KR20200090048A - Semiconductor device - Google Patents

Abstract

Disclosed is a semiconductor device including a semiconductor structure including a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer. When primary ions are applied to the semiconductor structure, secondary ions are released, and the secondary ions include aluminum, and magnesium, wherein an ionic strength of an aluminum secondary ion includes a plurality of aluminum intensity peaks and includes: a first aluminum intensity peak having the largest ionic strength among the aluminum intensity peaks; a second aluminum intensity peak having the greatest ionic strength in a region spaced apart from the first aluminum intensity peak in a first direction; a plurality of third aluminum intensity peaks including the greatest ionic strength in a region spaced apart from the first aluminum intensity peak in a second direction; and a first valley disposed in a region between the third aluminum intensity peaks.

Description

Semiconductor device {SEMICONDUCTOR DEVICE}

Embodiments relate to semiconductor devices.

Semiconductor devices including compounds such as GaN and AlGaN have many advantages such as having a wide and easy to adjust band gap energy and can be used in various ways as light emitting devices, light receiving devices, and various diodes.

Particularly, light emitting devices such as light emitting diodes or laser diodes using semiconductor group 3 or 2-6 compound semiconductor materials of semiconductors are red, green, and green due to the development of thin film growth technology and device materials. Various colors such as blue and ultraviolet light can be realized, and white light with high efficiency can be realized by using fluorescent materials or combining colors, and low power consumption, semi-permanent life, and fast response speed compared to conventional light sources such as fluorescent lamps and incandescent lamps It has the advantages of safety, environmental friendliness.

In addition, when a light-receiving device such as a photodetector or a solar cell is manufactured using a semiconductor group III- or 2-6 compound semiconductor material of semiconductors, the development of device materials absorbs light in various wavelength regions to generate a photocurrent. By doing so, it is possible to use light in various wavelength ranges from gamma rays to radio wavelength ranges. In addition, it has the advantages of fast response speed, safety, environmental friendliness, and easy adjustment of device materials, and thus can be easily used in power control or microwave circuits or communication modules.

Therefore, the semiconductor device can replace a light emitting diode backlight, a fluorescent lamp or an incandescent light bulb that replaces a cold cathode tube (CCFL) constituting a backlight of a transmission module of an optical communication means and a liquid crystal display (LCD) display device. Applications are expanding to white light emitting diode lighting devices, automobile headlights and traffic lights, and sensors that detect gas or fire. In addition, the application of the semiconductor device can be expanded to high-frequency application circuits, other power control devices, and communication modules.

In particular, a light emitting device that emits light in the ultraviolet wavelength range may be used for curing, medical, and sterilization by curing or sterilizing.

Recently, research on ultraviolet light emitting devices has been actively conducted, but there is a problem that an operating voltage increases due to diffusion of dopants.

An embodiment provides a semiconductor device with improved operating voltage drop due to magnesium diffusion in a semiconductor structure.

An embodiment provides a semiconductor device with improved crystallinity and improved light output of a semiconductor structure.

The problem to be solved in the embodiments of the present invention is not limited to this, and it will be said that an object or effect that can be grasped from the solution means or the embodiment of the problem described below is also included.

A semiconductor device according to an embodiment of the present invention includes a semiconductor structure including a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer, and when primary ions are applied to the semiconductor structure, secondary ions are emitted. , The secondary ions include aluminum, and magnesium, and the ionic strength of the aluminum secondary ions includes a plurality of aluminum intensity peaks, and a first aluminum intensity peak having the largest ionic intensity among the plurality of aluminum intensity peaks; A second aluminum intensity peak having the largest ionic intensity in a region spaced apart in the first direction from the first aluminum intensity peak; A plurality of third aluminum intensity peaks including the largest ionic intensity in a region spaced apart from the first aluminum intensity peak in the second direction; And a first valley disposed in a region between the plurality of third aluminum intensity peaks, wherein the doping concentration of magnesium secondary ions includes: a first doping concentration having the largest doping concentration; A second doping concentration having the smallest doping concentration in a region spaced in the first direction from the first aluminum intensity peak; And a third doping concentration having the largest doping concentration in a region between the second doping concentration and the first aluminum intensity peak, wherein the second conductivity type semiconductor layer includes the first doping concentration and the first doping concentration. A first region disposed between regions between aluminum intensity peaks, and the active layer includes a second region disposed between the plurality of third aluminum intensity peaks and the first valley, and the first conductivity type semiconductor layer Includes a third region spaced apart in the second direction from the plurality of third aluminum intensity peaks, and the third doping concentration is disposed in a region between the first aluminum intensity peak and the second aluminum intensity peak and the The first direction is a direction toward the first doping concentration at the first aluminum intensity peak, and the second direction is a direction opposite to the first direction.

The doping concentration ratio of the second doping concentration and the third doping concentration may be 1:8 to 1:12.

The first doping concentration may be disposed in a region spaced apart in the first direction from the second aluminum intensity peak.

The ionic strength of the third aluminum intensity peak may be smaller than the ionic strength of the first aluminum intensity peak and the ionic strength of the second aluminum intensity peak.

The ionic strength of the third aluminum intensity peak may be greater than the ionic strength of the first valley.

The doping concentration of the magnesium secondary ion further includes a fourth doping concentration having a smallest doping concentration in a region spaced apart from the third doping concentration in the second direction, and the second region includes the fourth doping concentration. can do.

The ionic strength of the aluminum secondary ion may include: a first sub-region disposed in a region between the third doping concentration and the third aluminum intensity peak; A second sub-region disposed in a region between the third doping concentration and the second aluminum intensity peak; And a third sub-region disposed toward the first direction at the second aluminum intensity peak.

The secondary ions further include indium, and the ionic strength of the indium secondary ions includes a plurality of first indium strengths having the greatest ionic strength; The ionic strength of the indium secondary ions may include a plurality of second indium strengths having the largest ionic strength in a region spaced apart from the first indium strength in the second direction; And a plurality of third valleys having the smallest ionic strength in the region between the plurality of second indium strengths.

The ionic strength of the indium secondary ion may include a third indium strength having the largest ionic strength in a region spaced apart from the first indium strength in a first direction; A fourth indium strength having the smallest ionic strength in a region between the third indium strength and the first indium strength; And a fifth indium strength having the smallest ionic strength in a region spaced apart from the third indium strength in the first direction.

The ionic strength of the aluminum secondary ions and the doping concentration of the magnesium secondary ions are spectra measured by TOF-SIMS, and the primary ions include O2+, Cs+, Bi+, and the measurement of the TOF-SIMS Conditions may include an acceleration voltage of 2keV, and an irradiation current of 3pA.

According to an embodiment of the present invention, a diffusion of magnesium into an active layer is prevented by controlling a magnesium doping concentration, thereby providing a semiconductor device in which an increase in operating voltage is prevented.

