge portions 77a installed on the first and second webs 35a and 35b of the door frames 31a and 31b and pivotably installed with respect to the first and second male hinge portions 76a and 76b (77b).

In particular, the first and second male hinge portions 76a and 76b are first and second front and rear hinge portions 78a and 78b slidably supported in the y-axis direction with respect to the cabinet body 10, and before and after the second and second hinge portions And first and second male hinge pins 79a and 79b protruding upward in the z direction with respect to the hinge portions 78a and 78b.

The first and second front and rear hinge portions 78a and 78b serve to move together when the first and second door frames 31a and 31b move back and forth as shown in FIG. 11.

The first and second front and rear hinge portions 78a and 78b are installed in the first and second front and rear movable pins 81a and 81b, and the cabinet 10, and the first and second front and rear movable pins 81a and 81b are installed. The first and second guide pieces 82a and 82b to be guided, and the first and second front departure prevention pieces 88a and 88b installed at the rear ends of the first and second movable pins 81a and 81b, The first and second guide pieces 82a, 82b and the first and second spring-break prevention pieces 88a and 88b are provided with first and second springs 83a and 83b.

The first and second springs 83a and 83b automatically add a reverse force when the first and second doors 30a and 30b are retracted.

The first and second female hinge portions 77a and 77b are formed of first and second female hinge holes 77a and 77b that are fitted to the first and second male hinge pins 79a and 79b.

The first and second door locks 72a and 72b are important components that serve as both an automatic door and a manual door.

18, the first and second door locks 72a and 72b are the first and second finger portions 84a and 84b and the first and second finger portions 84a and 84b disposed on the left and right sides, as shown in FIG. The first and second door lock pieces (85a) (85b) receiving elastic force to protrude to the left and right ends of the front end.

The first and second door lock pieces 85a and 85b are pushed toward the first and second finger portions 84a and 84b when an external force is applied.

In addition, the first and second door lock pieces 85a and 85b protrude in a straight triangle when viewed from a plane, and the rear side is formed of a horizontal surface 86 and an inclined surface 87 at the front.

The inclined surface 87 of the first and second door lock pieces 85a and 85b is allowed to ride by the pushing force when the first and second doors 30a and 30b are closed so that the first and second door lock pieces 85a) ( 85b) is pushed inward, and when it escapes from the force, it returns again and plays the role of locking.

The first and second door lock grooves 73a, 74a (73b, 74b) have first and second slots 73a, 74a formed long in the x-axis direction on the first and second upper and lower flanges 33a, 34a, 33b, 34b. (73b, 74b).

Accordingly, the first and second door lock pieces 85a and 85b are first and second slots 73a and 74a and 73b, while the first and second finger portions 84a and 84b approach each other as shown in FIG. 74b), the moment of entry into the interior, as shown in Fig. 10, the gap between the horizontal surface 86 of the first and second finger portions 84a and 84b and the first and second door lock pieces 85a and 85b ) Is locked by being fitted to the edges of the first and second slots 73a, 74a and 73b, 74b, and this is a mode in which the door is automatically moved back and forth.

Conversely, in the state of FIG. 10, when the first and second finger portions 84a and 84b are close to each other as shown in FIG. 13, the first and second door lock pieces 85a and 85b are the first and second slots 73a and 74a. ) (73b, 74b) is not caught on the edge of the unlocked state, in this case, the door is manually opened and closed.

Operation sequence for automatically opening the first door 30a and the second door 30b

When the first door 30a and the second door 30b are in close contact with the cabinet body 10 around the opening 11, the first rear rail groove 38a of the first door 30a is opened and closed secondly. The second rodless cylinder 53b is driven forward until it is positioned on the same line as the door 32b.

Sliding the second opening/closing door 32b toward the first rear rail groove 38a by advancing the second rodless cylinder 53b opens the second door frame 31b to perform necessary work such as replacement of the gas cylinder ②. Do it.

Conversely, while the first door 30a and the second door 30b are in close contact with the opening 11, the second rear rail groove 38b of the second door 30b is in contact with the first open/close door 32a. The first rodless cylinder 53a is driven forward until it is positioned on the same line.

Sliding the first opening/closing door (32a) toward the second rear rail groove (38b) by advancing the first rodless cylinder (53a) opens the first door frame (31a), necessary work such as replacement of the gas cylinder (①) Do it.

Operation sequence for manually opening the first door 30a and the second door 30b

With the first door 30a and the second door 30b in close contact with the cabinet body 10 around the opening 11, the first and second air cylinders 75a and 75b for door locks are used. The first and second door lock pieces 85a and 85b approach the first and second finger portions 84a and 84b of the door locks 72a and 72b so that the first and second slots 73a and 74a and 73b and 74b ).

When the first and second doors 30a and 30b are held and opened, the opening 11 is completely opened while turning in a casement manner by the first and second hinge portions 71a and 71b (see FIG. 19 ).

2. Upper unit (5)

9 and 20, the upper unit 5 includes a support frame 100 including a first support frame 110 and a second support frame 120; A support frame back and forth retraction drive module 200 for reversing the first support frame 110 in the x-axis direction relative to the second support frame 160; A connector module 300 installed on the first support frame 110, a gasket input/output module 400 and a valve shutter module 500; A vision module 600 disposed on the second support frame 160; A support frame elevating module 700 for elevating the support frame 100 in the z-axis direction; And a valve shutter emergency escape module 800.

2-1. Support frame (100)

20, the support frame 100 is divided into a first support frame 110 and a second support frame 120.

The first and second support frames 110 and 120 are the first and second column frames 130 and 140 in the y-axis direction and the x-axis installed on the first and second column frames 130 and 140. It includes a cross frame 150 in the direction.

The cross frame 150 is divided into a first cross frame 151 installed in the first column frame 130 and a second cross frame 152 installed in the second column frame 140.

The first cross frame 151 and the second cross frame 152 are connected by a support frame before and after the driving frame 200.

The valve shutter module 500 is installed on the first cross frame 151 in the y-axis direction.

A vision module 700 is installed on the second cross frame 152.

In the first column frame 130, the connector module 300 is hung slidably and non-loadably through a pair of cross roller guides 131 and 132.

That is, as shown in FIGS. 26 and 27, the top 303 of the support plate 301 of the connector module 300 is hung on the top 134 of the cross roller guide 131 of the first column frame 130. As the structure is suspended, that is, the cross roller guide 131 is accommodated in the support plate 301, so that the top 134 of the cross roller guide 131 naturally catches the top 303 of the support plate 301. 29, the first column frame 130 is supported on the connector module 300 through a pair of cross roller guides 131 and 132 so as to be slidably and unloaded downward.

