KR20200088115A - Apparatus and method for managing physical distribution system - Google Patents

Abstract

Provided are an apparatus and a method for managing logistics transfer. The apparatus for managing logistics transfer includes: a receiver that receives transport information collected on a transport path from a transport device that transports a carrier in which a substrate is stored along a rail arranged on the ceiling; and a display management unit that composes a logistics transport screen by synthesizing the received transport information on a layout diagram of the rail arranged on the ceiling; and an output unit for outputting the configured logistics transport screen.

Description

Apparatus and method for managing physical distribution system}

The present invention relates to an apparatus and method for managing logistics transportation.

When manufacturing a semiconductor device or a display device, various processes such as photography, etching, ashing, ion implantation, thin film deposition, and cleaning are performed. Here, the photo process includes coating, exposure, and development processes. A photoresist is applied onto the substrate (i.e., the coating process), a circuit pattern is exposed on the substrate on which the photosensitive film is formed (i.e., exposure process), and the exposed areas of the substrate are selectively developed (i.e., development process).

Various processes may be processed for one substrate, and the process may be performed in one substrate processing apparatus or may be performed in a plurality of substrate processing apparatuses. An overhead hoist transport (OHT) may be used to transfer the substrate between the substrate processing devices. The ceiling logistics transporter may include a rail installed on the ceiling, and the substrate may move from one place to the other along the rail.

The problem to be solved by the present invention is to provide a logistics transport management device and method.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

An aspect of the logistic conveyance management device of the present invention for achieving the above object is a receiving unit that receives the transport information collected on the transport path from the transport device carrying the carrier containing the substrate along the rail placed on the ceiling. And a screen manager configured to compose the logistics transport screen by synthesizing the received transport information to the layout of the rails disposed on the ceiling, and an output unit to output the configured logistics transport screen.

The screen manager configures the logistics return screen by expanding or reducing the layout.

The screen manager composes the logistic conveyance screen by synthesizing transfer information corresponding to the enlarged or reduced size of the layout in the layout.

The screen manager divides the layout into a plurality of zones, and configures the logistics return screen by matching transport information for each zone.

The transport information matched for each zone includes at least one of the type of error, the time of occurrence, the number of occurrences, whether it is true, whether there is an action, and whether or not the rail is captured.

When there is a plurality of transfer information received in correspondence to a certain point, the screen management unit lists a plurality of transfer information according to the order of occurrence.

The screen manager configures the logistic conveyance screen by synthesizing an icon including the number of errors generated in any one of the plurality of zones in the layout.

The screen manager determines the size of the icon in proportion to the number of errors.

The screen manager includes the number of true errors and the number of false errors among the errors in the icon.

The screen management unit includes the number of action errors and the number of non-action errors among the errors in the icon.

When the selection command for the non-action error is input, the screen manager switches the screen to the action work screen that receives the action status for the non-action error.

The screen manager displays at least one of color, thickness, and shape of the vibration status of each rail included in the layout.

The logistics transport management device further includes an input unit that receives change information regarding the layout, and the screen management unit configures the logistics transport screen by reflecting the changed information in the layout.

An aspect of the method for managing the logistics transport of the present invention for achieving the above object is receiving a transport information collected on a transport path from a transport device carrying a carrier in which a substrate is accommodated along a rail disposed on a ceiling. And synthesizing the received transport information on a layout of the rails arranged on the ceiling to construct a logistic transport screen, and outputting the configured logistic transport screen.

The step of constructing the logistic conveyance screen includes dividing the layout into a plurality of zones and matching transport information for each zone.

The transport information matched for each zone includes at least one of the type of error, the time of occurrence, the number of occurrences, whether it is true, whether there is an action, and whether or not the rail is captured.

Specific details of other embodiments are included in the detailed description and drawings.