The embodiment provides a semiconductor device with improved crystalline and light output.

Various and beneficial advantages and effects of the present invention are not limited to the above, and will be more easily understood in the course of describing specific embodiments of the present invention.

1 is a conceptual diagram of a semiconductor device according to an embodiment of the present invention,
2 is a top view of a semiconductor device according to an embodiment of the present invention,
3 is a view showing an energy band gap of a semiconductor device according to an embodiment of the present invention,
4 is SIMS (Secondary Ion Mass Spectroscopy) data of a semiconductor device according to an embodiment of the present invention,
5 is an enlarged view of part K in FIG. 4,
6 is a view showing the secondary ionic strength of the second dopant and aluminum,
7 is a view showing the secondary ionic strength of aluminum and indium,
8 is a conceptual diagram of a semiconductor device package according to an embodiment of the present invention.

These embodiments may be modified in different forms or various embodiments may be combined with each other, and the scope of the present invention is not limited to each embodiment described below.

Even if the matter described in the specific embodiment is not described in other embodiments, it may be understood as a description related to the other embodiment, unless there is a description contrary to or contradicting the matter in the other embodiments.

For example, if the features for configuration A have been described in certain embodiments and the features for configuration B have been described in other embodiments, the embodiments in which configuration A and configuration B are combined are contrary or contradictory even if not explicitly stated. Without this, it should be understood as belonging to the scope of the present invention.

In the description of the embodiment, when one element is described as being formed on the "on (top) or bottom (bottom)" (on or under) of another element, the top (top) or bottom (bottom) (on or under) includes both two elements directly contacting each other or one or more other elements formed indirectly in an area between the two elements. In addition, when expressed as "on (up) or down (down)" (on or under), it may include the meaning of the downward direction as well as the upward direction based on one element.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily practice.

1 is a conceptual diagram of a semiconductor device according to an embodiment of the present invention, Figure 2 is a top view of a semiconductor device according to an embodiment of the present invention, Figure 3 is an energy band gap of the semiconductor device according to an embodiment of the present invention It is a drawing to show.

1 to 3, a semiconductor device according to an embodiment includes a semiconductor structure 110. Specifically, the semiconductor device may include a substrate S and a semiconductor structure 110 disposed on the substrate S, the first electrode 161 and the second electrode 162.

First, the substrate S may include an insulating substrate. The substrate S may be a material suitable for semiconductor material growth or a carrier wafer. For example, the substrate S may be formed of a material such as sapphire (Al2O3), silicon (Si), GaN, or SiC.

In addition, the semiconductor structure 110 includes a buffer layer 115, a first conductivity type semiconductor layer 120 disposed on the buffer layer 115, an active layer 130 disposed on the first conductivity type semiconductor layer 120, and an active layer ( A second conductivity type semiconductor layer 140 disposed on 130 may be included. In addition, the first electrode 161 may be electrically connected to the first conductivity type semiconductor layer 120, and the second electrode 162 may be electrically connected to the second conductivity type semiconductor layer 140.

The buffer layer 115 may be disposed on the substrate S. The buffer layer 115 may relieve lattice mismatch between the substrate S, the first conductivity type semiconductor layer 120, the active layer 130, and the second conductivity type semiconductor layer 140. The buffer layer 115 may be made of AlN. The buffer layer 115 may be grown on the substrate S to improve the crystallinity of the first conductivity type semiconductor layer 120.

The first conductivity-type semiconductor layer 120 may be formed of a compound semiconductor such as a III-V group or a II-VI group, and the first dopant may be doped. The first conductive semiconductor layer 120 is a semiconductor material having a composition formula of Inx1Aly1Ga1-x1-y1N (0=x1≤=1, 0≤=y1≤=1, 0≤=x1+y1≤=1), for example For example, it can be selected from GaN, AlGaN, InGaN, InAlGaN, and the like.

The first dopant may be an n-type dopant such as Si, Ge, Sn, Se, or Te. When the first dopant is an n-type dopant, the first conductive semiconductor layer 120 doped with the first dopant may be an n-type semiconductor layer. In addition, in the following, the first dopant is described as Si.

The first conductivity type semiconductor layer 120 includes a first sub semiconductor layer 121, a second sub semiconductor layer 122, a first super lattice layer 123, a second super lattice layer 124, and a third sub semiconductor Layer 125 may be included.

The first sub semiconductor layer 121 may be disposed on the buffer layer. The first sub semiconductor layer 121 may be an unintentional doping semiconductor layer. In an embodiment, the first sub semiconductor layer 121 may be GaN. In addition, the first sub-semiconductor layer 121 may be doped with the above-described first dopant, but is not limited thereto.

The second sub semiconductor layer 122 may be disposed on the first sub semiconductor layer 121. The second sub-semiconductor layer 122 may include Al. For example, the second sub semiconductor layer 122 may be made of AlGaN. However, it is not limited thereto. However, when the second sub-semiconductor layer 122 contains Al, the second sub-semiconductor layer 122 provides tensile stress to block dislocation moving from the bottom to the top. can do. However, the second sub semiconductor layer 122 may be made of GaN. Also, the second sub semiconductor layer 122 may be doped with the first dopant described above.

The first superlattice layer 123 may be disposed on the second sub-semiconductor layer 122. The first superlattice layer 123 may include alternately disposed first sublayers 123a and second sublayers 123b. The first sub-layer 123a may include indium (In). For example, the first sub-layer 123a may be InN and the second sub-layer 123b may be GaN, but is not limited thereto.

The first sub-layer 123a and the second sub-layer 123b may both be InGaN. At this time, the composition of InGaN in the first sub-layer 123a and the composition of InGaN in the second sub-layer 123b may be different from each other. For example, the indium (In) composition of the first sub-layer 123a may be higher than the indium (In) composition of the second sub-layer 123b.

The thickness of the first sub-layer 123a may be 2 nm to 4 nm, and the thickness of the second sub-layer 123 b may be 20 nm to 40 nm. That is, the first sub-layer 123a may be thinner than the second sub-layer 123b.

The first superlattice layer 123 may be a semiconductor layer grown at a low temperature to form a concavo-convex portion having a V shape in cross section. The uneven portion relieves stress of the first conductivity type semiconductor layer 120 and the active layer 130, and prevents dislocation from extending into the active layer 130 and the second conductivity type semiconductor layer 140. The quality of semiconductor devices can be improved.

In addition, the surface roughness of the active layer 130 may increase and the applied stress may increase. Therefore, the light output can be lowered.