Therefore, even if the connector nut 340 of the connector module 300 is fastened and connected to the outlet port 91 of the gas cylinder 90 as shown in FIG. 29, the support frame 100 is elevated and unaffected at all. Together, the valve shutter module 500 is freely elevated.

The purpose of this is to minimize the error range caused by mechanical factors in detecting the weight change of the gas cylinder 90 according to the amount of gas used due to the no-load sliding of the cross roller guides 131 and 132.

That is, as the weight of the gas cylinder 90 loaded on the turntable module 1000 decreases, the connector module 300 also goes down together when the gas cylinder 90 finely descends, thereby causing an error range caused by mechanical factors. Minimizes.

The support plate 301 of the connector module 300 is formed with a withdrawal hole 303 through which a gas pipe 360 to be described later is drawn out, and a gas piping 360 withdrawn from the withdrawal hole 303 is formed in the first column frame 130. ) A vertical long hole 133 is formed to avoid interference due to the elevation of the support frame 100.

2-2. Support frame before and after drive module (200)

The support frame back-and-forth driving module 200 fastens the connector nut 340 of the connector module 300 to the outlet port 91 of the gas cylinder 90 (see FIG. 25) or releases the retraction (FIGS. 23 and 23 ). 24) is a module that places the valve shutter 510 of the valve shutter module 500 on the valve 92 of the gas cylinder 90 at the same time.

The support frame forward and backward driving module 200 connects between the first cross frame 151 and the second cross frame 152 to advance (pull) the first cross frame 151 relative to the second cross frame 152. Or it includes an actuator 200 to retreat (meme).

At this time, the actuator 200 is preferably divided into a first actuator 210 and a second actuator 220, the reason being as follows.

The first actuator 210 is implemented as an air (pneumatic) cylinder 210 that advances (pulls) the first cross frame 151 relative to the second cross frame 152.

In addition, on the movable side of the air cylinder 210, a release complete position sensor 211, a fastening start position sensor 212, and a fastened position sensor 213 are installed as shown in FIG.

The second actuator 220 is implemented as a gas spring 220 that retracts (pushes) the first cross frame 151 relative to the second cross frame 152.

Meanwhile, when the regulators 214 and 215 for retreating are installed in the air cylinder 210 to adjust the pressure when retracting lower than when moving forward, when the gas spring 220 retracts, the air cylinder 210 assists the retracting force. Gives

The functions of the air cylinder 210 and the gas spring 220 in the forward and backward motions will be described.

The air cylinder 210 is advanced to fasten and connect the connector nut 340 to the outlet port 91. The weight of the connector module 300 to be moved during the forward operation and the pressure of the forward regulator 214 for smooth operation. Is set to 0.3Mpa or more. When contact is made with each other after advancing, the inlet side wears out because the connector nut 340 strongly presses the outlet port 91 of the gas cylinder 90. At this time, the gas spring 220 applies a force in the opposite direction of the forward motion to halve the pressing force of the connector module 300 to minimize wear of each other.

Conversely, in the retraction (reverse) operation of releasing the connector nut 340 from the outlet port 91, the speed of the air cylinder 210 is faster than the speed at which the air cylinder 210 is released when only the retraction of the air cylinder 210 is released. Pressure continues to be compressed in the rod (piston) space, which causes the connector module 300 and the outlet port 91 to release pressure. The ~40mm section is moved at full speed. In this case, since severe collision occurs at the end point of the stroke, the life of the entire equipment may be shortened and the setting may be wrong. ) To 0.1MPa or less to reduce the air force compressed by the rod, and release it with the force and speed of the gas spring 220 to maintain a constant speed even when the connector module 300 and the outlet port 91 are released. It stably escapes, and instead of the insufficient power, the air set at 0.1 MPa is provided in preparation for the case where the power of the gas spring 220 is insufficient to push the instrument to the end of the stroke.

The air cylinder 210 and the gas spring 220 are disposed on the front side of the first cross frame 151 and the second cross frame 152, and guide posts corresponding thereto are installed on the rear side, and thus the left and right sides of the whole Sliding is performed stably.

2-3. Connector module (300)

The connector module 300 is a device that automatically connects the gas cylinder and the gas pipe in order to protect the operator from dangerous gases without a human error in connecting the gas cylinder 90 and the gas pipe 360 .

That is, the connector module 300 is a module that is automatically fastened (gas supply) or released (replacement of the gas cylinder) to the outlet port 91 of the gas cylinder 90.

The connector module 300, as shown in Figures 30 to 32, the motor 310, the hollow reducer 320 receiving the rotational power of the motor 310, and the connector socket which is the output terminal of the hollow reducer 320 The connector nut 340 installed in the 330 and fastened with the outlet port 91, the nut concentric correction piece 350 installed between the connector socket 330 and the connector nut 340, and the hollow reducer 320 The gas pipe 360 disposed through the center of the pipe, the pipe fixing block 370 fixing the other end of the gas pipe 360 to the hollow reducer 320, the head 361 of the gas pipe 360 and the connector nut It includes a C-ring 380 for preventing departure interposed between (340).

The motor 310 is a servo motor and is installed in the motor bracket 321 formed in the hollow reducer 320.

That is, the motor bracket 321 is disposed in the y-axis direction with respect to the rotation axis (centered on the x-axis) of the hollow reducer 320, thereby forming an L-shaped rotational power transmission unit as a whole, minimizing the occupied space as much as possible.

The driving part (not shown) of the motor 310 and the driven part (not shown) of the hollow speed reducer 320 are connected and transmitted by a conventional gear, etc., and detailed description is omitted.

The hollow reducer 320 is provided with a support plate 301 or a moving plate 301 having a cross roller guide 131 slidably connected to a cross roller guide 131 of the first column frame 130.

Nut concentric correction piece 350 is preferably implemented as a spring (350).

The spring 350 allows the connector nut 340 to move at a high degree of freedom, thereby correcting incorrect concentricity of each other when screwing with the outlet port 91.

The connector socket 330 and the connector nut 340 are inserted into a polygonal type, so that the rotational force of the connector socket 330 is transmitted to the connector nut 340 through the polygon.

At the rear end of the connector nut 340, a seat 341 on which one side of the spring 350 is placed is protruded toward the rotation center axis. That is, the seat 341 may be referred to as an inner flange.