1 is a view showing a logistics transportation system according to an embodiment of the present invention.
2 is a block diagram of a logistics transportation management device according to an embodiment of the present invention.
3 is a view showing a logistic transfer screen according to an embodiment of the present invention.
4 is a view showing that the error icon according to an embodiment of the present invention is displayed on the logistics return screen.
5 and 6 are views showing an enlarged rail layout according to an embodiment of the present invention.
7 is a diagram showing that an error icon is displayed on a logistics return screen according to another embodiment of the present invention.
8 is a diagram showing that detailed information of an error is displayed on a logistic return screen according to an embodiment of the present invention.
9 is a view showing an action operation screen according to an embodiment of the present invention.
10 is a view showing that the state of vibration for each section of the rail according to an embodiment of the present invention is included in the rail layout.
11 is a view showing that the vibration graph of the rail according to an embodiment of the present invention is displayed on the logistics transport screen.
12 is a view showing that a rail photographed image according to an embodiment of the present invention is displayed on a logistics transport screen.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and methods for achieving them will be clarified with reference to embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be embodied in various different forms, and only the embodiments allow the publication of the present invention to be complete, and general knowledge in the technical field to which the present invention pertains. It is provided to fully inform the holder of the scope of the invention, and the invention is only defined by the scope of the claims. The same reference numerals refer to the same components throughout the specification.

Elements or layers referred to as "on" or "on" of another device or layer are not only directly above the other device or layer, but also when intervening another layer or other device in the middle. All inclusive. On the other hand, when a device is referred to as “directly on” or “directly above”, it indicates that no other device or layer is interposed therebetween.

The spatially relative terms “below”, “beneath”, “lower”, “above”, “upper”, and the like are shown in the figure as one figure. It can be used to easily describe the correlation of a device or components with other devices or components. The spatially relative terms should be understood as terms including different directions of the device in use or operation in addition to the directions shown in the drawings. For example, if the device shown in the figure is turned over, a device described as "below" or "beneath" another device may be placed "above" another device. Thus, the exemplary term “below” can include both the directions below and above. The device can also be oriented in different directions, so that spatially relative terms can be interpreted according to the orientation.

Although the first, second, etc. are used to describe various elements, components and/or sections, it goes without saying that these elements, components and/or sections are not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Accordingly, it goes without saying that the first element, the first component or the first section mentioned below may be the second element, the second component or the second section within the technical spirit of the present invention.

The terminology used herein is for describing the embodiments and is not intended to limit the present invention. In the present specification, the singular form also includes the plural form unless otherwise specified in the phrase. As used herein, "comprises" and/or "comprising" refers to the components, steps, operations and/or elements mentioned above, the presence of one or more other components, steps, operations and/or elements. Or do not exclude additions.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used as meanings commonly understood by those skilled in the art to which the present invention pertains. In addition, terms defined in the commonly used dictionary are not ideally or excessively interpreted unless specifically defined.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in the description with reference to the accompanying drawings, the same or corresponding components are assigned the same reference numbers regardless of reference numerals, and overlapped with them. The description will be omitted.

1 is a view showing a logistics transportation system according to an embodiment of the present invention.

Referring to FIG. 1, the logistics transport system 10 includes a rail 100, a transport device 200, and a logistics transport management device 300.

The rail 100 provides a movement path of the transfer device 200. The transfer device 200 can move along the rail 100. In the present invention, the rail 100 may be disposed on the ceiling of a space provided with semiconductor manufacturing equipment (not shown). Semiconductor manufacturing equipment is a device that performs processes such as photography, etching, ashing, ion implantation, thin film deposition, and cleaning, and a plurality of semiconductor devices may be disposed in the corresponding space. The rail 100 may be disposed on the ceiling of the corresponding space so that the transfer device 200 moves to the top of each of the plurality of semiconductor manufacturing equipment.

The transfer device 200 serves to transport the carrier in which the substrate is accommodated along the rail 100 disposed on the ceiling. In order to perform various processes on the substrate, the substrate must be moved between different semiconductor manufacturing equipments, and the substrate may be accommodated in a carrier and transported by the transfer device 200. The carrier can accommodate a plurality of substrates. As a carrier, a Front Opening Unified Pod (FOUP) may be used. After the carrier is gripped by one semiconductor manufacturing equipment, the transfer equipment may move along the rail 100 and transfer to another semiconductor manufacturing equipment.