On the other hand, in the semiconductor device according to the embodiment, the first superlattice layer 123 is disposed on the first conductive type semiconductor layer 120, so that it is possible to confirm that the defects in the groove shape are reduced while maintaining the density of the uneven portion. . That is, according to the embodiment, the first superlattice layer 123 is disposed on the first conductivity type semiconductor layer 120, so that the surface morphology of the semiconductor layer and the stress of the active layer 130 before growth of the active layer 130 Can be controlled. Therefore, it is possible to improve the optical and electrical properties of the semiconductor device.

A first dopant may be doped into the first sub-layer 123a and the second sub-layer 123b. The first dopant may be an n-type dopant such as Si, Ge, Sn, Se, or Te. When the first dopant is an n-type dopant, the first sub-layer doped with the first dopant 123a and the second sub-layer 123b may be an n-type semiconductor layer.

The doping concentration of the first sub-layer 123a may be higher than the doping concentration of the second sub-layer 123b. When the first dopant is sufficiently doped into both the first sub-layer 123a and the second sub-layer 123b, it may be advantageous for electrostatic discharge (ESD), but the reverse voltage (VR) may drop significantly. Therefore, in the embodiment, since the first dopant is further doped into the first sub-layer 123a, which is thinner than the second sub-layer 123b, the depletion width of the depletion region is minimized. In this way, electrostatic discharge (ESD) can be improved by increasing capacitance. Here, the reverse voltage means a voltage measured in the semiconductor device when a low current in the reverse direction is applied to the semiconductor device, and the reliability of the semiconductor device increases as the absolute value of the reverse voltage increases. Illustratively, the first sub-doping concentration of the layer (123a) is 2Х10 ¹⁸ cm ^-3 to 3Х10 ¹⁸ cm ^-3, the second doping concentration is 0.5Х10 ¹⁸ cm ^-3 to 1.5Х10 ¹⁸ of the sub-layer (123b) cm ^- May be ³ , but is not necessarily limited to this.

The second superlattice layer 124 may include alternately disposed third sublayers 124a and fourth sublayers 124b. The third sub-layer 124a may include InGaN, and the fourth sub-layer 124b may include AlGaN and GaN. The second superlattice layer 124 may serve to relieve stress of the active layer 130 and disperse current.

The third sub semiconductor layer 125 may be disposed on the second superlattice layer 124. The third sub-semiconductor layer 125 may be doped with a first dopant. The first dopant may be an n-type dopant such as Si, Ge, Sn, Se, or Te. For example, the third sub semiconductor layer 125 may be made of InGaN. In addition, the third sub-semiconductor layer 125 may have a higher doping concentration of the first dopant than the doping concentration of the lower second superlattice layer 124, thereby increasing the electron movement speed. Therefore, the third sub-semiconductor layer 125 may improve electron injection efficiency and light output by increasing the movement speed of electrons injected into the upper active layer 130.

The active layer 130 may be disposed in a region between the first conductivity type semiconductor layer 120 and the second conductivity type semiconductor layer 140. The active layer 130 is a layer where electrons (or holes) injected through the first conductivity type semiconductor layer 120 meet holes (or electrons) injected through the second conductivity type semiconductor layer 140. The active layer 130 may transition to a low energy level and generate light as electrons and holes recombine.

According to an embodiment, since the surface roughness is improved by the first superlattice layer 123 before growth of the active layer 130, stress applied to the active layer 130 is relaxed to improve light output.

The active layer 130 may include any one of a single well structure, a multi well structure, a single quantum well structure, a multi quantum well (MQW) structure, a quantum dot structure or a quantum wire structure, and the active layer 130 ) Is not limited to this. For example, the active layer 130 may generate blue light in a wavelength range of 450 nm, but is not limited thereto.

The second conductivity-type semiconductor layer 140 is formed on the active layer 130, and may be implemented as a compound semiconductor such as a III-V group, a II-VI group, or the like, to the second conductivity-type semiconductor layer 140. The second dopant can be doped. The second conductivity type semiconductor layer 140 is a semiconductor material or AlInN having a composition formula of Inx5Aly2Ga1-x5-y2N (0=x5≤=1, 0≤=y2≤=1, 0≤=x5+y2≤=1), It may be formed of a material selected from AlGaAs, GaP, GaAs, GaAsP, AlGaInP. When the second dopant is a p-type dopant such as Mg, Zn, Ca, Sr, Ba, etc., the second conductivity-type semiconductor layer 140 doped with the second dopant may be a p-type semiconductor layer.

The second conductivity type semiconductor layer 140 may include a plurality of layers. In an embodiment, the second conductivity type semiconductor layer 140 includes a fourth sub semiconductor layer 141, a fifth sub semiconductor layer 142, a sixth sub semiconductor layer 143, and a seventh sub semiconductor layer 144. It can contain.

The fourth sub semiconductor layer 141 to the sixth sub semiconductor layer 143 blocks the flow of electrons supplied from the first conductivity type semiconductor layer 120 to the second conductivity type semiconductor layer 140, and thus the active layer The probability that electrons and holes recombine within 130 may be increased. The energy band gap of the fourth sub semiconductor layer 141 and the sixth sub semiconductor layer 143 may be greater than the energy band gap of the active layer 130 and/or the seventh sub semiconductor layer 144.

In addition, the fourth sub semiconductor layer 141 to the sixth sub semiconductor layer 143 may be disposed on the active layer 130. And the fourth sub semiconductor layer 141 to the sixth sub semiconductor layer 143 is Inx1Aly1Ga1-x1-y1N (0=x1≤=1, 0≤=y1≤=1, 0≤=x1+y1≤=1) It may include a semiconductor material having a composition formula of, for example, AlGaN, InGaN, InAlGaN.

More specifically, the fourth sub semiconductor layer 141 may include Al, and the fifth sub semiconductor layer 142 may be made of AlGaN or InAlGaN.

In addition, the fourth sub-semiconductor layer 141 may include the above-described V-shaped irregularities. In addition, the fourth sub semiconductor layer 141 may have a multi-layer superlattice structure. In this case, the fourth sub-semiconductor layer 141 may protect the active layer 130 by diffusing the current included in the voltage abnormally.

Also, the aluminum composition of the fourth sub semiconductor layer 141 may be greater than that of the fifth sub semiconductor layer 142. With this configuration, the fourth sub-semiconductor layer 141 has a relatively high resistance compared to the fifth sub-semiconductor layer 142, so that current dispersion can be improved. In addition, the thickness of the fourth sub semiconductor layer 141 may be 5 nm to 15 nm, and the thickness of the fifth sub semiconductor layer 142 may be 5 nm to 15 nm. That is, the fourth sub semiconductor layer 141 and the fifth sub semiconductor layer 142 may have the same thickness, but are not limited thereto.

In addition, the fifth sub-semiconductor layer 142 is disposed in a region between the fourth sub-semiconductor layer 141 and the sixth sub-semiconductor layer 143, and the energy band gap is the fourth sub-semiconductor layer 141 and the sixth. The energy band gap of the sub semiconductor layer 143 may be lower. Accordingly, hole injection efficiency may be increased by a 2-dimensional hole gas effect.