When the head 361 of the gas pipe 360 is caught inside the seat 341, the C-ring 380 may be omitted.

The gas pipe 360 is a stainless steel pipe, and the head 361 of the gas pipe 360 is inserted into the outlet port 91.

That is, the gas pipe 360 is fixed to the hollow reducer 320 such that the head 361 is disposed inside the connector nut 340.

The C-ring 380 is installed between the seat 341 and the head 361 to prevent the connector nut 340 from coming off.

In addition, a resin-based piping guide 390 is further provided between the center of the hollow reducer 320 and the gas piping 360 to maintain the straightness of the gas piping 360.

That is, since the stainless steel pipe 360 lacks flexibility, it is severely twisted when the Up/Down of the support frame 100 and the forward/backward movement of the connector module 300 are operated, and serves to hold the portion. If the stainless steel gas pipe 360 is twisted, the connector socket 330 is twisted, and there is a high possibility of leakage because it is not fastened or is not normally fastened.(If the used gas is a harmful gas, it is likely to spread in a big accident, so it is as stable as possible. Method is good.)

The head 361 of the gas pipe 360 is formed with a locking jaw 331 that is applied to the output end side.

Therefore, the gas pipe 360 is installed while being prevented from moving back and forth by the pipe fixing block 370 and the locking jaw 331.

In addition, at the tip of the head 361 of the gas pipe 360, a gasket support pipe 362 in the form of a tube is formed to protrude further, and a pair of cut grooves 363 through which a pair of grip portions 452 to be described later are drawn out Is formed.

Therefore, when the gasket (G) is introduced into the inside of the gasket support pipe (362), the C-ring (G1) installed on the side of the gasket (G) is in elastic contact and does not fall forward to maintain the injected state.

The rotational power of the motor 310 is fastened or reversely rotated with the connector socket 330 and the connector nut 340 installed on the rotating plate 322 through a reduction gear of the hollow speed reducer 320 or fastened with the outlet port 91 or Is released.

A spacer block 323 is provided between the rotating plate 322 and the connector socket 330.

In addition, left and right reflectors 640 and 650 reflecting the light source of the vision module 600, which will be described later, are installed on the left and right sides of the spacer block 323.

The left reflector 640 has a larger diameter than the right reflector 650.

The fastening/unlocking operation of the connector module 300 will be described.

Tightening action

1. Align the outlet port (91) of the gas cylinder (90) with the connector nut (340) of the connector module (300) with the vision camera of the vision module (600).

2. Advance (pull) the connector module 300 toward the outlet port 91 with the air cylinder 210

3. After detecting the tightening start position, rotate the connector nut 340 in the tightening direction by rotating the motor

4. Motor rotation and forward stop after detecting the set motor load value and tightening completion position

Release action

1.Reverse (meme) the connector module 300 by mixing the main reaction force of the gas spring 220 and the auxiliary reverse force of the air cylinder 210

2. Motor rotation in the fastening reverse direction

3. After the release complete position is detected, motor rotation and reverse stop

2-4. Gasket input/output module 400

The gasket input/discharge module 400 puts the gasket G into the gasket support pipe 362 of the gas pipe 360 before the connector nut 340 is fastened to the outlet port 91, and the connector nut 340 When is separated from the outlet port 91 is a module to take out the collected gasket (G) and collect.

That is, as shown in FIGS. 33 to 36, the gasket input/discharge module 400 includes a gasket supply unit 410 and a gasket charging unit that charges the gasket G supplied from the gasket supply unit 410. (420), the gasket alignment portion 430 disposed on the upper side of the gasket charging portion 420, and the gasket (G) of the gasket charging portion 420 lifting the gasket alignment portion 430 to lift in the z-axis direction For the gasket actuator 440, a pair of finger grippers 450 and a pair of finger grippers 450 gripping both sides of the gasket G in the y-axis direction while facing the gasket alignment part 430. A gasket actuator 460 for approaching/removing along the y-axis direction, a gasket actuator 470 for forward and backward reversing a pair of finger grippers 450 along the x-axis direction, and a pair of fingers It includes a rotating gasket actuator 480 for rotating the gripper 450 toward the connector nut 340 about the x-axis, and a gasket collection container 490 disposed under the pair of finger grippers 450.

Here, the gasket G is a donut-shaped metal, and a C-ring G1 is fitted on its side.

In addition, since the gasket G is compressed when it is fastened, it is disposable and is collected and discarded in the gasket collection container 490.

The gasket supply unit 410 has a gasket storage container 413 close to an L shape in which a gasket inlet 411 is formed on the upper side and a gasket outlet 412 is formed on the lower side, and the gasket inlet 411 and the gasket outlet of the gasket storage container 413 are formed. It includes an air purge (414) (415) for the inlet and outlet are installed on the (412) side.

The gasket storage container 413 does not need a separate protective sheet for the gasket (G) storage method as the gasket side contact method, and avoids the contact between the front part and the rear part, which is an important part, to prevent the gasket (G) from being damaged.

The gasket storage container 413 is made of a resin-shaped U-shaped cross-section guide frame 416 and a transparent PC cover 417 installed on the front surface of the guide frame 416, so that it is easy to check the remaining amount and to the gasket G. No damage.

The air purge 414 for the inlet can be made into an open type of the gasket inlet 411 to block the penetration of particles in advance, and the air purge for the outlet 415 is connected to the gasket reservoir 413. Contamination of the gasket G in storage can be blocked.

The gasket charging part 420 includes a gasket cover plate 423 having a lower surface and a front surface supporting the gasket G, and a front support piece 421 and 422, and an alignment block supporting the rear surface of the gasket G ( 424).

The lower surface support piece 421 has a circular arc shape concave down the same trajectory as the lower surface of the gasket G.

The front support piece 422 is a bar shape protruding from the vertical center line of the gasket charging plate 423, and its upper end protrudes to the center of the gasket G.

A blocking wall 425 is formed on one side of the alignment block 424 to prevent the gasket G from the gasket outlet 412 from coming off the base piece 421.

The gasket actuator 440 for lifting is a pneumatic cylinder composed of a cylinder 441 and a piston 442 installed on the rear surface of the alignment block 424.

The lower surface of the gasket charge plate 423 and the lower end of the piston 442 are connected by a connection block 443.

The alignment block 424 is supported by the main block 444 provided in the first cross frame 151 as shown in FIG. 22.

The gasket alignment unit 430 is installed on the front surface of the alignment block 424, as shown in FIG.