A plurality of transfer devices 200 may be provided in one space, and the plurality of transfer devices 200 may move along the rail 100 while avoiding collisions with each other.

The logistics transport management device 300 serves to manage transport information of the transport device 200 moving along the rail 100. For example, the logistics transport management device 300 may store and output transport information. The user can check various information related to the movement of the transfer device 200 by referring to the output transfer information.

The transport device 200 may transmit transport information to the logistics transport management device 300. To this end, the transport device 200 may include sensing means (not shown) for collecting transport information and communication means (not shown) for transmitting the collected transport information. The transfer device 200 may transmit transfer information wirelessly or transmit transfer information through a wired cable formed along the rail 100.

2 is a block diagram of a logistics transportation management device according to an embodiment of the present invention.

Referring to FIG. 2, the logistics transport management device 300 includes a receiving unit 310, an input unit 320, a storage unit 330, a control unit 340, a screen management unit 350, and an output unit 360 do.

The receiving unit 310 serves to receive the transport information collected on the transport path from the transport device 200 for transporting the carrier with the substrate along the rail 100 disposed on the ceiling. The receiving unit 310 may receive the transfer information by communicating with the transfer device 200 wirelessly or wired.

The receiver 310 may receive transfer information from a plurality of transfer devices 200, and for this purpose, the receiver 310 may constitute a separate communication channel from each of the plurality of transfer devices 200.

The input unit 320 serves to receive a layout of the rail 100. Also, the input unit 320 may receive a control command from a user. The user's control command may be a command for controlling the operation of the screen manager 350 to be described later.

The storage unit 330 temporarily or permanently stores the transfer information received through the receiving unit 310 and the layout of the rail 100 input through the input unit 320. Also, the storage unit 330 may temporarily store a control command input through the input unit 320.

The screen manager 350 composes the transport information received through the receiver 310 to the layout of the rail 100 disposed on the ceiling (hereinafter, referred to as a rail layout) to form a logistic conveyance screen. In addition, the screen management unit 350 may configure a logistic conveyance screen by expanding or reducing the rail layout, and may configure a logistic conveyance screen by editing transport information. A detailed description of the logistics return screen will be described later with reference to FIG. 3.

The output unit 360 plays a role of outputting the logistics transport screen configured by the screen management unit 350. To this end, the output unit 360 may include display means (not shown) for outputting a logistic conveyance screen.

The control unit 340 may perform overall control of the reception unit 310, the input unit 320, the storage unit 330, the screen management unit 350, and the output unit 360.

3 is a view showing a logistic transfer screen according to an embodiment of the present invention.

Referring to FIG. 3, the logistic conveyance screen 400 may include a rail layout 500 and a grid 600.

The rail layout 500 is a diagram showing the arrangement of the rails 100 disposed on the ceiling of a space provided with a plurality of semiconductor manufacturing equipment. Therefore, it can be understood that the surface indicating the rail layout 500 in FIG. 3 corresponds to the ceiling surface of the space.

The rail layout 500 may be divided into a plurality of regions by the grid 600. The grid 600 may include horizontal lines and vertical lines. Here, the spacing between two adjacent horizontal lines may be the same or different, and likewise, the spacing between two adjacent vertical lines may be the same or different. Accordingly, the size of each partition may be the same or different. Hereinafter, it will be mainly described that the size of each division is the same.

The rail layout 500 may be divided into a plurality of zones based on the grid 600 by the screen manager 350. The screen manager 350 may configure the logistics transport screen 400 by matching transport information for each zone. Here, the transport information matched for each zone may include at least one of a type of an error, an occurrence time, a number, an authenticity, an action, and a rail captured image generated in the corresponding zone. Hereinafter, the operation of the screen management unit 350 with respect to the logistics transport screen 400 will be described in detail.