In addition, the fifth sub-semiconductor layer 142 may include the above-described V-shaped irregularities as in the fourth sub-semiconductor layer 141. In addition, a plurality of fifth sub semiconductor layers 142 may be provided and may be alternately arranged.

Also, the sixth sub semiconductor layer 143 may be disposed on the fifth sub semiconductor layer 142. The aluminum composition of the sixth sub semiconductor layer 143 may be less than or equal to the aluminum composition of the fourth sub semiconductor layer 141. With this configuration, the crystallinity of the semiconductor layer can be improved and cracks due to stress can be prevented.

The sixth sub-semiconductor layer 143 may include InAlGaN, GaN, or the like. In an embodiment, the sixth sub-semiconductor layer 143 may have a lattice structure in which a plurality of layers are stacked. For example, the sixth sub-semiconductor layer 143 may have a structure in which the first sub-lattice layer and the second sub-lattice layer are alternately stacked.

In addition, the sixth sub-semiconductor layer 143 may block holes (or holes) advancing to the seventh sub-semiconductor layer 144 and induce holes to be injected through the V-shaped irregularities to improve hole injection efficiency. have.

In addition, the above-described fourth sub-semiconductor layer 141 and the sixth sub-semiconductor layer 143 are doped with magnesium (Mg), which is a second dopant, and may include aluminum (Al). At this time, since the energy level of the semiconductor layer is further increased, the hole concentration due to doping may be lowered, and thus the activation rate of the hole may decrease, so that magnesium (Mg) may be overdoped. In addition, when the semiconductor layer is overdoped with a second dopant, diffusion of magnesium (Mg) occurs and crystal quality decreases due to segregation by magnesium (Mg) and electrical resistance may increase, but an embodiment The fourth sub-semiconductor layer 141 may have a relatively low doping level of magnesium (Mg). In addition, the doping level of magnesium (Mg) may be relatively increased in the fifth sub semiconductor layer 142 and the sixth sub semiconductor layer 143. In other words, the magnesium (Mg) doping level C2 of the fourth sub semiconductor layer 141 and the magnesium (Mg) doping level C1 of the fifth sub semiconductor layer 142 in the semiconductor structure 110 according to the embodiment. The liver ratio may be 1:8 to 1:12. By such a configuration, magnesium (Mg) is accumulated in the sixth sub-semiconductor layer 143 on the fifth sub-semiconductor layer 142 and magnesium (Mg) toward the active layer 130 in the fourth sub-semiconductor layer 141. It can be prevented from spreading. In addition, the doping level of magnesium (Mg) in the fourth sub-semiconductor layer 141 may be relatively reduced due to a decrease in diffusion of magnesium (Mg). Accordingly, the proportion of active magnesium (Mg) participating in luminescence may be increased than inactive magnesium (Mg) not participating in luminescence. Accordingly, the semiconductor structure according to the embodiment may move to the active layer 130 to improve the ratio of holes providing actual light emission. In addition, the operating voltage may also be relatively reduced due to a decrease in the magnesium (Mg) doping level of the fourth sub semiconductor layer 141, and reliability of the semiconductor device may be improved.

In an embodiment, the thickness of the fourth sub-semiconductor layer 141 to the sixth sub-semiconductor layer 143 may be 1:4.7 to 1:11 in the thickness and ratio of the seventh sub-semiconductor layer 144. By this configuration, the injection efficiency of holes is improved by the tunnel effect, and the light output can be increased.

The seventh sub semiconductor layer 144 may be disposed on the sixth sub semiconductor layer 143. The seventh sub-semiconductor layer 144 is in contact with the upper surface of the V-shaped irregularities, and holes can be injected into the V-shaped irregularities.

The first electrode 161 and the second electrode 162 are indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), indium aluminum zinc oxide (IZAO), indium gallium zinc oxide (IGZO) ), IGTO (indium gallium tin oxide), AZO (aluminum zinc oxide), ATO (antimony tin oxide), GZO (gallium zinc oxide), IZON (IZO Nitride), AGZO (Al-Ga ZnO), IGZO (In-Ga ZnO), ZnO, IrOx, RuOx, NiO, RuOx/ITO, Ni/IrOx/Au, or Ni/IrOx/Au/ITO, Ag, Ni, Cr, Ti, Al, Rh, Pd, Ir, Sn, In, It may be formed of at least one of Ru, Mg, Zn, Pt, Au, Hf, and is not limited to these materials. And, as described above, the first electrode 161 may be electrically connected to the first conductivity type semiconductor layer 120, and the second electrode 162 may be electrically connected to the second conductivity type semiconductor layer 140. have.

In the semiconductor device including the above-described semiconductor structure 110, the substrate S may be disposed below. However, it is not limited to this structure, and the position of the substrate S may be changed according to the structure of the semiconductor device.

4 is SIMS (Secondary Ion Mass Spectroscopy) data of a semiconductor device according to an embodiment of the present invention, FIG. 5 is an enlarged view of a portion K in FIG. 4, and FIG. 6 is a secondary ion of a second dopant and aluminum FIG. 7 shows the strength of secondary ions of aluminum and indium.

First, in the thickness direction of the semiconductor structure, secondary ionic strength of indium (In), aluminum (Al), oxygen (O), and the first dopant may change. Here, the thickness direction is a direction from the first conductivity type semiconductor layer 120 toward the second conductivity type semiconductor layer 140. In addition, the first dopant 1 may be silicon (Si), and the second dopant 2 may be magnesium (Mg), which will be described below.

And the SIMS (SIMS) data may be analysis data by time-of-flight secondary ion mass spectrometry (TOF-SIMS).

These SIMS (SIMS) data can irradiate primary ions to the surface of the target and analyze released secondary ions. At this time, the primary ion may be selected from O2+, Cs+ Bi+, and the like. Illustratively, the acceleration voltage may be adjusted within 1 keV to 30 keV, the irradiation current may be adjusted from 0.1 pA to 5.0 pA, and the irradiation area may be 30 μmХ30 μm, but is not limited thereto.

And the SIMS (SIMS) data to collect the secondary ion mass spectrum while gradually etching the surface of the second conductivity type semiconductor layer 140 in the direction of the first conductivity type semiconductor layer 120 at the point (the depth of 0, SF) Can. In other words, in the example, SIMS (SIMS) data is a mass spectrum of secondary ions emitted from the above-described substrate, buffer layer, first conductivity type semiconductor layer, active layer, and second conductivity type semiconductor layer.

In addition, the results by SIMS analysis may be interpreted as a spectrum for the secondary ionic strength or doping concentration of the material, and may include noise generated within 0.9 times to 1.1 times in the analysis of the secondary ionic strength or doping concentration. Can. Thus, the phrase “same/equal to” may refer to one specific secondary ionic strength or noise within 0.9 times to 1.1 times the doping concentration.