The gasket alignment part 430 includes an alignment groove 431 formed toward the rear side (y-axis) of the alignment block 424 and a gasket alignment plate 432 disposed in the alignment groove 431, And a spring 433 installed between the gasket alignment plate 432 and the alignment groove 431.

This is in the alignment operation of the gasket (G), if the gasket alignment plate (432) is a fixed type, the finger gripper (450) compresses the gasket (G) with the gasket alignment plate (432), thereby causing scratches on the gasket (G). Since it can be made of a material of the movable gasket alignment plate 432 and resin-based spring 443 is compressed in the y-axis direction to prevent automatic alignment and scratches of the gasket (G).

That is, when the gasket G plate occupied by the gasket G is lifted and the rear surface of the gasket G is located on the front surface of the gasket alignment plate 423, the finger grippers 450 use both sides of the gasket G. When chucking, the alignment is automatically performed.

The pair of finger grippers 450 are disposed on the left and right sides of the front support piece 422.

That is, the pair of finger grippers 450, as shown in FIGS. 38 and 39, a pair of access/removal blocks 451 installed on the upper surface of the gasket actuator 460 for access/removal, and access/ It is installed on the upper end of the eviction block 451 is disposed on both sides of the gasket (G), a pair of grip portion 452, and formed on the inner surface of the pair of grip portion 452, as long as it hits the front of the gasket (G) It includes a pair of gasket alignment projections 453.

In particular, a fitting groove 454 into which the C ring G1 installed on the side of the gasket G is fitted is formed on the inner surface of the pair of grip portions 452.

Therefore, the grip portion 452 is manufactured in a shape that matches the side shape of the gasket G, so that a stable operation can be realized only with a two-position grip when chucking.

In addition, the finger gripper 450 has a gasket alignment protrusion 453 capable of supporting alignment, and is configured to align together without a separate operation during the gasket chuck operation.

In addition, since the front and rear surfaces of the gasket G should not be scratched, the grip portion 452 is preferably made of engineering plastic material.

The gasket actuator 470 for forward and backward movement is supported by the main block 444 as a pneumatic cylinder that is a cylinder and a piston.

The gasket actuator 480 for rotation is a rotary pneumatic cylinder, and is supported by a third block 447 supported by the gasket actuator 470 for forward and backward movement.

The gasket actuator 460 for approaching/removing is a pneumatic cylinder that is a cylinder and a piston, and is fixed to the upper surface of the second block 446, and the second block 446 is supported by the rotating gasket actuator 480.

In addition, the gasket supply unit 410 is supported on the other side of the alignment block 424.

A support frame 491 is installed on the lower side of the third block 447 to support the gasket collection container 490 detachably.

The operation of the gasket input/output module 400 will be described with reference to FIGS. 36, 38, and 40.

Gasket input operation

1. As shown in FIG. 36, the gasket charge plate 423 takes over one new gasket NG from the gasket supply unit 410 in the x-axis direction with free fall.

2. As illustrated in FIG. 36, the gasket charging plate 423 is moved up in the z-axis direction with the gasket actuator 440 for lifting to the gasket alignment portion 430 on the x-axis line equal to the position of the grip portion 452. The gasket NG is lifted. When the gasket charge plate 423 is lifted, the side gasket outlet 412 is blocked.

3. As shown in FIG. 38, the gasket (4) in the gasket alignment plate 432 of the gasket alignment part 430 is brought into contact with the gasket NG by the reverse motion in the x-axis direction of the gasket actuator 470 for forward and backward movement. NG) is chucked by the approach operation of the gasket actuator 460 for alignment and approach/removal.

4. When the gasket NG is aligned and chucked, when the gasket charge plate 423 is lowered in the z-axis direction, one new gasket NG is taken over in the x-axis direction with free fall.

5. As shown in FIG. 40(a), the grip portion 452 chucked by the forward movement in the x-axis direction of the gasket actuator 470 for forward and backward movement is returned to the initial position.

6. The returned grip portion 452 is rotated by a gasket actuator 480 90 degrees around the x-axis to be positioned on the connector nut 340 as shown in FIG. 40(b).

7. As shown in FIG. 40(c), the gasket NG of the grip portion 452 is put into the gasket support pipe 362 of the connector nut 340 by the reverse operation of the gasket actuator 470 for forward and backward movement. At this time, the grip portion 452 is introduced/exposed from the incision groove 363.

8. When input of the gasket NG is completed, the chucked by the eviction operation of the gasket actuator 460 for approach/eviction, and then the grip portion 452 unchucked by the forward movement of the gasket actuator 470 for forward and backward movement is shown in FIG. 40. As shown in (d), it comes out from the connector nut 340.

9. Rotating -90 degrees of the gasket actuator 480 for rotation, the unchucked grip portion 452 is positioned on the gasket alignment portion 430 as shown in FIG. 40(e).

Gasket discharge action

After the gas supply of the gas cylinder 90 is completed, one cycle, which is an operation of discharging the old gasket OG inside the connector nut 340 from the outlet port 91, will be described below.

1. The chucked grip portion 452 is rotated by a gasket actuator 480 for 90 degrees to be positioned on the connector nut 340.

2. The grip portion 452 enters the inside of the connector nut 340 by the reverse operation of the gasket actuator 470 for forward and backward movement.

3. The grip portion 452 chucks the gasket OG by the approach operation of the gasket actuator 460 for approaching/departing.

4. The grip portion 452 chucked by the forward movement of the gasket actuator 470 for forward and backward movement is pulled out from the connector nut 340.

5. The chucked grip portion 452 is rotated -90 degrees with a rotating gasket actuator 480.

6. The gasket OG used due to the chucking of the grip part 452 due to the eviction operation of the gasket actuator 460 for approach/eviction is freely dropped and collected in the gasket collection container 490.

2-5. Valve shutter module (500)

The purpose of the above is to prevent the inhalation accident caused by the leakage of harmful gases in the human body by automatically opening and closing the valve 92 of the gas cylinder 90 without an operator.

The valve shutter module 500 is installed on the first cross frame 151.

The valve shutter module 500, as shown in Figure 41, the valve shutter 510, the rotary driving unit 540, the rotary power transmission unit for transmitting the rotational power of the rotary driving unit 540 to the valve shutter 510 550.

The valve shutter 510 is a part that opens and closes the valve 92 of the gas cylinder 90.

The valve shutter 510 includes a cap portion 520 surrounding the outer circumferential surface of the valve 92 and a valve shutter portion 530 disposed inside the cap portion 520.