The rail layout 500 may be input through the input unit 320. In addition, the input unit 320 may receive change information for the rail layout 500. When the change information for the rail layout diagram 500 is input, the screen manager 350 may configure the logistics return screen 400 by reflecting the input change information to the rail layout diagram 500. For example, when the rail 100 is newly generated, a path is changed, or the existing rail 100 is removed, the user may input change information for the rail layout 500 through the input unit 320. Accordingly, the screen management unit 350 reflects the change information to configure the logistics return screen 400.

4 is a view showing that the error icon according to an embodiment of the present invention is displayed on the logistics return screen.

Referring to FIG. 4, the screen management unit 350 synthesizes the error icons 710 to 740 including the number of errors generated in any one of a plurality of zones on the rail layout 500 to display the logistics return screen 400 ).

Here, the screen manager 350 may determine the size of the error icons 710 to 740 in proportion to the number of errors. That is, the smaller the number of errors, the smaller the size of the error icons 710 to 740, and the larger the number of errors, the larger the size of the error icons 710 to 740. 4 shows circular error icons 710 to 740, but error icons may be implemented as polygons such as triangles or squares.

The user can easily check the number of errors generated in the rail 100 of the corresponding zone through the error icons 710 to 740.

5 and 6 are views showing an enlarged rail layout according to an embodiment of the present invention.

Referring to FIG. 5, the screen management unit 350 may configure the logistics return screen 400 by enlarging or reducing the rail arrangement diagram 500. FIG. 5 shows an enlarged view of a divided section in which five errors occur among the divided sections of the rail arrangement diagram 500 illustrated in FIG. 4.

The screen management unit 350 may configure the logistics transport screen 400 by synthesizing transfer information corresponding to the size of the enlarged or reduced rail layout 500 into the rail layout 500. For example, the screen manager 350 displays the number of errors in each divided section in one error icon 710 to 740 in the size step of the rail layout diagram 500 shown in FIG. 4, but FIG. 5 In the step of the size of the rail layout 500 shown in, it is possible to newly display the error icons 741 to 743 in the detailed area. Specifically, in a state in which the rail layout 500 is reduced, the screen manager 350 may include one error icon (5) containing a number of 5 for a region in which 5 errors have occurred as shown in FIG. 740) may be displayed on the logistics return screen 400. On the other hand, in the state where the rail layout 500 is enlarged, the screen manager 350 shows two error icons 741, 743 including a number of 1 for the area where 5 errors occurred as shown in FIG. ) And one error icon 742 including a number of 3 may be displayed on the logistics return screen 400. Here, each error icon 741 to 743 may be displayed at a point where an error occurs or may be displayed adjacent to the corresponding point.

Through the enlargement and reduction of the rail layout 500, the user can easily check the number and location of errors generated in each division.

Referring to FIG. 6, the screen manager 350 may compose the logistic return screen 400 by synthesizing the detailed information 751, 752a, 752b, 752c, and 753 of errors in the enlarged rail layout 500. For example, the logistic conveyance screen 400 of FIG. 6 may be a rail layout 500 more enlarged than the logistic conveyance screen 400 of FIG. 5.

When the rail layout 500 is enlarged to the step of FIG. 6, the screen manager 350 removes error icons 741 to 743 indicating the number of errors and details of the errors (751, 752a, 752b, 752c, 753) Can be displayed on the logistics return screen 400. For example, the type of error and identification information of the transfer device 200 that found the error may be included in the detailed information of the error (751, 752a, 752b, 752c, 753).

The screen manager 350 may list a plurality of transfer information according to an occurrence order when there are a plurality of transfer information received corresponding to a certain point. FIG. 6 shows three detailed information 752a, 752b, and 752c for the point where the three errors occurred. Each of the detailed information 752a, 752b, and 752c may be included in each of the transport information collected and generated at different times. The screen manager 350 may list detailed information 752a, 752b, and 752c according to the order in which the transfer information is generated. For example, the screen manager 350 may place the oldest 752a on the top side and the most recent 752c on the bottom side. Through this, the user can predict the occurrence trend of the error.