In SIMS data, indium (In) and aluminum (Al) are spectral data for ionic strength, and silicon (Si) and magnesium (Mg) can be calculated as spectral data for doping concentration. That is, referring to FIGS. 3 to 7, silicon (Si) and magnesium (Mg) may refer to concentration (Atoms/cm3) units, and indium and aluminum to secondary ion strength (Counts/sec.) units. Can mean

The method of calculating the doping concentration data of silicon (Si) and magnesium (Mg) is not particularly limited. Also, in the present embodiment, the vertical axis (Y axis) is converted to a logarithmic scale.

The ionic strength according to the embodiment may be increased or decreased depending on measurement conditions. However, when the intensity of the primary ion increases, the intensity graph of the secondary ion (aluminum ion) increases as a whole, and when the intensity of the primary ion decreases, the intensity graph of the secondary ion (aluminum ion) may decrease as a whole. Therefore, the change in ionic strength in the thickness (depth) direction can be similar even by changing the measurement conditions.

And hereinafter the description of the ionic strength or doping concentration is a description of the ions of the secondary ions. For example, the doping concentration of silicon (Si) means the concentration of secondary ions of silicon (Si), the doping concentration of magnesium (Mg) means the concentration of secondary ions of magnesium (Mg), and the ionic strength of aluminum Denotes the strength of the aluminum secondary ions, and the ionic strength of the indium means the ionic strength of the indium secondary ions.

4 to 7, the ionic strength of the aluminum (Al) secondary ion may include a plurality of aluminum intensity peaks. The plurality of aluminum intensity peaks are the first aluminum intensity peak (A1) having the largest ionic intensity. In the region adjacent to the first aluminum intensity peak (A1) may include a second aluminum intensity peak (A2) that is the peak point of the largest ionic strength. At this time, the second aluminum intensity peak A2 may be spaced apart from the first aluminum intensity peak A1 in the first direction D1. Here, the first direction (D1) is a direction toward the second aluminum intensity peak (A2) adjacent from the first aluminum intensity peak (A1), the doping of the magnesium (Mg) secondary ions at the first aluminum intensity peak (A1) The concentration may be the same as the direction toward the first doping concentration M1 having the largest concentration. In addition, the second direction D2 may be a direction opposite to the first direction D1 and toward the first aluminum intensity peak A1 at the first doping concentration M1. Further, the first direction D1 may mean the same direction as the above-described thickness direction, but may also be in the opposite direction depending on the structure of the semiconductor device. In addition, the peak may be defined as a point having a local maximum point.

The first aluminum intensity peak (A1) may have a secondary ionic strength greater than or equal to the secondary ionic intensity of the second aluminum intensity peak (A2). Accordingly, the first aluminum intensity peak (A1) has the highest intensity of aluminum secondary ions in the semiconductor structure and is located adjacent to the active layer 130, so that electrons passing through the active layer 130 can be blocked. Accordingly, the light emission efficiency in the active layer 130 can be improved to improve the amount of light.

Further, the secondary ionic strength of the first aluminum intensity peak (A1) may be greater than the secondary ionic strength of the second aluminum intensity peak (A2). Accordingly, it is possible to prevent magnesium from diffusing into the active layer from back-diffusion and suppress current leakage.

In addition, the second aluminum intensity peak A2 may be spaced apart from the first aluminum intensity peak A1 in the first direction D1. In other words, the second aluminum intensity peak (A2) and the first aluminum intensity peak (A1) may be arranged at a distance from each other, and the interval is the second ion intensity of the first aluminum intensity peak (A1) and the second aluminum It may have a secondary ionic strength of aluminum smaller than the secondary ionic strength of the intensity peak A2. Accordingly, when heterojunctions are made between the first aluminum intensity peak A1 and the second aluminum intensity peak A2, hole injection efficiency may be increased by a 2-dimensional hole gas effect.

In addition, in the region spaced apart from the second aluminum intensity peak A2 in the first direction D1, the ionic strength of the aluminum secondary ions may gradually decrease. In an embodiment, the second aluminum intensity peak (A2) may be located between the first aluminum intensity peak (A1) and the first doping concentration (M1) having the highest doping concentration of magnesium secondary ions.

In addition, the ionic strength of the aluminum (Al) secondary ion may include a third aluminum intensity peak (A3) having the largest ionic strength in a region spaced from the first aluminum intensity peak (A1) in the second direction (D2). . The third aluminum intensity peaks A3 may be plural, and may be alternately arranged.

In addition, the ionic strength of the aluminum (Al) secondary ions may include a first valley N1 disposed in a region between the plurality of third aluminum intensity peaks A3. Likewise, the first valley N1 may be plural and may be disposed in a region between the third aluminum intensity peaks A3, which are alternately arranged, and the secondary ionic intensity of the third aluminum intensity peak A3. May be greater than the secondary ionic strength of the first valley (N1). Thus, holes injected into the active layer 130 may be recombined in the first valley N1. At this time, the wavelength of the light emitting light may be determined according to the intensity of the aluminum secondary ion intensity of the first valley N1. Illustratively, light within 100 nm to 280 nm can be emitted.

In addition, the secondary ionic strength of the third aluminum intensity peak A3 may be smaller than the secondary ionic strength of the first aluminum intensity peak A1 and the secondary ionic strength of the second aluminum intensity peak A2. Accordingly, the hole of the first aluminum is reduced by reducing the energy of the hole injected into the active layer 130 from the second conductive semiconductor layer 140 including the first aluminum intensity peak A1 and the second aluminum intensity peak A2. It is possible to prevent the intensity peak A1 and the second aluminum intensity peak A2 from being crossed. Thereby, the luminous efficiency can be improved.

And the doping concentration of the magnesium (Mg) secondary ion is the highest doping concentration in the region between the first doping concentration (M1), the first aluminum intensity peak (A1), and the first doping concentration (M1) having the largest doping concentration. The second doping concentration M2 may be lower, and the third doping concentration M3 having the largest doping concentration in the region between the second doping concentration M2 and the first aluminum intensity peak A1 may be included.

First, the first doping concentration M1 may be a point at which the doping concentration of the second ion dopant magnesium (Mg) secondary ion is the largest in the semiconductor structure. The first doping concentration M1 may be spaced apart from the first aluminum intensity peak A1 and the second aluminum intensity peak A2 in the first direction D1.

The second doping concentration M2 may be spaced apart from the first doping concentration M1 in the second direction D2. In addition, the second doping concentration M2 may be the smallest point of the smallest doping concentration in a region spaced apart from the first aluminum peak A1 in the first direction D1. In other words, the second doping concentration M2 may be a point where the doping concentration is the smallest in the region between the first aluminum intensity peak A1 and the second aluminum intensity peak A2.