The cap portion 520 includes a top plate 521 and a cylindrical plate 523 installed at the edge of the top plate 521.

The valve shutter portion 530 is provided on the inner circumferential surface of the cylindrical plate 523 and the shaft 531 disposed at predetermined intervals in a circular shape inside the cap portion 520, and the support plate supporting the shaft 531 to be liftable ( 533), a spring 535 installed between the top of the top plate 521 and the shaft 531, and a rotating shaft fitted rotatably with the top plate 521 with the bottom installed at the center of the support plate 533 ( 537).

Between the shaft 531 and the support plate 533, a linear bush 532 is installed to provide smooth lifting of the shaft 531.

On the upper side of the shaft 531, a locking jaw 534 is formed on the top of the support plate 533 or the top of the linear bush 532.

The upper side of the spring 535 is fitted into the groove 522 formed on the lower surface of the upper plate 521, and the lower side of the spring 535 is fitted into the upper end 531a of the shaft 531.

The part where the top plate 521 and the rotation shaft 537 are fitted is fitted in a polygon, so that the valve shutter portion 530 is rotated at the same time by the rotation of the rotation shaft 537.

When the structure of the linear bush 532 and the spring 535 continues to push the shaft 531 downward, the valve shutter 510 is seated on the valve 92 of the gas cylinder 90, the valve ( 92) The part that interferes with the shape is avoided upward by the shaft 531, and the part without interference serves as a pillar that opens and closes the valve 92 during rotation. The above structure is to cope with the diversity of the shape of the valve 92 as shown in FIG.

The rotation driving unit 540 includes a servo motor 541 and an elbow type reducer 543 that receives the rotational power of the servo motor 541.

The rotary power transmission unit 550 includes an arc driving unit 560 installed on the lower surface of the pulley 544 of the reduction gear 543, an arc driven unit 570 installed on the upper plate 521, and a rotating shaft 534. And a bearing 580 installed between the pulleys 544.

The arc driving part 560 is an arc driving protrusion 560 protruding downward from the lower surface of the pulley 544.

That is, the arc driving protrusion 560 has a fan shape as shown in FIG. 44 and has an arc length of 1/2 of a half circle or 1/4 of a circle.

The arc driven portion 570 is an arc driven protrusion 570 projecting upward from the upper plate 521.

In addition, the circular arc driven protrusion 570 is implemented as a semicircular driven protrusion 570.

Accordingly, a discontinuous section separated by about 90 degrees is formed between the fan-shaped drive protrusion 560 and the semicircular driven protrusion 570.

The reason for the discontinuity is as follows.

The rotational power transmission unit 550 is configured such that the 90-degree section, which is a discontinuous section, freely rotates with each other and the power transmission is performed at 90 or more.

If there is no discontinuous section, the opening and closing of the valve 92 is driven by the servo motor 541. Even if the open and closed state is checked and the servo motor 541 is immediately stopped, the servo motor 541 Because of the nature of the encoder (Encoder) value exceeds the stop position, the load of the servo motor 541 continues to rise to find the encoder value, and eventually the servo off (Servo Off) is made.

In order to prevent such a situation, it is intended to stabilize the load of the servomotor by checking the open and closed state of the valve 92 and rotating the encoder value in the reverse direction.(When the load value of the servomotor rises to the maximum value, the equipment and valve Since damage is severely applied, the equipment may be damaged during repeated use, and if it is damaged at a lower limit value than the target load value, the servo motor will continue to rotate, resulting in a large number of process failures or endless stops.)

A rotating shaft 534 and a pulley 544 are installed on the inner ring 581 and outer ring 583 of the bearing 580.

In the discontinuous section, only the pulley 544 installed on the outer ring 533 rotates clockwise, and then the valve shutter 510 is also rotated to open and close the valve 92 while the circular drive unit 560 contacts the circular driven portion 570. .

Briefly, opening and closing is as follows.

Valve 92 open sequence

1. After detecting the completion signal of the connector nut 340, the valve shutter module 500 descends.

2. Stop after obtaining the gas cylinder position sensor signal (optional)

3. After detecting the sensor, the valve shutter is seated on the valve by descending by a fixed value to a certain value.

4. After opening the valve as much as the set motor load upper limit, stop

5. Stop after reversing the valve by the set motor load lower limit

Valve 92 close sequence

1. Stop after closing the valve as much as the set motor load upper limit

2. Stop after reversing the set motor load lower limit

3. Rise until the gas cylinder position sensor signal is released

2-6. Vision module (600)

The vision module 600 is a module that detects the positions of the connector nut 340 of the connector module 300 and the outlet port 91 of the gas cylinder 90.

The vision module 600 is installed on the second cross frame 152.

The vision module 600 includes a vision camera 610 and lighting 630.

In addition, the vision module 600 further includes the above-described left and right reflectors 640 and 650.

The left and right reflectors 640 and 650 reflect the light emitted from the light from the rear to make the front and rear business cards on the head 95 of the gas cylinder 90 more distinct, so as to take clear pictures.

2-7. Support frame lifting module(700)

The support frame elevating module 700 is installed on the carbit 3 to elevate the second column frame 140.

The support frame elevating module 700 includes a housing 710 fixed to one side wall of the cabinet 3, an elevating slider (not shown) disposed inside the housing 710 installed in the second column frame 140, and a housing A motor that transmits rotational force to a vertical male screw rod (not shown) mounted on the inside of the 710 and mounted on a lower surface of the housing 710 while being mounted on a vertical slide screw (not shown) and fastened to an elevating slider (not shown) ( 730).

2-8. Valve shutter emergency escape module (800)

The valve shutter emergency ejection module 800 attempts to solve the irrationality of removing the valve shutter module 500 in order to close the valve 92 of the gas cylinder 90 when the electricity is down in an emergency situation. ) And maintains the connection of the gas cylinder (90), it is an object to provide an upper unit (5) for a gas supply device of a gas cylinder to which an emergency release module capable of quickly closing the valve (92) is added.

The upper unit 5 further includes a valve shutter emergency release module 800 for raising the support frame 100 with respect to the support frame lifting module 700.

More specifically, the valve shutter emergency exit module 800 is further installed between the second column frame 152 and the lifting slider (not shown).

The valve shutter emergency ejection module 800 is an emergency situation (electric down) after the valve shutter 510 of the valve shutter module 500 is seated to open the valve 92 of the gas cylinder 90 as shown in FIG. 46. It is a safety device that lifts up the valve shutter 510 as shown in 47 and directly closes the valve 92 of the gas cylinder 90.