7 is a view showing that the error icon according to another embodiment of the present invention is displayed on the logistic return screen, and FIG. 8 is a view showing that the detailed information of the error according to an embodiment of the present invention is displayed on the logistic return screen, FIG. 9 is a view showing an action operation screen according to an embodiment of the present invention.

Referring to FIGS. 7 and 8, the screen manager 350 may include one or more pieces of information for one divided area in one error icon 810 to 840.

For example, the screen manager 350 includes the number of intrinsic errors and the number of false errors in the error icons 810 to 840, or the number of action errors and the number of non-action errors in the error icons 810 to 840 Can be included in In FIG. 7, the number displayed in the shaded area of the error icons 810 to 840 may be the number of true errors or the number of action errors, and the number displayed in the blank area may be the number of false errors or the number of uncorrected errors.

In the present invention, an intrinsic error indicates a true error, and a false error indicates the same effect as being an error, but actually indicates that it is not an error. Whether a true error or a false error is determined by the transfer device 200, the transfer device 200 may transmit transfer information according to the determination result.

In addition, in the present invention, the action error indicates an error in which the action is completed, and the non-action error indicates an error in which the action is not completed.

Referring to FIG. 8, detailed information of an error may be displayed on the logistics return screen 400. For example, if the pointer (PT) is placed on the error icon or when the error icon (810~830) is clicked with the pointer (PT), the error details (821, 822a) for the error icon (810~830) 822b) may be displayed.

The detailed information of the error (821, 822a, 822b) may include at least one of the type of the error, identification information of the transfer device 200 that found the error, the name of the operator who corrected the error, and whether or not to take action. 8 shows that detailed information 821 for one action error and detailed information 822a, 822b for two uncorrected errors are displayed on the logistics return screen 400. Here, the detailed information 822a, 822b for the two uncorrected errors may be listed in the order of occurrence. For example, the screen manager 350 may place the oldest 822a on the top side and the most recent 822b on the bottom side.

If the details (822a, 822b) of the non-action error are selected as the pointer (PT), an action action screen may be displayed to enter details of the action.

Referring to FIG. 9, the screen manager 350 may switch a screen to an action work screen 900 that receives an action status for an action that is not corrected when a command for selecting an action is not corrected.

Through the action work screen 900, the user can input the type of error, the time of occurrence, and the method of action. Information input through the action work screen 900 may be stored in the storage unit 330, and may be later confirmed by a user or another user. Further, the stored information may be updated through the action work screen 900, and the user or another user may check the updated information.

10 is a diagram showing that the vibration status for each section of the rail according to an embodiment of the present invention is included in the rail layout 500, and FIG. 11 shows a log of the vibration of the rail according to an embodiment of the present invention. ).

Referring to FIG. 10, the screen manager 350 may display vibration status of each rail of the rail included in the rail arrangement diagram 500 as at least one of color, thickness, and shape.

For example, the screen manager 350 displays the rail section in a good state in green, the rail section in an abnormal state in orange, the rail section in a dangerous state in red, and the rail section without collection information. Can be displayed in black. In the present invention, the rail section represents a rail path between two adjacent nodes. If the vibration status at each point of one rail section is different, the average value of the vibration status of all points is determined to be the vibration status of the corresponding rail section, or the vibration level of the point indicating the highest vibration status is the vibration status of the corresponding rail section. It can be determined to be.

10 shows that the vibration status of each rail is included in the enlarged rail layout 500, but the rail arrangement diagram 500 of the minimum stage may include and display vibration status of each rail.

Referring to FIG. 11, when a specific rail section is selected, the screen manager 350 may display a vibration state of the corresponding rail section as a graph (hereinafter referred to as a vibration graph) 1000. The vibration graph 1000 lists the magnitude of vibrations across the entire rail section for each point, and the user can check at which point in the rail section the largest vibration is generated through the vibration graph 1000.

12 is a view showing that a rail photographed image according to an embodiment of the present invention is displayed on a logistics transport screen.