Also, the third doping concentration M3 may be a point having the largest doping concentration in a region spaced apart from the second doping concentration M2 in the second direction D1. The third doping concentration M3 may be located in a region between the first aluminum intensity peak A1 and the second doping concentration M2. Further, the third doping concentration M3 may be located in a region spaced apart from the third aluminum intensity peak A3 in the first direction D1. Therefore, the first aluminum intensity peak (A1), which has the highest ionic strength of the aluminum secondary ions, partially blocks the diffusion of magnesium injected into the active layer 130 at the third doping concentration (M3) to protect the active layer 130. Can.

In addition, the doping concentration that is the secondary ionic strength of the third doping concentration M3 may be smaller than the doping concentration of the first doping concentration M1. Further, the doping concentration of the third doping concentration M3 may be greater than the doping concentration of the second doping concentration M2. With this configuration, magnesium (Mg) can be accumulated in the majority between the first doping concentration (M1) and the second doping concentration (M2). In addition, the doping concentration of the third doping concentration M3 is lowered, thereby preventing an increase in operating voltage due to a decrease in crystallinity and an increase in resistance due to magnesium (Mg). In addition, the third doping concentration (M3) is disposed in the region between the third aluminum intensity peak (A3) and the second doping concentration (M2) is an active layer comprising a third aluminum intensity peak (A3) magnesium (Mg) Diffusion can be prevented. As a result, the diffusion decreases, thereby increasing the injection of holes that actually recombine and improve the amount of light provided by the semiconductor device.

In addition, the doping concentration of the second doping concentration M2 is lower than the doping concentrations of the third doping concentration M3 and the first doping concentration M1, and the current is relatively horizontal in the horizontal direction than the thickness direction at the second doping concentration M2. It can flow multiple. Here, the horizontal direction is a direction perpendicular to the thickness direction. Accordingly, even if a plurality of currents flow in the thickness direction at the first doping concentration M1 and the third doping concentration M3, current spreading in the semiconductor structure may be improved by compensating for this.

And according to an embodiment, the ratio of the doping concentration of the second ionic strength of the second doping concentration M2 and the doping concentration of the third doping concentration M3 may be 1:8 to 1:12. By this configuration, Mg is accumulated between the second doping concentration M2 and the second aluminum intensity peak A2, and the agent disposed in the region between the second doping concentration M2 and the first aluminum intensity peak A1. 3 The secondary ionic strength of the doping concentration M3 decreases, so that the hole injected into the active layer can be increased, and an increase in the operating voltage can be suppressed.

In addition, when the ratio is less than 1:8, there is a limit in that the doping concentration is increased at the second doping concentration and thus the light output decreases due to magnesium (Mg) overdoping. And when the ratio is greater than 1:12, the proportion of holes that are injected into the active layer and do not recombine luminescence increases, resulting in deepening of hole scattering, which decreases hole injection efficiency into the active layer, and decreases crystallinity and resistance by magnesium. There is a problem that the operating voltage increases due to the increase.

In addition, the doping concentration of the magnesium (Mg) secondary ion may be reduced in a region spaced apart from the third doping concentration M3 in the second direction D2 to further include a fourth doping concentration M4 having a low doping concentration. . In contrast, the fourth doping concentration M4 may have the lowest doping concentration in a region spaced apart from the third doping concentration M3 in the second direction D2. The fourth doping concentration M4 may be located in a region between the plurality of third aluminum intensity peaks A3. For example, the fourth doping concentration M4 may be disposed in a second region, which will be described later. At this time, the doping concentration of the magnesium (Mg) secondary ion may be decreased from the third doping concentration M3 to the fourth doping concentration M4. In addition, the doping concentration of the magnesium (Mg) secondary ion may be increased and/or decreased irregularly in the second direction D2 based on the fourth doping concentration M4, and at the fourth doping concentration M4 The area spaced apart in the second direction D2 may be noise.

And the ionic strength of the aluminum (Al) secondary ions is the first sub-region (R1), the third doping concentration (M3) disposed in the region between the third doping concentration (M3) and the third aluminum intensity peak (A3) The second sub-region R2 disposed in the region between the second aluminum intensity peaks A2, the third sub-region R3 and the second sub-regions R3 arranged in the first direction D1 in the second aluminum intensity peak A2 A fourth sub-region R4 spaced apart from the 3 sub-regions R3 in the first direction D1 and less than or equal to 0.25 times the second aluminum intensity peak A2 may be included. Each of the sub-regions described above may be continuously or discontinuously disposed.

Specifically, the first sub-region R1 includes the first aluminum intensity peak A1 to block electrons passing through the active layer 130 from moving in the first direction D1. In addition, the strength of the magnesium secondary ion may be diffused from the third doping concentration M3 in the second direction D2, but may include a region that gradually decreases. Accordingly, the amount of light emitted from the active layer 130 through actual recombination can be improved. The first sub-region R1 may be a region corresponding to the above-described fourth sub-semiconductor layer.

In addition, the second sub-region R2 is an area disposed between the first aluminum intensity peak A1 and the second aluminum intensity peak A2 and may include a second doping concentration M2. That is, magnesium (Mg) and aluminum (Al) are smaller than the adjacent regions R1 and R3, thereby increasing hole injection efficiency due to a band gap difference and preventing crystalline degradation.

The third sub-region R3 includes the second aluminum intensity peak A2, and the ionic strength of the magnesium secondary ion may increase in the first direction D1. Here, the meaning of increasing may mean that the ionic strength of a plurality of high and/or low points gradually increases, or may gradually increase.

The fourth sub-region R4 is a region having an ionic strength of 0.25 times or less compared to the second aluminum intensity peak A2 and may be spaced apart from the second sub-region R3. Similarly, the fourth sub-region R4 may include a region in which the ionic strength of the magnesium secondary ion increases in the first direction D1.

In addition, the ionic strength of the indium (In) secondary ion has the highest ionic strength in a region spaced apart from the first indium strength (I1) and the first indium strength (I1) in the second direction (D2) in the semiconductor structure. The second indium intensity (I2), the third indium intensity (I3), the third indium intensity (I3) and the largest ionic strength in the region spaced apart from the first indium intensity (I1) in the first direction (D1) In the region between 1 indium strength (I1), the fourth indium strength (I4) having the smallest ionic strength and the fifth indium having the smallest ionic strength in the region separated from the third indium strength (I3) in the first direction (D1) Strength (I5).

At this time, the ionic strength of the first indium strength I1 may be greater than the ionic strength of the second indium strength I2. In addition, the ionic strength of the second indium strength I2 may be greater than the ionic strength of the third indium strength I3. Further, the ionic strength of the third indium strength I3 may be greater than the ionic strength of the fourth indium strength I4 and the ionic strength of the fifth indium strength I5. Further, the ionic strength of the fourth indium strength I4 may be smaller than the ionic strength of the fifth indium strength I5.