That is, the valve shutter emergency ejection module 800 fixes the second column frame 140 with respect to the lifting plate 810 for the supporting frame and the lifting plate 810 for the supporting frame installed on the lifting slider (not shown). The manual lever part 830 and the emergency release gas spring 850 for supporting the second column frame 140 upwardly with respect to the lifting plate 810 for the support frame when the manual lever part 830 is released are included. do.

The second column frame 152 and the lift plate 810 for the support frame are connected to be liftable by a cross roller guide 801 and 803 for escape.

The manual lever part 830 is inserted through the through hole 831 formed in the second column frame 140, the groove 833 formed in the lift plate 830 for the support frame, and the groove 833 through the through hole 831. It consists of a manual escape lever 835 plugged in.

The emergency escape gas spring 850 automatically lifts the weight of the appliance when using the emergency escape module to help prevent the support frame from dropping while the person manually operates the valve.

The operation of the valve shutter emergency eject module 800 is as follows.

When the valve shutter 510 is seated on the valve 92 of the gas cylinder 90 and an emergency such as an electric down occurs in an open state, the operator manually pulls the manual escape lever 835.

Then, with the force of the gas spring 850 for emergency escape, the second column frame 152 is raised (usually set to rise about 50 mm) with respect to the support frame lift plate 810, so that the valve shutter 510 has a gas cylinder ( When the valve 92 is out of the valve 92, the operator manually closes the valve 92.

When the emergency is over, the manual escape lever 835 is pulled down manually, and then the manual escape lever 835 is inserted into the groove 833 to resume the operation.

The rise of the valve shutter 510 in this emergency is also made while the connector module 300 is continuously connected to the outlet port 91 (due to no-load sliding structure).

3. Lower unit (7)

The lower unit 7 includes a turntable module 1000 on which the gas cylinder 90 is placed, a clamp module 3000 for clamping the gas cylinder 90 to be rotatable, and a jacket heating module for heating the gas cylinder 90 ( 5000).

3-1. Turntable module (1000)

The turntable module 1000 is configured to measure the amount of use of the gas cylinder 90 and the replacement cycle of the gas cylinder 90 using the load cell 1100, and at the same time, the outlet of the gas cylinder 90 to the connector module 300. A configuration in which a rotation function for aligning the port 91 is added.

The turntable module 1000 rotates the load cell 1100 placed on the floor, the turntable portion 1300 placed on the upper surface of the load cell 1100, and the turntable portion 1300, as shown in FIGS. 49 to 52. It includes a rotating transmission unit 1500.

The turntable part 1300 is provided with respect to the lower base 1310 having a through hole 1311 in which the loss cell 1100 is placed, an upper base 1320 placed on an upper surface of the load cell 1100, and a lower base 1310. The elevating guide portion 1330 for guiding the upper base 1320 up and down (z-axis), the turntable 1340, and the inner ring 1351 are installed on the turntable 1340 and the outer ring 1351 is the upper base 1320 It includes a cross roller bearing 1350 installed on.

The elevating guide part 1330 is a guide shaft 1331 in the y-axis direction installed at the edge of the upper case 1320, and a guide ball 1333 installed in the lower base 1310 to guide the guide shaft 1331 up and down. ).

In addition, the guide hole 1333 is fitted with a linear bush 1332 is installed to provide a precise lifting of the guide shaft 1331.

Of course, the guide hole 1333 is preferably formed in the guide hole block 1335 installed on the lower base 1310.

The guide hole block 1335 is preferably installed at an edge close to the through hole 1311 so that the guide hole 1333 is placed on the through hole 1311, and it is preferable to secure a sufficient stroke of the guide shaft 1331.

The turntable 1340 is composed of a driven table 1341 installed on the inner ring 1351 and a cover table 1343 provided on an upper surface of the driven table 1321.

The side of the driven table 1341 is of a spur gear type in which teeth formed to engage with a timing belt, which will be described later, are formed.

Of course, if it is not the timing belt 1530, it can rotate in engagement with a rack or other gear.

On the turntable 1340, as shown in FIG. 53, a gas cylinder 90 or a pallet-type dedicated jig 6100 is placed.

At this time, a positioning protrusion 6150 is installed on the lower surface of the pallet-type dedicated jig 6100, and a positioning groove 1370 in which the positioning protrusion 6150 is positioned is formed on the turntable 1340.

The rotation transmission unit 1500 applies rotational power to the driving pulley 1510 and the driven pulley (not shown), the timing belt 1530 and the driving pulley 1510 hanging from the driving pulley 1510 and the driven pulley (not shown). And a transmitting motor 1540.

The teeth of the timing belt 1530 are formed on the outer surface, and are engaged with the teeth of the driven table 1341 such as a flat tooth to rotate the driven table 1341 forward or reverse.

Of course, the rotation transmission unit 1500 can be transmitted in a variety of gears such as worms and worm gears, but in the case of meshing between these gears, the turntable 1340 needs to come down finely and make accurate measurements as the gas volume decreases. If the gears are engaged with each other, the teeth can be damaged even if they cannot come down.

To this end, in this embodiment, relative sliding with the driven table 1341 is possible with respect to the teeth of the timing belt even if the driven table 1341 meshed with the teeth of the timing belt 1530 with the inner and outer surfaces reversed finely downward. Rotational force can be transmitted without interference.

The core of the turntable module 1000 is as follows.

First, since the load cell 1100 is placed on the floor, there are no components with pneumatic and electrical wiring connected to the rotating turntable 1340. This can be said to be a stroke (stroke) that requires ±180 degrees of movement because the gas cylinder 90 is input in a non-constant direction. Therefore, when the pneumatic and electrical wiring is raised on the turntable 1340, it is necessary to cope with the unexpected situation of moving more than ±180 while allowing ±180 degrees to move, and the concept of the cable being infinitely turned because it is for precision measurement This is because it cannot be used.

Second, to prevent the external force from affecting the weight of the turntable 1340 and the gas cylinder 90 mounted on the load cell 1100, the linear bush 1333 and the guide shaft 1331 structures are installed in all directions. At the same time maintaining the balance and serves as a guide for preventing departure of the upper base 1320.

Sequence of turntable module 1000

1. The autonomous vehicle forklift 6300 puts the pallet type jig 6100 on which the gas cylinder 90 is placed, on the turntable 1340.