Referring to FIG. 12, when a specific rail section is selected, the screen manager 350 may display a rail photographed image 1100 of the corresponding rail section. The screen manager 350 may compose a rail transport image 400 by combining the rail photographed image 1100 with the rail layout 500.

As the transfer device 200 moves along the rail, a photographing device (not shown) provided in the transfer device 200 may continuously photograph the surface of the rail. The rail photographed image 1100 may be included in transport information and transmitted to the logistics transport management device 300. The storage unit 330 of the logistics transport management device 300 may store transport information including the rail photographed image 1100.

When a user selects a specific rail section of the rail layout 500, an image photographed in the rail section may be output through the logistics transport screen 400. Here, the image output through the logistics transport screen 400 may be a still image or a video.

The user can check the cleanliness of the corresponding rail section through the output image, and check the cause of vibration.

Although the embodiments of the present invention have been described with reference to the above and the accompanying drawings, those skilled in the art to which the present invention pertains can implement the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

10: logistics return system 100: rail
200: transport device 300: logistics transport management device
310: receiving unit 320: input unit
330: storage unit 340: control unit
350: screen management unit 360: output unit
400: logistics return screen 500: rail layout
600: grid
710~740, 741~743, 810~840: Error icon
751, 752a, 752b, 752c, 753, 821, 822a, 822b: details of the error
900: Action action screen 1000: Vibration graph
1100: Rail shooting video

Claims (16)

A receiver configured to receive transport information collected on a transport path from a transport device carrying a carrier in which a substrate is accommodated along a rail disposed on a ceiling;
A screen manager configured to compose the logistics transport screen by synthesizing the received transport information to the layout of the rails arranged on the ceiling; And
Logistics conveyance management device including an output unit for outputting the configured logistics conveyance screen. According to claim 1,
The screen management unit expands or reduces the layout, the logistics return management device to configure the logistics return screen. According to claim 2,
The screen management unit is a logistic transport management device that composes the logistic transport screen by synthesizing transport information corresponding to the enlarged or reduced size of the layout in the layout. According to claim 1,
The screen manager divides the layout into a plurality of zones, and matches the transport information for each zone to configure the logistics transport screen. According to claim 4,
The transport information matched by each zone includes at least one of the type of error, the time of occurrence, the number of occurrences, whether it is true, whether it is an action, and whether or not the rail is captured. According to claim 4,
The screen management unit is a logistics transport management device that lists a plurality of transport information in the order of occurrence when there is a plurality of transport information received corresponding to a certain point. According to claim 4,
The screen management unit is a logistics transport management device for configuring the logistic transport screen by synthesizing an icon including the number of errors generated in any one of the plurality of zones in the layout. The method of claim 7,
The screen management unit is a logistics return management device for determining the size of the icon in proportion to the number of errors. The method of claim 7,
The screen management unit is a logistics return management device including the number of false errors and the number of false errors in the icon. The method of claim 7,
The screen management unit includes the number of action errors and the number of non-action errors among the errors included in the logistic management device. The method of claim 10,
The screen management unit is a logistic return management device that switches the screen to an action work screen that receives an action status for the non-action error when a command to select the non-action error is input. According to claim 1,
The screen management unit is a logistic conveyance management device that displays at least one of color, thickness, and shape of the vibration of each section of the rail included in the layout. According to claim 1,
Further comprising an input unit for receiving the change information for the layout,
The screen management unit reflects the input change information on the layout, and configures the logistic return screen. Receiving transport information collected on a transport path from a transport device carrying a carrier having a substrate along a rail disposed on the ceiling;
Constructing a logistic conveyance screen by synthesizing the received transport information on a layout of the rails arranged on the ceiling; And
And outputting the configured logistics return screen. The method of claim 14,
The step of configuring the logistic conveyance screen includes dividing the layout into a plurality of zones and matching transport information for each zone. The method of claim 15,
The transport information matched by each area includes at least one of the type of error, the time, number of occurrences, whether it is true, whether it is an action, and whether or not the rail is captured.

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