First, the first indium intensity I1 may be an ionic strength peak of indium in the active layer 130. The first indium strength (I1) may be a plurality when the active layer 130 includes a plurality of well layers. That is, the number of the first indium strength I1 may be the same as the number of well layers in the active layer 130. In addition, the ionic strength of the indium (In) secondary ion may include a second valley N2 located between the first indium strength I1. The second valley N2 may be plural.

In addition, the first aluminum intensity peaks A1 may be located between the plurality of first indium intensity I1. Similarly, a first valley N1 may be located between the plurality of second valleys N2, respectively. In other words, the ionic strength of the indium secondary ions and the ionic strength of the secondary ions of aluminum in the active layer 130 may be increased/decreased. Here, the meaning that the ionic strength of the secondary ions of indium (In) and aluminum (Al) is lower may mean that the indium ion strength of a plurality of high and/or low points is gradually lowered, and may mean that it is gradually lowered. have.

Further, the plurality of first indium intensities I1 may be disposed between the plurality of third aluminum intensity peaks A3, respectively. Accordingly, the plurality of first indium intensity I1 and the plurality of third aluminum intensity peaks A3 may be alternately arranged. Likewise, the plurality of second valleys N2 may be disposed between the plurality of first valleys N1, respectively, and the plurality of second valleys N2 and the plurality of first valleys N1 alternate with each other. Can be arranged. Accordingly, the energy bandgap repeatedly increases/decreases and the difference in the energy bandgap between regions including the third aluminum intensity peak (A3) and the first indium intensity (I1) increases, so that the probability of recombination of electrons and holes is increased. It can increase further. Therefore, the luminous efficiency can be improved.

In addition, the second indium intensity I2 may have the largest ionic strength in a region spaced apart from the first indium intensity I1 in the second direction D2. The second indium strength I2 may be a plurality, and the ionic strength may be smaller than the ionic strength of the first indium strength I1.

The plurality of second indium strength I2 may be a plurality, and may correspond to the third sub-layer 124a described above. In addition, a third valley N3 which is a low point of the intensity of the indium secondary ion may be disposed between the plurality of second indium intensity I2. The third valley N3 may be a plurality, and may correspond to the fourth sub-layer 124b. At this time, the ionic strength of the aluminum secondary ions may gradually decrease toward the second direction D2 as the ionic strength of the aluminum secondary ions decreases as a whole by the above-described V-shaped irregularities. In addition, the ionic strength of the aluminum secondary ion may have a structure in which high and low points repeat in correspondence with the second indium strength (I2) and the third valley (N3). Accordingly, crystal defects extending to the active layer 130 may be reduced, and the crystal quality of the active layer may be improved to improve light output and electrical characteristics of the light emitting device.

The third indium intensity I3 may be disposed in the second sub-region R2 described above. In addition, the fourth indium intensity I4 may be disposed in the first sub-region R1. In addition, the fifth indium intensity I5 may be disposed in the third sub-region R3. Further, the ionic strength of the third indium strength I3 may be greater than the ionic strength of the fourth indium strength I4 and the fifth indium strength I5. With this configuration, it is possible to easily increase the doping concentration of magnesium to the third doping concentration M3 while providing surface planarization at the second doping concentration M2.

At this time, in the semiconductor structure, the second conductivity-type semiconductor layer 140 includes a first region disposed in a region between the first doping concentration M1 and the first aluminum intensity peak A1, and the active layer 130 is It includes a second region disposed between the plurality of third aluminum intensity peaks (A3) and the first valley (N1), the first conductivity-type semiconductor layer 120 is a plurality of third aluminum intensity peaks (A3) A third area spaced apart in two directions may be included. At this time, the first region is the third indium intensity (I3) to the fifth indium intensity (I5), the first aluminum intensity peak (A1), the second aluminum intensity peak (A2) and the first doping concentration (M1) to And a third doping concentration M3. In addition, the second region may further include a plurality of third aluminum intensity peaks A3.

8 is a conceptual diagram of a semiconductor device package according to an embodiment of the present invention.

Referring to FIG. 8, the semiconductor device package is disposed on the body 2 on which the groove 3 is formed, the semiconductor device 10 disposed on the body 2, and the body 2 to be electrically connected to the semiconductor device 10. It may include a pair of lead frames (5a, 5b) are connected. The semiconductor device 10 may include all of the above-described configurations.

The body 2 may include a material or coating layer that reflects ultraviolet light. The body 2 may be formed by stacking a plurality of layers 2a, 2b, 2c, 2d, and 2e. The plurality of layers 2a, 2b, 2c, 2d, and 2e may be the same material or may include different materials.

The groove 3 may be formed to be wider as it is farther from the semiconductor device, and a step 3a may be formed on the inclined surface.

In addition, the semiconductor device 10 is disposed on the first lead frame 5a and may be connected to the second lead frame 5b by a wire. At this time, the first lead frame 5a and the second lead frame 5b may be disposed to surround the side surfaces of the semiconductor device 10.

The light-transmitting layer 4 may cover the groove 3. The light-transmitting layer 4 is made of glass, but is not necessarily limited thereto. The light-transmitting layer 4 is not particularly limited as long as it is a material capable of effectively transmitting ultraviolet light. The interior of the groove 3 may be an empty space.

The semiconductor device can be applied to various types of light source devices. Illustratively, the light source device may be a concept including a lighting device and a display device and a vehicle lamp. That is, the semiconductor device can be applied to various electronic devices that are disposed in a case and provide light.

The lighting device may include a light source module including a semiconductor element of the substrate and the embodiment, a heat dissipation unit for dissipating heat of the light source module, and a power supply unit for processing or converting an electrical signal received from the outside and providing the light source module. Further, the lighting device may include a lamp, a head lamp, or a street light.

The display device may include a bottom cover, a reflector, a light emitting module, a light guide plate, an optical sheet, a display panel, an image signal output circuit, and a color filter. The bottom cover, the reflector, the light emitting module, the light guide plate, and the optical sheet may constitute a backlight unit.

The reflector is disposed on the bottom cover, and the light emitting module can emit light. The light guide plate is disposed in front of the reflector to guide light emitted from the light emitting module to the front, and the optical sheet may include a prism sheet or the like to be disposed in front of the light guide plate. The display panel is disposed in front of the optical sheet, an image signal output circuit supplies an image signal to the display panel, and a color filter can be disposed in front of the display panel.

When a semiconductor device is used as a backlight unit of a display device, it may be used as an edge type backlight unit or a direct type backlight unit.

The semiconductor device may be a laser diode in addition to the above-described light emitting diode.