2. The gas cylinder 90 is clamped with the clamping module 3000 to be rotatable about the z-axis.

3. Using the vision module 600, the turntable 1340 is rotated until the outlet port 91 of the gas cylinder 90 is aligned with the connector module 300 to perform alignment.

3-2. Clamp module (3000)

The clamp module 3000 is composed of an upper and lower clamp module 3000 that clamps the upper and lower sides of the body 93 of the gas cylinder 90.

That is, the upper and lower clamp modules 3000 are arranged on the upper and lower sides with the jacket heating module 5000 as shown in FIG. 9.

Each of the clamp modules 3000 includes a pair of left and right clamp parts 3100 and an actuator 3300 for clamp access/removal of the pair of clamp parts 3100 approaching/removing along the x-axis direction.

The clamp part 3100 includes a clamp body 3110 in which a trajectory such as the body 93 of the gas cylinder 90 is formed on the inner surface, and a roller 3130 installed on the inner surface of the clamp body 3110.

The roller 3130 is for freely allowing rotation for alignment while the gas cylinder 90 is clamped.

3-3. Jacket heating module (5000)

Since the compressed gas is used, it is possible to realize the automation of the facility by automatically wrapping and releasing the body of the gas cylinder of the jacket heating module 5000, which is installed to evaporate and freeze during use.

Basically, the contents of the gas cylinder 90 are liquefied gases, so if they are used continuously, the heat of vaporization is taken away and the inside of the barrel is cooled. Therefore, it is necessary to keep the gas cylinder at a constant temperature because the liquid in the barrel cannot be sufficiently vaporized, which in this case has a serious effect on the process of the equipment supplied with gas from the cabinet 3.

For this, the jacket heating module 5000 includes a left and right jacket 5100 surrounding the body 93 of the gas cylinder 90, and a hinge part 5200 and a hinge part 5200 connecting the rear sides of the left and right jackets 5100. ), the left and right pneumatic cylinders 5300 for pulling or pushing the left and right jackets 5100, and heaters 5400 installed on the inner surfaces of the left and right jackets 5100.

The left and right jackets 5100 are circular when viewed in a plane (x-y plane).

In addition, the left and right jackets 5100 are fixed jackets 5110 supported on side walls of the cabinet 3 and movable jackets 5130 connected to left and right sides of the fixed jackets 5110 through hinge portions 5200. Is divided.

The fixing jacket 5110 is supported on the side walls of the cabinet 3 by a support 5120.

The pneumatic cylinder 5300 is disposed between the bracket 5310 fixed to the side wall of the cabinet 3 and the movable jacket 5130, and installed in the front and rear hinge portions 5330 and 5340 in the front and rear of the pneumatic cylinder 5300. It is connected.

The rear hinge portion 5330 is connected to the cylinder 5301 side, and the front hinge portion 5340 is connected to the piston 5303 side.

Therefore, when the piston 5303 is pulled, the movable side jacket 5130 opens the hinge part 5200 while the pneumatic cylinder 5300 is turned outward by the front and rear hinge parts 5330 and 5340 when viewed from a plane. It is rotated to the center (rotated around the z axis) to open.

The heater 5400 may be embodied in various ways, but is preferably a planar heating element.

This hinge point is a layout for preventing the arrangement of the heating wires and the connection of the heater 5400.

4. Gas cylinder's autonomous vehicle transport mechanism (6000)

The basic configuration is that a structure such as motion is mounted on the autonomous vehicle, and minimizes the amount of power when driving motion other than that driven by the autonomous vehicle (transport robot) to enable additional operation.

The gas cylinder autonomous vehicle transport mechanism 6000 includes a pallet-type dedicated jig 6100 and a pallet-type dedicated jig 6100 that carries an autonomous vehicle forklift 6300.

The pallet-type jig 6100 is loaded with a gas cylinder 90, a support 6110, a fork insertion groove 6130 into which a fork F is inserted into the lower surface of the support 6110, and a positioning groove ( 1370) includes a positioning protrusion 6150 positioned.

In addition, a convex portion 6111 on which a concave lower surface 94 is placed above the gas cylinder 90 is formed at the center of the upper surface of the base 6110, and a protruding border 6113 is formed at the edge of the base 6110.

The autonomous vehicle forklift 6300 largely includes an autonomous vehicle 6400 and a transport forklift 6500 loaded on the autonomous vehicle 6400.

The autonomous driving vehicle 6400 is a transport robot, and a controller box CB is provided to provide a battery while the transport forklift 6500 is mounted, and to control the driving by transmitting and receiving with the control unit 9.

The transport forklift 6500 includes a mounting frame 6510 mounted on the self-driving truck 6400, a vertical plate 6520 disposed in the z-axis direction on the front surface of the mounting frame 6510, and up and down of the vertical plate 6520. And a clamper 6530 installed on the side, a lifter 6540, and an actuator 6470 for forward and backward movement of the vertical plate 6520 relative to the mounting frame 6510 in the y-axis direction.

A control box CB is mounted on the mounting frame 6510.

The clamper 6530 includes a pair of left and right clamp portions 6531 similar to the above-described clamp module 3000, and an actuator 6333 for approaching/departing along the x-axis direction.

However, there is no roller on the inner surface of the clamp portion 6531 because it is not necessary to rotate in the clamped state.

The actuator 6333 for approach/removal is a rack and pinion type linear module installed on each of the clamp portions 6531 of both arms, and transmits the rotational power of the motor 6534 and the motor 6534 to the clamp portion 6531. It consists of a rack and a pinion portion (6535) that allows the clamp portion (6531) of both arms to move symmetrically.

The lifter 6540 includes a lifting part 6650 and a lifting actuator 6560 for lifting the lifting part 6650 in the z-axis direction.

The lifting portion 6650 includes a lifting plate 6651 and left and right forks F installed at the bottom of the lifting plate 6651.

The left and right forks F are inserted into the fork insertion groove 6130 of the dedicated jig 6100 of the pallet type.

The actuator 6560 for lifting includes a housing 6601 installed on the front surface of the vertical plate 6520, a nut lift (not shown) mounted on the lifting plate 6651 while mounted on the housing 6601, and a vertical male thread rod It includes a ball screw type mechanism 6603 (not shown), and a servomotor 6567 that transmits rotational power to a vertical male thread rod (not shown).

The motor 6671 is disposed on the upper surface of the housing 6601.

The actuator 6470 for forward and backward movement is to move the vertical plate 6520 back and forth with respect to the mounting frame 6510, and is composed of a pulley and a ball screw type linear module, and reinforces deflection when moving forward with an LM guide.