The laser diode, like the light emitting device, may include a first conductivity type semiconductor layer 120 and an active layer 130, a second conductivity type semiconductor layer 140 and a blocking layer (not shown) having the above-described structure. have. And, after bonding the p-type first conductivity type semiconductor and the n-type second conductivity type semiconductor, an electro-luminescence phenomenon in which light is emitted when a current flows is used, but the directionality of the emitted light There is a difference in and phase. That is, the laser diode may emit light having one specific wavelength (monochromatic beam) with the same phase and emit in the same direction by using a phenomenon called excitation emission and reinforcement interference. Therefore, it can be used for optical communication, medical equipment, and semiconductor process equipment.

An example of a light receiving element is a photodetector, which is a kind of transducer that detects light and converts its intensity into an electrical signal. As such a photodetector, a photovoltaic cell (silicon, selenium), an optical output element (cadmium sulfide, cadmium selenide), a photodiode (for example, PD having peak wavelength in visible blind spectral region or true blind spectral region), photo Transistors, photomultiplier tubes, phototubes (vacuum, gas encapsulation), IR (Infra-Red) detectors, and the like, but embodiments are not limited thereto.

In addition, a semiconductor device such as a photodetector can be manufactured using a direct bandgap semiconductor, which generally has excellent light conversion efficiency. Alternatively, the photodetectors have various structures, and the most common structures include a pin type photodetector using a pn junction, a Schottky photodetector using a Schottky junction, and a MSM (Metal Semiconductor Metal) type photodetector. have.

The photodiode may include a first conductivity type semiconductor layer and an active layer, a blocking layer, and a second conductivity type semiconductor layer having the above-described structure, similarly to a light emitting device, and has a pn junction or pin structure. The photodiode operates by applying reverse bias or zero bias. When light enters the photodiode, electrons and holes are generated, and current flows. At this time, the magnitude of the current may be almost proportional to the intensity of light incident on the photodiode.

A photovoltaic cell or a solar cell is a type of photodiode and can convert light into electric current. The solar cell, like the light emitting device, may include a first conductivity type semiconductor layer, an active layer, a blocking layer, and a second conductivity type semiconductor layer having the above-described structure.

In addition, it may be used as a rectifier of an electronic circuit through the rectifying characteristics of a general diode using a p-n junction, and may be applied to an ultra-high frequency circuit and applied to an oscillation circuit.

In addition, the above-described semiconductor device is not necessarily implemented only as a semiconductor, and may further include a metal material in some cases. For example, a semiconductor device such as a light-receiving device may be implemented using at least one of Ag, Al, Au, In, Ga, N, Zn, Se, P, or As, by a p-type or n-type dopant It may be implemented using a doped semiconductor material or an intrinsic semiconductor material.

The embodiments have been mainly described above, but this is merely an example, and is not intended to limit the present invention. Those of ordinary skill in the art to which the present invention pertains are not exemplified above, without departing from the essential characteristics of the present embodiment. It will be appreciated that various modifications and applications are possible. For example, each component specifically shown in the embodiments can be implemented by modification. And differences related to these modifications and applications should be construed as being included in the scope of the invention defined in the appended claims.

Claims (10)

A semiconductor structure including a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer,
When the primary ions are applied to the semiconductor structure, secondary ions are released,
The secondary ions include aluminum and magnesium,
The ionic strength of the aluminum secondary ions includes a plurality of aluminum intensity peaks, the first aluminum intensity peak having the largest ionic strength among the plurality of aluminum intensity peaks; A second aluminum intensity peak having the largest ionic intensity in a region spaced apart in the first direction from the first aluminum intensity peak; A plurality of third aluminum intensity peaks including the largest ionic intensity in a region spaced apart from the first aluminum intensity peak in the second direction; And a first valley disposed in an area between the plurality of third aluminum intensity peaks.
The doping concentration of magnesium secondary ions is,
A first doping concentration having the largest doping concentration;
A second doping concentration having the smallest doping concentration in a region spaced in the first direction from the first aluminum intensity peak; And
And a third doping concentration having the largest doping concentration in a region between the second doping concentration and the first aluminum intensity peak.
The second conductivity-type semiconductor layer includes a first region disposed in a region between the first doping concentration and the first aluminum intensity peak,
The active layer includes a second region disposed between the plurality of third aluminum intensity peaks and the first valley,
The first conductivity type semiconductor layer includes a third region spaced apart in the second direction from the plurality of third aluminum intensity peaks,
The third doping concentration is disposed in a region between the first aluminum intensity peak and the second aluminum intensity peak
The first direction is a direction toward the first doping concentration in the first aluminum intensity peak,
The second direction is a semiconductor device opposite to the first direction.
According to claim 1,
A semiconductor device having a doping concentration ratio of the second doping concentration and the third doping concentration is 1:8 to 1:12.
According to claim 1,
The first doping concentration is a semiconductor device disposed in a region spaced apart in the first direction from the second aluminum intensity peak.
According to claim 1,
The ionic strength of the third aluminum intensity peak is smaller than the ionic strength of the first aluminum intensity peak and the ionic strength of the second aluminum intensity peak.
According to claim 1,
The ionic strength of the third aluminum intensity peak is greater than the ionic strength of the first valley.
According to claim 1,
The doping concentration of the magnesium secondary ion further includes a fourth doping concentration having the smallest doping concentration in a region spaced apart from the third doping concentration in the second direction,
The second region includes the fourth doping concentration.
The method of claim 6,
The ionic strength of the aluminum secondary ion may include: a first sub-region disposed in a region between the third doping concentration and the third aluminum intensity peak;
A second sub-region disposed in a region between the third doping concentration and the second aluminum intensity peak; And
And a third sub-region disposed toward the first direction at the second aluminum intensity peak.
Following paragraph 1,
The secondary ion further comprises indium,
The ionic strength of the indium secondary ions includes a plurality of first indium strengths having the greatest ionic strength; The ionic strength of the indium secondary ions may include a plurality of second indium strengths having the largest ionic strength in a region spaced apart from the first indium strength in the second direction; And
And a plurality of third valleys having the lowest ionic strength in the region between the plurality of second indium strengths.
The method of claim 8,
The ionic strength of the indium secondary ion may include a third indium strength having the largest ionic strength in a region spaced apart from the first indium strength in a first direction;
A fourth indium strength having the smallest ionic strength in a region between the third indium strength and the first indium strength; And
And a fifth indium strength having the smallest ionic strength in a region spaced apart from the third indium strength in the first direction.
According to claim 1,
The ionic strength of the aluminum secondary ion, and the doping concentration of the magnesium secondary ion are spectra measured by TOF-SIMS.
The primary ions include O2+, Cs+, Bi+,
The TOF-SIMS measurement conditions include an acceleration voltage of 2keV and an irradiation current of 3pA.

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