That is, as shown in FIGS. 61 and 63, the actuator 6670 for forward and backward advancement includes a motor 6657, a ball screw 6573 and a transfer nut 6475 that receive rotational power of the motor 6657, and transfer. It includes a forward and backward bar (6579) installed on the nut (6575).

The forward and backward bars 6579 move the vertical plate 6520 forward and backward while being supported by the LM guide.

Here, a protruding dock sensor (not shown) is installed on one side of the pedestal 6110 of the pallet-type jig 6100, and a proximity sensor (not shown) detecting a dock sensor (not shown) is installed on the gas supply device. By placing, the fork F of the autonomous vehicle forklift 6300 is sensed to be located on the turntable 1340 to stop driving and load the pallet-type dedicated jig 6100 to the turntable 1340.

The upper unit 5, the lower unit 7, and the autonomous vehicle forklift 6300 described above are driven and controlled by communication and sensors, such as Wi-Fi, with the control unit 9.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art variously modify or modify the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. Can be carried out.

1: Gas supply device 3: Cabinet
5,7: Upper and lower units 9: Control
10: cabinet body 11: opening
20a, 20b: 1st, 2nd door module 30a, 30b: 1st, 2nd door
31a,31b: 1st, 2nd door frame 32a,32b: 1st, 2nd opening/closing door
50a, 50b: 1st, 2nd auto door opening and closing part 51a,51b: Driving cylinder for 1st and 2nd door frame
53a,53b: Driving cylinder for first and second open/close doors
70a, 70b: 1st, 2nd manual door opening and closing part 71a,71b: 1st, 2nd hinge part
72a,72b: 1st, 2nd door lock 75a,75b: 1st & 2nd door lock drive cylinder
90: gas cylinder 91: outlet port
92: valve 93: gas cylinder body
100: support frame 110,120: first and second support frame
130,140: 1st, 2nd column frame 150: Cross frame
151,152: 1st, 2nd cross frame 200: Support frame back and forth drive module
210: first actuator (pneumatic cylinder) 220: second actuator (gas spring)
300: connector module 310: motor
320: hollow reducer 330: connector socket
340: connector nut 350: nut concentric correction
360: gas piping 370: piping fixing block
380: C ring for piping 390: Piping guide
400: gasket input / discharge module 410: gasket supply unit
420: gasket charging unit 430: gasket alignment unit
440: gasket actuator for lift 450: finger gripper
460: Gasket actuator for approach/eviction 470: Gasket actuator for forward and backward movement
480: gasket actuator for rotation 500: valve shutter module valve shutter
510: valve shutter 540: rotary drive
550: rotating power transmission unit 560: circular drive unit
570: circular driven part 600: vision module
700: support frame lifting module 710: housing
730: Motor 800: Valve shutter emergency escape module
810: Support frame lift plate 830: Manual lever part
850: emergency escape gas spring 1000: turntable module
1100: load cell 1300: turntable unit
1500: Rotational transmission part 3000: Clamp module
3100: clamp part
3300: Actuator for approaching/removing the clamp
5000: jacket heating module 5100: left and right jacket
5200: hinge part 5300: left and right pneumatic cylinders
5400: Heater 6000: Autonomous driving transport mechanism
6100: dedicated jig for pallets 6110: stand
6130: fork insertion groove 6150: positioning projection
6300: Autonomous vehicle forklift 6400: Autonomous vehicle
6500: Transport forklift 6510: Mounting frame
6520: Vertical plate 6530: Clamper
6570: actuator for forward and backward movement
G(NG)(OP): Gasket (new gasket) (old gasket)
G1: C ring for gasket

Claims (6)

As the connector module 300 for the gas supply device of the gas cylinder is fastened / released to the outlet port 91 of the gas cylinder 90,
A motor 310,
Hollow reduction gear 320 that receives the rotational power of the motor 310,
The connector nut 340 is installed in the connector socket 330 which is the output terminal of the hollow reducer 320 and fastened/released to the outlet port 91,
Nut concentric correction piece 350 is installed between the connector socket 330 and the connector nut 340,
Connector module for a gas supply device of a gas cylinder including a gas pipe (360) installed through the center of the hollow reducer (320).
The method according to claim 1,
The nut concentric correction piece 350 is a connector module for a gas supply device of a spring-in gas cylinder.
The method according to claim 1 or claim 2,
Pipe fixing block 370 for fixing the other end of the gas pipe 360 to the hollow reducer 320,
C ring 380 interposed between the head 361 of the gas pipe 360 and the connector nut 340,
A connector module for a gas supply device further comprising a resin-based piping guide 390 installed between the center of the hollow reducer 320 and the gas piping 360.
As the upper unit (5) for the gas supply device (1) of the gas cylinder (90) installed inside the cabinet (3),
A support frame 100 including first and second column frames 130 and 140 and a cross frame 150 connecting the upper sides of the first and second column frames 130 and 140; A connector module 300 that is hung and supported slidably with respect to the first column frame 130; A valve shutter module 500 disposed and installed in the cross frame 150; Including, but; support frame lifting module 700 for elevating the support frame 100,
The connector module 300 is installed in the motor 310, the hollow reducer 320 receiving the rotational power of the motor 310, and the connector socket 330 which is the output terminal of the hollow reducer 320, and the outlet port 91 With the connector nut 340 to be fastened/released, the nut concentric correction piece 350 installed between the connector socket 330 and the connector nut 340, and the gas piping installed through the center of the hollow reducer 320 ( 360) the upper unit for a gas supply device of a gas cylinder including.
The method according to claim 4,
The nut concentric correction piece 350 is a spring,
Pipe fixing block 370 for fixing the other end of the gas pipe 360 to the hollow reducer 320,
C ring 380 interposed between the head 361 of the gas pipe 360 and the connector nut 340,
The upper unit for the gas supply device of the gas cylinder further comprises a resin-based piping guide 390 installed between the center of the hollow reducer 320 and the gas piping 360.
The method according to claim 4 or claim 5,
The connector module 300 is provided with a support plate 301 supported on the first column frame 130,
The support plate 301 of the connector module 300 is formed with a drawing hole 303 through which the gas pipe 360 is drawn,
In the first column frame 130, a gas cylinder 360 with a vertical long hole 133 in which the gas pipe 360 drawn out of the withdrawal hole 303 is arranged to be lifted up and down of the support frame 100 is formed. .

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